Solid-state imaging device and electronic device

Abstract

This solid-state imaging device is provided with a light-receiving surface, multiple pixels that include a photoelectric conversion unit for photoelectrically converting light incident through the light-receiving surface, and a separation unit which electrically and optically separates the photoelectric conversion units. The pixels have a charge holding unit which holds a charge transferred from the photoelectric conversion unit, a transfer transistor which has a vertical gate electrode that reaches the photoelectric conversion unit and which transfers charge from the photoelectric conversion unit to the charge holding unit, and a light blocking unit which is disposed in the layer between the photoelectric conversion unit and the charge holding unit. In multiple, mutually adjacent first pixels of the aforementioned multiple pixels, multiple vertical gate electrodes are electrically connected to each other.

Description

[Technical field]

[0001] The present disclosure relates to a solid-state imaging device and an electronic device. [Background technology]

[0002] In solid-state imaging devices, a global shutter system using a CMOS image sensor is known (see, for example, Patent Document 1). In the invention described in Patent Document 1, a charge holding section to which charges accumulated in the photoelectric conversion section are transferred is provided at a depth different from that of the photoelectric conversion section, thereby ensuring the area of ​​the photoelectric conversion section while ensuring the number of saturated electrons. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2010-114273 A Summary of the Invention

[0004] However, in the invention described in the above Patent Document 1, there is a possibility that noise due to light incidence on the charge storage section may occur. In order to reduce this noise, it is possible to provide a light-shielding layer. If a light-shielding layer is provided, it becomes difficult to transfer charges from the photoelectric conversion section to the charge storage section. In order to facilitate the charge transfer, it is possible to provide a vertical gate electrode that reaches the photoelectric conversion section from an opening provided in the light-shielding layer. If a vertical gate electrode is provided, the pixel size becomes large, and further, the noise due to light incidence on the charge storage section from the opening provided in the light-shielding layer becomes large. Therefore, it is desirable to provide a solid-state imaging device that can avoid deterioration of charge transfer while suppressing an increase in noise and pixel size, and an electronic device equipped with the same.

[0005] A first solid-state imaging device according to an embodiment of the present disclosure includes a light receiving surface, a plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface, and an isolation unit that electrically and optically isolates each of the photoelectric conversion units. Each pixel includes a charge storage unit that stores charges transferred from the photoelectric conversion unit, a transfer transistor having a vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit, and a light shielding unit disposed in a layer between the photoelectric conversion unit and the charge storage unit. In a plurality of first pixels adjacent to each other among the plurality of pixels, a plurality of vertical gate electrodes are electrically connected to each other.

[0006] A first electronic device according to an embodiment of the present disclosure includes a solid-state imaging device that outputs pixel signals according to incident light, and a signal processing circuit that processes the pixel signals. The solid-state imaging device provided in the first electronic device has the same configuration as the first solid-state imaging device described above.

[0007] In the first solid-state imaging device and the first electronic device according to an embodiment of the present disclosure, a vertical gate electrode is provided that reaches the photoelectric conversion unit. This makes it possible to avoid deterioration of charge transfer from the photoelectric conversion unit to the charge storage unit due to the provision of the light shielding unit. In the present disclosure, the vertical gate electrodes are further electrically connected to each other in a plurality of first pixels that are adjacent to each other among the plurality of pixels. This makes it possible to reduce the size of the transfer transistor compared to a case where a transfer transistor is provided separately for each pixel, and accordingly makes it possible to reduce the opening of the light shielding unit through which the vertical gate electrode passes. As a result, it is possible to suppress noise and an increase in pixel size.

[0008] A second solid-state imaging device according to an embodiment of the present disclosure includes a light receiving surface, a plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface, and an isolation unit that electrically and optically isolates each of the photoelectric conversion units. Each pixel includes a charge storage unit that stores charges transferred from the photoelectric conversion unit, a transfer transistor having a first vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit, a discharge transistor having a second vertical gate electrode reaching the photoelectric conversion unit and disposed adjacent to the transfer transistor and discharging charges from the photoelectric conversion unit, and a light shielding unit disposed in a layer between the photoelectric conversion unit and the charge storage unit. In a plurality of first pixels adjacent to each other among the plurality of pixels, a plurality of vertical gate electrodes are electrically connected to each other.

[0009] A second electronic device according to an embodiment of the present disclosure includes a solid-state imaging device that outputs pixel signals according to incident light, and a signal processing circuit that processes the pixel signals. The solid-state imaging device provided in the second electronic device has the same configuration as the second solid-state imaging device described above.

[0010] In the second solid-state imaging device and the second electronic device according to an embodiment of the present disclosure, first and second vertical gate electrodes reaching the photoelectric conversion unit are provided. This makes it possible to avoid deterioration of charge transfer from the photoelectric conversion unit to the charge storage unit due to the provision of the light shielding unit. In the present disclosure, the first vertical gate electrodes are electrically connected to each other and the second vertical gate electrodes are electrically connected to each other in a plurality of first pixels adjacent to each other among the plurality of pixels. This makes it possible to reduce the size of the first and second transfer transistors compared to a case where the first and second transfer transistors are provided separately for each pixel, and accordingly makes it possible to reduce the opening of the light shielding unit through which the first and second vertical gate electrodes pass. As a result, it is possible to suppress noise and an increase in pixel size. [Brief description of the drawings]

[0011] [Figure 1]1 is a diagram illustrating an example of a schematic configuration of a solid-state imaging device according to an embodiment of the present disclosure. [Diagram 2] 2 is a diagram illustrating an example of a circuit configuration of a pixel array unit in FIG. 1. [Diagram 3] 2 is a diagram illustrating an example of a cross-sectional configuration of a pixel array portion in FIG. 1. [Figure 4] 4 is a diagram illustrating an example of a planar configuration of a logic circuit side of a pixel array unit in FIG. 3. [Diagram 5] 4 is a diagram illustrating an example of a planar configuration of a light receiving surface side of a pixel array unit in FIG. 3. [Figure 6] 4 is a diagram illustrating a modified example of the planar configuration of the logic circuit side of the pixel array unit in FIG. 3. [Figure 7] 4 is a diagram illustrating a modified example of the planar configuration of the light receiving surface side of the pixel array unit in FIG. 3. [Figure 8] 4 is a diagram illustrating a modified example of the planar configuration of the logic circuit side of the pixel array unit in FIG. 3. [Figure 9] 4 is a diagram illustrating a modified example of the planar configuration of the light receiving surface side of the pixel array unit in FIG. 3. [Figure 10] 2 is a diagram illustrating a modified example of the circuit configuration of the pixel array unit in FIG. 1. [Figure 11] 11 is a diagram illustrating an example of a planar configuration of a logic circuit side of a pixel array unit having the circuit configuration of FIG. 10. [Figure 12] 11 is a diagram illustrating a modified example of the planar configuration on the light-receiving surface side of a pixel array portion having the circuit configuration of FIG. [Figure 13] FIG. 13 is a diagram illustrating a modified example of the planar configuration of the logic circuit side of the pixel array unit. [Figure 14] 13 is a diagram illustrating a modified example of the planar configuration of the light receiving surface side of the pixel array portion. FIG. [Figure 15] 2 is a diagram illustrating a modified example of the circuit configuration of the pixel array unit in FIG. 1. [Figure 16] 2 is a diagram illustrating a modified example of the cross-sectional configuration of the pixel array portion in FIG. 1. [Figure 17] 17 is a diagram illustrating an example of a planar configuration of the logic circuit side of the pixel array unit in FIG. 16. [Figure 18]17 is a diagram illustrating an example of a planar configuration of the light receiving surface side of the pixel array unit in FIG. 16. [Figure 19] 17 is a diagram illustrating a modified example of the planar configuration of the logic circuit side of the pixel array unit in FIG. 16. [Figure 20] 17 is a diagram illustrating a modified example of the planar configuration of the light receiving surface side of the pixel array portion in FIG. 16. [Figure 21] 17 is a diagram illustrating a modified example of the planar configuration of the logic circuit side of the pixel array unit in FIG. 16. [Figure 22] 17 is a diagram illustrating a modified example of the planar configuration of the light receiving surface side of the pixel array portion in FIG. 16. [Figure 23] 4 is a diagram illustrating a modified example of the cross-sectional configuration of the pixel array portion in FIG. 3. [Figure 24] 17 is a diagram illustrating a modified example of the cross-sectional configuration of the pixel array portion in FIG. 16. [Diagram 25] 4 is a diagram illustrating a modified example of the cross-sectional configuration of the pixel array portion in FIG. 3. [Figure 26] 17 is a diagram illustrating a modified example of the cross-sectional configuration of the pixel array portion in FIG. 16. [Figure 27] 4 is a diagram illustrating a modified example of the cross-sectional configuration of the pixel array portion in FIG. 3. [Figure 28] 17 is a diagram illustrating a modified example of the cross-sectional configuration of the pixel array portion in FIG. 16. [Figure 29] 29 is a diagram illustrating a modification of the cross-sectional configuration of a part of the pixel array portion of FIGS. 3, 16, and 23 to 28. FIG. [Diagram 30] FIG. 2 is a schematic diagram illustrating a back bond on a crystal plane of a Si substrate according to the present disclosure. [Diagram 31] 2 is a schematic diagram illustrating an off-angle on the surface of a Si substrate according to the present disclosure. FIG. [Diagram 32] FIG. 1 is a diagram illustrating an example of a schematic configuration of an imaging system including a solid-state imaging device according to the above embodiment. [Diagram 33] 1 is a block diagram showing an example of a schematic configuration of a vehicle control system; [Diagram 34] 4 is an explanatory diagram showing an example of the installation positions of an outside-vehicle information detection unit and an imaging unit; FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The description will be made in the following order. 1. Embodiment (Solid-state imaging device)...FIGS. 1 to 4 2. Modifications (solid-state imaging device)...5~Fig. 31 3. Application examples (imaging systems)...32 4. Application to moving objects…33, Fig.34

[0013] <1. Preferred embodiment> [composition] A solid-state imaging device 1 according to an embodiment of the present disclosure will be described. The solid-state imaging device 1 is, for example, a global shutter type back-illuminated image sensor formed of a CMOS (Complementary Metal Oxide Semiconductor) image sensor or the like. The solid-state imaging device 1 captures an image by receiving light from a subject, photoelectrically converting the light, and generating an image signal. The solid-state imaging device 1 outputs a pixel signal according to the incident light.

