Probe insertion method and probe

Abstract

[Problem] To facilitate passing of a probe through two or more guide plates. [Solution] Provided is a probe passing method for a probe card 1 in which two guide plates 301, 302 are spaced apart from each other, and a probe 50 is passed through two guide holes 311, 312 respectively formed in the two guide plates 301, 302, the method comprising: a step for passing a towing rod 60 through the two guide holes 311, 312; a step for separably linking the tip-end of the towing rod 60, having passed through the two guide holes 311, 312, to a linking portion 510 provided at the tip-end of the probe 50; a step for pulling the towing rod 60 out of the receiving two guide holes 311, 312, and passing the probe 50 through the two guide holes 311, 312; and a step for separating the towing rod 60, having been pulled out of the two guide holes 311, 312, from the probe 50.

Description

[Technical field]

[0001] The present invention relates to a probe insertion method and a probe, and more particularly to an improvement in a method for inserting a probe into two or more guide plates that constitute a probe card and a probe used in said method. [Background technology]

[0002] A probe card is an inspection device used to inspect the electrical characteristics of semiconductor devices formed on a semiconductor wafer, and has a large number of probes provided on a wiring board, each of which is brought into contact with an electrode terminal on the semiconductor wafer.

[0003] A probe card is composed of a guide unit that supports the probes and a wiring board to which the guide unit is attached. The guide unit is composed of two or more guide plates arranged in parallel at a specified distance apart, and the probes are inserted sequentially into the guide holes of these guide plates and supported so as to be movable up and down. The probe card is manufactured by attaching the guide unit that houses the probes to the wiring board.

[0004] When a probe is inserted sequentially through the guide holes of two or more guide plates, it is relatively easy to insert the probe through the guide hole of the first guide plate, but it is not easy to insert the probe through the guide holes of the second and subsequent guide plates. In particular, when the probe has a curved portion, it is not easy to insert the probe through two or more guide plates.

[0005] 16 is a diagram showing how probe 55 is attached to guide unit 30. Guide unit 30 includes upper guide plate 301 and lower guide plate 302 spaced apart from each other, with upper guide plate 301 having upper guide hole 311 and lower guide plate 302 having lower guide hole 312.

[0006] When the probe 55, which is inserted successively into the upper guide hole 311 and the lower guide hole 312, has a curved portion 503, the attitude of the probe 55 changes when the curved portion 503 passes through the upper guide hole 311, causing the positional deviation of the tip of the probe 55. For this reason, it is not easy to insert the tip of the probe 55 into the lower guide hole 312, and if an attempt is made to forcibly insert the tip, there is a risk that the probe will be damaged or deformed. The same problem occurs not only when the probe 55 has the curved portion 503, but also when the probe 55 is warped during the manufacturing process.

[0007] A method has been proposed in the prior art in which a removable tab is connected to a probe and the tab is grasped with a grasping tool (for example, Patent Document 1), but this does not solve the problems that arise when the posture of the probe changes when the probe is inserted through two or more guide plates. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] JP 2014-16205 A Summary of the Invention [Problem to be solved by the invention]

[0009] The present invention has been made in view of the above circumstances, and has an object to facilitate insertion of a probe into two or more guide plates. In particular, it has an object to provide a probe insertion method that can easily insert a probe into two or more guide plates. It also has an object to provide a probe that can easily insert a probe into two or more guide plates. [Means for solving the problem]

[0010] A probe insertion method according to a first embodiment of the present invention is a probe insertion method for a probe card in which two guide plates are arranged spaced apart from each other and probes are inserted into two guide holes formed in each of the two guide plates, the method comprising the steps of inserting a traction rod into the two guide holes, detachably connecting a tip of the traction rod inserted into the two guide holes to a connecting portion provided at the tip of the probe, pulling the traction rod out of the two guide holes and inserting the probe into the two guide holes, and separating the traction rod pulled out of the two guide holes from the probe.

[0011] By adopting such a configuration, the probe is pulled by the traction rod, moves, and is inserted into the two guide holes by pulling the traction rod out of the two guide holes. Therefore, by using the traction rod, which is easier to insert into the guide holes than the probe, it is possible to facilitate the insertion of the probe into the guide holes.

[0012] In addition to the above configuration, the probe insertion method according to the second embodiment of the present invention further comprises connecting the traction rod to a connecting surface parallel to the axial direction of the connecting part. By adopting such a configuration, the probe and the traction rod can be connected so as not to easily come off during traction.

[0013] In addition to the above configuration, the probe insertion method according to the third embodiment of the present invention includes a step of removing the coupling part from the probe after the pulling rod is separated. With this configuration, it is possible to prevent the shape of the coupling part from affecting the inspection.

[0014] A probe according to a fourth embodiment of the present invention comprises an elastically deformable probe body inserted into two guide holes formed in two guide plates arranged at a distance from each other, and a connecting portion protruding in the axial direction from one end of the probe body, and is configured so that a traction rod for inserting the guide plates is attachable and detachable to a first connecting surface of the connecting portion parallel to the axial direction.

[0015] By adopting such a configuration, the probe is connected to the traction rod inserted into the two guide holes, and by pulling the traction rod out of the two guide holes, the probe is pulled by the traction rod, moves, and is inserted into the two guide holes. Therefore, by using the traction rod, which is easier to insert into the guide holes than the probe, it is possible to facilitate the insertion of the probe into the guide holes.

