Apparatus and method for evaluating magnetic bearings

Abstract

To provide a device and a method for evaluating a magnetic bearing.SOLUTION: A magnetic bearing has a plurality of magnetic elements in order to rotatably pivot a rotor by a stator. A device comprises a measurement device and an evaluation device. The measurement device detects a measurement value of the magnetic field intensity in one of a plurality of prescribed positions in the plurality of magnetic elements. The evaluation device is connected to the measurement device so as to be communicative therewith in order to receive the measurement value of the magnetic field intensity which is detected by the measurement device, and also, in order to determine magnetization characteristics with respect to each of the magnetic elements on the basis of the measurement value of the magnetic field intensity. Furthermore, the evaluation device receives geometric shape data of the magnetic bearing, and determines at least one resultant force which is exerted to the rotor by the magnetic elements on the basis of geometric data and the magnetization characteristics of the magnetic elements.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a device and a method for evaluating a magnetic bearing, and further to a vacuum pump, the magnetic bearing of which is optimized using said device and / or said method. [Background technology]

[0002] In vacuum pumps, especially turbomolecular pumps, typical magnetic bearings are used to support the rapidly rotating rotor of the pump on the stator. In many cases, turbomolecular pumps are equipped with hybrid bearings, in which the rotor is supported by a combination of a rolling bearing on the low pressure side of the pump and a magnetic bearing with permanent magnets arranged on the high vacuum side of the pump. Such permanent magnet bearings include a rotor part and a stator part, each of which has several pairs of ring magnets. The ring magnets are axially magnetized, i.e. parallel to the rotation axis of the rotor of the turbomolecular pump, arranged concentrically with each other and configured to repel each other. This means that the magnetization of the ring magnets in the stator and rotor parts of the magnetic bearing are oriented opposite to each other in successive rings.

[0003] Like any other rotating body, the rotor of a vacuum pump always has some residual unbalance which results in forces in the radial direction. These forces can be transmitted to the housing of the vacuum pump via the rolling bearings and permanent magnet bearings of the vacuum pump, resulting in vibrations and noise. However, certain applications, such as for example electron microscopes or ion mobility spectrometers, require very low vibration levels in the turbomolecular pumps used.

[0004] In these and other applications it is therefore necessary to minimize the vibrations and noise of turbomolecular pumps. This can be done on the one hand by minimizing the residual unbalance of the rotor by optimized balancing and on the other hand by analyzing and improving the bearings of the rotor relative to the stator or the housing of the vacuum pump. The present application relates to such an analysis and improvement of magnetic bearings for the rotor of a vacuum pump.

[0005] On the one hand, an ideally magnetized ring magnet has a magnetization axis that corresponds exactly to the axis of symmetry of the ring magnet or the rotor to be supported, and on the other hand, the magnetic material of such an ideal ring magnet is perfectly uniform. However, in reality, the magnetization of a ring magnet deviates from that of an ideal ring magnet due to various factors or magnetization properties. For example, angular errors may occur in which the magnetic preferred direction of the ring magnet deviates from its axis of symmetry or from the axis of symmetry of the rotor, and the magnetic material of the ring magnet may have inhomogeneities. In addition, a rotationally symmetric tilt of the actual magnetization may occur along the circumference of the ring magnet, which is referred to as North / South asymmetry (German: Nord / Sued-Asymmetrie). Furthermore, the ring magnet may have mechanical deviations of the shape of the ideal ring magnet, for example with respect to the desired dimensions and due to microcracks or peelings in or on the respective ring magnet.

[0006] The individual magnetization characteristics of the ring magnets result in additional forces, especially radial forces, on the entire permanent bearing. In the case of radial forces, the rapid rotation of the rotor of the turbomolecular pump results in harmonically or periodically circulating radial forces, also called magnetic bearing errors. The magnetic bearing errors are therefore vectors with magnitude and angular direction, just like the radial forces. Such magnetic bearing errors affect the operating characteristics of the rotor in the turbomolecular pump, especially at low rotation speeds.

[0007] In addition, the temperature rise of the rotor during the operation of the turbomolecular pump can cause an axial displacement between the ring magnet of the rotor and the ring magnet of the stator, resulting in a further change in the axial force of the rotor. It has been found that the rotating radial force and the corresponding magnetic bearing error are strongly dependent on such axial displacement. This can affect the starting of the rotor of the turbomolecular pump, and the pump can be vibratory and acoustically noticeable during this operation, which can hinder the above-mentioned applications. In addition, an increased stray magnetic field can be caused by such turbomolecular pump, hindering such applications that require the lowest possible stray magnetic field. Summary of the Invention [Problem to be solved by the invention]

[0008] The object of the present invention is to provide an apparatus and a method which allow the evaluation of a magnetic bearing in order to reduce the magnetic bearing error and / or the stray magnetic field of the magnetic bearing in order to optimize the magnetic bearing. [Means for solving the problem]

[0009] The object of the present invention is achieved by a device and a method having the features of the independent claims. Advantageous developments of the invention are set out in the dependent claims, the description and the drawings.

[0010] The device is intended for evaluating magnetic bearings, in particular magnetic bearings of turbomolecular pumps, the magnetic bearings having a plurality of magnetic elements for rotatably supporting a rotor on a stator, the device comprising a measuring device and an evaluation device, the measuring device being configured to detect measurements of the magnetic field strength at a plurality of predefined positions of a respective one of the plurality of magnetic elements, and the evaluation device being communicatively connected to the measuring device.

[0011] The evaluation device is configured to receive, for each of the magnetic elements, measurements of the magnetic field strength detected by the measurement device, and to determine a magnetization characteristic for each of the magnetic elements based on the measurements of the magnetic field strength. The evaluation device is further configured to receive predetermined geometry data of the magnetic bearing, and to determine at least one resultant force exerted by the magnetic elements on the rotor based on the predetermined geometry data and based on the magnetization characteristic of each of the magnetic elements. The evaluation device is further configured to determine and output an evaluation of the magnetic bearing based on the resultant force.

[0012] The detection of the magnetic field strength at the predetermined positions of each magnetic element may, for example, include detecting the magnetic field strength at equally spaced measurement points along the circumference of each magnetic element. Furthermore, the magnetic field strength of a ring segment of each magnetic element, which may extend over an angle of, for example, 45° or 90°, may be integrated, for example, by averaging the measurement points of the magnetic field strength located within each ring segment. The measurement device may, for example, comprise one or more Hall probes.

[0013] The magnetization characteristics of each magnetic element may be represented by one or more magnetization vectors, determined as a resultant vector for a segment or section of each magnetic element, or for the entire magnetic element. The magnetization characteristics may also include or represent deviations from an ideal magnetization of each magnetic element. These deviations from the ideal magnetization may include angular errors of the resultant magnetization vector with respect to the axis of symmetry of the magnetic element, magnetization non-uniformity, and north / south asymmetry. North / south asymmetry is caused by the inclination of the respective local magnetization direction along the circumference of each magnetic element with respect to the axis of symmetry of the magnetic element. Deviations from the ideal magnetization may also be caused by local deviations in magnitude based on the average value of the magnetization of the entire magnetic bearing, where each local magnetization is described by a position-dependent magnetization vector. Deviations from the ideal magnetization may further be caused by mechanical defects of each magnetic element, which may include deviations from the predetermined dimensions of the magnetic element, microcracks, and peeling.

