High-speed scanning system with acceleration tracking

Abstract

A novel method and device for reducing pixel smear in imaging an object on a moving stage is provided. [Solution] Disclosed herein are high-throughput optical scanning devices and methods of use. The optical scanning devices and methods provided herein can enable high-throughput scanning of continuously moving objects at high resolution despite variations in step speed. This can aid in high-throughput scanning of substrates such as biochips containing fluorophores. Also provided herein are improved optical relay systems and scanning optics.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Application No. 62 / 467,048, filed March 3, 2017, the disclosure of which is incorporated herein by reference in its entirety.

[0002] Technical Field The present invention relates to a method and apparatus for producing a stable image of a continuously moving substrate in an optical system. [Background technology]

[0003] Typical single molecule, single fluorescence sensitive, biological fluorescence optical scanning systems require low noise cameras with long exposure times. Such systems require a highly accurate and stable imaging platform, usually located on granite or equivalent. In addition, such systems utilize "step and repeat" steps, which require high acceleration and deceleration rates as well as high mass to achieve high throughput stable imaging of multiple fields. Large area chips (2000 mm2) can be scanned at high magnification in a short time (~5 min). 2 ) requires a shorter frame imaging time than a step-and-repeat system would allow.

[0004] An "image on the fly" approach is needed to prevent throughput losses due to stage acceleration and settling times inherent in process and repeat systems. Traditional image on the fly applications require a sample stage capable of providing a nearly constant velocity (~+ / -0.05%) and scanning optics that image the sample as it moves. If the stage velocity is not nearly constant throughout the entire movement, the scanning optics will not image the exact same area of ​​the sample as the stage moves. This can result in unclear images (e.g., with pixel smears of ~+ / -3 pixels). This problem is typically solved by utilizing expensive stages that provide a nearly constant velocity by using a heavy stage and powerful stage drives. Unfortunately, this adds to the cost of the product, making it impractical for use as a benchtop system.

[0005] Typical low-cost, compact and / or lightweight stages are constructed with components that have a variety of surface anomalies, such as pits, burrs, cut grooves, divots, and misshapen cavities. These anomalies usually result in non-constant velocities. For example, a burr or divot in the middle of the stage will cause the stage to momentarily slow down and then accelerate before returning to the speed it was at before the anomaly was encountered. Stage velocity variations make the use of such low-cost, small components incompatible with current image on flight high throughput scanning techniques due to the production of unacceptable levels of image blur.

[0006] Therefore, what is needed is an improved optical scanning system that increases the tolerance to velocity variations and enables acquisition of images with increased stability using in-flight imaging that scans at a single fluorescent sensitivity in a small, lightweight, low-cost optical scanning system. Summary of the Invention

[0007] The present invention is based, at least in part, on the discovery of novel methods and devices for reducing pixel smear in the imaging of objects on a moving stage.

[0008] Accordingly, there is provided herein an optical scanning system for imaging a moving substrate, the system comprising: a stage movable along an axis and configured to hold a substrate including a plurality of fields; an objective lens; a camera capable of acquiring an image of one of the plurality of fields through the objective lens, the image being acquired via an optical path defined from one of the plurality of fields through the objective lens to the camera during acquisition of the image; a velocity tracking mirror mounted along the optical path; a first electric motor operably coupled to the velocity tracking mirror for adjusting an angle of the velocity tracking mirror along the axis of stage movement in the optical path; a first electric motor operably coupled to the velocity tracking mirror for adjusting an angle of the velocity tracking mirror along the axis of stage movement in the optical path; a controller module operably coupled to the first electric motor to send a drive signal to the first electric motor, the first drive signal varying in association with a measurement of velocity of stage movement along the axis; an acceleration tracking mirror mounted along the optical path; and a second electric motor operably coupled to the acceleration tracking mirror to adjust an angle of the acceleration tracking mirror along the axis of stage movement in the optical path, the controller module operably coupled to the second electric motor to send a second drive signal to the second electric motor, the second drive signal varying in association with changes in stage velocity along the axis.

[0009] In some embodiments, the first or second drive signal is an electric signal. In some embodiments, the first drive signal comprises a non-sinusoidal waveform. In some embodiments, the non-sinusoidal waveform is a sawtooth wave. In some embodiments, the first electric motor is a galvanometer. In some embodiments, the second electric motor is a piezoelectric actuator. In some embodiments, the first electric motor or the second electric motor is a dual-axis motor.

[0010] In some embodiments, the optical scanning system further comprises a linear displacement sensor operably coupled to the controller module for sending a signal including a position measurement of the substrate or the stage to the controller module, hi some embodiments, the linear displacement sensor is a linear encoder.

[0011] In some embodiments, the first drive signal varies in relation to a velocity determined from the position measurements, hi some embodiments, the second drive signal varies in relation to changes in velocity determined from the position measurements.

[0012] In some embodiments, the first or second signal includes a waveform that varies in relation to the field scan frequency.In some embodiments, the first or second signal includes a waveform that varies in relation to the imaging duty cycle.

[0013] In some embodiments, the movement of the velocity tracking mirror and the acceleration tracking mirror reduces a tracking error of the field by the camera compared to no movement of the acceleration tracking mirror. In some embodiments, the tracking error is reduced to less than 0.1%. In some embodiments, the tracking error is reduced to less than 1 pixel.

[0014] In some embodiments, the velocity tracking mirror and the acceleration tracking mirror are adjacent components along the optical path.

[0015] In some embodiments, the optical scanning system includes a plurality of cameras, hi some embodiments, the optical scanning system further includes a beam splitter mounted along the optical path, the beam splitter mounted along the optical path after the velocity tracking mirror and the acceleration tracking mirror and before the plurality of cameras.

[0016] In some embodiments, the optical scanning system further includes an illumination path, the illumination path extending from an illumination element to one of the plurality of fields.

[0017] In some embodiments, the illumination element includes an excitation laser unit operably mounted to transmit excitation light to the field, and the optical path includes fluorescent light emitted from the field to the camera. In some embodiments, excitation light is not transmitted to the camera. In some embodiments, the illumination element includes an illumination light unit operably mounted to transmit illumination light to the field. In some embodiments, the illumination light unit is mounted directly below the field such that the optical path includes light transmitted through the field to the camera. In some embodiments, the illumination light unit is mounted above or across the field such that the optical path includes light reflected by the field to the camera.

[0018] In some embodiments, the optical scanning system further includes a third electric motor operably attached to an objective lens to move the objective lens along the optical path thereby maintaining focus of the field. In some embodiments, the third electric motor is operably connected to the controller module to receive a third drive signal that varies in relation to movement of the field from a focal plane such that the objective lens is moved by the camera to maintain focus of the field.

[0019] In some embodiments, the optical scanning system further includes at least one additional pair of mirrors including a second velocity tracking mirror and a second acceleration tracking mirror, the pair of mirrors operably mounted to the apparatus to reduce tracking errors of the field by the camera along different axes.

[0020] Also provided herein is a method for imaging multiple fields on a moving substrate, the method comprising the steps of: providing an optical scanning system including a movable stage holding a substrate including multiple fields, a camera, an objective lens, a velocity tracking mirror, and an acceleration tracking mirror; moving the movable stage along an axis, thereby moving the substrate including multiple fields along the axis; and simultaneously with the movement, capturing an image of one of the multiple fields passing through the objective lens using the camera, wherein the image of the field is stabilized during image capture by rotating the velocity tracking mirror in response to a velocity of the movable stage along the axis, and rotating the acceleration tracking mirror in response to changes in the velocity of the movable stage along the axis.

[0021] In some embodiments, the method of imaging multiple fields on a moving substrate further comprises obtaining a measurement of a velocity of the moveable stage, the substrate, or the field along the axis, and adjusting the first drive signal in response to the velocity, In some embodiments, the method of imaging multiple fields on a moving substrate further comprises determining a change in velocity of the moveable stage from the multiple velocity measurements, and adjusting the second drive signal in response to the change in velocity.

[0022] In some embodiments, rotation of the velocity tracking mirror or acceleration tracking mirror is performed based on a measured velocity or velocity change. In some embodiments, the first drive signal varies in relation to a predicted velocity of the stage. In some embodiments, the second drive signal varies in relation to a predicted change in velocity of the stage.

[0023] In some embodiments, the velocity tracking mirror is operably coupled to a first electric motor. In some embodiments, the first electric motor is a galvanometer. In some embodiments, the optical scanning system includes a controller module, and the first electric motor is operably coupled to the controller module.

[0024] In some embodiments, rotating the velocity tracking mirror includes sending a first drive signal from the controller module to the first electric motor, hi some embodiments, the first drive signal varies in relation to a measured or predetermined velocity of the substrate.

[0025] In some embodiments, the acceleration tracking mirror is operably coupled to a second electric motor. In some embodiments, the second electric motor is a piezoelectric actuator. In some embodiments, the second electric motor is operably coupled to the controller module. In some embodiments, the acceleration tracking mirror includes transmitting a second drive signal from the controller module to the second electric motor.

[0026] In some embodiments, the second drive signal varies in relation to changes in a measured or predetermined velocity of the substrate, hi some embodiments, the second drive signal varies in relation to a deviation of said velocity from the velocity used to determine the first drive signal.

[0027] In some embodiments, the velocity tracking mirror and the acceleration tracking mirror are adjacent.

[0028] In some embodiments, the movement of the velocity tracking mirror and the acceleration tracking mirror reduces a tracking error of the field by the camera compared to no movement of the mirror tracking mirror. In some embodiments, the tracking error is reduced to less than 0.1%. In some embodiments, the tracking error is reduced to less than 1 pixel.

[0029] In some embodiments, the method includes adjusting a position of an objective lens along an optical path to maintain focus of the field during the image capture, hi some embodiments, adjusting the objective lens maintains an intensity jump between two adjacent pixels of the image greater than 50%, 60%, 70%, 80%, or 90%.

[0030] In some embodiments, the optical scanning system further includes a second velocity tracking mirror and a second acceleration tracking mirror, and simultaneously with the movement of the movable stage and image capture of one of the plurality of fields, further includes: rotating the second velocity tracking mirror in response to a velocity of the movable stage along a second axis, and rotating the second acceleration tracking mirror in response to changes in the velocity of the movable stage along the second axis, thereby stabilizing imaging of the field with respect to at least two axes simultaneously.

[0031] In some embodiments, the method further includes rotating each of a plurality of pairs of velocity tracking mirrors and acceleration tracking mirrors to stabilize the image about a corresponding plurality of distinct axes.

[0032] In some embodiments, the frequency of image capture is at least 20 Hz, 40 Hz, 60 Hz, 80 Hz, 100 Hz, 120 Hz, 140 Hz, 160 Hz, 180 Hz, or 200 Hz. In some embodiments, the duty cycle of image capture is at least 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, or 10%. In some embodiments, the duty cycle of image capture is at least 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80%, or 90%.

[0033] Also provided herein is a method of reducing positioning errors in an image obtained from a moving stage, the method comprising the steps of: measuring a velocity of the moving stage; determining an error correction from the measured velocity responsive to a difference between the measured velocity of the stage and an expected velocity of the stage; generating a drive signal responsive to the error correction; and transmitting the drive signal to an electric motor operatively connected to the tracking mirror for actuating rotation of the tracking mirror. In some embodiments, the motor is a galvanometer or a piezoelectric actuator.

[0034] Also provided herein is an optical scanning system for imaging a moving substrate, the system including: a stage movable along an axis and configured to hold a substrate including a plurality of fields; an objective lens; a camera capable of acquiring an image of one of the plurality of fields through the objective lens, the image being acquired via an optical path defined from one of the plurality of fields through the objective lens to the camera during acquisition of the image; a motion tracking mirror mounted along an optical path; an electric motor operably coupled to the motion tracking mirror for actuating angular motion of the motion tracking mirror along the axis of stage movement in the optical path; and a controller module operably coupled to the electric motor for sending a drive signal to the electric motor, the controller module being capable of generating the drive signal in response to speed variations in the movement of the stage or substrate along the axis.

[0035] In some embodiments, the apparatus includes a velocity sensor in electrical communication with a controller module, the velocity sensor capable of detecting and transmitting position or velocity information of the substrate or stage to the controller module, the controller module configured to generate the drive signal in response to the velocity signal received from the velocity sensor.

[0036] In some embodiments, the sensor is a linear encoder. In some embodiments, the linear encoder is not a non-interferometric encoder. In some embodiments, the linear encoder is optical, magnetic, capacitive, inductive, or uses eddy current. In some embodiments, the sensor is calibrated for velocity feedback across a moveable stage.