[0016] In addition to the above configuration, a probe according to a fifth embodiment of the present invention is configured such that the first connecting surface is provided at a position set back from a side surface of the probe body, and a second connecting surface of the traction rod connected to the first connecting surface can be positioned closer to the first connecting surface than the side surface of the probe body.

[0017] By adopting such a configuration, the total thickness of the probe and the traction rod connected by opposing the first connecting surface and the second connecting surface can be reduced, making it easier to insert the probe into the two guide holes.

[0018] In addition to the above configuration, the probe according to the sixth embodiment of the present invention has a solder or a thermoplastic adhesive formed on the first connecting surface or the second connecting surface. By adopting such a configuration, the probe and the traction rod can be connected or separated by heating the probe or the traction rod.

[0019] In addition to the above configuration, the probe according to a seventh embodiment of the present invention has an engagement portion on the first connecting surface for engaging with the traction rod. By employing such a configuration, the first connecting surface and the second connecting surface can be connected to each other.

[0020] In addition to the above configuration, the probe according to an eighth embodiment of the present invention has a hook shape in which the engaging portion is formed to protrude from the first connecting surface and the tip is shaped to face the probe body. By adopting this configuration, the probe can be connected so as not to come off easily when pulled.

[0021] In addition to the above configuration, the probe according to a ninth aspect of the present invention has an engagement hole formed in the first coupling surface, and this configuration allows coupling that does not easily come off when towing.

[0022] In addition to the above configuration, a probe according to a tenth embodiment of the present invention has a tapered shape in which the connecting portion has a cross-sectional area that decreases toward the tip on the opposite side to the probe body. By adopting such a configuration, the probe can be easily inserted into the guide hole. Furthermore, the sharpened tip can be used when the probe is used for an inspection without removing the connecting portion. Effect of the Invention

[0023] According to the present invention, it is possible to facilitate insertion of a probe into two or more guide plates. In particular, it is possible to provide a probe insertion method that allows a probe to be easily inserted into two or more guide plates. It is also possible to provide a probe that allows a probe to be easily inserted into two or more guide plates. [Brief description of the drawings]

[0024] [Figure 1] FIG. 1 is a diagram showing an overview of a probe insertion method according to a first embodiment of the present invention. [Diagram 2] 11 is a diagram showing an example of a detailed procedure of a method for inserting a probe 50. FIG. [Diagram 3] 11 is a diagram showing an example of a detailed procedure of a method for inserting a probe 50. FIG. [Figure 4] FIG. 2 is a diagram showing a guide unit 30 to which a probe 50 is attached. [Diagram 5] 5 is a diagram showing a probe card 1 to which the guide unit 30 of FIG. 4 is attached. [Figure 6] 2 is a diagram showing an example of a detailed configuration of coupling portions 510 and 610 in FIG. 1. FIG. [Figure 7] FIG. 13 is a detailed view showing the probe 50 and the traction rod 60 after they are connected. [Figure 8] 3A to 3C are diagrams illustrating an example of a method for manufacturing the probe 50. [Figure 9] 13 is a diagram showing another configuration example of the probe 50. FIG. [Figure 10] 10 is a diagram showing a state during inspection using the probe 50 in FIG. 9. FIG. [Figure 11] 10A to 10C are diagrams illustrating an example of a probe insertion method according to the second embodiment of the present invention. [Figure 12] FIG. 11 is a diagram showing another configuration example of the probe 51 according to the second embodiment of the present invention. [Figure 13] FIG. 11 is a diagram showing still another configuration example of the probe 51 according to the second embodiment of the present invention. [Figure 14] 13A to 13C are diagrams illustrating an example of a probe insertion method according to the third embodiment of the present invention. [Figure 15] 13 is a diagram showing an example of a method for inserting a probe 53 according to the fourth embodiment of the present invention. FIG. [Figure 16] 13 is a diagram showing a state in which a conventional probe 55 is attached to a guide unit 30. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] In this specification, the axial direction of the probe means the longitudinal direction of the probe, the width direction of the probe means any direction perpendicular to the axial direction, and the thickness direction of the probe means a direction perpendicular to the axial and width directions.

[0026] Embodiment 1 FIG. 1 is a diagram showing an outline of a probe insertion method according to a first embodiment of the present invention, and shows an example of how a probe 50 is attached to a guide unit 30 using a traction rod 60. As shown in FIG.

[0027] The traction rod 60 is a jig for inserting the probe 50 into the guide holes 311, 312 of the guide unit 30. The traction rod 60 is inserted into the guide holes 311, 312 prior to the probe 50. Thereafter, when the traction rod 60 to which the probe 50 is connected is pulled out from the guide holes 311, 312, the probe 50 is pulled by the traction rod 60 and inserted into the guide holes 311, 312. Thereafter, when the traction rod 60 is separated from the probe 50, the probe 50 attached to the guide unit 30 is obtained.

[0028] (1) Guide unit 30 The guide unit 30 includes two guide plates 301, 302 that support the probe 50, and a connecting spacer 303 that connects these guide plates 301, 302 to each other.

[0029] The upper guide plate 301 is a plate-like member, such as a ceramic plate, in which two or more upper guide holes 311 are formed. The upper guide hole 311 is a hole that penetrates the upper guide plate 301 in the plate thickness direction, through which the probe 50 is inserted and which supports the vicinity of the upper end of the probe 50.