[0014] The predetermined geometric data of the magnetic bearing may include dimensions of each magnetic element of the magnetic bearing, the number of magnetic elements in the magnetic bearing, and their respective distances from each other. To determine the at least one resultant force exerted by the magnetic elements on the rotor, a coefficient matrix can be formed that describes the effect of the magnetization properties of each of the magnetic elements present in the magnetic bearing on the respective forces exerted by each magnetic element. The resultant force can be determined by vector addition of these individual forces of each magnetic element.

[0015] The method according to the invention therefore allows, using given geometric data, to predict at least one resultant force exerted by the magnetic elements on the rotor before the magnetic bearing is assembled from the magnetic elements. The prediction of the resultant force allows the evaluation of the magnetic bearing assembled from the magnetic elements, this resultant force having to be as low as possible, for example in order to achieve an optimal support of the rotor on the stator. The device is therefore characterised in that it predicts the resultant force and evaluates the magnetic bearing on this basis, thereby providing a basis for its optimization.

[0016] According to an embodiment, the evaluation device can further be configured to determine at least one resultant force depending on the axial displacement of the rotor relative to the stator. It has been found that for optimal operating properties of a magnetic bearing, for example in a turbomolecular pump, the predicted resultant force should be as independent as possible of the axial displacement of the rotor relative to the stator. Determining the resultant force as a function of the axial displacement of the rotor relative to the stator therefore represents a further criterion for evaluating the magnetic bearing. Thereby, when optimizing the magnetic bearing, it can be taken into account that the resultant force should be as independent as possible of the axial displacement between the rotor and the stator, and the magnetic elements for the magnetic bearing can be selected or designed accordingly. Furthermore, the predetermined geometric data of the magnetic bearing can be adjusted in order to make the resultant force as independent as possible of the axial displacement between the rotor and the stator.

[0017] The evaluation device is further configured to form a coefficient matrix describing the dependence of the individual forces exerted by each magnetic element on the respective magnetization properties of the individual magnetic elements and to determine the resultant force by vectorially adding the individual forces of each magnetic element. The coefficient matrix may thus be used to establish a relationship between the respective magnetization properties of the individual magnetic elements and the resultant force resulting from each measurement of the magnetic field strength using the measurement device. Furthermore, the use of the coefficient matrix may facilitate replacement of single or multiple magnetic elements when the magnetic bearing is optimized with respect to the resultant force by iterative application of the device.

[0018] The evaluation device can further be configured to determine and output the magnetic bearing error based on at least one resultant force and / or the stray magnetic field of the magnetic bearing based on the magnetization characteristics of each of the magnetic elements and based on the predetermined geometric data of the air bearing. As already explained at the beginning, the magnetic bearing error is caused by harmonically circulating radial forces resulting from the magnetization characteristics of the individual magnetic elements and caused by the rotation of the rotor. The magnetic bearing error can therefore be derived from at least one resultant force, and similarly the magnetic bearing error is a vector having a magnitude and an angular direction or position. The magnetic bearing error and the stray magnetic field of the magnetic bearing can represent alternative or additional criteria for evaluating and optimizing the magnetic bearing. Whether the magnetic bearing error, the stray magnetic field of the magnetic bearing or both variables are used to evaluate the magnetic bearing may depend on the respective environment in which the magnetic bearing or, for example, a turbomolecular pump including such a bearing is to be used. For example, whether the magnetic bearing of a turbomolecular pump is optimized, for example, with respect to the minimization of the magnetic bearing error or with respect to the minimization of the stray magnetic field of the magnetic bearing, may depend on the application of the turbomolecular pump.

[0019] Furthermore, the apparatus may comprise an optimization device configured to vary predetermined geometrical data of the magnetic bearing and / or parameters of the magnetic elements such that the magnetic bearing error and / or the magnetic stray field of the magnetic bearing meets predetermined optimization conditions. Since the evaluation device is capable of outputting a prediction of the magnetic bearing error and / or the stray field of the entire magnetic bearing, it can further be provided that the apparatus determines by means of the optimization device and provides information on how the predetermined geometrical data of the magnetic bearing and / or parameters or properties of the magnetic elements should be changed in order to improve or optimize the magnetic bearing, i.e. with respect to the magnetic bearing error and / or the magnetic stray field.

[0020] The optimization criteria may include, for example, that the magnetic bearing error and / or the stray magnetic field are as small as possible in magnitude. Modifying the geometric data of the magnetic bearing may include, for example, modifying the number of magnetic elements in the magnetic bearing, the dimensions of the magnetic elements, and / or the distance between the magnetic elements, and then determining again at least one resultant force, or again the magnetic bearing error and the stray magnetic field, and comparing these to previously determined values ​​of the forces, magnetic bearing error, and / or magnetic stray field according to an iterative process.

[0021] In a similar way, the parameters of the magnetic elements can be changed, i.e. for example by changing their magnetization and / or dimensions. Furthermore, it can be envisaged that one or more magnetic elements are replaced by other magnetic elements for which the measuring device has previously detected measurements of the magnetic field strength at a number of predefined positions. In this way, a magnetic bearing optimized for a group of magnetic elements provided and their database, with respect to magnetic bearing errors and / or stray magnetic fields, can be constructed overall.

[0022] According to a further embodiment, the magnetic bearing can be configured as a permanent magnet bearing, in which the magnetic element comprises a number of ring magnets, which may comprise, for example in a turbomolecular pump, inner and outer ring magnets, each assigned to a rotor or a stator. The use of permanent magnet bearings with ring magnets can enable the design of cost-effective and robust magnetic bearings.

[0023] For such permanent magnet bearings, the measurement device can also be configured to determine the magnetic field strength along each individual circumference of the ring magnet of the magnetic bearing. For such determination, a Hall probe can be used. The magnetic field strength can be determined for a predetermined number of measurement points along the circumference of the respective ring magnet, and the magnetic field strength can be integrated for a segment of the ring magnet, for example by averaging over the measurement points present in the respective segment. The segment can extend, for example, over an angle of 45° or 90°. This integration of the measurement data for the magnetic field strength can reduce the calculation time that the device requires to determine the result, i.e. to determine at least one resultant force, a magnetic bearing error, and / or a magnetic stray field.

[0024] According to a further aspect, there is further contemplated a method of evaluating a magnetic bearing having a plurality of magnetic elements (particularly in a turbomolecular pump) for rotatably supporting a rotor on a stator. The method comprises: a) measurements of magnetic field strength are detected at a plurality of predetermined locations on each of a plurality of magnetic elements; b) a magnetization characteristic for each of the magnetic elements is determined based on measurements of the magnetic field strength, for example averaged over segments of a ring magnet; c) receiving predetermined geometric data of the magnetic bearing; d) determining at least one resultant force exerted by the magnetic elements on the rotor based on the magnetization characteristics of each of the magnetic elements and based on predetermined geometric data of the magnetic bearing; e) Based on the resultant force, the rating of the magnetic bearing is determined and output. This includes:

[0025] The above-mentioned device is therefore intended to carry out the method steps a) to e) with the aid of the measuring device and the evaluation device. The above explanations regarding the device according to the invention therefore also apply mutatis mutandis to the method according to the invention, in particular the disclosure, advantages and preferred embodiments.

