Semiconductor Device

Abstract

To provide a semiconductor device in which the variation in induction load avalanche resistance can be controlled.SOLUTION: A semiconductor device includes a transistor and a Schottky barrier diode connected to the transistor in parallel. The transistor includes a first semiconductor substrate including a first main surface, and a gate electrode formed on the first main surface. In the gate electrode, the angle with <1-100> of the first semiconductor substrate extends in a first direction of a first angle. The Schottky barrier diode includes a second semiconductor substrate including a second main surface. The second semiconductor substrate includes a first semiconductor region of a first conductivity type forming the second main surface, and a second semiconductor region of a second conductivity type formed on the second main surface. In the second semiconductor region, the angle with <1-100> of the second semiconductor substrate extends in a second direction of a second angle. The difference between the first angle and the second angle is 10° or less.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a semiconductor device. [Background technology]

[0002] Regarding a semiconductor device including a transistor and a diode connected in parallel with each other, a semiconductor device has been proposed in which the characteristics of a body diode built into a transistor are limited in order to prevent degradation due to electrical conduction (for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-198228 A Summary of the Invention [Problem to be solved by the invention]

[0004] In conventional semiconductor devices, the avalanche resistance of an inductive load (L load) can vary greatly when the temperature rises.

[0005] An object of the present disclosure is to provide a semiconductor device capable of controlling variations in inductive load avalanche resistance. [Means for solving the problem]

[0006] A semiconductor device according to the present disclosure includes a transistor and a Schottky barrier diode connected in parallel to the transistor, the transistor including a first semiconductor substrate having a first main surface and a gate electrode formed on the first main surface, the gate electrode extending in a first direction having a first angle with a <1-100> plane of the first semiconductor substrate, the Schottky barrier diode including a second semiconductor substrate having a second main surface, the second semiconductor substrate including a first semiconductor region of a first conductivity type constituting the second main surface and a second semiconductor region of a second conductivity type formed on the second main surface, the second semiconductor region extending in a second direction having a second angle with a <1-100> plane of the second semiconductor substrate, a difference between the first angle and the second angle being 10° or less. Effect of the Invention

[0007] According to the present disclosure, the variation in inductive load avalanche resistance can be controlled. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a top view showing a semiconductor module according to the first embodiment. [Diagram 2] FIG. 2 is a circuit diagram showing the semiconductor module according to the first embodiment. [Diagram 3] FIG. 3 is a diagram showing a unit cell of the first transistor in the first embodiment. [Figure 4] FIG. 4 is a cross-sectional view showing the first transistor in the first embodiment. [Diagram 5] FIG. 5 is a diagram showing a unit cell of the first diode in the first embodiment. [Figure 6] FIG. 6 is a cross-sectional view showing the first diode in the first embodiment. [Figure 7] FIG. 7 is a plan view showing a unit cell of the second transistor in the first embodiment. [Figure 8] FIG. 8 is a cross-sectional view showing the second transistor in the first embodiment. [Figure 9]FIG. 9 is a diagram showing a unit cell of the second diode in the first embodiment. [Figure 10] FIG. 10 is a cross-sectional view showing the second diode in the first embodiment. [Figure 11] FIG. 11 is a diagram showing a unit cell of the first transistor in the second embodiment. [Figure 12] FIG. 12 is a cross-sectional view showing a first transistor in the second embodiment. [Figure 13] FIG. 13 is a diagram showing a unit cell of the first diode in the second embodiment. [Figure 14] FIG. 14 is a cross-sectional view showing a first diode in the second embodiment. [Figure 15] FIG. 15 is a diagram showing a unit cell of the second transistor in the second embodiment. [Figure 16] FIG. 16 is a cross-sectional view showing a second transistor in the second embodiment. [Figure 17] FIG. 17 is a diagram showing a unit cell of the second diode in the second embodiment. [Figure 18] FIG. 18 is a cross-sectional view showing a second diode in the second embodiment. [Figure 19] FIG. 19 is a diagram showing the breakdown characteristics. [Figure 20] FIG. 20 is a diagram showing a unit cell of a modified example of the first transistor in the first embodiment. [Figure 21] FIG. 21 is a diagram showing a unit cell of a modified example of the first diode in the first embodiment. [Figure 22] FIG. 22 is a diagram showing a unit cell of a modified example of the first transistor in the second embodiment. [Diagram 23] FIG. 23 is a diagram showing a unit cell of a modified example of the first diode in the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The embodiments for carrying out the invention are described below.

[0010] [Description of the embodiments of the present disclosure] First, the embodiments of the present disclosure will be listed and described. In the following description, the same or corresponding elements are given the same symbols, and the same description will not be repeated. In the crystallographic description in this specification, individual orientations are indicated by [], collective orientations by <>, individual planes by (), and collective planes by {}. In addition, when a crystallographic index is negative, it is usually expressed by placing a "-" (bar) above the number, but in this specification, a negative sign is placed before the number.

[0011] [1] A semiconductor device according to one embodiment of the present disclosure includes a transistor and a Schottky barrier diode connected in parallel to the transistor, the transistor including a first semiconductor substrate having a first main surface and a gate electrode formed on the first main surface, the gate electrode extending in a first direction having a first angle with a <1-100> plane of the first semiconductor substrate, the Schottky barrier diode including a second semiconductor substrate having a second main surface, the second semiconductor substrate including a first semiconductor region of a first conductivity type constituting the second main surface and a second semiconductor region of a second conductivity type formed on the second main surface, the second semiconductor region extending in a second direction having a second angle with a <1-100> plane of the second semiconductor substrate, a difference between the first angle and the second angle being 10° or less.

[0012] In the semiconductor device, the breakdown voltages of the transistor and Schottky barrier diode change in a similar manner due to an increase in temperature. Therefore, even if the breakdown voltages of the transistor and Schottky barrier diode change due to an increase in temperature, the concentration of avalanche current in the transistor or diode can be suppressed, and the variation in the inductive load avalanche withstand capability can be controlled.

[0013] [2] In [1], the first angle may be 10° or less, and the second angle may be 10° or less. In this case, the temperature characteristics of the breakdown voltage of the transistor and the Schottky barrier diode are more likely to be uniform, and the variation in the inductive load avalanche resistance is more likely to be suppressed.

[0014] [3] In [1], the first angle may be 80° or more and 100° or less, and the second angle may be 80° or more and 100° or less. In this case, the temperature characteristics of the breakdown voltage of the transistor and the Schottky barrier diode are more likely to be uniform, and the variation in the inductive load avalanche resistance is more likely to be suppressed.

[0015] [4] In any one of [1] to [3], the transistor may be multiple, and the multiple transistors may be connected in parallel to the Schottky barrier diode. In this case, a large current may easily flow. The number of the transistors may be, for example, 2, 4, 6, or 12.

[0016] [5] In any one of [1] to [4], the Schottky barrier diode may be provided in plurality, and the Schottky barrier diode may be connected in parallel to the transistor. In this case, it is easy to return the current. The number of the Schottky barrier diodes may be, for example, two, four, six, or twelve. The number of the transistors and the number of the Schottky barrier diodes may be the same or different.

[0017] [6] In any one of [1] to [5], the semiconductor device may include an upper arm and a lower arm connected in series to the upper arm, the upper arm including a first combination of the transistor and the Schottky barrier diode, and the lower arm including a second combination of the transistor and the Schottky barrier diode. In this case, the semiconductor device is used in a power module including an upper arm and a lower arm, and the variation in inductive load avalanche resistance of the power module can be controlled.

[0018] [7] In any of [1] to [6], the Schottky barrier diode may have a mark for specifying a crystal orientation of the second semiconductor substrate. In this case, the Schottky barrier diode can be easily mounted on an insulating substrate or the like while taking into account the crystal orientation of the second semiconductor substrate.

[0019] [8] In any of [1] to [7], the first semiconductor substrate and the second semiconductor substrate may be silicon carbide substrates. Silicon carbide has anisotropy in dielectric breakdown strength, but by forming a structure according to the crystal orientation of the substrate, it is easy to control the variation in inductive load avalanche resistance.

[0020] [9] In any one of [1] to [8], the transistor may have a plurality of first unit cells whose longitudinal direction is the first direction, and the Schottky barrier diode may have a plurality of second unit cells whose longitudinal direction is the second direction. In this case, a dielectric breakdown occurs in one of the plurality of first unit cells in the transistor, and a dielectric breakdown occurs in one of the plurality of second unit cells in the Schottky barrier diode, causing an avalanche current to flow in both the transistor and the Schottky barrier diode.

[0021]

[10] In any of [1] to [9], a difference in breakdown voltage between the transistor and the Schottky barrier diode may be equal to or less than 100 V. In this case, an avalanche current can easily flow in both the transistor and the Schottky barrier diode.

[0022]

[11] In any one of [1] to

[10] , the Schottky barrier diode may have a higher breakdown voltage than the transistor, which makes it easier to reduce the difference between the breakdown voltage of the transistor and the breakdown voltage of the diode.

