Detection device and method for manufacturing the same

Abstract

This detection device (1) comprises: a first substrate (21); a plurality of photodiodes (30) which are provided on the first substrate (21); and a light filter layer (75) which comprises a plurality of translucent regions (78) that are respectively superposed on the plurality of photodiodes (30), a light-blocking region (76) that is provided between the plurality of translucent regions (78), and a projection part (77) that protrudes from a surface of the light-blocking region (76), the surface facing the first substrate (21). This method for producing a detection device (1) comprises: a step for forming a plurality of photodiodes (30) on a first substrate (21); a step for forming a light filter layer (75) on a second substrate (71), the light filter layer (75) comprising a plurality of translucent regions (78), a light-blocking region (76) that is provided between the plurality of translucent regions (78), and a projection part (77) that protrudes upward from the light-blocking region (76); and a step for bonding the first substrate (21) and the second substrate (71) to each other in such a manner that the projection part (77) is positioned between adjacent photodiodes (30).

Description

[Technical field]

[0001] The present invention relates to a detection device and a method for manufacturing a detection device. [Background technology]

[0002] Patent Document 1 describes a detection device having a plurality of PIN-type photodiodes. Patent Document 2 describes an imaging device having a light detection element for detecting light, a display layer, and a lens array in which a plurality of lenses are arranged (described as a focusing means for refracting light in Patent Document 2). The imaging device of Patent Document 2 is provided with an optical filter layer (a collimator in Patent Document 2) that removes oblique light components incident on the light detection element. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-67834 A [Patent Document 2] JP 2009-110452 A Summary of the Invention [Problem to be solved by the invention]

[0004] If there is a misalignment between the optical filter layer and the photodetector element, the amount of light incident on the photodetector element varies, which may result in a decrease in detection accuracy.

[0005] An object of the present invention is to provide a detection device capable of improving detection accuracy and a method for manufacturing the detection device. [Means for solving the problem]

[0006] A detection device according to one embodiment of the present invention has a first substrate, a plurality of photodiodes provided on the first substrate, a plurality of light-transmitting regions provided overlapping each of the photodiodes, a light-shielding region provided between the light-transmitting regions, and an optical filter layer including a protrusion protruding from a surface of the light-shielding region facing the first substrate.

[0007] A manufacturing method for a detection device of one embodiment of the present invention includes the steps of forming a plurality of photodiodes on a first substrate; forming an optical filter layer on a second substrate, the optical filter layer including a plurality of light-transmitting regions, light-shielding regions provided between the light-transmitting regions, and a protrusion protruding above the light-shielding regions; and bonding the first substrate and the second substrate together such that, in a planar view from a direction perpendicular to the first substrate, the protrusion is located between adjacent photodiodes. [Brief description of the drawings]

[0008] [Figure 1A] FIG. 1A is a cross-sectional view showing a schematic cross-sectional configuration of a detection instrument with an illumination device having a detection device according to an embodiment. [Figure 1B] FIG. 1B is a cross-sectional view showing a schematic cross-sectional configuration of a detection instrument with an illumination device having a detection device according to Modification 1. As shown in FIG. [Figure 1C] FIG. 1C is a cross-sectional view showing a schematic cross-sectional configuration of a detection instrument with an illumination device having a detection device according to Modification 2. As shown in FIG. [Figure 1D] FIG. 1D is a cross-sectional view showing a schematic cross-sectional configuration of a detection instrument with an illumination device having a detection device according to Modification 3. As shown in FIG. [Diagram 2] FIG. 2 is a plan view showing the detection device according to the embodiment. [Diagram 3] FIG. 3 is a block diagram illustrating an example of the configuration of the detection device according to the embodiment. [Figure 4] FIG. 4 is a circuit diagram showing a detection element. [Diagram 5] FIG. 5 is a cross-sectional view taken along line VV' of FIG. [Figure 6] FIG. 6 is a cross-sectional view illustrating a schematic diagram of a photodiode. [Figure 7] FIG. 7 is a plan view showing the optical filter layer. [Figure 8] FIG. 8 is an explanatory diagram for typically explaining the positional relationship between the protruding portion of the optical filter layer and the photodiode and sensor insulating film of the array substrate. [Figure 9] FIG. 9 is a cross-sectional view taken along line IX-IX' of FIG. [Figure 10] FIG. 10 is an explanatory diagram showing an example of use of the detection device, which is disposed opposite a finger. [Figure 11] FIG. 11 is an explanatory diagram for explaining an example of a method for manufacturing a detection device. [Figure 12] FIG. 12 is a cross-sectional view illustrating a schematic configuration of a detection device according to a second embodiment. [Figure 13] FIG. 13 is a cross-sectional view illustrating a detection device according to a third embodiment. [Figure 14] FIG. 14 is an explanatory diagram for illustrating a schematic arrangement relationship between the protrusions of the optical filter layer, the photodiodes of the array substrate, and the sensor insulating film in the detection device according to the fourth embodiment. [Figure 15] FIG. 15 is a cross-sectional view illustrating a detection device according to a fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present disclosure is not limited by the contents described in the following embodiments. The components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the components described below can be appropriately combined. Note that the disclosure is merely an example, and those that a person skilled in the art can easily imagine appropriate modifications while maintaining the gist of the present disclosure are naturally included in the scope of the present disclosure. In addition, in order to make the explanation clearer, the drawings may be schematic in terms of the width, thickness, shape, etc. of each part compared to the actual embodiment, but they are merely examples and do not limit the interpretation of the present disclosure. In addition, in this disclosure and each figure, elements similar to those described above with respect to the previously mentioned figures may be given the same reference numerals, and detailed explanations may be omitted as appropriate.

[0010] In this specification and the claims, when expressing an aspect of arranging another structure on top of a certain structure, the term "on top" is used, unless otherwise specified, to include both a case in which another structure is arranged directly on top of a certain structure so as to be in contact with the certain structure, and a case in which another structure is arranged above a certain structure via yet another structure.