[0026] The at least one resultant force can be determined depending on the axial displacement of the rotor relative to the stator. A coefficient matrix can be formed describing the dependence of the individual forces exerted by each magnetic element on the rotor on the respective magnetization properties of the individual magnetic elements. The resultant force can be determined by vector addition of the individual forces of each magnetic element. Furthermore, a magnetic bearing error can be determined based on the at least one resultant force and / or a stray magnetic field of the magnetic bearing can be determined based on the respective magnetization properties of the magnetic elements and on predetermined geometrical data of the magnetic bearing.

[0027] Furthermore, the predefined geometric data of the magnetic bearing and / or the parameters of the magnetic elements can be modified such that the magnetic bearing error and / or the stray magnetic field of the magnetic bearing meet predefined optimization conditions.

[0028] According to a further embodiment, the magnetic bearing may be configured as a permanent magnet bearing and the magnetic elements may comprise a predetermined number N of ring magnets. Varying the parameters of the magnetic elements as described above may include that a predetermined plurality M of ring magnets is provided which is greater than the predetermined number N of ring magnets required to form or combine the magnetic bearing. A combination of N ring magnets may be selected from the predetermined number M of ring magnets, where for this combination the magnetic bearing error and / or the stray magnetic field of the magnetic bearing meets a predetermined optimization condition.

[0029] For example, the number M may be 50, so that the ring magnets for the magnetic bearing are selected from a buffer or stock of 50 ring magnets. The predetermined number N of ring magnets for forming or assembling the magnetic bearing may be, for example, 10 in the case of a turbomolecular pump, in which case 5 ring magnets may be provided for the rotor and a further 5 ring magnets may be provided for the stator. However, it is also possible, for example, that 5 ring magnets are first fixedly selected for the stator, and of the remaining ring magnets in the buffer, a combination of 5 ring magnets for the rotor is selected according to the method such that the magnetic bearing error and / or stray field of the entire magnetic bearing, i.e. of the assembled magnetic bearing, meets a predetermined optimization condition, according to which, for example, both are minimized. Thus, in both cases, the method makes it possible to determine the best combination of N ring magnets for the M ring magnets of the buffer.

[0030] According to a further embodiment, all possible combinations of N ring magnets forming a magnetic bearing can be determined for a given plurality of M ring magnets. For each of these determined combinations of N ring magnets, steps a) to e) of the method can be performed to determine for each combination a respective magnetic bearing error based on the magnetization characteristics of the N ring magnets of the respective combination and / or a respective stray field of the magnetic bearing based on the magnetization characteristics of the N ring magnets of the respective combination and based on the given geometric data of the magnetic bearing. Finally, a combination of N ring magnets can be selected whose (among the combinations of N ring magnets) respective magnetic bearing error and / or respective magnetic stray field best meets a given optimization condition.

[0031] The possible combinations of N ring magnets forming the magnetic bearing can be determined as permutations without repetition. Furthermore, the order of the ring magnets in the magnetic bearing can be taken into account. Thus, steps a) to e) of the method for predicting at least one resultant force in the rotor can be carried out iteratively for each of the determined combinations. By selecting the "best" combination in which the magnetic bearing error and / or stray field is closest to the predetermined optimization condition, it can be ensured that for a plurality of M ring magnets, a better combination of N ring magnets according to the predetermined optimization condition is not actually found.

[0032] The predetermined optimization condition may include that the magnetic bearing error and / or stray magnetic field remain substantially constant along the axial direction of the magnetic bearing. "Substantially constant" in this context means that the maximum relative deviation of the amount and / or angular direction or angular position of the magnetic bearing error and / or stray magnetic field along the axial direction of the magnetic bearing is not exceeded, for example by an amount of up to 1-5%. The optimization condition is therefore specified such that the magnitude and angular position or phase of the magnetic bearing error are only allowed to change slightly along the axial direction. The predetermined optimization condition that the magnetic bearing error and / or stray magnetic field are as constant as possible may therefore be such that the magnetic bearing error and / or magnetic stray magnetic field in the axial direction has a curve that is as flat as possible. For example, in the case of a turbomolecular pump, it has been found that such a flat curve of the magnetic bearing error or the radial force leads to an optimized and smooth running behavior of the magnetic bearing or rotor of the turbomolecular pump.

[0033] Alternatively or additionally, the predefined optimization condition may include that the respective amount of the magnetic bearing error and / or the magnetic stray field is smaller than a predefined threshold value. According to this alternative optimization condition, the smallest possible magnetic bearing error and / or the lowest possible stray field should be achieved. This can be set, for example, for the use of magnetic bearings (e.g. for a turbomolecular pump used in a particular environment).

[0034] According to a further aspect, a vacuum pump, in particular a turbomolecular pump, is contemplated, comprising a permanent magnetic bearing with N ring magnets, said ring magnets being selected from a predetermined number M of ring magnets according to the above-mentioned method such that the magnetic bearing error and / or the magnetic levitation field of the permanent magnetic bearing meets a predetermined optimization condition. The given optimization conditions are: the magnetic bearing error and / or stray magnetic field remain substantially constant along the axial direction of the magnetic bearing or during displacement along the axial direction of the magnetic bearing; and / or the respective amounts of magnetic bearing error and / or magnetic stray field are less than a predetermined threshold value; It may include the following.

[0035] The invention will now be described, purely by way of example, with the aid of advantageous embodiments and with reference to the accompanying drawings, in which: FIG. [Brief description of the drawings]

[0036] [Figure 1] FIG. 1 shows a perspective view of a turbomolecular pump. [Diagram 2] 2 shows an underside view of the turbomolecular pump of FIG. 1; [Diagram 3] 3 shows a cross-sectional view of the turbomolecular pump taken along the section line AA shown in FIG. 2. [Figure 4] 3 shows a cross-sectional view of the turbomolecular pump taken along the section line BB shown in FIG. 2. [Diagram 5] 3 shows a cross-sectional view of the turbomolecular pump taken along the line CC shown in FIG. 2. [Figure 6] 1 shows diagrams of different magnetization characteristics of a ring magnet of a permanent magnet bearing. [Figure 7] FIG. 2 shows a block diagram of a magnetic bearing evaluation device. [Figure 8] 1 shows a block diagram of an algorithm executed by the device for evaluating a magnetic bearing. [Figure 9]4 shows a typical diagram for the course of the magnetic bearing error due to the axial displacement between the rotor and the stator for a non-optimized and an optimized permanent magnet bearing. [Figure 10] 5 illustrates method steps for optimizing a permanent magnet bearing. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0037] The turbomolecular pump 111 shown in Fig. 1 has a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se. Gas from the recipient can be drawn in through the pump inlet 115 and transferred through the pump to a pump outlet 117, to which a pre-vacuum pump, for example a rotary vane pump, can be connected.

[0038] The inlet flange 113 constitutes the upper end of a housing 119 of the vacuum pump 111 when the vacuum pump is oriented according to Fig. 1. The housing 119 has a lower part 121 in which an electronics housing 123 is arranged laterally. In the electronics housing 123 the electric and / or electronic components of the vacuum pump 111 are accommodated, for example for operating an electric motor 125 arranged in the vacuum pump (see also Fig. 3). The electronics housing 123 is provided with a number of ports 127 for accessories. In addition, a data interface 129, for example according to the RS485 standard, and a power supply port 131 are arranged in the electronics housing 123.

[0039] There are also turbomolecular vacuum pumps which, rather than having such an attached electronics housing, are connected to external drive electronics.

