Imaging device, electronic device, and imaging method

Abstract

[Problem] To improve sensitivity, reduce a dark current, and reduce power consumption. [Solution] This imaging device comprises: a photoelectric conversion unit that has a plurality of photoelectric conversion elements, each of which photoelectrically converts incident light to generate an electric signal; a detection unit that outputs a detection signal indicating whether or not the amount of a change in the electric signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generation unit that generates a pixel signal on the basis of the electric signal; a transfer control unit that controls the transfer of the electric signal to the pixel signal generation unit; and an analog-to-digital converter that converts the pixel signal into a digital signal. A low-potential-side reference potential of the photoelectric conversion unit, a low-potential-side reference potential of the detection unit, a low-potential-side reference potential of the pixel signal generation unit, a low-potential-side reference potential of the analog-to-digital converter, and an off potential of the transfer control unit include three or more potentials having different potential levels.

Description

[Technical field]

[0001] The present disclosure relates to an imaging device, an electronic device, and an imaging method. [Background technology]

[0002] Conventional imaging devices generally use a synchronous imaging element that captures image data (frames) in synchronization with a synchronization signal such as a vertical synchronization signal. This type of synchronous imaging element can only acquire image data at a synchronization signal period (e.g., 1 / 60 seconds), and is therefore not suitable for applications in which image data must be acquired at higher speeds. In response to this, an asynchronous imaging element has been proposed in which an event detection circuit is provided for each pixel that detects in real time, for each pixel address, that the amount of light at that pixel exceeds a threshold value as an event (see, for example, Patent Document 1). In this imaging element, a photodiode and multiple transistors for detecting an event are arranged for each pixel. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2016-533140 Summary of the Invention [Problem to be solved by the invention]

[0004] The above-mentioned asynchronous imaging element can generate and output data at a much higher speed than the synchronous imaging element. Therefore, for example, in the field of traffic, the process of image recognition of people and obstacles can be performed at a high speed, thereby improving safety. However, when the reverse bias of the photodiode is lowered due to voltage fluctuations such as a drop in the power supply voltage or an increase in the ground voltage, the sensitivity of the photodiode may decrease and the dark current may increase. Therefore, there is a problem that the signal quality may decrease due to the lack of sensitivity and the dark current. If the area of ​​the photodiode is increased, the sensitivity can be improved and the dark current can be reduced, but this is not desirable because the number of pixels per unit area is reduced. In addition, the sensitivity can be improved and the dark current can be reduced by sufficiently increasing the power supply voltage, but this is not desirable because it increases the power consumption.

[0005] The present disclosure provides an imaging device, electronic device, and imaging method that are capable of improving sensitivity, reducing dark current, and reducing power consumption. [Means for solving the problem]

[0006] In order to solve the above problems, according to the present disclosure, a photoelectric conversion unit including a plurality of photoelectric conversion elements each configured to perform photoelectric conversion of incident light to generate an electrical signal; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; an imaging device, wherein the low potential side reference potential of the photoelectric conversion unit, the low potential side reference potential of the detection unit, the low potential side reference potential of the pixel signal generation unit, the low potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit include three or more potentials each having a different potential level.

[0007] The low-potential reference potential of the photoelectric conversion unit may be lower in potential level than the low-potential reference potential of the detection unit.

[0008] The low-potential reference potential of the photoelectric conversion unit may be higher in potential level than the off-potential of the transfer control unit.

[0009] The low-potential reference potential of the photoelectric conversion unit may have a potential level lower than a low-potential reference potential of at least one of the pixel signal generation unit and the analog-to-digital converter.

[0010] At least one of the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit may be a ground potential, and at least one of the others may be a first reference potential having a lower potential level than the ground potential, and at least one of the others may be a second reference potential having a lower potential level than the first reference potential.

[0011] a low-potential side reference potential of the photoelectric conversion unit is the second reference potential, a low-potential side reference potential of the detection unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential, The off potential of the transfer control unit may be the second reference potential.

[0012] The ground potential is 0V. the first reference potential is a negative potential, The second reference potential may be a negative potential having a lower potential level than the first reference potential.

[0013] The photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter may have substantially the same low-potential reference potential.

[0014] At least one of the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit may be a ground potential, and at least one of the others may be a first reference potential having a higher potential level than the ground potential, and at least one of the others may be a second reference potential having a lower potential level than the ground potential.

[0015] a low-potential side reference potential of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential, a low-potential side reference potential of the detection unit is the first reference potential, The off potential of the transfer control unit may be the second reference potential.

[0016] The ground potential is 0V. the first reference potential is a positive potential, The second reference potential may be a negative potential.

[0017] According to the present disclosure, a photoelectric conversion unit having a plurality of photoelectric conversion elements each of which performs photoelectric conversion on incident light to generate an electrical signal; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; and a potential selection section that switches a low potential side reference potential of the photoelectric conversion section.

[0018] the analog-to-digital converter converts the pixel signal into the digital signal when the detection unit detects that the amount of change has exceeded the predetermined threshold; The potential selection unit may select a first reference potential during a period in which the detection unit detects whether the amount of change has exceeded the predetermined threshold, and may select a second reference potential having a higher potential level than the first reference potential during a period in which the analog-to-digital converter converts the pixel signal into the digital signal.

[0019] the first reference potential is a negative potential, The second reference potential may be a ground potential.

[0020] The low potential side reference potential of the photoelectric conversion unit, the low potential side reference potential of the detection unit, the low potential side reference potential of the pixel signal generation unit, the low potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit may include two or more potentials each having a different potential level.

[0021] a low-potential-side reference potential of the detection unit, a low-potential-side reference potential of the pixel signal generation unit, and a low-potential-side reference potential of the analog-to-digital converter are ground potentials; The off potential of the transfer control unit may be a negative potential.

[0022] The semiconductor memory device may further include a potential generating section that generates at least one of the first reference potential and the second reference potential.

[0023] At least the detection unit may be disposed on a second substrate that is stacked on a first substrate on which the photoelectric conversion unit is disposed.

[0024] A back gate of a transistor in the transfer control unit may be set to a potential at the same potential level as a low potential side reference potential of the photoelectric conversion unit.

[0025] According to another aspect of the present disclosure, an imaging device that outputs captured image data; a processor for performing a predetermined signal processing on the image data, The imaging device includes: a photoelectric conversion unit having a plurality of photoelectric conversion elements each of which converts incident light into an electric signal; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; An electronic device is provided, in which the low potential side reference potential of the photoelectric conversion unit, the low potential side reference potential of the detection unit, the low potential side reference potential of the pixel signal generation unit, the low potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit include three or more potentials each having a different potential level.

[0026] According to another aspect of the present disclosure, a method for detecting a light-transmitting state includes: performing photoelectric conversion on incident light by a plurality of photoelectric conversion elements to generate an electrical signal; outputting a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; transmitting said electrical signal; generating a pixel signal based on the transferred electrical signal; converting the pixel signal into a digital signal; The low-potential side reference potential during the photoelectric conversion, the low-potential side reference potential when outputting the detection signal, the low-potential side reference potential when generating the pixel signal, the low-potential side reference potential when converting the pixel signal to a digital signal, and the off-potential when transferring the electrical signal include three or more potentials with different potential levels, and an imaging method is provided in which these potentials are used to perform the steps of generating the electrical signal, outputting the detection signal, transferring the electrical signal, generating the pixel signal, and converting into the digital signal. [Brief description of the drawings]

[0027] [Figure 1]1 is a block diagram showing an example of the configuration of an imaging apparatus according to a first embodiment. [Diagram 2] FIG. 2 is a diagram showing an example of a layered structure of the solid-state imaging element according to the first embodiment. [Diagram 3] 1 is a block diagram showing an example of the configuration of a solid-state imaging element according to a first embodiment. [Figure 4] FIG. 2 is a block diagram showing a configuration example of a pixel array unit according to the first embodiment. [Diagram 5] FIG. 2 is a circuit diagram showing an example of the configuration of a pixel block according to the first embodiment. [Figure 6] FIG. 4 is a block diagram showing a first example of the configuration of an address event detection unit. [Figure 7] FIG. 2 is a circuit diagram showing a configuration example of a current-voltage conversion unit in the first embodiment. [Figure 8] FIG. 2 is a circuit diagram showing an example of the configuration of a subtractor and a quantizer according to the first embodiment. [Figure 9] FIG. 2 is a block diagram showing a configuration example of a column ADC according to the first embodiment. [Figure 10] 4 is a timing chart showing an example of the operation of the solid-state imaging element according to the first embodiment. [Figure 11] 5 is a flowchart showing an example of the operation of the solid-state imaging element according to the first embodiment. [Figure 12] 4 is a diagram showing low-potential side reference potentials and off potentials used by each unit in the image pickup device according to the first embodiment. [Figure 13A] 5 is a diagram showing an example of a potential level when a transfer transistor according to the first embodiment is turned off. FIG. [Figure 13B] 5 is a diagram showing an example of a potential level when a transfer transistor according to the first embodiment is turned on; FIG. [Figure 14] 13 is a diagram showing a low-potential side reference potential and an off potential used by each unit in an image pickup apparatus according to a second embodiment. [Figure 15A] FIG. 11 is a diagram showing an example of a potential level when a transfer transistor according to the second embodiment is turned off. [Figure 15B] FIG. 11 is a diagram showing an example of a potential level when a transfer transistor according to the second embodiment is turned on. [Figure 16] 13 is a diagram showing a low-potential side reference potential and an off potential used by each unit in an image pickup device according to a third embodiment. [Figure 17] FIG. 13 is a block diagram showing a second example of the configuration of the address event detection unit. [Figure 18] FIG. 1 is a block diagram showing an example of the configuration of a scanning type imaging apparatus. [Figure 19] 1 is a block diagram showing a schematic configuration example of a vehicle control system which is an example of a mobile object control system. [Figure 20] 4A and 4B are diagrams showing examples of installation positions of an imaging unit and an outside-vehicle information detection unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] Hereinafter, embodiments of an imaging device, an electronic device, and an imaging method will be described with reference to the drawings. The following description will focus on the main components of the imaging device and the electronic device, but the imaging device and the electronic device may include components and functions that are not shown or described. The following description does not exclude components and functions that are not shown or described.

