Contamination inspection system, contamination inspection method, and contamination inspection program

Abstract

To provide a contamination inspection technology with which it is possible to improve the accuracy of inspection even when the shape of an inspection object is indefinite.SOLUTION: Provided is a contamination inspection system 100 comprising measurement means, inspection means and conveyance means, the inspection means having a robot 41 which holds a measurement unit to measure the radiation dose of a workpiece W as a three-dimensionally movable end effector, the measurement means performing three-dimensional measurement processing upon the workpiece having been conveyed to a measurement region by the conveyance means and acquiring shape information that includes coordinates in a workpiece coordinate system as information that indicates the workpiece shape, the inspection means converting the shape information on the workpiece having been conveyed to an inspection region by the conveyance means into an inspection coordinate system from the reference point of the inspection region, determining a permissible range in the inspection region in which the robot does not come into contact with the workpiece, and transmitting a drive signal to the robot.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a contamination inspection system, a contamination inspection method, and a contamination inspection program. [Background technology]

[0002] When vehicles such as large trucks leave a (radiation) controlled area, they are inspected to check whether the vehicle is contaminated by radioactive materials (hereinafter referred to as vehicle contamination inspection). Vehicle contamination inspections are mainly carried out manually using handheld radiation detectors. However, there is a demand for shortening the inspection time for vehicle contamination inspections and improving the inspection accuracy.

[0003] Patent Document 1 discloses a technology for a contamination inspection system for inspecting contamination of vehicles. This contamination inspection system includes a detector for detecting radiation levels, a robot having an arm movable three-dimensionally with the detector fixed to the tip of the arm, and a control device for controlling the robot based on predetermined operation information so that the detector moves following the shape of the vehicle and set according to vehicle attribute information including at least vehicle identification information and shape information relating to the shape of the vehicle, and the detector includes an exterior detector for detecting the radiation level on the exterior of the vehicle, and a detail detector provided near the exterior detector for detecting the radiation level in the details of the vehicle. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2019-190909 A Summary of the Invention [Problem to be solved by the invention]

[0005] The amount of radiation changes depending on the distance from the radioactive material. Therefore, to improve the accuracy of contamination inspection of the target surface, it is necessary to detect the amount of radiation from a certain distance along the shape of the target.

[0006] In the technology of Patent Document 1, a robot with a detector fixed to the tip of its arm is controlled based on preset operation information. However, when the inspection targets are huge quantities of materials and equipment, or when the objects are waste materials such as construction debris, which have indefinite shapes, it is difficult to preset the operation information in advance.

[0007] In view of the above circumstances, an object of the present invention is to provide a contamination inspection technique that can improve inspection accuracy even when the shape of the inspection object is indefinite. [Means for solving the problem]

[0008] In order to achieve the above object, the present invention provides a contamination inspection system, comprising: The contamination inspection system includes a measuring means, an inspection means, and a transport means, the inspection means has a robot that holds a measurement unit for measuring a radiation dose of a workpiece as an end effector that is movable in three dimensions; The transport means transports the workpiece, The measurement means performs a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means, and acquires shape information including coordinates in a workpiece coordinate system as information indicating a workpiece shape; The inspection means converts the shape information of the workpiece transported to the inspection area by the transport means from the reference point of the inspection area to an inspection coordinate system, determines an acceptable range within which the robot will not come into contact with the workpiece in the inspection area, and transmits a drive signal to the robot.

[0009] The present invention also provides a contamination inspection program executed by a control unit, The control unit receives shape information including coordinates in a work coordinate system, the shape information being acquired as information indicating a work shape when a measurement unit performs a three-dimensional measurement process on the work transported to a measurement area by a transport unit, and For the workpiece transported to the inspection area by the transport means, the shape information is transformed from the reference point of the inspection area to an inspection coordinate system, and an allowable range within which a robot holding a measurement unit that measures the radiation dose of the workpiece as an end effector movable in three dimensions will not come into contact with the workpiece in the inspection area is determined, and the operation of the robot is controlled.

[0010] The present invention also provides a contamination inspection method using a contamination inspection system, comprising: The contamination inspection system includes a measuring means, an inspection means, and a transport means, the inspection means has a robot that holds a measurement unit for measuring a radiation dose of a workpiece as an end effector that is movable in three dimensions; A step of the conveying means conveying the workpiece; a step of performing a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means by the measurement means, and acquiring shape information including coordinates in a workpiece coordinate system as information indicating a workpiece shape; The inspection means converts the shape information of the workpiece transported to the inspection area by the transport means from a reference point of the inspection area to an inspection coordinate system, determines an acceptable range within which the robot will not come into contact with the workpiece in the inspection area, and transmits a drive signal to the robot.

[0011] The present invention also provides a contamination inspection method in which the contamination inspection system including a conveying means, a measuring means, a robot, and a measuring unit executes a measurement step and an inspection step, comprising: the measurement unit includes a measuring device for measuring a radiation dose of a workpiece, and the robot holds the measurement unit as an end effector that is movable in three dimensions; The measurement step includes a step of performing a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means by one or more measurement means; The measuring means has a step of acquiring shape information including coordinates indicating a work shape from a three-dimensional measurement processing result, The inspection step includes a step of determining an allowable range within which the robot does not come into contact with the workpiece in an inspection area based on the shape information, and generating a drive signal for the robot. transmitting the drive signal to the robot; a step of bringing the measuring device closer to the workpiece transported to an inspection area by the transport means, based on the drive signal; The method includes a step of the measuring device measuring the amount of radiation applied to the workpiece.

[0012] In a preferred embodiment of the present invention, the robot is a robot arm having one or more joints, The inspection means determines at least a displacement angle of the joint as the drive signal and transmits it to the robot arm.

[0013] With this configuration, contamination inspection can be performed based on shape information indicating the shape of the workpiece, and if the workpiece can be transported on the inspection line, inspection can be performed without storing information about the workpiece shape in advance. Therefore, contamination inspection, which was previously performed manually, can be automated, improving worker safety and reducing variation in inspection quality between workers.

