Semiconductor device and power conversion device

Abstract

To improve performance of a semiconductor device.SOLUTION: A semiconductor device is formed and the semiconductor device comprises: a semiconductor wafer including a drift layer of a first conductivity type, a body region of a second conductivity type and a JFET region of the first conductivity type of which both the side faces are in contact with a region of the second conductivity type on the drift layer; a plurality of trenches formed on a top face of the semiconductor wafer and extending in a first direction; and a gate electrode formed in the trench and on the top face of the semiconductor wafer via an insulation film. In a unit cell, a first trench group consisting of a plurality of trenches disposed side by side in a second direction across the first direction and a second trench group consisting of a plurality of trenches disposed side by side in the second direction include channel regions shallower than the trenches on bottom faces of source regions between trenches which are disposed side by side in the first direction and adjacent to each other in the second direction. The gate electrode includes first portions within the plurality of trenches and a second portion positioned on the semiconductor wafers and connecting the first portions disposed side by side in the first direction and the second direction with each other and includes a plurality of JFET regions per unit cell.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a semiconductor device having a field effect transistor in which a channel is formed on a side surface of a semiconductor layer. [Background technology]

[0002] In recent years, a MOSFET (Metal Oxide Semiconductor Field Effect Transistor) has been proposed, which has a trench formed perpendicular to a source contact region formed in a stripe shape in a plan view, and a gate electrode is embedded in the trench via an insulating film. In this MOSFET, current flows in the depth direction along the side of the trench. In this structure, the on-resistance can be reduced by reducing the trench pitch and increasing the trench density.

[0003] For example, Patent Document 1 (JP-A-2004-207289) describes a MOSFET that includes a buried gate in a trench formed in the upper surface of a semiconductor substrate, and in which a channel is formed on the side surface of the trench.

[0004] Moreover, Patent Document 2 (JP 2021-12934 A) describes a vertical MOSFET having a gate electrode that straddles directly above each of two trenches adjacent to each other in the extension direction of the trenches. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2004-207289 A [Patent Document 2] Patent Publication No. 2021-12934 Summary of the Invention [Problem to be solved by the invention]

[0006] The MOSFET described in Patent Document 1 has a large gate capacitance due to the formation of many trenches, and also has a large gate wiring resistance due to the gate wiring extending in a direction across the trenches. This causes a problem of a large gate delay determined by CR (capacitance x resistance). In addition, since the length of the long side of the trench is determined by the design of the JFET region, it is difficult to increase the length of the trench to increase the gate wiring width.

[0007] In Patent Document 2, while two trenches are included in a unit cell in the extending direction of the trenches, only one JFET region is provided in the unit cell, resulting in a problem of high on-resistance.

[0008] Other objects and novel features will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0009] A brief outline of a representative embodiment of the present invention will be described below.

[0010] A semiconductor device according to one embodiment includes a semiconductor substrate having a drift layer of a first conductivity type, a plurality of trenches formed on an upper surface of the semiconductor substrate and extending in a first direction along the upper surface of the semiconductor substrate, a body region of a second conductivity type different from the first conductivity type formed on a side surface of the trench in a short direction, a source region of the first conductivity type formed on the upper surface of the semiconductor substrate and formed in the body region, a JFET region of the first conductivity type formed on an upper surface of the drift layer and having both side surfaces in contact with the region of the second conductivity type, a drain region of the first conductivity type formed on a lower surface of the semiconductor substrate and electrically connected to the drift layer, and a gate electrode formed in the trench and on the upper surface of the semiconductor substrate via an insulating film, and a first trench group formed by arranging a plurality of the trenches in the second direction, and another portion of the plurality of trenches formed by arranging a plurality of the trenches in the second direction to form a second trench group; the trenches forming the first trench group and the trenches forming the second trench group are arranged side by side in the first direction; a source region is also formed between the trenches adjacent to each other in the second direction, and a channel region is formed on a lower surface of the source region formed between the trenches adjacent to each other in the second direction, the channel region being formed to a depth shallower than a depth of the trenches; the gate electrode has a first portion embedded in each of the plurality of trenches and a second portion located on an upper surface of the semiconductor substrate, connecting the first portions arranged side by side in the first direction and connecting the first portions arranged side by side in the second direction; and a plurality of JFET regions are provided per unit cell. Effect of the Invention

[0011] The effects obtained by the representative inventions among those disclosed in this application will be briefly described as follows.

[0012] According to the present invention, the performance of a semiconductor device can be improved. [Brief description of the drawings]

[0013] [Figure 1] 1 is a bird's-eye view showing a semiconductor device according to a first embodiment. [Diagram 2]1 is a cross-sectional view showing a semiconductor device according to a first embodiment. [Diagram 3] 1 is a cross-sectional view showing a semiconductor device according to a first embodiment. [Figure 4] 1 is a cross-sectional view showing a semiconductor device according to a first embodiment. [Diagram 5] FIG. 11 is a cross-sectional view showing a semiconductor device which is a modified example of the first embodiment. [Figure 6] 11 is a bird's-eye view showing a semiconductor device according to a second embodiment. [Figure 7] FIG. 11 is a cross-sectional view showing a semiconductor device according to a second embodiment. [Figure 8] FIG. 11 is a cross-sectional view showing a semiconductor device according to a second embodiment. [Figure 9] FIG. 11 is a cross-sectional view showing a semiconductor device according to a third embodiment. [Figure 10] FIG. 11 is a cross-sectional view showing a semiconductor device according to a third embodiment. [Figure 11] FIG. 11 is a circuit diagram showing a power conversion device according to a fourth embodiment. [Figure 12] 1 is a bird's-eye view showing a semiconductor device according to a first comparative example. [Figure 13] FIG. 11 is a cross-sectional view showing a semiconductor device according to a second comparative example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, the embodiments of the present invention will be described in detail with reference to the drawings. In all the drawings for explaining the embodiments, the same reference numerals are used for the members having the same functions, and the repeated explanations are omitted. In addition, in the following embodiments, the explanations of the same or similar parts are not repeated in principle, except when particularly necessary. In addition, in the drawings for explaining the embodiments, hatching may be used even in plan views or perspective views, etc., in order to make the configuration easier to understand. In addition, in the drawings for explaining the embodiments, hatching may be omitted in cross-sectional views in order to make the configuration easier to understand.

