Image capture device and method for driving image capture device

Abstract

This imaging device comprises a plurality of pixels, a first and a second AD conversion circuit for outputting a digital signal that corresponds to the analog signal read out from the plurality of pixels, a first frame memory and an image processing circuit. The analog signal includes a reset signal that represents a reset level and a pixel signal that represents the image of a subject. The first frame memory temporarily holds the output from the first AD conversion circuit and a first digital signal, out of the output from the second AC conversion circuit, that corresponds to the reset signal. The image processing circuit outputs a second digital signal, out of the outputs from the first and second AD conversion circuits, that corresponds to a pixel signal relating to the pixels from which the reset signal was read out, and the first digital signal which is held in the first frame memory.

Description

[Technical field]

[0001] The present disclosure relates to an imaging device and also to a driving method of the imaging device. [Background technology]

[0002] The following Patent Document 1 discloses an imaging element having an organic photoelectric conversion layer supported on a semiconductor substrate via an insulating layer. A configuration in which a photoelectric conversion unit having a plurality of pixel electrodes is arranged above a semiconductor substrate instead of a buried photodiode, as in the technology described in Patent Document 1, is sometimes called a "stacked type". In such a configuration, the semiconductor substrate supporting the photoelectric conversion unit has a plurality of readout circuits corresponding to a plurality of pixels each having a pixel electrode. As shown in FIG. 1 of Patent Document 1, the pixel electrode of each pixel is connected to a corresponding one of the plurality of readout circuits through a via arranged in the insulating layer.

[0003] In the field of imaging devices, there is a demand for noise reduction, particularly for kTC noise that occurs when the charge generated by photoelectric conversion is reset. This kTC noise is also called "reset noise."

[0004] The following Patent Document 2 discloses an imaging device in which a transistor is interposed as a transfer means between a photoelectric conversion means for generating a signal charge and a memory means for storing the signal charge. The imaging device of Patent Document 2 further includes a noise suppression means including a frame memory and an adder. In the technology described in Patent Document 2, the reset level held in the frame memory is subtracted from the signal level by digital processing to cancel the effect of shot noise caused by dark current generated in the memory means in each pixel. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2011-228648 A [Patent Document 2] JP 2008-028517 A Summary of the Invention [Problem to be solved by the invention]

[0006] However, in the imaging device of Patent Document 2, although the readout of the reset signal representing the reset level is executed in parallel with the exposure of the photoelectric conversion means, the transfer of the signal charge to the memory means via the transfer means must be executed after the readout of the reset signal for all rows is completed. Therefore, the readout of the pixel signal representing the image of the subject is executed after the readout of the reset signal for all rows is completed. In other words, the interval between the readout of the reset signal and the readout of the pixel signal for each row of multiple pixels cannot be reduced, making it difficult to improve the frame rate. [Means for solving the problem]

[0007] According to certain non-limiting exemplary embodiments of the present disclosure, for example, the following is provided:

[0008] an image pickup device comprising: a plurality of pixels arranged in a plurality of rows and columns; a first AD conversion circuit and a second AD conversion circuit receiving analog signals read out from the plurality of pixels and outputting digital signals corresponding to the analog signals; a first frame memory; and an image processing circuit, wherein the analog signals include a reset signal representing a reset level and a pixel signal representing an image of a subject, the first frame memory temporarily holding a first digital signal corresponding to the reset signal among the outputs from the first AD conversion circuit and the second AD conversion circuit, and the image processing circuit outputs a difference between a second digital signal corresponding to a pixel signal for a pixel from which the reset signal is read out among the outputs from the first AD conversion circuit and the second AD conversion circuit.

[0009] The generic or specific aspects may be realized by an element, a device, a system, an integrated circuit, or a computer program. Also, the generic or specific aspects may be realized by any combination of an element, a device, an apparatus, a system, an integrated circuit, a method, and a computer program.

[0010] Additional benefits and advantages of the disclosed embodiments will become apparent from the specification and drawings, and the benefits and / or advantages may be provided individually by the various embodiments or features disclosed in the specification and drawings, and not all are required to obtain one or more of them. Effect of the Invention

[0011] According to an embodiment of the present disclosure, an imaging device capable of improving the frame rate while canceling the influence of reset noise is provided. [Brief description of the drawings]

[0012] [Figure 1] 1 is a diagram illustrating an example of a configuration of an imaging device according to a first embodiment of the present disclosure. [Diagram 2] 1 is a diagram illustrating a schematic diagram of an exemplary circuit configuration of an imaging device according to a first embodiment of the present disclosure. [Diagram 3] 2 is a schematic cross-sectional view showing an exemplary device structure of a first pixel Px1. FIG. [Figure 4] 4A to 4C are diagrams for explaining an example of a method for driving the imaging device according to the first embodiment of the present disclosure. [Diagram 5] 4 is a flowchart for explaining an example of a method for driving the imaging device according to the first embodiment of the present disclosure. [Figure 6] 5 is a diagram showing a schematic diagram of the operation of the readout circuit 20 of the pixel in the 0th row R0 and the operation of the readout circuit of the pixel in the 5th row R5 during a 1H period from time t8 to time t9 shown in FIG. 4. FIG. [Figure 7] 11 is a diagram illustrating the operation of a readout circuit for pixels in different h-th and k-th rows in a pixel array. FIG. [Figure 8] 1 is a diagram illustrating an example of an arrangement of AD conversion circuits with respect to a pixel array. [Figure 9] 11 is a diagram illustrating another example of the arrangement of AD conversion circuits with respect to a pixel array. FIG. [Figure 10] 1 is a diagram illustrating an example of an arrangement of AD conversion circuits on a semiconductor substrate on which a plurality of pixels are provided. [Figure 11] FIG. 11 is a diagram illustrating another example of connection of pixels to output signal lines. [Figure 12] FIG. 13 is a diagram illustrating still another example of connection of pixels to output signal lines. [Figure 13] FIG. 13 is a diagram illustrating still another example of connection of pixels to output signal lines. [Figure 14] FIG. 4 is a schematic diagram illustrating a modified example of the imaging device according to the first embodiment of the present disclosure. [Figure 15] FIG. 11 is a schematic diagram showing another modified example of the imaging device according to the first embodiment of the present disclosure. [Figure 16] FIG. 13 is a diagram illustrating an exemplary configuration of an imaging device according to a second embodiment of the present disclosure. [Figure 17] FIG. 11 is a diagram illustrating a modified example of an imaging device according to the second embodiment of the present disclosure. [Figure 18] FIG. 10 is a diagram illustrating a schematic diagram of another modified example of the imaging device according to the second embodiment of the present disclosure. [Figure 19] FIG. 11 is a diagram illustrating a schematic diagram of still another modified example of the imaging device according to the second embodiment of the present disclosure. [Figure 20] 1 is a diagram illustrating an example of the operation of an imaging device having a first frame memory 171 and a second frame memory 172. FIG. [Figure 21] 10 is a diagram illustrating an example of a signal readout operation in a configuration in which three or more AD conversion circuits are arranged for each column of a plurality of pixels Px. FIG. [Figure 22] FIG. 13 is a diagram illustrating a schematic diagram of still another modified example of the imaging device. [Diagram 23] 23 is a diagram illustrating an example of the operation of the imaging device 100H illustrated in FIG. 22. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] An outline of one aspect of the present disclosure is as follows.

[0014] [Item 1] a plurality of pixels arranged in a plurality of rows and columns; a first AD conversion circuit and a second AD conversion circuit that receive analog signals read from a plurality of pixels and output digital signals corresponding to the analog signals; A first frame memory; Image processing circuit Equipped with the analog signal includes a reset signal representing a reset level and a pixel signal representing an image of a subject; the first frame memory temporarily holds a first digital signal corresponding to the reset signal among the outputs from the first AD conversion circuit and the second AD conversion circuit; the image processing circuit outputs a difference between a second digital signal corresponding to a pixel signal related to a pixel from which a reset signal has been read out from among the output from the first AD conversion circuit and the output from the second AD conversion circuit, and the first digital signal held in the first frame memory; Imaging device.

[0015] According to the configuration of item 1, the imaging device is provided with first and second AD conversion circuits, and among the outputs from these, a first digital signal corresponding to a reset signal is stored in a first frame memory, and a difference between the first digital signal and a second digital signal corresponding to a pixel signal is calculated, so that the effect of reset noise can be substantially canceled. Also, by providing the imaging device with the first and second AD conversion circuits, it is possible to overlap a part of the reset signal readout period with a part of the pixel signal readout period, and it is possible to flexibly change the length of the exposure period.

[0016] [Item 2] the first AD conversion circuit receives a reset signal from among the analog signals read out from the plurality of pixels and converts it into a first digital signal; 2. The imaging device according to item 1, wherein the second AD conversion circuit receives pixel signals among the analog signals read out from the multiple pixels and converts them into a second digital signal.

[0017] [Item 3] a plurality of sets of a first output signal line connected to a first AD conversion circuit and a second output signal line connected to a second AD conversion circuit; each of the first signal switching circuits is connected between each pixel and a corresponding one of the plurality of sets of the first output signal line and the second output signal line; The imaging device described in item 2, wherein the first signal switching circuit outputs a reset signal among the analog signals read out from the pixels to a first output signal line, and outputs a pixel signal among the analog signals read out from the pixels to a second output signal line.

[0018] [Item 4] the plurality of pixels include a first pixel and a second pixel located in different rows of the plurality of rows; The imaging device a first output signal line connected to the first pixel; a second output signal line connected to the second pixel; a first signal switching circuit connected between the first output signal line and the second output signal line and the first AD conversion circuit; a second signal switching circuit connected between the first output signal line and the second output signal line and the second AD conversion circuit; Further equipped with 3. The imaging device according to item 2, wherein the first signal switching circuit and the second signal switching circuit operate in a complementarily manner.

[0019] [Item 5] 5. The imaging device according to any one of items 2 to 4, wherein the timing of output of the first digital signal from the first AD conversion circuit and the timing of output of the second digital signal from the second AD conversion circuit are consistent.

[0020] [Item 6] the plurality of pixels include a first pixel and a second pixel located in different rows of the plurality of rows; The imaging device a first output signal line connected to the first pixel and the first AD conversion circuit; a second output signal line connected to the second pixel and the second AD conversion circuit; Further equipped with the first AD conversion circuit generates a digital signal corresponding to the analog signal read from the first pixel; 2. The imaging device according to item 1, wherein the second AD conversion circuit generates a digital signal corresponding to the analog signal read out from the second pixel.

[0021] [Item 7] 7. The imaging device according to item 6, wherein the timing of output of the digital signal from the first AD conversion circuit and the timing of output of the digital signal from the second AD conversion circuit are the same.

[0022] [Item 8] 8. The imaging device according to any one of items 4 to 7, wherein the first pixel and the second pixel are located in an even row and an odd row, respectively, of the plurality of rows.

[0023] [Item 9] a second frame memory for temporarily storing the second digital signal; 9. The imaging device according to any one of items 1 to 8, wherein the image processing circuit outputs a difference between a first digital signal held in the first frame memory and a second digital signal held in the second frame memory.

