Laser processing method for internal materials
JP7603333B2Active Publication Date: 2024-12-20OXFORD UNIVERSITY INNOVATION LTD
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Patent Information
- Application Number
- JP2023060725
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2017-08-07
- Filing Date
- 2023-04-04
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2038-08-07
Abstract
To provide a method for laser modification of a sample to form a modified region at a target location within the sample.SOLUTION: The method comprises positioning a sample in a laser system for modification by a laser; measuring tilt of a surface of the sample through which the laser focuses; using at least the measured tilt to determine a correction to be applied to an active optical element of the laser system; applying the correction to the active optical element to correct wavefront properties of the laser to counteract an effect of coma on laser focus; and laser-modifying the sample at the target location using the laser with the corrected wavefront properties to produce the modified region.SELECTED DRAWING: Figure 4
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Citation Information
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