[0015] Also," - " and "+ " is a code that indicates the relative impurity concentration of the conductivity type, n-type or p-type. For example, "n - ", "n", "n + The impurity concentration of n-type impurities increases in this order.

[0016] <Details of areas for improvement> The room for improvement will be described in detail below with reference to Fig. 12. Fig. 12 is a bird's-eye view showing a semiconductor device of Comparative Example 1. In Fig. 12, among the structures on the epitaxial layer, the gate insulating film, the interlayer insulating film, the silicide layer, the source electrode, and the like are omitted from illustration. Also, in Fig. 12, the drain electrode under the SiC substrate is omitted from illustration.

[0017] 12 shows a trench-type SiC power MOSFET (Metal Oxide Semiconductor Field Effect Transistor) of Comparative Example 1. Hereinafter, this element may be simply referred to as a MOSFET.

[0018] As shown in FIG. 12, in Comparative Example 1, n + On the top surface of the SiC substrate, + An n-type epitaxial layer (semiconductor layer) made of SiC having a lower impurity concentration than a n-type SiC substrate is formed. The SiC substrate functions as a drain region 1, and the epitaxial layer functions as a drift layer 2. The SiC substrate and the epitaxial layer constitute a SiC epitaxial substrate. The thickness of the epitaxial layer is, for example, about 5 to 50 μm.

[0019] A p-type body region (well region) 3 is formed in the epitaxial layer at a predetermined depth from the upper surface of the epitaxial layer (the upper surface of the SiC epitaxial substrate). The body region 3 is an n-type well region formed from the upper surface of the body region 3 to the middle depth of the body region 3. +12. The source contact regions extend in the Y direction, and a plurality of source contact regions are arranged in the X direction. In other words, the source contact regions are formed in a stripe shape. The X direction and the Y direction are directions along the top surface (main surface) of the SiC epitaxial substrate, and are perpendicular to each other.

[0020] A JFET region 4 is formed in the epitaxial layer. The body region 3, the JFET region 4, and the source region 5 all extend in the Y direction. A plurality of trenches 7 are formed in the upper surface of the epitaxial layer directly above the JFET region 4, aligned in the Y direction. Each trench 7 extends in the X direction and is formed to a depth halfway through the body region 3. A source region 5 is formed from the upper surface of the plate-shaped epitaxial layer (fin) between the trenches 7 adjacent to each other in the Y direction to a depth halfway through the trench. In the plate-shaped epitaxial layer, and below the source region 5, body regions 3 aligned in the X direction, a p-type channel region 6 between the body regions 3, and a JFET region 4 below the channel region 6 are formed.

[0021] A gate electrode 16 is embedded in the trench 7 via a gate insulating film (not shown). The MOSFET is composed of at least a channel region 6 including a channel formation region, a source region 5, a drain region 1 (SiC substrate), and a gate electrode 16 in the trench 7. A plurality of gate electrodes 16 (trench gate electrodes) in the trench 7 are arranged in the Y direction, and the gate electrodes 16 in the portions connecting the gate electrodes 16 to each other above the trench 7 function as gate wiring.

[0022] When the gate electrode 16 is in the ON state, the electrons flowing through the MOSFET are +The electrons flow in the Z direction from the n-type source region 5 through a channel formed in the p-type channel region 6 on the side of the trench 7 adjacent to the gate electrode. The electrons flowing in the Z direction then move in sequence to the n-type JFET region 4, the n-type drift layer 2, the drain region 1, and the drain electrode (not shown) at the bottom of the SiC substrate. Thus, a current flows between the source and drain. The Z direction is the thickness direction of the SiC epitaxial substrate. The X direction, the Y direction, and the Z direction are perpendicular to each other.

[0023] In a MOSFET in which a channel is formed on the side surface of a SiC epitaxial substrate, such as the MOSFET of Comparative Example 1, a large number of trenches 7 are formed, so that the gate capacitance (gate-source capacitance) is large. In addition, since the gate wiring extends so as to straddle a plurality of trenches 7, the gate wiring resistance is large. For this reason, in a MOSFET having a trench 7, there is a problem that the gate delay time determined by CR (capacitance x resistance) is larger than the gate delay time of a planar MOSFET without a trench. In response to this, it is considered that the gate wiring resistance can be reduced by lengthening the side (long side) in the extension direction (X direction) of the trench 7 and widening the gate wiring width. However, since the long side of the trench 7 is determined by the design of the JFET region 4, it is difficult to lengthen the trench 7 and widen the gate wiring width.

[0024] Thus, in a semiconductor device including a MOSET in which a channel is formed on the side surface of a SiC epitaxial substrate, the first area for improvement is the large gate delay time due to the large gate wiring resistance.

[0025] 13, it is possible to form a gate electrode 17 extending over the space between two trenches 7 arranged side by side in the extension direction of the trenches 7. FIG. 13 is a cross-sectional view showing a semiconductor device of Comparative Example 2.

[0026] The semiconductor device of Comparative Example 2 has a SiC epitaxial substrate. The SiC epitaxial substrate has n +The device is composed of an n-type SiC substrate and an n-type epitaxial layer formed on the SiC substrate. The epitaxial layer is mainly composed of a drift layer 2, and the SiC substrate constitutes a drain region 1. In the epitaxial layer, the drift layer 2, body regions 3, 3a, a source region 5, a current diffusion region 18, a guard region 13, a drain region 1 and a JFET region 4 are formed.

