LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS

Abstract

To improve reliability of a liquid discharge head.SOLUTION: A first electrode layer, a piezoelectric layer, and a second electrode layer of a piezoelectric element are laminated on a first surface of a diaphragm in this order. A pressure chamber partitioned by a barrier wall arranged on a second surface opposite to the first surface of the diaphragm has a longitudinal shape when viewed in a thickness direction of the diaphragm. A portion, in which all of the pressure chamber, the first electrode layer, the piezoelectric layer, and the second electrode layer overlap when viewed in the thickness direction, of a structure formed of the diaphragm and piezoelectric element is an active part. A portion, which overlaps the pressure chamber in a position different from the active part when viewed in the thickness direction of the structure and is adjacent to the active part in a short side direction of the pressure chamber is a nonactive part. A position on an inner side of the active part when viewed in the thickness direction is a first position. A position closest to a boundary between the pressure chamber and the barrier wall on an inner side of the nonactive part when viewed in the thickness direction is a second position. When flexural rigidity of the active part in the first position is EI1, and flexural rigidity of the nonactive part in the second position is EI2, a liquid discharge head satisfies a relationship of EI1 / EI2≤40.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a liquid ejection head and a liquid ejection apparatus. [Background technology]

[0002] In a liquid ejection device typified by a piezoelectric inkjet printer, as described in Patent Document 1, for example, a first electrode layer, a piezoelectric layer, and a second electrode layer are laminated in this order on a diaphragm. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2008-44355 A Summary of the Invention [Problem to be solved by the invention]

[0004] In liquid ejection devices, it is desirable to further improve reliability so that damage such as cracks does not occur in the diaphragm even after long-term use. [Means for solving the problem]

[0005] In order to solve the above problems, one aspect of the liquid ejection head according to the present invention includes a vibration plate having a first surface and a second surface opposite to the first surface, a piezoelectric element disposed on the first surface, and a partition wall disposed on the second surface and defining a pressure chamber communicating with a nozzle, the piezoelectric element having a first electrode layer, a piezoelectric layer, and a second electrode layer, the first electrode layer, the piezoelectric layer, and the second electrode layer being laminated in this order on the first surface, the pressure chamber having an elongated shape as viewed in a thickness direction of the vibration plate, and in a structure formed of the vibration plate and the piezoelectric element, the pressure chamber has a longitudinal shape as viewed in the thickness direction of the vibration plate, A portion where a pressure chamber, the first electrode layer, the piezoelectric layer, and the second electrode layer all overlap is defined as an active portion, a portion of the structure that overlaps with the pressure chamber at a position different from the active portion as viewed in the thickness direction of the vibration plate and that is adjacent to the active portion in the short direction of the pressure chamber is defined as a non-active portion, a position inside the active portion as viewed in the thickness direction of the vibration plate is defined as a first position, a position inside the non-active portion as viewed in the thickness direction of the vibration plate is defined as a second position, and the bending rigidity of the active portion at the first position is defined as EI1 and the bending rigidity of the non-active portion at the second position is defined as EI2, The relationship EI1 / EI2≦40 is satisfied.

[0006] One aspect of the liquid ejection device according to the present invention includes the liquid ejection head of the above aspect, and a control unit that controls the driving of the liquid ejection head. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a configuration diagram that illustrates a liquid ejection device according to a first embodiment. [Diagram 2] FIG. 1 is an exploded perspective view of a liquid ejection head according to a first embodiment. [Diagram 3] 3 is a cross-sectional view taken along line AA in FIG. 2. [Figure 4] FIG. 1 is a plan view illustrating an example of a liquid ejection head according to a first embodiment. [Diagram 5] 5 is a cross-sectional view taken along line BB in FIG. [Figure 6]FIG. 13 is a diagram showing the relationship between the bending stiffness ratio (EI1 / EI2) and the displacement ratio. [Figure 7] FIG. 13 is a diagram showing the relationship between the neutral axis position ratio (λ1 / λ2) and the displacement ratio. [Figure 8] FIG. 11 is a cross-sectional view of a liquid ejection head according to a second embodiment. [Figure 9] FIG. 11 is a cross-sectional view of a liquid ejection head according to a third embodiment. [Figure 10] FIG. 11 is a cross-sectional view of a liquid ejection head according to a fourth embodiment. [Figure 11] FIG. 13 is a cross-sectional view of a liquid ejection head according to a fifth embodiment. [Figure 12] FIG. 13 is a cross-sectional view of a liquid ejection head according to a sixth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Note that the dimensions and scale of each part in the drawings may differ from the actual dimensions and some parts are shown diagrammatically to facilitate understanding. Furthermore, the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description to the effect that the present invention is limited thereto.

[0009] In the following description, the mutually intersecting X-axis, Y-axis, and Z-axis are used as appropriate. In the following, one direction along the X-axis is the X1 direction, and the direction opposite the X1 direction is the X2 direction. Similarly, the opposite directions along the Y-axis are the Y1 direction and the Y2 direction. In addition, the opposite directions along the Z-axis are the Z1 direction and the Z2 direction. Also, viewing in the direction along the Z-axis is sometimes referred to as "planar view."

[0010] Typically, the Z axis is a vertical axis, and the Z2 direction corresponds to the downward direction in the vertical direction. However, the Z axis does not have to be a vertical axis. Also, the X axis, the Y axis, and the Z axis are typically perpendicular to each other, but are not limited to this, and may intersect at an angle within a range of 80° to 100°, for example.

[0011] 1. Embodiment 1-1. Overall configuration of the liquid ejection device 1 is a schematic diagram showing a configuration of a liquid ejection device 100 according to a first embodiment. The liquid ejection device 100 is an inkjet printing device that ejects ink, which is an example of a liquid, as droplets onto a medium 12. The medium 12 is typically printing paper. Note that the medium 12 is not limited to printing paper, and may be a printing target made of any material, such as a resin film or fabric.

[0012] 1, a liquid container 14 that stores ink is attached to the liquid ejection device 100. Specific examples of the liquid container 14 include a cartridge that is detachable from the liquid ejection device 100, a bag-shaped ink pack made of a flexible film, and an ink tank that can be refilled with ink. The type of ink stored in the liquid container 14 is arbitrary.

[0013] The liquid ejection device 100 includes a control unit 20, a transport mechanism 22, a moving mechanism 24, and a liquid ejection head .

[0014] The control unit 20 includes, for example, a processing circuit such as a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array) and a storage circuit such as a semiconductor memory, and controls the operation of each element of the liquid ejection device 100. Here, the control unit 20 is an example of a “control unit” and controls the driving of the liquid ejection head 26.

[0015] The transport mechanism 22 transports the medium 12 in the Y2 direction under the control of the control unit 20. The movement mechanism 24 reciprocates the liquid ejection head 26 in the X1 direction and the X2 direction under the control of the control unit 20. In the example shown in FIG. 1, the movement mechanism 24 has a substantially box-shaped transport body 242 called a carriage that houses the liquid ejection head 26, and a transport belt 244 to which the transport body 242 is fixed. The number of liquid ejection heads 26 mounted on the transport body 242 is not limited to one, and may be multiple. In addition to the liquid ejection head 26, the above-mentioned liquid container 14 may be mounted on the transport body 242.