[0040] The housing 119 of the turbomolecular pump 111 is provided with a ventilation inlet 133, in particular in the form of a ventilation valve, through which the vacuum pump 111 can vent. Furthermore, in the region of the lower part 121, a sealing gas port 135, also called scavenging gas port, is arranged, through which scavenging gas can be introduced into the motor space 137, in which the electric motor 125 is accommodated in the vacuum pump 111, in order to protect the electric motor 125 (see, for example, FIG. 3) from the gases transported by the pump. Furthermore, in the lower part 121, two coolant ports 139 are arranged, one of which is arranged as an inlet for a coolant and the other coolant port as an outlet for a coolant, which can be introduced into the vacuum pump for cooling. Other existing turbomolecular vacuum pumps (not shown) are operated with air cooling only.

[0041] The underside 141 of the vacuum pump can be used as a stand surface, so that the vacuum pump 111 can be operated standing on the underside 141. However, the vacuum pump 111 can also be fixed to the recipient via the inlet flange 113, and thus operated in a somewhat suspended state. In addition, the vacuum pump 111 can be configured to be operated when oriented differently than shown in FIG. 1. It is also possible to realize embodiments of the vacuum pump in which the underside 141 can be oriented so that it faces sideways or upwards, rather than facing downwards. In this case, essentially any angle is possible.

[0042] Other existing turbomolecular vacuum pumps (not shown), particularly those larger than the pump illustrated herein, cannot be operated in an upright position.

[0043] 2 further comprises various bolts 143 by means of which the parts of the vacuum pump, not further specified here, are fixed to one another. For example, a bearing cover 145 is fixed to the lower side 141.

[0044] In addition, in the underside 141, fastening holes 147 are arranged, via which the pump 111 can be fixed, for example, to a mounting surface, which is not possible in the case of other existing turbomolecular vacuum pumps, in particular those larger than the pumps shown individually.

[0045] 2-5 show a coolant line 148 through which coolant may be circulated, the coolant being introduced and withdrawn via coolant port 139. As shown in FIG.

[0046] As the cross-sectional views of FIGS. 3-5 show, the vacuum pump has multiple process gas pumping stages to transport process gas present at pump inlet 115 to pump outlet 117.

[0047] A rotor 149 is disposed within the housing 119 and includes a rotor shaft 153 rotatable about an axis of rotation 151 .

[0048] The turbomolecular pump 111 has a number of turbomolecular pump stages interposed in series with each other operatively in the pump, with a number of radial rotor disks 155 fixed to the rotor shaft 153 and a stator disk 157 disposed between the rotor disks 155 and fixed to the housing 119. In this case, each rotor disk 155 and adjacent stator disk 157 constitutes one turbomolecular pump stage. The stator disks 157 are held at a desired axial distance from each other by spacer rings 159.

[0049] In addition, the vacuum pump has Holweck pump stages nested radially within one another, effectively interleaving the pump in series with one another. There are other existing turbomolecular vacuum pumps that do not include Holweck pump stages.

[0050] The rotor of the Holweck pump stage comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical shell-shaped Holweck rotor sleeves 163, 165 fixed to and supported by the rotor hub 161, which are aligned coaxially with respect to the rotation axis 151 and nested radially within one another. Furthermore, two cylindrical shell-shaped Holweck stator sleeves 167, 169 are provided, which are also aligned coaxially with respect to the rotation axis 151 and nested radially within one another.

[0051] The pump active surfaces of the Holbeck pump stage are constituted by the shell surfaces, i.e. the radial inner and / or outer surfaces, of the Holbeck rotor sleeves 163, 165 and the Holbeck stator sleeves 167, 169. The radial inner surface of the outer Holbeck stator sleeve 167 faces the radial outer surface of the outer Holbeck rotor sleeve 163, forming a radial Holbeck gap 171, and together with this radial outer surface constitutes the first Holbeck pump stage following the turbomolecular pump stage. The radial inner surface of the outer Holbeck rotor sleeve 163 faces the radial outer surface of the inner Holbeck stator sleeve 169, forming a radial Holbeck gap 173, and together with this radial outer surface constitutes the second Holbeck pump stage. The radial inner surface of the inner Holbeck stator sleeve 169 faces the radial outer surface of the inner Holbeck rotor sleeve 165, forming a radial Holbeck gap 175, and together with this radial outer surface constitutes the third Holbeck pump stage.

[0052] A radially extending passage may be provided at the lower end of the Holweck rotor sleeve 163, which connects the radially outer Holweck gap 171 with the central Holweck gap 173. In addition, a radially extending passage may be provided at the upper end of the inner Holweck stator sleeve 169, which connects the central Holweck gap 173 with the radially inner Holweck gap 175. The nested Holweck pump stages are thereby connected in series with one another. Furthermore, a connecting passage 179 to the outlet 117 may be provided at the lower end of the radially inner Holweck rotor sleeve 165.

[0053] The pump active surfaces of the Holweck stator sleeves 167, 169 each include a plurality of Holweck grooves extending axially in a spiral fashion about the axis of rotation 151, while the shell surfaces of the opposing Holweck rotor sleeves 163, 165 are smoothly formed to propel gas in the Holweck grooves to operate the vacuum pump 111.

[0054] For rotatably bearing the rotor shaft 153 , a rolling bearing 181 is provided in the region of the pump outlet 117 and a permanent magnetic bearing 183 is provided in the region of the pump inlet 115 .

[0055] In the region of the rolling bearing 181, the rotor shaft 153 is provided with a conical spray nut 185 with an outside diameter that increases towards the rolling bearing 181. The spray nut 185 is in sliding contact with at least one wiper of the working medium accumulator. In the case of other existing turbomolecular vacuum pumps (not shown), instead of the spray nut, a spray bolt can be provided. Since different configurations are therefore possible, the term "spray tip" is also used in this connection.

[0056] The working medium accumulator comprises a number of hygroscopic discs 187 stacked one on top of the other, which absorb the working medium, for example a lubricant, for the rolling bearings 181 .

[0057] During operation of the vacuum pump 111, the working medium is transferred by capillary action from the working medium accumulator via the wiper to the rotating spray nut 185 and, due to centrifugal force, is transported along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 towards the rolling bearing 181, where it fulfills, for example, a lubrication function. The rolling bearing 181 and the working medium accumulator are surrounded in the vacuum pump by a trough-shaped insert 189 and a bearing cover 145.

[0058] The permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which has a ring stack of permanent magnet rings 195, 197 stacked axially one above the other. The ring magnets 195, 197 face each other forming a radial bearing gap 199, with the rotor-side ring magnet 195 arranged radially outward and the stator-side ring magnet 197 arranged radially inward. The magnetic field present in the bearing gap 199 generates a magnetic repulsion force between the ring magnets 195, 197 which produces a radial bearing of the rotor shaft 153. The rotor-side ring magnet 195 is supported by a carrier part 201 of the rotor shaft 153, which surrounds the ring magnet 195 from the radial outside. The ring magnet 197 on the stator side is supported by a carrier part 203 on the stator side, which extends through the ring magnet 197 and is suspended on radial braces 205 of the housing 119. Parallel to the axis of rotation 151, the ring magnet 195 on the rotor side is fixed by a cover element 207 connected with the carrier part 201. The ring magnet 197 on the stator side is fixed in one direction, parallel to the axis of rotation 151, by a fixing ring 209 connected with the carrier part 203 as well as by a fixing ring 211 connected with the carrier part 203. In addition, a disc spring 213 can be provided between the fixing ring 211 and the ring magnet 197.