[0027] The lower surface of the drain region 1 is covered with a drain electrode 15. A source region 5 is formed on the upper surface of the epitaxial layer, and a body region 3 which is a p-type semiconductor region is formed between the source region 5 and the drift layer 2 in contact with the lower surface of the source region 5.

[0028] Below the body region 3, in contact with the bottom surface of the body region 3, + A current diffusion region 18, which is a p-type semiconductor region, is formed. A JFET region 4 is formed in a region adjacent to the current diffusion region 18 in the X direction and directly below a region in contact with a source electrode 19 extending in the Y direction. Here, the JFET region 4 is formed from the lower surface of the body region 3 to the upper surface of the drift layer 2 in the epitaxial layer below the body region 3. A p-type body region 3a is formed in a region adjacent to the current diffusion region 18 in the X direction across the trench 7 and on the opposite side of the JFET region 4. The upper surface of the body region 3a is in contact with the body region 3. The p-type impurity concentrations of the body regions 3 and 3a are equal. The current diffusion region 18 is a low-resistance region for diffusing the current flowing in the drift layer 2 via the JFET region 4 in the X direction and flowing the current in a wide region.

[0029] Under the current spreading region 18 and the body region 3a, p +A guard region 13, which is a type semiconductor region, is formed on the epitaxial layer. A trench 7 is formed from the upper surface of the epitaxial layer, i.e., the upper surface of the source region 5, to a depth partway through the guard region 13. The trench 7 penetrates the body region 3 and does not reach the lower surface (lower end) of the guard region 13. The trench 7 is surrounded by the guard region 13 in a plan view.

[0030] Of the four side surfaces of the trench 7, which has a rectangular planar shape, three side surfaces are in contact with the current diffusion region 18. Of the four side surfaces of the trench 7, the remaining side surface is in contact with the body region 3a at the same height as the current diffusion region 18. The JFET region 4 is formed in a region adjacent to the guard region 13 in the X direction and directly below a portion where the source electrode 19 is connected to the source region 5. The body regions 3, 3a and the guard region 13 are electrically connected to each other.

[0031] A plurality of trenches 7 are formed side by side in the Y direction, and a gate electrode 17 is embedded in each trench 7 via an insulating film 20. The gate electrodes 17 in each trench 7 are formed on the source region 5 via the insulating film 20, and are connected to each other by the gate electrodes 17 extending in the Y direction. The lower surface, side surfaces, and upper surface of the gate electrode 17 extending in the Y direction on the source region 5 are covered with the insulating film 20. In other words, the insulating film 20 includes a gate insulating film formed under the gate electrode 17 extending in the Y direction, and an interlayer insulating film formed above the gate insulating film.

[0032] A source electrode 19 is formed in a contact hole penetrating an insulating film 20 on the semiconductor substrate and on the insulating film 20. The source electrode 19 completely filling the contact hole and the source electrode 19 on the insulating film 20 are integrated with each other.

[0033] In the drift layer 2 under the current spreading region 18, n-type or -A JFET (Junction Field Effect Transistor) region 4, which is an n-type semiconductor region, is formed alongside the guard region 13 in the X direction. The JFET region 4 is an n-type semiconductor region with both side surfaces in contact with p-type semiconductor regions, and serves to connect the drift layer 2 and the channel region 6. Specifically, the JFET region 4 is adjacent to the guard region 13 directly below the current diffusion region 18, and a part of the JFET region 4 is adjacent to the current diffusion region 18 in the X direction. The JFET region 4 extends in the Y direction. In FIG. 13, the lower end of the JFET region 4 is indicated by a dashed line.

[0034] The n-type impurity concentration of the JFET region 4 is equal to or higher than the n-type impurity concentration of the drift layer 2. The n-type impurity concentration of the JFET region 4 is lower than the n-type impurity concentrations of the current diffusion region 18 and the source region 5. The JFET region 4 is a region between the guard regions 13 adjacent to each other in the X direction. In other words, the JFET region 4 is a region where depletion layers extend from the opposing side surfaces of the adjacent guard regions 13 and contact each other when the MOSFET is in an off state.

[0035] Next, the operation of the MOSFET of Comparative Example 2 will be described. The MOSFET has at least the drain region 1, the source region 5, the body region 3, and the gate electrode 17. When the MOSFET is in an on-state, a channel is formed in the body region 3 adjacent to the trench 7 and in the body region 3a. That is, of the channel, the part on the current diffusion region 18 is generated in the body region 3, and the part adjacent to the current diffusion region 18 is generated in the body region 3a. That is, the channel is generated in the p-type semiconductor region adjacent to the trench 7. In Comparative Example 2, since all four side surfaces of the trench 7 are in contact with the body region 3, a channel is formed on all the four side surfaces. At this time, a current flows from the drain electrode 15 through the drain region 1, the drift layer 2, the JFET region 4, the current diffusion region 18, the channel (body region 3, 3a), and the source region 5, in this order, to the source electrode 19 side.

[0036] In FIG. 13, the area of ​​a unit cell of the MOSFET is indicated by a two-dot chain line.

[0037] A unit cell of a MOSFET (hereinafter, sometimes simply referred to as a unit cell) refers to one of the structures repeatedly formed when a semiconductor device has a plurality of MOSFET structures arranged side by side. In the present application, a unit cell of a MOSFET refers to one of the structures repeatedly arranged without inversion in the direction along the extension direction of the trench 7 (X direction). In other words, the part surrounded by the two-dot chain line in FIG. 13 has a configuration in which two structures that are line-symmetrical with respect to the center axis in the X direction are arranged side by side, but in the present application, a structure repeatedly arranged while being inverted is not called a unit cell, and therefore each of the two structures is not a unit cell. In addition, in a plan view, a space between two source contact regions spaced apart in the X direction across a gate electrode may be a unit cell.