[0014] The global shutter method is a method of performing global exposure in which exposure is basically started and ended simultaneously for all pixels. Here, all pixels means all pixels that appear in an image, excluding dummy pixels and the like. In addition, if the time difference and image distortion are small enough to be negligible, the global shutter method also includes a method of performing global exposure in units of multiple rows (e.g., several tens of rows) instead of all pixels simultaneously, while moving the area where global exposure is performed. In addition, the global shutter method also includes a method of performing global exposure on pixels in a specified area, rather than on all pixels that appear in an image.

[0015] A back-illuminated image sensor is an image sensor having a configuration in which a photoelectric conversion unit such as a photodiode that receives light from a subject and converts it into an electrical signal is provided between a light receiving surface on which light from a subject is incident and a wiring layer on which wiring such as transistors that drive each pixel is provided. Note that the present disclosure is not limited to application to CMOS image sensors.

[0016] FIG. 1 illustrates an example of a schematic configuration of a solid-state imaging device 1 according to an embodiment of the present disclosure. The solid-state imaging device 1 includes a pixel array section 10 in which a plurality of sensor pixels 11 performing photoelectric conversion are arranged in a matrix. The sensor pixels 11 correspond to a specific example of a "pixel" in the present disclosure. FIG. 2 illustrates an example of a circuit configuration of the pixel array section 10. FIG. 3 illustrates an example of a cross-sectional configuration of the pixel array section 10. The solid-state imaging device 1 is configured, for example, by bonding together two substrates (a first substrate 30 and a second substrate 40).

[0017] The first substrate 30 has a plurality of sensor pixels 11 on a semiconductor substrate 31. The plurality of sensor pixels 11 are arranged in a matrix at positions facing the rear surface (light receiving surface 31A) of the semiconductor substrate 31. The first substrate 30 further has a plurality of readout circuits 12 on the semiconductor substrate 31. Each readout circuit 12 outputs a pixel signal based on the charge output from the sensor pixel 11. For example, one readout circuit 12 is provided for each sensor pixel 11. The readout circuit 12 has, for example, a reset transistor RST, a selection transistor SEL, and an amplification transistor AMP.

[0018] The first substrate 30 has a plurality of pixel driving lines extending in the row direction and a plurality of data output lines VSL extending in the column direction. The pixel driving lines are wirings to which control signals for controlling the output of charges accumulated in the sensor pixels 11 are applied, and extend, for example, in the row direction. The data output lines VSL are wirings for outputting pixel signals output from each readout circuit 12 to the logic circuit 20, and extend, for example, in the column direction.

[0019] The second substrate 40 has a logic circuit 20 that processes pixel signals on a semiconductor substrate 41. The logic circuit 20 has, for example, a vertical drive circuit 21, a column signal processing circuit 22, a horizontal drive circuit 23, and a system control circuit 24. The logic circuit 20 (specifically, the horizontal drive circuit 23) outputs an output voltage for each sensor pixel 11 to the outside.

[0020] For example, the vertical drive circuit 21 sequentially selects a plurality of sensor pixels 11 for each predetermined unit pixel row. A "predetermined unit pixel row" refers to a pixel row that can be selected at the same address.

[0021] The column signal processing circuit 22 performs, for example, correlated double sampling (CDS) processing on pixel signals output from each sensor pixel 11 of a row selected by the vertical drive circuit 21. The column signal processing circuit 22 extracts a signal level of the pixel signal by performing, for example, CDS processing, and holds pixel data according to the amount of light received by each sensor pixel 11. The column signal processing circuit 22 has, for example, a column signal processing section for each data output line VSL. The column signal processing section includes, for example, a single slope A / D converter. The single slope A / D converter includes, for example, a comparator and a counter circuit. The horizontal drive circuit 23 sequentially outputs, for example, the pixel data held in the column signal processing circuit 22 to the outside. The system control circuit 24 controls, for example, the driving of each block (the vertical drive circuit 21, the column signal processing circuit 22, and the horizontal drive circuit 23) in the logic circuit 20.

[0022] Each sensor pixel 11 has components in common with each other. Each sensor pixel 11 has, for example, a photodiode PD, a transfer transistor TRG, and a floating diffusion FD. The transfer transistor TRG is, for example, an NMOS (Metal Oxide Semiconductor) transistor. The photodiode PD corresponds to a specific example of a "photoelectric conversion unit" in the present disclosure. The transfer transistor TRG corresponds to a specific example of a "transfer transistor" in the present disclosure. The floating diffusion FD corresponds to a specific example of a "charge holding unit" in the present disclosure.

[0023] The photodiode PD performs photoelectric conversion on the light L incident through the light receiving surface 31A. The photodiode PD performs photoelectric conversion to generate charges according to the amount of received light. The photodiode PD is, for example, a PN junction photoelectric conversion element configured by an N-type semiconductor region 32A and a P-type semiconductor region 32B provided in the semiconductor substrate 31. The cathode of the photodiode PD is electrically connected to the source of the transfer transistor TRG, and the anode of the photodiode PD is electrically connected to a reference potential line (for example, ground GND). The transfer transistor TRG is formed in a layer different from the photodiode PD, and is formed at a position facing the photodiode PD in the normal direction of the semiconductor substrate 31.

[0024] The transfer transistor TRG is connected between the photodiode PD and the floating diffusion FD, and transfers the charge stored in the photodiode PD from the photodiode PD to the floating diffusion FD in response to a control signal applied to the gate electrode. The transfer transistor TRG transfers the charge from the photodiode PD to the floating diffusion FD. The drain of the transfer transistor TRG is electrically connected to the floating diffusion FD, and the gate of the transfer transistor TRG is connected to the pixel drive line.

[0025] The transfer transistor TRG has two vertical gate electrodes VG and a connection portion CN as gate electrodes. In the transfer transistor TRG, one vertical gate electrode VG is provided in one of two sensor pixels 11 adjacent to each other, and the other vertical gate electrode VG is provided in the other of the two sensor pixels 11 adjacent to each other. In the transfer transistor TRG, the connection portion CN is in contact with the two vertical gate electrodes VG. That is, in the two sensor pixels 11 adjacent to each other, the two vertical gate electrodes VG are electrically connected to each other via the connection portion CN, and the two sensor pixels 11 adjacent to each other share the connection portion CN (a part of the gate electrode). Here, "shared" refers to the outputs of the two sensor pixels 11 adjacent to each other being controlled by a common connection portion CN.

[0026] The floating diffusion FD is a floating diffusion region that temporarily holds the charge output from the photodiode PD via the transfer transistor TRG. For example, a reset transistor RST is connected to the floating diffusion FD, and a vertical signal line VSL is connected to the floating diffusion FD via an amplification transistor AMP and a selection transistor SEL.

[0027] In the reset transistor RST, the drain is connected to the power supply line VDD, and the source is connected to the floating diffusion FD. The reset transistor RST initializes (resets) the floating diffusion FD in response to a control signal applied to the gate electrode. For example, when the reset transistor RST is turned on, the potential of the floating diffusion FD is reset to the potential level of the power supply line VDD. In other words, the floating diffusion FD is initialized.

[0028] The amplifier transistor AMP has a gate electrode connected to the floating diffusion FD and a drain connected to a power supply line VDD, and serves as an input section of a source follower circuit that reads out charges obtained by photoelectric conversion in the photodiode PD. That is, the amplifier transistor AMP has a source connected to the vertical signal line VSL via the selection transistor SEL, and thus constitutes a source follower circuit together with a constant current source connected to one end of the vertical signal line VSL.

[0029] The selection transistor SEL is connected between the source of the amplification transistor AMP and the vertical signal line VSL, and a control signal is supplied to the gate electrode of the selection transistor SEL as a selection signal. When the control signal is turned on, the selection transistor SEL is turned on, and the sensor pixel 11 connected to the selection transistor SEL is turned on. When the sensor pixel 11 is turned on, a pixel signal output from the amplification transistor AMP is read out to the column signal processing circuit 22 via the vertical signal line VSL.

[0030] Next, the configuration of the sensor pixel 11 will be described in detail with reference to Fig. 3, Fig. 4, and Fig. 5. Fig. 4 shows an example of a planar configuration of the pixel array section 10 on the logic circuit 20 side. Fig. 5 shows an example of a planar configuration of the pixel array section 10 on the light receiving surface 31A side. In Fig. 4, the layout of various transistors (reset transistor RST, amplification transistor AMP, and selection transistor SEL) included in the readout circuit 12 is superimposed on the planar configuration of the semiconductor substrate 31 on the logic circuit 20 side. In Fig. 5, the layout of the vertical gate electrode VG is superimposed on the planar configuration of the semiconductor substrate 31 on the light receiving surface 31A side.

[0031] The first substrate 30 is configured by stacking a semiconductor layer 33 and an insulating layer 32 in this order on a semiconductor substrate 31. That is, the insulating layer 32 is formed in contact with the upper surface of the semiconductor layer 33. A transfer transistor TRG and a floating diffusion FD are formed on the upper surface of the semiconductor layer 33. Therefore, the upper surface of the semiconductor layer 33 is a formation surface 31B for the transfer transistor TRG and the like. It is also possible to regard a stacked body made of the semiconductor substrate 31 and the semiconductor layer 33 as a semiconductor substrate. In this case, the upper surface of the stacked body (semiconductor substrate) made of the semiconductor substrate 31 and the semiconductor layer 33 is the formation surface 31B, and the back surface of the stacked body (semiconductor substrate) made of the semiconductor substrate 31 and the semiconductor layer 33 is the light receiving surface 31A. At this time, each sensor pixel 11 is formed on the stacked body (semiconductor substrate) made of the semiconductor substrate 31 and the semiconductor layer 33.

[0032] The insulating layer 32 includes a gate of the transfer transistor TRG and a wiring connected to the gate of the transfer transistor TRG. The gate of the transfer transistor TRG and the wiring connected to the gate of the transfer transistor TRG are formed of, for example, a metal material. The gate of the transfer transistor TRG may be formed of polysilicon. The insulating layer 32 includes a readout circuit 12. The readout circuit 12 may be formed on the formation surface 31B of the semiconductor substrate 31.

