Mass flow rate control system

Abstract

The present invention relates to a mass flow control system 300 for the controlled provision of a fluid mass flow, the mass flow control system comprising a support plate 301, the support plate having a fluid connection portion on a first side surface 302 for mounting valve modules 304, each of which is provided with a plurality of channel openings 345, each of which is connected to inlet channels 306, 307 or to one of a plurality of outlet channels 309, and comprising a plurality of valve modules 304, each having one actuator 359, and having an outlet connection portion 347, the outlet connection portion being connected to an outlet channel 30 One of the 9 outlet channels is sealed and connected, and comprises a main board 363, which carries a processing unit 368, a supply interface 369, and a control interface 370. Within each of the outlet channels 309, one flow resistor 201 is arranged, and within the area of ​​the flow resistor 201, sensor openings 364 are arranged, with pressure sensors 361 and 362 assigned to these sensor openings 364, respectively. The processing unit 368 is electrically connected to the pressure sensors 361 and 362, as well as to the supply interface 369 and the control interface 370.

Description

TECHNICAL FIELD

[0001] The present invention relates to a mass flow regulation system for the regulated provision of fluid mass flows. BACKGROUND ART

[0002] Such a system is intended for use, for example, in automation technology, so that one or more consumers, which are for example pneumatic cylinders or other pneumatic actuators, are purposefully supplied with a defined fluid mass flow, in particular a compressed air mass flow. SUMMARY OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION

[0003] Accordingly, the problem underlying the present invention is to provide a modular mass flow regulation system for the regulated provision of fluid mass flows, the modularity of this mass flow regulation system enabling adaptation to different consumers, in particular to different numbers of consumers. MEANS FOR SOLVING THE PROBLEM

[0004] This problem is solved by a mass flow regulation system for the regulated provision of fluid mass flows, this mass flow regulation system comprising a carrier plate, this carrier plate having, on a first side, fluid connections for mounting valve modules, wherein each respective fluid connection is provided with a plurality of channel openings, wherein each respective channel opening is connected to a first inlet-side channel formed in the carrier plate, or to one outlet-side channel of a plurality of outlet-side channels formed in the carrier plate, and, the mass flow regulation system comprising a plurality of valve modules each having at least one valve assembly, Each of these valve modules is formed for regulating at least one fluid mass flow, In this case, each of these valve modules has an inlet connection, and this inlet connection is sealedly connected to an inlet channel through a channel opening, and It has an outlet connection, and this outlet connection is sealedly connected to one of the outlet channels via a channel opening. And, The mass flow rate control system comprises a main board, and this main board is It carries an electronic processing unit, an electrical supply interface, and an electrical control interface for connecting valve modules. In this case, one flow resistor is placed in each of the outlet channels, and In this case, each outlet channel of the outlet channel is assigned a sensor opening within the region of flow resistance, and these sensor openings are located on the second side of the support plate, opposite to the first side of the support plate. In this case, pressure sensors located on the main board are assigned to these sensor openings. At that time, the processing unit, It is electrically connected to a pressure sensor, a supply interface, and a control interface, and It is formed for evaluating the sensor signal of a pressure sensor and for controlling a valve module connected to a control interface for performing mass flow rate adjustment. [Effects of the Invention]

[0005] The mass flow rate control system can be used in different configurations as a result of the configuration according to the present invention. Therefore, for example, two or more valve modules may be connected to the support plate, and thus a fluid mass flow may be supplied to two consumption units, or a first valve module of both valve modules may first supply to the consumption unit, and in the event of failure of the first valve module, the supply may be switched to the second valve module. The number of valve modules installed can also be adapted to the specific usage. For example, five valve modules may be provided, supplying five different consumption units. In that case, the number of valve modules can be flexibly adjusted. This is because the necessary evaluation of sensor data, as well as the provision of control commands for the valve assembly of the valve module, are performed via an electronic processing unit located on the main board, which may be configured in particular as a processor or microcontroller. No dedicated control device is required within the valve module.

[0006] The support plate is provided, on the one hand, for mechanical fixing of the valve module, and on the other hand, for fluid connection between the fluid supply source, these valve modules, and one or more consumption units. For example, the support plate is manufactured from a synthetic material or a metallic material, particularly aluminum, and advantageously has a basically rectangular parallelepiped shape.

[0007] The valve modules are advantageously arranged in a row adjacent to each other with their sides facing each other along the direction of the row, in which case these sides are, in particular, the largest surface area of ​​each valve module. The valve module housing has two sides aligned parallel to each other, where these sides are connected by narrow sides, and where at least one of these narrow sides is formed for contact with the support plate. Advantageously, it is intended that these narrow sides are formed flat, and that the support plate is also formed flat, at least within the area of ​​the fluid connection.

[0008] For fluid connection, multiple fluid channels are formed within the support plate, and these fluid channels are connected to at least one channel opening of the fluid connection section, with the inlet channel to which a fluid supply source can be connected via an inlet coupling. Furthermore, the fluid connection section is allocated yet another channel opening, which is connected to at least one of the multiple outlet channels, and a consumption unit may be connected to this outlet channel, or to these outlet channels, via an outlet coupling. The fluid supply source and consumption unit can, advantageously, be connected to an inlet channel or multiple outlet channels using tubing connections. For convenient connection of the fluid tubes, the inlet and outlet couplings are configured, for example, as pneumatic push-in connectors.

