Coordinate measuring machine equipped with a vision probe for performing point-from-focus type measurement operations

Abstract

To provide a coordinate measuring machine (CMM) system that includes use of a vision probe (e.g., for performing operations or the like for determining and / or measuring surface profiles of workpieces).SOLUTION: An angular direction of a vision probe can be adjusted by using a rotation mechanism so that an optical axis of the vision probe is directed toward an angled surface of a workpiece (e.g., in some implementations, the optical axis can be approximately perpendicular to an angled workpiece surface). X-axis, y-axis, and z-axis slide mechanisms (e.g., moving in mutually orthogonal directions) can in conjunction move the vision probe to image acquisition positions along an image stack acquisition axis (which may approximately coincide with the optical axis) for acquiring a stack of images of the angled workpiece surface. Focus curve data can be determined, from analysis of the image stack, which indicates 3-dimensional positions of surface points on the angled surface of the workpiece.SELECTED DRAWING: Figure 1A

Description

[Technical field]

[0001] The present disclosure relates to precision metrology, and more particularly to a coordinate measuring machine with a translation mechanism capable of moving a measurement probe along multiple axes at a desired angle / orientation relative to a workpiece surface. [Background technology]

[0002] A typical known coordinate measuring machine (CMM) includes a probe, a motion mechanism, and a controller. The probe may be a contact measuring probe having a probe tip that physically contacts the workpiece (i.e., object) to be measured. Some examples of contact probes include a touch probe, or a scanning probe (e.g., a probe tip is positioned in contact with and slid along the surface of the workpiece to "scan" it). In operation, the motion mechanism of the CMM holds and moves the probe, and a controller controls the motion mechanism. The motion mechanism is typically capable of moving the probe in mutually orthogonal X, Y, and Z directions.

[0003] One exemplary CMM is disclosed in U.S. Patent No. 7,660,688. As described, a CMM with a moving mechanism moves a contact point of a contact scanning probe along the surface of a workpiece. During this movement, the probe is pressed against the workpiece to obtain displacements of the moving mechanism and the probe, and the CMM combines these displacements to detect the position (measurement value) of the contact point, thereby measuring / determining the surface profile of the workpiece based on the detected surface point. Summary of the Invention [Problem to be solved by the invention]

[0004] While use of such contact probe equipped CMMs has enabled measurement of the surface profile of a workpiece, such processes have certain limitations (e.g., with respect to the amount of time required to perform the process, the physical contact required between the probe tip and the workpiece, etc.) Techniques that may improve or otherwise enhance the use of CMMs to measure and / or otherwise determine the surface profile of a workpiece are desirable. [Means for solving the problem]

[0005] This summary is provided to introduce some concepts in a simplified form that are further described below in the Detailed Description. This summary is not intended to identify key features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.

[0006] According to one aspect, a coordinate measuring machine system is provided that includes a vision probe, a sliding mechanism arrangement, a rotation mechanism, one or more processors, and a memory coupled to the one or more processors. The vision probe includes a light source and an objective lens. The objective lens inputs image light emanating from a surface of the workpiece illuminated by the light source and transmits the image light along an imaging optical path. The objective lens defines an optical axis of the vision probe extending between the objective lens and the workpiece surface. The vision probe also includes a camera that receives the imaging light transmitted along the imaging optical path and provides an image of the workpiece surface. The sliding mechanism arrangement includes an x-axis sliding mechanism, a y-axis sliding mechanism, and a z-axis sliding mechanism configured to move the vision probe in mutually orthogonal x-axis, y-axis, and z-axis directions, respectively, in a machine coordinate system. A rotation mechanism is coupled between the z-axis sliding mechanism and the vision probe and configured to rotate the vision probe in various angular orientations relative to the z-axis of the machine coordinate system. The memory stores program instructions. The program instructions, when executed by the one or more processors, orienting the vision probe using a rotation mechanism such that an optical axis of the vision probe that is not parallel to the z-axis of the machine coordinate system and corresponds to the image stack acquisition axis is oriented toward the surface of the workpiece; acquiring an image stack along an image stack acquisition axis, the image stack including a plurality of images, each image corresponding to a focus position of the vision probe; determining focus curve data indicative of three-dimensional positions of a plurality of surface points on a surface of the workpiece based at least in part on the analysis of the images of the image stack; on one or more processors.

[0007] Furthermore, acquiring the image stack as described above may include: adjusting a plurality of sliding mechanisms to move the vision probe from a first image acquisition position to a second image acquisition position, each along an image stack acquisition axis, such that the vision probe acquires first and second images of the plurality of images at the first and second image acquisition positions, respectively; adjusting the plurality of sliding mechanisms to move the vision probe from the second image acquisition position to a third image acquisition position along the image stack acquisition axis, where the vision probe acquires a third image of the plurality of images at the third image acquisition position; Includes.

[0008] According to another aspect, a method for measuring a workpiece surface is provided. The method generally comprises four steps: Operating a coordinate measuring machine system including: (i) a vision probe configured to image a surface of a workpiece based on image light transmitted along an optical axis of the vision probe; (ii) a slide mechanism arrangement including an x-axis slide mechanism, a y-axis slide mechanism, and a z-axis slide mechanism configured to move the vision probe in mutually orthogonal x-axis, y-axis, and z-axis directions, respectively, in a machine coordinate system; and (iii) a rotation mechanism coupled between the z-axis slide mechanism and the vision probe, and configured to rotate the vision probe in various angular directions relative to the z-axis of the machine coordinate system; orienting the vision probe using a rotation mechanism such that an optical axis of the vision probe that is not parallel to the z-axis of the machine coordinate system and corresponds to the image stack acquisition axis is oriented toward the surface of the workpiece; acquiring an image stack along an image stack acquisition axis, the image stack including a plurality of images, each image corresponding to a focused position of the vision probe; determining focus curve data based at least in part on analysis of images of the image stack, the focus curve data indicative of three-dimensional positions of a plurality of surface points on a surface of the workpiece; Including, The step of acquiring the image stack described above includes: (i) adjusting a plurality of sliding mechanisms to move the vision probe from a first image acquisition position to a second image acquisition position, each along the image stack acquisition axis, such that the vision probe acquires a first and a second image of the plurality of images at the first and second image acquisition positions, respectively; and (ii) adjusting the plurality of sliding mechanisms to move the vision probe from the second image acquisition position to a third image acquisition position along the image stack acquisition axis, such that the vision probe acquires a third image of the plurality of images at the third image acquisition position. Includes. [Brief description of the drawings]

[0009] [Figure 1A] FIG. 1 illustrates various components of a coordinate measuring machine (CMM) according to one embodiment. [Figure 1B] FIG. 1B illustrates a schematic diagram of a vision probe coupled to a probe head of a CMM such as that shown in FIG. 1A. [Diagram 2] FIG. 1B is a block diagram showing various control elements of a CMM such as that of FIG. 1A. [Figure 3A] FIG. 1 is a schematic diagram of a vision probe having an optical axis (OA) oriented generally perpendicular to the surface on which the workpiece WP is located (i.e., the OA is parallel to the z-axis of the machine coordinate system). [Figure 3B]FIG. 3B is a schematic diagram of the vision probe of FIG. 3A with the optical axis (OA) oriented at an angle (i.e., not parallel to the z-axis of the machine coordinate system). [Figure 4] 1 is a graph showing a two-dimensional perspective view of the movement of a vision probe along the x-axis and z-axis of the machine coordinate system to capture an image at an image capture position (I). [Diagram 5] 1 is a graph showing a three-dimensional perspective view of the movement of a vision probe along the x-, y-, and z-axes of the machine coordinate system to capture an image at an image capture position (I). [Figure 6A] 1 illustrates an exemplary method of how an image stack acquired by a vision probe can be used to determine the relative position / coordinates of a point on a workpiece surface along the z-axis direction of the probe coordinate system. [Figure 6B] 1 illustrates an exemplary method of how an image stack acquired by a vision probe can be used to determine the relative position / coordinates of a point on a workpiece surface along the z-axis direction of the probe coordinate system. [Figure 7A] 1 shows a sample workpiece including multiple workpiece surfaces and workpiece elements. [Figure 7B] FIG. 1 is a schematic diagram of a vision probe with an optical axis (OA) and image stack acquisition axis (ISAA) oriented in a generally vertical direction (i.e., OA / ISAA is parallel to the z-axis of the machine coordinate system). [Figure 7C] FIG. 7B is a schematic diagram of a vision probe with an optical axis (OA) and an image stack acquisition axis (ISAA) oriented at an angle so as to be approximately perpendicular to the tilted workpiece surface of the workpiece of FIG. 7A. [Figure 8] FIG. 7C is a flowchart of a method for measuring a workpiece surface by moving a vision probe to a desired angle / orientation relative to the workpiece surface and acquiring an image stack using a CMM system including a movement mechanism configuration such as that described in FIGS. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] FIG. 1A is a diagram showing various components of a coordinate measuring machine (CMM) 100. As shown in FIG. 1A, the coordinate measuring machine 100 includes a machine body 200 for moving a probe 300, an operating unit 105 having a manually operated joystick 106, and a processing device arrangement 110. The machine body 200 includes a surface plate 210, a movement mechanism arrangement 220 (see also FIG. 2), and a vision probe (image probe) 300. The movement mechanism arrangement 220 includes an X-axis slide mechanism 225, a Y-axis slide mechanism 226, and a Z-axis slide mechanism 227 (FIG. 2), which are provided to be mounted on the surface plate 210 for holding and moving the vision probe 300 in three dimensions relative to the workpiece WP to be measured as shown in FIG. 1A. The movement mechanism arrangement 220 also includes a rotation mechanism 214.

[0011] Specifically, as shown in Fig. 1, the moving mechanism configuration 220 includes beam supports 221 that can move in the Ym direction of a machine coordinate system (MCS), a beam 222 connecting the beam supports 221, a column 223 that can move on the beam 222 in the Xm direction of the machine coordinate system, and a Z-axis moving member 224 (e.g., a spindle) that can move in the Zm direction of the machine coordinate system within the column 223. The X-axis slide mechanism 225, the Y-axis slide mechanism 226, and the Z-axis slide mechanism 227 shown in Fig. 2 are provided between the beam 222 and the column 223, between the surface plate 210 and the beam support 221, and between the column 223 and the Z-axis moving member 224, respectively. The vision probe 300 is attached to the probe head 213. The probe head 213 includes a rotation mechanism 214, and is attached to an end of the Z-axis moving member 224 and supported by this end. The rotation mechanism 214 allows the vision probe 300 to rotate relative to the Z axis moving member 224, which will be described in more detail below. The X axis slide mechanism 225, the Y axis slide mechanism 226 and the Z axis slide mechanism 227 are configured to move the probe 300 in mutually orthogonal X axis, Y axis and Z axis directions, respectively, within the MCS.