[0016] Under the control of the control unit 20, the liquid ejection head 26 ejects ink supplied from the liquid container 14 from each of a plurality of nozzles toward the medium 12 in the Z2 direction. This ejection is performed in parallel with the transportation of the medium 12 by the transport mechanism 22 and the reciprocating movement of the liquid ejection head 26 by the movement mechanism 24, thereby forming an ink image on the surface of the medium 12.

[0017] As described above, the liquid ejection device 100 includes the liquid ejection head 26 and the control unit 20, which is an example of a “control unit” that controls the ink ejection operation by the liquid ejection head 26.

[0018] 1-2. Overall configuration of liquid ejection head

[0019] Fig. 2 is an exploded perspective view of the liquid ejection head 26 according to the first embodiment. Fig. 3 is a cross-sectional view taken along line AA in Fig. 2. As shown in Fig. 2 and Fig. 3, the liquid ejection head 26 has a flow path substrate 32, a pressure chamber substrate 34, a vibration plate 36, a plurality of piezoelectric elements 38, a housing portion 42, a sealing body 44, a nozzle plate 46, a vibration absorber 48, and a wiring substrate 50.

[0020] Here, the pressure chamber substrate 34, the vibration plate 36, the plurality of piezoelectric elements 38, the housing 42, and the sealing body 44 are disposed in an area located in the Z1 direction from the flow path substrate 32. On the other hand, the nozzle plate 46 and the vibration absorber 48 are disposed in an area located in the Z2 direction from the flow path substrate 32. Each element of the liquid ejection head 26 is generally a plate-like member that is elongated in the direction along the Y axis, and is joined to one another by, for example, an adhesive.

[0021] 2, the nozzle plate 46 is a plate-like member provided with a plurality of nozzles N arranged in a direction along the Y axis. Each nozzle N is a through hole that allows ink to pass through. The nozzle plate 46 is manufactured by processing a silicon single crystal substrate by a semiconductor manufacturing technique that uses a processing technique such as dry etching or wet etching. However, other known methods and materials may be used as appropriate to manufacture the nozzle plate 46.

[0022] The flow path substrate 32 is a plate-like member for forming a flow path of ink. As shown in FIG. 2 and FIG. 3, the flow path substrate 32 is provided with an opening 322, a plurality of supply flow paths 324, a plurality of communication flow paths 326, and a relay flow path 328. The opening 322 is an elongated through hole extending in a direction along the Y axis in a plan view seen in a direction along the Z axis so as to be continuous across a plurality of nozzles N. On the other hand, each of the supply flow paths 324 and the communication flow paths 326 is a through hole provided individually for each nozzle N. As shown in FIG. 3, the relay flow path 328 is provided on a surface of the flow path substrate 32 facing the Z2 direction. The relay flow path 328 is a flow path provided across a plurality of supply flow paths 324 and communicates the opening 322 with the plurality of supply flow paths 324. The flow path substrate 32 is manufactured by processing a silicon single crystal substrate by, for example, a semiconductor manufacturing technology, in the same manner as the nozzle plate 46 described above. However, other known methods and materials may be appropriately used for manufacturing the flow path substrate 32.

[0023] The pressure chamber substrate 34 is a plate-like member in which a plurality of pressure chambers C corresponding to a plurality of nozzles N are formed. The pressure chambers C are located between the flow path substrate 32 and the vibration plate 36, and are spaces called cavities for applying pressure to the ink filled in the pressure chambers C. The pressure chambers C are arranged in a direction along the Y axis. Each pressure chamber C is formed of a hole 341 that opens on both sides of the pressure chamber substrate 34, and has an elongated shape extending in a direction along the X axis. That is, when viewed in a direction along the Z axis, which is the thickness direction of the vibration plate, the pressure chamber C has an elongated shape along the X axis. The end of each pressure chamber C in the X2 direction communicates with the corresponding supply flow path 324. On the other hand, the end of each pressure chamber C in the X1 direction communicates with the corresponding communication flow path 326. The pressure chamber substrate 34 is manufactured by processing a silicon single crystal substrate by semiconductor manufacturing technology, for example, in the same manner as the nozzle plate 46 described above. However, each of the pressure chamber substrates 34 may be manufactured using other known methods and materials as appropriate.

[0024] A vibration plate 36 is disposed on the surface of the pressure chamber substrate 34 facing the Z1 direction. The vibration plate 36 is a plate-like member that is elastically deformable. In the example shown in Fig. 3, the vibration plate 36 has a first layer 361 that is an elastic film and a second layer 362 that is an insulating film, which are laminated in this order in the Z1 direction. Details of the vibration plate 36 will be described later in 1-3.

[0025] A plurality of piezoelectric elements 38 corresponding to different nozzles N or pressure chambers C are arranged on the surface of the vibration plate 36 facing the Z1 direction. Each piezoelectric element 38 is a passive element that deforms when a drive signal is supplied, and has an elongated shape extending in the direction along the X axis. The plurality of piezoelectric elements 38 are arranged in the direction along the Y axis so as to correspond to the plurality of pressure chambers C. When the vibration plate 36 vibrates in conjunction with the deformation of the piezoelectric elements 38, the pressure in the pressure chambers C fluctuates, and ink is ejected from the nozzles N. Details of the piezoelectric elements 38 will be described later in 1-3.

[0026] The housing 42 is a case for storing ink to be supplied to the multiple pressure chambers C, and is bonded to the surface of the flow path substrate 32 facing the Z1 direction with an adhesive or the like. The housing 42 is made of, for example, a resin material, and is manufactured by injection molding. The housing 42 is provided with a storage section 422 and an inlet 424. The storage section 422 is a recessed portion having an outer shape corresponding to the opening 322 of the flow path substrate 32. The inlet 424 is a through hole communicating with the storage section 422. The space formed by the opening 322 and the storage section 422 functions as a liquid storage chamber R, which is a reservoir for storing ink. Ink is supplied to the liquid storage chamber R from the liquid container 14 via the inlet 424.

[0027] The vibration absorber 48 is an element for absorbing pressure fluctuations in the liquid storage chamber R. The vibration absorber 48 is, for example, a compliance substrate that is a flexible sheet member that can be elastically deformed. Here, the vibration absorber 48 is disposed on a surface of the flow path substrate 32 facing the Z2 direction so as to close the opening 322, the relay flow path 328, and the multiple supply flow paths 324 of the flow path substrate 32 and form the bottom surface of the liquid storage chamber R.

[0028] The sealing body 44 is a structure that protects the multiple piezoelectric elements 38 and reinforces the mechanical strength of the pressure chamber substrate 34 and the vibration plate 36. The sealing body 44 is bonded to the surface of the vibration plate 36 by, for example, an adhesive. The sealing body 44 is provided with a recess that accommodates the multiple piezoelectric elements 38.

