Light emitting device, projector, and display

Abstract

To provide a light emitting device that can increase the bonding strength of wire bonding to an external terminal.SOLUTION: In a light emitting device, a plurality of columnar parts each have a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type different from the first conductivity type, and a luminous layer that is provided between the first semiconductor layer and the second semiconductor layer. The first semiconductor layer is provided between a substrate and the luminous layer. A laminate has a third semiconductor layer of the first conductivity type that is provided between the substrate and the plurality of columnar parts. A first electrode is electrically connected with the first semiconductor layer through the third semiconductor layer. When seen from a lamination direction of the first semiconductor layer and the luminous layer, a contact hole is provided at a position of an insulating layer overlapping the first electrode. A first wiring layer is provided on the insulating layer. The first wiring layer is electrically connected with the first electrode through the contact hole.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a light emitting device, a projector, and a display. [Background technology]

[0002] Semiconductor lasers are expected to become the next generation of high-brightness light sources. In particular, semiconductor lasers that incorporate nanocolumns are expected to be able to achieve high-output light emission with a narrow radiation angle due to the photonic crystal effect of the nanocolumns.

[0003] For example, Patent Document 1 describes a method for manufacturing a semiconductor light-emitting device having a plurality of nanocolumns. In Patent Document 1, a portion of the region where the plurality of nanocolumns are formed is etched and excavated until it reaches the n-type GaN layer, and an n-type electrode is formed in the excavated region by vapor deposition. An SOG buried layer is provided between adjacent nanocolumns. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2010-135858 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, when the region where the nanocolumns are formed is etched, unevenness is formed on the surface of the n-type GaN layer due to the difference in etching rate between the nanocolumns and the SOG buried layer. When unevenness is formed on the surface of the n-type GaN layer, the surface of the n-type electrode formed on it also has an uneven shape. When wire bonding is bonded to an n-type electrode with an uneven surface, the bonding strength of the wire bonding decreases. [Means for solving the problem]

[0006] One aspect of the light emitting device according to the present invention is A substrate; a laminate provided on the substrate and having a plurality of columnar portions; A first electrode and a second electrode for injecting a current into the plurality of columnar portions; a first wiring layer electrically connected to the first electrode; an insulating layer covering the laminate and the first electrode; having Each of the plurality of columnar portions is A first semiconductor layer of a first conductivity type; a second semiconductor layer of a second conductivity type different from the first conductivity type; a light emitting layer provided between the first semiconductor layer and the second semiconductor layer; having the first semiconductor layer is provided between the substrate and the light emitting layer, the stacked body includes a third semiconductor layer of the first conductivity type provided between the substrate and the plurality of columnar portions, the first electrode is electrically connected to the first semiconductor layer via the third semiconductor layer; a contact hole is provided in the insulating layer at a position where the insulating layer overlaps with the first electrode when viewed from a stacking direction of the first semiconductor layer and the light emitting layer; the first wiring layer is provided on the insulating layer, The first wiring layer is electrically connected to the first electrode through the contact hole.

[0007] One aspect of the projector according to the present invention is The present invention has one aspect of the light emitting device.

[0008] One aspect of the display according to the present invention is The present invention has one aspect of the light emitting device. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a cross-sectional view illustrating a light emitting device according to a first embodiment. [Diagram 2] FIG. 1 is a plan view illustrating a light emitting device according to a first embodiment. [Diagram 3] 3A to 3C are cross-sectional views each showing a schematic process for manufacturing the light emitting device according to the first embodiment. [Figure 4] 3A to 3C are cross-sectional views each showing a schematic process for manufacturing the light emitting device according to the first embodiment. [Diagram 5] 3A to 3C are cross-sectional views each showing a schematic process for manufacturing the light emitting device according to the first embodiment. [Figure 6] 3A to 3C are cross-sectional views each showing a schematic process for manufacturing the light emitting device according to the first embodiment. [Figure 7] FIG. 11 is a diagram illustrating a projector according to a second embodiment. [Figure 8] FIG. 11 is a plan view illustrating a display according to a third embodiment. [Figure 9] FIG. 11 is a cross-sectional view illustrating a display according to a third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. Note that the embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are necessarily essential components of the present invention.

[0011] 1. First embodiment 1.1. Light-emitting device 1.1.1. Overall structure First, the light emitting device according to the first embodiment will be described with reference to the drawings. Fig. 1 is a cross-sectional view that shows a light emitting device 100 according to the first embodiment. Fig. 2 is a plan view that shows a light emitting device 100 according to the first embodiment. Fig. 1 is a cross-sectional view taken along line II in Fig. 2.

[0012] 1 and 2, the light emitting device 100 includes, for example, a substrate 10, a laminate 20, an insulating layer 40, a first electrode 50, a second electrode 52, a first wiring layer 60, and a second wiring layer 62. For convenience, components other than the electrodes 50 and 52 and the wiring layers 60 and 62 are not shown in Fig. 2. The light emitting device 100 is, for example, a semiconductor laser.

[0013] The substrate 10 is, for example, a Si substrate, a GaN substrate, a sapphire substrate, a SiC substrate, or the like.

[0014] The stacked body 20 is provided on a substrate 10. In the example shown in Fig. 1, the stacked body 20 is provided on the substrate 10. The stacked body 20 has, for example, a buffer layer 22 as a third semiconductor layer and a columnar portion 30.

[0015] In this specification, in the stacking direction of the laminate 20 (hereinafter also simply referred to as the "stacking direction"), when the light emitting layer 34 is used as a reference, the direction from the light emitting layer 34 toward the second semiconductor layer 36 is described as "upper", and the direction from the light emitting layer 34 toward the first semiconductor layer 32 is described as "lower". A direction perpendicular to the stacking direction is also referred to as an "in-plane direction". Moreover, the "stacking direction of the laminate 20" refers to the stacking direction of the first semiconductor layer 32 and the light emitting layer 34 of the columnar section 30.