[0012] 2, the X-axis slide mechanism 225, the Y-axis slide mechanism 226, and the Z-axis slide mechanism 227 are provided with an X-axis scale sensor 228, a Y-axis scale sensor 229, and a Z-axis scale sensor 230, respectively. Therefore, the movement amount of the vision probe 300 in the X-axis, Y-axis, and Z-axis directions of the machine coordinate system (MCS) can be obtained from the outputs of the X-axis scale sensor 228, the Y-axis scale sensor 229, and the Z-axis scale sensor 230. In the illustrated embodiment, the movement directions of the X-axis slide mechanism 225, the Y-axis slide mechanism 226, and the Z-axis slide mechanism 227 correspond to the Xm direction, the Ym direction, and the Zm direction, respectively, of the machine coordinate system (MCS). In various embodiments, such a relatively simple correlation and associated components can be useful for a high level of accuracy and relatively simple processing of the movement and position control / detection in the Xm, Ym, and Zm directions. The probe head 213 with rotation mechanism 214 includes one or more rotation sensors 215 (see Figure 2) for sensing the angular rotation / position / orientation of the vision probe 300, as will be described in more detail below.

[0013] In various embodiments, the vision probe 300 can be utilized to perform operations to determine and / or measure the surface profile of the workpiece WP. As described in more detail below, the angular orientation of the vision probe 300 can be adjusted using the rotation mechanism 214 to point the vision probe's optical axis OA at the tilted surface of the workpiece WP (e.g., in some embodiments, the optical axis OA can be approximately perpendicular to the tilted workpiece surface). The x-axis, y-axis, and z-axis slide mechanisms 225, 226, and 227 (e.g., moving in mutually orthogonal directions) can cooperate to move the vision probe 300 to an image acquisition position along an image stack acquisition axis (which can approximately coincide with the optical axis OA) to acquire a stack of images of the tilted workpiece surface. From analysis of the image stack (e.g., as part of a points-from-focus (PFF) type measurement operation), focus curve data can be determined that indicates three-dimensional positions of surface points on the tilted surface of the workpiece WP.

[0014] As shown in FIG. 2, the command section 402 of the processing device arrangement 110 is connected to the operation unit 105. Various commands can be input to the machine body 200 and the processing device arrangement 110 via the operation unit 105. As shown in FIG. 1A, the processing device arrangement 110 includes a movement control section 140 and a host computer system 115. In various embodiments, the processing device arrangement 110 can calculate shape coordinates of the workpiece WP to be measured based at least in part on the movement amount of the vision probe 300 moved by the movement mechanism arrangement 220 and / or on an analysis of data acquired by the vision probe 300 (e.g., including an image stack), as will be described in more detail below. In various embodiments, the shape coordinates correspond to a depth map and / or a surface topography of the workpiece and / or the workpiece surface and can be based on the relative positions (e.g., indicated by coordinates) of surface points on the workpiece.

[0015] The movement control unit 140 in Fig. 1A mainly controls the movement of the vision probe 300. The host computer system 115 processes the movements performed and the positions acquired by the machine body 200. In this embodiment, a processing device arrangement 110 having combined functions of the movement control unit 140 and the host computer system 115 is shown in the block diagram of Fig. 2 and described below. The host computer system 115 includes a computer 120, an input unit 125 such as a keyboard, and an output unit 130 such as a display or a printer.

[0016] Those skilled in the art will appreciate that the host computer system 115 and / or other computing systems and / or control systems described or usable with the elements and methods described herein may generally be implemented using any suitable computing system or device, including distributed or networked computing environments, etc. Such computing systems or devices may include one or more general-purpose or special-purpose processors (e.g., non-custom or custom devices) that execute software to achieve the functions described herein. The software may be stored in memory, such as random access memory (RAM), read-only memory (ROM), flash memory, or a combination of such components. The software may also be stored in one or more storage devices, such as optical disks, flash memory devices, or any other type of non-volatile storage medium for storing data. The software may include one or more program modules, including processes, routines, programs, objects, components, data structures, etc. that perform particular tasks or implement particular abstract data types. In a distributed computing environment, the functionality of the program modules may be combined or distributed across multiple computing systems or devices, in either a wired or wireless configuration, and accessed via service calls.

[0017] As shown in FIG. 2, the processing device configuration 110 includes a command section 402 , a slide mechanism control section 404 , a position determination section 406 , a vision probe control section 408 , a vision probe data section 410 , an analysis section 412 , and a memory section 414 .

[0018] 2 provides a predetermined command (based on a command input by, for example, the operation unit 105 or the input unit 125) to the slide mechanism control unit 404. The command unit 402 generates coordinate values ​​in the machine coordinate system for each control cycle as a position command for the movement mechanism configuration 220, taking into consideration, for example, a movement direction, a movement distance, a movement speed, etc. for moving the vision probe 300 to a plurality of positions (for example, an image acquisition position, etc.).

[0019] The slide mechanism control unit 404 shown in FIG. 2 outputs a drive control signal D in response to a command from the command unit 402, thereby performing drive control by passing current through the motors of the X-axis, Y-axis, and Z-axis slide mechanisms 225, 226, and 227 of the moving mechanism configuration 220.

[0020] To ensure proper synchronization of the coordinates of the CMM 100 and the vision probe 300 during image acquisition, in one embodiment, the position latch 216 communicates with various sensors and / or drive mechanisms. More specifically, in various embodiments, the position latch 216 can be used to ensure the accuracy of measurements derived from the images in the image stack. In various embodiments, operation of the position latch 216 can ensure proper synthesis of CMM machine coordinates (reflecting the position of the attachment point or other reference point of the vision probe 300 during a particular measurement) with position data (e.g., relating to the position and orientation of the vision probe 300) determined from the vision probe images. In some embodiments, the position latch 216 can be used to trigger measurements from a CMM position sensor (e.g., sensors 215 and 228-230, etc.), which can include a scale, encoder, or other sensing element that tracks the overall position and orientation of the vision probe 300 in the machine coordinate system (e.g., including its base position). In some embodiments, the position latch 216 may also initiate image acquisition from the vision probe 300 (e.g. as part of an image stack; a trigger signal may be provided for each image in the image stack, synchronizing and tracking the corresponding position of the vision probe 300 with each image acquisition).

[0021] FIG. 1B is a schematic diagram of some components of the machine body 200 of the CMM 100 and a vision probe 300', which may be similar to the vision probe 300 of FIG. 1A. As shown in FIG. 1B, the machine body 200 includes a probe head 213. The probe head 213 receives and transmits probe signals via a probe head cable 211. The probe head 213 is fixed to a coordinate measuring machine hollow shaft 217, which is attached to the end of a Z-axis moving member 224 (or a sliding element such as a spindle) that moves in the Z-axis direction of the machine coordinate system (MCS). The probe head 213 is connected to the vision probe 300' at a probe autojoint connection 231. One example of a probe autojoint connection is described in more detail in U.S. Pat. No. 9,115,982.

[0022] The probe head 213 includes a rotation mechanism 214 (FIG. 2), which in some embodiments may rotate 360 ​​degrees in a horizontal plane (e.g., angular movement / position / orientation may be sensed by a first rotation sensor 215) and may include some type of U-joint (e.g., to allow the attached probe to rotate about a corresponding axis in the horizontal plane, and angular movement / position / orientation may be sensed by a second rotation sensor 215, as will be described in more detail below in connection with FIG. 3B). Thus, the rotation mechanism 214 of the probe head 213 in the example of FIG. 1B supports rotation of the vision probe 300′ about two different axes: first, a rotation (spin) of the vision probe 300′ in its current orientation about the Z axis, and second, a rotation of the vision probe 300′ about a horizontal axis (i.e., an axis in the XY plane of the machine coordinate system). 3A and 3B, described below, the rotation mechanism 214 embodied in the probe head 213 is illustrated as essentially a circle, but in a three-dimensional representation may be depicted as a sphere in various embodiments. The rotation mechanism 214, which includes a spherical (or ball-shaped) joint, allows the vision probe 300' to rotate about and relative to the Z-axis translation member 224 in the column 223 and / or about any horizontal axis to position the optical axis of the vision probe 300' at a desired angle / orientation relative to the workpiece surface (e.g., the workpiece surface may be disposed at an angle relative to the horizontal plane). In general, the rotation mechanism 214 is a mechanism for changing the orientation of the vision probe 300 (i.e., the attitude of the vision probe 300), as shown in FIGS. 3A and 3B.

[0023] The probe autojoint connection 231 is an electromechanical connection that provides a rigid mechanical fastening of the probe head 213 to the vision probe 300' allowing the probe head 213 to be removed from one probe and attached to another. In one embodiment, the probe autojoint connection 231 may include first and second mating auto exchange joint elements 234 and 236. The first auto exchange joint element 234 is mounted to the probe head 213 and the mating second auto exchange joint element 236 is mounted to the vision probe 300'. In one embodiment, the probe autojoint connection 231 includes mating electrical contacts or connections 235 that automatically engage and provide an electrical connection when the probe is attached.

[0024] The vision probe 300' can receive at least some of the power and control signals via the autojoint connection 231. The power and control signals are sent via the probe head cable 211. Signals sent to the vision probe 300' via the autojoint connection 231 are sent via connection 235. As shown in FIG. 1B, the vision probe 300' includes an auto-exchange joint element 236 and a probe assembly 237 mounted to the auto-exchange joint element 236 for automatically connecting to the CMM 100 via the probe autojoint connection 231.

[0025] In various embodiments, the vision probe 300' may additionally or alternatively receive at least some of the power and control signals via the cable 211'. In some embodiments, the cable 211' may be used because there are a limited number of available wired connections on the standard autojoint connection 231, and because more connections to the vision probe 300' (e.g., which may be provided via the optional cable 211') may be desirable / utilized. In various implementations, in addition to some standard power and / or communication signals, the vision probe 300' may have additional features / functionality that require and / or benefit from additional power and / or communication signals that may be provided via the optional cable 211' and / or other transmission mechanisms. In various implementations, the power and / or communication signals for the vision probe 300' (e.g., sent via the cable 211 and / or cable 211') may be sent to and from the vision probe control unit 408 and the vision probe data unit 410, as will be described in more detail below in connection with FIG. 2.

