X-ray source and X-ray inspection equipment

Abstract

The present invention provides an X-ray source capable of suppressing the generation of electrical discharges during imaging of an object, and an X-ray inspection apparatus equipped with such an X-ray source. [Solution] The X-ray source 3 comprises an X-ray tube 7, a power supply unit 8 configured by embedding a voltage generating unit 82 within an insulating block 81, a power supply unit 11 positioned between the insulating block 81 and the X-ray tube 7 and electrically connecting the voltage generating unit 82 and the X-ray tube 7, and a cylindrical body 9 attached to the insulating block 81 that defines a housing area R for housing a part of the X-ray tube 7 and the power supply unit 11. An insulating gas G is sealed in the housing area R.

Claims

1. X-ray tube and The power supply unit is constructed by embedding a voltage generating unit within an insulating block, A power supply unit is positioned between the insulating block and the X-ray tube and electrically connects the voltage generating unit and the X-ray tube, The system includes a cylindrical body attached to the insulating block, which defines a housing area for housing a part of the X-ray tube and the power supply unit, The aforementioned containment area contains an X-ray source, which is sealed with insulating gas.

2. The X-ray source according to claim 1, wherein the insulating block is formed of an insulating resin.

3. The X-ray source according to claim 1, wherein the cylindrical body is made of metal.

4. The X-ray source according to claim 1, wherein the insulating gas is sealed in the containment area at an internal pressure of 100 kPa or more.

5. The X-ray source according to claim 1, wherein the insulating gas comprises at least one of sulfur hexafluoride and fluoronitrile.

6. The aforementioned containment area is further provided with an injection port for injecting the insulating gas, The X-ray source according to claim 1, wherein the injection port is provided in the cylindrical body.

7. The system further includes a pressure gauge for measuring the internal pressure of the insulating gas in the containment area, The X-ray source according to claim 1, wherein the pressure gauge is provided in the cylindrical body.

8. An X-ray source according to any one of claims 1 to 7, A support part that supports the object so as to be located on a horizontally extending reference line, An X-ray detection unit that detects X-rays emitted from the X-ray source and irradiated onto the object, An X-ray inspection apparatus comprising a drive unit for moving the X-ray source along a circle with the aforementioned reference line as its centerline.

9. The X-ray inspection apparatus according to claim 8, wherein the drive unit moves the X-ray source and the X-ray detection unit along the circumference while the X-ray source and the X-ray detection unit are facing each other with the reference line in between.

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