[0011] (First embodiment) Fig. 1A is a cross-sectional view showing a schematic cross-sectional configuration of a detector with an illumination device having a detector according to an embodiment. Fig. 1B is a cross-sectional view showing a schematic cross-sectional configuration of a detector with an illumination device having a detector according to a first modification. Fig. 1C is a cross-sectional view showing a schematic cross-sectional configuration of a detector with an illumination device having a detector according to a second modification. Fig. 1D is a cross-sectional view showing a schematic cross-sectional configuration of a detector with an illumination device having a detector according to a third modification.

[0012] As shown in FIG. 1A, the detection device 120 with an illumination device includes a detection device 1 and an illumination device 121. The detection device 1 includes an array substrate 2, an optical filter 7, an adhesive layer 125, and a cover member 122. That is, in a direction perpendicular to the surface of the array substrate 2, the array substrate 2, the optical filter 7, the adhesive layer 125, and the cover member 122 are laminated in this order. As will be described later, the cover member 122 of the detection device 1 can be replaced with the illumination device 121. The adhesive layer 125 only needs to bond the optical filter 7 and the cover member 122, and the structure may be such that the adhesive layer 125 is not present in the region corresponding to the detection area AA. When the adhesive layer 125 is not present in the detection area AA, the structure is such that the adhesive layer 125 bonds the cover member 122 and the optical filter 7 in the region corresponding to the peripheral area GA outside the detection area AA. The adhesive layer 125 provided in the detection area AA may simply be referred to as a protective layer for the optical filter 7.

[0013] As shown in FIG. 1A, the illumination device 121 may be, for example, a so-called side-light type front light that uses a cover member 122 as a light guide plate provided at a position corresponding to the detection area AA of the detection device 1 and has a plurality of light sources 123 arranged at one end or both ends of the cover member 122. In other words, the cover member 122 has a light irradiation surface 121a that irradiates light, and is one component of the illumination device 121. According to this illumination device 121, light L1 is irradiated from the light irradiation surface 121a of the cover member 122 toward a finger Fg that is a detection target. As the light source, for example, a light emitting diode (LED) that emits light of a predetermined color may be used. A diode is used.

[0014] Furthermore, as shown in FIG. 1B, the illumination device 121 may have a light source (e.g., an LED) provided directly below the detection area AA of the detection device 1, and the illumination device 121 equipped with a light source also functions as a cover member 122.

[0015] Furthermore, the lighting device 121 is not limited to the example of FIG. 1B, and may be provided to the side or above the cover member 122 as shown in FIG. 1C, and light L1 may be irradiated onto the finger Fg from the side or above the finger Fg.

[0016] Furthermore, as shown in FIG. 1D, the illumination device 121 may be a so-called direct backlight having a light source (for example, an LED) provided in the detection area of ​​the detection device 1.

[0017] Light L1 emitted from the lighting device 121 is reflected as light L2 by a finger Fg, which is a detection target. The detection device 1 detects the light L2 reflected by the finger Fg to detect unevenness (e.g., a fingerprint) on the surface of the finger Fg. Furthermore, in addition to detecting a fingerprint, the detection device 1 may detect information about a living body by detecting the light L2 reflected inside the finger Fg. The information about a living body may be, for example, an image of blood vessels such as veins, a pulse rate, a pulse wave, etc. The color of the light L1 from the lighting device 121 may be different depending on the detection target.

[0018] The cover member 122 is a member for protecting the array substrate 2 and the optical filter 7, and covers the array substrate 2 and the optical filter 7. As described above, the illumination device 121 may also serve as the cover member 122. In a structure in which the cover member 122 is separated from the illumination device 121 as shown in FIGS. 1C and 1D, the cover member 122 is, for example, a glass substrate. Note that the cover member 122 is not limited to a glass substrate, and may be a resin substrate or the like. Also, the cover member 122 may not be provided. In this case, a protective layer such as an insulating film is provided on the surfaces of the array substrate 2 and the optical filter 7, and the finger Fg comes into contact with the protective layer of the detection device 1.

[0019] As shown in FIG. 1B, the detection device 120 with the illumination device may be provided with a display panel instead of the illumination device 121. The display panel may be, for example, an organic EL display panel (OLED: Organic Light Emitting Diode) or an inorganic EL display (micro LED, mini LED). Alternatively, the display panel may be a liquid crystal display panel (LCD: Liquid Crystal Display) using liquid crystal elements as display elements, or an electrophoretic display panel (EPD: Electrophoretic Display) using electrophoretic elements as display elements. Even in this case, it is possible to detect information about the fingerprint and biometric information of the finger Fg based on the light L2 that is obtained by reflecting display light (light L1) emitted from the display panel and reflected by the finger Fg.

[0020] FIG. 2 is a plan view showing a detection device according to an embodiment. The first direction Dx shown in FIG. 2 and subsequent figures is one direction in a plane parallel to the first substrate 21. The second direction Dy is one direction in a plane parallel to the first substrate 21, and is a direction perpendicular to the first direction Dx. The second direction Dy may not be perpendicular to the first direction Dx but may intersect with it. The third direction Dz is a direction perpendicular to the first direction Dx and the second direction Dy, and is a normal direction to the first substrate 21. Moreover, "plan view" refers to the positional relationship when viewed from the third direction Dz.

[0021] As shown in FIG. 2, the detection device 1 includes an array substrate 2 (first substrate 21), a sensor unit 10, a scanning line driving circuit 15, a signal line selection circuit 16, a detection circuit 48, a control circuit 102, and a power supply circuit 103.

[0022] The control board 101 is electrically connected to the first board 21 via the wiring board 110. The wiring board 110 is, for example, a flexible printed circuit board or a rigid board. The wiring board 110 is provided with a detection circuit 48. The control board 101 is provided with a control circuit 102 and a power supply circuit 103. The control circuit 102 is, for example, an FPGA (Field Programmable Gate Array). The control circuit 102 supplies control signals to the sensor unit 10, the scanning line driving circuit 15, and the signal line selection circuit 16 to control the operation of the sensor unit 10. The power supply circuit 103 supplies voltage signals such as a power supply potential VDD and a reference potential VCOM (see FIG. 4) to the sensor unit 10, the scanning line driving circuit 15, and the signal line selection circuit 16. In the present embodiment, the case where the detection circuit 48 is disposed on the wiring board 110 is illustrated, but is not limited to this. The detection circuit 48 may be disposed on the first board 21.

