Mobility measurement device

Abstract

To provide a method and a measuring device that prevent melting of a metal needle by limiting an electric current to the metal needle and does not cause denaturation of a measured sample, when measuring sheet resistance of a conductive layer formed on a conductive substrate or surface, such as a semiconductor substrate, mobility of electrons, holes, and other carriers within the conductive layer, and carrier concentration within the conductive layer.SOLUTION: In a method for measuring a high voltage generating mechanism using a piezoelectric material and a 4-terminal probe, all 2-way switches 9 fall on output terminals A1 to A4 of a 2X4 matrix switch on a 2X4 matrix switch 8 side, metal needles 13-16 are energized and ohmic formation occurs, after the ohmic formation of each metal needle is completed, the 2-way switch 9 falls on the switching side terminals B1-B4 to a measurement side of the 2-way switch to which metal needles 13-16 are connected to a 4X4 matrix switch 10, and are connected to a current source 11 and a voltmeter 12.SELECTED DRAWING: Figure 1

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