[0037] In some embodiments, the drive signal varies relative to both the predetermined velocity and the measured velocity. In some embodiments, the stage includes a mechanical bearing positioned to facilitate movement of the stage along the axis. In some embodiments, the objective lens has a magnification selected from the group consisting of 5X, 10X, 20X, 30X, 40X, 50X, 60X, 70X, 80X, 90X, or 100X.

[0038] Also provided herein is a method of imaging multiple fields on a moving substrate, the method comprising the steps of: providing an optical scanning system including a movable stage that holds a substrate including multiple fields, an objective lens, a camera, a motion tracking mirror, and an electric motor operatively coupled to the motion tracking mirror for effecting motion of the motion tracking mirror, tracking the motion of the movable stage along the axis during image capture, and returning the motion tracking mirror to an initial position after image capture; moving the movable stage along the axis, thereby moving the substrate including multiple fields along the axis; and scanning the substrate along the axis. generating images for each of M fields of the substrate, the step including performing at least M image capture cycles during movement of the moveable stage, each cycle including: providing cycle M of electrical signals to an electric motor to control movement of the tracking mirror to track a velocity of the moveable stage along the axis; capturing images of the fields while the tracking mirror tracks the moving stage; and determining an average velocity of the fields, the average velocity being used to generate cycle M+1 of drive signals to control movement of the electric motor during cycle M+1.

[0039] In some embodiments, the frequency of image capture is at least 20 Hz, 40 Hz, 60 Hz, 80 Hz, 100 Hz, 120 Hz, 140 Hz, 160 Hz, 180 Hz, or 200 Hz. In some embodiments, the duty cycle of image capture is at least 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, or 10%. In some embodiments, the duty cycle of image capture is at least 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80%, or 90%.

[0040] In some embodiments, the method further includes performing an initial cycle to determine an average velocity of the field, where no image capture occurs. In some embodiments, the M+1 drive signals include a correction that varies in relation to a difference between a measured velocity of the movable stage along the axis and a desired velocity. In some embodiments, determining the average velocity of the field includes measuring one or more positions at a time. In some embodiments, determining the average velocity of the field includes comparing the measured position of the field at the time to a previously measured position and time of another field.

[0041] In some embodiments, the velocity feedback loop duration from measuring the position of field M to providing the M+1 drive signal is 100 ms or less, and may be as little as 2 ms, 90 ms, 80 ms, 70 ms, 60 ms, 50 ms, 40 ms, or 30 ms. In some embodiments, the average velocity is determined by collecting information about the position of the substrate at a frequency of 250 kHz, 200 kHz, 150 kHz, 100 kHz, 50 kHz, 20 kHz, 10 kHz, 5 kHz, 2 kHz, 1000 Hz, 500 Hz, 240 Hz, 120 Hz, 60 Hz, or 30 Hz or less.

[0042] In some embodiments, the images produced have a pixel smear of + / - 1 pixel or less, hi some embodiments, a pixel comprises a cross-sectional distance along said axis of about 150 nm on said substrate.

[0043] In some embodiments, the image is 100 μ The imaging system is generated from a substrate moving at a velocity range ranging from m / sec to 1,000 mm / sec, in some embodiments, the movement of the movable stage along the axis includes a velocity variation in the range of 0.1% to 1% of average velocity. [The present invention 1001] 1. An optical scanning system for imaging a moving substrate, comprising: a. a stage movable along an axis and configured to hold a substrate including a plurality of fields; b. Objective lens; c. a camera capable of acquiring an image of one of the plurality of fields through an objective lens, the image being acquired via an optical path defined from one of the plurality of fields through the objective lens to the camera during acquisition of the image; d. a velocity tracking mirror mounted along said optical path; e. a first electric motor operatively coupled to the velocity tracking mirror for adjusting an angle of the velocity tracking mirror along the axis of stage movement in the optical path; f. a controller module operably coupled to the first electric motor for sending a first drive signal to the first electric motor, the first drive signal varying in association with a measurement of a velocity of stage movement along the axis; g. an acceleration tracking mirror mounted along said optical path; h. a second electric motor operably coupled to the acceleration tracking mirror to adjust an angle of the acceleration tracking mirror along the axis of stage movement in the optical path, the controller module operably coupled to the second electric motor to send a second drive signal to the second electric motor, the second drive signal varying in relation to changes in stage velocity along the axis. 1. An optical scanning system comprising: [The present invention 1002] The optical scanning system of the present invention 1001, wherein the first electric motor is a galvanometer. [The present invention 1003] The optical scanning system of the present invention 1001 or 1002, wherein the first or second drive signal is an electrical signal. [The present invention 1004] Any one of the optical scanning systems of the present inventions 1001 to 1003, characterized in that the first drive signal includes a non-sinusoidal waveform. [The present invention 1005] The optical scanning system of the present invention 1004, wherein the non-sinusoidal waveform is a sawtooth wave. [The present invention 1006] Any one of the optical scanning systems of the present invention 1001 to 1005, characterized in that the second electric motor is a piezoelectric actuator. [The present invention 1007] Any one of the optical scanning systems of the present invention 1001 to 1006, further comprising a linear displacement sensor operably connected to the controller module for sending a signal to the controller module including a position measurement of the substrate or the stage. [The present invention 1008] The optical scanning system of the present invention 1007, wherein the first drive signal varies in relation to a velocity determined from the position measurement. [The present invention 1009] The optical scanning system of the present invention 1007, wherein the second drive signal varies in relation to a change in velocity determined from the position measurement. [The present invention 1010] Any one of the optical scanning systems of the present inventions 1007 to 1009, characterized in that the linear displacement sensor is a linear encoder. [The present invention 1011] Any one of the optical scanning systems of the present inventions 1001 to 1010, wherein the first or second drive signal includes a waveform that varies in relation to a field scanning frequency. [The present invention 1012] Any one of the optical scanning systems of the present inventions 1001 to 1011, wherein the first or second drive signal includes a waveform that varies in relation to an imaging duty cycle. [The present invention 1013] Any one of the optical scanning systems of the present inventions 1001 to 1012, characterized in that movement of the velocity tracking mirror and the acceleration tracking mirror reduces tracking errors of the field by the camera compared to a state in which there is no movement of the acceleration tracking mirror. [The present invention 1014] The optical scanning system of the present invention 1013, wherein the tracking error is reduced to less than 0.1%. [The present invention 1015] The optical scanning system of the present invention 1013, wherein the tracking error is reduced to less than one pixel. [The present invention 1016] Any one of the optical scanning systems of the present inventions 1001 to 1015, characterized in that the velocity tracking mirror and the acceleration tracking mirror are adjacent components along the optical path. [The present invention 1017] Any one of the optical scanning systems of the present invention 1001 to 1016, comprising a plurality of cameras. [The present invention 1018] The optical scanning system of the present invention 1017 further comprises a beam splitter mounted along the optical path, the beam splitter being mounted along the optical path after the velocity tracking mirror and the acceleration tracking mirror and before the plurality of cameras. [The present invention 1019] Any one of claims 1001 to 1018, further comprising an illumination path, the illumination path extending from the illumination element to one of the plurality of fields. [The present invention 1020] The optical scanning system of the present invention 1019, characterized in that the illumination element includes an excitation laser unit operably mounted to transmit excitation light to the field, and the optical path includes fluorescent light emitted from the field to the camera. [The present invention 1021] The optical scanning system of the present invention 1020, wherein the excitation light is not transmitted to the camera. [The present invention 1022] The optical scanning system of the present invention 1019, characterized in that the illumination element includes an illumination light section operably mounted to transmit illumination light to the field. [The present invention 1023] The optical scanning system of the present invention 1022, characterized in that the illumination light unit is mounted directly below the field so that the optical path includes light that is transmitted through the field to the camera. [The present invention 1024] An optical scanning system according to the present invention, characterized in that the illumination light unit is mounted above or across the field so that the optical path includes light reflected by the field to the camera. [The present invention 1025] Any one of the optical scanning systems of the present invention 1001 to 1024, further comprising a third electric motor operably attached to the objective lens for moving the objective lens along the optical path thereby maintaining the focus of the field. [The present invention 1026] The optical scanning system of the present invention 1025, characterized in that the third electric motor is operatively connected to the controller module to receive a third drive signal that varies in association with movement of the field from a focal plane such that the objective lens is moved by the camera to maintain focus of the field. [The present invention 1027] Any one of the optical scanning systems of the present inventions 1001 to 1026, further comprising at least one additional pair of mirrors including a second velocity tracking mirror and a second acceleration tracking mirror, the pair of mirrors being operably mounted to the apparatus to reduce tracking errors of the field by the camera along different axes. [The present invention 1028] Any one of the optical scanning systems of the present invention 1001 to 1027, characterized in that the first electric motor or the second electric motor is a two-axis motor. [The present invention 1029] 1. A method for imaging multiple fields on a moving substrate, comprising: a. providing an optical scanning system, said optical scanning system comprising: i. a movable stage that holds a substrate including a plurality of fields; ii. Camera; iii. Objective lens; iv. Speed ​​tracking mirrors, and v. Acceleration tracking mirror A process comprising: b. moving the movable stage along an axis, thereby moving the substrate including the plurality of fields along the axis; and c. concurrently with said moving, using said camera to capture an image of one of said fields passing through said objective lens, said image of said field being captured by: i. rotating the velocity tracking mirror in response to a velocity of the movable stage along the axis; and ii. stabilizing the acceleration tracking mirror by rotating it in response to changes in the velocity of the movable stage along the axis. A method comprising: [The present invention 1030] The method of claim 1029, further comprising the steps of obtaining a measurement of a velocity of the movable stage, the substrate, or the field along the axis, and adjusting the first drive signal in response to the velocity. [The present invention 1031] The method of any one of claims 1029 to 1030, further comprising the steps of determining a change in velocity of the movable stage from a plurality of velocity measurements, and adjusting the second drive signal in response to the change in velocity. [The present invention 1032] A method according to invention 1030 or 1031, characterized in that the rotation of the velocity tracking mirror or the acceleration tracking mirror is based on the measured velocity or on a change in the measured velocity. [The present invention 1033] The method of any one of claims 1029 to 1032, wherein the first drive signal varies in relation to a predicted velocity of the stage. [The present invention 1034] The method of any one of claims 1029 to 1032, wherein the second drive signal varies in relation to predicted changes in velocity of the stage. [The present invention 1035] The method of any one of claims 1029 to 1034, wherein the speed tracking mirror is operably connected to a first electric motor. [The present invention 1036] The method of claim 1035, wherein the first electric motor is a galvanometer. [The present invention 1037] The method of any one of claims 1035 to 1036, wherein said optical scanning system includes a controller module, and said first electric motor is operably connected to said controller module. [The present invention 1038] The method of claim 1037, wherein the step of rotating the speed tracking mirror includes the step of sending a first drive signal from the controller module to the first electric motor. [The present invention 1039] A method according to claim 1038, wherein the first drive signal varies in relation to a measured or predetermined velocity of the substrate. [The present invention 1040] The method of any one of claims 1029 to 1039, wherein the acceleration tracking mirror is operably connected to a second electric motor. [The present invention 1041] The method of claim 1040, wherein the second electric motor is a piezoelectric actuator. [The present invention 1042] The method of any one of claims 1040 to 1041, wherein said second electric motor is operably connected to said controller module. [The present invention 1043] The method of claim 1042, wherein the step of rotating the velocity tracking / acceleration tracking mirror includes the step of sending a second drive signal from the controller module to the second electric motor. [The present invention 1044] A method according to the invention, characterised in that the second drive signal varies in relation to a measured or predetermined change in the velocity of the substrate. [The present invention 1045] 104. A method according to claim 1044, wherein said second drive signal varies in relation to a deviation of said velocity from a velocity used to determine said first drive signal. [The present invention 1046] The method of any one of claims 1029 to 1045, wherein the velocity tracking mirror and the acceleration tracking mirror are adjacent. [The present invention 1047] Any one of methods 1029 to 1046 of inventions characterized in that movement of the velocity tracking mirror and the acceleration tracking mirror reduces tracking error of the field by the camera compared to a state in which there is no movement of the acceleration tracking mirror. [The present invention 1048] 1047. The method of claim 1047, wherein the tracking error is reduced to less than 0.1%. [The present invention 1049] A method according to claim 1047, wherein the tracking error is reduced to less than one pixel. [The present invention 1050] Any one of methods 1029 to 1049 of the present invention, further comprising the step of adjusting the position of an objective lens along the optical path to maintain focus of the field during the image capture. [The present invention 1051] The method of the present invention 1050, characterized in that said adjustment of said objective lens maintains an intensity jump between two adjacent pixels of said image of more than 50%, 60%, 70%, 80%, or 90%. [The present invention 1052] The optical scanning system further includes a second velocity tracking mirror and a second acceleration tracking mirror, and contemporaneously with the movement of the movable stage and image capture of one of the plurality of fields: a. rotating a second velocity tracking mirror in response to a velocity of a stage movable along a second axis; and b. rotating the second acceleration tracking mirror in response to velocity variations of the movable stage along the second axis, thereby stabilizing imaging of the field with respect to at least two axes simultaneously. Any one of the methods of the present invention 1029 to 1051, further comprising: [The present invention 1053] Any one of methods 1029 to 1052 of the present invention, further comprising the step of rotating each of a plurality of pairs of velocity tracking mirrors and acceleration tracking mirrors to stabilize the image relative to a corresponding plurality of separate axes. [The present invention 1054] Any one of the methods of inventions 1029 to 1053, characterized in that the frequency of image capture is at least 20 Hz, 40 Hz, 60 Hz, 80 Hz, 100 Hz, 120 Hz, 140 Hz, 160 Hz, 180 Hz, or 200 Hz. [The present invention 1055] Any one of methods 1029 to 1054 of the present invention, characterized in that the image capture duty cycle is at least 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80%, or 90%. [The present invention 1056] 1. A method for reducing positioning errors in an image acquired from a moving stage, comprising: a. measuring the velocity of the moving stage; b. determining an error correction from the measured speed as a function of a difference between the measured speed of the stage and a predicted speed of the stage; c. generating a drive signal in response to the error correction; and d. transmitting the drive signal to an electric motor, the electric motor operatively connected to the tracking mirror for actuating rotation of the tracking mirror; The method according to claim 1, further comprising: [The present invention 1057] The method of claim 1055, wherein the motor is a galvanometer or a piezoelectric actuator. [The present invention 1058] 1. An optical scanning system for imaging a moving substrate, comprising: a. a stage movable along an axis and configured to hold a substrate including a plurality of fields; b. Objective lens; c. a camera capable of acquiring an image of one of the plurality of fields through an objective lens, the image being acquired via an optical path defined from one of the plurality of fields through the objective lens to the camera during acquisition of the image; d. A motion tracking mirror mounted along the optical path; e. an electric motor operatively coupled to the motion tracking mirror for actuating angular motion of the motion tracking mirror along the axis of stage movement in the optical path; and f. a controller module operatively coupled to the electric motor for sending a drive signal to the electric motor, the controller module capable of generating the drive signal in response to velocity variations in the movement of the stage or substrate along the axis. 1. An optical scanning system comprising: [The present invention 1059] The apparatus includes a velocity sensor in electrical communication with a controller module, the velocity sensor detecting position or velocity information of a substrate or stage, and information The optical scanning system of the present invention 1058 can transmit a velocity signal to a controller module, the controller module being configured to generate the drive signal in response to the velocity signal received from the velocity sensor. [The present invention 1060] The optical scanning system of the present invention 1059, wherein the sensor is a linear encoder. [The present invention 1061] The optical scanning system of the present invention 1060, characterized in that the linear encoder is a non-interferometric encoder. [The present invention 1062] The optical scanning system of the present invention 1060 or 1061, characterized in that the linear encoder is optical, magnetic, capacitive, inductive, or uses eddy current. [The present invention 1063] Any one of the optical scanning systems of the present invention 1059 to 1062, characterized in that the sensor is calibrated for velocity feedback across the movable stage. [The present invention 1064] Any one of the optical scanning systems of the present inventions 1058 to 1063, characterized in that the drive signal varies in relation to both the predetermined velocity and the measured velocity. [The present invention 1065] The optical scanning system of any one of claims 1058 to 1064, wherein the stage includes a mechanical bearing positioned to facilitate movement of the stage along an axis. [The present invention 1066] Any one of the optical scanning systems of the present inventions 1058 to 1065, characterized in that the objective lens has a magnification selected from the group consisting of 5X, 10X, 20X, 30X, 40X, 50X, 60X, 70X, 80X, 90X, or 100X. [The present invention 1067] 1. A method for imaging multiple fields on a moving substrate, comprising: a. providing an optical scanning system, said optical scanning system comprising: i. a movable stage that holds a substrate including a plurality of fields; ii. Objective lens; iii. Camera; iv. Motion tracking mirrors, and v. including an electric motor operatively coupled to the motion tracking mirror for effecting movement of the motion tracking mirror, tracking the movement of a movable stage along the axis during image capture, and returning the motion tracking mirror to an initial position after image capture; b. moving the movable stage along an axis, thereby moving the substrate including the plurality of fields along the axis; and c. generating images for each of the M fields of the substrate, comprising performing at least M image capture cycles during movement of the movable stage along the axis, each cycle comprising: i. providing M cycles of electrical signals to an electric motor to control movement of said tracking mirror to track a velocity of said movable stage along said axis; ii. capturing an image of the field while the tracking mirror tracks the moving stage; and iii. determining an average speed of the field, the average speed being used to generate a cycle M+1 drive signal for controlling movement of the electric motor during cycle M+1. The method according to claim 1, further comprising: [The present invention 1068] 1067. The method of claim 1067, wherein the frequency of image capture is at least 20 Hz, 40 Hz, 60 Hz, 80 Hz, 100 Hz, 120 Hz, 140 Hz, 160 Hz, 180 Hz, or 200 Hz. [The present invention 1069] The method of claim 1067 or 1068, wherein the duty cycle of the image capture is at least 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80%, or 90%. [The present invention 1070] The method of any one of claims 1067 to 1069, further comprising the step of performing an initial cycle to determine an average velocity of the field, where no image capture takes place. [The present invention 1071] Any one of methods of inventions 1067 to 1070, characterized in that the M+1 drive signal includes a correction factor that varies in relation to the difference between the measured velocity and a desired velocity of the movable stage along the axis. [The present invention 1072] A method according to any one of claims 1067 to 1071, characterised in that the step of determining the average velocity of the field comprises measuring one or more positions of the field at a time. [The present invention 1073] The method of claim 1072, wherein the step of determining the average velocity of the field includes comparing the measured position of the field at the time with a previously measured position and time of another field. [The present invention 1074] Any one of methods 1067 to 1073 of the present invention, characterized in that the velocity feedback loop duration from measuring the position of field M to providing the drive signal for field M+1 is less than 100 ms, 90 ms, 80 ms, 70 ms, 60 ms, 50 ms, 40 ms, 30 ms, 20 ms, 15 ms, 10 ms, 5 ms, or 2 ms. [The present invention 1075] Any one of methods of inventions 1067 to 1074, characterized in that the average velocity is determined by collecting information regarding the position of the substrate at a frequency of 250 kHz, 200 kHz, 150 kHz, 100 kHz, 50 kHz, 20 kHz, 10 kHz, 5 kHz, 2 kHz, 1000 Hz, 500 Hz, 240 Hz, 120 Hz, 60 Hz, or 30 Hz or less. [The present invention 1076] The method of any one of claims 1067 to 1075, wherein the generated image has pixel smear of less than + / - 1 pixel. [The present invention 1077] 1076. The method of claim 1076, wherein said pixel comprises a cross-sectional distance along said axis on said substrate of about 150 nm. [The present invention 1078] The image is 100 μ The method of claim 1076 or 1077, wherein the photoresist is produced from a substrate moving at a speed range of from m / sec to 1,000 mm / sec. [The present invention 1079] A method according to any one of claims 1067 to 1078, wherein the movement of the movable stage along the axis includes a velocity variation in the range of 0.1% to 1% of the average velocity. [Brief description of the drawings]