[0029] <1. First embodiment> [Example of imaging device configuration] 1 is a block diagram showing an example configuration of an imaging device 100 according to a first embodiment of the present disclosure. The imaging device 100 includes an imaging lens 110, a solid-state imaging element 200, a recording unit 120, and a control unit 130. The imaging device 100 may be a camera mounted on an industrial robot, an in-vehicle camera, or the like.

[0030] The imaging lens 110 collects incident light and guides it to the solid-state imaging element 200. The solid-state imaging element 200 photoelectrically converts the incident light to capture image data. The solid-state imaging element 200 performs predetermined signal processing, such as image recognition processing, on the captured image data, and outputs data indicating the processing result and a detection signal of an address event to the recording unit 120 via a signal line 209. A method for generating the detection signal will be described later.

[0031] The recording section 120 records data from the solid-state imaging element 200. The control section 130 controls the solid-state imaging element 200 to capture image data.

[0032] [Example of the configuration of a solid-state imaging element] 2 is a diagram showing an example of a stacked structure of a solid-state imaging element 200 according to the first embodiment of the present disclosure. The solid-state imaging element 200 includes a detection chip 202 and a light-receiving chip 201 stacked on the detection chip 202. These chips are electrically connected through a connection portion such as a via. Note that, in addition to the via, the chips can also be connected by Cu-Cu bonding or bumps.

[0033] 3 is a block diagram showing an example of a configuration of the solid-state imaging device 200 according to the first embodiment of the present disclosure. The solid-state imaging device 200 includes a drive circuit 211, a signal processing unit 212, an arbiter 213, a column ADC 220, and a pixel array unit 300.

[0034] In the pixel array section 300, a plurality of pixels are arranged in a two-dimensional lattice. The pixel array section 300 is also divided into a plurality of pixel blocks, each of which consists of a predetermined number of pixels. Hereinafter, a set of pixels or pixel blocks arranged in the horizontal direction will be referred to as a "row," and a set of pixels or pixel blocks arranged in a direction perpendicular to the rows will be referred to as a "column."

[0035] Each pixel generates an analog signal of a voltage corresponding to the photocurrent as a pixel signal. Each pixel block detects the presence or absence of an address event based on whether the amount of change in the photocurrent exceeds a predetermined threshold. When an address event occurs, the pixel block outputs a request to the arbiter 213.

[0036] The drive circuit 211 drives each of the pixels to output a pixel signal to the column ADC 220 .

[0037] The arbiter 213 arbitrates requests from the pixel blocks and transmits responses to the pixel blocks based on the arbitration results. The pixel blocks that receive the responses supply detection signals indicating the detection results to the drive circuit 211 and the signal processing unit 212.

[0038] The column ADC 220 converts an analog pixel signal from each column of the pixel block into a digital signal. The column ADC 220 supplies the digital signal to the signal processing unit 212.

[0039] The signal processing unit 212 executes predetermined signal processing such as CDS (Correlated Double Sampling) processing and image recognition processing on the digital signal from the column ADC 220. The signal processing unit 212 supplies data indicating the processing result and a detection signal to the recording unit 120 via a signal line 209.

[0040] [Pixel array configuration example] 4 is a block diagram showing an example configuration of the pixel array section 300 according to the first embodiment of the present disclosure. The pixel array section 300 is divided into a plurality of pixel blocks 310. Each of the pixel blocks 310 has a plurality of pixels arranged in I rows and J columns (I and J are integers).

[0041] Moreover, the pixel block 310 includes a pixel signal generation unit 320, a plurality of light receiving units 330 arranged in I rows and J columns, and an address event detection unit 400. The plurality of light receiving units 330 in the pixel block 310 share the pixel signal generation unit 320 and the address event detection unit 400. A circuit consisting of the light receiving unit 330, pixel signal generation unit 320, and address event detection unit 400 at a certain coordinate functions as a pixel at that coordinate. Furthermore, a vertical signal line VSL is wired for each column of the pixel block 310. If the number of columns of the pixel block 310 is m (m is an integer), then m vertical signal lines VSL are arranged.

[0042] The light receiving section 330 photoelectrically converts incident light to generate a photocurrent. The light receiving section 330 supplies the photocurrent to either the pixel signal generating section 320 or the address event detecting section 400 under the control of the driving circuit 211.

[0043] The pixel signal generating unit 320 generates a pixel signal SIG, which is a voltage signal corresponding to a photocurrent. The pixel signal generating unit 320 supplies the generated pixel signal SIG to the column ADC 220 via a vertical signal line VSL.

[0044] The address event detection section 400 detects the presence or absence of an address event based on whether or not the amount of change in the photocurrent from each of the light receiving sections 330 has exceeded a predetermined threshold. This address event is, for example, comprised of an ON event indicating that the amount of change has exceeded an upper threshold, and an OFF event indicating that the amount of change has fallen below a lower threshold. The address event detection signal is, for example, comprised of one bit indicating the detection result of an ON event, and one bit indicating the detection result of an OFF event. The address event detection section 400 can also detect only ON events.

[0045] When an address event occurs, the address event detection unit 400 supplies a request for transmission of a detection signal to the arbiter 213. Then, upon receiving a response to the request from the arbiter 213, the address event detection unit 400 supplies a detection signal to the drive circuit 211 and the signal processing unit 212. Note that the address event detection unit 400 is an example of a detection unit described in the claims.

[0046] [Pixel block configuration example] 5 is a circuit diagram showing an example of a configuration of a pixel block 310 according to the first embodiment of the present disclosure. In the pixel block 310, the pixel signal generation unit 320 includes a reset transistor 321, an amplification transistor 322, a selection transistor 323, and a floating diffusion layer 324. A plurality of light receiving units 330 in the pixel block 310 are commonly connected to an address event detection unit 400 via a connection node 340.

[0047] Each of the light receiving sections 330 includes a transfer transistor 331, an OFG (Overflow Gate) transistor 332, and a photoelectric conversion element 333. If the number of pixels in the pixel block 310 is N (N is an integer), N transfer transistors 331, OFG transistors 332, and photoelectric conversion elements 333 are disposed. A transfer signal TRGn is supplied to the gate of the n-th (n is an integer from 1 to N) transfer transistor 331 in the pixel block 310 by the drive circuit 211. A control signal OFGn is supplied to the gate of the n-th OFG transistor 332 by the drive circuit 211. In this specification, the transfer transistor 331 and the OFG transistor 332 are collectively referred to as a transfer control section 335, and the photoelectric conversion element is referred to as a photoelectric conversion section 334.

[0048] Furthermore, for example, N-type Metal-Oxide-Semiconductor (MOS) transistors are used as the reset transistor 321, the amplification transistor 322, and the selection transistor 323. Similarly, N-type MOS transistors are used as the transfer transistor 331 and the OFG transistor 332.

[0049] Moreover, each of the photoelectric conversion elements 333 is disposed on the light receiving chip 201. All elements other than the photoelectric conversion elements 333 are disposed on the detection chip 202. A modified example in which some of the elements other than the photoelectric conversion elements 333 are disposed on the light receiving chip 201 is also conceivable.

[0050] The photoelectric conversion element 333 converts incident light into an electric charge and generates the electric charge. The transfer transistor 331 transfers the electric charge from the corresponding photoelectric conversion element 333 to the floating diffusion layer 324 in accordance with a transfer signal TRGn. The OFG transistor 332 supplies the electric signal generated by the corresponding photoelectric conversion element 333 to the connection node 340 in accordance with a control signal OFGn. Here, the supplied electric signal is a photocurrent consisting of an electric charge.

[0051] The floating diffusion layer 324 accumulates electric charges and generates a voltage according to the amount of accumulated electric charges. The reset transistor 321 initializes the amount of electric charges in the floating diffusion layer 324 in accordance with a reset signal from the drive circuit 211. The amplification transistor 322 amplifies the voltage of the floating diffusion layer 324. The selection transistor 323 outputs the amplified voltage signal as a pixel signal SIG to the column ADC 220 via the vertical signal line VSL in accordance with a selection signal SEL from the drive circuit 211.

[0052] When the control unit 130 instructs the drive circuit 211 to start detecting an address event, the drive circuit 211 drives the OFG transistors 332 of all pixels with a control signal OFGn to supply a photocurrent to the connection node 340. As a result, a current that is the sum of the photocurrents of all the light receiving units 330 in the pixel block 310 is supplied to the address event detection unit 400.

[0053] When an address event is detected in a pixel block 310, the drive circuit 211 turns off all of the OFG transistors 332 in that block to stop the supply of photocurrent to the address event detection unit 400. Next, the drive circuit 211 sequentially drives each of the transfer transistors 331 with a transfer signal TRGn to transfer the charge to the floating diffusion layer 324. As a result, pixel signals of each of the multiple pixels in the pixel block 310 are output sequentially.

[0054] In this way, the solid-state imaging device 200 outputs only pixel signals of the pixel block 310 in which an address event is detected to the column ADC 220. This makes it possible to reduce the power consumption of the solid-state imaging device 200 and the amount of image processing compared to a case in which pixel signals of all pixels are output regardless of the presence or absence of an address event.

[0055] Furthermore, since a plurality of pixels share the address event detection section 400, the circuit scale of the solid-state imaging device 200 can be reduced compared to a case in which the address event detection section 400 is provided for each pixel.

[0056] [Example of the configuration of the address event detection unit 400] 6 is a block diagram showing a first configuration example of the address event detection section 400 according to the first embodiment of the present disclosure. The address event detection section 400 includes a current-voltage conversion section 410, a buffer 420, a subtractor 430, a quantizer 440, and a transfer section 450.

[0057] The current-voltage converter 410 converts the photocurrent from the corresponding light receiving unit 330 into a voltage signal that is its logarithm. The current-voltage converter 410 supplies the voltage signal to a buffer 420.

