Method for detecting abnormality in piezoelectric driving device, piezoelectric driving device, and robot

Abstract

To provide an abnormality detection method of a piezoelectric drive device in need of no circuit dedicated for abnormality detection, a piezoelectric drive device, and a robot.SOLUTION: A method for detecting abnormality of a piezoelectric drive device 3 includes a substrate 60, and thin film piezoelectric elements 6A to 6E arranged on the substrate 60, being a method for detecting vibration abnormality of the piezoelectric driving device 3 for controlling an amplitude of the piezoelectric elements 6A to 6E by a drive control signal Vx. Abnormal vibration is detected by a drive voltage V with respect to the drive control signal Vx.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a method for detecting an abnormality in a piezoelectric drive device, a piezoelectric drive device, and a robot. [Background technology]

[0002] In recent years, piezoelectric motors that utilize the vibration of a piezoelectric body have been developed. For example, Patent Document 1 discloses an ultrasonic motor equipped with a protection device that provides a monitor electrode in a portion of the piezoelectric body to which no input voltage is applied, monitors the voltage generated by the vibration of the piezoelectric body, evaluates the monitored voltage to detect an abnormality, and, when an abnormality is detected, issues a warning or stops the motor, for example, to avoid damage to the ultrasonic motor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 190269 / 1999 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the ultrasonic motor described in Patent Document 1 requires a monitor electrode and a protection device having an abnormality detection circuit and a protection circuit in order to detect abnormalities and provide protection, which makes it difficult to reduce costs. [Means for solving the problem]

[0005] The method for detecting an abnormality in a piezoelectric drive device includes a substrate and a thin-film piezoelectric element disposed on the substrate, and detects vibration abnormalities in the piezoelectric drive device, which controls the amplitude of the piezoelectric element with a drive control signal, and detects the vibration abnormality based on the drive voltage relative to the drive control signal.

[0006] The piezoelectric driving device has a substrate, a thin-film piezoelectric element arranged on the substrate, a circuit section that outputs a drive control signal and controls the amplitude of the piezoelectric element, and a detection section that detects vibration abnormalities based on a drive voltage generated by the drive control signal.

[0007] The robot is equipped with a piezoelectric motor having a piezoelectric drive as described above. [Brief description of the drawings]

[0008] [Figure 1] 1 is a plan view showing a schematic configuration of a piezoelectric motor including a piezoelectric drive device according to a first embodiment. [Diagram 2] FIG. 1 is a plan view showing a schematic configuration of a piezoelectric driving device according to a first embodiment. [Diagram 3] Cross-sectional view taken along line AA in Figure 2. [Figure 4] FIG. 4 is a plan view showing a driving state of the piezoelectric motor. [Diagram 5] FIG. 4 is a plan view showing a driving state of the piezoelectric motor. [Figure 6] FIG. 4 is a block diagram showing the configuration of an abnormality detection circuit. [Figure 7] FIG. 4 is a diagram showing frequency characteristics of a piezoelectric element. [Figure 8] FIG. 4 is a flowchart showing a method for detecting an abnormality in a piezoelectric element. [Figure 9] FIG. 13 is a diagram showing a driving voltage characteristic for determining an abnormality in a piezoelectric element. [Figure 10] FIG. 11 is a perspective view showing a schematic configuration of a robot including a piezoelectric drive device according to a second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] 1. First embodiment First, a piezoelectric driving device 3 according to the first embodiment will be described with reference to FIGS. 1 to 5, taking a piezoelectric motor 1 including the piezoelectric driving device 3 as an example. For ease of explanation, the following figures show three mutually orthogonal axes: the X-axis, the Y-axis, and the Z-axis. The direction along the X-axis is called the "X-direction," the direction along the Y-axis is called the "Y-direction," and the direction along the Z-axis is called the "Z-direction." The arrow side of each axis is also called the "plus side," the opposite side to the arrow is called the "minus side," the plus side of the X-direction is also called the "upper," and the minus side of the X-direction is also called the "lower."

[0010] 1, the piezoelectric motor 1 has a rotor 2 as a driven member that is disk-shaped and rotatable about its central axis O, and a piezoelectric driving device 3 that abuts against an outer circumferential surface 21 of the rotor 2 and rotates the rotor 2 about the central axis O. The piezoelectric motor 1 also has a piezoelectric actuator 4, a biasing member 5 that biases the piezoelectric actuator 4 toward the rotor 2, and a control device 7 that controls the driving of the piezoelectric actuator 4. In such a piezoelectric motor 1, when the piezoelectric actuator 4 undergoes bending vibration, the vibration is transmitted to the rotor 2, and the rotor 2 rotates about the central axis O in the clockwise direction as indicated by arrow B1 or counterclockwise as indicated by arrow B2.