[0023]

[12] In any of [1] to

[11] , the breakdown voltage of the transistor and the breakdown voltage of the Schottky barrier diode may be 600 V or more. In this case, the improved breakdown voltage makes it easier to use in many applications.

[0024]

[13] In any of [1] to

[12] , a housing may be provided to house the transistor and the Schottky barrier diode. Heat generated by the transistor increases the temperature of the Schottky barrier diode, so that the breakdown voltages of the transistor and the Schottky barrier diode change in the same manner due to the increase in temperature, thereby making it possible to control variations in inductive load avalanche resistance.

[0025]

[14] In any of [1] to

[13] , an insulating substrate may be provided on which the transistor and the Schottky barrier diode are mounted. Heat generated by the transistor increases the temperature of the Schottky barrier diode, so that the breakdown voltages of the transistor and the Schottky barrier diode change in the same manner due to the increase in temperature, thereby making it possible to control variations in inductive load avalanche resistance.

[0026]

[15] In any of [1] to

[14] , the shortest distance between one or more of the transistors and one or more of the Schottky barrier diodes may be 1.0 cm or less. The shorter the distance between the transistors and the Schottky barrier diodes, the higher the integration density can be, but the temperature of the Schottky barrier diodes is also likely to increase due to heat generated by the transistors. Similarly, the breakdown voltages of the transistors and the Schottky barrier diodes change in the same way due to a rise in temperature, so that the variation in the inductive load avalanche resistance can be controlled.

[0027] [Details of the embodiment of the present disclosure] Hereinafter, the embodiments of the present disclosure will be described in detail, but the present embodiment is not limited thereto. In this specification and drawings, components having substantially the same functional configuration may be denoted by the same reference numerals to avoid repeated description. In this specification and drawings, the X1-X2 direction, the Y1-Y2 direction, and the Z1-Z2 direction are defined as mutually orthogonal directions. A plane including the X1-X2 direction and the Y1-Y2 direction is defined as the XY plane, a plane including the Y1-Y2 direction and the Z1-Z2 direction is defined as the YZ plane, and a plane including the Z1-Z2 direction and the X1-X2 direction is defined as the ZX plane. For convenience, the Z1 direction is defined as the upward direction, and the Z2 direction is defined as the downward direction. In this disclosure, planar view refers to viewing an object from the Z1 side.

[0028] (First embodiment) A first embodiment will be described. The first embodiment relates to a semiconductor module. Fig. 1 is a top view showing the semiconductor module according to the first embodiment. Fig. 2 is a circuit diagram showing the semiconductor module according to the first embodiment.

[0029] 1, the semiconductor module 100 according to the first embodiment mainly includes a heat sink 121, a housing 122, a P terminal 101, an N terminal 102, an O terminal 103, a first conductive pattern 111, a second conductive pattern 112, and a third conductive pattern 113. The semiconductor module 100 further includes a first transistor 200, a second transistor 400, a first diode 300, and a second diode 500.

[0030] The heat sink 121 is, for example, a rectangular plate-like body with a uniform thickness in a plan view. The material of the heat sink 121 is a metal with high thermal conductivity, such as copper (Cu), a copper alloy, aluminum (Al), etc. The heat sink 121 is fixed to a cooler or the like using a thermal interface material (TIM) or the like.

[0031] The housing 122 is formed, for example, in a frame shape in a plan view, and the outer shape of the housing 122 is the same as the outer shape of the heat sink 121. The material of the housing 122 is an insulator such as resin. The housing 122 has a pair of side walls 191 and 192 facing each other, and a pair of end walls 193 and 194 connecting both ends of the side walls 191 and 192. The side walls 191 and 192 are arranged parallel to the ZX plane, and the end walls 193 and 194 are arranged parallel to the YZ plane. The side wall 191 is arranged on the Y1 side of the side wall 192, and the end wall 193 is arranged on the X1 side of the end wall 194.

[0032] The P terminal 101 and the N terminal 102 are arranged on the upper surface (surface on the Z1 side) of the end wall portion 193, and the O terminal 103 is arranged on the upper surface (surface on the Z1 side) of the end wall portion 194. For example, the N terminal 102 is arranged on the Y2 side of the P terminal 101. The P terminal 101, the N terminal 102, and the O terminal 103 are each made of a metal plate.

[0033] An insulating substrate 123 is disposed on the Z1 side of the heat sink 121 inside the housing 122. The first conductive pattern 111, the second conductive pattern 112, and the third conductive pattern 113 are provided on the Z1 side surface of the insulating substrate 123. A conductive layer 114 (see FIGS. 4, 6, 8, and 10) is provided on the Z2 side surface of the insulating substrate 123. The conductive layer 114 is joined to the heat sink 121 by a joining material (not shown) such as solder.

[0034] The P terminal 101 is electrically connected to the first conductive pattern 111 , the O terminal 103 is electrically connected to the second conductive pattern 112 , and the N terminal 102 is electrically connected to the third conductive pattern 113 .

[0035] The first transistor 200 and the first diode 300 are provided on the first conductive pattern 111. A drain electrode 233 (see FIG. 4) of the first transistor 200 is bonded to the first conductive pattern 111 using a bonding material 116 (see FIG. 4) such as solder. A cathode electrode 333 (see FIG. 6) of the first diode 300 is bonded to the first conductive pattern 111 using a bonding material 117 (see FIG. 6) such as solder. A source electrode 232 (see FIG. 4) of the first transistor 200 is connected to the second conductive pattern 112 by a plurality of bonding wires 161. An anode electrode 332 (see FIG. 6) of the first diode 300 is connected to the source electrode 232 of the first transistor 200 by a plurality of bonding wires 171.

[0036] The second transistor 400 and the second diode 500 are provided on the second conductive pattern 112. A drain electrode 433 (see FIG. 8) of the second transistor 400 is bonded to the second conductive pattern 112 using a bonding material 118 (see FIG. 8) such as solder. A cathode electrode 533 (see FIG. 10) of the second diode 500 is bonded to the second conductive pattern 112 using a bonding material 119 (see FIG. 10) such as solder. A source electrode 432 (see FIG. 8) of the second transistor 400 is connected to the third conductive pattern 113 by a plurality of bonding wires 162. An anode electrode 532 (see FIG. 10) of the second diode 500 is connected to the source electrode 432 of the second transistor 400 by a plurality of bonding wires 172.

[0037] As shown in FIG. 2, the first transistor 200 and the second transistor 400 are connected in series between the P terminal 101 and the N terminal 102, and the O terminal 103 is connected between the first transistor 200 and the second transistor 400. In addition, the first diode 300 is connected in parallel to the first transistor 200, and the second diode 500 is connected in parallel to the second transistor 400. An upper arm 181 including the first transistor 200 and the first diode 300 is configured, and a lower arm 182 including the second transistor 400 and the second diode 500 is configured. The combination of the first transistor 200 and the first diode 300 is an example of a first combination, and the combination of the second transistor 400 and the second diode 500 is an example of a second combination.

[0038] [First transistor 200] Next, the first transistor 200 in the first embodiment will be described in detail. Fig. 3 is a diagram showing a unit cell of the first transistor 200 in the first embodiment, and Fig. 4 is a cross-sectional view showing the first transistor 200 in the first embodiment. Fig. 4 corresponds to a cross-sectional view taken along line IV-IV in Fig. 3.

[0039] The first transistor 200 mainly includes a silicon carbide substrate 210 , a gate electrode 231 , a source electrode 232 , and a drain electrode 233 .

[0040] The silicon carbide substrate 210 includes a silicon carbide single crystal substrate 206 and a silicon carbide epitaxial layer 207 on the silicon carbide single crystal substrate 206. The silicon carbide substrate 210 has a main surface 210A and a main surface 210B opposite to the main surface 210A. The silicon carbide epitaxial layer 207 constitutes the main surface 210A, and the silicon carbide single crystal substrate 206 constitutes the main surface 210B. The silicon carbide substrate 210 has a shape of, for example, a rectangular parallelepiped. The main surface 210A is a surface perpendicular to the Z1-Z2 direction. <1-100> is a direction parallel to the Y1-Y2 direction. The silicon carbide single crystal substrate 206 and the silicon carbide epitaxial layer 207 are composed of, for example, hexagonal silicon carbide of polytype 4H. Silicon carbide single crystal substrate 206 contains an n-type impurity such as nitrogen (N) and has an n-type. Silicon carbide substrate 210 is an example of a first semiconductor substrate, and main surface 210A is an example of a first main surface.

[0041] The primary surface 210A is a surface inclined from (0001) to the off direction. For example, the off direction is [11-20]. For example, the primary surface 210A is a surface inclined from (0001) to the off direction ([11-20]) at an off angle of 8° or less. The off angle may be, for example, 1° or more, or 2° or more. The off angle may be 6° or less, or 4° or less.

[0042] [11-20] is an orientation within (0001). However, since primary surface 210A is a surface inclined in the off-direction from (0001), [11-20] is not an orientation within primary surface 210A. The X1 direction corresponds to the orientation of [11-20] projected onto primary surface 210A, and the X2 direction corresponds to the orientation of [-1-120] projected onto primary surface 210A.