[0029] A wiring board 50 is bonded to the surface of the pressure chamber substrate 34 or the vibration plate 36 facing the Z1 direction. The wiring board 50 is a mounting component on which a plurality of wires for electrically connecting the control unit 20 and the liquid ejection head 26 are formed. The wiring board 50 is a flexible wiring board such as an FPC (Flexible Printed Circuit) or an FFC (Flexible Flat Cable). A drive signal for driving the piezoelectric elements 38 is supplied to the wiring board 50. The drive signal is supplied to each piezoelectric element 38 via the wiring board 50.

[0030] 1-3. Details of the diaphragm and piezoelectric element Fig. 4 is a plan view showing an example of the liquid ejection head 26 according to the first embodiment. Fig. 5 is a cross-sectional view taken along line BB in Fig. 4. In these figures, the configuration of the liquid ejection head 26 is shown in more detail than in the above-mentioned Figs. 2 and 3.

[0031] 4, in addition to the components described above, the liquid ejection head 26 has a wiring layer 54, a weight layer 55, and a weight layer 56. Here, the wiring layer 54, the weight layer 55, and the weight layer 56 are provided on the piezoelectric element 38, and are located furthest in the Z1 direction among the components included inside the sealing body 44.

[0032] As shown in FIGS. 4 and 5, holes 341 that form pressure chambers C are provided in the pressure chamber substrate 34. In FIG. 4, the planar shape of the holes 341 is indicated by dashed lines. A wall-like partition 342 extending along the X direction is provided between two adjacent pressure chambers C in the pressure chamber substrate 34. The partition 342 defines the pressure chambers C. The pressure chamber substrate 34 is formed, for example, by anisotropically etching a silicon single crystal substrate. An etchant for the anisotropic etching may be, for example, an aqueous potassium hydroxide solution (KOH). In the anisotropic etching, the first layer 361 of the vibration plate 36 is used as an etching stop layer.

[0033] In the example shown in Fig. 4, the shape of the hole 341 in a plan view is a parallelogram. The hole 341 having such a shape in a plan view is formed, for example, by anisotropic etching of a silicon single crystal substrate having a (110) surface orientation. Note that the shape of the hole 341 in a plan view is not limited to the example shown in Fig. 4 and may be any shape.

[0034] The vibration plate 36 has a first surface F1 and a second surface F2 opposite to the first surface F1. In the example shown in FIG. 5, the thickness direction of the vibration plate 36 is along the Z axis. Therefore, the first surface F1 is the surface of the vibration plate 36 facing the Z2 direction, and the second surface F2 is the surface of the vibration plate 36 facing the Z1 direction. In the example shown in FIG. 5, the thickness t3 of the vibration plate 36 is constant, but the thickness t3 can also be changed depending on the position in the Y direction. The case where the thickness t3 changes will be described in detail in the second embodiment. A piezoelectric element 38 is arranged on the first surface F1. A pressure chamber substrate 34 is arranged on the second surface F2.

[0035] As shown in FIG. 5, the diaphragm 36 has a first layer 361 and a second layer 362, which are laminated in this order in the Z1 direction. The first layer 361 is an elastic film made of, for example, silicon oxide (SiO2). The elastic film is formed, for example, by thermally oxidizing one surface of a silicon single crystal substrate. The second layer 362 is an insulating film made of, for example, zirconium oxide (ZrO2). The insulating film is formed, for example, by forming a layer of zirconium by a sputtering method and thermally oxidizing the layer.

[0036] The first layer 361 is not limited to silicon oxide, and may be made of other elastic materials such as silicon alone. The material of the second layer 362 is not limited to zirconium oxide, and may be other insulating materials such as silicon nitride. Another layer such as a metal oxide may be interposed between the first layer 361 and the second layer 362. In other words, the first layer 361 or the second layer 362 may be made of a plurality of layers that are the same or different from each other. A part or the whole of the diaphragm 36 may be integrally made of the same material as the pressure chamber substrate 34. The diaphragm 36 may be made of a layer of a single material.

[0037] 4, the piezoelectric element 38 overlaps the pressure chamber C in a plan view. As shown in Fig. 5, the piezoelectric element 38 has a first electrode layer 381, a piezoelectric layer 382, ​​and a second electrode layer 383, which are laminated in this order in the Z1 direction.

[0038] In addition, between the layers of the piezoelectric elements 38 or between the piezoelectric elements 38 and the vibration plate 36, other layers such as layers for improving adhesion may be appropriately interposed. In addition, a seed layer may be provided between the first electrode layer 381 and the piezoelectric layer 382. The seed layer has a function of improving the orientation of the piezoelectric layer 382 when the piezoelectric layer 382 is formed. The seed layer is, for example, made of titanium (Ti) or made of a complex oxide having a perovskite structure such as Pb(Fe,Ti)O3. When the seed layer is made of titanium, the island-shaped Ti becomes a crystal nucleus when the piezoelectric layer 382 is formed, improving the orientation of the piezoelectric layer 382. In this case, the seed layer is formed to a thickness of about 3 nm to 20 nm by a known film formation technique such as a sputtering method, and a known processing technique using photolithography and etching. Furthermore, when the seed layer is made of the complex oxide, the piezoelectric layer 382 is influenced by the crystal structure of the seed layer during the formation of the piezoelectric layer 382, ​​thereby improving the orientation of the piezoelectric layer 382. In this case, the seed layer is formed by forming a precursor layer of the complex oxide by, for example, a sol-gel method or a metal organic decomposition (MOD) method, and baking and crystallizing the precursor layer.

[0039] The first electrode layers 381 are individual electrodes spaced apart from one another for each piezoelectric element 38. Specifically, a plurality of first electrode layers 381 extending in the direction along the X-axis are arranged in the direction along the Y-axis at intervals from one another. A drive signal for ejecting ink from the nozzle N corresponding to each piezoelectric element 38 is applied to the first electrode layer 381 of each piezoelectric element 38 via the wiring board 50.

[0040] The first electrode layer 381 has, for example, a first layer made of titanium (Ti), a second layer made of platinum (Pt), and a third layer made of iridium (Ir), which are laminated in this order in the Z1 direction. The first electrode layer 381 is formed by, for example, a known film formation technique such as a sputtering method, and a known processing technique using photolithography, etching, etc.

[0041] Here, the first layer of the first electrode layer 381 functions as an adhesion layer that improves the adhesion of the first electrode layer 381 to the diaphragm 36. The thickness of the first layer is not particularly limited, but is, for example, about 3 nm or more and 50 nm or less. Note that the material of the first layer is not limited to titanium, and for example, chromium may be used instead of titanium.

[0042] In addition, platinum constituting the second layer and iridium constituting the third layer of the first electrode layer 381 are both electrode materials with excellent electrical conductivity and have similar chemical properties. This allows the first electrode layer 381 to have excellent electrode characteristics. The thickness of the second layer is not particularly limited, but is, for example, about 50 nm to 200 nm. The thickness of the third layer is not particularly limited, but is, for example, about 4 nm to 20 nm.