[0033] The semiconductor substrates 31 and 41 are, for example, made of silicon substrates. The semiconductor layer 33 is, for example, made of a silicon layer formed by epitaxial crystal growth. The semiconductor substrate 31 has a P-type semiconductor region 32B in a part of the upper surface and in the vicinity thereof, and has an N-type semiconductor region 32A of a different conductivity type from the P-type semiconductor region 32B in a region deeper than the P-type semiconductor region 32B. The P-type semiconductor region 32B is provided on the surface side of the semiconductor substrate 31 opposite to the light receiving surface 31A. The conductivity type of the P-type semiconductor region 32B is P-type. The conductivity type of the N-type semiconductor region 32A is a different conductivity type from the P-type semiconductor region 32B, and is N-type. The semiconductor layer 33 has the same conductivity type as the P-type semiconductor region 32B, and is P-type. The semiconductor layer 33 has a floating diffusion FD of a different conductivity type from the semiconductor layer 33. A part of the gate of the transfer transistor TRG (two vertical gate electrodes VG) is formed extending from the upper surface (formation surface 31B) of the semiconductor layer 33 in the thickness direction (normal direction) of the semiconductor substrate 31. A part of the gate of the transfer transistor TRG (two vertical gate electrodes VG) extends from the formation surface 31B to a depth reaching the N-type semiconductor region 32A. A part of the gate of the transfer transistor TRG (two vertical gate electrodes VG) has, for example, a rod-like shape extending in the thickness direction (normal direction) of the semiconductor substrate 31.

[0034] The first substrate 30 further includes, for example, a fixed charge film 36 in contact with the rear surface (light receiving surface 31A) of the semiconductor substrate 31. The fixed charge film 36 has a negative fixed charge in order to suppress the generation of dark current due to the interface state on the light receiving surface 31A side of the semiconductor substrate 31. The fixed charge film 36 is formed, for example, of an insulating film having a negative fixed charge. Examples of materials for such an insulating film include hafnium oxide, zirconium oxide, aluminum oxide, titanium oxide, and tantalum oxide. A hole accumulation layer is formed at the interface on the light receiving surface 31A side of the semiconductor substrate 31 by the electric field induced by the fixed charge film 36. This hole accumulation layer suppresses the generation of electrons from the interface. The first substrate 30 further includes, for example, a color filter 37. The color filter 37 is provided on the light receiving surface 31A side of the semiconductor substrate 31. The color filter 37 is provided, for example, in contact with the fixed charge film 36 and is provided at a position facing the sensor pixel 11 via the fixed charge film 36.

[0035] Each sensor pixel 11 has a light receiving lens 50 on the back surface (light receiving surface 31A) side of the semiconductor substrate 31. That is, the solid-state imaging device 1 has a plurality of light receiving lenses 50, one for each sensor pixel 11. The plurality of light receiving lenses 50 are provided for each photodiode PD, and are disposed at positions facing the photodiode PD. That is, the solid-state imaging device 1 is a back-illuminated imaging device. The light receiving lens 50 is provided, for example, in contact with the color filter 37, and is provided at a position facing the sensor pixel 11 via the color filter 37 and the fixed charge film 36.

[0036] The first substrate 30 has separation sections 51, 52, and 54 that electrically and optically separate two adjacent sensor pixels 11. The separation sections 51, 52, and 54 correspond to a specific example of the "separation section" of the present disclosure. The separation sections 51, 52, and 54 are formed extending in the normal direction (thickness direction) of the semiconductor substrate 31. The separation sections 51 and 52 are stacked in the normal direction (thickness direction) of the semiconductor substrate 31 in the semiconductor substrate 31 and the semiconductor layer 33. That is, the separation sections 51 and 52 are connected to each other. A structure made up of the separation sections 51 and 52 is formed extending from the light receiving surface 31A to the formation surface 31B. That is, the structure made up of the separation sections 51 and 52 penetrates the semiconductor substrate 31 and the semiconductor layer 33. Similarly, the separation section 54 is formed in the semiconductor substrate 31 and the semiconductor layer 33 extending in the normal direction (thickness direction) of the semiconductor substrate 31. The separation portion 54 is formed to extend from the light-receiving surface 31A to the formation surface 31B. That is, the separation portion 54 penetrates the semiconductor substrate 31 and the semiconductor layer 33.

[0037] The separation units 51 and 54 are integrally formed, for example, so as to surround the sensor pixel 11 (particularly the photodiode PD) in the horizontal plane direction, and further extend in the normal direction (thickness direction) of the semiconductor substrate 31. The separation units 52 and 54 are formed, for example, so as to surround the sensor pixel 11 (particularly the transfer transistor TRG and the floating diffusion FD) in the horizontal plane direction, and further extend in the normal direction (thickness direction) of the semiconductor substrate 31.

[0038] The isolation parts 51 and 54 are, for example, high resistance regions formed by injecting impurities into the semiconductor substrate 31. The isolation part 52 is configured to include, for example, a DTI (Deep Trench Isolation) structure. In the isolation part 52, the DTI is configured to include an insulating film 52B in contact with the inner wall of a trench provided in the semiconductor substrate 31, and a metal embedded part 52A provided inside the insulating film 52B. The metal embedded part 52A is formed to extend to a predetermined depth from the formation surface 31B. The insulating film 52B is, for example, an oxide film formed by thermally oxidizing the semiconductor substrate 31, and is formed of, for example, silicon oxide. The metal embedded part 52A is a ring-shaped metal layer surrounding the sensor pixel 11 (particularly, the transfer transistor TRG and the floating diffusion FD) in the horizontal plane direction. The metal embedded part 52A is formed, for example, by using CVD (Chemical Vapor Deposition), and is formed of, for example, aluminum or an aluminum alloy.

[0039] The first substrate 30 further includes a light shielding portion 53 arranged in a layer between the photodiode PD and the floating diffusion FD for each sensor pixel 11. The light shielding portion 53 has an opening 53H through which the vertical gate electrode VG penetrates. In two sensor pixels 11 adjacent to each other, the two vertical gate electrodes VG are arranged opposite each other via a separation portion 54 and are in contact with the separation portion 54. The connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite each other. The light shielding portion 53 has an opening 53H at a location that is in contact with the separation portion 54 and where the vertical gate electrode VG penetrates. That is, the light shielding portion 53 has an opening 53H at a location facing the gate of the transfer transistor TRG. The light shielding portion 53 blocks the light L incident through the light receiving surface 31A from entering the floating diffusion FD at a location other than the opening 53H.

[0040] Light shielding portion 53 includes, for example, insulating film 53B in contact with the inner wall of cavity 58 provided in first substrate 30, and metal embedded portion 53A provided inside insulating film 53B. Metal embedded portion 53A corresponds to a specific example of a "light shielding portion" in the present disclosure.

[0041] The cavity 58 spreads in the in-plane direction in the semiconductor layer 33. The cavity 58 is formed at a predetermined location in the semiconductor layer 33 by, for example, wet etching using a predetermined chemical solution. An etching stop layer may be provided at a location of the cavity 58 facing the vertical gate electrode VG. The etching stop layer is made of a material whose etching rate with respect to the above-mentioned chemical solution is relatively slower than that of the semiconductor layer 33.

[0042] The insulating film 53B is formed, for example, by using CVD. The insulating film 53B is formed, for example, by a dielectric material such as SiO2. The insulating film 53B has a laminated structure made of, for example, a SiO2 film (silicon oxide film), an SCF film, and a SiO2 film (silicon oxide film). The insulating film 53B may be a single layer film made of SiO2 (silicon oxide). The metal embedded portion 53A is formed, for example, by using CVD. The metal embedded portion 53A may be formed all at once, for example, by using CVD. The metal embedded portion 53A is formed, for example, by aluminum or an aluminum alloy.

[0043] The metal embedded portion 53A is formed in contact with the lower portion of the metal embedded portion 52A of the separation portion 52. The metal embedded portion 53A blocks the light incident through the rear surface (light receiving surface 31A) of the semiconductor substrate 31 from being incident on the floating diffusion FD. The metal embedded portion 53A is disposed in a layer between the photodiode PD and the floating diffusion FD. The metal embedded portion 53A is a sheet-like metal layer extending in a direction perpendicular to the normal direction (thickness direction) of the semiconductor substrate 31. The metal embedded portion 53A has an opening through which the vertical gate electrode VG penetrates. The insulating film 53B covers the metal embedded portion 53A and insulates and separates the metal embedded portion 53A from the vertical gate electrode VG. The metal embedded portion 53A and the vertical gate electrode VG are disposed, for example, via the insulating film 53B and a part of the semiconductor layer 33 (hereinafter referred to as the "semiconductor portion 33A").

[0044] [effect] Next, the effects of the solid-state imaging device 1 according to the present embodiment will be described.

[0045] In solid-state imaging devices, a global shutter system using a CMOS image sensor is known (see, for example, Patent Document 1). In the invention described in Patent Document 1, a charge holding section to which charges accumulated in the photoelectric conversion section are transferred is provided at a depth different from that of the photoelectric conversion section, thereby ensuring the area of ​​the photoelectric conversion section while ensuring the number of saturated electrons.

[0046] However, in the invention described in Patent Document 1, there is a possibility that noise may occur due to light incidence on the charge storage section. In order to reduce this noise, it is possible to provide a light-shielding layer. If a light-shielding layer is provided, it becomes difficult to transfer charges from the photoelectric conversion section to the charge storage section. In order to facilitate the charge transfer, it is possible to provide a vertical gate electrode that reaches the photoelectric conversion section from an opening provided in the light-shielding layer. If a vertical gate electrode is provided, the pixel size becomes large, and further, the noise caused by light incidence on the charge storage section from the opening provided in the light-shielding layer becomes large.

[0047] On the other hand, in this embodiment, a vertical gate electrode VG is provided that reaches the photodiode PD. This makes it possible to avoid deterioration of charge transfer from the photodiode PD to the floating diffusion FD due to the provision of the light shielding portion 53. In this embodiment, furthermore, in two sensor pixels 11 adjacent to each other, two vertical gate electrodes VG are electrically connected to each other. This makes it possible to reduce the size of the transfer transistor TRG compared to the case where a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly, it is possible to reduce the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG passes. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0048] In this embodiment, in two adjacent sensor pixels 11, a connection portion CN is provided that contacts two vertical gate electrodes VG and electrically connects the two vertical gate electrodes VG to each other. This allows the size of the transfer transistor TRG to be smaller than when a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG passes can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0049] In this embodiment, in two adjacent sensor pixels 11, two vertical gate electrodes VG are arranged opposite each other via a separation portion 54 and are in contact with the separation portion 54, and further, the connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite each other. This allows the size of the transfer transistor TRG to be reduced compared to the case where a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly, the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG passes can be reduced. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0050] In this embodiment, an opening 53H is provided at a location that contacts the separation portion 54 and where the vertical gate electrode VG penetrates. This allows the size of the transfer transistor TRG to be smaller than when a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG penetrates can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0051] <2. Modifications> Modifications of the solid-state imaging device 1 according to the above embodiment will be described below.