[0044] The foregoing and other objects, features and advantages will become apparent from the following description of specific embodiments of the invention, as illustrated in the accompanying drawings, in which like reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of various embodiments of the invention. [Figure 1] 1 is a diagram of components of an optical scanning device along an optical path from a substrate to a detector that includes an acceleration tracking mirror and a velocity tracking mirror (i.e., a dual mirror embodiment) according to an embodiment of the present invention. [Diagram 2] 1 illustrates a sawtooth waveform for controlling the movement of a tracking mirror of a moving stage, such as a velocity tracking mirror, and its correlation to changes in position of a movable stage along an axis over time, according to one embodiment. [Diagram 3] We provide example waveforms that can be used to generate drive signals for the velocity tracking mirror and the acceleration tracking mirror (in a dual mirror embodiment) to stabilize an image of a moving substrate based on measured or predicted stage velocity errors and the predicted stage velocity. [Figure 4] 1 is a diagram of components of an optical scanning device along an optical path from a substrate to a detector that includes one motion tracking mirror (i.e., a single mirror embodiment) according to an embodiment of the present invention. [Diagram 5] Provided are example waveforms that may be used to generate drive signals for a motion tracking mirror (in a single mirror embodiment) to stabilize an image of a moving substrate based on measured or predicted stage velocity errors and the predicted stage velocity. [Figure 6] An overview of one possible implementation of a field level feedforward mechanism is provided to provide a correction to adjust the drive signal provided to a mirror of a movable device in response to velocity variations of a substrate or a movable stage. [Figure 7A] 7A is a diagram of the components of the controller module and its connections to certain components of the apparatus, including an adjustable tracking mirror and a device for sensing the position of the substrate or moveable stage. The connections are indicated by arrows. The solid arrows indicate signals sent from the controller module to each component. The dotted arrows indicate paths for measurement of stage or substrate velocity variations and translation to drive signals that control motors operatively connected to the acceleration or motion tracking mirrors. The dashed arrows indicate the movement of light along an optical path between components of the optical scanning system. FIG. 7A relates to a dual mirror embodiment. [Figure 7B] FIG. 7B is a diagram of the components of the controller module and its connections to certain components of the apparatus, including an adjustable tracking mirror and a device for sensing the position of the substrate or moveable stage. The connections are indicated by arrows. The solid arrows indicate signals sent from the controller module to each component. The dotted arrows indicate paths for measurement of variations in velocity of the stage or substrate and translation to drive signals that control motors operatively connected to the acceleration tracking mirror or motion tracking mirror. The dashed arrows indicate the movement of light along an optical path between components of the optical scanning system. FIG. 7B relates to a single mirror embodiment. [Figure 8A] 1 provides a flow chart of a method of operating a dual tracking mirror embodiment of the apparatus to capture a stable image of a field of a moving substrate. [Figure 8B]1 provides a flow chart of a method of operating a single tracking mirror embodiment of the apparatus to capture a stable image of a field of a moving substrate. [Figure 9A] Illustrates an example of pixel smearing for images +1 and +2, respectively. Each square represents a pixel. [Figure 9B] Illustrates an example of pixel smearing for images +1 and +2, respectively. Each square represents a pixel. [Figure 10] 1 illustrates an embodiment of an optical scanning system that includes components for controlling and archiving data from the system. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0045] The details of various embodiments of the invention are set forth in the following description. Other features, objects, and advantages of the invention will become apparent from the following detailed description, drawings, and claims.

[0046] As used herein, the term "objective lens" refers to an element or group of elements in an optical scanning system that includes one or more lenses and is configured and operable to magnify an electromagnetic (e.g., optical) signal. In some embodiments, the objective lens has a numerical aperture (NA), such as an NA in the range of 0.6 to 1.5, and performs imaging via air immersion or liquid immersion (e.g., water, oil, or other immersion fluid). In various embodiments, the objective lens can have a focal length in the range of 2 mm to 25 mm.

[0047] As used herein, the term "substrate" refers to an object with multiple distinct features that are targets for imaging. These features may or may not be arranged in a spatially uniform pattern. For example, in some embodiments, the substrate comprises a non-planar structure with a surface, such as a bead or well, to which target biomolecules are attached as target features. In another example, in some embodiments, the substrate comprises an array chip. An array chip (i.e., array, microarray, or chip) refers to a solid support having a surface that carries attachment sites to which target biomolecules (e.g., proteins or nucleic acids) are attached as target features, but preferably has a surface that is generally planar or substantially planar.

[0048] As used herein, the term "field" refers to the area of ​​a substrate that can be captured by a camera in a single image. A field on a substrate relates to the field of view of the camera. An entire substrate can be scanned by taking images of multiple fields on the substrate.

[0049] As used herein, the term "optical path" or "light path" refers to the path of light or other electromagnetic radiation from a source to a camera sensor. Steering the optical path by mirrors along the optical path allows for the capture of still images from a continuously moving substrate with random or regular velocity variations.

[0050] As used herein, the term "scanning" refers to an operation for observing and recording the condition of a substrate.

[0051] As used herein, the term "velocity tracking mirror" refers to a mirror that is configured to track the movement of the substrate at a velocity. This velocity may be fixed or variable. The velocity may be predetermined or may include systematic or random errors in the velocity.

