Leak detection system and methods for making and using same

Abstract

A leak detection sensor comprising: a dielectric substrate comprising a circuit board material; and a plurality of electrical circuits in communication with the substrate, the plurality of electrical circuits being located on different sides of the substrate.

Description

[Technical field]

[0001] TECHNICAL FIELD This disclosure relates to leak detection systems and methods of making and using same. [Background technology]

[0002] Many industrial and commercial applications involve the use of fluids, which may be used, for example, in processing steps, fabrication functions such as masking or etching, or temperature control. Some fluids may be particularly hazardous or require special care in view of adverse environmental or biological effects. Other fluids may be very valuable, and therefore leakage would result in losses for the user. Other fluids may have purity requirements, and leakage poses a risk of external contamination that may ruin the respective fluidic system.

[0003] Many industries need new ways to effectively and accurately monitor for leaks of hazardous or valuable fluids in a more sustainable and economical manner. [Brief description of the drawings]

[0004] Embodiments are illustrated by way of example and not by way of limitation in the accompanying drawings. [Figure 1] 1 includes a perspective view of an exemplary leak detection system, according to one embodiment. [Diagram 2] 1 includes side elevational views of multiple exemplary leak detection systems, according to an embodiment, positioned on a fluid interface between coupled fluid components. [Diagram 3] 1 includes a schematic diagram of a sensor including a sensing element, according to one embodiment. [Figure 4] 1 includes a cross-sectional elevation view of a sensor including a sensing element according to one embodiment. [Diagram 5] 1 includes a cross-sectional elevation view of a sensor including a sensing element according to another embodiment. [Figure 6] 1 includes a cross-sectional elevation view of a sensor including a sensing element according to another embodiment. [Figure 7]2 includes a schematic diagram of a sensor including a sensing element according to another embodiment. [Figure 8] 1 includes a cross-sectional elevation view of a sensor including a sensing element sensor according to one embodiment. [Figure 9] 1 includes a schematic diagram of another sensor including a dry sensing element, according to one embodiment. [Figure 10] 10 includes a schematic diagram of the sensor of FIG. 9 in a wet state, according to one embodiment. [Figure 11] 2 includes a schematic diagram of another sensor including a sensing element having an electrical circuit, according to one embodiment. [Figure 12] 2 includes a schematic diagram of another sensor including a sensing element having an electrical circuit, according to one embodiment. [Figure 13] 1 includes a cross-sectional elevation view of a sensor including a sensing element having two detector elements, according to one embodiment. [Figure 14] 1 includes a perspective view of a fluid conduit having multiple sensors coupled thereto, each sensor having a different mounting element, according to one embodiment. [Figure 15] 1 includes a perspective view of a leak detection system, according to one embodiment. [Figure 16] 1 includes a perspective view of a mounting element according to one embodiment. [Figure 17] 1 includes a perspective view of a leak detection array, according to one embodiment. [Figure 18A] 1 includes a bottom view of a substrate used in an exemplary leak detection system, according to one embodiment. [Figure 18B] 1 includes a bottom perspective view of a substrate used in an exemplary leak detection system, according to one embodiment. [Figure 18C] 1 includes a side view of a substrate used in an exemplary leak detection system, according to one embodiment. [Figure 19A] 1 includes a top perspective view of an exemplary leak detection system, according to one embodiment. [Figure 19B] 1 includes a side perspective view of an exemplary leak detection system, according to one embodiment. [Figure 19C] 1 includes a cross-sectional side view of an exemplary leak detection system, according to one embodiment. [Figure 19D] 1 includes a bottom view of an exemplary leak detection system, according to one embodiment. [Figure 19E] 1 includes a side perspective view of an exemplary leak detection system, according to one embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0005] The following description in combination with the drawings is provided to aid in understanding the teachings disclosed herein. The following discussion focuses on specific implementations and embodiments of the teachings. This focus is provided to help explain the teachings and should not be construed as a limitation on the scope or applicability of the teachings. However, other embodiments can be used based on the disclosed teachings.

[0006] The terms "comprises," "comprising," "includes," "including," "has," "having," or any other variations thereof, are intended to cover non-exclusive inclusions. For example, a method, article, or apparatus that includes a list of features is not necessarily limited to only those features, but may include other features not expressly listed or that are inherent to such method, article, or apparatus. Further, unless expressly stated to the contrary, "or" refers to an inclusive or, not an exclusive or. For example, a condition A or B is satisfied by any one of the following: A is true (or present) and B is false (or absent), A is false (or absent) and B is true (or present), and both A and B are true (or present).

[0007] Additionally, the use of "a" or "an" is used to describe elements and components described herein. This is done merely for convenience and to give a general sense of the scope of the invention. This description should be understood as one, at least one, or the singular as including the plural, or vice versa, unless it is clear that this is meant to be otherwise. For example, where a single item is described herein, two or more items can be used in place of the single item. Similarly, where two or more items are described herein, the two or more items can be replaced with a single item.

[0008] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention belongs. The materials, methods, and examples are illustrative only and are not intended to be limiting. To the extent not described herein, many details regarding specific materials and processing operations are conventional and can be found in textbooks and other sources in the art of fluid transport.

[0009] A leak detection system according to one or more of the embodiments described herein may generally include at least one sensor, a communication device coupled to the sensor, and a mounting element adapted to operably couple the leak detection system to an area for monitoring for fluid leaks. In one embodiment, the leak detection system may be disposed adjacent to a fluid interface on a fluid component. According to certain embodiments, the fluid component may include a junction where fluid may leak from the fluid interface, such as, for example, a pipe junction, a pipe fitting, a pipe, a pipe bend, a manifold, an elbow, a valve, a pump, a regulator, a liquid trap, a pressure vessel, a tank, a filter housing, an exhaust line, a vacuum condensate vessel, a seam or weld line, a nozzle or sprayer, a threaded port, a sampling valve, a fluid inlet or a fluid outlet, or any other similar junction. In another embodiment, the sensor may have a first modality having a first state when dry and a second state when wet. In one embodiment, the sensor may have a second modality adapted to monitor the operability of the sensor. In one embodiment, the sensor may have a third modality adapted to monitor a measurement of the sensor's battery life. In one embodiment, the sensor may have a fourth modality adapted to monitor the signal strength of the sensor. The signal strength may be a gateway communication signal between the sensor and a communication device (e.g., whether the communication device "listens" to the sensor). The communication device may transmit the status (first, second, third, or fourth) through a wireless protocol or a wired connection to a communication hub or receiving device adapted to communicate the status of the monitored area to a user or system that may respond to the leak. In certain embodiments, the attachment element may be removable, reusable, or both. That is, the attachment element may selectively engage and disengage from the fluid component being monitored, or an area or surface of the fluid component. In one embodiment, the sensor may have a dielectric substrate connected to multiple electrical circuits located on different sides of the substrate.

[0010] According to certain embodiments, the leak detection system described herein may be positioned to monitor leaks in fluid components across several different technical disciplines. For example, the leak detection system according to one or more embodiments described herein may be utilized in electronic device fabrication, such as in the semiconductor and superconductor industries, medical devices, such as fluid transfer lines and fluid transfer pumps, the oil and gas industry, pipe fittings such as those found in drinking water and sewer systems, the aerospace industry in fabrication, maintenance, and design, the food and beverage industry, and the automotive industry. In certain embodiments, the leak detection system may be attached to a fluid component housing. In certain embodiments, the leak detection system may be adapted to monitor leaks in fluids that may include at least one of HF, H2SO4, HNO3, NaClO, H2O2, H3PO4, Chemical Mechanical Planarization (CMP) fluids and slurries, HCL, deionized water, ethanol, isopropyl alcohol, acetone, hydrocarbon solvents, or toluene. In some embodiments, the fluid may be a fluid used in semiconductor manufacturing. According to yet other embodiments, the leak detection systems described herein can reduce response time to leaks by quickly and accurately detecting small fluid leaks, allowing operators to address potential leaks before they have a chance to grow larger.

[0011] According to one embodiment, the sensor may be adapted to capture a particular fluid leak. For example, the sensor may be adapted to capture a fluid leak of about 0.0001 mL to about 1 mL. In some embodiments, the sensor may be adapted to capture a fluid leak of at least about 0.0001 mL, such as at least 0.001 mL, or at least 0.01 mL, or at least 0.05 mL, or at least 0.1 mL.

[0012] FIG. 1 includes a diagram of a leak detection system 1000 including a sensor 100. As shown in FIG. 1, the leak detection system 1000 and / or the sensor 100 may generally include at least one sensing element 102 and a communication device 104. The sensing element 102 and the communication device 104 may be coupled to a common support, such as a substrate 106, that can keep the sensing element 102 and the communication device 104 spatially coupled to one another. In another embodiment, the sensing element 102 and the communication device 104 may be coupled to one another or to another object of the leak detection system 1000, allowing for removal of the substrate 106, as described below. In some embodiments, the leak detection system 1000 may optionally include a salt pack 107 that dissolves components of the fluid for better monitoring through the sensing element 102. In some embodiments, the sensing element 102 may include a dielectric substrate including a circuit board material and multiple electrical circuits in communication with the substrate and located on different sides of the substrate, as described in more detail below. Additionally, each of the multiple circuits may include a conductive trace connected to multiple pins extending therefrom, as described in more detail below.

