Electro-optical devices and electronic equipment

Abstract

To provide an electro-optical device that can improve display quality, and an electronic apparatus.SOLUTION: An electro-optical device comprises: a substrate that has a recess extending in a first direction; a laminated film that has a first conductive layer, a dielectric layer, and a second conductive layer; a light-transmissive first insulating film; a light-blocking light shielding film; a light-transmissive second insulating film; and a semiconductor layer that includes a source region, a channel region, and a drain region arranged in order in the first direction. The laminated film, the first insulating film, the light shielding film, the second insulating film, and the semiconductor layer are arranged in order from the substrate. The semiconductor layer overlaps the recess and is arranged along the recess in a plain view.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to an electro-optical device and an electronic device. [Background technology]

[0002] 2. Description of the Related Art Electronic devices such as projectors use electro-optical devices such as liquid crystal display devices in which the optical characteristics can be changed for each pixel.

[0003] The electro-optical device described in Patent Document 1 includes an element substrate, an opposing substrate, and a liquid crystal layer sandwiched between these substrates. The element substrate includes a base material, various wiring lines having a light-shielding property such as scanning lines and data lines, a capacitance element, a transistor, and a pixel electrode.

[0004] In Patent Document 1, a plurality of capacitive elements are provided for each pixel. By providing a plurality of capacitive elements for each pixel, the capacitance value can be increased. In addition, the transistor, the plurality of capacitive elements, and the data lines are arranged in this order from the substrate. Light incident on the transistor is blocked by the wiring structure including the plurality of capacitive elements and the data lines. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2017-72741 A Summary of the Invention [Problem to be solved by the invention]

[0006] For these reasons, with conventional configurations, it is difficult to increase the capacitance value while suppressing a decrease in the aperture ratio, and the configuration for suppressing the intrusion of light into the transistors is complicated, which may result in a decrease in display quality. [Means for solving the problem]

[0007] One embodiment of the electro-optical device of the present invention comprises a substrate having a recess extending in a first direction, a laminate film having a first conductive layer, a dielectric layer and a second conductive layer, a first light-transmitting insulating film, a light-shielding light-shielding film, a second light-transmitting insulating film, and a semiconductor layer including a source region, a channel region and a drain region arranged in sequence in the first direction, wherein the laminate film, the first insulating film, the light-shielding film, the second insulating film and the semiconductor layer are arranged in sequence from the substrate, and the semiconductor layer overlaps the recess in a planar view and is arranged along the recess.

[0008] An electronic device according to an aspect of the present invention includes the electro-optical device described above, and a control unit that controls the operation of the electro-optical device. [Brief description of the drawings]

[0009] [Figure 1] 1 is a plan view of an electro-optical device according to an embodiment. [Diagram 2] 2 is a cross-sectional view of the electro-optical device shown in FIG. 1 taken along line AA. [Diagram 3] 2 is an equivalent circuit diagram showing an electrical configuration of the element substrate of FIG. 1. [Figure 4] 3 is a plan view showing a part of the element substrate of FIG. 2. [Diagram 5] 3 is a cross-sectional view showing a part of the element substrate of FIG. 2. [Figure 6] 3 is a cross-sectional view showing a part of the element substrate of FIG. 2. [Figure 7] 6 is an enlarged cross-sectional view of a first recess shown in FIG. 5. [Figure 8] FIG. 7 is a plan view corresponding to the line DD in FIGS. 5 and 6. [Figure 9] FIG. 7 is a plan view corresponding to the line EE in FIGS. 5 and 6. [Figure 10] 4 is a diagram showing the planar positional relationship between a first recess, a first element portion, a scanning line, a semiconductor layer, and a gate electrode. FIG. [Figure 11] FIG. 7 is a plan view corresponding to the line FF in FIGS. 5 and 6. [Figure 12] FIG. 7 is a plan view corresponding to the line GG in FIGS. 5 and 6. [Figure 13] 7 is a plan view corresponding to the line HH in FIG. 5 and FIG. 6. [Figure 14] 5A to 5C are diagrams illustrating a flow of a part of a manufacturing method for an element substrate. [Figure 15] 11A to 11C are views for explaining a recess forming step. [Figure 16] 1A to 1C are diagrams for explaining a capacitive element forming step. [Figure 17] 11A to 11C are views for explaining a first insulating film forming step and a scanning line forming step. [Figure 18] 11A to 11C are views for explaining a second insulating film forming step and a semiconductor layer forming step. [Figure 19] 6 is a diagram for explaining reflection of light on the scanning line shown in FIG. 5. FIG. [Figure 20] FIG. 1 is a perspective view showing a personal computer as an example of an electronic device. [Figure 21] FIG. 1 is a plan view showing a smartphone as an example of an electronic device. [Figure 22] FIG. 1 is a schematic diagram illustrating a projector as an example of an electronic device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Note that the dimensions or scale of each part in the drawings may differ from the actual dimensions, and some parts are shown diagrammatically to facilitate understanding. Furthermore, the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description to the effect that the present invention is limited thereto.

[0011] 1. Electro-optical device 1A.Basic configuration FIG. 1 is a plan view of an electro-optical device 100 according to an embodiment. FIG. 2 is a cross-sectional view of the electro-optical device 100 shown in FIG. 1 taken along line AA. In FIG. 1, the opposing substrate 3 is omitted. In the following description, the X-axis, Y-axis, and Z-axis, which are orthogonal to each other, are appropriately used. In addition, one direction along the X-axis is referred to as the X1 direction, and the opposite direction to the X1 direction is referred to as the X2 direction. Similarly, one direction along the Y-axis is referred to as the Y1 direction, and the opposite direction to the Y1 direction is referred to as the Y2 direction. In the following description, the Z1 direction or the Z2 direction is referred to as a "planar view." In the following description, the X-direction is the X1 direction or the X2 direction. The Y-direction is the Y1 direction or the Y2 direction. The Z-direction is the Z1 direction or the Z2 direction.

[0012] The electro-optical device 100 shown in Figures 1 and 2 is a transmissive electro-optical device of an active matrix driving system. As shown in Figure 2, the electro-optical device 100 has an element substrate 2, a counter substrate 3, a frame-shaped seal member 4, and a liquid crystal layer 5. The element substrate 2, the liquid crystal layer 5, and the counter substrate 3 are arranged in this order in the Z1 direction. Furthermore, the shape of the electro-optical device 100 shown in Figure 1 in a plan view is rectangular, but it may be, for example, circular.

[0013] The element substrate 2 shown in Fig. 2 is a substrate having a plurality of TFTs (Thin Film Transistors) to be described later. The element substrate 2 has a first substrate 21 having light-transmitting properties, a laminated body 22 having light-transmitting properties, a plurality of pixel electrodes 25 having light-transmitting properties, and a first alignment film 29 having light-transmitting properties. Although not shown, the element substrate 2 also has a plurality of dummy pixel electrodes surrounding the plurality of pixel electrodes 25 in a planar view. Note that "light-transmitting properties" refers to transparency to visible light, and preferably refers to a visible light transmittance of 50% or more.

[0014] The first substrate 21, the laminate 22, the pixel electrodes 25, and the first alignment film 29 are laminated in this order in the Z1 direction. The first substrate 21 is an example of a "substrate". The first substrate 21 is a flat plate having translucency and insulation. The first substrate 21 is, for example, a glass substrate or a quartz substrate. The laminate 22 has a plurality of insulating layers having translucency and various wirings arranged between the insulating layers. The first substrate 21 and the laminate 22 will be described later. The pixel electrodes 25 are translucent and conductive. The pixel electrodes 25 are used to apply an electric field to the liquid crystal layer 5. The pixel electrodes 25 include, for example, a transparent conductive material such as ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), and FTO (Fluorine-doped tin oxide). The first alignment film 29 is translucent and insulating. The first alignment film 29 aligns the liquid crystal molecules of the liquid crystal layer 5. The first alignment film 29 is disposed so as to cover the plurality of pixel electrodes 25. The material of the first alignment film 29 is, for example, polyimide and silicon oxide.

[0015] The counter substrate 3 is a substrate disposed opposite the element substrate 2. The counter substrate 3 has a second substrate 31 having light-transmitting properties, an inorganic insulating layer 32 having light-transmitting properties, a common electrode 33 having light-transmitting properties, and a second alignment film 34 having light-transmitting properties. Although not shown, the counter substrate 3 has a light-shielding partition surrounding the plurality of pixel electrodes 25 in a plan view. Note that "light-shielding properties" refers to light-shielding properties against visible light, and preferably refers to a visible light transmittance of less than 50%, more preferably 10% or less.