[0011] In this embodiment, the rotor 2 is provided with an encoder 9, which can detect the behavior of the rotor 2, in particular the amount of rotation and angular velocity.

[0012] As shown in FIG. 2, the piezoelectric actuator 4 has a vibrating body 41, a support portion 42 that supports the vibrating body 41, a connection portion 43 that connects the vibrating body 41 and the support portion 42, and a convex portion 44 that is connected to the vibrating body 41 and transmits the vibration of the vibrating body 41 to the rotor 2.

[0013] The vibrating body 41 has a thickness direction in the X direction, is plate-like and extends in the YZ plane including the Y and Z axes, and vibrates in an S-shape by expanding and contracting in the Y direction while bending in the Z direction. Moreover, the vibrating body 41 has an elongated shape with the Y direction, which is the expansion and contraction direction, as the long side when viewed in a plan view from the X direction.

[0014] The vibrating body 41 also has a substrate 60 and five piezoelectric elements 6A to 6E that are disposed on the substrate 60 and are used for driving the vibrating body 41 to cause it to vibrate in a bending manner.

[0015] The piezoelectric element 6C is disposed in the center of the vibrating body 41 in the Z direction along the Y direction, which is the longitudinal direction of the vibrating body 41. On the positive side of the vibrating body 41 in the Z direction with respect to the piezoelectric element 6C, the piezoelectric elements 6A and 6B are disposed side by side in the Y direction of the vibrating body 41, and on the negative side of the Z direction with respect to the piezoelectric element 6C, the piezoelectric elements 6D and 6E are disposed side by side in the Y direction of the vibrating body 41. Each of these piezoelectric elements 6A to 6E expands and contracts in the Y direction of the vibrating body 41 when electricity is applied. The piezoelectric elements 6A and 6E are electrically connected to each other, and the piezoelectric elements 6B and 6D are electrically connected to each other.

[0016] By applying driving voltages V (alternating voltages) of the same frequency but different phases to the piezoelectric elements 6A and 6E, the piezoelectric element 6C, and the piezoelectric elements 6B and 6D, respectively, and shifting the timing of their expansion and contraction, the vibrating body 41 can be made to vibrate in an S-shape within its plane.

[0017] As shown in Fig. 3, each of the piezoelectric elements 6A to 6E has a first electrode 61 arranged on a substrate 60, a piezoelectric body 62 arranged on the first electrode 61, and a second electrode 63 arranged on the piezoelectric body 62. An insulating layer 64 is provided on the second electrode 63 to prevent short circuits between the electrodes. The first electrode 61 of the piezoelectric elements 6A to 6E is a common electrode, and the piezoelectric body 62 and the second electrode 63 are provided individually for each of the piezoelectric elements 6A to 6E. The second electrode 63 is a drive electrode that vibrates each of the piezoelectric bodies 62 of the piezoelectric elements 6A to 6E based on a drive control signal Vx.

[0018] The thickness of the piezoelectric body 62 is not particularly limited, but is preferably 50 nm or more and 20 μm or less, and more preferably 0.5 μm or more and 7 μm or less. For this reason, the piezoelectric elements 6A to 6E can also be said to be thin-film piezoelectric elements. If the thickness of the piezoelectric body 62 is less than 50 nm, piezoelectric breakdown is likely to occur, making it difficult to increase the drive voltage V, and the output of the piezoelectric actuator 4 may be reduced accordingly. On the other hand, if the thickness of the piezoelectric body 62 is more than 20 μm, the piezoelectric body 62 may be more likely to crack, and the drive voltage V may be increased.

[0019] The constituent material of the piezoelectric body 62 is not particularly limited, and examples of the piezoelectric ceramics that can be used include lead zirconate titanate (PZT), barium titanate, lead titanate, potassium niobate, lithium niobate, lithium tantalate, sodium tungstate, zinc oxide, barium strontium titanate (BST), strontium bismuth tantalate (SBT), lead metaniobate, lead scandium niobate, etc. In addition to the above-mentioned piezoelectric ceramics, the piezoelectric body 62 may also be made of polyvinylidene fluoride, quartz crystal, etc.