[0052] [Variation A] In the above embodiment, each sensor pixel 11 may have a plurality of transfer transistors TRG. For example, as shown in FIG. 6 and FIG. 7, each sensor pixel 11 may have two transfer transistors TRG. FIG. 6 shows a modified planar configuration of the pixel array unit 10 on the logic circuit 20 side. FIG. 7 shows a modified planar configuration of the pixel array unit 10 on the light receiving surface 31A side. In FIG. 6, the layout of various transistors (reset transistor RST, amplification transistor AMP, and selection transistor SEL) included in the readout circuit 12 is superimposed on the planar configuration of the semiconductor substrate 31 on the logic circuit 20 side. In FIG. 7, the layout of the vertical gate electrode VG is superimposed on the planar configuration of the semiconductor substrate 31 on the light receiving surface 31A side.

[0053] The discharge transistor OFG is, for example, an NMOS transistor. The discharge transistor OFG discharges electric charges from the photoelectric conversion unit in response to a control signal applied to the gate electrode. The discharge transistor OFG has a common configuration with the transfer transistor TRG, and has two vertical gate electrodes VG and a connection portion CN as gate electrodes. In each transfer transistor TRG, one vertical gate electrode VG is provided in one of two sensor pixels 11 adjacent to each other, and the other vertical gate electrode VG is provided in the other of two sensor pixels 11 adjacent to each other. In each transfer transistor TRG, the connection portion CN is in contact with the two vertical gate electrodes VG. That is, in two sensor pixels 11 adjacent to each other, the two vertical gate electrodes VG are electrically connected to each other via the connection portion CN, and the two sensor pixels 11 adjacent to each other share the connection portion CN (a part of the gate electrode). Here, "shared" refers to the discharge of electric charges in two sensor pixels 11 adjacent to each other being controlled by a common connection portion CN.

[0054] In this modification, the transfer transistor TRG corresponds to a specific example of the "transfer transistor" of the present disclosure. Also, in this modification, the vertical gate electrode VG of one transfer transistor TRG corresponds to a specific example of the "first vertical gate electrode" of the present disclosure, and the vertical gate electrode VG of the other transfer transistor TRG corresponds to a specific example of the "second vertical gate electrode" of the present disclosure.

[0055] In this modification, in the transfer transistor TRG, the connection portion CN is in contact with two vertical gate electrodes VG. That is, in two adjacent sensor pixels 11, the two vertical gate electrodes VG included in the transfer transistor TRG are electrically connected to each other via the connection portion CN, and the two adjacent sensor pixels 11 share the above-mentioned connection portion CN (part of the gate electrode). In the two adjacent sensor pixels 11, the two vertical gate electrodes VG included in the transfer transistor TRG are arranged opposite each other via the separation portion 54 and are in contact with the separation portion 54. In the transfer transistor TRG, the above-mentioned connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite each other.

[0056] In this modification, the light shielding portion 53 has an opening 53H at a portion where the light shielding portion 53 is in contact with the separating portion 54 and where the vertical gate electrode VG included in the transfer transistor TRG penetrates through the light shielding portion 53. The two transfer transistors TRG provided in each sensor pixel 11 are disposed adjacent to each other, and further, in each sensor pixel 11, the floating diffusion FD is disposed adjacent to the gap between the two vertical gate electrodes VG.

[0057] In this modification, two transfer transistors TRG are provided in each sensor pixel 11. This improves charge transfer from the photodiode PD to the floating diffusion FD compared to the case where one transfer transistor TRG is provided in each sensor pixel 11.

[0058] In this modification, the two transfer transistors TRG provided in each sensor pixel 11 are disposed adjacent to each other, and further, the floating diffusion FD is disposed adjacent to the gap between the two vertical gate electrodes VG in each sensor pixel 11. This improves charge transfer from the photodiode PD to the floating diffusion FD compared to a case where the floating diffusion FD is disposed away from the gap between the two vertical gate electrodes VG.

[0059] In this modification, the transfer transistor TRG is provided with a connection portion CN that contacts two vertical gate electrodes VG and electrically connects the two vertical gate electrodes VG to each other. This allows the size of the transfer transistor TRG to be smaller than when a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG passes can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0060] In this modification, in the transfer transistor TRG, two vertical gate electrodes VG are arranged opposite to each other via a separation portion 54 and are in contact with the separation portion 54, and further, the connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite to each other. This allows the size of the transfer transistor TRG to be reduced compared to the case where a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly, the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG passes can be reduced. As a result, the increase in noise and pixel size can be suppressed. Therefore, the deterioration of charge transfer can be avoided while suppressing the increase in noise and pixel size.

[0061] In this modification, an opening 53H is provided at a location that contacts the separation portion 54 and where two vertical gate electrodes VG penetrate. This allows the size of the transfer transistor TRG to be smaller than when a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG penetrates can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0062] [Variation B] In the above embodiment, the transfer transistor TRG may further include a vertical gate electrode VG that is not connected to the connection portion CN, for each sensor pixel 11, as shown in, for example, FIGS. 8 and 9. FIG. 8 shows a modified planar configuration of the logic circuit 20 side of the pixel array unit 10. FIG. 9 shows a modified planar configuration of the light receiving surface 31A side of the pixel array unit 10. In FIG. 8, the layout of various transistors (reset transistor RST, amplification transistor AMP, and selection transistor SEL) included in the readout circuit 12 is superimposed on the planar configuration of the logic circuit 20 side of the semiconductor substrate 31. In FIG. 9, the layout of the vertical gate electrode VG is superimposed on the planar configuration of the light receiving surface 31A side of the semiconductor substrate 31.

[0063] In this modification, each sensor pixel 11 has a floating diffusion FD at a position adjacent to the gap between the vertical gate electrode VG connected to the connection part CN and the vertical gate electrode VG not connected to the connection part CN. This improves charge transfer from the photodiode PD to the floating diffusion FD compared to the case where the floating diffusion FD is disposed away from the gap between the two vertical gate electrodes VG.

[0064] [Variation C] In the above embodiment and its modified example, the transfer transistor TRG may have four vertical gate electrodes VG and a connection portion CN as a gate electrode. In this case, in the transfer transistor TRG, the four vertical gate electrodes VG are provided for each of four sensor pixels 11 adjacent to each other, as shown in Figures 10, 11, and 12.

[0065] FIG. 10 shows an example of a circuit configuration of the pixel array section 10 according to this modification. FIG. 11 shows an example of a planar configuration of the logic circuit 20 side of the pixel array section 10 according to this modification. FIG. 12 shows an example of a planar configuration of the light receiving surface 31A side of the pixel array section 10 according to this modification. In FIG. 11, the layout of various transistors (reset transistor RST, amplification transistor AMP, and selection transistor SEL) included in the readout circuit 12 is superimposed on the planar configuration of the logic circuit 20 side of the semiconductor substrate 31. In FIG. 12, the layout of the vertical gate electrode VG is superimposed on the planar configuration of the light receiving surface 31A side of the semiconductor substrate 31.

[0066] In this modification, in the transfer transistor TRG, the connection portion CN is in contact with four vertical gate electrodes VG. That is, in four adjacent sensor pixels 11, the four vertical gate electrodes VG are electrically connected to each other via the connection portion CN, and the four adjacent sensor pixels 11 share the connection portion CN (a part of the gate electrode).

[0067] In this modification, in four adjacent sensor pixels 11, four vertical gate electrodes VG are disposed opposite each other via a separation portion 54 and are in contact with the separation portion 54. The connection portion CN is in contact with the separation portion 54 and the four vertical gate electrodes VG disposed opposite each other. The light shielding portion 53 has an opening 53H at a portion in contact with the separation portion 54 and where the vertical gate electrode VG penetrates.

[0068] In this manner, in this modification, the transfer transistor TRG is provided with four vertical gate electrodes VG and a connection portion CN as a gate electrode. This allows the size of the transfer transistor TRG to be smaller than when the transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG passes can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0069] [Variation D] In the above embodiment and its modified examples, each sensor pixel 11 may have a transfer transistor TRG and a discharge transistor OFG, for example, as shown in FIG. 13 and FIG. 14. FIG. 13 shows a modified planar configuration of the logic circuit 20 side of the pixel array unit 10. FIG. 14 shows a modified planar configuration of the light receiving surface 31A side of the pixel array unit 10. In FIG. 13, the layout of various transistors (reset transistor RST, amplification transistor AMP, and selection transistor SEL) included in the readout circuit 12 is superimposed on the planar configuration of the logic circuit 20 side of the semiconductor substrate 31. In FIG. 14, the layout of the vertical gate electrode VG is superimposed on the planar configuration of the light receiving surface 31A side of the semiconductor substrate 31.

[0070] The discharge transistor OFG is, for example, an NMOS transistor. The discharge transistor OFG discharges electric charges from the photoelectric conversion unit in response to a control signal applied to the gate electrode. The discharge transistor OFG has a common configuration with the transfer transistor TRG, and has two vertical gate electrodes VG and a connection portion CN as gate electrodes. In the discharge transistor OFG, one vertical gate electrode VG is provided in one of two sensor pixels 11 adjacent to each other, and the other vertical gate electrode VG is provided in the other of the two sensor pixels 11 adjacent to each other. In the discharge transistor OFG, the connection portion CN is in contact with the two vertical gate electrodes VG. That is, in the two sensor pixels 11 adjacent to each other, the two vertical gate electrodes VG are electrically connected to each other via the connection portion CN, and the two sensor pixels 11 adjacent to each other share the connection portion CN (a part of the gate electrode). Here, "shared" refers to the discharge of electric charges in the two sensor pixels 11 adjacent to each other being controlled by a common connection portion CN.

[0071] In this modification, the transfer transistor TRG corresponds to a specific example of the "transfer transistor" of the present disclosure, and the emission transistor OFG corresponds to a specific example of the "emission transistor" of the present disclosure. Also, in this modification, the vertical gate electrode VG of the transfer transistor TRG corresponds to a specific example of the "first vertical gate electrode" of the present disclosure, and the vertical gate electrode VG of the emission transistor OFG corresponds to a specific example of the "second vertical gate electrode" of the present disclosure.

[0072] In this modification, in the transfer transistor TRG, the connection portion CN is in contact with two vertical gate electrodes VG. That is, in two adjacent sensor pixels 11, the two vertical gate electrodes VG included in the transfer transistor TRG are electrically connected to each other via the connection portion CN, and the two adjacent sensor pixels 11 share the above-mentioned connection portion CN (part of the gate electrode). In the two adjacent sensor pixels 11, the two vertical gate electrodes VG included in the transfer transistor TRG are arranged opposite each other via the separation portion 54 and are in contact with the separation portion 54. In the transfer transistor TRG, the above-mentioned connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite each other.