[0026] As shown in FIG. 2, in some embodiments, the machine body 200 of the CMM 100 may include, in addition to the vision probe 300 (300′), an optional contact measurement probe 390 including one or more XYZ sensors 392. The contact measurement probe 390 may be a touch probe, a scanning probe, or the like, and typically has a probe tip that physically contacts the workpiece to be measured. In some embodiments, such a contact measurement probe 390 may be used in addition to / in combination with the vision probe 300. For example, after the vision probe 300 is used to acquire an image stack and determine a three-dimensional profile of the workpiece surface, the vision probe 300 may be detached / removed from the CMM 100 (e.g., removed from the probe head 213 in FIG. 1B). The contact measurement probe 390 may then be attached to the CMM 100 (e.g., attached to the probe head 213). To do this, in some examples, the CMM 100 has various probes (e.g., 300, 390, etc.) stored in a probe rack, and the probe head 213 can be moved to the correct position for attachment and removal of the various probes. The contact measurement probe 390 can then be used to physically contact some surface points (e.g., surface points that are difficult to see / determine using the vision probe 300) and verify some measurements. In various embodiments, if there are surface points on the workpiece surface that are difficult to image / capture and / or are partially obscured by other parts of the workpiece and therefore not visible to the vision probe 300, the contact measurement probe 390 can be used to physically contact such surface points for measurement.

[0027] 2, the vision probe 300 can include an illumination arrangement 302, an objective lens 304, and a camera 306. In the illustrated embodiment, the objective lens 304 and the camera 306 are internal to the vision probe 300 and are illustrated in some figures (e.g., Figures 3A and 3B) as a dotted box. In various implementations, the objective lens 304 can be a multi-lens optical element and can be selected to have a range of magnifications. For example, a variety of objective lenses having different magnifications can be selected, and in some applications, the objective lens utilized in the vision probe can be selected based on the desired magnification (e.g., selecting an objective lens with a relatively high magnification can provide a relatively high resolution, but with tradeoffs such as a reduced PFF image range).

[0028] In the embodiment of Figures 3A and 3B, the illumination arrangement 302 may be a ring illumination (e.g., formed from an LED array) provided at the distal end of the vision probe 300, although the mechanism of the illumination arrangement 302 is not limited to the illustrated embodiment. For example, the illumination arrangement 302 may alternatively be provided as an epi-illumination source. In some examples, providing an epi-illumination source may require a different configuration, such as having a beam splitter on the optical axis path within the vision probe 300 to direct light downward through the objective lens 304, and a light source positioned laterally or elsewhere within the vision probe 300 to direct light to the beam splitter. In some examples, the illumination arrangement 302 formed with a ring illumination (e.g., an LED array) may be lighter and smaller than the illumination arrangement 302 formed with an epi-illumination source (which may require a beam splitter and a lateral light source).

[0029] 1B, optional probe head cable 211' may be used to carry additional signals (e.g. to control and / or provide power to the vision probe 300 for the lighting arrangement 302, camera 306, etc.). Alternatively, cable 211' may not be included, in which case all of the required lines / signals may pass through the probe head 213 (e.g. and thus through cable 211).

[0030] When utilized with only the vision probe 300, the CMM movement mechanism arrangement 220, and in particular its sensors (215 and 228-230), may provide a measurement output M to a position determiner 406 which determines the position of the probe head 213 of the vision probe 300 (or other connection point or reference position) in the machine coordinate system (MCS) of the CMM. For example the position determiner 406 may provide the X, Y and Z coordinates in the machine coordinate system of the probe head 213 or other connection point or reference point of the vision probe 300. When a contact measurement probe 390 is attached, the contact measurement probe 390 may include a mechanism which can move the probe tip (by a small amount) relative to the rest of the contact measurement probe 390, and a sensor (e.g. XYZ sensor 392) which provides sensor data indicative of the position of the probe tip (i.e. the probe stylus tip) which is actually in contact with the workpiece surface in the local coordinate system of the contact measurement probe 390. A measurement synchronization trigger signal (e.g. provided in conjunction with operation of the position latch 216, etc.) initiates measurements to track the global position and orientation of the contact measurement probe 390 (e.g. of the probe head 213) in the machine coordinate system, and also initiates local surface measurements using the contact measurement probe 390 in the local coordinate system. Using the coordinates of the contact measurement probe 390 measured in the local coordinate system and combining them with its position measured in the machine coordinate system, the position determiner 406 can determine the global position of the probe tip, and therefore the measurement / detection surface point on the workpiece.

[0031] In contrast to such determinations using a contact measurement probe 390, when using a vision probe 300 as described herein with respect to various exemplary embodiments, the position determiner 406 need only determine the position of the probe head 213 (or other reference or mounting position) on top of the vision probe 300. To determine the coordinates of the surface points on the workpiece, information from analysis of an image stack can be used. For example, an image stack (of images at various focus positions) can be acquired by the vision probe 300. The relative positions / focus positions of the images in the image stack are expressed in a probe coordinate system (PCS), which in some examples may be related to a reference position of the probe in the MCS. To determine the overall positions of the surface points in the machine coordinate system (MCS), in some examples the PCS position data of the surface points can be converted to and / or otherwise combined with the MCS position data, thereby determining the overall positions of all of the surface points.

[0032] When the vision probe 300 is oriented at an angle (e.g., as shown in FIG. 3B ), and thus the probe coordinate system (PCS) has its Z-axis (i.e., corresponding to the optical axis of the vision probe 300) oriented at an angle, the acquired image stack will show the relative distance of the surface points of the workpiece along the direction of the probe Z-axis oriented at that angle. These probe coordinate system (PCS) coordinates, which in some embodiments may be referred to as a local coordinate system, can be combined (e.g., converted to or added to MCS coordinates) with determined MCS coordinates of the probe head 213 (or other reference position) to determine the overall location of the surface point on the workpiece within the MCS. For example, if it is desired to determine the coordinates of the surface point in the MCS, the measurement points determined in the probe coordinate system PCS can be converted to MCS coordinates and added to other MCS coordinates of the probe head 213 (or other reference position) of the vision probe 300. Alternatively, if the workpiece has its own local coordinate system (LCS) assigned to it, the determined MCS coordinates of the probe head 213 of the vision probe 300 (or other reference position) may be transformed to or combined with the LCS of the workpiece. As yet another example, in some cases other local coordinate systems (e.g., for images of an image stack, etc.) may additionally or alternatively be established. Generally, the MCS covers a large overall volume of the coordinates of the CMM 100, while the LCS (e.g., the PCS, etc.) generally covers a smaller volume and may in some cases be generally contained within the MCS. In various embodiments, in addition to X, Y, and Z coordinates, certain types of cylindrical, Cartesian, or other coordinates may additionally or alternatively be utilized for determining the orientation of the vision probe 300 and the coordinates of the measured surface points on the workpiece WP.

[0033] In some embodiments, position data represented in the PCS from an image stack may be utilized relatively independently (e.g., with limited or no conversion or combination with coordinates in the MCS or other coordinate systems). For example, position data determined from an analysis of an image stack may provide 3D coordinates indicative of 3D positions of surface points on a workpiece surface represented in a PCS or other LCS, and thus represent / correspond to a 3D profile / surface topography of the workpiece surface. As noted above, in some embodiments, such data may be combined with other position data represented in an MCS to indicate the overall positions of the workpiece surface and surface points within the MCS. However, in some embodiments / analyses / representations, etc., it may be desirable to primarily or exclusively use position data determined from an image stack. For example, where a primary objective of an analysis or inspection is to determine relative positions and / or characteristics of workpiece elements on a workpiece surface (e.g., with respect to distances between such workpiece elements on the workpiece surface, and / or 3D dimensions of workpiece elements on the surface, etc.), in some embodiments, such data may be determined primarily from an analysis of an image stack. More specifically, where the desired analysis / inspection does not require one or more general locations of the workpiece surface and / or workpiece features within the MCS, data determined from the image stack may be utilized with limited or no synthesis with coordinates in the MCS or other coordinate system. In addition to analysis of such data, it will be appreciated that a 3D representation of the workpiece surface may also be provided (e.g., on a display, etc.) according to data from analysis of the image stack.

[0034] As shown in FIG. 2, the vision probe control 408 controls the vision probe 300 (e.g., controls the illumination arrangement 302 and the camera 306, etc., to acquire the images of the image stack). In various embodiments, the vision probe control 408 need not control the movement or focusing of the vision probe 300, as these aspects can be controlled by the CMM motion mechanism arrangement 220. The CMM motion mechanism arrangement 220 moves the vision probe 300 closer to and / or farther from the workpiece to acquire the image stack (i.e., moves the vision probe 300 to each image acquisition position, as shown / described below with respect to FIGS. 4 and 5). The rotation mechanism 214 may be used to rotate the vision probe 300 to a desired angle / orientation. In various embodiments, the focus distance of the vision probe 300 may be determined primarily by the objective lens 304 (e.g., the focus distance in front of the vision probe 300 during a measurement operation may be constant, corresponding to the objective lens 304 selected / used in the vision probe 300). The vision probe data unit 410 receives the output of the vision probe 300 (i.e. image data for the images of the image stack). The analysis unit 412 can be used to perform relevant analysis (e.g. point-from-focus (PFF) analysis to determine the relative position of each surface point on the workpiece surface along the probe Z axis direction or other analysis of the image stack to determine the three-dimensional surface profile of the workpiece surface, etc., as will be described in more detail below in connection with Figures 6A and 6B). The storage unit 414 may include a portion of computer memory that stores certain software, routines, data, etc. for the operation of the processing device arrangement 110, etc.