[0013] 2 includes a side elevational view of a plurality of exemplary leak detection systems 1000, according to an embodiment, disposed on a fluid interface 114 between coupled fluid components 121. As shown in FIG. 2, at least one leak detection system 1000 may be operatively coupled to a fluid component 121 having a surface with a fluid interface 114, such as between the axial ends of a first fluid conduit 116 and a second fluid conduit 118, to monitor for fluid leakage between the axial ends. The plurality of leak detection systems 1000 may be installed anywhere on the surface or fluid interface 114 of the fluid component 121. Each leak detection system 1000 may monitor the areas 108, 110, and 112 for fluid leakage. In one embodiment, the areas 108, 110, and 112 each have a diameter of at least 2 cm. 2 , or at least 3 cm 2 , or at least 4 cm 2 , or at least 5 cm 2 , or at least 10 cm2 , or at least 20 cm 2 , or at least 30 cm 2 , or at least 40 cm 2 , or at least 50 cm 2 , or at least 75 cm 2 , or at least 100 cm 2 At least 1 cm 2 In one embodiment, regions 108, 110, and 112 may be equal in size and may have the same relative shape to one another. In another embodiment, regions 108, 110, and 112 need not have the same shape or size. That is, region 108 may be larger than region 110. Alternatively, region 112 may be generally circular while region 108 may be generally rectangular. The shapes and sizes of regions 108, 110, and 112 may depend on several factors, such as, for example, the size or sensitivity of sensing element 102, the relative position of sensing element 102, or even the type of fluid being monitored. For example, a sensing element 102 located at a lower position of a fluid conduit may monitor a larger area since fluid may pool or collect at the bottom of the fluid conduit, while a sensing element 102 located at an upper position of the fluid conduit may only monitor a smaller area since fluid may be less likely to collect at the upper position. In certain embodiments, a single leak detection system 1000 may be positioned at the lowest vertical point along a fluid conduit.

[0014] In certain cases, regions 108, 110, and 112 may be adjacent to one another, such as directly next to one another or slightly spaced apart from one another. That is, regions 108, 110, and 112 may not overlap one another. In other cases, at least two of regions 108, 110, and 112 may at least partially overlap one another. That is, at least two of regions 108, 110, and 112 may share a common area. For example, as a non-limiting embodiment, regions 108 and 110 may each be within 10 cm of one another. 2 and at least 2 cm between region 108 and region 110 2There may be overlap. Therefore, the effective monitoring area (covered by areas 108 and 110) is 18 cm 2 It becomes.

[0015] According to certain embodiments, at least two of the leak detection systems 1000 may overlap by a certain amount. For example, at least two of the leak detection systems 1000 may overlap by at least 1%, or at least 2%, or at least 3%, or at least 4%, or at least 5%, or at least 10%, or at least 25%. In another particular embodiment, at least two of the leak detection systems 1000 may overlap by 99% or less, or 98% or less, or 97% or less, or 96% or less, or 95% or less, or 90% or less, or 75% or less. In one embodiment, the two leak detection systems 1000 may overlap by at least about 1% and about 99% or less. By overlapping at least two of the regions 108, 110, and 112, the rate of missed leak detection may be reduced, which may otherwise occur if one of the leak detection systems 1000 fails.

[0016] Figure 3 includes a schematic diagram of a sensor 100 including a sensing element 102, according to one embodiment. As shown in Figure 3, in one embodiment, the sensing element 102 may include a substrate 302. In some embodiments, the sensing element 102 may include a sensing element 304. The sensing element 304 may be attached to the substrate 302, such as by an adhesive, a threaded or non-threaded fastener, a surface roughness interface, a bonding layer, a mechanical fastener, or another suitable method.

[0017] In one embodiment, the sensing element 304 may be adapted to change in response to fluid contact. In one embodiment, the sensing element 304 may be adapted to monitor the operability of the sensing element 102 or the leak detection system 1000. In one embodiment, the sensing element 304 may have a first aspect having a first state that may be adapted to change in response to fluid contact and a second aspect that may be adapted to monitor the operability of the sensing element 102 or the leak detection system 1000. In one embodiment, the sensing element 304 may include an electrical circuit. More specifically, the sensing element 304 may include an open circuit in a dry state and a closed circuit in a wet state (i.e., upon fluid contact). In a particular embodiment, the electrical circuit may include a plurality of first fingers or traces 306 and a plurality of second fingers or traces 308, where the first plurality of fingers 306 and the second plurality of fingers 308 are separated by a gap 314 having a distance D such that the first plurality of fingers 306 and the second plurality of fingers 308 are electrically disconnected from each other. The distance D may be uniform or non-uniform (e.g., wobbly or varying) between the length of the finger 306 and the length of the finger 308. In some embodiments, the distance D between the sensor traces or sensor fingers 306, 308 may range from about 0.001 mm to about 5 mm. Fluid interaction with the substrate 302 may bridge the gap 314 to create a closed circuit through which a current may flow. The sensor traces 306, 308 may each be operatively attached or connected to a number of pins 307, 309 extending from the respective traces 306, 308. The pins 307, 309 may be formed of a conductive material through which a current may flow, as is commonly known in the art. Additionally, the pins 307, 309 may be extendable from the traces 306, 308, as described in more detail below. The pins 307, 309 may be applied to any of the sensing elements, as described and exemplarily shown below. A power supply 132 (discussed in more detail below), which electrically biases the sensing element 304, can be energized when the circuit is closed.Upon such an occurrence, the sensing element 304 may switch from a first state (indicating that the sensing element 102 is dry) to a second state (indicating that the sensing element 102 is wet), causing the communication device 104 (FIG. 1) to transmit a signal communicating the occurrence of a fluid leak. Such action may be caused, for example, by a change in voltage, current or resistance, as measured by a suitable element 312 electrically coupled to the sensing element 304. The signal may be digital or analog.

[0018] In one embodiment, the sensing element 304 may include a wire with one or more unconnected segments along its length. Upon contact with a fluid, the unconnected segments may be bridged, creating a closed circuit through which current may flow. In one embodiment, at least one of the unconnected segments may have a length of at least 0.001 inches, such as at least 0.01 inches, or at least 0.1 inches, or even at least 1 inch, as measured by the shortest distance between two segments of the wire that, when bridged, closes the circuit. In another embodiment, the length of the unconnected segment may be 10 inches or less, such as 5 inches or less, or even 2 inches or less. A shorter unconnected segment length may decrease the time required to close the circuit, accelerating the speed of leak detection.

[0019] In one embodiment, the leak detection element 304 may be particularly suited to applications where the fluid being monitored is conductive, i.e., completing the circuit is accomplished by bridging the gap 314, which in turn requires a conductive medium. Exemplary conductive fluids include distilled water, salt water, alcohol, acid, and liquid metals.

[0020] In certain embodiments, the substrate 302 may include a material adapted to rapidly transport fluid from the surface being monitored to the sensing element 304. For example, the substrate 302 may include a wicking material or other suitable material with a high fluid transport rate. Exemplary materials include closed or open cell foam, woven or non-woven mesh, textiles, and polymers. It is believed that using a material with a high fluid transport rate may accelerate the transport of fluid from the fluid interface to the sensing element 304, shortening the sensing time, which in turn accelerates leak detection. In some embodiments, the substrate may be a dielectric substrate including a non-conductive material. The non-conductive material may include a polymer such as polyketone, polyaramid, polyimide, polyetherimide, polyphenylene sulfide, polyethersulfone, polysulfone, polyphenylene sulfone, polyamideimide, ultra-high molecular weight polyethylene, fluoropolymer, polyamide, polybenzimidazole, elastomer (including, but not limited to, rubber or silicone-based elastomer), thermoset material, or any combination thereof. In one example, the inner member 4 may at least partially comprise a polyketone, a polyaramid, a polyimide, a polyetherimide, a polyamideimide, a polyphenylene sulfide, a polyphenylene sulfone, a fluoropolymer, a polybenzimidazole, a derivative thereof, or a combination thereof. In a particular example, the non-conductive material may comprise a polymer, such as a polyketone, a thermoplastic polyimide, a polyetherimide, a polyphenylene sulfide, a polyether sulfone, a polysulfone, a polyamideimide, a derivative thereof, or a combination thereof. In a further example, the non-conductive material may comprise a polyketone, such as polyether ether ketone (PEEK), a polyether ketone, a polyether ketone ketone, a polyether ketone ether ketone, a derivative thereof, or a combination thereof. In a particular example, the non-conductive material may comprise a fluoropolymer.Exemplary fluoropolymers include fluorinated ethylene propylene (FEP), polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF), perfluoroalkoxy (PFA), terpolymers of tetrafluoroethylene, hexafluoropropylene, and vinylidene fluoride (THV), polychlorotrifluoroethylene (PCTFE), ethylene tetrafluoroethylene copolymer (ETFE), ethylene chlorotrifluoroethylene copolymer (ECTFE), polyacetal, polybutylene terephthalate (PBT), polyethylene terephthalate (PE), and the like. The polymer may include, but is not limited to, polyimide (PI), polyetherimide, polyetheretherketone (PEEK), polyethylene (PE), polysulfone, polyamide (PA), polyphenylene oxide, polyphenylene sulfide (PPS), polyurethane, polyester, liquid crystal polymer (LCP), any combination thereof, or may be of another type.In one embodiment, the non-conductive material may at least partially comprise a ceramic, including, but not limited to, barium titanate, bismuth strontium calcium copper oxide, boron oxide, boron nitride, porcelain, ferrite, magnesium diboride, porcelain, silicon carbide, silicon nitride, titanium carbide, zinc oxide, zirconium dioxide, stoneware, bone porcelain, any combination thereof, or may be of another type. In some embodiments, the dielectric substrate may be a non-conductive material adapted to house a circuit, such as, but not limited to, a circuit board or circuit board materials, as described in more detail below. Examples of circuit board materials include FR-1 through FR-6, CEM-1 through CEM-5, G-10 and G-11, aluminum or insulated metal substrates (IMS), polytetrafluoroethylene (PTFE), RF-35, polyimide, alumina, and flexible substrates Pyralux and Kapton.