[0023] The first substrate 21 has a detection area AA and a peripheral area GA. The detection area AA and the peripheral area GA extend in a plane direction parallel to the first substrate 21. Within the detection area AA, each element (detection element 3) of the sensor unit 10 is provided. The peripheral area GA is an area outside the detection area AA, and is an area where each element (detection element 3) is not provided. In other words, the peripheral area GA is an area between the outer periphery of the detection area AA and the end of the first substrate 21. Within the peripheral area GA, a scanning line driving circuit 15 and a signal line selection circuit 16 are provided. The scanning line driving circuit 15 is provided in an area of ​​the peripheral area GA extending along the second direction Dy. The signal line selection circuit 16 is provided in an area of ​​the peripheral area GA extending along the first direction Dx, and is provided between the sensor unit 10 and the detection circuit 48.

[0024] Each of the detection elements 3 of the sensor unit 10 is an optical sensor having a photodiode 30 as a sensor element. The photodiode 30 is a photoelectric conversion element, and outputs an electrical signal according to the light irradiated thereto. More specifically, the photodiode 30 is an OPD (Organic Photo Diode). Alternatively, the photodiode 30 may be a PIN (Positive Intrinsic Negative) photodiode. The detection elements 3 are arranged in a matrix in the detection area AA. The photodiodes 30 of the detection elements 3 perform detection according to gate drive signals (e.g., a reset control signal RST and a read control signal RD) supplied from the scanning line drive circuit 15. The photodiodes 30 output an electrical signal according to the light irradiated thereto as a detection signal Vdet to the signal line selection circuit 16. The detection device 1 detects information about a living body based on the detection signals Vdet from the photodiodes 30.

[0025] Fig. 3 is a block diagram showing a configuration example of a detection device according to an embodiment. As shown in Fig. 3, the detection device 1 further includes a detection control circuit 11 and a detection unit 40. A part or all of the functions of the detection control circuit 11 are included in a control circuit 102. In addition, a part or all of the functions of the detection unit 40 other than the detection circuit 48 are included in the control circuit 102.

[0026] The detection control circuit 11 is a circuit that supplies control signals to the scanning line driving circuit 15, the signal line selection circuit 16, and the detection unit 40, respectively, and controls their operations. The detection control circuit 11 supplies various control signals, such as a start signal STV and a clock signal CK, to the scanning line driving circuit 15. The detection control circuit 11 also supplies various control signals, such as a selection signal ASW, to the signal line selection circuit 16.

[0027] The scanning line driving circuit 15 is a circuit that drives a plurality of scanning lines (readout control scanning line GLrd, reset control scanning line GLrst (see FIG. 4)) based on various control signals. The scanning line driving circuit 15 sequentially or simultaneously selects a plurality of scanning lines, and supplies gate driving signals (e.g., reset control signal RST, readout control signal RD) to the selected scanning lines. In this way, the scanning line driving circuit 15 selects a plurality of photodiodes 30 connected to the scanning lines.

[0028] The signal line selection circuit 16 is a switch circuit that sequentially or simultaneously selects a plurality of output signal lines SL (see FIG. 4). The signal line selection circuit 16 is, for example, a multiplexer. The signal line selection circuit 16 connects the selected output signal line SL to the detection circuit 48 based on a selection signal ASW supplied from the detection control circuit 11. As a result, the signal line selection circuit 16 outputs the detection signal Vdet of the photodiode 30 to the detection unit 40.

[0029] The detection unit 40 includes a detection circuit 48, a signal processing circuit 44, a coordinate extraction circuit 45, a memory circuit 46, and a detection timing control circuit 47. Based on a control signal supplied from the detection control circuit 11, the detection timing control circuit 47 controls the detection circuit 48, the signal processing circuit 44, and the coordinate extraction circuit 45 so that they operate in synchronization with each other.

[0030] The detection circuit 48 is, for example, an analog front-end circuit (AFE). The detection circuit 48 is a signal processing circuit having at least the functions of a detection signal amplifier circuit 42 and an A / D conversion circuit 43. The detection signal amplifier circuit 42 is a circuit that amplifies the detection signal Vdet, and is, for example, an integration circuit. The A / D conversion circuit 43 converts the analog signal output from the detection signal amplifier circuit 42 into a digital signal.

[0031] The signal processing circuit 44 is a logic circuit that detects a predetermined physical quantity input to the sensor unit 10 based on an output signal from the detection circuit 48. When the finger Fg is in contact with or close to the detection surface, the signal processing circuit 44 can detect unevenness on the surface of the finger Fg or the palm based on a signal from the detection circuit 48. The signal processing circuit 44 may also detect information about the living body based on the signal from the detection circuit 48. The information about the living body is, for example, a blood vessel image of the finger Fg or the palm, a pulse wave, a pulse rate, blood oxygen saturation, etc.

[0032] The memory circuit 46 temporarily stores the signal calculated by the signal processing circuit 44. The memory circuit 46 may be, for example, a RAM (Random Access Memory), a register circuit, or the like.

[0033] The coordinate extraction circuit 45 is a logic circuit that determines the detection coordinates of the unevenness of the surface of the finger Fg, etc., when the contact or proximity of the finger Fg is detected in the signal processing circuit 44. The coordinate extraction circuit 45 is also a logic circuit that determines the detection coordinates of the blood vessels of the finger Fg or the palm. The coordinate extraction circuit 45 combines the detection signals Vdet output from each detection element 3 of the sensor unit 10 to generate two-dimensional information indicating the shape of the unevenness of the surface of the finger Fg, etc. The coordinate extraction circuit 45 may output the detection signal Vdet as the sensor output Vo without calculating the detection coordinates.

