Method for manufacturing an optoelectronic semiconductor chip and an optoelectronic semiconductor chip

Abstract

According to one embodiment, a method for manufacturing an optoelectronic semiconductor chip is used, comprising the following steps: A) growing an AlInGaAsP semiconductor layer sequence (3) on a growth substrate (2) along a growth direction (G), the semiconductor layer sequence (3) comprising an active zone (33) for generating radiation, the active zone (33) being composed of a plurality of quantum well layers (61) and barrier layers (62) arranged alternately with one another; B) generating structured masking layers (5, 34); C) partially mixing the quantum well layers (61) and the barrier layers (62) by applying a mixing aid (55) into the active zone (33) in at least one mixing region (51) through openings (50) in the masking layers (5, 34); and D) individualizing the semiconductor layer sequence (3) to form partial regions (39) for a semiconductor chip (1), wherein in step A), x≧0.5 [(Al x Ga 1-x ) y In 1-y ] z P 1-z A barrier layer (62) is grown from the

Description

[Technical field]

[0001] The present invention relates to a method for manufacturing an optoelectronic semiconductor chip.Furthermore, the present invention relates to an optoelectronic semiconductor chip.

[0002] The problem to be solved is to provide a method for manufacturing optoelectronic semiconductor chips that is highly efficient and relatively small.

[0003] This problem is solved in particular by a method with the features of claim 1. Preferred developments are described in the further claims.

[0004] According to at least one embodiment, the method is used to manufacture an optoelectronic semiconductor chip. The finished semiconductor chip is in particular a light-emitting diode chip, or LED chip for short. Alternatively, a laser diode chip can be manufactured, for example a surface-emitting radar diode chip or else a side-emitting laser diode chip. Furthermore, the optoelectronic semiconductor chip can be a detector chip, in particular a photodiode.

[0005] According to at least one embodiment, the method comprises the step of growing a semiconductor layer sequence, in particular along a growth direction on a growth substrate, in particular a GaAs substrate.

[0006] The semiconductor layer sequence is preferably based on III-V compound semiconductor materials. Particularly preferably, the semiconductor layer sequence is based on the phosphide material system AlInGaAsP. In this case, the semiconductor layer sequence contains not only Al but also In, Ga and P. As forms an optional component of the semiconductor layer sequence. The semiconductor layer sequence can comprise dopants as well as additional components. For the sake of simplicity, however, only the basic components of the crystal lattice of the semiconductor layer sequence are mentioned, i.e. Al, As, Ga, In or P, even though they can be partially supplemented and / or replaced by small amounts of further substances.

[0007] As an alternative to AlInGaAsP or AlInGaP, the semiconductor layer sequence can also be based on AlInGaN or AlInGaAs. The following description of AlInGaAsP or AlInGaP can equally be applied to AlInGaN or AlInGaAs, with N or As respectively replacing P.

[0008] According to at least one embodiment, the semiconductor layer sequence comprises an active zone. The active zone is preferably adapted to generate radiation, but alternatively can be configured to detect radiation. The active zone is in particular a multi-quantum well structure, in English abbreviated as multi quantum well structure or MQW. In the active zone, a number of quantum well layers and barrier layers are arranged alternately with one another. In particular, the active zone consists of a number of alternating quantum well layers and barrier layers.

[0009] According to at least one embodiment, the method comprises the step of producing a structured masking layer. The masking layer can be part of the semiconductor layer sequence and therefore still be present in the finished semiconductor chip. Alternatively, the masking layer is a layer that is produced specifically for that purpose, for example a soft mask such as a photoresist or a hard mask such as an oxide layer.

[0010] According to at least one embodiment, the method comprises a step of intermixing the quantum well layers and the barrier layers in some regions. The intermixing is performed by applying an intermixing agent. An intermixing agent, in particular zinc, is introduced into the active zone through an opening in the masking layer such that the intermixing agent is present in at least one intermixing region. The intermixing agent induces intermixing of the crystalline components of the semiconductor layer sequence, in particular Al, Ga and / or In. The intermixing is preferably performed at a temperature significantly higher than room temperature and also significantly higher than the prescribed future operating temperature of the finished semiconductor chip.