[0073] In this modification, furthermore, in the discharge transistor OFG, the connection portion CN is in contact with two vertical gate electrodes VG. That is, in two adjacent sensor pixels 11, the two vertical gate electrodes VG included in the discharge transistor OFG are electrically connected to each other via the connection portion CN, and the two adjacent sensor pixels 11 share the above-mentioned connection portion CN (part of the gate electrode). In the two adjacent sensor pixels 11, the two vertical gate electrodes VG included in the discharge transistor OFG are arranged opposite each other via the separation portion 54 and are in contact with the separation portion 54. In the discharge transistor OFG, the above-mentioned connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite each other.

[0074] In this modification, the light shielding portion 53 has an opening 53H at a portion where the light shielding portion 53 contacts the separating portion 54 and where the vertical gate electrode VG included in the transfer transistor TRG and the vertical gate electrode VG included in the discharge transistor OFG penetrate through the light shielding portion 53. The transfer transistor TRG and the discharge transistor OFG provided in each sensor pixel 11 are disposed adjacent to each other, and further, in each sensor pixel 11, a floating diffusion FD is disposed adjacent to the gap between the two vertical gate electrodes VG.

[0075] In this modification, a transfer transistor TRG and a discharge transistor OFG are provided in each sensor pixel 11. This improves charge transfer from the photodiode PD to the floating diffusion FD compared to the case where one transfer transistor TRG is provided in each sensor pixel 11.

[0076] In this modification, the transfer transistor TRG and the discharge transistor OFG provided in each sensor pixel 11 are disposed adjacent to each other, and further, the floating diffusion FD is disposed adjacent to the gap between the two vertical gate electrodes VG in each sensor pixel 11. This improves charge transfer from the photodiode PD to the floating diffusion FD compared to a case where the floating diffusion FD is disposed away from the gap between the two vertical gate electrodes VG.

[0077] In this modification, the transfer transistor TRG is provided with a connection part CN that contacts the two vertical gate electrodes VG and electrically connects the two vertical gate electrodes VG to each other. In this modification, the discharge transistor OFG is further provided with a connection part CN that contacts the two vertical gate electrodes VG and electrically connects the two vertical gate electrodes VG to each other. This allows the size of the transfer transistor TRG and the discharge transistor OFG to be reduced compared to the case where the transfer transistor TRG and the discharge transistor OFG are provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding part 53 through which the vertical gate electrode VG passes can be reduced. As a result, the increase in noise and pixel size can be suppressed. Therefore, the deterioration of charge transfer can be avoided while suppressing the increase in noise and pixel size.

[0078] In this modification, in the transfer transistor TRG, two vertical gate electrodes VG are arranged opposite to each other via a separation portion 54 and are in contact with the separation portion 54, and the connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite to each other. In this modification, further, in the discharge transistor OFG, two vertical gate electrodes VG are arranged opposite to each other via a separation portion 54 and are in contact with the separation portion 54, and the connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite to each other. This makes it possible to reduce the size of the transfer transistor TRG and the discharge transistor OFG compared to the case where the transfer transistor TRG and the discharge transistor OFG are provided separately for each sensor pixel 11, and accordingly, the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG penetrates can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0079] In this modification, an opening 53H is provided at a location that contacts the separation portion 54 and where two vertical gate electrodes VG penetrate. This allows the size of the transfer transistor TRG to be smaller than when a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG penetrates can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0080] [Variation E] In the above-described embodiments and their variations, each sensor pixel 11 may have, for example, a photodiode PD, a transfer transistor TRG, a transfer transistor TRM, a charge holding unit MEM, a transfer transistor TRX, a floating diffusion FD, a discharge transistor OFG, and a discharge floating diffusion OFD, as shown in Figures 15, 16, 17, and 18.

[0081] FIG. 15 shows an example of a circuit configuration of the pixel array section 10 according to this modification. FIG. 16 shows an example of a cross-sectional configuration of the pixel array section 10 according to this modification. FIG. 17 shows an example of a planar configuration of the logic circuit 20 side of the pixel array section 10 according to this modification. FIG. 18 shows an example of a planar configuration of the light receiving surface 31A side of the pixel array section 10 according to this modification. In FIG. 17, the layout of various transistors (reset transistor RST, amplification transistor AMP, and selection transistor SEL) included in the readout circuit 12 is superimposed on the planar configuration of the logic circuit 20 side of the semiconductor substrate 31. In FIG. 18, the layout of the vertical gate electrode VG is superimposed on the planar configuration of the light receiving surface 31A side of the semiconductor substrate 31.

[0082] The transfer transistors TRG, TRM, TRX, and OFG are, for example, NMOS transistors. Fig. 15 illustrates a case where a part of the gate of the transfer transistor TRG is shared by two adjacent sensor pixels 11. In this modification, a part of the gate of the transfer transistor TRG may be shared by four adjacent sensor pixels 11.

[0083] In this modification, the transfer transistor TRG is connected between the photodiode PD and the transfer transistor TRM, and transfers the charge stored in the photodiode PD to the transfer transistor TRM in response to a control signal applied to the gate. The transfer transistor TRG transfers the charge from the photodiode PD to the charge holding unit MEM. For example, when the discharge transistor OFG is turned off and the transfer transistor TRG is turned on, the charge held in the photodiode PD is transferred to the floating diffusion FD via the transfer transistor TRG. The drain of the transfer transistor TRG is electrically connected to the source of the transfer transistor TRM, and the gate of the transfer transistor TRG is connected to a pixel drive line.

[0084] The transfer transistor TRM is connected between the transfer transistor TRG and the transfer transistor TRX, and controls the potential of the charge holding unit MEM in response to a control signal applied to the gate. For example, when the transfer transistor TRM is turned on, the potential of the charge holding unit MEM becomes deeper, and when the transfer transistor TRM is turned off, the potential of the charge holding unit MEM becomes shallower. Then, for example, when the transfer transistor TRG and the transfer transistor TRM are turned on, the charge stored in the photodiode PD is transferred to the charge holding unit MEM via the transfer transistor TRG and the transfer transistor TRM. The drain of the transfer transistor TRM is electrically connected to the source of the transfer transistor TRX, and the gate of the transfer transistor TRM is connected to the pixel drive line.

[0085] The charge holding unit MEM is an area that temporarily holds the charge accumulated in the photodiode PD in order to realize a global shutter function. The charge holding unit MEM holds the charge transferred from the photodiode PD.

[0086] The transfer transistor TRX is connected between the transfer transistor TRM and the floating diffusion FD, and transfers the charge held in the charge holding unit MEM to the floating diffusion FD in response to a control signal applied to the gate. For example, when the transfer transistor TRM is turned off and the transfer transistor TRX is turned on, the charge held in the charge holding unit MEM is transferred to the floating diffusion FD via the transfer transistor TRM and the transfer transistor TRX. The drain of the transfer transistor TRX is electrically connected to the floating diffusion FD, and the gate of the transfer transistor TRX is connected to the pixel drive line.

[0087] The floating diffusion FD is a floating diffusion region that temporarily holds the charge output from the photodiode PD via the transfer transistor TRX. For example, a reset transistor RST is connected to the floating diffusion FD, and a vertical signal line VSL is connected to the floating diffusion FD via an amplification transistor AMP and a selection transistor SEL.

[0088] In the discharge transistor OFG, the drain is connected to a power supply line VDD, and the source is connected between the transfer transistor TRG and the transfer transistor TRM. The discharge transistor OFG initializes (resets) the photodiode PD in response to a control signal applied to the gate. For example, when the transfer transistor TRG and the discharge transistor OFG are turned on, the potential of the photodiode PD is reset to the potential level of the power supply line VDD. That is, the photodiode PD is initialized. In addition, the discharge transistor OFG forms an overflow path between the transfer transistor TRG and the power supply line VDD, for example, and discharges the charge overflowing from the photodiode PD to the power supply line VDD.

[0089] The transfer transistors TRG, TRM, TRX, the charge holding unit MEM, the floating diffusion FD, and the discharge transistor OFG are formed on the upper surface (formation surface 31B) of the semiconductor layer 33. In the insulating layer 32, the gate electrodes of the transfer transistors TRG, TRM, TRX, and the discharge transistor OFG, wiring connected to these gate electrodes, and the like are provided.

[0090] In this modification, as in the above embodiment and its modifications, a vertical gate electrode VG reaching the photodiode PD is provided. This makes it possible to avoid deterioration of charge transfer from the photodiode PD to the floating diffusion FD due to the provision of the light shielding portion 53. In this modification, furthermore, in a plurality of (for example, two or four) sensor pixels 11 adjacent to each other, a plurality of (for example, two or four) vertical gate electrodes VG are electrically connected to each other. This makes it possible to reduce the size of the transfer transistor TRG compared to the case where a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly makes it possible to reduce the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG passes. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0091] In this modification, each sensor pixel 11 may have a buffer region between the vertical gate electrode VG and the charge storage unit MEM. The buffer region is, for example, an N-type semiconductor region of the same conductivity type as the charge storage unit MEM. By providing the buffer region in this manner, when the photodiode PD is irradiated with a large amount of light and the accumulated charge overflows, the overflowed charge can be prevented from directly entering the charge storage unit MEM.

[0092] In this modification, the readout circuit 12 may be provided in the insulating layer 32, not on the formation surface 31B of the semiconductor substrate 31. In other words, the readout circuit 12 may be provided in a layer different from each transistor (e.g., the transfer transistors TRG, TRM, TRX and the discharge transistor OFG) included in the sensor pixel 11. In this case, it is possible to form the charge holding portion MEM large, and a larger number of saturated electrons can be secured.

[0093] [Variation F] In the above modification E, the discharge transistor OFG may have two vertical gate electrodes VG and a connection part CN as gate electrodes, for example, as shown in FIG. 19 and FIG. 20. In the discharge transistor OFG, one vertical gate electrode VG is provided in one of two sensor pixels 11 adjacent to each other, and the other vertical gate electrode VG is provided in the other of the two sensor pixels 11 adjacent to each other. In the discharge transistor OFG, the connection part CN is in contact with the two vertical gate electrodes VG. That is, in the two sensor pixels 11 adjacent to each other, the two vertical gate electrodes VG are electrically connected to each other via the connection part CN, and the two sensor pixels 11 adjacent to each other share the connection part CN (a part of the gate electrode). Here, "shared" means that the outputs of the two sensor pixels 11 adjacent to each other are controlled by a common connection part CN.

