Liquid crystal display device and electronic device

Abstract

[Problem] To provide a liquid crystal display device with which it is possible to increase light utilization efficiency without layering a plurality of micro-lenses having a three-dimensional shape. [Solution] A liquid crystal display device which comprises a first substrate having micro-lenses that correspond to pixels, a second substrate arranged opposite to the first substrate, and a liquid crystal material layer held between the first substrate and the second substrate, wherein: in the first substrate, a first transparent material layer is formed and is composed of a material that has a first refractive index, and a material having a second refractive index, different from the first refractive index, is arranged in a section corresponding to a section between adjacent pixels inside the first transparent material layer; and in the second substrate, a second transparent material layer is formed and is composed of a material that has a third refractive index, and a material having a fourth refractive index, different from the third refractive index, is arranged in a section corresponding to a section between adjacent pixels in the second transparent material layer.

Description

[Technical field]

[0001] The present disclosure relates to a liquid crystal display device and an electronic device. [Background technology]

[0002] A liquid crystal display device is known that has a liquid crystal material layer sandwiched between a pair of substrates. The liquid crystal display device displays images by operating pixels as optical shutters (light valves).

[0003] In recent years, there has been a demand for high brightness as well as high definition in liquid crystal display devices. For this reason, it has been proposed to provide microlenses corresponding to pixels to improve the efficiency of light use. It has also been proposed to stack multiple microlenses to further improve the efficiency of light use (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2018-100994 A Summary of the Invention [Problem to be solved by the invention]

[0005] When multiple microlenses are stacked, the lenses need to be aligned accurately in order to form an image with high accuracy. However, it is not easy to align a microlens having a three-dimensional shape with high accuracy because it is affected by misalignment during lithography and shape variation during etching. Therefore, there is a demand for improving the light utilization efficiency without stacking multiple microlenses having a three-dimensional shape.

[0006] Therefore, an object of the present disclosure is to provide a liquid crystal display device that can improve the light utilization efficiency without stacking multiple microlenses having a three-dimensional shape, and an electronic device equipped with such a liquid crystal display device. [Means for solving the problem]

[0007] In order to achieve the above-mentioned object, the liquid crystal display device of the present disclosure comprises a first substrate having microlenses corresponding to each pixel, a second substrate arranged opposite the first substrate, and a liquid crystal material layer sandwiched between the first substrate and the second substrate, wherein a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index different from the first refractive index is arranged in a portion corresponding to between adjacent pixels in the first transparent material layer, and a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a material having a fourth refractive index different from the third refractive index is arranged in a portion corresponding to between adjacent pixels in the second transparent material layer.

[0008] A first transparent material layer is formed between the microlenses and the layer of liquid crystal material.

[0009] The second refractive index is less than the first refractive index.

[0010] The material having the second refractive index is arranged in a grid pattern.

[0011] The material having the second refractive index is arranged to extend across the grating intersections.

[0012] The material having the first refractive index is silicon nitride or silicon oxynitride.

[0013] The material having the second refractive index is silicon oxide.

[0014] A multi-layer stack including a high refractive index material film and a low refractive index material film is disposed between the microlens and the first transparent material layer.

[0015] The multi-layer stack includes a silicon nitride film and a silicon oxide film.

[0016] The first transparent material layer is made of a multi-layer laminate film including a high refractive index material film and a low refractive index material film.

[0017] The fourth refractive index is less than the third refractive index.

[0018] The material having a fourth refractive index is arranged in a grid pattern.

[0019] The material having the fourth refractive index is arranged to have a wide width at the intersection of the gratings.

[0020] The material having the third refractive index is silicon nitride or silicon oxynitride.

[0021] The material having a fourth refractive index is silicon oxide.

[0022] A transparent common electrode is formed on the first substrate, and transparent pixel electrodes corresponding to each pixel are formed on the second substrate.

[0023] The second substrate has a lattice-shaped light-shielding region located in a portion corresponding to the area between adjacent pixels.

[0024] The first substrate has a plurality of transparent electrodes formed thereon, which extend in a first direction, and the second substrate has a plurality of transparent electrodes formed thereon, which extend in a second direction different from the first direction.

[0025] In order to achieve the above-mentioned object, the electronic device of the present disclosure includes a liquid crystal display device comprising a first substrate having microlenses corresponding to each pixel, a second substrate arranged opposite the first substrate, and a liquid crystal material layer sandwiched between the first substrate and the second substrate, in which a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index different from the first refractive index is arranged in a portion corresponding to between adjacent pixels in the first transparent material layer, and in which a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a transparent material having a fourth refractive index different from the third refractive index is arranged in a portion corresponding to between adjacent pixels in the second transparent material layer.

[0026] In the first substrate, a third transparent material layer made of a material having a fifth refractive index higher than the second refractive index is formed on the first transparent material layer, and a material having the second refractive index is embedded in a first groove provided in a portion corresponding to between adjacent pixels in the first and third transparent material layers.

[0027] A sidewall of the first groove in the first transparent material layer is inclined at a first inclination angle from the vertical to the interface between the first transparent material layer and the third transparent material layer, and a sidewall of the first groove in the third transparent material layer is inclined at a second inclination angle from the vertical that is greater than the first inclination angle.

[0028] The film thickness of the third transparent material layer is greater than 0 nm and less than 200 nm.

[0029] The first transparent material layer is a silicon oxynitride film, and the third transparent material layer is a silicon nitride film.

[0030] The third transparent material layer has a slower etching or polishing rate than the first transparent material layer.

[0031] In the second substrate, a fourth transparent material layer made of a material having a sixth refractive index higher than the fourth refractive index is formed on the second transparent material layer, and the material having the fourth refractive index is embedded in a second groove provided in a portion corresponding to between adjacent pixels in the second and fourth transparent material layers.

[0032] A sidewall of the second groove in the second transparent material layer is inclined at a third inclination angle from the vertical to the interface between the second transparent material layer and the fourth transparent material layer, and a sidewall of the second groove in the fourth transparent material layer is inclined at a fourth inclination angle greater than the third inclination angle from the vertical.

[0033] The film thickness of the fourth transparent material layer is greater than 0 nm and less than 200 nm.

[0034] The second transparent material layer is a silicon oxynitride film, and the fourth transparent material layer is a silicon nitride film.

[0035] The fourth transparent material layer has a slower etching or polishing rate than the second transparent material layer.

[0036] In order to achieve the above object, the electronic device of the present disclosure includes a first substrate, a third transparent material layer made of a material having a fifth refractive index higher than the second refractive index, formed on a first transparent material layer, and a material having the second refractive index embedded in a first groove provided in a portion corresponding to between adjacent pixels in the first and third transparent material layers.

[0037] [Brief description of the drawings]

[0038] [Figure 1] FIG. 1 is a schematic diagram illustrating a liquid crystal display device according to a first embodiment. [Diagram 2] Fig. 2A is a schematic cross-sectional view for explaining the basic configuration of a liquid crystal display device, and Fig. 2B is a schematic circuit diagram for explaining a pixel in the liquid crystal display device. [Diagram 3]FIG. 3 is a schematic partial cross-sectional view of a substrate and the like for explaining the liquid crystal display device according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view of a part of the liquid crystal display device for explaining the planar shape of the light-shielding region in the liquid crystal display device according to the first embodiment. [Diagram 5] FIG. 5 is a schematic cross-sectional view of a portion indicated by AA in FIG. [Figure 6] FIG. 6 is a schematic partial cross-sectional view of the first substrate, etc., for illustrating the convergence of light passing through the first substrate. [Figure 7] FIG. 7 is a schematic cross-sectional view for explaining another example of the portion indicated by AA in FIG. [Figure 8] 8 is a schematic cross-sectional view for explaining another example of the portion indicated by AA in FIG. 3, following FIG. [Figure 9] FIG. 9 is a schematic cross-sectional view of a portion indicated by BB in FIG. [Figure 10] FIG. 10 is a schematic partial cross-sectional view of the substrate and the like for explaining the state of convergence of light passing through the second substrate. [Figure 11] FIG. 11 is a schematic plan view of a part of the liquid crystal display device for illustrating a modification of the planar shape of the light-shielding region in the liquid crystal display device according to the first embodiment. [Figure 12] FIG. 12 is a schematic cross-sectional view of a portion indicated by AA in FIG. 3, and shows an example formed so as to correspond to the light-shielding region shown in FIG. [Figure 13] FIG. 13 is a schematic cross-sectional view of the portion indicated by BB in FIG. 3, and shows an example formed so as to correspond to the light-shielding region shown in FIG. [Figure 14] 14A and 14B are schematic partial cross-sectional views of a substrate and the like for illustrating a manufacturing method of the display device according to the first embodiment. [Figure 15] 15A and 15B are schematic partial cross-sectional views of the substrate and the like for illustrating the manufacturing method of the display device according to the first embodiment, following FIG. 14B. [Figure 16]16A and 16B are schematic partial cross-sectional views of the substrate and the like for explaining the manufacturing method of the display device according to the first embodiment, following FIG. 15B. [Figure 17] 17A and 17B are schematic partial cross-sectional views of the substrate and the like for illustrating the manufacturing method of the display device according to the first embodiment, following FIG. 16B. [Figure 18] 18A, 18B, and 18C are schematic partial cross-sectional views of the substrate and the like for illustrating the manufacturing method of the display device according to the first embodiment, following FIG. 17B. [Figure 19] 19A, 19B, and 19C are schematic partial cross-sectional views of the substrate and the like for illustrating the manufacturing method of the display device according to the first embodiment, following FIG. 18C. [Figure 20] 20A and 20B are schematic partial cross-sectional views of the substrate and the like for illustrating the manufacturing method of the display device according to the first embodiment, following FIG. 19C. [Figure 21] FIG. 21 is a schematic partial cross-sectional view of a substrate and the like for explaining a liquid crystal display device according to the second embodiment. [Figure 22] 22A and 22B are schematic partial cross-sectional views of a substrate and the like for illustrating a manufacturing method of a display device according to the second embodiment. [Figure 23] FIG. 23 is a schematic partial cross-sectional view of a substrate and the like for explaining a liquid crystal display device according to a third embodiment. [Figure 24] 24A and 24B are schematic partial cross-sectional views of a substrate and the like for illustrating a manufacturing method of a display device according to the third embodiment. [Diagram 25] FIG. 25 is a schematic diagram illustrating a liquid crystal display device according to the fourth embodiment. [Figure 26] FIG. 26 is a schematic partial cross-sectional view of a substrate and the like for explaining a liquid crystal display device according to the fourth embodiment. [Figure 27] FIG. 27 is a schematic cross-sectional view of a portion indicated by CC in FIG. [Figure 28]FIG. 28 is a schematic cross-sectional view of a portion indicated by DD in FIG. [Figure 29] FIG. 29 is a conceptual diagram of a projection type display device. [Diagram 30] FIG. 30 is a diagram showing the appearance of a lens-interchangeable single-lens reflex type digital still camera, with FIG. 30A showing a front view and FIG. 30B showing a rear view. [Diagram 31] FIG. 31 is an external view of a head mounted display. [Diagram 32] FIG. 32 is an external view of a see-through head mounted display. [Diagram 33] FIG. 33 is a block diagram showing an example of a schematic configuration of a vehicle control system. [Diagram 34] FIG. 34 is an explanatory diagram showing an example of the installation positions of the vehicle outside information detection unit and the imaging unit. [Diagram 35] FIG. 35 is a schematic partial cross-sectional view illustrating a liquid crystal display device according to the fifth embodiment. [Diagram 36] FIG. 36 is a schematic cross-sectional view showing a configuration example of the dashed-line frame B36 in FIG. [Figure 37] FIG. 37 is a cross-sectional view showing an example of a method for manufacturing the liquid crystal display device according to the fifth embodiment. [Figure 38] FIG. 38 is a cross-sectional view showing an example of a method for manufacturing the liquid crystal display device according to the fifth embodiment. [Figure 39] FIG. 39 is a cross-sectional view showing an example of a method for manufacturing the liquid crystal display device according to the fifth embodiment. [Diagram 40] FIG. 40 is a cross-sectional view showing an example of a method for manufacturing the liquid crystal display device according to the fifth embodiment. [Diagram 41] FIG. 41 is a cross-sectional view showing an example of a method for manufacturing the liquid crystal display device according to the fifth embodiment. [Diagram 42] FIG. 42 is a cross-sectional view showing an example of a method for manufacturing the liquid crystal display device according to the fifth embodiment. [Diagram 43] FIG. 43 is a schematic partial cross-sectional view illustrating a liquid crystal display device according to the sixth embodiment. [Diagram 44] FIG. 44 is a schematic partial cross-sectional view illustrating a liquid crystal display device according to the seventh embodiment. [Diagram 45] FIG. 45 is a schematic cross-sectional view showing a configuration example of the dashed-line frame B45 in FIG. [Diagram 46] FIG. 46 is a schematic partial cross-sectional view illustrating a liquid crystal display device according to the eighth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0039] Hereinafter, the present disclosure will be described based on the embodiments with reference to the drawings. The present disclosure is not limited to the embodiments, and various numerical values ​​and materials in the embodiments are examples. In the following description, the same elements or elements having the same functions will be designated by the same reference numerals, and duplicated descriptions will be omitted. The description will be given in the following order. 1. General Description of Liquid Crystal Display Device and Electronic Device According to the Present Disclosure 2. First embodiment 3. Second embodiment 4. Third embodiment 5. Fourth embodiment 6. Description of Electronic Devices 7. Application Examples 8.Other

[0040] [General Description of Liquid Crystal Display Device and Electronic Device According to the Present Disclosure] In the following description, the liquid crystal display device according to the present disclosure and the liquid crystal display device included in the electronic device according to the present disclosure may be simply referred to as the "liquid crystal display device according to the present disclosure." A first substrate having microlenses corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between a first substrate and a second substrate; Equipped with a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index different from the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; A second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a material having a fourth refractive index different from the third refractive index is disposed in a portion of the second transparent material layer corresponding to between adjacent pixels.