[0021] In one embodiment, the substrate 302 may have a thickness of 10 inches or less, such as 5 inches or less, or 1 inch or less, or 0.75 inches or less, or 0.5 inches or less, or 0.1 inches or less, or even 0.01 inches or less, measured in the installed state. In another embodiment, the substrate 302 may have a thickness of at least 0.001 inches, measured in the installed state. In one embodiment, the substrate 302 may have a thickness of at least about 0.001 inches to about 10 inches, measured in the installed state. In certain cases, the substrate 302 may deform during installation. That is, the substrate 302 may elastically or plastically deform from an un-installed shape. Such deformation may allow the substrate 302 to better conform to the contours and undulations of the surface on which the leak detection system 1000 is installed. Deformation may occur through flexure, compression, or expansion of the substrate, for example, caused by the force required to secure the leak detection system 1000 to the surface.

[0022] In one embodiment, prior to placement, in a relaxed state, the substrate 302 may be substantially planar. That is, the substrate 302 may deviate from the plane by 2 inches or less, 1.5 inches or less, 1 inch or less, 0.5 inches or less, or 0.25 inches or less at any location along the plane. In another embodiment, the substrate 302 may be sufficiently flexible such that when positioned on a flat surface, the substrate 302 assumes a substantially planar shape.

[0023] In another embodiment, prior to installation, in a relaxed state, the substrate 302 may have a generally arcuate cross-section. For example, the substrate 302 may have a radius of curvature R of at least 1 inch, such as at least 2 inches, or at least 3 inches, or at least 4 inches, or at least 5 inches, or at least 6 inches, or at least 12 inches, or at least 24 inches, or even at least 48 inches. In one embodiment, R may be 0.001 inches or more. In one embodiment, R may be 0.001 inches or more and 48 inches or less. Such an arcuate shaped substrate 302 may be suitable, for example, for engagement with fluid conduits (e.g., pipes and tubing) having a circular cross-section. The radius of curvature of the substrate 302 may be selected to best fit the shape and size of the fluid conduit or surface being monitored. In certain embodiments, the substrate 302 may have an arcuate cross-section in a relaxed state and may bend when a sufficient loading condition occurs. This may allow for low strain use of the substrate 302 with the fluid conduits while allowing flexure to accommodate deviations in the surface shape and texture of the fluid conduits.

[0024] In certain instances, the substrate 302 has an installed thickness T E Different initial thickness T I T I is T E For example, T I is at least 1.01T E , or at least 1.05T E , or at least 1.1T E , or at least 1.2T E , or at least 1.3T E , or at least 1.4TE , or at least 1.5T E , or at least 2.0T E , or at least 5.0T E In one embodiment, T I is 100T E Less than or equal to 50T E or less, or 25T E In one embodiment, T I is at least 1.01T E and about 100T E It can be: T I and T E may be a measure of the absolute thickness (thickness at a particular location) or the average thickness of the substrate 302 , measured over a selected area of ​​the substrate 302 or across the entire area of ​​the substrate 302 .

[0025] The substrate 302 may define opposing major surfaces or sides, i.e., a first major surface 316 and a second major surface 318, separated by a thickness of the substrate 302. The sensing element 304 may be disposed along one of the first major surface 316 and the second major surface 318. As shown, in one embodiment, the sensing element 304 may be centrally disposed along the major surface 316 or the major surface 318. Such a central location may maximize the amount and rate of fluid interaction with the sensing element 304 by displacing the sensing element 304 equally from all edges of the substrate 302. This may reduce detection regardless of which edge of the substrate 302 the fluid first contacts. Alternatively, in one embodiment, the sensing element 304 may be disposed at a peripheral portion of the substrate 302, i.e., closer to one of the edges. Such a location may be suitable for a leak detection system 1000 having particular applications involving asymmetric interfaces.

[0026] In certain embodiments, the sensing element 304 may occupy less than 90% of the surface area of ​​the substrate 302, or less than 80% of the surface area of ​​the substrate 302, or less than 70% of the surface area of ​​the substrate 302, or less than 60% of the surface area of ​​the substrate 302, or less than 50% of the surface area of ​​the substrate, or less than 40% of the surface area of ​​the substrate, or less than 30% of the surface area of ​​the substrate, or less than 20% of the surface area of ​​the substrate, or less than 10% of the surface area of ​​the substrate, or less than 1% of the surface area of ​​the substrate. In another particular embodiment, the sensing element 304 may occupy at least 0.001% of the surface area of ​​the substrate 302. In another particular embodiment, the sensing element 304 may occupy at least about 0.001% of the surface area of ​​the substrate 302, and no more than 90% of the surface area of ​​the substrate 302.

[0027] 4 includes a cross-sectional elevation view of the sensor 100 including the sensing element 102, according to one embodiment. As shown in FIG. 4, according to a particular embodiment, the sensing element 304 may be at least partially embedded within the substrate 302. That is, at least a portion of the sensing element 304 may be disposed between the major surface 316 and the major surface 318 of the substrate 302. In a more particular embodiment, at least a portion of at least one of the first plurality of fingers 306 or the second plurality of fingers 308 may be embedded within the substrate 302. In another embodiment, all of at least one of the first plurality of fingers 306 or the second plurality of fingers 308 may be embedded within the substrate 302. In yet another embodiment, all of the first plurality of fingers 306 and the second plurality of fingers 308 may be embedded within the substrate 302. Disposing at least a portion of sensing element 304 between major surface 316 and major surface 318 may accelerate leak detection by shortening the distance, measured in a direction perpendicular to major surface 316 and major surface 318, that a fluid must travel to bridge gap 314 (FIG. 3) and close the circuit.

[0028] As shown, in one embodiment, at least one of the first plurality of fingers 306 may be vertically offset (in a direction perpendicular to major surface 316 and major surface 318) from at least one of the second plurality of fingers 308. Such positioning may accelerate sensing timing by further shortening the distance between sensing element 304 and the surface being monitored. In another embodiment, first plurality of fingers 306 and second plurality of fingers 308 may be positioned in the same relative position with respect to major surface 316 and major surface 318.

[0029] FIG. 5 illustrates a cross-sectional elevation view of a sensor 100 including a sensing element 102 according to another embodiment. As illustrated in FIG. 5, the sensing element 304 may be at least partially disposed on both the major surface 316 and the major surface 318. For example, the first sensing element 502 may be disposed on the first major surface 316 and the second sensing element 504 may be disposed on the second major surface 318. Disposing the first sensing system 502 on the first major surface 316 and the second sensing element 504 on the second major surface 318 may allow the sensing element 304 to be reversibly placed on a surface for fluid monitoring. In one embodiment, the leak sensing element 502 and the leak sensing element 504 may share a single power source 132. In one embodiment, the leak sensing element 502 and the leak sensing element 504 may each utilize a separate power source. A lithium battery or a rechargeable battery or other battery form may be used as part of the power source 132.

[0030] According to an embodiment, the sensor 100 including the sensing element 102 may include a sensing element 304 coupled to a substrate 302, where the sensing element 102 or sensing element 304 may be adapted to have one or more characteristics or measurement properties that change in response to fluid contact. In these embodiments, the sensing element 304 may include an electrical circuit. In this embodiment, the substrate 302 may define opposing major surfaces, i.e., a first major surface 316 and a second major surface 318, spaced apart by a thickness of the substrate 302. The sensing element 304 may be disposed along one of the first major surface 316 and the second major surface 318. In some embodiments, the first sensing element (or electrical circuit) 502 may be in communication with or disposed on the first major surface 316, and the second sensing element (or electrical circuit) 504 may be in communication with or disposed on the second major surface 318. The first major surface 316 may be opposite the second major surface 318. In some embodiments, the sensing elements 502, 504 may be located on adjacent surfaces of the substrate 302. In one embodiment, the leakage sensing element 502 and the leakage sensing element 504 may share a single power source 132. In one embodiment, the leakage sensing element 502 and the leakage sensing element 504 may each utilize a separate power source. A lithium battery or a rechargeable battery or other battery form may be used as part of the power source 132.

[0031] According to one embodiment, the sensing element 102 may include sensing elements 304 coupled to multiple substrates 302 that share or are operably connected to a single power source. Specifically, the sensing element may have a first substrate 302a and a second substrate 302b, where the first sensing element 502 is in communication with the first substrate 302a and the second sensing element 504 is in communication with the second substrate 302b. In one embodiment, the leakage sensing element 502 and the leakage sensing element 504 may share a single power source 132. In one embodiment, the leakage sensing element 502 and the leakage sensing element 504 may each utilize a separate power source.

[0032] As discussed above and in more detail below, sensing element 502 and sensing element 504 may each include an electrical circuit coupled to a substrate, which may include a circuit board.

[0033] 6 includes a cross-sectional elevation view of a sensor 100 including a sensing element 102 according to another embodiment. As shown in FIG. 6, in one embodiment, a single leakage sensing element 304 can be disposed on a substrate 302 such that at least one of the first plurality of fingers 306 can be adjacent to the first major surface 316 and at least one of the second plurality of fingers 308 can be adjacent to the second major surface 318. As shown, the first plurality of fingers 306 and the second plurality of fingers 308 can be disposed on the first major surface 316 and the second major surface 318, respectively. In another particular embodiment, at least one of the first plurality of fingers 306 and the second plurality of fingers 308 can be at least partially embedded within the substrate 302 adjacent to the first major surface 316 and the second major surface 318, respectively.

[0034] 4, in one embodiment, the power source 132 may be disposed adjacent to one of the major surfaces 316 or 318. In certain embodiments, the power source 132 may be disposed on the major surface 316 or 318. That is, the power source 132 may rest on the major surface 316 or 318. In operation, the opposite major surface 316 or 318 (i.e., the major surface opposite the power source) may be disposed over the surface being monitored to allow flush contact with the surface.