[0034] Next, an example of the circuit configuration of the detection device 1 will be described. Fig. 4 is a circuit diagram showing a detection element. As shown in Fig. 4, the detection element 3 has a photodiode 30, a reset transistor Mrst, a readout transistor Mrd, and a source follower transistor Msf. The reset transistor Mrst, the readout transistor Mrd, and the source follower transistor Msf are provided corresponding to one photodiode 30. The reset transistor Mrst, the readout transistor Mrd, and the source follower transistor Msf are each composed of an n-type TFT (Thin Film Transistor). However, this is not limited thereto, and each transistor may be composed of a p-type TFT.

[0035] A reference potential VCOM is applied to the anode of the photodiode 30. The cathode of the photodiode 30 is connected to a node N1. The node N1 is connected to a capacitance element Cs, one of the source or drain of the reset transistor Mrst, and the gate of the source follower transistor Msf. Furthermore, a parasitic capacitance Cp exists at the node N1. When light is incident on the photodiode 30, a signal (charge) output from the photodiode 30 is accumulated in the capacitance element Cs. Here, the capacitance element Cs is, for example, a capacitance formed between the upper conductive layer 35 and the lower conductive layer 34 (see FIG. 6) connected to the photodiode 30. The parasitic capacitance Cp is a capacitance added to the capacitance element Cs, and is a capacitance formed between various wirings and electrodes provided on the array substrate 2.

[0036] The gate of the reset transistor Mrst is connected to a reset control scanning line GLrst. The other of the source or drain of the reset transistor Mrst is supplied with a reset potential Vrst. When the reset transistor Mrst is turned on (conductive state) in response to a reset control signal RST, the potential of the node N1 is reset to the reset potential Vrst. The reference potential VCOM has a potential lower than the reset potential Vrst, and the photodiode 30 is reverse-bias driven.

[0037] The source follower transistor Msf is connected between a terminal to which a power supply potential VDD is supplied and the readout transistor Mrd (node ​​N2). The gate of the source follower transistor Msf is connected to the node N1. A signal (charge) generated in the photodiode 30 is supplied to the gate of the source follower transistor Msf. As a result, the source follower transistor Msf outputs a voltage signal corresponding to the signal (charge) generated in the photodiode 30 to the readout transistor Mrd.

[0038] The read transistor Mrd is connected between the source of the source follower transistor Msf (node ​​N2) and the output signal line SL (node ​​N3). The gate of the read transistor Mrd is connected to the read control scanning line GLrd. When the read transistor Mrd is turned on in response to the read control signal RD, the signal output from the source follower transistor Msf, i.e., a voltage signal corresponding to the signal (charge) generated in the photodiode 30, is output to the output signal line SL as the detection signal Vdet.

[0039] In the example shown in FIG. 4, the reset transistor Mrst and the readout transistor Mrd each have a so-called double-gate structure in which two transistors are connected in series. However, without being limited thereto, the reset transistor Mrst and the readout transistor Mrd may have a single-gate structure or a multi-gate structure in which three or more transistors are connected in series. Furthermore, the circuit of one detection element 3 is not limited to a configuration having three transistors, namely, the reset transistor Mrst, the source follower transistor Msf, and the readout transistor Mrd. The detection element 3 may have two or four or more transistors.

[0040] Next, a detailed configuration of the detection element 3 and the optical filter 7 will be described. Fig. 5 is a cross-sectional view taken along line VV' in Fig. 2. Fig. 5 shows a schematic diagram of the laminated configuration of the array substrate 2, the photodiode 30, and the optical filter 7.

[0041] 5, the array substrate 2 has a protective film 201, an adhesive layer 203, a first substrate 21, a TFT layer 24, a plurality of photodiodes 30, and a sensor insulating film 25. The first substrate 21 is bonded onto the protective film 201 via the adhesive layer 203. A resin substrate such as polyimide is used for the first substrate 21. The adhesive layer 203 is, for example, an optically adhesive film (OCA: Optical Clear Adhesive).

[0042] In this specification, the direction from first substrate 21 to second substrate 71 in a direction perpendicular to first substrate 21 is referred to as "upper side" or simply "top". Furthermore, the direction from second substrate 71 to first substrate 21 is referred to as "lower side" or simply "bottom". Furthermore, "plan view" refers to the positional relationship when viewed from a direction perpendicular to first substrate 21.

[0043] The TFT layer 24 is provided on the first substrate 21. The TFT layer 24 is a layer in which various transistors such as a reset transistor Mrst, a readout transistor Mrd, and a source follower transistor Msf (see FIG. 4) and wiring connected to these transistors are formed.

[0044] The multiple photodiodes 30 are arranged on the TFT layer 24 of the array substrate 2. The sensor insulating film 25 is provided on the TFT layer 24 to cover the multiple photodiodes 30. The sensor insulating film 25 is, for example, an inorganic insulating film, and is provided as a sealing film that prevents moisture from entering the multiple photodiodes 30 from the outside. Note that the sensor insulating film 25 is not limited to a single layer, and may be configured with multiple insulating films stacked together.

[0045] Fig. 6 is a cross-sectional view showing a schematic diagram of a photodiode. As shown in Fig. 6, the photodiode 30 has a hole transport layer 31, an active layer 32, and an electron transport layer 33. The photodiode 30 is an OPD (Organic Photo Diode) in which the active layer 32 is made of an organic semiconductor.

[0046] More specifically, a lower conductive layer 34, a hole transport layer 31, an active layer 32, an electron transport layer 33, and an upper conductive layer 35 are laminated in this order on the TFT layer 24. The lower conductive layer 34 is formed of a metal material such as aluminum (Al). The upper conductive layer 35 is formed of a conductive material having light transmission such as ITO (Indium Tin Oxide). The sensor insulating film 25 is provided to cover the upper conductive layer 35.

[0047] 6 shows an example in which the photodiode 30 is an OPD made of an organic semiconductor, but is not limited to this. For example, the photodiode 30 may be a PIN type photodiode made of an inorganic semiconductor.

[0048] 5, the optical filter 7 is provided on the multiple photodiodes 30. The optical filter 7 is an optical element that transmits a component of the light L2 reflected by a detection object such as a finger Fg, traveling in the third direction Dz, toward the photodiode 30, and blocks a component traveling in an oblique direction. The optical filter 7 is also called a collimating aperture or a collimator.