[0020] Furthermore, the method for forming the piezoelectric body 62 is not particularly limited, and it may be formed using a sol-gel method or a sputtering method. The piezoelectric body 62 in this embodiment is a thin film formed using a sol-gel method. Therefore, the thin film piezoelectric elements 6A to 6E are arranged on the substrate 60. This makes it possible to obtain a thinner piezoelectric body 62 compared to when it is formed from a bulk material, and to obtain the piezoelectric elements 6A to 6E with a large capacitance C, and further to reduce the thickness of the piezoelectric driving device 3.

[0021] The support part 42 supports the vibrating body 41 via the connection part 43. The support part 42 has a U-shape surrounding the negative side in the Y direction of the vibrating body 41 in a plan view from the X direction. The connection part 43 connects the support part 42 to a part that becomes a node of the bending vibration of the vibrating body 41, specifically, the center part in the Y direction of the vibrating body 41.

[0022] One common electrode wiring 81 and five drive electrode wirings 82A, 82B, 82C, 82D, and 82E are provided on the support portion 42 and the connection portion 43. In addition, one common electrode terminal 83 and five drive electrode terminals 84 are arranged side by side along the Z direction at the end portion on the negative side in the Y direction of the support portion 42.

[0023] One end of the common electrode wiring 81 is electrically connected to the first electrodes 61 of the piezoelectric elements 6A to 6E, and the other end of the common electrode wiring 81 is electrically connected to a common electrode terminal 83. One end of each of the five drive electrode wirings 82A, 82B, 82C, 82D, and 82E is electrically connected to the second electrodes 63 of the piezoelectric elements 6A, 6B, 6C, 6D, and 6E, and the other end of each of the five drive electrode wirings 82A, 82B, 82C, 82D, and 82E is electrically connected to a drive electrode terminal 84.

[0024] The common electrode terminal 83 electrically connected to the first electrodes 61 of the piezoelectric elements 6A to 6E is electrically connected to the control device 7 via external wiring 85 and is grounded to GND. In addition, five drive electrode terminals 84 electrically connected to the second electrodes 63 of the piezoelectric elements 6A to 6E are electrically connected to the control device 7 via external wiring 86.

[0025] The protrusion 44 is provided at the tip of the vibrating body 41 and protrudes from the vibrating body 41 toward the positive side in the Y direction. The tip of the protrusion 44 is in contact with the outer circumferential surface 21 of the rotor 2. Therefore, the vibration of the vibrating body 41 is transmitted to the rotor 2 via the protrusion 44.

[0026] When a driving voltage V with a phase of 0° is applied to the piezoelectric elements 6A and 6E, a driving voltage V with a phase difference of 90° is applied to the piezoelectric element 6C, and a driving voltage V with a phase difference of 180° is applied to the piezoelectric elements 6B and 6D, when the piezoelectric elements 6A and 6E deform toward the outside of the vibrating body 41, the piezoelectric elements 6B and 6D deform toward the inside of the vibrating body 41. Conversely, when the piezoelectric elements 6A and 6E deform toward the inside of the vibrating body 41, the piezoelectric elements 6B and 6D deform toward the outside of the vibrating body 41. Therefore, the vibrating body 41 is displaced in an S-shape in the Z direction. In addition, the piezoelectric element 6C stretches and vibrates in the Y direction. Therefore, as shown in FIG. 4, the vibrating body 41 stretches and vibrates in an S-shape in the Z direction while vibrating in the Y direction, and these vibrations are combined, and the tip of the convex portion 44 performs an elliptical motion (rotational motion) that describes an elliptical orbit in the counterclockwise direction as shown by the arrow A1. The rotor 2 is sent out by such an elliptical motion of the convex portion 44, and the rotor 2 rotates clockwise as indicated by the arrow B1.

[0027] In this embodiment, the vibrating body 41 is subjected to in-plane vibrations, namely bending vibration and stretching vibration, which displace the vibrating body 41 within the YZ plane, to cause the tip of the convex portion 44 to move in an elliptical motion, thereby driving the rotor 2. However, this is not limited to this, and the vibrating body 41 may be vibrated by out-of-plane vibrations, which displace the vibrating body 41 outside the YZ plane, to cause the tip of the convex portion 44 to move in an elliptical motion, thereby driving the rotor 2.