[0052] As used herein, the term "velocity tracking error" refers to an error in tracking the velocity of a substrate or stage by a velocity tracking mirror, which in some embodiments is the result of a deviation of the velocity of the substrate from the velocity being tracked by the velocity tracking mirror.

[0053] As used herein, the term "acceleration tracking mirror" refers to a mirror operatively connected to an optical scanning system to rotate in response to a non-linear, such as systematic or random errors in the stage velocity, or any other deviation from an expected or constant stage velocity. In some embodiments, the acceleration tracking mirror is paired with a velocity tracking mirror to provide a still image of a moving substrate with reduced pixel smear.

[0054] As used herein, the term "electric motor" refers to a device that converts an electrical signal into physical movement, such as a motor that rotates in response to electrical energy. In some embodiments, the electric motor provides a rotation mechanism for rotating a velocity tracking mirror or an acceleration tracking mirror. The electric motor can be operatively coupled to a controller module that transmits an electrical signal or a drive signal to achieve controlled movement of the electric motor. The electric motor may be a galvanometer or a piezoelectric actuator. As used herein, "galvanometer" refers to a coil in a magnetic field that moves in response to an electrical signal. This can act as an electric motor to actuate the rotational movement of the tracking mirror. As used herein, the term "piezoelectric actuator" refers to a type of electric motor that is based on a change in the shape of a piezoelectric material when an electric field is applied. Although an electric motor is referred to herein as a preferred embodiment, other devices for providing actuation of some components of the invention described herein, such as those based on hydraulic, pneumatic, or magnetic principles, can also be used.

[0055] As used herein, the term "controller module" refers to one or more components in an apparatus that provides control to components of an optical scanning system. In particular, the controller module includes apparatus that controls the movement of electric motors operatively connected to one or more tracking mirrors. The controller module thus generates and communicates drive signals for these electric motors. The drive signals may be generated from preprogrammed or observed stage or substrate movements. Drive signals may be generated from information collected by position or velocity sensors, such as encoders, and used to generate velocity measurements that are then translated into responsive drive signals to control the movement of one or more tracking mirrors.

[0056] As used herein, the term "electrical signal" or "drive signal" refers to a controlled amount of energy sent to an electric motor that the motor converts into physical movement. For example, a galvanometer can track a movable stage and achieve rotation of a mirror to return it to its original position after imaging is completed by sending a drive signal that resembles a sawtooth wave.

[0057] As used herein, the term "duty cycle" refers to the percentage of time that the tracking mirror is tracking the stage and the camera is imaging the field (as opposed to the retrace time, when the tracking mirror is returning to its initial position).

[0058] As used herein, the term "imaging frequency" or "image capture frequency" refers to the frequency of image capture of a field on a substrate.

[0059] As used herein, the term "pixel smear" refers to a measure of pixel propagation along an axis due to movement of an imaged object during image capture. A large amount of pixel smear produces an image that is less sharp and has a larger amount of blur. In some embodiments, pixel smear is produced by uncompensated velocity variations in the optical path or in the movement of one or more tracking mirrors. Provided herein, in some embodiments, is an apparatus and method for capturing images of a continuously moving substrate on a moveable stage with velocity variations, where the amount of pixel smear along a major axis of substrate movement is mitigated by rotation of one or more tracking mirrors along the optical path.

[0060] As used herein, the term "logic" refers to a set of instructions that, when executed by one or more processors (e.g., CPUs) of one or more computing devices, are operable to perform one or more functions and / or return data in the form of one or more results or input data used by other logic elements or elements that control the operation of mechanical devices (e.g., servos, etc.). In various embodiments and implementations, a given logic may be implemented as one or more software components that are executable by one or more processors (e.g., CPUs), as one or more hardware components such as application specific integrated circuits (ASICs) and / or field programmable gate arrays (FPGAs), or as any combination of one or more software components and one or more hardware components. A particular logic software component may be implemented, without limitation, as a stand-alone software application, as a client in a client-server system, as a server in a client-server system, as one or more software modules, as one or more libraries of functions, and as one or more statically and / or dynamically linked libraries. During execution, instructions of a particular logic may be embodied as one or more computer processes, threads, fibers, and other suitable runtime entities that may be instantiated in the hardware of one or more computing devices and that may have allocated computing resources that may include, but are not limited to, memory, CPU time, storage space, and network bandwidth.

[0061] Optical scanning system and method of use Provided herein is a lightweight, cost-effective system for high frame rate image capture of a portion or field of a substrate with high sensitivity while the substrate moves on a movable stage. This optical scanning system is capable of high speed, single molecule, single fluorescence imaging, which to date has only been provided by heavy, expensive systems that require precise control of stage movement, or through slower step and repeat optical scanning systems. The optical scanning system provided herein can be used as an image-in-flight system (continuously moving stage) by using scanning optics to compensate for stage velocities that vary by 1% to 10% (typically resulting in image blurring of at least some pixels). This compensation can result in image equivalents of tracked step velocities with less than 0.1% variation or pixel smearing of the image of + / - 1 pixel or less. Thus, the scanning optics disclosed herein provide a system for compensating for velocity errors (i.e. velocity variations) such as local acceleration and deceleration of the movable stage or substrate to provide a stable image field of the camera during imaging of a continuously moving movable stage to reduce pixel smear.

[0062] The optical scanning system disclosed herein uses a rotatable scanning optics and control system to stabilize the optical path between the substrate and the detector while the substrate is moving. The rotatable scanning optics rotates in response to the stage velocity and stage velocity variations (or the substrate velocity and substrate velocity variations). The scanning optics provided by one embodiment of an optical scanning system with dual tracking mirrors is shown in FIG. 1. In this embodiment, the optical scanning system includes a movable stage (110) configured to move a mounted substrate (120) along an axis. The substrate (120) includes one or more fields (121) that are individually imaged by the optical scanning system as the stage moves continuously. The substrate is illuminated by an illumination mechanism (not shown), and light from the substrate moves along an optical path through an objective lens (130). The image of the moving substrate is stabilized to an image sensor by a velocity tracking mirror (140) and an acceleration tracking mirror (150). The image of the fields (121) is captured by a camera (160) that includes an image sensor. The velocity tracking mirror (140) is configured to rotate about an axis parallel to the plane of the image field. Rotation of the velocity tracking mirror (140) adjusts the optical path to stabilize an image of a field moving at a predetermined velocity during image capture by the camera (160). The acceleration tracking mirror (150) is configured to rotate about an axis parallel to the plane of the image field. The acceleration tracking mirror (150) rotates in response to velocity variations (i.e., acceleration) of the motion stage or substrate. This rotation adjusts the optical path to stabilize the image by compensating for velocity variations in the motion of the stage and / or substrate along the axis.

[0063] The optical scanning system in various embodiments is configured to image, in a scanning fashion, a continuously moving object, such as a substrate mounted on a movable stage. In such embodiments, the substrate is typically mounted (or otherwise positioned) on a movable stage that is coupled to one or more mechanisms (e.g., motors or other actuators) capable of continuously moving the substrate under the objective lens while the camera captures images of a field of the substrate. The movable stage is configured and operable to move the substrate along a direction perpendicular to the optical axis of the objective lens. In some embodiments, the axis of movement of the movable stage is orthogonal to the operation of an autofocus type mechanism that typically moves the imaged object and / or objective along the optical axis of the objective lens.

[0064] In various embodiments, the speed of the movable stage may range from 0.1 mm per second to 1000 mm per second (or more). In some embodiments, the speed of the movable stage may range from 10 mm per second to 100 mm per second. In some embodiments, the movable stage (and thus the substrate mounted thereon) may be configured to move at a constant velocity, but the stage is still subject to velocity fluctuation errors that are compensated for by the optical systems provided herein. In some embodiments, the movable stage moves at a velocity between 10 and 50 mm per second. In some embodiments, the speed of the movable stage is about 25 mm per second. In other embodiments, the movable stage may be configured to move at a non-constant velocity. This non-constant velocity may also be subject to fluctuation errors that are compensated for by the optical systems provided herein.

[0065] In some embodiments, a mechanism may be used to facilitate movement of the movable stage at a given desired speed. Such a mechanism may include one or more components that induce the movement (e.g., linear motors, lead screws, screw motors, speed screws, etc.) and one or more components that reduce friction (e.g., various types of bearings, etc.).

[0066] For example, in some embodiments, a movable stage may use metal bearings (e.g., ball bearings, cylinder bearings, cross-roll ball bearings, etc.) having a repeatability of a few microns to facilitate the movement of the movable stage at a given desired velocity. Repeatability is essentially the effect of rolling a metal bearing in oil, which bounces as it rotates, and such bouncing introduces jitter into the motion of an object moving on the bearing. The "repeatability" of such motion can only be constant above a certain range, since two metal bearings can only bounce in the same way within a certain tolerance. Thus, embodiments using ball bearings typically have larger velocity variations, thus introducing image smearing (e.g., pixel smearing). However, stages using ball bearings offer various advantages, including being lighter, smaller, and less expensive than comparable air bearing stages. Thus, according to some embodiments, improved scanning optics are provided herein for reducing image smearing or pixel smearing due to velocity variations of movable stages, including stages with ball bearings or other components that provide motion subject to some velocity variations.

[0067] In some embodiments, the velocity of the movable stage varies from the intended velocity by more than 0.1% during the continuous optical scan. In some embodiments, the velocity of the movable stage varies from the intended velocity by more than 0.5% during the continuous optical scan. In some embodiments, the velocity of the movable stage varies from 0.1% to 1% during the continuous optical scan. In some embodiments, the optical scanning system provided herein reduces blurring or pixel smear of images from a movable stage with velocity variations of 0.1% to 1% to less than 0.1%. In some embodiments, pixel smear for a stable image is less than + / - 1 pixel. In some embodiments, the movable stage is configured to move the substrate in a continuous motion in a first known lateral direction relative to the objective lens while a camera with a two-dimensional full frame electronic sensor generates a two-dimensional image. In some embodiments, the movable stage is configured to move in a continuous serpentine manner to image multiple rows or columns of fields on the substrate.

[0068] In some embodiments, the substrate is attached (or placed) on a moveable stage. In some embodiments, the substrate comprises an array having target biomolecules disposed thereon. In some embodiments, the substrate comprises a number of distinct features that are targets for imaging, such as, for example, array chips. In some embodiments, the substrate comprises a randomly positioned array of targets for imaging.

[0069] In some embodiments, the substrate includes a number of distinct features that are targets for imaging. For example, in some embodiments, the substrate includes a non-planar structure with a surface, such as a bead or well, to which the target biomolecule is attached as a target feature. In some embodiments, the substrate includes an array chip. In some embodiments, the array chip is a solid support having a surface, e.g., a planar or substantially planar surface, carrying attachment sites to which the biomolecule is attached as a target feature. In some embodiments, the attachment sites on the array chip may be arranged in an ordered pattern or in any manner. In some embodiments, the attachment sites are configured to have dimensions suitable for attachment of the target biomolecule. Thus, the attachment sites are spatially defined and do not overlap with other sites; i.e., the attachment sites are spatially distinct on the array chip. Once attached to the attachment sites, the biomolecule may be covalently or non-covalently bound to the array chip.

[0070] In some embodiments, the substrate is a biochip. In some embodiments, the biochip is a high throughput microfluidic chip. In some embodiments, the biochip includes a biomolecule array for detection of single molecules from a sample. In some embodiments, the substrate includes an array having target nucleic acids disposed thereon. In another embodiment, the substrate includes a number of distinct features that are targets for imaging.

[0071] In some embodiments, attachment sites on a substrate are divided into fields that are each imaged separately. A typical substrate may be divided into hundreds or thousands of fields arranged in a square wave pattern of rows and columns. (For example, the rows and columns of fields may include tracking regions that are substantially aligned along the horizontal and vertical dimensions, respectively.)

[0072] In such an embodiment, the techniques described herein are provided for scanning and imaging a substrate field by field. In one example, the optical scanning system images the substrate in a manner (as described herein) while the movable stage moves the substrate along the y-direction in a plane and / or axis that is approximately perpendicular to the optical axis of the objective lens. In this example, the optical scanning system stops imaging when the end of the row of fields being imaged is reached to allow the movable stage to position the substrate for imaging of the next row of fields. In another example, the optical scanning system images the substrate in a scanning manner (as described herein) while the movable stage moves the substrate back and forth in a serpentine manner (e.g., along the y-direction) in a plane that is approximately perpendicular to the optical axis of the objective lens, in this example, the optical scanning system images a row of fields while the movable stage moves the substrate in one direction, and then images the next / adjacent row of fields while the movable stage moves / returns the substrate in the opposite direction, e.g., the optical scanning system images the substrate by effectively traversing the rows of fields in a continuous serpentine manner.