[0014] In a preferred embodiment of the present invention, the measurement means includes a sensor for measuring the workpiece from a side direction and a sensor for measuring the workpiece from a zenith direction, executing the three-dimensional measurement process based on a measurement result of a sensor that measures at least from the side direction; Measure and process the amount of rotation of the workpiece relative to a reference orientation based on the measurement result of the sensor measuring from the zenith direction; The inspection means determines a drive signal based on the shape information and the amount of rotation.

[0015] In a preferred embodiment of the present invention, the inspection means determines a plurality of inspection directions for inspecting the workpiece based on the amount of rotation, and determines a drive signal for each of the inspection directions.

[0016] With this configuration, the measurement unit can be placed closer to the workpiece, enabling more accurate measurement of the radiation dose.

[0017] In a preferred embodiment of the present invention, the robot includes a first robot and a second robot capable of measuring radiation doses with a higher resolution than the first robot, the second robot includes a measurement unit having a plurality of measuring devices arranged side by side, each of the measuring devices being extendable and retractable in the same direction and including a proximity detection means in the extension direction; The second robot determines the radiation dose measurement position by controlling the measurement unit to approach the workpiece based on the drive signal, and by controlling the extension of each of the measuring devices based on the detection results of the proximity detection means.

[0018] In a preferred embodiment of the present invention, the proximity detection means includes a proximity sensor that measures distance to the workpiece without contacting the workpiece, and a tactile switch that detects contact with the workpiece.

[0019] With this configuration, by controlling the extension of each measuring device, it is possible to measure the radiation dose in more detail along the three-dimensional shape of the workpiece, without having to store information about the workpiece shape in advance.

[0020] In a preferred embodiment of the present invention, the inspection area includes a rough inspection area and a detailed inspection area, The measurement means determines whether or not a detailed inspection is required for the workpiece transported to the rough inspection area using the measurement result by the first robot and a first threshold value; If a judgment is required, the transport means transports the workpiece to a detailed inspection area, and if a judgment is not required, the transport means transports the workpiece to an inspection completion area.

[0021] With this configuration, contamination inspection can be performed in two steps, making it possible to efficiently perform the inspection and shorten the inspection time.

[0022] In a preferred embodiment of the present invention, the inspection means further includes a bottom surface measuring unit for inspecting a bottom surface of the workpiece, the conveying means has a conveyor on which the bottom surface measuring unit is disposed, The inspection areas include an inspection area where inspection is performed only by the robot, and an inspection area where inspection is performed by the robot and the bottom surface measurement unit.

[0023] With this configuration, the inspection can be carried out efficiently and the inspection time can be shortened. Effect of the Invention

[0024] The present invention can provide a contamination inspection technique that can improve inspection accuracy even when the shape of the inspection object is indefinite. [Brief description of the drawings]

[0025] [Figure 1] FIG. 1 is a diagram showing an overview of a system according to an embodiment. [Diagram 2] FIG. 4 is a plan view showing an area on an inspection line according to an embodiment. [Diagram 3] FIG. 1 is a block diagram of a contamination inspection system according to one embodiment. [Figure 4] FIG. 2 is a diagram illustrating a hardware configuration according to an embodiment. [Diagram 5] 3A and 3B are a perspective view and a plan view of a measurement region according to an embodiment. [Figure 6] FIG. 2 is a perspective view of a first robot according to an embodiment. [Figure 7] FIG. 2 is a perspective view of a second robot according to an embodiment. [Figure 8] FIG. 2 is a perspective view of a measurement unit for detailed inspection according to an embodiment. [Figure 9] FIG. 1 is a perspective view of a measuring instrument for detailed inspection according to an embodiment. [Figure 10] 1 is a flowchart of a contamination inspection method in a system according to an embodiment. [Figure 11] 11 is a process flowchart of rough inspection in the system of one embodiment. [Figure 12]11 is a flowchart showing a detailed inspection process in the system according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0026] The present invention will now be described more fully with reference to the accompanying drawings, in which there is shown a preferred embodiment, but which may be embodied in many different forms and is not limited to the embodiments set forth herein.

[0027] For example, the configuration, operation, etc. of the contamination inspection system will be described in this embodiment, but the same effects can be achieved by an executed method, device, computer program, etc. The program in this embodiment may be provided as a non-transitory computer-readable recording medium, or may be provided so as to be downloadable from an external server.

[0028] <System configuration of contamination inspection system> Fig. 1 is a diagram showing an overview of a system according to an embodiment. Fig. 2 is a plan view showing an area on an inspection line according to an embodiment. Fig. 3 is a block diagram of a contamination inspection system according to an embodiment. Fig. 4 is a hardware configuration diagram. The system configuration of the contamination inspection system 100 will be described with reference to these figures as appropriate.

[0029] 2, the contamination inspection system 100 according to the embodiment includes a conveying means 2, a measuring means 3, and an inspection means 4. More specifically, the contamination inspection system 100 includes a management device 10, a conveying control device 20 and a conveyor 21 as the conveying means 2, a measurement control device 30 and measurement sensors 31 and 32 as the measuring means 3, and a robot control device 40, a robot 41, a measurement unit control device 50, and measurement units 51 and 52 as the inspection means 4.

[0030] The management device 10 according to this embodiment is configured to be able to communicate with the transport means 2, the measurement means 3, and the inspection means 4 via a network NW. The network NW is a network configured by connecting each device to another device by wire and / or wirelessly, and enables the management device 10 to issue operation instructions to each device, obtain inspection results, etc., and execute processes synchronously between the devices.

[0031] As shown in Fig. 3, the workpiece W to be inspected is input from an input area IN onto the conveyor 21 and transported to each area. Measurement sensors 31 and 32 are arranged in the measurement area MA, and a robot 41 and a measuring unit 51 are arranged in the first inspection area CA1 (rough inspection area: first area CA11, second area CA12) and the second inspection area CA2 (detailed inspection area: first area CA21, second area CA22). The conveyor 21 is also provided with a first switching area TP1 and a second switching area TP2 that switch the destination of the workpiece W, and the workpiece W is transported to the first inspection completion area FA1, the second inspection completion area FA2, or the third inspection completion area FA3.

[0032] 4(a) is a diagram showing an example of a hardware configuration of a terminal device 70 (management device 10). The terminal device 70 includes, as its hardware configuration, a control unit 71, a storage unit 72, a communication unit 73, an input / operation unit 74, and an output unit 75.