[0041] In the liquid crystal display device of the present disclosure, the first transparent material layer may be configured to be formed between a microlens and the liquid crystal material layer. The configuration of the microlens is not particularly limited. The microlens may be formed by known lithography or etching techniques.

[0042] In the liquid crystal display device of the present disclosure including the above-mentioned preferable configuration, the second refractive index can be smaller than the first refractive index.

[0043] In the liquid crystal display device of the present disclosure including the various preferred configurations described above, the material having the second refractive index may be arranged discretely, but is preferably arranged in a lattice pattern. In this case, the material having the second refractive index may be arranged in a widened manner at the intersections of the lattices.

[0044] In the liquid crystal display device of the present disclosure including the various preferred configurations described above, the material having the first refractive index and the material having the second refractive index can be appropriately selected from organic materials and inorganic materials. From the viewpoint of the manufacturing process of the liquid crystal display device, it is preferable that the material having the first refractive index is silicon nitride or silicon oxynitride. In this case, the material having the second refractive index can be silicon oxide.

[0045] In the liquid crystal display device of the present disclosure including the various preferred configurations described above, a multi-layer laminate film including a high refractive index material film and a low refractive index material film may be disposed between the microlens and the first transparent material layer. The high refractive index material film and the low refractive index material film may be formed using, for example, an inorganic insulating material. Silicon nitride (SiN x ), tantalum oxide (Ta2O5), titanium oxide (TiO2), etc. Examples of materials that can be used to form the low refractive index film include silicon oxide (SiO x ) and silicon oxynitride (SiO x N y From the viewpoint of the manufacturing process of the liquid crystal display device, it is preferable that the multilayer laminated film contains a silicon nitride film and a silicon oxide film.

[0046] The multilayer laminated film described above usually functions as a C-plate. A multilayer laminated film consisting of a group of alternating high-refractive index obliquely evaporated films and low-refractive index obliquely evaporated films having the same tilt direction with respect to the normal line of the film-forming surface acts as an optically tilted C-plate. Such a multilayer laminated film can optically compensate for the effects of the refractive index anisotropy of the liquid crystal material layer and the pretilt of the liquid crystal molecules.

[0047] The thickness and number of layers of the multi-layer laminated film may be appropriately set according to the viewpoint of optical compensation. For example, the film thickness may be about 10 to 50 nanometers. The film thickness ratio of the high refractive index material film and the low refractive index material film may be approximately 1:1. The number of layers may be, for example, about 10 to 200. The high refractive index material film and the low refractive index material film may be formed by a well-known film formation method such as a CVD method or a PVD method.

[0048] Alternatively, in the liquid crystal display device of the present disclosure including the various preferred configurations described above, the first transparent material layer may be configured to be a multilayer laminate film including a high refractive index material film and a low refractive index material film. In this case, the average refractive index of the multilayer laminate film may be set as the first refractive index. The configuration of the multilayer laminate film including a high refractive index material film and a low refractive index material film is the same as that described above, so a description thereof will be omitted.

[0049] In the liquid crystal display device of the present disclosure including the various preferable configurations described above, the fourth refractive index can be smaller than the third refractive index.

[0050] In the liquid crystal display device of the present disclosure including the various preferred configurations described above, the material having the fourth refractive index may be arranged discretely, but is preferably arranged in a lattice pattern. In this case, the material having the fourth refractive index may be arranged in a widened manner at the intersections of the lattices.

[0051] In the liquid crystal display device of the present disclosure including the various preferred configurations described above, the material having the third refractive index and the material having the fourth refractive index can be appropriately selected from organic materials and inorganic materials. From the viewpoint of the manufacturing process of the liquid crystal display device, it is preferable that the material having the third refractive index is silicon nitride or silicon oxynitride. In this case, the material having the fourth refractive index can be silicon oxide.

[0052] In the liquid crystal display device of the present disclosure including the various preferred configurations described above, a transparent common electrode may be formed on the first substrate, and transparent pixel electrodes corresponding to each pixel may be formed on the second substrate. In addition, for operation in a so-called active matrix system, a transistor for driving the transparent pixel electrodes and a storage capacitor for storing charges may be formed on the second substrate. In this case, the second substrate may be configured to have a lattice-shaped light-shielding region located in a portion corresponding to a portion between adjacent pixels. The light-shielding region is usually formed by blocking light with various wirings and electrodes for driving the transparent pixel electrodes. The light-shielding region is usually formed in a lattice shape so as to be located between pixels.

[0053] Alternatively, in the liquid crystal display device of the present disclosure including the various preferred configurations described above, a configuration may be adopted in which a plurality of transparent electrodes extending in a first direction are formed on the first substrate, and a plurality of transparent electrodes extending in a second direction different from the first direction are formed on the second substrate. A liquid crystal display device having this configuration is a so-called passive matrix liquid crystal display device, and the portions where the transparent electrodes in the first direction and the transparent electrodes in the second direction different from the first direction overlap function as pixels.

[0054] In the case of a transmissive liquid crystal display device, the transparent pixel electrodes formed on the second substrate can be formed using transparent conductive materials such as indium tin oxide (ITO) and indium zinc oxide (IZO). The same is true for the transparent common electrode formed on the first substrate. In some cases, a metal thin film made of silver (Ag) or magnesium (Mg) with a thickness of about 5 nm and capable of transmitting light to a certain extent can also be used.

[0055] The first and second substrates can be made of transparent materials such as plastic, glass, quartz, etc. The transistors and various circuits that drive the pixel electrodes provided on the second substrate can be constructed, for example, by forming and processing a semiconductor material layer on the substrate.

[0056] The materials constituting the various wiring, electrodes, or contacts are not particularly limited, and metal materials such as aluminum (Al), aluminum alloys such as Al-Cu and Al-Si, tungsten (W), and tungsten alloys such as tungsten silicide (WSi) can be used.

[0057] There are no particular limitations on the materials constituting the interlayer insulating layer, the planarizing film, etc., and inorganic materials such as silicon oxide, silicon oxynitride, silicon nitride, etc., and organic materials such as polyimide, etc. can be used.

[0058] The method of forming the semiconductor material layer, wiring, electrodes, insulating layers, insulating films, etc. is not particularly limited, and any known film forming method can be used to form the films as long as it does not interfere with the implementation of the present disclosure. The same applies to the patterning method of these.

[0059] The liquid crystal display device may be configured to display monochrome images or color images. Examples of pixel values ​​of the liquid crystal display device include U-XGA (1600, 1200), HD-TV (1920, 1080), Q-XGA (2048, 1536), as well as (3840, 2160), (7680, 4320), and other image resolutions, but are not limited to these values.

[0060] Examples of electronic devices equipped with the liquid crystal display device of the present disclosure include direct-view and projection display devices, as well as various other electronic devices equipped with an image display function.

[0061] The various conditions in this specification are satisfied not only when they are strictly met, but also when they are substantially met. Various variations that occur in design or manufacturing are permitted. In addition, the drawings used in the following description are schematic and do not indicate actual dimensions or proportions.

[0062] [First embodiment] The first embodiment relates to a liquid crystal display device and an electronic device according to the present disclosure.

[0063] FIG. 1 is a schematic diagram illustrating a liquid crystal display device according to a first embodiment.

[0064] The liquid crystal display device according to the first embodiment is an active matrix type liquid crystal display device. As shown in Fig. 1, the liquid crystal display device 1 includes pixels PX arranged in a matrix, and various circuits such as a horizontal drive circuit 11 and a vertical drive circuit 12 for driving the pixels PX. The liquid crystal display device 1 is a display device in which various circuits such as the horizontal drive circuit 11 and the vertical drive circuit 12 are integrated. In some cases, the various circuits may be configured as separate entities.

[0065] The symbol SCL denotes a scanning line for scanning the pixels PX, and the symbol DTL denotes a signal line for supplying various voltages to the pixels PX. The pixels PX are arranged in a matrix, for example, M pixels in the horizontal direction and N pixels in the vertical direction, totaling M×N pixels. The common electrode shown in FIG. 1 is provided as a common electrode for each liquid crystal cell. In the example shown in FIG. 1, the horizontal drive circuit 11 and the vertical drive circuit 12 are each arranged on one end side of the liquid crystal display device 1, but this is merely an example.

[0066] Fig. 2A is a schematic cross-sectional view for explaining the basic configuration of a liquid crystal display device, and Fig. 2B is a schematic circuit diagram for explaining a pixel in the liquid crystal display device.

[0067] As shown in Fig. 2A, the liquid crystal display device 1 includes a first substrate 150, a second substrate 100 disposed opposite the first substrate 150, and a liquid crystal material layer 140 sandwiched between the first substrate 150 and the second substrate 100. For convenience of illustration, the first substrate 150 and the second substrate 100 are shown in a simplified manner in Fig. 2A. The first substrate 150 and the second substrate 100 are sealed by a sealing portion 180. The sealing portion 180 is annular and surrounds the liquid crystal material layer 140.

[0068] Although not shown in FIG. 2A, the first substrate 150 has a microlens corresponding to each pixel. The first substrate 150 is provided with a transparent common electrode made of a transparent conductive material such as ITO. More specifically, the first substrate 150 is composed of a rectangular support substrate made of a transparent material such as quartz, a microlens corresponding to each pixel, a transparent common electrode provided on the surface of the support substrate facing the liquid crystal material layer 140, and an alignment film provided on the transparent common electrode. In addition, a polarizing film or the like is appropriately arranged on the first substrate 150 and the second substrate 100 so as to satisfy the crossed Nicol or parallel Nicol conditions.

[0069] As described later, the second substrate 100 is configured by laminating various components on a support substrate made of, for example, quartz. The liquid crystal display device 1 is a transmissive liquid crystal display device. That is, light from a light source enters from the first substrate 150 side and exits from the second substrate 100 side via a liquid crystal material layer.

[0070] As shown in Fig. 2B, a liquid crystal cell constituting a pixel PX is composed of a transparent pixel electrode provided on the second substrate 100, and a liquid crystal material layer and a transparent common electrode in a portion corresponding to the transparent pixel electrode. In order to prevent deterioration of the liquid crystal material layer, a common potential V com In addition, in the pixel PX, each element except for the liquid crystal material layer and the transparent common electrode is formed on the second substrate 100 shown in FIG. 2A. do.

[0071] As is clear from the wiring relationship in FIG. 2B, the pixel voltage supplied from the signal line DTL is applied to the transparent pixel electrode via the transistor TR that is turned on by the scanning signal of the scanning line SCL. Since the transparent pixel electrode and one of the electrodes of the capacitance structure CS are electrically connected, the pixel voltage is also applied to one of the electrodes of the capacitance structure CS. The other electrode of the capacitance structure CS is supplied with a common potential V comIn this configuration, even after the transistor TR is turned off, the voltage of the transparent pixel electrode is maintained by the capacitance of the liquid crystal cell and the capacitive structure CS.