[0094] In this modification, the light shielding portion 53 has an opening 53H at a portion where the light shielding portion 53 contacts the separating portion 54 and where the vertical gate electrode VG included in the transfer transistor TRG and the vertical gate electrode VG included in the discharge transistor OFG penetrate through the light shielding portion 53. The transfer transistor TRG and the discharge transistor OFG provided in each sensor pixel 11 are disposed adjacent to each other, and further, in each sensor pixel 11, a floating diffusion FD is disposed adjacent to the gap between the two vertical gate electrodes VG.

[0095] In this modification, a transfer transistor TRG and a discharge transistor OFG are provided in each sensor pixel 11. This improves charge transfer from the photodiode PD to the floating diffusion FD compared to the case where one transfer transistor TRG is provided in each sensor pixel 11.

[0096] In this modification, the transfer transistor TRG and the discharge transistor OFG provided in each sensor pixel 11 are disposed adjacent to each other, and further, the floating diffusion FD is disposed adjacent to the gap between the two vertical gate electrodes VG in each sensor pixel 11. This improves charge transfer from the photodiode PD to the floating diffusion FD compared to a case where the floating diffusion FD is disposed away from the gap between the two vertical gate electrodes VG.

[0097] In this modification, the transfer transistor TRG is provided with a connection part CN that contacts the two vertical gate electrodes VG and electrically connects the two vertical gate electrodes VG to each other. In this modification, the discharge transistor OFG is further provided with a connection part CN that contacts the two vertical gate electrodes VG and electrically connects the two vertical gate electrodes VG to each other. This allows the size of the transfer transistor TRG and the discharge transistor OFG to be reduced compared to the case where the transfer transistor TRG and the discharge transistor OFG are provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding part 53 through which the vertical gate electrode VG passes can be reduced. As a result, the increase in noise and pixel size can be suppressed. Therefore, the deterioration of charge transfer can be avoided while suppressing the increase in noise and pixel size.

[0098] In this modification, in the transfer transistor TRG, two vertical gate electrodes VG are arranged opposite to each other via a separation portion 54 and are in contact with the separation portion 54, and the connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite to each other. In this modification, further, in the discharge transistor OFG, two vertical gate electrodes VG are arranged opposite to each other via a separation portion 54 and are in contact with the separation portion 54, and the connection portion CN is in contact with the separation portion 54 and the two vertical gate electrodes VG arranged opposite to each other. This makes it possible to reduce the size of the transfer transistor TRG and the discharge transistor OFG compared to the case where the transfer transistor TRG and the discharge transistor OFG are provided separately for each sensor pixel 11, and accordingly, the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG penetrates can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0099] In this modification, an opening 53H is provided at a location that contacts the separation portion 54 and where two vertical gate electrodes VG penetrate. This allows the size of the transfer transistor TRG to be smaller than when a transfer transistor TRG is provided separately for each sensor pixel 11, and accordingly the opening 53H of the light shielding portion 53 through which the vertical gate electrode VG penetrates can be made smaller. As a result, it is possible to suppress an increase in noise and pixel size. Therefore, it is possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0100] [Variation G] In the above modification E, the transfer transistor TRG may further include a vertical gate electrode VG that is not connected to the connection portion CN, for each sensor pixel 11, as shown in, for example, FIG. 21 and FIG. 22. FIG. 21 shows a modification of the planar configuration of the logic circuit 20 side of the pixel array unit 10. FIG. 22 shows a modification of the planar configuration of the light receiving surface 31A side of the pixel array unit 10. In FIG. 21, the layout of various transistors (reset transistor RST, amplification transistor AMP, and selection transistor SEL) included in the readout circuit 12 is superimposed on the planar configuration of the logic circuit 20 side of the semiconductor substrate 31. In FIG. 22, the layout of the vertical gate electrode VG is superimposed on the planar configuration of the light receiving surface 31A side of the semiconductor substrate 31.

[0101] In this modification, each sensor pixel 11 has a floating diffusion FD at a position adjacent to the gap between the vertical gate electrode VG connected to the connection part CN and the vertical gate electrode VG not connected to the connection part CN. This improves charge transfer from the photodiode PD to the floating diffusion FD compared to the case where the floating diffusion FD is disposed away from the gap between the two vertical gate electrodes VG.

[0102] [Variation H] In the above embodiment and its modified example, at least the portions of the isolation parts 51 and 54 adjacent to the vertical gate electrodes VG may be formed of an oxide film. For example, as shown in FIG. 23 and FIG. 24, the portions of the isolation parts 51 and 54 adjacent to the vertical gate electrodes VG may be formed of an oxide film 54A. Also, as shown in FIG. 25 and FIG. 26, the entire isolation part 54 may be formed of an oxide film 54A. Also, as shown in FIG. 27 and FIG. 28, an oxide film 54A extending from the light receiving surface 31A to the portions adjacent to the vertical gate electrodes VG may be formed in the isolation part 54.

[0103] The oxide film 54A is formed by, for example, CVD, filling a trench formed in the semiconductor substrate 31 with SiO2 (silicon oxide). In this case, when the gate of the transfer transistor TRG is turned on, the potential of the isolation parts 51 and 54 changes, and it is possible to prevent charge from leaking between two adjacent sensor pixels 11. As a result, it is possible to reduce noise caused by charge leakage.

[0104] [Variation I] In the above-described embodiment and its modified examples, the vertical gate electrode VG may be formed across two adjacent sensor pixels 11, as shown in Fig. 29. Even in this case, the same effects as those of the above-described embodiment and its modified examples can be obtained.

[0105] [Variation J] In the above modifications E, F, G, H, and I, the shape of the region of the semiconductor substrate 31 formed by the isolating portions 51 and 54 surrounding the photodiode PD in the stacking plane (hereinafter referred to as the "first shape") and the shape of the region of the semiconductor substrate 31 formed by the isolating portions 52 and 54 surrounding the floating diffusion FD or the charge holding portion MEM in the stacking plane (hereinafter referred to as the "second shape") may be different from each other. For example, the first shape may be rectangular, and the second shape may be closer to a square than the first shape.

[0106] [Variation K] In the above embodiment and its modified examples, the semiconductor substrate 31 may be, for example, a Si{111} substrate. The Si{111} substrate is a single crystal silicon substrate or single crystal silicon wafer having a crystal plane represented by {111} in Miller indices. The crystal plane represented by {111} (crystal plane represented by the plane index {111}) spreads along a plane (horizontal plane) perpendicular to the thickness direction in the single crystal silicon substrate or single crystal silicon wafer. In this modified example, the Si{111} substrate also includes a substrate or wafer whose crystal orientation is shifted by several degrees, for example, shifted by several degrees from the {111} plane toward the nearest

[0110] direction. In this modified example, the Si{111} substrate further includes a substrate or wafer in which a silicon single crystal is grown by epitaxial growth or the like on a part or the entire surface of the substrate or wafer.

[0107] In this modification, the {111} plane is a collective term for the (111) plane, (-111) plane, (1-11) plane, (11-1) plane, (-1-11) plane, (-11-1) plane, (1-1-1) plane, and (-1-1-1) plane, which are crystal planes equivalent to each other in terms of symmetry. Therefore, in this modification, the description of a Si{111} substrate may be read as, for example, a Si(1-11) substrate. Here, the bar symbol for expressing the negative index of the Miller indices is substituted with a minus symbol.

[0108] In addition, in this modified example, <110> The direction is a general term for the crystal plane directions, which are equivalent to each other in terms of symmetry, namely, the

[0110] direction, the

[0101] direction, the

[0011] direction, the [-110] direction, the [-101] direction, the [10-1] direction, the [0-11] direction, the [01-1] direction, the [-1-10] direction, the [-10-1] direction, and the [0-1-1] direction, and may be interpreted as any one of them. However, in this modification, etching is performed in a direction perpendicular to the element formation surface and in a direction further perpendicular to the direction perpendicular to the element formation surface (i.e., a direction parallel to the element formation surface).

[0109] Table 1 shows the {111} crystal plane of the Si{111} substrate in this modification. <110> Specific combinations of faces and orientations that allow etching in a direction are shown.

[0110] [Table 1]

[0111] As shown in Table 1, the {111} plane and <110> There are 96 (=8×12) combinations with the direction. However, in this modified example, <110> The etching direction is limited to a direction perpendicular to the {111} surface on which the elements are formed, and a direction parallel to the surface. That is, in this modification, the combination of the element formation surface on the Si{111} substrate and the etching direction for the Si{111} substrate is selected from any of the combinations indicated by ○ in Table 1.

[0112] In this modified example, a Si{111} substrate is used, and wet etching is performed so that etching proceeds easily in the left-right direction (X-axis direction) in Figures 3, 16, and 23 to 28, but is difficult to proceed in at least the Z-axis direction among the depth direction (Y-axis direction) and up-down direction (Z-axis direction) in Figures 3, 16, and 23 to 28, thereby making it possible to form cavity 58.

[0113] For example, the cavity 58 can be formed by wet etching the Si{111} substrate using a predetermined alkaline aqueous solution. As the alkaline aqueous solution, inorganic solutions such as KOH, NaOH, or CsOH can be used, and organic solutions such as EDP (ethylenediaminepyrocatechol aqueous solution), N2H4 (hydrazine), NH4OH (ammonium hydroxide), or TMAH (tetramethylammonium hydroxide) can be used. The cavity 58 can be formed by crystal anisotropic etching that utilizes the property that the etching rate varies depending on the surface orientation of Si{111}.

[0114] Specifically, in the case of a Si{111} substrate, <111> With respect to the etching rate in the direction, i.e., the direction with three Si back bonds <110> The etching rate in the direction having one or two Si back bonds is sufficiently high. <110> direction, i.e., the direction having one or two Si back bonds is the X-axis direction, <111> By setting the direction of the X-axis, i.e., the direction having three Si back bonds, as the Z-axis direction, etching proceeds in the X-axis direction, while etching hardly proceeds at least in the Z-axis direction among the Y-axis and Z-axis directions. As a result, a cavity 58 including a pair of first surfaces, a pair of second surfaces, and a third surface is formed inside the semiconductor substrate 31, which is a Si{111} substrate. Therefore, the light shielding portion 53 formed in the cavity 58 also includes a pair of first surfaces, a pair of second surfaces, and a third surface.