[0024] According to the configuration of Item 9, for example, it is possible to obtain a difference between a digital signal corresponding to a pixel signal acquired in the next frame period and the second digital signal stored in the second frame memory. Therefore, while allowing a part of the reset signal readout period to overlap with a part of the pixel signal readout period, it is possible to perform a difference between the first digital signal and the second digital signal after the readout of the reset signal and the readout of the pixel signal for all rows of the multiple pixels is completed.

[0025] [Item 10] a third signal switching circuit electrically connected between the first AD conversion circuit, the second AD conversion circuit, and the first frame memory and the second frame memory; 10. The imaging device according to item 9, wherein the third signal switching circuit selectively outputs the first digital signal among the inputs to the first frame memory and selectively outputs the second digital signal to the second frame memory.

[0026] According to the configuration of item 10, the first digital signal output from the AD conversion circuit can be stored in the first frame memory, and the second digital signal can be stored in the second frame memory.

[0027] [Item 11] Each of the plurality of pixels is a semiconductor substrate provided with a readout circuit electrically connected to one or both of the first AD conversion circuit and the second AD conversion circuit; A photoelectric conversion unit located above a semiconductor substrate; 11. The imaging device according to any one of items 1 to 10, comprising:

[0028] [Item 12] A method for driving an imaging device including a plurality of pixels, each of which has a photoelectric conversion unit supported on a semiconductor substrate having an impurity region and electrically connected to a charge accumulation region including the impurity region as a part thereof, comprising: (a) resetting the potential of the charge storage region; a step (b) of reading out a reset signal corresponding to the potential of the charge storage region after the step (a) is performed; (c) generating a first digital signal corresponding to the reset signal by analog-to-digital conversion; (d) storing the first digital signal in a first frame memory; After performing step (a), a step (e) of accumulating a signal charge generated by the photoelectric conversion unit in a charge accumulation region; a step (f) of reading out a pixel signal corresponding to the amount of charge accumulated in the charge accumulation region in the step (e); (g) generating a second digital signal corresponding to the pixel signal by analog-to-digital conversion; (h) obtaining a difference between the second digital signal and the first digital signal; A method for driving an imaging device comprising the steps of:

[0029] According to the configuration of item 12, by acquiring a second digital signal corresponding to a pixel signal and a first digital signal corresponding to a reset signal and taking the difference between them, it is possible to substantially cancel the effect of random noise caused by the reset operation executed immediately before the exposure period.

[0030] [Item 13] Item 13. A method for driving an imaging device according to item 12, wherein step (b) is a step of reading out a reset signal from one or more pixels among the plurality of pixels, and step (f) is a step of reading out a pixel signal from one or more pixels other than the one or more pixels among the plurality of pixels, and is performed in parallel with step (b).

[0031] According to the configuration of item 13, since a part of the reset signal readout period and a part of the pixel signal readout period are overlapped, it is possible to flexibly change the length of the exposure period. For example, the exposure period can be shortened to improve the frame rate.

[0032] [Item 14] A plurality of pixels arranged in a plurality of rows and columns, the plurality of pixels including a first pixel and a second pixel arranged in different rows of the plurality of rows; an output signal line electrically connected to the first pixel and the second pixel; an AD conversion circuit electrically connected to the output signal line, the AD conversion circuit outputting a digital signal corresponding to the analog signal read from the first pixel and the second pixel; a first frame memory for temporarily storing a first digital signal corresponding to a reset signal representing a reset level among outputs from the AD conversion circuit; an image processing circuit that outputs a difference between a second digital signal corresponding to a pixel signal expressing an image of a subject, the pixel being associated with a pixel from which a reset signal has been read out of the output from the AD conversion circuit, and the first digital signal held in the first frame memory; A frequency multiplier that receives a horizontal sync signal from an image processing circuit and generates a pulse signal with a shorter period than the horizontal sync signal. Equipped with The first pixel outputs a reset signal to an output signal line during a part of a 1H period based on an output from the frequency multiplier; The second pixel outputs a pixel signal to an output signal line during another part of the 1H period based on the output from the frequency multiplier.

[0033] According to the configuration of item 14, it is possible to flexibly change the frame rate while canceling the influence of reset noise, without providing two or more output signal lines for each column of a plurality of pixels.

[0034] [Item 15] Item 15. An imaging device according to item 14, wherein, when k is an integer, reading of a reset signal from a first pixel in a (k+1)th frame is performed prior to reading of a pixel signal from a second pixel in a kth frame.

[0035] [Item 16] Item 16. The imaging device according to item 14 or 15, further comprising a second frame memory that temporarily holds a second digital signal output from the AD conversion circuit.

[0036] According to the configuration of Item 16, the first digital signal output from the AD conversion circuit can be stored in the first frame memory, and the second digital signal can be stored in the second frame memory.

[0037] Hereinafter, the embodiments of the present disclosure will be described in detail with reference to the drawings. Note that the embodiments described below are all comprehensive or specific examples. The numerical values, shapes, materials, components, arrangements and connection forms of components, steps, order of steps, etc. shown in the following embodiments are examples and are not intended to limit the present disclosure. The various aspects described in this specification can be combined with each other as long as there is no contradiction. In addition, among the components in the following embodiments, components that are not described in the independent claims showing the highest concept are described as optional components. In the following description, components having substantially the same functions are indicated by common reference symbols and may be omitted from description. In addition, in order to avoid excessive complexity of the drawings, illustration of some elements may be omitted.

[0038] (First embodiment) Fig. 1 is a schematic diagram showing an exemplary configuration of an imaging device according to a first embodiment of the present disclosure. The imaging device 100A shown in Fig. 1 includes a plurality of pixels Px each having a photoelectric conversion unit supported on a semiconductor substrate 110. That is, in the following, an imaging device having a so-called stacked type configuration is illustrated as the imaging device 100A. As will be described in detail later with reference to the drawings, the semiconductor substrate 110 has a plurality of readout circuits formed corresponding to each pixel Px.

[0039] A plurality of pixels Px are two-dimensionally arranged on the semiconductor substrate 110 to form an imaging region. In an embodiment of the present disclosure, the plurality of pixels Px are arranged in a plurality of rows and columns. In FIG. 1, the plurality of pixels Px are arranged in m rows and n columns, where m and n independently represent integers equal to or greater than 2.

[0040] The imaging device 100A includes a plurality of row signal lines R i and a plurality of output signal lines. i are m row signal lines R0, R1, R2, . . . , R arranged corresponding to multiple rows of pixels Px. m-2 ,R m-1 A plurality of row signal lines R iEach of these row signal lines R is electrically connected to one or more pixels Px belonging to the same row. i are connected to the row scanning circuit 130. Note that two or more signal lines may be provided for each row of the pixels Px.

[0041] In the example shown in FIG. 1, the plurality of output signal lines are a plurality of first output signal lines S j and a plurality of second output signal lines T j A plurality of first output signal lines S j are n first output signal lines S0, S1, S2, . . . , S arranged corresponding to a plurality of columns of pixels Px. n-2 ,S n-1 Similarly, a plurality of second output signal lines T j Also, n second output signal lines T0, T1, T2, . . . , T n-2 ,T n-1 Includes.

[0042] A plurality of first output signal lines S j Each of the first output signal lines S is electrically connected to a readout circuit of one or more pixels Px belonging to the same column. j A first analog-to-digital conversion circuit 141 and a first digital output interface 161 are connected to the first analog-to-digital conversion circuit 141. The first digital output interface 161 outputs a first output signal line S j The signal is read out from the pixel Px via the first analog-to-digital converter 141 and is output after undergoing analog-to-digital conversion.

[0043] A plurality of second output signal lines T j Similarly, each of the second output signal lines T j For example, among the multiple pixels belonging to the same column, the first output signal line S j However, as will be described later, when focusing on a plurality of pixels in the same column, the first output signal line S j A second output signal line T jare also possible.

[0044] As shown in the figure, a plurality of second output signal lines T j A second analog-to-digital conversion circuit 142 and a second digital output interface 162 are connected to the second analog-to-digital conversion circuit 142. The second digital output interface 162 outputs a second output signal line T j and outputs a signal that has undergone analog-to-digital conversion by the second analog-to-digital conversion circuit 142. For simplicity, hereinafter, the analog-to-digital conversion circuit will be simply referred to as the "AD conversion circuit" and the digital output interface will be simply referred to as the "interface."

[0045] In the configuration illustrated in FIG. 1, the imaging device 100A has a first output signal line S j The imaging device 100A further includes a first digital memory 151 connected between the first AD conversion circuit 141 and the first interface 161 connected to the first output signal line T j The image sensor further includes a second digital memory 152 connected between the second interface 162 and the second AD conversion circuit 142 connected to the first digital memory 151. The first digital memory 151 and the second digital memory 152 temporarily store digital signals for one row that are read out from the multiple pixels Px and analog-to-digital converted by the first AD conversion circuit 141 or the second AD conversion circuit 142. By interposing a digital memory between the AD conversion circuit and the interface as in this example, it becomes possible to store the results of analog-to-digital conversion for one row in the digital memory while performing analog-to-digital conversion for the next row in the AD conversion circuit. In other words, analog-to-digital conversion for each row can be processed at a higher speed.

[0046] An image processing circuit 170A is connected to the first interface 161 and the second interface 162. The image processing circuit 170A performs processes such as gamma correction, color interpolation, spatial interpolation, and auto white balance on the digital signals output from the interfaces as necessary. The image processing circuit 170A can be realized by, for example, a DSP (Digital Signal Processor), an ISP (Image Signal Processor), or an FPGA (Field-programmable gate array).

[0047] In this example, the control circuit 220 is electrically connected to the image processing circuit 170A. The image processing circuit 170A provides control signals such as a vertical synchronization signal and a horizontal synchronization signal to the control circuit 220. The row scanning circuit 130, the first AD conversion circuit 141, and the second AD conversion circuit 142 are connected to the control circuit 220. The control circuit 220 is realized by a microcontroller including one or more processors, for example, and typically has a timing generator. The control circuit 220 supplies drive signals to the row scanning circuit 130, the first AD conversion circuit 141, and the second AD conversion circuit 142, and controls the entire imaging device 100A. In FIG. 1, the arrows extending toward the control circuit 220 and the arrows extending from the control circuit 220 respectively represent input signals to the control circuit 220 and output signals from the control circuit 220. The control circuit 220 may include one or more memories.

[0048] The imaging device 100A may include a display device 180, such as a liquid crystal display or an organic EL display, connected to the image processing circuit 170A. The display device 180 presents an image based on a digital signal obtained by shooting to a user of the imaging device 100A.

