Coating Equipment

Abstract

To provide a coating device capable of further uniformizing film formation of a coating material onto a substrate and capable of further restraining sagging of coating material on the substrate at an edge of a coating area.SOLUTION: A coating device 1 includes: a holding table 2 for holding a substrate 100; a coating unit 4 for discharging a coating material containing an ultraviolet curable resin to the base board 100 held by the holding table 2 to coat it; and a table moving mechanism 5 as a moving mechanism for moving the substrate 100 coated with the coating material from the coating unit 4. The coating device 1 also has an ultraviolet ray irradiation unit 6 for irradiating the base board 100 after being coated with the coating material with an ultraviolet ray during movement of the substrate 100 by the moving mechanism. The holding table 2 is provided with a heating source 22 for heating the holding table 2.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a coating apparatus, and in particular to a coating apparatus that ejects and coats a substrate with coating materials such as organic electroluminescence (hereinafter referred to as "OLED") materials and materials for general flat panel displays (hereinafter referred to as "FPD") such as liquid crystal. [Background technology]

[0002] In order to manufacture OLED panels for FPDs such as 4K TVs and high-definition smartphones, there is a need for inkjet coating equipment that can apply OLED materials to substrates with high precision and efficiency. For example, Patent Documents 1 and 2 disclose examples of inkjet type coating devices that discharge and coat a coating material onto a substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 5671414 [Patent Document 2] Patent No. 5352073 Summary of the Invention [Problem to be solved by the invention]

[0004] In a conventional inkjet coating device, a substrate is generally carried in and out of the coating device by supporting the bottom surface of the substrate with a support arm provided on an actuator such as a robot hand and moving the substrate in and out of the coating device. The substrate coated with the coating material is then transported to a drying treatment device while being supported on the bottom surface by the support arm of the robot hand, and dried. As a result, the coating material hardens and forms a film on the substrate.

[0005] Inkjet coating devices are useful for manufacturing large FPDs. However, as panels become larger and thinner, it becomes difficult to apply a uniform film of coating material to the substrate, which can result in poor quality such as uneven color. That is, since the substrate is partially supported by the support arm of the robot hand, it may bend on the support arm, and the coating material may move on the substrate due to gravity. In addition, the coating material may move on the substrate due to vibrations or wind during transportation by the robot hand. Since the drying of the coating material progresses slightly during transportation, if the coating material moves on the substrate, the coating material will start to harden at a position shifted from its original position, making it difficult to form a uniform film of the coating material on the substrate.

[0006] There is also a risk that the coating material may move on the substrate and spread around the periphery of the coating area, causing larger sagging at the edges of the coating area on the substrate, narrowing the display area of ​​the FPD.

[0007] The present invention has been developed in consideration of the above-mentioned circumstances, and has an objective of providing a coating device that can more uniformly form a film of a coating material on a substrate and can further suppress sagging of the edges of the coating area of ​​the coating material on the substrate. [Means for solving the problem]

[0008] In order to achieve the above object, a coating apparatus according to the present invention comprises: A coating device used for manufacturing flat panel displays such as organic EL panels and liquid crystal panels,the substrate holding apparatus includes a holding table which holds a substrate by suction, a robot hand for loading the substrate onto the holding table at an entrance section, the robot hand having a plurality of suction pads which suction the upper surface of the substrate and which loads the substrate onto the holding table by suction at the entrance section, a robot hand for unloading the substrate from the holding table at an exit section, the robot hand having a plurality of suction pads which suction the upper surface of the substrate and which unloads the substrate from the holding table by suction at the upper surface of the substrate, a table moving mechanism which moves the holding table horizontally to any position between the entrance section and the exit section, a coating section which dispenses a coating material containing an ultraviolet curing resin onto the substrate held on the holding table while the substrate is being moved horizontally by the table moving mechanism, and an ultraviolet irradiation section which irradiates the substrate with the coating material applied with ultraviolet light while the substrate is being moved horizontally by the table moving mechanism, and Effect of the Invention

[0009] According to the present invention, it is possible to provide a coating device that can more uniformly form a film of a coating material on a substrate and can further suppress sagging of the edges of the coating area of ​​the coating material on the substrate. [Brief description of the drawings]