[0033] The control unit 71 of the terminal device 70 includes one or more processors such as a CPU, and controls the overall operation processing of the terminal device 70. The storage unit 72 of the terminal device 70 is an HDD, a ROM, a RAM, etc., and stores a management program and data used when the control unit 71 executes processing based on the program. The communication unit 73 of the terminal device 70 is a communication module (e.g., a network card) that controls communication with the network NW and targets of operation control. The input / operation unit 74 of the terminal device 70 is a touch panel, a mouse, a keyboard, etc., and inputs operation requests from users to the control unit 71. The output unit 75 of the terminal device 70 is a liquid crystal display device, a plasma display panel, a CRT (Cathode Ray Tube), an electroluminescence panel, etc., and displays the display processing results of the control unit 71, etc.

[0034] The transport control device 20 is connected to the conveyor 21, the measurement control device 30 to the measurement sensors 31 and 32, the robot control device 40 to the robot 41, and the measurement unit control device 50 to the measurement units 51 and 52, each connected by wire or wirelessly, and configured to enable control, etc.

[0035] 4(b) is a diagram showing an example of a hardware configuration of the control device 90 (management device 10). The control device 90 includes, as its hardware configuration, a control unit 91, a storage unit 92, and a communication unit 93.

[0036] The control unit 91 of the control device 90 includes one or more processors such as a CPU, and controls the overall operational processing of the control device 90. The storage unit 92 of the control device 90 is a HDD, ROM, RAM, etc., and stores the control program and data used when the control unit 91 executes processing based on the program. The communication unit 93 of the control device 90 controls communication with the network NW and targets of operational control. Some or all of the control devices 90 constituting the contamination inspection system 100 may be equipped with elements equivalent to the input unit and output unit of the terminal device 70.

[0037] For example, the transport control device 20 is, for example, a sequencer, a PLC (Programmable Logic Controller), etc., and the robot control device 40 and the measurement unit control device 50 are machine controllers (robot controllers). These may be implemented as software by executing a control application on a general-purpose PC or an industrial PC.

[0038] In this embodiment, the transport control device 20 controls the operation of the conveyor 21, the measurement control device 30 controls the operation of the measurement sensors 31 and 32 and acquires the measurement results, the robot control device 40 controls the operation of the robot 41, the measurement unit control device 50 controls the operation of the measurement units 51 and 52 and acquires the measurement results, and the management device 10 performs display processing of the measurement results. For example, a single device may control multiple or all of the conveyors, measurement sensors, robots, and measurement units. For example, an integrated controller (for example, an integrated controller of the robot and control device) may be configured to control multiple or all of these, or a general-purpose PC or an industrial PC may execute a software robot controller or a software PLC to control multiple or all of these.

[0039] <Management device 10> The management device 10 is connected to at least some of the devices in the contamination inspection system 100, and displays the inspection results. In this embodiment, the management device 10 is connected to the transport control device 20, the measurement control device 30, the robot control device 40, and the measurement unit control device 50, and is configured to be able to operate these devices, such as starting up the devices and starting and stopping their operations, and displays the inspection results stored by the measurement unit control device 50. Note that, for example, the measurement unit control device 50 that controls the measurement units may also function as the management device 10.

[0040] <Work W> The workpiece W refers to an object to be inspected for contamination, and specifically, is equipment and materials such as tools and construction materials, waste, etc. In the contamination inspection system 100 according to the embodiment, the workpiece W is placed on a pallet P and transported by a conveyor 21.

[0041] <Transportation means 2> The transport means 2 includes a conveyor 21 and a transport control device 20 that controls the operation of the conveyor 21. The transport control device 20 controls the conveyor 21 to move the workpiece W to be inspected to each area according to the inspection step.

[0042] The conveyor 21 in the embodiment further includes stopping means 22 (in the embodiment, 22A, 22B, 22C, 22D, and 22E) for stopping the workpiece W in a desired area, and switching means 23 (in the embodiment, 23A and 23B) for switching the destination of the workpiece W.

[0043] The stopping means 22 is a means for stopping the workpiece W in a predetermined area, and in this embodiment, it is a stopper or arm that supports the workpiece W or pallet P moving on the conveyor 21 and inhibits the progress of the conveyor 21. These are provided in the measurement area MA, the first area CA11 and the second area CA12 of the first inspection area CA1, and the first area CA21 and the second area CA22 of the second inspection area CA2. The stopping means 22A in this embodiment stops the workpiece W in the measurement area MA. The stopping means 22B stops the workpiece W in the first area CA11 in the first inspection area CA1, and the stopping means 22C stops the workpiece W in the second area CA12 in the first inspection area CA1. The stopping means 22D stops the workpiece W in the first area CA21 in the second inspection area CA2, and the stopping means 22E stops the workpiece W in the second area CA22 in the second inspection area CA2.

[0044] The stopping means 22 may be incorporated into, for example, a control device (transport control device 20) that controls the operation of the conveyor 21, and may stop the workpiece W in a desired area by controlling the driving of the conveyor 21.

[0045] The switching means 23 is a means for switching the destination of the workpiece W, and in this embodiment, it is a branching device, arm, pusher, transfer device, etc. that comes into contact with the workpiece W or the pallet P and switches the traveling direction on the conveyor 21. The switching means 23A in this embodiment is disposed in the first switching area TP1, and switches the destination to transport the workpiece W to the first inspection completion area FA1 or the second inspection area CA2 based on the inspection result in the first inspection area CA1. The switching means 23B is disposed in the second switching area TP2, and switches the destination to transport the workpiece W to the second inspection completion area FA2 or the third inspection completion area FA3 based on the inspection result in the second inspection area CA2.

[0046] The switching means 23 may be incorporated, for example, in a control device (transport control device 20) that controls the operation of the conveyor 21, and may switch the destination of the workpiece W by controlling the drive, direction of travel, inclination, etc. of the conveyor 21.

[0047] <Measurement method 3> The measurement means 3 performs three-dimensional measurement processing on the workpiece W transported to the measurement area MA by the transport means 2, and acquires shape information including coordinates in the workpiece coordinate system as information indicating the workpiece shape. The measurement means 3 in this embodiment includes measurement sensors 31 and 32 (32A-32D) and a measurement control device 30 that controls their operation and stores the measurement results. The measurement control device 30 controls the operation and measurement processing of the measurement sensors 31 and 32, and stores the measurement processing results in a memory unit. The measurement control device 30 (measurement means 3) passes the shape information to the inspection means 4 based on the measurement processing results.