[0058] The buffer 420 corrects the voltage signal from the current-voltage conversion unit 410. The buffer 420 outputs the corrected voltage signal to the subtractor 430.

[0059] The subtractor 430 reduces the level of the voltage signal from the buffer 420 in accordance with the row drive signal from the drive circuit 211. The subtractor 430 supplies the reduced voltage signal to the quantizer 440.

[0060] The quantizer 440 quantizes the voltage signal from the subtractor 430 into a digital signal and outputs it to the transfer section 450 as a detection signal.

[0061] The transfer unit 450 transfers the detection signal from the quantizer 440 to the signal processing unit 212 and the like. When an address event is detected, the transfer unit 450 supplies a request for transmission of the detection signal to the arbiter 213. Then, when the transfer unit 450 receives a response to the request from the arbiter 213, it supplies the detection signal to the drive circuit 211 and the signal processing unit 212.

[0062] [Example of current-voltage conversion section configuration] 7 is a circuit diagram showing a configuration example of the current-voltage conversion unit 410 in the first embodiment of the present disclosure. This current-voltage conversion unit 410 includes N-type transistors 411 and 413 and a P-type transistor 412. For example, MOS transistors are used as these transistors.

[0063] The source of N-type transistor 411 is connected to light receiving unit 330, and the drain is connected to a power supply terminal. P-type transistor 412 and N-type transistor 413 are connected in series between the power supply terminal and a ground terminal. A connection node between P-type transistor 412 and N-type transistor 413 is connected to the gate of N-type transistor 411 and the input terminal of buffer 420. A predetermined bias voltage Vbias is applied to the gate of P-type transistor 412.

[0064] The drains of N-type transistors 411 and 413 are connected to the power supply side, and such a circuit is called a source follower. The photocurrent from the light receiving unit 330 is converted into a logarithmic voltage signal by these two source followers connected in a loop. In addition, P-type transistor 412 supplies a constant current to N-type transistor 413.

[0065] [Example of subtractor and quantizer configuration] 8 is a circuit diagram showing an example configuration of the subtractor 430 and the quantizer 440 according to the first embodiment of the present disclosure. The subtractor 430 includes capacitors 431 and 433, an inverter 432, and a switch 434. The quantizer 440 includes a comparator 441.

[0066] One end of the capacitor 431 is connected to the output terminal of the buffer 420, and the other end is connected to the input terminal of the inverter 432. The capacitor 433 is connected in parallel to the inverter 432. The switch 434 opens and closes a path connecting both ends of the capacitor 433 in accordance with a row drive signal.

[0067] The inverter 432 inverts the voltage signal input via the capacitor 431. The inverter 432 outputs the inverted signal to the non-inverting input terminal (+) of the comparator 441.

[0068] When switch 434 is turned on, voltage signal Vinit is input to the buffer 420 side of capacitor 431, and the opposite side serves as a virtual ground terminal. For convenience, the potential of this virtual ground terminal is set to zero. At this time, potential Qinit stored in capacitor 431 is expressed by the following equation, assuming that the capacitance of capacitor 431 is C1. On the other hand, both ends of capacitor 433 are short-circuited, so the stored charge therein is zero. Qinit = C1 × Vinit (1)

[0069] Next, when the switch 434 is turned off and the voltage on the buffer 420 side of the capacitor 431 changes to Vafter, the charge Qafter stored in the capacitor 431 is expressed by the following equation. Qafter = C1 × Vafter (2)

[0070] On the other hand, the charge Q2 stored in the capacitor 433 is expressed by the following equation, where the output voltage is Vout. Q2 = -C2 × Vout (3)

[0071] At this time, the total charge of capacitors 431 and 433 does not change, so the following equation holds: Qinit = Qafter + Q2 (4)

[0072] By substituting equations (1) to (3) into equation (4) and rearranging it, the following equation is obtained. Vout=-(C1 / C2)×(Vafter-Vinit) ···(5)

[0073] Equation (5) represents the subtraction operation of the voltage signal, and the gain of the subtraction result is C1 / C2. Since it is usually desired to maximize the gain, it is preferable to design the capacitance C1 of the capacitor 431 to be large and the capacitance C2 of the capacitor 433 to be small. On the other hand, if C2 is too small, kTC noise increases and there is a risk of deteriorating noise characteristics, so the reduction in the capacitance of C2 is limited to a range in which noise can be tolerated. In addition, since the address event detection unit 400 including the subtractor 430 is mounted for each pixel block, there are area restrictions on the capacitances C1 and C2. The values ​​of the capacitances C1 and C2 are determined taking these factors into consideration.

[0074] The comparator 441 compares the voltage signal from the subtractor 430 with a predetermined threshold voltage Vth applied to an inverting input terminal (-) of the comparator 441. The comparator 441 outputs a signal indicating the comparison result to the transfer unit 450 as a detection signal.

[0075] Moreover, the gain A of the entire address event detection section 400 described above is expressed by the following formula, where the conversion gain of the current-voltage conversion section 410 is CGlog and the gain of the buffer 420 is "1."

number

[0076] In the above formula, iphoto_n is the photocurrent of the nth pixel, for example in units of amperes (A), and N is the number of pixels in the pixel block 310.

[0077] [Column ADC220 configuration example] 9 is a block diagram showing an example of a configuration of the column ADC 220 in the first embodiment of the present disclosure. The column ADC 220 includes an ADC 230 for each column of the pixel blocks 310. The column ADC 220 also includes a reference signal generating unit 223 and an output unit 222. The reference signal generating unit 223 generates a reference signal such as a ramp signal and supplies the reference signal to each of the ADCs 230. A DAC (Digital to Analog Converter) or the like is used as the reference signal generating unit 223. The output unit 222 supplies a digital signal from the ADC 230 to the signal processing unit 212.

[0078] The ADC 230 converts the analog pixel signal SIG supplied via the vertical signal line VSL into a digital signal. The ADC 230 includes a comparator 236, a counter 237, a switch 238, and a memory 239. The comparator 236 compares the pixel signal SIG with a reference signal, and the counter 237 counts a count value over a period until the comparison result is inverted. The switch 238 supplies the count value to the memory 239 and stores it under the control of a timing control circuit (not shown) or the like. The memory 239 supplies a digital signal indicating the count value to the output unit 222 under the control of a horizontal drive unit (not shown) or the like. With this configuration, the pixel signal SIG is converted into a digital signal having a larger number of bits than the detection signal. For example, if the detection signal is 2 bits, the pixel signal is converted into a digital signal having 3 bits or more (e.g., 16 bits). The ADC 230 is an example of an analog-to-digital converter as described in the claims.

[0079] [Example of operation of solid-state imaging device] 10 is a timing chart showing an example of the operation of the solid-state imaging device 200 in the first embodiment of the present disclosure. When the control unit 130 instructs the start of address event detection at timing T0, the drive circuit 211 sets all control signals OFGn to a high level to turn on the OFG transistors 332 of all pixels. As a result, the sum of the photocurrents of all pixels is supplied to the address event detection unit 400. Meanwhile, all transfer signals TRGn are at a low level, and the transfer transistors 331 of all pixels are in an off state.

[0080] It is assumed that at timing T1, the address event detector 400 detects an address event and outputs a high-level detection signal. Here, it is assumed that the detection signal is a 1-bit signal indicating the detection result of an ON event.

[0081] Upon receiving the detection signal, the drive circuit 211 sets all of the control signals OFGn to low level at timing T2 to stop the supply of photocurrent to the address event detection unit 400. The drive circuit 211 also sets the selection signal SEL to high level and sets the reset signal RST to high level for a certain pulse period to initialize the floating diffusion layer 324. The pixel signal generation unit 320 outputs the voltage at the time of this initialization as a reset level, and the ADC 230 converts the reset level into a digital signal.

[0082] At timing T3 after the conversion of the reset level, the driving circuit 211 supplies a high-level transfer signal TRG1 for a certain pulse period to cause the first pixel to output a voltage as a signal level. The ADC 230 converts the signal level into a digital signal. The signal processing unit 212 obtains the difference between the reset level and the signal level as the net pixel signal. This process is called CDS processing.

[0083] At timing T4 after the signal level conversion, the drive circuit 211 supplies a high-level transfer signal TRG2 for a certain pulse period to cause the second pixel to output the signal level. The signal processor 212 obtains the difference between the reset level and the signal level as the net pixel signal. Thereafter, similar processing is performed, and the pixel signals of each pixel in the pixel block 310 are output in sequence.

[0084] When all pixel signals have been output, the drive circuit 211 sets all control signals OFGn to a high level, turning on the OFG transistors 332 of all pixels.

[0085] 11 is a flowchart showing an example of the operation of the solid-state imaging device 200 according to the first embodiment of the present disclosure. This operation is started, for example, when a predetermined application for detecting an address event is executed.

[0086] Each pixel block 310 detects whether or not an address event has occurred (step S901). The drive circuit 211 determines whether or not an address event has occurred in any of the pixel blocks 310 (step S902). If an address event has occurred (step S902: Yes), the drive circuit 211 sequentially outputs pixel signals of each pixel in the pixel block 310 in which the address event has occurred (step S903).

[0087] If there is no address event (step S902: No), or after step S903, the solid-state imaging device 200 repeats step S901 and subsequent steps. In this way, according to the first embodiment of the present disclosure, the address event detection unit 400 detects the amount of change in photocurrent of each of the multiple (N) photoelectric conversion elements 333 (pixels), so the number of address event detection units 400 can be one for every N pixels. By sharing one address event detection unit 400 among N pixels in this way, the circuit size can be reduced compared to a configuration in which an address event detection unit 400 is not shared but is provided for each pixel.

[0088] It should be noted that the above-mentioned value of N is arbitrary. For example, if there is no need to consider reducing the circuit scale, N=1 may be set and an address event detection unit 400 may be provided for each pixel.

[0089] In the first embodiment, the low-potential side reference potential and the off potential used by each unit in the imaging device 100 include three or more types of potentials with different potential levels. The low-potential side reference potential and the off potential are typically the ground potential GND, but in this embodiment, it is assumed that each unit in the imaging device 100 uses a potential with a potential level other than the ground potential GND.