[0073] The objective lens of the optical scanning system is configured and operable to image the substrate or a portion thereof onto the camera. In some embodiments, the objective lens is an element or group of elements of the optical scanning system that includes one or more lenses and is configured and operable to magnify an electromagnetic (e.g., optical) signal. In some embodiments, the objective lens has a large numerical aperture (NA) (e.g., NA in the range of 0.6 to 1.5) and performs imaging through air immersion or liquid immersion (e.g., water, oil, or other immersion fluids). In various embodiments, the objective lens can have a focal length in the range of 2 mm to 40 mm. The objective lens can be an off-the-shelf microscope objective lens or a custom-designed multi-element optical component. In some embodiments, the objective lens is configured to image at least a two-dimensional portion of the substrate onto a two-dimensional full-frame electronic sensor of the camera to generate a two-dimensional image.

[0074] The magnification of an objective lens is the ratio of the size of an image space pixel (i.e., a camera pixel) to the actual size of the object space region that corresponds to the image space pixel as viewed by the camera. For example, a magnification of 16X allows a camera using 8 μm pixels to view a 500 nm object space pixel. In some embodiments, the objective lens has a magnification between 4X and 100X. In some embodiments, the objective lens has a magnification between 20X and 50X. In some embodiments, the objective lens has a magnification of 40X.

[0075] In some embodiments, the objective lens is operably connected to an electric motor to position the objective lens to enable autofocusing. In some embodiments, the apparatus includes a focusing sensor. In some embodiments, the apparatus includes an array of focusing sensors.

[0076] In some embodiments, the autofocus mechanism used is based on light sensing methods. In some embodiments, autofocusing is performed by image content analysis. In some embodiments, autofocusing is performed by obtaining multiple images of the substrate at multiple focal lengths, determining the optimal focal length for each of the images, and using a feedback loop to adjust the focal length.

[0077] Autofocusing can be performed by directing a laser beam at the substrate, measuring the reflection of the laser beam from the substrate to provide a reference point, and using a feedback loop to adjust the focal distance. In some embodiments, a non-optical, non-contact position sensor is used. Such a sensor is capable of providing position readings with high bandwidth and tracking accuracy of 0.1 μm or less. In some embodiments, a capacitive position sensor may be used (see, for example, US2002 / 0001403, the disclosure of which is incorporated herein by reference).

[0078] In some embodiments, autofocus of the objective lens is achieved in less than 100 ms, hi some embodiments, the autofocus range provided by the device is + / - 200 μm.

[0079] In some embodiments, the optical scanning device includes an active autofocus system that measures the distance of the object independently of the optical system and then adjusts the objective lens to correct the center. In some embodiments, a passive autofocus system is used that determines the exact center by performing a passive analysis of the image entering the optical system. Passive autofocusing can be achieved, for example, by phase detection or by contrast measurement.

[0080] In some embodiments, the optical scanning system includes a camera capable of capturing two-dimensional still images of a field of the substrate while the substrate is moved by the movable stage. In some embodiments, the optical scanning system includes a full-frame camera. In some embodiments, the full-frame camera is a complementary metal-oxide semiconductor (CMOS) camera. These full-frame cameras are fast, have high resolution, and are low cost. Furthermore, they are compatible with the optical scanning system to capture images of the continuously moving substrate at high resolution. In some embodiments, the camera is a scientific CMOS (sCMOS) camera. In some embodiments, the camera is a non-CMOS camera capable of operating in full-frame mode.

[0081] The optical scanning systems described herein are configured to use a high speed camera in cooperation with scanning optics (e.g., single mirror or dual mirror embodiments) to achieve continuous exposure of still images while the substrate being imaged is in motion. In some embodiments, the size (length and / or width) of the camera pixels ranges from 5 μm to 10 μm, but preferably ranges from 6 to 8 μm, inclusive. In some embodiments, the size of the camera pixels is 6.5 μm. In some embodiments, the camera includes an imaging sensor in the range of 15×15 mm to 10×10 mm.

[0082] In various embodiments, the optical scanning systems described herein are configured to scan a continuously moving substrate (such as an array chip) by using high-speed cameras that do not move the image through the camera, such as non-TDI cameras and other cameras (including TDI cameras) that operate in full-frame 2D mode. CMOS cameras are an example of such a camera classification. CMOS cameras typically use active pixel sensors (APS), which are image sensors made up of integrated circuits that contain an array of pixels, each pixel containing a photodetector and an active amplifier.

[0083] A high-speed camera may be defined in terms of the number of pixels the camera can expose per unit of time. For example, the speed of a camera may be defined by the mathematical product of the number of pixels in its field of view and the frames per second the camera can capture. Thus, a camera with a 5.5 megapixel field of view (e.g., a field of view of 2560 pixels by 2160 pixels) running at 100 frames per second (fps) can expose 550 megapixels per second; such a camera is therefore referred to herein as a "550" megapixel camera. Examples of such cameras include, but are not limited to, CMOS, sCMOS, and similar cameras. In various embodiments, the optical scanning systems described herein may use cameras ranging from 10 megapixels to 2500 megapixels. In some embodiments, the camera includes a two-dimensional full-frame electronic sensor.

[0084] The scanning optics described herein as part of an optical scanning system may include single tracking mirror and dual tracking mirror embodiments having one or more rotatable mirrors along the optical path of the system between the imaged object and the camera. In dual tracking mirror embodiments, two sets of scanning optics are used, each capable of moving cooperatively to track the movement of a movable stage along an axis during imaging. The first scanning optics (e.g., velocity tracking mirror) is used to track the movement of the stage at a predicted velocity or velocity pattern to enable imaging of the field by the camera while the field is moving. The second scanning optics (e.g., acceleration tracking mirror) is used to compensate for local stage accelerations that may result in unacceptable pixel smearing, thereby stabilizing the image. In single tracking mirror embodiments, one set of scanning optics is used to track the movement of the stage at a predicted velocity or velocity pattern, and to compensate for local stage accelerations (i.e., velocity fluctuations) that may result in unacceptable pixel smearing, thereby stabilizing the image. For single tracking mirror embodiments, one set of scanning optics compensates for all stage motions, including velocity and acceleration (or velocity fluctuations). In some embodiments, a set of scanning optics includes a motion tracking mirror to exhibit both a constant or predicted velocity or velocity pattern, and compensation for measured or predicted velocity variations (acceleration).

[0085] In some embodiments, the movement of the tracking mirror in response to velocity variations of the movable stage is based on a feedback control mechanism. In some embodiments, the feedback control mechanism includes a device for measuring the position of the substrate over time, such as an encoder. In some embodiments, the movement of the mirror in response to velocity variations is based on predetermined velocity variations relative to the movable stage. In some embodiments, all rotatable scanning optics are positioned along the optical path prior to using a splitter to split the image to multiple cameras.

[0086] In some embodiments, provided herein is an optical scanning apparatus configured to enable a camera sensor to image a field of a substrate moving along an axis on a moveable stage, the velocity tracking mirror being operatively mounted to said apparatus for reflecting light along an optical path from an objective lens to a camera.

[0087] To maintain a still image of the moving substrate, the velocity tracking mirror is configured and operable to move in cooperation with the movable stage while the movable stage moves the substrate in the same predetermined direction to reflect light from the objective lens to the camera. Hence, the velocity tracking mirror is operably mounted to said apparatus for rotation about a fixed axis. In some embodiments, the fixed axis is parallel to the plane of the two-dimensional substrate image. In some embodiments, the fixed axis is orthogonal to the optical path. Thus, the velocity tracking mirror is configured and operable to perform an angular motion that allows the camera to acquire a still image of a field of the substrate through the objective lens while the substrate is being moved by the movable stage.

[0088] The velocity tracking mirror can be operably coupled to an electric motor to effect rotation of the velocity tracking mirror. In a preferred embodiment, the electric motor operably coupled to the velocity tracking mirror is a galvanometer, although other types of electric motors may be used. One example of a suitable galvanometer is the Nutfield QS-7 OPD Galvanometer Scanner (Nutfield Technology). In some embodiments, other mechanisms for actuating the velocity tracking mirror, such as those based on hydraulic, pneumatic, or magnetic principles, may also be used. In some embodiments, an electric motor is operably coupled to the velocity tracking mirror and operable to angularly move the velocity tracking mirror in cooperation with a movable stage, which in turn moves the substrate to keep the image of the substrate (or field) stationary relative to the camera while the image is acquired through the objective lens.

[0089] Movement of the velocity tracking mirror can be coordinated via a controller module configured to send drive signals to an electric motor operably connected to the velocity tracking mirror. The controller module can include motion controller components to generate a desired output or motion profile, and drive or amplifier components to convert control signals from the motion controller into electrical or drive signals that operate the electric motor.

[0090] In some embodiments, the speed tracking mirror has a range of rotation angles of about 60 degrees, 50 degrees, 40 degrees, 30 degrees, 20 degrees, 15 degrees, 10 degrees, or 5 degrees. In some preferred embodiments, the speed tracking mirror has a range of rotation angles of about 3 degrees, 2 degrees, 1 degree, ½ degree, ¼ degree, or 1 / 10 degree.

[0091] In optical scanning systems that use a velocity-tracked mirror to image a moving substrate, the mirror angle is adjusted over time so that the camera can view a fixed area on the moving substrate. This is called the "forward scan" time. The velocity-tracked mirror is then allowed to rotate quickly back to its initial position. This is called the "flyback" or "backscan" time. During the flyback time, the image projected onto the camera is not stable.

[0092] FIG. 2 illustrates an angular movement and timing diagram of a velocity tracking mirror according to an example embodiment. In operation, the objective lens focuses on a substrate (e.g., an array chip) that is moving along an axis during imaging. FIG. 2 shows the movement of the stage over time (210). During this movement, the velocity tracking mirror rotates from its initial position to its end position to track the substrate movement, which is represented as a forward scan time (220). During a single forward scan, a portion of the substrate is imaged, which is referred to herein as a field. The rotation of the velocity tracking mirror allows the imaging of a portion of the substrate corresponding to the field by the camera during the exposure time, which allows sufficient exposure on the camera sensor. The remaining movement of the field relative to the camera may be due to velocity fluctuations, or deviations of the substrate velocity from the expected velocity. Once the velocity tracking mirror reaches its extreme position, it then returns to its initial position in preparation for a new scan, which is represented by the waveform or movement of the mirror at (230) (flyback time). No still image of the substrate is acquired during the flyback time interval. The forward scan and flyback motion of the velocity tracking mirror is represented as a sawtooth waveform (FIG. 2), which reflects both the movement of the velocity tracking mirror during scanning and the drive signal sent to an electric motor operably connected to the velocity tracking mirror to actuate the mirror.

[0093] An embodiment of a sawtooth waveform for driving the mirror (including forward scan and back scan portions) is shown in Figures 2 and 3. In some embodiments, the velocity tracking mirror may have a non-linear response over portions of its range of motion. In this case, the velocity tracking mirror response may be linearized by adjusting the waveform or drive signal to linearize the response from the velocity tracking mirror.

[0094] In some embodiments, the velocity tracking mirror is operably coupled to an electric motor to achieve rotation of the acceleration tracking mirror. In a preferred embodiment, the electric motor operably coupled to the velocity tracking mirror is a galvanometer, i.e., an electric coil in a magnetic field that moves in response to an electric current. In some embodiments, other mechanisms for providing actuation of the velocity tracking mirror may also be used, such as those based on hydraulic, pneumatic, or magnetic principles. In some embodiments, the electric motor operably coupled to the velocity tracking mirror is operable to generate angular motion of the velocity tracking mirror in response to the velocity of the moveable stage or substrate.

[0095] In some embodiments, the movement of the velocity tracking mirror is coordinated via a controller module configured to send drive signals to an electric motor operably coupled to the velocity tracking mirror. The controller module may include motion controller components to generate a desired output or motion profile, and drive or amplifier components to convert control signals from the motion controller into energy that is provided to the electric motor as an electrical signal or drive signal.

[0096] In some embodiments, the drive signal or electrical signal sent to the electric motor operably coupled to the velocity tracking mirror is a linearized velocity tracking error waveform defined as a function of G(θ,ω,ε(θ)), where G is a modified triangular wave, θ=angular position, ω=frequency, and ε(θ)=amplitude.