[0011] The intermixing can be homogeneous across all quantum well layers. Alternatively, the intermixing can be non-homogeneous. The intermixing preferably extends completely through the active zones to the n-doped regions. Furthermore, there is preferably only a single intermixing region per active zone or per lateral edge of an active zone, although there can also be several intermixing regions per active zone or per lateral edge, which are interrupted by non-intermixed regions along the growth direction.

[0012] According to at least one embodiment, the method comprises a step of singulating the semiconductor layer sequence in order to produce partial regions for the semiconductor chip, for example by etching, but alternatively also by sawing or cracking and breaking.

[0013] According to at least one embodiment, [(Al x Ga 1-x ) y In 1-y ] z P 1-z The barrier layer is grown from, preferably with x≧0.5 or x≧0.6 or x≧0.7 or x≧0.8 or x≧0.9=1. By applying x=1, the barrier layer can be Ga-free or substantially Ga-free when grown.

[0014] In at least one embodiment, the method is used for producing optoelectronic semiconductor chips and particularly preferably comprises the following steps, in the order listed: A) growing an AlInGaAsP semiconductor layer sequence on a growth substrate along a growth direction, the semiconductor layer sequence comprising an active zone for generating radiation, the active zone being made up of a number of alternating quantum well layers and barrier layers, B) generating a structured masking layer; C) intermixing the quantum well layer and the barrier layer in some regions by applying an intermixing agent in the active zone in at least one intermixing region through an opening in the masking layer; and D) Individualizing the semiconductor layer sequence so that partial regions for the semiconductor chip are produced. Including, In step A), x≧0.5 or preferably x≧0.6 [(Al x Ga 1-x ) y In 1-y ] z P 1-z A barrier layer is grown from

[0015] The method described herein makes it possible, in particular in the case of LED chips with short edge lengths, to reduce or eliminate non-radiative charge carrier recombinations, i.e. loss channels, at the sides of the semiconductor layer sequence, and thus makes it possible to produce semiconductor chips with small lateral dimensions and high efficiency.

[0016] Localized in-diffusion of impurities and subsequent intermixing of quantum wells, also called quantum well intermixing, is a possible method for improving especially the low current characteristics of optoelectronic semiconductor chips. This is especially true for light-emitting diode chips with small dimensions, also called μLEDs, emitting in the red spectral range. In this case, in order to achieve a significant degree of intermixing on a wafer containing closely packed μLEDs, sufficiently long diffusion times must be maintained, especially in MOVPE reactors.

[0017] However, the degree of mixing does not only depend on the diffusion time, but also on the packing ratio of the μLEDs, with the tendency being that the degree of mixing decreases as the packing ratio increases. The methods described herein can reduce the time required during fabrication, especially the diffusion time, and / or increase the degree of mixing in the active zone, especially for red-emitting μLEDs that are densely packed on a wafer.

[0018] For example, to improve the efficiency of μLEDs based on the material system AlInGaAsP, local in-diffusion of impurities such as zinc is used in combination with intermixing of the quantum wells and barrier layers induced by these impurities. In a typical LED structure, the barrier layers have an aluminum content of about 50%, which is [(Al x Ga 1-x ) y In 1-y ] z P 1-z The reason for this relatively low aluminum content is that a higher aluminum content typically leads to an increased operating voltage, especially in the case of active zones containing tens of barrier and quantum well layers. In contrast, in the method described herein, barrier layers are grown with a significantly increased aluminum content of at least 60%, preferably at least 80%.

[0019] For AlGaInP-based μLEDs, the number of quantum well and barrier layers in the active zone is usually limited to a maximum of 50. Nevertheless, the current injection into the active zone must be uniform over the quantum well layers. In the case of using a mixing step, the design of the layers in the active zone must be carefully selected. A typical potential barrier aimed at preventing recombination centers for non-radiative recombination of charge carriers on the sidewalls of the μLED and thus avoiding efficiency loss as well is around 65 meV for a barrier with an aluminum content x of 50%. This value is around 140 meV for a barrier layer with an aluminum content x of 85%.

[0020] This is true for equal process times, which results in stronger mixing due to the higher aluminum content, and thus improved efficiency of the finished semiconductor chip. Moreover, since mixing is generally tricky in the manufacturing process of μLEDs, the method described herein can be used to generally improve mixing in such μLEDs. In addition, the mixed region created by the barrier with a high aluminum content x has an indirect band gap. This means that in the mixed region with the mixing aid, not only radiative but also non-radiative recombination can be significantly reduced, which increases the efficiency of the finished laser diode.