[0030] The lower guide plate 302 is a plate-like member, such as a ceramic plate, in which two or more lower guide holes 312 are formed, and is disposed so as to face the lower surface of the upper guide plate 301 via a connecting spacer 303. The lower guide plate 302 is disposed below the upper guide plate 301 so as to be parallel to the upper guide plate 301 at a predetermined distance. The lower guide hole 312 is a hole that penetrates the lower guide plate 302 in the plate thickness direction, through which the probe 50 is inserted, and supports the vicinity of the lower end of the probe 50 so as to be vertically movable.

[0031] It is desirable that the upper guide hole 311 and the lower guide hole 312, through which the same probe 50 is inserted, are arranged opposite each other in a direction perpendicular to the guide plates 301, 302 so that the traction rod 60 can be easily inserted, but the present invention is not limited to such a configuration.

[0032] (2) Probe 50 The probe 50 is a vertical probe extending in a direction substantially perpendicular to the guide plates 301, 302. The probe 50 is made of a conductive material having an elongated shape, and is formed, for example, by a plating method. The material of the probe 50 is a metal material having both good elasticity and conductive properties, such as a nickel (Ni) alloy or a palladium (Pd) alloy. The probe 50 may be made of only a single conductive material, but may also be made of two or more conductive materials. For example, gold (Au), copper (Cu), or the like, which has particularly high conductive properties, may be used in part.

[0033] The probe 50 includes a probe body 500, a first connecting portion 510, and a stopper 520. The probe body 500 is composed of an upper rod 501, a lower rod 502, and a curved portion 503. The upper rod 501 and the lower rod 502 are connected via the curved portion 503. The first connecting portion 510 is provided on the lower rod 502, and the stopper 520 is provided on the upper rod 501.

[0034] Upper rod 501 has a substantially linear shape, is inserted into upper guide hole 311, and is supported by upper guide plate 301. An upper end of upper rod 501 protrudes upward from guide unit 30, while a lower end of upper rod 501 is connected to curved portion 503 within guide unit 30.

[0035] Lower rod 502 has a substantially linear shape, is inserted into lower guide hole 312, and is supported by lower guide plate 302. The lower end of lower rod 502 protrudes downward from guide unit 30, while the upper end of lower rod 502 is connected to curved portion 503 within guide unit 30. Note that, although the figure shows a case in which lower rod 502 is coaxial with upper rod 501, the present invention is not limited to only this configuration.

[0036] The curved portion 503 has a curved shape and is elastically deformed by pressure received from the test object during testing. The curved portion 503 is buckled and deformed by external force received from the test object, thereby allowing the probe 50 to elastically contact the test object. Furthermore, by providing the curved portion 503, the portion and direction of deformation of the probe 50 can be predefined, and contact between adjacently arranged probes 50 can be suppressed.

[0037] The first connecting part 510 is a connecting means for detachably connecting the traction rod 60. The first connecting part 510 is formed as a protruding part protruding in the axial direction from the lower end of the probe body 500, that is, in the substantially vertical direction from the tip of the lower rod 502. The traction rod 60 is connected to the side surface of the first connecting part 510 so as to face it.

[0038] The stopper 520 is a protrusion provided on the side of the upper rod 501, and the stopper 520 is engaged with the upper surface of the upper guide plate 301 to prevent the probe 50 from falling off the guide unit 30.

[0039] (3) Towing rod 60 The traction rod 60 is a tool that is inserted into the guide holes 311, 312 prior to the probe 50, and then pulls the probe 50 and inserts the probe 50 into the guide holes 311, 312. The traction rod 60 may be made of the same material as the probe 50, or may be made of a different material. The traction rod 60 includes a rod body 600, a second connecting portion 610, and a handle 620.

[0040] The rod body 600 has a substantially linear shape, and is provided with a second connecting part 610 at its upper end and a handle 620 at its lower end.

[0041] The second connecting part 610 is a connecting means that is detachably connected to the probe 50. The second connecting part 610 is formed so as to protrude in the axial direction from the upper end of the rod main body 600, and the probe 50 is connected to the side surface of the second connecting part 610 so as to face the side surface of the second connecting part 610.

[0042] The handle 620 is a gripping portion that is gripped by an operator or an assembly robot. The handle 620 has a cross-sectional area larger than that of the rod body 600, and can be easily gripped.

[0043] (4) Probe insertion method 2 and 3 are diagrams showing an example of detailed steps of a method for inserting the probe 50, in which (a) to (f) chronologically show the steps of attaching the probe 50 to the guide unit 30 using the traction rod 60. The probe attachment step shown in the figures is part of the manufacturing process of the probe card, and is also part of the repair process of the probe card to replace a damaged probe 50.

[0044] 1, with a focus on the probe 50 and the traction rod 60, and shows a state in which the traction rod 60 is inserted into the lower guide hole 312 and then into the upper guide hole 311. The traction rod 60 is inserted into the guide holes 312, 311 from below. Since the traction rod 60 has a substantially linear shape, it can be more easily inserted into the guide holes 311, 312 compared to the probe 50 having the curved portion 503.

[0045] FIG. 1B shows a state in which the probe 50 is connected to the traction rod 60 with the second connection portion 610 of the traction rod 60 protruding above the upper guide plate 301. The first connection portion 510 of the probe 50 and the second connection portion 610 of the traction rod 60 are separably connected.