[0010] [Figure 1] 1 is a schematic perspective view showing a coating apparatus according to an embodiment of the present invention; [Diagram 2] FIG. 2 is a schematic side view of the coating device shown in FIG. [Diagram 3] FIG. 2 is a schematic plan view of the coating device shown in FIG. [Figure 4] 1A is a schematic oblique view for explaining the loading of a substrate in the loading section, FIG. 1B is a schematic oblique view for explaining the application of a coating material to a substrate in the coating section and the inspection of the coating state, FIG. 1C is a schematic oblique view for explaining the irradiation of ultraviolet rays to the substrate, and FIG. 1D is a schematic oblique view for explaining the unloading of a substrate in the unloading section. [Diagram 5] FIG. 4 is a functional block diagram for explaining functions of a control unit. [Figure 6] 4 is a flowchart showing the steps of a method for applying a coating material to a substrate. [Figure 7] 1 is a cross-sectional view showing a state in which a sealing film is formed by applying a coating material to a substrate. FIG. [Figure 8] 1 is a diagram showing a cross-sectional surface shape near an edge of a sealing film formed by applying a coating material to a substrate; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an embodiment of the present invention (hereinafter referred to as "the present embodiment") will be described in detail with reference to the drawings. Note that each drawing is merely a schematic illustration to allow a sufficient understanding of the present invention. Therefore, the present invention is not limited to the illustrated examples. In addition, in each drawing, common or similar components are given the same reference numerals, and duplicated explanations thereof will be omitted.

[0012] Fig. 1 is a schematic perspective view showing a coating apparatus 1 according to this embodiment. Fig. 2 is a schematic side view of the coating apparatus 1 shown in Fig. 1. Fig. 3 is a schematic plan view of the coating apparatus 1 shown in Fig. 1. In the following description, as shown in Fig. 1, the longitudinal direction of the stand 11 (the moving direction of the holding table 2) is defined as the X-axis, the width direction of the stand 11 (the direction perpendicular to the X-axis on a horizontal plane) is defined as the Y-axis, and the vertical direction is defined as the Z-axis.

[0013] 1 to 3, a coating apparatus 1 is a coating apparatus that discharges and coats a coating material onto a substrate 100 used in an FPD. The white arrows in the drawings indicate the flow of the substrate 100 when it is carried in and out.

[0014] In order to manufacture an organic EL panel, the coating device 1 of this embodiment is an inkjet type coating device that discharges and coats an organic EL material (sealing material) as a coating material onto a substrate 100 having an organic EL element 102 formed on a base material 101 such as a glass plate, as shown in Fig. 7. Since the quality of the light-emitting layer of the organic EL element 102 constituting the organic EL panel is deteriorated by moisture and oxygen, a sealing film 103 is formed on the organic EL element 102 on the base material 101 by coating the coating material using the coating device 1, to protect the organic EL element 102 from the outside world.

[0015] The sealing film 103 has a three-layer structure in which, for example, an inorganic layer, an organic layer, and an inorganic layer are laminated in this order, and the coating apparatus 1 of this embodiment is used to form the organic layer of the sealing film 103. Note that, in FIG. 7, the inorganic layer is not shown.

[0016] As shown in Figures 1 to 3, the coating device 1 mainly comprises a holding table 2, an entrance section 3a, a coating section 4, a table moving mechanism 5, an ultraviolet irradiation section 6, and an exit section 3b, which are arranged in a room (not shown) whose interior is maintained in an environment of clean dry air (CDA) or N2 (nitrogen gas).

[0017] The holding table 2 holds the substrate 100 placed on the holding table 2. In this embodiment, the holding table 2 has an adsorption section 21 formed of porous ceramics or the like having a large number of fine holes, and is an adsorption table that adsorbs and holds the entire lower surface of the substrate 100 on the adsorption section 21. A vacuum device (not shown) is connected to the adsorption section 21 of the holding table 2, and the adsorption section 21 is put into negative pressure by the operation of the vacuum device, so that the substrate 100 placed on the upper surface of the adsorption section 21 is adsorbed and held by the adsorption section 21.

[0018] The holding table 2 is provided with a heating source 22 (see FIG. 2) for heating the holding table 2. Specifically, the heating source 22 is built into the holding table 2 and disposed below the adsorption portion 21. For example, an electric heater is used as the heating source 22, but the present invention is not limited thereto, and for example, an ultrasonic heating device may be used. The heating source 22 heats the adsorption portion 21 of the holding table 2, thereby heating the coating material applied to the substrate 100 via the substrate 100 held by the holding table 2.

[0019] Heat source 22 is controlled by control unit 8 (see FIG. 5) so that the temperature of the coating material on substrate 100 rises to a predetermined temperature range of 30 to 100° C., preferably 40 to 90° C., and more preferably 60 to 70° C. This is to increase the fluidity of the coating material applied to substrate 100 and quickly flatten the surface of the coating material on substrate 100.