[0048] 5(a) is a perspective view of the measurement area MA, and FIG. 5(b) is a plan view of the measurement area MA. As shown in FIG. 5, the measurement means 3 in the embodiment further includes a support mechanism 33, which supports one measurement sensor 31 and four measurement sensors 32. The measurement sensors 31 and 32 are stereo cameras for measuring the three-dimensional shape of the workpiece W, and the measurement sensors 31 and 32 in the present embodiment are imaging modules that include, for example, a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor, a lens, and the like, and output the acquired stereo image data to the measurement control device 30. For example, the measurement sensor can use various devices capable of realizing three-dimensional measurement processing, and may be, for example, a sensor module of a TOF (Time Of Flight) type, a light cutting method, a random pattern light method, a phase shift method, or the like, which performs three-dimensional measurement using laser light such as infrared light.

[0049] The measurement sensor 31 is a sensor module supported by a support mechanism 33 and arranged in the zenith (vertical) direction of the workpiece W stopped by the stopping means 22A. The measurement sensor 32 is arranged in the side direction of the workpiece W (diagonally upward in this embodiment) by the support mechanism 33, and is a sensor module that performs three-dimensional measurement processing of the workpiece W. In this embodiment, the measurement sensor 32 is arranged in a diagonal direction in a plan view with respect to the traveling direction of the conveyor 21. The number of measurement sensors 32 and the shooting direction are arbitrary, but it is preferable to arrange two or more measurement sensors 32.

[0050] The measurement control device 30 executes a rotation measurement process based on the measurement results of the measurement sensor 31 that measures from the zenith direction, and obtains the amount of rotation of the workpiece W relative to the reference orientation. In this embodiment, the measurement control device 30 also recognizes the boundaries between the workpiece W and other elements (such as the pallet P and the conveyor 21) based on image data, determines the outer edge of the workpiece W in a planar view, i.e., a rectangular shape in a planar view that surrounds the silhouette shape of the workpiece W in a planar view, and measures the amount of rotation of the determined rectangular shape when the traveling direction of the conveyor 21 is set as the reference orientation. Note that, in this embodiment, a rectangular shape is estimated, but the outer edge shape of the workpiece W in a planar view may be determined by a quadrangle in which not all corners are right angles, or a polygon with three or more sides.

[0051] The measurement control device 30 executes three-dimensional measurement processing based on the measurement results of the measurement sensors 32 (32A to 32D) that measure at least from the side direction, and acquires shape information including coordinates in a work coordinate system as information indicating the work shape. The work coordinate system is a coordinate system that uses a predetermined three-dimensional coordinate in the work W, pallet P, or measurement area MA as a reference point.

[0052] The shape information in this embodiment has a plurality of coordinates (point cloud data) indicating the surface shape of the workpiece W. In this embodiment, the shape information may further include the acquired rotation amount, the side length of the rectangular shape, and the height of the workpiece W calculated based on the point cloud data. The coordinates of the vertices indicating the planar outer edge shape of the workpiece W may be included in the shape information as coordinates distinct from the point cloud data.

[0053] <Testing method 4> The inspection means 4 measures the radiation dose of the workpiece W transported by the transport means 2 to the first inspection area CA1 and the second inspection area CA2, and performs contamination inspection of the workpiece W. The inspection means 4 in this embodiment includes a robot control device 40, a robot 41 (41A to 41D), a measurement unit control device 50, and measurement units 51 (51A to D) and 52 (52A, 52B).

[0054] The robot control device 40 controls the operation of the robot 41 based on the shape information of the workpiece W, and brings the measuring unit 51 or 52, which is an end effector, close to the workpiece W.

[0055] The robot control device 40 performs operation control by transforming the shape information received from the measurement means 3 from the reference point in the inspection area to the inspection coordinate system, determining the allowable range in the inspection area within which the robot 41 will not come into contact with the workpiece W, and transmitting a drive signal indicating at least the displacement angle of the joint to the robot. The drive signal performs operation control, for example, to move an end effector provided at the tip of the robot 41 to the coordinates that are closest to the workpiece W within the allowable range.

[0056] The robot control device 40 converts shape information (workpiece coordinate system: workpiece local coordinate system) of the workpiece W, which is conveyed to each area by the conveyor 21 and stopped by the stopping means 22, into an inspection coordinate system for generating a drive signal for the robot 41. Note that an inspection coordinate system and a reference point may be set for each of the first area CA11 and the second area CA12 in the first inspection area CA1 and the first area CA21 and the second area CA22 in the second inspection area CA2, or calculations may be performed for some or all of the robots 41 using a common inspection coordinate system (e.g., world coordinate system, global coordinate system) and reference point.

[0057] The measurement unit control device 50 controls the operation of the measurement units 51 and 52, receives the measurement results, and stores the measurement results in a memory unit. It performs a judgment based on the measurement results and a threshold value, and passes the judgment result to the transport means 2. The transport means 2 transports the workpiece W to a predetermined area according to the judgment result.

[0058] <Robot 41> The robot 41 is a robot arm having one or more joints and holding a measuring unit 51 for measuring the radiation dose of a workpiece as an end effector movable in three dimensions. The robot 41 in this embodiment is a so-called six-axis multi-joint serial link robot arm. The robot 41 may be, for example, a parallel link robot.

[0059] In this embodiment, the robots 41A and 41B (first robots) are equipped with measuring units 51A and 51B for rough inspection, and the robots 41C and 41D (second robots) are equipped with measuring units 51C and 51D for detailed inspection.

[0060] Four robots 41 are arranged on the inspection line: a robot 41A that inspects the workpiece W transported to the first area CA11 of the first inspection area CA1, a robot 41B that inspects the workpiece W transported to the second area CA12 of the first inspection area CA1, a robot 41C that inspects the workpiece W transported to the first area CA21 of the second inspection area CA2, and a robot 41D that inspects the workpiece W transported to the second area CA22 of the second inspection area CA2. When two or more robots 41 are arranged in each of the first and second areas, it is preferable to arrange the robots 41 so that they sandwich the conveyor 21.