[0072] 3 to 13, in the display device 1 according to the first embodiment, a first transparent material layer made of a material having a first refractive index is formed on the first substrate 150, and a material having a second refractive index different from the first refractive index is disposed in a portion of the first transparent material layer corresponding to between adjacent pixels. Also, a second transparent material layer made of a material having a third refractive index is formed on the second substrate 100, and a material having a fourth refractive index different from the third refractive index is disposed in a portion of the second transparent material layer corresponding to between adjacent pixels.

[0073] FIG. 3 is a schematic partial cross-sectional view of a substrate and the like for explaining the liquid crystal display device according to the first embodiment.

[0074] As described above, the liquid crystal display device 1 includes the first substrate 150, the second substrate 100, and the liquid crystal material layer 140 sandwiched between the first substrate 150 and the second substrate 100.

[0075] The first substrate 150 includes a support substrate 151 made of quartz, and microlenses 152 formed on the support substrate 151 and arranged to correspond to each pixel. In addition, a first transparent material layer 160 made of a material having a first refractive index is formed on the first substrate 150, and a material 161 having a second refractive index different from the first refractive index is arranged in a portion of the first transparent material layer 160 corresponding to between adjacent pixels. For convenience of explanation, the material constituting the first transparent material layer 160 may be referred to as material 160.

[0076] The arrangement pitch, height, and width of the material 161 are respectively represented by the symbols PH, H, and W. The symbol PH is equal to the pixel pitch, and is, for example, a value of about 5 to 10 micrometers. The symbol H is a value of about 0.2 to 1 micrometers, and the symbol W is a value of about 0.5 to 1 micrometers.

[0077] The material 160 having the first refractive index and the material 161 having the second refractive index are selected so as to satisfy the condition that the second refractive index is smaller than the first refractive index. Here, the material 160 having the first refractive index is silicon nitride, and the material 161 having the second refractive index is silicon oxide. The first transparent material layer 160 made of silicon nitride is formed between the microlens 152 and the liquid crystal material layer 140. A transparent common electrode 171 and an alignment film 172 are laminated and arranged on the surface of the first transparent material layer 160 facing the liquid crystal material layer 140.

[0078] The second substrate 100, which is disposed opposite the first substrate 150, includes a support substrate 101 made of quartz, a wiring layer 120 including various wirings, and a pixel electrode 131 formed on the wiring layer 120. A planarization film 132 and an alignment film 133 are laminated on the entire surface including the pixel electrode 131. The pixel electrode 131 is connected to one of the source / drain regions of the transistor 122 via a contact (not shown).

[0079] In the wiring layer 120, reference numeral 121 denotes a wiring that also functions as a light shield, and reference numeral 122 denotes a transistor. Reference numeral 122A denotes a patterned semiconductor material layer, and reference numeral 122B denotes a gate electrode. Although not shown in the figure, the wiring 121 is connected to the gate electrode 122B. Reference numeral 123 typically denotes various other wirings. Among the wirings 123, those that extend in the X direction and those that extend in the Y direction are mixed, but in FIG. 3, only a cross section of some of them is typically shown. Reference numeral 124 denotes an insulating layer for isolating wirings and the like. Note that the wiring layer 120 is formed by stacking various elements, but is shown in a simplified form for convenience of illustration.

[0080] Between the support substrate 101 and the wiring layer 120, a second transparent material layer 110 made of a material having a third refractive index is formed, and a material 111 having a fourth refractive index different from the third refractive index is disposed in a portion of the second transparent material layer 110 corresponding to a portion between adjacent pixels. Reference numeral 111A denotes, for example, a base layer made of a material similar to the material 111. For convenience of explanation, the material constituting the second transparent material layer 110 may be referred to as material 110. The arrangement pitch, height, and width of the material 111 are similar to the arrangement pitch, height, and width of the material 161 described above.

[0081] The material 110 constituting the second transparent material layer may be formed over the entire area of ​​the first substrate 150, or may be formed only in the portion corresponding to the display area.

[0082] For example, by omitting the formation of the material 110 in the region where the horizontal drive circuit 11 and the vertical drive circuit 12 shown in Fig. 1 are formed, it becomes possible to adjust the threshold value of the transistor in accordance with the characteristics of the above-mentioned peripheral circuits, etc. Also, normally, a material with a high refractive index has a large stress, which can cause the film to peel off, but by forming the material 110 only in a specific region, it is possible to suppress the stress as a whole.

[0083] The material 110 having the third refractive index and the material 111 having the fourth refractive index are selected so as to satisfy the condition that the fourth refractive index is smaller than the third refractive index. Here, the material 110 having the third refractive index is silicon nitride, and the material 111 having the fourth refractive index is silicon oxide. The second transparent material layer 110 made of silicon nitride is formed between the wiring layer 120 and the support substrate 101.

[0084] Incidentally, polarizing films (not shown) are disposed between the first substrate 150 and the second substrate 100 so as to establish a crossed Nicol or parallel Nicol relationship depending on the specifications of the liquid crystal display device 1.

[0085] The liquid crystal material layer 140 is sandwiched between the second substrate 100 and the first substrate 150. The initial alignment direction of the liquid crystal molecules 141 in the liquid crystal material layer 140 is set by the alignment films 133 and 172. In a state where no electric field is applied to the liquid crystal material layer 140, the liquid crystal molecules 141 are aligned in a substantially vertical direction at a predetermined tilt angle. The liquid crystal display device 1 is a so-called vertical alignment type (VA mode) liquid crystal display device.

[0086] The above describes the basic configuration of the liquid crystal display device 1. Next, an explanation will be given of the convergence of light passing through the liquid crystal display device 1. For convenience of explanation, first, the planar shape of the light-shielding region in the liquid crystal display device 1 will be explained.

[0087] FIG. 4 is a schematic plan view of a part of the liquid crystal display device for explaining the planar shape of the light-shielding region in the liquid crystal display device according to the first embodiment.

[0088] A light-shielding region that does not transmit light is formed in the liquid crystal display device 1 by the wiring 121 and wiring 123 shown in FIG. 3. The various wirings are basically arranged so as to be located between the pixel electrodes 131. Therefore, the light-shielding region BLK of the liquid crystal display device 1 becomes a lattice-shaped region shown by hatching in FIG. 4. Basically, the material 161 having a second refractive index different from the first refractive index is arranged in a portion corresponding to the light-shielding region BLK in the first transparent material layer 160. Similarly, the material 111 having a fourth refractive index different from the third refractive index is arranged in a portion corresponding to the light-shielding region BLK in the second transparent material layer 110.

[0089] Having described the planar shape of the light blocking region, the convergence of light by the first transparent material layer will now be described.

[0090] Fig. 5 is a schematic cross-sectional view of a portion indicated by AA in Fig. 3. Fig. 6 is a schematic partial cross-sectional view of a substrate etc. for explaining the convergence of light passing through a first substrate.

[0091] As shown in FIG. 5, in the cross section indicated by AA, the material 161 having the second refractive index is arranged in a lattice shape. The material 160 constituting the first transparent material layer 160 is arranged in an island shape with respect to the lattice formed by the material 161. As shown in FIG. 6, the light incident on the first substrate 150 is first changed in direction to a convergent direction by the microlens 152. Then, of the light incident on the first transparent material layer 160, the light incident near the boundary between the material 160 and the material 161 travels relatively fast in the material 161 having a relatively small refractive index, and the travel direction is changed to a more convergent direction. In other words, the first transparent material layer 160 in which the material 161 is embedded functions optically in the same manner as a convex lens.

[0092] In the above description, the material 161 is arranged in a lattice pattern in the cross section of the portion indicated by AA, but this is merely one example. For example, even if the material 161 is arranged discretely in the portion corresponding to the light-shielding region BLK, it is possible to obtain a certain degree of effect. The same applies to the material 111 in the second transparent material layer 110. FIG. 7 and FIG. 8 are schematic cross-sectional views for explaining other examples of the portion indicated by AA in FIG. 3. These show examples in which the material 161 is arranged at the intersection of the light-shielding portion BLK. FIG. 7 shows an example in which the region in which the material 161 is arranged is contained within the light-shielding portion BLK. FIG. 8 shows an example in which a part of the region in which the material 161 is arranged extends outside the light-shielding portion BLK.

[0093] The convergence of light by the first transparent material layer has been described above, followed by the convergence of light by the second transparent material layer.

[0094] Fig. 9 is a schematic cross-sectional view of a portion indicated by BB in Fig. 3. Fig. 10 is a schematic partial cross-sectional view of a substrate etc. for explaining the convergence of light passing through the second substrate.

[0095] As shown in FIG. 9, in the cross section indicated by BB, the material 111 having the fourth refractive index is arranged in a lattice shape. The material 110 constituting the second transparent material layer 110 is arranged in an island shape with respect to the lattice formed by the material 111. As shown in FIG. 10, the light incident on the second substrate 100 from the liquid crystal material layer 140 is diffracted by the wiring of the wiring layer 120 and the like, and the traveling direction is changed to the diverging direction. At this time, the light incident on the vicinity of the boundary between the material 110 and the material 111 travels relatively fast in the material 111 having a relatively small refractive index, so that the detouring caused by diffraction is mitigated. In other words, the second transparent material layer 110 in which the material 111 is embedded functions optically in the same manner as a convex lens.

[0096] The above describes the convergence of light by the second transparent material layer.

[0097] In the liquid crystal display device 1, the light converging effect is enhanced by the microlens 152 and the first transparent material layer 160 in which the material 161 is embedded, without stacking multiple microlenses having a three-dimensional shape. In addition, the second transparent material layer 110 reduces the wraparound caused by diffraction due to wiring or the like. In this way, in the liquid crystal display device 1, it is possible to increase the light utilization efficiency without stacking multiple microlenses having a three-dimensional shape.

[0098] In addition, the planar shape of the light-shielding region is determined by the arrangement and shape of wiring, etc., and is not necessarily a simple lattice shape. For example, as shown in FIG. 11, the light-shielding region may be widened at the portion where the lattices intersect. In such a case, in the first transparent material layer 160, the material 161 having the second refractive index may be arranged so as to be widened at the portion where the lattices intersect. Specifically, the material 161 may be embedded in the first transparent material layer 160 so that the portion indicated by AA in FIG. 3 has a cross section as shown in FIG. 12. Similarly, in the second transparent material layer 110, the material 111 having the fourth refractive index may be arranged so as to be widened at the portion where the lattices intersect. Specifically, the material 111 may be embedded in the second transparent material layer 110 so that the portion indicated by BB in FIG. 3 has a cross section as shown in FIG. 13.

[0099] Next, a method for manufacturing the liquid crystal display device 1 according to the first embodiment will be described.

[0100] 14 to 20 are schematic partial cross-sectional views of a substrate and the like for illustrating the manufacturing method of the display device according to the first embodiment.

[0101] [Step-100] (see Figures 14A, 14B and 15A) First, the manufacturing process of the first substrate 150 will be described. A support substrate 151 is prepared (see FIG. 14A), and the outer shape of the microlens is formed thereon using a known etching technique or the like (see FIG. 14B). Next, a material 152 having a higher refractive index than the support substrate 151 is formed thereon, and then planarized to form the microlens 152 (see FIG. 15A).

[0102] [Step-110] (see Figures 15B, 16A, 16B and 17A) Next, a first transparent material layer 160 in which a material 161 having a second refractive index is embedded is formed on the microlens 152. First, a layer made of a material 160 having a first refractive index is formed on the microlens 152 (see FIG. 15B). Next, an opening OP is formed in a portion corresponding to the area between the pixel electrodes 131 (see FIG. 16A). After that, a layer made of a material 161 having a second refractive index is formed on the entire surface (see FIG. 16B). Next, planarization is performed to obtain a first transparent material layer 160 in which the material 161 is embedded in the opening OP (see FIG. 17A). Note that, although the material 161 remains only in the opening OP in the figure, the material 161 may remain on the upper surface of the material 160 with a predetermined thickness after planarization.

[0103] [Step-120] (see Figure 17B) Thereafter, a transparent common electrode 171 and an alignment film 172 are sequentially laminated on the entire surface of the first transparent material layer 160. Through the above steps, the first substrate 150 can be obtained.

[0104] [Step-130] (see Figures 18A, 18B, 18C, 19A, 19B and 19C) Next, the manufacturing process of the second substrate 100 will be described. A support substrate 101 is prepared (see FIG. 18A), and a second transparent material layer 110 in which a material 111 having a fourth refractive index is embedded is formed thereon. First, a base film 111A made of a material similar to the material 111 having the fourth refractive index is formed (see FIG. 18B). Next, a layer made of a material 110 having a third refractive index is formed thereon (see FIG. 18C).