[0035] In another particular embodiment, the power source 132 may be partially embedded within the substrate 302 such that it is partially visible while still extending into the substrate. In yet another embodiment, as shown in Figures 5 and 6, the power source 132 may be completely embedded within the substrate 302. Electrical contacts may extend from the substrate to allow for coupling of the sensing element to a communication device.

[0036] 7 includes a schematic diagram of a sensor 100 including a sensing element 102, according to another embodiment. As shown in FIG. 7, in one embodiment, the sensing element 102 may include a sensing element 704 that defines a closed circuit in a dry state and an open circuit in a wet state (i.e., when in fluid contact). The sensing element 704 may be coupled to a substrate 702. In one embodiment, the substrate 702 may have any or all of the characteristics as described above with respect to the substrate 302. For example, the substrate 702 may have a mounting thickness T E Different initial thickness T I In another embodiment, the substrate 702 may be different from the substrate 302. For example, as described below, the application of the sensing element 704 may be best suited for use with corrosive or harmful fluids that may break or sever the continuous wire 706 upon exposure. Thus, it may be desirable to utilize a substrate adapted to withstand exposure to the damaging effects of corrosive or harmful fluids. As used herein, "wire" refers to a conductive member having a length and a thickness, where the length is greater than the thickness. Exemplary wires include cylindrical wires, wound wires, solid wires, ribbons, bands, sheets, cords, and other similar elements. The wire may be a conductive material. In some embodiments, the wire may be a metallic material, including copper.

[0037] In one embodiment, it may be desirable for the substrate 702 to degrade or become damaged upon contact with a corrosive or harmful fluid. Specifically, the substrate 702 may degrade upon contact with the fluid, causing more rapid progression of the fluid through the substrate to the sensing element.

[0038] In a particular case, the wire 706 has an overall length L, as measured by the length of the wire 706 on the substrate 702. W , which is the effective length L of the wire 706, measured by the straight-line distance between a location 708 where the wire 706 enters the substrate 702 and a location 709 where the wire exits the substrate 702. EIn one embodiment, the wire 706 can pass through the substrate 702 in a non-straight line. As shown, the wire 706 can form multiple straight line segments interconnected at 90 degree angles. The present disclosure is not intended to be limited to embodiments having 90 degree angles, but instead further includes interconnections of line segments at both acute and obtuse angles. In another embodiment, the wire 706 can have a generally serpentine shape or can be a serpentine circuit. The wire 706 can be formed in concentric circles, concentric ellipses, Z-shapes, spirals, and other shapes with an effective length L on the substrate 702. E Longer overall length L W The effective length L may have other shapes, which may include other arcuate or linear segmented shapes. E Overall length L is longer than W It is believed that wire 706 having a .mu.m diameter may increase fluid sensitivity or even decrease sensing time.

[0039] In one embodiment, the sensing element 704 may include a portion that is at least partially embedded within the substrate 702. FIG. 8 illustrates a side cross-sectional view of the sensing element 704, according to one embodiment. As illustrated in FIG. 8, the wire 706 extends in a non-straight line through the substrate 702. That is, the wire 706 extends through the substrate in multiple straight line segments interconnected at 90 degree angles. The present disclosure is not intended to be limited to embodiments having 90 degree angles, but instead further includes interconnections of line segments at both acute and obtuse angles. Positioning the wire 706 at various vertical heights within the substrate 702 may allow reversible placement of the sensing element 704 relative to the surface being monitored. Additionally, the wire 706 occupies a larger relative volume of the substrate 702, thereby accelerating the rate at which fluid contacting the substrate 702 contacts the wire 706.

[0040] In one embodiment, the sensing element may include a conductive structure having a two-dimensional matrix shape, a three-dimensional matrix shape, or a quasi-matrix shape instead of or in addition to the wires 706. In certain cases, the conductive structure may have a low flexural modulus that allows bending of the sensing element. To protect the conductive structure or to make it easier to attach the conductive structure to a surface for monitoring, a material may be positioned around the conductive structure, for example, by overmolding or extrusion.

[0041] In certain embodiments, the varying characteristic of the substrate 902 may be a measured property of the substrate 902. For example, Figures 9-10 show the sensor 100 including the sensing element 102 as seen prior to fluid contact. As shown in Figure 9, the substrate 902 has an initial length L I and initial width W I After contacting the fluid, the substrate 902 has a final length L F and final width W F In one embodiment, the measurement characteristic may vary, having L I L F It can be smaller than W I W F In another embodiment, L I L F It can be larger than W I W F The wire 906 may be larger than the wire 902. The wire 906 extending across a portion of the substrate 902 may enable detection of a change in a measured characteristic of the substrate 902. More specifically, the element 912 may measure the conductivity or another suitable characteristic of the wire 906 as it changes with the strain imposed by the substrate 902. When the conductivity or other suitable characteristic changes, the sensing system 902 may change from a first state (dry) to a second state (wet), thus enabling notification of a fluid leak. Although the wire 906 is shown as having a loop shape including multiple loops, the wire 906 may also have any shape as described above with respect to the wire 706.

[0042] In one embodiment, the substrate 902 may be formed from a material adapted to expand upon contact with a fluid. For example, the substrate 902 may include or be based on a fibrous material, a woven or nonwoven material, a matrix-based or quasi-matrix-based material, or any other suitable material adapted to expand upon contact with a fluid to effect a physical change in at least one of the sensing element 902, the sensing element 904, and / or the sensor 100 to effect leak detection.

[0043] The wires 906 may extend at least partially within the substrate 902. In one embodiment, a majority of the wires 906 may be embedded within the substrate 902. In a further embodiment, all of the wires 906 may be embedded within the substrate 902. Partial or complete burial of the wires 906 may improve the speed of fluid leak detection because forces acting on the substrate 902 may be more easily transmitted to the buried wires 606 as opposed to wires disposed on a major surface of the substrate 902.

[0044] Sensing element 904 and substrate 902 may include any or all of the features described above with respect to sensing element 304 and sensing element 704, and substrate 302 and substrate 702, respectively.

[0045] 11-12, according to one embodiment, a sensor 100 including a sensing element 102 may include a sensing element 304 coupled to a substrate 302, and the sensing element 102 or sensing element 904 may be adapted to have one or more characteristics or measurement properties that change in response to fluid contact.

[0046] In certain embodiments, the sensing element 102 may include an electric circuit, as shown in FIGS. 11-12. As shown in FIG. 3, the electric circuit may form a geometric parallel interdigitated circuit design. FIG. 11 shows a schematic diagram of another sensor having an electric circuit, according to an embodiment. As shown in FIG. 11, the electric circuit forms a geometric meander design between two wires 706 (between A and D) and 706′ (between B and C). FIG. 12 shows a schematic diagram of another sensor having an electric circuit, according to an embodiment. As shown in FIG. 12, the electric circuit forms a geometric spiral design between two wires 706 (between A and D) and 706′ (between B and C). The sensing element 102 may enable serial or parallel measurement of a measured characteristic of the electric circuit. The measured characteristic may undergo a change in response to a fluid contact that the sensing element 102 monitors and / or responds to via the communication device 104. The measured characteristic may be at least one of a resistance, an impedance, a capacitance, a current, a voltage, or another measured characteristic of the sensing element 304 or circuit. In some embodiments, the sensing element 102 may include two electrical circuits electrically connected in parallel. In some embodiments, the sensing element 102 may include two electrical circuits electrically connected in series. As noted above, each wire 706, 706' may be a conductive trace connected to a respective pin 307, 309 to form an electrical circuit. In some embodiments, the sensing element 102 may include multiple electrical circuits, each of which may include a conductive trace, the traces being connected to multiple pins extending from the traces. In other words, a first sensing element may include a first trace connected to a first pin and a second pin. A second sensing element may include a first trace connected to a first pin and a second pin. The sensing elements may be located on different sides of a substrate to detect leakage on different sides of the substrate, as described in more detail below. In some embodiments, each sensing element may have its own power source. As noted above, each sensing element may share a power source. In one embodiment, the pins may be removable or extendable, as described below.

[0047] In some embodiments, in a first phase, the circuitry of the sensing element 102 (and / or sensor 100) may be monitored to have a first state when dry and a second state when wet. In some embodiments, in the second phase, the sensing element 102 (and / or sensor 100) may be adapted to monitor the operability of the sensing element 102, i.e., to monitor the ability of the sensor to detect a leak in the first phase. In some embodiments, the operation of the sensing element 102 and leak detection system 1000 to perform these two operations is as follows: 1) measure the measurement characteristic between A and D to ensure acceptable operability of the circuit, the first sensing element 304 and the sensing element 102, 2) measure the measurement characteristic between B and C to ensure acceptable operability of the circuit, the first sensing element 304 and the sensing element 102, and 3) measure the measurement characteristic between A and B with C and D open to detect the first aspect of the circuit, the first sensing element 304 and the sensing element 102 (i.e., whether the sensor is in a first state when dry and in a second state when wet). The order of these steps can be changed and can be performed sequentially. Alternatively, the operation of the sensing element 102 and leak detection system 1000 to perform these two operations is as follows: 1) shorting points C and D to ensure acceptable operability of the circuit, the first sensing element 304 and the sensing element 102, and 3) measuring the measurement characteristic between A and B with C and D open to detect a first aspect of the circuit, the first sensing element 304 and the sensing element 102 (i.e., whether the sensor is in a first state when dry and a second state when wet).Thus, a method of using the leak detection system 1000 may include: 1) providing at least one leak detection system 1000 having a sensing element 102 having a first modality having a first state when dry and a second state when wet, and a second modality adapted to monitor operability of the sensor, a communication device 104 operably connected to the sensing element 102, and a mounting element 120 adapted to mount the leak detection system 1000 to a fluid component 121 having a fluid for monitoring for fluid leakage; and 2) mounting the at least one leak detection system 1000 to the fluid component 121 for monitoring for fluid leakage. In other embodiments, it is contemplated that the sensor may include a substrate adapted to generate luminescence, fluorescence, incandescence, a temperature change, a pressure change, or any other suitable changing characteristic in response to contact with the fluid as a result of contact with the fluid. The sensing element may be appropriately selected to sense the changing state of the substrate. For example, the sensing element may include an optical sensor, a thermocouple, or a pressure transducer. If the state of the substrate changes (luminescence, fluorescence, incandescence, temperature or pressure) as a result of contact with a fluid, the sensing element can sense the changed state and generate a signal to the communication device 104 to issue a leak alert.