[0090] More specifically, the low potential side reference potential of the photoelectric conversion unit 334, the low potential side reference potential of the detection unit, the low potential side reference potential of the pixel signal generation unit 320, the low potential side reference potential of the column ADC 220, and the off potential of the transfer control unit 335 include three or more potentials each having a different potential level.

[0091] For example, the low potential reference potential of the photoelectric conversion unit 334 may have a lower potential level than the low potential reference potential of the address event detection unit 400. Furthermore, the low potential reference potential of the photoelectric conversion unit 334 may have a higher potential level than the off potential of the transfer control unit 335. Furthermore, the low potential reference potential of the photoelectric conversion unit 334 may have a lower potential level than the low potential reference potential of at least one of the pixel signal generation unit 320 and the column ADC 220.

[0092] Fig. 12 is a diagram showing the low-potential side reference potential and off potential used by each unit in the imaging device 100 according to the first embodiment. Fig. 12 shows an example in which the low-potential side reference potential and off potential used by each unit in the imaging device 100 include three potentials with different potential levels. In the example of Fig. 12, these three potentials are a ground potential, a first reference potential, and a second reference potential. The ground potential is, for example, 0V, the first reference potential is a negative potential with a potential level lower than the ground potential GND, and the second reference potential is a negative potential with an even lower potential level than the second reference potential.

[0093] The first reference potential and the second reference potential are supplied from a negative potential supplying unit 235. The negative potential supplying unit 235 generates the first reference potential and the second reference potential lower than the ground potential GND, for example, by using a charge pump.

[0094] 12, the low-potential reference potential of the photoelectric conversion unit 334 is the first reference potential. In addition, the low-potential reference potential of the address event detection unit 400, the pixel signal generation unit 320, and the column ADC 220 is the ground potential GND. The off potential of the transfer control unit 335 is the second reference potential. The transfer control unit 335 is composed of a transfer transistor 331 and an OFG transistor 332, and the off potential of the transfer control unit 335 refers to a potential for turning off the gates of the transfer transistor 331 and the OFG transistor 332.

[0095] 12, by setting the low potential side reference potential of the photoelectric conversion unit 334 to the second reference potential which is a negative potential, the reverse bias of the photodiode (photoelectric conversion element) in the photoelectric conversion unit 334 becomes larger compared to the case where the low potential side reference potential of the photoelectric conversion unit 334 is set to the ground potential GND. This increases the sensitivity of the photodiode 311 and reduces the dark current.

[0096] Also, the back gates of the transfer transistor 331 and OFG transistor 332 in the transfer control unit 335 may be set to a negative potential Vn. This makes it possible to prevent the threshold voltages of the transistors from becoming higher due to the substrate bias effect, as compared to the case where these potentials are set to the reference potential, and the gate-source voltages of the transistors from becoming 0 or lower. If the gate-source voltage becomes 0 or lower, a normal output cannot be obtained due to the circuit configuration of the pixel signal generation unit 320, so supplying the negative potential Vn to the back gates can prevent such a situation. In this way, the signal quality of the detection signal can be improved by improving the sensitivity of the photodiode 311, reducing the dark current, and increasing the threshold voltage.

[0097] 12, the low potential side reference potential (first reference potential) of the address event detection unit 400 is set to a higher potential level than the low potential side reference potential (first reference potential) of the photoelectric conversion unit 334. If the low potential side reference potential of the address event detection unit 400 were set to a lower potential level than the low potential side reference potential of the photoelectric conversion unit 334, a sufficient reverse bias would not be applied to the photodiode in the photoelectric conversion unit 334, which could increase leakage current or noise and slow down response. As shown in FIG. 12, by setting the low potential side reference potential of the address event detection unit 400 to a higher potential level than the low potential side reference potential of the photoelectric conversion unit 334, a sufficient reverse bias can be applied to the photodiode, reducing noise and improving response speed.

[0098] The OFG transistor 332 in the transfer control unit 335 is turned on when the address event detection unit 400 performs an address event detection process. At this time, the transfer transistor 331 must be turned off. Furthermore, when an address event is detected by the address event detection unit 400, the OFG transistor 332 is turned off and the transfer transistor 331 is turned on. When the transfer transistor 331 is turned on, an electrical signal (photocurrent) photoelectrically converted by the photodiode is sent via the transfer transistor 331 to the pixel signal generation unit 320 to generate a pixel signal, which is then sent to the column ADC 220 to generate a digital signal.

[0099] In this way, the OFG transistor 332 and the transfer transistor 331 are turned on / off exclusively. To ensure that the OFG transistor 332 and the transfer transistor 331 perform exclusive operation, it is desirable to apply a positive potential to the gate of the transistor that is turned on and a negative potential to the gate of the transistor that is turned off. For this reason, in FIG. 12, the off potential of the transfer control unit 335 is set to the second reference potential, which is a negative potential.

[0100] Figures 13A and 13B show an example of specific potential levels of the low potential side reference potential and off potential applied to each unit in the imaging device 100 according to the first embodiment. Figure 13A shows the potential levels when the transfer transistor is turned off, and Figure 13B shows the potential levels when the transfer transistor is turned on. When performing address event detection, the potential levels are set to those shown in Figure 13A. Note that the potential levels in Figures 13A and 13B are merely examples, and various modified examples are possible.

[0101] As shown in FIG. 13A, when the transfer transistor is turned off, the anode of the photodiode is set to a negative potential of −0.6V. Also, the gate of the transfer transistor is set to a negative potential of −1.8V. This ensures that the transfer transistor is turned off. The gate of the reset transistor in the pixel signal generation unit 320 is set to 2.2V. This turns on the reset transistor and initializes the amount of charge in the floating diffusion layer 324. The positive potential side reference potential of the pixel signal generation unit 320 is set to 2.8V.

[0102] 13A, when address event detection is performed, the gate of the OFG transistor is set to about 2.2 to 2.8 V. The low potential reference potential of the address event detection unit 400 is set to the ground potential GND (0 V) that is higher than the anode potential of the photodiode. The positive potential reference potential of the address event detection unit 400 is set to 2.2 V.

[0103] 13B, when the transfer transistor is turned on, the anode of the photodiode is also set to −0.6 V. The gate of the transfer transistor is also set to 2.2 V. The gate of the reset transistor in the pixel signal generation unit 320 is set to a negative potential of −0.6 V. The drain of the reset transistor is set to 2.2 V. The drain of the amplification transistor 322 in the pixel signal generation unit 320 is set to 2.8 V.

[0104] Although omitted in Fig. 13A, the gate of the OFG transistor is set to -1.8 V. The low-potential reference potential of the address event detection unit 400 is the ground potential GND (0 V) as in Fig. 13A.

[0105] In this way, in the first embodiment, the low potential side reference potential and the off potential used by each unit in the imaging device 100 include three or more types of potentials with different potential levels. This allows the operation of each unit in the imaging device 100 to be optimized. For example, since the low potential side reference potential of the photoelectric conversion unit 334 is set to the reference potential, the sensitivity of the photodiode can be improved and the dark current can be reduced. In addition, by making the low potential side reference potential of the address event detection unit 400 higher than the low potential side reference potential of the photoelectric conversion unit 334, a sufficient reverse bias is applied to the photodiode, thereby reducing noise and improving the response speed. Furthermore, by setting the off potential of the transfer control unit 335 to a negative potential, the transfer transistor and the OFG transistor can be reliably operated exclusively.

[0106] Second embodiment Fig. 14 is a diagram showing the low-potential side reference potential and off potential used by each unit in the imaging device 100 according to the second embodiment. In the example of Fig. 14, three types of reference potentials with different potential levels are used as the low-potential side reference potential and off potential used by each unit in the imaging device 100, but the potential levels of these three types of reference potentials are different from those in Fig. 12. More specifically, the first reference potential in Fig. 14 is a potential level higher than the ground potential GND, and the second reference potential is a potential level lower than the ground potential GND.

[0107] The second reference potential is supplied from a negative potential supply unit 235. The first reference potential is supplied from a power supply unit (not shown).

[0108] 14, the low-potential reference potential of the photoelectric conversion unit 334, the pixel signal generation unit 320, and the column ADC 220 is the ground potential GND (0V). The low-potential reference potential of the address event detection unit 400 is a first reference potential which is a positive potential. The off potential of the transfer control unit 335 is a second reference potential which is a negative potential lower than the first reference potential.

[0109] 14, the low potential side reference potential of the photoelectric conversion unit 334 is set lower than the low potential side reference potential of the address event detection unit 400, so the reverse bias of the photodiode in the photoelectric conversion unit 334 can be made sufficiently large, thereby reducing noise and improving the response speed. Also, the off potential of the transfer control unit 335 is set to the second reference potential, which is a negative potential lower than the first reference potential, so that the transfer transistor and the OFG transistor can be reliably operated exclusively.

[0110] 15A and 15B are examples of specific potential levels of the low potential side reference potential and the off potential applied to each unit in the image pickup device 100 according to the second embodiment. Fig. 15A shows the potential levels when the transfer transistor is turned off, and Fig. 15B shows the potential levels when the transfer transistor is turned on.

[0111] As shown in FIG. 15A, when the transfer transistor is turned off, the anode of the photodiode is set to the ground potential GND (0V), which is a negative potential. Also, the gate of the transfer transistor is set to a negative potential of −1.2V. This ensures that the transfer transistor is turned off. The gate of the reset transistor in the pixel signal generation unit 320 is set to 2.8V. This turns on the reset transistor and initializes the charge amount of the floating diffusion layer 324. The positive potential side reference potential of the pixel signal generation unit 320 is set to 2.8V. The low potential side reference potential of the address event detection unit 400 is set to 0.6V, which is higher than the anode potential of the photodiode. The positive potential side reference potential of the address event detection unit 400 is set to 2.8V.