[0115] For example, in the schematic diagram of FIG. 30, the Si backbond means a bond extending in the negative direction on the opposite side to the normal line of the Si{111} plane when the Si dangling bond side is in the positive direction. In the example of FIG. 30, three backbonds are shown that form angles of -19.47° to +19.47° with respect to the {111} plane. Specifically, when the photodiode PD, the cavity 58, the light shielding portion 53, and the charge storage portion MEM are provided on a Si{111} substrate, the cavity 58 and the light shielding portion 53 include a first surface that is perpendicular to the first direction and aligned with the first crystal plane of the Si{111} substrate, which is expressed by the plane index {111}, and a second surface that is inclined with respect to the first direction and aligned with the second crystal plane of the Si{111} substrate, which is expressed by the plane index {111}.

[0116] The pair of first surfaces are surfaces along the first crystal plane of the semiconductor substrate 31, and face each other in the Z-axis direction. The first crystal plane of the semiconductor substrate 31 is expressed by a plane index {111}. The pair of second surfaces are surfaces along the second crystal plane of the semiconductor substrate 31, and face each other in the Y-axis direction. The second crystal plane of the semiconductor substrate 31 is expressed by a plane index {111}, and is inclined at about 19.5° with respect to the Z-axis direction. That is, the inclination angle of the second crystal plane with respect to the horizontal plane (XY plane) is about 70.5°. The second crystal plane is inclined with respect to the X-axis and Y-axis in the horizontal plane (XY plane), and forms an angle of about 30° with respect to the Y-axis, for example. The third surface is a surface along the third crystal plane of the semiconductor substrate 31. The third crystal plane of the semiconductor substrate 31 is inclined at about 19.5° with respect to the Z-axis direction, similar to the second crystal plane. That is, the inclination angle of the third crystal plane with respect to the horizontal plane (XY plane) is about 70.5°.

[0117] In addition, the Si{111} substrate has a substrate surface as shown in FIG. <112> This also includes substrates that have been processed to have an off angle relative to the direction. When the off angle is 19.47° or less, even in the case of a substrate with an off angle, <111> For the etching rate in the direction, i.e., the direction with three Si back bonds, <110> The relationship that the etching rate in the direction, i.e., the direction having one Si back bond, is sufficiently high is maintained. As the off angle becomes larger, the number of steps increases and the density of microscopic steps increases, so it is preferable that the off angle is 5° or less. In the example of Figure 31, the substrate surface is <112> We have mentioned cases where the direction is off-axis. <110> It does not matter if there is an off angle in the direction, and the direction of the off angle does not matter. The Si plane orientation can be analyzed using X-ray diffraction, electron diffraction, electron backscatter diffraction, etc. The number of Si backbonds is determined by the crystal structure of Si, so the number of backbonds can also be analyzed by analyzing the Si plane orientation.

[0118] In this modification, the cavity 58 and the light-shielding portion 53 are provided inside the semiconductor substrate 31, which is a Si{111} substrate. The cavity 58 and the light-shielding portion 53 include a first surface along the first crystal plane and a second surface along a second crystal plane inclined with respect to the first surface. Here, both the first crystal plane and the second crystal plane are expressed by the plane index {111}. Therefore, the cavity 58 can be easily formed by crystal anisotropic etching using an etching solution such as an alkaline aqueous solution, and has high dimensional accuracy.

[0119] <3. Application Examples> 32 shows an example of a schematic configuration of an imaging system 2 including a solid-state imaging device 1 according to the above embodiment and its modified example. The imaging system 2 corresponds to a specific example of an "electronic device" in the present disclosure. The imaging system 2 includes, for example, an optical system 210, the solid-state imaging device 1, a signal processing circuit 220, and a display unit 230.

[0120] The optical system 210 forms an image of image light (incident light) from a subject on the imaging surface of the solid-state imaging device 1. The solid-state imaging device 1 receives the image light (incident light) incident from the solid-state imaging device 1, and outputs a pixel signal corresponding to the received image light (incident light) to the signal processing circuit 220. The signal processing circuit 220 processes the image signal input from the solid-state imaging device 1 to generate video data. The signal processing circuit 220 further generates a video signal corresponding to the generated video data, and outputs it to the display unit 230. The display unit 230 displays an image based on the video signal input from the signal processing circuit 220.

[0121] In this application example, the solid-state imaging device 1 according to the above-described embodiment and its modified example is applied to an imaging system 2. This makes it possible to provide an imaging system 2 with low noise and high image quality.

[0122] <4. Application examples for mobile objects> The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility device, an airplane, a drone, a ship, a robot, etc.

[0123] FIG. 33 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a moving object control system to which the technology according to the present disclosure can be applied.

[0124] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 33, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also, as functional configurations of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (interface) 12053 are illustrated.

[0125] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.

[0126] The body system control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 12020. The body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0127] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle and receives the captured image. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for a person, a car, an obstacle, a sign, or characters on a road surface, based on the received image.

[0128] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of light received. The imaging unit 12031 can output the electrical signal as an image, or as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0129] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing.

[0130] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, the steering mechanism, or the braking device based on the information inside and outside the vehicle acquired by the outside-of-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output a control command to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc.

[0131] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on the driver's operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle acquired by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0132] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the outside-vehicle information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detection unit 12030, and perform cooperative control for the purpose of preventing glare, such as switching from high beams to low beams.

[0133] The audio / video output unit 12052 transmits at least one output signal of audio and video to an output device capable of visually or audibly notifying information to passengers in the vehicle or the outside of the vehicle. In the example of Fig. 33, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are exemplified as the output device. The display unit 12062 may include at least one of an on-board display and a head-up display, for example.

[0134] FIG. 34 is a diagram showing an example of the installation position of the imaging unit 12031.

[0135] In FIG. 34, a vehicle 12100 has imaging units 12101, 12102, 12103, 12104, and 12105 as an imaging unit 12031.

[0136] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield inside the vehicle cabin of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the upper part of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The images of the front acquired by the imaging units 12101 and 12105 are mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0137] 34 shows an example of the imaging ranges of the imaging units 12101 to 12104. An imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and an imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, an overhead image of the vehicle 12100 viewed from above is obtained by superimposing the image data captured by the imaging units 12101 to 12104.

[0138] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of a plurality of imaging elements, or may be an imaging element having pixels for detecting a phase difference.

[0139] For example, the microcomputer 12051 can extract, as a preceding vehicle, a three-dimensional object that is the closest three-dimensional object on the travel path of the vehicle 12100 and travels at a predetermined speed (for example, 0 km / h or more) in approximately the same direction as the vehicle 12100, by calculating the distance to each three-dimensional object in the imaging ranges 12111 to 12114 and the change over time of this distance (relative speed with respect to the vehicle 12100) based on the distance information obtained from the imaging units 12101 to 12104. Furthermore, the microcomputer 12051 can set a vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including follow-up stop control) and automatic acceleration control (including follow-up start control). In this way, cooperative control can be performed for the purpose of automatic driving that travels autonomously without relying on the driver's operation.

[0140] For example, the microcomputer 12051 classifies and extracts three-dimensional object data on three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drive system control unit 12010.

[0141] At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the captured images of the imaging units 12101 to 12104. The recognition of such a pedestrian is performed, for example, by a procedure of extracting feature points in the captured images of the imaging units 12101 to 12104 as infrared cameras, and a procedure of performing pattern matching processing on a series of feature points that indicate the contour of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the captured images of the imaging units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular contour line for emphasis on the recognized pedestrian. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating a pedestrian at a desired position.

[0142] An example of a mobile object control system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to the imaging unit 12031 among the configurations described above. Specifically, the solid-state imaging device 1 according to the above embodiment and its modified example can be applied to the imaging unit 12031. By applying the technology according to the present disclosure to the imaging unit 12031, a captured image with low noise and high quality can be obtained, and therefore, high-precision control using the captured image can be performed in the mobile object control system.

[0143] The present disclosure has been described above by giving embodiments and their modified examples, application examples, and application examples, but the present disclosure is not limited to the above-mentioned embodiments, etc., and various modifications are possible. Note that the effects described in this specification are merely examples. The effects of the present disclosure are not limited to the effects described in this specification. The present disclosure may have effects other than those described in this specification.

[0144] According to a first solid-state imaging device and a first electronic device relating to an embodiment of the present disclosure, a vertical gate electrode is provided that reaches an electric conversion unit, and in a plurality of first pixels that are adjacent to each other among a plurality of pixels, the multiple vertical gate electrodes are electrically connected to each other, thereby making it possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0145] According to a second solid-state imaging device and a second electronic device relating to an embodiment of the present disclosure, first and second vertical gate electrodes are provided reaching a photoelectric conversion section, and in a plurality of first pixels among a plurality of pixels that are adjacent to each other, the plurality of first vertical gate electrodes are electrically connected to each other and the plurality of second vertical gate electrodes are electrically connected to each other, thereby making it possible to avoid deterioration of charge transfer while suppressing an increase in noise and pixel size.