[0016] The second substrate 31, the inorganic insulating layer 32, the common electrode 33, and the second alignment film 34 are laminated in this order in the Z2 direction. The second substrate 31 is a flat plate having translucency and insulation. The second substrate 31 is, for example, a glass substrate or a quartz substrate. The inorganic insulating layer 32 has translucency and insulation, and is formed of an inorganic material containing silicon, such as silicon oxide. The common electrode 33 is a counter electrode disposed with respect to the plurality of pixel electrodes 25 via the liquid crystal layer 5. The common electrode 33 is used to apply an electric field to the liquid crystal layer 5. The common electrode 33 has translucency and conductivity. The common electrode 33 includes, for example, a transparent conductive material such as ITO, IZO, and FTO. The second alignment film 34 has translucency and insulation. The second alignment film 34 aligns the liquid crystal molecules of the liquid crystal layer 5. The material of the second alignment film 34 is, for example, polyimide, silicon oxide, or the like.

[0017] The sealing member 4 is disposed between the element substrate 2 and the opposing substrate 3. The sealing member 4 is formed using an adhesive or the like containing various curable resins such as epoxy resin. The sealing member 4 may contain a gap material made of an inorganic material such as glass.

[0018] The liquid crystal layer 5 is disposed within a region surrounded by the element substrate 2, the counter substrate 3, and the seal member 4. The optical properties of the liquid crystal layer 5 change in response to an electric field. The liquid crystal layer 5 contains liquid crystal molecules having positive or negative dielectric anisotropy. The orientation of the liquid crystal molecules changes in response to a voltage applied to the liquid crystal layer 5.

[0019] 1, a plurality of scanning line driving circuits 11, a data line driving circuit 12, and a plurality of external terminals 13 are arranged on the element substrate 2. Some of the plurality of external terminals 13 are connected to wiring (not shown) drawn from the scanning line driving circuit 11 or the data line driving circuit 12. The plurality of external terminals 13 also include a terminal to which a common potential is applied. This terminal is electrically connected to a common electrode 33 of the counter substrate 3 via wiring and a conductive material (not shown).

[0020] The electro-optical device 100 has a display region A10 for displaying an image, and a peripheral region A20 located outside the display region A10 in a planar view. A plurality of pixels P arranged in a matrix are provided in the display region A10. A plurality of pixel electrodes 25 are arranged in a one-to-one correspondence with the plurality of pixels P. The above-mentioned common electrode 33 is provided in common to the plurality of pixels P. The peripheral region A20 surrounds the display region A10 in a planar view. A scanning line driving circuit 11 and a data line driving circuit 12 are arranged in the peripheral region A20.

[0021] In this embodiment, the electro-optical device 100 is a transmissive type. Specifically, in this embodiment, as shown in Fig. 2, light LL is incident on the counter substrate 3, and the light that has entered the counter substrate 3 is modulated while it is being emitted from the element substrate 2, thereby displaying an image. Note that an image may also be displayed by modulating the light that has entered the element substrate 2 while it is being emitted from the counter substrate 3.

[0022] The electro-optical device 100 is also applied to a display device that performs color display, such as a personal computer and a smartphone, which will be described later. When applied to such a display device, a color filter is appropriately used for the electro-optical device 100. The electro-optical device 100 is also applied to a projection-type projector, which will be described later. In this case, the electro-optical device 100 functions as a light valve. In this case, the color filter is omitted for the electro-optical device 100.

[0023] 1B. Electrical configuration of element substrate 2 Fig. 3 is an equivalent circuit diagram showing an electrical configuration of the element substrate 2 of Fig. 1. The laminate 22 of the element substrate 2 is provided with a plurality of transistors 23, n scanning lines 241, m data lines 242, and n constant potential lines 243 shown in Fig. 3. n and m are each an integer of 2 or more. The transistors 23 are arranged corresponding to each intersection of the n scanning lines 241 and the m data lines 242. Each transistor 23 is, for example, a TFT (thin film transistor) that functions as a switching element. Each transistor 23 includes a gate, a source, and a drain.

[0024] Each of the n scanning lines 241 extends in the X1 direction, and the n scanning lines 241 are arranged at equal intervals in the Y1 direction. Each of the n scanning lines 241 is electrically connected to the gates of the corresponding transistors 23. The n scanning lines 241 are electrically connected to the scanning line driving circuit 11 shown in Fig. 1. Scanning signals G1, G2, ..., and Gn are supplied line-sequentially to the 1st to nth scanning lines 241 from the scanning line driving circuit 11.

[0025] Each of the m data lines 242 shown in Fig. 3 extends in the Y1 direction, and the m data lines 242 are arranged at equal intervals in the X1 direction. Each of the m data lines 242 is electrically connected to the sources of the corresponding transistors 23. The m data lines 242 are electrically connected to the data line driving circuit 12 shown in Fig. 1. Image signals S1, S2, ..., and Sm are supplied in parallel to the 1 to m data lines 242 from the data line driving circuit 12.

[0026] 3 are electrically insulated from each other and arranged in a lattice pattern in plan view. An area surrounded by two adjacent scanning lines 241 and two adjacent data lines 242 corresponds to a pixel P. Each pixel electrode 25 is electrically connected to the drain of a corresponding transistor 23.

[0027] Each of the n constant potential lines 243 extends in the Y1 direction, and the n constant potential lines 243 are arranged at equal intervals in the X1 direction. The n constant potential lines 243 are electrically insulated from the m data lines 242 and the n scanning lines 241, and are arranged at intervals from these. A fixed potential such as a ground potential is applied to each of the constant potential lines 243. Each of the n constant potential lines 243 is a capacitance line electrically connected to a corresponding capacitance element 26. Each capacitance element 26 is a storage capacitance for storing the potential of the pixel electrode 25, and is arranged to overlap the transistor 23 in a planar view. The multiple capacitance elements 26 are electrically connected to the multiple pixel electrodes 25 in a one-to-one relationship. The multiple capacitance elements 26 are electrically connected to the drains of the multiple transistors 23 in a one-to-one relationship.

[0028] When the scanning signals G1, G2, ..., and Gn are successively activated and n scanning lines 241 are successively selected, the transistor 23 connected to the selected scanning line 241 is turned on. Then, image signals S1, S2, ..., and Sm having a magnitude corresponding to the gradation to be displayed are taken into the pixel P corresponding to the selected scanning line 241 via m data lines 242 and applied to the pixel electrode 25. As a result, a voltage corresponding to the gradation to be displayed is applied to the liquid crystal capacitance formed between the pixel electrode 25 and the common electrode 33 in FIG. 2, and the orientation of the liquid crystal molecules changes according to the applied voltage. In addition, the applied voltage is held by the capacitance element 26. Such a change in the orientation of the liquid crystal molecules modulates light, enabling gradation display.

[0029] 1C. Structure of element substrate 2 FIG. 4 is a plan view showing a part of the element substrate 2 in FIG. 2. FIG. 4 corresponds to the line BB in FIG. 2, and shows a part of the element substrate 2 in the display area A10. As shown in FIG. 4, a plurality of pixel electrodes 25 of the element substrate 2 are arranged in a matrix form, spaced apart from each other. The region in which the pixel electrodes 25 are arranged in a plan view is an aperture A11 through which light passes. The frame-shaped region located between the plurality of apertures A11 in a plan view is a light-shielding region A12. In the light-shielding region A12, the transistor 23, the capacitance element 26, and various wirings such as the scanning line 241, the data line 242, and the constant potential line 243 shown in FIG. 3 are arranged. The pixel electrode 25 is connected to the transistor 23 and the capacitance element 26 through a contact hole 2511.

[0030] 5 and 6 are cross-sectional views showing a part of the element substrate 2 in FIG. 2. FIGS. 5 and 6 correspond to a cross-section of region C indicated by a two-dot chain line in FIG. 4. FIG. 5 is a cross-sectional view mainly taken along the extension direction (X direction) of the scanning lines 241, and FIG. 6 is a cross-sectional view mainly taken along the extension direction (Y direction) of the data lines 242. The extension direction of the scanning lines 241 is the "first 2 The extension direction of the data line 242 is an example of the "first direction". 1 This is an example of "direction."

[0031] As described above, the element substrate 2 has the first substrate 21, the laminate 22, a plurality of pixel electrodes 25, and the first alignment film 29. The element substrate 2 will be described below with reference to FIGS. 5 and 6, which are cross-sectional configurations in the X and Y directions, and with reference to FIGS. 7 to 13, which will be described later.

[0032] The first substrate 21 shown in FIG. 5 and FIG. 6 is, as described above, made of, for example, a glass substrate or a quartz substrate. The first substrate 21 has a first recess 211, a second recess 212, and a third recess 213. The first recess 211 is an example of a "recess". The first recess 211, the second recess 212, and the third recess 213 are recesses formed in the first substrate 21, and are formed for each transistor 23. The first recess 211 is disposed in the Y direction along the data line 242, and the second recess 212 and the third recess 213 are disposed in the X direction along the scanning line 241, spaced apart from the first recess 211. In this embodiment, the depths of the first recess 211, the second recess 212, and the third recess 213 in the Z2 direction are equal to each other.