[0021] Furthermore, the methods described herein allow, particularly in μLEDs, to influence the uniformity of current injection into the quantum well layers by varying the composition of the barrier layers along the growth direction across the active zone.

[0022] According to at least one embodiment, the masking layer is formed by a contact layer of the semiconductor layer sequence, in particular by a p-type contact layer. Alternatively, a separate masking layer is used, for example in the form of a correspondingly structured permanent passivation layer or in the form of a temporary layer, such as a photoresist.

[0023] According to at least one embodiment, the contact layer, in particular the p-type contact layer, is completely penetrated by an opening in step B), i.e. in places the contact layer is completely removed.

[0024] In this case, the contact layer is preferably Al v Ga 1-v Contains As or Al v Ga 1-v In particular, v≦0.35 or v≦0.1 applies. Alternatively or additionally, v≧0, in particular v≧0.01 or v≧0.05 applies. The contact layer can also be formed by a combination of a GaAs layer with such an AlGaAs layer.

[0025] According to at least one embodiment, the mixing in step C) is performed so as to completely penetrate the active zone along the growth direction. That is, the mixing region completely penetrates the active zone up to the growth substrate. Alternatively, the mixing region extends through the active zone but does not reach the growth substrate, or only reaches the growth substrate in some places.

[0026] According to at least one embodiment, the singulation in step D) is performed only in at least one mixing region. This is particularly true when looking at the semiconductor layer stack from above, especially when looking at the contact layer from above. Thus, the side surfaces of the semiconductor layer stack resulting from the singulation are at least partially, or otherwise completely, formed by at least one mixing region.

[0027] According to at least one embodiment, in step A), a quantum well layer is grown from [(Al a Ga 1-a ) b In 1-b c P 1-c In this case, in particular, 0 < a ≤ 0.3 or 0.05 ≤ a ≤ 0.2 is applicable. The emission wavelength of the maximum intensity of the active zone can be adjusted, in particular, via the aluminum content in the quantum well layer. All quantum well layers can be grown nominally equal, that is, they can be made not to differ from each other with respect to the material composition and furthermore with respect to their thickness within the manufacturing tolerances. Alternatively, for example, quantum well layers configured to be different from each other can be grown such that a predetermined transition in thickness or a predetermined transition in the aluminum content of the quantum well layer is achieved within the active zone along the growth direction. Quantum well layers with changing characteristics are also referred to as chirped MQW.

[0028] According to at least one embodiment, [(Al a Ga 1-a ) b In 1-b ​] c P 1-c For the quantum well layer consisting of [(Al x Ga 1-x ) y In 1-y ] z P 1-z For a barrier layer consisting of, 0.47≦y≦0.53 and 0.47≦z≦0.53 and / or 0.47≦b≦0.53 and 0.47≦c≦0.53 apply, or else 0.48≦y≦0.52 and 0.48≦z≦0.52 and / or 0.48≦b≦0.52 and 0.48≦c≦0.52 apply. And preferably, c<0.5 and z<0.5 and / or b>0.5 and y>0.5 apply.

[0029] The above-mentioned values ​​for b, c, y and z apply in particular in the case of lattice-matched or pseudomorphic growth of the semiconductor layer sequence on a GaAs growth substrate. Alternatively, the active zone can be intentionally grown tensile, so that values ​​for y, z and / or b, c that are different from the above-mentioned ranges are intentionally used.

[0030] According to at least one embodiment, step C) comprises a heat treatment of the semiconductor layer sequence, for example at an elevated temperature for a period of at least 0.2 or 0.5 hours and / or at most 10 or 2 hours, for example at least 400° C. or 500° C. and / or at most 700° C. or 600° C. In particular, this temperature lies between 500° C. and 540° C.

[0031] According to at least one embodiment, the active zone is present between the first and second semiconductor regions. The first and / or second semiconductor regions can each consist of one or more partial layers. In particular, the second semiconductor region comprises more than one partial layer. For example, the first semiconductor region is n-doped and the second semiconductor region is p-doped. In this case, the p-contact layer can be the partial layer of the second semiconductor region which is located furthest from the active zone after step A).