[0049] In the configuration illustrated in FIG. 1, the image processing circuit 170A has a first frame memory 171. The first frame memory 171 temporarily holds digital data corresponding to one frame of an image output from the first interface 161 and / or the second interface 162. In the embodiment of the present disclosure, the first frame memory 171 temporarily holds a first digital signal corresponding to a reset signal expressing a reset level. The first digital signal is a digital signal output from the first AD conversion circuit 141 or the second AD conversion circuit 142 using a reset signal, which is an analog signal read from each pixel Px, as an input. As will be described later, the image processing circuit 170A outputs a difference between the first digital signal held in the first frame memory 171 and a second digital signal corresponding to a pixel signal expressing an image of a subject. The difference between the digital signals can substantially cancel the effect of random noise caused by a reset operation executed immediately before an exposure period.

[0050] Furthermore, in the configuration illustrated in FIG. 1, the imaging device 100A has a first output signal line S j A first system including a second output signal line T j In one embodiment, for a certain column of the pixels Px, the first output signal line S j is connected to one or more pixels in the column. On the other hand, the second output signal line T j is connected to one or more other pixels in the column. According to this connection mode, for a certain column of the pixels Px, it is possible to execute in parallel the readout of a reset signal from a certain pixel and the readout of a pixel signal from a pixel belonging to a row different from the row to which the certain pixel belongs. Therefore, it is possible to reduce the interval between the period of readout of the reset signal on a row-by-row basis and the period of readout of the pixel signal on a row-by-row basis, and therefore it is possible to improve the frame rate while eliminating the influence of reset noise.

[0051] (Example circuit configuration of pixel Px) FIG. 2 shows an exemplary circuit configuration of the imaging device 100A. For simplicity, FIG. 2 shows four pixels Px taken out from the plurality of pixels Px included in the imaging region shown in FIG. 1. These four pixels Px include a first pixel Px1, a second pixel Px2, a third pixel Px3, and a fourth pixel Px4 arranged in two rows and two columns. Among these, the first pixel Px1 and the second pixel Px2 are located in the same row, while the third pixel Px3 and the fourth pixel Px4 are located in the same row different from the first pixel Px1 and the second pixel Px2. The first pixel Px1 and the second pixel Px2 are located, for example, in an even-numbered row of a pixel array including a plurality of pixels Px, and the third pixel Px3 and the fourth pixel Px4 are located in an odd-numbered row of the pixel array. The basic circuit configuration of the pixels is common to these pixels Px1 to Px4, and therefore, hereinafter, an exemplary configuration of each pixel will be described with attention to the first pixel Px1.

[0052] The first pixel Px1 includes a photoelectric conversion unit 10 and a readout circuit 20 electrically connected to the photoelectric conversion unit 10. As described later, the photoelectric conversion unit 10 has a pixel electrode, a counter electrode, and a photoelectric conversion layer sandwiched between these electrodes. The photoelectric conversion unit 10 of each pixel has an electrical connection to a voltage line 192 connected to a voltage supply circuit 190, and is configured to be able to apply a predetermined voltage between the pixel electrode and the counter electrode during operation of the imaging device 100A. The voltage supply circuit 190 is not limited to a specific power supply circuit as long as it is configured to be able to apply a predetermined voltage to the photoelectric conversion unit 10 of each pixel during operation of the imaging device 100A. The voltage supply circuit 190 may be a circuit that generates a predetermined voltage, or may be a circuit that converts a voltage supplied from another power source into a predetermined voltage. The voltage supply circuit 190 may be a part of the row scanning circuit 130.

[0053] 2, the read circuit 20 includes a signal detection transistor 22, an address transistor 24, and a reset transistor 26. The signal detection transistor 22, the address transistor 24, and the reset transistor 26 are typically field effect transistors formed on a semiconductor substrate 110, and an example in which N-channel MOSFETs are used for these transistors will be described below.

[0054] The gate of the signal detection transistor 22 is connected to the pixel electrode of the photoelectric conversion unit 10. The source of the signal detection transistor 22 is connected to a corresponding output signal line via an address transistor 24. Here, a first output signal line S j and the second output signal line T j As shown in FIG. 2, the first output signal line S j is connected to the first AD conversion circuit 141. In contrast, the second output signal line T j is connected to the second AD conversion circuit 142.

[0055] In the example shown in FIG. 2, when attention is paid to a first pixel Px1 and a fourth pixel Px4 that belong to the same column of the pixel array, the source of the signal detection transistor 22 of the first pixel Px1 is connected to the first output signal line S j On the other hand, the source of the signal detection transistor 22 of the fourth pixel Px4 is electrically connected to the second output signal line T j Similarly, when attention is paid to the second pixel Px2 and the third pixel Px3 that belong to the same row, the source of the signal detection transistor 22 of the second pixel Px2 is electrically connected to the first output signal line S j-1 The source of the signal detection transistor 22 of the third pixel Px3 is electrically connected to the second output signal line T j-1 1 and 2. That is, in this example, the first AD conversion circuit 141 generates, by analog-to-digital conversion, a digital signal corresponding to an analog signal read out from, for example, a first pixel Px1 and a second pixel Px2 located in an even-numbered row of the pixel array, and outputs the digital signal to the first interface 161. Also, the second AD conversion circuit 142 generates a digital signal corresponding to an analog signal read out from, for example, a third pixel Px3 and a fourth pixel Px4 located in an odd-numbered row of the pixel array, and outputs the digital signal to the second interface 162.

[0056] The analog signal read from each pixel Px includes a reset signal representing a reset level and a pixel signal representing an image of a subject. As will be described later, the reset signal and pixel signal read from each pixel Px are signals on which kTC noise generated with pixel reset is superimposed.

[0057] 2, the first AD conversion circuit 141 and the second AD conversion circuit 142 may have a plurality of elements, such as a column signal processing circuit 145, each of which is provided for each output signal line. Each of these elements is connected to a corresponding one of the output signal lines. On the other hand, the drain of the signal detection transistor 22 of each pixel is connected to a power supply line 194. The power supply line 194 functions as a source follower power supply by applying a power supply voltage VDD of about 3.3 V during operation of the imaging device 100A.

[0058] The gate of the address transistor 24 is connected to a row signal line R i The row scanning circuit 130 is connected to the row signal line R i The address transistor 24 is switched on and off by controlling the voltage level applied to the row scanning circuit 130. This enables the row scanning circuit 130 to read out signals from the pixels belonging to the selected row to the corresponding output signal line.

[0059] In this example, the readout circuit 20 includes a reset transistor 26. One of the drain and source of the reset transistor 26 is connected to a node FD that electrically connects the photoelectric conversion unit 10 to the gate of the signal detection transistor 22. The other of the drain and source of the reset transistor 26 is connected to a reset voltage line 196. The reset voltage line 196 is connected to a reset voltage supply circuit 198. When the imaging device 100A is in operation, a predetermined reset voltage V RST is applied to the reset voltage line 196 from the reset voltage supply circuit 198. The reset voltage V RSTFor example, a voltage of 0V or near 0V is used as the reset voltage supply circuit 198. The reset voltage supply circuit 198 is not limited to a specific power supply circuit as with the voltage supply circuit 190, as long as it is configured to be able to apply a predetermined reset voltage to each pixel during operation of the imaging device 100A. The reset voltage supply circuit 198 may be a circuit independent of the voltage supply circuit 190, or one of the reset voltage supply circuit 198 and the voltage supply circuit 190 may be a part of the other.

[0060] A plurality of reset signal lines Q corresponding to a plurality of pixels Px i As shown in the figure, typically, one reset signal line is commonly connected to the gates of the reset transistors 26 of multiple pixels Px that belong to the same row. In this example, the reset signal line Q i has a connection to the row scanning circuit 130. Thus, the row scanning circuit 130 has a connection to the reset signal line Q i By controlling the voltage level applied to the reset transistor 26 of each of the pixels Px in a row, the reset transistor 26 is turned on, and the potential of the node FD of the pixel Px in which the reset transistor 26 is turned on is set to V RST can be reset to

[0061] (Device structure of pixel Px) Fig. 3 shows a schematic device structure of the first pixel Px1. The first pixel Px1 generally includes a semiconductor substrate 110 on which a readout circuit 20 is formed, and a photoelectric conversion unit 10 supported by the semiconductor substrate 110. As shown in Fig. 3, an insulating layer 50 that covers the readout circuit 20 is typically disposed between the semiconductor substrate 110 and the photoelectric conversion unit 10.

[0062] The photoelectric conversion unit 10 includes a pixel electrode 11 supported by an insulating layer 50, a light-transmitting counter electrode 13, and a photoelectric conversion layer 12 located between the pixel electrode 11 and the counter electrode 13. The pixel electrode 11 is located closer to the semiconductor substrate 110 than the photoelectric conversion layer 12, and may be formed from a metal such as aluminum or copper, a metal nitride, or polysilicon doped with impurities to provide electrical conductivity. As shown in FIG. 3, the pixel electrode 11 is spatially separated from the pixel electrodes 11 of other adjacent pixels, and is thereby electrically isolated from them.

[0063] The counter electrode 13 is located on the side where light from the subject arrives. The counter electrode 13 is a light-transmitting electrode made of a conductive material such as ITO. In this specification, the term "light-transmitting" means that the photoelectric conversion layer 12 transmits at least a part of the light having a wavelength that can be absorbed, and it is not essential that the photoelectric conversion layer 12 transmits light over the entire wavelength range of visible light. An optical filter such as a color filter, a microlens, etc. may be arranged on the main surface of the counter electrode 13 opposite to the photoelectric conversion layer 12.

[0064] The counter electrode 13 is typically provided in the form of a single electrode layer that is continuous across multiple pixels. The aforementioned voltage line 192 is connected to the counter electrode 13 of the photoelectric conversion unit 10. In FIG. 2, the voltage line 192 is illustrated as being connected to each of the photoelectric conversion units 10 of multiple pixels, but typically, the counter electrode 13 of each pixel is part of a single light-transmitting electrode that is continuous between multiple pixels. Therefore, the counter electrode 13 of each pixel is basically equipotential, and it is not essential that the voltage line 192 is a wiring that branches into multiple lines.

[0065] The photoelectric conversion layer 12 is formed from an organic material or an inorganic material such as amorphous silicon, and generates charge pairs upon receiving light that has passed through the counter electrode 13. Like the counter electrode 13, the photoelectric conversion layer 12 is typically provided in the form of a single continuous photoelectric conversion structure spanning multiple pixels. That is, the photoelectric conversion layer 12 in each pixel may be part of a photoelectric conversion layer that is continuously formed across multiple pixels.

[0066] By forming the photoelectric conversion layer 12 by selecting one or more suitable materials as the photoelectric conversion material, it is possible to obtain a photoelectric conversion layer 12 that exhibits sensitivity in both the visible and infrared regions. Examples of such materials are described in detail, for example, in International Publication No. 2018 / 025544. For reference, the entire disclosure of International Publication No. 2018 / 025544 is incorporated herein by reference. The photoelectric conversion layer 12 may be composed of quantum dots and / or nanotubes. Alternatively, the photoelectric conversion layer 12 may contain quantum dots and / or nanotubes as the photoelectric conversion material. The photoelectric conversion layer 12 may include a layer composed of an organic material and a layer composed of an inorganic material.

