Beam catcher and electron beam irradiation device

Abstract

To provide a beam catcher and an electron beam irradiation device that suppress the temperature deviation in a body part and a side wall part.SOLUTION: A beam catcher 6 includes: a body part 61 which is arranged so as to be opposed to an irradiation part that emits an electron beam; a first side wall part 62 which rises from one end of the body part 61; a second side wall part 63 which rises from the other end of the body part 61; and a fluid path 7 which is provided in the body part 61, the first side wall part 62 and the second side wall part 63, and is the path of cooling fluid. The fluid path 7 includes: a forward part 73 which flows in the order from the first side wall part 62 to the body part 61 and the second side wall part 63; and a backward part 74 which is connected to the forward part 73 and flows in the order from the second side wall part 63 to the body part 61 and the first side wall part 62.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a beam catcher and an electron beam irradiation device. [Background technology]

[0002] A conventional beam catcher is disclosed in Patent Document 1. In the beam catcher described in Patent Document 1, a beam catcher (main body) is disposed so as to face an opening through which an electron beam is irradiated, and shielding side plates (side walls) are attached to both ends of the beam catcher.

[0003] A water-cooling duct is provided on the rear surface of the main body. A water-cooling duct of a different system from the water-cooling duct of the main body is provided on the rear surface of the side wall. The main body and the side wall are configured to be cooled separately. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Utility Model Application Publication No. 5-27700 Summary of the Invention [Problem to be solved by the invention]

[0005] However, when the main body and the side wall are cooled separately, temperature deviations tend to occur between the main body and the side wall, and if there are temperature differences depending on the location near the object to be irradiated, the irradiation effect of the electron beam becomes unstable.

[0006] An object of the present invention is to provide a beam catcher and an electron beam irradiation device in which temperature deviation is unlikely to occur between the main body and the side wall. [Means for solving the problem]

[0007] A beam catcher according to one aspect of the present invention includes a main body arranged to face an irradiation unit that irradiates an electron beam, a first sidewall rising from one end of the main body, a second sidewall rising from the other end of the main body, and a fluid path that is provided in the main body, the first sidewall, and the second sidewall and is a path for a cooling fluid. The fluid path has an outward path portion that flows from the first sidewall to the main body and the second sidewall in this order, and a return path portion that is connected to the outward path portion and flows from the second sidewall to the main body and the first sidewall in this order.

[0008] An electron beam irradiation device according to one aspect of the present invention is an electron beam irradiation device including an irradiation unit that irradiates an electron beam onto an irradiated object, and a beam catcher that is arranged so that the irradiated object is located between the irradiation unit and the beam catcher. The beam catcher includes a main body that is arranged to face the irradiation unit, a first side wall rising from one end of the main body, a second side wall rising from the other end of the main body, and a fluid path that is a path of a cooling fluid and is provided in the main body, the first side wall, and the second side wall. The fluid path includes an outward path portion that flows from the first side wall to the main body and the second side wall in this order, and a return path portion that is connected to the outward path portion and flows from the second side wall to the main body and the first side wall in this order. Effect of the Invention

[0009] The catcher and the electron beam irradiation device according to the above aspects of the present invention have an advantage that temperature imbalance is unlikely to occur between the main body and the side wall. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic cross-sectional view of an electron beam irradiation apparatus according to an embodiment. [Diagram 2] FIG. 2 is a perspective view of the beam catcher according to the embodiment. [Diagram 3] FIG. 3 is a plan view of the beam catcher according to the embodiment. [Figure 4]Fig. 4(A) is a cross-sectional view taken along line AA in Fig. 3. Fig. 4(B) is a cross-sectional view taken along line BB in Fig. 3. [Diagram 5] FIG. 5 is a schematic cross-sectional view of a connection structure between a first side wall portion and a round pipe in a beam catcher according to an embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view showing a case where the beam catcher according to the embodiment is used in another mode of use. [Figure 7] FIG. 7 is a perspective view of a beam catcher according to a modified example. [Figure 8] Fig. 8(A) is a cross-sectional view taken along line CC in Fig. 7. Fig. 8(B) is an enlarged view of part B in Fig. 8(A). DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] <Embodiment> The electron beam irradiation device 100 according to this embodiment is a device that generates an electron beam and irradiates an object to be irradiated 9 with the electron beam. As shown in FIG. 1, the electron beam irradiation device 100 includes an irradiation device main body 1 and a beam catcher 6. The irradiation device main body 1 has an irradiation unit 3 that irradiates an object to be irradiated 9 with an electron beam. The beam catcher 6 is disposed to face the irradiation unit 3, and captures the electron beam irradiated from the irradiation unit 3. A part of the electron beam captured by the beam catcher 6 is the electron beam directly irradiated from the irradiation unit 3, and the other part is the electron beam that has passed through the object to be irradiated 9.