[0049] The optical filter 7 has a protective film 202, an adhesive layer 204, a second substrate 71, a barrier film 74, an optical filter layer 75, and a sealing portion 27. The optical filter 7 is bonded to the array substrate 2 via the adhesive layer 26 and the sealing portion 27. The optical filter layer 75 of the optical filter 7 is provided on the multiple photodiodes 30 and the sensor insulating film 25 via the adhesive layer 26. The adhesive layer 26 is, for example, an optically transparent resin (OCR: Optical Clear Resin), which is a liquid UV-curable resin.

[0050] The seal portion 27 is provided on the periphery of the peripheral area GA, and seals between the optical filter 7 (optical filter layer 75) and the array substrate 2 (sensor insulating film 25). Furthermore, the terminal protective film 112 is provided to cover the area between the periphery of the optical filter 7 and the wiring substrate 110.

[0051] The optical filter layer 75 has a plurality of light-transmitting regions 78, a light-shielding region 76, and a plurality of protrusions 77. The light-transmitting regions 78 are provided so as to overlap with each of the plurality of photodiodes 30. The light-transmitting regions 78 are formed, for example, from a light-transmitting resin material, and have a columnar shape that continues from the upper surface to the lower surface of the optical filter layer 75. More specifically, the light-transmitting regions 78 are formed in a cylindrical shape that is circular in plan view. The light-shielding regions 76 are provided between the adjacent light-transmitting regions 78, and are provided so as to overlap with the regions between the photodiodes 30. The light-shielding regions 76 are formed, for example, from a resin material that is colored black. The protrusions 77 are provided so as to protrude from the surface of the light-shielding regions 76 that faces the first substrate 21.

[0052] The second substrate 71 is disposed opposite the first substrate 21. An optical filter layer 75 and a plurality of photodiodes 30 are provided between the first substrate 21 and the second substrate 71 in the third direction Dz. More specifically, the second substrate 71 is attached to the lower surface of the protective film 202, i.e., the surface facing the first substrate 21, via an adhesive layer 204. A resin substrate such as polyimide is used for the second substrate 71. The adhesive layer 204 is, for example, an optically adhesive film (OCA: Optical Clear Adhesive).

[0053] The optical filter layer 75 is provided on the surface of the second substrate 71 facing the first substrate 21 via a barrier film 74. The barrier film 74 is, for example, an inorganic insulating film.

[0054] With this configuration, light L2 reflected by a detection object such as a finger Fg passes through the light-shielding region 76 and enters the photodiode 30. Light traveling in an oblique direction is blocked by the light-shielding region 76 and the protrusion 77. This allows the detection device 1 to suppress the occurrence of so-called crosstalk between adjacent photodiodes 30.

[0055] The first substrate 21 and the second substrate 71 are formed of a resin material such as polyimide, and the detection device 1 can be configured as a flexible sensor that can deform along the shape of a detection object such as a finger Fg. However, without being limited thereto, the first substrate 21 and the second substrate 71 may be, for example, a glass substrate such as quartz or non-alkali glass. In this case, the protective films 201, 202 and the adhesive layers 203, 204 can be omitted.

[0056] Next, the detailed configuration of the protruding portion 77 of the optical filter layer 75 will be described with reference to Figs. 7 to 9. Fig. 7 is a plan view showing the optical filter layer. Fig. 8 is an explanatory diagram for typically explaining the positional relationship between the protruding portion of the optical filter layer and the photodiode and sensor insulating film of the array substrate. Fig. 9 is a cross-sectional view taken along line IX-IX' of Fig. 7. Fig. 7 shows the light-shielding region 76 of the optical filter layer 75 with diagonal lines. Fig. 8 also shows a part (protruding portion 77) of the optical filter layer 75, with the protruding portion 77 shown with diagonal lines.

[0057] 7 and 8, the multiple photodiodes 30 are arranged in a first direction Dx and a second direction Dy. The light-transmitting regions 78 of the optical filter layer 75 are arranged in a matrix in the first direction Dx and the second direction Dy and are provided so as to overlap with each of the multiple photodiodes 30. The light-transmitting regions 78 are circular in plan view. However, the light-transmitting regions 78 may be other shapes, such as a square or polygonal shape.

[0058] The protruding portions 77 are formed in a lattice pattern and are provided between adjacent photodiodes 30. In other words, the protruding portions 77 are provided in a frame shape surrounding each of the photodiodes 30.

[0059] More specifically, as shown in Fig. 8, the protrusion 77 has a plurality of first portions 77a and a plurality of second portions 77b intersecting with the plurality of first portions 77a. In a plan view, the plurality of first portions 77a are provided between the plurality of photodiodes 30 adjacent to each other in the second direction Dy and extend in the first direction Dx. The plurality of first portions 77a are arranged side by side in the second direction Dy. In a plan view, the plurality of second portions 77b are provided between the plurality of photodiodes 30 adjacent to each other in the first direction Dx and extend in the second direction Dy. The plurality of second portions 77b are arranged side by side in the first direction Dx.

[0060] As shown in Fig. 9, the sensor insulating film 25 has a groove 25a between adjacent photodiodes 30. The protrusion 77 is provided at a position overlapping the groove 25a. In other words, at least a part of the protrusion 77 is disposed between the side surfaces of the groove 25a in the first direction Dx. Note that while Fig. 9 shows a cross-sectional view along the first direction Dx, at least a part of the protrusion 77 is also disposed between the side surfaces of the groove 25a in the second direction Dy in a similar manner.

[0061] This allows the detection device 1 to suppress misalignment in a plane between the optical filter layer 75 and the multiple photodiodes 30. In other words, the optical filter layer 75 and the array substrate 2 are precisely positioned so that the multiple light-transmitting regions 78 overlap with the multiple photodiodes 30, respectively, and therefore the detection device 1 can suppress variations in the amount of light incident on the multiple photodiodes 30 and the occurrence of moire caused by misalignment of the multiple light-transmitting regions 78.