[0067] The insulating layer 50 located between the semiconductor substrate 110 and the photoelectric conversion unit 10 includes, for example, a plurality of insulating layers each formed of silicon dioxide. As shown in FIG. 3, a multilayer wiring including at least a conductive structure 52 having one end connected to the pixel electrode 11 of the photoelectric conversion unit 10 is provided inside the insulating layer 50. The conductive structure 52 may include vias and wiring formed of a metal such as copper, plugs formed of polysilicon, and the like. In the illustrated example, the other end of the conductive structure 52 is electrically connected to an impurity region 111 formed in the semiconductor substrate 110.

[0068] The semiconductor substrate 110 has impurity regions 112, 113, 114, and 115 in addition to the impurity region 111. The semiconductor substrate 110 further has an element isolation region 116 that electrically isolates the readout circuit 20 provided for each pixel Px between the pixels Px. In the following, a P-type silicon substrate is exemplified as the semiconductor substrate 110. The semiconductor substrate 110 may be an insulating substrate having a semiconductor layer provided on its surface.

[0069] Each of the impurity regions 111, 112, 113, 114, and 115 is typically an N-type diffusion region. Of these impurity regions, the impurity region 111 to which the conductive structure 52 is connected functions as one of the source region and the drain region of the reset transistor 26. The reset transistor 26 further includes an impurity region 112 that functions as the other of the source region and the drain region, a gate insulating layer 26g on the semiconductor substrate 110, and a gate electrode 26e on the gate insulating layer 26g. Although not shown in FIG. 3, the above-mentioned reset voltage line 196 is connected to the impurity region 112.

[0070] The signal detection transistor 22 includes an impurity region 113 and an impurity region 114, a gate insulating layer 22g on the semiconductor substrate 110, and a gate electrode 22e on the gate insulating layer 22g. The impurity region 113 functions as a drain region of the signal detection transistor 22, and the impurity region 114 functions as a source region of the signal detection transistor 22. The above-mentioned power supply line 194 is connected to the impurity region 113. As shown in FIG. 3, an element isolation region 116 is also provided between the signal detection transistor 22 and the reset transistor 26.

[0071] The address transistor 24 includes an impurity region 114 and an impurity region 115, a gate insulating layer 24g on the semiconductor substrate 110, and a gate electrode 24e on the gate insulating layer 24g. The impurity region 114 and the impurity region 115 function as a drain region and a source region of the address transistor 24, respectively. In the configuration illustrated in FIG. 3, the address transistor 24 shares the impurity region 114 with the signal detection transistor 22. The impurity region 115 includes a gate electrode 24e connected to the plurality of output signal lines S j , T j The corresponding one of them is connected.

[0072] The insulating layer 50 covers the signal detection transistor 22, the address transistor 24, and the reset transistor 26. As shown in Fig. 3, the conductive structure 52 in the insulating layer 50 is also electrically connected to the gate electrode 22e of the signal detection transistor 22. That is, the conductive structure 52 in each pixel has a function of electrically connecting the pixel electrode 11 of the photoelectric conversion unit 10 and the readout circuit 20 including the signal detection transistor 22 and the like formed on the semiconductor substrate 110 to each other.

[0073] Furthermore, the conductive structure 52 also functions as a part of a charge accumulation region that temporarily accumulates charges collected by the pixel electrode 11, i.e., signal charges. As described with reference to FIG. 2, the voltage supply circuit 190 applies a predetermined voltage to the photoelectric conversion unit 10 of each pixel via the voltage line 192. For example, by applying a voltage to the counter electrode 13 of the photoelectric conversion unit 10, a predetermined potential difference ΔV can be applied between the counter electrode 13 and the pixel electrode 11 during the exposure period. For example, by applying a voltage to the counter electrode 13 so that the potential of the counter electrode 13 is higher than that of the pixel electrode 11 with respect to the pixel electrode 11, charges having a positive polarity, for example, holes, among positive and negative charges generated in the photoelectric conversion layer 12 by the incidence of light, can be collected by the pixel electrode 11 as signal charges. The signal charges are temporarily accumulated in a charge accumulation region that includes the conductive structure 52 as a part thereof. Similar to the conductive structure 52, the impurity region 111 formed in the semiconductor substrate 110, the pixel electrode 11 of the photoelectric conversion section 10, and the gate electrode 22e of the signal detection transistor 22 also function as part of a charge accumulation region that temporarily accumulates signal charges.

[0074] (Exemplary Driving Method of Imaging Device 100A) 4 and 5 are diagrams for explaining an example of a method for driving an imaging device according to the first embodiment of the present disclosure. In FIG. 4, the top chart shows a pulse of a vertical synchronization signal VD. The rising edge of the pulse of the vertical synchronization signal VD indicates the start of a period for reading out pixel signals. In FIG. 4, the second chart from the top shows a pulse of a horizontal synchronization signal HD. The period from the rising edge of one pulse to the rising edge of the next pulse corresponds to one horizontal scanning period, 1H.

[0075] FIG. 4 also shows a plurality of blocks representing the operation of a plurality of pixels Px included in the imaging region in one diagram. For simplicity, here, the number of rows of the plurality of pixels Px is six, from the 0th row R0 to the 5th row R5, and the operation of the pixels Px is shown typically by a plurality of rectangular blocks. The 0th row R0 of the plurality of pixels Px includes, for example, the first pixel Px1 and the second pixel Px2, and the first row R1 includes, for example, the third pixel Px3 and the fourth pixel Px4. In FIG. 4, for example, a white rectangular block typically represents an exposure period in a frame period, and a rectangular block hatched with vertical lines represents a period of readout of a reset level corresponding to a signal level in the dark. Also, a rectangular block hatched with diagonal lines represents a period of readout of a pixel signal representing an image of a subject.

[0076] The driving method of the imaging device illustrated in Fig. 5 includes, in outline, a step of resetting the potential of the charge accumulation region of the pixel (step S1), a step of reading out a reset signal corresponding to the potential of the charge accumulation region after the pixel is reset (step S2), a step of generating a first digital signal corresponding to the reset signal by analog-digital conversion (step S3), a step of storing the first digital signal in a frame memory (step S4), a step of accumulating a signal charge generated by a photoelectric conversion unit in the charge accumulation region after the pixel is reset (step S5), a step of reading out a pixel signal corresponding to the amount of charge accumulated in the step of accumulating the signal charge in the charge accumulation region (step S6), a step of generating a second digital signal corresponding to the pixel signal by analog-digital conversion (step S7), and a step of obtaining a difference between the second digital signal and the first digital signal (step S8). Hereinafter, the details of an exemplary driving method of the imaging device will be described with reference to Fig. 4.

[0077] <Step of resetting the potential of the charge storage region> Fig. 4 shows an example of an operation based on a so-called rolling shutter, which performs exposure and signal readout for each row of pixels. Here, first, attention is paid to row 0 R0 among row 0 R0 to row 5 R5. In acquiring an image, first, resetting of the charge accumulation region of each pixel Px is performed. In the example shown in Fig. 4, where k is an integer equal to or greater than 0, resetting of the pixels belonging to row 0 R0 is started at time t3 for the kth frame period.

[0078] Specifically, by turning on the reset transistor 26, the potential of the node FD is adjusted to the potential of the reset voltage line 196. That is, the voltage of the pixel electrode 11 of the photoelectric conversion unit 10 is adjusted to the reset voltage V RST 2 and 3, the signal detection transistor 22 of the readout circuit 20 outputs a signal corresponding to the potential of the pixel electrode 11 by electrically connecting the gate electrode 22e to the pixel electrode 11 via the conductive structure 52. That is, the readout circuit 20 outputs an analog signal corresponding to the potential of the pixel electrode 11 by a source follower including the signal detection transistor 22.

[0079] <Step of reading out the reset signal> After the reset transistor 26 is turned off, the address transistor 24 is turned on, so that the reset voltage V RST A signal according to the reset level is output to the corresponding output signal line. The signal output to the output signal line at this time is an analog signal representing the reset level, and usually contains reset noise that occurs when the reset transistor 26 is turned off. For example, in the example of the circuit configuration described with reference to FIG. 2, the reset signal read out from the pixel belonging to the 0th row R0 is output to the first output signal line S j , and the signal is input to the first AD conversion circuit 141 via a corresponding one of the

[0080] <Step of generating a first digital signal corresponding to a reset signal> The reset signal input to the first AD conversion circuit 141 is converted into a digital signal by the first AD conversion circuit 141. After the reset signal is read out, the address transistor 24 is turned off. By turning off the address transistor 24 of the pixel belonging to the 0th row R0, the readout of the reset signal from the pixel belonging to the 0th row R0 is completed.

[0081] <Step of storing the first digital signal in the first frame memory> As shown in FIG. 4, the above-mentioned read operation is executed sequentially row by row in synchronization with the horizontal synchronization signal HD. The interval between pulses of the horizontal synchronization signal HD, i.e., the 1H period, represents the period from when a row is selected to when the next row is selected. In this example, during the period from time t3 to time t4, the pixels belonging to the 0th row R0 are reset and the reset signals are read from the pixels, and during the period from time t4 to time t5, the pixels belonging to the 1st row R1 are reset and the reset signals are read from the pixels. As can be seen from the above, the reset level read period may include a reset period for resetting the potential of the charge storage region of the pixel.

[0082] In the example of the circuit configuration described with reference to FIG. 2, the reset signal read from the pixel in the first row R1 is output to the first output signal line S j Instead, the second output signal line T j The reset signal read from the pixel located in the even row and the reset signal read from the pixel located in the odd row are input to either the first AD conversion circuit 141 or the second AD conversion circuit 142 via a corresponding one of the output signal lines. That is, here, the reset signal read from the pixel located in the even row and the reset signal read from the pixel located in the odd row are input to either the first AD conversion circuit 141 or the second AD conversion circuit 142 via different output signal lines. The reset signal input to the second AD conversion circuit 142 is also converted to a digital signal by analog-to-digital conversion. The digital signals output from the first AD conversion circuit 141 and the second AD conversion circuit 142 are input to the image processing circuit 170A via the first interface 161 and the second interface 162, respectively. The first digital signal corresponding to the reset signal read from time t3 to time t9 in FIG. 4 is temporarily held in the first frame memory 171 in the image processing circuit 170A.

[0083] <Step of accumulating signal charges generated by photoelectric conversion> Focus again on the pixels belonging to the 0th row R0. After the reset signal is read out, the reset transistor 26 is turned off and the exposure period begins. In this example, focusing on the 0th row R0, the period from time t4 to time t8 is set as the exposure period in the kth frame period. The exposure period is a period for accumulating signal charges generated by the photoelectric conversion unit 10 in accordance with the amount of exposure to the pixels in the charge accumulation region. The length of the exposure period for each row of the multiple pixels Px is, for example, in the range of 1 / 60 seconds to 1 / 16000 seconds.

[0084] At this time, the counter electrode 13 of the photoelectric conversion unit 10 of each pixel Px is supplied with a predetermined voltage V1 from the voltage supply circuit 190 via a voltage line 192, so that the counter electrode 13 is set to, for example, a high potential state with respect to the pixel electrode 11. The potential of the pixel electrode 11 immediately after the reset is the above-mentioned reset voltage V RST Immediately after the reset, the potential between the pixel electrode 11 and the counter electrode 13 is determined by (V1-VRST ) bias voltage is applied.