[0012] The electron beam irradiation apparatus 100 according to this embodiment is a non-scanning type (area type) electron beam irradiation apparatus, but in the present invention, it may be a scanning type electron beam irradiation apparatus.

[0013] Here, the irradiated object 9 means an object to be irradiated with an electron beam. The irradiated object 9 is not particularly limited, and examples thereof include food, food packaging containers, beverage containers, medical equipment, inspection equipment, semiconductors, tires, electric wire coatings, foam sheets, heat shrink tubes, films, hydrogels, silicon carbide fibers, fiber-reinforced plastics, battery separators, adsorbents, functional clothing, outdoor panels, flooring materials, decorative panels, transfer films, etc. By irradiating the irradiated object 9 with an electron beam, the irradiated object 9 can be subjected to a process such as crosslinking, modification, hardening, graft polymerization, sterilization, and the like.

[0014] In this embodiment, the irradiated object 9 is transported by a transport device (not shown). As shown in Fig. 1, the irradiated object 9 is transported in one direction on a transport surface 8. The transport direction of the irradiated object 9 intersects with the radiation direction of the electron beam emitted from the irradiation unit 3.

[0015] In this embodiment, as shown in FIG. 1, the direction along the irradiation direction of the electron beam emitted from the irradiation unit 3 is defined as the "Z direction", and two directions perpendicular to each other on a plane perpendicular to the Z direction are defined as the "X direction" and the "Y direction". In this embodiment, the plane including the X direction and the Y direction is the conveying surface 8. The X direction is parallel to the conveying direction (sometimes referred to as the "first direction") in a plan view. However, the X direction only needs to be parallel to the conveying direction in a plan view, and the X direction and the conveying direction do not necessarily need to be parallel in a side view. In this embodiment, the first direction and the X direction are parallel. The Y direction may also be referred to as the "second direction". "Planar view" means that the object is viewed from one side of the Z direction.

[0016] The conveying surface 8 may be parallel to a horizontal plane, inclined relative to the horizontal plane, or vertical. The conveying surface 8 may be a real plane such as a belt conveyor, or may be a virtual plane such as a roller conveyor or wheel conveyor.

[0017] (Irradiation device main body 1) The irradiation device main body 1 is a part that constitutes the main body of the electron beam irradiation device 100. The irradiation device main body 1 includes a vacuum container 2, an irradiation unit 3, an electron beam generating unit 4, and a power supply unit 5, as shown in FIG.

[0018] (vacuum container 2) The vacuum vessel 2 is a hollow vessel and houses an electron beam generating unit 4 therein. The space inside the vacuum vessel 2 is configured so that it can be depressurized by a vacuum pump (not shown). This allows the inside of the vacuum vessel 2 to be made into a vacuum. Note that the term "vacuum" in this specification does not mean a vacuum in the strict sense, but rather means a space with a pressure lower than atmospheric pressure.

[0019] The vacuum vessel 2 is formed in a substantially cylindrical shape with a central axis in the Y direction, and both ends in the central axis direction are closed. A square cylindrical opening 21 is formed in a part of the vacuum vessel 2. The end of the opening 21 facing the irradiated object 9 has an opening surface. An irradiation unit 3 is provided at the end of the opening 21 so as to close the opening surface. The inside of the vacuum vessel 2 is kept airtight by the irradiation unit 3.

[0020] There is no potential difference between the vacuum vessel 2 and the irradiation unit 3, and they are at the same potential. In this embodiment, the vacuum vessel 2 and the irradiation unit 3 are grounded.

[0021] (Irradiation unit 3) The irradiation unit 3 transmits the electron beam generated by the electron beam generation unit 4 from the inside to the outside of the vacuum container 2, thereby irradiating the electron beam onto the irradiated object 9. The irradiation unit 3 includes a window foil 31 and a frame unit 32 that supports the outer periphery of the window foil 31.