[0112] 15B, when the transfer transistor is turned on, the anode of the photodiode is also set to the ground potential GND (0V). In addition, the gate of the transfer transistor is set to 2.8V. The gate of the reset transistor in the pixel signal generation unit 320 is set to the ground potential GND (0V). The drain of the reset transistor is set to 2.8V. The drain of the amplification transistor 322 in the pixel signal generation unit 320 is set to 2.8V.

[0113] 13A, 13B, 15A, and 15B, 2.2V and 2.8V are mixed as the positive potential side reference potential, but this is just an example, and the potential may be adjusted to a specific potential.

[0114] In this way, in the second embodiment, in addition to the ground potential GND, a first reference potential of positive potential and a second reference potential of negative potential are provided as the low-potential reference potential and off-potential in the imaging device 100, so that the low-potential reference potential of the optimal voltage level can be set for each part in the imaging device 100, and the operation of each part can be optimized. In particular, by making the low-potential reference potential of the address event detection unit 400 higher than the low-potential reference potential of the photoelectric conversion unit 334, a sufficient reverse bias is applied to the photodiode, thereby reducing noise and improving the response speed. Furthermore, by setting the off-potential of the transfer control unit 335 to a negative potential, the transfer transistor and the OFG transistor can be reliably operated exclusively.

[0115] Furthermore, in the second embodiment, since only one type of negative potential is used as the low potential side reference potential and the off potential, the circuit configuration of the negative potential supply unit 235 can be simplified.

[0116] (Third embodiment) FIG. 16 is a diagram showing the low-potential side reference potential and the off potential used by each unit in the image pickup device 100 according to the third embodiment.

[0117] 16, the imaging device 100 according to the third embodiment includes a potential selection section 336 that switches the low-potential side reference potential of the photoelectric conversion section 334. The potential selection section 336 selects a first reference potential during a period in which the address event detection section 400 detects whether or not the amount of change in the electrical signal (photocurrent) photoelectrically converted by the photodiode has exceeded a predetermined threshold, and selects a second reference potential having a higher potential level than the first reference potential during a period in which the analog-to-digital converter converts the pixel signal into a digital signal.

[0118] The low-potential side reference potential and the off potential used by each unit of the imaging device 100 according to the third embodiment are a first reference potential and a second reference potential having different potential levels, respectively. That is, the third embodiment has one less reference potential than the first and second embodiments.

[0119] In the third embodiment, the second reference potential is, for example, a ground potential GND (0V), and the first reference potential is a negative potential whose potential level is lower than the ground potential GND. The first reference potential is supplied from a negative potential supply unit 235.

[0120] 16, the low-potential reference potential of the address event detection unit 400, the pixel signal generation unit 320, and the column ADC 220 is the ground potential GND (second reference potential). The off potential of the transfer control unit 335 is a negative potential (first reference potential).

[0121] The address event detection unit 400 needs to detect an address event as quickly as possible based on the electrical signal photoelectrically converted by the photodiode in the photoelectric conversion unit 334. Therefore, during the period in which the address event detection unit 400 performs the address event detection operation, the low-potential side reference potential of the photoelectric conversion unit 334 is lowered to a negative potential to improve the sensitivity of the photodiode and reduce the dark current. On the other hand, when an address event is detected by the address event detection unit 400, the pixel signal generation unit 320 performs an operation to generate a pixel signal, but since there is no need to improve the sensitivity of the photodiode during this period, the low-potential side reference potential of the receiving unit is set to the ground potential GND to reduce power consumption.

[0122] As described above, in the third embodiment, the low potential side reference potential of the photoelectric conversion unit 334 is switched between when performing address event detection and when generating a pixel signal, thereby improving the sensitivity of the photodiode and reducing the dark current when detecting an address event, and reducing the power consumption when generating a pixel signal.

[0123] (Fourth embodiment) In the above-mentioned first to third embodiments, the imaging device 100 including the address event detection unit 400 of Fig. 6 has been described, but the internal configuration of the address event detection unit 400 is not necessarily limited to that of Fig. 6. Fig. 17 is a block diagram showing a second configuration example of the address event detection unit 400. As shown in Fig. 17, the address event detection unit 400 according to this configuration example has a storage unit 460 and a control unit 470 in addition to a current-voltage conversion unit 410, a buffer 420, a subtractor 430, a quantizer 440, and a transfer unit 450.

[0124] The storage unit 460 is provided between the quantizer 440 and the transfer unit 450, and accumulates the output of the quantizer 440, i.e., the comparison result of the comparator 441 in the quantizer 440, based on the sample signal supplied from the control unit 470. The storage unit 460 may be a sampling circuit such as a switch, a plastic, or a capacitor, or may be a digital memory circuit such as a latch or a flip-flop.

[0125] The control unit 470 supplies a predetermined threshold voltage V th The threshold voltage V supplied from the control unit 470 to the comparator 441 is th For example, the control unit 470 may set a threshold voltage V corresponding to an ON event indicating that the amount of change in the photocurrent has exceeded the upper threshold. th1 , and a threshold voltage V corresponding to an off-event indicating that the change amount falls below the lower threshold th2By supplying these at different timings, a single comparator 441 can detect multiple types of address events.

[0126] For example, the storage unit 460 receives a threshold voltage V corresponding to an off event from the control unit 470 to the inverting (-) input terminal of the comparator 441. th2 During the period when the on-event is being th1 may be stored. The storage unit 460 may be provided inside the pixel 30 or outside the pixel 30. The storage unit 460 is not an essential component of the address event detection unit 400. In other words, the storage unit 460 may be omitted.

[0127] [Imaging device 100 according to the second configuration example (scanning method)] The imaging device 10020 having the first configuration example of the address event detection unit 400 shown in Fig. 6 described above is an asynchronous imaging device 100 that reads out events by an asynchronous reading method. However, the event reading method is not limited to the asynchronous reading method, and may be a synchronous reading method. The imaging device 100 to which the synchronous reading method is applied is a scanning type imaging device 100, the same as a normal imaging device 100 that captures images at a predetermined frame rate.

[0128] FIG. 18 is a block diagram showing an example of the configuration of an imaging device 100 according to a second configuration example, that is, a scanning type imaging device 100, used as an imaging device 10020 in an imaging system 10 to which the technology of the present disclosure is applied.

[0129] As shown in FIG. 18, an imaging device 10020 according to a second configuration example of the imaging device 100 of the present disclosure includes a pixel array section 21, a driving section 22, a signal processing section 25, a readout area selection section 27, and a signal generation section 221.

[0130] The pixel array unit 21 includes a plurality of pixels 30. The plurality of pixels 30 output an output signal in response to a selection signal from the readout region selection unit 27. Each of the plurality of pixels 30 may be configured to have a quantizer within the pixel, for example, as shown in FIG. 7. The plurality of pixels 30 output an output signal corresponding to the amount of change in light intensity. The plurality of pixels 30 may be two-dimensionally arranged in a matrix, as shown in FIG.

[0131] The driving unit 22 drives each of the multiple pixels 30 to output a pixel signal generated in each pixel 30 to the signal processing unit 25. The driving unit 22 and the signal processing unit 25 are circuit units for acquiring gradation information. Therefore, when only event information is acquired, the driving unit 22 and the signal processing unit 25 may not be required.

[0132] The readout region selection unit 27 selects a portion of the multiple pixels 30 included in the pixel array unit 21. For example, the readout region selection unit 27 selects one or more rows among the rows included in the two-dimensional matrix structure corresponding to the pixel array unit 21. The readout region selection unit 27 sequentially selects one or more rows according to a preset period. The readout region selection unit 27 may also determine the selection region in response to a request from each pixel 30 in the pixel array unit 21.

[0133] The signal generating unit 221 generates an event signal corresponding to an active pixel that has detected an event among the selected pixels, based on the output signal of the pixel selected by the readout region selecting unit 27. An event is an event in which the intensity of light changes. An active pixel is a pixel in which the amount of change in the intensity of light corresponding to the output signal exceeds or falls below a preset threshold. For example, the signal generating unit 221 compares the output signal of the pixel with a reference signal, detects an active pixel that outputs an output signal when the output signal is greater or smaller than the reference signal, and generates an event signal corresponding to the active pixel.

[0134] The signal generation unit 221 may be configured to include, for example, a column selection circuit that arbitrates signals coming into the signal generation unit 221. The signal generation unit 221 may be configured to output not only information about active pixels that detect an event, but also information about inactive pixels that do not detect an event.

[0135] Address information and time stamp information (e.g., (X, Y, T)) of an active pixel in which an event is detected are output from the signal generating unit 221 through the output line 15. However, the data output from the signal generating unit 221 may be not only address information and time stamp information but also frame format information (e.g., (0, 0, 1, 0,...)).

[0136] [Example of chip structure] The chip (semiconductor integrated circuit) structure of the imaging device 10020 according to the first or second configuration example described above may be a stacked chip structure as shown in Fig. 2. The stacked chip structure, or so-called stacked structure, is a structure in which at least two chips, a light receiving chip 201 which is a first chip, and a detection chip 202 which is a second chip, are stacked. In the circuit configuration of the pixel 30 shown in Fig. 4, each of the light receiving units 330 is disposed on the light receiving chip 201, and all elements other than the light receiving element 311 and elements of other circuit parts of the pixel 30 are disposed on the detection chip 202. The light receiving chip 201 and the detection chip 202 are electrically connected to each other through a connection part such as a via (VIA), a Cu-Cu joint, or a bump.

[0137] Here, an example of a configuration in which the light receiving element 311 is arranged on the light receiving chip 201, and elements other than the light receiving element 311 and elements of other circuit parts of the pixel 30 are arranged on the detection chip 202 has been given, but the present invention is not limited to this example configuration.

[0138] 4, the elements of the light receiving unit 330 and the reset transistor 321 and floating diffusion layer 324 of the pixel signal generating unit 32032 may be arranged on the light receiving chip 201, and the other elements may be arranged on the detection chip 202. Alternatively, some of the elements constituting the address event detection unit 400 may be arranged on the light receiving chip 201 together with the elements of the light receiving unit 330.