[0059] In the magnetic bearing, an emergency or safety bearing 215 is provided, which during standard operation of the vacuum pump 111 runs free without contact and only engages to form a radial stop for the rotor 149 in case of excessive radial displacement of the rotor 149 relative to the stator, in order to prevent a collision between structures on the stator side and structures on the rotor side. The safety bearing 215 is formed as a lubricated rolling bearing and together with the rotor 149 and / or the stator forms a radial gap which causes the safety bearing 215 to be released during standard pump operation. The radial displacement with which the safety bearing 215 engages is set to be large enough so that the safety bearing 215 does not engage during standard operation of the vacuum pump, and at the same time small enough so that a collision between structures on the stator side and structures on the rotor side is prevented under all circumstances.

[0060] The vacuum pump 111 has an electric motor 125 as a drive device for rotating a rotor 149. The anchor of the electric motor 125 is constituted by the rotor 149, whose rotor shaft 153 extends through the motor stator 217. A permanent magnet device can be arranged on the part of the rotor shaft 153 extending through the motor stator 217, either radially outwardly or embedded. Between the motor stator 217 and the part of the rotor 149 extending through the motor stator 217, an intermediate space 219 is arranged, which intermediate space has a radial motor gap, via which the motor stator 217 and the permanent magnet device can be magnetically influenced to transmit a drive torque.

[0061] The motor stator 217 is fixed in the housing in a motor space 137 provided for the electric motor 125. Via a sealing gas port 135, a sealing gas, also called scavenging gas and which may be, for example, air or nitrogen, can reach into the motor space 137. Via the sealing gas, the electric motor 125 can be protected from the process gas, for example from corrosive components of the process gas. The motor space 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure prevails in the motor space 137 at least approximately, which is generated by a pre-vacuum pump connected to the pump outlet 117.

[0062] In addition, between the rotor hub 161 and the wall 221 defining the motor space 137, a so-called labyrinth seal 223, known per se, can be provided in order to achieve good sealing of the motor space 217, in particular with respect to the Holweck pump stage located radially outward.

[0063] In Fig. 6, the different magnetization characteristics of the ring magnets 195, 197 of the permanent magnetic bearing 183 are shown diagrammatically. The top four figures show a cross-sectional view of one of the ring magnets 195, 197 together with the local magnetization vector 600 and the symmetry axis 605 of the ring magnet 195, 197. The term "local magnetization vector 600" in this context means that the magnetization is considered locally along the circumference of the ring magnet 195, 197, e.g. using cylindrical coordinates, rather than globally or summarily for the entire ring magnet 195, 197. The bottom two figures each show a schematic top view of one of the ring magnets 195, 197.

[0064] The top diagram shows an ideal magnetization 610 of the ring magnets 195, 197, where the magnetization or local magnetization vector 600 has a substantially constant magnitude around the circumference of the ring magnets 195, 197 and is always oriented parallel to the axis of symmetry 605 of the ring magnets 195, 197. In contrast, the second diagram below shows an angular error 620, where the magnitude of the magnetization vector 600 is substantially constant around the circumference of the ring magnets 195, 197, but is tilted with respect to the axis of symmetry 605. This tilt or directional deviation of the local magnetization vectors 600 of the individual ring magnet segments from the axis of symmetry 605 is not constant along the circumference of the ring magnets 195, 197, but rather is variable.

[0065] The third diagram below illustrates an inhomogeneity 630 in which the magnetization vector 600 is oriented parallel to the axis of symmetry 605 around the circumference of the ring magnets 195, 197, but the magnitude of the magnetization vector 600 varies around the circumference of the ring magnets 195, 197.

[0066] The bottom diagram illustrates the so-called North / South effect 640, where the local magnetization vectors 600 of the individual ring magnet segments have a constant magnitude around the circumference of the ring magnets 195, 197 and are inclined in the same direction, and therefore constant, with respect to the axis of symmetry 605 along the circumference of the ring magnets 195, 197 in local view in cylindrical coordinates. This results in an overall conical orientation of the respective magnetization vectors 600 with respect to the axis of symmetry 605 around the circumference of the ring magnets 195, 197.

[0067] 6 shows a top view of ring magnets 195, 197 with microcracks 650, while the bottommost view of Fig. 6 shows a top view of ring magnets 195, 197 with mechanical damage in the form of so-called "peelings" 660. Microcracks 650 and peelings 660 can result in non-uniformity of the magnetization or magnetization vector 600 along the circumference of the ring magnets 195, 197 and / or incorrect orientation of the magnetization vector 600 across the circumference of the ring magnets 195, 197 relative to the axis of symmetry 605.

[0068] The above-mentioned individual magnetization characteristics of each ring magnet 195, 197, i.e. the respective deviations from the ideal magnetization 610, cause additional forces in the permanent magnet bearing 183, in particular radial forces. In the case of radial forces, when the rotor 149 rotates (see Figs. 3-5), a harmonically rotating radial force, also called magnetic bearing error, is generated. The magnetic bearing error, like each radial force, is therefore a vector with a magnitude and an angular direction or position. Such a magnetic bearing error, like an unbalance of the rotor 149, affects or disturbs the operating characteristics of the rotor 149 of the turbomolecular pump 111, especially at low rotational speeds. Due to the magnetic bearing error, vibrations and noises can occur in the turbomolecular pump 111, just like in the case of an unbalance. The device according to the invention and the method according to the invention are for determining the magnetic stray fields for the permanent magnet bearing 183, which can be caused by the magnetic bearing error and / or the individual magnetization characteristics of the ring magnets 195, 197, also shown in Fig. 6. The permanent magnet bearings 183 may be evaluated and then optimized based on the magnetic bearing error and / or the magnetic stray field.

[0069] 7 shows a block diagram of an apparatus 700 for evaluating a permanent magnet bearing 183 of a turbomolecular pump 111, the permanent magnet bearing 183 having a ring magnet 195 in the rotor-side bearing half 191 and a ring magnet 197 in the stator-side bearing half 193 (see FIG. 3 ). The apparatus 700 comprises a measurement device 710, an evaluation device 720 and an optimization device 730.

[0070] The measurement device 710 is intended to detect measurements of the magnetic field strength at a plurality of positions along the circumference of each ring magnet 195, 197. The evaluation device 720 is communicatively connected to the measurement device 710 and configured to execute an algorithm 725, which will be described in more detail in relation to FIG. 8, for determining or predicting at least one resultant force exerted by the ring magnets 195, 197 on the rotor 149. The evaluation device 720 is further configured to determine an evaluation of the permanent magnet bearing 183 based on the determined resultant force and output this to the optimization device 730. The evaluation device 720 further determines the above-mentioned magnetic bearing error and / or magnetic stray field based on the at least one resultant force of the permanent magnet bearing 183 and output this to the optimization device 730. Based on the information provided by the evaluation device 720, the optimization device performs an algorithm 735 or method steps for optimizing the permanent magnet bearing 183, which will be described in more detail in relation to FIG. 10. The optimization is performed before mounting the permanent magnet bearing 183 in the turbomolecular pump 111 with multiple ring magnets 195, 197, and an optimal combination of the ring magnets 195, 197 is selected to evaluate each combination by predicting at least one resultant force for multiple combinations of the ring magnets 195, 197.