[0062] Moreover, the protrusion 77 protrudes from the lower surface of the light-shielding region 76 toward the first substrate 21. The end of the protrusion 77 is provided between the adjacent photodiodes 30, extending to the vicinity of the bottom surface of the groove portion 25a. The protrusion 77 is formed of a colored resin material similar to the light-shielding region 76. Thereby, the protrusion 77 can effectively block light traveling in an oblique direction through the adjacent light-transmitting regions 78 between the adjacent photodiodes 30, and can suppress the occurrence of so-called crosstalk. Furthermore, as described above, the protrusion 77 is provided in a frame shape surrounding each of the multiple photodiodes 30, and therefore can block light more effectively than when the protrusion 77 is formed in a pin shape, for example.

[0063] An adhesive layer 26 is provided between the end of the protrusion 77 and the bottom surface of the groove 25a, and the end of the protrusion 77 is separated from the bottom surface of the groove 25a. The present invention is not limited to this, and the end of the protrusion 77 may be in contact with a part of the bottom surface or side wall of the groove 25a. The protrusion 77 is not limited to a configuration in which it is continuously formed in the first direction Dx and the second direction Dy, and may be formed by dividing it into a plurality of parts by providing slits or the like.

[0064] Fig. 10 is an explanatory diagram for explaining a usage example of the detection device, which is placed opposite a finger. In the example shown in Fig. 10, flexible resin substrates are used for the first substrate 21 of the array substrate 2 and the second substrate 71 of the optical filter 7, and the detection device 1 is configured as a deformable (bendable) flexible sensor.

[0065] 10, in the detection device 1, the optical filter 7 (optical filter layer 75) is disposed facing the surface of the finger Fg and curved in a concave shape along the shape of the surface of the finger Fg. In this case, compressive stress is generated in the optical filter 7 (optical filter layer 75).

[0066] Since the detection device 1 is provided with the protrusion 77, it is possible to suppress misalignment between the array substrate 2 and the optical filter 7 even when the detection device 1 is bent and deformed. In addition, the protrusion 77 can be made of a resin material having a lower elasticity than the translucent resin material constituting the translucent region 78. This makes it possible to suppress damage or peeling of the optical filter layer 75 even when the detection device 1 is bent and deformed.

[0067] Next, a manufacturing process of the detection device 1 will be described. Fig. 11 is an explanatory diagram for explaining an example of a manufacturing method of the detection device. The manufacturing method of the detection device 1 shown in Fig. 11 includes a step of forming the array substrate 2 (steps ST11, ST12, ST13), a step of forming the optical filter 7 (steps ST14, ST15, ST16), and a step of assembling the detection device 1 by bonding the array substrate 2 and the optical filter 7 together (steps ST17, ST18).

[0068] First, the process of forming the array substrate 2 will be described. As shown in Fig. 11, the first substrate 21 and the TFT layer 24 are formed on one surface of the support substrate 211 (step ST11). The first substrate 21 is formed by applying the material of the first substrate 21 onto the support substrate 211 and curing the applied material. The support substrate 211 is, for example, a glass substrate, and has higher rigidity than the first substrate 21. Various transistors and various wirings constituting the TFT layer 24 are formed on the first substrate 21.

[0069] Next, a photodiode 30 is formed on the TFT layer 24 (step ST12). The photodiode 30 may be formed by deposition or coating. Although shown in simplified form in FIG. 11, various electrodes such as a lower conductive layer 34 and an upper conductive layer 35 connected to the photodiode 30 are also patterned.

[0070] Next, the sensor insulating film 25 is formed to cover the multiple photodiodes 30 (step ST13). Groove portions 25a are formed between adjacent photodiodes 30. The groove portions 25a are formed following the steps formed between the photodiodes 30 and the TFT layer 24. Alternatively, the groove portions 25a may be formed by removing a part of the surface of the sensor insulating film 25 by etching or the like.

[0071] The process of forming the optical filter 7 will be described. First, the second substrate 71 and the barrier film 74 are formed on one surface of the support substrate 212 (step ST14). The second substrate 71 is formed by applying the material of the second substrate 71 onto the support substrate 212 and curing the applied material. The support substrate 212 is, for example, a glass substrate, and has higher rigidity than the second substrate 71. The barrier film 74 is formed on the second substrate 71.

[0072] Next, the optical filter layer 75 is formed on the barrier film 74 of the second substrate 71 (step ST15). As described above, the optical filter layer 75 includes a plurality of light-transmitting regions 78, a light-shielding region 76 provided between the plurality of light-transmitting regions 78, and a protruding portion 77 protruding above the light-shielding region 76. The optical filter layer 75 may be formed by forming the light-shielding region 76 with a colored resin material, patterning the light-shielding region 76, and then forming the light-transmitting region 78 with a light-transmitting resin material. Alternatively, the optical filter layer 75 may be formed by forming a columnar light-transmitting region 78 with a light-transmitting resin material, and then filling the light-shielding region 76 with a colored resin material. The area and arrangement pitch of the plurality of light-transmitting regions 78 in a plan view are formed to correspond to the area and arrangement pitch of the plurality of photodiodes 30 of the array substrate 2. The shape and height of the protruding portion 77 in a plan view are formed to correspond to the groove portion 25a of the sensor insulating film 25.

[0073] Next, the sealing portion 27 is formed (step ST16) on the peripheral edge of the optical filter layer 75. The sealing portion 27 is provided in an area corresponding to the peripheral area GA, and is formed in a frame shape surrounding an area corresponding to the detection area AA.

[0074] Next, the adhesive layer 26, which is a liquid UV-curable resin, is applied to cover the surface of the optical filter layer 75, and the first substrate 21 (array substrate 2) and the second substrate 71 (optical filter 7) are bonded together (step ST17). In this process, the first substrate 21 and the second substrate 71 are positioned and bonded together so that the protrusions 77 are located between the adjacent photodiodes 30 in a plan view, more specifically, so that the protrusions 77 face the bottom surfaces of the grooves 25a. Thereafter, the adhesive layer 26 is cured by irradiation with UV light. Alternatively, UV light irradiation and thermal curing may be used in combination, if necessary.