[0043] The configuration of the first electrode layer 381 is not limited to the above example. For example, either the second layer or the third layer may be omitted, or a layer made of iridium may be provided between the first layer and the second layer. Also, instead of the second layer and the third layer, or in addition to the second layer and the third layer, a layer made of an electrode material other than iridium and platinum may be used. Examples of the electrode material include metal materials such as aluminum (Al), nickel (Ni), gold (Au), and copper (Cu). Of these, one type may be used alone, or two or more types may be used in combination in the form of a laminate or an alloy.

[0044] The above-described first electrode layer 381 is extended to a position in the X1 direction further than the piezoelectric layer 382, ​​and a wiring layer 54 is connected to the first electrode layer 381. The wiring layer 54 is a conductive film extending in the X1 direction from the piezoelectric element 38 for each first electrode layer 381, and functions as a wiring connecting the first electrode layer 381 and the wiring board 50. The wiring layer 54 has, for example, a layer made of a nickel-chromium alloy and a layer made of gold (Au), which are laminated in this order in the Z1 direction.

[0045] The piezoelectric layer 382 is disposed between the first electrode layer 381 and the second electrode layer 383. The piezoelectric layer 382 has a strip shape extending in the direction along the Y-axis so as to be continuous across the plurality of piezoelectric elements 38. In the example shown in Fig. 4, the piezoelectric layer 382 is provided with through-holes 382a extending in the direction along the X-axis, penetrating the piezoelectric layer 382, ​​in regions corresponding to the gaps between the adjacent pressure chambers C in a plan view. The piezoelectric layer 382 may be provided for each of the plurality of piezoelectric elements 38 individually.

[0046] The piezoelectric layer 382 is made of a piezoelectric material having a perovskite crystal structure represented by a general composition formula ABO3. Examples of the piezoelectric material include lead titanate (PbTiO3), lead zirconate titanate (Pb(Zr,Ti)O3), lead zirconate (PbZrO3), lead lanthanum titanate ((Pb,La),TiO3), lead lanthanum zirconate titanate ((Pb,La)(Zr,Ti)O3), lead zirconium niobate titanate (Pb(Zr,Ti,Nb)O3), and lead magnesium zirconium niobate titanate (Pb(Zr,Ti)(Mg,Nb)O3). Among them, lead zirconate titanate is preferably used as the constituent material of the piezoelectric layer 382. The piezoelectric layer 382 may contain small amounts of other elements such as impurities. Furthermore, the piezoelectric material that constitutes the piezoelectric layer 382 may be a non-lead material such as barium titanate.

[0047] The piezoelectric layer 382 is formed by forming a precursor layer of the piezoelectric body by a liquid phase method such as a sol-gel method or a metal organic decomposition (MOD) method, and then baking and crystallizing the precursor layer. Here, the piezoelectric layer 382 may be composed of a single layer, but when composed of multiple layers, there is an advantage that the characteristics of the piezoelectric layer 382 can be easily improved even if the thickness of the piezoelectric layer 382 is increased.

[0048] The second electrode layer 383 is a band-shaped common electrode extending in the direction along the Y-axis so as to be continuous across the plurality of piezoelectric elements 38. A predetermined reference voltage is applied to the second electrode layer 383.

[0049] The second electrode layer 383 has, for example, a layer made of iridium (Ir) and a layer made of titanium (Ti), which are laminated in this order in the Z1 direction. The second electrode layer 383 is formed by, for example, a known film formation technique such as a sputtering method, and a known processing technique using photolithography, etching, etc.

[0050] The material of the second electrode layer 383 is not limited to iridium and titanium, and may be, for example, a metal material such as platinum (Pt), aluminum (Al), nickel (Ni), gold (Au), or copper (Cu). The second electrode layer 383 may be made of one of these metal materials alone, or may be made of two or more of these materials in combination in the form of a laminate or alloy. The second electrode layer 383 may be made of a single layer.

[0051] 4 are disposed on the second electrode layer 383. The weight layer 55 and the weight layer 56 are weights for suppressing unnecessary vibration of the diaphragm 36. Specifically, the weight layer 55 is a strip-shaped conductive film extending along the Y axis along the edge of the second electrode layer 383 in the X1 direction. The weight layer 56 is a strip-shaped conductive film extending along the Y axis along the edge of the second electrode layer 383 in the X2 direction. Each of the weight layers 55 and 56 has, for example, a layer made of a nickel-chromium alloy and a layer made of gold (Au) similarly to the wiring layer 54 described above, and these are laminated in this order in the Z1 direction.

[0052] The structure Act, which is made up of the diaphragm 36 and the piezoelectric element 38, has a vibration part PV which is a part that overlaps with the pressure chamber C in a plan view. The vibration part PV vibrates in the direction along the Z axis when driven by the piezoelectric element 38.

[0053] The vibration part PV has an active part P1 and a non-active part P2. The active part P1 is a part of the structure Act where the pressure chamber C, the first electrode layer 381, the piezoelectric layer 382, ​​and the second electrode layer 383 all overlap when viewed in the thickness direction of the vibration plate 36. Therefore, the active part P1 is a laminate including the vibration plate 36, the first electrode layer 381, the piezoelectric layer 382, ​​and the second electrode layer 383. In the active part P1, when a voltage is applied between the first electrode layer 381 and the second electrode layer 383, the piezoelectric layer 382 deforms due to the inverse piezoelectric effect. This causes the active part P1 to deform.

[0054] 5, the thickness t1 of the active part P1 is constant. The active part P1 may have a plurality of parts with different thicknesses. Here, the thickness t1 may be the thickness of the thinnest part of the active part P1 or may be the average thickness of the active part P1.

[0055] The width W1 of the active part P1 along the Y axis is constant over the entire area along the X axis. The active part P1 may include a plurality of parts with different widths. In this case, the width W1 is, for example, the average width of the active part P1.

[0056] The non-active part P2 is a part of the structure Act that overlaps the pressure chamber C at a position different from the active part P1 in the thickness direction of the vibration plate 36 and is adjacent to the active part P1 in the short side direction of the pressure chamber C. Here, the non-active part P2 is a part of the structure Act other than the active part P1 that overlaps the pressure chamber C in the thickness direction of the vibration plate 36, and is located between the active part P1 and the partition wall 342 in the thickness direction of the vibration plate 36. In this embodiment, the non-active part P2 is a laminate that does not include the first electrode layer 381 but includes the vibration plate 36, the piezoelectric layer 382, ​​and the second electrode layer 383. The non-active part P2 deforms in accordance with the deformation of the active part P1. As a result, the entire vibration part PV deforms in the thickness direction of the vibration plate 36. In this embodiment, a part of the piezoelectric layer 382 is present in the non-active part P2, but the part is not interposed between the first electrode layer 381 and the second electrode layer 383. Therefore, even if a voltage is applied between the first electrode layer 381 and the second electrode layer 383, the inverse piezoelectric effect does not occur in the non-active portion P2.

[0057] In this embodiment, the thickness t2 of the non-active part P2 is thinner than the thickness t1 of the active part P1. Therefore, the bending rigidity of the non-active part P2 is lower than the bending rigidity of the active part P1. Here, the non-active part P2 may have a plurality of parts with different thicknesses, and in this case, the thickness t2 is the thickness of the thinnest part of the non-active part P2. Note that the thickness t2 may be the average thickness of the non-active part P2.