[0035] 3A and 3B show some components related to those of FIGS. 1A-2, including some parts of the movement mechanism arrangement 220, including the rotation mechanism 214′ (embodied in the probe head 213′) of the machine body 200 of the CMM 100. FIG. 3A shows the vision probe 300 in a vertical orientation (as some prior art systems, such as some vision systems, are operated to move the focusing position only up and down primarily along the Z-axis direction of the machine coordinate system to acquire an image stack containing an image of the workpiece). As shown in FIG. 3A, the workpiece WP has a workpiece surface WPS1 with an oblique orientation (angle A1). It should be noted that in the illustration of FIG. 3A, the Z-axis of the machine coordinate system is parallel to the optical axis OA of the vision probe 300. It will be appreciated that where the vision probe 300 is only moved up and down along the Z axis of the MCS by the Z axis slide mechanism 227 (including movement of the Z axis moving member 224 in the column 223), the optical axis (Z axis) of the vision probe 300 will be co-oriented with the Z axis of the machine coordinate system and the image stack acquisition axis ISAA. Workpiece surface WPS1 is illustrated at an angle A1 relative to the horizontal plane of the MCS. In contrast, workpiece surface WPS2 of workpiece WP is illustrated approximately parallel to the horizontal plane.

[0036] FIG. 3B illustrates the vision probe 300 tilted both relative to the horizontal plane of the MCS (angle "AH") and relative to the vertical plane of the MCS (angle "AV"), according to various embodiments of the present disclosure. This can be achieved by the disclosed CMM 100. As described in more detail below, the CMM 100 can operate three slide mechanisms (i.e., mutually orthogonal X-axis, Y-axis, and Z-axis slide mechanisms 225-227, each of which generates movement only along the orthogonal X-, Y-, and Z-axis / directions of the MCS) and a rotation mechanism 214' (embodied in the probe head 213') to move / orient the vision probe 300. The CMM 100 can thus freely move the vision probe 300 relative to the workpiece WP along multiple axes simultaneously, including rotation about any axis, to acquire an image stack at a specified angle. More generally, the movement mechanism arrangement 220 (including X, Y, and Z slide mechanisms 225-227, and rotation mechanism 214') supports and enables the vision probe 300 to be moved in mutually orthogonal X, Y, and Z directions, and to a desired angle / orientation relative to the workpiece surface to be measured.

[0037] In the example shown in Figure 3B, the vision probe 300 has been rotated (e.g., by a U-joint or other component of the rotation mechanism 214' of the probe head 213') to point at an angle AH about a horizontal rotation axis RA2 passing through rotation point R2. The optical axis OA of the vision probe 300 is approximately perpendicular to the workpiece surface WPS1. In Figure 3B, the ability of the rotation mechanism 214' of the probe head 213' to rotate the vision probe 300 about the Z-axis of the machine coordinate system is shown by the rotation axis RA1 passing through the upper rotation point R1 of the probe head 213' / rotation mechanism 214'. Rotation about a horizontal axis (e.g., following the action of the U-joint shown in Figure 1B) is shown according to the rotation axis RA2 passing through the central rotation point R2 of the probe head 213' / rotation mechanism 214' (i.e., shown as a single point since it is into the page).

[0038] FIG. 3B shows an exemplary image stack range SR-3B for determining the three-dimensional surface profile of the workpiece surface WPS1. The workpiece surface WPS1 may have various workpiece elements (e.g., surface elements) that may be higher or lower than the average surface position of the workpiece surface WPS1. This will be described in more detail below in connection with FIG. 7A. In some embodiments, it may be desirable for the range of focus positions of the image stack to extend a certain distance above and below the workpiece surface. As shown in FIG. 3B, the exemplary image stack range SR-3B may be significantly smaller than the image stack range SR-3A of FIG. 3A (i.e., the image stack range required to cover all the surface points of the workpiece surface WPS1 in the exemplary orientation of FIG. 3A). This is because, unlike the orientation of FIG. 3A, the vision probe 300 of FIG. 3B is oriented such that the optical axis OA is approximately perpendicular to the workpiece surface WPS1. In Figure 3B, the angle of the optical axis OA (and image stack acquisition axis ISAA) relative to at least a portion of the workpiece surface WPS1 is indicated as "AP" and is approximately 90 degrees / orthogonal in the illustrated example. Figure 3B also indicates the angle "AW" of the workpiece surface WPS1 relative to the horizontal plane (e.g., corresponding to angle A1 in Figure 3A). Depending on the particular angle AW in each embodiment, the rotation mechanism 214' can be adjusted to ensure that the optical axis OA (and ISAA) of the vision probe 300 is approximately orthogonal to at least a portion of the workpiece surface WPS1. This is described in more detail below in connection with Figures 7A-7C.

[0039] FIG. 4 shows a two-dimensional perspective view, and FIG. 5 shows a three-dimensional perspective view, of the movement of the vision probe 300 to acquire an image stack (including, by way of example, eleven images, as shown and described in more detail below in connection with FIGS. 6A and 6B). As shown in FIGS. 4 and 5, in one embodiment, the vision probe 300 can move through at least eleven corresponding axial image acquisition positions I1-I11 to acquire eleven images at axial focus positions F1-F11. It will be appreciated that each of the axial focus positions F1-F11 can be located along an image stack acquisition axis (ISAA) of the vision probe 300.

[0040] 4 and 5 show the two-dimensional and three-dimensional coordinates of the axial image acquisition positions I1-I11 and the axial focus positions F1-F11, respectively. Generally, some prior art systems for acquiring image stacks perform such acquisition in only the vertical direction (i.e., only along the Z-axis of the machine coordinate system). More specifically, according to prior art techniques, an imaging system (e.g., a machine vision system, etc.) may be configured to move the system's focus position up and down along a vertical Z-axis, which corresponds to the Z-axis of the machine coordinate system. However, according to the present disclosure, the orientation specified for acquiring the image stack is not so limited. As shown herein, components of the CMM 100 may be used in combination with the disclosed vision probe 300 to acquire the image stack at an angle. Thus, according to the present disclosure, rather than showing the "Z-axis" of the machine coordinate system as the default optical axis for image acquisition as in the prior art, the optical axis of the vision probe 300, which may be positioned and oriented in any direction and at any angle for acquiring the image stack, may in some instances correspond to and / or be shown as the "image stack acquisition axis" (ISAA or ISA axis).

[0041] Referring to FIG. 4, generally, an ISA axis (ISAA) may be established at the beginning of a process for acquiring an image stack. The vision probe 300 may then be moved to each new position along the ISA to acquire additional images. In acquiring each additional image of the image stack, the optical axis OA of the vision probe 300 may be coaxial with the ISA axis. Because moving the vision probe 300 typically requires individual adjustment of the X, Y, and Z axis slide mechanisms 225-227 (e.g., may or may not all be moved simultaneously or proportionately in various embodiments), the movement of the vision probe 300 may not necessarily be precisely along the ISA axis during such fine adjustments between image acquisition positions. However, once the movement of the vision probe 300 to the next axial image acquisition position for acquiring the next image is completed, that axial image acquisition position may be a position along the ISA axis. Additionally, each axial focus position F1-F11 (i.e., corresponding to the focus position of each acquired image) may also be a position along the ISA axis.

[0042] The above-mentioned prior art imaging systems using only one slide mechanism (e.g., a Z-axis slide mechanism) to acquire image stacks may in some instances be configured to perform specialized imaging and therefore may be uncommon and relatively expensive. In contrast, CMMs including X, Y, and Z-axis slide mechanisms are relatively common and widely available. In accordance with the present disclosure, in various exemplary embodiments, the CMM is used to move the vision probe 300 to acquire image stacks at any orientation or angle, thereby providing increased flexibility while still utilizing standard CMMs. Additionally, the configuration with the X, Y, and Z slide mechanisms 225-227 and the rotation mechanism 214 may be highly accurate, as it includes highly accurate X, Y, and Z scale sensors 228-230 for each slide mechanism, and one or more rotation sensors 215 (e.g., including rotational encoders and / or other types of relative position sensors) for the rotation mechanism 214. In various exemplary embodiments, due in part to the direct correlation of each X, Y, and Z sensor with a single coordinate axis (and corresponding single coordinate) of the MCS, global position determination of each of the X, Y, and Z coordinates within the MCS can be relatively simple to perform and at the same time extremely accurate.

[0043] 4 and 5 show example X, Y, and Z coordinates of the machine coordinate system for each movement of the vision probe 300 to each of the image acquisition positions I1 to I11. In various embodiments, the x-axis, y-axis, and z-axis of the machine coordinate system are respectively designated as X, Y, and Z. S Axis, Y S axis and Z S6B , the image stack 650 is focused at an axial focus position F1, F2, F3, F4, F5, F6, F7, F8, F9, F10, F11, F12, F13, F14, F15, F16, F17, F18, F19, F20, F21, F22, F23, F24, F25, F26, F27, F28, F30, F31, F32, F33, F34, F35, F36, F37, F38, F39, F40, F41, F42, F43, F44, F45, F46, F47, F48, F50, F51, F52, F53, F64, F65, F70, F71, F72, F73, F74, F75, F86, F87, F88, F90, F91, F92, F93, F94, F95, F96, F97, F98, F99, F100, F101, F102, F103, F104, F105, F106, F107, F108, F109, F1109, F1101, F11101, F111102, F109, F1 ...

[0044] More specifically, as shown in FIG. 4, at image acquisition position I1, the corresponding MCS coordinates of the reference position of the vision probe 300 are IX1 and IZ1. At the next image acquisition position I2, the MCS coordinates are IX2 and IZ2. At the next image acquisition position I3, the MCS coordinates are IX3 and IZ3. At the remaining image acquisition positions I4-I11, the corresponding MCS coordinates of the reference position of the vision probe 300 are similarly IX4-IX11 and IZ4-IZ11, respectively. To move the vision probe 300 from image acquisition position I1 to image acquisition position I2, the X-axis slide mechanism 255 is adjusted for movement from IX1 to IX2. Similarly, the Z-axis slide mechanism 227 is adjusted for movement from IZ1 to IZ2. Referring to FIG. 5, at image acquisition position I1, the corresponding MCS coordinates are IX1, IY1, and IZ1. At the next image acquisition position I2, the MCS coordinates are IX2, IY2, and IZ2. For the next image capture position, I3, the MCS coordinates are IX3, IY3, and IZ3. To move the vision probe 300 from image capture position I1 to image capture position I2, the X-axis slide mechanism 255 is adjusted for movement from IX1 to IX2. Similarly, the Y-axis slide mechanism 226 is adjusted for movement from IY1 to IY2, and the Z-axis slide mechanism 227 is adjusted for movement from IZ1 to IZ2. Similar movements are performed for movements to the remaining image capture positions.