[0038] In Comparative Example 2, one unit cell has two trenches 7 aligned in the X direction, one gate electrode 17 spanning between the trenches 7, one guard region 13, and one JFET region 4. Note that in the region surrounded by the two-dot chain line shown in FIG. 13, it appears that two JFET regions 4 are formed on the left and right, but each of these JFET regions 4 constitutes one JFET region 4 together with the JFET region 4 at the end of the adjacent unit cell. Therefore, one JFET region 4 is formed per unit cell.

[0039] In Comparative Example 2, the gate wiring resistance can be reduced by forming a gate electrode 17 that spans between two trenches 7 in the extension direction (longitudinal direction) of the trenches 7. However, in Comparative Example 2, while two trenches 7 are arranged side by side in a unit cell, only one JFET region 4 is formed. Therefore, there is room for a second improvement in that the JFET density is low and the on-resistance is high.

[0040] Therefore, in the embodiment of the present application, a device is devised to solve the above-mentioned first and second room for improvement. The technical idea of ​​the embodiment that devised this device will be described below.

[0041] (Embodiment 1) Hereinafter, the semiconductor device will be described with reference to the drawings, taking as an example a MOSFET (SiC power MOSFET) that constitutes the upper part of the epitaxial layer and has the side surface of the trench as a channel region. Note that, although the example described here uses silicon carbide (SiC) as the semiconductor substrate, the present invention is not limited to this and may be applied to other semiconductor substrates such as silicon (Si).

[0042] <Structure of Semiconductor Device> The structure of a MOSFET, which is a semiconductor device according to the present embodiment, will be described with reference to FIGS. 1 to 4. FIG. 1 is a bird's-eye view showing the semiconductor device according to the present embodiment. FIG. 2 is a cross-sectional view along the extension direction (long side direction, longitudinal direction) of a trench included in the semiconductor device, and is a cross-sectional view of a portion adjacent to the trench in the short side direction of the trench (a portion not including the trench). FIG. 3 is a cross-sectional view along the extension direction of the trench, and is a cross-sectional view including the trench. FIG. 4 is a cross-sectional view showing a structure in which a plurality of trenches are arranged in the short side direction (short side direction) of the trench. In FIG. 1, illustrations of a gate insulating film, a silicide layer, an interlayer insulating film, a source electrode, a drain electrode, and the like are omitted. In FIG. 1, a portion hidden by the gate electrode is shown in a transparent manner, and among the ridges of the gate electrode, the hidden ridges are not shown. In FIGS. 1, 2, and 3, a unit cell of a MOSFET is shown. However, the length of the unit cell in the Y direction may be longer or shorter than that in FIG. 1. In FIG. 2, the contour of a trench that is not visible because it is located deep in the cross section shown in the figure is shown by a dashed line.

[0043] The XYZ coordinate axes used in the description are defined as the directions shown in the drawings. In the present application, the Z direction (Z axis direction) is a direction perpendicular to the upper surface of the SiC substrate, and the X direction (X axis direction) and the Y direction (Y axis direction) are directions along the upper surface of the SiC substrate and the upper surface of the SiC epitaxial substrate, respectively. The X direction and the Y direction are directions along the upper surface (main surface) of the SiC epitaxial substrate, and the Z direction is the thickness direction (height direction, depth direction) of the SiC epitaxial substrate. The X direction, the Y direction, and the Z direction are mutually orthogonal. That is, the X direction and the Y direction intersect with each other in a plan view.

[0044] The semiconductor device described here is, for example, a semiconductor chip having a rectangular planar shape. The structure of the element region in the center of the semiconductor chip will be described below. Although not shown, a field limiting ring (FLR) or a junction termination extension (JTE) is formed as a termination region in a termination region surrounding the element region on the upper surface of the semiconductor chip.

[0045] As shown in Fig. 1 to Fig. 4, the semiconductor device of the present embodiment has an n-type SiC (silicon carbide) epitaxial substrate. + A type SiC substrate and a n + The SiC substrate is formed on an n-type SiC substrate and has an n-type epitaxial layer (semiconductor layer) with a lower impurity concentration than the SiC substrate. + The n-type epitaxial layer constitutes a n-type drain region, and the n-type epitaxial layer functions as the drift layer 2. The thickness of the epitaxial layer is, for example, about 10 μm. The impurity concentration of the drift layer 2 is, for example, 1×10 16 cm -3 It is.

[0046] As shown in FIGS. 1 to 4, a body region (well region) 3, which is a p-type semiconductor region, is formed in the drift layer 2 at a predetermined depth from the upper surface of the drift layer 2 (upper surface of the epitaxial layer). In the unit cell, the body regions 3 extend in the Y direction, and three of them are arranged in the X direction. In the body region 3, a p-type semiconductor region is formed at a predetermined depth from the upper surface of the drift layer 2 (upper surface of the body region 3). + A source region 5, which is a type semiconductor region, is formed in the drift layer 2. A trench 7 is formed from the top surface of the drift layer 2 (top surface of the body region 3) to a midpoint of the depth of the body region 3.

[0047] In the unit cell, in a plan view, two source regions 5 extending in the Y direction are formed side by side in the X direction. Only the body region 3 is formed between the two source regions 5. In the unit cell, three body regions 3 are arranged side by side in the X direction. Each of the two source regions 5 is formed between the body region 3 located at the center of the unit cell in the X direction and the body region 3 located at the end of the unit cell in the X direction. In other words, the end of each of the two source regions 5 in the X direction is in contact with a different body region 3. In a plan view, one of the two source regions 5 is in contact with a plurality of trenches 7 (first trench group) arranged side by side in the Y direction, and the other source region 5 is in contact with a plurality of other trenches 7 (second trench group) arranged side by side in the Y direction. That is, in the unit cell, two rows of a plurality of trenches 7 (trench groups) arranged side by side in the Y direction are formed side by side in the X direction.