[0085] By making the potential of the counter electrode 13 higher relative to the pixel electrode 11, the positive charges of the charge pairs generated by photoelectric conversion are collected by the pixel electrode 11. The PN junction formed in the semiconductor substrate 110 by forming the impurity region 111 functions as a junction capacitance that temporarily stores the positive charges collected by the pixel electrode 11. When holes are used as signal charges, the potential of the impurity region 111 as a charge storage section rises as the signal charges are accumulated in the impurity region 111. Note that in a typical embodiment of the present disclosure, (V1-V RST )>0, it is of course possible to use, for example, electrons as signal charges by applying a voltage to the counter electrode 13 such that the potential of the counter electrode 13 is lower than that of the pixel electrode 11.

[0086] <Step of reading out pixel signals according to the amount of accumulated charge> After a predetermined time has elapsed, the pixel signal is read out. In this example, based on the vertical synchronization signal VD, at time t8, the readout of the signal from the pixel belonging to the 0th row R0 is started. As described above, the readout circuit 20 of each pixel belonging to the 0th row R0 outputs an analog signal corresponding to the potential of the pixel electrode 11 to a corresponding one of the multiple first output signal lines. At this time, the signal read out from the pixel of the 0th row R0 is an analog signal corresponding to the amount of charge accumulated in the charge accumulation region during the exposure period for the 0th row R0, and is a pixel signal expressing an image of a subject based on ambient light such as sunlight. This pixel signal contains reset noise caused by a reset operation executed before the exposure period. After the pixel signal is read out, the address transistor 24 is turned off again.

[0087] <Step of generating a second digital signal corresponding to the second digital signal> 4, exposure of each pixel and reading of pixel signals from each pixel are also performed sequentially for each row of pixels. When the reading of the first pixel signals from the 0th row R0 to the 5th row R5 is completed, the kth frame period ends.

[0088] Similar to the readout of the reset signal, the pixel signals read out from the pixels in the 0th row R0, the 2nd row R2, and the 4th row R4 are output to the first output signal line S j On the other hand, pixel signals read from the pixels in the first row R1, the third row R3, and the fifth row R5 are sent to the first AD conversion circuit 141 via the second output signal line T j The pixel signals are then sent to the second AD conversion circuit 142 via the first interface 161 or the second interface 162. The first AD conversion circuit 141 and the second AD conversion circuit 142 perform analog-to-digital conversion on the received pixel signals on a row-by-row basis to generate a second digital signal corresponding to the pixel signals. The generated second digital signal is sent to the image processing circuit 170A via the first interface 161 or the second interface 162.

[0089] <Step of Obtaining the Difference Between the First Digital Signal and the Second Digital Signal> The image processing circuit 170A calculates the difference between the second digital signal corresponding to the pixel signal and the first digital signal corresponding to the reset signal, and outputs this difference as pixel value data. As described above, the reset signal read from the pixel after the potential of the charge accumulation region is reset has a reset noise generated by the reset superimposed thereon. In addition, the reset signal is read non-destructively, and the potential of the charge accumulation region is not reset again during the period until the pixel signal is read. Therefore, the pixel signal corresponding to the amount of charge accumulated in the charge accumulation region during the exposure period also has a reset noise superimposed thereon. According to the embodiment of the present disclosure, the first digital signal corresponding to the reset signal and the second digital signal corresponding to the pixel signal are obtained, and then the difference between these digital signals is obtained. Therefore, by subtracting the first digital signal corresponding to the reset signal, the reset noise is substantially subtracted from the second digital signal corresponding to the pixel signal, and as a result, the effect of the reset noise is effectively canceled.

[0090] Here, in the example shown in Fig. 4, for example, in the period from time t8 to time t9, the readout of pixel signals from the pixels in the 0th row R0 is executed in parallel with the readout of reset signals from the pixels in the 5th row R5. Fig. 6 shows a schematic diagram of the operation of the readout circuit 20 for the pixels in the 0th row R0 and the operation of the readout circuit for the pixels in the 5th row R5 during the 1H period from time t8 to time t9 shown in Fig. 4. In Fig. 6, φ S The graph of represents the waveform of the address control signal applied to the gate of the address transistor 24 of the read circuit 20, and φ R The graph of represents the waveform of the reset control signal applied to the gate of the reset transistor 26 of the readout circuit 20. The graph of V0 typically shows a period during which the signals read out from the pixels of the 0th row R0 are analog-to-digital converted by the first AD conversion circuit 141. In other words, it represents the output waveform from the first AD conversion circuit 141. Similarly, the graph of V5 typically shows a period during which the signals read out from the pixels of the 5th row R5 are analog-to-digital converted by the second AD conversion circuit 142. In other words, it represents the output waveform from the second AD conversion circuit 142.

[0091] As can be seen from the graphs of V5 and V0 in FIG. 6, the timing of output of the first digital signal corresponding to the reset signal for the pixel in the fifth row R5 and the timing of output of the second digital signal corresponding to the pixel signal for the pixel in the zeroth row R0 are the same here. In this way, the results of analog-digital conversion of one row of pixels Px may be output at a common timing between the first AD conversion circuit 141 and the second AD conversion circuit 142. However, it is not essential in the embodiment of the present disclosure that the outputs of the results of analog-digital conversion are the same between the first AD conversion circuit 141 and the second AD conversion circuit 142. As illustrated in FIG. 7, the timing of output of the digital signal from the first AD conversion circuit 141 and the timing of output of the digital signal from the second AD conversion circuit 142 may be shifted. Note that FIG. 7 shows the operation of the readout circuit 20 for pixels in different h-th and k-th rows in the pixel array.

[0092] As illustrated in Fig. 2, for example, a first output signal line and a second output signal line, each connected to an AD conversion circuit, are provided for each column of a plurality of pixels Px, and a portion of the plurality of pixels Px is connected to the first output signal line, while the remaining pixels are connected to the second output signal line, thereby making it possible to read out a reset signal from a pixel and read out a pixel signal from another pixel in parallel. In this way, by allowing the parallel execution of the readout of a reset signal from a pixel and the readout of a pixel signal from another pixel, it becomes possible to overlap a portion of the readout period of the reset signal with a portion of the readout period of the pixel signal, and it becomes possible to flexibly change the length of the exposure period. For example, the exposure period can be shortened to improve the frame rate.

[0093] In the example shown in FIG. 1 and FIG. 2, as shown in FIG. 8, the first AD conversion circuit 141 and the second AD conversion circuit 142 are arranged separately along two mutually opposing sides of a substantially rectangular imaging area RA including a plurality of pixels Px. Of course, the arrangement of the first AD conversion circuit 141 and the second AD conversion circuit 142 is not limited to this example. As shown in FIG. 9, the first AD conversion circuit 141 and the second AD conversion circuit 142 may be arranged near one side of the substantially rectangular imaging area RA. In addition, it is not necessary for one or both of the first AD conversion circuit 141 and the second AD conversion circuit 142 to be formed on the semiconductor substrate 110 on which the plurality of pixels Px are provided. As shown in FIG. 10, it is of course possible to arrange the first AD conversion circuit 141, the second AD conversion circuit 142, the first digital memory 151, the second digital memory 152, the image processing circuit 170A, and the like on a circuit substrate 120 other than the semiconductor substrate 110.

[0094] In the examples shown in FIGS. 8 and 9, pixels located in even-numbered rows and pixels located in odd-numbered rows of the plurality of pixels Px are connected to the first output signal line S j and the second output signal line T j However, the first output signal line S j and the second output signal line T j 11 and 12 are schematic diagrams showing other examples of pixel connection to output signal lines. In the configuration shown in FIG. 11, pixels are connected to the first output signal line S every two rows of the pixels Px. j and the second output signal line T j FIG. 12 shows an example in which the first output signal lines S are alternately connected to each of the columns of the pixels Px. j , second output signal line T j , 3rd output signal line U j and the fourth output signal line V j In the example shown in FIG. 12, four output signal lines are provided, and pixels are connected to each output signal line for every four rows of the pixels Px. j , second output signal line T j , 3rd output signal line U j and the fourth output signal line Vj A first AD conversion circuit 141, a second AD conversion circuit 142, a third AD conversion circuit 143, and a fourth AD conversion circuit 144 are connected to the AD converter 141, 142, 143, and 144, respectively.

[0095] In this manner, in the embodiment of the present disclosure, some of the pixels Px are connected to the first output signal line S connected to the first AD conversion circuit 141. j , and the other part is connected to a second output signal line T j 13, the imaging area RA may be divided into two areas, and the connection destination of a pixel may be determined to be either the first AD conversion circuit 141 or the second AD conversion circuit 142 depending on which area the pixel belongs to.

[0096] In the example shown in Fig. 13, the imaging area RA is divided into two areas, an upper area and a lower area. As shown in Fig. 13, among the multiple pixels Px, the pixels located in the lower half area of ​​the imaging area RA are connected to the first output signal line S j 1, and the pixels located in the upper half of the imaging area RA are connected to the second output signal line T j With such a connection, for example, it is possible to read out pixel signals from pixels located in the upper half of the imaging area RA on a row-by-row basis while reading out reset signals from pixels located in the lower half of the imaging area RA on a row-by-row basis. That is, by allowing an overlap between the readout period of the reset signals for some pixels and the readout period of the pixel signals for some other pixels, it is possible to obtain an effect of shortening the frame rate, for example.

[0097] (Modification of the first embodiment) In the examples described so far, when focusing on one pixel in the imaging area RA, either the first AD conversion circuit 141 or the second AD conversion circuit 142 generates both a first digital signal corresponding to a reset signal read from that pixel and a second digital signal corresponding to the pixel signal. However, as described below, depending on whether the analog signal read from the pixel is a reset signal or a pixel signal, it is also possible to switch between the first AD conversion circuit 141 and the second AD conversion circuit 142 to output a digital signal corresponding to the analog signal read from that pixel.

[0098] Fig. 14 shows a modified example of the imaging device according to the first embodiment of the present disclosure. Similar to the imaging device 100A described above, the imaging device 100B shown in Fig. 14 includes a plurality of pixels Px and first output signal lines S arranged for each column of the plurality of pixels Px. j and the second output signal line T j 14, the imaging device 100A has a plurality of sets of the first AD conversion circuit 141 and the second AD conversion circuit 142. In order to avoid overly complicating the drawing, Fig. 14 illustrates four pixels belonging to one column among the plurality of pixels Px, and also omits illustration of elements common to the imaging device 100A, such as an image processing circuit 170A.

[0099] In comparison with the imaging device 100A described above, in the example shown in FIG. 14, all pixels in the same column are connected to the first output signal line S j and the second output signal line T j However, as shown in FIG. 14, each pixel in the imaging region RA and the first output signal line S corresponding to the column to which the pixel belongs are electrically connected to both the first output signal line S j and the second output signal line T j Between them is interposed the first signal switching circuit 31. The first signal switching circuit 31 may be a part of each pixel.

