Semiconductor device and semiconductor assembly including the same

Abstract

To provide a semiconductor element and a semiconductor assembly including the semiconductor element.SOLUTION: A semiconductor element includes a first semiconductor structure, a second semiconductor structure, and an active region. The first semiconductor structure includes a first dopant. The second semiconductor structure is located on the first semiconductor structure and includes a second dopant different from the first dopant. The active region is located between the first semiconductor structure and the second semiconductor structure and includes the first dopant. This semiconductor element has a maximum external quantum efficiency of Emax% under a current density of J_EmaxA / cm2, and the semiconductor element has an external quantum efficiency of 15% or more of Emax% under a current density of 0.001*(J_Emax)A / cm2.SELECTED DRAWING: Figure 1B

Description

[Technical field]

[0001] The present invention relates to semiconductor devices, and more particularly to semiconductor light emitting devices, such as light emitting diodes. [Background technology]

[0002] The applications of semiconductor devices are very wide, and the development and research of related materials is also continuing. For example, III-V group semiconductor materials including group 3 and group 5 elements can be applied to various photoelectric semiconductor devices, such as light emitting diodes (LEDs), laser diodes (LDs), photoelectric detectors, or solar cells, or can be power devices such as switches or rectifiers that can be used in the fields of lighting, medicine, displays, communications, sensing, power systems, etc. Light emitting diodes, as one type of semiconductor light emitting device, have the advantages of low power consumption and long service life, and are therefore widely used. Summary of the Invention [Problem to be solved by the invention]

[0003] It is an object of the present invention to provide a semiconductor device and a semiconductor assembly including the same. [Means for solving the problem]

[0004] According to the present invention, a semiconductor device is provided, which includes a first semiconductor structure, a second semiconductor structure, and an active region. The first semiconductor structure includes a first dopant. The second semiconductor structure is located on the first semiconductor structure and includes a second dopant different from the first dopant. The active region is located between the first semiconductor structure and the second semiconductor structure and includes the first dopant. The semiconductor device is a J_E max A / cm 2 Maximum external quantum efficiency E at a current density of max %, of which 0.001A / cm 2 ≦J_E max A / cm 2≦100A / cm 2 and 0.001*(J_E max )A / cm 2 Under a current density of E max % external quantum efficiency of 15% or more. [Brief description of the drawings]

[0005] [Figure 1A] FIG. 2 is a top view of a semiconductor device according to an embodiment of the present invention. [Figure 1B] 1 is a diagram showing a cross-sectional structure of a semiconductor element according to an embodiment of the present invention; [Figure 1C] FIG. 2 is a partially enlarged view of a semiconductor element according to an embodiment of the present invention. [Figure 1D] 1 is a diagram showing a cross-sectional structure of a semiconductor element according to an embodiment of the present invention; [Figure 1E] FIG. 2 is a top view of a semiconductor device according to an embodiment of the present invention. [Figure 1F] 1 is a diagram showing a cross-sectional structure of a semiconductor element according to an embodiment of the present invention; [Figure 2A] FIG. 2 is a diagram showing the relationship between current density and internal quantum efficiency (IQE) of a semiconductor element in an embodiment of the present invention. [Figure 2B] FIG. 2 is a graph showing the relationship between current density and external quantum efficiency (EQE) of a semiconductor device in an embodiment of the present invention. [Figure 2C] FIG. 1 is a diagram showing the relationship between the R value and the relative EQE ratio of a semiconductor element in an embodiment of the present invention. [Figure 2D] FIG. 2 is a graph showing the relationship between current density and external quantum efficiency (EQE) of a semiconductor device in an embodiment of the present invention. [Diagram 3] FIG. 2 is a diagram showing the relationship between the concentration of an element and depth in a partial region of a semiconductor element in one embodiment of the present invention. [Figure 4] FIG. 2 is a diagram showing the relationship between current density and internal quantum efficiency (IQE) of a semiconductor element in an embodiment of the present invention. [Figure 5A] 1 is a diagram showing a cross-sectional structure of a semiconductor assembly in an embodiment of the present invention. [Figure 5B] This is a diagram showing a cross-sectional structure of a semiconductor assembly in an embodiment of the present invention. [Figure 6] This is a diagram showing a cross-sectional structure of a semiconductor assembly in an embodiment of the present invention. [Figure 7] This is a top view of a semiconductor assembly in an embodiment of the present invention.

Modes for Carrying Out the Invention

[0006] Hereinafter, several embodiments will be described to enable those skilled in the art to more easily understand the present invention. Note that these embodiments are merely illustrative and do not limit the present invention. Also, those skilled in the art may adjust the embodiments described below according to needs. For example, the order of the processes may be changed, and / or some steps may be increased or decreased.

[0007] Unless otherwise specified, the general formula InGaP represents In x0 Ga 1-x0 P, where 0 < x0 < 1; the general formula AlInP represents Al x1 In 1-x1 P, where 0 < x1 < 1; the general formula AlGaInP represents Al x2 Ga x3 In 1-x2-x3 P, where 0 < x2 < 1, 0 < x3 < 1; the general formula InGaAsP represents In x4 Ga 1-x4 As x5 P 1-x5 where 0 < x4 < 1, 0 < x5 < 1; the general formula AlGaInAs represents Al x6 Ga x7 In 1-x6-x7 As, where 0 < x6 < 1, 0 < x7 < 1; the general formula InGaNAs represents In x8 Ga 1-x8 N x9 As 1-x9 where 0 < x8 < 1, 0 < x9 < 1; the general formula InGaAs represents In x10 Ga 1-x10represents As, where 0 < x10 < 1; the general formula AlGaAs represents Al x11 Ga 1-x11 represents As, where 0 < x11 < 1; the general formula InGaN represents In x12 Ga 1-x12 represents N, where 0 < x12 < 1; the general formula AlGaN represents Al x13 Ga 1-x13 represents N, where 0 < x13 < 1; the general formula AlGaAsP represents Al x14 Ga 1-x14 As x15 P 1-x15 represents, where 0 < x14 < 1 and 0 < x15 < 1; the general formula InGaAsN represents In x16 Ga 1-x16 As x17 N 1-x17 represents, where 0 < x16 < 1 and 0 < x17 < 1; the general formula AlInGaN represents Al x18 In x19 Ga 1-x18-x19 represents N, where 0 < x18 < 1 and 0 < x19 < 1. Also, the content of each element can be adjusted according to different purposes. For example, it is not limited to adjusting the magnitude of the energy level, or when the semiconductor device is a light-emitting device, the main wavelength or peak wavelength of the light-emitting device can be adjusted thereby.

[0008] The semiconductor device of the present invention may be, for example, a light-emitting device (e.g., a light-emitting diode, a laser diode), a light-absorbing device (e.g., a photodetector), or a device that does not emit light. The components and dopants of each layer included in the semiconductor device of the present invention may be obtained by analyzing in any suitable manner, for example, a secondary ion mass spectrometer (SIMS) may be used, and the thickness of each layer may also be obtained by analyzing in any suitable manner, for example, a transmission electron microscopy (TEM), a scanning electron microscope (SEM), or the like may be used.

[0009] It should be understood by those skilled in the art that other components may be added based on each embodiment described below. For example, unless otherwise specified, a description such as "a first layer (or structure) is located on a second layer (or structure)" may include an embodiment in which the first layer (or structure) is in direct contact with the second layer (or structure), and may include an embodiment in which there is another structure between the first layer (or structure) and the second layer (or structure) and they are not in direct contact with each other. It should also be understood that the vertical positional relationship of each layer (or structure) may change depending on different observation directions.

[0010] In addition, in the present invention, a description such as "a layer or structure is substantially composed of M" indicates that the main component of this layer or structure is M, but does not exclude that this layer or structure contains dopants or unavoidable impurities.