[0058] In the example shown in FIG. 5, the piezoelectric layer 382 in the non-active part P2 is shaped to become thinner from the active part P1 toward the partition wall 342. Here, the thickness t4 of the piezoelectric layer 382 is constant over the entire area of ​​the active part P1. In addition, the piezoelectric layer 382 is partially provided in a part of the non-active part P2 in the direction along the X-axis, and the non-active part P2 has a part P2a that does not have the piezoelectric layer 382. The part P2a is also called an "arm part" and is the part of the vibration part PV that is most easily deformed. The part P2a in this embodiment is the thinnest part of the non-active part P2. Note that the non-active part P2 does not need to have the piezoelectric layer 382 over the entire area. In this case, the entire area of ​​the non-active part P2 constitutes the "arm part".

[0059] Moreover, the width W2 of the non-active part P2 in the direction along the Y-axis is constant over the entire area in the direction along the X-axis. Here, from the viewpoint of efficiently deforming the vibrating part PV, it is preferable that the width W2 is equal to or larger than the width W1, that is, the relationship 1≦W1 / W2 is satisfied. From the viewpoint of reducing damage such as cracks to the diaphragm 36, it is preferable that the width W2 is equal to or larger than one-fifth of the width W1, that is, the relationship W1 / W2≦5 is satisfied. Note that the non-active part P2 may include a plurality of parts having different widths. In this case, the width W2 is, for example, the average width of the non-active part P2.

[0060] In the above-described vibrating section PV, from the viewpoint of reducing damage such as cracks in the diaphragm 36, the relationship between the bending rigidities of the active section P1 and the passive section P2 is defined. Specifically, the position inside the active section P1 as viewed in the thickness direction of the diaphragm 36 is defined as the first position pt1, and the position closest to the boundary BD between the pressure chamber C and the partition wall 342 inside the passive section P2 as viewed in the thickness direction of the diaphragm 36 is defined as the second position pt2. When the bending rigidity at the first position pt1 of the active section P1 is EI1 and the bending rigidity at the second position pt2 of the passive section P2 of the structure Act is EI2, the relationship EI1 / EI2 ≤ 40 is satisfied.

[0061] FIG. 6 is a diagram showing the relationship between the bending rigidity ratio (EI1 / EI2) and the displacement ratio. In FIG. 6, for each of a plurality of samples having different EI1 / EI2, the displacement amount of the diaphragm 36 when a predetermined voltage is applied to the piezoelectric element 38 is measured, and the result is shown in which the measured value of the sample having the smallest displacement amount of the diaphragm 36 is normalized with 1 as the displacement ratio. For each sample, the ratio of the thickness t1 of the active section P1 to the thickness t2 of the passive section P2 and the thickness of each layer are appropriately adjusted to make the respective bending rigidity ratios (EI1 / EI2) different.

[0062] In FIG. 6, the shapes of the markers are different between the case where EI1 / EI2 ≤ 40 is satisfied and the case where it is not. When EI1 / EI2 ≤ 40 is satisfied, even when the application of a predetermined voltage to the piezoelectric element 38 is performed a predetermined number of times or more, damage such as cracks in the diaphragm 36 does not occur. On the other hand, when EI1 / EI2 > 40 is satisfied, when the application of a predetermined voltage to the piezoelectric element 38 is performed a predetermined number of times or more, damage such as cracks in the diaphragm 36 occurs.

[0063] The bending rigidity ratio (EI1 / EI2) only needs to satisfy EI1 / EI2 ≤ 40. However, as understood from FIG. 6, from the viewpoint of improving the displacement amount of the diaphragm 36, it is preferable to satisfy the relationship 1 < EI1 / EI2 ≤ 40. Further, from the viewpoint of achieving both the improvement of the displacement amount of the diaphragm 36 and the reduction of damage such as cracks, it is more preferable to satisfy the relationship 30 < EI1 / EI2 ≤ 40.

[0064] Here, bending rigidity is expressed as the product (EI) of the moment of inertia I, which is determined by the cross-sectional shape and size of a member, and the Young's modulus E of the material that constitutes the member, and indicates how difficult the member is to bend. In a structure having a layered structure such as the active part P1 and non-active part P2 described above, bending rigidity EI is generally expressed by the following formula (1).

[0065]

number

[0066]

number

[0067] Here, when the end of the structure Act in the X-axis direction is fixed by the partition wall 342, and the bending rigidity of the structure Act when it is bent with the span length in the X-axis direction is obtained, b is the width in the Y-axis direction. When the bending rigidity at the first position pt1 is obtained, the value of the width W1 of the active part P1 along the Y-axis is substituted for b. On the other hand, when the bending rigidity at the second position pt2 is obtained, the value of the width of the part P2a along the Y-axis is substituted for b. That is, when the bending rigidity at the second position pt2 is obtained, the value of the width within the range of the non-active part P2, which is equal to the thickness at the second position pt2 in the Z-axis direction, is substituted for b. Note that, as in the fifth embodiment described later, when the thickness in the Z-axis direction is equal across the active part P1 and the non-active part P2, the width W2 of the non-active part may be substituted for b when the bending rigidity at the second position pt2 is obtained.

[0068] As can be seen from formula (1), the bending stiffness EI of the structure varies depending on the neutral axis position λ. Therefore, it is preferable that the relationship between the neutral axis positions λ of the active part P1 and the non-active part P2 is specified so as to satisfy the bending stiffness ratio EI1 / EI2 as described above. Specifically, when the neutral axis position λ of the active part P1 is λ1 and the neutral axis position λ of the non-active part P2 is λ2, it is preferable to satisfy the relationship λ1 / λ2≦1.8.

[0069] Here, the neutral axis position λ1 is the distance between the second surface F2 and the neutral axis of the active part P1 along the thickness direction of the diaphragm 36. The neutral axis position λ2 is the distance between the second surface F2 and the neutral axis of the non-active part P2 along the thickness direction of the diaphragm 36.

[0070] Fig. 7 is a diagram showing the relationship between the neutral axis position ratio (λ1 / λ2) and the displacement ratio. Fig. 7 shows the results of measuring the amount of displacement of the diaphragm 36 when a predetermined voltage is applied to the piezoelectric element 38 for each of a number of samples with different λ1 / λ2, and normalizing the measured value of the sample with the smallest amount of displacement of the diaphragm 36 to 1, and taking the result as the displacement ratio. Note that for each sample, the ratio between the thickness t1 of the active part P1 and the thickness t2 of the non-active part P2, and the thickness of each layer were appropriately adjusted to make each neutral axis position ratio (λ1 / λ2) different.

[0071] In Fig. 7, the shape of the marker differs between cases where λ1 / λ2≦1.8 is satisfied and cases where it is not. When λ1 / λ2≦1.8 is satisfied, no damage such as cracks occurs in the vibration plate 36 even when a predetermined voltage is applied to the piezoelectric element 38 a predetermined number of times or more. In contrast, when λ1 / λ2>1.8 is satisfied, damage such as cracks occurs in the vibration plate 36 when a predetermined voltage is applied to the piezoelectric element 38 a predetermined number of times or more.