[0139] [Example of column processing section configuration] 9 shows an example of a configuration in which the analog-digital converter (ADC) 230 is arranged in the column ADC 220 in a one-to-one correspondence with the pixel columns of the pixel array unit 21, but the present invention is not limited to this example of the configuration. For example, the analog-digital converter (ADC) 230 may be arranged for each of a plurality of pixel columns, and the analog-digital converter (ADC) 230 may be used in a time-division manner among the plurality of pixel columns.

[0140] The analog-digital converter (ADC) 230 converts the analog pixel signal SIG supplied via the vertical signal line VSL into a digital signal having a larger number of bits than the address event detection signal described above. For example, if the address event detection signal is 2 bits, the pixel signal is converted into a digital signal having 3 bits or more (e.g., 16 bits). The analog-digital converter (ADC) 230 supplies the digital signal generated by the analog-digital conversion to the signal processing unit 25.

[0141] [About noise events] Meanwhile, the imaging device 10020 according to the first configuration example is an asynchronous imaging device 100 called a DVS, which is provided with a detection unit (i.e., an address event detection unit 400) for each pixel 30 that detects in real time, for each pixel address, that the amount of light at that pixel exceeds a predetermined threshold as an address event.

[0142] In the imaging device 100 according to the first configuration example of the asynchronous type, when some event (i.e., a true event) occurs in a scene, data due to the occurrence of the true event is acquired. However, in the asynchronous imaging device 100, even in a scene where no true event occurs, data may be acquired in vain due to a noise event (false event) such as sensor noise. This not only causes a noise signal to be read out, but also reduces the throughput of the signal output.

[0143] <Application examples of the technology disclosed herein> The technology according to the present disclosure can be applied to various products. More specific application examples will be described below. For example, the technology according to the present disclosure may be realized as a distance measuring device mounted on any type of moving object such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility, an airplane, a drone, a ship, a robot, a construction machine, or an agricultural machine (tractor).

[0144] [Mobile object] 19 is a block diagram showing a schematic configuration example of a vehicle control system 7000 which is an example of a mobile object control system to which the technology according to the present disclosure can be applied. The vehicle control system 7000 includes a plurality of electronic control units connected via a communication network 7010. In the example shown in FIG. 19, the vehicle control system 7000 includes a drive system control unit 7100, a body system control unit 7200, a battery control unit 7300, an outside-vehicle information detection unit 7400, an inside-vehicle information detection unit 7500, and an integrated control unit 7600. The communication network 7010 connecting these multiple control units may be an in-vehicle communication network conforming to any standard such as, for example, a Controller Area Network (CAN), a Local Interconnect Network (LIN), a Local Area Network (LAN), or FlexRay (registered trademark).

[0145] Each control unit includes a microcomputer (processor) that performs arithmetic processing according to various programs, a storage unit that stores the programs executed by the microcomputer or parameters used in various calculations, and a drive circuit that drives various controlled devices. Each control unit includes a network I / F for communicating with other control units via a communication network 7010, and a communication I / F for communicating with devices or sensors inside and outside the vehicle by wired communication or wireless communication. In FIG. 19, a microcomputer 7610, a general-purpose communication I / F 7620, a dedicated communication I / F 7630, a positioning unit 7640, a beacon receiving unit 7650, an in-vehicle device I / F 7660, an audio / video output unit 7670, an in-vehicle network I / F 7680, and a storage unit 7690 are illustrated as functional configurations of the integrated control unit 7600. Other control units also include a microcomputer, a communication I / F, a storage unit, and the like.

[0146] The drivetrain control unit 7100 controls the operation of devices related to the drivetrain of the vehicle according to various programs. For example, the drivetrain control unit 7100 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle. The drivetrain control unit 7100 may also function as a control device such as an ABS (Antilock Brake System) or an ESC (Electronic Stability Control).

[0147] A vehicle state detection unit 7110 is connected to the drive system control unit 7100. The vehicle state detection unit 7110 includes at least one of a gyro sensor that detects the angular velocity of the axial rotational motion of the vehicle body, an acceleration sensor that detects the acceleration of the vehicle, or a sensor for detecting the amount of operation of an accelerator pedal, the amount of operation of a brake pedal, the steering angle of a steering wheel, the engine rotation speed, or the rotation speed of wheels, for example. The drive system control unit 7100 performs arithmetic processing using signals input from the vehicle state detection unit 7110, and controls the internal combustion engine, the drive motor, the electric power steering device, the brake device, etc.

[0148] The body system control unit 7200 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 7200 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 7200. The body system control unit 7200 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0149] The battery control unit 7300 controls the secondary battery 7310, which is a power supply source for the drive motor, according to various programs. For example, information such as battery temperature, battery output voltage, or remaining capacity of the battery is input to the battery control unit 7300 from a battery device equipped with the secondary battery 7310. The battery control unit 7300 performs calculation processing using these signals, and controls the temperature regulation of the secondary battery 7310 or controls a cooling device or the like equipped in the battery device.

[0150] The outside-vehicle information detection unit 7400 detects information outside the vehicle equipped with the vehicle control system 7000. For example, at least one of an imaging unit 7410 and an outside-vehicle information detection unit 7420 is connected to the outside-vehicle information detection unit 7400. The imaging unit 7410 includes at least one of a ToF (Time Of Flight) camera, a stereo camera, a monocular camera, an infrared camera, and other cameras. The outside-vehicle information detection unit 7420 includes at least one of an environmental sensor for detecting the current weather or climate, or a surrounding information detection sensor for detecting other vehicles, obstacles, pedestrians, and the like around the vehicle equipped with the vehicle control system 7000.

[0151] The environmental sensor may be, for example, at least one of a raindrop sensor that detects rain, a fog sensor that detects fog, a sunshine sensor that detects the degree of sunshine, and a snow sensor that detects snowfall. The surrounding information detection sensor may be at least one of an ultrasonic sensor, a radar device, and a LIDAR (Light Detection and Ranging, Laser Imaging Detection and Ranging) device. The imaging unit 7410 and the outside vehicle information detection unit 7420 may be provided as independent sensors or devices, or may be provided as a device in which multiple sensors or devices are integrated.

[0152] Here, FIG. 20 shows an example of the installation positions of the imaging unit 7410 and the vehicle exterior information detection unit 7420. The imaging units 7910, 7912, 7914, 7916, and 7918 are provided, for example, at least one of the front nose, side mirrors, rear bumper, back door, and upper part of the windshield in the vehicle interior of the vehicle 7900. The imaging unit 7910 provided on the front nose and the imaging unit 7918 provided on the upper part of the windshield in the vehicle interior mainly acquire images of the front of the vehicle 7900. The imaging units 7912 and 7914 provided on the side mirrors mainly acquire images of the sides of the vehicle 7900. The imaging unit 7916 provided on the rear bumper or back door mainly acquires images of the rear of the vehicle 7900. The imaging unit 7918 provided on the upper part of the windshield in the vehicle interior is mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0153] 20 shows an example of the imaging ranges of the imaging units 7910, 7912, 7914, and 7916. Imaging range a indicates the imaging range of the imaging unit 7910 provided on the front nose, imaging ranges b and c indicate the imaging ranges of the imaging units 7912 and 7914 provided on the side mirrors, and imaging range d indicates the imaging range of the imaging unit 7916 provided on the rear bumper or back door. For example, image data captured by the imaging units 7910, 7912, 7914, and 7916 are superimposed to obtain an overhead image of the vehicle 7900.

[0154] The outside information detection units 7920, 7922, 7924, 7926, 7928, and 7930 provided on the front, rear, sides, and corners of the vehicle 7900 and on the upper part of the windshield inside the vehicle cabin may be, for example, ultrasonic sensors or radar devices. The outside information detection units 7920, 7926, and 7930 provided on the front nose, rear bumper, back door, and on the upper part of the windshield inside the vehicle cabin of the vehicle 7900 may be, for example, LIDAR devices. These outside information detection units 7920 to 7930 are mainly used to detect preceding vehicles, pedestrians, obstacles, and the like.

[0155] Returning to FIG. 19, the description will be continued. The outside-vehicle information detection unit 7400 causes the imaging unit 7410 to capture an image outside the vehicle, and receives the captured image data. The outside-vehicle information detection unit 7400 also receives detection information from the outside-vehicle information detection unit 7420 connected thereto. When the outside-vehicle information detection unit 7420 is an ultrasonic sensor, a radar device, or a LIDAR device, the outside-vehicle information detection unit 7400 transmits ultrasonic waves or electromagnetic waves, and receives information on the received reflected waves. The outside-vehicle information detection unit 7400 may perform object detection processing or distance detection processing for people, cars, obstacles, signs, or characters on the road surface, based on the received information. The outside-vehicle information detection unit 7400 may perform environment recognition processing for recognizing rainfall, fog, road surface conditions, and the like, based on the received information. The outside-vehicle information detection unit 7400 may calculate the distance to an object outside the vehicle based on the received information.

[0156] Furthermore, the outside vehicle information detection unit 7400 may perform image recognition processing or distance detection processing to recognize people, cars, obstacles, signs, or characters on the road surface, based on the received image data. The outside vehicle information detection unit 7400 may perform processing such as distortion correction or position adjustment on the received image data, and may generate an overhead image or a panoramic image by synthesizing image data captured by different imaging units 7410. The outside vehicle information detection unit 7400 may perform viewpoint conversion processing using image data captured by different imaging units 7410.

[0157] The in-vehicle information detection unit 7500 detects information inside the vehicle. For example, a driver state detection unit 7510 that detects the state of the driver is connected to the in-vehicle information detection unit 7500. The driver state detection unit 7510 may include a camera that captures an image of the driver, a biosensor that detects the bioinformation of the driver, or a microphone that collects sound in the vehicle cabin. The biosensor is provided, for example, on the seat or steering wheel, and detects the bioinformation of a passenger sitting in the seat or a driver gripping the steering wheel. The in-vehicle information detection unit 7500 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 7510, or may determine whether the driver is dozing. The in-vehicle information detection unit 7500 may perform processing such as noise canceling processing on the collected sound signal.