[0048] FIG. 13 illustrates a cross-sectional elevation view of a sensor 100 including a sensing element 102 having two sensing elements, according to one embodiment. As shown in FIG. 13, according to one embodiment, the sensing element 102 may include at least two sensing elements 1304 and 1306 disposed on one or more substrates 1302. In certain embodiments, the sensing elements 1304 and 1306 may be disposed on the same substrate 1302. In another particular embodiment, the sensing elements 1304 and 1306 may be disposed on adjacent substrates (collectively referred to as "substrates"). The sensing elements 1304 and 1306 may be disposed on the same or different major surfaces 316 or 318 of the substrate 1302. As shown, according to another embodiment, the sensing elements 1304 and 1306 may also be at least partially embedded within the substrate 1302.

[0049] In one embodiment, the sensing element 1304 and the sensing element 1306 can be different from each other. That is, each of the at least two sensing elements 1304 and the sensing element 1306 can be adapted to sense a different condition of the substrate 1302. For example, as shown, the sensing element 1304 can be similar to the sensing element 304 described above, while the sensing element 1306 can be similar to the sensing element 1104. In certain embodiments, the sensing elements 1304 and the sensing element 1306 can be spaced apart on the substrate 1302. This can make the assembly of the sensing element 102 easier and allow for easier removal of a broken or improper sensing element. In another embodiment, the sensing elements 1304 and the sensing elements 1306 can overlap vertically or horizontally. The vertical or horizontal overlap can reduce the size of the sensor and therefore the space required to install the sensor.

[0050] In some embodiments, in a third aspect, the sensing element 102 (or sensor 100) may be used to measure the battery life of the sensing element 102 and / or the power source 132. As mentioned above, a lithium battery or a rechargeable battery or other battery form may be used as part of the power source 132. The battery life may be measured and communicated to a user as described below.

[0051] In some embodiments, in a fourth aspect, the sensing element 102 (or sensor 100) may be used to measure the signal strength of the communication device 104 and / or the sensor 100 itself. The signal strength of the sensor 100 may be measured and communicated to a user, as described below.

[0052] Any of the above-described sensing elements may further include electronic components, such as resistors, capacitors, inductors, transistors, other similar components, or any combination thereof, that may be necessary to develop a complete circuit for the above-described sensing element.

[0053] Referring again to FIG. 1 , the communication device 104 may be operatively coupled to the sensing element 102 and / or the communication hub 105. In one embodiment, the communication device 104 may transmit signals to the communication hub 105 on the four aspects of the leak detection sensing element 102. In one embodiment, the communication device and / or the communication hub 105 may include a controller or electronic control unit (ECU) adapted to manage data received from the sensor, interpret the data, and organize the data to an end user in a format to monitor fluid leaks in the leak detection system 1000. The communication device 104 and / or the communication hub 105 may include a controller including a computer or other computing device capable of understanding, analyzing, and / or executing one or more programmable languages. The controller and / or computer may include a processing unit capable of processing information provided by the sensing element 102 (or sensor 100) (e.g., leak detection, sensor operability, battery life, and signal strength). For example, the fluid leak signal from the sensing element 102 may be received by a processing unit of the communication device 104. In some embodiments, the processing unit may include a PPC-3060S 6.5" Fanless Panel PC having an Intel® Celeron® N2807 processor.

[0054] In some embodiments, the processing unit of the communication device 104 and / or the communication hub 105 may receive a signal from the sensing unit 102 having data related to the first modality or the second modality of the sensor 100. Additionally, the processing unit of the communication device 104 and / or the communication hub 105 may receive a signal from the power source 132 having data related to the third modality. Finally, the processing unit of the communication device 104 and / or the communication hub 105 may receive a signal having data related to the signal strength of the communication device 104 itself. In some embodiments, the communication device 104 may send a master signal to the communication hub 105 to send either the data itself from each of the above listed components or a calculation of whether each of the four modalities has crossed a threshold from an acceptable to an unacceptable reading. The communication hub 105 may compute from the data provided by the communication device 104 a calculation of whether each of the four modalities has exceeded a threshold from an acceptable reading to an unacceptable reading, or may compile the results of a calculation already made by the communication device 104 as to whether each of the four modalities has exceeded a threshold from an acceptable reading to an unacceptable reading. The determination of whether an unacceptable reading has been obtained may be made by the communication device 104 and / or a controller in the communication hub 105. In the first modality, for example, an acceptable reading is a first state (dry) and an unacceptable reading is a second state (wet). In the second modality, for example, an acceptable reading is that the sensor is healthy and an unacceptable reading is that the sensor is abnormal. In the third modality, for example, an acceptable reading is when the battery has a life of more than 15% of the charge of the fully charged modality and an unacceptable reading is when the battery has a life of less than 15% of the charge of the fully charged modality. In the fourth aspect, for example, an acceptable reading is when the signal has a strength that results in an RSSI value of at least -120 dBm, and an unacceptable reading is when the signal has a strength that results in an RSSI value of less than -120 dBm, all of which are exemplary and do not necessarily limit the thresholds contemplated for embodiments herein.The thresholds themselves and / or their respective severity may be modified as needed for a given application. If data is sent directly to the communications hub 105, the communications hub 105 may then calculate the thresholds and send acceptable or unacceptable readings to a Graphical User Interface ("GUI"), described in more detail below. In some embodiments, the thresholds may be further divided into grades in terms of severity, detectability, and probability. These threshold grades may be ranked by a number between 10 (very dangerous threshold) and 1 (minimal effect threshold) within these three categories. These may be viewed and / or modified by the user based on the application of the leak detection system 1000.

[0055] In certain embodiments, the communication device 104 may be wirelessly connected to the sensing element 102, the power source 132, and / or the communication hub 105. This wireless communication may be by, for example, Bluetooth or another short-range wireless protocol. In another particular embodiment, the communication device 104 may be connected to the sensing element 102 and / or the communication hub 105 by a conductive wire. Care must be taken to ensure that the conductive wire is not sensitive to the fluid being monitored. That is, the conductive wire should not be constructed from a material that will break down upon fluid contact. Alternatively, the conductive wire may be insulated or otherwise protected against damaging fluid interactions by an outer or shielding layer disposed between the wire and a channel suspected of fluid movement within the leak detection system 1000. In further embodiments, the communication device 104 may be integral with the sensing element 102 and / or the communication hub 105.

[0056] The communication device 104 and / or the communication hub 105 may be a wireless communication device or a wired communication device. That is, the communication device 104 may operate wirelessly using a wireless protocol such as HTML or HTMLS, a Local Area Network (LAN), or may operate with a wired interface. The communication device 104 may be adapted to receive an input signal from the sensing element 102 and send an output signal to the communication hub or receiving device 105 when the sensing element 102 senses a fluid leak. In this manner, the communication device 104 may be operatively connected to the communication hub 105, which may compile and analyze information from the sensing element 102 and provide feedback to a user or the sensing element 102 itself based on a first aspect (first state or second state) or a second aspect of the sensing element 102 as described herein.

[0057] In one embodiment, the communication device 104 and / or the communication hub 105 can communicate with at least one sensing element 102 using a wireless network using a Long Range (LoRa) protocol. The LoRa wireless network can include a LoRa gateway. The communication device 104 and / or the communication hub 105 can also connect with a cloud server. The communication device 104 and / or the communication hub 105 can include a LoRa sensing node, which can include a first LoRa controller and a LoRa radio module, each connected to a power source 132 and, optionally, a backup power source (not shown). A lithium battery or a rechargeable battery or other battery form can be used as part of the backup power source. A LoRa gateway can be included in at least one of the communication device 104 and / or the communication hub 105. The communication device 104 or the communication hub 105 can communicate with the other of the communication device 104 or the communication hub 105 via the LoRa gateway.

[0058] Computer program code for carrying out operations of aspects of the present invention (e.g., one or more embodiments of the sensing element 102, communication device 104, or communication hub 105) can be written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as the "C" programming language or similar programming languages. The program code can be executed completely on the user's computer, partially on the user's computer, as a standalone software package, partially on the user's computer and partially on a remote computer, or completely on a remote computer or server. In the latter scenario, the remote computer can be connected to the user's computer through any type of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or the connection can be to an external computer (e.g., through the Internet using an Internet Service Provider). At least one of the sensing element 102, communication device 104, or communication hub 105 can include a ROM or other existing storage mechanism to include a memory for recording data from the sensing element 102.

[0059] In one embodiment, the communication device 104 may operate continuously. As used herein, "operating continuously" refers to the continuous or uninterrupted transmission of signals from the communication device to, for example, the communication hub or receiving device 105. In one embodiment, the communication device 104 may operate passively. As used herein, "operating passively" refers to transmitting signals to, for example, the communication hub or receiving device 105 only upon the occurrence of a threshold condition (i.e., a fluid leak). For example, the communication device 104 may be powered by the power source 132. In one embodiment, the communication device 104 may receive power to transmit a signal to the communication hub or receiving device 105 only when the sensing element 102 senses a leak. This may extend the operational life of the leak detection system 1000 by reducing the current draw from the power source 132, thus allowing for more remote positioning of the leak detection system 1000.