[0072] As can be seen from FIG. 7, from the viewpoint of improving the displacement amount of the diaphragm 36, it is preferable that the neutral axis position ratio (λ1 / λ2) satisfies the relationship 1<λ1 / λ2≦1.8, and furthermore, from the viewpoint of achieving both an improvement in the displacement amount of the diaphragm 36 and a reduction in damage such as cracks, it is more preferable that the neutral axis position ratio satisfies the relationship 1.5<λ1 / λ2≦1.8.

[0073] As described above, the liquid ejection head 26 has a vibration plate 36, a piezoelectric element 38, and a partition wall 342. The vibration plate 36 has a first surface F1 and a second surface F2 opposite to the first surface F1. The piezoelectric element 38 is disposed on the first surface F1 and has a first electrode layer 381, a piezoelectric layer 382, ​​and a second electrode layer 383. The first electrode layer 381, the piezoelectric layer 382, ​​and the second electrode layer 383 are stacked in this order on the first surface F1. The partition wall 342 is disposed on the second surface F2 and defines a pressure chamber C communicating with the nozzle N. The pressure chamber C has a longitudinal shape when viewed in the thickness direction of the vibration plate 36. Note that "one of two objects is disposed on the other object" is a concept that includes not only the case where the two objects are in contact with each other, but also the case where another object is interposed between the two objects.

[0074] Furthermore, when the bending rigidity EI at the first position pt1 of the active part P1 of the structure Act composed of the diaphragm 36 and the piezoelectric element 38 is defined as EI1, and the bending rigidity EI at the second position pt2 of the passive part P2 of the structure Act is defined as EI2, the relationship EI1 / EI2 ≤ 40 is satisfied. As described above, the active part P1 is the part of the structure Act where all of the pressure chamber C, the first electrode layer 381, the piezoelectric layer 382, and the second electrode layer 383 overlap when viewed in the thickness direction of the diaphragm 36. The passive part P2 is the part of the structure Act that overlaps the pressure chamber C at a position different from the active part P1 when viewed in the thickness direction of the diaphragm 36 and is adjacent to the active part P1 in the short side direction of the pressure chamber C, and is located between the active part P1 and the partition wall 342 when viewed in the thickness direction of the diaphragm 36. The first position pt1 is a position inside the active part P1 when viewed in the thickness direction of the diaphragm 36. The second position pt2 is the position closest to the boundary BD between the pressure chamber C and the partition wall 342 inside the passive part P2 when viewed in the thickness direction of the diaphragm 36.

[0075] In the above liquid ejection head 26, by satisfying the relationship EI1 / EI2 ≤ 40, damage such as cracks in the diaphragm 36 can be reduced. As a result, the reliability of the liquid ejection head 26 can be improved compared to the conventional case.

[0076] Also, when the relationship 1 < EI1 / EI2 is satisfied, the displacement amount of the diaphragm 36 can be increased compared to a configuration that satisfies the relationship 1 ≥ EI1 / EI2.

[0077] Furthermore, when the relationship 30 < EI1 / EI2 is satisfied, the displacement amount of the diaphragm 36 can be increased and damage such as cracks in the diaphragm 36 can be reduced, and the balance between them is excellent.

[0078] In the present embodiment, as described above, the thickness t1 of the active part P1 is thicker than the thickness t2 of the passive part P2. Therefore, even if the Young's modulus of the material constituting the vibrating part PV of the structure Act is constant over the short side direction of the pressure chamber C, the bending rigidity EI1 of the active part P1 can be made larger than the bending rigidity EI2 of the passive part P2. Similarly, the relationship of the neutral axis position ratio described above can be satisfied.

[0079] Furthermore, as described above, if the width of the active portion P1 along the short side of the pressure chamber C is W1 and the width of the non-active portion P2 along the short side of the pressure chamber C is W2, by satisfying the relationship W1 / W2≦5, damage such as cracks in the vibration plate 36 can be reduced compared to a configuration in which the relationship W1 / W2>5 is satisfied.

[0080] Furthermore, as described above, when the relationship 1≦W1 / W2 is satisfied, the amount of displacement of the diaphragm 36 can be made larger than in a configuration where the relationship 1>W1 / W2 is satisfied.

[0081] 2. Second embodiment A second embodiment of the present invention will be described below. In the following example, for elements having the same actions and functions as those in the first embodiment, the reference numerals used in the description of the first embodiment will be used and detailed descriptions of each will be omitted as appropriate.

[0082] 8 is a cross-sectional view of a liquid ejection head 26A according to the second embodiment. The liquid ejection head 26A is configured similarly to the liquid ejection head 26 of the first embodiment described above, except that it has a vibration plate 36A instead of the vibration plate 36. The vibration plate 36A is configured similarly to the vibration plate 36, except that it has a second layer 362A instead of the second layer 362. The second layer 362A is configured similarly to the second layer 362, except that the thickness distribution is different.

[0083] In the second layer 362A, the thickness at the non-active portion P2 is smaller than the thickness at the active portion P1. Therefore, in the diaphragm 36A, the thickness t32 at the non-active portion P2 is smaller than the thickness t31 at the active portion P1. Such a second layer 362A is obtained, for example, by overetching when patterning the piezoelectric layer 382. In addition, the thicknesses t31 and t32 are appropriately determined so as to satisfy the above-mentioned relationship EI1 / EI2.

[0084] The second embodiment described above can improve the reliability of the liquid ejection head 26A, as in the first embodiment described above. In this embodiment, as described above, the thickness t32 of the thinnest part of the vibration plate 36 in the non-active part P2 is thinner than the thickness t31 of the thinnest part of the vibration plate 36 in the active part P1. Therefore, even if the Young's modulus of the material constituting the vibration plate 36 is constant in the short direction of the pressure chamber C, the bending rigidity of the vibration plate 36 in the active part P1 can be made larger than the bending rigidity of the vibration plate 36 in the non-active part P2. As a result, the bending rigidity of the active part P1 can be made larger than the bending rigidity of the non-active part P2. Similarly, the above-mentioned relationship of the neutral axis position ratio can be satisfied.

[0085] 3. Third embodiment The third embodiment of the present invention will be described below. In the following exemplary embodiment, for elements having the same actions and functions as those in the first embodiment, the reference numerals used in the description of the first embodiment will be used and detailed descriptions of each will be omitted as appropriate.

[0086] 9 is a cross-sectional view of liquid ejection head 26B according to the third embodiment. Liquid ejection head 26B is configured similarly to liquid ejection head 26 of the first embodiment described above, except that it has piezoelectric element 38B instead of piezoelectric element 38. Piezoelectric element 38B is configured similarly to piezoelectric element 38, except that it has piezoelectric layer 382B instead of piezoelectric layer 382. Piezoelectric layer 382B is configured similarly to piezoelectric layer 382, ​​except that the thickness distribution is different.

