Computer-readable storage medium having recorded thereon a data structure for storing data for controlling the operation of an overlay metrology apparatus, and overlay metrology apparatus therefor

JP7629055B2Active Publication Date: 2025-02-12AUROS TECH INC
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Patent Information

Application Number
JP2023101921
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2022-11-14
Filing Date
2023-06-21
Publication Date
2025-02-12
Estimated Expiration
2043-06-21

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Abstract

To provide a computer-readable storage medium having a data structure recorded thereon for storing data for controlling the operation of an overlay metrology device, and an overlay metrology device therefor.SOLUTION: In an overlay metrology system 100, a computer-readable storage medium having a data structure recorded thereon for storing data for controlling the operation of an overlay metrology device 120 includes recipe information input by a manager program installed in a user terminal 110 such that the overlay metrology tool 120 measures the characteristics of a wafer, and specific information of the overlay metrology device 120.SELECTED DRAWING: Figure 1
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Citation Information

Patent Citations

  • Overlay measuring method and overlay measuring apparatus

    JP2015099054A

  • Device for measuring overlay

    US20220035258A1

  • System and method for application of harmonic detectivity as a quality indicator for imaging-based overlay measurements

    WO2021055407A1

  • Measurement modes for overlay

    WO2021236470A1