[0011] FIG. 1A is a top view of a semiconductor device 10 according to an embodiment of the present invention. FIG. 1B is a diagram showing a cross-sectional structure of the semiconductor device 10 along line X-X' in FIG. 1A. FIG. 1C is a partial enlarged view of a region R in the semiconductor device 10 shown in FIG. 1B. As shown in FIG. 1A, in a top view, the semiconductor device 10 may have a length L0 and a width W0. The length L0 and the width W0 may be 500 μm or less, for example, 450 μm, 400 μm, 350 μm, 300 μm, 250 μm, 200 μm, 150 μm, 100 μm, 50 μm, 30 μm, or 10 μm or less, and may be 1 μm or more. In a top view, the semiconductor device 10 may have a rectangular or circular shape. In an embodiment, the length L0 and the width W0 of the semiconductor device 10 may be approximately equal to each other and may be a square shape. In one embodiment, the area (L0*W0) of the upper surface of the semiconductor element 10 when viewed from above is 10000 μm 2 For example, 1 μm or less 2 ~5000μm 2 (e.g., 100 μm 2 , 625μm 2 , 1250μm 2 , 2000μm 2 or 2500μm 2 1A and 1B, the semiconductor device 10 includes a base 100, an epitaxial structure 102, a first electrode 110, and a second electrode 112. The epitaxial structure 102 is located on the base 100. The first electrode 110 is located on the epitaxial structure 102, and the second electrode 112 is located below the base 100.

[0012] The base 100 includes a conductive or insulating material, the conductive material being, for example, GaAs, InP, SiC, GaP, ZnO, GaN, AlN, Ge, Si, etc., and the insulating material being, for example, sapphire, etc. In one embodiment, the base 100 is a growth substrate, i.e., the epitaxial structure 102 can be formed on the base 100, for example, by metalorganic chemical vapor deposition (MOCVD). In one embodiment, the base 100 is not a growth substrate, but a bonding substrate, which can be bonded to the epitaxial structure 102 by an adhesive material.

[0013] As shown in FIG. 1B, the epitaxial structure 102 includes a first semiconductor structure 104, a second semiconductor structure 106, and an active region 108 between the first semiconductor structure 104 and the second semiconductor structure 106. The first semiconductor structure 104 and the second semiconductor structure 106 have opposite conductivity types. For example, the first semiconductor structure 104 is n-type and the second semiconductor structure 106 is p-type, or the first semiconductor structure 104 is p-type and the second semiconductor structure 106 is n-type. Thus, the first semiconductor structure 104 and the second semiconductor structure 106 can provide electrons and holes, respectively. The first semiconductor structure 104, the second semiconductor structure 106, and the active region 108 may each include a Group 3, 5 semiconductor material. The Group 3, 5 semiconductor material may include Al, Ga, As, P, N, or In. In one embodiment, the first semiconductor structure 104, the second semiconductor structure 106, and the active region 108 may not include N. Specifically, the above-mentioned III, V semiconductor materials may be binary compound semiconductors (e.g., GaAs, GaP, or GaN), ternary compound semiconductors (e.g., InGaAs, AlGaAs, InGaP, AlInP, InGaN, or AlGaN), or quaternary compound semiconductors (e.g., AlGaInAs, AlGaInP, AlInGaN, InGaAsP, InGaAsN, or AlGaAsP). In one embodiment, the active region 108 is substantially composed of a ternary compound semiconductor (e.g., InGaAs, AlGaAs, InGaP, AlInP, InGaN, or AlGaN) or a quaternary compound semiconductor (e.g., AlGaInAs, AlGaInP, AlInGaN, InGaAsP, InGaAsN, or AlGaAsP).

[0014] The semiconductor device 10 may include a double heterostructure (DH), a double-side double heterostructure (DDH), or a multiple quantum wells (MQW) structure. According to one embodiment, when the semiconductor device 10 is a light emitting device, and when the semiconductor device 10 is operating, the active region 108 can emit a light flux. The light flux includes visible light or invisible light. The light flux emitted by the semiconductor device 10 depends on the material composition of the active region 108. For example, when the material of the active region 108 includes an InGaN system, the active region 108 can emit, for example, blue light or deep blue light having a peak wavelength of 400 nm to 490 nm, or green light having a peak wavelength of 490 nm to 550 nm. When the material of the active region 108 includes an AlGaN system, the active region 108 can emit, for example, ultraviolet light having a peak wavelength of 250 nm to 400 nm. When the material of the active region 108 includes an InGaAs system, an InGaAsP system, an AlGaAs system, or an AlGaInAs system, the active region 108 can emit, for example, infrared light having a peak wavelength of 700 to 1700 nm. When the material of the active region 108 includes an InGaP system or an AlGaInP system, the active region 108 can emit, for example, red light having a peak wavelength of 610 nm to 700 nm, or yellow light having a peak wavelength of 530 nm to 600 nm.

[0015] In one embodiment, the active region 108 may include a semiconductor stack layer 108c consisting of a barrier layer 108a and a well layer 108b adjacent thereto, i.e., one pair of semiconductor stack layers 108c includes one barrier layer 108a and one well layer 108b. Specifically, the active region 108 may include one or more pairs of semiconductor stack layers 108c. In one embodiment, the number of pairs of the semiconductor stack layers 108c is 2 or more. In one embodiment, the number of pairs of the semiconductor stack layers 108c may be 20 or less, and may be 10 or less. The number of pairs of the semiconductor stack layers 108c may be, for example, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, or 19. In one embodiment, when the active region 108 includes five or fewer pairs of semiconductor stack layers 108c (i.e., five or fewer barrier layers 108a and five or fewer well layers 108b), the semiconductor device 10 has a relatively high quantum efficiency, particularly at low current densities (e.g., less than 1 A / cm 2 The efficiency of the device is high when it is operated under low currents (e.g., 10 mA or less) or low currents (e.g., 10 mA or less). Specifically, the current density is determined by dividing the magnitude of the current (in amperes (A)) applied to the semiconductor device 10 by the top surface area (in cm 2 In one embodiment, the top surface area of ​​the epitaxial structure 102 is 1 μm 2 ~2500μm 2 For example, the range may be 50 μm. 2 ~100μm 2 , 600μm 2 , 1200μm 2 , 1500μm 2 or 2000μm 2 When the epitaxial structure 102 has areas of different sizes in top view, the above-mentioned top surface area refers to the largest of these areas.

[0016] The barrier layer 108a and / or the well layer 108b may include AL (aluminum). In one embodiment, the active region 108 includes n pairs of semiconductor stack layers 108c, thereby having n barrier layers 108a and n well layers 108b, where n is a positive integer. Each barrier layer 108a may have a first aluminum content (percentage) (ai%, i=1, 2, ..., n), and each well layer 108b may have a second aluminum content (percentage) (bi%, i=1, 2, ..., n). a1% is the first aluminum content (percentage) of the first barrier layer 108a, a2% is the first aluminum content (percentage) of the second barrier layer 108a, and an% is the first aluminum content (percentage) of the n-th barrier layer 108a. b1% is the second aluminum content (percentage) of the first well layer 108b, b2% is the second aluminum content (percentage) of the second well layer 108b, and bn% is the second aluminum content (percentage) of the n-th well layer 108b. In one embodiment, the first aluminum content (percentage) of the barrier layer 108a of each layer may be the same or different. The difference in the aluminum content (percentage) (Al%) between the barrier layers 108a may be between 0 and 1 atom%. In one embodiment, the second aluminum content (percentage) of the well layer 108b of each layer may be the same or different. The difference in the aluminum content (percentage) (Al%) between the well layers 108b may be between 0 and 1 atom%.