[0045] In some examples, such adjustments of the sliding mechanisms 225-227 are performed relatively simultaneously to allow the vision probe 300 to move generally along an image stack acquisition axis (ISAA) in moving between image acquisition positions I1 and I2. However, the movement of the various sliding mechanisms 225-227 need not be precisely proportional or simultaneous during the overall movement, and the movement of the vision probe 300 between positions may not be perfectly centered around the ISA axis. That is, unlike prior art systems that utilize a single sliding mechanism, which always results in movement precisely along the image stack acquisition axis, the movement of the various sliding mechanisms 225-227 according to various embodiments of the present disclosure may result in the determination and / or combination of movement along multiple axes. However, in various exemplary examples, at the end of the overall movement from position I1, the vision probe 300 is positioned at position I2 along the ISA axis, and / or the optical axis of the vision probe 300 is coaxial with the ISA axis.

[0046] As will be described in more detail below, in some embodiments, it may be desirable for the focus position of at least a portion of the workpiece surface WPS1 to approximately correspond to a focus position in the middle of the focus position range of the image stack. For example, in an example image stack consisting of eleven images with corresponding focus positions F1-F11, it may be desirable for at least a portion of the workpiece surface to be approximately focused at an axial focus position F6 that approximately corresponds to the middle of the image stack range. This is described in more detail below in connection with FIGS. 6A and 6B. As described herein, it may also be desirable for at least a portion of the workpiece surface WPS1 (and / or the overall or average angular orientation of the workpiece surface or portions thereof) to be approximately / nominally orthogonal to the ISA axis as shown in FIGS. 4 and 5. Such features have already been described in connection with possible scan ranges SR in FIGS. 3A and 3B, and will be described in more detail below in connection with scan ranges SR1 and SR2 in FIGS. 7B and 7C. More specifically, in accordance with the present disclosure, by orienting the vision probe 300 so that the image stack acquisition axis (ISAA) is approximately perpendicular to at least a portion of the workpiece surface (WPS1) being imaged, the range of the image stack can be relatively short while covering the entire range of surface points of the three-dimensional workpiece element (i.e., corresponding to three-dimensional surface features and deviations) with high accuracy.

[0047] 6A and 6B show how an image stack acquired by a vision probe 300 according to the present disclosure can be used to determine the ZP location of a point on a workpiece surface along a ZP axis that may be approximately / nominally orthogonal to the workpiece surface. As used herein, the "ZP axis" may correspond to the z-axis of the probe coordinate system and / or the optical axis of the vision probe 300, but may not coincide with the z-axis of the MCS if the vision probe 300 is positioned at an angle or tilted. In various embodiments, the image stack is acquired with the CMM 100 operating in a point-from-focus (PFF) mode (or similar mode) to determine the ZP height (ZP location) of the workpiece surface along an axis that is approximately orthogonal to the workpiece surface. The PFF image stack can be processed to determine or output a ZP height coordinate map (e.g., a point cloud) that quantitatively indicates a set of three-dimensional surface coordinates (e.g., corresponding to the surface shape or profile of the workpiece).

[0048] 6A and 6B show operations associated with determining a relative ZP position for a point on a workpiece surface along the direction of the image stack acquisition axis (e.g., parallel to the ZP axis of the vision probe 300 or probe coordinate system (PCS)). In configurations where the image stack acquisition axis ISAA is parallel to the Z axis of the machine coordinate system, in some conventional systems the relative position is shown as corresponding to the Z height of the surface point, but more generally the image stack acquisition axis ISAA can be oriented in any direction as disclosed herein.

[0049] As shown in FIG. 6A and FIG. 6B, the focus position may move through a range of positions Zp(i) along the direction of the image stack acquisition axis ISAA corresponding to the focusing axis at each image stack acquisition position. The vision probe 300 may capture an image (i) at each position Zp(i). At each captured image (i), a focus measure fm(k,i) may be calculated based on a region or sub-region of interest ROI(k) (e.g., a set of pixels) in the image (e.g., a corresponding surface point is at the center of the region or sub-region of interest ROI(k)). The focus measure fm(k,i) is associated with a corresponding position Zp(i) of the vision probe 300 along the direction of the image stack acquisition axis ISAA and a corresponding focus position at the time of capturing the image (i). This results in focus curve data (e.g., a set of focus measures fm(k,i) at the position Zp(i), which is one type of focus peak determination data set). This is sometimes simply referred to as the “focus curve” or the “autofocus curve.” In one embodiment, the focus measure value may involve a calculation of contrast or sharpness of a region of interest in an image.

[0050] The ZP position corresponding to the peak of the focusing curve that corresponds to the best focus position along the image stack acquisition axis (e.g., ZP in Figure 6A). P k601) is the ZP position of the region of interest used to determine the focus curve. For illustrative purposes, the image stack is shown as including eleven images (image(1)-image(11)), although it will be appreciated that in practical embodiments fewer or more images (e.g., 100 or more) may be used.

[0051] As shown by the focus curves generated for images (1)-(11), in the illustrated example, image (6) appears close to or at best focus (e.g., the central element (not shown) of ROI (1) appears most in focus in image (6), whereas in the other images, the workpiece surface appears to become progressively more out of focus and blurry as one moves away from image (6)). When the focus metric is based on contrast as described above, one method involves comparing the color / brightness etc. of a pixel at the center of an ROI to adjacent pixels within that ROI. By finding the image with the highest overall contrast that corresponds to the in-focus position at the time of image acquisition, an indication / measurement of the relative ZP position of a surface point (e.g., at the center of an ROI) along the optical axis OA and image stack acquisition axis ISAA can be obtained.

[0052] As mentioned above, in FIG. 6B, the central region of the region of interest ROI(1) is considered to be approximately in focus in image (6) corresponding to a position Zp(6) along the optical axis of the vision probe 300. The optical axis corresponds to the Zp axis of the probe coordinate system (PCS) and may be coaxial with the image stack acquisition axis ISAA when acquiring each image using the vision probe 300. In this manner, the surface point on the workpiece surface corresponding to the center of ROI(1) may be determined to be at a relative position Zp(6) that approximately corresponds to the in-focus position of image (6) in the image stack. It will be appreciated that in some cases, the determined peak focus position may be between two images in the image stack. The in-focus peak position may be determined by interpolation or other techniques in response to fitting a focus curve to the focus measure values ​​determined for the images.

[0053] In some embodiments, it may be desirable to space the images of an image stack approximately uniformly within the image stack. This may be done to help ensure a uniform distribution of data points along the focus curve and / or to simplify some calculations (e.g., interpolation, etc.) or to aid / improve some algorithmic operations. However, in some instances, the focus curve may still be relatively accurately determined from the image stack even if the images are not all uniformly spaced (e.g., may result from the X, Y, and Z axis slide mechanisms 225-227 having some parameters / limitations on relative movement, such as how small the increments in which movements can be accurately performed).

[0054] If uniform spacing of all images in an image stack is desired, in some embodiments it may be desirable to utilize a particular orientation of the vision probe 300 to support the movement for image stack acquisition due to the limitations / characteristics of the X, Y, and Z axis sliding mechanisms 225-227 of a particular CMM. For example, if each of the X, Y, and Z axis sliding mechanisms 225-227 has a minimum movement increment (e.g., 1 μm) and a 45 degree angle is used for the ISA axis, in one exemplary embodiment, each of the moving X, Y, and Z axis sliding mechanisms 225-227 may be moved the same increment amount (e.g., 1 μm) at each image acquisition position to provide the same spacing between each image in the image stack. Following similar principles, each of the X, Y, and Z axis sliding mechanisms 225-227 may be moved a different amount at each image acquisition, but with the same X movement / difference between each image acquisition position, the same Y movement / difference between each image acquisition position, and the same Z movement / difference between each image acquisition position. Following such movement, the image acquisition positions correspond to and / or define the image stack acquisition axis ISAA. The probe can be oriented such that the optical axis OA of the vision probe 300 is approximately / nominally coaxial with the image stack acquisition axis ISAA at each image acquisition position.

[0055] Following a similar principle, if there is a minimum increment for adjusting the angular orientation of the vision probe 300 (e.g., according to a minimum achievable increment / adjustment of movement of one or more rotation mechanisms 214 to adjust the angular orientation of the vision probe 300), then movement of the X, Y, and Z axis sliding mechanisms 225-227 may be performed to cause the ISAA to correspond to such angular orientation. In some embodiments, for the entire system, a desired orientation of the vision probe 300 that best / most accurately aligns the optical axis OA of the vision probe 300 with the image stack acquisition axis ISAA is found based, at least in part, on the minimum increment of movement of the one or more rotation mechanisms 214 and / or the X, Y, and Z axis sliding mechanisms 225-227. Specifically, such desired orientation of the vision probe 300 for capturing an image stack is found according to the movement / adjustment functions of the CMM 100 to adjust the position / angular orientation of the vision probe 300. In one exemplary embodiment, in some cases following the principles / examples described above, a 45 degree angle (or a trigonometrically similar angle, such as, for example, a 135 degree, 225 degree, or 315 degree angle) may be used as the orientation of the vision probe 300 (e.g., relative to a horizontal or vertical plane, such as one or more of the XY, XZ, and / or YZ planes of the MCS).

[0056] 6B, a region of interest ROI(2) is shown positioned diagonally relative to the region of interest ROI(1). As an example, if the region of interest ROI(2) is not in focus in any of the eleven images of the exemplary image stack 650, it may be necessary to evaluate additional images and / or expand the range of the image stack (e.g., to acquire an image stack with more images and a correspondingly wider range of focus positions) to find the in-focus position of the surface point corresponding to ROI(2). In some embodiments, image stacks including 100 or more images may be acquired / utilized frequently. For example, referring to FIG. 7A, a surface point located in the center of ROI(1) may be at the bottom of a cylindrical hole that is workpiece element WPF1, whereas a surface point corresponding to ROI(2) may be at the top edge of the cylindrical hole, thus requiring / utilizing a larger image stack range including additional images (e.g., to cover all surface points of workpiece element WPF1 of workpiece surface WPS1).

[0057] FIG. 7A shows a sample workpiece WP1 having various workpiece surfaces WPS1, WPS2, WPS3, and workpiece elements WPF1 (which is a hole defined in the workpiece surface WPS1), WPF2 / WPF3C (which are specific geometric features defined at the boundary edge between the workpiece surfaces WPS2 and WPS3), WPF3A and WPF3B (both are holes defined in the workpiece surface WPS3). As described above with reference to FIG. 3B, the workpiece surface or workpiece element to be measured must be located within the image stack range SR-3B to determine the three-dimensional surface profile of this workpiece surface or workpiece element. As shown in FIG. 7A, the surfaces included in the various workpiece elements may be higher or lower than the overall or average plane of the workpiece surface on which these workpiece elements are defined. Therefore, in various embodiments, to image the workpiece elements, it may be necessary to use an image stack range (or scan range SR) that is large enough to cover all surfaces / surface points of the workpiece elements at different ZP heights.