[0046] 1C is a diagram showing a state in which the traction rod 60 is pulled out from the guide holes 311 and 312. When the traction rod 60 is moved downward, the probe 50 is also pulled downward by the traction rod 60. Therefore, the probe 50 is inserted into the upper guide hole 311 and further into the lower guide hole 312.

[0047] FIG. 1(d) shows the state after the traction rod 60 has been separated. When the traction rod 60 is moved downward, the traction rod 60 is completely pulled out of the guide holes 311, 312, and then the stopper 520 of the probe 50 is engaged with the upper surface of the upper guide plate 301, and the traction rod 60 stops. At this time, the first connecting portion 510 and the second connecting portion 610 pass through the lower guide hole 312 and are positioned below the lower guide plate 302. Therefore, if the traction rod 60 is separated from the probe 50, the probe 50 inserted into the guide holes 311, 312 is obtained.

[0048] FIG. 1(e) shows a state in which the first connecting part 510 is removed from the probe 50. The first connecting part 510 is removed as necessary. For example, the first connecting part 510 can be removed by rubbing the lower end of the probe 50 with a cleaning sheet 70 on which an abrasive layer is formed.

[0049] (f) in the figure shows the state after removal of the first connecting portion 510. The probe 50 is obtained which is inserted into the guide holes 311, 312 and does not have the first connecting portion 510. Note that, in this embodiment, an example in which the first connecting portion 510 is removed will be described, but it is also possible to omit the polishing step of (e) above and leave the first connecting portion 510 without removing it, and bring the tip of the first connecting portion 510 into contact with the test object.

[0050] (5) Probe card 1 Fig. 4 is a diagram showing the guide unit 30 to which all the necessary probes 50 are attached. Fig. 5 is a diagram showing the probe card 1 to which the guide unit 30 of Fig. 4 is attached, and shows a cross section of the probe card 1 arranged horizontally in a wafer prober, cut along a vertical plane.

[0051] The probe card 1 is attached to the card holder 20 so that the mounting surface of the probes 50 faces the semiconductor wafer 211 on the stage 21, and by moving the stage 21 up and down, the probes 50 can be brought into contact with the electrode pads 212 on the semiconductor wafer 211. The probe card 1 is composed of a main substrate 10, a reinforcing plate 103, a guide unit 30, and two or more probes 50.

[0052] The main substrate 10 is a wiring substrate that is detachably attached to a wafer prober, and is horizontally disposed with the outer periphery of its lower surface supported by a card holder 20 of the wafer prober. A reinforcing plate 103 is attached to the center of the upper surface of the main substrate 10, and two or more external terminals 101 to which signal terminals of a tester device (not shown) are connected are provided on the outer periphery. Two or more probe electrodes 102 to which probes 50 are connected are provided in the center of the lower surface, and the probe electrodes 102 and the external terminals 101 are electrically connected to each other via the main substrate 10.

[0053] The guide unit 30 is a support member for the probes 50 that supports two or more probes 50 so that they can move up and down and positions them in a horizontal plane, and is attached so as to face the lower surface of the main board 10 via the attachment spacer 40. In other words, the upper guide plate 301 is disposed below the main board 10 so as to be parallel to the main board 10 at a predetermined distance.

[0054] The probe 50 has a shape extending in a direction intersecting with the main substrate 10, and both its upper and lower ends protrude from the guide unit 30. The upper end of the probe 50 is connected to the probe electrode 102, and the lower end of the probe 50 can be brought into contact with an electrode pad 212 on the object to be tested.

[0055] (6) Connecting part 510,610 Fig. 6 is a diagram showing an example of a detailed configuration of the connecting parts 510, 610 in Fig. 1. Also, (a) to (c) in the figure show a time series of how the probe 50 and the traction rod 60 are connected. Note that Da, Dt, and Dw shown in the figure respectively indicate the axial direction, thickness direction, and width direction of the probe 50. The axial direction Da is the vertical direction, and the thickness direction Dt and width direction Dw are horizontal directions perpendicular to each other.

[0056] The first connecting portion 510 is provided at the tip of the probe main body 500 and has a first connecting surface 515. The first connecting surface 515 is a side surface of the first connecting portion 510, and is formed, for example, as a plane parallel to the axial direction Da. An engagement protrusion 550 is provided on the first connecting surface 515. The engagement protrusion 550 is an engagement means that detachably engages with the traction rod 60, and is formed, for example, as a hook-shaped protrusion that protrudes from the first connecting surface 515 in the thickness direction Dt and has a tip that faces the probe main body 500 side.

[0057] The second connecting portion 610 is provided at the tip of the rod main body 600 and has a second connecting surface 615. The second connecting surface 615 is a side surface of the second connecting portion 610, and is, for example, a plane parallel to the axial direction Da. An engagement hole 650 is provided on the second connecting surface 615. The engagement hole 650 is an engagement means that detachably engages with the engagement protrusion 550, and is formed, for example, as a through hole on the second connecting surface 615 that penetrates the second connecting portion 610 in the thickness direction Dt.

[0058] The probe 50 and the traction rod 60 are connected by opposing the first connection surface 515 and the second connection surface 615 and engaging the engagement protrusion 550 on the first connection surface 515 with the engagement hole 650 on the second connection surface 615. By connecting the sides of the probe 50 and the traction rod 60 to each other, they can be connected so that they do not easily come off when towing. In addition, since the tip of the engagement protrusion 550 is a hook shape facing the opposite side to the traction rod 60, they can be connected so that they do not easily come off when towing.