[0060] As shown, in one embodiment, the communication device 104 may be exposed such that it extends beyond the outer surface of the substrate 106. Thus, the communication device 104 may be accessible such that a user may adjust or replace the communication device 104. In one embodiment, the communication device 104 may be at least partially, such as completely, embedded within the substrate 106. This may protect the communication device 104 from exposure to harmful fluids that may otherwise contact the communication device 104 when the communication device 104 is placed on the surface of the substrate 106.

[0061] In one embodiment, the communication device 104 may be removable from the substrate 106. In another embodiment, the communication device 104 may be replaceable. The electrical interface may allow for quick replacement of the communication device 104. For example, the electrical interface may consist of one or more ports having electrical connection points that match electrical connection points on the communication device 104. Various communication devices 104 may have the same arrangement of electrical connection points, thereby allowing for quick replacement and quick interchange between communication devices 104.

[0062] In some embodiments, the leak detection system 1000 may include a housing, as described in more detail below. In some embodiments, the housing may include a non-conductive material that at least partially insulates the multiple sensing elements (i.e., the electrical circuit). In some embodiments, the housing may have a funnel shape to direct liquid to the sensing elements.

[0063] With further reference to FIG. 1, the leak detection system 1000 may further include a mounting element 120 adapted to mount the leak detection system 1000 to a surface adjacent the fluid interface 114 (FIG. 2).

[0064] In one embodiment, the mounting element 120 may include a unitary body. That is, the mounting element 120 may be formed from a single piece. In another embodiment, the mounting element 120 may include a multi-piece structure. For example, the mounting element 120 may include at least two components that are engageable with each other or with the substrate 106 or one or more components disposed on the substrate 106 such that they form a single piece.

[0065] In one embodiment, the mounting element 120 may be directly coupled to the substrate 106. In one embodiment, the mounting element 120 may be indirectly coupled to the substrate 106 through the sensing element 102, the communication device 104, or some other suitable intermediate object.

[0066] The mounting element 120 can releasably couple the leak detection system 1000 to a surface for monitoring for fluid leaks. That is, in one embodiment, the mounting element 120 can be removable from the leak detection system 1000. This can allow replacement of the mounting element 120 or adjustment of the mounting element 120 relative to the leak detection system 1000. Over extended use (especially in hot or wet conditions), the mounting element 120 can deteriorate or wear out, a problem that can be significantly mitigated by periodically replacing the mounting element 120. In another embodiment, the mounting element 120 can be integral with the leak detection system 1000. For example, the mounting element 120 can be molded or otherwise fabricated into the substrate 106, the sensing element 102, or the communication device 104 such that it is inseparable therefrom, thus preventing accidental detachment during installation or extended use.

[0067] As shown in FIG. 1, in one embodiment, the mounting element 120 may include a band 122, an engagement element 124 extending from the band 122, and an opening 126 adapted to receive the engagement element 124. To install the leak detection system 1000 on a fluid conduit, the band 122 may be positioned around the fluid conduit until the engagement element 124 can engage with the opening 126. The engagement element 124 may then be inserted into the opening 126 to hold the leak detection system 1000 against the fluid conduit. In applications requiring a more secure attachment protocol, one or more additional mounting elements (e.g., mounting element 128 and mounting element 130) may be deployed along the substrate 106 or in another suitable manner as described above. The mounting elements 122, 128, and 130 may each include the same or similar attachment protocol as one another. For example, the mounting element 128 may include the engagement element 124 and the opening 126 into which the engagement element 124 may be insertable. In one embodiment, mounting elements 122 , 128 and 130 may be spaced apart along a surface of leak detection system 1000 to enhance engagement with the surface and spread the loading conditions across substrate 106 .

[0068] FIG. 14 illustrates an installed leak detection system 1402 having a band 122, an engagement element 124, and an opening 126 installed around a fluid conduit 1400. In one embodiment, as shown in FIG. 14, the band 122 may be flexible or otherwise elastically deformable. The band 122 may be adapted to stretch around the fluid conduit and provide an inward retaining force that acts to draw the substrate 106 into the fluid conduit. Exemplary materials include wovens, nonwovens, and polymers. Suitable polymers may include, for example, elastomers such as rubber. In one embodiment, the attachment element 120 has an unloaded size S, measured when placed. U and load size S, measured under load conditions L and S L is at least 1.01S U , or at least 1.1S U , or at least 1.5S U , or at least 2.0S U , or at least 5.0S U , or at least 10.0S U , or at least 20.0S U In another embodiment, S L is 200S U In one embodiment, S L is at least about 1.01S U and about 200S U The unloaded and loaded sizes may be the length of the attachment element 120, i.e., the length of the band 122, in the unloaded and loaded states, respectively.

[0069] In another embodiment, the attachment element 120 may include an elongated object 1404, such as a rope, cord, string, or other similar device. The elongated object 1404 may be wrapped around a surface of the fluid conduit 1400 to secure the leak detection system 1000 to the surface. An installed leak detection system 1406 is shown in FIG. 14 having an elongated object 1404 as the attachment element 120. As shown, the ends of the elongated object 1404 may be tied together in a knot. In one embodiment, the leak detection system 1000 may be secured to the fluid conduit 1400 by multiple elongated objects 1404. The longitudinal ends of the elongated objects 1404 may be tied together at the same relative circumferential position along the fluid conduit. Alternatively, the longitudinal ends may be arranged in an alternating manner around the circumference of the fluid conduit. In one embodiment, the elongated object 1404 may have an engagement mechanism at its longitudinal ends. For example, the elongated object 1404 may terminate in a buckle, ratchet, eyelet, ratcheting tie system, cable tie, threaded or non-threaded fastener, or any other suitable engaging element that allows for connection of opposite longitudinal ends of the elongated object 1404.

[0070] In yet another embodiment, the attachment element 120 may include a hook and loop engagement system. Similar to the leak detection system 1000 described above with the elongated object 1404, it is contemplated that the attachment element 120 may include a band 1408 of material with a hook and loop engagement. The band 1408 may be elastic or inelastic and may be wrapped around the fluid conduit 1400 such that a first portion of the band 1408 with hooks may be coupled to a second portion of the band 1408 with loops. Such engagement may be quickly removable and is unlikely to degrade over extended use. An installed leak detection system 1410 with hook and loop engagement as the attachment element 120 is shown in FIG. 14. In yet another embodiment, the attachment element 120 may include a clip, as described in more detail below.

[0071] With further reference to FIG. 14, in one embodiment, the attachment element 120 may include a system that does not extend around the entire circumference of the fluid conduit 1400 .

[0072] For example, the leak detection system 1000 may be secured to a fluid conduit by an adhesive backed material 1412. In certain embodiments, the adhesive backed material 1412 may be integral with the leak detection system 1000. In another particular embodiment, the adhesive backed material 1412 may be a separate element attached to the leak detection system 1000. As used herein, a "separate element" refers to a separate component that is or was previously separable from another object upon application of a nominal force. An installed leak detection system 1414 having an adhesive backed material 1412 as the attachment element 120 is shown in FIG.

[0073] In another embodiment, the mounting element 120 may include a fastening layer (not shown) disposed between the leak detection system 1000 and the fluid conduit 1400. The fastening layer may include a paste, gel, putty, a material having high plasticity, an epoxy resin, a liquid, or any other substance that may be applied to one or both of the fluid conduit 1400 or the leak detection system 1000. Upon curing, the fastening layer may prevent removal of the leak detection system 1000. An installed leak detection system 1416 having a fastening layer as the mounting element 120 is shown in FIG.

[0074] In one embodiment, the fastening layer may be relaxable to allow removal of the leak detection system 1000. For example, the fastening layer may soften or lose its adhesive properties upon a particular temperature, a particular pressure, a particular fluid interaction, or the introduction of a particular type of light. Thus, a user may selectively disengage the leak detection system 1000 from the fluid conduit 1400.

[0075] In yet another embodiment, the mounting element 120 may include a clamp 1418. The clamp 1418 may extend at least partially over or partially through the leak detection system 1000 to provide a radially inward compressive force to the system. In one embodiment, the clamp 1418 may include two halves (a first half 1420 and a second half 1422) adapted to mate together to secure the leak detection system 1000 to the fluid conduit 1400. An installed leak detection system 1424 having the clamp 1418 as the mounting element 120 is shown in FIG.

[0076] FIG. 15 illustrates a perspective view of a leak detection system 1500, according to one embodiment. As shown in FIG. 15, according to one embodiment, the mounting element 120 can form a substrate on which the sensing element 102 and the communication device 104 are disposed. That is, the leak detection system 1500, according to one embodiment, can include the sensing element 102 and the communication device 104 directly coupled to the mounting element 120. In certain embodiments, directly coupling the sensing element 102 and the communication device 104 to the mounting element 120 can reduce the weight of the leak detection system 1500 compared to the leak detection system 1000 described above. In addition, the leak detection system 1500 can position the sensing element 102 closer to the fluid interface 114 (FIG. 2) compared to the leak detection system 1000. In certain embodiments, the mounting element 120 can include a material having a high fluid transport rate, as described above, relative to the substrate 302. This may accelerate fluid transmission to the sensing element 102 and therefore reduce the delay time between the occurrence of a leak and notification to a user or system who can then take action to correct the leak.

[0077] As shown, the leak detection system 1500 may be disposed along a surface of the mounting element 120. In another embodiment, the leak detection system 1500 may be at least partially embedded in the mounting element 120. In yet another embodiment, the leak detection system 1500 may be fully embedded in the mounting element 120 such that the sensing element 102 is not visible. In certain embodiments, at least one of the sensing element 102 and the communication device 104 may be at least partially visible through the mounting element 120.