[0105] Next, an opening OP is formed in the layer made of material 110 in a portion corresponding to the gap between pixel electrodes 131 (see FIG. 19A). After that, a layer made of material 111 having a third refractive index is formed on the entire surface (see FIG. 19B). Next, planarization is performed to obtain a second transparent material layer 110 in which material 111 is filled in the opening OP (see FIG. 19C).

[0106] [Step-140] (see Figure 20A) Thereafter, the wiring layer 120 is formed on the second transparent material layer 110. The wiring 121, the transistor 122 including the semiconductor material layer 122A and the gate electrode 122B, and the wiring 123 can be formed by known film formation technology, patterning technology, or the like. As long as there is no impediment to the implementation of the present disclosure, the configuration of the wiring layer 120 is not particularly limited. For example, the transistor 122 can be configured to be composed of a TFT formed by forming a semiconductor material layer on the second transparent material layer 110 and appropriately patterning the semiconductor material layer. Alternatively, the transistor 122 can be formed by a so-called SOI process.

[0107] When the transistor 122 is configured to be a TFT, a high-quality oxide film may be further formed on the second transparent material layer 110, and then the wiring layer 120 may be formed. By forming a high-quality oxide film, it is possible to reduce the influence of hydrogen desorbed from the second transparent material layer 110 on the interface between the semiconductor material layer 122A and the gate insulating film.

[0108] [Step-150] (see Figure 20B) Thereafter, a pixel electrode 131 is formed on the wiring layer 120, and then a planarizing film 132 and an alignment film 133 are sequentially laminated on the entire surface. Through the above steps, the second substrate 100 can be obtained.

[0109] [Process-160] Next, the first substrate 150 and the second substrate 100 are placed opposite each other with the liquid crystal material layer 140 sandwiched therebetween and sealed, thereby obtaining the liquid crystal display device 1 shown in FIG.

[0110] The liquid crystal display device 1 has been described above. In the liquid crystal display device 1, the microlens 152 and the first transparent material layer 160 in which the material 161 is embedded enhance the light convergence effect without stacking multiple microlenses having a three-dimensional shape. In addition, the second transparent material layer 110 reduces the wraparound caused by diffraction due to wiring and the like. In this way, in the liquid crystal display device 1, it is possible to enhance the light utilization efficiency without stacking multiple microlenses having a three-dimensional shape.

[0111] Furthermore, in the case of a configuration in which a three-dimensional microlens is formed on support 101, cracks and the like occur during high-temperature heat treatment in the transistor manufacturing process after the microlens is formed, resulting in a decrease in yield. In the liquid crystal display device 1, a flat structure such as second transparent material layer 110 in which material 111 is embedded is formed on support 101, so that the occurrence of cracks due to heat treatment can be suppressed.

[0112] [Second embodiment] The second embodiment also relates to a liquid crystal display device and an electronic device according to the present disclosure.

[0113] 21 is a schematic partial cross-sectional view for explaining a liquid crystal display device according to a second embodiment. In the schematic diagram of the liquid crystal display device according to the second embodiment, the liquid crystal display device 1 in FIG. 1 can be read as a liquid crystal display device 2. In addition, in the schematic cross-sectional view for explaining the basic configuration of the liquid crystal display device, the liquid crystal display device 1 in FIG. 2A can be read as a liquid crystal display device 2 and the first substrate 150 as a first substrate 250.

[0114] The liquid crystal display device 2 is configured such that, compared to the liquid crystal display device 1 described in the first embodiment, a multilayer stacked film 263 including a high refractive index material film 264 and a low refractive index material film 265 is further disposed between the microlens 152 and the first transparent material layer 160. The multilayer stacked film 263 includes a silicon nitride film as the high refractive index material film 264, and a silicon oxide film as the low refractive index material film 265.

[0115] The deposition direction of the multilayer stacked film 263 is, for example, the normal direction of the surface on which the film is formed. The multilayer stacked film 263 functions as an optical compensation element constituting a C-plate. The multilayer stacked film 263 has its extraordinary axis perpendicular to the plane, and does not generate retardation for normally incident light. The refractive index anisotropy of the liquid crystal material layer 140 is compensated for by the multilayer stacked film 263.

[0116] Alternatively, the deposition direction of the multilayer laminated film 263 may be the same inclined direction (deposition direction) with respect to the normal line of the surface on which the film is formed. Such a multilayer laminated film 263 exhibits characteristics in which the characteristics of an O-plate are superimposed on the characteristics of a C-plate. Therefore, in addition to the refractive index anisotropy of the liquid crystal material layer 140, the refractive index anisotropy due to the tilt angle of the liquid crystal molecules 141 is also compensated for by the multilayer laminated film 263.

[0117] Next, a method for manufacturing the liquid crystal display device 2 according to the second embodiment will be described.

[0118] FIG. 22 is a schematic partial cross-sectional view illustrating a method for manufacturing a liquid crystal display device according to the second embodiment.

[0119] [Process-200] First, a step similar to [Step-100] described in the first embodiment is performed to form a microlens 152 on a support 151 (see FIG. 15A).

[0120] [Step-210] (see Figure 22A) Next, a multilayer stacked film 263 is formed on the microlens 152. The multilayer stacked film 263 can be obtained, for example, by successively forming a high refractive index material film 264 and a low refractive index material film 265 alternately by vapor deposition on the microlens 152 in a predetermined inclined direction.

[0121] [Step-220] (see Figure 22B) Next, a first transparent material layer 160 in which a material 161 having a second refractive index is embedded is formed on the multilayer stacked film 263. The first transparent material layer 160 in which a material 161 having a second refractive index is embedded can be formed by performing the same steps as those described with reference to Figures 15B, 16A, 16B, and 17A in the first embodiment.

[0122] [Process-230] Thereafter, a transparent common electrode 171 and an alignment film 172 are sequentially laminated on the entire surface of the first transparent material layer 160. Through the above steps, the first substrate 250 can be obtained.

[0123] [Process-240] Next, steps similar to [Step-130] to [Step-150] described in the first embodiment are performed to obtain the second substrate 100. Then, a step similar to [Step-160] described in the first embodiment is performed to obtain the liquid crystal display device 2 shown in FIG.

[0124] In the liquid crystal display device 2, the microlens 152 and the first transparent material layer 160 in which the material 161 is embedded enhance the light convergence effect without stacking multiple microlenses having a three-dimensional shape. The second transparent material layer 110 reduces the detouring caused by diffraction due to wiring or the like. In this way, in the liquid crystal display device 2, the light utilization efficiency can be improved without stacking multiple microlenses having a three-dimensional shape. Also, in the liquid crystal display device 2, flat structures such as the first transparent material layer 160 in which the material 161 is embedded and the second transparent material layer 110 in which the material 111 is embedded are stacked, so that the occurrence of cracks can be suppressed.

[0125] Furthermore, in the liquid crystal display device 2, a multilayer laminated film that functions as an optical compensation element is incorporated in-cell. Therefore, it is possible to achieve high contrast of the displayed image without disposing a separate optical compensation element, and also to reduce the manufacturing process and the number of parts. Furthermore, since the optical compensation element can be disposed within the liquid crystal display device, it is possible to obtain a highly reliable liquid crystal display device.

[0126] [Third embodiment] The third embodiment also relates to a liquid crystal display device and an electronic device according to the present disclosure.

[0127] 23 is a schematic partial cross-sectional view for explaining a liquid crystal display device according to a third embodiment. In the schematic diagram of the liquid crystal display device according to the third embodiment, the liquid crystal display device 1 in FIG. 1 can be read as a liquid crystal display device 3. In addition, in the schematic cross-sectional view for explaining the basic configuration of the liquid crystal display device, the liquid crystal display device 1 in FIG. 2A can be read as a liquid crystal display device 3 and the first substrate 150 as a first substrate 350.

[0128] In the liquid crystal display device 3, the first transparent material layer 360 is made of a multilayer laminate film including a high refractive index material film and a low refractive index material film. More specifically, the material 160 described in the first embodiment is replaced with the multilayer laminate film 360. In this case, the average refractive index of the multilayer laminate film 360 may be set as the first refractive index. The configuration of the multilayer laminate film 360 is basically the same as that of the multilayer laminate film 263 described in the second embodiment.

[0129] Next, a method for manufacturing the liquid crystal display device 3 according to the third embodiment will be described.

[0130] FIG. 24 is a schematic partial cross-sectional view illustrating a method for manufacturing a liquid crystal display device according to the third embodiment.

[0131] [Process-300] First, a step similar to [Step-100] described in the first embodiment is performed to form a microlens 152 on a support substrate 151 (see FIG. 15A).

[0132] [Step-310] (see Figures 24A and 24B) Next, a first transparent material layer 360 in which a material 161 having a second refractive index is embedded is formed on the microlens 152. First, a multilayer stacked film 360 constituting the first transparent material layer is formed on the microlens 152 (see FIG. 24A). The multilayer stacked film 360 can be obtained, for example, by successively depositing a high refractive index material film 264 and a low refractive index material film 265 alternately on the microlens 152 in a predetermined inclined direction by vapor deposition.

[0133] Next, by performing processes similar to those described with reference to Figures 16A, 16B and 17A referred to in the first embodiment, a first transparent material layer 360 having embedded material 161 having a second refractive index can be formed (see Figure 24B).

[0134] [Process-320] Thereafter, the transparent common electrode 171 and the alignment film 172 are sequentially laminated on the entire surface of the first transparent material layer 360. Through the above steps, the first substrate 350 can be obtained.

[0135] [Process-330] Next, steps similar to [Step-130] to [Step-150] described in the first embodiment are performed to obtain the second substrate 100. Then, a step similar to [Step-160] described in the first embodiment is performed to obtain the liquid crystal display device 3 shown in FIG.

[0136] In the liquid crystal display device 3 as well, the microlens 152 and the first transparent material layer 360 in which the material 161 is embedded enhance the light convergence effect without stacking multiple microlenses having a three-dimensional shape. The second transparent material layer 110 reduces the wraparound caused by diffraction due to wiring or the like. In this way, the liquid crystal display device 3 can also enhance the light utilization efficiency without stacking multiple microlenses having a three-dimensional shape. In addition, in the liquid crystal display device 3 as well, flat structures such as the first transparent material layer 360 in which the material 161 is embedded and the second transparent material layer 110 in which the material 111 is embedded are stacked, so that the occurrence of cracks can be suppressed.

[0137] In addition, the liquid crystal display device 3 also has a multilayer laminated film that functions as an optical compensation element incorporated in the cell. Therefore, it is possible to achieve high contrast of the displayed image without disposing a separate optical compensation element, and also to reduce the manufacturing process and the number of parts. Furthermore, since the optical compensation element can be disposed within the liquid crystal display device, it is possible to obtain a highly reliable liquid crystal display device.

[0138] [Fourth embodiment] The fourth embodiment also relates to a liquid crystal display device and an electronic device according to the present disclosure.

[0139] Fig. 25 is a schematic diagram for explaining a liquid crystal display device according to the present disclosure, and Fig. 26 is a schematic partial cross-sectional view for explaining a liquid crystal display device according to a fourth embodiment.

[0140] The liquid crystal display device according to the fourth embodiment is a passive matrix liquid crystal display device. As shown in Fig. 25, the liquid crystal display device 4 includes a plurality of transparent electrodes SCL extending in a first direction (X direction in the figure), a plurality of transparent electrodes DTL extending in a second direction (Y direction in the figure) different from the first direction, and various circuits such as a horizontal drive circuit 11 for driving the transparent electrodes SCL and a vertical drive circuit 12 for driving the transparent electrodes DTL. In addition, in the schematic cross-sectional view for explaining the basic configuration of the liquid crystal display device 4, the liquid crystal display device 1 in Fig. 2A should be read as the liquid crystal display device 4, the first substrate 150 as the first substrate 450, and the second substrate 100 as the second substrate 400.

[0141] 26, a transparent electrode SCL extending in the X direction is formed on the first substrate 450, and a transparent electrode DTL extending in the Y direction is formed on the second substrate 400. A region where the transparent electrode SCL and the transparent electrode DTL face each other forms a pixel.

[0142] The first substrate 450 is basically configured such that the common electrode of the first substrate 150 in the first embodiment is replaced with the transparent electrode SCL described above. The first transparent material layer 160 shown in FIG. 26 has the same configuration as that described in the first embodiment.

[0143] The second substrate 400 is basically configured such that the wiring 121, the transistor 122, and the various wirings 123 are omitted from the second substrate 100 in the first embodiment, and further the pixel electrode 131 is replaced with the above-mentioned transparent electrode SCL. The second transparent material layer 110 has the same configuration as that described in the first embodiment.