[0022] The window foil 31 is a portion through which the electron beam passes. The window foil 31 is made of a metal foil. Examples of the metal foil include aluminum, titanium, magnesium, and beryllium. The window foil 31 is made of a material that is heat resistant and has a specific gravity that allows the electron beam to pass through.

[0023] The frame 32 is fixed to the tip surface of the opening 21 with the window foil 31 closing the opening surface of the opening 21. As a result, the window foil 31 is arranged parallel to the transport surface 8 and intersects with the electron beam. Furthermore, by fixing the frame 32 to the opening 21, the irradiation unit 3 can seal the vacuum container 2.

[0024] (Electron beam generator 4) The electron beam generating unit 4 generates an electron beam when a voltage is applied from a power supply device 5. The electron beam generating unit 4 is housed in a vacuum vessel 2. As shown in FIG. 1, the electron beam generating unit 4 includes an extraction electrode 41 and a plurality of filaments 42. The extraction electrode 41 is an electrode (grid) disposed so as to face the plurality of filaments 42. The extraction electrode 41 can extract electrons emitted from the plurality of filaments 42 as an electron beam.

[0025] (Power supply unit 5) 1, the power supply device 5 applies a voltage to the electron beam generating unit 4. The power supply device 5 includes a filament transformer 51, an extraction power supply 52, an acceleration power supply 53, and a controller .

[0026] The filament transformer 51 is a device that converts a voltage supplied from a power source into a voltage capable of heating the filament 42. The filament transformer 51 is electrically connected to the filament support portion 43. The power transformed by the filament transformer 51 is supplied to the multiple filaments 42. The power supplied to the filaments 42 may be DC power or AC power.

[0027] A DC extraction voltage is applied between the extraction electrode 41 and the filament 42 from an extraction power supply 52 via a filament transformer 51 and a controller 54. The controller 54 controls the amount of the electron beam. The extraction power supply 52 allows the electron beam to be extracted efficiently.

[0028] A DC acceleration voltage is applied from an acceleration power supply 53 between the irradiation unit 3 and the vacuum vessel 2 and between the extraction electrode 41 and the electron beam extracted from the extraction electrode 41. The electron beam extracted from the extraction electrode 41 can be accelerated by the acceleration voltage.

[0029] (Beam Catcher 6) The beam catcher 6 captures the electron beam irradiated from the irradiation unit 3. As shown in Fig. 2, the beam catcher 6 includes a main body unit 61, a first side wall unit 62, a second side wall unit 63, and a fluid path 7 (Fig. 3).

[0030] (Main body 61) The main body 61 is a part that constitutes the main body of the beam catcher 6. The main body 61 is disposed so as to face the irradiation unit 3. Therefore, as shown in FIG. 1, the irradiated object 9 is located between the irradiation unit 3 and the main body 61. As shown in FIG. 3, the main body 61 is formed in a rectangular shape having a longitudinal direction in the Y direction in a plan view. The main body 61 is composed of a plurality of round pipes 611. Each of the round pipes 611 is hollow and constitutes a part of the fluid path 7. The central axis of the round pipes 611 is parallel to the Y direction. By the main body 61 being composed of a plurality of round pipes 611, it is possible to improve the pressure resistance against the cooling fluid flowing inside, and to reduce the occurrence of leakage, etc.

[0031] The nominal diameter of the round pipe 611 is not particularly limited, but is preferably, for example, 25 A or more and 65 A or less, and more preferably 32 A or more and 50 A or less. In this way, strength can be maintained while preventing a loss of the flow rate of the cooling fluid.

[0032] The wall thickness of the round pipe 611 is preferably, for example, schedule 10S or more, and more preferably 20S or more. This allows the pipe to withstand the pressure of the cooling fluid (for example, 1.0 MPaG or more). The material of each round pipe 611 is preferably a material that can withstand the environment of the electron beam irradiation chamber and has high thermal conductivity, such as stainless steel, aluminum, and stainless steel.

[0033] The multiple round pipes 611 are arranged in the X direction in plan view. It is preferable that the adjacent round pipes 611 are arranged so that no gaps are generated between them in plan view. As shown in FIG. 4(A), the centers of the adjacent round pipes 611 according to this embodiment are shifted in the Z direction and partially overlap each other in plan view. That is, the common inscribed line of the outer surfaces of the adjacent round pipes 611 is inclined with respect to the Z direction. With this configuration, it is possible to prevent no gaps from being generated between the adjacent round pipes 611 in plan view. It is preferable that the adjacent round pipes 611 are partially welded in the longitudinal direction.