[0017] Specifically, the first and second aluminum contents (percentages) refer to the number of Al atoms (percentages) (atom%) in the barrier layer 108a and the well layer 108b, respectively, and can be obtained by measuring the barrier layer 108a and the well layer 108b, respectively, using, for example, an energy dispersive spectrometer (EDX). z1 Ga 0.5-z1 In 0.5 P (wherein 0≦z1≦0.5), and the well layer 108b is Al z2 Ga 0.5-z2 In0.5 When the barrier layer 108a contains P (where 0≦z2≦0.5), z1 and z2 can be obtained from the EDX measurement results. Here, the first aluminum content (percentage) (ai%) of the barrier layer 108a can be defined as z1*100%, and the second aluminum content (percentage) (bi%) of the well layer 108b can be defined as z2*100%. That is, the aluminum content (percentage) represents the proportion of Al in the total number of atoms (percentage) of all group 3 elements. For example, when z1=0.3, the first aluminum content (percentage) is 30%. In one embodiment, the aluminum content (percentage) of the barrier layer 108a and the well layer 108b can also be obtained by analyzing using SIMS. In one embodiment, the first aluminum content (percentage) is greater than the second aluminum content (percentage). In one embodiment, the first aluminum content (percentage) may be in the range of 15% to 50%, such as 20%, 25%, 30%, 35%, 40%, 45% or 50%. In one embodiment, the second aluminum content (percentage) may be in the range of 0% to 15%, such as 5% or 10%. In one embodiment, when the first aluminum content (percentage) is 25% or more, the electron confinement ability of the barrier layer 108a can be further improved, and the barrier layer 108a has a relatively good quantum efficiency (e.g., EQE or IQE). In one embodiment, when the first aluminum content (percentage) is 35% or more, the barrier layer 108a has a better quantum efficiency.

[0018] In one embodiment, the active region 108 includes n pairs of semiconductor stack layers 108c, thereby having n barrier layers 108a and n well layers 108b, where n is a positive integer. Each barrier layer 108a may have a first thickness (t1i, i=1, 2, ..., n), and each well layer 108b may have a second thickness (t2i, i=1, 2, ..., n). The first thickness may be greater than or equal to the second thickness. t11 is the first thickness of the first barrier layer 108a, t12 is the first thickness of the second barrier layer 108a, and t1n is the first thickness of the nth barrier layer 108a. t21 is the second thickness of the first well layer 108b, t22 is the second thickness of the second well layer 108b, and t2n is the second thickness of the nth well layer 108b. In one embodiment, the first thickness of the barrier layers 108a of each layer may be the same or different, and the thickness difference between the barrier layers 108a may be between 0 and 1 nm. In one embodiment, the second thickness of the well layers 108b of each layer may be the same or different, and the thickness difference between the well layers 108b may be between 0 and 1 nm. The first thickness and the second thickness may each be 200 Å or less, for example, about 150 Å, 100 Å, 50 Å, or 10 Å, respectively. In one embodiment, when the thicknesses of the barrier layers 108a and the well layers 108b are all 200 Å or less, the quantum efficiency of the semiconductor device 10 is good. In one embodiment, the ratio of the first thickness (t1i) to the second thickness (t2i) is in the range of 2:1 to 40:1. For example, the ratio of the first thickness to the second thickness (t1i / t2i) may be in the range of 10:1 to 35:1. The relatively large first thickness can improve the electron confinement capability of the barrier layer 108a. In one embodiment, the first thickness can be in the range of 20 Å to 4000 Å, for example, 100 Å to 2000 Å. The second thickness can be in the range of 10 Å to 200 Å, for example, 150 Å, 100 Å, or 50 Å.

[0019] As shown in FIG. 1B, the first semiconductor structure 104 includes a first confinement layer 114, and the second semiconductor structure 106 includes a second confinement layer 116. In this embodiment, the first confinement layer 114 and the second confinement layer 116 are adjacent to and in direct contact with the active region 108. The first confinement layer 114 and the second confinement layer 116 may each include a group 3, 5 semiconductor material, such as a ternary compound semiconductor (e.g., InGaAs, AlGaAs, InGaP, AlInP, InGaN, or AlGaN) or a quaternary compound semiconductor (e.g., AlGaInAs, AlGaInP, AlInGaN, InGaAsP, InGaAsN, or AlGaAsP). In one embodiment, the first confinement layer 114 and the second confinement layer 116 have the same material as the barrier layer 108a. The first confinement layer 114 and / or the second confinement layer 116 may include aluminum. The first confinement layer 114 may have a third aluminum content (percentage), and the second confinement layer 116 may have a fourth aluminum content (percentage). As before, the aluminum content (percentage) here represents the percentage of Al in the total number (percentage) of atoms of all group 3 elements. In one embodiment, the third aluminum content (percentage) and the fourth aluminum content (percentage) are all greater than the second aluminum content (percentage). In one embodiment, the third aluminum content (percentage) and the fourth aluminum content (percentage) are equal to or greater than the first aluminum content (percentage). In one embodiment, the first confinement layer 114 may have a third thickness (t3), and the second confinement layer 116 may have a fourth thickness (t4). The third thickness and the fourth thickness may be the same or different. In one embodiment, the third thickness is equal to or greater than the second thickness, and the fourth thickness is equal to or greater than the second thickness. This can improve the electron confinement capabilities of the first confinement layer 114 and the second confinement layer 116. In one embodiment, the ratio of the third thickness to the first thickness or the second thickness (t3 / t1i or t3 / t2i) is in the range of 1.5:1 to 10:1, for example, 2:1, 3:1, 4:1, 5:1, 6:1, 7:1, 8:1, 9:1.In one embodiment, the ratio of the fourth thickness to the first thickness or the second thickness (t4 / t1i or t4 / t2i) is in the range of 1.5:1 to 10:1, such as 2:1, 3:1, 4:1, 5:1, 6:1, 7:1, 8:1, 9:1. In one embodiment, when t3 / t1i, t3 / t2i, t4 / t1i or t4 / t2i is in the above range, the electron confinement ability of the first confinement layer 114 / second confinement layer 116 can be further improved.

[0020] In one embodiment, the active region 108 includes a first dopant. The first dopant has a doping concentration in the active region 108. The first dopant may be an n-type or p-type dopant with respect to the active region 108. In one embodiment, the first dopant may include an element of Group II, Group IV, or Group VI of the Periodic Table of Elements. In one embodiment, the first dopant includes C, Zn, Si, Ge, Sn, Se, Mg, or Te. In one embodiment, the first dopant has a doping concentration in the active region 108 of 1×10 16 / cm 3 In one embodiment, the doping concentration of the first dopant in the active region 108 is 1×10 18 / cm 3 Specifically, the doping concentration of the first dopant in the active region 108 is less than 5×10 15 / cm 3 ~1x10 16 / cm 3 , 5x10 16 / cm 3 , 8x10 16 / cm 3 , 1x10 17 / cm 3 Or 5x10 17 / cm 3The first dopant may be distributed in the first semiconductor structure 104 and / or the second semiconductor structure 106. In one embodiment, the doping concentration of the first dopant in the first semiconductor structure 104 is higher than the doping concentration of the first dopant in the active region 108. In one embodiment, the first dopant is distributed in at least the first confinement layer 114 and the active region 108. In one embodiment, the first dopant is distributed continuously and uninterruptedly in the first confinement layer 114 and the active region 108 and has a doping concentration of at least 1×10 16 / cm 3 The doping concentration of the first dopant is equal to or greater than 100 nm. The phrase "distributed continuously and uninterruptedly in the first confinement layer 114 and the active region 108" means that when the first confinement layer 114 and the active region 108 are analyzed by SIMS, signals of the first dopant can be obtained at all depth positions in the first confinement layer 114 and the active region 108. Specifically, in one embodiment, when the first dopant is analyzed by SIMS, the first dopant is present at least between the surface of the first confinement layer 114 away from the active region 108 side to the interface between the active region 108 and the second confinement layer 116, and is present in each barrier layer 108a and each well layer 108b of the active region 108.