[0020] The table moving mechanism 5 can move the holding table 2 in the horizontal direction to any position between the carry-in section 3a and the carry-out section 3b. In other words, the table moving mechanism 5 can move the substrate 100 while it is held by the holding table 2. Here, the table moving mechanism 5 is a linear motor actuator including a stator (magnet plate) 5a laid on the base 11 and a mover (coil) 5b provided on the lower surface of the holding table 2. The table moving mechanism 5 is configured to be able to move the holding table 2 in the X-axis direction relative to the base 11. However, instead of the linear motor actuator, a linear motion mechanism using a ball screw or a rack and pinion may be used.

[0021] Figure 4(a) is a schematic oblique view for explaining the loading of substrate 100 in loading section 3a, Figure 4(b) is a schematic oblique view for explaining the application of coating material to substrate 100 in coating section 4 and inspection of the coating state, Figure 4(c) is a schematic oblique view for explaining the irradiation of ultraviolet light to substrate 100, and Figure 4(d) is a schematic oblique view for explaining the unloading of substrate 100 in unloading section 3b.

[0022] As shown in Figures 4(a) and 4(d), the carry-in unit 3a carries the substrate 100 onto the holding table 2, and the carry-out unit 3b carries the substrate 100 out from the holding table 2. The carry-in unit 3a and the carry-out unit 3b each have a transport arm 31 that adsorbs the upper surface of the substrate 100 and transports it. The transport arm 31 is provided on a robot hand (not shown). The transport arm 31 is provided with a plurality of suction pads 32, and the suction pads 32 are adapted to adsorb the area of ​​the upper surface of the substrate 100 other than the active area 33 (light emitting area).

[0023] 1 to 3, the coating unit 4 discharges and coats a coating material onto a substrate 100 held on a holding table 2. The coating unit 4 is configured to coat the substrate 100 with the coating material while the table moving mechanism 5 moves the holding table 2 between the carry-in unit 3a and the carry-out unit 3b.

[0024] The coating unit 4 is configured to complete the application of the coating material to the substrate 100 during one movement of the holding table 2 from the carry-in unit 3a to the carry-out unit 3b, but is not limited thereto. The coating unit 4 may be configured to apply the coating material to the substrate 100, for example, during each movement of the holding table 2 from the carry-in unit 3a to the carry-out unit 3b, and then from the carry-out unit 3b to the carry-in unit 3a. In this case, the carry-out unit 3b functions as a turning unit, and the carry-in unit 3a functions as a carry-in / out unit. In this way, the coating unit 4 may be configured to apply the coating material to the substrate 100, during each movement of the holding table 2 moving between the carry-in unit 3a and the carry-out unit 3b multiple times.

[0025] The coating section 4 has a pair of gate-shaped gantries 41, 42 that are provided across the movement path of the holding table 2, and a coating head unit 43 that is installed on each of the pair of gantries 41, 42. The coating head unit 43 is provided on a surface of the gantry 41 that faces the gantry 42, and a surface of the gantry 42 that faces the gantry 41.

[0026] The coating head unit 43 can be moved in the Y-axis direction (horizontal direction perpendicular to the moving direction of the holding table 2) relative to the gantries 41 and 42 by a head unit horizontal movement mechanism 44. The head unit horizontal movement mechanism 44 is a linear motor actuator including a stator (magnet plate) 44a provided on the gantries 41 and 42 and a mover (coil) 44b provided on the coating head unit 43. The coating head unit 43 can be moved in the Z-axis direction relative to the gantries 41 and 42 by a head unit vertical movement mechanism 45 including a servo motor (not shown).

[0027] The movement of the holding table 2 in the X-axis direction by the table moving mechanism 5, the movement of the coating head unit 43 in the Y-axis direction by the head unit horizontal moving mechanism 44, and the movement of the coating head unit 43 in the Z-axis direction by the head unit vertical moving mechanism 45 are each configured to be guided by a linear guide mechanism (not shown) that guides movement in a linear direction.

[0028] The table moving mechanism 5, the head unit horizontal moving mechanism 44, and the head unit vertical moving mechanism 45 are controlled by a control unit 8 (see FIG. 5).

[0029] The coating head unit 43 has a plurality of coating heads 46. In the example shown in Fig. 1 to Fig. 3, the coating head unit 43 has six coating heads 46 arranged in a row along the Y-axis direction, and the rows of the coating heads 46 are arranged in three rows in the X-axis direction.