[0033] FIG. 7 is an enlarged cross-sectional view of the first recess 211 shown in FIG. 5. The first recess 211 has a shape in which the surface of the first substrate 21 is open, and includes a side surface 2113 facing the bottom surface 2111 in the Z2 direction. The first recess 211 is elongated in a plan view, and has a width in the X direction and a length in the Y direction (see FIG. 8). The distance in the Z2 direction between the surface of the first substrate 21 and the bottom surface 2111 is the depth D1. The depth D1 is the length in the Z1 direction from the opening 2112 to the bottom surface 2111. The width W1 is the length of the bottom surface 2111 in the X1 direction. The width W2 is the length of the opening 2112 in the X1 direction. The depth D1 of the first recess 211 is greater than the width W1 of the bottom surface 2111 of the first recess 211. The bottom surface 2111 is a surface along the XY plane. Further, the depth D1 is greater than the width W2 of the opening 2112 of the first recess 211. When the capacitive element 26 is formed in the first recess 211, the distance of the opening is a width W3.

[0034] The ratio (D1 / W1) of the depth D1 to the width W1 of the first recess 211 is preferably, for example, 1.5 or more. Furthermore, the ratio (D1 / W2) of the depth D1 to the width W2 is, for example, 1.4 or more.

[0035] The depth D1 depends on the characteristics and ease of formation of the capacitance element 26, but is, for example, 0.5 μm to 2.0 μm. The width W1 is, for example, 0.2 μm to 1.0 μm. The width W2 is, for example, 0.3 μm to 1.5 μm.

[0036] 8 is a plan view corresponding to the line DD in FIG. 5 and FIG. 6, and a laminated film including a first conductive layer 261, a dielectric layer 263, and a second conductive layer 262, and an insulating layer 221 are formed on the surface including the first recess 211, the second recess 212, and the third recess 213 of the first substrate 21. The first recess 211 is elongated and extends in the Y1 direction in a plan view. The second recess 212 and the third recess 213 extend in the X2 direction and the X1 direction, respectively. The first recess 211 is located between the second recess 212 and the third recess 213 and spaced apart in a plan view.

[0037] The capacitance element 26 is disposed on the first substrate 21. The capacitance element 26 has a first conductive layer 261, a dielectric layer 263, and a second conductive layer 262. The first conductive layer 261, the dielectric layer 263, and the second conductive layer 262 are laminated in this order in the Z1 direction. The first conductive layer 261 contacts the first substrate 21. The dielectric layer 263 is disposed between the first conductive layer 261 and the second conductive layer 262. The film in which the first conductive layer 261, the dielectric layer 263, and the second conductive layer 262 are laminated in this order in the Z1 direction is an example of a "laminated film." Note that the first conductive layer 261 and the first substrate 21 may have a light-transmitting layer.

[0038] The capacitance element 26 has a portion extending in the Y direction, a portion extending in the X direction, and an intersection portion between them. In addition, the capacitance element 26 overlaps with the first recess 211, the second recess 212, and the third recess 213 in a plan view. Specifically, the capacitance element 26 widely covers the first recess 211, the second recess 212, and the third recess 213. At one end of the capacitance element 26 in the Y2 direction, a cutout portion 2710 is formed in the dielectric layer 263 and the second conductive layer 262 to electrically connect the first conductive layer 261 to the pixel electrode 25, etc. The cutout portion 2710 and the first recess 211 do not overlap in a plan view. In addition, a portion electrically connecting the second conductive layer 262 and the constant potential line 243 at one end of the capacitance element 26 in the X1 direction does not overlap with the second recess 212 and the third recess 213 in a plan view. A portion of the capacitance element 26 is disposed in the first recess 211, the second recess 212, and the third recess 213. The capacitance element 26 is formed along the shape of the surface in the Z1 direction of the first substrate 21. Therefore, the capacitance element 26 is formed along the shapes of the first recess 211, the second recess 212, and the third recess 213. The first conductive layer 261, the dielectric layer 263, and the second conductive layer 262 are formed in this order with uniform film thicknesses, etc., on the front surface, bottom surface 2111, and side surface 2113 of the first substrate 21, and a stable capacitance element 26 can be formed.

[0039] The capacitive element 26 has a first element portion 265, a second element portion 266, and a third element portion 267. The first element portion 265 is a portion disposed in the first recess 211, and corresponds to a "trench portion." The second element portion 266 is a portion disposed in the second recess 212. The third element portion 267 is a portion disposed in the third recess 213.

[0040] The material of the first conductive layer 261 and the second conductive layer 262 is preferably, for example, a polysilicon film having low light shielding properties and high conductivity, but may be a metal such as titanium, a metal oxide, or a metal nitride. In the case of polysilicon, the polysilicon contains impurities such as phosphorus (P). The dielectric layer 263 is preferably, for example, a silicon nitride film having low light shielding properties and high dielectric constant, but may be a metal oxide film such as aluminum oxide, hafnium oxide, or silicon oxide, a metal nitride film such as silicon nitride, or a multilayer film in which these metal oxide films and metal nitride films are stacked.

[0041] The thickness of each of the first conductive layer 261 and the second conductive layer 262 is, for example, 0.03 μm to 0.2 μm. The thickness of the dielectric layer 263 is, for example, 0.01 μm to 0.03 μm. The thickness of the laminated film is, for example, 0.13 μm to 0.26 μm. The first conductive layer 261, the dielectric layer 263, and the second conductive layer 262 can be formed at the same time. The laminated film may be formed uniformly along the shape of the first recess 211, and may have a stable characteristic as long as the capacitance element 26 is formed. In addition, it is preferable that the thickness of the second conductive layer 262, which is the upper side, is larger than the thickness of the first conductive layer 261, which is the lower side.

[0042] 7, the width W3 of the opening 260 of the first element portion 265 of the capacitive element 26 is smaller than the depth D1 of the first recess 211. In the illustrated example, the width W3 is smaller than the width W1 of the first recess 211. However, the width W3 may be greater than or equal to the width W1 depending on the inclination angle of the side surface 2113 of the first recess 211 relative to the bottom surface 2111, etc. The width W3 is the length of the opening 260 of the first element portion 265 in the X1 direction. Each of the widths W1, W2, and W3 described above may be greater than or equal to the depth D1.

[0043] The laminate 22 is disposed on the first substrate 21 so as to cover the capacitive element 26. The laminate 22 has a plurality of insulating layers 221, 222, 223, 224, 225, 226, and 227 arranged in the Z1 direction. The insulating layers 221 to 227 are transparent and insulating. The materials of the insulating layers 221 to 227 are inorganic materials containing silicon, such as silicon oxide and silicon oxynitride. The insulating layers 221 and 222 constitute an "insulating layer". The insulating layer 221 is an example of a "first insulating layer", the insulating layer 222 is an example of a "second insulating layer", and the insulating layer 224 is an example of a "third insulating layer". The insulating layers 221 and 222 are formed to a thickness of, for example, 0.2 μm to 0.6 μm. The insulating layer 221 fills the recessed region of the first substrate 21, and the thickness of the filled region in the Z2 direction becomes thicker.

[0044] A plurality of wirings and the like are arranged in the laminate 22. Specifically, the laminate 22 includes a transistor 23, a scanning line 241, a data line 242, a constant potential line 243, and a capacitance element 26. Furthermore, the laminate 22 includes relay electrodes 271, 272, 273, 274, 275, 276, 277, 278, and 279 for connecting various wirings. The transistor 23 includes a gate electrode 232 and a semiconductor layer 231, and the relay electrode 273 as a drain electrode and the relay electrode 274 as a source electrode are connected to the semiconductor layer 231, respectively. The relay electrode 273 is an example of a "drain electrode", and the relay electrode 274 is an example of a "source electrode".

[0045] The insulating layer 221 is disposed on the first substrate 21 so as to cover the capacitive element 26, and is disposed so as to fill the spaces in the first recess 211, the second recess 212, and the third recess 213. Therefore, the first recess 211, the second recess 212, and the third recess 213 are filled with the insulating layer 221, and the thickness of the insulating layer 221 in the Z direction in each space is formed to be thicker than other regions. Depending on the shape of the first recess 211 and the like and the forming conditions of the insulating layer 221, the insulating layer 221 can be formed into the shape shown in FIG. 7, but a planarization process such as a CMP method may be performed on the surface of the insulating layer 221 opposite to the first substrate 21.

[0046] The scanning line 241 is disposed on the insulating layer 221. The scanning line 241 is an example of a "light-shielding film." The scanning line 241 has light-shielding properties and electrical conductivity. As shown in FIG. 7, the scanning line 241 has a portion 2410 recessed toward the first element portion 265 of the capacitive element 26. Since a part of the scanning line 241 is formed on the first recess 211, the portion 2410 is formed due to the influence of the first recess 211. The surface of the insulating layer 221 in the Z1 direction also has a portion recessed toward the first element portion 265.