[0034] In a plan view, it is preferable that the area where the adjacent round pipes 611 overlap includes not only the thick parts of the round pipes 611 but also a part of the flow path. In this way, the electron beam passing through the main body 61 can be reduced.

[0035] 4(A), in the main body 61, multiple round pipes 611 are arranged in a mountain shape when viewed along the Y direction, so that the closer to the center in the X direction, the closer to the irradiation unit 3 in the Z direction. In the present invention, the multiple round pipes 611 may be arranged in one direction inclined with respect to the conveying surface 8 when viewed along the Y direction, but by arranging them in a mountain shape as in this embodiment, it is possible to prevent the main body 61 from becoming large in the Z direction.

[0036] (First side wall portion 62) As shown in FIG. 2, the first side wall portion 62 rises from one end of the main body portion 61 in the Y direction. The first side wall portion 62 faces the object to be irradiated 9 in the Y direction. The object to be irradiated 9 is located between the first side wall portion 62 and the second side wall portion 63. As shown in FIG. 3, the first side wall portion 62 includes an inner wall plate 621, an outer wall plate 622, a plurality of peripheral wall plates 623, and a plurality of partition plates 624 (FIG. 4(A)). The first side wall portion 62 is formed in a flat box shape.

[0037] The inner wall plate 621 is a plate having a surface facing the irradiated object 9 in the Y direction. The inner wall plate 621 is orthogonal to the Y direction. The plate thickness of the inner wall plate 621 is preferably thicker than the plate thickness of the outer wall plate 622. The outer wall plate 622 is disposed outside the inner wall plate 621 in the Y direction with a gap therebetween. The outer wall plate 622 is disposed parallel to the inner wall plate 621. The peripheral wall plate 623 is a plate surrounding the outer periphery of the inner wall plate 621 and the outer wall plate 622. The box body formed by the inner wall plate 621, the outer wall plate 622, and the multiple peripheral wall plates 623 may be referred to as a "side wall main body."

[0038] The partition plate 624 divides the inside of the side wall main body. As shown in Fig. 4, the partition plate 624 is arranged so as to be perpendicular to the X direction and connect the inner wall plate 621 and the outer wall plate 622. The multiple partition plates 624 include a first plate 625 that spans the entire length in the Z direction, and a second plate 626 that has an opening surface in a part of the entire length in the Z direction (here, the end on the irradiation unit 3 side in the Z direction). The first plate 625 and the second plate 626 are arranged alternately in the X direction.

[0039] The opening surface of the second plate 626 may be located closer to the irradiation unit 3 than the round pipe 611 in the Z direction, but is preferably closer to the end portion on the irradiation unit 3 side. In this embodiment, the opening surface of the second plate 626 is formed at the end portion on the irradiation unit 3 side in the Z direction.

[0040] The round pipe 611 and the inner wall plate 621 are connected as shown in FIG. 5. A through hole for passing the round pipe 611 is formed in the inner wall plate 621, and an end of the round pipe 611 is passed through the through hole. The end of the round pipe 611 is expanded while passing through the through hole, and the tip 612 of the round pipe 611 is expanded. After that, a full circumference weld W1 is performed between the tip 612 of the round pipe 611 and the inner wall plate 621. This connects the round pipe 611 and the inner wall plate 621. However, the method of connecting the round pipe 611 and the inner wall plate 621 is not limited to that of this embodiment.

[0041] (Second side wall portion 63) As shown in Fig. 2, the second side wall portion 63 rises from an end portion (i.e., the other end) of the main body portion 61 in the Y direction opposite to the first side wall portion 62. The second side wall portion 63 faces the irradiated object 9 in the Y direction. As shown in Fig. 3, the second side wall portion 63 includes an inner wall plate 631, an outer wall plate 632, a plurality of peripheral wall plates 633, and a plurality of partition plates 634 (Fig. 4(B)). The second side wall portion 63 is formed in a flat box shape.

[0042] The inner wall plate 631 is a plate having a surface facing the irradiated object 9 in the Y direction. The inner wall plate 631 is perpendicular to the Y direction. The outer wall plate 632 is disposed outside the inner wall plate 631 in the Y direction with a gap therebetween. The outer wall plate 632 is disposed parallel to the inner wall plate 631. The peripheral wall plate 633 is a plate surrounding the outer periphery of the inner wall plate 631 and the outer wall plate 632. The box body formed by the inner wall plate 631, the outer wall plate 632, and the multiple peripheral wall plates 633 may be referred to as a "side wall main body."