[0048] In the unit cell, each trench 7 is formed between the body region 3 located at the center of the unit cell in the X direction and the body region 3 located at the end of the unit cell in the X direction. A source region 5 is also formed between the trenches 7 adjacent to each other in the Y direction. A p-type channel region 6 is formed in the drift layer 2 immediately below the source region 5 between the trenches 7 adjacent to each other in the Y direction and between the body regions 3 adjacent to each other in the X direction. The p-type impurity concentration of the channel region 6 is lower than the p-type impurity concentration of the body region 3. The channel region 6 is a channel formation region where a channel is formed during the operation of the MOSFET. The lower end of the channel region 6 is located above the lower ends of the body region 3 and the trenches 7.

[0049] Between the trenches 7 adjacent to each other in the Y direction, an n-type JFET region 4 is formed in the drift layer 2 immediately below the channel region 6. The n-type impurity concentration of the JFET region 4 is equal to or higher than the n-type impurity concentration of the drift layer 2 and lower than the n-type impurity concentration of the source region 5. The depth of the lower end of the JFET region 4 is lower than the lower end of the trench 7, and is located at a height equal to that of the lower end of the body region 3, for example. The JFET region 4 extends in the Y direction so as to overlap with the multiple trenches 7 in a plan view. In the X direction, both side surfaces of the JFET region 4 are in contact with the body region 3, which is a p-type semiconductor region. In FIGS. 1 to 4, the lower end of the JFET region 4 is indicated by a broken line. In this manner, the JFET region 4 is formed from the side surface of the trench 7 to the region below the trench 7. The JFET region 4 is in contact with the drift layer 2 and is electrically connected to the drift layer 2.

[0050] That is, between the trenches 7 adjacent to each other in the Y direction, the source region 5, the channel region 6, and the JFET region 4 are formed on the side surface of the trench 7 in this order from the upper surface of the epitaxial layer downward. The channel region 6 is in contact with the lower end of the source region 5, and the JFET region 4 is in contact with the lower end of the channel region 6. In addition, the drift layer 2 is formed below the JFET region 4 and the body region 3. In other words, the JFET region 4 is formed on the drift layer 2.

[0051] A gate electrode 9 is buried in the trench 7 via a gate insulating film 8. The gate electrode 9 is made of, for example, a polysilicon film (conductor film). The gate electrodes 9 formed in each trench 7 and aligned in the Y direction are formed on the trench 7 and on the upper surface of the epitaxial layer, and are integrated with the gate electrode 9 extending in the Y direction. That is, the gate electrode 9 includes a plurality of trench gate electrodes formed in each trench 7 and a gate wiring extending in the Y direction. In a cross section along the Y direction, the gate electrode 9 has a comb-like structure (see FIG. 4). An insulating film 10 is interposed between the upper surface of the epitaxial layer and the gate electrode 9. The gate electrode 9 on the upper surface of the epitaxial layer is covered with the insulating film 10.

[0052] Here, as one of the main features of this embodiment, the gate electrode 9 on the upper surface of the epitaxial layer, that is, the gate wiring, is formed directly above each of the two rows of trenches 7 aligned in the X direction in the unit cell, and extends in the Y direction. That is, the gate wiring is formed between the regions directly above each of the trenches 7 aligned in the X direction in the unit cell. In other words, the gate wiring overlaps each of the trenches 7 aligned in the X direction in the unit cell in a plan view. In this way, since the gate electrode 9 is formed straddling the trenches 7 aligned in the X direction in the unit cell, a wide width of the gate wiring can be ensured. Also, in the unit cell, two rows of JFET regions 4 extending in the Y direction are formed aligned in the X direction directly below the gate electrode 9 (gate wiring).

[0053] That is, in the unit cell, two trench groups each consisting of a plurality of trenches 7 arranged in the Y direction are arranged in the X direction, and one JFET region 4 extending in the Y direction is formed directly below each trench group. Fins made of epitaxial layers are formed between the trenches 7 adjacent to each other in the Y direction, and a plurality of the fins are arranged in the Y direction to form one fin group. That is, in the unit cell, two fin groups each consisting of a plurality of fins arranged in the Y direction are arranged in the X direction, and one JFET region 4 extending in the Y direction is formed directly below each fin group (each trench group).

[0054] No source region 5 is formed directly below the gate electrode 9 (gate wiring) formed between two rows of trenches 7 (two trench groups) aligned in the X direction in the unit cell, and a body region 3 is formed on the upper surface of the epitaxial layer. In other words, a region where no source region 5 is formed extends in the Y direction between the two rows of trenches 7 aligned in the X direction in the unit cell. In other words, the two source regions 5 formed in the unit cell are spaced apart from each other between the two rows of trenches 7 aligned in the X direction.

[0055] A silicide layer 14 is formed in contact with the upper surface of the source region 5 exposed from the insulating film 10 and the gate electrode 9. The silicide layer 14 is made of, for example, NiSi (nickel silicide). The source region 5 and the body region 3 adjacent to the source region 5, which are formed on the upper surface of the epitaxial layer exposed from the insulating film 10 and the gate electrode 9, are electrically connected to a source electrode (not shown) via the silicide layer 14. The channel region 6 is electrically connected to the source electrode via the source region 5 and the silicide layer 14. The silicide layer 14 extends in the Y direction. The portion where the source region 5 is connected to the source electrode via the silicide layer 14 is a source contact region. That is, the source contact region extends in the Y direction and is formed side by side at both ends in the X direction in the unit cell. That is, the source contact region is formed in a stripe shape in a plan view.

[0056] In addition, at a location not shown, the gate electrode 9 is electrically connected to a gate electrode (gate pad) via a gate plug penetrating the insulating film 10 on the gate electrode 9.

[0057] The lower surface (rear surface, bottom surface) of the SiC substrate is covered with a drain electrode 15 in contact with the lower surface of the SiC substrate. That is, the drain electrode 15 is electrically connected to the drain region 1.

