Powder for layered modeling, paste for photolithography, and method for manufacturing layered model
JP7622519B2Active Publication Date: 2025-01-28MITSUBISHI MATERIALS CORP
Patent Information
- Application Number
- JP2021058021
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2021-03-30
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2041-03-30
Smart Images
Figure 0007622519000002 
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Abstract
To provide: a cemented carbide and cermet raw material powder suitable for laser beam lithography; a paste for laser beam lithography containing the powder suitable for laser beam lithography; and a method for producing a laminated mold composed of the cemented carbide or cermet suitable for laser beam lithography by laser beam lithography.SOLUTION: A powder for laminated mold is for producing a laminated mold by laser beam lithography and includes a composite particle comprising a plurality of hard phases composed of one or more of tungsten, titanium, tantalum, niobium, or a plurality of carbides, nitrides, or carbonitrides, and a bonding phase composed of one or more of cobalt, nickel, or iron to bond the hard phases together. When the wavelength of the laser beam used in the laser beam lithography is 220 nm or more and 500 nm or less, the absorbance of the composite particles is 1.0 or less.SELECTED DRAWING: Figure 1
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Citation Information
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