[0075] Next, the support substrate 211 is peeled off from the first substrate 21 by so-called laser lift-off, and the support substrate 212 is peeled off from the second substrate 71. Thereafter, the protective film 201 is bonded to the first substrate 21, and the protective film 202 is bonded to the second substrate 71 (step ST18). Through the above-mentioned steps, the detection device 1 can be manufactured.

[0076] In this embodiment, the array substrate 2 and the optical filter 7 are formed in separate processes using different first substrate 21 and second substrate 71, respectively. Therefore, compared to a process of laminating and forming the optical filter layer 75 on the multiple photodiodes 30 of the array substrate 2, it is possible to prevent heat and the like from being applied to the multiple photodiodes 30 of the array substrate 2 during the manufacturing process of the optical filter layer 75. This makes it possible to prevent damage to the multiple photodiodes 30 of the array substrate 2. Alternatively, there is no temperature restriction on the array substrate 2 side during the manufacturing process of the optical filter 7, and it is possible to improve the degree of freedom in the material and process used for the optical filter layer 75.

[0077] Furthermore, since the optical filter layer 75 is provided with a plurality of protrusions 77, it is possible to suppress misalignment during the process of bonding the first substrate 21 and the second substrate 71 together. Furthermore, the first substrate 21 and the second substrate 71 are bonded together in a state in which the first substrate 21 and the second substrate 71 are bonded to the support substrates 211 and 212, each of which has rigidity. Therefore, even if the first substrate 21 and the second substrate 71 are formed as flexible resin substrates, it is possible to suppress deformation of the first substrate 21 and the second substrate 71 and to suppress misalignment during the bonding process.

[0078] 11 is merely an example and can be modified as appropriate. For example, in step ST18, protective film 201 may be attached to first substrate 21, and protective film 202 may not be provided on second substrate 71.

[0079] As described above, the detection device 1 of this embodiment has a first substrate 21, a plurality of photodiodes 30 provided on the first substrate 21, a plurality of light-transmitting regions 78 provided overlapping each of the plurality of photodiodes 30, a light-shielding region 76 provided between the plurality of light-transmitting regions 78, and an optical filter layer 75 including a protrusion 77 protruding from the surface of the light-shielding region 76 facing the first substrate 21.

[0080] In addition, the manufacturing method of the detection device 1 of this embodiment includes a step of forming a plurality of photodiodes 30 on the first substrate 21 (step ST12), a step of forming an optical filter layer 75 on the second substrate 71 (step ST15), the optical filter layer 75 including a plurality of light-transmitting regions 78, a light-shielding region 76 provided between the plurality of light-transmitting regions 78, and a protrusion 77 protruding above the light-shielding region 76, and a step of bonding the first substrate 21 and the second substrate 71 together so that the protrusion 77 is located between adjacent photodiodes 30 in a planar view from a direction perpendicular to the first substrate 21 (step ST17).

[0081] Second embodiment 12 is a cross-sectional view showing a schematic diagram of a detection device according to the second embodiment. In the following description, the same components as those described in the above-mentioned embodiment are denoted by the same reference numerals, and duplicated description will be omitted.

[0082] In the above-described first embodiment, the optical filter layer 75 is formed in a light guiding column structure in which the light transmitting region 78 is formed in a cylindrical shape, but is not limited thereto and other configurations can be adopted. As shown in Fig. 12, in an optical filter 7A included in a detection device 1A according to the second embodiment, an optical filter layer 75A is formed by alternately stacking a plurality of light blocking layers 72 and a plurality of light transmitting resin layers 73.

[0083] An opening OP is formed in an area of ​​the plurality of light-shielding layers 72 overlapping with the photodiode 30. In this embodiment, the light-shielding area 76A is an area where no opening OP is formed, and where at least one light-shielding layer 72 is provided between one surface and the other surface of the optical filter layer 75A in the third direction Dz. The light-transmitting area 78A is an area where an opening OP is formed, and where the light-transmitting resin layer 73 is continuously formed from one surface to the other surface of the optical filter layer 75A in the third direction Dz. The protrusion 77 is provided in the light-shielding area 76A of the light-shielding layer 72 of the lowest layer (first substrate 21 side).

[0084] The diameters of the openings OP provided in the multiple light-shielding layers 72 are formed to be the same size along the third direction Dz. However, without being limited thereto, the diameters of the openings OP may be different along the third direction Dz. For example, the diameters of the openings OP may be increased from the second substrate 71 toward the first substrate 21. Moreover, the multiple light-shielding layers 72 may be stacked in six or more layers, or four or less layers.

[0085] Third embodiment Fig. 13 is a cross-sectional view showing a schematic diagram of a detection device according to the third embodiment. As shown in Fig. 13, in an optical filter 7B included in a detection device 1B according to the third embodiment, an optical filter layer 75B includes a low refractive index layer 79A and a plurality of lenses 79B.

[0086] The low refractive index layer 79A and the lenses 79B are provided on the second substrate 71 side of the optical filter layer 75B, more specifically, between the uppermost light-shielding layer 72 and the barrier film 74 in the third direction Dz. The lenses 79B are provided at positions overlapping the light-transmitting regions 78A and the photodiodes 30. The low refractive index layer 79A is provided between the adjacent lenses 79B, and is provided to cover the lenses 79B and the light-shielding layer 72 (light-transmitting regions 78A). The low refractive index layer 79A is formed of a material having a smaller refractive index than the lenses 79B.

[0087] Light L2 from a detection object such as a finger Fg is collected by each of the multiple lenses 79B, passes through the multiple light-transmitting regions 78A, and is incident on the multiple photodiodes 30. In this embodiment, the multiple lenses 79B can appropriately control the path of light traveling in the optical filter layer 75B, so that the detection device 1B can suppress the occurrence of crosstalk.

[0088] (Fourth embodiment) Fig. 14 is an explanatory diagram for typically explaining the positional relationship between the protrusions of the optical filter layer and the photodiodes and sensor insulating film of the array substrate in the detection device according to the fourth embodiment. Fig. 15 is a cross-sectional diagram typically showing the detection device according to the fourth embodiment.