[0087] The piezoelectric layer 382B is disposed over both the active portion P1 and the non-active portion P2. In the piezoelectric layer 382B, the thickness t42 in the non-active portion P2 is thinner than the thickness t41 in the active portion P1. Such a piezoelectric layer 382B can be obtained, for example, by omitting the formation of the aforementioned through-hole 382a. In addition, the thicknesses t41 and t42 are appropriately determined so as to satisfy the aforementioned relationship EI1 / EI2.

[0088] The above third embodiment can improve the reliability of the liquid ejection head 26B, as in the first embodiment. In this embodiment, as described above, the piezoelectric layer 382 is disposed over both the active portion P1 and the non-active portion P2. The thickness t42 of the thinnest portion of the piezoelectric layer 382 in the non-active portion P2 is thinner than the thickness t41 of the thinnest portion of the piezoelectric layer 382 in the active portion P1. Therefore, even if the Young's modulus of the material constituting the piezoelectric layer 382 is constant over the short side direction of the pressure chamber C, the bending rigidity of the piezoelectric layer 382 in the active portion P1 can be made larger than the bending rigidity of the vibration plate 36 in the piezoelectric layer 382. As a result, the bending rigidity of the active portion P1 can be made larger than the bending rigidity of the non-active portion P2. Similarly, the above-mentioned relationship of the neutral axis position ratio can be satisfied. Even if the thickness t41 and the thickness t42 are the same, the above-mentioned EI1 / EI2 relationship can be satisfied by appropriately adjusting the thickness of the first electrode layer 381 arranged in the active part P1, and the bending rigidity of the active part P1 can be made greater than the bending rigidity of the non-active part P2.

[0089] 4. Fourth embodiment The fourth embodiment of the present invention will be described below. In the following exemplary embodiment, for elements having the same actions and functions as those in the first embodiment, the reference numerals used in the description of the first embodiment will be used and detailed descriptions of each will be omitted as appropriate.

[0090] 10 is a cross-sectional view of a liquid ejection head 26C according to the fourth embodiment. The liquid ejection head 26C is configured similarly to the liquid ejection head 26 of the first embodiment described above, except that it has a vibration plate 36C and a piezoelectric element 38B instead of the vibration plate 36 and the piezoelectric element 38. The vibration plate 36C is configured similarly to the vibration plate 36, except that it has a first layer 361C instead of the first layer 361. The first layer 361C is configured similarly to the first layer 361, except that the thickness distribution is different. The piezoelectric element 38B of this embodiment is configured similarly to the piezoelectric element 38B of the third embodiment described above.

[0091] In the first layer 361C, the thickness at the non-active portion P2 is thinner than the thickness at the active portion P1. Therefore, in the diaphragm 36C, the thickness t32 at the non-active portion P2 is thinner than the thickness t31 at the active portion P1. Such a first layer 361C is obtained, for example, by removing a part of one surface of the elastic film formed by thermal oxidation as described above, by etching using hydrofluoric acid or ion milling. In addition, the thicknesses t31 and t32 are appropriately determined so as to satisfy the relationship EI1 / EI2 described above. In this embodiment, the thicknesses t41 and t42 may be equal to each other.

[0092] According to the fourth embodiment, the reliability of the liquid ejection head 26C can be improved, similarly to the first embodiment described above. This embodiment can also provide the same effects as the second and third embodiments described above.

[0093] 5. Fifth embodiment The fifth embodiment of the present invention will be described below. In the following exemplary embodiments, the elements having the same actions and functions as those in the first embodiment will be designated by the same reference numerals as those in the first embodiment, and detailed descriptions thereof will be omitted as appropriate.

[0094] 11 is a cross-sectional view of a liquid ejection head 26D according to the fifth embodiment. The liquid ejection head 26D is configured similarly to the liquid ejection head 26 of the first embodiment described above, except that it has a vibration plate 36D and a piezoelectric element 38D instead of the vibration plate 36 and the piezoelectric element 38. The vibration plate 36D is configured similarly to the vibration plate 36, except that it has a first layer 361D instead of the first layer 361. The first layer 361D is configured similarly to the first layer 361, except that it has a portion 361a. The piezoelectric element 38D is configured similarly to the piezoelectric element 38, except that it has a piezoelectric layer 382D instead of the piezoelectric layer 382. The piezoelectric layer 382D is configured similarly to the piezoelectric layer 382, ​​except that the thickness distribution is different.

[0095] The portion 361a does not belong to the non-active portion P2 but belongs to the active portion P1, and is made of a material having a different composition from that of the other portions of the first layer 361D. The Young's modulus of the material of the portion 361a is higher than that of the material of the other portions of the first layer 361D. Such a portion 361a is obtained, for example, by making the degree of oxidation of the silicon oxide film of the first layer 361D different from that of the other portions, or by doping an impurity element by ion implantation. In the example shown in FIG. 11, the thickness t3 of the diaphragm 36D is constant, but is not limited thereto. For example, the thickness t3 of the diaphragm 36D may be different between the non-active portion P2 and the active portion P1, as in the diaphragm 36A of the second embodiment or the diaphragm 36C of the fourth embodiment described above.

[0096] The piezoelectric layer 382D is disposed across both the active portion P1 and the non-active portion P2. The thickness t4 of the piezoelectric layer 382B is constant. The thickness t4 of the piezoelectric layer 382D may be different between the non-active portion P2 and the active portion P1, as in the piezoelectric layer 382B of the third embodiment described above.

[0097] The fifth embodiment described above can improve the reliability of the liquid ejection head 26D, as in the first embodiment described above. In this embodiment, as described above, the Young's modulus of the material constituting the diaphragm 36 in the active portion P1 is higher than the Young's modulus of the material constituting the diaphragm 36 in the non-active portion P2. Therefore, even if the thickness t3 of the diaphragm 36 is constant across the short side direction of the pressure chamber C, the bending rigidity of the diaphragm 36 in the active portion P1 can be made larger than the bending rigidity of the diaphragm 36 in the non-active portion P2. Similarly, the above-mentioned relationship of the neutral axis position ratio can be satisfied.

[0098] As described above, the composition of the material constituting the diaphragm 36 in the active portion P1 is different from the composition of the material constituting the diaphragm 36 in the non-active portion P2. Therefore, the Young's modulus of the material constituting the diaphragm 36 in the active portion P1 can be made higher than the Young's modulus of the material constituting the diaphragm 36 in the non-active portion P2.

[0099] 6. Sixth embodiment The sixth embodiment of the present invention will be described below. In the following exemplary embodiments, the elements having the same actions and functions as those in the first embodiment will be designated by the same reference numerals as those in the first embodiment, and detailed descriptions thereof will be omitted as appropriate.

[0100] FIG. 12 is a cross-sectional view of a liquid ejection head 26E according to the sixth embodiment. Liquid ejection head 26E is similar to liquid ejection head 26D of the fifth embodiment described above, except that it has piezoelectric element 38E instead of piezoelectric element 38D. Piezoelectric element 38E is similar to piezoelectric element 38D of the fifth embodiment described above, except that it has first electrode layer 381E and second electrode layer 382E instead of first electrode layer 381 and second electrode layer 383.