[0043] The first transistor 200 has an active region 201 and a termination region 202 disposed around the active region 201 .

[0044] In the active region 201 , the silicon carbide epitaxial layer 207 mainly includes a drift region 211 , a body region 212 , a source region 213 , a contact region 214 , and an electric field reduction region 215 .

[0045] The drift region 211 contains an n-type impurity such as nitrogen (N) and has an n-type conductivity. The drift region 211 constitutes the main surface 210B. The body region 212 is in contact with the drift region 211. The body region 212 contains a p-type impurity such as aluminum (Al) and has a p-type conductivity. The source region 213 is provided on the body region 212 so as to be separated from the drift region 211 by the body region 212. The source region 213 contains an n-type impurity such as nitrogen or phosphorus (P) and has an n-type conductivity. The source region 213 constitutes a part of the main surface 210A. The silicon carbide epitaxial layer 207 may have a buffer layer under the drift region 211.

[0046] A plurality of gate trenches 220 are provided in the main surface 210A. The plurality of gate trenches 220 extend parallel to the Y1-Y2 direction and are arranged side by side in the X1-X2 direction. The gate trench 220 is defined by a side surface 221 and a bottom surface 222. The bottom surface 222 is continuous with the side surface 221. The side surface 221 penetrates the source region 213 and the body region 212. The side surface 221 reaches the drift region 211. The bottom surface 222 is located in the drift region 211. The bottom surface 222 is approximately parallel to the main surface 210A. The side surface 221 is composed of the source region 213, the body region 212, and the drift region 211. The bottom surface 222 is composed of the drift region 211.

[0047] A gate insulating film 217 is formed in the gate trench 220, the gate insulating film 217 being in contact with the side surface 221 and the bottom surface 222. The gate insulating film 217 is in contact with the drift region 211 at the bottom surface 222. The gate insulating film 217 is in contact with the source region 213, the body region 212, and the drift region 211 at the side surface 221.

[0048] The gate electrode 231 is provided on the gate insulating film 217. The gate electrode 231 is made of, for example, polysilicon containing conductive impurities. The gate electrode 231 is disposed inside the gate trench 220. The gate electrode 231 faces the source region 213, the body region 212, and the drift region 211. The multiple gate electrodes 231 extend parallel to the Y1-Y2 direction and are disposed side by side in the X1-X2 direction. The Y1-Y2 direction is an example of a first direction. In this embodiment, a first angle between the <1-100> of the silicon carbide substrate 210 and the first direction is 0°.

[0049] The contact region 214 is provided between the gate trenches 220 adjacent to each other in the X1-X2 direction, away from the side surface 221 of each gate trench 220, penetrating the source region 213, and in contact with the body region 212. The contact region 214 constitutes a part of the main surface 210A. The contact region 214 contains p-type impurities such as aluminum and has p-type conductivity.

[0050] The electric field relaxation region 215 is provided between the gate trenches 220 adjacent to each other in the X1-X2 direction, away from the side surface 221 of each gate trench 220, so as to extend from the body region 212 toward the main surface 210B. The electric field relaxation region 215 contains p-type impurities such as aluminum and has p-type conductivity. The electric field relaxation region 215 has a lower end surface 215C, a first side end surface 215A, and a second side end surface 215B. The lower end surface 215C is approximately parallel to the XY plane. The first side end surface 215A and the second side end surface 215B are approximately parallel to the YZ plane. The first side end surface 215A is on the X1 side of the second side end surface 215B. The lower end surface 215C, the first side end surface 215A, and the second side end surface 215B are in contact with the drift region 211.

[0051] An interlayer insulating film 235 is provided so as to cover the gate trench 220 and the gate electrode 231. In the interlayer insulating film 235, a contact hole 236 that exposes a part of the source region 213 and the contact region 214 is formed.

[0052] The source electrode 232 is provided on the interlayer insulating film 235, and contacts the main surface 210A through a contact hole 236. The source electrode 232 is electrically connected to the source region 213 and the contact region 214. The interlayer insulating film 235 electrically insulates the gate electrode 231 and the source electrode 232 from each other.

[0053] The drain electrode 233 is in contact with the major surface 210B. The drain electrode 233 is electrically connected to the drift region 211.

[0054] The first transistor 200 includes a plurality of first unit cells 203, which are units of the periodic pattern of the gate trenches 220, in an active region 201. The plurality of first unit cells 203 are arranged in the X1-X2 direction with the Y1-Y2 direction as the longitudinal direction.

[0055] Termination region 202 is, for example, a region having a ring-shaped planar shape, and constitutes a part of main surface 210 A. Termination region 202 contains p-type impurities such as aluminum, and has p-type conductivity.

[0056] In the first transistor 200, when a voltage is applied between the source electrode 232 and the drain electrode 233, an electric field tends to concentrate in the electric field relaxation region 215 at the first corner 216A where the bottom end surface 215C and the first side end surface 215A intersect, and at the second corner 216B where the bottom end surface 215C and the second side end surface 215B intersect.

[0057] [First diode 300] Next, the first diode 300 in the first embodiment will be described in detail. The first diode 300 is a Schottky barrier diode having a JBS (Junction Barrier Schottky) structure. FIG. 5 is a diagram showing a unit cell of the first diode 300 in the first embodiment, and FIG. 6 is a cross-sectional view showing the first diode 300 in the first embodiment. FIG. 6 corresponds to a cross-sectional view taken along line VI-VI in FIG. 5.

[0058] The first diode 300 mainly includes a silicon carbide substrate 310 , an anode electrode 332 , and a cathode electrode 333 .

[0059] The silicon carbide substrate 310 includes a silicon carbide single crystal substrate 306 and a silicon carbide epitaxial layer 307 on the silicon carbide single crystal substrate 306. The silicon carbide substrate 310 has a main surface 310A and a main surface 310B opposite to the main surface 310A. The silicon carbide epitaxial layer 307 constitutes the main surface 310A, and the silicon carbide single crystal substrate 306 constitutes the main surface 310B. The silicon carbide substrate 310 has a shape of, for example, a rectangular parallelepiped. The main surface 310A is a surface perpendicular to the Z1-Z2 direction. <1-100> is a direction parallel to the Y1-Y2 direction. The silicon carbide single crystal substrate 306 and the silicon carbide epitaxial layer 307 are composed of, for example, hexagonal silicon carbide of polytype 4H. Silicon carbide single crystal substrate 306 contains an n-type impurity such as nitrogen and has an n-type. Silicon carbide substrate 310 is an example of a second semiconductor substrate, and main surface 310A is an example of a second main surface.

[0060] The primary surface 310A is a surface inclined from (0001) to the off direction. For example, the off direction is [11-20]. For example, the primary surface 310A is a surface inclined from (0001) to the off direction ([11-20]) at an off angle of 8° or less. The off angle may be, for example, 1° or more, or 2° or more. The off angle may be 6° or less, or 4° or less.

[0061] [11-20] is an orientation within (0001). However, since primary surface 310A is a surface inclined in the off-direction from (0001), [11-20] is not an orientation within primary surface 310A. The X1 direction corresponds to the orientation of [11-20] projected onto primary surface 310A, and the X2 direction corresponds to the orientation of [-1-120] projected onto primary surface 310A.

[0062] The first diode 300 has an active region 301 and a termination region 302 disposed around the active region 301 .

[0063] In the active region 301 , the silicon carbide epitaxial layer 307 mainly includes an n-type region 311 and a number of p-type regions 315 .

[0064] N-type region 311 contains n-type impurities such as nitrogen and has n-type conductivity. N-type region 311 constitutes main surface 310B and constitutes a part of main surface 310A. N-type region 311 is an example of a first semiconductor region.

[0065] A plurality of p-type regions 315 are provided on the main surface 310A. The p-type regions 315 constitute a part of the main surface 310A. The plurality of p-type regions 315 extend parallel to the Y1-Y2 direction and are arranged side by side in the X1-X2 direction. The p-type regions 315 contain p-type impurities such as aluminum and have p-type conductivity. The p-type regions 315 have a lower end surface 315C, a first side end surface 315A, and a second side end surface 315B. The lower end surface 315C is approximately parallel to the XY plane. The first side end surface 315A and the second side end surface 315B are approximately parallel to the YZ plane. The first side end surface 315A is on the X1 side of the second side end surface 315B. The lower end surface 315C, the first side end surface 315A, and the second side end surface 315B are in contact with the n-type region 311. The p-type region 315 is an example of a second semiconductor region, and the Y1-Y2 direction is an example of the second direction. In this embodiment, the second angle between the <1-100> of the silicon carbide substrate 310 and the second direction is 0°.

[0066] The anode electrode 332 is in contact with the main surface 310 A. The anode electrode 332 is electrically connected to the n-type region 311 and the p-type region 315.

[0067] The cathode electrode 333 is in contact with the main surface 310 B. The cathode electrode 333 is electrically connected to the n-type region 311.