[0030] Furthermore, a plurality of nozzles (not shown) that discharge the coating material are arranged in a row along the Y-axis direction for one coating head 46, and a plurality of rows of the nozzles are arranged in the X-axis direction (not shown). The coating head 46 is an inkjet type coating head (inkjet head) that uses a piezoelectric element or the like to discharge small droplets from the nozzles with high precision.

[0031] The coating section 4 is provided with a coating material heating device 48 (see FIG. 5) that heats the coating material before it is applied to the substrate 100. Specifically, the coating material heating device 48 heats at least one of the coating head 46, a tank (not shown) that stores the coating material, and a pipe (not shown) that connects the tank and the coating head 46. The coating material heating device 48 is controlled by the control section 8 (see FIG. 5) so that the temperature of the coating material rises to a predetermined temperature range of 30 to 100° C., preferably 40 to 90° C., and more preferably 60 to 70° C. This is to increase the fluidity of the coating material before application, and quickly flatten the surface of the coating material when it is applied to the substrate 100.

[0032] The control unit 8 (see FIG. 5) is capable of controlling, for each nozzle of the coating head 46, whether or not to discharge the coating material, the timing, and the amount of the coating material to be discharged.

[0033] A coating inspection unit 7 that inspects the coating state of the coating material on the substrate 100 is provided downstream of the coating unit 4 in the movement direction of the substrate 100. Here, the coating inspection units 7 are provided on both sides of the coating unit 4 in the X-axis direction so as to accommodate a case in which the coating unit 4 applies the coating material to the substrate 100 separately during each of a plurality of movements of the holding table 2 between the carry-in unit 3a and the carry-out unit 3b. The coating inspection units 7 are configured to inspect the coating state on the substrate 100 while the table movement mechanism 5 moves the holding table 2 between the coating unit 4 and the carry-out unit 3b or the carry-in unit 3a.

[0034] The application inspection unit 7 has a gate-shaped gantry 71 provided across the movement path of the holding table 2, and a plurality of inspection cameras 72 installed on the gantry 71. The inspection cameras 72 are provided on the surface of the gantry 71 facing the gantry 41 (or 42). A camera movement mechanism 73 that moves the inspection camera 72 in the Y-axis direction relative to the gantry 71 is provided on the surface of the gantry 71 facing the gantry 41. The camera movement mechanism 73 is controlled by the control unit 8 (see FIG. 5).

[0035] 4(b), an image captured by the inspection camera 72 of the coating inspection unit 7 is transmitted to the control unit 8 and is used to monitor that there are no uncoated areas (missing drops) during the coating operation of the coating material on the substrate 100 by the coating head 46. In addition, the position of the substrate 100 held on the holding table 2 can be confirmed based on the image captured by the inspection camera 72.

[0036] 1 to 3, the ultraviolet irradiating unit 6 irradiates the substrate 100 coated with a coating material with ultraviolet rays while the substrate 100 is moving. Specifically, the ultraviolet irradiating unit 6 irradiates the substrate 100 coated with a coating material and held by the holding table 2 with ultraviolet rays while the substrate 100 is being moved by the table moving mechanism 5.

[0037] The ultraviolet irradiating unit 6 is disposed downstream of the coating unit 4 and the coating inspection unit 7 in the movement direction of the substrate 100. Here, the coating inspection units 7 are provided on both sides of the coating unit 4 and the coating inspection unit 7 in the X-axis direction so as to accommodate a case in which the coating unit 4 applies the coating material to the substrate 100 separately during each of a plurality of movements of the holding table 2 between the carry-in unit 3a and the carry-out unit 3b. The ultraviolet irradiating unit 6 is configured to irradiate ultraviolet rays onto the substrate 100 on which the coating material has been applied while the table moving mechanism 5 moves the holding table 2 between the coating unit 4 and the carry-out unit 3b or the carry-in unit 3a.

[0038] The ultraviolet irradiating section 6 has a gate-shaped gantry 61 provided across the moving path of the holding table 2, and an ultraviolet irradiating unit 62 installed on the gantry 61. The ultraviolet irradiating unit 62 has a plurality of LEDs that irradiate ultraviolet rays downward, and extends along the Y-axis direction.

[0039] The ultraviolet irradiating unit 6 can be moved in the moving direction of the holding table 2 by the irradiating unit moving mechanism 63. In other words, the irradiating unit moving mechanism 63 functions as a distance variable mechanism that changes the distance between the coating unit 4 and the ultraviolet irradiating unit 6.