[0100] Each of the first signal switching circuits 31 provided corresponding to each pixel switches the output of the pixel to the first output signal line S depending on whether the analog signal read from the pixel is a reset signal or a pixel signal. j and the second output signal line T j For example, when the output from the readout circuit 20 of a pixel is a reset signal, the first signal switching circuit 31 switches between the readout circuit 20 of the pixel and the first output signal line S j When the output from the readout circuit 20 of a pixel is a pixel signal, a connection is established between the readout circuit 20 of the pixel and the second output signal line T j The first signal switching circuit 31 can be realized in the form of a circuit including switching elements, such as field effect transistors, formed on the semiconductor substrate 110. These switching elements are operated in synchronization with the pixel readout circuit 20, for example, based on a drive signal Ds from the control circuit 220. As a result, the first signal switching circuit 31 establishes a connection between the readout circuit 20 and the first output signal line S when the readout circuit 20 outputs a reset signal. j When the pixel signal is output from the readout circuit 20, a connection is established between the readout circuit 20 and the second output signal line T j A connection can be established between.

[0101] In this configuration, the first output signal line S j The first AD conversion circuit 141 connected to the second output signal line T jThe second AD conversion circuit 142 connected to the first frame memory 171 performs analog-digital conversion of pixel signals read from each pixel. In this way, an AD conversion circuit that outputs a first digital signal and an AD conversion circuit that outputs a second digital signal may be provided in the imaging device. With this configuration, it is possible to read pixel signals from pixels in a certain row in the imaging area RA in parallel with reading reset signals from pixels in another row. This allows overlapping between the readout period of the reset signal and the readout period of the pixel signal, making it possible to flexibly change the frame rate. In addition, by calculating the difference between the first digital signal stored in the first frame memory 171 and the second digital signal corresponding to the first digital signal by the image processing circuit 170A, it is possible to effectively cancel reset noise mixed into these signals. As described with reference to FIG. 6 and FIG. 7, the timing of output of the first digital signal from the first AD conversion circuit 141 and the timing of output of the second digital signal from the second AD conversion circuit 142 may be the same or different.

[0102] Alternatively, as exemplified below, instead of between each pixel and the set of output signal lines, a signal switching circuit may be disposed between the set of output signal lines and two AD conversion circuits. FIG. 15 shows another modified example of the imaging device according to the first embodiment of the present disclosure. Compared to the imaging device 100B described with reference to FIG. 14, in the imaging device 100C shown in FIG. 15, some of the pixels belonging to the same column in the imaging area RA are connected to the first output signal line S. j , and the remaining pixels are connected to the second output signal line T j Unlike the example shown in FIG. 14, each pixel is connected to the first output signal line S j and the second output signal line T j In this example, the first signal switching circuit 31 is not disposed between the first output signal line S j and the second output signal line T j The first signal switching circuit 33 is connected between the pair and the first AD conversion circuit 141, and the first output signal line S j and the second output signal line T jThe second signal switching circuit 34 is connected between this set and the second AD conversion circuit 142 .

[0103] The first signal switching circuit 33 and the second signal switching circuit 34 switch the connection of the output signal line between the AD conversion circuit and the source follower power supply, for example, based on a drive signal Dt from the control circuit 220. As shown in FIG. 15, each of the first signal switching circuit 33 and the second signal switching circuit 34 can be configured to operate similarly to a four-way switch. However, these operations are complementary between the first signal switching circuit 33 and the second signal switching circuit 34. Here, "the first signal switching circuit 33 and the second signal switching circuit 34 operate complementarily" means that one of the first signal switching circuit 33 and the second signal switching circuit 34 switches the connection of the output signal line S j or the second output signal line T j When a connection is established between one of the first signal switching circuit 33 and the AD conversion circuit, the other of the first signal switching circuit 33 and the second signal switching circuit 34 establishes a connection between its output signal line and the source follower power supply. j When the connection between the first AD conversion circuit 141 and the first output signal line S j At this time, the first signal switching circuit 33 establishes a connection between the second output signal line T j and the source follower power supply, and the second signal switching circuit 34 is in a state where the connection between the second output signal line T j and the second AD conversion circuit 142 is in a state of being established.

[0104] Therefore, the first AD conversion circuit 141 outputs a first output signal line S j When the second AD conversion circuit 142 is connected to a first pixel via a second output signal line T j15. In this case, the first AD conversion circuit 141 is connected to another second pixel via the second output signal line T, thereby performing analog-to-digital conversion of the pixel signal output from the second pixel in parallel. Here, it is assumed that the connections in the first signal switching circuit 33 and the second signal switching circuit 34 are switched as shown diagrammatically by the dotted lines in FIG. 15. In this case, the first AD conversion circuit 141 is connected to the second output signal line T j The second AD conversion circuit 142 can perform analog-to-digital conversion of a reset signal output from the second pixel by being connected to the second pixel via the first output signal line S. j to the first pixel, it is possible to perform analog-to-digital conversion of the pixel signal output from the first pixel in parallel.

[0105] 14, one of the first AD conversion circuit 141 and the second AD conversion circuit 142 performs analog-to-digital conversion of a reset signal read from each pixel, and the other of the first AD conversion circuit 141 and the second AD conversion circuit 142 performs analog-to-digital conversion of a pixel signal read from each pixel. In the example shown in FIG. 15, pixels located in even-numbered rows of the imaging area RA are connected to the first output signal line S j , and the pixels located in the odd-numbered rows of the imaging area RA are connected to the second output signal line T j However, the connection of the pixels to the output signal line is not limited to this example. j , and the remaining pixels are connected to the second output signal line T j It is sufficient that the NI 6110 is connected to the

[0106] Second embodiment Fig. 16 is a schematic diagram of an exemplary configuration of an imaging device according to a second embodiment of the present disclosure. Compared with the imaging device 100A shown in Fig. 1, the imaging device 100D shown in Fig. 16 has an image processing circuit 170B instead of the image processing circuit 170A. As shown in Fig. 16, the image processing circuit 170B has a second frame memory 172 in addition to the first frame memory 171.

[0107] The first frame memory 171 temporarily holds a first digital signal generated from a reset signal representing a reset level, whereas the second frame memory 172 temporarily holds, for example, a second digital signal generated from a pixel signal representing an image of a subject. The image processing circuit 170B calculates and outputs a difference between the second digital signal corresponding to one frame of image data held in the second frame memory 172 and the first digital signal held in the first frame memory 171. By providing the second frame memory 172 for temporarily holding one frame of the second digital signal in addition to the first frame memory 171 in the imaging device, it is possible to obtain, for example, a difference between a digital signal corresponding to a pixel signal acquired in the next frame period and the second digital signal held in the second frame memory 172. Alternatively, it is possible to temporarily hold a digital signal corresponding to a reset signal related to a certain frame period in the first frame memory 171, and temporarily hold a digital signal corresponding to a reset signal related to the next frame period in the second frame memory 172.

[0108] (Modification of the second embodiment) Fig. 17 shows a modified example of the imaging device according to the second embodiment of the present disclosure. In the configuration shown in Fig. 17, each pixel Px shown in Fig. 17 has the same connection as that shown in Fig. 14. That is, each pixel Px of the imaging device 100E shown in Fig. 17 has a first output signal line S connected to the first AD conversion circuit 141. j and a second output signal line T connected to the second AD conversion circuit 142. j via a first signal switching circuit 31.

[0109] According to the connection described with reference to FIG. 14, the first output signal line S j A reset signal read from the pixel readout circuit 20 is output to the first output signal line T j17, the first interface 161 and the second interface 162 function as output ports for the first digital signal and the second digital signal, respectively.

[0110] The first digital signal output from the first interface 161 is stored in the first frame memory 171. On the other hand, the second digital signal output from the second interface 162 is stored in the second frame memory 172. Therefore, of the digital signals corresponding to the output from each pixel, the first digital signal can be stored in the first frame memory 171, and the second digital signal can be stored in the second frame memory 172.

[0111] Fig. 18 shows another modified example of the imaging device according to the second embodiment of the present disclosure. The imaging device 100F shown in Fig. 18 has an imaging area RA including a plurality of pixels Px, an image processing circuit 170B, and a data selector 35 electrically connected between the first AD conversion circuit 141, the second AD conversion circuit 142, and the first frame memory 171 and the second frame memory 172.

[0112] In the configuration illustrated in Fig. 18, the pixels Px of the imaging device 100F have the same connections as those illustrated in Fig. 8. That is, the pixels located in the even-numbered rows of the imaging region RA are connected to the first output signal line S j On the other hand, the pixels located in the odd-numbered rows of the imaging area RA are connected to the first AD conversion circuit 141 via the second output signal line T j , and is connected to the second AD conversion circuit 142 via the first AD conversion circuit 141. Therefore, for example, the first AD conversion circuit 141 outputs to the data selector 35 a first digital signal and a second digital signal related to pixels located in the even-numbered rows of the imaging area RA.

[0113] The data selector 35 selectively outputs the first digital signal, among the signals received from the first AD conversion circuit 141, to the first interface 161. As a result, the first digital signal related to the pixels located in the even rows of the imaging area RA is stored in the first frame memory 171. In addition, the data selector 35 selectively outputs the second digital signal, among the signals received from the first AD conversion circuit 141, to the second interface 162. That is, the second digital signal related to the pixels located in the odd rows of the imaging area RA is stored in the second frame memory 172. Similarly, the data selector 35 selectively outputs the first digital signal, among the signals received from the second AD conversion circuit 142, to the first interface 161 and selectively outputs the second digital signal to the second interface 162. That is, here, the first interface 161 and the second interface 162 function as output ports for the first digital signal and the second digital signal, respectively.

[0114] In this way, the data selector 35 outputs signals from the first AD conversion circuit 141 and the second AD conversion circuit 142 to either the first interface 161 or the second interface 162 depending on whether the inputs from these AD conversion circuits are the first digital signal corresponding to the reset signal or the second digital signal corresponding to the pixel signal. This allows the data selector 35 to distribute the first digital signal and the second digital signal, and store the first digital signal in the first frame memory 171 and the second digital signal in the second frame memory 172. The operation depending on whether the signal received from the first AD conversion circuit 141 is the first digital signal or the second digital signal can be performed by operating the data selector 35 in synchronization with the first AD conversion circuit 141 and the second AD conversion circuit 142 based on a drive signal from the control circuit 220, for example.

[0115] Fig. 19 shows yet another modified example of the imaging device according to the second embodiment of the present disclosure. Compared with the imaging device 100F shown in Fig. 18, in the imaging device 100G shown in Fig. 19, the data selector 35 is electrically connected between the first interface 161 and the second interface 162 and the first frame memory 171 and the second frame memory 172. As in the example described with reference to Fig. 18, in this example, the first digital signal and the second digital signal output from the first AD conversion circuit 141 and the second AD conversion circuit 142 are input to the first frame memory 171 and the second frame memory 172, respectively, by the data selector 35. Note that, when the first digital signal is output from the first AD conversion circuit 141, the second digital signal may be output in parallel from the second AD conversion circuit 142, and when the second digital signal is output from the first AD conversion circuit 141, the first digital signal may be output in parallel from the second AD conversion circuit 142.