[0068] The first diode 300 includes a plurality of second unit cells 303, which are units of the periodic pattern of the p-type regions 315, in the active region 301. The plurality of second unit cells 303 are arranged in the X1-X2 direction with the Y1-Y2 direction as the longitudinal direction.

[0069] Termination region 302 is, for example, a region having a ring-shaped planar shape, and constitutes a part of main surface 310 A. Termination region 302 contains p-type impurities such as aluminum, and has p-type conductivity.

[0070] Markings 319 for specifying the crystal orientation of silicon carbide substrate 310 may be provided on a portion of main surface 310A exposed from anode electrode 332. Markings 319 may directly indicate the crystal orientation. For example, the direction in which [11-20] faces may be indicated using Miller indices or a figure such as a triangle. Furthermore, the crystal orientation of silicon carbide substrate 310 may be indirectly indicated by the direction of a product number, etc.

[0071] In the first diode 300, when a voltage is applied between the anode electrode 332 and the cathode electrode 333, an electric field tends to concentrate in the p-type region 315 at the first corner 316A where the bottom end surface 315C and the first side end surface 315A intersect, and at the second corner 316B where the bottom end surface 315C and the second side end surface 315B intersect.

[0072] [Second transistor 400] Next, the second transistor 400 will be described in detail. Fig. 7 is a plan view showing a unit cell of the second transistor 400 in the first embodiment, and Fig. 8 is a cross-sectional view showing the second transistor 400 in the first embodiment. Fig. 8 corresponds to a cross-sectional view taken along line VIII-VIII in Fig. 7.

[0073] The second transistor 400 mainly includes a silicon carbide substrate 410 , a gate electrode 431 , a source electrode 432 , and a drain electrode 433 .

[0074] The silicon carbide substrate 410 includes a silicon carbide single crystal substrate 406 and a silicon carbide epitaxial layer 407 on the silicon carbide single crystal substrate 406. The silicon carbide substrate 410 has a main surface 410A and a main surface 410B opposite to the main surface 410A. The silicon carbide epitaxial layer 407 constitutes the main surface 410A, and the silicon carbide single crystal substrate 406 constitutes the main surface 410B. The silicon carbide substrate 410 has a shape of, for example, a rectangular parallelepiped. The main surface 410A is a surface perpendicular to the Z1-Z2 direction. <1-100> is a direction parallel to the Y1-Y2 direction. The silicon carbide single crystal substrate 406 and the silicon carbide epitaxial layer 407 are composed of, for example, hexagonal silicon carbide of polytype 4H. Silicon carbide single crystal substrate 406 contains an n-type impurity such as nitrogen and has an n-type. Silicon carbide substrate 410 is an example of a first semiconductor substrate, and main surface 410A is an example of a first main surface.

[0075] The main surface 410A is a surface inclined from (0001) to the off direction. For example, the off direction is [11-20]. For example, the main surface 410A is a surface inclined from (0001) to the off direction ([11-20]) at an off angle of 8° or less. The off angle may be, for example, 1° or more, or 2° or more. The off angle may be 6° or less, or 4° or less.

[0076] [11-20] is an orientation within (0001). However, since primary surface 410A is a surface inclined in the off-direction from (0001), [11-20] is not an orientation within primary surface 410A. The X1 direction corresponds to the orientation of [11-20] projected onto primary surface 410A, and the X2 direction corresponds to the orientation of [-1-120] projected onto primary surface 410A.

[0077] The second transistor 400 has an active region 401 and a termination region 402 disposed around the active region 401 .

[0078] In the active region 401 , the silicon carbide epitaxial layer 207 mainly includes a drift region 411 , a body region 412 , a source region 413 , a contact region 414 , and an electric field reduction region 415 .

[0079] The drift region 411 contains an n-type impurity such as nitrogen and has an n-type conductivity. The drift region 411 constitutes the main surface 410B. The body region 412 is in contact with the drift region 411. The body region 412 contains a p-type impurity such as aluminum and has a p-type conductivity. The source region 413 is provided on the body region 412 so as to be separated from the drift region 411 by the body region 412. The source region 413 contains an n-type impurity such as nitrogen or phosphorus and has an n-type conductivity. The source region 413 constitutes a part of the main surface 410A. The silicon carbide epitaxial layer 407 may have a buffer layer under the drift region 411.

[0080] A plurality of gate trenches 420 are provided in the main surface 410A. The plurality of gate trenches 420 extend parallel to the Y1-Y2 direction and are arranged side by side in the X1-X2 direction. The gate trench 420 is defined by a side surface 421 and a bottom surface 422. The bottom surface 422 is continuous with the side surface 421. The side surface 421 penetrates the source region 413 and the body region 412. The side surface 421 reaches the drift region 411. The bottom surface 422 is located in the drift region 411. The bottom surface 422 is approximately parallel to the main surface 410A. The side surface 421 is composed of the source region 413, the body region 412, and the drift region 411. The bottom surface 422 is composed of the drift region 411.

[0081] A gate insulating film 417 is formed in the gate trench 420, the gate insulating film 417 being in contact with a side surface 421 and a bottom surface 422. The gate insulating film 417 is in contact with the drift region 411 at the bottom surface 422. The gate insulating film 417 is in contact with the source region 413, the body region 412, and the drift region 411 at the side surface 421.

[0082] The gate electrode 431 is provided on the gate insulating film 417. The gate electrode 431 is made of, for example, polysilicon containing conductive impurities. The gate electrode 431 is disposed inside the gate trench 420. The gate electrode 431 faces the source region 413, the body region 412, and the drift region 411. The multiple gate electrodes 431 extend parallel to the Y1-Y2 direction and are disposed side by side in the X1-X2 direction. The Y1-Y2 direction is an example of a first direction. In this embodiment, a first angle between the <1-100> of the silicon carbide substrate 410 and the first direction is 0°.

[0083] The contact region 414 is provided between the gate trenches 420 adjacent to each other in the X1-X2 direction, away from the side surface 421 of each gate trench 420, penetrating the source region 413, and in contact with the body region 412. The contact region 414 constitutes a part of the main surface 410A. The contact region 414 contains p-type impurities such as aluminum and has p-type conductivity.

[0084] The electric field relaxation region 415 is provided between the gate trenches 420 adjacent to each other in the X1-X2 direction, away from the side surface 421 of each gate trench 420, so as to extend from the body region 412 toward the main surface 410B. The electric field relaxation region 415 contains p-type impurities such as aluminum and has p-type conductivity. The electric field relaxation region 415 has a lower end surface 415C, a first side end surface 415A, and a second side end surface 415B. The lower end surface 415C is approximately parallel to the XY plane. The first side end surface 415A and the second side end surface 415B are approximately parallel to the YZ plane. The first side end surface 415A is on the X1 side of the second side end surface 415B. The lower end surface 415C, the first side end surface 415A, and the second side end surface 415B are in contact with the drift region 411.

[0085] An interlayer insulating film 435 is provided so as to cover the gate trench 420 and the gate electrode 431. In the interlayer insulating film 435, a contact hole 436 that exposes a part of the source region 413 and the contact region 414 is formed.

[0086] The source electrode 432 is provided on the interlayer insulating film 435, and contacts the main surface 410A through a contact hole 436. The source electrode 432 is electrically connected to the source region 413 and the contact region 414. The interlayer insulating film 435 electrically insulates the gate electrode 431 and the source electrode 432 from each other.

[0087] The drain electrode 433 is in contact with the major surface 410B. The drain electrode 433 is electrically connected to the drift region 411.

[0088] The second transistor 400 includes a plurality of first unit cells 403, which are units of the periodic pattern of the gate trenches 420, in an active region 401. The plurality of first unit cells 403 are arranged in the X1-X2 direction with the Y1-Y2 direction as the longitudinal direction.

[0089] Termination region 402 is, for example, a region having a ring-shaped planar shape, and constitutes a part of main surface 410 A. Termination region 402 contains p-type impurities such as aluminum, and has p-type conductivity.

[0090] In the second transistor 400, when a voltage is applied between the source electrode 432 and the drain electrode 433, an electric field tends to concentrate in the electric field relaxation region 415 at a first corner 416A where the bottom end surface 415C and the first side end surface 415A intersect, and at a second corner 416B where the bottom end surface 415C and the second side end surface 415B intersect.

[0091] [Second Diode 500] Next, the second diode 500 will be described in detail. The second diode 500 is a Schottky barrier diode having a JBS structure. Fig. 9 is a diagram showing a unit cell of the second diode 500 in the first embodiment, and Fig. 10 is a cross-sectional view showing the second diode 500 in the first embodiment. Fig. 10 corresponds to a cross-sectional view taken along line XX in Fig. 9.

[0092] The second diode 500 mainly includes a silicon carbide substrate 510 , an anode electrode 532 , and a cathode electrode 533 .