[0047] An insulating layer 222 is disposed on the scanning line 241. As shown in Fig. 7, the surface of the insulating layer 222 in the Z1 direction is a flat surface. By stacking the insulating layer 222, the influence of the first recess 211 is mitigated, and as a result, the surface of the insulating layer 222 in the Z1 direction becomes a flat surface.

[0048] A semiconductor layer 231 is disposed on the insulating layer 222, and a transistor 23 is disposed on the semiconductor layer 231. The transistor 23 has a semiconductor layer 231, a gate electrode 232, and a gate insulating film 233. The gate electrode 232 is disposed on the insulating layer 223. The gate insulating film 233 is interposed between the gate electrode 232 and a channel region 231a of the semiconductor layer 231. A region of the insulating layer 223 corresponding to the gate electrode 232 corresponds to the gate insulating film 233.

[0049] The semiconductor layer 231 has an LDD (Lightly Doped Drain) structure. Specifically, the semiconductor layer 231 has a channel region 231a, a drain region 231b, a source region 231c, a low-concentration drain region 231d, and a low-concentration source region 231e. The channel region 231a is located between the drain region 231b and the source region 231c. The low-concentration drain region 231d is located between the channel region 231a and the drain region 231b. The low-concentration source region 231e is located between the channel region 231a and the source region 231c. The semiconductor layer 231 is formed of, for example, polysilicon. The region other than the channel region 231a is doped with an impurity that increases conductivity. The impurity concentration in the low-concentration drain region 231d is lower than the impurity concentration in the drain region 231b. The impurity concentration in the low-concentration source region 231e is lower than the impurity concentration in the source region 231c. For example, the low concentration source region 231e may be omitted.

[0050] The gate insulating film 233 is composed of a silicon oxide film formed by, for example, thermal oxidation or a CVD (chemical vapor deposition) method. The gate electrode 232 is formed by, for example, doping polysilicon with an impurity that enhances electrical conductivity. The gate electrode 232 may be formed using a material having electrical conductivity, such as a metal, a metal oxide, or a metal compound.

[0051] The gate electrode 232 is disposed in contact holes 2321 and 2322 for connection to the scanning line 241. The contact holes 2321 and 2322 penetrate the insulating layers 222 and 223 and reach the scanning line 241. In addition to the gate electrode 232, a part of the relay electrode 272 is disposed on the insulating layer 223. The relay electrode 272 is disposed in a contact hole 2721 for connection to the second conductive layer 262 of the capacitance element 26. The contact hole 2721 penetrates the insulating layers 221 to 223 and reaches the second conductive layer 262. The relay electrode 272 is positioned apart from the gate electrode 232 in the X1 direction in a plan view. A part of the relay electrode 272 overlaps with the scanning line 241 in a plan view. A part of the relay electrode 271 is disposed on the insulating layer 223. The relay electrode 271 is disposed in a contact hole 2711 for connection to the first conductive layer 261 of the capacitance element 26. The contact hole 2711 penetrates the insulating layers 221 to 223 and reaches the first conductive layer 261. The relay electrode 271 is positioned to be spaced apart from the gate electrode 232 in the Y2 direction in a plan view.

[0052] Fig. 9 is a plan view corresponding to the EE lines in Fig. 5 and Fig. 6. On the insulating layer 221 of Fig. 8, a scanning line 241, an insulating layer 222, a semiconductor layer 231, an insulating layer 223, a gate electrode 232, relay electrodes 271 and 272, and an insulating layer 224 are formed. In the semiconductor layer 231, the drain region 231b, the low concentration drain region 231d, the channel region 231a, the low concentration source region 231e, and the source region 231c are arranged in this order along the Y1 direction in a plan view. The width of the semiconductor layer 231 in the X direction is, for example, 0.3 μm. In a plan view, the semiconductor layer 231 has an elongated shape that extends linearly in the Y direction. Note that the drain electrode formation region of the drain region 231b and the source electrode formation region of the source region 231c may be formed to be wide. The scanning line 241 has a width of, for example, 0.5 to 1 μm and extends in the X direction in a plan view. The scanning line 241 overlaps with the semiconductor layer 231 at a wide portion and includes a protruding portion extending from the wide portion in the Y1 direction and the Y2 direction. The wide portion and the protruding portion widely cover the semiconductor layer 231 from the first substrate 21 side. The scanning line 241 is electrically connected to the gate electrode 232 via contact holes 2321 and 2322 at the wide portion. The gate electrode 232 overlaps with the channel region 231a of the semiconductor layer 231 in a plan view. In addition, the low-concentration drain region 231d is located between the contact holes 2321 and 2322 in which the gate electrode 232 is disposed in a plan view, and overlaps with the scanning line 241. As a result, the low-concentration drain region 231d is shielded from light from both sides in the X direction and from the Z2 direction side.

[0053] Fig. 10 is a diagram showing the planar positional relationship between the first recess 211, the first element portion 265, the scanning line 241, the semiconductor layer 231, and the gate electrode 232. Fig. 7 is a cross-sectional view corresponding to the line JJ in Fig. 10. The first recess 211 is disposed along the semiconductor layer 231 in a planar view and overlaps with the semiconductor layer 231. Therefore, the first element portion 265 of the capacitive element 26 shown in Fig. 8 is disposed along the semiconductor layer 231 in a planar view and overlaps with the semiconductor layer 231. Furthermore, the portion 2410 of the scanning line 241 overlaps with the first recess 211, the first element portion 265, and the low-concentration drain region 231d in a planar view.

[0054] In the illustrated example, the width W1 of the bottom surface 2111 of the first recess 211 is equal to or smaller than the width W0 of the source region 231c of the semiconductor layer 231. The width W1 may exceed the width W0. The width W0 is the length along the X1 direction. The width W0 of the source region 231c and the width of the drain region 231b are equal to each other. In the illustrated example, the width W1 of the bottom surface 2111 of the first recess 211 is smaller than the width of the channel region 231a, but may be equal to or larger than the width of the channel region 231a. Although not illustrated in detail, the width W3 of the opening 260 of the first element portion 265 is equal to or smaller than the width W0 of the source region 231c. The width W3 may exceed the width W0.

[0055] As shown in FIG. 9, in addition to the gate electrode 232, a part of the relay electrode 272 is disposed on the insulating layer 223.

[0056] The relay electrode 271 extends in the Y1 direction and is connected to the relay electrode 273. The relay electrode 271 disposed in the contact hole 2711 can block light directed toward the low-concentration drain region 231d and the drain region 231b of the semiconductor layer 231 in the Y1 direction, including oblique directions.

[0057] Fig. 11 is a plan view corresponding to the line FF in Fig. 5 and Fig. 6. The insulating layer 225 is formed so as to cover the relay electrodes 273, 274, and 275. The relay electrode 273 overlaps a part of the semiconductor layer 231 in a planar view. The relay electrode 274 overlaps a part of the semiconductor layer 231 in a planar view, and is disposed spaced apart from the relay electrode 273 in the Y1 direction. The relay electrode 275 is disposed spaced apart from the relay electrode 273 in the X1 direction in a planar view. The relay electrode 273 extends in the Y1 direction and has a wide portion 246 overlapping the drain region 231b and the low-concentration drain region 231d of the semiconductor layer 231.

[0058] A part of the relay electrode 275 is disposed on the insulating layer 224. The relay electrode 275 is disposed in a contact hole 2751 for connection to the relay electrode 272. The contact hole 2751 penetrates the insulating layer 224 and reaches the relay electrode 272.

[0059] Furthermore, a part of the relay electrode 273 and a part of the relay electrode 274 are disposed on the insulating layer 224. The relay electrode 273 is disposed in a contact hole 2731 for connecting to the drain region 231b of the semiconductor layer 231 and the relay electrode 271. The contact hole 2731 penetrates the insulating layers 223 and 224 and reaches the drain region 231b. Furthermore, a part of the contact hole 2731 penetrates the insulating layer 224 and reaches the relay electrode 271. Furthermore, the relay electrode 274 is disposed in a contact hole 2741 for connecting to the source region 231c of the semiconductor layer 231. The contact hole 2741 penetrates the insulating layers 223 and 224 and reaches the source region 231c. The relay electrode 273 can block light directed in the Z2 direction, including the oblique direction, with respect to the low concentration drain region 231d and the drain region 231b of the semiconductor layer 231 by the wide portion 246 and the contact hole 2731. An insulating layer 225 is formed covering the relay electrodes 273 , 274 , and 275 .

[0060] 12 is a plan view corresponding to the GG line in FIG. 5 and FIG. 6, and the data line 242 and the relay electrodes 276, 277 are formed on the insulating layer 225. As shown in FIG. 12, the relay electrode 276 is arranged to be spaced apart from the corresponding data line 242 in the X1 direction in a plan view. The relay electrode 277 is arranged to be spaced apart from the corresponding data line 242 in the X2 direction in a plan view. The data line 242 extends in the Y direction and overlaps the semiconductor layer 231 in a plan view. For example, the width of the data line 242 is 0.5 to 1 μm.