[0043] As shown in Fig. 4(B), the partition plate 634 divides the inside of the side wall main body. The partition plate 634 is arranged so as to be perpendicular to the X direction and connect the inner wall plate 631 and the outer wall plate 632. The multiple partition plates 634 include a first plate 635 that spans the entire length in the Z direction, and a second plate 636 that has an opening surface in a part of the entire length in the Z direction (here, the end portion on the irradiation unit 3 side in the Z direction). The first plate 635 and the second plate 636 are arranged alternately in the X direction.

[0044] The opening surface of the second plate 636 may be located above the round pipe 611 in the Z direction, but is preferably closer to the end portion on the irradiation unit 3 side. In this embodiment, the opening surface of the second plate 636 is formed at the end portion on the irradiation unit 3 side in the Z direction. The round pipe 611 and the inner wall plate 631 are connected in the same manner as described for the first side wall portion 62. Here, overlapping descriptions will be omitted.

[0045] (Fluid Path 7) The fluid path 7 is a path for the cooling fluid. The fluid path 7 passes through the inside of the main body 61, the first side wall 62, and the second side wall 63. The cooling fluid passes through the fluid path 7, and exchanges heat with the main body 61, the first side wall 62, and the second side wall 63 while moving, thereby cooling them. The fluid path 7 of the first side wall 62 and the second side wall 63 is composed of a flow path surrounded by the side wall main body and the partition plates 624, 634. The fluid path 7 of the main body 61 is composed of a flow path inside the round pipe 611. The fluid path 7 is a single path connecting the inlet 71 and the outlet 72.

[0046] Here, the cooling fluid may be liquid or gaseous as long as it is a refrigerant capable of cooling the beam catcher 6. When the cooling fluid is liquid, there is no particular limitation, and examples thereof include tap water, pure water, oil, brine, and other liquid refrigerants.

[0047] 3, the inflow port 71 is formed on a surface of the peripheral wall plate 623 of the first side wall portion 62 at a tip side in the first direction (downstream side in the conveying direction). In this embodiment, the inflow port 71 is an opening of a pipe protruding from the peripheral wall plate 623 of the first side wall portion 62. That is, the inflow port 71 penetrates the peripheral wall plate 623.

[0048] The outlet 72 is formed on a surface of the peripheral wall plate 623 of the first side wall portion 62 on the base end side in the first direction (upstream side in the conveying direction). In this embodiment, the outlet 72 is also an opening of a pipe protruding from the peripheral wall plate 623 of the first side wall portion 62, and the inlet 71 penetrates the peripheral wall plate 623. However, the inlet 71 and / or the outlet 72 may be provided in the second side wall portion 63. Moreover, one of the inlet 71 and the outlet 72 may be provided in the first side wall portion 62, and the other may be provided in the second side wall portion 63.

[0049] The fluid path 7 includes a plurality of round trip paths. As shown in Fig. 3, one round trip path is composed of one outward path section 73 and one return path section 74. Adjacent round trip paths are connected at the first side wall section 62 with the return path section 74 of one round trip path and the outward path section 73 of the other round trip path. In this embodiment, six round trip paths are arranged in the X direction in a plan view as the plurality of round trip paths.

[0050] The outgoing path section 73 is a part of the fluid path 7 in which the cooling fluid flows from the first side wall section 62, to the main body section 61 and to the second side wall section 63 in this order. The returning path section 74 is a part of the fluid path 7 in which the cooling fluid flows from the second side wall section 63, to the main body section 61 and to the first side wall section 62 in this order. The returning path section 74 is connected to the outgoing path section 73. In a plan view, the outgoing path section 73 is located on the tip side in the first direction (downstream in the conveying direction) of the returning path section 74.