[0093] The silicon carbide substrate 510 includes a silicon carbide single crystal substrate 506 and a silicon carbide epitaxial layer 507 on the silicon carbide single crystal substrate 506. The silicon carbide substrate 510 has a main surface 510A and a main surface 510B opposite to the main surface 510A. The silicon carbide epitaxial layer 507 constitutes the main surface 510A, and the silicon carbide single crystal substrate 506 constitutes the main surface 510B. The silicon carbide substrate 510 has a shape of, for example, a rectangular parallelepiped. The main surface 510A is a surface perpendicular to the Z1-Z2 direction. <1-100> is a direction parallel to the Y1-Y2 direction. The silicon carbide single crystal substrate 506 and the silicon carbide epitaxial layer 507 are composed of, for example, hexagonal silicon carbide of polytype 4H. Silicon carbide single crystal substrate 506 contains an n-type impurity such as nitrogen and has an n-type. Silicon carbide substrate 510 is an example of a second semiconductor substrate, and main surface 510A is an example of a second main surface.

[0094] Primary surface 510A is a surface inclined from (0001) to the off direction. For example, the off direction is [11-20]. For example, primary surface 510A is a surface inclined from (0001) to the off direction ([11-20]) at an off angle of 8° or less. The off angle may be, for example, 1° or more, or 2° or more. The off angle may be 6° or less, or 4° or less.

[0095] [11-20] is an orientation within (0001). However, since primary surface 510A is a surface inclined in the off-direction from (0001), [11-20] is not an orientation within primary surface 510A. The X1 direction corresponds to the orientation of [11-20] projected onto primary surface 510A, and the X2 direction corresponds to the orientation of [-1-120] projected onto primary surface 510A.

[0096] The second diode 500 has an active region 501 and a termination region 502 disposed around the active region 501 .

[0097] In the active region 501 , the silicon carbide epitaxial layer 507 mainly includes an n-type region 511 and a number of p-type regions 515 .

[0098] N-type region 511 contains an n-type impurity such as nitrogen and has n-type conductivity. N-type region 511 constitutes main surface 510B and constitutes a part of main surface 510A. N-type region 511 is an example of a first semiconductor region.

[0099] A plurality of p-type regions 515 are provided on the main surface 510A. The p-type regions 515 constitute a part of the main surface 510A. The plurality of p-type regions 515 extend parallel to the Y1-Y2 direction and are arranged side by side in the X1-X2 direction. The p-type regions 515 contain p-type impurities such as aluminum and have p-type conductivity. The p-type regions 515 have a lower end surface 515C, a first side end surface 515A, and a second side end surface 515B. The lower end surface 515C is approximately parallel to the XY plane. The first side end surface 515A and the second side end surface 515B are approximately parallel to the YZ plane. The first side end surface 515A is on the X1 side of the second side end surface 515B. The lower end surface 515C, the first side end surface 515A, and the second side end surface 515B are in contact with the n-type region 511. The p-type region 515 is an example of a semiconductor region of a second conductivity type. The Y1-Y2 direction is an example of a second direction. In this embodiment, a second angle formed between the <1-100> of the silicon carbide substrate 510 and the second direction is 0°.

[0100] The anode electrode 532 is in contact with the main surface 510 A. The anode electrode 532 is electrically connected to the n-type region 511 and the p-type region 515.

[0101] Cathode electrode 533 is in contact with main surface 510 B. Cathode electrode 533 is electrically connected to n-type region 511.

[0102] The second diode 500 includes a plurality of second unit cells 503, which are units of the periodic pattern of the p-type regions 515, in an active region 501. The plurality of second unit cells 503 are arranged in the X1-X2 direction with the Y1-Y2 direction as the longitudinal direction.

[0103] Termination region 502 is, for example, a region having a ring-shaped planar shape, and constitutes a part of main surface 510 A. Termination region 502 contains p-type impurities such as aluminum, and has p-type conductivity.

[0104] Marking 519 for specifying the crystal orientation of silicon carbide substrate 510 may be provided on a portion of main surface 510A exposed from anode electrode 532. Marking 519 may directly indicate the crystal orientation. For example, the direction in which [11-20] faces may be indicated using Miller indices or a figure such as a triangle. Also, the crystal orientation of silicon carbide substrate 510 may be indirectly indicated by the direction of a product number, etc.

[0105] In the second diode 500, when a voltage is applied between the anode electrode 532 and the cathode electrode 533, an electric field tends to concentrate in the p-type region 515 at a first corner 516A where the bottom end surface 515C and the first side end surface 515A intersect, and at a second corner 516B where the bottom end surface 515C and the second side end surface 515B intersect.

[0106] [Functions and Effects of the First Embodiment] Here, the effects of the first embodiment will be described.

[0107] In the upper arm 181, the first transistor 200 and the first diode 300 are mounted on the insulating substrate 123, and the first transistor 200 and the first diode 300 are connected in parallel to each other inside the housing 122. Therefore, if the temperature of the first transistor 200 rises due to operation, the temperature of the first diode 300 also rises. In general, the breakdown voltage of a transistor and the breakdown voltage of a Schottky barrier diode have temperature dependence, and the breakdown voltage increases as the temperature increases. The temperature dependence of the breakdown voltage depends on the crystal orientation of silicon carbide.

[0108] In general, silicon carbide has anisotropy in dielectric breakdown strength. For example, when the electric field strength is the same, dielectric breakdown is more likely to occur when the electric field is applied to the <11-20> than when the electric field is applied to the <1-100>.

[0109] Therefore, in the first transistor 200, dielectric breakdown is likely to occur at the pn junction interfaces between the drift region 211 and the first side end surface 215A and the second side end surface 215B of the electric field reduction region 215. Furthermore, in the first transistor 200, since the <11-20> is non-parallel to the main surface 210A, dielectric breakdown is more likely to occur at the pn junction interface between the drift region 211 and the second side end surface 215B than at the pn junction interface between the drift region 211 and the first side end surface 215A.

[0110] In the first diode 300, dielectric breakdown is more likely to occur at the pn junction interfaces between the n-type region 311 and the first and second side end faces 315A and 315B of the p-type region. Furthermore, in the first diode 300, since the <11-20> is non-parallel to the main surface 310A, dielectric breakdown is more likely to occur at the pn junction interface between the n-type region 311 and the second side end face 315B than at the pn junction interface between the n-type region 311 and the first side end face 315A.

[0111] As described above, in the first transistor 200, when a voltage is applied between the source electrode 232 and the drain electrode 233, an electric field tends to concentrate at the first corner 216A and the second corner 216B of the electric field relaxation region 215. In addition, the gate electrode 231 and the electric field relaxation region 215 extend parallel to the Y1-Y2 direction (<1-100>), and the first corner 216A and the second corner 216B also extend parallel to the Y1-Y2 direction (<1-100>).

[0112] Thus, in the first transistor 200, the first corner portion 216A and the second corner portion 216B are world This is a portion where concentration is likely to occur and where dielectric breakdown is likely to occur. The first corner portion 216A and the second corner portion 216B are present over a wide range in the Y1-Y2 direction. Therefore, in the first transistor 200, dielectric breakdown is more likely to occur than in a case where the first corner portion 216A and the second corner portion 216B extend parallel to the X1-X2 direction.

[0113] In the first diode 300, when a voltage is applied between the anode electrode 332 and the cathode electrode 333, an electric field tends to concentrate at the first corner 316A and the second corner 316B of the p-type region 315. In addition, the p-type region 315 extends parallel to the Y1-Y2 direction (<1-100>), and the first corner 316A and the second corner 316B also extend parallel to the Y1-Y2 direction (<1-100>).

[0114] Thus, in the first diode 300, the first corner portion 316A and the second corner portion 316B are world This is a portion where concentration is likely to occur and where dielectric breakdown is likely to occur. The first corner portion 316A and the second corner portion 316B are present over a wide range in the Y1-Y2 direction. Therefore, in the first diode 300, dielectric breakdown is more likely to occur than in a case where the first corner portion 316A and the second corner portion 316B extend parallel to the X1-X2 direction.

[0115] Therefore, when the breakdown voltage of the first transistor 200 increases due to a rise in temperature, the breakdown voltage of the first diode 300 also increases due to a rise in temperature in a similar manner to that of the first transistor 200. This makes it possible to control variations in the inductive load avalanche resistance of the upper arm 181 caused by a rise in temperature.

[0116] Furthermore, in the case where a plurality of upper arms 181 are provided within the housing 122, the variation in the inductive load avalanche resistance caused by the temperature rise among the plurality of upper arms 181 can be controlled.

[0117] In the lower arm 182, the second transistor 400 and the second diode 500 are mounted on the insulating substrate 123, and the second transistor 400 and the second diode 500 are connected in parallel to each other inside the housing 122. Therefore, if the temperature of the second transistor 400 rises due to operation, the temperature of the second diode 500 also rises.

[0118] In the second transistor 400, for the same reason as in the first transistor 200, the first corner portion 416A and the second corner portion 416B are worldThis is a portion where concentration is likely to occur and where dielectric breakdown is likely to occur. The first corner portion 416A and the second corner portion 416B are present over a wide range in the Y1-Y2 direction. Therefore, in the second transistor 400, dielectric breakdown is more likely to occur than in a case where the first corner portion 416A and the second corner portion 416B extend parallel to the X1-X2 direction.