[0009] The housing of each valve module may be formed, for example, in a rectangular parallelepiped shape, and may have a plurality of shafts that are spaced apart from each other at a certain pitch and oriented parallel to each other, particularly on the end surfaces that are oriented perpendicular to the end surfaces provided for mounting on a support plate. Each of these shafts extends from its end face as a notch along its extending axis into the housing of the valve module. The shafts advantageously have a essentially constant cross-section, and their openings are advantageously located on an opening surface aligned parallel to the end face. Each of these shafts is provided for housing a valve assembly, which can be inserted into the shaft, starting from its opening and moving along its extending axis.

[0010] The valve assembly has a supply connection and a discharge connection, which are formed as openings for the supply channel or discharge channel of the valve assembly, respectively. Within the discharge channel, a valve seat and a valve member movable between a closed position and an open position for the valve seat are arranged, so that the cross-section of the discharge channel can be changed. The valve member is connected to an actuator, which, depending on an electrical control signal, can cause the valve member to move between a closed position and an open position.

[0011] Advantageously, the valve member opens the maximum cross-section of the discharge channel in the open position and completely closes the discharge channel in the closed position.

[0012] The fluid resistances positioned within each outlet channel of the support plate, in conjunction with a pressure sensor positioned on the main substrate, enable fluid mass flow rate measurement within each outlet channel using a differential pressure method. The fluid resistances may, in this case, be configured, for example, as a throttling section, an orifice section, or a Laval nozzle. Each pressure sensor assigned to an outlet channel protrudes into a sensor opening located within the fluid resistance region and is each fluidly connected to its respective outlet channel. A sealing element is provided for the fluid connection between the pressure sensor and the support plate. The pressure sensors are directly located on the main board, and therefore the electrical sensor signals provided by these sensors are supplied to an electronic processing unit via integrated signal wires within the main board, where they are processed.

[0013] The electronic processing unit is electrically connected to the supply board of each valve module via an electrical control interface for linking the valve modules. In this way, the electronic processing unit can transmit control signals to the valve assembly located within the valve module.

[0014] In accordance with the present invention, an electronic processing unit is formed to perform mass flow rate adjustment for each outlet channel to provide a preset fluid mass flow rate at the outlet connection of each outlet channel. For this purpose, the processing unit controls the valve module depending on the measured fluid mass flow rate. In that case, it is possible that all valve assemblies assigned to a single outlet channel can be actuated simultaneously, and that each is intended to have essentially the same valve opening. In this type of operating method, when the actuator of each valve assembly opens the maximum cross-section of each outlet channel in the open position, the maximum fluid mass flow rate is provided when all valve assemblies assigned to each outlet channel are fully open.

[0015] Alternatively and by way of example, it is possible and intended that in each case two valve assemblies of one valve module are connected to one another in pairs to form a first group, and a further two valve assemblies of the valve module are connected to one another to form a second group. Subsequently, initially only the first group is used for regulating the fluid mass flow, while the second group is only put into operation in the event of a failure of at least one valve assembly of the first group, so that the second group can therefore be referred to as a redundant group.

[0016] An electrical supply interface arranged on the main circuit board is used to supply power to electrical and electronic components arranged on the main circuit board, in particular a processing unit and a pressure sensor, and is also used to supply power to the valve modules via the respective control interfaces.

[0017] Furthermore, it is possible that the supply interface is designed, for example, for communication of the mass flow regulating system with a higher-level controller of networked automation installations. For this purpose, the supply interface is designed for connecting the mass flow regulating system to a communication system. By way of example in particular, the supply interface is designed for communication according to a communication standard consisting of the group of OPC UA (Open Platform Communication Unified Architecture), bus communication systems, and IO-Link. In this case, data exchange can take place via the supply interface, for example with a higher-level controller, in particular a programmable logic controller, or with a monitoring level, or with the cloud.

[0018] In accordance with the present invention, it is intended that all components necessary for the operation of the mass flow control system, such as an electronic processing unit, an electrical supply interface, an electrical control interface, and a pressure sensor, are arranged on the main board. The main board enables centralized supply and control of all components, particularly the valve module, and all steps necessary for mass flow rate adjustment can also be initiated and monitored by components on the main board. The time-consuming connection configurations of separately configured boards, such as the sensor board and control board, can be omitted.

[0019] Further advantageous configurations of the present invention are subject to the dependent claims.

[0020] In an advantageous embodiment, the first sensor opening is positioned in front of the flow resistance in the flow direction, and the second sensor opening is positioned behind the flow resistance in the flow direction. In this configuration, the first pressure sensor assigned to the first sensor opening and the second pressure sensor assigned to the second sensor opening are each formed as absolute pressure sensors. Therefore, the pressure loss induced by flow resistance can be calculated as the pressure difference between the sensor signals of the first pressure sensor and the second pressure sensor, and the fluid mass flow rate can be calculated based on this. The calculations necessary for this are performed within an electronic processing unit. The electronic processing unit is further configured to transmit appropriate control signals to the valve module in the event of a deviation between the currently calculated fluid mass flow rate and a predetermined target fluid mass flow rate, in order to adjust the fluid mass flow rate to a target fluid mass flow rate. In this embodiment of the first and second pressure sensors, the main board may additionally be assigned another pressure sensor for calculating ambient pressure, and this ambient pressure sensor signal is also evaluated within the electronic processing unit.

[0021] It is intended that, selectively, the first pressure sensor and the second pressure sensor are formed as relative pressure sensors, and that an ambient pressure sensor for measuring ambient pressure is provided on the main substrate. Therefore, simpler relative pressure sensors may be used, and the measurement results from these relative pressure sensors can be corrected before the calculation of the fluid mass flow rate using the detected ambient pressure.