[0101] The first electrode layer 381E is configured similarly to the first electrode layer 381 of the first embodiment described above, except that it is a band-shaped common electrode extending in the direction along the Y-axis so as to be continuous across the plurality of piezoelectric elements 38E. The second electrode layer 383E is configured similarly to the second electrode layer 383 of the first embodiment described above, except that it is an individual electrode disposed spaced apart from each other for each piezoelectric element 38E.

[0102] According to the sixth embodiment described above, the reliability of the liquid ejection head 26E can be improved, similarly to the first embodiment described above, and the same effects as those of the fifth embodiment described above can also be obtained.

[0103] 7. Variations Each of the above-mentioned exemplary embodiments can be modified in various ways. Specific modified embodiments that can be applied to each of the above-mentioned embodiments are illustrated below. Note that two or more embodiments selected from the following exemplary embodiments can be appropriately combined as long as they are not contradictory to each other.

[0104] 7-1. Variation 1 In the above-described embodiment, a configuration in which a piezoelectric layer is interposed between an individual electrode and a common electrode is exemplified, but this is not limiting, and a configuration in which a piezoelectric layer is interposed between individual electrodes may also be used.

[0105] 7-2.Modification 2 In each of the above-mentioned embodiments, a serial type liquid ejection device 100 is exemplified in which a transport body 242 carrying a liquid ejection head 26 is moved back and forth, but the present invention can also be applied to a line type liquid ejection device in which multiple nozzles N are distributed across the entire width of the medium 12.

[0106] 7-3. Variation 3 The liquid ejection device 100 exemplified in each of the above-mentioned embodiments can be adopted in various devices such as facsimile machines and copy machines, in addition to devices dedicated to printing. However, the use of the liquid ejection device of the present invention is not limited to printing. For example, a liquid ejection device that ejects a solution of a color material is used as a manufacturing device for forming a color filter of a liquid crystal display device. Also, a liquid ejection device that ejects a solution of a conductive material is used as a manufacturing device for forming wiring and electrodes of a wiring board. [Explanation of symbols]

[0107] 12...medium, 14...liquid container, 20...control unit (control section), 22...transport mechanism, 24...movement mechanism, 26...liquid ejection head, 26A...liquid ejection head, 26B...liquid ejection head, 26C...liquid ejection head, 26D...liquid ejection head, 26E...liquid ejection head, 32...flow path substrate, 34...pressure chamber substrate, 36...diaphragm, 36A...diaphragm, 36C...diaphragm, 36D...diaphragm, 38...pressure 38B...piezoelectric element, 38D...piezoelectric element, 38E...piezoelectric element, 42...casing portion, 44...sealing body, 46...nozzle plate, 48...vibration absorber, 50...wiring board, 54...wiring layer, 55...weight layer, 56...weight layer, 100...liquid ejection device, 242...transport body, 244...transport belt, 322...opening, 324...supply flow path, 326...communicating flow path, 328...relay flow path, 341...hole, 342...partition wall, 361... First layer, 361C...first layer, 361D...first layer, 361a...portion, 362...second layer, 362A...second layer, 381...first electrode layer, 381E...first electrode layer, 382...piezoelectric layer, 382B...piezoelectric layer, 382D...piezoelectric layer, 382E...second electrode layer, 382a...through hole, 383...second electrode layer, 383E...second electrode layer, 422...accommodation section, 424...inlet, Act...structure, BD...boundary, C...pressure chamber, EI1...bending rigidity, EI2...bending rigidity, F1...first surface, F2...second surface, N...nozzle, P1...active part, P2...non-active part, P2a...part, PV...vibration part, R...liquid storage chamber, pt1...first position, pt2...second position, t1...thickness, t2...thickness, t3...thickness, t31...thickness, t32...thickness, t4...thickness, t41...thickness, t42...thickness, λ1...neutral axis position, λ2...neutral axis position.

Claims

1. a diaphragm having a first surface and a second surface opposite the first surface; a piezoelectric element disposed on the first surface; a partition wall disposed on the second surface and defining a pressure chamber communicating with a nozzle; The piezoelectric element has a first electrode layer, a piezoelectric layer, and a second electrode layer, the first electrode layer, the piezoelectric layer, and the second electrode layer are laminated in this order on the first surface; The pressure chamber has a longitudinal shape when viewed in a thickness direction of the diaphragm, a portion of a structure including the vibration plate and the piezoelectric element, where the pressure chamber, the first electrode layer, the piezoelectric layer, and the second electrode layer all overlap when viewed in a thickness direction of the vibration plate, is defined as an active portion; a portion of the structure that overlaps with the pressure chamber at a position different from the active portion when viewed in a thickness direction of the vibration plate and that is adjacent to the active portion in a short side direction of the pressure chamber is defined as a non-active portion; a first position is an inner position of the active part as viewed in a thickness direction of the diaphragm; a second position is a position that is closest to the boundary between the pressure chamber and the partition wall inside the inactive portion as viewed in a thickness direction of the diaphragm, The bending stiffness of the active part at the first position is defined as EI1; When the bending stiffness of the non-active portion at the second position is EI2, The relationship of EI1 / EI2≦40 is satisfied. A liquid ejection head comprising:

2. The relationship 1<EI1 / EI2 is satisfied.

2. The liquid ejection head according to claim 1.

3. The relationship of 30<EI1 / EI2 is satisfied.

3. The liquid ejection head according to claim 2.

4. the non-active portion is located between the active portion and the partition wall in a thickness direction of the diaphragm.

4. The liquid ejection head according to claim 1, wherein the liquid ejection head is a liquid ejection head.

5. The thickness of the active portion is greater than the thickness of the non-active portion.

5. The liquid ejection head according to claim 1,

6. the thickness of the thinnest portion of the diaphragm in the non-active portion is thinner than the thickness of the thinnest portion of the diaphragm in the active portion; 6. The liquid ejection head according to claim 5.

7. the piezoelectric layer is disposed over both the active section and the non-active section, the thickness of the thinnest portion of the piezoelectric layer in the non-active portion is thinner than the thickness of the thinnest portion of the piezoelectric layer in the active portion; 7. The liquid ejection head according to claim 5, wherein the liquid ejection head is a liquid ejection head.

8. The Young's modulus of the material constituting the diaphragm in the active portion is higher than the Young's modulus of the material constituting the diaphragm in the non-active portion.

8. The liquid ejection head according to claim 1, wherein the liquid ejection head is a liquid ejection head.

9. The composition of the material constituting the diaphragm in the active portion is different from the composition of the material constituting the diaphragm in the non-active portion.

9. The liquid ejection head according to claim 1,

10. The width of the active part along the short side direction of the pressure chamber is W1, When the width of the non-active portion along the short side direction of the pressure chamber is W2, The relationship W1 / W2≦5 is satisfied.

10. The liquid ejection head according to claim 1,

11. The relationship 1≦W1 / W2 is satisfied.

11. The liquid ejection head according to claim 10.

12. A liquid ejection head according to any one of claims 1 to 11, A control unit for controlling the driving of the liquid ejection head. A liquid ejection device comprising:

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