[0158] The integrated control unit 7600 controls the overall operation of the vehicle control system 7000 according to various programs. The input unit 7800 is connected to the integrated control unit 7600. The input unit 7800 is realized by a device that can be operated by an occupant to input, such as a touch panel, a button, a microphone, a switch, or a lever. Data obtained by voice recognition of a voice input by a microphone may be input to the integrated control unit 7600. The input unit 7800 may be, for example, a remote control device using infrared or other radio waves, or an externally connected device such as a mobile phone or a PDA (Personal Digital Assistant) that supports the operation of the vehicle control system 7000. The input unit 7800 may be, for example, a camera, in which case the occupant can input information by gestures. Alternatively, data obtained by detecting the movement of a wearable device worn by the occupant may be input. Furthermore, the input unit 7800 may include, for example, an input control circuit that generates an input signal based on information input by the occupant using the above-mentioned input unit 7800 and outputs the input signal to the integrated control unit 7600. A passenger or the like operates the input unit 7800 to input various data to the vehicle control system 7000 and to instruct processing operations.

[0159] The storage unit 7690 may include a ROM (Read Only Memory) that stores various programs executed by the microcomputer, and a RAM (Random Access Memory) that stores various parameters, calculation results, sensor values, etc. The storage unit 7690 may be realized by a magnetic storage device such as an HDD (Hard Disc Drive), a semiconductor storage device, an optical storage device, or a magneto-optical storage device, etc.

[0160] The general-purpose communication I / F 7620 is a general-purpose communication I / F that mediates communication between various devices present in the external environment 7750. The general-purpose communication I / F 7620 may implement a cellular communication protocol such as GSM (registered trademark), WiMAX, LTE (Long Term Evolution), or LTE-Advanced (LTE-A), or other wireless communication protocols such as wireless LAN (also called Wi-Fi (registered trademark)) and Bluetooth (registered trademark). The general-purpose communication I / F 7620 may connect to a device (e.g., an application server or a control server) present on an external network (e.g., the Internet, a cloud network, or a carrier-specific network) via, for example, a base station or an access point. The general-purpose communication I / F 7620 may also connect to a terminal (e.g., a driver's, pedestrian's, or store's terminal, or a MTC (Machine Type Communication) terminal) present in the vicinity of the vehicle using, for example, a P2P (Peer To Peer) technology.

[0161] The dedicated communication I / F 7630 is a communication I / F that supports a communication protocol designed for use in a vehicle. The dedicated communication I / F 7630 may implement a standard protocol such as WAVE (Wireless Access in Vehicle Environment), which is a combination of a lower layer IEEE802.11p and a higher layer IEEE1609, DSRC (Dedicated Short Range Communications), or a cellular communication protocol. The dedicated communication I / F 7630 typically performs V2X communication, which is a concept including one or more of vehicle-to-vehicle communication, vehicle-to-infrastructure communication, vehicle-to-home communication, and vehicle-to-pedestrian communication.

[0162] The positioning unit 7640 performs positioning by receiving, for example, a GNSS signal from a Global Navigation Satellite System (GNSS) satellite (for example, a GPS signal from a Global Positioning System (GPS) satellite) and generates position information including the latitude, longitude, and altitude of the vehicle. The positioning unit 7640 may identify the current position by exchanging signals with a wireless access point, or may obtain position information from a terminal such as a mobile phone, PHS, or smartphone having a positioning function.

[0163] The beacon receiving unit 7650 receives, for example, radio waves or electromagnetic waves transmitted from radio stations or the like installed on the road, and acquires information such as the current location, congestion, road closure, required time, etc. The function of the beacon receiving unit 7650 may be included in the dedicated communication I / F 7630 described above.

[0164] The in-vehicle device I / F 7660 is a communication interface that mediates a connection between the microcomputer 7610 and various in-vehicle devices 7760 present in the vehicle. The in-vehicle device I / F 7660 may establish a wireless connection using a wireless communication protocol such as wireless LAN, Bluetooth (registered trademark), NFC (Near Field Communication), or WUSB (Wireless USB). The in-vehicle device I / F 7660 may also establish a wired connection such as USB (Universal Serial Bus), HDMI (High-Definition Multimedia Interface), or MHL (Mobile High-definition Link) via a connection terminal (and a cable, if necessary) not shown. The in-vehicle device 7760 may include at least one of a mobile device or a wearable device owned by a passenger, or an information device carried or attached to a vehicle. The in-vehicle device 7760 may also include a navigation device that searches for a route to an arbitrary destination. The in-vehicle equipment I / F 7660 exchanges control signals and data signals with these in-vehicle equipment 7760.

[0165] The in-vehicle network I / F 7680 is an interface that mediates communication between the microcomputer 7610 and the communication network 7010. The in-vehicle network I / F 7680 transmits and receives signals in accordance with a predetermined protocol supported by the communication network 7010.

[0166] The microcomputer 7610 of the integrated control unit 7600 controls the vehicle control system 7000 according to various programs based on information acquired through at least one of the general-purpose communication I / F 7620, the dedicated communication I / F 7630, the positioning unit 7640, the beacon receiving unit 7650, the in-vehicle device I / F 7660, and the in-vehicle network I / F 7680. For example, the microcomputer 7610 may calculate a control target value of a driving force generating device, a steering mechanism, or a braking device based on the acquired information inside and outside the vehicle, and output a control command to the drive system control unit 7100. For example, the microcomputer 7610 may perform cooperative control for the purpose of realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the distance between vehicles, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc. In addition, the microcomputer 7610 may perform cooperative control for the purpose of autonomous driving, in which the vehicle travels autonomously without relying on driver operation, by controlling a driving force generating device, a steering mechanism, a braking device, etc. based on information acquired about the vehicle's surroundings.

[0167] The microcomputer 7610 may generate three-dimensional distance information between the vehicle and objects such as surrounding structures and people, and create local map information including peripheral information of the current position of the vehicle, based on information acquired via at least one of the general-purpose communication I / F 7620, the dedicated communication I / F 7630, the positioning unit 7640, the beacon receiving unit 7650, the in-vehicle device I / F 7660, and the in-vehicle network I / F 7680. The microcomputer 7610 may also predict dangers such as vehicle collisions, the approach of pedestrians, or entry into a closed road, based on the acquired information, and generate a warning signal. The warning signal may be, for example, a signal for generating a warning sound or turning on a warning lamp.

[0168] The audio / image output unit 7670 transmits at least one of audio and image output signals to an output device capable of visually or audibly notifying the passengers of the vehicle or the outside of the vehicle of information. In the example of FIG. 19, an audio speaker 7710, a display unit 7720, and an instrument panel 7730 are illustrated as output devices. The display unit 7720 may include, for example, at least one of an on-board display and a head-up display. The display unit 7720 may have an AR (Augmented Reality) display function. The output device may be other devices such as headphones, a wearable device such as a glasses-type display worn by the passenger, a projector, or a lamp, other than these devices. When the output device is a display device, the display device visually displays the results obtained by various processes performed by the microcomputer 7610 or information received from other control units in various formats such as text, image, table, graph, etc. When the output device is an audio output device, the audio output device converts an audio signal consisting of reproduced audio data or acoustic data into an analog signal and audibly outputs it.

[0169] In the example shown in FIG. 19, at least two control units connected via the communication network 7010 may be integrated into one control unit. Alternatively, each control unit may be composed of multiple control units. Furthermore, the vehicle control system 7000 may include another control unit not shown. In the above description, some or all of the functions performed by any control unit may be provided by another control unit. In other words, as long as information is transmitted and received via the communication network 7010, a predetermined arithmetic processing may be performed by any control unit. Similarly, a sensor or device connected to any control unit may be connected to another control unit, and multiple control units may transmit and receive detection information to each other via the communication network 7010.

[0170] An example of a vehicle control system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to, for example, the imaging units 7910, 7912, 7914, 7916, and 7918, the outside vehicle information detection units 7920, 7922, 7924, 7926, 7928, and 7930, and the driver state detection unit 7510, among the configurations described above. Specifically, the imaging system 10 of FIG. 1 having the imaging device 100 of the present disclosure can be applied to these imaging units and detection units. By applying the technology according to the present disclosure, the influence of noise events such as sensor noise can be mitigated, and the occurrence of a true event can be reliably and quickly detected, thereby making it possible to realize safe vehicle driving.