[0016] The buffer layer 22 is provided on the substrate 10. The buffer layer 22 is a semiconductor layer of a first conductivity type. The buffer layer 22 is, for example, an n-type GaN layer doped with Si. A mask layer 24 for forming the columnar section 30 is provided on the buffer layer 22. The mask layer 24 is, for example, a silicon oxide layer, a titanium layer, a titanium oxide layer, an aluminum oxide layer, or the like.

[0017] The columnar section 30 is provided on the buffer layer 22. The columnar section 30 has a columnar shape protruding upward from the buffer layer 22. In other words, the columnar section 30 protrudes upward from the substrate 10 via the buffer layer 22. The columnar section 30 is also called, for example, a nanocolumn, a nanowire, a nanorod, or a nanopillar. The planar shape of the columnar section 30 is, for example, a polygon or a circle.

[0018] The diameter of the columnar section 30 is, for example, 50 nm or more and 500 nm or less. By making the diameter of the columnar section 30 500 nm or less, it is possible to obtain a light-emitting layer 34 of high quality crystals and reduce distortion inherent in the light-emitting layer 34. This allows the light generated in the light-emitting layer 34 to be amplified with high efficiency.

[0019] The "diameter of the columnar portion" refers to the diameter when the planar shape of the columnar portion 30 is a circle, and refers to the diameter of the smallest inclusive circle when the planar shape of the columnar portion 30 is not a circle. For example, when the planar shape of the columnar portion 30 is a polygon, the diameter of the columnar portion 30 refers to the diameter of the smallest circle that includes the polygon, and when the planar shape of the columnar portion 30 is an ellipse, the diameter of the smallest circle that includes the ellipse.

[0020] A plurality of columnar sections 30 are provided. The interval between adjacent columnar sections 30 is, for example, 1 nm or more and 500 nm or less. The plurality of columnar sections 30 are arranged at a predetermined pitch in a predetermined direction as viewed from the stacking direction. The plurality of columnar sections 30 are arranged, for example, in a triangular lattice or square lattice pattern. The plurality of columnar sections 30 can exhibit the effect of a photonic crystal.

[0021] The "pitch of the columnar portion" is the distance between the centers of adjacent columnar portions 30 along a predetermined direction. When the planar shape of the columnar portion 30 is a circle, the "center of the columnar portion" is the center of the circle, and when the planar shape of the columnar portion 30 is a shape other than a circle, the center of the smallest inclusive circle. For example, when the planar shape of the columnar portion 30 is a polygon, the center of the columnar portion 30 is the center of the smallest circle that includes the polygon inside, and when the planar shape of the columnar portion 30 is an ellipse, the center of the smallest circle that includes the ellipse inside.

[0022] The columnar section 30 has a first semiconductor layer 32, a light emitting layer , and a second semiconductor layer .

[0023] The first semiconductor layer 32 is provided on the buffer layer 22. The first semiconductor layer 32 is provided between the substrate 10 and the light emitting layer 34. The first semiconductor layer 32 is a semiconductor layer of a first conductivity type. The first semiconductor layer 32 is, for example, an n-type GaN layer doped with Si.

[0024] The light emitting layer 34 is provided on the first semiconductor layer 32. The light emitting layer 34 is provided between the first semiconductor layer 32 and the second semiconductor layer 36. The light emitting layer 34 generates light when a current is injected into it. The light emitting layer 34 has, for example, a well layer and a barrier layer. The well layer and the barrier layer are i-type semiconductor layers that are not intentionally doped with impurities. The well layer is, for example, an InGaN layer. The barrier layer is, for example, a GaN layer. The light emitting layer 34 has an MQW (Multiple Quantum Well) structure composed of the well layer and the barrier layer.

[0025] There is no particular limitation on the number of well layers and barrier layers constituting the light-emitting layer 34. For example, only one well layer may be provided, in which case the light-emitting layer 34 has a SQW (Single Quantum Well) structure.

[0026] The second semiconductor layer 36 is provided on the light emitting layer 34. The second semiconductor layer 36 is a semiconductor layer of a second conductivity type different from the first conductivity type. The second semiconductor layer 36 is, for example, a p-type GaN layer doped with Mg. The first semiconductor layer 32 and the second semiconductor layer 36 are cladding layers having the function of confining light in the light emitting layer 34.

[0027] Although not shown, an OCL (Optical Confinement Layer) made of an i-type InGaN layer and a GaN layer may be provided at least one between the first semiconductor layer 32 and the light emitting layer 34 and between the light emitting layer 34 and the second semiconductor layer 36. The second semiconductor layer 36 may have an EBL (Electron Blocking Layer) made of a p-type AlGaN layer.

[0028] In the light emitting device 100, a pin diode is formed by the p-type second semiconductor layer 36, the i-type light emitting layer 34, and the n-type first semiconductor layer 32. In the light emitting device 100, when a forward bias voltage of the pin diode is applied between the first electrode 50 and the second electrode 52, a current is injected into the light emitting layer 34, and recombination of electrons and holes occurs in the light emitting layer 34. This recombination causes light emission. The light generated in the light emitting layer 34 propagates in the in-plane direction, forms a standing wave due to the effect of the photonic crystal of the multiple columnar parts 30, receives gain in the light emitting layer 34, and oscillates as a laser. Then, the light emitting device 100 emits the +1st order diffracted light and the -1st order diffracted light as laser light in the stacking direction.

[0029] Although not shown, a reflective layer may be provided between the substrate 10 and the buffer layer 22 or under the substrate 10. The reflective layer is, for example, a DBR (Distributed Bragg Reflector) layer. The reflective layer can reflect light generated in the light-emitting layer 34, and the light-emitting device 100 can emit light only from the second electrode 52 side.