[0032] According to at least one embodiment, the openings extend through the contact layer in the direction of the active zone into the remaining part of the second semiconductor region by at least 50 nm or at least 100 nm. These openings then end at a distance from the active zone. This distance from the active zone is preferably at least 150 nm or 250 nm or 300 nm. The total thickness of the second semiconductor region is in particular at least in the vicinity of 0.3 μm or 0.4 μm. Alternatively or additionally, the total thickness can be, for example, at most 10 μm or 1 μm or 0.6 μm. In this case, the p-type contact layer preferably has a relatively small thickness, for example at most 50 nm or 20 nm and / or at least 4 nm or 8 nm.

[0033] According to at least one embodiment, the partial regions of the semiconductor layer sequence for the semiconductor chip generated in step D) have an average edge length of at most 150 μm or 100 μm or 70 μm or 30 μm or 10 μm, respectively, when viewed from above. The finished semiconductor chip is thus a μLED. If the partial regions are not square or rectangular when viewed from above, the average diameter of the partial regions can be used instead of the average edge length.

[0034] According to at least one embodiment, after step D), at least one mixed region extends into the active zone by at least 0.1 μm or 0.2 μm in a direction perpendicular to the growth direction. Alternatively or additionally, this value is in the vicinity of at most 1.5 μm or 1 μm or 0.5 μm or 0.3 μm. That is to say, when viewed from above, only a relatively small part of the active zone is mixed. That is to say, when viewed from above, the mixed region is relatively small relative to the active zone, in particular at most 3% or 1% or 0.2% of the area of ​​the active zone, also when viewed from above.

[0035] According to at least one embodiment, at least one mixed region extends completely through the semiconductor layer sequence in a direction parallel to the growth direction, i.e. the mixed region can reach down to the growth substrate or else into the growth substrate.

[0036] According to at least one embodiment, the active zone comprises at least 2 or 3 or 4 quantum well layers after step A. Alternatively or additionally, the number of quantum well layers is at most around 50 or 30 or 20 or 10 or 5.

[0037] According to at least one embodiment, the quantum well layers each have a thickness of at least 2 nm or 4 nm. Alternatively or additionally, the quantum well layers each have a thickness of at most around 15 nm, 10 nm, 7 nm or 4 nm, respectively.

[0038] According to at least one embodiment, the barrier layers have a thickness of at least 2 nm, 3 nm, or 5 nm, respectively. Alternatively or additionally, the thickness of the barrier layers is at most around 353 nm, 25 nm, 15 nm, or 10 nm, respectively. In particular, the thickness of the barrier layers is at most around 7 nm, for example with a tolerance of at most 1 nm or 2 nm.

[0039] According to at least one embodiment, the active zone is adapted to generate a maximum intensity radiation wavelength of at least 560 nm or 590 nm or 610 nm or 620 nm. Alternatively or additionally, the maximum intensity radiation wavelength is at most around 670 nm or 655 nm or 635 nm. Thus, the finished semiconductor chip is particularly adapted to generate red light.

[0040] According to at least one embodiment, after step A) and yet before at least step C), the barrier layers are grown such that some or all of the barrier layers have different aluminum contents. Blocks of barrier layers immediately adjacent to each other can be grown nominally equally. Pairs of barrier layers can have different aluminum contents, etc.

[0041] According to at least one embodiment, after step A) and before step C), the corresponding aluminum content is constant within the individual barrier layers, i.e., the individual barrier layers are grown without a gradient in the aluminum content within the respective barrier layer. Alternatively, the individual barrier layers can already be grown in step A) with an aluminum gradient.

[0042] According to at least one embodiment, the minimum and maximum aluminum contents of the barrier layer in the active zone differ after step A) and at least before step C) by a factor of at least 1.05 or 1.1 or 1.2, respectively. Alternatively or additionally, this factor is at most around 1.7 or 1.6 or 1.5 or 1.4.

[0043] According to at least one embodiment, some or all of the barrier layers have different thicknesses, where the barrier layers of the same thickness can be grouped together in blocks, or all of the barrier layers have different thicknesses in pairs.

[0044] According to at least one embodiment, the minimum and maximum thicknesses of the barrier layers in the active zone differ by at least a factor of 1.2 or 1.5 or 2 or 2.5, respectively. Alternatively or additionally, this factor is at most 8 or 6 or 4 or 3.