[0022] Selectively, the first sensor opening is positioned in front of the flow resistance in the flow direction. Furthermore, the second sensor opening has a first inflow channel and a second inflow channel, In this configuration, the first inlet channel opens to the outlet channel in the flow direction, before the flow resistance, and the second inlet channel opens to the outlet channel in the flow direction, behind the flow resistance. In this case, the first pressure sensor assigned to the first sensor opening is formed as an absolute pressure sensor, and the second pressure sensor assigned to the second sensor opening is formed as a differential pressure sensor, or The first pressure sensor is configured as a relative pressure sensor, and the second pressure sensor is configured as a differential pressure sensor, and It is intended that an ambient pressure sensor for measuring ambient pressure be provided on the main board. Therefore, advantageously, a differential pressure gauge can be used for the direct differential pressure measurement of the pressure loss induced by the flow resistance, and this pressure loss, along with the absolute pressure measured before the flow resistance, is incorporated into the calculation of the mass flow rate.

[0023] For the purpose, the valve module has multiple outlet connections and comprises multiple valve assemblies. These valve assemblies are connected to one inlet connector and one or more outlet connectors. Therefore, for example, in a valve module having four valve assemblies, two valve assemblies may be connected to a first outlet connection, and the other two valve assemblies may be connected to yet another outlet connection, in which case each outlet connection may be sealed to a single discharge channel via a single channel opening. Within each discharge channel, and also through each discharge channel, it is possible to determine the fluid mass flow rate. Thus, exemplary, two different consumption units may be supplied with a certain fluid mass flow rate simultaneously or alternately, and the fluid mass flow rate supplied to each may be determined. Selectively, the supply of different fluids to each consumption unit is possible by fluid separation between the first and second outlet connections.

[0024] In an advantageous embodiment, the valve module is provided with a channel plate, This channel plate is formed for connecting multiple valve assemblies located within the valve module. The channel plate is formed for mounting on the end face of the valve housing. Within the channel plate, a first connection channel and a second connection channel are formed, wherein the first connection channel is fluidically connected to the respective supply connection portions of the valve assembly, and the second connection channel is fluidically connected to the respective outlet connection portions of the valve assembly. The inlet connection of the first connection channel is connected to the inlet channel via a channel opening, and the outlet connection of the second connection channel is fluidically connected to one of the outlet channels via one or more channel openings. Depending on the number of valve assemblies arranged in the valve module and / or the fluid mass flow rate to be provided, various configurations of the first and second connection channels can be achieved by replacing the channel plate.

[0025] Therefore, exemplary, it is conceivable that only two valve assemblies are arranged within the first and second shafts of the valve module, in which case the first and second connection channels each have only two connections for the valve assemblies.

[0026] Advantageously, the supply interface has data and current interfaces for connection with the supply module. In this configuration, a replaceable supply module is inserted into the supply interface and connected to the supply interface via the data and current interfaces. Therefore, by replacing the supply module, the supply interface can be adapted to extremely different conditions. For example, it is possible to provide a supply module for connection to a power supply at 50 Hz, or a supply module for connection to a power supply at 60 Hz. Within the supply module, advantageously, communication units are also provided, which are formed for integration into each communication system; therefore, different communication systems can be operated by replacing the supply module.

[0027] In yet another embodiment of the mass flow control system, the support plate has a plurality of notches, within which one insertion portion for each of the valve modules can be accommodated in an inserted state for an insertion connection between the valve module and the main board. This provides the first fixation of the valve module to the support plate, and allows the support plate to be precisely aligned with the connection portion of the support plate. After the alignment is performed, the valve module can be further fixed to the support plate, for example, by another fixing element.

[0028] Advantageously, the actuator of the valve assembly is configured as a piezoelectrically bent body. In particular, a proportional valve function can be realized with a piezoelectrically bent body that can be formed in a strip shape, with or without an electrically conductive intermediate layer, as a monomorph, bimorph, or trimorph. A change in the radius of curvature of the piezoelectric bending body causes a change in the position of the valve member connected to the piezoelectric bending body, and consequently affects the cross-sectional area of ​​the discharge channel. Therefore, the fluid mass flow released through the valve assembly can be continuously regulated by an appropriate control signal from the processing unit.

[0029] Advantageously, the valve module includes a supply board with high-voltage electronics, which are provided for the electrical supply of an actuator formed as a piezoelectric bend. Under high voltage conditions, in this context, DC voltages within the range of 300V are understood. The supply board can be adapted for a valve assembly inserted into a valve module. Control, however, is still performed via a processing unit, and so high-voltage electronics provided within the valve module convert the control signals received from the processing unit exclusively into this actuator or corresponding high-voltage signals for these actuators. In this way, the complexity of the supply board can be significantly reduced, and the high-voltage electronics can be harmonized with the valve assembly located within the valve module. Therefore, in an advantageous manner, when the valve module is replaced, the high-voltage electronics required for supplying the valve assembly are also replaced.

[0030] In an advantageous embodiment of the present invention, the processing unit is formed for the individual control of each actuator. Accordingly, for each valve assembly, each valve cross section can be adjusted independently of the other valve cross sections. In particular, each actuator can be electrically controlled by a parameter set individually adapted by the processing unit.