[0061] On the insulating layer 225, a part of the relay electrode 276, a part of the relay electrode 277, and the data line 242 are disposed.

[0062] The relay electrode 276 is disposed in a contact hole 2761 for connection to the relay electrode 275. The contact hole 2761 penetrates the insulating layer 225 and reaches the relay electrode 275. The relay electrode 277 is disposed in a contact hole 2771 for connection to the relay electrode 273. The contact hole 2771 penetrates the insulating layer 225 and reaches the relay electrode 273.

[0063] The data line 242 is disposed in a contact hole 2421 for connection to the relay electrode 274. The contact hole 2421 penetrates the insulating layer 225 and reaches the relay electrode 274. The data line 242 is electrically connected to the source region 231c of the semiconductor layer 231 via the relay electrode 274. The insulating layer 226 is formed covering the data line 242 and the relay electrodes 276 and 277 .

[0064] 5 and 6, a constant potential line 243 and relay electrodes 278, 279 are disposed on an insulating layer 226. The relay electrode 278 is disposed so as to protrude in the X1 direction relative to the corresponding constant potential line 243 in a plan view, and is connected to the constant potential line 243. The relay electrode 279 is disposed in the X2 direction relative to the corresponding constant potential line 243 in a plan view. The constant potential line 243 extends in the Y direction with a width of, for example, 0.5 to 1 μm, and overlaps with each of the data line 242 and the semiconductor layer 231 in a plan view. The insulating layer 227 is disposed over the constant potential line 243 and the relay electrodes 278 , 279 .

[0065] A part of the relay electrode 278, a part of the relay electrode 279, and the constant potential line 243 are disposed on the insulating layer 226. The relay electrode 278 and the constant potential line 243 are formed integrally with each other.

[0066] The relay electrode 278 is disposed in a contact hole 2781 for connection to the relay electrode 276. The contact hole 2781 penetrates the insulating layer 226 and reaches the relay electrode 276. The constant potential line 243 is electrically connected to the second conductive layer 262 of the capacitance element 26 via the relay electrodes 278, 276, 275 and the relay electrode 272.

[0067] The relay electrode 279 is disposed in a contact hole 2791 for connection to the relay electrode 277. The contact hole 2791 penetrates the insulating layer 226 and reaches the relay electrode 277. The insulating layer 227 is formed to cover the constant potential line 243 and the relay electrodes 278 and 279 .

[0068] As shown in FIG. 4, the pixel electrode 25 is disposed on the insulating layer 227. The pixel electrode 25 is disposed in a contact hole 2511 for connection to the relay electrode 279. The contact hole 2511 is formed along the inner wall surface of the contact hole that penetrates the insulating layer 227 and reaches the relay electrode 279. The pixel electrode 25 is electrically connected to the drain region 231b of the semiconductor layer 231 via the relay electrodes 279, 277 and the relay electrode 273, and to the first conductive layer 261 of the capacitance element 26 via the relay electrodes 279, 277, 273 and the relay electrode 271. The first conductive layer 261 of the capacitance element 26 is electrically connected to the drain region 231b of the semiconductor layer 231 via the relay electrodes 273, 271.

[0069] The materials of the scanning line 241, the data line 242, and the constant potential line 243 may be, for example, metals such as tungsten (W), titanium (Ti), chromium (Cr), iron (Fe), and aluminum (Al), metal nitrides such as titanium nitride, and metal oxides such as tungsten silicide. The scanning line 241, the data line 242, and the constant potential line 243 are made of a single layer or a multilayer of metal materials. The relay electrodes 271, 272, the relay electrodes 276, 277, and the relay electrodes 278, 279 are made of the same material as the gate electrode 232, the data line 242, and the constant potential line 243, respectively. The relay electrodes 273, 274, and 275 are also made of the same material as the above. For example, the scanning line 241 is made of a tungsten silicide film having a thickness of 0.1 to 0.4 μm. The data line 242 and the constant potential line 243 are formed to a film thickness of 0.3 to 0.6 μm.

[0070] The above-described configuration of various wirings and the like of the element substrate 2 is an example, and is not limited to the configuration shown in Fig. 5 and Fig. 6. For example, the scanning line 241 may be formed in a layer above the transistor 23. In this case, a light-shielding film having a light-shielding property other than the scanning line 241 is disposed between the capacitive element 26 and the transistor 23. The light-shielding film may be a wiring or a conductive film insulated from the wiring as long as it has a light-shielding property.

[0071] 1D. Manufacturing method of element substrate 2 14 is a diagram showing the flow of a part of the manufacturing method of the element substrate 2. Of the manufacturing methods of the element substrate 2 of the electro-optical device 100, the manufacturing methods of the first recess 211, the capacitive element 26, the scanning line 241, and the semiconductor layer 231 are mainly shown.

[0072] The method for manufacturing the element substrate 2 includes a recess forming step S11, a capacitive element forming step S12, a first insulating film forming step S13, a scanning line forming step S14, a second insulating film forming step S15, and a semiconductor layer forming step S16.

[0073] 15 is a diagram for explaining the recess forming step S11. In the recess forming step S11, as shown in FIGS. 5, 6, and 8, a first substrate 21 having a first recess 211 is formed. In addition to the first recess 211, a second recess 212 and a third recess 213 are also formed. The first recess 211 is formed, for example, by forming a mask (not shown) on a quartz substrate and performing anisotropic etching through the mask. Also, for example, the first recess 211 is formed so that the aspect ratio (D1 / W1) of the first recess 211 is larger than 1.

[0074] FIG. 16 is a diagram for explaining the capacitive element forming step S12. As shown in FIGS. 5, 6 and 8, in the capacitive element forming step S12, the capacitive element 26 is formed along the Z1 direction surface of the first substrate 21 including the first recess 211. Specifically, for example, first, a first conductive layer 261 of a polysilicon film containing impurities such as phosphorus is formed along the first recess 211 by a CVD method. Next, a dielectric layer 263 of a silicon nitride film is formed on the first conductive layer 261 by a CVD method. Thereafter, a second conductive layer 262 of a polysilicon film containing impurities such as phosphorus is formed on the dielectric layer 263 by a CVD method. Note that the first conductive layer 261 and the second conductive layer 262 are preferably made of the same material from the viewpoint of ease of manufacture, etc.

[0075] FIG. 17 is a diagram for explaining the first insulating film forming step S13 and the scanning line forming step S14. As shown in FIG. 5, FIG. 6, and FIG. 8, in the first insulating film forming step S13, an insulating layer 221 is formed as a "first insulating film" on the capacitive element 26. The insulating layer 221 is formed by, for example, a CVD method. A recessed portion corresponding to the first recess 211 is formed on the surface of the insulating layer 221 in the Z1 direction. Next, as shown in FIG. 5, FIG. 6, and FIG. 9, in the scanning line forming step S14, as shown in FIG. 17, a scanning line 241 is formed on the insulating layer 221. The scanning line 241 is formed by, for example, forming a metal film by a sputtering method or a vapor deposition method, and etching the metal film using a resist mask. A portion 2410 recessed in the Z2 direction corresponding to the first recess 211 is formed on the scanning line 241.

[0076] FIG. 18 is a diagram for explaining the second insulating film forming step S15 and the semiconductor layer forming step S16. As shown in FIG. 5, FIG. 6, and FIG. 9, in the second insulating film forming step S15, an insulating layer 222 is formed as a "second insulating film" on the scanning line 241. The insulating layer 222 is formed by, for example, a CVD method. Here, when the first recess 211 is formed in the above-mentioned step so that the aspect ratio, which is the aspect ratio, is 1.5 or more, the flatness of the surface of the insulating layer 222 in the Z1 direction can be improved without performing a flattening process by the CMP method on the insulating layer 222, compared to when the aspect ratio is less than 1.5. Therefore, the surface of the insulating layer 222 in the Z1 direction becomes a flat surface without performing a flattening process. Therefore, the number of manufacturing steps of the element substrate 2 can be reduced, and the manufacturing can be simplified.

[0077] Next, as shown in FIG. 5, FIG. 6, and FIG. 9, in the semiconductor layer formation step S16, the semiconductor layer 231 is formed on the insulating layer 222. For example, an amorphous silicon film is formed and then heat-treated to form a crystallized polysilicon film. Then, impurities are selectively injected into the polysilicon film to form the semiconductor layer 231. Here, since the surface of the insulating layer 222 in the Z1 direction has excellent flatness, the risk of unevenness due to the influence of the first recess 211 occurring in the semiconductor layer 231 formed on the insulating layer 222 is reduced.