[0059] In (a) of the figure, the state before connection is shown. The probe 50 and the traction rod 60 are arranged spaced apart such that the first connection surface 515 and the second connection surface 615 face each other.

[0060] In (b) of the figure, the state during connection is shown. By horizontally moving the probe 50 or the traction rod 60 shown in (a) and bringing them closer until the second connection surface 615 contacts the first connection surface 515, the engaging protrusion 550 is inserted into the engaging hole 650.

[0061] In (c) of the figure, the state after connection is shown. By vertically moving the probe 50 or the traction rod 60 shown in (b) and moving them apart, the hook-shaped engaging protrusion 550 engages with the engaging hole 650. When the engaging protrusion 550 and the engaging hole 650 engage, the probe 50 is connected to the traction rod 60, enabling the probe 50 to be pulled by the traction rod 60.

[0062] The separation of the traction rod 60 from the probe 50 is performed in the reverse procedure of the above (a) - (c). That is, by vertically moving the probe 50 or the traction rod 60 shown in (c) of the figure and bringing them closer, the engagement between the engaging protrusion 550 and the engaging hole 650 is released, reaching the state of (b) in the figure. Next, by horizontally moving the probe 50 or the traction rod 60 and moving them apart, the engaging protrusion 550 is pulled out of the engaging hole 650, reaching the state of (a) in the figure, and the traction rod 60 is separated from the probe 50.

[0063] Figure 7 is a diagram showing in detail the state after the connection of the probe 50 and the traction rod 60. In (a) of the figure, a perspective view is shown, and in (b), a side view is shown respectively. Also, in (c) of the figure, a side view of the probe 56 as a comparative example is shown.

[0064] As shown in (a) and (b) in the figure, the thickness of the first connecting portion 510 is thinner than that of the probe body 500, and the first connecting surface 515 is formed as a surface that is set back from the side surface 505 of the probe body 500. Therefore, a connecting space 560 is formed within the contour of the cross section of the probe body 500 when viewed from the axial direction. In other words, the connecting space 560 is a space that is adjacent to the first connecting surface 515 and formed inside the side surface 505. By arranging the second connecting surface 615 in such a connecting space 560, the total thickness of the connected first connecting portion 510 and second connecting portion 610 can be suppressed. Therefore, the probe 50 can be easily inserted into the guide holes 311 and 312.

[0065] Similarly, the thickness of the second connecting portion 610 is thinner than that of the rod main body 600, and the second connecting surface 615 is formed as a surface that is set back from the side surface 605 of the rod main body 600. Therefore, the first connecting surface 515 can be disposed inside the side surface 605, and the total thickness of the connected first connecting portion 510 and second connecting portion 610 can be reduced. Therefore, the probe 50 can be easily inserted into the guide holes 311, 312.

[0066] The width of the first connecting part 510 is equal to or less than the width of the probe main body 500, and the first connecting part 510 is disposed within the outline of the cross section of the probe main body 500 when viewed from the axial direction. Therefore, the first connecting part 510 does not hinder the insertion of the probe 50 into the guide holes 311, 312.

[0067] FIG. 4(c) shows a comparative example of a probe 56 in which an engagement protrusion 550 is formed on a side surface 505 of a probe body 500. This probe 56 does not have a first connecting portion 510, and is not provided with a connecting space 560. Therefore, the total thickness of the connected probe 56 and second connecting portion 610 becomes excessively large, and it becomes difficult to insert the probe 56 into the guide holes 311, 312, compared to the probe 50 shown in FIG. 4(a) and FIG. 4(b).

[0068] 7(a) and (b) show an example in which the second connecting portion 610 is completely accommodated in the connecting space 560 as viewed in the axial direction and does not protrude outside the outline of the cross section of the probe main body 500, but the present invention is not limited to such a case. In other words, a part of the second connecting portion 610 may protrude outside the connecting space 560 as viewed in the axial direction.

[0069] 8 is a diagram showing an example of a method for manufacturing the probe 50, in which (a) to (e) chronologically show the main steps constituting the manufacturing process of the probe 50. The probe 50 is manufactured using an electroplating method.

[0070] First, a conductive layer 701 is formed by electroplating on a substrate 700 for forming a probe (FIG. 8(a)). The conductive layer 701 is patterned as a series of regions corresponding to the probe body 500 and the first connection layer 510. The patterning is achieved by an exposure and development process using a photoresist.

[0071] Next, a conductive layer 702 is formed by electroplating on a portion of the conductive layer 701 (FIG. 8(b)). The conductive layer 702 is patterned into two regions spaced apart from each other corresponding to the probe body 500 and the engagement projection 550.

[0072] Next, a sacrificial layer 703 is formed by electroplating on the conductive layer 701 where the conductive layer 702 is not formed, and the surface is flattened by polishing (FIG. 8(c)). The sacrificial layer is a layer formed in the process of manufacturing a three-dimensional structure by plating, and is removed by a later etching process. The sacrificial layer 703 is made of a material different from the conductive layers 701, 702, and 704, for example, copper (Cu).

[0073] Next, a conductive layer 704 is formed by electroplating on the exposed region of the conductive layer 702 and on a portion of the sacrificial layer 703 (FIG. 8(d)). The conductive layer 704 is patterned as two regions spaced apart from each other corresponding to the probe body 500 and the engagement protrusion 550. The region corresponding to the engagement protrusion 550 is formed across the conductive layer 702 and the sacrificial layer 703.