[0031] For practical purposes, the flow resistance is formed as a turbulent throttling. The use of turbulent throttles allows for the generation of significant pressure differences, which enable accurate differential pressure measurements while maintaining minimal structural space requirements. This is particularly true when comparing the space requirements of turbulent throttles with those of laminarflusselements. The function of a turbulent throttle is based on the fact that the fluid flow is changed direction multiple times as it passes through the turbulent throttle, and consequently undergoes multiple changes in flow direction, thereby enabling the desired significant pressure drop to be achieved through the turbulent throttle. For this purpose, at least two, preferably three, flow guide elements are arranged within the turbulent throttle, each of which is penetrated by one or more notches. In this case, the notches of adjacent flow guide elements are positioned and formed such that there is no overlap between the projections of the notches of adjacent flow guide elements in a projection plane that is aligned perpendicular to the main flow direction of the fluid mass flow, and particularly perpendicular to the central axis of the exit channel.

[0032] The present invention will be described in more detail below with reference to the attached figures. [Brief explanation of the drawing]

[0033] [Figure 1] This is a schematic perspective view of a mass flow control system. [Figure 2] This is a perspective view of the mass flow rate control system shown in Figure 1, in an exploded view. [Figure 3]This is a schematic perspective view of the valve module. [Figure 4] This is a schematic diagram of the first fluid connection configuration within the mass flow control system. [Figure 5] This is a schematic diagram of the second fluid connection configuration within the mass flow control system. [Figure 6] This is a cross-sectional view of the mass flow rate control system shown in Figure 1, along section II, from a lateral perspective. [Figure 7] This is a detailed view of the exit channel of section A in Figure 6. [Figure 8] This is a side view of the flow resistance configured as a turbulent flow throttling in a cross-sectional view. [Figure 9] This is a plan view of the inlet plate of the turbulence constrictor shown in Figure 8. [Figure 10] This is a diagram of the turbulence throttling plate shown in Figure 8. [Modes for carrying out the invention]

[0034] The mass flow control system 300 shown in Figure 1 is provided for the fluid supply of several consumption units, which are not shown. Exemplarily, the mass flow control system 300 comprises a rectangular support plate 301 made of aluminum, to which several valve modules 304 are mounted on the upper side 302, also referred to as the first side, of this support plate. In Figure 2, the mass flow rate control system 300 is shown in an exploded view. On the first end surface 305 of the support plate 301, which is aligned perpendicular to the upper surface 302, a first inlet channel 306 and a second inlet channel 307 are provided as exemplary, and these first and second inlet channels are provided for connection to the fluid supply source 308. Through these, the mass flow control system 300 may be supplied with one or two pressurized fluids, particularly compressed air or process gas.

[0035] Eight more outlet couplings 311 are provided on the end side 305, particularly exemplary, to which fluid shafts (not shown) for connecting a consumption unit (not shown) can be connected.

[0036] In the shown embodiment, the first inlet channel 306 and the second inlet channel 307 each have an inlet coupling 310 configured as a pneumatic plug-in connector. Each outlet coupling 311 partitions an assigned outlet channel 309, which extends into the support plate 301.

[0037] Exemplary, five valve modules 304 are arranged on a support plate 301, each of which has one socket portion 312, recognizable in Figures 2 and 3. These socket portions 312 are provided for the electrical connection of the valve modules 304 and each has a notch 313 passing through it in the support plate 301. Each valve module 304 is attached to the support plate 301 by two fixing screws 386, 388.

[0038] The valve modules 304 are arranged in a line adjacent to each other along a row of axes 303, with their largest sides 315 facing each other. The housing 316 of the valve module 304 has two sides 315 that are aligned parallel to each other, and these sides are joined together by narrow sides 318, one of which may be referred to as the lower side 319. It is intended that the valve module 304 abuts against the upper side 302 of the support plate 301 at each of its lower sides 319. Accordingly, the housing 316 is basically formed in the shape of a rectangular parallelepiped. The first valve module 304 is adjacent to the housing 321 of the supply module 322 by its side surface 315, and this supply module is similarly fixed on the support plate 301. For fixing the supply module 322, a support plate notch 314 is provided adjacent to the end surface 305, and this support plate notch can be sealed using a cover plate 317, within which the supply module 322 is partially housed. In this case, the cover plate 317 is fixed to the support plate 301 using fixing screws 320.

[0039] For example, the valve module 304 shown in the exploded view in Figure 3 has a number of shafts 324 that are spaced apart from each other at a constant pitch and oriented parallel to each other at a front end surface 323 that is oriented perpendicular to the lower surface 319 (Figures 4, 5, and 5). The shafts 324 basically have a constant cross-section and are provided for housing the valve assembly 325. The exemplary valve module 304 has four shafts 324, each housing a valve assembly 325 such that the first side 328 of the valve assembly 325, having a supply connection 326 and a discharge connection 327, is positioned within the region of the end side 323. On the second side 329 of the valve assembly 325, opposite to the first side 328, four electrical connections 330 are formed, exemplarily, which are provided for electrical connection to the supply board 331. However, it is also possible to provide a smaller or larger number of shafts 324, in particular eight shafts.

[0040] The electrical connection portion 330 protrudes through the housing web 333, which is formed in the region of the second end surface 332 of the housing 316, opposite to the first end surface 323, and a sealing ring 335 is provided between the sealing surface 334 of the valve assembly 325 and the invisible inner surface of the housing web 333 facing the shaft 324, and this sealing ring liquid-tightly seals the shaft 324 to the housing web 333. Within the area of ​​the outer surface 336 located opposite to the inner surface of the housing web 333, a housing chamber 337 is formed within the housing 316, and the supply board 331 is housed in this housing chamber when the supply board is connected to the electrical connection part 330. In this state, the supply board 331 partially protrudes through the insertion part 312, such that the electrical connector 338 of the supply board 331 protrudes relative to the insertion part 312. The housing chamber 337 can be closed using the cover 339. Within the region of the first end surface 323, a channel plate 340 is positioned, and within this channel plate, a first connecting channel 341 and a second connecting channel 342 are formed, with the first connecting channel 341 sealedly connected to the supply connection portion 326 of each valve assembly 325, and the second connecting channel 342 sealedly connected to the discharge connection portion 327. A sealing element 344 is provided between the first surface 323 and the channel plate 340 for fluid sealing of each valve assembly 325 to the channel plate 340.