[0078] The configuration of the element substrate 2 and the manufacturing method of a part of the element substrate 2 have been described above. As described above, the electro-optical device 100 includes the first substrate 21 having the first recess 211, the light-shielding scanning line 241, the capacitance element 26 having the first conductive layer 261, the second conductive layer 262, and the dielectric layer 263, and the transistor 23 having the semiconductor layer 231 including the source region 231c, the channel region 231a, and the drain region 231b. The capacitance element 26, the scanning line 241, and the transistor 23 are arranged in this order from the first substrate 21. Therefore, the capacitance element 26 is arranged in the lower layer of the transistor 23. Therefore, the data line 242, etc. is not arranged in the upper layer of the transistor 23 via the capacitance element 26 as in the conventional case. Therefore, it is easier to bring the data line 242, etc. closer to the transistor 23 than in the conventional case. Therefore, it is possible to suppress the intrusion of light in the Z2 direction from between the transistor 23 and the data line 242, etc. toward the transistor 23 more than in the conventional case. This improves the light blocking effect on the transistor 23. This prevents the operation of the transistor 23 from becoming unstable, thereby preventing display defects such as uneven luminance from occurring.

[0079] Moreover, the first substrate 21 has a first recess 211, and the capacitive element 26 has a first element portion 265 disposed in the first recess 211. By the capacitive element 26 having the first element portion 265, the capacitance value can be increased without stacking a plurality of capacitive elements 26. Furthermore, since it is not necessary to provide a plurality of capacitive elements 26, an increase in the number of contacts for connecting the plurality of capacitive elements 26 is suppressed. Thus, a decrease in the aperture ratio can be suppressed. Therefore, the capacitance value can be increased and a decrease in the aperture ratio can be suppressed, thereby obtaining excellent display quality.

[0080] For this reason, the electro-optical device 100 having the element substrate 2 of this embodiment can improve the light blocking property, increase the capacitance value, and suppress the decrease in the aperture ratio, thereby improving the display quality compared to the conventional configuration.

[0081] Furthermore, in this embodiment, the second element portion 266 and the third element portion 267 are provided. Therefore, the capacitance value can be increased compared to a case where these are not provided.

[0082] Furthermore, since the capacitive element 26 has the first element portion 265, the capacitance value can be improved without stacking a plurality of capacitive elements 26, so there is no need to stack a plurality of capacitive elements 26. Therefore, the element substrate 2 can be easily manufactured.

[0083] Furthermore, each of the first conductive layer 261 and the second conductive layer 262 contains polysilicon. Therefore, for example, the risk of defects occurring in the first conductive layer 261 and the second conductive layer 262 due to heat of annealing treatment when manufacturing the semiconductor layer 231 is suppressed. Therefore, compared to the case where the first conductive layer 261 and the second conductive layer 262 contain, for example, metal, it is possible to suppress the risk of cracks and the like occurring in the first substrate 21 by forming the first conductive layer 261 and the second conductive layer 262. Therefore, the capacitance element 26 can be provided under the transistor 23. Therefore, the capacitance element 26 is easy to manufacture, and the degree of freedom in selecting the material of the capacitance element 26 can be increased. Therefore, according to this embodiment, it is possible to improve the display quality and facilitate the manufacture of the electro-optical device 100 compared to the conventional configuration.

[0084] Moreover, it is preferable that the capacitive element 26 and the insulating layer 221 have an increased reflectivity. By having the increased reflectivity, a part of the light LL can be transmitted and another part of the light LL can be reflected at the interface between the first substrate 21 and the first conductive layer 261, the interface between the first conductive layer 261 and the dielectric layer 263, the interface between the dielectric layer 263 and the second conductive layer 262, the interface between the second conductive layer 262 and the insulating layer 221, and the interface between the insulating layer 221 and the scanning line 241. Therefore, the light blocking property for the semiconductor layer 231 can be improved.

[0085] In particular, it is preferable that the reflections at the interface between the capacitive element 26 and the insulating layer 221 and at the interface between the insulating layer 221 and the scanning line 241 are set to be reinforced. This makes it possible to increase the reflectance and OD (Optical Density) value of the light LL in the layer below the transistor 23. Therefore, by providing the capacitive element 26, the insulating layer 221, and the scanning line 241 in the layer below the transistor 23, it is possible to improve the light blocking property for the transistor 23 without making the thickness of the scanning line 241 excessively thick, compared to the case where only the scanning line 241 is provided in the layer below the transistor 23. In addition, since the thickness of the scanning line 241 does not need to be excessively thick, it is possible to suppress the occurrence of cracks in the insulating layer 221.

[0086] For example, by adjusting the film thickness, material, or refractive index of the capacitance element 26 and the insulating layer 221, the capacitance element 26 and the insulating layer 221 can be configured to have increased reflectivity.

[0087] As described above, the first element portion 265 is disposed along the semiconductor layer 231 in a plan view. Therefore, a decrease in the aperture ratio can be suppressed compared to a case in which the first element portion 265 is not disposed along the semiconductor layer 231.

[0088] Moreover, the material of the scanning line 241 may be the above-mentioned metal material. In particular, the scanning line 241 preferably contains tungsten, such as tungsten, tungsten silicide, or tungsten titanium nitride. Tungsten is a material with a high melting point among metals. For this reason, by including tungsten, for example, the risk of defects occurring in the scanning line 241 due to the heat of the annealing process when manufacturing the semiconductor layer 231 is suppressed.

[0089] As described above, the scanning line 241 overlaps the first element portion 265 in a plan view and has a portion 2410 recessed toward the first element portion 265. The presence of the portion 2410 allows light incident on the surface of the scanning line 241 in the Z2 direction to be reflected more efficiently than in the case where the portion 2410 does not exist.

[0090] FIG. 19 is a diagram for explaining the reflection of light at the scanning line 241 shown in FIG. 5. For example, in the case of a configuration in which light LL is incident from the counter substrate 3, return light of light transmitted through the element substrate 2 may be incident from the first substrate 21. As shown in FIG. 19, the scanning line 241 has a portion 2410 recessed toward the first element portion 265, so that light L0 such as return light is incident obliquely on the surface of the portion 2410 in the Z2 direction. Therefore, the light L0 incident from the first substrate 21 can be efficiently reflected by the portion 2410. Therefore, the light shielding property of the scanning line 241 can be improved compared to a configuration in which the portion of the scanning line 241 that overlaps with the semiconductor layer 231 in a plan view is flat. Therefore, the incidence of light on the transistor 23 can be effectively suppressed compared to a configuration in which the portion 2410 does not exist.

[0091] In addition, when the aspect ratio of the first recess 211 is 1.5 or more, the recessed portion 2410 in the scanning line 241 is easily formed. However, the aspect ratio does not have to be 1.5 or more. Even if the aspect ratio is not 1.5 or more, as long as the portion 2410 is provided, it is possible to effectively suppress the incidence of light into the transistor 23 compared to the case where the portion 2410 does not exist.

[0092] As described above, the surface of the insulating layer 222 opposite to the first substrate 21 is a flat surface. Therefore, compared to a case where the insulating layer 222 has irregularities, it is possible to reduce the risk of irregularities occurring in the semiconductor layer 231 formed on the insulating layer 222. Also, by having the aspect ratio (D1 / W1) of 1.5 or more, it is possible to reduce the risk of depressions occurring in the semiconductor layer 231 due to the influence of the first recess 211, compared to a case where the aspect ratio is less than 1.5.

[0093] Furthermore, it is more preferable that the aspect ratio is equal to or greater than 1.7 and equal to or less than 3.0. By satisfying this range, it becomes easier to form the capacitance element 26 in the first recess 211, and the risk of a recess being generated in the semiconductor layer 231 can be particularly suppressed.

[0094] Moreover, it is preferable that the width W1 of the bottom surface 2111 of the first recess 211 is equal to or smaller than the width W0 of the source region 231c of the semiconductor layer 231. Therefore, it is possible to suppress the risk of unevenness occurring in the semiconductor layer 231 due to the influence of the first recess 211, compared to a case where the width W1 exceeds the width W0.

[0095] Moreover, the first element portion 265 overlaps the semiconductor layer 231 in a planar view. Therefore, compared to a case where there is no overlap, it is possible to suppress a decrease in the aperture ratio. In particular, the first element portion 265 overlaps the source region 231c, the channel region 231a, and the drain region 231b in a planar view. That is, the first element portion 265 overlaps the entire semiconductor layer 231 in a planar view. Therefore, compared to a case where the first element portion 265 overlaps a part of the semiconductor layer 231, it is possible to increase the capacitance value while suppressing a decrease in the aperture ratio.

[0096] Moreover, the first element portion 265 of the capacitive element 26 is disposed in the first recess 211 and overlaps the channel region 231a in a plan view. Therefore, the distance between the channel region 231a and the capacitive element 26 can be made longer than when the capacitive element 26 is formed on a flat surface. Therefore, for example, when the first conductive layer 261 and the second conductive layer 262 are formed of polysilicon containing an impurity such as phosphorus, the risk of the impurity diffusing into the channel region 231a of the semiconductor layer 231 can be suppressed. Thus, the occurrence of malfunction of the transistor 23 is suppressed.