[0058] The MOSFET (MOS field effect transistor) of this embodiment is an n-channel type MOSFET having a source region 5, a trench 7, a body region 3, a channel region 6, a drain region 1, and a gate electrode 9. The MOSFET also has a JFET region 4 and a drift layer 2, which are n-type semiconductor regions electrically connected to a drain electrode 15. For example, Al (aluminum) is introduced as a p-type impurity into the p-type body region 3 and the p-type channel region 6. + n-type source region 5, n-type JFET region 4, n-type drift layer 2, + In each of the n-type drain regions 1, for example, N (nitrogen) is introduced as an n-type impurity.

[0059] 3, one unit cell of this embodiment has two trenches 7 aligned in the X direction, one gate electrode 9 spanning between the trenches 7, and two JFET regions 4. Therefore, in this embodiment, two JFET regions 4 are formed per unit cell.

[0060] When a MOSFET is in operation, the electrons flowing through it are n + The electrons mainly flow from the p-type source region 5 through the p-type channel region 6 on the side of the trench 7, which is a channel formation region adjacent to the gate electrode 9. Then, the electrons flow in this order through the n-type JFET region 4, the n-type drift layer 2, the n-type + The drain region 1 of the semiconductor substrate 10 is then transferred to the drain electrode 15 .

[0061] By forming a MOSFET having the side surface of the trench 7 as a channel formation region and forming a large number of trenches 7, it is possible to ensure a large gate width while reducing the area of ​​the semiconductor element in a plan view, thereby achieving a high-performance semiconductor device.

[0062] <Effects of this embodiment> Next, the effects of the semiconductor device according to this embodiment will be described.

[0063] The semiconductor device of this embodiment has a plurality of trenches 7 having a longitudinal direction in the X direction and a transverse direction in the Y direction in a plan view, a fin-structured channel separated by the plurality of trenches 7, and a source contact region arranged at the end of the longitudinal direction of the trenches 7 and in contact with a source electrode across the body region 3 and the source region 5, and a channel current flows vertically. In this embodiment, when a unit cell is defined between two source contact regions spaced apart in the X direction, the unit cell has a first fin group arranged in the Y direction and a second fin group arranged in the Y direction and spaced apart from the first fin group in the X direction. The semiconductor device also has a gate wiring formed between the first fin group and the second fin group and extending in the Y direction, and a gate electrode 9 embedded in the trench 7, and the embedded gate electrode 9 is connected to the gate wiring.

[0064] In other words, the semiconductor device of this embodiment has a semiconductor substrate having a drift layer (n type) of a first conductivity type, a plurality of trenches formed on the upper surface of the semiconductor substrate and extending in a first direction (X direction) along the upper surface of the semiconductor substrate, and a body region of a second conductivity type (p type) different from the first conductivity type formed on the side surface of the trench in the short direction (Y direction). The semiconductor device of this embodiment also has a source region of the first conductivity type formed on the upper surface of the semiconductor substrate and in the body region, and a JFET region of the first conductivity type formed on the upper surface of the drift layer and having both side surfaces in contact with the region of the second conductivity type. The semiconductor device of this embodiment also has a drain region of the first conductivity type formed on the lower surface of the semiconductor substrate and electrically connected to the drift layer, and a gate electrode formed in the trench and on the upper surface of the semiconductor substrate via an insulating film. Here, in the unit cell, some of the trenches are arranged in a second direction intersecting the first direction in a plan view to form a first trench group, and other parts of the trenches are arranged in a second direction to form a second trench group, and the trenches that form the first trench group and the trenches that form the second trench group are arranged in a line in the first direction. The source region is also formed between the trenches adjacent to each other in the second direction, and has a channel region formed at a depth shallower than the depth of the trenches on the lower surface of the source region formed between the trenches adjacent to each other in the second direction. The gate electrode includes a first portion (trench gate electrode) embedded in each of the trenches, and a second portion (gate wiring) that is located on the upper surface of the semiconductor substrate, connects the first portions arranged in the first direction, and connects the first portions arranged in the second direction. In addition, a plurality of JFET regions are provided per unit cell.

[0065] Thus, unlike the MOSFET of Comparative Example 1 shown in FIG. 12, the MOSFET of this embodiment has a gate wiring (gate electrode 9) formed across two adjacent trenches 7 in the longitudinal direction of the trenches 7. This allows the cross-sectional area of ​​the gate wiring to be increased, and the gate wiring resistance to be reduced. Also, in the region between two adjacent trenches 7 in the longitudinal direction of the trenches 7, the source region 5 is not formed directly below the gate wiring. In other words, in the unit cell, the source region has the source region of the first trench group and the source region of the second trench group, and the source region of the first trench group and the source region of the second trench group are spaced apart from each other directly below the portion of the second part of the gate electrode that connects the first parts of the gate electrodes arranged in the first direction. Therefore, even if the gate wiring width is increased as described above, an increase in gate capacitance can be prevented. Therefore, the gate delay time determined by CR (capacitance x resistance) can be reduced, and the performance of the semiconductor device can be improved.

[0066] As described above, by forming the gate wiring across two trenches 7 adjacent to each other in the longitudinal direction of the trenches 7, the MOSFET of this embodiment has a larger unit cell than that of Comparative Example 2. Therefore, in order to prevent the JFET density from decreasing, in this embodiment, two JFET regions 4 are formed per unit cell. In other words, the number of JFET regions 4 aligned in the X direction per unit cell is equal to or greater than the number of trenches aligned in the X direction per unit cell.

[0067] 13, by forming a plurality of JFET regions 4 per unit cell, it is possible to prevent a decrease in JFET density and thus an increase in the on-resistance of the MOSFET, thereby improving the performance of the semiconductor device.