[0028] Furthermore, when the drive voltages V applied to the piezoelectric elements 6A, 6E and the piezoelectric elements 6B, 6D are switched, that is, when the drive voltage V with a phase of 0° is applied to the piezoelectric elements 6B, 6D, the drive voltage V with a phase shift of 90° is applied to the piezoelectric element 6C, and the drive voltage V with a phase shift of 180° is applied to the piezoelectric elements 6A, 6E, the vibrating body 41 vibrates in an S-shape in the Z direction while stretching and contracting in the Y direction, as shown in Fig. 5, and these vibrations are combined, causing the convex portion 44 to perform an elliptical motion in the clockwise direction as indicated by the arrow A2. The elliptical motion of the convex portion 44 sends out the rotor 2, and the rotor 2 rotates in the counterclockwise direction as indicated by the arrow B2.

[0029] The biasing member 5 is a member that biases the convex portion 44 toward the outer peripheral surface 21 of the rotor 2. The biasing member 5 can bias the convex portion 44 toward the outer peripheral surface 21 of the rotor 2 by utilizing the restoring force of the spring portion 513, which is provided on the base portion 51 that supports the piezoelectric actuator 4, by fixing the biasing member 5 to a housing or the like in a state in which the spring portion 513 is deflected in the Y direction.

[0030] The control device 7 controls the driving of the piezoelectric actuator 4 by applying a driving voltage V, which is an alternating voltage, to the piezoelectric elements 6A to 6E. Furthermore, the control device 7 has a function of detecting abnormal vibration of the piezoelectric elements 6A to 6E based on the drive voltage V in response to the drive control signal Vx.

[0031] Next, a circuit and a detection method for detecting abnormal vibration of the piezoelectric elements 6A to 6E in the control device 7 will be described with reference to FIGS.

[0032] The control device 7 has a circuit section 70 that outputs a drive control signal Vx, controls the amplitude of the piezoelectric elements 6A-6E, and detects vibration abnormalities of the piezoelectric elements 6A-6E. As shown in Fig. 6, the circuit section 70 has a voltage control section 71 having a detection section 72 that detects vibration abnormalities of the piezoelectric elements 6A-6E, a DA conversion section 73, and a waveform amplification section 74.

[0033] The voltage control unit 71 outputs a drive control signal Vx that controls the amplitude of the piezoelectric elements 6A to 6E, and determines the amplitude width of the drive voltage V in the waveform amplification unit 74. The drive control signal Vx has a PWM (Pulse Width Modulation) width. The PWM width is a signal modulated by changing the duty ratio of a pulse wave. The use of the PWM width allows for a simple circuit configuration. The detection unit 72 compares the drive voltage V, which is a voltage signal generated by the circuit unit 70, with the drive voltage V, which is an actual drive waveform, to detect abnormal vibration of the piezoelectric elements 6A-6E. Since the detection unit 72 can be configured by software, a new circuit dedicated to abnormality detection is not required. The DA conversion section 73 converts the rectangular pulse output from the voltage control section 71 into an analog waveform. The waveform amplifier 74 amplifies the analog waveform converted by the DA converter 73 based on the drive control signal Vx, generates the drive voltage V to be applied to the piezoelectric elements 6A-6E, and controls the amplitude of the piezoelectric elements 6A-6E.

[0034] The circuit section 70 connected to the piezoelectric elements 6A to 6E has frequency characteristics as shown in FIG. 7 when the drive control signal Vx is constant. When the piezoelectric elements 6A to 6E are driving normally, a drive voltage V1 is generated at a drive frequency f1. In contrast, when an abnormality occurs in the piezoelectric elements 6A to 6E, such as a decrease in capacitance C, the frequency characteristics change and the drive voltage increases to V2 at the drive frequency f1. Therefore, by comparing the drive voltage V1 in the normal state with the drive voltage V2 in the abnormal state by the detection section 72, it is possible to detect a vibration abnormality of the piezoelectric elements 6A to 6E. Therefore, when the drive voltage V in response to the drive control signal Vx deviates from the expected value Vs by a specified value or more, it is determined to be abnormal. Also, if a vibration abnormality is detected, it is notified.

[0035] The drive frequency f1 is determined by the inductor L of the DA conversion section 73 and the capacitance C of the piezoelectric elements 6A to 6E, as shown in the following formula (1). f1=1 / (2π(LC) 1 / 2 ) (1)

[0036] In addition, since the piezoelectric elements 6A to 6E of this embodiment are formed of thin films, the capacitance C can be made larger than that of bulk. In the case of bulk, the capacitance C is small, so it is necessary to add a separate capacitor in parallel to adjust the capacitance. As the ratio of the added capacitor to the capacitance C of the piezoelectric elements 6A to 6E increases, the change in resonance frequency relative to the capacitance change of the piezoelectric elements 6A to 6E becomes gentler and the voltage change becomes smaller. Therefore, by forming the piezoelectric elements 6A to 6E of this embodiment from thin films, the voltage change relative to the capacitance change of the piezoelectric elements 6A to 6E is made larger, improving the accuracy of detecting abnormal vibration of the piezoelectric elements 6A to 6E.