[0074] Finally, the sacrificial layer 703 is etched away, so that the conductive layer 704 formed on the sacrificial layer 703 becomes the tip of the engaging projection 550, and the probe 50 is obtained.

[0075] Fig. 9 is a diagram showing another configuration example of the probe 50. This probe 50 differs from the probe 50 of Fig. 6 in that the first connecting portion 510 has a tapered shape in which the cross-sectional area decreases toward the tip.

[0076] The thickness of the first connecting portion 510 is constant, but the tapered surface 513 intersecting with the first connecting surface 515 is inclined with respect to the axial direction Da, and the width of the first connecting portion 510 narrows toward the tip. Therefore, the cross-sectional area becomes smaller toward the tip.

[0077] By forming the tip of the first coupling surface 515 in a tapered shape, the probe 50 can be easily inserted into the guide holes 311 and 312.

[0078] Fig. 10 is a diagram showing the state of inspection using the probe of Fig. 9. In Fig. 10, (a) shows the state of inspection using a probe 50 having a first connecting portion 510. When the inspection is performed by bringing the probe 50 into contact with the electrode pad 212 on the semiconductor wafer, it is desirable to remove the oxide film on the electrode pad 212 by performing a scrubbing operation during contact, and it is advantageous for the tip of the probe 50 to be sharpened. Therefore, in such a case, it is preferable to perform the inspection using a probe 50 whose tip has a tapered shape and whose first connecting portion 510 remains without being removed.

[0079] FIG. 1B shows a state where an inspection is performed using the probe 50 from which the first connecting portion 510 has been removed. When the first connecting portion 510 has been removed using the cleaning sheet 70, a flat cross section appears at the tip of the probe body 500. When an inspection is performed by bringing the probe 50 into contact with the bump electrode 213 on the semiconductor wafer, a flat tip is advantageous in terms of stable contact and reducing uneven marks on the bump electrode 213 due to contact. Therefore, in such a case, it is preferable to perform the inspection using the probe 50 from which the first connecting portion 510 has been removed.

[0080] Embodiment 2 In the first embodiment, an example of the probe insertion method for connecting the probe 50 having the engagement protrusion 550 to the traction rod 60 having the engagement hole 650 has been described. In contrast, in the present embodiment, a probe insertion method for connecting the probe 51 having the engagement hole 551 to the traction rod 61 having the engagement protrusion 651 will be described.

[0081] 11 is a diagram showing an example of a probe insertion method according to the second embodiment of the present invention, and shows an example of a detailed configuration of a first connecting portion 510 of the probe 51 and a second connecting portion 610 of the traction rod 61. The probe 51 and the traction rod 61 are different from the probe 50 and the traction rod 60 of FIG. 6 (first embodiment) in the configurations of the first connecting portion 510 and the second connecting portion 610. The other configurations are the same as those of the probe 50 and the traction rod 60, so a duplicated description will be omitted.

[0082] The first connecting portion 510 is provided at the tip of the probe body 500, and has a first connecting surface 515 and a connecting back surface 516. The first connecting surface 515 is a side surface of the first connecting portion 510, and is formed, for example, as a plane parallel to the axial direction Da. The connecting back surface 516 is a side surface of the first connecting portion 510 facing the first connecting surface 515. An engagement hole 551 is provided on the first connecting surface 515. The engagement hole 551 is an engagement means that detachably engages with the traction rod 61, and is formed, for example, as a through hole on the first connecting surface 515 that penetrates the first connecting portion 510 in the thickness direction Dt.

[0083] The second connecting portion 610 is provided at the tip of the rod main body 600 and has a second connecting surface 615. The second connecting surface 615 is a side surface of the second connecting portion 610, and is, for example, a plane parallel to the axial direction Da. In addition, an engagement protrusion 651 is provided on the second connecting surface 615. The engagement protrusion 651 is an engagement means that detachably engages with the engagement hole 551, and is formed, for example, as a hook-shaped protrusion that protrudes from the second connecting surface 615 in the thickness direction Dt and has a tip that faces the rod main body 600 side.

[0084] The probe 51 and the traction rod 61 are connected by opposing the first connecting surface 515 and the second connecting surface 615 and engaging the engaging hole 551 with the engaging protrusion 651. By connecting the side surfaces of the probe 51 and the traction rod 61 to each other, the probe 51 and the traction rod 61 can be connected so as not to come off easily when towing. In addition, the engaging protrusion 651 has a hook shape with a tip facing away from the probe 51, so that the probe 51 and the traction rod 61 can be connected so as not to come off easily when towing.

[0085] Moreover, the thickness of the first connecting portion 510 is thinner than that of the probe body 500, and the first connecting surface 515 and the connecting back surface 516 are formed as surfaces that are recessed from the corresponding side surfaces 505, 506 of the probe body 500. Therefore, the second connecting surface 615 can be disposed inside the side surface 505, and the total thickness of the connected first connecting portion 510 and second connecting portion 610 can be suppressed. Furthermore, at least a part of the engagement protrusion 651 protruding from the connecting back surface 516 can be disposed inside the side surface 506, and the length of the engagement protrusion 651 protruding outward from the side surface 506 can be suppressed. Therefore, the probe 51 can be easily inserted into the guide holes 311, 312.