[0041] A channel opening 345 is formed on the upper surface 302 of the support plate 301, and through this channel opening, the inlet connection portion 346 of the first connection channel 341 is sealedly connected to either the first inlet channel 306 or the second inlet channel 307, and the outlet connection portion 347 of the second connection channel 342 is sealedly connected to one of the outlet channels 309. For this purpose, another sealing element 348 is provided that can abut against the lower surface 343 of the channel plate 340. A lid 351 sealed with a lid sealant 350 is provided on the side 349 of the channel plate 340 opposite to the lower surface 343, and this lid can be fixed to the channel plate 340 using fixing screws 386. For example, each of the two channel openings 345 embodies a fluid connection, which is assigned to each valve module 304.

[0042] The previously described pneumatic connection configuration (Verschaltung (connection)) can be seen, in particular, in the schematic diagram of the first connection configuration in Figure 4. The fluid supply source 308 is, in this case, exemplary, connected to the mass flow control system 300 via a first inlet channel 306 and supplies a fluid mass flow to this first inlet channel. In the illustrated embodiment, this fluid mass flow flows into a first inlet channel 306 within the support plate 301, departs from the support plate through the channel opening 345, flows into a first connecting channel 341 of the channel plate 340 via the inlet connection 346, and is then guided through this first connecting channel to a supply connection 326 of a valve assembly 325, as illustrated in Figure 4. From here, the fluid mass flow reaches the pressure chamber 353 formed within the valve assembly 325 via the supply connection 326 of the valve assembly 325 and through the supply channel 352. In this case, the supply channel 352 is formed within a nozzle carrier 355 located within the valve assembly 325, similar to the two discharge channels 354, where the pressure chamber-side opening 356 of each discharge channel 354 has a valve seat 357, which can be liquid-tightly closed using a valve member 358 of an actuator 359 configured as a piezo-bent body of the valve assembly 325, or the cross-section of the discharge channel 354 can be changed by this actuator 359.

[0043] Advantageously, the actuator 359 is intended to open the maximum cross-sectional area of ​​the discharge channel 354 in the open position and to completely close the discharge channel 354 in the closed position. Depending on the adjusted cross-section of each discharge channel 354, a portion of the fluid mass flow can pass through each discharge channel 354, through the assigned discharge connection 327 into the second connection channel 342, the outlet connection 347, and through the channel opening 345 into the outlet channel 309, and be supplied from this outlet channel to the consumption unit. For determining the fluid mass flow guided through the outlet channel 309, a flow resistance 201 is provided within the outlet channel 309, which is exemplary configured as a turbulent throttle, as can also be seen in the illustrations in Figures 6 and 7. The pressure loss induced by this flow resistance is measured via a first pressure sensor 361 and a second pressure sensor 362 on the main substrate 363, each of which is assigned to a sensor opening 364 that opens on the second side surface 365 of the support plate 301. In the shown embodiment, the first pressure sensor 361 and the second pressure sensor 362 are configured as absolute pressure sensors, and the first sensor opening 364 is positioned in front of the flow resistance 201 in the flow direction. The second sensor opening 364 has a first inlet channel 366 and a second inlet channel 367, in which case the first inlet channel 366 is positioned in front of the flow resistance 201 in the flow direction, and the second inlet channel 367 is positioned behind the flow resistance 201 in the flow direction.

[0044] In embodiments not shown, the second sensor opening 364 may have only one inflow channel, which is located behind the flow resistance 201. In embodiments not shown in the same manner, the first pressure sensor 361 and the second pressure sensor 362 may be configured as relative pressure sensors, in which case another pressure sensor configured as an absolute pressure sensor, which is provided on the main substrate 363 for measuring ambient pressure, is provided.

[0045] A processing unit 368, configured exemplary as a microcontroller and located on the main board 363, is electrically connected to a first pressure sensor 361 and a second pressure sensor 362, as well as to a supply interface 369 and a control interface 370. The supply interface 369 of the main board 363 is provided for connection to a supply module 322, through which voltage is supplied to the main board 363, and which enables communication with an exemplary overall system (not shown), within which the mass flow control system 300 is integrated. For this purpose, the supply interface 369 has an internal data and current interface, and when the supply module 322 is plugged into the supply interface 369 as shown herein, the connection between the supply interface 369 and the supply module 322 is made via this internal data and current interface. The control interface 370 is provided for housing the electrical plug-in connector 338 of the supply board 331 and enables the technical supply of voltage to the valve assembly 325 by the main board 363, as well as the transmission of control signals from the processing unit 368 to the actuator 359 of the valve assembly 325. Accordingly, it is possible to provide high-voltage electronic equipment exclusively on the supply board 331, and to perform further control of the valve assembly 325 via the processing unit 368.

[0046] The control interface 370, the supply interface 369, and the first and second pressure sensors 361 and 362 are arranged on the upper surface 372 of the main board 363, with each outlet channel 309 of the support plate 301 being assigned a pair consisting of the first pressure sensor 361 and the second pressure sensor 362. For example, the processing unit 368 is similarly positioned on the upper side surface 372, however, it may also be positioned on the lower side surface 373 of the main board 363, which is located on the opposite side from the upper side surface 372 of the main board 363.