[0030] The insulating layer 40 covers the laminate 20 and the first electrode 50. In the illustrated example, the insulating layer 40 covers a part of the buffer layer 22, a part of the plurality of columnar sections 30, a part of the first electrode 50, and a part of the second electrode 52. A first contact hole 42 is provided at a position where the insulating layer 40 overlaps with the first electrode 50 when viewed from the stacking direction. A second contact hole 44 is provided at a position where the insulating layer 40 overlaps with the first layer 53 of the second electrode 52 when viewed from the stacking direction. The thickness of the insulating layer 40 is, for example, 1 μm or more. The insulating layer 40 is, for example, a polyimide layer, a silicon oxide layer, or the like.

[0031] The first electrode 50 is provided on the buffer layer 22. The buffer layer 22 may be in ohmic contact with the first electrode 50. The first electrode 50 is electrically connected to the first semiconductor layer 32. In the illustrated example, the first electrode 50 is electrically connected to the first semiconductor layer 32 via the buffer layer 22. The first electrode 50 is one of the electrodes for injecting a current into the light emitting layer 34.

[0032] The second electrode 52 is provided on the second semiconductor layer 36. The second electrode 52 is electrically connected to the second semiconductor layer 36. The second semiconductor layer 36 may be in ohmic contact with the second electrode 52. The second electrode 52 is the other electrode for injecting a current into the light emitting layer 34. The first electrode 50 and the second electrode 52 will be described in detail later.

[0033] The first wiring layer 60 is electrically connected to the first electrode 50. In the illustrated example, the first wiring layer 60 is connected to the first electrode 50. The second wiring layer 62 is connected to the second electrode 52. Details of the first wiring layer 60 and the second wiring layer 62 will be described later.

[0034] Although the above describes the InGaN-based light emitting layer 34, various material systems capable of emitting light when a current is injected depending on the wavelength of the emitted light can be used for the light emitting layer 34. For example, semiconductor materials such as AlGaN-based, AlGaAs-based, InGaAs-based, InGaAsP-based, InP-based, GaP-based, and AlGaP-based materials can be used.

[0035] In the above, a gap is provided between the adjacent columnar sections 30, but a light propagation layer that propagates the light generated in the light-emitting layer 34 may be provided between the adjacent columnar sections 30. The light propagation layer is, for example, a silicon oxide layer, an aluminum oxide layer, or a titanium oxide layer.

[0036] Furthermore, the light emitting device 100 is not limited to a laser, and may be an LED (Light Emitting Diode).

[0037] 1.1.2. Buffer layer 1, the buffer layer 22 is provided between the substrate 10 and the multiple columnar sections 30. The buffer layer 22 has, for example, a columnar section formation region 22a, an electrode formation region 22b, and a peripheral region 22c. The regions 22a, 22b, and 22c are the upper surface of the buffer layer 22.

[0038] In the columnar section formation region 22a, a plurality of columnar sections 30 and a mask layer 24 are provided. When viewed from the stacking direction, the columnar section formation region 22a overlaps with the plurality of columnar sections 30 and the mask layer 24. In the illustrated example, the columnar section formation region 22a is a flat surface.

[0039] A first electrode 50 is provided in the electrode formation region 22b. When viewed from the stacking direction, the electrode formation region 22b surrounds the columnar section formation region 22a. In the illustrated example, the height of the electrode formation region 22b is smaller than the height of the columnar section formation region 22a. In other words, the distance between the electrode formation region 22b and the substrate 10 is smaller than the distance between the columnar section formation region 22a and the substrate 10.

[0040] A plurality of protrusions 23 are formed in the electrode formation region 22b. The height of the protrusions 23 is, for example, 30 nm or more and 300 nm or less. The reason why the protrusions 23 are formed in the electrode formation region 22b will be described later in "1.2. Manufacturing method of light-emitting device".

[0041] The peripheral region 22c surrounds the electrode formation region 22b when viewed from the stacking direction. In the illustrated example, the height of the peripheral region 22c is smaller than the height of the electrode formation region 22b. In other words, the distance between the peripheral region 22c and the substrate 10 is smaller than the distance between the electrode formation region 22b and the substrate 10. There is a possibility that an abnormal film (not shown) grows in the peripheral region 22c. The reason why an abnormal film grows in the peripheral region 22c will be explained later in "1.2. Manufacturing method of a light-emitting device."

[0042] 1.1.3. First and second electrodes The first electrode 50 is provided on the electrode formation region 22b and the multiple protrusions 23. On the upper surface of the first electrode 50, the shapes of the multiple protrusions 23 are traced to form unevenness (not shown).

[0043] The first electrode 50 surrounds the plurality of columnar sections 30 when viewed from the stacking direction. The first electrode 50 surrounds the columnar section forming region 22a when viewed from the stacking direction. In the example shown in FIG. 2, the first electrode 50 has a ring-shaped portion 50a and a contact receiving portion 50b for receiving the first contact hole 42. The contact receiving portion 50b is connected to the ring-shaped portion 50a. The first contact hole 42 overlaps with the contact receiving portion 50b when viewed from the stacking direction. The plurality of columnar sections 30 are provided inside the ring-shaped portion 50a when viewed from the stacking direction. Although not shown, the first electrode 50 may have a shape in which a notch is provided in the ring-shaped portion 50a when viewed from the stacking direction.

[0044] The thickness of the first electrode 50 is, for example, 10 nm to 200 nm, preferably 50 nm to 100 nm. If the thickness of the first electrode 50 is 10 nm or more, the resistance can be reduced. If the thickness of the first electrode 50 is 200 nm or less, the flatness of the insulating layer 40 can be increased, and the possibility of the second wiring layer 62 peeling off can be reduced. If the thickness of the first electrode 50 is 200 nm or less, the possibility of unevenness being formed on the upper surface of the first electrode 50 increases.

[0045] The first electrode 50 is, for example, a laminate in which a Cr layer and a Ni layer are laminated from the buffer layer 22 side. The thickness of the Cr layer is, for example, 20 nm. The thickness of the Ni layer is, for example, 50 nm.