[0086] Similarly, the thickness of the second connecting portion 610 is thinner than that of the rod main body 600, and the second connecting surface 615 is formed as a surface that is set back from the side surface 605 of the rod main body 600. Therefore, the first connecting surface 515 can be disposed inside the side surface 605, and the total thickness of the connected first connecting portion 510 and second connecting portion 610 can be reduced. Therefore, the probe 51 can be easily inserted into the guide holes 311, 312.

[0087] The width of the first connecting part 510 is equal to or less than the width of the probe main body 500, and the first connecting part 510 is disposed within the outline of the cross section of the probe main body 500 when viewed from the axial direction. Therefore, the first connecting part 510 does not hinder the insertion of the probe 51 into the guide holes 311, 312.

[0088] Fig. 12 is a diagram showing another example of the configuration of probe 51 according to the second embodiment of the present invention, showing detailed configurations of connecting portions 510, 610. Probe 51 in Fig. 12 differs from probe 51 in Fig. 11 only in that it has a tapered shape with a cross-sectional area that decreases toward the tip.

[0089] The thickness of the first connecting portion 510 is constant, but the tapered side surface 513 intersecting with the first connecting surface 515 is inclined with respect to the axial direction Da, and the width of the first connecting portion 510 narrows toward the tip. Therefore, the cross-sectional area becomes smaller toward the tip.

[0090] By forming the tip of the first coupling surface 515 in a tapered shape, the probe 51 can be easily inserted into the guide holes 311 and 312.

[0091] Fig. 13 is a diagram showing yet another configuration example of probe 51 according to the second embodiment of the present invention, showing detailed configurations of coupling portions 510, 610. Probe 51 in Fig. 11 has a circular engagement hole 551, whereas probe 51 in Fig. 13 has a rectangular engagement hole 551, with a portion of engagement hole 551 being open, which is a difference.

[0092] The shape of the engagement hole 551 may be a circle, a rectangle, or any other shape. The engagement hole 551 does not need to be completely surrounded by an edge, and may have an opening 517 that breaks a part of it in the horizontal direction, for example. The illustrated engagement hole 551 is also a hook shape formed in a plane that intersects with the engagement protrusion 651.

[0093] Embodiment 3 In the above embodiment, an example of a method for connecting the probes 50, 51 and the traction rods 60, 61 using the engagement protrusions 550, 651 and the engagement holes 650, 551 has been described. In contrast, in the present embodiment, another method for connecting the probes and the traction rods will be described.

[0094] 14 is a diagram showing an example of a probe insertion method according to the third embodiment of the present invention, showing an example of a detailed configuration of a first connecting portion 510 of the probe 52 and a second connecting portion 610 of the traction rod 62. In the figure, (a) shows a state before connection, and (b) shows a state after connection. The probe 52 and the traction rod 62 are different from the probe 50 and the traction rod 60 of FIG. 6 (first embodiment) in the configuration of the first connecting portion 510 and the second connecting portion 610. The other configurations are the same as those of the probe 50, so a duplicated description will be omitted.

[0095] A solder layer 552 is formed on the first coupling surface 515. The solder layer 552 can be formed by plating, and therefore can be formed during the manufacturing process of the probe 52.

[0096] The probe 52 and the traction rod 62 can be detachably connected by joining the first connection surface 515 and the second connection surface 615 via the solder layer 552. For example, the probe 52 and the traction rod 62 can be connected by heating the traction rod 62 with the second connection surface 615 in contact with the solder layer 552 and melting the solder layer 552. The probe 52 is inserted into the guide holes 311, 312 after the temperature of the traction rod 62 has decreased. In addition, the probe 52 and the traction rod 62 can be separated from each other by heating the traction rod 62 again after the probe is inserted and melting the solder layer 552 again.

[0097] The first connecting surface 515 is formed recessed from the side surface 505 of the probe body 500, and the second connecting surface 615 is formed recessed from the side surface 605 of the rod body 600, similar to the case of the probe 50 and the traction rod 60 in FIG. 6.

[0098] In this embodiment, the solder layer 552 is used for connection, but the present invention is not limited to this configuration. For example, a bonding layer using a thermoplastic adhesive may be used for connection.

[0099] In the present embodiment, the solder layer 552 is formed on the first coupling surface 515, and the traction rod 62 is heated, but the present invention is not limited to this configuration. For example, the solder layer 552 may be formed on the second coupling surface 615, and the probe 52 may be heated.

[0100] Embodiment 4 In the above embodiment, an example of probe 50 inserted into guide unit 30 from the upper guide plate 301 side was described, but in this embodiment, a probe 53 inserted into guide unit 30 from the lower guide plate 302 side will be described.

[0101] 15 is a diagram showing an example of a method for inserting a probe 53 according to the fourth embodiment of the present invention, in which (a) to (c) chronologically show the steps of attaching the probe 53 to the guide unit 30 using a traction rod 60. The probe attachment step shown in the diagram is part of the manufacturing process of the probe card, and is also part of the repair process of the probe card to replace a damaged probe 53.

[0102] 2 (Embodiment 1), probe 53 differs in that first connecting portion 510 is provided at the upper end of probe body 500, and stopper 520 can pass through guide holes 311, 312 from the bottom to the top. Other configurations are the same as those of probe 50, so duplicated explanations will be omitted.

[0103] The first connecting part 510 is a connecting means for detachably connecting the traction rod 60. The first connecting part 510 is formed as a protruding part that protrudes in the axial direction from the upper end of the probe body 500, that is, in the substantially vertical direction from the tip of the upper rod 501. The traction rod 60 is connected to the side surface of the first connecting part 510 so as to face it.