[0047] In Figure 5, a second connection configuration is shown, which includes the first connection configuration described above, and additionally, a second inlet channel 307 is connected to yet another fluid supply source 308. For this connection configuration, yet another channel plate 340 is used, and this yet another channel plate has, in addition to the first connection channels 341 and 342, yet another first connection channel 341 with yet another inlet connection portion 346, and yet another second connection channel 342 with yet another outlet connection portion 347. Furthermore, a fluid mass flow supplied from another fluid source 308 flows into the support plate 301 through a second inlet channel 307, leaves the support plate through yet another channel opening 345, flows into yet another first connection channel 341 of yet another channel plate 340 through yet another inlet connection 346, and is then led through this yet another first connection channel 341 to the supply connection 326 of the valve assembly 325. Starting from this valve assembly, yet another fluid mass flow reaches yet another outlet channel 309 of the support plate 301, as described above, where this yet another outlet channel also comprises all the elements necessary for measuring the fluid mass flow rate, in particular, yet another flow resistance 201, yet another first pressure sensor 361, yet another second pressure sensor 362, yet another sensor opening 364, etc. Since the exemplary mass flow control system includes a number of first pressure sensors 361 and a number of second pressure sensors 362, each of these pressure sensors is surrounded by a dashed frame in Figure 2.

[0048] Exemplary, in the assembled state, the main substrate 363 is housed in a substrate housing portion 375 formed on the lower surface 374 of the support plate 301, and is fixed to the support portion 377 using a fixing element 376. The substrate housing portion 375 is partitioned by a cover 390 that can be supported in a groove portion 389 formed within the support plate 301, parallel to the lower surface 374, and by a cover plate 317.

[0049] Two sleeves 378 are provided for sealing the first and second pressure sensors 361 and 362, which are positioned between the main substrate 363 and the support plate 301, and each sleeve has a first sealing groove 379 and a second sealing groove 380 for housing a first ring-shaped sealing element 381 and a second ring-shaped sealing element 382. To accommodate the first ring-shaped sealing element 381, a first sealing groove 379 is formed on the side of the sleeve 378 opposite to the main substrate 363, and this first ring-shaped sealing element is used to seal the sleeve 378 from the surrounding environment between the sleeve 378 and the second side 365 of the support plate 301. The second ring-shaped sealing element 382 seals the main substrate 363 to the exit channel 309, and a second sealing groove 380 for housing the second ring-shaped sealing element 382 is formed within the sleeve 378 such that the second ring-shaped sealing element 382 abuts against the cylindrical portions of the first and second pressure sensors 361 and 362, respectively.

[0050] To seal the second inflow channel 367, a teardrop-shaped sealing element 384 is provided, positioned within the sealing cutout 383 of the support plate 301.

[0051] As can be seen in Figure 6, each valve module 304 is fixed by a fixing screw 386 extending through a fixing notch 385 in the channel plate 340, and by a fixing screw 388 extending through a fixing notch 387 in the cover 339.

[0052] As shown in Figure 7, the turbulence throttle 201 located within the outlet channel 309 is illustrated in more detail in Figure 8. The turbulence throttle 201 is formed as a set of unique structural components that can be assembled independently of other components of the mass flow control system 300 and can be inspected in relation to the functional aspects of this turbulence throttle. The turbulence throttling 201 includes, quite exemplary, a tubular throttling sleeve 203 that is formed rotationally symmetric with respect to the central axis 202 and extends along this central axis 202.

[0053] The outer surface 204 of the throttling sleeve 203 has, quite exemplarily, three adjacent portions along the central axis 202, namely, a first guide portion 205, a fluid portion 206, and a second guide portion 207. The first guide portion 205 and the second guide portion 207 each have an outer diameter that is not denoted by a reference numeral, and this diameter basically corresponds to the inner diameter of the throttling portion 391 in the outlet channel 309 used to accommodate the turbulent throttling 201. The fluid portion 206, positioned between the first guide portion 205 and the second guide portion 207, has a smaller outer diameter than both guide portions 205 and 207, and together with the throttling portion 391, forms an annular channel 392 when the turbulent throttling 201 is assembled within the throttling portion 391 of the outlet channel 309.

[0054] A second inlet channel 367 opens in this throttling section 391, and this second inlet channel 367 is assigned to a second pressure sensor 362, which is illustrated in more detail in Figure 7.

[0055] For example, the notch 208 of the throttling sleeve 203, which is formed rotationally symmetrically with respect to the central axis 202, can be divided into an inlet portion 209, a holding portion 210, and an outlet portion 211. In this case, the inlet portion 209 and the outlet portion 211 have larger diameters than the holding portion 210. Indeed, as an example, it is intended that the outlet portion 211, like the inlet portion 209, is formed by slightly expanding its diameter in a conical shape, starting from the holding portion 210, and extending to the inlet opening 212 or the outlet opening 213, respectively.

[0056] Multiple flow guide elements are arranged within the inlet section 209, and these flow guide elements can induce the desired turbulent throttling function when a gaseous fluid flows through the turbulent throttling 201. Starting from the inlet opening 212, within the inlet section 209, there is an inlet plate 214, and in the axial direction, a throttling plate 215 directly adjacent to this inlet plate along the central axis 202, and In the axial direction, an outlet plate 216 is provided directly adjacent to the throttling plate 215 along the central axis 202.