[0021] In one embodiment, in the semiconductor stack layer 108c of the active region 108 closest to the first confinement layer 114, the doping concentration of the first dopant is about 1×10 16 / cm 3 Above and 1x10 18 / cm 3 In one embodiment, in the semiconductor stack layer 108c of the active region 108 closest to the second confinement layer 116, the doping concentration of the first dopant is 1×10 16 / cm 3 Above and 1x10 17 / cm 3or less. In one embodiment, the doping concentration of the first dopant in the semiconductor stack layer 108c of the active region 108 closest to the first confinement layer 114 is equal to or greater than the doping concentration of the first dopant in the semiconductor stack layer 108c of the active region 108 closest to the second confinement layer 116. In one embodiment, the first dopant is distributed in at least the first confinement layer 114, the second confinement layer 116, and the active region 108. In one embodiment, the doping concentration of the first dopant in the first confinement layer 114 is equal to or greater than the doping concentration of the first dopant in the active region 108. In one embodiment, the doping concentration of the first dopant in the active region 108 is equal to or greater than the doping concentration of the first dopant in the second confinement layer 116. In one embodiment, the doping concentration of the first dopant gradually decreases from the first confinement layer 114 to the second confinement layer 116. Specifically, in one embodiment, the first dopant in the first confinement layer 114 may have a minimum doping concentration c1, the first dopant in the second confinement layer 116 may have a minimum doping concentration c2, and the first dopant in the active region 108 may have a minimum doping concentration c3, where c1≧c3≧c2. The minimum doping concentrations c1, c2, and c3 may be the minimum values ​​of the first dopant doping concentrations in the first confinement layer 114, the second confinement layer 116, and the active region 108, respectively. When analyzing the first dopant using SIMS, the above-mentioned minimum values ​​may correspond to the positions of the lowest valleys (referring to the minimum values ​​of the concentrations that can be detected when there is no obvious valley) in the first dopant concentration curve in the SIMS analysis results in the first confinement layer 114, the second confinement layer 116, and the active region 108, respectively.

[0022] The first semiconductor structure 104 may further include a first cladding layer 118 located below the first confinement layer 114. The first cladding layer 118 may include a group 3, 5 semiconductor material, such as a ternary compound semiconductor (e.g., InGaAs, AlGaAs, InGaP, AlInP, InGaN, or AlGaN) or a quaternary compound semiconductor (e.g., AlGaInAs, AlGaInP, AlInGaN, InGaAsP, InGaAsN, or AlGaAsP). In one embodiment, the first cladding layer 118 also includes a first dopant. In one embodiment, a doping concentration of the first dopant in the first cladding layer 118 is equal to or greater than a doping concentration of the first dopant in the first confinement layer 114.

[0023] In one embodiment, the first semiconductor structure 104 may further include a first window layer (not shown) located below the first cladding layer 118. The first window layer may include a group 3, 5 semiconductor material, such as a ternary compound semiconductor (e.g., InGaAs, AlGaAs, InGaP, AlInP, InGaN, or AlGaN) or a quaternary compound semiconductor (e.g., AlGaInAs, AlGaInP, AlInGaN, InGaAsP, InGaAsN, or AlGaAsP). The first window layer may be made of a material different from that of the first cladding layer 118. In one embodiment, the thickness of the first window layer is greater than the thickness of the first cladding layer 118. In one embodiment, the first window layer also includes a first dopant. In one embodiment, the doping concentration of the first dopant in the first window layer is greater than or equal to the doping concentration of the first dopant in the first cladding layer 118 or the first confinement layer 114. In one embodiment, the first cladding layer 118 and / or the first window layer has a doping concentration of the first dopant of about 1×10 19 / cm 3 For example, 5x10 17 / cm 3 ~1x10 18 / cm 3 , 2x10 18 / cm 3 Or 3x10 18 / cm 3 is within the range.

[0024] In one embodiment, the second semiconductor structure 106 further includes a second cladding layer 119 located above the second confinement layer 116. The second cladding layer 119 may include a group 3, 5 semiconductor material, such as a ternary compound semiconductor (e.g., InGaAs, AlGaAs, InGaP, AlInP, InGaN, or AlGaN) or a quaternary compound semiconductor (e.g., AlGaInAs, AlGaInP, AlInGaN, InGaAsP, InGaAsN, or AlGaAsP). In one embodiment, the second cladding layer 119 includes a second dopant different from the first dopant. In one embodiment, the second dopant may include an element of Group II, Group IV, or Group VI in the periodic table of elements. In one embodiment, the second dopant includes C, Zn, Si, Ge, Sn, Se, Mg, or Te. The second dopant may also be distributed in the active region 108 and / or the second confinement layer 116. In one embodiment, the first dopant and the second dopant may be present simultaneously in the second confinement layer 116 and / or the second cladding layer 119. In one embodiment, the second dopant in the second confinement layer 116 and / or the second cladding layer 119 is present at a concentration of 1×10 16 / cm 3 The doping concentration may be greater than or equal to 100 .mu.m.

[0025] In one embodiment, the first semiconductor structure 104 may include a third dopant different from the first dopant and the second dopant. In one embodiment, the third dopant is distributed in the first cladding layer 118 and / or the first window layer. In one embodiment, the first dopant is distributed in the first cladding layer 118, the first confinement layer 114, and the active region 108, and the third dopant is distributed primarily in the first window layer. In one embodiment, the first dopant and the third dopant are not simultaneously present in the first confinement layer 114, the active region 108, the first cladding layer 118, or the first window layer, e.g., the first dopant and the third dopant have a minimum doping concentration of 1×10 in the first confinement layer 114, the active region 108, the first cladding layer 118, or the first window layer. 16 / cm 3In one embodiment, the third dopant may include an element of Group II, Group IV, or Group VI in the periodic table of elements. In one embodiment, the third dopant includes C, Zn, Si, Ge, Sn, Se, Mg, or Te. In one embodiment, the atomic radius of the third dopant is smaller than the atomic radius of the first dopant or the second dopant. In one embodiment, for the first semiconductor structure 104, the first dopant and the third dopant are dopants of the same conductivity type, and the second dopant is a dopant of the opposite conductivity type. For example, for the first semiconductor structure 104, the first dopant and the third dopant are p-type dopants and the second dopant is an n-type dopant, or the first dopant and the third dopant are n-type dopants and the second dopant is a p-type dopant. In one embodiment, the first dopant is continuously and uninterruptedly distributed in the first coating layer 118 to the second confinement layer 116, and for example, when the first coating layer 118 to the second confinement layer 116 are analyzed by SIMS, a signal of the first dopant can be obtained at each depth position in the first coating layer 118 to the second confinement layer 116. In one embodiment, the second dopant is continuously and uninterruptedly distributed in the second coating layer 119, and for example, when the second coating layer 119 is analyzed by SIMS, a signal of the second dopant can be obtained at each depth position in the second coating layer 119. In one embodiment, the third dopant is continuously and uninterruptedly distributed in the first window layer, and for example, when the first window layer is analyzed by SIMS, a signal of the third dopant can be obtained at each depth position in the first window layer. In one embodiment, the doping concentration of the second dopant in the second confinement layer 116 may be slightly smaller than the doping concentration of the second dopant in the second coating layer 119. In one embodiment, the doping concentration of the third dopant in the first window layer may be greater than the doping concentration of the third dopant in the first cladding layer 118. In one embodiment, the first dopant and the third dopant may be present simultaneously at the interface between the first window layer and the first cladding layer 118.