[0144] In the liquid crystal display device 4, no light-shielding wiring or the like is formed. Therefore, there is no light-shielding region as shown in Fig. 4 in the first embodiment, but the arrangement of components in the first transparent material layer 160 and the second transparent material layer 110 is similar to the arrangement described in the first embodiment. Fig. 27 is a schematic cross-sectional view of the portion indicated by CC in Fig. 26. Fig. 28 is a schematic cross-sectional view of the portion indicated by DD in Fig. 26.

[0145] In the liquid crystal display device 4 as well, the microlens 152 and the first transparent material layer 160 in which the material 161 is embedded enhance the light convergence effect without stacking multiple microlenses having a three-dimensional shape. In addition, the second transparent material layer 110 also functions optically in the same manner as a convex lens. Therefore, in the liquid crystal display device 4 as well, the light utilization efficiency can be improved without stacking multiple microlenses having a three-dimensional shape. In addition, in the liquid crystal display device 4 as well, flat structures such as the first transparent material layer 160 in which the material 161 is embedded and the second transparent material layer 110 in which the material 111 is embedded are stacked, so that the occurrence of cracks can be suppressed.

[0146] [Electronic device description] The liquid crystal display device according to the present disclosure described above can be used as a display unit (display unit) of electronic devices in various fields that displays a video signal input to the electronic device or a video signal generated within the electronic device as an image or video. For example, the liquid crystal display device can be used as a display unit of a television set, a digital still camera, a notebook personal computer, a portable terminal device such as a mobile phone, a video camera, a head-mounted display, etc.

[0147] The liquid crystal display device of the present disclosure also includes a sealed module. An example of the liquid crystal display device is a display module formed by attaching a counter part made of a transparent glass material or the like to a pixel array part. The display module may be provided with a circuit part or a flexible printed circuit (FPC) for inputting and outputting signals from the outside to the pixel array part. Below, a projection display device, a digital still camera, and a head mounted display are given as specific examples of electronic devices using the liquid crystal display device of the present disclosure. However, the specific examples given here are merely examples and are not limited thereto.

[0148] (Example 1) 29 is a conceptual diagram of a projection type display device using the liquid crystal display device of the present disclosure. The projection type display device is composed of a light source unit 500, an illumination optical system 510, a liquid crystal display device 1, an image control circuit 520 that drives the liquid crystal display device, a projection optical system 530, and a screen 540. The light source unit 500 can be composed of various lamps such as a xenon lamp, and semiconductor light emitting elements such as light emitting diodes. The illumination optical system 510 is used to guide light from the light source unit 500 to the liquid crystal display device 1, and is composed of optical elements such as a prism and a dichroic mirror. The liquid crystal display device 1 acts as a light valve, and an image is projected onto the screen 540 via the projection optical system 530.

[0149] (Example 2) Fig. 30 is an external view of a lens-interchangeable single-lens reflex type digital still camera, with Fig. 30A showing a front view and Fig. 30B showing a rear view. A lens-interchangeable single-lens reflex type digital still camera has, for example, an interchangeable taking lens unit (interchangeable lens) 612 on the right side of the front of a camera main body (camera body) 611, and a grip part 613 for the photographer to hold on the left side of the front.

[0150] A monitor 614 is provided at approximately the center of the back surface of the camera body 611. A viewfinder (eyepiece window) 615 is provided above the monitor 614. By looking through the viewfinder 615, the photographer can visually confirm the optical image of the subject guided by the photographing lens unit 612 and determine the composition.

[0151] In the lens-interchangeable single-lens reflex type digital still camera having the above configuration, the liquid crystal display device of the present disclosure can be used as the viewfinder 615. That is, the lens-interchangeable single-lens reflex type digital still camera according to this example is produced by using the liquid crystal display device of the present disclosure as the viewfinder 615.

[0152] (Example 3) 31 is an external view of a head mounted display. The head mounted display has, for example, ear hooks 712 on both sides of a glasses-shaped display unit 711 for wearing on the user's head. In this head mounted display, the liquid crystal display device of the present disclosure can be used as the display unit 711. That is, the head mounted display according to this example is produced by using the liquid crystal display device of the present disclosure as the display unit 711.

[0153] (Example 4) 32 is an external view of the see-through head mounted display. The see-through head mounted display 801 is composed of a main body 802, an arm 803, and a lens barrel 804.

[0154] The main body 802 is connected to the arm 803 and the glasses 800. Specifically, an end of the long side of the main body 802 is coupled to the arm 803, and one side of the main body 802 is connected to the glasses 800 via a connecting member. The main body 802 may be directly attached to the head of the human body.

[0155] The main body 802 incorporates a control board for controlling the operation of the see-through head mounted display 801 and a display unit. The arm 803 connects the main body 802 to the mirror tube 804 and supports the mirror tube 804. Specifically, the arm 803 is coupled to an end of the main body 802 and an end of the mirror tube 804, respectively, and fixes the mirror tube 804. The arm 803 also incorporates a signal line for communicating data related to an image provided from the main body 802 to the mirror tube 804.

[0156] The lens barrel 804 projects image light provided from the main body 802 via the arm 803 through an eyepiece lens toward the eyes of a user wearing the see-through head mounted display 801. In this see-through head mounted display 801, the liquid crystal display device of the present disclosure can be used for the display unit of the main body 802.

[0157] [Application example] The technology according to the present disclosure can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility device, an airplane, a drone, a ship, a robot, a construction machine, an agricultural machine (tractor), etc.

[0158] 33 is a block diagram showing a schematic configuration example of a vehicle control system 7000 which is an example of a mobile object control system to which the technology according to the present disclosure can be applied. The vehicle control system 7000 includes a plurality of electronic control units connected via a communication network 7010. In the example shown in FIG. 33, the vehicle control system 7000 includes a drive system control unit 7100, a body system control unit 7200, a battery control unit 7300, an outside-vehicle information detection unit 7400, an inside-vehicle information detection unit 7500, and an integrated control unit 7600. The communication network 7010 connecting these multiple control units may be an in-vehicle communication network conforming to any standard such as CAN (Controller Area Network), LIN (Local Interconnect Network), LAN (Local Area Network), or FlexRay (registered trademark).

[0159] Each control unit includes a microcomputer that performs arithmetic processing according to various programs, a storage unit that stores the programs executed by the microcomputer or parameters used in various calculations, and a drive circuit that drives various devices to be controlled. Each control unit includes a network I / F for communicating with other control units via a communication network 7010, and a communication I / F for communicating with devices or sensors inside and outside the vehicle by wired communication or wireless communication. In FIG. 33, a microcomputer 7610, a general-purpose communication I / F 7620, a dedicated communication I / F 7630, a positioning unit 7640, a beacon receiving unit 7650, an in-vehicle device I / F 7660, an audio / video output unit 7670, an in-vehicle network I / F 7680, and a storage unit 7690 are illustrated as functional configurations of the integrated control unit 7600. Other control units also include a microcomputer, a communication I / F, a storage unit, and the like.

[0160] The drivetrain control unit 7100 controls the operation of devices related to the drivetrain of the vehicle according to various programs. For example, the drivetrain control unit 7100 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle. The drivetrain control unit 7100 may also function as a control device such as an ABS (Antilock Brake System) or an ESC (Electronic Stability Control).

[0161] A vehicle state detection unit 7110 is connected to the drive system control unit 7100. The vehicle state detection unit 7110 includes at least one of a gyro sensor that detects the angular velocity of the axial rotational motion of the vehicle body, an acceleration sensor that detects the acceleration of the vehicle, or a sensor for detecting the amount of operation of an accelerator pedal, the amount of operation of a brake pedal, the steering angle of a steering wheel, the engine rotation speed, or the rotation speed of wheels, for example. The drive system control unit 7100 performs arithmetic processing using signals input from the vehicle state detection unit 7110, and controls the internal combustion engine, the drive motor, the electric power steering device, the brake device, etc.

[0162] The body system control unit 7200 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 7200 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 7200. The body system control unit 7200 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0163] The battery control unit 7300 controls the secondary battery 7310, which is a power supply source for the drive motor, according to various programs. For example, information such as battery temperature, battery output voltage, or remaining capacity of the battery is input to the battery control unit 7300 from a battery device equipped with the secondary battery 7310. The battery control unit 7300 performs calculation processing using these signals, and controls the temperature regulation of the secondary battery 7310 or controls a cooling device or the like equipped in the battery device.

[0164] The outside-vehicle information detection unit 7400 detects information outside the vehicle equipped with the vehicle control system 7000. For example, at least one of an imaging unit 7410 and an outside-vehicle information detection unit 7420 is connected to the outside-vehicle information detection unit 7400. The imaging unit 7410 includes at least one of a ToF (Time Of Flight) camera, a stereo camera, a monocular camera, an infrared camera, and other cameras. The outside-vehicle information detection unit 7420 includes at least one of an environmental sensor for detecting the current weather or climate, or a surrounding information detection sensor for detecting other vehicles, obstacles, pedestrians, and the like around the vehicle equipped with the vehicle control system 7000.

[0165] The environmental sensor may be, for example, at least one of a raindrop sensor that detects rain, a fog sensor that detects fog, a sunshine sensor that detects the degree of sunshine, and a snow sensor that detects snowfall. The surrounding information detection sensor may be at least one of an ultrasonic sensor, a radar device, and a LIDAR (Light Detection and Ranging, Laser Imaging Detection and Ranging) device. The imaging unit 7410 and the outside vehicle information detection unit 7420 may be provided as independent sensors or devices, or may be provided as a device in which multiple sensors or devices are integrated.

[0166] Here, FIG. 34 shows an example of the installation positions of the imaging unit 7410 and the vehicle exterior information detection unit 7420. The imaging units 7910, 7912, 7914, 7916, and 7918 are provided, for example, at least one of the front nose, side mirrors, rear bumper, back door, and upper part of the windshield in the vehicle interior of the vehicle 7900. The imaging unit 7910 provided on the front nose and the imaging unit 7918 provided on the upper part of the windshield in the vehicle interior mainly acquire images of the front of the vehicle 7900. The imaging units 7912 and 7914 provided on the side mirrors mainly acquire images of the sides of the vehicle 7900. The imaging unit 7916 provided on the rear bumper or back door mainly acquires images of the rear of the vehicle 7900. The imaging unit 7918 provided on the upper part of the windshield in the vehicle interior is mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0167] 34 shows an example of the imaging ranges of the imaging units 7910, 7912, 7914, and 7916. Imaging range a indicates the imaging range of the imaging unit 7910 provided on the front nose, imaging ranges b and c indicate the imaging ranges of the imaging units 7912 and 7914 provided on the side mirrors, and imaging range d indicates the imaging range of the imaging unit 7916 provided on the rear bumper or back door. For example, image data captured by the imaging units 7910, 7912, 7914, and 7916 are superimposed to obtain an overhead image of the vehicle 7900.

[0168] The outside information detection units 7920, 7922, 7924, 7926, 7928, and 7930 provided on the front, rear, sides, and corners of the vehicle 7900 and on the upper part of the windshield inside the vehicle cabin may be, for example, ultrasonic sensors or radar devices. The outside information detection units 7920, 7926, and 7930 provided on the front nose, rear bumper, back door, and on the upper part of the windshield inside the vehicle cabin of the vehicle 7900 may be, for example, LIDAR devices. These outside information detection units 7920 to 7930 are mainly used to detect preceding vehicles, pedestrians, obstacles, and the like.

[0169] Returning to FIG. 33, the description will be continued. The outside-vehicle information detection unit 7400 causes the imaging unit 7410 to capture an image outside the vehicle, and receives the captured image data. The outside-vehicle information detection unit 7400 also receives detection information from the outside-vehicle information detection unit 7420 connected thereto. When the outside-vehicle information detection unit 7420 is an ultrasonic sensor, a radar device, or a LIDAR device, the outside-vehicle information detection unit 7400 transmits ultrasonic waves or electromagnetic waves, and receives information on the received reflected waves. The outside-vehicle information detection unit 7400 may perform object detection processing or distance detection processing for people, cars, obstacles, signs, or characters on the road surface, based on the received information. The outside-vehicle information detection unit 7400 may perform environment recognition processing for recognizing rainfall, fog, road surface conditions, and the like, based on the received information. The outside-vehicle information detection unit 7400 may calculate the distance to an object outside the vehicle based on the received information.