[0116] (Exemplary Driving Method of Imaging Devices 100D to 100G) Here, an example of the operation of an imaging device having second frame memory 172 in addition to first frame memory 171 will be described. Fig. 20 shows an example of the operation of an imaging device having first frame memory 171 and second frame memory 172. Fig. 20 shows a schematic diagram of the operation in each of the k-th, (k+1)-th, and (k+2)-th frame periods.

[0117] 20, the kth frame period is the period from time t6, which is the start of readout of the reset signals for the pixels in the 0th row R0, to time t14, which is the completion of readout of the pixel signals for the pixels in the 5th row R5, and its length is 8 times the 1H period. Of this period, the pixel signal readout period starts at time t8 based on the rising edge of the VD pulse and ends at time t14.

[0118] 20, part of the reset signal readout period and part of the pixel signal readout period overlap. For example, in the 1H period from time t8 to time t9, the pixel signal readout from the pixel in the 0th row R0 is executed in parallel with the reset signal readout from the pixel in the 2nd row R2. The first digital signal obtained by analog-to-digital conversion of the read reset signal is temporarily stored in the first frame memory 171, and the second digital signal obtained by analog-to-digital conversion of the read pixel signal is temporarily stored in the second frame memory 172.

[0119] According to the configuration of providing the first frame memory 171 and the second frame memory 172 in the imaging device as in the present embodiment, the first digital signal and the second digital signal can be stored in the frame memory on a row-by-row basis. Therefore, while allowing an overlap between a part of the reset signal readout period and a part of the pixel signal readout period, for example, the difference between the first digital signal and the second digital signal can be calculated after the reset signal readout and pixel signal readout for all rows of the pixels Px are completed. This is therefore advantageous for shortening the exposure period. According to the present embodiment, for example, the exposure period can be made shorter than a 1V period.

[0120] In this example, the kth frame period has a length 8 times that of the 1H period, while the (k+1)th frame period has a length 10 times that of the 1H period, and the (k+2)th frame period has a length 12 times that of the 1H period. Here, the first output signal line S j and the second output signal line T j In response to the arrangement of the pixels Px, it is possible to read out signals for two pixels at a time from the same column of the pixels Px. Therefore, as shown by the thick dashed lines in Fig. 20, the exposure period can be shortened by shifting the readout of the reset signal for each row to twice the 1H period for the (k+1)th and (k+2)th frame periods. Note that shortening the exposure period is useful for shooting when the environment changes suddenly from a dark environment to a bright environment.

[0121] Conversely, when the exposure period is extended, the readout period of the reset signal for the previous frame period may overlap with the readout period of the reset signal for the subsequent frame period between two consecutive frame periods. In this case, the reset signal may not be properly read out for some rows during the readout of the reset signal in one of the two frame periods. Therefore, when the exposure period is extended, the range within which the exposure period can be extended may be set in advance so that the readout periods of the reset signal do not overlap between two consecutive frame periods.

[0122] In addition, when the exposure period is reduced, if the adjacent blanking periods are short, for example, the readout of the reset signal for pixels in a certain row and the readout of the pixel signal for another row during a previous frame period may overlap with the readout of the reset signal for pixels in yet another row during a subsequent frame period. In such a case, it may not be possible to obtain the reset signal for some rows of pixels during either the previous frame period or the subsequent frame period.

[0123] For example, when the timing of readout of reset signals for two different rows and readout of pixel signals for another row are the same 1H period, priority may be given to acquisition of a reset signal for the previous frame period. In this case, pixel signals read out from rows whose signal readout periods overlap for the subsequent frame period may be treated as invalid data. Alternatively, the reset level acquired for the previous frame period may be used again for the subsequent frame period. Conversely, when priority is given to acquisition of a reset signal for the subsequent frame period, pixel signals read out from rows whose signal readout periods overlap for the subsequent frame period may be treated as invalid data, or the reset level acquired for the frame period one frame before the previous frame period may be used.

[0124] As shown in Fig. 12, by providing three or more output signal lines for each column of pixels Px and connecting AD conversion circuits to the output signal lines individually, it becomes possible to allow parallel reading of analog signals from three or more rows of pixels. Fig. 22 shows an example of a signal read operation in a configuration in which three or more AD conversion circuits are arranged for each column of pixels Px. The operation shown in Fig. 22 is possible, for example, in a configuration in which a connection between pixels and AD conversion circuits as shown in Fig. 12 is applied to an imaging device having two frame memories as in the example described with reference to Fig. 16.

[0125] In the example shown in Fig. 21, a part of the kth frame period overlaps with a part of the (k+1)th frame period. In the example shown in Fig. 21, for example, in a 1H period from time t9 to time t10, the readout of the reset signal from the pixel in the 3rd row R3 and the readout of the pixel signal from the pixel in the 1st row R1 in the kth frame period overlap with the readout of the reset signal from the pixel in the 0th row R0 in the (k+1)th frame period.

[0126] Here, as shown in FIG. 12, the pixel in the 0th row R0, the pixel in the first row R1, the pixel in the second row R2, and the pixel in the third row R3 are each connected to the first output signal line S j , second output signal line T j , 3rd output signal line U j and the fourth output signal line V j to the first AD conversion circuit 141, the second AD conversion circuit 142, the third AD conversion circuit 143, and the fourth AD conversion circuit 144 via output signal lines. With this connection, in addition to the reset signals from the pixels in the third row R3 and the pixel signals from the pixels in the first row R1 for the k-th frame period, the reset signals from the pixels in the 0th row R0 for the (k+1)-th frame period can be read out in parallel via different output signal lines. In other words, analog signals can be read out in parallel from three or more rows of pixels.

[0127] First output signal line S j , second output signal line Tj and the fourth output signal line V j The analog signals individually read out via these are converted into digital signals by a first AD conversion circuit 141, a second AD conversion circuit 142, and a fourth AD conversion circuit 144. Of the digital signals generated by the analog-to-digital conversion, for example, a first digital signal corresponding to a reset signal is stored in a first frame memory 171, and a second digital signal corresponding to a pixel signal is stored in a second frame memory 172. As described with reference to Figs. 18 and 19, the first digital signal and the second digital signal can be distributed by connecting, for example, a data selector 35 in front of the first frame memory 171 and the second frame memory 172.

[0128] (Other variations) Fig. 22 is a schematic diagram showing yet another modified example of the imaging device. The imaging device 100H shown in Fig. 22 has an image processing circuit 170B, similar to the imaging device 100D described with reference to Fig. 16, and further has a frequency multiplier 175 connected to the image processing circuit 170B. However, compared to the imaging device 100D shown in Fig. 16, the imaging device 100H has a second output signal line T j Therefore, it does not have the second AD conversion circuit 142, the second interface 162, etc. It goes without saying that the image processing circuit 170A may be applied in place of the image processing circuit 170B.

[0129] As shown in FIG. 22, the imaging device 100H includes a plurality of first output signal lines S j A plurality of first output signal lines S j Each of the first output signal lines S is connected to a readout circuit 20 for two or more pixels that belong to the same column of the imaging area. j is connected to the first AD conversion circuit 141, similarly to the examples described so far.

[0130] The frequency multiplier 175 receives the horizontal synchronizing signal from the image processing circuit 170B and generates a pulse train with a shorter period than the horizontal synchronizing signal. This pulse train has an interval that is an equal division of the pulse interval of the horizontal synchronizing signal, and is sent from the frequency multiplier 175 to the control circuit 220. The frequency multiplier 175 is typically a circuit that performs frequency multiplication using a PLL (phase locked loop). The frequency multiplier 175 may be a part of the image processing circuit 170B or 170A, or may be a part of the row scanning circuit 130.

[0131] Fig. 23 shows a schematic example of the operation of the imaging device 100H shown in Fig. 22. The third chart from the top in Fig. 23 shows a schematic diagram of the pulses of the signal MD output from the frequency multiplier 175. Here, the pulses of the signal MD have a period that is 1 / 2 times that of the pulses of the horizontal synchronization signal HD.

[0132] For example, in the k-th frame shown in Fig. 23, a part of the reset signal readout period overlaps a part of the pixel signal readout period. Now, for example, in the period from time t3 to time t4 in this frame period, pixel signals are read out from the pixels in the 0th row R0 in the first half of this 1H period, and reset signals are read out from the pixels in the 2nd row R2 in the second half of this 1H period. In other words, pixel signals are read out from pixels in a certain row belonging to the same column of multiple pixels Px, and reset signals are read out from pixels in another certain row within the same 1H period.

[0133] The read reset signal and pixel signal are converted into a first digital signal and a second digital signal, respectively, by the first AD conversion circuit 141. Of these, at least the first digital signal is held in the first frame memory 171. At this time, the second digital signal may be held in the second frame memory 172. After completing the readout of pixel signals for all rows, the image processing circuit 170B outputs, for each pixel, the difference between the second digital signal and the first digital signal held in the first frame memory 171. This difference processing makes it possible to substantially cancel the influence of reset noise superimposed on these signals.

[0134] As in this example, a second pulse train having a higher frequency than the pulses of the horizontal synchronization signal HD may be generated, and analog signals may be read from the pixels based on the second pulse train. By reading out analog signals at intervals shorter than the pulse train of the horizontal synchronization signal HD, it is possible to obtain the effect of enabling flexible change of the frame rate while canceling the influence of reset noise, as in the above-mentioned examples, without providing two or more output signal lines for each column of the multiple pixels Px.

[0135] 23, as can be seen by focusing on the 1H period spanning time t6, the readout of the reset signal for a certain frame period can be executed before the readout of the pixel signal for the frame period immediately preceding that frame period. Therefore, even with a simpler circuit configuration, the blanking period between two frame periods can be shortened, thereby shortening the frame rate.

[0136] 22 has an image processing circuit 170B including a first frame memory 171 and a second frame memory 172. In such a configuration, the above-mentioned data selector 35 may be interposed between the first interface 161 and the image processing circuit 170B. Alternatively, an interface that selectively outputs the first digital signal and an interface that selectively outputs the second digital signal may be provided, and the data selector 35 may be interposed between these interfaces and the first AD conversion circuit 141.

[0137] As described above, according to a typical embodiment of the present disclosure, the first output signal line S is connected to each column of the plurality of pixels Px. j and the second output signal line T j Since a set of AD conversion circuits 141 and 142 is arranged corresponding to each column of the pixels Px, it is possible to read out a reset signal from a pixel in a row belonging to the same column while reading out pixel signals from pixels in another row belonging to the same column in parallel. Furthermore, since the first AD conversion circuit 141 and the second AD conversion circuit 142 are arranged corresponding to each column of the pixels Px, it is possible to sequentially convert a reset signal and a pixel signal related to a pixel in the imaging area into a digital signal by using one or both of the first AD conversion circuit 141 and the second AD conversion circuit 142. Furthermore, it is possible to shorten the frame rate and substantially cancel the effect of reset noise at the same time by storing the first digital signal corresponding to the reset signal in a frame memory and calculating the difference between the first digital signal corresponding to the pixel signal.