[0057] As can be seen from the illustration in Figure 9, the inlet plate 214 is formed as a circular plate and a flat parallel plate, and has a plurality of inlet holes 217, which are arranged on a common partial circle 220 at a constant angular pitch. Exemplary, the inlet plate 214 may be manufactured from a metal sheet, which may be provided with inlet holes 217 by a laser cutting or etching process. Optionally, the inlet plate may similarly be manufactured from a synthetic material, particularly by a synthetic injection molding method.

[0058] Advantageously, it is intended that the inlet plate 214 and the outlet plate 216 are constructed of the same structure.

[0059] The throttling plate 215 has a significantly larger axial extension along the central axis 202 compared to the inlet plate 214 and the outlet plate 216. Functionally, the throttling plate 215 can be divided into a throttling disc portion 221, as well as a pre-positioned spacing ring portion 222 and a post-positioned spacing ring portion 223. The throttling disc portion 221 is formed in a circular ring shape and has an outer diameter that is not denoted by a reference numeral, and this outer diameter is slightly smaller than the inner diameter of the inlet portion 209, which is also not denoted by a reference numeral. The throttling disc portion 221 is provided with exactly one throttling hole 218, which is arranged coaxially with respect to the outer diameter of the throttling disc portion 221. Exemplarily, the throttling hole 218 is formed in a circular shape. As can be seen from the illustration in Figure 8, the throttling disc portion 221 has an axial extension along the central axis 202, and this axial extension corresponds to approximately seven times the axial extension of the inlet plate 214 or the outlet plate 216. At the axial end faces 224 and 225 located on opposite sides of each other, circularly formed spacing ring portions 222 and 223 protrude from the throttling disc portion 221, respectively. These spacing ring portions are used as axial spacing holders for the inlet plate 214 or the outlet plate 216. Each of the spacing ring portions 222 and 223 has an inner diameter that is not indicated by a reference numeral, and this inner diameter is selected so as not to cover the inlet hole 217 of the inlet plate 214 and the outlet hole 219 of the outlet plate 216. Rather, the spacing rings 222 and 223 are provided solely for the purpose of spacing out the inlet plate 214 and the outlet plate 216, and do not play any significant role in the throttling action of the turbulent throttle 201, which will be described in more detail below.

[0060] The challenges of the retaining portion 210, which has an inner diameter only slightly smaller than that of the subassembly consisting of the inlet plate 214, the throttling plate 215, and the outlet plate 216, lie solely in the axial support of this subassembly and, similarly, have no significant involvement in the throttling action of the turbulent throttling 201, which will be described in more detail below.

[0061] The outlet portion 211 has an axial extension along the central axis, which is essentially the same as the inlet portion 209, and is used to calm the fluid flow after it has passed through the flow guide elements (inlet plate 214, throttling plate 215, outlet plate 216) described above.

[0062] Furthermore, radial perforations 226 are formed within the outlet portion 211, and these radial perforations ensure fluid communication between the outlet portion 211 and the annular channel between the fluid portion 206 and the outlet channel 309 as described above, and consequently, it becomes possible to derive the dominant fluid pressure within the outlet portion 211 for the purpose of differential pressure measurement.

[0063] As can be seen from the illustration in Figure 9, the projection 227 of the throttling hole 218 onto the inlet plate 214 does not overlap with the inlet hole 217 in any way. This ensures that the fluid flowing through the turbulent throttling hole 201, particularly the compressed air flow or process gas flow, undergoes multiple changes in the direction of its flow. This induces the desired turbulence within the turbulence throttle 201. The advantage of this type of turbulence is that the compactly configured turbulence throttle 201 allows for differential pressure measurement, and in this differential pressure measurement, the pressure value upstream of or preceding the turbulence throttle 201, particularly within the region of the inlet opening 212, can be clearly distinguished from the pressure value downstream of or following the turbulence throttle 201, particularly in the radial hole 226, thereby enabling accurate differential pressure measurement. From this differential pressure measurement, the fluid mass flow rate passing through the turbulent throttle 201 can be inferred with high accuracy in that case.

[0064] As described above, the turbulence throttling 201 is housed within the throttling section 391, which for this purpose has an enlarged, unreferenced diameter relative to the remaining outlet channel 309. In this case, the constricted portion 391 extends into the outlet channel 309 in the opposite direction of the flow, starting from the end surface 305 of the support plate 301, and a constricted portion bottom, which is not assigned a reference numeral, is located between the first inflow channel 366 and the second inflow channel 367 in the flow direction, and demarcates the constricted portion 391 at the end opposite to the end surface 305. As a result of the enlarged diameter, the bottom of the constricted section forms a circular ring-shaped sealing seat 400. Between the sealing seat 400 and the end face 228 of the constricted section (Figure 8), a constricted section sealing material 393 is provided, for example, formed as an O-ring in the assembled state. A fixing sleeve 394 is positioned between the outlet coupling 311 and the turbulence throttle 201 to secure the turbulence throttle 201 and to provide a sealing force to the throttle sealing material 393. Each of these fixing sleeves abuts against the turbulence throttle 201 and the outlet coupling 311 with its ring surface, which is not marked with a reference numeral.

[0065] The portion of the outlet channel 309 located upstream of the flow resistance 201 preferably has a through portion 395, which is fluidly connected to the channel opening 345 and oriented parallel to the end surface 305. At the opening position 397, the through portion 395 opens to the connection portion 396 of the outlet channel 309, at which point the connection portion 396 is oriented perpendicular to the end surface 305 or formed concentrically with respect to the constricted portion 391. In the embodiment shown, the opening position 397 of the through portion 395 is located between the constricted portion 391 and the channel bottom portion 398 formed as the end face of the blind hole.