[0046] As shown in FIG. 1, the second electrode 52 is provided on the side of the laminate 20 opposite to the substrate 10. The second electrode 52 has a first portion 52a and a second portion 52b. The first portion 52a is a portion that overlaps with the columnar portion forming region 22a when viewed from the stacking direction. The second portion 52b is a portion that does not overlap with the columnar portion forming region 22a when viewed from the stacking direction. The second portion 52b overlaps with, for example, the electrode forming region 22b when viewed from the stacking direction. The second portion 52b surrounds the first portion 52a when viewed from the stacking direction. The second portion 52b is connected to the first portion 52a. The first electrode 50 overlaps with the second portion 52b when viewed from the stacking direction. That is, the first electrode 50 overlaps with the second electrode 52 when viewed from the stacking direction. A part of the first electrode 50 is arranged to overlap with the second electrode 52 when viewed from the stacking direction. Moreover, the first electrode 50 overlaps with the second wiring layer 62 when viewed from the stacking direction. A portion of the first electrode 50 is disposed so as to overlap with the second wiring layer 62 when viewed from the stacking direction.

[0047] The second electrode 52 has a first layer 53 and a second layer 54. The first layer 53 is provided between the columnar section 30 and the second layer 54. The first layer 53 is provided on the multiple columnar sections 30 and on the gaps between the adjacent columnar sections 30. The first layer 53 is in contact with the second semiconductor layer 36 of the columnar section 30. The second semiconductor layer 36 may be in ohmic contact with the first layer 53. The planar shape of the first layer 53 is, for example, a circle.

[0048] The resistivity of the first layer 53 is lower than the resistivity of the second layer 54. The thickness of the first layer 53 is, for example, 5 nm or more and 50 nm or less, and preferably 10 nm or more and 30 nm or less. If the thickness of the first layer 53 is 5 nm or more, the resistance can be reduced. If the thickness of the first layer 53 is 50 nm or less, the transmittance of the light generated in the light emitting layer 34 can be increased. The first layer 53 is, for example, a laminate in which a Pd layer, a Pt layer, and an Au layer are laminated from the second semiconductor layer 36 side. The thickness of the Pd layer is, for example, 5 nm. The thickness of the Pt layer is, for example, 5 nm. The thickness of the Au layer is, for example, 10 nm. The first layer 53 may be a laminate in which a Ni layer and an Au layer are laminated from the second semiconductor layer 36 side.

[0049] The second layer 54 is provided on the first layer 53 and on the insulating layer 40. The second layer 54 is provided in the second contact hole 44. The second layer 54 is provided on the upper surface of the insulating layer 40 and on the side surface of the insulating layer 40 that defines the second contact hole 44. The second layer 54 is connected to the first layer 53 exposed by the second contact hole 44. The planar shape of the second layer 54 is, for example, a circle.

[0050] The second layer 54 has a higher transmittance for the light generated in the light-emitting layer 34 than the first layer 53. The second layer 54 is transparent to the light generated in the light-emitting layer 34, for example. The second layer 54 has a thickness of, for example, 100 nm or more and 500 nm or less, and preferably 250 nm or more and 350 nm or less. If the thickness of the second layer 54 is 100 nm or more, the resistance can be reduced. If the thickness of the second layer 54 is 500 nm or less, the transmittance for the light generated in the light-emitting layer 34 can be increased. The material of the second layer 54 is, for example, ITO (Indium Tin Oxide) or IZO (Indium Zinc Oxide).

[0051] The second layer 54 has a third portion 54a and a fourth portion 54b. The third portion 54a is a portion that overlaps with the first layer 53 when viewed from the stacking direction. The fourth portion 54b is a portion that does not overlap with the first layer 53 when viewed from the stacking direction. The fourth portion 54b surrounds the third portion 54a when viewed from the stacking direction. The fourth portion 54b is connected to the third portion 54a.

[0052] 1.1.4. First and second wiring layers The first wiring layer 60 is connected to the first electrode 50. The first wiring layer 60 is provided on the first electrode 50, on the insulating layer 40, and in the first contact hole 42. The first wiring layer 60 is provided on the upper surface of the first electrode 50, on the upper surface of the insulating layer 40, and on the side surface of the insulating layer 40 that defines the first contact hole 42. The first wiring layer 60 is connected to the first electrode 50 exposed by the first contact hole 42. In this embodiment, the first wiring layer 60 is provided on the first electrode 50 and in the first contact hole 42, but this is not limited thereto. A conductive contact plug may be provided in the first contact hole 42, and the first wiring layer 60 may be provided on the first electrode 50, on the insulating layer 40, and on the contact plug. In this case, the first wiring layer 60 is connected to the contact plug and is electrically connected to the first electrode 50 through the contact plug. The contact plug may be made of the same material as the first wiring layer, or may be made of a different material. The contact plug may be made of, for example, tungsten (W), titanium (Ti), or the like.

[0053] In this embodiment, the first wiring layer 60 is provided on the first electrode 50 and in the first contact hole 42, but this is not limiting. A conductive contact plug may be provided in the first contact hole 42, and the first wiring layer 60 may be provided on the first electrode 50, on the insulating layer 40, and on the contact plug. In this case, the first wiring layer 60 is connected to the contact plug and is electrically connected to the first electrode 50 via the contact plug. The contact plug may be made of the same material as the first wiring layer, or may be made of a different material. The contact plug may be made of, for example, tungsten (W), titanium (Ti), or the like.

[0054] The first wiring layer 60 is, for example, a laminated body in which a Cr layer, a Ni layer, and an Au layer are laminated from the insulating layer 40 side. The thickness of the Cr layer is, for example, 20 nm. The thickness of the Ni layer is, for example, 30 nm. The thickness of the Au layer is, for example, 200 nm. As shown in FIG. 1, a first wire bonding 70 is bonded to a portion of the first wiring layer 60 located on the insulating layer 40. In the illustrated example, the upper surface of the portion of the first wiring layer 60 located on the insulating layer 40 is a flat surface. Although not illustrated, an FPC (Flexible Printed Circuits) may be used instead of the first wire bonding 70.