[0051] As shown in FIG. 4A, in the first side wall portion 62, the first plate 625 is connected to the round pipe 611 ("P 1 ") and the adjacent round pipe 611 (denoted as "P 2 The second plate 626 is disposed between the round pipe 611 (denoted as "P 2 ") and a round pipe 611 (denoted as "P 3 " is placed between the

[0052] As shown in FIG. 4B, in the second side wall portion 63, the second plate 636 is connected to the round pipe 611 ("P 1 ") and the adjacent round pipe 611 (denoted as "P 2 The first plate 635 is disposed between the round pipe 611 (denoted as "P 2 ") and a round pipe 611 (denoted as "P 3 " is placed between the

[0053] The cooling fluid that flows into the first side wall portion 62 from the inlet 71 moves along the outward path portion 73 as shown in Fig. 4(A). That is, the cooling fluid moves along the first side wall portion 62 toward the round pipe 611 in the Z direction, and then moves along the round pipe 611 toward the second side wall portion 63 in the Y direction as shown in Fig. 3, and enters the second side wall portion 63.

[0054] Thereafter, the cooling fluid moves along the return path 74. That is, as shown in Fig. 4(B), the cooling fluid moves along the second side wall 63 toward the irradiation unit 3 side along the Z direction, then turns back and moves toward the round pipe 611 side, and as shown in Fig. 3, moves along the round pipe 611 toward the first side wall 62 side in the Y direction, and enters the first side wall 62.

[0055] Thereafter, the cooling fluid moves along the outgoing path 73 of another adjacent round-trip path in the first side wall 62, as shown in Fig. 4(A). That is, the cooling fluid moves along the first side wall 62 to the irradiation unit 3 side along the Z direction, turns back through the opening surface of the second plate 626, moves along the Z direction to the round pipe 611 side, and then moves along the round pipe 611 to the second side wall 63 side in the Y direction, as shown in Fig. 3, and then moves along the return path 74 as described above. The cooling fluid repeats this process along multiple round-trip paths, and is discharged from the outlet 72.

[0056] In this way, in the beam catcher 6 of this embodiment, the fluid path 7 flows from the first side wall portion 62, to the main body portion 61 and the second side wall portion 63 in that order, and then from the second side wall portion 63, to the main body portion 61 and the first side wall portion 62 in that order, so that temperature bias is less likely to occur between the first side wall portion 62, the main body portion 61 and the second side wall portion 63.

[0057] Furthermore, since the main body 61 is composed of multiple round pipes 611 and has high pressure resistance, even if the flow rate of the cooling fluid is increased to improve cooling efficiency, the occurrence of leakage of the cooling fluid can be reduced.

[0058] In addition, since the centers of adjacent round pipes 611 among the multiple round pipes 611 are offset in the irradiation direction of the electron beam and partially overlap each other when viewed in a planar view, the amount of electron beam passing through the main body 61 can be reduced.

[0059] Moreover, after the electron beam is irradiated to the irradiated object 9 directly above the center of the beam catcher 6 in the X direction, the object becomes hot and moves in the first direction. For this reason, the beam catcher 6 is likely to have a higher temperature in the X direction in the region on the tip side of the center of the main body 61 than in the region on the base side due to the heat of the irradiated object 9. However, in this embodiment, the outgoing path section 73 is disposed on the tip side in the first direction of the returning path section 74 in a plan view, so that a cooling fluid with a relatively low temperature can be circulated to the region where the temperature is likely to become high.

[0060] The beam catcher 6 according to this embodiment can also be suitably used for an irradiation object 9 cross-hung around a pair of drums 11 of a capstan device 10, as shown in Fig. 6. In this case, the conveying direction (first direction D1) is inclined with respect to the X direction in a side view, but is parallel to the X direction in a plan view. In this case, examples of the irradiation object 9 include wires, electric wires, optical cables, rubber hoses, tubes, etc.

[0061] The capstan device 10 includes a pair of drums 11, a support 12 that rotatably supports each drum 11, and a drive device 13 that drives at least one of the pair of drums 11. The rotation axes of the pair of drums 11 extend in the Y direction and are parallel to each other.

[0062] The beam catcher 6 has a main body 61 disposed below the object to be irradiated 9. Since the main body 61 is formed in a mountain-shaped cross section, the distance between the object to be irradiated 9 and the main body 61, which are cross-hung, can be made substantially constant. In this way, the distance between the irradiation unit 3 and the beam catcher 6 can be shortened as much as possible, and the generation of ozone due to the electron beam can be reduced. Furthermore, at least a part of the electron beam is reflected when it hits the main body 61, but since the distance between the object to be irradiated 9 and the main body 61 is substantially constant, the effect of the reflection on the object to be irradiated 9 can be made uniform.