[0089] 14 and 15, in a detection device 1C according to the fourth embodiment, an array substrate 2A has at least a pair of sensor-side protrusions 29 provided on a sensor insulating film 25 between adjacent photodiodes 30. The sensor-side protrusions 29 protrude from the bottom surface of a groove 25a of the sensor insulating film 25 toward the second substrate 71.

[0090] 14, four sensor-side protrusions 29 are provided for one photodiode 30. The sensor-side protrusions 29 are provided at the four corners of the protrusion 77 surrounding one photodiode 30. In other words, four sensor-side protrusions 29 are provided at each of the intersections between the first portion 77a and the second portion 77b of the protrusion 77.

[0091] 14, the protrusion 77 (first portion 77a) is disposed between a pair of sensor-side protrusions 29 adjacent to each other in the second direction Dy. Also, as shown in Fig. 14 and Fig. 15, the protrusion 77 (second portion 77b) is disposed between a pair of sensor-side protrusions 29 adjacent to each other in the first direction Dx.

[0092] As described above, in the fourth embodiment, multiple sensor side protrusions 29 corresponding to the protrusions 77 are provided, thereby improving the positional accuracy between the first substrate 21 (array substrate 2A) and the second substrate 71 (optical filter 7).

[0093] Although FIG. 15 shows the optical filter layer 75 of a light guiding column type, the present invention is not limited to this, and the configuration of the fourth embodiment can be combined with the configurations of the second and third embodiments described above.

[0094] Although the preferred embodiment of the present invention has been described above, the present invention is not limited to such an embodiment. The contents disclosed in the embodiment are merely examples, and various modifications are possible within the scope of the present invention. Appropriate modifications made within the scope of the present invention naturally belong to the technical scope of the present invention. At least one of various omissions, substitutions, and modifications of components can be made within the scope of the gist of each of the above-mentioned embodiments and each modified example. [Explanation of symbols]

[0095] 1, 1A, 1B, 1C Detector 2. 2A Array Board 3. Detector element 7, 7A, 7B Optical Filters 10 Sensor section 21 First board 24 TFT layers 25 Sensor insulating film 25a Groove 26 Adhesive layer 27 Seal part 29 Sensor side protrusion 30 Photodiode 71 Second board 72 Light blocking layer 73 Translucent resin layer 74 Barrier Membrane 75, 75A, 75B Optical filter layer 76, 76A Shade area 77 Protrusion 78, 78A Translucent area 79A Low refractive index layer 79B Lens 201, 202 Protective film 211, 212 Support substrate OP Opening

Claims

1. A first substrate; A plurality of photodiodes provided on the first substrate; an optical filter layer including a plurality of light-transmitting regions provided to overlap the plurality of photodiodes, respectively, a light-shielding region provided between the plurality of light-transmitting regions, and a protrusion protruding from a surface of the light-shielding region facing the first substrate; a sensor insulating film covering the plurality of photodiodes; a groove portion is provided in the sensor insulating film between adjacent ones of the photodiodes; The protrusion is provided at a position overlapping the groove, an adhesive layer is provided between the protruding portion of the optical filter layer and the groove portion of the sensor insulating film; Outer edges of the plurality of photodiodes are arranged to overlap the light-shielding regions of the optical filter layer, The width of the protrusion is smaller than the width of the light blocking region, The protruding portion is made of a resin material having a lower elasticity than the light-transmitting region. Detection device.

2. a second substrate facing the first substrate with the plurality of photodiodes and the optical filter layer interposed therebetween; The light-transmitting region and the light-shielding region are provided on a surface of the second substrate facing the first substrate. The detection device according to claim 1 .

3. A first substrate; A plurality of photodiodes provided on the first substrate; an optical filter layer including a plurality of light-transmitting regions provided to overlap the plurality of photodiodes, respectively, a light-shielding region provided between the plurality of light-transmitting regions, and a protrusion protruding from a surface of the light-shielding region facing the first substrate; a sensor insulating film covering the plurality of photodiodes; at least one pair of sensor side protrusions provided on the sensor insulating film between adjacent ones of the photodiodes; The protrusion is provided between a pair of the sensor side protrusions, The width of the protrusion is smaller than the width of the light blocking region, The protruding portion is made of a resin material having a lower elasticity than the light-transmitting region. Detection device.

4. The photodiodes are arranged adjacent to each other in a first direction, In a plan view from a direction perpendicular to the first substrate, the protrusion is provided between the plurality of photodiodes adjacent to each other in the first direction and extends in a second direction intersecting the first direction. The detection device according to any one of claims 1 to 3.

5. The protrusion is provided in a frame shape surrounding each of the plurality of photodiodes. The detection device according to any one of claims 1 to 4.

6. a plurality of lenses provided on a surface of the optical filter layer opposite to a surface facing the first substrate, the lenses overlapping the plurality of light-transmitting regions; a low refractive index layer provided between adjacent lenses and having a refractive index lower than that of the lenses; A detection device according to any one of claims 1 to 5.

7. forming a plurality of photodiodes on a first substrate; forming a sensor insulating film covering the plurality of photodiodes and having a groove between adjacent ones of the plurality of photodiodes; forming an optical filter layer on a second substrate, the optical filter layer including a plurality of light-transmitting regions, light-shielding regions provided between the plurality of light-transmitting regions, and a protrusion protruding above the light-shielding regions; and bonding the first substrate and the second substrate together such that, in a plan view from a direction perpendicular to the first substrate, the protrusion is located between adjacent ones of the photodiodes and is provided at a position overlapping the groove, In the step of bonding the first substrate and the second substrate, an adhesive layer is provided between the protruding portion of the optical filter layer and the groove portion of the sensor insulating film; Outer edges of the plurality of photodiodes are arranged to overlap the light-shielding regions of the optical filter layer, The width of the protrusion is smaller than the width of the light blocking region, The protruding portion is made of a resin material having a lower elasticity than the light-transmitting region. A method for manufacturing a detection device.

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