[0097] The movement of the tracking mirror may be characterized by its duty cycle, defined as the fraction of time that the tracking mirror is operatively moving in a forward scanning motion to enable active imaging of the substrate. For example, if the tracking mirror tracks the substrate to enable imaging by the camera during at least 90% of the tracking mirror cycle (e.g., when the tracking mirror flyback time is 10% or less of the cycle), this technique allows the camera to operate with an overall readout efficiency of at least 90%.

[0098] In some embodiments, such as in fluorescence imaging where longer exposure times may be required, the scanning time interval during which images are collected by the camera must be long enough to establish an adequate signal-to-noise ratio as fluorescence imaging light levels are typically very weak.

[0099] The duty cycle is also affected by the speed at which the tracking mirror returns to its initial position. This flyback time interval can be configured to be only a small portion of the tracking mirror cycle, thus maximizing the duty cycle. For greater efficiency, the amount of time spent by the tracking mirror at each imaging area can be made proportional to the camera frame rate, thereby allowing sufficient time to expose the image of each field onto the camera.

[0100] In some embodiments, the duty cycle is greater than 60%. In some embodiments, the duty cycle is between 60% and 90%. In some embodiments, the duty cycle of the image capture is at least 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, or 10%. In some embodiments, the duty cycle can be as low as 10% or in the range of 20%, 30%, 40%, 50%, 60%, 70%, 80%, or 90%. In some embodiments, these duty cycles are achieved with an imaging frequency of 30-200 Hz. In some embodiments, these duty cycles are achieved with an imaging frequency of 30-40 Hz. In some embodiments, these duty cycles are achieved with an imaging frequency of 30 Hz, 35 Hz, 40 Hz, 45 Hz, or 50 Hz.

[0101] During the flyback time interval, the optical scanning system must stop imaging because the acquired image is not stable. Therefore, in various embodiments, various mechanisms may be used to prevent image exposure to the camera during the flyback time interval. For example, in some embodiments, an acousto-optical modulator (AOM) switch (or other type of fast switch) may be used to turn on and off the illumination light that is an event on the substrate being imaged. In other embodiments, a suitable aperture may be placed in the optical path of the illumination light, where the illumination light is allowed to overscan, but the aperture prevents the light from illuminating the substrate during the flyback time interval by blocking the light outside the field of view. In yet other embodiments, a suitable shutter may be placed in the optical path of the illumination light, where the shutter is left open during the exposure interval and closed during the flyback time interval of the tracking mirror.

[0102] In a dual tracking mirror embodiment, the optical scanning device further includes an acceleration tracking mirror configured and operable to provide an offset correction of the optical path to stabilize the transmission of light from the substrate to the camera during imaging of the substrate (or a portion thereof). The offset correction varies in association with velocity variations in the movement of the moveable stage along the axis as compared to being tracked by the velocity tracking mirror. These velocity variations may affect the accuracy of tracking of the moveable stage by the velocity tracking mirror, resulting in images with unacceptable pixel smear. Rotation of the acceleration tracking mirror stabilizes the image of the field captured by the camera to reduce pixel smear from velocity variations of the stage or substrate, as provided herein.

[0103] FIG. 3 provides an example of an acceleration tracking mirror waveform generated in response to an average stage velocity error for a field. When there is a positive error in the stage velocity, the acceleration tracking mirror waveform is generated to track the additional velocity of the stage. Conversely, when there is a negative velocity error in the stage velocity, the acceleration tracking waveform is generated to track the slower velocity of the stage (i.e., rotating in the opposite direction to the positive velocity error). In some embodiments, the acceleration tracking mirror waveform is generated and converted to a drive signal immediately upon sensing of the velocity error. In some embodiments, the acceleration tracking mirror waveform is generated based on an average measurement of the velocity during imaging of field n-1, and a drive signal is generated from this waveform to direct the movement of the acceleration tracking mirror during imaging of field n.

[0104] The stage velocity error can be modeled as a function of amplitude (A), stage position (x), and time (t) to give the following function: F(A,x,t)=A(x) * Err(x,t)

[0105] In some embodiments, an electrical or drive signal (D) for controlling the movement of an electric motor operatively connected to the acceleration tracking mirror may be determined based on the stage velocity error by a function expressed as follows: D(F,C,x,E)=F(A,x,t)y * C * x+E, where C is the magnification, x=stage position, and E is the offset. F(A,x,t)y is the average value of F(A,x,t) over the tilt range=y, or prior field, as described herein. Functions for smooth discontinuities can also be used to generate acceleration tracking mirror drive signals.

[0106] In some embodiments, the tracking mirror is operably coupled to an electric motor to achieve rotation of the acceleration tracking mirror. In a preferred embodiment, the electric motor operably coupled to the acceleration tracking mirror is a piezoelectric actuator, although other types of electric motors may be used. In some embodiments, other mechanisms for providing actuation of the acceleration tracking mirror may also be used, such as those based on hydraulic, pneumatic, or magnetic principles. In some embodiments, the electric motor operably coupled to the acceleration tracking mirror is operable to generate angular motion of the acceleration tracking mirror in response to variations in the velocity of the moveable stage to compensate for the velocity variations during imaging.

[0107] In some embodiments, the movement of the acceleration tracking mirror is regulated via a controller module configured to send a drive signal to an electric motor operably coupled to the acceleration tracking mirror. The controller module may include motion controller components to generate a desired output or motion profile and drive or amplifier components to convert a control signal from the motion controller into energy provided to the electric motor as an electrical signal or drive signal. Because the movement of the acceleration tracking mirror varies in conjunction with variations in the velocity of the movable stage, the controller module may further include a position, velocity, or acceleration sensor. This sensor may act as a type of feedback sensor to determine information regarding the position and / or motion of the substrate or the movable stage. In some embodiments, the sensor includes an encoder (e.g., a linear encoder) or an interferometer operably attached to the scanning device. In some embodiments, the encoder is a non-interferometric encoder. In some embodiments, an accelerometer may be used to determine the change in velocity. In some embodiments, the sensor is a component that provides information from a velocity variation table that includes predicted velocity variation values ​​for the stage for incorporation into a drive signal to the electric motor operably coupled to the acceleration tracking mirror.

[0108] The encoder can be a sensor, transducer, or read head paired with a scale that encodes the position. In some embodiments, the sensor reads the scale (e.g., the encoder number) to convert the encoded position into an analog or digital signal, which can then be decoded into a position by a digital readout (DRO) or motion controller. Thus, in some embodiments, the position sensor (including position, velocity, and / or acceleration sensors) is a linear encoder that interfaces with an encoder number (or another scale) on the substrate or movable stage. In some embodiments, the encoder numbers on the substrate are positioned with a distance of 10 μm, 5 μm, 2 μm, 1 μm, or 500 nm or less between each encoder number. In some embodiments, the resolution of the position detectable by the encoder is 1 nm or less. This can be done, for example, using interpolation between lines on the substrate or between the encoder numbers. The spacing between the encoder numbers can be correlated to the speed of the stage scan and the frequency of the position measurement.

[0109] In some embodiments, the scale used by the encoder, such as a linear encoder, may be optical, magnetic, capacitive, inductive, eddy current based, etc. In some embodiments, position detection can be performed without a scale on the substrate or moveable stage, for example by using an optical image sensor based on image correlation methods.

[0110] Position measurements from a substrate or stage position or motion sensor are used to provide a set of data representing a measured velocity of the substrate or movable stage. The measured velocity can be compared to a predicted velocity to determine velocity variations in the stage. These velocity variations can then be translated into an electrical signal (e.g., a drive signal) that effects controlled movement of an electric motor operatively connected to the acceleration tracking mirror. The controlled movement of the acceleration tracking mirror adjusts the position of the optical path between the substrate and the camera to provide an image with increased stability, increased sharpness, and / or reduced blur or pixel smear.

[0111] The electric motor may be selected based on its ability to quickly respond to a drive signal that includes a correction based on the measured speed variation. To provide a fast response, in some embodiments, the electric motor has a full angular range of rotation of less than 1 degree. In some embodiments, the electric motor is a piezoelectric actuator or other motor with a similar response time to a correction signal. In some embodiments, the position sensor acquires position information at rates of 500 Hz, 1 kHz, 2 kHz, 3 kHz, 4 kHz, 5 kHz, 10 kHz, 20 kHz, 50 kHz, 100 kHz, and 250 kHz or higher. In certain embodiments, a higher frequency of position detection, for example 5 kHz, increases the resolution of the speed variation, thereby enabling more accurate measurement of the stage to provide a sharper image. However, a frequency low enough to provide correction to prevent pixel smearing of more than 2 pixels may be used.

[0112] For example, in some embodiments the encoder provides substrate or stage position or movement information to logic executing in a computing device, such as a motion controller, where the logic uses the measurement information to calculate the required correction to the direction of stage movement and to cause a servo mechanism, such as an electric motor, to rotate an acceleration tracking mirror based on the calculated correction that varies in relation to the velocity variations of the movable stage.

[0113] The determination of the velocity variation can be determined from two or more position measurements from the position sensor, hi some embodiments, the near instantaneous velocity can be determined from the most recent two or three positions measured from the substrate.

[0114] In some embodiments, the velocity variations used to generate the drive signals are determined from a pre-calculated table. The velocity variations may already be known for the stage and can be recorded in a table that is accessed by the motion controller components. Thus, in these embodiments, the position sensor is a component of the controller module that provides data from the velocity variation table to the motion controller.

[0115] By using acceleration tracking mirrors as described herein, an optical scanning system can use a camera operating in full frame mode (e.g., a CMOS camera not operating in TDI mode, etc.) to acquire still images of a moving substrate within an accuracy of + / - 1 pixel. In some embodiments utilized for biological imaging, such as DNA sequencing or other single molecule detection techniques, the extreme alignment precision requirements of fluorescent imaging may necessitate the use of at least one velocity tracking mirror and acceleration tracking mirror pair to correct for motion including velocity variations of the substrate along an axis to remove nonlinearities in the motion of the movable stage.

[0116] In some embodiments, tracking of stage movement, including both stage velocity and stage velocity variations along an axis, is performed by a single tracking mirror (single mirror embodiment), referred to herein as the motion tracking mirror. In this embodiment, the single motion tracking mirror performs the functions of both the velocity tracking mirror and the acceleration tracking mirror described above. Thus, in a single mirror embodiment, a drive signal is sent to an electric motor operatively coupled to the single motion tracking mirror, which varies in relation to a predetermined stage velocity, including both a scanning waveform and a flyback waveform (e.g., a sawtooth waveform), and also in relation to the velocity variations of the stage or substrate, which may be pre-measured or based on one or more measurements that provide information about the motion of the substrate or movable stage to determine the velocity variations of the stage or substrate.

[0117] The scanning optics provided in the single mirror embodiment of the optical scanning system is shown in FIG. 4. In this embodiment, the optical scanning system includes a movable stage (110) configured to move a mounted substrate (120) along an axis. The substrate (120) includes one or more fields (121) that are individually imaged by the optical scanning system as the stage moves continuously. The substrate is illuminated by an illumination mechanism (not shown), and light from the substrate moves along an optical path through an objective lens (130). An image of the moving substrate is stabilized to an image sensor by a motion tracking mirror (145). An image of the field (121) is captured by a camera (160) that includes an image sensor. The motion tracking mirror (145) is configured to rotate about an axis parallel to the plane of the image field. The rotation of the motion tracking mirror (145) adjusts the optical path to stabilize the image of the field during image capture by the camera (160). The rotation of the motion tracking mirror (145) varies in relation to both a predetermined stage velocity and velocity variations of the stage or substrate. Thus, the single mirror embodiment of the optical scanning system provides a stable image with improved sharpness or reduced pixel smear over systems that do not compensate for stage velocity variations while imaging a moving substrate.

[0118] A controller module configured to direct the movement of a single motion tracking mirror includes a controller module component operatively connected to a velocity tracking mirror and a controller module component operatively connected to an acceleration tracking mirror, as described in the two mirror embodiments above. Thus, in some embodiments, the controller module includes a motion controller component that generates a desired output or motion profile, i.e., a drive component or an amplifier component for converting a control signal from the motion controller into an electrical or drive signal. The controller module may also include a position, velocity, or acceleration sensor configured to determine the position or motion of the substrate or movable stage and to send this signal to the motion controller component that is used to generate the desired output or motion profile in response to information from the sensor. The motion controller component can then generate a motion profile for the single motion tracking mirror that varies in relation to both a constant or predicted velocity (e.g., a sawtooth waveform) of the substrate or stage, and velocity variations determined from signals from the sensors or pre-determined for the stage. Thus, the sawtooth waveform used to track the velocity can be modified according to real-time velocity measurements determined from signals from the position sensors or pre-determined velocity variations.