[0037] As shown in FIG. 8, the method for detecting abnormal vibration of the piezoelectric elements 6A to 6E in the control device 7 is as follows: first, in step S101, the voltage control section 71 outputs a drive control signal Vx to drive the piezoelectric elements 6A to 6E.

[0038] Next, in step S102, the detection unit 72 judges whether the drive voltage V output from the waveform amplifier 74, which is the expected value Vs, is greater than or equal to a specified value. That is, as shown in FIG. 9, for example, in the drive control signal Vx1, it is judged whether the expected value Vs is greater than the warning lower limit Wmin or less than the warning upper limit Wmax. If the expected value Vs is within the range from the warning lower limit Wmin to the warning upper limit Wmax, it is judged to be normal, the result is "Yes", the process returns to step S101, the drive control signal Vx is output, and the piezoelectric elements 6A to 6E are driven. If the expected value Vs is outside the range from the warning lower limit Wmin to the warning upper limit Wmax, it is judged to be abnormal, the result is "No", the process proceeds to step S103, a warning signal is issued, and an abnormal vibration is notified to the outside.

[0039] Next, in step S104, the detection unit 72 judges whether the drive voltage V output from the waveform amplifier 74, which is the expected value Vs, is greater than or equal to a specified value. That is, as shown in FIG. 9, for example, in the drive control signal Vx1, the detection unit 72 judges whether the expected value Vs is greater than the error lower limit Emin or less than the error upper limit Emax. If the expected value Vs is within the range from the error lower limit Emin to the error upper limit Emax, it is judged to be normal, the result is "Yes", the process returns to step S101, the drive control signal Vx is output, and the piezoelectric elements 6A to 6E are driven. If the expected value Vs is outside the range from the error lower limit Emin to the error upper limit Emax, it is judged to be abnormal, the result is "No", the process proceeds to step S105, an error signal is generated, and an abnormal vibration is notified to the outside. Note that the specified value in this embodiment is any one of the warning lower limit Wmin, the warning upper limit Wmax, the error lower limit Emin, and the error upper limit Emax.

[0040] After that, in step S106, the output of the drive control signal Vx from the voltage control section 71 is stopped, and further, the piezoelectric driving device 3 is stopped.

[0041] According to the piezoelectric driving device 3 and the abnormality detection method for the piezoelectric driving device 3 described above, since the control device 7 includes the detection unit 72 configured by software, which detects the vibration abnormality of the piezoelectric elements 6A-6E based on the drive voltage V in response to the drive control signal Vx, it is possible to detect the vibration abnormality of the piezoelectric elements 6A-6E at low cost without providing a new circuit dedicated to abnormality detection. Also, it is possible to avoid damage to the piezoelectric motor 1 due to the vibration abnormality of the piezoelectric elements 6A-6E.

[0042] 2. Second embodiment Next, a robot 1000 including a piezoelectric driving device 3 according to a second embodiment will be described with reference to Fig. 10. In the following description, a configuration in which a piezoelectric motor 1 including the piezoelectric driving device 3 is applied will be described as an example.

[0043] 10, the robot 1000 can perform operations such as supplying, removing, transporting, and assembling precision equipment and components constituting the equipment. The robot 1000 is a six-axis robot, and includes a base 1010 fixed to a floor or a ceiling, an arm 1020 rotatably connected to the base 1010, an arm 1030 rotatably connected to the arm 1020, an arm 1040 rotatably connected to the arm 1030, an arm 1050 rotatably connected to the arm 1040, an arm 1060 rotatably connected to the arm 1050, an arm 1070 rotatably connected to the arm 1060, and a control device 1080 that controls the driving of these arms 1020, 1030, 1040, 1050, 1060, and 1070.

[0044] Further, the arm 1070 is provided with a hand connection section, and an end effector 1090 corresponding to the task to be performed by the robot 1000 is attached to the hand connection section. Further, a piezoelectric motor 1 is mounted on all or a part of each joint section, and each of the arms 1020, 1030, 1040, 1050, 1060, and 1070 rotates by driving this piezoelectric motor 1. Note that the piezoelectric motor 1 may be mounted on the end effector 1090 and used to drive the end effector 1090.