[0055] The second wiring layer 62 is connected to the second electrode 52. In the illustrated example, the second wiring layer 62 is connected to the second layer 54 of the second electrode 52. The second wiring layer 62 is provided on the second layer 54 and on the insulating layer 40. The second wiring layer 62 is connected to the fourth portion 54b of the second layer 54. The second wiring layer 62 surrounds the first layer 53 of the second layer 54 when viewed from the stacking direction.

[0056] The material of the second wiring layer 62 is, for example, the same as that of the first wiring layer 60. As shown in Fig. 1, a second wire bonding 72 is bonded to a portion of the second wiring layer 62 located on the insulating layer 40. In the illustrated example, the upper surface of the portion of the second wiring layer 62 located on the insulating layer 40 is a flat surface. Although not illustrated, an FPC may be used instead of the second wire bonding 72.

[0057] 1.2. Manufacturing method of light-emitting device Next, a method for manufacturing the light emitting device 100 according to the first embodiment will be described with reference to the drawings. Figures 3 to 6 are cross-sectional views that typically show the manufacturing process for the light emitting device 100 according to the first embodiment.

[0058] 3, the buffer layer 22 is epitaxially grown on the substrate 10. Examples of the epitaxial growth method include a metal organic chemical vapor deposition (MOCVD) method and a molecular beam epitaxy (MBE) method.

[0059] Next, a mask layer 24 is formed on the buffer layer 22. The mask layer 24 is formed in the columnar section formation region 22a, the electrode formation region 22b, and the outer periphery region 22c of the buffer layer 22. The mask layer 24 is formed by film formation using, for example, an electron beam deposition method or a sputtering method, and patterning. The patterning is performed by photolithography and etching.

[0060] As shown in Fig. 4, a first semiconductor layer 32, a light emitting layer 34, and a second semiconductor layer 36 are epitaxially grown in this order on the buffer layer 22 using the mask layer 24 as a mask. Examples of the epitaxial growth method include the MOCVD method and the MBE method. This process allows the formation of a plurality of columnar sections 30. The plurality of columnar sections 30 are formed in the columnar section formation region 22a and the electrode formation region 22b.

[0061] In this step, although not shown, there is a possibility that an abnormally grown film will be formed on the mask layer 24 formed in the peripheral region 22c of the buffer layer 22. For example, if impurities are attached to the mask layer 24, an unintended film will grow during epitaxial growth using the impurities as nuclei. The mask layer 24 formed in the peripheral region 22c does not have openings for growing the columnar section 30, so impurities are likely to remain on the mask layer 24. Thus, there is a possibility that an abnormally grown film will be formed on the mask layer 24 formed in the peripheral region 22c, and therefore it is not preferable to form the first electrode 50 in the peripheral region 22c.

[0062] 5, a mask layer 80 having a predetermined shape is formed on the multiple columnar sections 30. The mask layer 80 is, for example, a resist layer or a silicon oxide layer. When viewed from the stacking direction, the mask layer 80 overlaps with the columnar section formation region 22a.

[0063] Next, the mask layer 80 is used as a mask to etch the multiple columnar sections 30 that are not covered by the mask layer 80. The etching is, for example, dry etching. The multiple columnar sections 30 that are not covered by the mask layer 80 become smaller by this etching, but the multiple protrusions 23 remain. The multiple protrusions 23 may be composed of only the buffer layer 22, or may be composed of the buffer layer 22 and the first semiconductor layer 32.

[0064] Since the multiple protrusions 23 are formed by reducing the multiple columnar portions 30, the multiple protrusions 23 are regularly arranged when viewed from the stacking direction. Therefore, when forming the first electrode 50, it is possible to form it uniformly over the entire surface of the first electrode 50. Furthermore, by forming the first electrode 50 so as to fill the valleys between the adjacent protrusions 23, it is possible to increase the contact area between the first electrode 50 and the laminate 20 compared to a case where the protrusions 23 are not provided. This makes it possible to reduce the contact resistance between the first electrode 50 and the laminate 20.

[0065] The mask layer 24 formed in the electrode formation region 22b and the outer periphery region 22c is removed in the etching process of the multiple columnar portions 30. Since no columnar portion 30 is formed in the outer periphery region 22c, the height of the outer periphery region 22c is lower than, for example, the columnar portion formation region 22a and the electrode formation region 22b.

[0066] 6, after removing the mask layer 80, a first layer 53 of the second electrode 52 is formed on the plurality of columnar sections 30, and a first electrode 50 is formed in the electrode formation region 22b and the plurality of protrusions 23. The first layer 53 and the first electrode 50 are formed by, for example, a chemical vapor deposition (CVD) method, a sputtering method, a vacuum deposition method, or the like. The order of forming the first layer 53 and the first electrode 50 is not particularly limited.

[0067] Next, the insulating layer 40 is formed so as to cover the laminate 20, the first electrode 50, and the first layer 53. The insulating layer 40 is formed by, for example, a spin coating method, a CVD method, or the like.

[0068] Next, the insulating layer 40 is patterned to form a first contact hole 42 and a second contact hole 44. The patterning is performed by, for example, photolithography and etching. The first contact hole 42 and the second contact hole 44 may be formed in the same process or in separate processes.

[0069] 1, a second layer 54 is formed on the first layer 53 and the insulating layer 40. The second layer 54 is formed by, for example, a CVD method, a sputtering method, a vacuum deposition method, or the like. By this process, the second electrode 52 can be formed.

[0070] Next, a first wiring layer 60 is formed on the first electrode 50 and the insulating layer 40, and a second wiring layer 62 is formed on the second electrode 52 and the insulating layer 40. The first wiring layer 60 and the second wiring layer 62 are formed by, for example, a CVD method or a sputtering method. The first wiring layer 60 and the second wiring layer 62 may be formed in the same process or in separate processes.