[0061] In this embodiment, for example, when the workpiece W is a hexahedron, in the first area, the front side, one side side, and back side of the workpiece W are inspected using the robot 41 and the measurement unit 51 with respect to the moving direction of the conveyor 21, and in the second area, the other side side and flat side of the workpiece W are inspected using the robot 41 and the measurement unit 51 with respect to the moving direction of the conveyor 21, and the bottom side of the workpiece W is inspected using the measurement unit 52 (bottom measurement unit). Note that, with respect to the moving direction, the front and back sides and the left and right sides may be defined as the left and right sides, and the sides that form a small angle with the moving direction in a plan view (close to 90 degrees) may be defined as the front and back sides, based on the amount of rotation of the workpiece W. Also, the bottom side may be measured in either the first area or the second area, or may be measured in both areas.

[0062] An attachment may be provided at the tip of the robot 41, and a measuring unit may be fixed so as to be freely removable. The robot 41 may be 7-axis, 5-axis, or the like, and the number of axes is not particularly limited. The robot 41 may be one or three, and the number of installed robots is not particularly limited. Preferably, at least two robots 41 are arranged, one robot 41 for roughly inspecting the workpiece W in the first inspection area CA1 and the other robot 41 for detailedly inspecting the workpiece W in the second inspection area CA2. Preferably, a dedicated robot is installed according to the measuring unit. Detailed inspection refers to inspection at a higher resolution than rough inspection. In this embodiment, high resolution does not necessarily mean only inspection using a measuring unit 51 equipped with a measuring device 511 with higher performance. For example, in detailed inspection, inspection may be performed at a larger number of measurement points than rough inspection in order to inspect at a higher resolution. Preferably, in detailed inspection, inspection is performed using a measuring unit 51 with a larger number of detection points per unit area than rough inspection. In addition, in the detailed inspection, in order to inspect with a higher resolution, the measuring unit 51 (the end effector of the robot 41) may be brought closer to the workpiece than in the rough inspection. The configurations of the measuring unit 51 for rough inspection and the measuring unit 51 for detailed inspection will be described later.

[0063] <Measurement units 51 and 52> The measuring unit 51 is fixed to the tip of the robot 41 and detects the radiation dose of the workpiece W. FIG. 6 shows a perspective view of the robot 41 (first robot) equipped with the measuring unit 51 for rough inspection according to this embodiment. The measuring unit 51 detects the radiation dose of the workpiece. The measuring unit 51 for rough inspection is equipped with one measuring device 511 which is a beta-ray plastic survey meter having a flat detection surface. The measuring unit control device 50 measures the radiation dose of the workpiece W using the measuring device 511 and stores the measurement result in a memory unit.

[0064] Fig. 7 shows a perspective view of a robot 41 (second robot) equipped with a measuring unit 51 for detailed inspection according to this embodiment. Fig. 8 shows a perspective view of the measuring unit 51 for detailed inspection according to this embodiment. Fig. 9 is a perspective view of the measuring device.

[0065] The measurement unit 51 for detailed inspection includes a plurality of measuring instruments 511 (three in this embodiment) arranged side by side in the horizontal direction, each of which is a beta-ray plastic survey meter with a flat detection surface, an extension means 512 for independently extending each of the measuring instruments 511, and a proximity detection means 513. The measurement unit control device 50 measures the radiation dose of the workpiece W using the measuring instruments 511, and stores the measurement results in a memory unit. The extension means 512 is, for example, an extendable actuator, and the measurement unit control device 50 is configured to extend and retract the measuring instruments 511 in the front-rear direction in response to an input from the proximity detection means 513. The plurality of measuring instruments 511 arranged side by side are configured to extend and retract in the same direction.

[0066] In this embodiment, the measuring unit 51 for detailed inspection is provided with, as the proximity detection means 513, a proximity sensor 514 that measures the distance to the workpiece W or the like in a non-contact manner in the extension direction of the measuring instrument 511, and a tactile switch 515 that detects contact with the workpiece W. In this embodiment, each of the three measuring instruments 511 is provided with the proximity sensor 514 and the tactile switch 515 as the proximity detection means 513. The tactile switch 515 is, for example, a pressure sensor or the like.

[0067] In this embodiment, each measuring device 511 has a contact portion 516 that covers the detection surface while leaving it open, and input is made to a tactile switch 515 via this contact portion 516. A plurality of proximity sensors 514 (four in the illustrated example) are arranged on contact portion 516 so as to face each other across the detection surface. Contact portion 516 also has a lattice that covers the detection surface while leaving it open.

[0068] After the measuring unit 51, which is an end effector, approaches the workpiece W by controlling the operation of the robot 41, the measuring unit control device 50 brings each measuring device 511 even closer to the workpiece W and determines the measurement position for the radiation dose. The measuring position is determined based on a signal (detection result) from the proximity sensor 514 or the tactile switch 515, a measurement instruction is given to the measuring device 511, and the measurement result is received.

[0069] The measuring unit 52 (bottom surface measuring unit) uses a measuring instrument that is a gamma ray survey meter that is arranged to face the workpiece W across the conveyor 21. In this embodiment, the measuring unit 52A is arranged in the second area CA12, and the measuring unit 52B is arranged in the second area CA22, and they measure the radiation amount on the bottom surface side of the workpiece W across the conveyor 21. The measuring units 51 and 52 only need to be able to detect the amount of radiation, and there is no particular limitation on the type of radiation to be measured (alpha rays, beta rays, gamma rays, etc.).

[0070] <Contamination inspection method> Next, a contamination inspection method will be described together with the operation of the contamination inspection system 100. Fig. 10 is a flowchart of the contamination inspection method according to this embodiment. Fig. 11 is a process flowchart of the rough inspection according to this embodiment, and Fig. 12 is a process flowchart of the detailed inspection.

[0071] In step S1001, a workpiece W to be inspected is input through an input area IN of the inspection line. If another workpiece W is present at least in the measurement area MA, the input workpiece W may be stopped by the stopping means 22 until the other workpiece W is measured and carried out of the measurement area MA.