[0071] FIG. 8 shows a block diagram of an algorithm 725 for resultant forces executed by the evaluation device 720 (see FIG. 7). At reference "810", measurements of the magnetic field strength are received for individual measurement points or at a number of predefined positions along the circumference of the ring magnets 195, 197 of the permanent magnetic bearing 183, these measurements being detected by the measurement device 710 (see FIG. 7) in advance, i.e. already before the permanent magnetic bearing 183 is mounted. The ring magnets 195, 197 are measured individually during this measurement process. Then, at reference "820", the magnetization characteristics of the ring magnets 195, 197 are determined based on the received values ​​of the magnetic field strength. The magnetization characteristics are represented by one or more magnetization vectors 600 (see FIG. 6), which are determined as resultant vectors for segments or sections of the respective ring magnets 195, 197 or for the entire ring magnet 195, 197. Additionally, the magnetization characteristics include deviations from the ideal magnetization 610 of each ring magnet 195, 197, as shown by reference numerals "620"-"660" in FIG.

[0072] At reference numeral "830," geometric data for the permanent magnetic bearing 183 is received. The geometric data for the permanent magnetic bearing 183 is predetermined and includes the dimensions of each ring magnet 195, 197, the number of ring magnets 195, 197 within the permanent magnetic bearing 183, and their distance from one another.

[0073] Based on the magnetization characteristics determined at "820" of the ring magnets 195, 197 and based on the geometric data received at "830" of the permanent magnet bearing 183, the magnetic bearing error, i.e., the harmonically rotating radial forces acting on the rotor 149 and / or the stray magnetic field of the permanent magnet bearing 183, is calculated at "840". The calculation at "840" is performed using a coefficient matrix, as represented by block 845. The coefficient matrix represents the effect of the magnetization characteristics of each of the ring magnets 195, 197 present in the permanent magnet bearing on the respective forces exerted by each of the ring magnets 195, 197. The resultant force or corresponding magnetic bearing error for the permanent magnet bearing 183 is then determined by vector addition of the individual forces of each of the ring magnets 195, 197.

[0074] Furthermore, the calculation of the magnetic bearing error and / or magnetic stray field for the permanent magnet bearing 183 is performed iteratively, with the axial displacement between the rotor 149 and the stator being changed for each iteration step at "850". The magnetic bearing error and / or the magnetic stray field are thus calculated as a function of this axial displacement between the rotor 149 and the stator. This results in a progression of the magnetic bearing error as a function of the axial displacement of the permanent magnet bearing 183, as depicted in FIG. 9.

[0075] It has been found that for optimal operating characteristics of the permanent magnet bearing 183 or the rotor 149 supported thereby, the magnetic bearing error should have as little dependence as possible on the axial displacement of the rotor 149 relative to the stator, or a flat curve in the case of such displacement.

[0076] In Fig. 9, three different diagrams are shown, each plotting the magnetic bearing error 910 on the y-axis versus the axial displacement 920 on the x-axis. Curves 930, 932, and 934 show examples of the magnetic bearing error 910 for a non-optimized permanent magnet bearing. As can be seen, the amount of the magnetic bearing error 910 varies very strongly with the axial displacement, i.e., compared to a minimum value, it reaches a multiple of the magnitude of the magnetic bearing error as soon as the axial displacement is increased or decreased sufficiently. Furthermore, phase or angular changes of the magnetic bearing error 910 may occur as a function of the axial displacement, but are not shown here.

[0077] For comparison, the lower diagram of Fig. 9 shows a curve of the magnitude of the magnetic bearing error 910 as a function of the axial displacement of the permanent magnet bearing 183 optimized using the algorithm or method shown in Fig. 10, which will be described in more detail below. As can be seen, the optimization of the permanent magnet bearing 183 results in a significantly flatter curve 940 as a function of the axial displacement 920 compared to the curve 934 of the non-optimized permanent magnet bearing, whereby the amount of the magnetic bearing error 910 is about an order of magnitude lower for small and relatively large values ​​of the axial displacement 920 compared to the curve 934 of the non-optimized permanent magnet bearing. The flat curve 940 versus the magnitude of the magnetic bearing error 910 significantly improves the running characteristics of the permanent magnet bearing 183 or the rotor 149.

[0078] In Fig. 10 there is shown diagrammatically an algorithm 735 or corresponding method steps for optimizing the permanent magnet bearings 183. The algorithm 735 for optimizing the permanent magnet bearings 183 is executed by an optimizer 730 (see Fig. 7).

[0079] In "1010", a predetermined number M of ring magnets 195, 197 are provided as a buffer. The predetermined number M of ring magnets 195, 197 is, for example, 50, and is therefore more than the number N of ring magnets 195, 197 required to constitute the permanent magnetic bearing 183. In the example of FIG. 3, five ring magnets 195 and five ring magnets 197 are present in the rotor-side bearing half 191 and the stator-side bearing half 193, respectively. Within the algorithm 735, the buffer of ring magnets 195, 197 provided in "1010" does not include the ring magnets themselves, but rather measurements of their magnetic field strength, determined for each of the buffer ring magnets 195, 197 by the measurement device 710 (see FIG. 7).

[0080] In "1020", all combinations of the M ring magnets 195, 197 present in the buffer provided in "1010" that are capable of forming or assembling the permanent magnetic bearing 183 are determined. For each of these combinations of ring magnets 195, 197, at least one resultant force is predicted or calculated in "1030", as described above in connection with FIG. 8. In other words, the algorithm 725 shown in FIG. 8 is iteratively executed in "1030" for each possible combination of ring magnets 195, 197 determined in "1020". This also includes determining the course or dependence of the resultant force or magnetic bearing error and / or stray magnetic field on the displacement between the rotor 149 and the stator of the turbomolecular pump 111.

[0081] Based on the results determined in "1030", an optimized combination of ring magnets 195, 197 is selected in "1040", which is closest to the predetermined optimization conditions. The optimization conditions include that for each combination of ring magnets 195, 197, there is a magnetic bearing error that is as constant as possible with respect to the displacement of the rotor 149 and the stator, and / or there is a magnetic bearing error and / or a stray field that is as low as possible. Further, in "1040", the best combination is determined (to use this combination) among the selected optimized combinations of ring magnets 195, 197, taking into account the threshold values ​​of the magnetic bearing error and / or the stray field.

[0082] Unused ring magnets 195, 197 of the buffer with M ring magnets are sorted out at "1050" in order to fill the buffer of unused ring magnets 195, 197 with new ring magnets 195, 197 at "1060". This means that corresponding measurements of the magnetic field strength are further provided for the further ring magnets 195, 197, whereby these measurements of the magnetic field strength are detected by the measuring device 710 (see FIG. 7).