[0119] FIG. 5 provides an example of a stage velocity error waveform generated from data provided by position, velocity, or acceleration sensors. Also shown is the approximate velocity correction required, known as the average velocity error over the field. The next waveform (solid line) shows the velocity tracking waveform modified with a correction that varies relative to the average velocity error (e.g., average velocity error over the field). The dashed line represents the linearized uncorrected motion tracking mirror waveform (similar to the waveform used to move the velocity tracking mirror in a dual mirror embodiment). When there is a positive velocity error, the slope of the waveform increases during the scan, which increases the speed of the mirror rotation to compensate for the velocity error. When there is a negative velocity error, the slope of the waveform decreases, which decreases the speed of the mirror rotation to compensate for the velocity error.

[0120] In some embodiments, the sensor determines an average velocity of the stage or substrate based on multiple measurements taken during imaging of the field. In some embodiments, the sensor is a position sensor. In some embodiments, the position sensor is an encoder (e.g., a linear encoder) or an interferometer operably attached to the scanning device. The signal from the position sensor can be used to determine an average velocity of the moveable stage or substrate using two or more of the most recent position measurements captured by the position sensor. In some embodiments, these measurements can be used to adjust the angle of the motion tracking mirror after sensing.

[0121] In some embodiments, the average velocity of the substrate or stage is determined over field n-1 and used to provide a correction that is used to generate a motion profile of the motion tracking mirror for field n. This is known as a field-level feedforward mechanism, as illustrated in FIG. 6. In some embodiments of a field-level feedforward correction mechanism, the motion controller component generates a motion profile for the movement of the motion tracking mirror (single mirror embodiment) or acceleration tracking mirror (dual mirror embodiment) in response to the average velocity of the previously imaged fields. Field-level feedforward velocity, tracking, and correction mechanisms differ from other types of correction, such as scan-line level feedforward mechanisms. Field-level feedforward correction is advantageous in that it provides sufficient correction information to generate an acceptably sharp image for monitoring information at a single pixel (i.e., no more than + / - 1 pixel pixel smear) while reducing the stringency of the immediate signal processing. Although some degree of image blurring or pixel smear may not be corrected by the field-level feed-forward mechanism, in some embodiments, such as in single molecule imaging applications (e.g., for biomolecular sensing), where pixel smear of up to + / - 1 pixel is acceptable, the field-level feed-forward correction can produce acceptable smear when there is velocity variation from field n-1 to field n that is within an acceptable level (e.g., resulting in pixel smear of + / - 1 pixel or less).

[0122] A diagram of an embodiment of field-level feedforward correction is provided in FIG. 6. In this embodiment, tip or stage velocity tracking measurements are obtained to generate a mirror rotation drive signal that incorporates the velocity fluctuations of the moving stage. Now the stage begins to move and position information is obtained (or velocity information is obtained) over time to determine the pre-field nonlinearity (velocity fluctuations) of the stage velocity. Once the first field is imaged, a drive signal that varies relative to the average velocity measured at the pre-field stage is sent to the motion tracking mirror (or acceleration tracking mirror in two mirror embodiments). For the next successive field, the process is repeated using the velocity error determined from the position information of the pre-field (N-1) over time. A drive signal is determined in response to this velocity error and sent to the motion tracking mirror for rotation during field N. FIG. 6 shows the stage velocity error over time and the approximate velocity error per field. The first arrow descending from the stage velocity error indicates the determination of the average velocity error from the field and the translation to the "same field" acceleration correction waveform. The feedforward mechanism is shown below by the second arrow and translates this waveform to steer the mirror for the next field n based on the waveform derived from field n-1. In this way, the stage velocity error is estimated for each field based on the previous field n-1.

[0123] In one embodiment, the field-level feedforward mechanism proceeds according to the following steps: a. Measuring multiple positions on the substrate across field n-1. b. Determining the average velocity for field n-1. c. Calculation of the speed variation for field n-1 and a correction based on this speed variation. d. Applying corrections to the motion profile (e.g., electric motor waveform) to be sent to the driver or amplifier. e. Sending a drive signal to an electric motor operatively coupled to the motion tracking mirror or the acceleration tracking mirror to generate movement of the tracking mirror during image capture of field n. f. Repeat the process for the remaining fields in the lane.

[0124] In some embodiments, the sum of the feedback loop in a servomechanism based on field level feedforward velocity tracking is less than 100 ms, less than 90 ms, less than 80 ms, less than 70 ms, less than 60 ms, less than 50 ms, less than 40 ms, less than 30 ms, less than 20 ms, less than 10 ms, less than 5 ms, or less than 2 ms. In some embodiments, feedforward velocity tracking is used to adjust the movement of the acceleration tracking mirror in a two mirror optical path alignment correction embodiment.

[0125] In some embodiments, to minimize errors due to the linear tilt of a single mirror controlled by an electric motor, the electric motor drive signal or waveform is adjusted to compensate for systematic errors in tracking. Minimizing errors in generating the linear tilt of the electric motor (e.g., forward scan or flyback) can also be achieved by slowing down the movement of the mirror, such as by reducing the imaging frequency of the optical scanning system. In some embodiments, the frequency of the sawtooth waveform controlling the electric motor in a single mirror embodiment is kept below 200 Hz. In some embodiments, the frequency of the sawtooth waveform controlling the electric motor in a single mirror embodiment is between 50 Hz and 30 Hz. In some embodiments, the frequency of the sawtooth waveform controlling the electric motor in a single mirror embodiment is between 45 Hz and 35 Hz. In some embodiments, the duty cycle of the sawtooth waveform controlling the electric motor in a single mirror embodiment is less than 70%. In some embodiments, the duty cycle of the sawtooth waveform controlling the electric motor in a single mirror embodiment is between 60% and 80%. In some embodiments, the frequency and duty cycle of image capture in single mirror embodiments is adjusted to have a total velocity tracking error of less than 2%, hi some embodiments, the frequency and duty cycle of image capture in single mirror embodiments is adjusted to have a total pixel smear of less than 2 pixels or less than 1 pixel.

[0126] As discussed herein, in accordance with some embodiments, a controller module refers to a collection of components including: i) a sensor (e.g., a stage position sensor) for determining a state of a component of an optical scanning system for feedback control; ii) a mechanism for calculating or providing a waveform for effecting movement of a component of the optical scanning device (e.g., a sawtooth wave for guiding a velocity tracking mirror); or iii) a mechanism for sending actuator drive signals based on the waveform for effecting movement of the component.

[0127] For example, as described above, the controller module can be used to create precise waveforms to align the optical path and direct the movement of specific components, such as a rotatable mirror, that are synchronized to the stage movement based on stage encoder or master clock values. The velocity tracking mirror waveform can be a sawtooth waveform with a slope that tilts the velocity tracking mirror at a precise velocity to match the stage velocity. The waveform sent to the acceleration tracking mirror, or to the single rotatable mirror in a single mirror embodiment, must include provisions to correct for velocity variations that occur in the movable stage velocity. This waveform can be created by "mapping" out the nonlinearity of the stage velocity using a reticle with calibration marks on it, or by taking the measured stage velocity from the previous field and creating a waveform that compensates for the nonlinearity of the velocity and using a waveform to correct the velocity variations in the next field, i.e., a field level "feed forward" approach. The waveform can also be created by providing information to the controller module from a velocity variation table.

[0128] In accordance with the techniques described herein, one or more computing devices and / or various logic thereof are configured and operable to control the coordinated movement of the scanning mirrors (e.g., acceleration tracking mirrors and velocity tracking mirrors) and the movable stage. Thus, in some embodiments, the movable stage (and thus the substrate mounted thereon) can be configured to move at a constant velocity, in which case the backside scanning motion of the tracking mirror is at an appropriate constant velocity. In other embodiments, the movable stage can be configured to move at a non-constant velocity, in which case the backside scanning motion of the tracking mirror is also at an appropriate non-constant velocity.

[0129] The controller module can also be used to synchronize components of the optical scanning device to enable capture of images of fields of the substrate on a moving stage. In addition to coupling movement of the rotatable mirror to the velocity of the movable stage, the controller module can also control other components of the device. In some embodiments, the controller module includes a mechanism for controlling illumination of the field. For example, the controller module may send a signal to an illumination device, such as a laser, to time the illumination with the image capture process. In some embodiments, the illumination state depends on a sawtooth waveform sent to a velocity tracking mirror. In some embodiments, the controller module sends a signal to control movement of the movable stage at a selected speed or along a selected path, such as a serpentine path, to image various fields on the substrate.

[0130] The connection of the controller module to certain components of the optical scanning system is shown in FIG. 7A according to a dual mirror embodiment. As illustrated in this embodiment, the controller module is operatively connected to the illumination components to control the illumination of the substrate, such as by timing the illumination with the timing of image capture. The controller module is operatively connected to the camera to control the image capture by the camera to match the movement of the rotating mirror, for example, such that images are acquired during tracking of each field and images are not acquired during the flyback period of the tracking mirror. As described in more detail herein, the controller module may include a memory, a processor, and a driver. The memory may hold predetermined speed or speed variation information to be used by the processor to generate a waveform. The memory may also hold predetermined waveforms. The waveform may be sent to the driver to generate a drive signal. In some embodiments, the controller module is operatively connected to an encoder (e.g., a linear encoder) to receive position information about the motion stage over time. The controller module then generates a drive signal in response to the velocity variations from the linear encoder information, which is then sent to a driver for sending a drive signal to the acceleration tracking mirror (or substrate tracking mirror (FIG. 7B) in single mirror embodiments). The path from data collection from the stage to the movement of the tracking mirror is shown by the dotted arrows, which also include a drive signal sent from the controller module to a motor operably connected to the acceleration tracking mirror (150) or motion tracking mirror (145). FIGS. 7A and 7B further illustrate the optical path of light from the illumination source to detection by the camera according to a dual mirror embodiment. The solid lines (not arrows) in FIGS. 7A and 7B indicate operative connections between the motors and the components of the apparatus that are actuated by the motors.

[0131] In one embodiment, the optical scanning system further includes an illumination light source. In various embodiments, the illumination source can emit light of various wavelengths, e.g., light of wavelengths ranging from 400 nm to 800 nm, that can be compatible with various fluorophores that can be used for biomolecule detection. In some embodiments, the illumination source is mounted directly below the substrate such that light collected by the objective lens is transmitted to the objective lens through the field. In other embodiments, the illumination source is mounted above the substrate such that light collected by the objective lens is reflected by the field to the objective lens.

[0132] The optical scanning system can further include a dichroic mirror. In one embodiment, the optical scanning system further includes an illumination source and a dichroic mirror configured and operable to at least: (a) reflect light from the illumination source to illuminate a field of the substrate or a portion thereof; and (b) pass light emitted by the sample and through the objective lens.

[0133] In some embodiments, the optical scanning system further includes a splitter, which can be positioned along the optical path after the acceleration tracking mirror and the velocity tracking mirror (or a single tracking mirror) to split the optical signal containing the field image to two or more cameras.

[0134] The optical scanning system may also include a tube lens component located in the optical path between the tracking mirror and the objective lens so that the tracking mirror can be located at the pupil of the objective lens. Relay lenses or tube lenses may also be used at other locations along the optical path to reverse images or extend the optical path.

[0135] In some embodiments, the optical scanning system includes a relay lens system that is used to make all light rays nominally parallel and create a region in the optical path that has a small beam diameter. In some embodiments, the scanning optical elements are placed in a location where the optical path has a small beam diameter such that their placement (i) minimizes power loss, (ii) minimizes image degradation, and (iii) minimizes the size of the optical elements so that their mass is as small as possible. This allows for high scanning frequencies and a light weight system.

[0136] The use of a relay lens system can facilitate these systems being used for biomolecule detection on a substrate because fluorescence-based optical scanning systems typically utilize very low light levels with unclear fluorescence images. Thus, the relay lens is effective in increasing the efficiency and sensitivity of the optical scanning system to keep image acquisition times to a minimum. Furthermore, in some embodiments, the illumination intensity must remain below the point where it may damage the biomolecules on the substrate.

[0137] 8A illustrates one example of a method for imaging a substrate in accordance with a dual mirror embodiment. The method of FIG. 8A is not limited to being performed by any particular type of machine or apparatus, and thus the method described below should be considered in an illustrative sense, not limiting.