[0104] The stopper 520 is configured to be able to pass through the guide holes 311, 312 upward, but unable to pass through them downward. For example, the stopper 520 is made of an elastically deformable member extending obliquely downward from the side surface of the upper rod 501, and when inserted into the guide holes 311, 312 from below, it can pass through the guide holes 311, 312 while elastically deforming so as to reduce the amount of protrusion, whereas when inserted into the guide holes 311, 312 from above, it elastically deforms so as to increase the amount of protrusion, and is unable to pass through the guide holes 311, 312. For this reason, the stopper 520 that has passed through the guide holes 311, 312 from below to above is locked to the upper surface of the upper guide plate 301. Note that in this embodiment, an example in which the stopper 520 is locked to the upper surface of the upper guide plate 301 will be described, but for example, a configuration in which the stopper 520 that has passed only the lower guide hole 312 from below to above is locked to the upper surface of the lower guide plate 302 may also be adopted.

[0105] FIG. 1(a) shows a state in which the traction rod 60 is inserted into the upper guide hole 311 and then into the lower guide hole 312. The traction rod 60 is inserted into the guide holes 311 and 312 from above.

[0106] FIG. 1B shows a state in which the probe 53 is connected to the traction rod 60 in a state in which the connection portion 610 of the traction rod 60 protrudes downward from the lower guide plate 302, and the traction rod 60 is further pulled out from the guide holes 311, 312. When the traction rod 60 is moved upward, the probe 53 is also pulled by the traction rod 60 and moves upward. Therefore, the probe 53 is inserted into the lower guide hole 312 and further into the upper guide hole 311.

[0107] FIG. 1C shows the state after the traction rod 60 has been separated. When the traction rod 60 is moved upward, it is completely pulled out of the guide holes 311, 312, and the first connecting portion 510 and the second connecting portion 610 also pass through the upper guide hole 311 and protrude above the guide plate 301. In this state, when the traction rod 60 is separated from the probe 53, the stopper 520 is engaged with the upper surface of the upper guide plate 301, and the probe 53 inserted into the guide holes 311, 312 is obtained.

[0108] If necessary, the first connecting portion 510 may be removed by rubbing the upper end of the probe 53 with a cleaning sheet. [Explanation of symbols]

[0109] 1 Probe card 10 Main Board 101 External terminal 102 Probe electrode 103 Reinforcement plate 20 Card Holder 21 Stage 211 Semiconductor Wafer 212 Electrode Pads 213 Bump Electrode 30 Guide unit 301 Upper guide plate 302 Lower guide plate 303 Connecting spacer 311 Upper guide hole 312 Lower guide hole 40 Spacer 50~53 Probe 55,56 Probe 500 Probe Body 501 Upper Rod 502 Lower Rod 503 Curved section 505,506 Side of probe body 510 1st connection part 513 Tapered surface 515 1st connection surface 516 Connected back 517 Open area 520 Stopper 550 Engagement protrusion 551 Engagement hole 552 Solder layer 560 Connected Space 60~62 Towing rod 600 Rod body 605 Side of rod body 610 2nd connection part 615 2nd connection surface 620 Handle 650 Engagement hole 651 Engagement protrusion 70 Cleaning Sheet 700 Substrates 701, 702, 704 Conductive layer 703 Sacrificial Layer Da axis direction Dt Thickness direction Dw Width direction

Claims

1. A probe insertion method for a probe card, comprising: two guide plates spaced apart from each other; and two guide holes formed in each of the two guide plates, each of which has a probe inserted therethrough; Inserting a traction rod through the two guide holes; a step of detachably connecting a tip of the traction rod inserted through the two guide holes to a connecting portion provided at a tip of a probe; Pulling out the traction rod from the two guide holes and inserting the probe into the two guide holes; and separating the traction rod, which has been pulled out from the two guide holes, from the probe.

2. The probe insertion method according to claim 1 , wherein the traction rod is connected to a connection surface of the connection portion that is parallel to an axial direction of the connection portion.

3. 3. The probe insertion method according to claim 1, further comprising the step of removing the coupling portion from the probe after separation of the traction rod.

4. an elastically deformable probe body that is inserted into two guide holes that are formed in two guide plates that are spaced apart from each other; a connecting portion protruding in an axial direction from one end of the probe body, A probe characterized in that a traction rod for inserting a guide plate is detachably attached to a first connecting surface of the connecting portion that is parallel to the axial direction.

5. The first coupling surface is provided at a position retreated from a side surface of the probe body, The probe according to claim 4 , wherein a second connection surface of the traction rod connected to the first connection surface can be positioned closer to the first connection surface than a side surface of the probe body.

6. 6. The probe according to claim 5, wherein the first coupling surface or the second coupling surface is provided with a solder or a thermoplastic adhesive.

7. The probe according to claim 5 , wherein the first coupling surface is provided with an engagement portion for engaging with the traction rod.

8. The probe according to claim 7 , wherein the engaging portion is formed to protrude from the first connecting surface and has a hook shape with a tip pointing toward the probe body.

9. The probe according to claim 7 , wherein the engagement portion is an engagement hole formed in the first connection surface.

10. 10. The probe according to claim 4, wherein the connecting portion has a tapered shape in which a cross-sectional area decreases toward a tip on a side opposite to the probe body.

Images