[0119] In the second diode 500, for the same reason as in the first diode 300, the first corner portion 516A and the second corner portion 516B are world This is a portion where concentration is likely to occur and where dielectric breakdown is likely to occur. The first corner portion 516A and the second corner portion 516B are present over a wide range in the Y1-Y2 direction. Therefore, in the second diode 500, dielectric breakdown is more likely to occur than in a case where the first corner portion 516A and the second corner portion 516B extend parallel to the X1-X2 direction.

[0120] Therefore, when the breakdown voltage of the second transistor 400 increases due to a rise in temperature, the breakdown voltage of the second diode 500 also increases due to a rise in temperature in a similar manner to that of the second transistor 400. This makes it possible to control variations in the inductive load avalanche resistance of the lower arm 182 caused by a rise in temperature.

[0121] Furthermore, in the case where a plurality of lower arms 182 are provided within the housing 122, the variation in the inductive load avalanche resistance caused by the temperature rise among the plurality of lower arms 182 can be controlled.

[0122] Since the inductive load avalanche resistance can be improved in both the upper arm 181 and the lower arm 182, the semiconductor module 100 can be used as a power module, and the variation in the inductive load avalanche resistance of the power module can be controlled.

[0123] A high dielectric breakdown voltage is easily obtained because the silicon carbide substrates 210, 310, 410, and 510 are used. As described above, silicon carbide has anisotropy in dielectric breakdown strength, but by forming a structure according to the crystal orientation of the substrate, it is easy to control the variation in inductive load avalanche resistance.

[0124] When the markers 319, 519 are provided, the first diode 300 and the second diode 500 can be easily mounted on the insulating substrate 123 or the like while taking into consideration the crystal orientation of the silicon carbide substrates 310, 510. The markers 319, 519 may be provided on the anode electrodes 332, 532 instead of the silicon carbide substrates 310, 510.

[0125] In the first embodiment, the first angle does not have to be 0°, but is preferably 10° or less, and more preferably 5° or less, because if the first angle deviates too much from 0°, the channel mobility of electrons in the portion of the body region 212, 412 that functions as a channel may decrease.

[0126] Also, the second angle does not have to be 0°, but is preferably 10° or less, and more preferably 5° or less. If the difference between the second angle and the first angle becomes large, it may become difficult to uniform the temperature characteristics of the breakdown voltage of the first transistor 200 and the first diode 300, or it may become difficult to uniform the temperature characteristics of the breakdown voltage of the second transistor 400 and the second diode 500, which may make it difficult to control the variation in the inductive load avalanche resistance.

[0127] Second embodiment A second embodiment will be described. The second embodiment differs from the first embodiment in the configurations of the first transistor, the first diode, the second transistor, and the second diode. That is, the semiconductor device according to the second embodiment has a first transistor 600, a first diode 700, a second transistor 800, and a second diode 900 instead of the first transistor 200, the first diode 300, the second transistor 400, and the second diode 500.

[0128] [First transistor 600] First, the first transistor 600 in the second embodiment will be described in detail. Fig. 11 is a diagram showing a unit cell of the first transistor 600 in the second embodiment, and Fig. 12 is a cross-sectional view showing the first transistor 600 in the second embodiment. Fig. 12 corresponds to a cross-sectional view taken along line XII-XII in Fig. 11.

[0129] Similar to the first transistor 200, the first transistor 600 mainly includes a silicon carbide substrate 210, a gate electrode 231, a source electrode 232, and a drain electrode 233.

[0130] In the second embodiment, a plurality of gate trenches 220 extend parallel to the X1-X2 direction and are arranged side by side in the Y1-YX2 direction. A plurality of gate electrodes 231 extend parallel to the X1-X2 direction and are arranged side by side in the Y1-Y2 direction. The X1-X2 direction is an example of a first direction. In this embodiment, a first angle formed between the <1-100> of the silicon carbide substrate 210 and the first direction is 90°.

[0131] The electric field reduction region 215 is provided between adjacent gate trenches 220 in the Y1-Y2 direction, away from the side surface 221 of each gate trench 220, and extends from the body region 212 toward the main surface 210B. The bottom end surface 215C is approximately parallel to the XY plane. The first side end surface 215A and the second side end surface 215B are approximately parallel to the ZX plane. The first side end surface 215A is on the Y1 side of the second side end surface 215B.

[0132] The first transistor 600 includes a plurality of first unit cells 603, which are units of the periodic pattern of the gate trenches 220, in the active region 201. The plurality of first unit cells 603 are arranged in the Y1-Y2 direction with the X1-X2 direction as the longitudinal direction.

[0133] The other configuration is similar to that of the first transistor 200 .

[0134] [First diode 700] Next, the first diode 700 in the second embodiment will be described in detail. Fig. 13 is a diagram showing a unit cell of the first diode 700 in the second embodiment, and Fig. 14 is a cross-sectional view showing the first diode 700 in the second embodiment. Fig. 14 corresponds to a cross-sectional view taken along line XIV-XIV in Fig. 13.

[0135] Similar to the first diode 300 , the first diode 700 mainly includes a silicon carbide substrate 310 , an anode electrode 332 , and a cathode electrode 333 .

[0136] In the second embodiment, the multiple p-type regions 315 extend parallel to the X1-X2 direction and are arranged side by side in the Y1-Y2 direction. The bottom end face 315C is approximately parallel to the XY plane. The first side end face 315A and the second side end face 315B are approximately parallel to the ZX plane. The first side end face 315A is on the Y1 side of the second side end face 315B. The X1-X2 direction is an example of the second direction. In this embodiment, the second angle between the <1-100> of the silicon carbide substrate 310 and the second direction is 90°.

[0137] The first diode 700 includes a plurality of second unit cells 703, which are units of the periodic pattern of the p-type regions 315, in the active region 301. The plurality of second unit cells 703 are longitudinally aligned in the X1-X2 direction and aligned in the Y1-Y2 direction.

[0138] The other configuration is similar to that of the first diode 300 .

[0139] [Second transistor 800] Next, the second transistor 800 in the second embodiment will be described in detail. Fig. 15 is a diagram showing a unit cell of the second transistor 800 in the second embodiment, and Fig. 16 is a cross-sectional view showing the second transistor 800 in the second embodiment. Fig. 16 corresponds to a cross-sectional view taken along line XVI-XVI in Fig. 15.

[0140] Similar to the second transistor 400, the second transistor 800 mainly includes a silicon carbide substrate 410, a gate electrode 431, a source electrode 432, and a drain electrode 433.

[0141] In the second embodiment, a plurality of gate trenches 420 extend parallel to the X1-X2 direction and are arranged side by side in the Y1-YX2 direction. A plurality of gate electrodes 431 extend parallel to the X1-X2 direction and are arranged side by side in the Y1-Y2 direction. The X1-X2 direction is an example of a first direction. In this embodiment, a first angle formed between the <1-100> of the silicon carbide substrate 410 and the first direction is 90°.

[0142] The electric field reduction region 415 is provided between adjacent gate trenches 420 in the Y1-Y2 direction, away from the side surface 421 of each gate trench 420, and extends from the body region 412 toward the main surface 410B. The bottom end surface 415C is approximately parallel to the XY plane. The first side end surface 415A and the second side end surface 415B are approximately parallel to the ZX plane. The first side end surface 415A is on the Y1 side of the second side end surface 415B.

[0143] The second transistor 800 includes a plurality of first unit cells 803, which are units of the periodic pattern of the gate trenches 420, in the active region 401. The plurality of first unit cells 803 are longitudinally aligned in the X1-X2 direction and aligned in the Y1-Y2 direction.

[0144] The other configuration is similar to that of the second transistor 400 .

[0145] [Second Diode 900] Next, the second diode 900 in the second embodiment will be described in detail. Fig. 17 is a diagram showing a unit cell of the second diode 900 in the second embodiment, and Fig. 18 is a cross-sectional view showing the second diode 900 in the second embodiment. Fig. 18 corresponds to a cross-sectional view taken along line XVIII-XVIII in Fig. 17.

[0146] Similar to the second diode 500, the second diode 900 mainly includes a silicon carbide substrate 510, an anode electrode 532, and a cathode electrode 533.

[0147] In the second embodiment, the multiple p-type regions 515 extend parallel to the X1-X2 direction and are arranged side by side in the Y1-Y2 direction. The bottom end face 515C is approximately parallel to the XY plane. The first side end face 515A and the second side end face 515B are approximately parallel to the ZX plane. The first side end face 515A is on the Y1 side of the second side end face 515B. The X1-X2 direction is an example of the second direction. In this embodiment, the second angle between the <1-100> of the silicon carbide substrate 510 and the second direction is 90°.

[0148] The second diode 900 includes a plurality of second unit cells 903, which are units of the periodic pattern of the p-type regions 515, in the active region 501. The plurality of second unit cells 903 are longitudinally aligned in the X1-X2 direction and aligned in the Y1-Y2 direction.

[0149] The other configuration is similar to that of the second diode 500 .