[0083] Finally, the combination of ring magnets 195, 197 determined in "1040" is outputted in "1070", and an optimized permanent magnet bearing 183 is formed using this combination of ring magnets 195, 197. This application relates to the invention described in the claims, but also includes the following as other aspects. 1. 1. An apparatus (700) for evaluating a magnetic bearing (183) of, in particular, a turbomolecular pump (111), comprising: The apparatus (700) includes a plurality of magnetic elements (195, 197) for rotatably supporting a rotor (149) on a stator, The apparatus (700) includes a measuring device (710) and an evaluation device (720), the measurement device (710) is configured to detect measurements of magnetic field strength at a plurality of predetermined locations of a respective one of the plurality of magnetic elements (195, 197); The evaluation device (720) is communicatively connected to the measurement device (710), and the evaluation device (720) for receiving, for each of the magnetic elements (195, 197), a measurement of the magnetic field strength detected by the measurement device (710); determining a magnetization characteristic for each of the magnetic elements (195, 197) based on the measured magnetic field strength; To receive predetermined geometric data of the magnetic bearing (183), determining at least one resultant force exerted by the magnetic elements (195, 197) on the rotor (149) based on the magnetization characteristics of each of the magnetic elements (195, 197) and based on predetermined geometric data of the magnetic bearing (183); determining and outputting a rating of the magnetic bearing (183) based on the resultant force; It is composed of 13. An apparatus (700). 2. the evaluation device (710) is further configured to determine at least one resultant force depending on an axial displacement of the rotor (149) relative to the stator. 10. The device (700) according to claim 1, 3. The evaluation device (710) further includes: to form a coefficient matrix describing the dependence of the respective forces exerted by each magnetic element (195, 197) on the rotor (149) on the respective magnetization properties of each magnetic element (195, 197); and To determine the resultant force by vector addition of the individual forces of each magnetic element (195, 197), It is composed of 3. The device (700) according to claim 1 or 2. 4. The evaluation device (710) further includes: determining and outputting a magnetic bearing error based on at least one resultant force and / or a magnetic stray field of said magnetic bearing (183) based on the magnetization characteristics of each of said magnetic elements (195, 197) and based on predetermined geometric data of the magnetic bearing; It is composed of The device (700) according to any one of 1 to 3 above. 5. 5. The device (700) according to claim 4, characterized in that it comprises an optimization device (730) configured to vary predetermined geometrical data of the magnetic bearing (183) and / or parameters of the magnetic elements (195, 197) in such a way that the magnetic bearing error and / or the magnetic stray field of the magnetic bearing (183) satisfy predetermined optimization conditions. 6. The magnetic bearing is configured as a permanent magnetic bearing (183) in which the magnetic element comprises a number of ring magnets (195, 197); and a measuring device (710) configured to determine a magnetic field strength along each respective circumference of said ring magnets (195, 197) of the magnetic bearing (183); 6. The device (700) according to any one of 1 to 5 above. 7. A method for evaluating a magnetic bearing (183) in particular of a turbomolecular pump (111), comprising the steps of: The method, wherein the magnetic bearing comprises a plurality of magnetic elements (195, 197) for rotatably supporting a rotor (149) on a stator, The method comprises: a) measurements of magnetic field strength are detected at a plurality of predetermined locations of a respective one of a plurality of magnetic elements (195, 197); b) determining a magnetization characteristic for each of the magnetic elements (195, 197) based on the measured magnetic field strength; c) predetermined geometric data of the magnetic bearing (183) is received; d) determining at least one resultant force exerted by the magnetic elements (195, 197) on the rotor (149) based on the magnetization characteristics of each of the magnetic elements (195, 197) and based on predetermined geometric data of the magnetic bearing (183); e) based on the resultant force, a rating of the magnetic bearing (183) is determined and output; Including, A method comprising: 8. At least one resultant force is determined in dependence on an axial displacement of the rotor (149) relative to the stator. 8. The method according to claim 7, characterized in that 9. a coefficient matrix is ​​formed that describes the dependence of the respective forces that each magnetic element (195, 197) exerts on the rotor (149) on the respective magnetization properties of each magnetic element (195, 197); and A resultant force is determined by vectorially adding the individual forces of each magnetic element (195, 197). 9. The method according to claim 7 or 8, characterized in that 10. The at least one resultant force To and / or based on the magnetization characteristics of each of the magnetic elements (195, 197) and based on predetermined geometric data of the magnetic bearing, the magnetic stray field of said magnetic bearing (183) is calculated. will be further determined, 10. The method according to any one of 7 to 9 above, 11. 11. The method according to claim 10, characterized in that predetermined geometrical data of the magnetic bearing (183) and / or parameters of the magnetic elements are changed such that the magnetic bearing error and / or the magnetic stray field of the magnetic bearing (183) satisfy predetermined optimization conditions. 12. The magnetic bearing is configured as a permanent magnet bearing (183) and the magnetic element comprises a predetermined number N of ring magnets (195, 197); The parameters of the magnetic elements (195, 197) are changed by: A predetermined plurality M of ring magnets (195, 197) is provided that is greater than a predetermined number N of ring magnets (195, 197). To , The magnetic bearing error and / or the magnetic bearing stray field meet a given optimization condition. A combination of N ring magnets (195, 197) but, Prescribed Multiple number of M ring magnets (195, 197) are selected To , and Including, 12. The method according to claim 11, characterized in that 13. all possible combinations of N ring magnets (195, 197) forming a magnetic bearing are determined for a given plurality of M ring magnets (195, 197); and For each of these determined combinations of N ring magnets (195, 197), steps a) to e) of the method include: for each combination, determining a respective magnetic bearing error based on a respective at least one resultant force and / or a respective stray magnetic field based on the magnetization characteristics of the N ring magnets (195, 197) of each combination and based on predetermined geometric data of the magnetic bearing (183); and Among said combinations of N ring magnets (195, 197), the combination that best satisfies predetermined optimization conditions for the respective magnetic bearing errors and / or the respective magnetic stray fields is selected. 13. The method according to claim 12, characterized in that 14. the predetermined optimization condition includes that the magnetic bearing error and / or stray magnetic field remain substantially constant along the axial direction of the magnetic bearing (183); and / or the predetermined optimization condition includes that the respective amount of the magnetic bearing error and / or the magnetic stray field is less than a predetermined threshold value; 14. The method according to any one of the above items 11 to 13. 15. A vacuum pump, in particular a turbomolecular pump (111), comprising a permanent magnetic bearing (183) having N ring magnets (195, 197), The ring magnets (195, 197) are selected from a predetermined number M of ring magnets (195, 197) according to any one of the methods described in 11 to 14 above, so that the magnetic bearing error and / or the magnetic stray field of the permanent magnetic bearing (183) meets a predetermined optimization condition. Vacuum pump. [Explanation of symbols]

[0084] 111 Turbomolecular Vacuum Pump 113 Inlet flange 115 Pump inlet 117 Pump outlet 119 Housing 121 Lower 123 Electronics Housing 125 Electric Motor 127 Accessory Port 129 Data Interface 131 Power supply port 133 Ventilation Inlet 135 Seal gas port 137 Motor Space 139 Coolant Port 141 Lower side 143 Volts 145 Bearing cover 147 Fixed hole 148 Coolant Line 149 Rotor 151 Rotation axis 153 rotor shaft 155 rotor disk 157 Stator disc 159 Spacer ring 161 rotor hub 163 Holbeck Rotor Sleeve 165 Holbeck Rotor Sleeve 167 Holbeck Sterling Sleeve 169 Holbeck Sterling Sleeve 171 Holbeck Gap 173 Holbeck Gap 175 Holbeck Gap 179 Connecting Passage 181 Rolling bearings 183 Permanent magnet bearing 185 Spray Nut 187 Discs 189 Insert 191 Rotor side bearing half 193 Stator side bearing half 195 Ring Magnet 197 Ring Magnet 199 Bearing Gap 201 Carrier part 203 Carrier part 205 Radial Braces 207 Cover Elements 209 Support Ring 211 Fixing ring 213 Disc spring 215 Emergency or safety bearings 217 Motor Stator 219 Intermediate Space 221 Wall 223 Labyrinth Seal 600 Magnetization Vector 605 Axis of Symmetry 610 Ideal Magnetization 620 Angle Error 630 Heterogeneity 640 NS Effect 650 Microcrack 660 Peeling part 700 Device for Evaluating Magnetic Bearings 710 Measuring Equipment 720 Evaluation Equipment 725 Algorithm for resultant forces 730 Optimizer 735 Optimization Algorithm for Magnetic Bearings 810~850 Steps of the algorithm for the resultant force 910 Magnetic bearing error 920 Axial Displacement 930, 932, 934 Progression of magnetic bearing errors for non-optimized permanent magnet bearings 940 Progression of Magnetic Bearing Errors for Optimized Permanent Magnet Bearings 1010~1070 Steps of the algorithm for optimizing magnetic bearings