[0138] 1 and 16 illustrate a configuration in which the row scanning circuit 130, the control circuit 220, the first AD conversion circuit 141, the second AD conversion circuit 142, the first digital memory 151, the second digital memory 152, the first interface 161, and the second interface 162 are arranged on a semiconductor substrate 110 on which a plurality of pixels Px are formed. That is, the semiconductor substrate 110 on which a plurality of pixels Px are formed, the row scanning circuit 130, the control circuit 220, the first AD conversion circuit 141, the second AD conversion circuit 142, the first digital memory 151, the second digital memory 152, the first interface 161, and the second interface 162 may be provided in the form of an integrated package. Some or all of these circuits may be integrally formed on the semiconductor substrate 110 in addition to the readout circuit 20 of each pixel Px. That is, these circuits may be formed on the semiconductor substrate 110 by applying a process similar to the process of forming the readout circuit 20 of each pixel Px. For example, the control circuit 220 may be an integrated circuit formed on the semiconductor substrate 110. However, it is not essential that all of these circuits are integrally formed on the semiconductor substrate 110 together with each pixel Px. Some or all of these circuits may be disposed on a substrate different from the semiconductor substrate 110 on which each pixel Px is formed.

[0139] The functions of the control circuit 220 and the image processing circuits 170A and 170B described above may be realized by a combination of a general-purpose processing circuit and software, or by hardware specialized for such processing. The control circuit 220 may be configured to receive settings related to the exposure time from the image processing circuits 170A and 170B according to the processing results of the image processing circuits 170A and 170B, and to supply drive signals according to the settings related to the exposure time to the row scanning circuit 130, the first AD conversion circuit 141, the second AD conversion circuit 142, etc.

[0140] The image processing circuits 170A and 170B may be provided in the imaging device in the form of a chip or package separate from the circuit group arranged on the semiconductor substrate 110. These substrates including the semiconductor substrate 110 may be provided in a stacked form. The first frame memory 171 and / or the second frame memory 172 may be arranged in the imaging device in the form of a chip or package separate from the image processing circuits 170A or 170B. Alternatively, the image processing circuits 170A and 170B may be arranged on the semiconductor substrate 110. The image processing circuits 170A and 170B may be part of the control circuit 220. The image processing circuits 170A and 170B or the control circuit 220 may be configured to perform processing such as distance measurement calculation and wavelength information separation.

[0141] The imaging device according to the embodiment of the present disclosure may be provided in the form of a package in which the semiconductor substrate 110 on which the plurality of pixels Px are formed and the image processing circuit 170A or 170B are integrated together. The imaging device according to the embodiment of the present disclosure may be in the form of an image sensor chip or a camera. [Industrial Applicability]

[0142] The embodiments of the present disclosure can be used in various cameras and camera systems, such as digital still cameras, digital video cameras, medical cameras, security cameras, cameras mounted on vehicles, distance measuring cameras, microscope cameras, cameras for unmanned aerial vehicles called drones, and cameras for robots. Vehicle-mounted cameras can be used, for example, as input to a control device for the vehicle to travel safely. Alternatively, they can be used to assist an operator in the vehicle to travel safely. [Explanation of symbols]

[0143] 10 Photoelectric conversion unit 20 Readout circuit 31, 33 First signal switching circuit 34 Second signal switching circuit 35 Data Selector 100A~100H Imaging device 110 Semiconductor substrate 120 Circuit Board 130 Row Scanning Circuit 141 1st AD conversion circuit 142 Second AD conversion circuit 143 3rd AD conversion circuit 144 4th AD conversion circuit 145 Column signal processing circuit 161 First Interface 162 Second Interface 170A, 170B Image processing circuit 171 1st frame memory 172 Second Frame Memory 175 Frequency Multiplier 220 Control circuit Px, Px1 to Px4 pixels S j First output signal line T j Second output signal line U j 3rd output signal line V j 4th output signal line

Claims

1. a plurality of pixels arranged in a plurality of rows and columns; a first AD conversion circuit and a second AD conversion circuit that receive analog signals read from the plurality of pixels and output digital signals corresponding to the analog signals; A first frame memory; Image processing circuit Equipped with the analog signal includes a reset signal representing a reset level and a pixel signal representing an image of a subject; the first frame memory temporarily holds a first digital signal corresponding to the reset signal among the output from the first AD conversion circuit and the output from the second AD conversion circuit; the image processing circuit outputs a difference between a second digital signal corresponding to a pixel signal related to a pixel from which the reset signal is read out from among the output from the first AD conversion circuit and the output from the second AD conversion circuit, and the first digital signal held in the first frame memory; the plurality of pixels include a first pixel and a second pixel located in the same column of the plurality of columns and in different rows of the plurality of rows, the first AD conversion circuit receives the reset signal among the analog signals read out from the first pixel and the second pixel and converts it into the first digital signal; The second AD conversion circuit receives the pixel signal out of the analog signals read out from the first pixel and the second pixel and converts it into the second digital signal.

2. A plurality of pairs of first output signal lines and second output signal lines each corresponding to each of the plurality of columns, the pairs transmitting the analog signals; a plurality of first signal switching circuits each connected between each pixel and a corresponding one of the plurality of sets of the first output signal line and the second output signal line; Further equipped with the first output signal line is connected to the first AD conversion circuit; the second output signal line is connected to the second AD conversion circuit; 2. The imaging device according to claim 1, wherein the first signal switching circuit outputs the reset signal among the analog signals read out from the pixels to the first output signal line, and outputs the pixel signal among the analog signals read out from the pixels to the second output signal line.

3. A plurality of pairs of first output signal lines and second output signal lines each corresponding to each of the plurality of columns, the pairs transmitting the analog signals; a first signal switching circuit connected between the first output signal line and the first AD conversion circuit, and between the first output signal line and the second output signal line and the first AD conversion circuit; a second signal switching circuit connected between the first output signal line and the second output signal line and the second AD conversion circuit; Further equipped with The first pixel is connected to the first output signal line, The second pixel is connected to the second output signal line, The imaging device according to claim 1 , wherein the first signal switching circuit and the second signal switching circuit operate in a complementary manner.

4. An imaging device as described in claim 3, wherein each of the first signal switching circuit and the second signal switching circuit outputs the reset signal among the analog signals read out from the pixel to the first AD conversion circuit, and outputs the pixel signal among the analog signals read out from the pixel to the second AD conversion circuit.

5. 5 . The imaging device according to claim 1 , wherein a timing at which the first digital signal is output from the first AD conversion circuit and a timing at which the second digital signal is output from the second AD conversion circuit are synchronized.

6. A plurality of pixels arranged in a plurality of rows and columns; a first AD conversion circuit and a second AD conversion circuit that receive analog signals read from the plurality of pixels and output digital signals corresponding to the analog signals; a plurality of pairs of first and second output signal lines that are provided corresponding to the plurality of columns and transmit the analog signals; A first frame memory; Image processing circuit Equipped with the analog signal includes a reset signal representing a reset level and a pixel signal representing an image of a subject; the first frame memory temporarily holds a first digital signal corresponding to the reset signal among the output from the first AD conversion circuit and the output from the second AD conversion circuit; the image processing circuit outputs a difference between a second digital signal corresponding to a pixel signal related to a pixel from which the reset signal is read out from among the output from the first AD conversion circuit and the output from the second AD conversion circuit, and the first digital signal held in the first frame memory; the plurality of pixels include a first pixel and a second pixel located in the same column of the plurality of columns and in different rows of the plurality of rows, the first pixel is connected to the first AD conversion circuit via the first output signal line; the second pixel is connected to the second AD conversion circuit via the second output signal line; the first AD conversion circuit generates a digital signal corresponding to an analog signal read out from the first pixel; The second AD conversion circuit generates a digital signal corresponding to the analog signal read out from the second pixel.

7. 7. The imaging device according to claim 6, wherein a timing at which the first AD converter circuit outputs the digital signal coincides with a timing at which the second AD converter circuit outputs the digital signal.

8. The imaging device according to claim 1 , wherein the first pixel and the second pixel are located in an even row and an odd row, respectively, of the plurality of rows.

9. a second frame memory for temporarily storing the second digital signal; 9. The imaging device according to claim 1, wherein the image processing circuit outputs a difference between the first digital signal held in the first frame memory and the second digital signal held in the second frame memory.

10. a third signal switching circuit electrically connected between the first AD conversion circuit and the second AD conversion circuit, and between the first frame memory and the second frame memory; 10. The imaging device according to claim 9, wherein the third signal switching circuit selectively outputs the first digital signal, among the inputs, to the first frame memory and selectively outputs the second digital signal to the second frame memory.

11. Each of the plurality of pixels is a semiconductor substrate provided with a readout circuit electrically connected to one or both of the first AD conversion circuit and the second AD conversion circuit; a photoelectric conversion portion located above the semiconductor substrate; The imaging device according to claim 1 , further comprising:

12. A method for driving an imaging device including a plurality of pixels, each of which has a photoelectric conversion unit supported on a semiconductor substrate having an impurity region and electrically connected to a charge accumulation region including the impurity region as a part thereof, the plurality of pixels being arranged in a plurality of rows and columns, the plurality of pixels including a first pixel and a second pixel located in the same column of the plurality of columns but in different rows of the plurality of rows; (a) resetting the potential of the charge storage region; a step (b) of reading out a reset signal corresponding to the potential of the charge storage region after the step (a) is performed; (c) generating a first digital signal corresponding to the reset signal by analog-to-digital conversion; (d) storing the first digital signal in a first frame memory; a step (e) of accumulating a signal charge generated by the photoelectric conversion unit in the charge accumulation region after the step (a); a step (f) of reading out a pixel signal corresponding to the amount of charge accumulated in the charge accumulation region in the step (e); (g) generating a second digital signal corresponding to the pixel signal by analog-to-digital conversion; (h) obtaining a difference between the second digital signal and the first digital signal; A method for driving an imaging device, wherein a period of the step (b) for the first pixel and a period of the step (f) for the second pixel overlap with each other.

13. a plurality of pixels arranged in a plurality of rows and columns; a first AD conversion circuit and a second AD conversion circuit; A first frame memory; Image processing circuit Equipped with the plurality of pixels include a first pixel and a second pixel located in the same column of the plurality of columns and in different rows of the plurality of rows, the first AD conversion circuit generates a digital signal corresponding to an analog signal read out from the first pixel; the second AD conversion circuit generates a digital signal corresponding to the analog signal read out from the second pixel; the analog signal includes a reset signal representing a reset level and a pixel signal representing an image of a subject; the first frame memory temporarily holds a first digital signal corresponding to the reset signal among the output from the first AD conversion circuit and the output from the second AD conversion circuit; the image processing circuit outputs a difference between a second digital signal corresponding to a pixel signal related to a pixel from which the reset signal is read out from among the output from the first AD conversion circuit and the output from the second AD conversion circuit, and the first digital signal held in the first frame memory. Imaging device.

Images