[0150] [Functions and Effects of the Second Embodiment] Here, the effects of the second embodiment will be described.

[0151] As described above, if the strength of the electric field is the same, when an electric field is applied to <11-20>, dielectric breakdown is more likely to occur in the former than when an electric field is applied to <1-100>.

[0152] In the first transistor 600, the first corner 216A and the second corner 216B are world Although this is a portion where concentration is likely to occur, it is also a portion where dielectric breakdown is unlikely to occur. The first corner portion 216A and the second corner portion 216B are present over a wide range in the X1-X2 direction. Therefore, in the first transistor 200, dielectric breakdown is unlikely to occur compared to a case where the first corner portion 216A and the second corner portion 216B extend parallel to the Y1-Y2 direction.

[0153] In the first diode 700, the first corner portion 316A and the second corner portion 316B are world Although this is a portion where concentration is likely to occur, it is also a portion where dielectric breakdown is unlikely to occur. The first corner portion 316A and the second corner portion 316B are present over a wide range in the X1-X2 direction. Therefore, in the first diode 300, dielectric breakdown is unlikely to occur compared to a case where the first corner portion 316A and the second corner portion 316B extend parallel to the Y1-Y2 direction.

[0154] Therefore, when the breakdown voltage of the first transistor 600 increases due to a rise in temperature, the breakdown voltage of the first diode 700 also increases due to a rise in temperature in a similar manner to that of the first transistor 600. This makes it possible to control variations in the inductive load avalanche resistance of the upper arm 181 caused by a rise in temperature.

[0155] Furthermore, in the case where a plurality of upper arms 181 are provided within the housing 122, the variation in the inductive load avalanche resistance caused by the temperature rise among the plurality of upper arms 181 can be controlled.

[0156] In the second transistor 800, the first corner 416A and the second corner 416B are world Although this is a portion where concentration is likely to occur, it is also a portion where dielectric breakdown is unlikely to occur. The first corner portion 416A and the second corner portion 416B are present over a wide range in the X1-X2 direction. Therefore, in the second transistor 800, dielectric breakdown is unlikely to occur compared to a case where the first corner portion 416A and the second corner portion 416B extend parallel to the Y1-Y2 direction.

[0157] In the second diode 900, the first corner 516A and the second corner 516B are world Although this is a portion where concentration is likely to occur, it is also a portion where dielectric breakdown is unlikely to occur. The first corner portion 516A and the second corner portion 516B are present over a wide range in the X1-X2 direction. Therefore, in the second diode 900, dielectric breakdown is unlikely to occur compared to a case where the first corner portion 516A and the second corner portion 516B extend parallel to the Y1-Y2 direction.

[0158] Therefore, when the breakdown voltage of the second transistor 800 increases due to a rise in temperature, the breakdown voltage of the second diode 900 also increases due to the rise in temperature in a similar manner to that of the second transistor 800. This makes it possible to control variations in the inductive load avalanche resistance of the lower arm 182 caused by a rise in temperature.

[0159] Furthermore, in the case where a plurality of lower arms 182 are provided within the housing 122, the variation in the inductive load avalanche resistance caused by the temperature rise among the plurality of lower arms 182 can be controlled.

[0160] In the second embodiment, the first angle does not have to be 90°, but is preferably 80° to 100°, and more preferably 85° to 95°. If the first angle deviates greatly from 90°, the channel mobility of electrons in the portion of the body region 212, 412 that functions as a channel may decrease.

[0161] Also, the second angle does not have to be 90°, but is preferably 80° to 100°, more preferably 85° to 95°. If the difference between the second angle and the first angle is large, it may become difficult to align the temperature characteristics of the breakdown voltage of the first transistor 600 and the first diode 700, or it may become difficult to align the temperature characteristics of the breakdown voltage of the second transistor 800 and the second diode 900, which may make it difficult to control the variation in the inductive load avalanche resistance.

[0162] A plurality of first transistors 200, 600 may be connected in parallel to one first diode 300, 700, and a plurality of second transistors 400, 800 may be connected in parallel to one second diode 500, 900. In these cases, the currents flowing through the upper arm 181 and the lower arm 182 can be increased.

[0163] A plurality of first diodes 300, 700 may be connected in parallel to one first transistor 200, 600, and a plurality of second diodes 500, 900 may be connected in parallel to one second transistor 400, 800. In these cases, it becomes easier to circulate current in the upper arm 181 and the lower arm 182, respectively.

[0164] Furthermore, the multiple first transistors 200, 600 and the multiple first diodes 300, 700 may be connected in parallel to each other, and the multiple second transistors 400, 800 and the multiple second diodes 500, 900 may be connected in parallel to each other.

[0165] In the present disclosure, a gallium nitride substrate, a gallium oxide substrate, or the like may be used as the semiconductor substrate.

[0166] The difference in breakdown voltage between the first transistor 200, 600 and the first diode 300, 700 is preferably 100 V or less, more preferably 80 V or less, and further preferably 60 V or less. This is because the smaller the difference in breakdown voltage, the easier it is for an avalanche current to flow through both the first transistor 200, 600 and the first diode 300, 700.

[0167] Similarly, the difference in breakdown voltage between the second transistor 400, 800 and the second diode 500, 900 is preferably 100 V or less, more preferably 80 V or less, and further preferably 60 V or less. This is because the smaller the difference in breakdown voltage, the easier it is for an avalanche current to flow through both the second transistor 400, 800 and the second diode 500, 900.

[0168] It is preferable that the breakdown voltage of the first diode 300, 700 is higher than the breakdown voltage of the first transistor 200, 600, and it is preferable that the breakdown voltage of the second diode 500, 900 is higher than the breakdown voltage of the second transistor 400, 800. In this case, it is easy to reduce the difference between the breakdown voltage of the first transistor 200, 600 and the breakdown voltage of the first diode 300, 700, and it is easy to reduce the difference between the breakdown voltage of the second transistor 400, 800 and the breakdown voltage of the second diode 500, 900.

[0169] The breakdown voltages of the first transistors 200 and 600, the first diodes 300 and 700, the second transistors 400 and 800, and the second diodes 500 and 900 are preferably 600 V or more, more preferably 700 V or more, and even more preferably 800 V or more. The improved breakdown voltage allows use in many applications.

[0170] In this disclosure, the dielectric breakdown voltage is the voltage at a current density of 10 mA / cm 2 This refers to the voltage when a current of 10 mA / cm flows in the reverse direction. FIG. 19 is a diagram showing breakdown characteristics. The horizontal axis of FIG. 19 indicates the reverse voltage, and the vertical axis indicates the current density of the reverse current. As shown in FIG. 19, in a transistor and a Schottky barrier diode, the reverse current increases as the reverse voltage increases, and when the reverse voltage exceeds a certain value, the reverse current increases rapidly. 2 The current density roughly corresponds to the voltage at which the reverse current is increasing rapidly.

[0171] The distance between the first transistor 200, 600 and the first diode 300, 700 is preferably 1.0 cm or less, and more preferably 0.8 cm or less. The shorter the distance between the first transistor 200, 600 and the first diode 300, 700, the higher the integration degree. In addition, the shorter this distance, the easier it is for the temperature of the first diode 300, 700 to rise due to the heat generated by the first transistor 200, 600, but the more the variation in the inductive load avalanche resistance can be controlled. In the case where two or more first transistors 200, 600 are provided or two or more first diodes 300, 700 are provided, the shortest distance between the first transistor 200, 600 and the first diode 300, 700 is preferably 1.0 cm or less, and more preferably 0.8 cm or less.

[0172] Similarly, the distance between the second transistor 400, 800 and the second diode 500, 900 is preferably 1.0 cm or less, more preferably 0.8 cm or less. When two or more second transistors 400, 800 are provided or when two or more second diodes 500, 900 are provided, the shortest distance between the second transistor 400, 800 and the second diode 500, 900 is preferably 1.0 cm or less, more preferably 0.8 cm or less.

[0173] In the first transistor 200, a plurality of first unit cells having the Y1-Y2 direction as a longitudinal direction may be arranged in the Y1-Y2 direction. Fig. 20 is a diagram showing a unit cell of a modification of the first transistor 200 in the first embodiment. In this modification, a plurality of first unit cells 204 having the Y1-Y2 direction as a longitudinal direction are arranged in the Y1-Y2 direction. In addition, a plurality of groups each made up of a plurality of first unit cells 204 arranged in the Y1-Y2 direction are arranged in the X1-X2 direction.

[0174] Similarly, in the second transistor 400, a plurality of first unit cells having the Y1-Y2 direction as the longitudinal direction may be arranged in the Y1-Y2 direction.

[0175] In the first diode 300, a plurality of second unit cells having the Y1-Y2 direction as their longitudinal direction may be arranged in the Y1-Y2 direction. Fig. 21 is a diagram showing a unit cell of a modification of the first diode 300 in the first embodiment. In this modification, a plurality of second unit cells 304 having the Y1-Y2 direction as their longitudinal direction are arranged in the Y1-Y2 direction. A plurality of groups each made up of a plurality of second unit cells 304 arranged in the Y1-Y2 direction are arranged in the X1-X2 direction.