[0040] The irradiation unit moving mechanism 63 is a linear motor actuator including a stator (magnet plate) 63a installed on the gantry 11 and a mover (coil) 63b provided on the lower surfaces of both legs of the gantry 61. The irradiation unit moving mechanism 63 is configured to be able to move the ultraviolet irradiator 6 in the X-axis direction relative to the gantry 11. However, instead of the linear motor actuator, a linear motion mechanism using a ball screw or a rack and pinion may be used.

[0041] The movement of the inspection camera 72 in the Y-axis direction by the camera moving mechanism 73, and the movement of the ultraviolet ray irradiation unit 6 in the X-axis direction by the irradiation unit moving mechanism 63 are each configured to be guided by a linear guide mechanism (not shown) that guides movement in a linear direction.

[0042] In this embodiment, a coating material containing an ultraviolet curable resin is used, such as an epoxy resin or an acrylic resin. Therefore, as shown in FIG. 4(c), the coating material on the substrate 100 can be hardened by irradiating ultraviolet light from the ultraviolet irradiation unit 62 of the ultraviolet irradiation section 6 toward the substrate 100 on which the coating material has been applied.

[0043] As shown in Figs. 1 to 3, the coating unit 4 has head recovery devices 47a and 47b on both sides of the stand 11 in the Y-axis direction. The head recovery devices 47a and 47b are devices that eject the coating material from the nozzles of the coating head 46 to prevent the nozzles from clogging and detect the recovery of the clogging. The head recovery devices 47a and 47b are operated, for example, when waiting for a coating operation. When the head recovery devices 47a and 47b are operated, the head unit horizontal movement mechanism 44 and the head unit vertical movement mechanism 45 move the coating head 46 to a position above the head recovery devices 47a and 47b.

[0044] FIG. 5 is a functional block diagram for explaining the function of the control unit 8. As shown in FIG. The control unit 8 is capable of controlling the position of each object moved by the table moving mechanism 5 , the head unit horizontal moving mechanism 44 , the head unit vertical moving mechanism 45 , the irradiation unit moving mechanism 63 , and the camera moving mechanism 73 . The control unit 8 is also capable of controlling the adsorption and detachment (adsorption cancellation) of the substrate 100 on the holding table 2. The control unit 8 is also capable of controlling the presence / absence and timing of ejection of the coating material for each of the nozzles of the coating heads 46. The control unit 8 is also capable of controlling the irradiation of ultraviolet rays by the ultraviolet irradiation unit 62. The control unit 8 is also capable of receiving input of an image captured by the inspection camera 72. The control unit 8 is also capable of controlling the operation of the head recovery devices 47a and 47b. The control unit 8 is also capable of controlling the driving of the heating source 22 and the coating material heating device 48.

[0045] Next, with reference to FIGS. 6 to 8 in addition to FIGS. 1 to 5, a method for applying a coating material to a substrate 100 using the coating apparatus 1 according to this embodiment will be described. Fig. 6 is a flow chart showing the procedure of a method for applying a coating material to the substrate 100. Fig. 7 is a cross-sectional view showing a schematic state in which the substrate 100 is coated with a coating material to form a sealing film 103.

[0046] First, the control unit 8 drives the heating source 22 provided on the holding table 2 and the coating material heating device 48 provided in the coating unit 4 to heat the holding table 2 and the coating material before it is applied to the substrate 100.

[0047] 6, the substrate 100 is carried into and held in the carry-in section 3a (step S1). Here, the control section 8 operates the transfer arm 31 (see FIG. 4(a)), whereby the substrate 100 is carried into and placed on the holding table 2 (see FIGS. 1 to 3). The control section 8 also controls the holding table 2, whereby the substrate 100 is attracted to and held on the holding table 2 heated by the heating source 22.

[0048] Next, the coating material is applied to the substrate 100, and the coating state is inspected (step S2). Specifically, the process is carried out as follows. First, the control unit 8 performs control to discharge and apply a coating material containing an ultraviolet curing resin to the substrate 100 held on the holding table 2. That is, the control unit 8 controls the table moving mechanism 5 to move the substrate 100 in the X-axis direction, controls the head unit horizontal moving mechanism 44 to move the coating head 46 in the Y-axis direction, and controls the coating head 46 to control the timing at which the coating material is discharged from the nozzle.

[0049] Here, organic EL elements 102 including a light-emitting layer are formed in advance on a base material 101 such as a glass plate to form a substrate 100. When a coating material is discharged from the nozzle of the coating head 46, the coating material is applied as a large number of droplets to a coating area on the substrate 100 including the organic EL elements 102.