[0045] According to at least one embodiment, the barrier layers in the active zone are arranged asymmetrically with respect to the thickness variation and / or the aluminum content variation at least after step A) and before step C), i.e. with respect to the configuration of the barrier layers, there is no symmetry plane in the active zone that is oriented perpendicular to the growth direction. Alternatively, the barrier layers are distributed symmetrically such that such a symmetry plane exists in the active zone for the barrier layers.

[0046] According to at least one embodiment, the adjuvant is zinc, which is applied in step C), in particular by vapor deposition, for example in the form of diethylzinc, abbreviated DEZn, or as dimethylzinc, abbreviated DMZn. Alternatively or additionally to zinc, magnesium can be used, which is applied, for example, by bis(cyclopentadienyl)magnesium, abbreviated Cp2Mg.

[0047] According to at least one embodiment, after step D), in step E), at least one passivation layer is applied on the separated mixed regions, i.e. on the sides of the semiconductor layer sequence produced in the singulation step. The passivation layer is, for example, made of an oxide, such as silicon dioxide, or a nitride, such as silicon nitride. The thickness of the passivation layer is preferably relatively small, for example at least in the region of 50 nm and / or at most in the region of 250 nm.

[0048] According to at least one embodiment, the growth substrate is removed only after step C), immediately after step C) or otherwise after several intermediate steps. In particular before the removal of the growth substrate, a replacement support can be attached to the semiconductor layer sequence. Such a replacement support is preferably attached before the singulation step in step D). The singulation step, i.e. step D), can be performed before or after the removal of the growth substrate, depending on when the optional replacement support is attached.

[0049] The invention further relates to an optoelectronic semiconductor chip, which is preferably manufactured by a method as described in connection with one or more of the above-mentioned embodiments, and therefore features of the semiconductor chip are also disclosed for the method and vice versa.

[0050] According to at least one embodiment, the optoelectronic semiconductor chip comprises an AlInGaAsP semiconductor layer sequence, which comprises an active zone for generating radiation, which active zone is made up of a number of quantum well layers and barrier layers arranged alternately with one another. The semiconductor layer sequence comprises a structured masking layer, in particular a p-type contact layer. The quantum well layers and the barrier layers are mixed in some areas in the active zone in a mixing region, in which a mixing aid, in particular zinc, is present. The mixing region extends around the periphery of the semiconductor layer sequence, preferably in a closed locus, when viewed from above. The barrier layers have a composition other than the mixing region with x≧0.5 or x≧0.8 or x≧0.9 or x=1 [(Al x Ga 1-x ) y In 1-y ] z P 1-z It consists of:

[0051] According to at least one embodiment, the semiconductor chip is a red-emitting laser diode chip having an average edge length of at most 50 μm, the mixed region extending into the active zone by at least 0.1 μm and / or by at most 0.5 μm in the direction perpendicular to the growth direction of the semiconductor layer sequence.

[0052] The method described herein and the optoelectronic semiconductor chip described herein will now be explained in more detail by way of example with reference to the drawings, in which like reference numbers refer to like elements in the individual figures, which are not drawn to scale and in which individual elements may even be exaggerated in order to facilitate understanding. [Brief description of the drawings]