[0026] The first electrode 110 and the second electrode 112 are used for electrically connecting with an external power source. The materials of the first electrode 110 and the second electrode 112 may be the same or different, for example, each includes a metal oxide material, a metal, or an alloy. The metal oxide material includes ITO, InO, SnO, CTO, ATO, AZO, ZTO, GZO, IWO, ZnO, IZO, etc. The metal may be, for example, Ge, Be, Zn, Au, Pt, Ti, Al, Ni, Cu, etc. The alloy may include at least two selected from the group consisting of these metals, for example, GeAuNi, BeAu, GeAu, ZnAu, etc. As shown in FIG. 1A, the first electrode 110 may include an electrode pad 110a and an extended electrode 110b connected to the electrode pad 110a. In this embodiment, the extended electrode 110b includes a first extended portion 110b1 and a second extended portion 110b2. The first extending portion 110b1 may be in direct contact with the electrode pad 110a, and the second extending portion 110b2 may be in direct contact with the first extending portion 110b1 and extend in a direction perpendicular to the first extending portion 110b1. In one embodiment, the semiconductor device 10 may have only the electrode pad 110a, but is not limited thereto.

[0027] 1D is a diagram showing a cross-sectional structure of a semiconductor device 20 in an embodiment of the present invention. The main difference between the semiconductor device 20 of this embodiment and the semiconductor device 10 is that the semiconductor device 20 further includes an insulating layer 120, a conductive layer 122, a reflective layer 124, and a junction structure 128. The insulating layer 120, the conductive layer 122, the reflective layer 124, and the junction structure 128 are located between the epitaxial structure 102 and the base 100. In this embodiment, the insulating layer 120 contacts the second semiconductor structure 106, and the first electrode 110 is located on the first semiconductor structure 104 and contacts and electrically connects with the first semiconductor structure 104. The conductive layer 122 covers the insulating layer 120, the reflective layer 124 covers the conductive layer 122, and the junction structure 128 is located between the base 100 and the reflective layer 124.

[0028] The insulating layer 120 may be a patterned layer of dielectric material, for example an insulating material with a refractive index less than 2, such as SiN. x , AlOx , SiO x , MgF x 1D, the insulating layer 120 may include a plurality of pores 126, the conductive layer 122 may cover the insulating layer 120 and fill the pores 126, and the conductive layer 122 and the epitaxial structure 102 may form contact areas at the pores 126. This allows the conductive layer 122 to be in electrical contact with the epitaxial structure 102. The conductive layer 122 may include a metal or a metal oxide. The metal may include Ag, Ge, Au, Ni, or a combination thereof. The metal oxide may include ITO, InO, SnO, CTO, ATO, AZO, ZTO, GZO, IWO, ZnO, IZO, or a combination of these materials.

[0029] The reflective layer 124 can reflect the light beam emitted from the active region 108 and emit it out of the semiconductor device 20 toward the first electrode 110. The reflective layer 124 may include a semiconductor material, a metal, or an alloy. The semiconductor material may include a group 3, 5 semiconductor material, for example, a binary, ternary, or quaternary group 3, 5 semiconductor material. The metal may include, but is not limited to, Cu, Al, Sn, Au, Ag, Pb, Ti, Ni, Pt, W, etc. The alloy may include at least two selected from the group consisting of these metals. In one embodiment, the reflective layer 124 may include a distributed Bragg reflector structure (DBR). The Bragg reflector structure may be formed by stacking two or more semiconductor materials with different refractive indexes, for example, AlAs / GaAs, AlGaAs / GaAs, or InGaP / GaAs.

[0030] The junction structure 128 is connected to the base 100 and the reflective layer 124. In an embodiment, the junction structure 128 may be a single layer or multiple layers (not shown). The material of the junction structure 128 may include a transparent conductive material, a metal, or an alloy. The transparent conductive material may include, but is not limited to, ITO, InO, SnO, CTO, ATO, AZO, ZTO, GZO, ZnO, GaP, ICO, IWO, ITiO, IZO, IGO, GAZO, graphene, or a combination of these materials. The metal may include, but is not limited to, Cu, Al, Sn, Au, Ag, Pb, Ti, Ni, Pt, W, etc. The alloy may include at least two selected from the group consisting of these metals.

[0031] 1D shows that the first semiconductor structure 104 is located above the active region 108 and the second semiconductor structure 106 is located below the active region 108, but in another embodiment, the first semiconductor structure 104 is located below the active region 108 and in contact with the insulating layer 120 and the conductive layer 122, and the second semiconductor structure 106 is located above the active region 108 and in contact with the first electrode 110. Note that the positions, relative relationships, material components, and other details of the other layers or structures in this embodiment, as well as modifications of the structures, are all described in detail in the previous embodiment, and therefore will not be described in detail here.

[0032] FIG. 1E is a top view of a semiconductor device 40 according to an embodiment of the present invention. FIG. 1F is a diagram showing a cross-sectional structure of the semiconductor device 40 along line Y-Y' in FIG. 1E. The main difference between the semiconductor device 40 of this embodiment and the semiconductor device 10 is that the first electrode 110 and the second electrode 112 in the semiconductor device 40 are located on the same side of the base 100, while the first electrode 110 and the second electrode 112 in the semiconductor device 10 are located on both sides of the base 100, respectively. In this embodiment, the epitaxial structure 102 is located on the base 100, and the first electrode 110 and the second electrode 112 are located on the epitaxial structure 102. The first electrode 110 can be in contact with the second semiconductor structure 106, and the second electrode 112 can be in contact with the first semiconductor structure 104. In this embodiment, the first semiconductor structure 104 and the active region 108 have a width smaller than the width of the second semiconductor structure 106. Although FIG. 1F shows that the first semiconductor structure 104 is located above the active region 108 and the second semiconductor structure 106 is located below the active region 108, in another embodiment, the first semiconductor structure 104 may be located below the active region 108 and in contact with the base 100, and the second semiconductor structure 106 may be located above the active region 108 and in contact with the second electrode 112. Similarly, the insulating layer 120, the conductive layer 122, the reflective layer 124, or the junction structure 128 described in the previous embodiment may be located between the second semiconductor structure 106 and the base 100. The junction structure 128 may include a conductive or non-conductive material. Note that the contents such as the positions, relative relationships, material components, etc. of each of the other layers or structures in this embodiment and the modifications of the structures are all described in detail in the previous embodiment, so detailed descriptions thereof will be omitted here.

[0033] 2A is a diagram showing the relationship between current density and internal quantum efficiency (IQE) of a semiconductor device in an embodiment of the present invention. Specifically, FIG. 2A shows IQE curves obtained by simulating the semiconductor device using simulation software APSYS (Crosslight Software Inc.). The semiconductor device corresponding to curve C1 has a structure in which the active region 108 is not doped, and the semiconductor device corresponding to curve C2 has a structure in which the active region 108 is doped with about 1×10 16 / cm 3 As shown in FIG. 2A, both structures have a first dopant with a doping concentration of about 30 A / cm. 2 The maximum IQE value is obtained when the 2 Within the low current density range below, a semiconductor device having a first dopant in the active region 108 has a relatively high IQE value as compared to a semiconductor device that is not doped in the active region 108. Thus, the presence of the first dopant in the active region can help improve the IQE value, especially in low current density environments (e.g., below 1 A / cm 2 (see below), which can significantly improve the IQE value.