[0050] In this embodiment, the control unit 8 controls the coating unit 4, so that the coating material is applied to the substrate 100 such that the coating density at the edge of the coating area of ​​the coating material on the substrate 100 is lower than the inside of the coating area. Such control of the coating density is performed, for example, by changing the pattern (density) of dots formed by droplets of the coating material, but is not limited to this, and may be performed, for example, by changing the size of the dots. However, it is also possible to adopt a configuration in which the control of the coating density is omitted.

[0051] Next, the control unit 8 performs control to inspect the coating state of the coating material on the substrate 100. That is, the control unit 8 controls the table moving mechanism 5 to move the substrate 100 in the X-axis direction, and sequentially receives each image captured by each inspection camera 72. The control unit 8 monitors for any missing drops based on each input image.

[0052] Next, the control unit 8 checks whether there is any missing drop of the coating material (OK) in the coating area of ​​the coating material on the substrate 100 as a result of the coating inspection in step S2 (step S3). If it is determined that there is no missing drop (OK) (Yes in step S3), the control unit 8 proceeds to step S4. On the other hand, if it is determined that there is a missing drop (No in step S3), the control unit 8 returns the process to step S2 and causes the part with the missing drop to be repaired.

[0053] When the application of the coating material to the substrate 100 in the coating unit 4 and the inspection of the coating state in the coating inspection unit 7 are completed, the control unit 8 performs control to irradiate ultraviolet rays onto the substrate 100 in a state in which the coating material has been applied. That is, the ultraviolet irradiating unit 6 irradiates ultraviolet rays onto the substrate 100 in a state in which the coating material has been applied and which is held by the holding table 2 while the table moving mechanism 5 is moving the substrate 100 in the X-axis direction (step S4). The coating material on the substrate 100 is cured by the irradiation of ultraviolet rays. The curing with ultraviolet light in step S4 is a preliminary curing step to prevent the coating material from moving on the substrate 100, and is performed before the main curing process described below.

[0054] When irradiation of the coating material on the substrate 100 with ultraviolet light is completed, the control unit 8 continues to move the holding table 2, on which the substrate 100 is held, in the X-axis direction until it is positioned at the discharge unit 3b. When the applicator 4 applies the coating material to the substrate 100 during each of the multiple movements of the holding table 2 between the load unit 3a and the unload unit 3b, the processes of steps S2 to S4 are repeatedly performed.

[0055] Subsequently, the substrate 100 is released from the carrying-out unit 3b and carried out (step S5). Here, the control unit 8 controls the holding table 2 to release the suction of the substrate 100 placed on the holding table 2, and causes the transfer arm 31 (see FIG. 4(d)) to operate to carry out the substrate 100 from the coating apparatus 1.

[0056] The substrate 100 is transferred from the coating apparatus 1 to a curing treatment device (not shown) that performs a main curing treatment. The coating material is fully cured by the main curing treatment in the curing treatment device, and a sealing film 103 having a uniform thickness and a smooth surface is formed on the substrate 100 as shown in FIG.

[0057] As described above, the coating apparatus 1 according to this embodiment includes the holding table 2 that holds the substrate 100, the coating section 4 that discharges and coats the substrate 100 held on the holding table 2 with a coating material containing an ultraviolet curing resin, and the table moving mechanism 5 as a moving mechanism that moves the substrate 100 coated with the coating material from the coating section 4. The coating apparatus 1 also includes an ultraviolet irradiation section 6 that irradiates the substrate 100 coated with the coating material with ultraviolet light while the substrate 100 is moved by the moving mechanism. The holding table 2 is provided with a heat source 22 that heats the holding table 2.

[0058] According to this embodiment, the coating apparatus 1 can apply a coating material to the substrate 100 held on the holding table 2 heated by the heating source 22, and then harden the coating material by irradiating it with ultraviolet light while moving the substrate 100. This improves the fluidity of the coating material applied to the substrate 100 by heating from the heating source 22, and the surface of the coating material on the substrate 100 is quickly flattened, and the coating material is quickly hardened after application. Therefore, the coating material can be preliminarily cured to a certain degree in the original position and maintained in that state while preventing the coating material from moving on the substrate 100 without causing distortion or displacement to the substrate 100. Also, the edge of the coating area of ​​the coating material on the substrate 100 can be prevented from spreading thinly. That is, according to this embodiment, the coating material can be more uniformly formed on the substrate 100, and the sagging of the edges of the coating area of ​​the coating material on the substrate 100 can be more suppressed. This makes it possible to provide a higher quality organic EL panel with more uniform light transmission and suppressed color unevenness. In addition, the yield rate is improved, which reduces manufacturing costs and improves productivity. Furthermore, a wide display area of ​​the organic EL panel can be secured.