[0171] The present disclosure can have the following configurations. (1) a photoelectric conversion unit having a plurality of photoelectric conversion elements each of which converts incident light into an electric signal by photoelectric conversion; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; an imaging device, wherein the low potential side reference potential of the photoelectric conversion unit, the low potential side reference potential of the detection unit, the low potential side reference potential of the pixel signal generation unit, the low potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit include three or more potentials each having a different potential level. (2) The imaging device according to (1), wherein the low potential side reference potential of the photoelectric conversion unit is lower in potential level than the low potential side reference potential of the detection unit. (3) The imaging device according to (1) or (2), wherein a low-potential side reference potential of the photoelectric conversion unit is higher in potential level than an off potential of the transfer control unit. (4) An imaging device described in any one of (1) to (3), wherein the low-potential side reference potential of the photoelectric conversion unit is lower in potential level than the low-potential side reference potential of at least one of the pixel signal generation unit and the analog-to-digital converter. (5) An imaging device described in any one of (1) to (4), wherein at least one of the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit is a ground potential, and at least one of the others is a first reference potential having a potential level lower than the ground potential, and at least one of the others is a second reference potential having a potential level lower than the first reference potential. (6) a low-potential side reference potential of the photoelectric conversion unit is the second reference potential; a low-potential side reference potential of the detection unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential, The imaging device according to (5), wherein the off potential of the transfer control unit is the second reference potential. (7) the ground potential is 0 V; the first reference potential is a negative potential, The imaging device according to (5) or (6), wherein the second reference potential is a negative potential having a lower potential level than the first reference potential. (8) The imaging device according to any one of (1) to (3), wherein low-potential reference potentials of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter are substantially equal to each other. (9) An imaging device described in any one of (1) to (3) and (8), wherein at least one of the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit is a ground potential, and at least one of the others is a first reference potential having a higher potential level than the ground potential, and at least one of the others is a second reference potential having a lower potential level than the ground potential. (10) A low-potential side reference potential of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential, a low-potential side reference potential of the detection unit is the first reference potential, The imaging device according to (9), wherein the off potential of the transfer control unit is the second reference potential. (11) The ground potential is 0 V; the first reference potential is a positive potential, The imaging device according to (9) or (10), wherein the second reference potential is a negative potential. (12) A photoelectric conversion unit having a plurality of photoelectric conversion elements each of which converts incident light into an electric signal by photoelectric conversion; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; a potential selection unit that switches a low potential side reference potential of the photoelectric conversion unit. (13) When the detection unit detects that the amount of change exceeds the predetermined threshold, the analog-to-digital converter converts the pixel signal into the digital signal, The imaging device described in (12), wherein the potential selection unit selects a first reference potential during a period in which the detection unit detects whether the amount of change has exceeded the predetermined threshold, and selects a second reference potential having a higher potential level than the first reference potential during a period in which the analog-to-digital converter converts the pixel signal into the digital signal. (14) The first reference potential is a negative potential, The imaging device according to (13), wherein the second reference potential is a ground potential. (15) An imaging device described in any one of (12) to (14), wherein the low potential side reference potential of the photoelectric conversion unit, the low potential side reference potential of the detection unit, the low potential side reference potential of the pixel signal generation unit, the low potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit include two or more potentials each having a different potential level. (16) A low-potential reference potential of the detection unit, a low-potential reference potential of the pixel signal generation unit, and a low-potential reference potential of the analog-to-digital converter are a ground potential; The imaging device according to any one of (12) to (15), wherein an off potential of the transfer control unit is a negative potential. (17) The imaging device according to any one of (5) to (7), (9) to (11), and (13), further comprising a potential generating unit that generates at least one of the first reference potential and the second reference potential. (18) The imaging device according to any one of (1) to (17), wherein at least the detection unit is disposed on a second substrate that is stacked on a first substrate on which the photoelectric conversion unit is disposed. (19) The imaging device according to any one of (1) to (18), wherein a back gate of a transistor in the transfer control unit is set to a potential level equal to a low potential side reference potential of the photoelectric conversion unit. (20) An imaging device that outputs captured image data; a processor for performing a predetermined signal processing on the image data, The imaging device includes: a photoelectric conversion unit having a plurality of photoelectric conversion elements each of which converts incident light into an electric signal; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; an electronic device in which the low-potential-side reference potential of the photoelectric conversion unit, the low-potential-side reference potential of the detection unit, the low-potential-side reference potential of the pixel signal generation unit, the low-potential-side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit include three or more potentials each having a different potential level. (21) A step of photoelectrically converting incident light to generate an electric signal by a plurality of photoelectric conversion elements; outputting a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; transmitting said electrical signal; generating a pixel signal based on the transferred electrical signal; converting the pixel signal into a digital signal; The low-potential-side reference potential during the photoelectric conversion, the low-potential-side reference potential when outputting the detection signal, the low-potential-side reference potential when generating the pixel signal, the low-potential-side reference potential when converting the pixel signal to a digital signal, and the off-potential when transferring the electrical signal include three or more potentials with different potential levels, and the imaging method performs the steps of generating the electrical signal, outputting the detection signal, transferring the electrical signal, generating the pixel signal, and converting into the digital signal using these potentials.

[0172] The aspects of the present disclosure are not limited to the above-mentioned individual embodiments, but include various modifications that may be conceived by a person skilled in the art, and the effects of the present disclosure are not limited to the above-mentioned contents. In other words, various additions, modifications, and partial deletions are possible within the scope of the conceptual idea and intent of the present disclosure derived from the contents defined in the claims and their equivalents. [Explanation of symbols]

[0173] 100 imaging device, 110 imaging lens, 120 recording unit, 130 control unit, 200 solid-state imaging element, 201 light receiving chip, 202 detection chip, 211 driving circuit, 212 signal processing unit, 213 arbiter, 220 column ADC, 221 signal generating unit, 223 reference signal generating unit, 222 output unit, 230 ADC, 235 negative potential supply unit, 236 comparator, 237 counter, 238 switch, 239 memory, 240 differential amplifier circuit, 241, 242, 412 P-type transistor, 243, 244, 245, 411, 413 N-type transistor, 250 counter, 300 pixel array unit, 310 pixel block, 311 pixel, 312 normal pixel, 313 address event detection pixel, 320 pixel signal generating unit, 321 Reset transistor, 322 Amplification transistor, 323 Selection transistor, 324 Floating diffusion layer, 330 Light receiving section, 331 Transfer transistor, 332 OFG transistor, 333 Photoelectric conversion element, 334 Photoelectric conversion section, 335 Transfer control section, 400 Address event detection section, 410 Current-voltage conversion section, 420 Buffer, 430 Subtractor, 431, 433 Capacitor, 432 Inverter, 434 Switch, 440 Quantizer, 441 Comparator, 450 Transfer section, 12031 Imaging section

Claims

1. a photoelectric conversion unit having a plurality of photoelectric conversion elements each of which converts incident light into an electric signal; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; a low-potential-side reference potential of the photoelectric conversion unit, a low-potential-side reference potential of the detection unit, a low-potential-side reference potential of the pixel signal generation unit, a low-potential-side reference potential of the analog-to-digital converter, and an off potential of the transfer control unit include three or more potentials each having a different potential level; the low-potential side reference potentials of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter are substantially equal to each other; Imaging device.

2. a low-potential side reference potential of the photoelectric conversion unit is lower in potential level than a low-potential side reference potential of the detection unit; The imaging device according to claim 1 .

3. a low-potential side reference potential of the photoelectric conversion unit is higher in potential level than an off-potential of the transfer control unit; The imaging device according to claim 1 .

4. at least one of the low-potential-side reference potential of the photoelectric conversion unit, the low-potential-side reference potential of the detection unit, the low-potential-side reference potential of the pixel signal generation unit, the low-potential-side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit is a ground potential, and at least one of the others is a first reference potential having a potential level higher than the ground potential, and at least one of the others is a second reference potential having a potential level lower than the ground potential; The imaging device according to claim 1 .

5. a low-potential side reference potential of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential, a low-potential side reference potential of the detection unit is the first reference potential, an off potential of the transfer control unit is the second reference potential; The imaging device according to claim 4.

6. The ground potential is 0 V. the first reference potential is a positive potential, the second reference potential is a negative potential; The imaging device according to claim 4 .

7. a photoelectric conversion unit having a plurality of photoelectric conversion elements each of which converts incident light into an electric signal; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; a potential selection unit that switches a low potential side reference potential of the photoelectric conversion unit, the analog-to-digital converter converts the pixel signal into the digital signal when the detection unit detects that the amount of change has exceeded the predetermined threshold; the potential selection unit selects a first reference potential during a period in which the detection unit detects whether or not the amount of change has exceeded the predetermined threshold, and selects a second reference potential having a potential level higher than the first reference potential during a period in which the analog-to-digital converter converts the pixel signal into the digital signal. Imaging device.

8. the first reference potential is a negative potential, the second reference potential is a ground potential; The imaging device according to claim 7.

9. the low potential side reference potential of the photoelectric conversion unit, the low potential side reference potential of the detection unit, the low potential side reference potential of the pixel signal generation unit, the low potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit each include two or more potentials having different potential levels.

9. The imaging device according to claim 7 or 8.

10. a low-potential-side reference potential of the detection unit, a low-potential-side reference potential of the pixel signal generation unit, and a low-potential-side reference potential of the analog-to-digital converter are ground potentials; The off potential of the transfer control unit is a negative potential. The imaging device according to claim 7 .

11. a potential generating unit that generates at least one of the first reference potential and the second reference potential; The imaging device according to claim 4 .

12. At least the detection unit is disposed on a second substrate that is laminated on a first substrate on which the photoelectric conversion unit is disposed. The imaging device according to claim 1 .

13. a back gate of a transistor in the transfer control unit is set to a potential at the same potential level as a low potential side reference potential of the photoelectric conversion unit; The imaging device according to claim 1 .

14. an imaging device that outputs captured image data; a processor for performing a predetermined signal processing on the image data, The imaging device includes: a photoelectric conversion unit having a plurality of photoelectric conversion elements each of which converts incident light into an electric signal; a detection unit that outputs a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; a pixel signal generating unit that generates a pixel signal based on the electrical signal; a transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit; an analog-to-digital converter for converting the pixel signal into a digital signal; a low-potential-side reference potential of the photoelectric conversion unit, a low-potential-side reference potential of the detection unit, a low-potential-side reference potential of the pixel signal generation unit, a low-potential-side reference potential of the analog-to-digital converter, and an off potential of the transfer control unit include three or more potentials each having a different potential level; the low-potential side reference potentials of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter are substantially equal to each other; electronic equipment.

15. A step of photoelectrically converting incident light to generate an electrical signal by a plurality of photoelectric conversion elements; outputting a detection signal indicating whether or not a change amount of the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold; transmitting said electrical signal; generating a pixel signal based on the transferred electrical signal; converting the pixel signal into a digital signal; the low-potential reference potential at the time of the photoelectric conversion, the low-potential reference potential at the time of outputting the detection signal, the low-potential reference potential at the time of generating the pixel signal, the low-potential reference potential at the time of converting the pixel signal into a digital signal, and an off potential at the time of transferring the electrical signal include three or more potentials each having a different potential level, and the step of generating the electrical signal, the step of outputting the detection signal, the step of transferring the electrical signal, the step of generating the pixel signal, and the step of converting into the digital signal are performed using these potentials, a low-potential-side reference potential during the photoelectric conversion, a low-potential-side reference potential during generation of the pixel signal, and a low-potential-side reference potential during conversion of the pixel signal into a digital signal are substantially equal to each other; Imaging method.

Images