[0045] The control device 1080 is configured as a computer, and has, for example, a processor (CPU), a memory, an I / F (interface), and the like. The processor executes a predetermined program stored in the memory to control the driving of each part of the robot 1000. The program may be downloaded from an external server via the I / F. Also, all or a part of the configuration of the control device 1080 may be provided outside the robot 1000 and connected via a communication network such as a LAN (local area network).

[0046] Such a robot 1000 includes the piezoelectric motor 1 as described above. That is, the robot 1000 includes a piezoelectric actuator 4, a control device 7 that controls the vibration of the piezoelectric actuator 4, and a piezoelectric driving device 3 that vibrates the piezoelectric actuator 4 to drive the rotor 2 that contacts the piezoelectric actuator 4. Among these, the control device 7 includes a detection unit 72 configured by software that detects abnormal vibration of the piezoelectric elements 6A to 6E. Therefore, when abnormal vibration of the piezoelectric elements 6A to 6E is detected, the piezoelectric driving device 3 and the like are stopped, thereby preventing damage to the piezoelectric motor 1. As a result, a highly reliable and high-performance robot 1000 can be obtained. [Explanation of symbols]

[0047] 1...piezoelectric motor, 2...rotor, 3...piezoelectric drive device, 4...piezoelectric actuator, 5...biasing member, 6A, 6B, 6C, 6D, 6E...piezoelectric element, 7...control device, 9...encoder, 21...outer periphery, 41...vibration body, 42...support portion, 43...connection portion, 44...projection portion, 51...base portion, 60...substrate, 61...first electrode, 62...piezoelectric body, 63...second electrode, 70...circuit portion, 71...voltage control portion, 72...detection portion, 73...DA conversion portion, 74...waveform amplification portion, 81...common Electrode wiring, 82A, 82B, 82C, 82D, 82E...wiring for drive electrodes, 83...terminal for common electrode, 84...terminal for drive electrode, 85, 86...external wiring, 513...spring part, 1000...robot, A1, A2, B1, B2...arrows, Emax...upper error limit value, Emin...lower error limit value, f1...drive frequency, O...central axis, V, V1, V2...drive voltage, Vs...expected value, Vx...drive control signal, Wmax...upper warning limit value, Wmin...lower warning limit value.

Claims

1. A substrate; a thin-film piezoelectric element disposed on the substrate; When the capacitance of the piezoelectric element decreases, the frequency characteristic of the drive voltage changes. A method for detecting a vibration abnormality in a piezoelectric driving device that controls the amplitude of the piezoelectric element using a drive control signal, comprising: determining that the drive voltage, which is an actual drive waveform corresponding to the drive control signal, is abnormal when the drive voltage deviates from an expected value by a specified value or more; A method for detecting an abnormality in a piezoelectric driving device.

2. The piezoelectric driving device includes a voltage control unit that outputs the drive control signal, a DA conversion unit that converts the rectangular pulse output from the voltage control unit into an analog waveform, and a waveform amplification unit that amplifies the analog waveform converted by the DA conversion unit based on the drive control signal. A method for detecting an abnormality in a piezoelectric driving device according to claim 1.

3. The thickness of the thin film of the piezoelectric element is 50 nm or more and 20 μm or less. A method for detecting an abnormality in the piezoelectric driving device according to claim 1 or 2.

4. The drive control signal is a PWM width. A method for detecting an abnormality in the piezoelectric driving device according to any one of claims 1 to 3.

5. When the vibration abnormality is detected, an alarm is issued. A method for detecting an abnormality in the piezoelectric driving device according to any one of claims 1 to 4.

6. A substrate; a thin film piezoelectric element disposed on the substrate; A circuit section that outputs a drive control signal to control the amplitude of the piezoelectric element; a detection unit that detects vibration abnormality by comparing a drive voltage, which is an actual drive waveform generated by the drive control signal, with an expected value; having When the capacitance of the piezoelectric element decreases, the frequency characteristic of the driving voltage changes. Piezoelectric drive.

7. The thickness of the thin film of the piezoelectric element is 50 nm or more and 20 μm or less.

7. The piezoelectric drive device according to claim 6.

8. A piezoelectric motor having the piezoelectric drive device according to claim 6 or 7 is provided. robot.

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