[0066] Based on this configuration, within the region of the connecting portion 396 located between the opening position 397 and the channel bottom 398, there is essentially no fluid flow, or only a very small amount of fluid flow, and therefore this region can also be called the dead water region 399 (Totwasserraum (stagnant fluid region)). For the purpose of measuring the pressure as unobstructed as possible before the flow resistance 201, the first sensor opening 364 is formed within the region of the connecting portion 396 that forms the dead water region 399. Under the condition of "without obstruction," it is understood that in this context, the measured pressure either does not contain any dynamic pressure fraction that can be induced by fluid flow, or contains only a small dynamic pressure fraction that can be induced by fluid flow.

[0067] In embodiments not shown, the second sensor opening 364, or the first inflow channel 366 of the second sensor opening 364, may be formed within the region of the connection portion 396 that forms the dead water region 399.

Claims

1. A mass flow control system (300) for the controlled provision of a fluid mass flow, wherein the mass flow control system comprises a support plate (301), This support plate has a fluid connection portion on its first side surface (302) for mounting a valve module (304), Each fluid connection section is provided with multiple channel openings (345), Each channel opening (345) is connected to an inlet channel (306, 307) formed within the support plate (301), or to one of several outlet channels (309) formed within the support plate (301). and, The mass flow rate control system comprises a plurality of valve modules (304), each having at least one valve assembly (325), These valve modules are formed for regulating at least one fluid mass flow, Each of these valve modules (304) has an inlet connection (346), which is sealedly connected to an inlet channel (306, 307) via a channel opening (345), and It has an outlet connection portion (347), which is sealedly connected to one of the outlet channels (309) via a channel opening (345). And, The mass flow rate control system comprises a main board (363), and this main board is It carries an electronic processing unit (368), an electrical supply interface (369), and an electrical control interface (370) for connecting valve modules (304), Within each outlet channel (309), one flow resistor (201) is provided, and Each of the outlet channels (309) is assigned a sensor opening (364) within the region of the flow resistance (201), and these sensor openings are located on the second side (365) of the support plate (301), opposite to the first side (302) of the support plate (301). Pressure sensors (361, 362) located on the main board (363) are assigned to these sensor openings (364). The electronic processing unit (368) Electrically, it is connected to pressure sensors (361, 362), a supply interface (369), and a control interface (370), and It is formed for the evaluation of sensor signals from pressure sensors (361, 362) and for the control of a valve module (304) connected to a control interface (370) for the implementation of mass flow rate adjustment. A mass flow rate control system characterized by the following:

2. The first sensor opening (364) is positioned in front of the flow resistance (201) in the flow direction, and the second sensor opening (364) is positioned behind the flow resistance (201) in the flow direction. The first pressure sensor (361) assigned to the first sensor opening (364) and the second pressure sensor (362) assigned to the second sensor opening (364) are each formed as absolute pressure sensors, or the first pressure sensor (361) and the second pressure sensor (362) are formed as relative pressure sensors. An ambient pressure sensor for measuring ambient pressure is provided on the main board (363). The mass flow rate control system according to claim 1.

3. The first sensor opening (364) is positioned in front of the flow resistance (201) in the flow direction. Furthermore, the second sensor opening (364) has a first inflow channel (366) and a second inflow channel (367), The first inlet channel (366) opens to the outlet channel (309) in the flow direction, before the flow resistance (201), and the second inlet channel (367) opens to the outlet channel (309) in the flow direction, behind the flow resistance (201). The first pressure sensor (361) assigned to the first sensor opening (364) is formed as an absolute pressure sensor, and the second pressure sensor (362) assigned to the second sensor opening (364) is formed as a differential pressure sensor, or The first pressure sensor (361) is formed as a relative pressure sensor, and the second pressure sensor (362) is formed as a differential pressure sensor, and An ambient pressure sensor for measuring ambient pressure is provided on the main board. The mass flow rate control system according to claim 1.

4. The valve module (304) has a plurality of outlet connection portions (347) and comprises a plurality of valve assemblies (325). These valve assemblies are connected to an inlet connector (346) and to one or more outlet connectors (347). A mass flow rate control system according to any one of claims 1 to 3.

5. A channel plate (340) is provided on the valve module (304). This channel plate is formed for connecting a plurality of valve assemblies (325) located within the valve module (304). The mass flow rate control system according to feature 4.

6. The supply interface (369) has data and current interfaces for connection to the supply module (322). A replaceable supply module (322) is inserted into the supply interface (369) and is connected to the supply interface (369) via a data and current interface. A mass flow rate control system according to any one of claims 1 to 5.

7. The support plate (301) has a plurality of notches (313), Within these notches, one insertion portion (312) can be housed in each of the valve modules (304) when inserted for a plug-in connection between the valve module (304) and the main board (363). A mass flow rate control system according to any one of features 1 to 6.

8. The mass flow rate control system according to any one of claims 1 to 7, characterized in that the actuator (359) of the valve assembly (325) is configured as a piezoelectrically bent body.

9. The valve module (304) includes a supply board (331) having high-voltage electronic equipment, which is provided for the electrical supply of the actuator (359). The mass flow rate control system according to claim 8.

10. The mass flow rate control system according to any one of claims 1 to 9, characterized in that the processing unit (368) is formed for the individual control of each actuator (359).

11. The mass flow rate control system according to any one of claims 1 to 10, characterized in that the flow resistance (201) is configured as a turbulence throttle.

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