[0059] Fig. 8 is a diagram showing the cross-sectional surface shape near the edge of sealing film 103 formed by applying a coating material to substrate 100. In Fig. 8, the solid line shows an example (one example of this embodiment) in which the coating density was controlled so that the coating density at the edge of the coating area of ​​the coating material was lower than the inside of the coating area, the two-dot chain line shows an example in which the control of the coating density was omitted, and the dashed line shows a comparative example. The comparative example in Fig. 8 differs from the example shown by the two-dot chain line in that the preliminary curing process by ultraviolet irradiation in step S4 is not performed.

[0060] 8, in the comparative example, the distance from the edge position to the position where the film thickness falls within the target range, i.e., the drooping of the edge, is large. On the other hand, in the present example, it is found that the drooping of the edge is smaller than that of the comparative example, regardless of whether or not the coating density is controlled.

[0061] Moreover, in this embodiment, the ultraviolet irradiating section 6 irradiates the substrate 100, which has been coated with the coating material and is held by the holding table 2, with ultraviolet rays while the substrate 100 is being moved by the table moving mechanism 5. With this configuration, the substrate 100 is irradiated with ultraviolet rays while being securely held by the holding table 2, so that the coating material can be cured in its original position while further suppressing movement of the coating material on the substrate 100.

[0062] In this embodiment, the holding table 2 is an adsorption table having a porous adsorption portion 21, and adsorbs and holds the entire surface of the substrate 100 on the adsorption portion 21. With this configuration, the entire surface of the substrate 100 to be coated with the coating material can be uniformly controlled to a predetermined pressure. Therefore, it is possible to more reliably prevent the substrate 100 from being distorted or displaced.

[0063] In this embodiment, the coating material is applied to the substrate 100 so that the coating density at the edge of the coating area of ​​the coating material on the substrate 100 is lower than the inside of the coating area. By controlling the coating density in this way, the edge of the coating area of ​​the coating material can be cured more quickly by irradiation with ultraviolet light. This makes it possible to prevent the coating material from flowing from the inside of the coating area to the edge. Therefore, according to the embodiment shown by the solid line in FIG. 8 in which the coating density is controlled, it is possible to suppress the occurrence of protuberances near the edges as in the embodiment shown by the two-dot chain line in FIG. 8.

[0064] The control unit 8 may control the ultraviolet irradiation unit 6 to irradiate ultraviolet light so that the illuminance at the edge of the coating area of ​​the coating material on the substrate 100 is higher than that inside the coating area. Such illuminance control is performed, for example, by changing the number of LEDs that emit light in the part corresponding to the edge of the coating area of ​​the coating material and the other part among the multiple LEDs of the ultraviolet irradiation unit 62, but is not limited to this, and may be performed by adjusting the output. By controlling the illuminance in this way, it is possible to cure the edge part of the coating area of ​​the coating material more quickly.

[0065] Moreover, in this embodiment, the ultraviolet ray irradiation section 6 is disposed downstream in the moving direction of the substrate 100 with respect to the coating section 4. With such a configuration, while the substrate 100 moves from the coating section 4 to the ultraviolet ray irradiation section 6, the surface of the coating material applied to the substrate 100 is ensured to be flattened, and then the coating material can be cured by ultraviolet ray irradiation.

[0066] In addition, in this embodiment, an irradiation unit moving mechanism 63 is provided that functions as a distance variable mechanism that changes the distance between the coating unit 4 and the ultraviolet irradiation unit 6. With this configuration, the degree of planarization of the surface of the coating material applied to the substrate 100 during ultraviolet irradiation can be adjusted by changing the time it takes for the substrate 100 to move from the coating unit 4 to the ultraviolet irradiation unit 6. Therefore, the coating material can be cured by ultraviolet irradiation after more appropriately ensuring the planarization of the surface of the coating material applied to the substrate 100.

[0067] In this embodiment, the coating section 4 is provided with a coating material heating device 48 that heats the coating material before it is applied to the substrate 100. This configuration increases the fluidity of the coating material before application, and allows the surface of the coating material to be quickly flattened when applied to the substrate 100.

[0068] The present invention is not limited to the above-described embodiment, and includes various modified examples. For example, the above-described embodiment has been described in detail to easily explain the present invention, and is not necessarily limited to those including all of the configurations described. In addition, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. In addition, it is possible to add, delete, or replace a part of the configuration of each embodiment with another configuration.