[0071] Next, the first bonding wire 70 is bonded to the first wiring layer 60, and the second bonding wire 72 is bonded to the second wiring layer 62. The order in which the first bonding wire 70 and the second bonding wire 72 are bonded is not particularly limited.

[0072] Through the above steps, the light emitting device 100 can be manufactured.

[0073] 1.3. Effects In the light emitting device 100, the first electrode 50 is electrically connected to the first semiconductor layer 32 via the buffer layer 22, a first contact hole 42 is provided in the insulating layer 40 at a position overlapping the first electrode 50 when viewed from the stacking direction, and the first wiring layer 60 is provided in the insulating layer 40, and the first wiring layer 60 is electrically connected to the first electrode 50 via the contact hole 42. Therefore, in the light emitting device 100, an external terminal such as a first wire bonding 70 can be bonded to a portion of the first wiring layer 60 located on the insulating layer 40. This makes it possible to increase the bonding strength with the external terminal compared to a case where an external terminal is directly bonded to the first electrode.

[0074] As described above, the first electrode 50 is formed on the multiple protrusions 23, so that the upper surface of the first electrode 50 is uneven. When wire bonding is bonded to the first electrode 50 with the unevenness formed thereon, the wire bonding cannot fill the recesses of the unevenness, and the contact area between the first electrode 50 and the wire bonding decreases. As a result, the bonding strength with the wire bonding decreases.

[0075] In the light emitting device 100, the second electrode 52 is provided on the side of the laminate 20 opposite to the substrate 10, and the multiple columnar sections 30 are provided in the columnar section formation region 22a of the buffer layer 22. The second electrode 52 has a first portion 52a that overlaps with the columnar section formation region 22a when viewed from the stacking direction, and a second portion 52b that does not overlap with the columnar section formation region 22a and surrounds the first portion 52a when viewed from the stacking direction, and the first electrode 50 overlaps with the second portion 52b when viewed from the stacking direction. Therefore, in the light emitting device 100, the distance between the first electrode 50 and the columnar section formation region 22a can be made smaller than when the first electrode does not overlap with the second portion when viewed from the stacking direction. This allows current to be efficiently injected into the multiple columnar sections 30. If the distance between the first electrode and the columnar section formation region is large, the buffer layer has a higher resistivity than the first electrode, making it difficult to efficiently inject current.

[0076] In the light emitting device 100, the first electrode 50 surrounds the multiple columnar portions 30 when viewed from the stacking direction. Therefore, in the light emitting device 100, current can be injected into the multiple columnar portions 30 with good uniformity compared to a case in which the first electrode does not surround the multiple columnar portions when viewed from the stacking direction.

[0077] In the light emitting device 100, the second electrode 52 has a first layer 53 and a second layer 54 having a higher transmittance for light generated in the light emitting layer 34 than the first layer 53, the resistivity of the first layer 53 is lower than the resistivity of the second layer 54, the first layer 53 is in contact with the second semiconductor layer 36, and the second layer 54 is provided on the first layer 53. Therefore, in the light emitting device 100, the contact resistance between the second electrode 52 and the second semiconductor layer 36 can be reduced, while the transmittance for light generated in the light emitting layer 34 can be increased.

[0078] The light emitting device 100 has a second wiring layer 62 connected to the second electrode 52, and the second layer 54 has a third portion 54a overlapping with the first layer 53 when viewed from the stacking direction, and a fourth portion 54b not overlapping with the first layer 53 and surrounding the third portion 54a when viewed from the stacking direction, and the second wiring layer 62 is connected to the fourth portion 54b, and surrounds the first layer 53 when viewed from the stacking direction. Therefore, in the light emitting device 100, a current can be injected into the first layer 53 with good uniformity compared to a case in which the second wiring layer does not surround the first layer when viewed from the stacking direction.

[0079] 2. Second embodiment Next, a projector according to a second embodiment will be described with reference to the drawings. Fig. 7 is a diagram illustrating a projector 800 according to the second embodiment.

[0080] The projector 800 includes, for example, a light emitting device 100 as a light source.

[0081] Projector 800 has a housing (not shown) and red light source 100R, green light source 100G, and blue light source 100B that are provided in the housing and emit red light, green light, and blue light, respectively. For convenience, red light source 100R, green light source 100G, and blue light source 100B are simplified in FIG.

[0082] The projector 800 further includes a first optical element 802R, a second optical element 802G, a third optical element 802B, a first light modulation device 804R, a second light modulation device 804G, a third light modulation device 804B, and a projection device 808, which are provided in the housing. The first light modulation device 804R, the second light modulation device 804G, and the third light modulation device 804B are, for example, transmissive liquid crystal light valves. The projection device 808 is, for example, a projection lens.

[0083] The light emitted from red light source 100R is incident on first optical element 802R. The light emitted from red light source 100R is collected by first optical element 802R. Note that first optical element 802R may have a function other than collecting light. The same applies to second optical element 802G and third optical element 802B described later.

[0084] The light collected by the first optical element 802R is incident on the first light modulation device 804R. The first light modulation device 804R modulates the incident light in accordance with image information. The projection device 808 then enlarges the image formed by the first light modulation device 804R and projects it onto the screen 810.

[0085] The light emitted from green light source 100G is incident on second optical element 802G. The light emitted from green light source 100G is collected by second optical element 802G.

[0086] The light collected by the second optical element 802G is incident on the second light modulation device 804G. The second light modulation device 804G modulates the incident light in accordance with image information. The projection device 808 then enlarges the image formed by the second light modulation device 804G and projects it onto the screen 810.

[0087] The light emitted from blue light source 100B is incident on third optical element 802B. The light emitted from blue light source 100B is collected by third optical element 802B.

[0088] The light collected by the third optical element 802B enters the third light modulation device 804B. The third light modulation device 804B modulates the incident light in accordance with image information. The projection device 808 then enlarges the image formed by the third light modulation device 804B and projects it onto the screen 810.