[0072] In step S1002, when the workpiece W is transported to the measurement area MA, the measurement control device 30 (measurement means 3) acquires shape information of the workpiece W via the measurement sensors 31 and 32 (measurement means 3). After acquiring the measurement information, the conveyor 21 (transportation means 2) transports the workpiece to the first area CA11 of the inspection area (first inspection area CA1) for rough inspection. The measurement control device 30 (measurement means 3) transmits the measured shape information to the robot control device 40 (inspection means 4).

[0073] In step S1003, the robot control device 40 (inspection means 4) converts the coordinates and distances in the workpiece coordinate system included in the shape information into coordinates and distances in an inspection coordinate system for controlling the operation of the robot 41 (inspection means 4).

[0074] <Rough inspection process> In step S1004, a rough inspection is performed on the workpiece W. In this embodiment, as the rough inspection, the radiation amount is measured from six directions when the workpiece W is a hexahedron.

[0075] In step S1101, the robot control device 40 determines the maximum approaching coordinates which are three-dimensional coordinates to which the measuring unit 51 is brought close, and in step S1102, based on the shape information, determines the traveling direction when the measuring unit 51, which is the end effector (EE), is brought close to the workpiece W. Note that these determinations may be made in any order.

[0076] In this embodiment, the radiation dose is measured from six directions when the workpiece W is a square prism. This square prism is determined based on the two-dimensional rectangular shape and the height information of the workpiece, and the direction in which the detection surface of the measuring device 511 (measurement unit 51) moves parallel to the plane and side of this square prism is defined as the traveling direction.

[0077] Therefore, for the plane (upper surface), the vertical downward direction may be predefined as the moving direction. The closest coordinate, which is the destination to which the robot control device 40 moves the measuring unit 51 relative to the plane (upper surface), is a three-dimensional coordinate that passes through a two-dimensional coordinate (e.g., the coordinate of the diagonal intersection or the center of gravity) in the inspection coordinate system in the planar silhouette shape and is a predetermined distance away from the coordinate value corresponding to the height in the vertical direction.

[0078] The robot control device 40 determines a plurality of inspection directions for inspecting the workpiece W based on the amount of rotation of the workpiece W, and determines a drive signal for the measuring unit 51, which is an end effector, to reach the maximum proximity coordinate along the travel direction for each inspection direction. For the sides (front, back, right side, left side), for example, the travel direction is the direction perpendicular to each side of the rectangular shape included in the shape information of the workpiece W. The maximum proximity coordinate is, for example, a two-dimensional coordinate of the center of the side and a three-dimensional coordinate determined by the height coordinate value. For example, the height coordinate value may be an arbitrarily set coordinate value, or may be a coordinate value calculated based on the height (for example, a seating length value that is half the height, etc.).

[0079] When the travel direction and the maximum proximity coordinate are determined, in step S1103, the robot control device 40 generates a drive signal and controls the operation of the robot 41 (first robot). When the operation of the robot 41 is controlled and the measurement unit 51 reaches the maximum proximity coordinate, in step S1104, the measurement unit 51 measures the amount of radiation.

[0080] For each face of the rectangular prism, the operation of the robot 41 is controlled in step S1103, and the radiation dose is measured in step S1104. For the bottom face, the workpiece W is transported to an area (second area CA12) where the measurement unit 52A is installed, and the radiation dose is measured without controlling the robot 41 (first robot).

[0081] In step S1005, the measuring means 3 judges whether detailed inspection is necessary for the workpiece W transported to the rough inspection area using the measurement result by the robot 41 (first robot) equipped with the measuring unit 51 for rough inspection and the first threshold value stored in the memory unit. In this embodiment, if any one of the six-sided inspection results is measured with a radiation dose exceeding the first threshold value, it judges that detailed inspection is necessary (YES in step S1105), and instructs the transport means 2 to transport the workpiece W, and transports it to the second inspection area CA2 (detailed inspection area) by the conveyor 21 and the switching means 23A. If no radiation dose exceeding the first threshold value is measured, it judges that detailed inspection is not necessary (NO in step S1105), and instructs the transport means 2 to transport the workpiece W, and transports it to the first inspection completion area FA1 by the conveyor 21 and the switching means 23A (step S1106). For example, a non-contaminated workpiece W is transported to the first inspection completion area FA1.

[0082] <Detailed inspection process> In step S1007, a detailed inspection is performed on the workpiece W. In this embodiment, the detailed inspection involves measuring the radiation dose from six directions when the workpiece W is treated as a hexahedron. The robot control device 40 determines a plurality of inspection directions for inspecting the workpiece W based on the amount of rotation of the workpiece W, determines a plurality of maximum proximity coordinates and a traveling direction for each inspection direction, and determines a drive signal for the measuring unit 51, which is an end effector, to reach the maximum proximity coordinate along the traveling direction.

[0083] In step S1201, the robot control device 40 determines the maximum approaching coordinates which are three-dimensional coordinates to which the measuring unit 51 is brought close, and in step S1202, based on the shape information, determines the traveling direction when the measuring unit 51, which is the end effector (EE), is brought close to the workpiece W. Note that these determinations may be made in any order.

[0084] In this embodiment, the radiation dose is measured from six directions when the workpiece W is a square prism. This square prism is determined based on the two-dimensional rectangular shape and the height information of the workpiece. In step S1201, the robot control device 40 determines one or more two-dimensional coordinates for determining the three-dimensional closest coordinates for each surface based on the width and height of the plane and side of this square prism and the detection range of the measurement unit 51 stored in a memory unit of the robot control device 40, etc. Then, based on the three-dimensional coordinates indicating the shape of the workpiece W stored as shape information and these two-dimensional coordinates, one or more three-dimensional closest coordinates are determined for each surface.

[0085] In step S1202, the robot control device 40 calculates the inclination of the surface around the maximum proximity coordinates based on the maximum proximity coordinates and multiple three-dimensional coordinate points around the maximum proximity coordinates in the shape information, and determines, for each maximum proximity coordinate, the direction perpendicular to the inclination as the direction of travel.

[0086] As for the bottom surface, the workpiece W is transported to an area (second area CA22) where the measuring unit 52B is installed, and the radiation amount is measured without controlling the robot 41 (second robot).