[0069] For example, in the above embodiment, the coating apparatus 1 is described as being used to manufacture an organic EL panel, but the present invention is not limited to this. The coating apparatus of the present invention is also applicable to the manufacture of other FPDs, such as liquid crystal panels.

[0070] In the above embodiment, the irradiation unit moving mechanism 63 that moves the ultraviolet irradiating unit 6 in the moving direction of the holding table 2 is provided as a distance varying mechanism that changes the distance between the coating unit 4 and the ultraviolet irradiating unit 6, but is not limited thereto. For example, instead of the irradiation unit moving mechanism 63, a coating unit moving mechanism that moves the gantries 41, 42 of the coating unit 4 in the moving direction of the holding table 2 may be provided.

[0071] In the above embodiment, the substrate 100 is carried out from the carrying-out unit 3b by releasing the suction of the substrate 100 placed on the holding table 2 and adsorbing the substrate 100 to the suction pad 32 of the transport arm 31 provided on the robot hand, but this is not limited to the above. For example, a floating transport method may be used in which a porous table having many fine holes is used, air is discharged from the many holes to float the substrate 100 on the porous table, and the substrate 100 is moved by a predetermined moving means. This makes it possible to carry out the substrate 100 from the coating apparatus 1 while further suppressing distortion of the substrate 100. Moreover, such a floating transport method may be used for loading the substrate 100 into the loading section 3a, and for moving the substrate 100 from the loading section 3a to the unloading section 3b.

[0072] In the above embodiment, the substrate 100 is configured to be carried into the carry-in unit 3a, but the present invention is not limited to this and the substrate 100 may be directly carried into the coating unit 4. In this case, for example, the gantries 41, 42 of the coating unit 4 are configured to be movable in the X-axis direction, thereby making it possible to change the relative positional relationship between the substrate 100 and the coating unit 4. [Explanation of symbols]

[0073] 1 Coating equipment 2 Retaining table 3a Loading area 3b Unloading section 4. Application section 5 Table movement mechanism 6. Ultraviolet irradiation unit 7 Coating Inspection Department 8. Control Unit 11 Mounting stand 21 Adsorption part 22 Heating source 31 Transport Arm 32 Suction pad 33 Active Area 41,42 Gantry 43 Coating head unit 44 Head unit horizontal movement mechanism 45 Head unit vertical movement mechanism 46 Application head 47a, 47b Head recovery device 48 Coating material heating device 61 Gantry 62 Ultraviolet irradiation unit 63 Irradiation unit moving mechanism 71 Gantry 72 Inspection Camera 73 Camera movement mechanism 100 Substrates 101 Base material 102 Organic EL element 103 Sealing film

Claims

1. A coating device used for manufacturing flat panel displays such as organic electroluminescence (EL) panels and liquid crystal panels, comprising: a holding table that holds the substrate by suction; a loading robot hand including a plurality of suction pads for suctioning an upper surface of the substrate, the robot hand loading the substrate onto the holding table at a loading section by suctioning the upper surface of the substrate; a carrying-out robot hand including a plurality of suction pads for adsorbing an upper surface of the substrate, the carrying-out robot hand adsorbing the upper surface of the substrate from the holding table at a carrying-out section and carrying the substrate out; a table moving mechanism that moves the holding table in a horizontal direction to an arbitrary position between the loading section and the unloading section; a coating unit that discharges and coats a coating material including an ultraviolet curing resin onto the substrate held on the holding table while the substrate is moved in a horizontal direction by the table moving mechanism; an ultraviolet irradiation unit that irradiates the substrate coated with the coating material with ultraviolet rays while the substrate is moved in a horizontal direction by the table moving mechanism; It is equipped with A coating apparatus, characterized in that the suction pads are adapted to suction areas of the upper surface of the substrate other than a light emitting area.

2. 2. The coating apparatus according to claim 1, wherein the table moving mechanism moves the holding table in a horizontal direction so that the unloading portion serves as a turning portion and the loading portion serves as a loading / unloading portion.

3. 3. The coating apparatus according to claim 1, wherein the holding table is provided with a heat source for heating the holding table.

4. 4. The coating apparatus according to claim 1, wherein the curing of the coating material applied to the substrate by the ultraviolet irradiating section is a preparatory curing step performed before a main curing process.

5. The coating device according to any one of claims 1 to 4, characterized in that it is provided with a coating inspection unit that inspects the coating state of the coating material on the substrate while the substrate is moved horizontally by the table movement mechanism with respect to the substrate on which the coating material is applied.

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