[0053] [Figure 1] 1A-1D are cross-sectional views that illustrate schematic process steps of one embodiment of the manufacturing method described herein for the optoelectronic semiconductor chip described herein. [Diagram 2] 1A-1D are cross-sectional views that illustrate schematic process steps of one embodiment of the manufacturing method described herein for the optoelectronic semiconductor chip described herein. [Diagram 3] 1A-1D are cross-sectional views that illustrate schematic process steps of one embodiment of the manufacturing method described herein for the optoelectronic semiconductor chip described herein. [Figure 4] 1A-1D are cross-sectional views that illustrate schematic process steps of one embodiment of the manufacturing method described herein for the optoelectronic semiconductor chip described herein. [Diagram 5] 1A-1D are cross-sectional views that illustrate schematic process steps of one embodiment of the manufacturing method described herein for the optoelectronic semiconductor chip described herein. [Figure 6] 1A-1D are cross-sectional views that illustrate schematic process steps of one embodiment of the manufacturing method described herein for the optoelectronic semiconductor chip described herein. [Figure 7] 1A-1D are cross-sectional views that illustrate schematic process steps of one embodiment of the manufacturing method described herein for the optoelectronic semiconductor chip described herein. [Figure 8] 1A-1D are cross-sectional views that illustrate schematic process steps of one embodiment of a manufacturing method for an optoelectronic semiconductor chip as described herein. [Figure 9] 1A-1D are top plan views that illustrate schematic process steps of one embodiment of a manufacturing method for an optoelectronic semiconductor chip as described herein. [Figure 10] FIG. 2 is a diagram showing a schematic diagram of the progression of the aluminum content in one variation of a semiconductor chip. [Figure 11] 2A and 2B are schematic diagrams illustrating aluminum transitions for an embodiment of an optoelectronic semiconductor chip as described herein. [Figure 12] 2A and 2B are schematic diagrams illustrating aluminum transitions for an embodiment of an optoelectronic semiconductor chip as described herein. [Figure 13] 2A and 2B are schematic diagrams illustrating aluminum transitions for an embodiment of an optoelectronic semiconductor chip as described herein. [Figure 14] 2A and 2B are schematic diagrams illustrating aluminum transitions for an embodiment of an optoelectronic semiconductor chip as described herein.

[0054] 1 to 5 show an embodiment of a manufacturing method for an optoelectronic semiconductor chip 1. According to Fig. 1, a semiconductor layer sequence 3 is epitaxially grown on a growth substrate 2 along a growth direction G.

[0055] The semiconductor layer sequence 3 comprises first semiconductor regions 31, for example n-type doped regions, directly on the growth substrate 2. In the figures, the first semiconductor regions 31 are each depicted as a single layer. Alternatively, the first semiconductor regions 31 can be composed of several partial layers. In particular, the first semiconductor regions 31 have, on the side facing the growth substrate 2, a buffer layer (not shown) and / or an n-type contact layer (not shown).

[0056] The first semiconductor region 31 is followed in the direction away from the growth substrate 2 by an active zone 33 for generating radiation. The active zone 33 comprises a number of quantum well layers 61 and barrier layers 62 arranged in alternation. In particular, in the active zone 33 orange or red light is generated during operation of the finished semiconductor chip 1.

[0057] Along the growth direction G, the active zone 33 is followed by a second semiconductor region 32. The second semiconductor region 32 is, for example, p-type doped. As an uppermost layer furthest away from the growth substrate 2, the second semiconductor region 32 comprises a p-type contact layer 34. Between the p-type contact layer 34 and the active zone 33 there is thus present a remainder 35 of the second semiconductor region.

[0058] The semiconductor layer sequence 3 is based on the material system AlGaInAsP, where the quantum well layers are preferably [(Al a Ga 1-a ) b In 1-b ] c P 1-c where a is 0.1≦a≦0.3 depending on the wavelength to be generated. The barrier layer is [(Al x Ga 1-x ) y In 1-y ] z P 1-z where x≧0.6, in particular x≧0.8. The barrier layer therefore has a relatively high aluminum content x. The p-type contact layer 34 is particularly v Ga 1-vAs, where v≦0.2. What is particularly true for parameters b, c, y, and z is that these parameters are near 0.5, and in particular near 0.51 or 0.49. For example, active zone 33 includes 5 to 15 quantum well layers 61.

[0059] The process step of Fig. 2 shows the formation of a number of openings 50 through the p-type contact layer 34. The openings 50 reach into the second semiconductor region remainder 35. The openings 50 have a depth of, for example, 50 nm to 200 nm. The spacing between the openings 50 and the active zone 33 is preferably at least 300 nm. The second semiconductor region remainder 35 has a thickness of, for example, 300 nm to 600 nm. The p-type contact layer 34 has a thickness of, for example, 5 nm to 20 nm.

[0060] The p-contact layer 34 thus simultaneously serves as a masking layer 5 for the subsequent process steps, see Fig. 3. Optionally, in the steps of Figs. 2 and 3, besides the opening a further masking layer, not shown, is applied onto the p-contact layer 34, e.g. a photoresist layer. However, such a further masking layer, which is used when forming the opening 50 in the p-contact layer 34, can also already be removed before the process step of Fig. 3.