[0089] The projector 800 may also have a cross dichroic prism 806 that combines the light emitted from the first light modulation device 804R, the second light modulation device 804G, and the third light modulation device 804B and guides the combined light to the projection device 808.

[0090] The three color lights modulated by the first light modulation device 804R, the second light modulation device 804G, and the third light modulation device 804B enter the cross dichroic prism 806. The cross dichroic prism 806 is formed by bonding four right-angle prisms together, and a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are disposed on its inner surface. The three color lights are synthesized by these dielectric multilayer films to form light that represents a color image. The synthesized light is then projected by the projection device 808 onto a screen 810, and an enlarged image is displayed.

[0091] Note that red light source 100R, green light source 100G, and blue light source 100B may directly form an image without using first light modulation device 804R, second light modulation device 804G, and third light modulation device 804B, by controlling light emitting device 100 as a pixel of the image according to image information. Then, projection device 808 may enlarge and project the image formed by red light source 100R, green light source 100G, and blue light source 100B onto screen 810.

[0092] In the above example, a transmissive liquid crystal light valve is used as the light modulation device, but a light valve other than liquid crystal may be used, or a reflective light valve may be used. Examples of such light valves include a reflective liquid crystal light valve and a digital micro mirror device. The configuration of the projection device is changed as appropriate depending on the type of light valve used.

[0093] The light source can also be applied to a light source device of a scanning type image display device having a scanning means, which is an image forming device that displays an image of a desired size on a display surface by scanning light from the light source on a screen.

[0094] 3. Third embodiment Next, a display according to a third embodiment will be described with reference to the drawings. Fig. 8 is a plan view showing a display 900 according to the third embodiment. Fig. 9 is a cross-sectional view showing a display 900 according to the third embodiment. For convenience, Fig. 8 shows an X-axis and a Y-axis as two mutually orthogonal axes.

[0095] The display 900 includes, for example, a light emitting device 100 as a light source.

[0096] The display 900 is a display device that displays an image. The image includes an image that displays only text information. The display 900 is a self-luminous display. As shown in Figs. 8 and 9, the display 900 has a circuit board 910, a lens array 920, and a heat sink 930.

[0097] A driving circuit for driving the light emitting device 100 is mounted on the circuit board 910. The driving circuit is, for example, a circuit including a CMOS (Complementary Metal Oxide Semiconductor) or the like. The driving circuit drives the light emitting device 100 based on, for example, input image information. Although not shown, a light-transmitting substrate for protecting the circuit board 910 is disposed on the circuit board 910.

[0098] The circuit board 910 has a display area 912 , a data line driving circuit 914 , a scanning line driving circuit 916 , and a control circuit 918 .

[0099] The display area 912 is made up of a plurality of pixels P. In the illustrated example, the pixels P are arranged along the X-axis and the Y-axis.

[0100] Although not shown, a plurality of scanning lines and a plurality of data lines are provided on the circuit board 910. For example, the scanning lines extend along the X-axis, and the data lines extend along the Y-axis. The scanning lines are connected to a scanning line driving circuit 916. The data lines are connected to a data line driving circuit 914. Pixels P are provided at intersections of the scanning lines and the data lines.

[0101] One pixel P has, for example, one light emitting device 100, one lens 922, and a pixel circuit (not shown). The pixel circuit includes a switching transistor that functions as a switch for the pixel P. The gate of the switching transistor is connected to a scan line, and one of the source and drain is connected to a data line.

[0102] The data line driving circuit 914 and the scanning line driving circuit 916 are circuits that control the driving of the light emitting device 100 that constitutes the pixel P. The control circuit 918 controls the display of an image.

[0103] Image data is supplied from a higher-level circuit to the control circuit 918. The control circuit 918 supplies various signals based on the image data to the data line driving circuit 914 and the scanning line driving circuit 916.

[0104] When the scanning line driving circuit 916 activates a scanning signal to select a scanning line, the switching transistor of the selected pixel P is turned on. At this time, the data line driving circuit 914 supplies a data signal from the data line to the selected pixel P, causing the light emitting device 100 of the selected pixel P to emit light in response to the data signal.

[0105] The lens array 920 has a plurality of lenses 922. For example, one lens 922 is provided for each light emitting device 100. Light emitted from the light emitting device 100 is incident on one lens 922.

[0106] The heat sink 930 is in contact with the circuit board 910. The material of the heat sink 930 is, for example, a metal such as copper or aluminum. The heat sink 930 dissipates heat generated by the light emitting device 100.

[0107] The light emitting devices according to the above-described embodiments can be used for purposes other than projectors and displays, such as light sources for indoor and outdoor lighting, laser printers, scanners, car lights, sensing devices that use light, and communication devices.

[0108] The present invention includes configurations that are substantially the same as the configurations described in the embodiments, for example, configurations with the same functions, methods, and results, or configurations with the same purpose and effects. The present invention also includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. The present invention also includes configurations that achieve the same effects as the configurations described in the embodiments, or configurations that can achieve the same purpose. The present invention also includes configurations in which publicly known technology is added to the configurations described in the embodiments.

[0109] The following can be derived from the above-described embodiment and modifications.

[0110] One aspect of the light emitting device is A substrate; a laminate provided on the substrate and having a plurality of columnar portions; A first electrode and a second electrode for injecting a current into the plurality of columnar portions; a first wiring layer electrically connected to the first electrode; an insulating layer covering the laminate and the first electrode; having Each of the plurality of columnar portions is A first semiconductor layer of a first conductivity type; a second semiconductor layer of a second conductivity type different from the first conductivity type; a light emitting layer provided between the first semiconductor layer and the second semiconductor layer; having the first semiconductor layer is provided between the substrate and the light emitting layer, the stacked body includes a third semiconductor layer of the first conductivity type provided between the substrate and the plurality of columnar portions, the first electrode is electrically connected to the first semiconductor layer via the third semiconductor layer; a contact hole is provided in the insulating layer at a position where the insulating layer overlaps with the first electrode when viewed from a stacking direction of the first semiconductor layer and the light emitting layer; the first wiring layer is provided on the insulating layer, The first wiring layer is electrically connected to the first electrode through the contact hole.

