Microparticle manufacturing apparatus and method for manufacturing microparticles

Abstract

Provided are a fine particle manufacturing apparatus and a fine particle manufacturing method capable of controlling the particle size of fine particles and efficiently mass-manufacturing fine particles having good evenness of particle size. This fine particle manufacturing apparatus has: a raw material supply part that supplies a raw material for manufacturing fine particles into a thermal plasma flame; a plasma torch in which the thermal plasma flame is generated and the raw material supplied by the raw material supply part is vaporized by using the thermal plasma flame so as to form a mixture in a gas phase state; and a plasma generation part that generates the thermal plasma flame inside the plasma torch. The plasma generation part has: a first coil encircling the plasma torch; a second coil encircling the plasma torch and disposed below the first coil; a first power supply part that supplies a high-frequency electric current to the first coil; and a second power supply part that supplies an amplitude-modulated high-frequency electric current to the second coil. The first coil and the second coil are arranged in the longitudinal direction of the plasma torch.

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