[0068] <Variation 1> As shown in FIG. 5, a metal wiring 11 connected to the upper surface of the gate wiring may be formed. That is, in this embodiment, a wide gate wiring is formed not only directly above one trench group consisting of a plurality of trenches 7 arranged in the Y direction, but also between two trench groups. That is, the gate wiring has a sufficient width. Therefore, it is possible to connect the metal wiring 11 extending in the Y direction to the upper surface of the gate wiring. The metal wiring 11 is covered with an insulating film 10. The metal wiring 11 is made of, for example, Al (aluminum).

[0069] Here, a metal wiring 11 is formed on the gate wiring directly above the body region 3 that does not have a source contact and between the trenches 7 adjacent to each other in the X direction. By forming the metal wiring 11, the gate wiring resistance can be further reduced, and the gate delay time can be shortened.

[0070] (Embodiment 2) The semiconductor device of the present embodiment will be described below with reference to FIGS.

[0071] Fig. 6 is a bird's-eye view showing the semiconductor device of this embodiment. Fig. 7 is a cross-sectional view along the extension direction of the trench, including the trench. Fig. 8 is a cross-sectional view showing a structure in which a plurality of trenches are arranged in the short side direction of the trench. Figs. 6 and 7 show a unit cell of a MOSFET. In Fig. 6, the part hidden by the gate electrode is shown in a see-through manner, and the hidden ridges of the gate electrode are not shown.

[0072] As shown in Figs. 6 to 8, unlike the first embodiment, the position of the upper surface of the gate electrode 12 in the trench 7 (trench gate electrode) is lower than the position of the upper surface of the epitaxial layer outside the trench 7 (the upper end of the trench 7) except for one end in the X direction. In other words, the height of a part of the upper surface of the gate electrode 12 in the trench 7 is lower than the upper end of the trench 7. The gate electrodes 12 inside each of two trenches 7 aligned in the X direction in the unit cell are connected to the upper gate wiring at the end on the side of the region between the two trenches 7.

[0073] When the trench pitch in the Y direction becomes finer and the interval between the trenches 7 becomes narrower, the tip of the fin between the trenches 7 becomes sharp, and it is considered that the electric field concentrates at the tip, and the gate breakdown voltage decreases. Therefore, by making the upper surface of the gate electrode 12 in the trench 7 lower than the upper end of the trench 7 (the upper end of the fin), the electric field concentration at the tip of the fin can be suppressed. Therefore, it is possible to suppress the decrease in the gate breakdown voltage of the MOSFET. Meanwhile, since the gate electrode 12 in the trench 7 is connected to the gate wiring on the body region 3 that does not have a source contact, it is possible to supply power to the gate electrode 12 in each trench 7.

[0074] In the present embodiment, since the gate wiring width is smaller than in the first embodiment, the effect of reducing the gate wiring resistance is smaller. However, the effect of reducing the gate wiring resistance is achieved compared to the first comparative example, and the effect of reducing the on-resistance is achieved compared to the second comparative example.

[0075] (Embodiment 3) The semiconductor device of this embodiment will be described below with reference to Fig. 9 and Fig. 10. Fig. 9 is a cross-sectional view along the extension direction of the trench, including the trench. Fig. 10 is a cross-sectional view showing a structure in which a plurality of trenches are arranged in the short side direction of the trench. Fig. 9 shows a unit cell of a MOSFET.

[0076] In the first embodiment, the JFET region 4 is formed directly below the trench 7. In contrast, the MOSFET of the present embodiment differs from the first embodiment in that the JFET region 4 is disposed directly below the source contact region and directly below the body region 3 that does not have a source contact. That is, one JFET region 4 is formed directly below a first region between adjacent trenches 7 in the X direction, and the other JFET region 4 is formed directly below a second region adjacent to the trench 7 in the X direction and opposite to the first region.

[0077] In this case, in order to electrically connect the channel region and the JFET region 4, a current diffusion region 21 which is an n-type semiconductor region is formed under the body region 3. Here, the lower surface of the body region 3 is located above the bottom surface of the trench 7. The current diffusion region 21 is formed in the drift layer 2 in a region adjacent to the trench 7, directly under the body region 3. The n-type impurity concentration of the current diffusion region 21 is higher than the n-type impurity concentrations of the drift layer 2 and the JFET region 4. In this embodiment, the number of JFET regions 4 formed per unit cell is two.

[0078] In order to protect the trench 7 from a high electric field, p + The guard region 13 extends in the Y direction and contacts the bottom surface of each of the trenches 7 aligned in the Y direction. In FIG. 9, the upper surface of the guard region 13 is located at the same height as the bottom surface of the trench 7, but the upper surface may be located above the bottom surface of the trench 7. The JFET region 4 in this embodiment is an n-type semiconductor region located directly below the source contact region and between the guard regions 13 aligned in the X direction. In addition, in the unit cell shown in FIG. 9, it appears that three JFET regions 4 are formed in the center and on the left and right in the X direction, but each of the left and right JFET regions 4 constitutes one JFET region 4 together with the JFET region 4 at the end of the adjacent unit cell. Therefore, in this embodiment, there are two JFET regions 4 formed per unit cell.

[0079] In the first embodiment, the length of the long side of the trench 7 is determined by the width of the JFET region 4, so there is little freedom in design. However, in this embodiment, it is possible to lengthen the long side of the trench 7 regardless of the width of the JFET region 4. This makes it possible to increase the channel density and reduce the on-resistance. In addition, this embodiment provides the same effects as the first embodiment.

[0080] (Embodiment 4) The semiconductor device having the SiC power MOSFET described in the first to third embodiments can be used in a power converter. The power converter in this embodiment will be described with reference to Fig. 11. Fig. 11 is a circuit diagram showing an example of the power converter (inverter) in this embodiment.

[0081] As shown in Fig. 11, the inverter 102 has a SiC MOSFET 104 as a switching element, and a diode 105. The SiC MOSFET 104 is a SiC power MOSFET described in any one of the first to third embodiments. In each single phase, the SiC MOSFET 104 and the diode 105 are connected in anti-parallel between the power supply voltage (Vcc) and the input potential of the load (e.g., a motor) 101 (upper arm). In addition, the SiC MOSFET 104 and the diode 105 are connected in anti-parallel between the input potential of the load 101 and the ground potential (GND) (lower arm).