[0170] Furthermore, the outside vehicle information detection unit 7400 may perform image recognition processing or distance detection processing to recognize people, cars, obstacles, signs, or characters on the road surface, based on the received image data. The outside vehicle information detection unit 7400 may perform processing such as distortion correction or position adjustment on the received image data, and may generate an overhead image or a panoramic image by synthesizing image data captured by different imaging units 7410. The outside vehicle information detection unit 7400 may perform viewpoint conversion processing using image data captured by different imaging units 7410.

[0171] The in-vehicle information detection unit 7500 detects information inside the vehicle. For example, a driver state detection unit 7510 that detects the state of the driver is connected to the in-vehicle information detection unit 7500. The driver state detection unit 7510 may include a camera that captures an image of the driver, a biosensor that detects the bioinformation of the driver, or a microphone that collects sound in the vehicle cabin. The biosensor is provided, for example, on the seat or steering wheel, and detects the bioinformation of a passenger sitting in the seat or a driver gripping the steering wheel. The in-vehicle information detection unit 7500 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 7510, or may determine whether the driver is dozing. The in-vehicle information detection unit 7500 may perform processing such as noise canceling processing on the collected sound signal.

[0172] The integrated control unit 7600 controls the overall operation of the vehicle control system 7000 according to various programs. The input unit 7800 is connected to the integrated control unit 7600. The input unit 7800 is realized by a device that can be operated by an occupant to input, such as a touch panel, a button, a microphone, a switch, or a lever. Data obtained by voice recognition of a voice input by a microphone may be input to the integrated control unit 7600. The input unit 7800 may be, for example, a remote control device using infrared or other radio waves, or an externally connected device such as a mobile phone or a PDA (Personal Digital Assistant) that supports the operation of the vehicle control system 7000. The input unit 7800 may be, for example, a camera, in which case the occupant can input information by gestures. Alternatively, data obtained by detecting the movement of a wearable device worn by the occupant may be input. Furthermore, the input unit 7800 may include, for example, an input control circuit that generates an input signal based on information input by the occupant using the above-mentioned input unit 7800 and outputs the input signal to the integrated control unit 7600. A passenger or the like operates the input unit 7800 to input various data to the vehicle control system 7000 and to instruct processing operations.

[0173] The storage unit 7690 may include a ROM (Read Only Memory) that stores various programs executed by the microcomputer, and a RAM (Random Access Memory) that stores various parameters, calculation results, sensor values, etc. The storage unit 7690 may be realized by a magnetic storage device such as an HDD (Hard Disc Drive), a semiconductor storage device, an optical storage device, or a magneto-optical storage device, etc.

[0174] The general-purpose communication I / F 7620 is a general-purpose communication I / F that mediates communication between various devices present in the external environment 7750. The general-purpose communication I / F 7620 may implement a cellular communication protocol such as GSM (registered trademark), WiMAX, LTE (Long Term Evolution), or LTE-Advanced (LTE-A), or other wireless communication protocols such as wireless LAN (also called Wi-Fi (registered trademark)) and Bluetooth (registered trademark). The general-purpose communication I / F 7620 may connect to a device (e.g., an application server or a control server) present on an external network (e.g., the Internet, a cloud network, or a carrier-specific network) via, for example, a base station or an access point. The general-purpose communication I / F 7620 may also connect to a terminal (e.g., a driver's, pedestrian's, or store's terminal, or a MTC (Machine Type Communication) terminal) present in the vicinity of the vehicle using, for example, a P2P (Peer To Peer) technology.

[0175] The dedicated communication I / F 7630 is a communication I / F that supports a communication protocol designed for use in a vehicle. The dedicated communication I / F 7630 may implement a standard protocol such as WAVE (Wireless Access in Vehicle Environment), which is a combination of a lower layer IEEE802.11p and a higher layer IEEE1609, DSRC (Dedicated Short Range Communications), or a cellular communication protocol. The dedicated communication I / F 7630 typically performs V2X communication, which is a concept including one or more of vehicle-to-vehicle communication, vehicle-to-infrastructure communication, vehicle-to-home communication, and vehicle-to-pedestrian communication.

[0176] The positioning unit 7640 performs positioning by receiving, for example, a GNSS signal from a Global Navigation Satellite System (GNSS) satellite (for example, a GPS signal from a Global Positioning System (GPS) satellite) and generates position information including the latitude, longitude, and altitude of the vehicle. The positioning unit 7640 may identify the current position by exchanging signals with a wireless access point, or may obtain position information from a terminal such as a mobile phone, PHS, or smartphone having a positioning function.

[0177] The beacon receiving unit 7650 receives, for example, radio waves or electromagnetic waves transmitted from radio stations or the like installed on the road, and acquires information such as the current location, congestion, road closure, required time, etc. The function of the beacon receiving unit 7650 may be included in the dedicated communication I / F 7630 described above.

[0178] The in-vehicle device I / F 7660 is a communication interface that mediates a connection between the microcomputer 7610 and various in-vehicle devices 7760 present in the vehicle. The in-vehicle device I / F 7660 may establish a wireless connection using a wireless communication protocol such as wireless LAN, Bluetooth (registered trademark), NFC (Near Field Communication), or WUSB (Wireless USB). The in-vehicle device I / F 7660 may also establish a wired connection such as USB (Universal Serial Bus), HDMI (High-Definition Multimedia Interface), or MHL (Mobile High-definition Link) via a connection terminal (and a cable, if necessary) not shown. The in-vehicle device 7760 may include at least one of a mobile device or a wearable device owned by a passenger, or an information device carried or attached to a vehicle. The in-vehicle device 7760 may also include a navigation device that searches for a route to an arbitrary destination. The in-vehicle equipment I / F 7660 exchanges control signals and data signals with these in-vehicle equipment 7760.

[0179] The in-vehicle network I / F 7680 is an interface that mediates communication between the microcomputer 7610 and the communication network 7010. The in-vehicle network I / F 7680 transmits and receives signals in accordance with a predetermined protocol supported by the communication network 7010.

[0180] The microcomputer 7610 of the integrated control unit 7600 controls the vehicle control system 7000 according to various programs based on information acquired through at least one of the general-purpose communication I / F 7620, the dedicated communication I / F 7630, the positioning unit 7640, the beacon receiving unit 7650, the in-vehicle device I / F 7660, and the in-vehicle network I / F 7680. For example, the microcomputer 7610 may calculate a control target value of a driving force generating device, a steering mechanism, or a braking device based on the acquired information inside and outside the vehicle, and output a control command to the drive system control unit 7100. For example, the microcomputer 7610 may perform cooperative control for the purpose of realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the distance between vehicles, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc. In addition, the microcomputer 7610 may perform cooperative control for the purpose of autonomous driving, in which the vehicle travels autonomously without relying on driver operation, by controlling a driving force generating device, a steering mechanism, a braking device, etc. based on information acquired about the vehicle's surroundings.

[0181] The microcomputer 7610 may generate three-dimensional distance information between the vehicle and objects such as surrounding structures and people, and create local map information including peripheral information of the current position of the vehicle, based on information acquired via at least one of the general-purpose communication I / F 7620, the dedicated communication I / F 7630, the positioning unit 7640, the beacon receiving unit 7650, the in-vehicle device I / F 7660, and the in-vehicle network I / F 7680. The microcomputer 7610 may also predict dangers such as vehicle collisions, the approach of pedestrians, or entry into a closed road, based on the acquired information, and generate a warning signal. The warning signal may be, for example, a signal for generating a warning sound or turning on a warning lamp.

[0182] The audio / image output unit 7670 transmits at least one of audio and image output signals to an output device capable of visually or audibly notifying the passengers of the vehicle or the outside of the vehicle of information. In the example of FIG. 33, an audio speaker 7710, a display unit 7720, and an instrument panel 7730 are illustrated as output devices. The display unit 7720 may include at least one of an on-board display and a head-up display, for example. The display unit 7720 may have an AR (Augmented Reality) display function. The output device may be other devices such as headphones, a wearable device such as a glasses-type display worn by the passenger, a projector, or a lamp, other than these devices. When the output device is a display device, the display device visually displays the results obtained by various processes performed by the microcomputer 7610 or information received from other control units in various formats such as text, image, table, graph, etc. When the output device is an audio output device, the audio output device converts an audio signal consisting of reproduced audio data or acoustic data into an analog signal and audibly outputs it.

[0183] In the example shown in FIG. 33, at least two control units connected via the communication network 7010 may be integrated into one control unit. Alternatively, each control unit may be composed of multiple control units. Furthermore, the vehicle control system 7000 may include another control unit not shown. In the above description, some or all of the functions performed by any control unit may be provided by another control unit. In other words, as long as information is transmitted and received via the communication network 7010, a predetermined arithmetic processing may be performed by any control unit. Similarly, a sensor or device connected to any control unit may be connected to another control unit, and multiple control units may transmit and receive detection information to each other via the communication network 7010.

[0184] The technology according to the present disclosure can be applied to, for example, a display portion of an output device capable of visually or auditorily notifying information, among the configurations described above.

[0185] FIG. 35 is a schematic partial cross-sectional view for explaining a liquid crystal display device according to a fifth embodiment. The liquid crystal display device according to the fifth embodiment further includes a third transparent material layer 165 on a first substrate 250. The third transparent material layer 165 is made of a material having a refractive index (fifth refractive index) higher than the refractive index (second refractive index) of the material 161 and is formed on the first transparent material layer 160. Also, the refractive index of the third transparent material layer 165 is higher than the refractive index (first refractive index) of the first transparent material layer 160. That is, when the refractive indices of the first transparent material layer 160, the material 161, and the third transparent material layer 165 are n1, n2, and n3, respectively, they have a relationship of n2 < n1 < n3. For example, when the material 161 is a silicon oxide film and the first transparent material layer 160 is a silicon oxynitride film, a high refractive index material such as a silicon nitride film is used for the third transparent material layer 165. The film thickness of the third transparent material layer 165 is, for example, thicker than 0 nm and thinner than 200 nm. Preferably, the film thickness of the third transparent material layer 165 is, for example, 100 nm to 200 nm.

[0186] As will be described later, the third transparent material layer 165 functions as an etching stopper or a polishing stopper in the etch-back process or the polishing process of the material 161. Therefore, the surface of the material 161 can be made substantially flush with the surface of the third transparent material layer 165. As a result, the transparent common electrode 171 and the alignment film 172 can be formed on the surfaces of the highly flat material 161 and the third transparent material layer 165. Thus, the liquid crystal material 140 can be aligned on the substantially flat alignment film 172, and as a result, a decrease in the contrast of the pixel can be suppressed.

[0187] Fig. 36 is a schematic cross-sectional view showing a configuration example of the dashed line frame B36 in Fig. 35. A third transparent material layer 165 is provided on a first transparent material layer 160. First grooves TR1 are provided in the third transparent material layer 165 and the first transparent material layer 160. The first grooves TR1 are provided in portions corresponding to between adjacent pixels in the first transparent material layer 160, similar to the material 161 in the first embodiment. In a plan view seen from the light incidence direction (Z direction), the first grooves TR1 are provided, for example, in a lattice shape between adjacent pixels.

[0188] The first grooves TR1 are filled with a material 161. Therefore, the material 161 is also provided in portions of the first transparent material layer 160 corresponding to between adjacent pixels, and is provided in, for example, a lattice pattern in plan view seen from the Z direction.

[0189] Here, as described later, the third transparent material layer 165 has a slower etching rate or polishing rate than the first transparent material layer 160. Therefore, in the etching process for forming the first groove TR1, the processing of the third transparent material layer 165 takes a relatively long time, and the etching in the lateral direction (X direction) is also relatively large. In contrast, the processing of the first transparent material layer 160 takes a relatively short time, and the etching in the lateral direction (X direction) is small. For this reason, the inclination angle of the sidewall of the first groove TR1 differs between the third transparent material layer 165 and the first transparent material layer 160. For example, the inclination angle of the sidewall of the first groove TR1 is set to an angle inclined from the vertical direction (Z direction) to the interface IF between the first transparent material layer 160 and the third transparent material layer 165. In this case, if the sidewall of the first groove TR1 in the first transparent material layer 160 is inclined at a first inclination angle θ1, the sidewall of the first groove TR1 in the third transparent material layer 165 is inclined at a second inclination angle θ2 (θ2>θ1) that is larger than the first inclination angle θ1.

[0190] Other configurations of the fifth embodiment may be similar to the corresponding configurations of the second embodiment, and therefore the fifth embodiment can achieve the same effects as the second embodiment.