[0034] 2B is a graph showing the relationship between current density and external quantum efficiency (EQE) of a semiconductor device in an embodiment of the invention. The semiconductor device corresponding to curve F1 has an undoped structure in the active region 108, and the semiconductor device corresponding to curve F2 includes a structure having a first dopant in the active region 108. As shown in FIG. 2B, the current density of 1 A / cm 2 Within the low current density range below (e.g., 0.001 to 1 A / cm 2 ), a semiconductor device having a first dopant in the active region 108 has a relatively high external quantum efficiency.

[0035] 2C is a diagram showing the relationship between the R value and the relative EQE ratio of the semiconductor device according to the embodiment of the present invention. The semiconductor device corresponding to the curve G1 has an undoped structure in the active region 108, and the semiconductor device corresponding to the curve G2 includes a structure having a first dopant in the active region 108. The semiconductor devices corresponding to the curves G1 and G2 have a 0.001 A / cm 2 ~100A / cm 2 When the current density is measured within a range of 100 Hz, the semiconductor device has a maximum external quantum efficiency E max %, and the current density corresponding to this maximum external quantum efficiency is J_E max A / cm 2 In Figure 2C, R value = 1 means that the current density is 1*(J Emax )A / cm2 and FIG. 2C corresponds to the result that max )A / cm 2 ~1*(J_E max )A / cm 2 In other words, the relative EQE ratio is the ratio of the current density of max % was set to 100%, and the EQE values ​​obtained under different current densities were max %. As shown in FIG. 2C, the semiconductor device having the first dopant in the active region 108 has a J_E max All of them have relatively good EQE within the current density range lower than 0.001*(J_E max )A / cm 2 3. Under a current density of 100 MHz, the semiconductor device having the first dopant in the active region 108 performs much better than the semiconductor device having no doping in the active region 108 .

[0036] FIG. 2D is a diagram showing the relationship between current density and external quantum efficiency (EQE) of a semiconductor device in an embodiment of the present invention. The difference between the semiconductor devices of curves Q1 to Q3 is the aluminum content (percentage) in the barrier layer. In the semiconductor device corresponding to curve Q1, the aluminum content (percentage) of each barrier layer 108a is about 17.5%, in the semiconductor device corresponding to curve Q2, the aluminum content (percentage) of each barrier layer 108a is about 35%, and in the semiconductor device corresponding to curve Q3, the aluminum content (percentage) of each barrier layer 108a is about 50%. As can be seen from FIG. 2D, when the current density is 1 A / cm 2 When the aluminum content (percentage) of the barrier layer 108a is less than 100%, increasing the aluminum content (percentage) of the barrier layer 108a can help improve the EQE of the semiconductor device.

[0037] 3 is a diagram showing the relationship between the concentration of an element in a part of a region in a semiconductor device and the depth in an embodiment of the present invention. Specifically, FIG. 3 shows the result of analyzing a part of the structure of a semiconductor device 10 including a first dopant and a second dopant by SIMS. As shown in FIG. 3, the semiconductor device 10 of this embodiment includes, in order, a second cladding layer 119, a second confinement layer 116, an active region 108, a first confinement layer 114, a first cladding layer 118, and a first window layer 130. In this embodiment, the second cladding layer 119 includes AlInP, the second confinement layer 116 includes AlGaInP, the active region 108 includes 16 pairs of semiconductor stack layers 108c (16 barrier layers 108a and 16 well layers 108b), and the barrier layers 108a and the well layers 108b all include AlGaInP, the first confinement layer 114 includes AlGaInP, the first cladding layer 118 includes AlInP, and the first window layer 130 includes AlGaInP. The curve D1 in Fig. 3 represents the dopant concentration of the first dopant, and the curve D2 represents the dopant concentration of the second dopant. In this embodiment, the first dopant is distributed at least in the range from the first window layer 130 to the second confinement layer 116, and the second dopant is mainly distributed in the second cladding layer 119 and the second confinement layer 116. As shown in Fig. 3, the doping concentration of the second dopant in the second confinement layer 116 is obviously lower than the doping concentration of the second dopant in the second cladding layer 119.

[0038] 4 is a diagram showing the relationship between current density and internal quantum efficiency (IQE) of a semiconductor device according to an embodiment of the present invention. Specifically, FIG. 4 shows IQE curves obtained by simulating the semiconductor device using simulation software APSYS (Crosslight Software Inc.). The difference between the semiconductor devices is the first dopant having different doping concentrations in the active region 108. In detail, the semiconductor device corresponding to curve E0 has a structure in which the active region 108 is not doped, and the curves E1 to E5 each have a doping concentration of the first dopant of about 1×10 in the active region 108. 16 / cm 3 , 5x1016 / cm 3 , 1x10 17 / cm 3 , 5x10 17 / cm 3 , 1x10 18 / cm 3 As shown in FIG. 4, in this embodiment, the current is 1 A / cm 2 At a low current density of about 1x10 16 / cm 3 ~1x10 17 / cm 3 The IQE of the structures in the range (curves E1-E3) are all significantly better than the structure (curve E0) that is undoped in the active region 108. In this example, the doping concentration of the first dopant is 1×10 17 / cm 3 When the current increases to 1A / cm 2 The maximum IQE value is achieved when the doping concentration of the first dopant is 5x10 17 / cm 3 or 1x10 18 / cm 3 4, in this embodiment, the presence of a first dopant in a particular doping concentration range in the active region 108 allows the IQE to be increased to 1 A / cm2 while maintaining maximum quantum efficiency. 2 It is possible to improve the quantum efficiency in the following environments.

[0039] 5A is a diagram showing a cross-sectional structure of a semiconductor assembly 200 in an embodiment of the present invention. As shown in FIG. 5A, the semiconductor assembly 200 includes a mounting substrate 22, an adhesive layer 24 located on the mounting substrate 22, and a plurality of semiconductor elements 10' located on the adhesive layer 24. In this embodiment, the semiconductor element 10' does not include a base, and the semiconductor element 10' includes the epitaxial structure 102 described in each embodiment, and a first electrode 110 and a second electrode 112 located on both sides of the epitaxial structure 102, respectively. The mounting substrate 22 is in contact with the semiconductor element 10' through the adhesive layer 24. The mounting substrate 22 may include a conductive or insulating material, such as sapphire, glass, GaAs, InP, SiC, GaP, ZnO, GaN, AlN, Ge, Si, etc. The material of the adhesive layer 24 may include a polymer material, such as benzocyclobutene (BCB), epoxy resin, polyimide, silicone resin, or SOG (Spin On Glass). Note that the positions, relative relationships, material components, and other details of each layer or structure in this embodiment and modifications of the structure are described in detail in the previous embodiment, and therefore will not be described here in detail.

[0040] FIG. 5B is a cross-sectional view of a semiconductor assembly 400 according to an embodiment of the present invention. As shown in FIG. 5B, the semiconductor assembly 400 includes a mounting substrate 42, an adhesive layer 44 disposed on the mounting substrate 42, and a plurality of semiconductor elements 40' disposed on the adhesive layer 44. In this embodiment, the semiconductor element 40' does not include a base, and the semiconductor element 40' may include the epitaxial structure 102 described in the previous embodiment, and the first electrode 110 and the second electrode 112 disposed on one side of the epitaxial structure 102. The semiconductor element 40' further includes a first contact structure 140a disposed between the first electrode 110 and the epitaxial structure 102, and a second contact structure 140b disposed between the second electrode 112 and the epitaxial structure 102. The first contact structure 140a and the second contact structure 140b may each include a group 3 or 5 semiconductor material, a metal, or an alloy. The semiconductor device 40' further includes a dielectric material layer 160 covering the epitaxial structure 102 and having an opening. As shown in FIG. 5B, the first electrode 110 and the second electrode 112 can be electrically connected to the first contact structure 140a and the second contact structure 140b by filling the opening of the dielectric material layer 160. For the mounting substrate 42 and the adhesive layer 44, the description of the mounting substrate 22 and the adhesive layer 24 can be referred to. In addition, the contents such as the positions, relative relationships, and material components of each of the other layers or structures in this embodiment and the modified structures are described in detail in the previous embodiment, so detailed description thereof will be omitted here.