[0087] When the travel direction and the maximum proximity coordinate are determined, in step S1203, the robot control device 40 generates a drive signal and controls the operation of the robot 41 (second robot). When the robot 41 is controlled and the measuring unit 51 reaches the maximum proximity coordinate, in step S1204, the measuring unit control device 50 (extension means 512) independently extends each measuring device 511. The measuring devices 511 are extended until the length reaches a threshold value, until the measuring devices 511 approach the workpiece W to a distance that reaches the threshold value by the proximity detection means 513, or until contact with the workpiece W is detected by the tactile switch 515, and the measuring unit control device 50 determines the measurement position. Then, in step S1205, the measuring unit 51 measures the radiation dose at the measurement position.

[0088] For each measurement surface, the operation of the robot 41 is controlled in step S1203, the measuring device 511 is extended in step S1204, and the radiation dose is measured in step S1205. For the bottom surface, the workpiece W is transported to an area (second area CA12) where the measuring unit 52A is installed, and the radiation dose is measured without controlling the robot 41 (second robot).

[0089] In step S1005, the measuring means 3 judges contamination of the workpiece W transported to the detailed inspection area using the measurement results by the robot 41 (second robot) equipped with the measuring unit 51 for detailed inspection and the second threshold value stored in the memory unit. In this embodiment, if any one of the six-sided inspection results is measured with a radiation dose exceeding the second threshold value, the measurement means 3 judges contamination (YES in step S1008), instructs the transport means 2 to transport the workpiece W, and transports the workpiece W to the second inspection completion area FA2 by the conveyor 21 and the switching means 23B (step S1009). If no radiation dose exceeding the second threshold value is measured, the measurement means 3 judges contamination (NO in step S1008), instructs the transport means 2 to transport the workpiece W, and transports the workpiece W to the third inspection completion area FA3 by the conveyor 21 and the switching means 23B (step S1010). For example, a non-contaminated workpiece W is transported to the third inspection completion area FA3, and a contaminated workpiece W is transported to the second inspection completion area FA2. Then, the inspection may be repeated until the inspection of all the works W is completed (step S1011).

[0090] Here, in the rough inspection process, there is a possibility that the measuring device 511 cannot approach the workpiece W as much as in the detailed inspection process. Therefore, it is preferable that the first threshold value is set as a threshold value of a radiation amount different from that of the second threshold value. For example, the first threshold value may be set as a threshold value of a radiation amount smaller than that of the second threshold value, and it can be configured to transport only the workpiece W that is definitely not contaminated to the first inspection completion area FA1.

[0091] According to the contamination inspection system 100 of this embodiment, contamination inspection can be performed based on shape information of the workpiece W, and if the workpiece W can be transported on the inspection line, inspection can be performed without storing information about the workpiece shape in advance. Therefore, contamination inspection, which was previously performed manually, can be automated, worker safety can be improved, and variation in inspection quality between workers can be reduced.

[0092] In addition, by conducting the inspection in two steps, a rough inspection and a detailed inspection, the inspection can be carried out efficiently and the inspection time can be shortened.

[0093] In addition, in detailed inspection, multiple measuring devices 511 can be extended independently and brought close to the workpiece W, making it possible to measure the radiation dose in more detail along the three-dimensional shape of the workpiece W without storing information about the workpiece shape in advance. [Explanation of symbols]

[0094] 100: Contamination inspection system 2: Means of transportation 3: Measurement methods 4: Inspection method 10: Management device 20: Transport control device 21: Conveyor 22A~E: Stopping means 23A,B: Switching means 30: Measurement and control device 31: Measurement sensor (top) 32: Measurement sensor (side) 33: Support mechanism 40: Robot control device 41A~D: Robot 50: Measuring unit control device 51A~D: Measuring unit 511:Measuring instrument 512:Extension means 513: Proximity detection means 514: Proximity sensor 515: Tactile switch 516: Contact part 52A,B: Measuring unit 70: Terminal device 71: Control section 72: Storage section 73: Communications Department 74:Operation section 75: Output section 90: Control device 91: Control section 92: Storage section 93: Communications Department IN: Input area MA: Measurement area CA1: First examination area CA11: 1st area CA12: 2nd area CA2: Second inspection area CA21: 1st area TP1: First switching area CA22: 2nd area TP2: Second switching area FA1: First inspection completed area FA2: 2nd inspection completion area FA3: Third inspection completed area NW: Network P: Palette W: Work

Claims

1. 1. A contamination inspection system comprising: The contamination inspection system includes a measuring means, an inspection means, and a transport means, the inspection means has a robot that holds a measurement unit for measuring a radiation dose of a workpiece as an end effector that is movable three-dimensionally; the robot includes a first robot and a second robot capable of measuring radiation doses with a higher resolution than the first robot, the second robot includes the measurement unit having a plurality of measuring devices arranged side by side, each of the measuring devices being extendable and retractable in the same direction and including a proximity detection means in the extension direction; The transport means transports the workpiece, The measurement means performs a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means, and acquires shape information including coordinates in a workpiece coordinate system as information indicating a shape of the workpiece; the inspection means converts the shape information of the workpiece transported to an inspection area by the transport means into an inspection coordinate system for generating a drive signal for the robot, determines an allowable range within which the robot does not come into contact with the workpiece in the inspection area, and transmits the drive signal to the robot; In the second robot, a measurement position of the radiation dose is determined by controlling the measurement unit to approach the workpiece based on the drive signal and controlling the measurement devices to extend based on the detection result of the proximity detection means. Contamination inspection system.

2. The proximity detection means has a proximity sensor that measures distance to the workpiece without contact and a tactile switch that detects contact with the workpiece. The contamination inspection system of claim 1 .

3. the inspection area includes a coarse inspection area and a detailed inspection area; the measuring means determines whether or not a detailed inspection is required for the workpiece transported to the rough inspection area using a measurement result by the first robot and a first threshold value; When the judgment is necessary, the conveying means conveys the work to a detailed inspection area, and when the judgment is not necessary, the conveying means conveys the work to an inspection completion area. The contamination inspection system according to claim 1 or 2.

