Information processing device, simulation method, and information processing system
JP7636076B2Active Publication Date: 2025-02-26TOKYO ELECTRON LTD
Patent Information
- Application Number
- JP2021093049
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2021-06-02
- Publication Date
- 2025-02-26
- Estimated Expiration
- 2041-06-02
Smart Images
Figure 0007636076000001 
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Abstract
To construct a simulation model in which process parameters include the temperature of gas introduced into a semiconductor manufacturing apparatus.SOLUTION: An information processor that uses a simulation model of a semiconductor manufacturing apparatus to execute simulation of a condition of a process being performed in the semiconductor manufacturing apparatus includes: a physical sensor data acquisition unit that acquires physical sensor data measured by the semiconductor manufacturing apparatus that is performing the process according to process parameters; and a simulation execution unit that executes simulation using the simulation model according to the process parameters including the physical sensor data, and calculates virtual sensor data and virtual process result data. The physical sensor data acquired by the physical sensor data acquisition unit includes temperature of gas introduced into the semiconductor manufacturing apparatus that is performing the process.SELECTED DRAWING: Figure 5
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Citation Information
Patent Citations
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