[0041] FIG. 6 is a cross-sectional view of a semiconductor assembly 600 according to an embodiment of the present invention. Referring to FIG. 6, the semiconductor assembly 600 includes a semiconductor device 60, a package substrate 61, a carrier 63, a bonding line 65, a contact structure 66, and a package layer 68. The package substrate 61 may include a ceramic or glass material. The package substrate 61 has a plurality of through holes 62. The through holes 62 may be filled with a conductive material, such as a metal, to facilitate electrical conduction and / or heat dissipation. The carrier 63 is located on one surface of the package substrate 61 and may include a conductive material, such as a metal. The contact structure 66 is located on the other surface of the package substrate 61. In this embodiment, the contact structure 66 includes a first contact pad 66a and a second contact pad 66b, and the first contact pad 66a and the second contact pad 66b may be electrically connected to the carrier 63 through the through holes 62. In one embodiment, the contact structure 66 further includes a thermal pad (not shown), for example, located between the first contact pad 66a and the second contact pad 66b.

[0042] The semiconductor element 60 is located on a carrier 63. The semiconductor element 60 may be a semiconductor element (e.g., semiconductor elements 10, 10', 20, 40, 40') according to any embodiment of the present invention. In this embodiment, the carrier 63 includes a first portion 63a and a second portion 63b, and the semiconductor element 60 is electrically connected to the second portion 63b of the carrier 63 by a bonding line 65. The material of the bonding line 65 may include a metal, such as gold, silver, copper, aluminum, or an alloy containing at least one of these elements. The package layer 68 has an effect of covering the semiconductor element 60 and protecting the semiconductor element 60. Specifically, the package layer 68 may include a resin material, such as epoxy resin, silicone resin, etc. The package layer 68 may further include a plurality of wavelength conversion particles (not shown) for converting the first light emitted from the semiconductor element 60 into a second light. The wavelength of the second light is longer than the wavelength of the first light.

[0043] FIG. 7 is a top view of a semiconductor assembly 800 in an embodiment of the present invention. The semiconductor assembly 800 in this embodiment is, for example, a display unit. As shown in FIG. 7, the semiconductor assembly 800 includes a carrier 80 and a plurality of pixel units 82 located on the carrier 80. The plurality of pixel units 82 are arranged in an array in a direction parallel to the x-axis and y-axis, and are arranged with a distance d in a direction parallel to the x-axis. The number of pixel units 82 may be adjusted according to needs. For example, in one embodiment, the plurality of pixel units 82 included in the semiconductor assembly 800 can provide a resolution of 1920x1080 pixels. In one embodiment, the distance d is less than 1.4 mm, for example, the distance d is between 0.2 mm and 1.3 mm, and is, for example, 0.75 mm, 0.8 mm, 1 mm, and 1.25 mm. As shown in FIG. 7, each pixel unit 82 includes a first semiconductor element 84, a second semiconductor element 86, and a third semiconductor element 88 arranged in a direction parallel to the y-axis. One or more of the first semiconductor element 84, the second semiconductor element 86 and the third semiconductor element 88 may be the semiconductor element (e.g., semiconductor element 10, 10', 20, 40, 40') according to any embodiment of the present invention. In one embodiment, the first semiconductor element 84, the second semiconductor element 86 and the third semiconductor element 88 are all light-emitting elements, and can respectively emit red light, green light and blue light. In one embodiment, the arrangement order of these light-emitting elements may also be adjusted according to needs, for example, the first semiconductor element 84, the second semiconductor element 86 and the third semiconductor element 88 may respectively emit red light, blue light and green light. Each pixel unit 82 is electrically connected to a circuit (not shown) on the surface of the carrier 80, so that the light-emitting element therein can receive an external signal and emit light according to the external signal. The carrier 80 may be a single-layer or multi-layer structure. The material of the carrier 80 may include Polyester, Polyimide (PI), Bismaleimide Triazine (BT resin), Polytetrafluoroethylene (PTFE resin), Phenol resins (PF), or Fiberglass Epoxy (FR4).In one embodiment, the carrier 80 is capable of bending, for example, withstanding a radius of curvature of less than 50 mm, for example 25 mm or 32 mm.

[0044] As can be seen from the above, the length L0 and width W0 of the semiconductor element are within the aforementioned range (500 μm or less), and the operating current of the semiconductor element is between 0.001 mA and 100 mA and / or the current density is 0.001 A / cm 2 and 100A / cm 2 between, the number of pairs of semiconductor stack layers 108c in the active region 108, and / or the first aluminum content (percentage), and / or the thicknesses of the barrier layers 108a and well layers 108b, and / or the thicknesses of the first or second confinement layers, and / or the aluminum content of the first or second confinement layers, and / or the concentration of the first dopant in the active region 108, etc. can all affect the quantum efficiency of the semiconductor device.

[0045] Specifically, in one embodiment, the operating current is between 0.01 mA and 5 mA and / or the current density is 0.01 A / cm 2 and 5A / cm 2 and (vi) an epitaxial structure or semiconductor device that satisfies any one or any combination of two or more of the following conditions (i)-(vi) has a relatively high quantum efficiency, i.e., (i) the first aluminum content (percentage) is 25% or more; (ii) the ratio of the first thickness to the second thickness is in the range of 2:1 to 40:1; (iii) the number of pairs of the semiconductor stack layers 108c in the active region 108 is 10 pairs or less; (iv) the third / fourth aluminum content (percentage) is greater than the second aluminum content (percentage); (v) the third thickness is greater than or equal to the second thickness and the fourth thickness is greater than or equal to the second thickness; and (vi) the active region 108 includes a first dopant. Furthermore, the length L0 of the semiconductor device 10 is less than 200 μm, the width W0 is less than 200 μm, and / or the top surface area of ​​the epitaxial structure 102 is less than 50 μm. 2 ~2000μm 2When the range is within the range, an epitaxial structure or a semiconductor device that satisfies any one or any combination of two or more of the above conditions (i) to (vi) is more remarkable in terms of improving quantum efficiency.

[0046] According to one embodiment, under different current densities (e.g., 0.001 to 100 A / cm 2 For example, 0.001 to 0.01, 0.1, 1, 5, 10 or 50 A / cm 2 When measuring the external quantum efficiency (e.g., in %) of an epitaxial structure or a semiconductor element, an epitaxial structure or a semiconductor element that satisfies any one or any combination of two or more of the above conditions (i) to (vi) has a maximum external quantum efficiency E 1max %, and the maximum external quantum efficiency E 1max The current density corresponding to J_E 1max A / cm 2 The external quantum efficiency can be obtained by measuring, for example, an integrating sphere system. 0.1*(J_E 1max )A / cm 2 Under a current density of E 1max % or more, and preferably has an external quantum efficiency of E 1max % or more. External quantum efficiency of 85% or 90% or more. 1max )A / cm 2 Under a current density of E 1max % or more, and preferably has an external quantum efficiency of E 1max % or more. External quantum efficiency of 0.001*(J_E 1max )A / cm 2 Under a current density of E 1max % or more, and preferably has an external quantum efficiency of E 1max % of the external quantum efficiency may be 20%, 25%, 30% or 40% or more.