[0138] In step 810, the movable stage moves the substrate beneath the objective lens in a plane perpendicular to the optical axis of the objective lens. While the substrate is moving, in step 820, a servo mechanism (e.g., an electric motor) varies the angle of a velocity tracking mirror to track the velocity of the moving stage during capture of an image of the field of the substrate. In some embodiments, a controller module that is part of or coupled to the velocity tracking mirror executes logic that controls the servo mechanism operably connected to the velocity tracking mirror. In step 840, the servo mechanism varies the angle of the acceleration tracking mirror to track velocity fluctuations of the moving stage during capture of an image of the field of the substrate. In some embodiments, a controller module that is part of or coupled to the acceleration tracking mirror executes logic that controls the servo mechanism in cooperation with the movable stage. In some embodiments, the logic receives feedback control information indicative of the movement (e.g., velocity fluctuations) of the movable stage and uses this information to adjust an input signal to the servo mechanism, which in turn varies the angle of the acceleration tracking mirror, thereby coordinating the combined motion of the velocity tracking mirror and the acceleration tracking mirror with the movement of the movable stage. In some embodiments, this feedback information is received from a linear controller that detects 830 whether there is any nonlinearity in the motion of the movable stage. The logic then uses this information to calculate an offset correction, which is passed as an input signal to a servo mechanism that controls the angle of an acceleration tracking mirror in the optical path between the tracking mirror and the camera. In this manner, by making fine adjustments to the angle of the acceleration tracking mirror, the logic effectively removes from the acquired images any errors caused by nonlinearities in the motion of the movable stage.

[0139] In step 850, the camera records a still image of the substrate (or a portion thereof) while the substrate is being moved by the moveable stage.

[0140] 8B illustrates one example of a method for imaging a substrate according to a single mirror embodiment. The method of FIG. 8B is not limited to being performed by any particular type of machine or apparatus, and thus the method described below should be considered in an illustrative sense, rather than a limiting one.

[0141] In step 810, a movable stage moves a substrate beneath the objective in a plane perpendicular to the optical axis of the objective, where the substrate includes multiple distinct features that are targets for imaging.

[0142] While the substrate is moving, in step (845), the servo mechanism varies the angle of the motion tracking mirror to track velocity variations of the moving stage during capture of an image of the field of the substrate. In some embodiments, a controller module that is part of or coupled to the motion tracking mirror executes logic that controls the servo mechanism in cooperation with the movable stage. In some embodiments, the logic receives feedback control information representative of the movement (e.g., velocity variations) of the movable stage and uses this information to adjust an input signal to the servo mechanism, which in turn varies the angle of the motion tracking mirror to compensate for the velocity variations of the movable stage. In some embodiments, the controller module incorporates the velocity variations of the movable stage into a sawtooth waveform to track a predetermined velocity that is used as a drive signal to control the movement of the motion tracking mirror. In some embodiments, this feedback information is received from a linear controller that detects (830) whether there is any nonlinearity in the movement of the movable stage. The logic then uses this information to calculate an offset correction and passes the offset correction as an input signal to the servo mechanism that controls the angle of the motion tracking mirror in the optical path. In this manner, by making fine adjustments to the angle of the motion tracking mirror, the logic effectively removes from the acquired images any errors caused by non-linearities in the motion of the movable stage.

[0143] In step 850, the camera records a still image of the substrate (or a portion thereof) while the substrate is being moved by the moveable stage.

[0144] The optical scanning systems provided herein compensate for nonlinearities (e.g., local stage acceleration) in stage velocity (or other imaging of a moving component) that would normally result in blurred images in devices that track stage velocity alone, but have no mechanism for compensating for stage velocity fluctuations. In some embodiments, the optical scanning system can generate stable images of a continuously moving substrate or other object at 30 frames / sec. In some embodiments, the optical scanning system can generate still images of a continuously moving substrate or other object at 10-30 frames / sec. In some embodiments, the optical scanning system can generate still images of a continuously moving substrate or other object at 40 frames / sec. In some embodiments, the optical scanning system can generate still images of a continuously moving substrate or other object at 30 frames / sec, 40 frames / sec, 50 frames / sec, 60 frames / sec, 70 frames / sec, 80 frames / sec, 90 frames / sec, 100 frames / sec, 120 frames / sec, 150 frames / sec, or 200 frames / sec or more.

[0145] In some embodiments, the stage velocity variation of the optical scanning system is greater than + / - 0.5%. In some embodiments, the stage velocity variation of the optical scanning system is greater than + / - 0.1%. In some embodiments, the stage velocity variation of the optical scanning system is greater than + / - 0.1% and is reduced to less than + / - 0.1% as observed by the camera.

[0146] In some embodiments, the stage velocity variation of the optical scanning system is greater than + / - 1%. In some embodiments, the stage velocity variation of the optical scanning system is greater than + / - 1% and is reduced to less than + / - 1% as observed by the camera.

[0147] In some embodiments, the optical scanning systems described herein provide increased image sharpness over systems that do not compensate for velocity variations of a continuously moving stage.

[0148] In some embodiments, the total distance the substrate moves during imaging of the field deviates by more than + / - 1 pixel (as measured by the image of the substrate projected onto the sensor) from a predetermined movement based on the predicted velocity during capture of the field image, while the optical scanning system produces an image with a pixel blur of less than 1. In some embodiments, a pixel correlates to an area of ​​∼150 nm x 150 nm field. In some embodiments, a pixel correlates to an area of ​​∼162.5 nm x 162.5 nm field. In some embodiments, a pixel correlates to an area of ​​a field that exceeds the size of a single fluorophore.

[0149] Pixel smear is one measure of image sharpness and refers to image artifacts resulting from the movement of the substrate in the optical field relative to the image sensor. One method for measuring pixel smear is by looking at the ratio of the single spot major and minor axes, also known as eccentricity. In some embodiments, the eccentricity of the image produced by the optical scanning system is less than 3. In some embodiments, the eccentricity of the image is positive single fluorophore detection.

[0150] Figures 9A and 9B provide an example of pixel smear and the resulting image eccentricity of a substrate of an optical scanning system provided herein. The blue dots represent a single illuminated fluorophore and each square is a pixel of ∼162 nm. In Figure 9A, there is an example of pixel smear of +1 pixel, within the preferred range of + / - 1 pixel, with an eccentricity of 2. In Figure 9B, there is an example of pixel smear of +2 pixel, outside the preferred range of + / - 1 pixel, with an eccentricity of 3.

[0151] 10 illustrates a system environment for communicating information to or to an optical scanning device. The system environment may include one or more client devices (1010), one or more servers (1030), and a database (1005) accessible to the servers (1030), all connected via a network (1020). In other embodiments, different and / or additional entities may be included in the system environment.

[0152] The system environment allows results from the optical scanning device (1040) to be shared with one or more other users at the client device (1010) over the network (1020). Results can also be uploaded to the web.

[0153] The network (1020) facilitates communication between components of the system environment. The network (1020) may be a wired or wireless local area network (LAN) and / or wide area network (WAN), such as an intranet, an extranet, or the Internet. In various embodiments, the network (1020) uses standard communication technologies and / or protocols. Examples of technologies used by the network (1020) include Ethernet, 802.11, 3G, 4G, 802.16, or other suitable communication technologies. The network (1020) may use wireless communication, wired communication, or a combination of wireless and wired communication. Examples of network protocols used to communicate over the network (1020) include Multiprotocol Label Switching (MPLS), Transmission Control Protocol / Internet Protocol (TCP / IP), Hypertext Transport Protocol (HTTP), Simple Mail Transfer Protocol (SMTP), and File Transfer Protocol (FTP). Data exchanged over the network 1020 may be represented using any suitable format, such as HyperText Markup Language (HTML) or Extensible Markup Language (XML). In some embodiments, all or some of the communications links of the network 1020 may be encrypted using any suitable technique.

[0154] The client device (1010) is a computing device capable of receiving user input and transmitting and / or receiving data over the network (1020). In one embodiment, the client device (1010) is a conventional computer system, such as a desktop or laptop computer. Alternatively, the client device (1010) may be a device with computing capabilities, such as a personal digital assistant (PDA), a mobile phone, a smart phone, or other suitable device. The client device (1010) is configured to communicate over the network (1020).

[0155] In some embodiments, the system environment may include one or more servers, for example, where the diagnostic system includes services managed by an entity that communicates with either the optical scanning device (1040) and / or the client device (1010) over a network (1020). The server (1030) stores data in a database (1005) and can access data stored in the database (1005). The server (1030) may also store data in a cloud. In some embodiments, the server (1030) may occasionally push updates to the optical scanning device (1040) or may receive result data from the optical scanning device (1040), perform certain analyses on the result data, and return analysis data to the optical scanning device (1040) or the client device (1010).

[0156] In some embodiments, the functionality of the optical scanning device (1040) is contained in a client device (1010), such as a mobile phone, and can be operated through a mobile application stored on the phone. The mobile application stored on the phone can process the results read from the optical scanning device and share the results with other devices (810) over a network (820).

[0157] Equivalence and Scope Those skilled in the art will recognize, or be able to ascertain using no more than routine experimentation, many equivalents to the specific embodiments in accordance with the invention described herein. The scope of the present invention is not intended to be limited to the above description, but rather is as set forth in the appended claims.

[0158] In the claims, articles such as "a," "an," and "the" may mean one or more, unless indicated to the contrary or clear from the context. A claim or description containing "or" between one or more members of a group shall be satisfied if one, more than one, or all of the members of the group are present in, utilized in, or relevant to a given product, unless indicated to the contrary or clear from the context. The invention pertains to as few as one member of a group being present in, utilized in, or relevant to a given product or process. The invention pertains to more than one or all members of a group being present in, utilized in, or relevant to a given product or process.

[0159] The term "comprising" is intended to be open and permissive, but does not require the inclusion of additional elements or steps. When the term "comprising" is used herein, the term "consisting of" is therefore likewise included and disclosed.

[0160] Where ranges are given, the endpoints are included. Furthermore, unless otherwise indicated or apparent from the context and understanding by one of ordinary skill in the art, it is to be understood that values ​​expressed as ranges can represent specific values ​​or subranges within the ranges set forth in different embodiments of the invention, up to the tenth unit of the lower limit of the range, unless the context clearly indicates otherwise.

[0161] In addition, it is to be understood that certain embodiments of the present invention that fall within the prior art may be expressly excluded from any one or more of the claims. Such embodiments may be excluded even if the exclusion is not expressly set forth herein, since they are deemed to be known to those of skill in the art. Certain embodiments of the compositions of the present invention (e.g., any nucleic acids or proteins encoded thereby; any methods of manufacture; any methods of use, etc.) may be excluded from one or more of the claims for any reason, whether related to the existence of prior art or not.

[0162] All sources, e.g., references, publications, databases, database entries, and techniques cited herein, are incorporated by reference into this application, even if not expressly stated in the citation. In the event of conflicting language between the sources and this application, the language in this application will control.

[0163] Paragraph and table headings are not intended as limiting.

Claims

1. 1. An optical scanning system for imaging a moving substrate, comprising: a. a stage movable along an axis and configured to hold a substrate including a plurality of fields and at least one biomolecule; b. Objective lens; c) a camera capable of acquiring an image of one of the plurality of fields through the objective lens, the image being acquired via an optical path defined from one of the plurality of fields through the objective lens to the camera during acquisition of the image; d. A motion tracking mirror mounted along the optical path; e. an electric motor operatively coupled to the motion tracking mirror for actuating angular motion of the motion tracking mirror along the axis of stage motion; f. a controller module operatively coupled to the electric motor for sending a drive signal to the electric motor, the controller module capable of generating the drive signal in response to an acceleration of the movement of the stage or substrate along the axis; and g. an encoder sensor in electrical communication with the controller module, the encoder sensor detecting position or velocity information of the substrate or the stage, and having an encoder pitch of less than 2 μm; 1. An optical scanning system comprising:

2. 2. The optical scanning system of claim 1, wherein the encoder sensor transmits position or velocity information to the controller module, the controller module being configured to generate the drive signal in response to the velocity signal received from the encoder sensor.

3. 3. The optical scanning system of claim 2, wherein the encoder sensor is a linear encoder.

4. 4. The optical scanning system of claim 3, wherein the linear encoder is a non-interferometric encoder.

5. 5. The optical scanning system of claim 3 or 4, wherein the linear encoder is optical, magnetic, capacitive, inductive, or uses eddy current.

6. 6. The optical scanning system of claim 2, wherein the velocity signal of the encoder sensor is calibrated as the stage moves along the axis.

7. 7. An optical scanning system according to any one of claims 1 to 6, characterized in that the drive signal varies in relation to both the predetermined velocity and the measured velocity.

8. 8. The optical scanning system of claim 1, wherein the stage includes a mechanical bearing positioned to facilitate movement of the stage along an axis.

9. 9. The optical scanning system of claim 1, wherein the objective lens has a magnification selected from the group consisting of 5X, 10X, 20X, 30X, 40X, 50X, 60X, 70X, 80X, 90X, or 100X.

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