[0061] 3 shows that a gaseous precursor 56 is brought close to the semiconductor layer sequence 3. The precursor 56 is, for example, DMZn or DEZn. Zinc is thus supplied via the precursor 56 as mixing assistant 55. Instead of supplying it from the gas phase, it is also possible to deposit a solid layer for the mixing assistant 55, for example a zinc layer having a thickness of a few nm.

[0062] Preferably, the temperature is increased, for example to about 550° C., so that the auxiliary mixing agent 55 diffuses into the semiconductor layer sequence 3. In this case, the AlGaAs p-type contact layer 34 is non-transparent to the auxiliary mixing agent 55.

[0063] Thus, each opening 50 defines an intermixed region 51 having therein an intermixing agent 55. In the intermixed region 51, intermixing of the materials of the barrier layers 62 and the quantum well layers 61 occurs, as will be shown further below in connection with Figures 11-14.

[0064] The mixed region 51 extends, for example, at least 0.2 μm or 0.5 μm below the p-type contact layer 34. The same applies to all other embodiments.

[0065] The process steps of Fig. 4 show that the semiconductor layer sequence 3 is individualized in the region of the openings 50, so that partial regions 39 for the semiconductor chip 1 are produced. The individualization is carried out, for example, by etching. As a result, individualization trenches 8 result between the partial regions 39. In contrast to what is shown in Fig. 4, the individualization trenches 8 can also reach all the way into the growth substrate 2. The edge length of the partial regions 39 is thereby preferably short, less than 100 μm or 50 μm, when viewed from above.

[0066] The individualization trenches 8 are each located within the region of a mixed region 51. The individualization trenches 8 result in side walls of the semiconductor layer sequence 3 which, according to FIG. 4, are each only partially formed by the mixed region 51. In the direction towards the growth substrate 2, the mixed region 51 begins on the side of the p-type contact layer 34 facing the active zone 33. The mixed region 51 preferably extends downwardly below the p-type contact layer 34, as shown.

[0067] 4 further shows that a plurality of second electrodes are applied onto the p-type contact layer 34, as well as the formation of a passivation layer 7. Masking layers for forming the second electrodes 42 and / or for forming the passivation layer 7 are not shown.

[0068] 5 further shows that, as an option, the growth substrate is removed from partial regions. A first electrode 41 is attached to the first semiconductor region 31. The passivation layer 7 is removed over a large area from the second electrode 42. The semiconductor chip 1 is thus preferably a light-emitting diode chip for producing red light.

[0069] The electrodes 41, 42 are shown only diagrammatically in Figure 5. The electrodes 41, 42 comprise at least a metal and / or a transparent conductive oxide and are configured, for example, as shown in Figure 3 and paragraphs 59-62 of US Patent Application Publication No. 2012 / 0248494, the disclosure of which is incorporated herein by reference, in particular Figure 3 and paragraphs 59-62.

[0070] A further manufacturing method is shown in Figures 6 and 7, where only some process steps are shown, the other process steps can be carried out in the same way as in Figures 1 to 5.

[0071] According to Fig. 6, a mixing aid 55 is applied through the opening 50 to form a mixed region 51. In this case, a separate masking layer 5 is used which is not a partial layer of the semiconductor layer sequence 3. For example, the masking layer 5 is a hard mask made, for example, of silicon nitride or silicon dioxide. This allows the mixed region 51 to reach right up to the masking layer 5.

[0072] 6 further shows that the mixed region 51 extends completely through the semiconductor layer sequence 3 and thus all the way to the growth substrate 2. The mixed region 51 can also be embodied in a similar manner in the methods according to FIGS.

[0073] 7, individualization trenches 8 are produced which reach at least as far as the growth substrate 2. This allows the semiconductor layer sequence 3, and thus the side walls of the individualization trenches 8, to be formed completely through the mixed region 51 in the region below the masking layer 5.

[0074] The masking layer 5 can also serve as a mask for forming the personalization trenches 8, i.e. the personalization trenches 8 and the openings 50 can extend congruently with one another when viewed from above, unlike the case shown in Figures 1 to 5. Personalization trenches 8 like these can alternatively also be used in the method shown in connection with Figures 1 to 5.