[0176] Similarly, in the second diode 500, a plurality of second unit cells having the Y1-Y2 direction as the longitudinal direction may be arranged in the Y1-Y2 direction.

[0177] In the first transistor 600, a plurality of first unit cells having the X1-X2 direction as a longitudinal direction may be arranged in the X1-X2 direction. Fig. 22 is a diagram showing a unit cell of a modification of the first transistor 600 in the second embodiment. In this modification, a plurality of first unit cells 604 having the X1-X2 direction as a longitudinal direction are arranged in the X1-X2 direction. In addition, a plurality of groups each composed of a plurality of first unit cells 604 arranged in the X1-X2 direction are arranged in the Y1-Y2 direction.

[0178] Similarly, in the second transistor 800, a plurality of first unit cells having the longitudinal direction in the X1-X2 direction may be arranged in the X1-X2 direction.

[0179] In the first diode 700, a plurality of second unit cells having the X1-X2 direction as their longitudinal direction may be arranged in the X1-X2 direction. Fig. 23 is a diagram showing a unit cell of a modification of the first diode 700 in the second embodiment. In this modification, a plurality of second unit cells 704 having the X1-X2 direction as their longitudinal direction are arranged in the X1-X2 direction. A plurality of groups each made up of a plurality of second unit cells 704 arranged in the X1-X2 direction are arranged in the Y1-Y2 direction.

[0180] Similarly, in the second diode 900, a plurality of second unit cells having the longitudinal direction in the X1-X2 direction may be arranged in the X1-X2 direction.

[0181] Although the embodiments have been described in detail above, the present invention is not limited to the specific embodiments, and various modifications and changes are possible within the scope of the claims. [Explanation of symbols]

[0182] 100: Semiconductor module 101:P terminal 102:N terminal 103:O terminal 111: First conductive pattern 112: second conductive pattern 113: Third conductive pattern 114: Conductive layer 116, 117, 118, 119: Bonding material 121: Heat sink 122: Cabinet 123: Insulating substrate 161, 162, 171, 172: Bonding wire 181: Upper arm 182: Lower arm 191, 192: Side wall 193, 194: End wall 200: First transistor 201:Active region 202: Termination area 203, 204: First unit cell 206: Silicon carbide single crystal substrate 207: Silicon carbide epitaxial layer 210: Silicon carbide substrate (first semiconductor substrate) 210A: Main surface (first main surface) 210B: Main surface 211: Drift region 212: Body region 213: Source area 214: Contact area 215: Electric field relaxation region 215A: First side end surface 215B: Second side end surface 215C: Bottom end surface 216A: 1st corner 216B: 2nd corner 217: Gate insulating film 220: Gate trench 221: Side 222: Bottom 231: Gate electrode 232: Source electrode 233: Drain electrode 235: Interlayer insulating film 236: Contact Hole 300: First diode 301: Active area 302: Termination area 303, 304: second unit cell 306: Silicon carbide single crystal substrate 307: Silicon carbide epitaxial layer 310: Silicon carbide substrate (second semiconductor substrate) 310A: Main surface (second main surface) 310B: Main surface 311: n-type region (first semiconductor region) 315:p-type region (second semiconductor region) 315A: First side end surface 315B: Second side end surface 315C: Bottom end surface 316A: 1st corner 316B:Second corner 319:Sign 332: Anode electrode 333: Cathode electrode 400: Second transistor 401:Active area 402: Termination area 403: First unit cell 406: Silicon carbide single crystal substrate 407: Silicon carbide epitaxial layer 410: Silicon carbide substrate (first semiconductor region) 410A: Main surface (first main surface) 410B: Main surface 411: Drift region 412: Body area 413: Source area 414: Contact area 415: Electric field relaxation region 415A: First side end surface 415B: 2nd side end surface 415C: Bottom end surface 416A: 1st corner 416B:Second corner 417: Gate insulating film 420: Gate trench 421: Side 422: Bottom 431: Gate electrode 432: Source electrode 433: Drain electrode 435: Interlayer insulating film 436: Contact Hole 500: Second diode 501: Active area 502: Termination area 503: Second unit cell 506: Silicon carbide single crystal substrate 507: Silicon carbide epitaxial layer 510: Silicon carbide substrate (second semiconductor substrate) 510A: Main surface (second main surface) 510B: Main surface 511: n-type region (first semiconductor region) 515:p-type region (second semiconductor region) 515A: First side end surface 515B: Second side end surface 515C: Bottom end surface 516A: 1st corner 516B:Second corner 519: Sign 532: Anode electrode 533: Cathode electrode 600: First transistor 603, 604: First unit cell 700: First diode 703, 704: Second unit cell 800: Second transistor 803: First unit cell 900: Second diode 903: Second unit cell

Claims

1. A transistor; a Schottky barrier diode connected in parallel to the transistor; having The transistor is a first semiconductor substrate having a first major surface and a second major surface opposite the first major surface; A plurality of gate electrodes; having The first semiconductor substrate is a drift region of a first conductivity type; a body region of a second conductivity type provided on the drift region; a source region of the first conductivity type provided on the body region so as to be separated from the drift region; a plurality of electric field relaxation regions of the second conductivity type connected to the body region and at least a portion of which contacts the drift region; having a plurality of gate trenches are formed in the first main surface, the gate trenches having side surfaces penetrating the source region and the body region to reach the drift region and bottom surfaces continuous with the side surfaces; at least a portion of the gate electrode is within the gate trench; the electric field relaxation region is located between adjacent ones of the gate trenches in a top view perpendicular to the first main surface, the gate electrode and the electric field relief region extend in a first direction that forms a first angle with a <1-100> plane of the first semiconductor substrate; the electric field reduction region has a first side end surface, a second side end surface opposite to the first side end surface, and a first lower end surface connected to the first side end surface and the second side end surface, the first side end surface, the second side end surface, and the first lower end surface are in contact with the drift region; The Schottky barrier diode is a second semiconductor substrate having a third major surface; The second semiconductor substrate is a first semiconductor region of the first conductivity type constituting the third major surface; a second semiconductor region of the second conductivity type formed on the third major surface; having the second semiconductor region extends in a second direction that forms a second angle with a <1-100> plane of the second semiconductor substrate; the second semiconductor region has a third side end surface, a fourth side end surface opposite to the third side end surface, and a second lower end surface continuous with the third side end surface and the fourth side end surface, the third side end surface, the fourth side end surface and the second lower end surface are in contact with the first semiconductor region, A semiconductor device in which the difference between the first angle and the second angle is 10° or less.

2. the first angle is less than or equal to 10 degrees; The semiconductor device according to claim 1 , wherein the second angle is equal to or smaller than 10°.

3. The first angle is equal to or greater than 80° and equal to or less than 100°, The semiconductor device according to claim 1 , wherein the second angle is equal to or greater than 80° and equal to or less than 100°.

4. The transistor is provided in a plurality of layers.

4. The semiconductor device according to claim 1, wherein a plurality of the transistors are connected in parallel to the Schottky barrier diode.

5. The Schottky barrier diode includes a plurality of the Schottky barrier diodes, 5. The semiconductor device according to claim 1, wherein a plurality of the Schottky barrier diodes are connected in parallel to the transistor.

6. An upper arm; A lower arm connected in series to the upper arm; having the upper arm includes a first combination of the transistor and the Schottky barrier diode; The semiconductor device according to claim 1 , wherein the lower arm includes a second combination of the transistor and the Schottky barrier diode.

7. The semiconductor device according to claim 1 , wherein the Schottky barrier diode has a mark for specifying a crystal orientation of the second semiconductor substrate.

8. The semiconductor device according to claim 1 , wherein the first semiconductor substrate and the second semiconductor substrate are silicon carbide substrates.

9. the transistor has a plurality of first unit cells whose longitudinal direction is the first direction, 9. The semiconductor device according to claim 1, wherein the Schottky barrier diode includes a plurality of second unit cells each having a longitudinal direction aligned in the second direction.

10. 10. The semiconductor device according to claim 1, wherein a difference in breakdown voltage between the transistor and the Schottky barrier diode is 100 V or less.

11. 11. The semiconductor device according to claim 1, wherein the Schottky barrier diode has a dielectric breakdown voltage higher than a dielectric breakdown voltage of the transistor.

12. 12. The semiconductor device according to claim 1, wherein the transistor and the Schottky barrier diode have a breakdown voltage of 600 V or more.

13. The semiconductor device according to claim 1 , further comprising a housing that houses the transistor and the Schottky barrier diode.

14. 14. The semiconductor device according to claim 1, further comprising an insulating substrate on which the transistor and the Schottky barrier diode are mounted.

15. 15. The semiconductor device according to claim 1, wherein the shortest distance between the one or more transistors and the one or more Schottky barrier diodes is 1.0 cm or less.

16. A semiconductor device described in any one of claims 1 to 15, wherein the electric field relaxation region extends from the body region toward the second main surface.

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