[0058] Figure 7B is a schematic diagram showing the distal end of vision probe 300. The optical axis OA and image stack acquisition axis ISAA of vision probe 300 are oriented generally perpendicular to the surface on which workpiece WP1 having tilted workpiece surface WPS1 with workpiece element WPF1 is located (i.e., parallel to the z-axis of the MCS). Figure 7C is a schematic diagram showing the distal end of vision probe 300. The optical axis OA and image stack acquisition axis ISAA of vision probe 300 are oriented at an angle such that they are approximately / nominally perpendicular to tilted workpiece surface WPS1 of workpiece WP1.

[0059] In general, Figures 7B and 7C can be understood to show a desired scanning range (e.g., in Figure 7C compared to Figure 7B) to cover the three-dimensional surface topography of the workpiece surface WPS1 depending on the orientation of the vision probe 300 relative to the workpiece surface WPS1 to be measured. For example, the scanning range SR1 in the orientation of Figure 7B is significantly larger than the scanning range SR2 in the orientation of Figure 7C to cover the three-dimensional surface topography of the workpiece surface WPS1 (e.g., including the workpiece element WPF1). Therefore, adjusting the angle / orientation of the vision probe 300 as in Figure 7C to make the optical axis OA approximately perpendicular to the workpiece surface WPS1 and / or the workpiece element WPF1 may be technically advantageous to reduce the required scanning range. This may allow for a shorter scan time and / or a reduced number of images required to form an image stack (e.g., of a desired image density).

[0060] In addition to the scan range SR1 for the image stack being significantly larger than the scan range SR2 in FIG. 7C, as shown in FIG. 7B, the orientation of the vision probe 300 is at a relatively acute angle with respect to the workpiece surface WPS1, which may degrade image quality or prevent imaging of some portions / aspects of the workpiece element WPF1. For example, the acute angle may result in reduced imaging quality due to less imaging light being reflected back towards the vision probe 300, etc. As another example, in FIG. 7B, the top corner at surface point SP3 of the bottom of the cylindrical hole workpiece element WPF1 is shown as not being visible to the vision probe 300 (i.e., in the orientation shown, the top edge of the cylindrical hole obscures the corner at surface point SP3 of the cylindrical hole). In contrast, in Figure 7C, by orienting the vision probe 300 so that it is approximately orthogonal to at least a portion of the workpiece surface WPS1 and / or workpiece element WPF1, the angle of the vision probe 300 may be better for imaging various workpiece elements (e.g., WPF1) of the workpiece surface WPS1 (e.g., at a better angle to the reflected imaging light, be able to see the corner of surface point SP3, etc.) Thus, in addition to having a smaller scan range SR2 compared to the scan range SR1 of Figure 7B, the vision probe 300 oriented in Figure 7C may provide a more accurate three-dimensional surface profile of the workpiece surface WPS1 in some embodiments.

[0061] In various embodiments, it may be desirable to perform different scans (including acquiring different image stacks) with different orientations of the vision probe 300. For example, workpiece WP1 is shown to include workpiece surfaces WPS1, WPS2, and WPS3. In one embodiment, the vision probe 300 may be positioned as shown in FIG. 7B (e.g., at a 0 degree inclination relative to a vertical orientation) to scan workpiece surface WPS2 to acquire an image stack, then positioned as shown in FIG. 7C (e.g., at a 45 degree inclination relative to vertical) to scan workpiece surface WPS1 to acquire an image stack, and then oriented to scan workpiece surface WPS3 to acquire an image stack (e.g., at a 90 degree inclination relative to vertical).

[0062] In some embodiments, the scan / image stack may include all or a portion of multiple workpiece surfaces. For example, the image (and field of view) from the scan of the 0 degree tilted workpiece surface WPS2 may also include all or a portion of the workpiece surface WPS1 (and / or workpiece surface WPS3). In such a process, the multiple image stacks may include at least some common surface points scanned / imaged from different orientations, which may help to further verify the 3D location of each surface point and / or form a full or partial 3D representation of the workpiece WP1 by accurate alignment / reassembly of the various 3D data corresponding to the different workpiece surfaces. For example, in various embodiments, the 3D profiles of the various surfaces may be "stitched together" or otherwise synthesized to form a full or partial 3D representation of the workpiece WP1. Furthermore, some workpiece elements (e.g., WPF2 / WPF3C) may have certain dimensions / faces that are included in the scans of multiple surfaces (e.g., WPS2 and WPS3), so the scans of each surface can be used / combined to determine the overall features / dimensions / 3D profile of the workpiece element WPF2 / WPF3C. These possible operations and processes illustrate another advantage of the present disclosure. That is, while some of the prior art typically only allows for the acquisition of an image stack from a single orientation (e.g., along the Z-axis of the MCS), the present disclosure allows the CMM system to acquire multiple image stacks from multiple orientations using a vision probe to analyze / measure / determine the 3D profile of multiple workpiece surfaces and / or elements that may have different orientations. Such 3D data of the various surfaces / elements of the workpiece can then be combined or otherwise used to determine the overall 3D profile of all or part of the workpiece and / or some workpiece elements.

[0063] In the PFF type analysis described above with reference to Figures 6A and 6B, each focus curve (as shown in Figure 6A) corresponds to a single point on the workpiece surface. That is, the peak of each focus curve indicates the Zp position of a single point along the direction of the optical axis OA of the vision probe 300. In various embodiments, the PFF type analysis repeats this process for multiple surface points (e.g., each with a corresponding region of interest) across the workpiece surface, allowing the determination of the overall profile of the workpiece surface. In general, the process may be performed for multiple surface points that are within the field of view (i.e., captured within the images of the image stack). In each image of the image stack, a particular ROI(i) corresponds to a particular point on the workpiece surface (this point is preferably at the center of the ROI). 7B, as one illustrative example, if ROI(1) corresponds to a surface point at the bottom edge of cylindrical hole workpiece element WPF1 (e.g., adjacent to surface point SP3) and ROI(2) corresponds to a surface point on workpiece surface WPS1 that is not within the cylindrical hole (e.g., surface point SP2), the focus curves corresponding to these two exemplary surface points will be different from one another and have different focus peaks. For example, at surface point SP2, the focus curve as in FIG. 6A will shift and the peak will be in a different location (which may indicate, for example, that the focus position is closer to the vision probe 300 and thus in an upper portion of the image stack shown in FIG. 6B, or further up in the image stack not shown in FIG. 6B, for example in an embodiment where the image stack has more than the exemplary 11 images).

[0064] If only movement along the Z axis (i.e., using only the Z axis slide mechanism 227) was used to adjust the focus of the vision probe 300 relative to the total movement volume available in the CMM 100 with the X, Y, and Z axis slide mechanisms 225-227 (e.g., similar to techniques used in some conventional machine vision systems to acquire image stacks), the total range of movement for the potential image stack acquisition process would be limited to the maximum range of movement of the Z axis slide mechanism 227. In contrast, the techniques disclosed herein allow the vision probe 300 to move in a diagonal direction of the total available movement volume of the CMM 100 to acquire image stacks, which generally achieves a larger potential scanning range and improved flexibility for scanning various workpiece surfaces from different angles to acquire image stacks.

[0065] As previously described, in some embodiments, in addition to acquiring image stacks with vision probe 300 to determine the three-dimensional surface profile, it may be useful to use a contact measurement probe 390 in combination with vision probe 300 (i.e., a probe with a probe tip that physically contacts the workpiece to determine measurements, such as a touch probe or a scanning probe in which the probe tip is positioned in contact with and slid along the surface of the workpiece to "scan" it). For example, after utilizing vision probe 300, vision probe 300 can be removed from CMM 100 and contact measurement probe 390 can be attached to CMM 100 and used to verify the location of and / or measure several surface points, such as those that may not have been fully imaged by vision probe 300. For example, in the embodiment of FIG. 7C, it may be difficult to determine the exact location of surface point SP3 from the image stack captured by vision probe 300, given that in the illustrated orientation, surface point SP3 is directly below surface point SP2 along the optical axis OA of vision probe 300. In such an example, the contact measurement probe 390 may be used to verify the positions of several surface points (e.g., surface points SP3 and SP4 along the edges and / or at the bottom corners of the cylindrical hole workpiece element WPF1).

[0066] As mentioned above, in some embodiments, it may be desirable to have the optical axis of the vision probe 300 approximately orthogonal to the workpiece surface being scanned (i.e., the image stack is being captured). It should be noted that the optical axis of the vision probe 300 may only be orthogonal to a portion of the workpiece surface, or in some cases may not actually be orthogonal to any particular portion of the workpiece surface, but only orthogonal to the overall or average orientation, etc., of the workpiece surface. For example, if the workpiece surface is highly uneven and / or includes multiple workpiece elements that form a complex or otherwise non-uniform three-dimensional profile / surface topography, the optical axis / image stack acquisition axis (OA / ISAA) may not be precisely orthogonal to any particular portion of the workpiece surface, but may be approximately / nominal orthogonal to the overall, average, and / or gross orientation, etc., or to the principal angle, of the workpiece surface.

[0067] With continued reference to FIGS. 7A-7C, another embodiment of the CMM 100 for acquiring and using image stacks to determine a “depth map” and / or “surface topography” of a workpiece surface is described. In some examples, the entire workpiece surface may be described as being at a “principal angle.” The principal angle corresponds to the workpiece angle AW described in connection with FIG. 3B and is the angle formed between the workpiece surface and the horizontal plane on which the workpiece rests. As mentioned above, in some examples, it may be advantageous or desirable to have the image stack acquisition axis ISAA approximately orthogonal to the workpiece surface at the principal angle (AW). Even if the image stack acquisition axis ISAA is not perfectly orthogonal to the general orientation of the workpiece surface, such may be partially addressed by processing of the image data depending on the particular application (including, for example, how a user desires the image data to be presented, etc.). More specifically, when using the image stack to determine the depth map and / or surface topology of the workpiece surface, if it is determined that the normal of the workpiece surface at the principal angle (AW) is not perfectly aligned with the ISA axis but forms an angle with respect to the ISA axis (i.e., the workpiece surface is not perfectly orthogonal to the ISA axis), such angular offset can be subtracted or otherwise compensated for as part of the processing of the image data, so that the depth map or surface topology of the workpiece surface at the level plane of the workpiece can be approximately determined / presented (which may be desirable, for example, for certain presentations and / or analyses, etc.). In some embodiments, when a user or system is visually or otherwise assessing the workpiece surface for defects, it may be preferable to provide a generally horizontal presentation of the workpiece surface. The defects can be easily recognized / determined as height deviations from the otherwise horizontal workpiece surface (e.g., by defects and / or other deviations having coordinates above or below the generally horizontal surface).