[0111] According to this light emitting device, the bonding strength with an external terminal, such as by wire bonding, can be increased.

[0112] In one embodiment of the light emitting device, The first wiring layer may be provided in the insulating layer and the contact hole.

[0113] In one embodiment of the light emitting device, the second electrode is provided on the side of the laminate opposite to the substrate, the plurality of pillars are provided in a pillar-forming region of the third semiconductor layer, When viewed from the stacking direction, the second electrode is A first portion overlapping the columnar portion formation region; a second portion that does not overlap the columnar portion formation region and surrounds the first portion; having When viewed from the stacking direction, the first electrode may overlap the second portion.

[0114] According to this light emitting device, the distance between the first electrode and the columnar portion forming region can be reduced, which allows current to be efficiently injected into the multiple columnar portions.

[0115] In one embodiment of the light emitting device, When viewed from the stacking direction, the first electrode may surround the plurality of columnar portions.

[0116] According to this light emitting device, current can be injected into the multiple columnar portions with good uniformity.

[0117] In one embodiment of the light emitting device, The second electrode is The first layer, a second layer having a higher transmittance for light generated in the light-emitting layer than the first layer; having the resistivity of the first layer is lower than the resistivity of the second layer; the first layer is in contact with the second semiconductor layer; The second layer may be disposed on the first layer.

[0118] According to this light emitting device, it is possible to increase the transmittance of light generated in the light emitting layer while reducing the contact resistance between the second electrode and the second semiconductor layer.

[0119] In one embodiment of the light emitting device, a second wiring layer connected to the second electrode; When viewed from the stacking direction, the second layer has a third portion overlapping the first layer; a fourth portion that does not overlap the first layer and surrounds the third portion; having the second wiring layer is connected to the fourth portion, When viewed from the stacking direction, the second wiring layer may surround the first layer.

[0120] According to this light emitting device, a current can be injected into the first layer with good uniformity.

[0121] One aspect of the projector is The present invention has one aspect of the light emitting device.

[0122] One embodiment of the display includes: The present invention has one aspect of the light emitting device. [Explanation of symbols]

[0123] 10...substrate, 20...laminated body, 22...buffer layer, 22a...columnar portion forming region, 22b...electrode forming region, 22c...peripheral region, 23...projection, 24...mask layer, 30...columnar portion, 32...first semiconductor layer, 34...light emitting layer, 36...second semiconductor layer, 40...insulating layer, 42...first contact hole, 44...second contact hole, 50...first electrode, 50a...ring-shaped portion, 50b...contact receiving portion, 52...second electrode, 52a...first portion, 52b...second portion, 53...first layer, 54...second layer, 54a...third portion, 54b...fourth portion, 60...first wiring layer, 62...second wiring layer, 70...first wire bonding, 72...second wire bonding bonding, 80...mask layer, 100...light emitting device, 100R...red light source, 100G...green light source, 100B...blue light source, 800...projector, 802R...first optical element, 802G...second optical element, 802B...third optical element, 804R...first light modulation device, 804G...second light modulation device, 804B...third light modulation device, 806...cross dichroic prism, 808...projection device, 810...screen, 900...display, 910...circuit board, 912...display area, 914...data line driving circuit, 916...scanning line driving circuit, 918...control circuit, 920...lens array, 922...lens, 930...heat sink

Claims

1. A substrate; a laminate provided on the substrate and having a plurality of columnar portions; a first electrode and a second electrode for injecting a current into the plurality of columnar portions; a first wiring layer electrically connected to the first electrode; an insulating layer covering the laminate and the first electrode; a second wiring layer connected to the second electrode; having Each of the plurality of columnar portions is A first semiconductor layer of a first conductivity type; a second semiconductor layer of a second conductivity type different from the first conductivity type; a light emitting layer provided between the first semiconductor layer and the second semiconductor layer; having the first semiconductor layer is provided between the substrate and the light emitting layer, the stacked body includes a third semiconductor layer of the first conductivity type provided between the substrate and the plurality of columnar portions, the first electrode is electrically connected to the first semiconductor layer via the third semiconductor layer; a contact hole is provided in the insulating layer at a position where the insulating layer overlaps with the first electrode when viewed from a stacking direction of the first semiconductor layer and the light emitting layer; the first wiring layer is provided on the insulating layer, the first wiring layer is electrically connected to the first electrode through the contact hole; The second electrode is A first layer; a second layer having a higher transmittance for light generated in the light-emitting layer than the first layer; having the resistivity of the first layer is lower than the resistivity of the second layer; the first layer is in contact with the second semiconductor layer; The second layer is provided on the first layer, and when viewed from the stacking direction, a third portion overlapping the first layer; a fourth portion that does not overlap the first layer and surrounds the third portion; having the second wiring layer is connected to the fourth portion, The light emitting device, wherein the second wiring layer surrounds the first layer as viewed from the stacking direction.

2. In claim 1, The first wiring layer is provided in the insulating layer and the contact hole.

3. In claim 1 or 2, the second electrode is provided on the side of the stack opposite to the substrate, the plurality of pillars are provided in a pillar-formation region of the third semiconductor layer, When viewed from the stacking direction, the second electrode has A first portion overlapping the columnar portion formation region; a second portion that does not overlap the columnar portion formation region and surrounds the first portion; having The light emitting device, wherein the first electrode overlaps with the second portion when viewed from the stacking direction.

4. In any one of claims 1 to 3, The light emitting device, wherein the first electrode surrounds the plurality of columnar portions as viewed from the stacking direction.

5. A projector comprising the light emitting device according to claim 1 .

6. A display comprising a light-emitting device according to any one of claims 1 to 4.

Images