[0078] 16 illustrates an attachment element 1620 having a plurality of weakened portions 1622. As shown in FIG. 16, the weakened portions 1622 may allow for resizing of the attachment element 1620. That is, the weakened portions may be selectively broken to adjust the length of the attachment element 1620. In this regard, the attachment element 1620 may have an initial length, measured prior to use, and an operating length, measured prior to installation, where the operating length may be equal to or less than the initial length, such as less than the initial length.

[0079] In one embodiment, the attachment element may include only one weakened portion. In other embodiments, the attachment element may include at least two weakened portions, such as at least three weakened portions, or at least four weakened portions, or at least five weakened portions, or at least six weakened portions, or at least seven weakened portions, or at least eight weakened portions, or at least nine weakened portions, or at least ten weakened portions. In one embodiment, the attachment element may include up to 1000 weakened portions. In one embodiment, the attachment element may include at least two weakened portions and up to 1000 weakened portions.

[0080] Each weakened portion may comprise a structurally weakened portion of the mounting element. For example, the weakened portion may be defined by one or more openings through the mounting element. The openings may extend at least partially through the thickness of the mounting element. In more particular embodiments, the openings may extend completely through the thickness of the mounting element. The openings may traverse the mounting element, e.g., may be spaced apart by portions of the mounting element. The weakened portion may break when a sufficient force is generated in a transverse or generally transverse direction relative to the mounting element.

[0081] 1, the leak detection system 1000 may include a power source 132 coupled to at least one of the sensing element 102, the communication device 104, the substrate 106, or the mounting element 120. In certain embodiments, the power source 132 may include a battery or other power storage device. In more particular embodiments, the power source 132 may be rechargeable, for example, by a 120V power source. The power source 132 may be removable from the leak detection system 1000 to allow for replacement. A lithium battery or a rechargeable battery or other battery form may be used as part of the power source 132.

[0082] In one embodiment, the leak detection system 1000 can receive power from an electrical outlet. The leak detection system 1000 can include conductive wires extending from elements on the leak detection system 1000 and terminating in a plug adapted to be inserted into a wall outlet. In this regard, the leak detection system 1000 can receive a constant flow of electrical current, eliminating the need to charge or monitor the power supply to the leak detection system 1000.

[0083] Figure 17 shows a leak detection array 1700 having a plurality of leak detection systems 1702 disposed on a length of material 1710. As shown in Figure 17, the material 1710 may include a fabric, such as a woven or nonwoven fabric, a film, or another suitable substrate formed from a textile, polymer, metal, alloy, or other suitable material. In certain embodiments, the material 1710 may be flexible, allowing the leak detection array 1700 to bend.

[0084] Each leak detection system 1702 may include one or more features from the leak detection systems 100, 1402, 1406, 1410, 1414, 1416, 1424, and 1500 described above. Specifically, each leak detection system 1702 may include a sensor 1704 and a communication device 1706. In one embodiment, the leak detection systems 1702 may be identical to one another. For example, the first leak detection system and the second leak detection system of the leak detection system 1702 may be identical to one another. In another embodiment, the leak detection systems 1702 may be different from one another. For example, the first leak detection system of the leak detection system 1702 may be different from the third leak detection system of the leak detection system 1702. In another embodiment, at least two of the leak detection systems 1702 may include different leak detection systems, as described herein above. That is, the leak detection systems 1702 of the leak detection array 1700 may operate differently from one another. For example, a first leak detection system of the leak detection array 1700 may be similar to that shown in FIG. 4, and a second leak detection system of the leak detection array 1700 may be similar to that shown in FIG. 11 and FIG. 12.

[0085] In one embodiment, the leak detection array 1700 may be divisible into n divisible parts, where n is the number of leak detection systems 1702 in the leak detection array 1700. Thus, for example, a leak detection array 1700 having four leak detection systems 1702 (as shown in FIG. 17) includes four divisible parts. In certain cases, the leak detection array 1700 may include at least two leak detection systems, such as at least three leak detection systems, or at least four leak detection systems, or at least five leak detection systems, or at least ten leak detection systems, or at least twenty leak detection systems, or at least fifty leak detection systems, or at least one hundred leak detection systems. In one embodiment, the leak detection array 1700 may include up to 10,000 leak detection systems 1702. In one embodiment, the leak detection array 1700 may include at least two leak detection systems 1702 and up to 10,000 leak detection systems 1702 .

[0086] Weakened portions 1708 disposed between adjacent leak detection systems 1702 may make adjacent leak detection systems 1702 and leak detection systems 1702 easier to separate. That is, weakened portions 1708 may allow a user to selectively peel a separate leak detection system 1702 from the leak detection array 1700. In one embodiment, the weakened portions 1708 may break when a force of at least 1 N is applied, such as a force of at least 2 N, or at least 5 N, or at least 10 N, or at least 100 N. In another embodiment, the weakened portions 1708 may break when a force of 10,000 N or less is applied, such as a force of 1000 N or less, or 125 N or less. In another embodiment, the weakened portions 1708 may break when a force of at least 1 N and no more than 10,000 N is applied.

[0087] Each of the leak detection systems 1702 may be adapted to operate independently from the other leak detection systems 1702 of the leak detection array 1700. That is, each leak detection system 1702 may be autonomous and self-contained and require no additional external components for effective operation. In one embodiment, the leak detection systems 1702 may operate independently of each other or may operate in a smaller group of leak detection arrays 1702, such as, for example, two leak detection systems 1700 connected together.

[0088] In one embodiment, at least one of the leak detection systems 1702 may further include a power source 1712 coupled to at least one of the sensor 1704 and the communication device 1706. In certain embodiments, the power source 1712 may be self-activating (i.e., generating a current) upon rupture of the adjacent weakened portion 1708. This may conserve the power source 1712 until the at least one leak detection system 1702 is ready to be installed.

[0089] It is contemplated that the leak detection array 1700 may be rolled up and contained within a housing and accessible through an opening in the housing. A user may grasp an exposed portion of the leak detection array to unroll it. Once an appropriate number of leak detection systems 1702 have been unrolled, a user may tear the respective weakened portions 1708 to separate a preferred leak detection system 1702 from the remaining leak detection array 1700.

[0090] FIG. 18A includes a bottom view of a substrate used in an exemplary leak detection system, according to one embodiment. FIG. 18B includes a bottom view of a substrate used in an exemplary leak detection system, according to one embodiment. FIG. 18C includes a side view of a substrate used in an exemplary leak detection system, according to one embodiment. As discussed above, the sensing element 102 may include a substrate 302 and a sensing element 304. As discussed above, the sensing element 304 may include an electrical circuit, coupled to the substrate 302, which may include a circuit board. In some embodiments, a plurality of sensing elements 304 in the form of a plurality of electrical circuits may be coupled to the substrate 302. In some embodiments, the electrical circuit may include a conductive trace, the trace connected to a plurality of pins extending from the trace. As shown, the sensing element 304 may include a first trace 305 connected to a first pin 307 and a second pin 309. A second sensing element (not shown) on the opposite (major) surface of the substrate 302 may include a first trace, connected to the first pin and the second pin. In some embodiments, each sensing element 304 may have its own power source. Alternatively, each sensing element 304 may share a power source. In one embodiment, the pins 307, 309 may be removable. In another embodiment, as shown in FIG. 18C, a conductive wire wrap 311 may be mated with the substrate 302 and serve as a sensing element to detect leaks outside the housing 115 of the sensor 100. The conductive wire wrap 311 may be flexible, allowing the sensor 100 to be uniquely positioned over the fluid component to detect leaks in places where it is difficult to install. In this manner, the pins 307, 309 may be extendable from the circuitry and / or traces.

[0091] FIG. 19A shows a top perspective view of an exemplary leak detection system 1000 including the sensor 100. FIG. 19B includes a side perspective view of the exemplary leak detection system 1000 including the sensor 100. FIG. 19C includes a side cross-sectional view of the exemplary leak detection system 1000 including the sensor 100. As described above, the sensor 100 can include a housing 115. As shown, the housing 115 can house a substrate and can have a polygonal, circular, elliptical cross-section, or can be another shape. In some embodiments, the housing 115 can include a non-conductive material that at least partially insulates the multiple sensing elements (i.e., electrical circuits). In some embodiments, a portion of the sensing element 304 can be located through the housing 115 to detect a leak outside the housing 115. For example, a pin of the sensing element can protrude through the housing 115 to detect a leak, as shown in FIG. 19B. The housing 115 can further include a leg 121 that places the sensor 100 in a raised position. In some embodiments, as shown in FIG. 19A, the housing 115 may have a funnel shape 117 including a funnel hole 119 for funneling liquid into the sensing element to detect leaks on multiple sides of the sensor 100. As best shown in FIG. 19C, the funnel shape 117 may be inclined at an angle α from a plane from the top surface of the housing 115. The angle α may be at least 1°, such as at least 10°, such as at least 20°, such as at least 30°, such as at least 45°, such as at least 60°, such as at least 75°, or such as at least 90°. If fluid drips through the funnel hole 119 and contacts the sensing element 304, a leak may be detected as described above. FIG. 19D includes a side view of an exemplary leak detection system 1000 including the sensor 100. FIG. 19B includes a bottom view of an exemplary leak detection system 1000 including the sensor 100. As shown, the housing 115 of the sensor 100 may be polygonal shaped. Additionally, the housing 115 can include a cylindrical component 123 that can house mounting and / or sensing components, as described above.