[0068] In various exemplary embodiments of the CMM 100, the principal angle (AW) of the workpiece surface to be measured may first be determined to know at what angle the vision probe 300 should be oriented to image the workpiece surface. In various exemplary embodiments, the principal angle may be known, along with other dimensions and features of the workpiece to be measured that may be precisely measured and / or inspected using the CMM 100. Once the principal angle is known or determined, the desired angular orientation of the vision probe 300 may be determined (e.g., approximately perpendicular to at least a portion of the workpiece surface). As discussed above, such an orientation of the vision probe 300 relative to the workpiece surface may result in a relatively smaller / shorter range required for the image stack, allowing the image stack to be acquired more quickly and / or the same number of images to be acquired in a denser image stack (i.e., with a smaller corresponding focus position spacing between images). In contrast, a larger scan range requires an image stack with the same number of images that are more widely spaced apart (i.e., with a larger corresponding focus position spacing between images) to cover it.

[0069] 7B and 7C, when the program instructions are executed by one or more processors of the CMM 100, the program instructions may cause the one or more processors to acquire a first image stack as shown in FIG. 7C and a second image stack as shown in FIG. 7B. In FIG. 7C, the workpiece surface WPS1 may be designated as the first workpiece surface, and a first image stack of the first workpiece surface of the workpiece WP1 may be acquired using an orientation of the vision probe 300 that is a first orientation. In FIG. 7B, the workpiece surface WPS2 may be designated as the second workpiece surface oriented at a different angle than the first workpiece surface WPS1, and a second image stack of the second workpiece surface of the workpiece WP1 may be acquired using an orientation of the vision probe 300 that is a second orientation that is different from the first orientation. In the orientation shown in FIG. 7B, the second image stack may have a field of view that includes primarily the workpiece surface WPS2 (the second workpiece surface), but may also include all or a portion of the workpiece surface WPS1 (the first workpiece surface). Similarly, in the orientation shown in FIG. 7C, the first image stack may have a field of view that primarily includes workpiece surface WPS1 (first workpiece surface) but may also include all or a portion of workpiece surface WPS2 (second workpiece surface).

[0070] In various embodiments, in addition to the focus curve data that may be determined based at least in part on the analysis of the first image stack (e.g., associated with FIG. 7C), additional focus curve data may be determined based at least in part on the analysis of the second image stack (e.g., associated with FIG. 7B). The additional focus curve data indicates three-dimensional positions of a plurality of surface points on a second workpiece surface (e.g., workpiece surface WPS2) of the workpiece. In various embodiments, the system may determine and / or display a three-dimensional representation of at least a portion of the first workpiece surface WPS1 based at least on the focus curve data determined based on the analysis of the first image stack but not based on the analysis of the second image stack. Similarly, the system may determine and / or display a three-dimensional representation of at least a portion of the second workpiece surface WPS2 based at least on the focus curve data determined based on the analysis of the second image stack but not based on the analysis of the first image stack.

[0071] For example, in some embodiments in which each of the first and second image stacks may include portions or all of both workpiece surfaces WPS1 and WPS2, focus curve data determined for the first workpiece surface WPS1 based on analysis of the first image stack (wherein the first image stack acquisition axis ISAA1 may be approximately orthogonal to at least a portion of the first workpiece surface WPS1) may be deemed and / or determined to be more accurate and / or of higher quality / certainty than focus curve data determined for the first workpiece surface WPS1 based on analysis of the second image stack (wherein the second image stack acquisition axis ISAA2 is not approximately orthogonal to at least a portion of the first workpiece surface WPS1, and in particular is farther away from the orthogonal direction than the first image stack acquisition axis ISAA1).

[0072] As detailed in U.S. Patent No. 8,581,162, certain focus peak certainty and / or Z-height quality metadata analysis may indicate the reliability and / or quality of certain determined three-dimensional data (e.g., for a region of interest within an image stack). Although the '162 patent performs such analysis with respect to the quality / reliability of the coordinate determination of adjacent workpiece surface points within a single image stack (i.e., acquired only along the Z-axis direction of the machine coordinate system), in accordance with the present disclosure, some similar principles may be applied to the quality / reliability of the coordinate determination of workpiece surface points within one image stack versus another image stack (i.e., acquired at a different angle). For example, in some embodiments, focus curve data determined from an image stack acquired with an image stack acquisition axis ISAA that is approximately orthogonal to a portion of the workpiece surface may be relatively more accurate in determining the coordinates of workpiece surface points of that portion of the workpiece surface than an image stack with an image stack acquisition axis that is relatively non-orthogonal to the portion. In some embodiments, the increased accuracy is due, at least in part, to more imaging light being reflected back to the vision probe 300 at a vision probe / optical axis orientation closer to orthogonal to the workpiece surface (e.g., potentially resulting in larger focus peaks and more reliable and / or quality three-dimensional data). In some embodiments, the relative accuracy is also due, at least in part, to the fact that more adjacent workpiece surface points / pixels are in focus simultaneously within a given image of an image stack at a closer to orthogonal orientation, allowing a higher focus measure value to be determined (e.g., based on contrast or other focus measure). In comparison, focus curve data determined from an image stack acquired with an image stack acquisition axis ISAA that is relatively away from orthogonal to a portion of the workpiece surface may be relatively less accurate in determining the coordinates of workpiece surface points on that portion of the workpiece surface.In some embodiments, the lower accuracy is due, at least in part, to less imaging light being reflected back to the vision probe 300 at orientations of the vision probe / optical axis away from orthogonal to the workpiece surface (e.g., resulting in smaller focus peaks and potentially less reliable and / or quality three-dimensional data). In various embodiments, the relative inaccuracy is also due, at least in part, to fewer adjacent workpiece surface points / pixels being in focus simultaneously at orientations away from orthogonal (i.e., due to the tilt of a portion of the workpiece surface relative to the image stack acquisition axis; in some cases, only a "striped portion" of the relatively tilted workpiece surface at the same Z distance in the probe coordinate system is in fine focus simultaneously, resulting in fewer "in focus" pixels / surface points in the region of interest that contribute more to the overall focus metric of the region of interest having a central surface point / pixel in a given image of the image stack). More specifically, in some cases, the focus peak can be larger when more pixels are in focus simultaneously within a region of interest of a given image, and the determination of the focus peak location can be more accurate (e.g., less susceptible to noise or other factors), thereby achieving better focus peak certainty.

[0073] As another example, in various embodiments, the CMM 100 can acquire a commonly imaged surface point, such as a surface point SP2 on a first portion of the first workpiece surface WPS1 that is imaged in both the first image stack and the second image stack. The first image stack acquisition axis ISAA1 (of FIG. 7C) is closer to being orthogonal to the first portion of the first workpiece surface WPS1 than the second image stack acquisition axis ISAA2 (of FIG. 7B). The focus curve data determined at least in part based on the analysis of the first image stack can indicate a first three-dimensional location of the commonly imaged surface point SP2 (e.g., in one example, it can correspond to a first determined set of coordinates such as (XP2C, YP2C, ZP2C)). Meanwhile, the focus curve data determined at least in part based on the analysis of the second image stack can indicate a second three-dimensional location of the commonly imaged surface point SP2 (e.g., in one example, it can correspond to a second determined set of coordinates such as (XP2B, YP2B, ZP2B)). It should be noted that in various embodiments, the second determined three-dimensional location (e.g., at determined coordinates XP2B, YP2B, ZP2B) may differ from the first determined three-dimensional location (e.g., at determined coordinates XP2C, YP2C, ZP2C), and the first three-dimensional location may be indicated or determined to be more reliable / accurate than the second three-dimensional location and / or may be utilized as part of the workpiece's three-dimensional data set in place of the second three-dimensional location. As discussed above, such techniques may be advantageous in that a focus curve determined from an image stack acquired with an image stack acquisition axis ISAA that is approximately orthogonal to the workpiece surface and / or portions of the workpiece elements may be relatively less accurate than a focus curve determined from an image stack acquired with an image stack acquisition axis ISAA that is less orthogonal to the workpiece surface and / or portions of the workpiece elements.For this reason, with respect to surface point SP2, the determined first three-dimensional position (e.g., having determined coordinates XP2C, YP2C, ZP2C) may be more accurate than the determined second three-dimensional position (e.g., having determined coordinates XP2B, YP2B, ZP2B), and it may therefore be advantageous to use the determined first three-dimensional position as part of a three-dimensional data set for representing surface point SP2 of workpiece WP1.

[0074] Figure 8 is a flow chart of a method for measuring a workpiece surface by moving a vision probe along multiple axes to a desired angle / orientation relative to the workpiece surface using a CMM system including a motion mechanism configuration as described in Figures 1 to 7C. The method generally includes four steps.

[0075] Block 802 includes operating a coordinate measuring machine (CMM) system including: (i) a vision probe 300 configured to image a surface of a workpiece WP based on image light transmitted along an optical axis OA of the vision probe 300; (ii) a slide mechanism arrangement including x-axis, y-axis, and z-axis slide mechanisms 225-227 configured to move the vision probe 300 in mutually orthogonal x-, y-, and z-axis directions, respectively, in a machine coordinate system MCS; and (iii) a rotation mechanism 214 coupled between the z-axis slide mechanism and the vision probe 300 and configured to rotate the vision probe 300 in various angular orientations relative to the z-axis of the machine coordinate system.

[0076] Block 804 includes orienting the vision probe 300 using a rotation mechanism such that the optical axis OA of the vision probe 300 points towards the surface of the workpiece WP. The optical axis OA of the vision probe 300 is not parallel to the z-axis of the machine coordinate system and corresponds to the image stack acquisition axis ISAA. As noted above, in various embodiments, the optical axis may be approximately / nominally perpendicular to at least a portion of the workpiece surface. The workpiece surface may be oblique (e.g., not horizontal in the machine coordinate system).