[0191] Next, a method for manufacturing the liquid crystal display device according to the fifth embodiment will be described.

[0192] 37 to 42 are cross-sectional views showing an example of a method for manufacturing a liquid crystal display device according to Embodiment 5. First, a first transparent material layer 160 is formed on a multilayer laminated film 263 through steps leading to the structure shown in FIG.

[0193] Next, as shown in FIG. 37, a third transparent material layer 165 is formed on the first transparent material layer 160.

[0194] 38, a resist film 166 is formed and patterned on the third transparent material layer 165 using a lithography technique. The resist film 166 is patterned so as to expose the third transparent material layer 165 in the formation region of the first groove TR1.

[0195] Next, the third transparent material layer 165 and the first transparent material layer 160 are etched using an anisotropic etching method such as RIE (Reactive Ion Etching) method to form the first groove TR1. At this time, the third transparent material layer 165 has a slower etching rate or polishing rate than the first transparent material layer 160. Therefore, when the third transparent material layer 165 is processed, the etching in the X direction becomes relatively large, and the inclination angle (taper angle) θ2 of the sidewall of the third transparent material layer 165 becomes large.

[0196] After the third transparent material layer 165 is penetrated, the etching rate of the first transparent material layer 160 is relatively fast, so that when the first transparent material layer 160 is processed, the etching in the X direction is relatively small, and the inclination angle (taper angle) θ1 of the sidewall of the first transparent material layer 160 is relatively small. In this manner, the first groove TR1 is formed so that the opening width at its upper end is relatively wide, and the inclination angle gradually decreases from the upper end of the first groove TR1 toward the bottom surface.

[0197] Next, the resist film 166 is removed, thereby obtaining the structure shown in FIG.

[0198] Next, as shown in FIG. 41, material 161 is formed on the third transparent material layer 165 and in the first groove TR1. As a result, the first groove TR1 is filled with material 161. At this time, as described above, the opening width at the upper end of the first groove TR1 is formed relatively wide, so that the material 161 is easily filled in the first groove TR1. Even if a void or seam occurs in the material 161, it is formed above the opening of the first groove TR1 (the upper surface of the third transparent material layer 165). Therefore, the void or seam in the material 161 can be removed in the subsequent etch-back step or polishing step.

[0199] Next, the material 161 is etched back or polished using a CMP (Chemical Mechanical Polishing) method or the like, whereby the material 161 and the third transparent material layer 165 are planarized as shown in FIG.

[0200] At this time, the third transparent material layer 165 has a lower etching rate or polishing rate than the material 161. Therefore, the third transparent material layer 165 functions as an etching stopper or polishing stopper, and the surface of the material 161 can be made substantially flush with the surface of the third transparent material layer 165. This makes it possible to increase the flatness of the surfaces of the material 161 and the third transparent material layer 165.

[0201] Next, the transparent common electrode 171 and the alignment film 172 are formed on the material 161 and the third transparent material layer 165. At this time, the transparent common electrode 171 and the alignment film 172 are formed on the highly flat surfaces of the material 161 and the third transparent material layer 165. The flatness of the transparent common electrode 171 and the alignment film 172 is also improved.

[0202] This completes the first substrate 250. The method for forming the second substrate 100 and the liquid crystal material layer 140 of the fifth embodiment may be the same as in the second embodiment. This completes the liquid crystal display device according to the fifth embodiment.

[0203] Sixth embodiment 43 is a schematic partial cross-sectional view for explaining a liquid crystal display device according to embodiment 6. The liquid crystal display device according to embodiment 6 further includes a material film 162 provided between a third transparent material layer 165 and a transparent common electrode 171. The material film 162 is made of, for example, the same silicon oxide film as the material 161.

[0204] The material film 162 is formed on the material 161 and the third transparent material layer 165 after etching back or polishing the material 161. Usually, the flatness of the film formed by the film forming process is better than that of the film formed by the etch back or polishing process. Therefore, by forming the material film 162, the overall warping and polishing variation of the first substrate 250 can be reduced. That is, the surface of the material film 162 is more flat than the surfaces of the material 161 and the third transparent material layer 165. As a result, the flatness of the transparent common electrode 171 and the alignment film 172 is also improved, leading to an improvement in contrast.

[0205] Other configurations of the sixth embodiment may be similar to the corresponding configurations of the fifth embodiment. Moreover, the material film 162 may be formed on the material 161 and the third transparent material layer 165 after etching back or polishing the material 161. Other manufacturing methods of the sixth embodiment may be similar to the manufacturing method of the fifth embodiment. Therefore, the sixth embodiment can also obtain the effects of the fifth embodiment.

[0206] Although not shown, an anti-reflection film may be provided under the transparent common electrode 171. The anti-reflection film may be, for example, a laminated film of a silicon oxide film and a silicon nitride film.

[0207] Seventh embodiment FIG. 44 is a schematic partial cross-sectional view for explaining a liquid crystal display device according to the seventh embodiment. The liquid crystal display device according to the seventh embodiment further includes a fourth transparent material layer 168 on the second substrate 100. The fourth transparent material layer 168 is made of a material having a refractive index (sixth refractive index) higher than the refractive index (fourth refractive index) of the material 111, and is formed on the second transparent material layer 110. Also, the refractive index of the fourth transparent material layer 168 is higher than the refractive index (third refractive index) of the second transparent material layer 110. That is, assuming the refractive indices of the second transparent material layer 110, the material 111, and the fourth transparent material layer 168 are n4, n5, and n6, respectively, they have a relationship of n5 < n4 < n6. For example, when the material 111 is a silicon oxide film and the second transparent material layer 110 is a silicon oxynitride film, a high refractive index material such as a silicon nitride film is used for the fourth transparent material layer 168. The film thickness of the fourth transparent material layer 168 is, for example, thicker than 0 nm and thinner than 200 nm. Preferably, the film thickness of the fourth transparent material layer 168 is, for example, 100 nm to 200 nm.

[0208] As will be described later, the fourth transparent material layer 168 functions as an etching stopper or a polishing stopper in the etch-back process or the polishing process of the material 111. Therefore, the surface of the material 111 can be made substantially flush with the surface of the fourth transparent material layer 168. Thereby, the accuracy of microfabrication of the wirings 121 and 123, the transistors 122, and the contacts (not shown) is improved.

[0209] FIG. 45 is a schematic cross-sectional view showing a configuration example of the broken line frame B45 in FIG. 35. A fourth transparent material layer 168 is provided on the second transparent material layer 110. A second groove TR2 is provided in the fourth transparent material layer 168 and the second transparent material layer 110. The second groove TR2 is provided in a portion corresponding to between adjacent pixels in the second transparent material layer 110, similarly to the first groove TR1. In a plan view seen from the light incident direction (Z direction), the second groove TR2 is provided, for example, in a lattice shape between adjacent pixels.

[0210] The second grooves TR2 are filled with a material 111. Therefore, the material 111 is also provided in portions of the second transparent material layer 110 corresponding to between adjacent pixels, and is provided in, for example, a lattice pattern in plan view seen from the Z direction.

[0211] Here, the fourth transparent material layer 168 has a slower etching rate or polishing rate than the second transparent material layer 110. Therefore, in the etching process for forming the second groove TR2, the processing of the fourth transparent material layer 168 takes a relatively long time, and the etching in the lateral direction (X direction) is also relatively large. In contrast, the processing of the second transparent material layer 110 takes a relatively short time, and the etching in the lateral direction (X direction) is small. For this reason, the inclination angle of the sidewall of the second groove TR2 differs between the fourth transparent material layer 168 and the second transparent material layer 110. For example, the inclination angle of the sidewall of the second groove TR2 is set to an angle inclined from the vertical direction (Z direction) to the interface IF2 between the second transparent material layer 110 and the fourth transparent material layer 168. In this case, if the sidewall of the second groove TR2 in the second transparent material layer 110 is inclined at a third inclination angle θ3, the sidewall of the second groove TR2 in the fourth transparent material layer 168 is inclined at a fourth inclination angle θ4 (θ4>θ3) that is larger than the third inclination angle θ3.

[0212] Other configurations of the seventh embodiment may be similar to the corresponding configurations of the fifth embodiment, so the seventh embodiment can also achieve the same effects as the fifth embodiment.

[0213] The methods for forming the fourth transparent material layer 168, the second groove TR2, and the material film 111 in the seventh embodiment can be easily understood from the methods for forming the third transparent material layer 165, the first groove TR1, and the material film 161 in the fifth embodiment, and therefore will not be described here.

[0214] Eighth embodiment 46 is a schematic partial cross-sectional view for explaining a liquid crystal display device according to an eighth embodiment. The liquid crystal display device according to the eighth embodiment further includes a material film 112 provided on a fourth transparent material layer 168. The material film 112 includes, for example, the same silicon oxide film as the material 111.

[0215] The material film 112 is formed on the material 111 and the fourth transparent material layer 168 after etching back or polishing the material 111. Usually, the flatness of the film formed by the film forming process is better than the flatness of the film formed by the etch back process or polishing process. Therefore, by forming the material film 112, the overall warping and polishing variation of the second substrate 100 can be reduced. That is, the surface of the material film 112 has a flatness further improved than the surfaces of the material 111 and the fourth transparent material layer 168. This improves the precision of the microfabrication of the wirings 121 and 123, the transistor 122, and the contacts (not shown).

[0216] Other configurations of the eighth embodiment may be similar to the corresponding configurations of the seventh embodiment. Moreover, the material film 112 may be formed on the material 111 and the fourth transparent material layer 168 after etching back or polishing the material 111. Other manufacturing methods of the eighth embodiment may be similar to the manufacturing method of the seventh embodiment. Therefore, the eighth embodiment can also obtain the effects of the seventh embodiment.

[0217] [others] The technology of the present disclosure can also be configured as follows.

[0218] [A1] A first substrate having microlenses corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between a first substrate and a second substrate; Equipped with a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index different from the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; A liquid crystal display device, in which a second transparent material layer made of a material having a third refractive index is formed on a second substrate, and a material having a fourth refractive index different from the third refractive index is disposed in a portion of the second transparent material layer corresponding to between adjacent pixels. [A2] a first transparent material layer formed between the microlens and the liquid crystal material layer; The liquid crystal display device according to the above [A1]. [A3] The second refractive index is less than the first refractive index. The liquid crystal display device according to the above [A1] or [A2]. [A4] The material having the second refractive index is arranged in a lattice pattern. The liquid crystal display device according to any one of the above [A1] to [A3]. [A5] The material having the second refractive index is arranged to be expanded at the intersection of the gratings. The liquid crystal display device according to the above item [A4]. [A6] the material having the first refractive index is silicon nitride or silicon oxynitride; The liquid crystal display device according to any one of the above [A1] to [A5]. [A7] The material having the second refractive index is silicon oxide. The liquid crystal display device according to any one of the above [A1] to [A6]. [A8] A multilayer laminate film including a high refractive index material film and a low refractive index material film is disposed between the microlens and the first transparent material layer. The liquid crystal display device according to any one of the above [A1] to [A7]. [A9] The multilayer stacked film includes a silicon nitride film and a silicon oxide film. The liquid crystal display device according to the above [A8]. [A10] the first transparent material layer is made of a multilayer laminate film including a high refractive index material film and a low refractive index material film; The liquid crystal display device according to any one of the above [A1] to [A9]. [A11] The fourth refractive index is less than the third refractive index; The liquid crystal display device according to any one of the above [A1] to [A10]. [A12] The material having a fourth refractive index is arranged in a lattice pattern. The liquid crystal display device according to any one of the above [A1] to [A11]. [A13] The material having the fourth refractive index is arranged to be expanded at the intersection of the gratings. The liquid crystal display device according to the above [A12]. [A14] The material having the third refractive index is silicon nitride or silicon oxynitride. The liquid crystal display device according to any one of the above [A1] to [A13]. [A15] The material having the fourth refractive index is silicon oxide. The liquid crystal display device according to any one of the above [A1] to [A14]. [A16] A transparent common electrode is formed on the first substrate. A transparent pixel electrode corresponding to each pixel is formed on the second substrate. The liquid crystal display device according to any one of the above [A1] to [A15]. [A17] the second substrate has a lattice-shaped light-shielding region located in a portion corresponding to a portion between adjacent pixels; The liquid crystal display device according to any one of the above [A1] to [A16]. [A18] A plurality of transparent electrodes extending in a first direction are formed on the first substrate, A plurality of transparent electrodes extending in a second direction different from the first direction are formed on the second substrate. The liquid crystal display device according to any one of the above [A1] to [A15].