Claims

1. An apparatus (700) for evaluating a magnetic bearing (183) of a turbomolecular pump (111), comprising: The apparatus (700) comprises a plurality of magnetic elements (195, 197) for rotatably supporting the rotor (149) on the stator, The apparatus (700) comprises a measurement device (710) and an evaluation device (720), the measurement device (710) is configured to detect measurements of magnetic field strength at a plurality of predetermined locations of a respective one of the plurality of magnetic elements (195, 197); The evaluation device (720) is communicatively connected to the measurement device (710), and the evaluation device (720) for receiving, for each of the magnetic elements (195, 197), a measurement of the magnetic field strength detected by the measurement device (710); determining a magnetization characteristic for each of the magnetic elements (195, 197) based on the measured magnetic field strength; To receive predetermined geometric data of the magnetic bearing (183), determining at least one resultant force exerted by the magnetic elements (195, 197) on the rotor (149) based on the magnetization characteristics of each of the magnetic elements (195, 197) and based on predetermined geometric data of the magnetic bearing (183); determining and outputting an estimate of the magnetic bearing (183) based on the resultant force; It is composed of 13. An apparatus (700).

2. the evaluation device (710) is further configured for determining at least one resultant force in dependence on an axial displacement of the rotor (149) relative to the stator.

2. The apparatus (700) of claim 1 .

3. The evaluation device (710) further comprises: to form a coefficient matrix describing the dependence of the respective forces exerted by each magnetic element (195, 197) on the rotor (149) on the respective magnetization properties of each magnetic element (195, 197); and To determine the resultant force by vectorially adding the individual forces of each magnetic element (195, 197), It is composed of 3. Apparatus (700) according to claim 1 or 2.

4. The evaluation device (710) further comprises: determining and outputting a magnetic bearing error based on at least one resultant force and / or a magnetic stray field of said magnetic bearing (183) based on the magnetization characteristics of each of said magnetic elements (195, 197) and based on predetermined geometric data of the magnetic bearing; It is composed of 3. The apparatus (700) of claim 1 or 2.

5. 5. The device (700) according to claim 4, characterized in that it comprises an optimization device (730) configured to vary predetermined geometrical data of the magnetic bearing (183) and / or parameters of the magnetic elements (195, 197) such that the magnetic bearing error and / or the magnetic stray field of the magnetic bearing (183) satisfy predetermined optimization conditions.

6. The magnetic bearing is configured as a permanent magnetic bearing (183) whose magnetic elements comprise a number of ring magnets (195, 197); and a measuring device (710) configured to determine a magnetic field strength along each respective circumference of said ring magnets (195, 197) of the magnetic bearing (183); 3. The apparatus (700) of claim 1 or 2.

7. A method for evaluating a magnetic bearing (183) of a turbomolecular pump (111), comprising: The method, wherein the magnetic bearing comprises a plurality of magnetic elements (195, 197) for rotatably supporting a rotor (149) on a stator, The method comprises: a) measurements of magnetic field strength are detected at a plurality of predetermined locations of a respective one of a plurality of magnetic elements (195, 197); b) a magnetization characteristic for each of the magnetic elements (195, 197) is determined based on the measurements of the magnetic field strength; c) predetermined geometric data of the magnetic bearing (183) is received; d) determining at least one resultant force exerted by the magnetic elements (195, 197) on the rotor (149) based on the magnetization characteristics of each of the magnetic elements (195, 197) and based on predetermined geometric data of the magnetic bearing (183); e) based on the resultant force, an estimate of the magnetic bearing (183) is determined and output; Including, A method comprising:

8. at least one resultant force is determined in dependence on an axial displacement of the rotor (149) relative to the stator; 8. The method of claim 7.

9. a coefficient matrix is ​​formed that describes the dependence of the respective forces that each magnetic element (195, 197) exerts on the rotor (149) on the respective magnetization properties of each magnetic element (195, 197); and A resultant force is determined by vectorially adding the individual forces of each magnetic element (195, 197); 9. The method according to claim 7 or 8.

10. and / or a magnetic bearing error based on the at least one resultant force. on the basis of the magnetization characteristics of each of the magnetic elements (195, 197) and on the basis of predetermined geometric data of the magnetic bearing, the magnetic stray field of said magnetic bearing (183) will be further determined, 8. The method of claim 7.

11. 11. The method according to claim 10, characterized in that predetermined geometrical data of the magnetic bearing (183) and / or parameters of the magnetic elements are changed such that the magnetic bearing error and / or the magnetic stray field of the magnetic bearing (183) meet predetermined optimization conditions.

12. The magnetic bearing is configured as a permanent magnet bearing (183) and the magnetic element comprises a predetermined number N of ring magnets (195, 197), The change in the parameters of the magnetic elements (195, 197) can be a predetermined plurality M of ring magnets (195, 197) is provided which is greater than a predetermined number N of ring magnets (195, 197); A combination of N ring magnets (195, 197) for which the magnetic bearing error and / or the magnetic bearing stray field satisfies a predetermined optimization condition is selected from a predetermined plurality of M ring magnets (195, 197); and 12. The method of claim 11 .

13. all possible combinations of N ring magnets (195, 197) forming a magnetic bearing are determined for a given plurality of M ring magnets (195, 197); and For each of these determined combinations of N ring magnets (195, 197), steps a) to e) of the method include: for each combination, determining a respective magnetic bearing error based on a respective at least one resultant force and / or a respective stray magnetic field based on the magnetization characteristics of the N ring magnets (195, 197) of each combination and based on predetermined geometric data of the magnetic bearing (183); and Among said combinations of N ring magnets (195, 197), the combination that best satisfies predetermined optimization conditions for the respective magnetic bearing errors and / or the respective magnetic stray fields is selected.

13. The method of claim 12.

14. The predetermined optimization conditions include that the magnetic bearing error and / or stray magnetic field remain substantially constant along the axial direction of the magnetic bearing (183); and / or the predetermined optimization condition includes that the respective amount of the magnetic bearing error and / or the magnetic stray field is less than a predetermined threshold value; 12. The method of claim 11 .

15. A turbomolecular pump (111) comprising a permanent magnet bearing (183) having N ring magnets (195, 197), The ring magnet (195, 197) is selected from a predetermined number M of ring magnets (195, 197) according to the method of any one of claims 11 to 14, in a turbomolecular pump (111) such that the magnetic bearing error and / or the magnetic levitation field of the permanent magnetic bearing (183) meets predetermined optimization conditions.

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