[0092] The leak detection systems and leak detection arrays described herein may be used on a variety of fluid components to monitor for fluid leaks. Exemplary fluid components can be found in electronic device fabrication, such as in the semiconductor and superconductor industries, medical devices, such as fluid transfer lines and fluid transfer pumps, oil and gas industries, pipe fittings such as those found in drinking water systems and sewer systems, aerospace, food and beverage, and automotive industries. The leak detection system embodiments shown herein can detect leaks in hard to reach locations and provide ease of use and improved performance over known leak detection systems, thereby conserving valuable, corrosive, or purity controlled fluids and improving the performance, productivity, and cost-effectiveness of the respective fluid systems.

[0093] Many different aspects and embodiments are possible. Some of these aspects and embodiments are described herein. After reading this specification, a person skilled in the art will understand that these aspects and embodiments are merely exemplary and do not limit the scope of the present invention. The embodiment can be according to any one or more of the embodiments listed below.

[0094] Embodiment 1: A leak detection sensor comprising a dielectric substrate including a circuit board material and a plurality of electrical circuits in communication with the substrate, the plurality of electrical circuits being located on different sides of the substrate. Embodiment 2: A fluid system comprising a fluid component having a fluid and at least one leak detection sensor operably coupled to the fluid component, the leak detection sensor comprising a dielectric substrate comprising a circuit board material and a plurality of electrical circuits in communication with the substrate, the plurality of electrical circuits being located on different sides of the substrate. Embodiment 3: A method of leak detection comprising: providing at least one leak detection sensor, the leak detection sensor comprising a dielectric substrate comprising a circuit board material and a plurality of electrical circuits in communication with the substrate, the plurality of electrical circuits being located on different sides of the substrate; and operably coupling the at least one leak detection sensor to a fluid component for monitoring for fluid leakage. Embodiment 4: A leak detection sensor comprising: a first dielectric substrate; a first electrical circuit in communication with the first substrate; a second dielectric substrate separated from the first dielectric substrate; and a second electrical circuit in communication with the second substrate, wherein the first electrical circuit and the second electrical circuit are operably connected to a single power source. Embodiment 5: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 4, wherein each of the multiple electrical circuits comprises a conductive trace, and the trace is connected to a plurality of pins extending from the trace. Embodiment 6: A leak detection sensor, fluid system, or method described in any one of embodiments 1 to 5, wherein the multiple electrical circuits include a power source. Embodiment 7: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 6, wherein a first electrical circuit is located on a first surface of the substrate and a second electrical circuit is located on a second surface of the substrate opposite the first surface of the substrate. Embodiment 8: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 7, wherein the leak detection sensor further comprises a housing including a non-conductive material that at least partially insulates the multiple electrical circuits. Embodiment 9: The leak detection sensor, fluid system, or method of embodiment 7, wherein the housing has a funnel shape. Embodiment 10: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 9, wherein the multiple electrical circuits include at least one serpentine circuit. Embodiment 11: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 10, wherein the sensor undergoes a change in a measurement characteristic in response to fluid contact. Embodiment 12: A leak detection sensor, fluid system or method as described in embodiment 10, wherein the measured characteristic is at least one of the resistance, impedance, capacitance, current or voltage of the first sensing element. Embodiment 13: A leak detection sensor, fluid system, or method as described in embodiment 10, wherein the measurement characteristic is a physical change in the sensor. Embodiment 14: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 13, wherein the leak detection sensor further comprises a mounting element adapted to mount the leak detection sensor to a fluid component. Embodiment 15: The leak detection sensor, fluid system, or method of embodiment 14, wherein the mounting element is removably engageable with the fluid component for monitoring for fluid leaks. Embodiment 16: The leak detection sensor, fluid system, or method of embodiment 14, wherein the mounting component comprises a clip. Embodiment 17: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 16, wherein the fluid component is at least one of a pipe, a pipe bend, a manifold, an elbow, a pipe fitting, a valve, a pump, a tank, a filter housing, a pressure vessel, a liquid trap, an exhaust line, a vacuum condensate vessel, or a regulator. Embodiment 18: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 17, further comprising a communication hub operably connected to a communication device for compiling and analyzing information from the sensor. Embodiment 19: A leak detection sensor, fluid system, or method as described in embodiment 18, wherein the communication hub is operably connected to the communication device via a long-range wireless network. Embodiment 20: A leak detection sensor, fluid system, or method as described in any of embodiments 1 to 19, wherein the leak detection sensor is adapted to monitor leakage of fluids including at least one of HF, H2SO4, HNO3, NaClO, H2O2, H3PO4, chemical mechanical planarization (CMP) fluids and slurries, HCL, deionized water, ethanol, isopropyl alcohol, acetone, hydrocarbon solvents, or toluene. Embodiment 21: A leak detection sensor, fluid system, or method described in any of embodiments 1 to 20, wherein each of the multiple circuits includes an electronic component having a resistor, a capacitor, an inductor, a transistor, or any combination thereof.

[0095] It should be noted that not all of the above features are required, that some of the specific features may not be required, and that one or more features may be provided in addition to the features described. Still further, the order in which the features are listed is not necessarily the order in which the features are introduced.

[0096] Certain features that are, for clarity, described herein in the context of separate embodiments, may also be provided in combination in a single embodiment. Conversely, various features that are, for brevity, described in the context of a single embodiment, may also be provided separately or in any subcombination.

[0097] Benefits, other advantages, and solutions to problems have been described above with respect to specific embodiments. However, the benefits, advantages, solutions to problems, and any features that may provide or make more prominent any benefit, advantage, or solution should not be construed as critical, necessary, or essential features of any or all of the claims.

[0098] The specification and drawings of the embodiments described herein are intended to provide a general understanding of the structure of the various embodiments. The specification and drawings are not intended to serve as an exhaustive and comprehensive description of all elements and features of the apparatus and systems that use the structures or methods described herein. Separate embodiments may be provided in combination in a single embodiment, and conversely, various features that are described in the context of a single embodiment for brevity may be provided separately or in any subcombination. Furthermore, references to values ​​described in ranges include each and every value within that range. Many other embodiments may become apparent to those skilled in the art only after reading this specification. Other embodiments may be used and derived from this disclosure, such that structural substitutions, logical substitutions, or any changes may be made without departing from the scope of this disclosure. Thus, this disclosure should be considered as illustrative and not restrictive.

Claims

1. A leak detection sensor, comprising: a dielectric substrate comprising a circuit board material; A leak detection sensor comprising: a plurality of electrical circuits in communication with the substrate, the plurality of electrical circuits being located on different sides of the substrate; the leak detection sensor further comprising a housing including a non-conductive material that at least partially insulates the plurality of electrical circuits, the housing comprising a funnel-shaped or cylindrical component adjacent to the dielectric substrate and adapted to supply fluid directly to the dielectric substrate.

2. 1. A fluid system comprising: a fluidic component having a fluid; at least one leak detection sensor operably coupled to the fluid component, the leak detection sensor comprising: a dielectric substrate comprising a circuit board material; and a plurality of electrical circuits in communication with the substrate, the plurality of electrical circuits being located on different sides of the substrate, the leak detection sensor further comprising a housing including a non-conductive material that at least partially insulates the plurality of electrical circuits, the housing comprising a funnel-shaped or cylindrical component adjacent to the dielectric substrate and adapted to supply fluid directly to the dielectric substrate.

3. 1. A method of leak detection comprising: Providing at least one leak detection sensor, the leak detection sensor comprising: a dielectric substrate comprising a circuit board material; a plurality of electrical circuits in communication with the substrate, the plurality of electrical circuits being located on different sides of the substrate; operably coupling the at least one leak detection sensor to a fluid component for monitoring for fluid leakage, the leak detection sensor further comprising a housing including a non-conductive material that at least partially insulates the plurality of electrical circuits, the housing comprising a funnel-shaped or cylindrical component adjacent to the dielectric substrate and adapted to supply fluid directly to the dielectric substrate.

4. The leak detection sensor of claim 1 , wherein each of the plurality of electrical circuits comprises a conductive trace, the trace being connected to a plurality of pins extending therefrom.

5. The leak detection sensor of claim 1 , wherein the plurality of electrical circuits comprises a power source.

6. 2. The leak detection sensor of claim 1, wherein a first electrical circuit is located on a first surface of the substrate and a second electrical circuit is located on a second surface of the substrate opposite the first surface of the substrate.

7. The leak detection sensor of claim 1 , wherein the plurality of electrical circuits comprises at least one serpentine circuit.

8. The leak detection sensor of claim 1 , wherein the sensor undergoes a change in a measured characteristic in response to fluid contact.

9. The leak detection sensor of claim 1 , further comprising a mounting element adapted to mount the leak detection sensor to a fluid component.

10. 3. The fluid system of claim 2, wherein the fluid component is at least one of a pipe, a pipe bend, a manifold, an elbow, a pipe fitting, a valve, a pump, a tank, a filter housing, a pressure vessel, a liquid trap, an exhaust line, a vacuum condensate vessel, or a regulator.

11. The leak detection sensor of claim 1 , further comprising a communication hub operatively connected to a communication device for compiling and analyzing information from the sensor.

12. The leak detection sensor of claim 11 , wherein the communication hub is operatively connected to the communication device via a long-range wireless network.

13. The leak detection sensor is HF, H ２ SO ４ , HNO ３ , NaClO, H ２ O ２ , H ３ P.O. ４ 13. The leak detection sensor of claim 1, adapted to monitor leakage of fluids including at least one of: chemical mechanical planarization (CMP) fluids and slurries, HCL, deionized water, ethanol, isopropyl alcohol, acetone, hydrocarbon solvents, or toluene.

14. The leak detection sensor of claim 1 , wherein the plurality of circuits each comprise electronic components including resistors, capacitors, inductors, transistors, or any combination thereof.

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