[0219] [B1] A first substrate having microlenses corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between a first substrate and a second substrate; Equipped with a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index different from the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; An electronic device equipped with a liquid crystal display device, in which a second transparent material layer made of a material having a third refractive index is formed on a second substrate, and a transparent material having a fourth refractive index different from the third refractive index is disposed in a portion of the second transparent material layer corresponding to between adjacent pixels. [B2] a first transparent material layer formed between the microlens and the liquid crystal material layer; The electronic device described in [B1] above. [B3] The second refractive index is less than the first refractive index. The electronic device according to [B1] or [B2] above. [B4] The material having the second refractive index is arranged in a lattice pattern. The electronic device according to any one of [B1] to [B3] above. [B5] The material having the second refractive index is arranged to be expanded at the intersection of the gratings. The electronic device described in [B4] above. [B6] the material having the first refractive index is silicon nitride or silicon oxynitride; An electronic device according to any one of [B1] to [B5] above. [B7] The material having the second refractive index is silicon oxide. An electronic device according to any one of [B1] to [B6] above. [B8] A multilayer laminate film including a high refractive index material film and a low refractive index material film is disposed between the microlens and the first transparent material layer. An electronic device according to any one of [B1] to [B7] above. [B9] The multilayer stacked film includes a silicon nitride film and a silicon oxide film. The electronic device described in [B8] above. [B10] the first transparent material layer is made of a multilayer laminate film including a high refractive index material film and a low refractive index material film; An electronic device according to any one of [B1] to [B9] above. [B11] The fourth refractive index is less than the third refractive index; The electronic device according to any one of [B1] to [B10] above. [B12] The material having a fourth refractive index is arranged in a lattice pattern. The electronic device according to any one of [B1] to [B11] above. [B13] The material having the fourth refractive index is arranged to be expanded at the intersection of the gratings. The electronic device according to [B12] above. [B14] The material having the third refractive index is silicon nitride or silicon oxynitride. The electronic device according to any one of [B1] to [B13] above. [B15] The material having the fourth refractive index is silicon oxide. The electronic device according to any one of [B1] to [B14] above. [B16] A transparent common electrode is formed on the first substrate. A transparent pixel electrode corresponding to each pixel is formed on the second substrate. The electronic device according to any one of [B1] to [B15] above. [B17] the second substrate has a lattice-shaped light-shielding region located in a portion corresponding to a portion between adjacent pixels; The electronic device according to any one of [B1] to [B16] above. [B18] A plurality of transparent electrodes extending in a first direction are formed on the first substrate, A plurality of transparent electrodes extending in a second direction different from the first direction are formed on the second substrate. The electronic device according to any one of [B1] to [B15] above. [A20] A liquid crystal display device as described in [A1], wherein a third transparent material layer made of a material having a fifth refractive index higher than the second refractive index is formed on a first transparent material layer of a first substrate, and a material having the second refractive index is embedded in a first groove provided in a portion corresponding to between adjacent pixels in the first and third transparent material layers. [A21] a sidewall of the first groove in the first transparent material layer is inclined at a first inclination angle from a direction perpendicular to an interface between the first transparent material layer and the third transparent material layer; The liquid crystal display device according to [A20], wherein a sidewall of the first groove in the third transparent material layer is inclined from the vertical direction at a second inclination angle larger than the first inclination angle. [A22] The liquid crystal display device according to [A20] or [A21], wherein the third transparent material layer has a thickness greater than 0 nm and less than 200 nm. [A23] the first transparent material layer is a silicon oxynitride film; The liquid crystal display device according to any one of [A20] to [A22], wherein the third transparent material layer is a silicon nitride film. [A24] The liquid crystal display device according to any one of [A20] to [A23], wherein the third transparent material layer has a slower etching rate or polishing rate than the first transparent material layer. [A25] A liquid crystal display device as described in [A1], wherein a fourth transparent material layer made of a material having a sixth refractive index higher than the fourth refractive index is formed on the second transparent material layer of the second substrate, and the material having the fourth refractive index is embedded in a second groove provided in a portion corresponding to between adjacent pixels in the second and fourth transparent material layers. [A26] a sidewall of the second groove in the second transparent material layer is inclined at a third inclination angle from a direction perpendicular to an interface between the second transparent material layer and the fourth transparent material layer; The liquid crystal display device according to [A25], wherein a sidewall of the second groove in the fourth transparent material layer is inclined from the vertical direction at a fourth inclination angle larger than the third inclination angle. [A27] The liquid crystal display device according to [A25] or [A26], wherein the fourth transparent material layer has a thickness greater than 0 nm and less than 200 nm. [A28] the second transparent material layer is a silicon oxynitride film; The liquid crystal display device according to any one of [A25] to [A27], wherein the fourth transparent material layer is a silicon nitride film. [A29] The liquid crystal display device according to any one of [A25] to [A28], wherein the fourth transparent material layer has a slower etching rate or polishing rate than the second transparent material layer. [A30] The electronic device described in [A19], wherein a third transparent material layer made of a material having a fifth refractive index higher than the second refractive index is formed on a first transparent material layer of a first substrate, and a material having the second refractive index is embedded in a first groove provided in a portion corresponding to between adjacent pixels in the first and third transparent material layers. [Explanation of symbols]

[0220] 1, 2, 3, 4... liquid crystal display device, 11... horizontal drive circuit, 12... vertical drive circuit, 100... second substrate, 101... support substrate, 110... second transparent material layer made of a material having a third refractive index, 111... material having a fourth refractive index different from the third refractive index, 111A... undercoat film, 120... wiring layer, 121... wiring, 122... transistor, 122A... semiconductor material layer, 122B... gate electrode, 123 152....microlens; 160....first transparent material layer made of a material having a first refractive index; 161....material having a second refractive index different from the first refractive index; 171....transparent common electrode; 172....transparent common electrode; 173....transparent common electrode; 174....transparent common electrode; 175....transparent common electrode; 176....transparent common electrode; 177....transparent common electrode; 178....transparent common electrode; 179....transparent common electrode; 180....transparent common electrode; 181....transparent common electrode; 182....transparent common electrode; 183....transparent common electrode; 184....transparent common electrode; 185....transparent common electrode; 186....transparent common electrode; 187....transparent common electrode; 188....transparent common electrode; 189....transparent common electrode; 190....transparent common electrode; 191....transparent common electrode; 192....transparent common electrode; 193....transparent common electrode; 194....transparent common electrode; 195....transparent common electrode; 196....transparent common electrode; 197....transparent common electrode; 198....transparent common electrode; 19 ... 180···sealing portion, 250···second substrate, 263···multilayer laminated film, 264···high refractive index material film, 265···low refractive index material film, 350···second substrate, 360···first transparent material layer made of a material having a first refractive index, 400···second substrate, 450···first substrate, PX···pixel, SCL···scanning line, DTL···signal line, TR···transistor, CS···capacitive structure, 500···light source portion, 510·· · Illumination optical system, 520···Image control circuit, 530···Projection optical system, 540···Screen, 611···Camera main body, 612···Photographing lens unit, 613···Grip section, 614···Monitor, 615···Viewfinder, 711···Glasses-shaped display section, 712···Ear hook section, 800···Glasses, 801···See-through head mounted display, 802···Main body, 803···Arm, 804···Lens barrel

Claims

1. A first substrate having microlenses corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between the first substrate and the second substrate; a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index smaller than the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a material having a fourth refractive index smaller than the third refractive index is disposed in a portion of the second transparent material layer corresponding to a portion between adjacent pixels; The material having the second refractive index is arranged in a lattice pattern.

2. The liquid crystal display device according to claim 1 , wherein the material having the second refractive index is arranged with a wide width at a portion where the gratings intersect.

3. A first substrate having a microlens corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between the first substrate and the second substrate; a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index smaller than the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a material having a fourth refractive index smaller than the third refractive index is disposed in a portion of the second transparent material layer corresponding to a portion between adjacent pixels; A liquid crystal display device, wherein a multilayer laminate film including a high refractive index material film and a low refractive index material film is disposed between the microlens and the first transparent material layer.

4. 4. The liquid crystal display device according to claim 3, wherein the multi-layer laminated film includes a silicon nitride film and a silicon oxide film.

5. A first substrate having a microlens corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between the first substrate and the second substrate; a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index smaller than the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a material having a fourth refractive index smaller than the third refractive index is disposed in a portion of the second transparent material layer corresponding to a portion between adjacent pixels; The first transparent material layer is made of a multi-layer laminate film including a high refractive index material film and a low refractive index material film.

6. A first substrate having a microlens corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between the first substrate and the second substrate; a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index smaller than the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a material having a fourth refractive index smaller than the third refractive index is disposed in a portion of the second transparent material layer corresponding to a portion between adjacent pixels; a third transparent material layer made of a material having a fifth refractive index higher than the first and second refractive indexes is formed on the second substrate side of the first transparent material layer, and a material having the second refractive index is embedded in a first groove provided in a portion corresponding to between adjacent pixels in the first and third transparent material layers.

7. a sidewall of the first groove in the first transparent material layer is inclined at a first inclination angle from a direction perpendicular to an interface between the first transparent material layer and the third transparent material layer so that a width of the sidewall narrows from a side close to the second substrate toward a side close to the first substrate; The liquid crystal display device according to claim 6 , wherein a sidewall of the first groove in the third transparent material layer is inclined from the vertical direction at a second inclination angle larger than the first inclination angle.

8. The liquid crystal display device according to claim 6 , wherein the third transparent material layer has a thickness greater than 0 nm and less than 200 nm.

9. 7. The liquid crystal display device according to claim 6, wherein the first transparent material layer is a silicon oxynitride film, and the third transparent material layer is a silicon nitride film.

10. The liquid crystal display device according to claim 6 , wherein the third transparent material layer has a slower etching rate or polishing rate than the first transparent material layer.

11. A first substrate having a microlens corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between the first substrate and the second substrate; a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index smaller than the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a material having a fourth refractive index smaller than the third refractive index is disposed in a portion of the second transparent material layer corresponding to a portion between adjacent pixels; a fourth transparent material layer made of a material having a sixth refractive index higher than the third and fourth refractive indexes is formed on the second substrate on the first substrate side of the second transparent material layer, and the material having the fourth refractive index is embedded in a second groove provided in a portion corresponding to a space between adjacent pixels in the second and fourth transparent material layers; a sidewall of the second groove in the second transparent material layer is inclined at a third inclination angle from a direction perpendicular to an interface between the second transparent material layer and the fourth transparent material layer so that a width of the sidewall becomes narrower from a side close to the first substrate toward a side close to the second substrate; a sidewall of the second groove in the fourth transparent material layer is inclined from the vertical direction at a fourth inclination angle larger than the third inclination angle.

12. The liquid crystal display device according to claim 11 , wherein the fourth transparent material layer has a thickness greater than 0 nm and less than 200 nm.

13. the second transparent material layer is a silicon oxynitride film; The liquid crystal display device according to claim 11 , wherein the fourth transparent material layer is a silicon nitride film.

14. A first substrate having a microlens corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between the first substrate and the second substrate; a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index smaller than the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a material having a fourth refractive index smaller than the third refractive index is disposed in a portion of the second transparent material layer corresponding to a portion between adjacent pixels; a fourth transparent material layer made of a material having a sixth refractive index higher than the third and fourth refractive indexes is formed on the second substrate on the first substrate side of the second transparent material layer, and the material having the fourth refractive index is embedded in a second groove provided in a portion corresponding to a space between adjacent pixels in the second and fourth transparent material layers; A liquid crystal display device, wherein the fourth transparent material layer has a slower etching rate or polishing rate than the second transparent material layer.

15. A first substrate having a microlens corresponding to each pixel; A second substrate disposed opposite to the first substrate; a layer of liquid crystal material sandwiched between the first substrate and the second substrate; a first transparent material layer made of a material having a first refractive index is formed on the first substrate, and a material having a second refractive index smaller than the first refractive index is disposed in a portion of the first transparent material layer corresponding to a portion between adjacent pixels; a second transparent material layer made of a material having a third refractive index is formed on the second substrate, and a transparent material having a fourth refractive index smaller than the third refractive index is disposed in a portion of the second transparent material layer corresponding to a portion between adjacent pixels; an insulating layer formed on the first substrate and arranged on a side of the first substrate facing the second substrate, the insulating layer being made of a material having a fifth refractive index higher than the first and second refractive indexes; and a material having the second refractive index embedded in a first groove provided in a portion of the first and third transparent material layers corresponding to a portion between adjacent pixels.

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