[0063] <Modification> The above embodiment is merely one of various embodiments of the present invention. The embodiment can be modified in various ways depending on the design, etc., as long as the object of the present invention can be achieved. Modifications of the embodiment are listed below. The modifications described below can be applied in appropriate combination.

[0064] (Variation 1) In the beam catcher 6 according to the above embodiment, the main body 61 is arranged such that the multiple round pipes 611 are arranged in a mountain shape when viewed in the Y direction, but may be arranged in the manner shown in Figs. 7 and 8. As shown in Fig. 8, the main body 61 according to this modification is common to the main body 61 of the embodiment in that the centers of the multiple round pipes 611 among the multiple round pipes 611 are shifted in the irradiation direction of the electron beam and partially overlap each other in a plan view. On the other hand, in the main body 61 of this modification, every other round pipe 611 is arranged at the same position in the Z direction, so that it is arranged in a so-called staggered pattern. As shown in Fig. 8(B), the common inscribed line K1 of the outer surfaces of the adjacent round pipes 611 is inclined with respect to the Z direction, as in the above embodiment.

[0065] (Other variations) In the above embodiment, the outgoing path portion 73 is located on the tip side in the first direction relative to the return path portion 74, but the outgoing path portion 73 may be located on the base end side in the first direction relative to the return path portion 74. That is, the outlet 72 of the embodiment may be used as an inlet, and the inlet 71 of the embodiment may be used as an outlet.

[0066] In the above embodiment, the first side wall portion 62 is arranged on the left side in the conveying direction and the second side wall portion 63 is arranged on the right side, but the second side wall portion 63 may be arranged on the left side and the first side wall portion 62 on the right side.

[0067] In the above embodiment, the fluid path 7 is arranged over the entire surfaces of the first side wall portion 62, the main body portion 61 and the second side wall portion 63 so as to extend throughout the entire surfaces. However, the fluid path 7 may be provided only in the area in the X direction where the temperature is likely to become high.

[0068] In this specification, "parallel" includes not only the case where two straight lines, surfaces, etc. do not intersect when extended, but also the case where the angle between the two straight lines, surfaces, etc. is within 10°. "Orthogonal" includes not only the case where two straight lines, surfaces, etc. intersect at 90° when extended, but also the case where the angle between the two straight lines, surfaces, etc. is within 90°±10° when extended.

[0069] Furthermore, in this specification, expressions that are distinguished by the presence or absence of "part", such as "end" and "end", are used. For example, "end" means the end part of an object, while "end" means a region having a certain range that includes the "end". Any point that is within a certain range that includes the end is considered to be an "end". The same applies to other expressions that include "part".

[0070] <Summary> As described above, the beam catcher 6 according to the first embodiment includes the main body 61 disposed so as to face the irradiation unit 3 which irradiates the electron beam, the first side wall 62 rising from one end of the main body 61, the second side wall 63 rising from the other end of the main body 61, and the fluid path 7 which is provided in the main body 61, the first side wall 62, and the second side wall 63 and serves as a path for a cooling fluid. The fluid path 7 includes an outward path 73 through which the fluid flows from the first side wall 62 to the main body 61 and the second side wall 63 in this order, and a return path 74 which is connected to the outward path 73 and through which the fluid flows from the second side wall 63 to the main body 61 and the first side wall 62 in this order.

[0071] According to this embodiment, the outward path portion 73 and the return path portion 74 flow sequentially through the first side wall portion 62, the main body portion 61, and the second side wall portion 63, so that temperature bias is less likely to occur among the first side wall portion 62, the main body portion 61, and the second side wall portion 63.

[0072] In the beam catcher 6 according to the second embodiment, in the first embodiment, the direction in which the irradiated object 9 to be irradiated with the electron beam is transported to the irradiation unit 3 is defined as the first direction. The main body 61 has a plurality of round pipes 611 that extend in a direction intersecting the first direction and form a part of the fluid path 7. The plurality of round pipes 611 are arranged so as to be aligned in a direction parallel to the first direction in a plan view. According to this embodiment, since the round pipes 611 having high pressure resistance are used, leakage of the cooling fluid can be reduced even if the flow rate of the cooling fluid is increased.

[0073] In the beam catcher 6 according to the third embodiment, the centers of the adjacent round pipes 611 are shifted from each other in the irradiation direction of the electron beam in the second embodiment, and are partially overlapped in a plan view. According to this embodiment, the electron beam passing through the main body 61 can be reduced.