[0146] The present disclosure can also be configured as follows. (1) A light receiving surface; A plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface; a separator that electrically and optically separates each of the photoelectric conversion units; Equipped with Each of the pixels is a charge holding unit that holds the charges transferred from the photoelectric conversion unit; a transfer transistor having a vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit; a light shielding portion disposed in a layer between the photoelectric conversion portion and the charge retention portion; having Among the plurality of pixels, in a plurality of first pixels adjacent to each other, a plurality of the vertical gate electrodes are electrically connected to each other. Solid-state imaging device. (2) Each of the first pixels is in contact with a plurality of the vertical gate electrodes and shares a connection portion that electrically connects the plurality of the vertical gate electrodes to each other. A solid-state imaging device according to (1). (3) In the first pixels, the vertical gate electrodes are arranged to face each other via the isolation portion and are in contact with the isolation portion, The connection portion is in contact with the isolation portion and with the vertical gate electrodes arranged opposite to each other. A solid-state imaging device according to (2). (4) The light shielding portion has an opening at a portion where the light shielding portion is in contact with the isolation portion and where the vertical gate electrode penetrates. A solid-state imaging device according to (3). (5) The light-shielding portion further includes a semiconductor substrate having the light-shielding portion provided therein, the semiconductor substrate is a Si{111} substrate having a first crystal plane expressed by plane index {111} extending along a plane perpendicular to a thickness direction; The light blocking portion is a first face aligned along the first crystal plane; a second surface inclined with respect to the thickness direction and aligned along a second crystal plane of the Si{111} substrate; Includes A solid-state imaging device according to any one of (1) to (4). (6) A light receiving surface; A plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface; a separator that electrically and optically separates each of the photoelectric conversion units; Equipped with Each of the pixels is a charge holding unit that holds the charges transferred from the photoelectric conversion unit; a transfer transistor having a first vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit; a discharge transistor having a second vertical gate electrode reaching the photoelectric conversion unit, being disposed adjacent to the transfer transistor, and discharging charges from the photoelectric conversion unit; a light shielding portion disposed in a layer between the light receiving surface and the charge storage portion; having Among the plurality of pixels, in a plurality of first pixels adjacent to each other, the plurality of first vertical gate electrodes are electrically connected to each other, and the plurality of second vertical gate electrodes are electrically connected to each other. Solid-state imaging device. (7) In the plurality of first pixels, The first vertical gate electrodes are arranged to face each other via the isolation portion and are in contact with the isolation portion, The second vertical gate electrodes are arranged to face each other via the isolation portion and are in contact with the isolation portion, Each of the first pixels is a first connection portion that contacts the plurality of first vertical gate electrodes and electrically connects the plurality of first vertical gate electrodes to each other; a second connection portion that contacts the second vertical gate electrodes and electrically connects the first vertical gate electrodes to each other; Share A solid-state imaging device according to (6). (8) In the first pixels, the first vertical gate electrodes are arranged opposite to each other via the isolation portion and are in contact with the isolation portion; the first connection portion is in contact with the isolation portion and with the first vertical gate electrodes arranged opposite to each other; In the first pixels, the second vertical gate electrodes are arranged opposite to each other via the isolation portion and are in contact with the isolation portion; The second connection portion is in contact with the isolation portion and with the second vertical gate electrodes arranged opposite to each other. A solid-state imaging device according to (7). (9) The light shielding portion has an opening at a portion in contact with the isolation portion and at a portion through which the first vertical gate electrode and the second vertical gate electrode penetrate. A solid-state imaging device according to (8). (10) The charge retention portion is disposed adjacent to a gap between the first vertical gate electrode and the second vertical gate electrode. A solid-state imaging device according to any one of (6) to (9). (11) The light-shielding portion further includes a semiconductor substrate having the light-shielding portion provided therein, the semiconductor substrate is a Si{111} substrate having a first crystal plane expressed by plane index {111} extending along a plane perpendicular to a thickness direction; The light blocking portion is a first face aligned along the first crystal plane; a second surface inclined with respect to the thickness direction and aligned along a second crystal plane of the Si{111} substrate; Includes A solid-state imaging device according to any one of (6) to (10). (12) a solid-state imaging device that outputs pixel signals in response to incident light; a signal processing circuit for processing the pixel signal; Equipped with The solid-state imaging device includes: A light receiving surface; A plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface; a separator that electrically and optically separates each of the photoelectric conversion units; having Each of the pixels is a charge holding unit that holds the charges transferred from the photoelectric conversion unit; a transfer transistor having a vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit; a light shielding portion disposed in a layer between the photoelectric conversion portion and the charge retention portion; having Among the plurality of pixels, in a plurality of first pixels adjacent to each other, a plurality of the vertical gate electrodes are electrically connected to each other. electronic equipment. (13) a solid-state imaging device that outputs pixel signals in response to incident light; a signal processing circuit for processing the pixel signal; Equipped with The solid-state imaging device includes: A light receiving surface; A plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface; a separator that electrically and optically separates each of the photoelectric conversion units; having Each of the pixels is a charge holding unit that holds the charges transferred from the photoelectric conversion unit; a transfer transistor having a first vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit; a discharge transistor having a second vertical gate electrode reaching the photoelectric conversion unit, being disposed adjacent to the transfer transistor, and discharging charges from the photoelectric conversion unit; a light shielding portion disposed in a layer between the light receiving surface and the charge storage portion; having Among the plurality of pixels, in a plurality of first pixels adjacent to each other, a plurality of the vertical gate electrodes are electrically connected to each other. electronic equipment.

[0147] This application claims priority based on Japanese Patent Application No. 2019-207923, filed on November 18, 2019 in the Japan Patent Office, the entire contents of which are incorporated herein by reference.

[0148] Those skilled in the art will recognize that various modifications, combinations, subcombinations, and variations may occur to those skilled in the art depending on design requirements and other factors, and that such modifications are within the scope of the appended claims and their equivalents.

Claims

1. A light receiving surface; A plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface; a separator that electrically and optically separates each of the photoelectric conversion units; A solid-state imaging device comprising: Each of the pixels is a charge holding unit that holds the charges transferred from the photoelectric conversion unit; a transfer transistor having a vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit; a light shielding portion disposed in a layer between the photoelectric conversion portion and the charge retention portion; having Among the plurality of pixels, in a plurality of first pixels adjacent to each other, a plurality of the vertical gate electrodes are electrically connected to each other, The solid-state imaging device further includes a semiconductor substrate having the light-shielding portion provided therein, the semiconductor substrate is a Si{111} substrate having a first crystal plane expressed by plane index {111} extending along a plane perpendicular to a thickness direction; The light blocking portion is a first surface aligned along the first crystal plane; a second surface inclined with respect to the thickness direction and aligned along a second crystal plane of the Si{111} substrate; Includes Solid-state imaging device.

2. Each of the first pixels is in contact with a plurality of the vertical gate electrodes and shares a connection portion that electrically connects the plurality of the vertical gate electrodes to each other. The solid-state imaging device according to claim 1 .

3. In the first pixels, the vertical gate electrodes are arranged to face each other via the isolation portion and are in contact with the isolation portion, The connection portion is in contact with the isolation portion and with the vertical gate electrodes arranged opposite to each other. The solid-state imaging device according to claim 2 .

4. The light shielding portion has an opening at a portion where the light shielding portion is in contact with the isolation portion and where the vertical gate electrode penetrates. The solid-state imaging device according to claim 3 .

5. A light receiving surface; A plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface; a separator that electrically and optically separates each of the photoelectric conversion units; A solid-state imaging device comprising: Each of the pixels is a charge holding unit that holds the charges transferred from the photoelectric conversion unit; a transfer transistor having a first vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit; a discharge transistor having a second vertical gate electrode reaching the photoelectric conversion unit, the discharge transistor being disposed adjacent to the transfer transistor and discharging charges from the photoelectric conversion unit; a light shielding portion disposed in a layer between the light receiving surface and the charge storage portion; having Among the plurality of pixels, in a plurality of first pixels adjacent to each other, a plurality of the first vertical gate electrodes are electrically connected to each other, and a plurality of the second vertical gate electrodes are electrically connected to each other; The solid-state imaging device further includes a semiconductor substrate having the light-shielding portion provided therein, the semiconductor substrate is a Si{111} substrate having a first crystal plane expressed by plane index {111} extending along a plane perpendicular to a thickness direction; The light blocking portion is a first surface aligned along the first crystal plane; a second surface inclined with respect to the thickness direction and aligned along a second crystal plane of the Si{111} substrate; Includes Solid-state imaging device.

6. In the plurality of first pixels, a plurality of the first vertical gate electrodes are disposed opposite to each other via the isolation portion and are in contact with the isolation portion; The second vertical gate electrodes are arranged to face each other via the isolation portion and are in contact with the isolation portion, Each of the first pixels comprises: a first connection portion contacting the plurality of first vertical gate electrodes and electrically connecting the plurality of first vertical gate electrodes to each other; a second connection portion contacting the second vertical gate electrodes and electrically connecting the first vertical gate electrodes to each other; Share The solid-state imaging device according to claim 5 .

7. In the first pixels, the first vertical gate electrodes are arranged opposite to each other via the isolation portion and are in contact with the isolation portion, the first connection portion is in contact with the isolation portion and with the first vertical gate electrodes arranged opposite to each other; In the first pixels, the second vertical gate electrodes are arranged opposite to each other via the isolation portion and are in contact with the isolation portion; The second connection portion is in contact with the isolation portion and with the second vertical gate electrodes arranged opposite to each other.

7. The solid-state imaging device according to claim 6.

8. The light shielding portion has an opening at a portion in contact with the isolation portion and at a portion through which the first vertical gate electrode and the second vertical gate electrode penetrate. The solid-state imaging device according to claim 7 .

9. The charge retaining portion is disposed adjacent to a gap between the first vertical gate electrode and the second vertical gate electrode. The solid-state imaging device according to claim 5 .

10. a solid-state imaging device that outputs pixel signals in response to incident light; a signal processing circuit for processing the pixel signal; Equipped with The solid-state imaging device includes: A light receiving surface; A plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface; a separator that electrically and optically separates each of the photoelectric conversion units; having Each of the pixels is a charge holding unit that holds the charges transferred from the photoelectric conversion unit; a transfer transistor having a vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit; a light shielding portion disposed in a layer between the photoelectric conversion portion and the charge retention portion; having Among the plurality of pixels, in a plurality of first pixels adjacent to each other, a plurality of the vertical gate electrodes are electrically connected to each other, the solid-state imaging device further includes a semiconductor substrate having the light-shielding portion provided therein; the semiconductor substrate is a Si{111} substrate having a first crystal plane expressed by plane index {111} extending along a plane perpendicular to a thickness direction; The light blocking portion is a first surface aligned along the first crystal plane; a second surface inclined with respect to the thickness direction and aligned along a second crystal plane of the Si{111} substrate; Includes electronic equipment.

11. a solid-state imaging device that outputs pixel signals in response to incident light; a signal processing circuit for processing the pixel signal; Equipped with The solid-state imaging device includes: A light receiving surface; A plurality of pixels including a photoelectric conversion unit that photoelectrically converts light incident through the light receiving surface; a separator that electrically and optically separates each of the photoelectric conversion units; having Each of the pixels is a charge holding unit that holds the charges transferred from the photoelectric conversion unit; a transfer transistor having a first vertical gate electrode reaching the photoelectric conversion unit and transferring charges from the photoelectric conversion unit to the charge storage unit; a discharge transistor having a second vertical gate electrode reaching the photoelectric conversion unit, the discharge transistor being disposed adjacent to the transfer transistor and discharging charges from the photoelectric conversion unit; a light shielding portion disposed in a layer between the light receiving surface and the charge storage portion; having Among the plurality of pixels, in a plurality of first pixels adjacent to each other, a plurality of the vertical gate electrodes are electrically connected to each other, The solid-state imaging device further includes a semiconductor substrate having the light-shielding portion provided therein, the semiconductor substrate is a Si{111} substrate having a first crystal plane expressed by plane index {111} extending along a plane perpendicular to a thickness direction; The light blocking portion is a first surface aligned along the first crystal plane; a second surface inclined with respect to the thickness direction and aligned along a second crystal plane of the Si{111} substrate; Includes electronic equipment.

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