[0097] Moreover, the insulating layers 221 and 222 preferably contain an inorganic material containing silicon, and more preferably contain silicon oxide. In particular, when the material of the insulating layers 221 and 222 is an inorganic material containing silicon, when the first conductive layer 261 and the second conductive layer 262 are formed of polysilicon containing impurities such as phosphorus, the risk of the impurities diffusing into the semiconductor layer 231 can be suppressed compared to when the material of the insulating layers 221 and 222 is other materials. Furthermore, when the material of the insulating layers 221 and 222 is silicon oxide, the risk of the impurities diffusing into the semiconductor layer 231 can be particularly effectively suppressed.

[0098] The electro-optical device 100 also includes a first substrate 21, an insulating layer 221, a capacitance element 26 having a first conductive layer 261, a second conductive layer 262, and a dielectric layer 263, and a transistor 23 having a semiconductor layer 231 including a source region 231c, a channel region 231a, and a drain region 231b. The capacitance element 26, the insulating layer 221, the insulating layer 222, and the transistor 23 are arranged in this order on the first substrate 21. The first substrate 21 also has a first recess 211 that overlaps with the semiconductor layer 231 in a planar view and is arranged along the semiconductor layer 231 in a planar view. The capacitance element 26 is arranged in the first recess 211, and has a first element portion 265 that overlaps with the semiconductor layer 231 in a planar view and is arranged along the semiconductor layer 231 in a planar view. The insulating layer 222 is arranged in the first recess 211.

[0099] Since the capacitive element 26 has the first element portion 265, the capacitance value can be increased without stacking multiple capacitive elements 26. Furthermore, since the first element portion 265 is provided, the capacitance value can be increased without stacking multiple capacitive elements 26, and the element substrate 2 can be easily manufactured. Furthermore, since multiple capacitive elements 26 do not need to be provided, the increase in the number of contacts for connecting the multiple capacitive elements 26 is suppressed. Therefore, the decrease in the aperture ratio can be suppressed. Furthermore, since the first element portion 265 overlaps the semiconductor layer 231 in a plan view, the decrease in the aperture ratio can be suppressed compared to when they do not overlap. Therefore, the capacitance value can be increased and the aperture ratio can be improved. Therefore, the display quality can be improved compared to the conventional art.

[0100] In particular, the first element portion 265 overlaps with the source region 231c, the channel region 231a, and the drain region 231b in a planar view. That is, the first element portion 265 overlaps with the entire semiconductor layer 231 in a planar view. Therefore, compared to a case where the first element portion 265 overlaps with a part of the semiconductor layer 231, it is possible to increase the capacitance value while suppressing a decrease in the aperture ratio. Furthermore, in this embodiment, since the second element portion 266 and the third element portion 267 are provided, it is possible to increase the capacitance value compared to a case where these are not provided.

[0101] Furthermore, since the capacitive element 26 is present in a layer below the semiconductor layer 231, it is not necessary to form the capacitive element 26 on the semiconductor layer 231. Therefore, it is easier to shorten the distance between the semiconductor layer 231 and the various wirings compared to when the capacitive element 26 is provided in a layer above the semiconductor layer 231. Therefore, it is possible to more effectively suppress the intrusion of light in the Z1 direction into the semiconductor layer 231.

[0102] Moreover, the aspect ratio (D1 / W1) of the first recess 211 is 1.5 or more. By having the aspect ratio (D1 / W1) of 1.5 or more, it is possible to reduce the risk of a recess being generated in the semiconductor layer 231 due to the influence of the first recess 211, compared to when the aspect ratio is less than 1.5. Therefore, as described in the above-mentioned manufacturing method, the process of planarizing the upper surface of the insulating layer 222 can be omitted. Therefore, the manufacturing of the element substrate 2 is easier than when the process of planarizing the upper surface must be performed. Therefore, it is possible to simplify the manufacturing process compared to the conventional method.

[0103] Furthermore, as described above, even if the process of planarizing the upper surface of the insulating layer 222 is omitted, the surface of the insulating layer 222 opposite to the first substrate 21 is a flat surface. This makes it possible to improve the display quality and simplify the manufacturing process.

[0104] As described above, the light-shielding scanning line 241 is disposed between the capacitance element 26 and the transistor 23. Therefore, compared to the case where a light-shielding film such as the scanning line 241 does not exist between the capacitance element 26 and the transistor 23, the incidence of light in the Z1 direction to the transistor 23 can be significantly suppressed.

[0105] In addition, when the first conductive layer 261 and the second conductive layer 262 of the capacitive element 26 are made of polysilicon, it is preferable that the capacitive element 26 and the insulating layer 221 have an increased reflectivity. By having the increased reflectivity, a part of the light LL can be transmitted and another part of the light LL can be reflected at the interface between the first substrate 21 and the first conductive layer 261, the interface between the first conductive layer 261 and the dielectric layer 263, the interface between the dielectric layer 263 and the second conductive layer 262, the interface between the second conductive layer 262 and the insulating layer 221, and the interface between the insulating layer 221 and the scanning line 241. Therefore, the light shielding property for the semiconductor layer 231 can be improved.

[0106] In particular, it is preferable that the reflections at the interface between the capacitive element 26 and the insulating layer 221 and at the interface between the insulating layer 221 and the scanning line 241 are set to be reinforced. This makes it possible to increase the reflectance and OD (Optical Density) value of the light LL in the layer below the transistor 23. Therefore, by providing the capacitive element 26, the insulating layer 221, and the scanning line 241 in the layer below the transistor 23, it is possible to improve the light blocking property for the transistor 23 without making the thickness of the scanning line 241 excessively thick, compared to the case where only the scanning line 241 is provided in the layer below the transistor 23. In addition, since the thickness of the scanning line 241 does not need to be excessively thick, it is possible to suppress the occurrence of cracks in the insulating layer 221.

[0107] For example, by adjusting the film thickness, material, or refractive index of the capacitance element 26 and the insulating layer 221, the capacitance element 26 and the insulating layer 221 can be configured to have increased reflectivity.

[0108] Furthermore, since the first conductive layer 261 and the second conductive layer 262 contain polysilicon, it is easier to improve the heat resistance compared to when they contain a metal material. Therefore, it is possible to suppress the occurrence of defects such as cracks in the first substrate 21 during manufacturing. Furthermore, it is possible to reduce the occurrence of film peeling of the first conductive layer 261 and the second conductive layer 262.

[0109] The insulating layer 222 preferably contains an inorganic material containing silicon, such as silicon oxide and silicon oxynitride, and more preferably contains silicon oxide. When the insulating layer 222 contains an inorganic material containing silicon, it is possible to suppress the occurrence of defects, such as cracks, in the first substrate 21 during manufacturing. In addition, the space of the first recess 211 can be efficiently filled with the insulating layer 222. Furthermore, for example, when the capacitive element 26 is formed of polysilicon containing an impurity such as phosphorus, it is possible to suppress the possibility that the impurity will diffuse into the semiconductor layer 231.

[0110] 2. Variations The above-described embodiment may be modified in various ways. Specific modified aspects that may be applied to the above-described embodiment are illustrated below. Two or more aspects selected from the following examples may be combined as appropriate to the extent that they are not mutually inconsistent.

[0111] In each of the above-described embodiments, the electro-optical device 100 is an active matrix type, but the driving method of the electro-optical device 100 is not limited to this, and may be, for example, a passive matrix type or the like.

[0112] The driving method of the "electro-optical device" is not limited to the vertical electric field method, but may be a horizontal electric field method. The horizontal electric field method may be, for example, an IPS (In Plane Switching) mode. The vertical electric field method may be, for example, a TN (Twisted Nematic) mode, a VA (Vertical Alignment), a PVA mode, or an OCB (Optically Compensated Bend) mode.

[0113] 3.Electronic equipment The electro-optical device 100 can be used in various electronic devices.

[0114] 20 is a perspective view showing a personal computer 2000, which is an example of an electronic device. The personal computer 2000 has an electro-optical device 100 that displays various images, a main body 2010 on which a power switch 2001 and a keyboard 2002 are installed, and a control unit 2003. The control unit 2003 includes, for example, a processor and a memory, and controls the operation of the electro-optical device 100.

[0115] 21 is a plan view showing a smartphone 3000 as an example of an electronic device. The smartphone 3000 has an operation button 3001, an electro-optical device 100 that displays various images, and a control unit 3002. The screen content displayed on the electro-optical device 100 changes in response to an operation of the operation button 3001. The control unit 3002 includes, for example, a processor and a memory, and controls the operation of the electro-optical device 100.

[0116] 22 is a schematic diagram showing a projector, which is an example of an electronic device. The projection display device 4000 is, for example, a three-plate projector. The electro-optical device 1r is an electro-optical device 100 corresponding to a red display color, the electro-optical device 1g is an electro-optical device 100 corresponding to a green display color, and the electro-optical device 1b is an electro-optical device 100 corresponding to a blue display color. That is, the projection display device 4000 has three electro-optical devices 1r, 1g, and 1b corresponding to red, green, and blue display colors, respectively. The control unit 4005 includes, for example, a processor and a memory, and controls the operation of the electro-optical device 100.