4. 1. A contamination inspection system comprising: The contamination inspection system includes a measuring means, an inspection means, and a transport means, The inspection means includes a robot that holds a measurement unit for measuring a radiation dose of a workpiece as an end effector that is movable in three dimensions, and a bottom surface measurement unit that inspects a bottom surface of the workpiece, The conveying means has a conveyor on which the bottom surface measuring unit is arranged, The transport means transports the workpiece, The measurement means performs a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means, and acquires shape information including coordinates in a workpiece coordinate system as information indicating a shape of the workpiece; the inspection means converts the shape information of the workpiece transported to an inspection area by the transport means into an inspection coordinate system for generating a drive signal for the robot, determines an allowable range within which the robot does not come into contact with the workpiece in the inspection area, and transmits the drive signal to the robot; The inspection area includes an inspection area where inspection is performed only by the robot, and an inspection area where inspection is performed by the robot and the bottom surface measurement unit. Contamination inspection system.

5. the robot is a robot arm having one or more joints; The inspection means determines at least a displacement angle of the joint as the drive signal and transmits the drive signal to the robot arm. A contamination inspection system according to any one of claims 1 to 4.

6. The measuring means includes a sensor for measuring the workpiece from a side direction and a sensor for measuring the workpiece from a zenith direction, executing the three-dimensional measurement process based on a measurement result of a sensor that measures at least from the side direction; Measure and process the amount of rotation of the workpiece relative to a reference orientation based on the measurement result of the sensor measuring from the zenith direction; The inspection means determines a drive signal based on the shape information and the amount of rotation. A contamination inspection system according to any one of claims 1 to 5.

7. The inspection means determines a plurality of inspection directions for inspecting the workpiece based on the amount of rotation, and determines a drive signal for each of the inspection directions. The contamination inspection system of claim 6.

8. A contamination inspection method using a contamination inspection system, comprising: The contamination inspection system includes a measuring means, an inspection means, and a transport means, the inspection means has a robot that holds a measurement unit for measuring a radiation dose of a workpiece as an end effector that is movable three-dimensionally; the robot includes a first robot and a second robot capable of measuring radiation doses with a higher resolution than the first robot, the second robot includes the measurement unit having a plurality of measuring devices arranged side by side, each of the measuring devices being extendable and retractable in the same direction and including a proximity detection means in the extension direction; A step of the conveying means conveying the workpiece; a step of performing a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means by the measurement means, and acquiring shape information including coordinates in a workpiece coordinate system as information indicating a workpiece shape; a step in which the inspection means converts the shape information of the workpiece transported to an inspection area by the transport means into an inspection coordinate system for generating a drive signal for the robot, determines an allowable range in which the robot does not come into contact with the workpiece in the inspection area, and transmits the drive signal to the robot; The second robot determines a measurement position of a radiation amount by controlling the measurement unit to approach the workpiece based on the drive signal and controlling the measurement device to extend based on a detection result of the proximity detection means. Contamination testing methods.

9. A contamination inspection method using a contamination inspection system, comprising: The contamination inspection system includes a measuring means, an inspection means, and a transport means, The inspection means includes a robot that holds a measurement unit for measuring a radiation dose of a workpiece as an end effector that is movable in three dimensions, and a bottom surface measurement unit that inspects a bottom surface of the workpiece, The conveying means has a conveyor on which the bottom surface measuring unit is arranged, A step of the conveying means conveying the workpiece; a step of performing a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means by the measurement means, and acquiring shape information including coordinates in a workpiece coordinate system as information indicating a workpiece shape; the inspection means converts the shape information of the workpiece transported to an inspection area by the transport means into an inspection coordinate system for generating a drive signal for the robot, determines an allowable range in which the robot does not come into contact with the workpiece in the inspection area, and transmits the drive signal to the robot; The inspection area includes an inspection area where inspection is performed only by the robot, and an inspection area where inspection is performed by the robot and the bottom surface measurement unit. Contamination testing methods.

10. A contamination inspection method in which a contamination inspection system including a conveying means, a measuring means, a robot, and a measuring unit performs a measurement step and an inspection step, comprising: the measurement unit includes a measuring device for measuring a radiation dose of a workpiece, and the robot holds the measurement unit as an end effector that is movable three-dimensionally; the robot includes a first robot and a second robot capable of measuring radiation doses with a higher resolution than the first robot, the second robot includes the measurement unit having a plurality of measuring devices arranged side by side, each of the measuring devices being extendable and retractable in the same direction and including a proximity detection means in the extension direction; The measurement step includes a step of performing a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means by one or more measurement means; The measuring means has a step of acquiring shape information including coordinates indicating a work shape from a three-dimensional measurement processing result, The inspection step includes a step of determining an allowable range within which the robot does not come into contact with the workpiece in an inspection area based on the shape information, and generating a drive signal for the robot. transmitting the drive signal to the robot; In a step in which the robot brings the measuring device closer to the workpiece transported to the inspection area by the transport means based on the drive signal, the second robot determines a measurement position for the radiation amount by controlling the measuring unit to approach the workpiece based on the drive signal and controlling the measuring device to extend based on a detection result by the proximity detection means; The measuring device includes a step of measuring a radiation dose of the workpiece. Contamination testing methods.

11. A contamination inspection method in which a contamination inspection system including a conveying means, a measuring means, a robot, and a measuring unit performs a measurement step and an inspection step, comprising: the measurement unit includes a measuring device for measuring a radiation dose of the workpiece, the robot holds the measurement unit as an end effector movable in three dimensions, and the transport means includes a conveyor on which a bottom surface measurement unit for inspecting a bottom surface of the workpiece is disposed; The measurement step includes a step of performing a three-dimensional measurement process on the workpiece transported to a measurement area by the transport means by one or more measurement means; The measuring means has a step of acquiring shape information including coordinates indicating a work shape from a three-dimensional measurement processing result, The inspection step includes a step of determining an allowable range within which the robot does not come into contact with the workpiece in an inspection area based on the shape information, and generating a drive signal for the robot. transmitting the drive signal to the robot; a step of the robot bringing the measuring device closer to the workpiece transported to an inspection area by the transport means based on the drive signal; The measuring device measures the amount of radiation for the workpiece, The inspection area includes an inspection area where inspection is performed only by the robot, and an inspection area where inspection is performed by the robot and the bottom surface measurement unit. Contamination testing methods.

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