[0077] Box 806 includes acquiring an image stack along an image stack acquisition axis, the image stack including a plurality of images, each corresponding to a corresponding focus position of the vision probe 300. Acquiring the image stack includes (i) adjusting the plurality of sliding mechanisms 225-227 to move the vision probe 300 from a first image acquisition position to a second image acquisition position, each along the image stack acquisition axis, such that the vision probe 300 acquires a first and a second image of the plurality of images at the first and second image acquisition positions, respectively, and (ii) adjusting the plurality of sliding mechanisms 225-227 to move the vision probe 300 from the second image acquisition position to a third image acquisition position along the image stack acquisition axis, such that the vision probe 300 acquires a third image of the plurality of images at the third image acquisition position.

[0078] Box 808 includes determining focus curve data based at least in part on the analysis of the images of the image stack, the focus curve data indicating three-dimensional positions of a plurality of surface points on the workpiece surface.

[0079] While preferred embodiments of the present disclosure have been shown and described, numerous variations in the arrangement of elements and sequences of operation shown and described will be apparent to those skilled in the art based on this disclosure. Various alternative configurations can be used to implement the principles disclosed herein. Moreover, various embodiments described above can be combined to provide further embodiments.

Claims

1. 1. A vision probe comprising: A light source; an objective lens that receives image light emanating from a surface of a workpiece illuminated by the light source and transmits the image light along an imaging optical path, the objective lens defining an optical axis of the vision probe extending at least between the objective lens and the workpiece surface; a camera that receives imaging light transmitted along the imaging optical path and provides an image of the workpiece surface; a vision probe including: a slide mechanism configuration including an x-axis slide mechanism, a y-axis slide mechanism, and a z-axis slide mechanism configured to move the vision probe in mutually orthogonal x-axis, y-axis, and z-axis directions, respectively, in a machine coordinate system; a rotation mechanism coupled between the z-axis slide mechanism and the vision probe, the rotation mechanism being configured to rotate the vision probe at various angular orientations relative to the z-axis of the machine coordinate system; one or more processors; a memory coupled to the one or more processors and configured to store program instructions, The program instructions, when executed by the one or more processors, at least orienting the vision probe using the rotation mechanism such that the optical axis of the vision probe, which is not parallel to the z-axis of the machine coordinate system and corresponds to an image stack acquisition axis, points towards a surface of the workpiece; acquiring an image stack along the image stack acquisition axis, the image stack including a plurality of images, each image corresponding to a focused position of the vision probe; determining focus curve data indicative of three-dimensional positions of a plurality of surface points on the surface of the workpiece based at least in part on analysis of the images of the image stack; on said one or more processors; acquiring the image stack adjusting the plurality of slide mechanisms to move the vision probe from a first image acquisition position to a second image acquisition position, each along the image stack acquisition axis, such that the vision probe acquires first and second images of the plurality of images at the first and second image acquisition positions, respectively; and adjusting the plurality of sliding mechanisms to move the vision probe from the second image acquisition position to a third image acquisition position along the image stack acquisition axis, wherein the vision probe acquires a third image of the plurality of images at the third image acquisition position.

2. 2. The system of claim 1, wherein as part of the analysis of the image stack, each surface point of the plurality of surface points corresponds to a center of a region of interest in the image stack, and the analysis includes determining a focus curve for each region of interest in the image stack as part of the focus curve data, a peak of each focus curve indicating the three-dimensional location of the corresponding surface point.

3. 2. The system of claim 1, wherein the program instructions, when executed by the one or more processors, further cause the one or more processors to display a three-dimensional representation of the workpiece surface based at least in part on the focus curve data.

4. 2. The system of claim 1, wherein adjusting the plurality of sliding mechanisms to move the vision probe from the first image acquisition position to the second image acquisition position comprises adjusting the x-axis sliding mechanism by an x-axis image spacing, adjusting the y-axis sliding mechanism by a y-axis image spacing, and adjusting the z-axis sliding mechanism by a z-axis image spacing.

5. The system of claim 4 , wherein a spacing between each of the multiple images in the image stack corresponds to the x-axis image spacing, the y-axis image spacing, and the z-axis image spacing.

6. The system of claim 1 , wherein a distance along the image stack acquisition axis between the first and second image acquisition positions is the same as a distance along the image stack acquisition axis between the second and third image acquisition positions.

7. The rotation mechanism is configured to orient the vision probe in a plurality of orientations, the plurality of orientations including at least: an orientation in which the optical axis of the vision probe is at a 0 degree angle with respect to the z-axis of the machine coordinate system; an orientation of the optical axis of the vision probe at a 45 degree angle with respect to the z-axis of the machine coordinate system; The system of claim 1 , comprising:

8. 8. The system of claim 7, wherein the system is configured to acquire the image stack with the vision probe in the orientation where the optical axis of the vision probe is at the 45 degree angle with respect to the z-axis of the machine coordinate system.

9. The system of claim 1 , wherein while the plurality of sliding mechanisms are adjusted to move the vision probe between the image capture positions, the rotation mechanism is not adjusted such that the orientation of the vision probe remains constant and unadjusted.

10. The system of claim 1 , wherein during acquisition of the image stack, the optical axis of the vision probe and the image stack acquisition axis, which are not parallel to the z-axis of the machine coordinate system, are approximately perpendicular to at least a portion of the workpiece surface.

11. 2. The system of claim 1, wherein the workpiece surface is a first workpiece surface, the orientation of the vision probe is a first orientation, and the image stack is a first image stack acquired by the vision probe in the first orientation, and the program instructions when executed by the one or more processors further cause the one or more processors to acquire a second image stack with the vision probe in a second orientation different from the first orientation, with the optical axis of the vision probe pointing towards a second workpiece surface of the workpiece that is oriented at a different angle in the machine coordinate system to the first workpiece surface.

12. 12. The system of claim 11 , wherein the program instructions, when executed by the one or more processors, further cause the one or more processors to determine focus curve data based at least in part on analysis of the second image stack, the focus curve data indicating three-dimensional positions of a plurality of surface points on the second workpiece surface of the workpiece.

13. The program instructions, when executed by the one or more processors, further comprise: displaying a three-dimensional representation of at least a portion of the first workpiece surface based on the focus curve data determined based on at least an analysis of the first image stack but not based on an analysis of the second image stack; and displaying a three-dimensional representation of at least a portion of the second workpiece surface based on the focus curve data determined based on an analysis of the second image stack but not based on an analysis of the first image stack; The system of claim 12 , further comprising:

14. 13. The system of claim 12, wherein a commonly imaged surface point on a first portion of the first workpiece surface is imaged in both the first and second image stacks, a first image stack acquisition axis during acquisition of the first image stack is closer to an orthogonal direction to the first portion of the first workpiece surface than a second image stack acquisition axis during acquisition of the second image stack, the focus curve data determined at least in part based on the analysis of the first image stack indicates a first three-dimensional position of the commonly imaged surface point, and the focus curve data determined at least in part based on the analysis of the second image stack indicates a second three-dimensional position of the commonly imaged surface point that is different from the first three-dimensional position, and the first three-dimensional position is at least one of indicated or determined to be more reliable than the second three-dimensional position and utilized as part of the three-dimensional data set of the workpiece in place of the second three-dimensional position.

15. The system of claim 1 , wherein the objective lens has a specified magnification and is selected for use with the vision probe from a range of objective lenses having different magnifications.

16. 1. A method for measuring a workpiece surface, comprising: operating a coordinate measuring machine system including: (i) a vision probe configured to image a surface of a workpiece based on image light transmitted along an optical axis of the vision probe; (ii) a slide mechanism arrangement including an x-axis slide mechanism, a y-axis slide mechanism, and a z-axis slide mechanism configured to move the vision probe in mutually orthogonal x-axis, y-axis, and z-axis directions, respectively, in a machine coordinate system; and (iii) a rotation mechanism coupled between the z-axis slide mechanism and the vision probe, and configured to rotate the vision probe in various angular orientations relative to the z-axis of the machine coordinate system; orienting the vision probe using the rotation mechanism such that the optical axis of the vision probe, which is not parallel to the z-axis of the machine coordinate system and corresponds to an image stack acquisition axis, points towards a surface of the workpiece; acquiring an image stack along the image stack acquisition axis, the image stack including a plurality of images, each image corresponding to a focused position of the vision probe; determining focus curve data indicative of three-dimensional positions of a plurality of surface points on the surface of the workpiece based at least in part on analysis of the images of the image stack; Including, acquiring the image stack adjusting the plurality of slide mechanisms to move the vision probe from a first image acquisition position to a second image acquisition position, each along the image stack acquisition axis, such that the vision probe acquires first and second images of the plurality of images at the first and second image acquisition positions, respectively; and adjusting the plurality of sliding mechanisms to move the vision probe from the second image acquisition position to a third image acquisition position along the image stack acquisition axis, where the vision probe acquires a third image of the plurality of images at the third image acquisition position; A method comprising:

17. The method of claim 16 further comprising displaying a three-dimensional representation of the workpiece surface on a screen.

18. 17. The method of claim 16, wherein adjusting the orientation of the vision probe using the rotation mechanism comprises setting the optical axis of the vision probe to be approximately perpendicular to at least a portion of the workpiece surface, and wherein the orientation of the vision probe is not further adjusted and remains approximately constant during acquisition of the image stack.

19. The workpiece surface is a first workpiece surface, the orientation of the vision probe is a first orientation, and the image stack is a first image stack acquired by the vision probe in the first orientation, the method further comprising: acquiring a second image stack with the vision probe in a second orientation different from the first orientation and directing the optical axis of the vision probe towards a second workpiece surface of the workpiece that is oriented at a different angle than the first workpiece surface; 17. The method of claim 16, comprising:

20. determining second focus curve data indicative of three-dimensional positions of a plurality of surface points on the second workpiece surface of the workpiece based at least in part on analysis of the second image stack; 20. The method of claim 19, further comprising:

21. displaying a three-dimensional representation of at least a portion of the first workpiece surface based on the focus curve data determined based on at least an analysis of the first image stack but not based on an analysis of the second image stack; displaying a three-dimensional representation of at least a portion of the second workpiece surface based at least on the second focus curve data determined based on an analysis of the second image stack but not based on an analysis of the first image stack; 21. The method of claim 20, further comprising:

Images