[0082] That is, in the load 101, two SiCMOSFETs 104 and two diodes 105 are provided for each single phase, and six SiCMOSFETs (switching elements) 104 and six diodes 105 are provided for three phases. A control circuit 103 is connected to the gate electrode of each SiCMOSFET 104, and the SiCMOSFET 104 is controlled by this control circuit 103. Therefore, the load 101 can be driven by controlling the current flowing through the SiCMOSFET 104 constituting the inverter 102 with the control circuit 103. The SiCMOSFET 104 and the diode 105 connected in anti-parallel to each other are, for example, separate elements and are not mounted together in the same semiconductor chip.

[0083] The function of the SiCMOSFET 104 constituting the inverter 102 will be described below. In order to control and drive the load 101, for example a motor, it is necessary to input a sine wave of a desired voltage to the load 101. The control circuit 103 controls the SiCMOSFET 104 to perform a pulse width modulation operation that dynamically changes the pulse width of a square wave. The output square wave is smoothed by passing through an inductor, becoming a pseudo-desired sine wave. The SiCMOSFET 104 has the function of generating a square wave for performing this pulse width modulation operation.

[0084] As described above, according to the present embodiment, the semiconductor device having low on-resistance and short gate delay time described in the first to third embodiments is used for the SiCMOSFET 104. As described above, the high performance of the SiCMOSFET 104 can improve the performance of a power conversion device such as an inverter.

[0085] The power conversion device can also be used in a three-phase motor system. When the load 101 shown in Fig. 11 is a three-phase motor, the power conversion device including the semiconductor device described in the first to third embodiments is used in the inverter 102, thereby achieving high performance of the three-phase motor system.

[0086] In addition, in this embodiment, the same effects as those of the above-mentioned embodiment can be obtained.

[0087] The invention made by the present inventors has been specifically described above based on an embodiment, but it goes without saying that the present invention is not limited to the above embodiment and can be modified in various ways without departing from the gist of the invention.

[0088] For example, the materials, conductivity types, and manufacturing conditions of each part are not limited to those described in the above-mentioned embodiment, and it goes without saying that many variations are possible. Here, for convenience of explanation, the conductivity types of the semiconductor substrate and the semiconductor region are fixed, but are not limited to those described in the above-mentioned embodiment. In other words, the MOSFET may be a p-channel type. [Explanation of symbols]

[0089] 1 Drain Region 2. Drift layer 3. Body Region 4 JFET area 5 Source Area 6 Channel Area 7. Trench 8 Gate insulating film 9, 12, 16, 17 Gate electrode 13 Guard Area

Claims

1. a semiconductor substrate having a drift layer of a first conductivity type; a plurality of trenches formed on an upper surface of the semiconductor substrate and extending in a first direction along the upper surface of the semiconductor substrate; a body region of a second conductivity type different from the first conductivity type formed on a side surface of the trench in a short direction; a source region of the first conductivity type formed on the top surface of the semiconductor substrate and within the body region; the first conductivity type JFET region being formed on an upper surface of the drift layer and having both side surfaces in contact with the second conductivity type region; a drain region of the first conductivity type formed on a lower surface of the semiconductor substrate and electrically connected to the drift layer; a gate electrode formed in the trench and on the upper surface of the semiconductor substrate via an insulating film; having In the unit cell, some of the trenches are arranged in a second direction intersecting the first direction in a plan view to form a first trench group, and other parts of the trenches are arranged in the second direction to form a second trench group, The trenches constituting the first trench group and the trenches constituting the second trench group are arranged side by side in the first direction, The source region is also formed between the trenches adjacent to each other in the second direction, a channel region formed on a lower surface of the source region between the trenches adjacent to each other in the second direction, the channel region being formed to a depth shallower than a depth of the trenches; the gate electrode includes a first portion embedded in each of the plurality of trenches, and a second portion located on the upper surface of the semiconductor substrate, connecting the first portions aligned in the first direction and connecting the first portions aligned in the second direction, A semiconductor device comprising a plurality of the JFET regions per unit cell.

2. 2. The semiconductor device according to claim 1, Among the plurality of JFET regions, one of the JFET regions extends in the second direction directly below the first trench group, Another of the plurality of JFET regions extends in the second direction directly below the second trench group.

3. 2. The semiconductor device according to claim 1, Among the plurality of JFET regions, one of the JFET regions is formed immediately below a first region between the trenches adjacent to each other in the first direction, A semiconductor device, wherein another of the plurality of JFET regions is formed immediately below a second region adjacent to the trench in the first direction and on the opposite side to the first region.

4. 2. The semiconductor device according to claim 1, a top surface of a portion of the first portion of the gate electrode in the trench is lower than an upper end of the trench; Another part of the first portion of the gate electrode in the trench is connected to the second portion of the gate electrode on the semiconductor substrate.

5. 2. The semiconductor device according to claim 1, The semiconductor device further comprises a metal wiring connected to an upper surface of the gate electrode on the semiconductor substrate and extending in the second direction.

6. 2. The semiconductor device according to claim 1, The unit cell is one of a plurality of structures repeatedly arranged without inversion in the first direction.

7. 2. The semiconductor device according to claim 1, a source region of the first group of trenches and a source region of the second group of trenches within the unit cell, the source region of the first group of trenches and the source region of the second group of trenches are spaced apart from each other directly below a portion of the second portion of the gate electrode that connects the first portions of the gate electrodes that are aligned in the first direction.

8. 2. The semiconductor device according to claim 1, The semiconductor device, wherein the semiconductor substrate is a semiconductor substrate containing silicon carbide.

9. A power conversion device using the semiconductor device according to claim 1.

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