[0047] According to one embodiment, when measuring the external quantum efficiency (e.g., in %) of an epitaxial structure or a semiconductor device under different current intensities (e.g., in the range of 0.001 to 100 mA, e.g., 0.001 to 0.01, 0.1, 1, 5, 10, 20, 30, 40 or 50 mA), an epitaxial structure or a semiconductor device that satisfies any one or any combination of two or more of the above conditions (i) to (vi) has a maximum external quantum efficiency E 2max %, and the maximum external quantum efficiency E 2max The current density corresponding to % is C_E 2max The external quantum efficiency is defined as the current per unit area (mA). The external quantum efficiency can be measured, for example, by an integrating sphere system. E 2max % is 80% or more, and preferably, E 2max The percentage may be 85% or 90% or more. 0.01*(C_E 2max ) mA current, the epitaxial structure or semiconductor device has a 2max % or more, and preferably has an external quantum efficiency of E 2max % of the external quantum efficiency of 60% or 70% or more. 2max Under a current of E 2max % or more, and preferably has an external quantum efficiency of E 2max % of the external quantum efficiency may be 20%, 25%, 30% or 40% or more.

[0048] According to an embodiment, an epitaxial structure or a semiconductor device satisfying any one or any combination of two or more of the above conditions (i) to (vi) has a first light output value O1 (e.g., in lumens (lm)) under a first temperature and a second light output value O2 under a second temperature, where the second temperature is lower than the first temperature. The first temperature and the second temperature are, for example, different environmental temperatures for testing or operating the epitaxial structure and / or the semiconductor device. The ratio of the first light output value O1 to the second light output value O2 may be 30% or more, for example, 40%, 50%, 60%, 70%, 80%, 90%. The ratio of the first light output value O1 to the second light output value O2 may be 100% or less. The difference between the first temperature and the second temperature may be 30°C or more, for example, about 40°C, 50°C, 60°C, 70°C, or 80°C. In one embodiment, the second temperature is room temperature (e.g., about 25° C.), and the first temperature is about 85° C. That is, the optical output value of an epitaxial structure or a semiconductor device that satisfies any one or any combination of two or more of the above conditions (i) to (vi) is relatively less affected by changes in temperature and can have a relatively low temperature dependence.

[0049] In view of the above, according to the embodiments of the present invention, an epitaxial structure, a semiconductor device, or a semiconductor assembly can be provided, which can further improve characteristics such as internal or external quantum efficiency, particularly at low currents (e.g., 10 mA or less) or low current densities (e.g., 1 A / cm 2The epitaxial structure, semiconductor element, and semiconductor assembly of the present invention can be applied to cases where operation and / or miniaturization (such as those described below) is required. Specifically, the epitaxial structure, semiconductor element, and semiconductor assembly of the present invention can be improved in terms of surface recombination velocity (SRV), temperature dependency, current spreading, and operation efficiency droop, etc. Specifically, the epitaxial structure, semiconductor element, and semiconductor assembly of the present invention can be applied to products in the fields of lighting, medicine, display, communication, sensing, power supply systems, etc., for example, lighting fixtures, monitors, mobile phones, tablet computers, automotive instrument panels, televisions, computers, wearable devices (such as watches, bracelets, necklaces, etc.), traffic lights, outdoor displays, medical equipment, etc.

[0050] Although the preferred embodiment of the present invention has been described above, the present invention is not limited to this embodiment, and any modification to the present invention falls within the technical scope of the present invention as long as it does not depart from the spirit of the present invention. [Explanation of symbols]

[0051] 10, 10', 20, 40, 40': semiconductor element 22, 42: mounting substrate 24, 44: Adhesive layer 200, 400, 600, 800: Semiconductor Assembly 61: Package substrate 62:Through hole 63: Carrier 63a:First part 63b:Second part 65:Join line 66: Contact structure 66a: First contact pad 66b: Second contact pad 68: Packaging layer 80: Career 82: Pixel unit 84: First semiconductor element 86: Second semiconductor element 88: Third semiconductor element 100: Bass 102: Epitaxial structure 104: First semiconductor structure 106: Second semiconductor structure 108: Active area 108a: Barrier layer 108b: Well layer 108c: Semiconductor stack layer 110:First electrode 110a: Electrode pad 110b: Stretched electrode 110b1: First extension part 110b2:Second extension part 112:Second electrode 114: First confinement layer 116: Second Confinement Layer 118:First coating layer 119:Second coating layer 130: First window layer 140a: First contact structure 140b:Second contact structure 160: Dielectric material layer 120: Insulating layer 122: Conductive layer 124: Reflective layer 126: Pore 128:Joint structure R:Region L0: Length W0: Width C1, C2, D1, D2, E0, E1, E2, E3, E4, E5, F1, F2, G1, G2, Q1, Q2, Q3: Curve X-X', Y-Y': Lines

Claims

1. A semiconductor device, a first semiconductor structure comprising a first confinement layer and a first cladding layer underlying the first confinement layer, the first confinement layer comprising a first dopant and the first cladding layer comprising the first dopant; a second semiconductor structure overlying the first semiconductor structure and including a second confinement layer and a second cladding layer overlying the second confinement layer, the second confinement layer including a second dopant different from the first dopant and the second cladding layer including the second dopant; and an active region located between the first semiconductor structure and the second semiconductor structure; the active region includes a plurality of pairs of semiconductor stack layers, each of the semiconductor stack layers including a barrier layer and a well layer, and the active region includes the first dopant; the first confinement layer and the second confinement layer are both in direct contact with the active region; The active region does not contain N, the first containment layer is adjacent to the first coating layer; the first dopant is distributed continuously and uninterruptedly from the first coating layer to the active region, a doping concentration of the first dopant in the first coating layer is higher than a doping concentration of the first dopant in the active region, the first dopant has a doping concentration of 1×10 16 / cm 3 or more in the first confinement layer and the active region, and a doping concentration of the first dopant in the first coating layer is in the range of 5×10 17 / cm 3 to 1×10 19 / cm 3 ; a doping concentration of the first dopant in the active region is less than a doping concentration of the first dopant in the first confinement layer, and a doping concentration of the first dopant in the first confinement layer is less than a doping concentration of the first dopant in the first cladding layer.

2. 2. The semiconductor device of claim 1 , A semiconductor element, wherein the semiconductor element has a rectangular shape in a top view, the rectangle having a length and a width, the length and the width each being less than or equal to 500 μm and greater than 1 μm.

3. 2. The semiconductor device of claim 1 , the barrier layer has a first aluminum content (percentage) and the well layer has a second aluminum content (percentage); the barrier layer has a first thickness and the well layer has a second thickness; The first aluminum content (percentage) is greater than the second aluminum content (percentage), and the first thickness is greater than the second thickness.

4. 4. The semiconductor device according to claim 3, the first containment layer having a third aluminum content (percentage), and the second containment layer having a fourth aluminum content (percentage); The third aluminum content (percentage) and the fourth aluminum content (percentage) are both greater than the second aluminum content (percentage).

5. 4. The semiconductor device according to claim 3, the first containment layer has a third thickness and the second containment layer has a fourth thickness; the third thickness is greater than or equal to the second thickness, and the fourth thickness is greater than or equal to the second thickness.

6. 4. The semiconductor device according to claim 3, The first aluminum content (percentage) is 25% or more.

7. 2. The semiconductor device of claim 1 , The first coating layer further comprises a third dopant different from the first dopant and the second dopant.

8. 2. The semiconductor device of claim 1 , The semiconductor device, wherein the first coating layer or the second coating layer comprises a ternary compound semiconductor.

9. 2. The semiconductor device of claim 1 , The first dopant comprises C, Zn, Si, Ge, Sn, Se, Mg or Te.

10. 2. The semiconductor device of claim 1 , the second containment layer includes the first dopant, and the first dopant is distributed continuously and uninterruptedly from the first coating layer to the second containment layer; A semiconductor device, wherein a doping concentration of the first dopant in the second confinement layer is less than a doping concentration of the first dopant in the first cladding layer.

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