[0117] The illumination optical system 4001 supplies a red component r of light emitted from an illumination device 4002, which is a light source, to an electro-optical device 1r, a green component g to an electro-optical device 1g, and a blue component b to an electro-optical device 1b. Each of the electro-optical devices 1r, 1g, and 1b functions as an optical modulator such as a light valve that modulates each monochromatic light supplied from the illumination optical system 4001 according to a display image. The projection optical system 4003 combines the light emitted from each of the electro-optical devices 1r, 1g, and 1b and projects the combined light onto a projection surface 4004.

[0118] The above electronic devices include the electro-optical device 100 described above and the control unit 2003, 3002, or 4005. By including the electro-optical device 100 described above, the display quality of the personal computer 2000, the smartphone 3000, or the projection display device 4000 can be improved.

[0119] Note that electronic devices to which the electro-optical device of the present invention can be applied are not limited to the exemplified devices, and examples thereof include PDAs (Personal Digital Assistants), digital still cameras, televisions, video cameras, car navigation devices, in-vehicle displays, electronic organizers, electronic paper, calculators, word processors, workstations, videophones, and POS (Point of Sale) terminals, etc. Furthermore, examples of electronic devices to which the present invention can be applied include printers, scanners, copiers, video players, and devices equipped with touch panels, etc.

[0120] Although the present invention has been described based on the preferred embodiment, the present invention is not limited to the above-mentioned embodiment. Furthermore, the configuration of each part of the present invention can be replaced with any configuration that exhibits the same function as the above-mentioned embodiment, and any configuration can be added.

[0121] In the above description, a liquid crystal display device has been described as an example of the electro-optical device of the present invention, but the electro-optical device of the present invention is not limited to this. For example, the electro-optical device of the present invention can also be applied to an image sensor, etc. [Explanation of symbols]

[0122] Reference Signs List 1b...electro-optical device, 1g...electro-optical device, 1r...electro-optical device, 2...element substrate, 3...opposing substrate, 4...sealing member, 5...liquid crystal layer, 11...scanning line driving circuit, 12...data line driving circuit, 13...external terminal, 21...first substrate, 22...laminated body, 23...transistor, 25...pixel electrode, 26...capacitive element, 29...first alignment film, 31...second substrate, 32...inorganic insulating layer, 33...common electrode, 34...second alignment film, 100...electro-optical device, 211...first recess, 212...second recess, 213...third recess, 221...insulating layer, 222...insulating layer, 223...insulating layer, 224...insulating layer, 225...insulating layer, 226...insulating layer, 227...insulating layer, 231...semiconductor layer, 231a...channel region, 231b...drain region, 231c...source region, 231d...low-concentration drain region, 231e...low-concentration source region, 232...gate electrode, 233...gate insulating film, 241...scanning line, 242...data line, 243...constant potential line, 251...contact hole, 260...opening, 261...first conductive layer, 262...second conductive layer, 263...dielectric layer, 265...first element portion, 266...second element portion, 267...third element portion, 271...relay electrode, 272...relay electrode, 273... relay electrode, 274... relay electrode, 275... relay electrode, 276... relay electrode, 277... relay electrode, 278... relay electrode, 279... relay electrode, 2000... personal computer, 2001... power switch, 2002... keyboard, 2003... control unit, 2010... main body, 2111... bottom surface, 2112... opening, 2321... contact hole, 2322... contact hole, 2410... part, 2421... contact hole, 2711... contact hole, 2721... contact hole, 2731... contact hole, 2741... contact hole , 2751...contact hole, 2761...contact hole, 2771...contact hole, 2781...contact hole, 2791...contact hole, 3000...smartphone, 3001...operation button, 3002...control unit, 4000...projection type display device, 4001...illumination optical system, 4002...illumination device, 4003...projection optical system, 4004...projection surface, 4005...control unit, A10...display area, A11...opening, A12...light-shielding area, A20...peripheral area, L0...light, LL...light, P...pixel, W1...width, W2...width, W3...width, W0...width, D1...depth.

Claims

1. a substrate having a recess extending along a first direction; a laminated film having a first conductive layer, a dielectric layer, and a second conductive layer; A first insulating film; A light-shielding film; A second insulating film; a semiconductor layer having a source region, a channel region, a drain region, and a low-concentration drain region between the channel region and the drain region, the source region, the channel region, and a drain region arranged in this order along the first direction; a drain electrode overlapping a bottom surface of the recess and the low-concentration drain region in a plan view; the stacked film, the first insulating film, the light-shielding film, the second insulating film, and the semiconductor layer are disposed in this order from the substrate side, the semiconductor layer overlaps the recess and is disposed along the recess in a plan view, a width of a bottom surface of the recess along a second direction intersecting the first direction is equal to or smaller than a width of the lightly doped drain region along the second direction; The electro-optical device is characterized by the above.

2. the laminated film is disposed along a bottom surface and a side surface of the recessed portion, the first insulating film is disposed including within the recess; The source region, the channel region, and the drain region overlap with the bottom surface in a plan view.

2. The electro-optical device according to claim 1.

3. contact holes for connecting the light-shielding film and a gate electrode are disposed on both sides of the lightly doped drain region in a plan view; a contact hole that connects a relay electrode connected to the drain electrode and the first conductive layer is disposed on a side of the drain region opposite to the lightly doped drain region in a plan view; 2. The electro-optical device according to claim 1.

4. A substrate having a recess extending along a first direction; a capacitive element having a first conductive layer, a dielectric layer and a second conductive layer; A first insulating film; a scanning line extending along a second direction intersecting the first direction and having a light blocking property; A second insulating film; a transistor having a semiconductor layer having a source region, a channel region, and a drain region arranged in sequence along the first direction; a data line extending along the first direction; the capacitance element, the first insulating film, the scanning line, the second insulating film, and the transistor are arranged in this order from the substrate side, the capacitive element has a trench portion disposed along the recess, the trench portion is disposed along the semiconductor layer in a plan view and overlaps with the semiconductor layer, the data line, and the scanning line in a plan view; The electro-optical device is characterized by the above.

5. The trench portion overlaps with the source region, the channel region, and the drain region in a plan view.

5. The electro-optical device according to claim 4.

6. The scanning line has a portion that overlaps the trench portion in a plan view and is recessed toward the trench portion.

6. The electro-optical device according to claim 5.

7. A substrate having a recess extending along a first direction; a laminated film having a first conductive layer, a dielectric layer, and a second conductive layer; A first insulating film; A light-shielding film; A second insulating film; a semiconductor layer having a source region, a channel region, and a drain region arranged in sequence along the first direction; the stacked film, the first insulating film, the light-shielding film, the second insulating film, and the semiconductor layer are disposed in this order from the substrate side, the semiconductor layer overlaps the recess and is disposed along the recess in a plan view, The surface of the first insulating film opposite to the substrate is a flat surface. The electro-optical device is characterized by the above.

8. A substrate having a recess extending along a first direction; a laminated film having a first conductive layer, a dielectric layer, and a second conductive layer; A first insulating film; A light-shielding film; A second insulating film; a semiconductor layer having a source region, a channel region, and a drain region arranged in sequence along the first direction; the stacked film, the first insulating film, the light-shielding film, the second insulating film, and the semiconductor layer are disposed in this order from the substrate side, the semiconductor layer overlaps the recess and is disposed along the recess in a plan view, a surface of the second insulating film opposite to the light-shielding film is a flat surface; The electro-optical device is characterized by the above.

9. A substrate having a recess extending along a first direction; a laminated film having a first conductive layer, a dielectric layer, and a second conductive layer; A first insulating film; A light-shielding film; A second insulating film; a semiconductor layer having a source region, a channel region, and a drain region arranged in sequence along the first direction; the stacked film, the first insulating film, the light-shielding film, the second insulating film, and the semiconductor layer are disposed in this order from the substrate side, the semiconductor layer overlaps the recess and is disposed along the recess in a plan view, the first insulating film and the second insulating film contain an inorganic material containing silicon, the first conductive layer and the second conductive layer include polysilicon; the dielectric layer comprises silicon nitride; The electro-optical device is characterized by the above.

10. A substrate having a recess extending along a first direction; a laminated film having a first conductive layer, a dielectric layer, and a second conductive layer; A first insulating film; a light-shielding film containing tungsten; A second insulating film; a semiconductor layer having a source region, a channel region, and a drain region arranged in sequence along the first direction; the stacked film, the first insulating film, the light-shielding film, the second insulating film, and the semiconductor layer are disposed in this order from the substrate side, The semiconductor layer overlaps the recess in a plan view and is disposed along the recess. The electro-optical device is characterized by the above.

11. The electro-optical device according to claim 1 , and a control unit for controlling an operation of the electro-optical device.

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