[0074] In the beam catcher 6 according to the fourth embodiment, in the third embodiment, the main body 61 has a plurality of round pipes 611 arranged in a mountain shape so that the central portion in the first direction is closer to the irradiation unit 3 when viewed along the central axis of the round pipes 611. According to this embodiment, it is possible to prevent the main body 61 from becoming large in the Z direction, and therefore it is possible to realize a miniaturization of the electron beam irradiation device 100.

[0075] The electron beam irradiation device 100 according to the fifth embodiment includes an irradiation unit 3 that irradiates an electron beam to an irradiated object 9, and a beam catcher 6 that is arranged so that the irradiated object 9 is located between the irradiation unit 3 and the beam catcher 6. The beam catcher 6 includes a main body 61 that is arranged so as to face the irradiation unit 3, a first side wall 62 that rises from one end of the main body 61, a second side wall 63 that rises from the other end of the main body 61, and a fluid path 7 that is provided in the main body 61, the first side wall 62, and the second side wall 63 and is a path of a cooling fluid. The fluid path 7 includes an outward path 73 that flows from the first side wall 62 to the main body 61 and the second side wall 63 in this order, and a return path 74 that is connected to the outward path 73 and flows from the second side wall 63 to the main body 61 and the first side wall 62 in this order.

[0076] According to this embodiment, it is possible to provide the electron beam irradiation device 100 having the beam catcher 6 in which temperature deviation is unlikely to occur among the first side wall portion 62, the main body portion 61, and the second side wall portion 63. As a result, it is possible to provide the electron beam irradiation device 100 in which the irradiation effect of the electron beam on the irradiation target 9 is stable. [Explanation of symbols]

[0077] 100 Electron beam irradiation equipment 3. Irradiation unit 6 Beam Catcher 61 Main body 611 Round Pipe 62 First side wall portion 63 Second side wall 7 Fluid Path 71 Inlet 72 Outlet 73 Outbound Section 74 Return Section 9 Irradiated object

Claims

1. a main body portion disposed opposite an irradiation portion that irradiates an electron beam; a first side wall portion rising from one end of the main body portion; a second side wall portion rising from the other end of the main body portion; a fluid path that is provided in the main body portion, the first side wall portion, and the second side wall portion and that is a path for a cooling fluid, The fluid path includes: an outward path portion that flows from the first side wall portion to the main body portion and the second side wall portion in this order; a return path portion that is connected to the outward path portion and flows from the second side wall portion to the main body portion and the first side wall portion in this order, a direction in which an object to be irradiated with an electron beam is transported to the irradiation unit is defined as a first direction; the main body portion has a plurality of round pipes extending in a direction intersecting the first direction in a plan view and forming a part of the fluid path, The plurality of round pipes are arranged so as to be aligned in a direction parallel to the first direction in a plan view, A beam catcher in which adjacent round pipes among the plurality of round pipes have centers that are offset from each other in the irradiation direction of the electron beam and partially overlap each other in a plan view.

2. The main body has a plurality of round pipes arranged in a mountain shape so that the central portion is closer to the irradiation portion when viewed along the central axis direction of the round pipes. The beam catcher according to claim 1 .

3. an irradiation unit that irradiates an electron beam onto an object to be irradiated; a beam catcher arranged so that the object to be irradiated is located between the beam catcher and the irradiation unit, The beam catcher is A main body portion arranged to face the irradiation portion; a first side wall portion rising from one end of the main body portion; a second side wall portion rising from the other end of the main body portion; a fluid path that is provided in the main body portion, the first side wall portion, and the second side wall portion and that is a path for a cooling fluid, The fluid path includes: an outward path portion that flows from the first side wall portion to the main body portion and the second side wall portion in this order; a return path portion that is connected to the outward path portion and flows from the second side wall portion to the main body portion and the first side wall portion in this order; having a direction in which an object to be irradiated with an electron beam is transported to the irradiation unit is defined as a first direction; the main body portion has a plurality of round pipes extending in a direction intersecting the first direction in a plan view and forming a part of the fluid path, The plurality of round pipes are arranged so as to be aligned in a direction parallel to the first direction in a plan view, In the electron beam irradiation device, the centers of adjacent round pipes among the plurality of round pipes are shifted in the irradiation direction of the electron beam and partially overlap each other in a plan view.

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