[0075] In the method of FIG. 8, it is shown that the p-type contact layer 34 is also used as masking layer 5. Here again, the singulation trenches 8 and the openings 50 are arranged congruently when viewed from above. However, it is not essential that the intermixed regions 51 involved in the singulation still reach the growth substrate 2 after the singulation. For example, the intermixed regions 51 reach the growth substrate 2 only in those regions which are subsequently removed by the singulation. A similar arrangement is possible in the methods of FIGS. 1 to 5 and 6 and 7.

[0076] Figure 9 shows a schematic top view of the semiconductor layer sequence 3 after singulation, as shown in particular in the methods of Figures 6 and 7 and in the method of Figure 8, i.e. the singulation trenches 8 and the openings 50 extend congruently. Corresponding structures with singulation trenches 8 narrower than the openings 50 can likewise be used.

[0077] The mixing regions 51 each run in a closed path around the periphery of a partial region 39 of the semiconductor layer sequence 3. The partial regions 39 for the semiconductor chip 1 are each approximately square or otherwise rectangular in shape. The edge length of the partial regions 39 is less than 100 μm. The distance between adjacent partial regions 39, and thus the width of the openings 50 and the individualization trenches 8, is preferably relatively small, for example in the region of at most 10%, 5% or 2% of the average edge length of the partial regions 39. In particular, the openings 50 and / or the individualization trenches 8 have a width of at most 5 μm, 3 μm or 1 μm and / or a width of at least 0.5 μm or 1 μm. The partial regions 39 are thus arranged closely packed on the growth substrate 2, so that only a relatively small space remains for the inward diffusion of the mixing auxiliary 55.

[0078] In Fig. 10 one variation 10 of the semiconductor chip is shown. In this case the ratio of the aluminium content to the sum of the aluminium and gallium contents is plotted in percentage terms in the growth direction G. The left part of the figure concerns the non-mixed region 52 of the active zone 33, whereas the right part of the figure focuses on the mixed region 51 of the active zone 33. The same representation is used in Figs. 11 to 14.

[0079] The barrier layer 62 has a relatively low aluminum content, which results in a relatively flat progression of the aluminum content after intermixing in the intermixed region 51, i.e. a band gap of a relatively low height relative to the quantum well layer 61. This makes it possible to reduce the recombination losses of the charge carriers at the sidewalls of the partial region 39, and thus of the semiconductor chip 1, only to a relatively low extent. In the case of conventional LEDs, such edge effects play a less significant role, since the edge lines play a relatively secondary role in relation to the overall area of ​​the active zone. In contrast, in the case of the μLEDs described herein, due to the small edge length of the partial region 39, the corresponding effects at the sidewalls are potentially significant loss channels.

[0080] Figure 11 shows the progression of the aluminum content for one embodiment of the semiconductor chip 1. The barrier layer 62 has an aluminum content of about 85%, which is significantly higher than in Figure 10. As a result, in the intermixed region 51, the band gap between the quantum well layer 61 in the unintermixed region 52 and the intermixed structure in the intermixed region 51 is significantly increased.

[0081] According to Figure 11, all quantum well layers 61 and barrier layers 62 are grown identically and therefore remain unchanged along the growth direction G in the unmixed regions 52. In contrast, the barrier layers 62 according to Figures 12 to 14 each have at least one gradient in thickness and / or material composition.

[0082] That is, according to Figure 12 the barrier layer 62 is configured with a decreasing aluminum content along the growth direction G. According to Figure 13 the aluminum content of the barrier layer 62 remains the same along the growth direction G, but the thickness of the barrier layer 62 decreases. Figure 14 is a combination of the configurations according to Figures 12 and 13, so that the thickness of the barrier layer decreases along the growth direction G with a decreasing aluminum content.

[0083] 11 to 14, for simplicity of illustration, only five quantum well layers 61 are depicted. More or fewer quantum well layers than those depicted may be provided within the active zone 33.

[0084] The barrier layers 62 in Figures 12 to 14 are arranged asymmetrically in the active zone 33, which therefore does not have a plane of symmetry, which would occur if the barrier layers 62 were designed with mirror symmetry. Alternatively, it is also possible to arrange the succession of barrier layers 62 symmetrically, so that, for example, as in Figure 12, the aluminum content of the barrier layers 62 first increases along the growth direction G and then decreases at the same rate. The same applies to the embodiments according to Figures 13 and 14.

[0085] Likewise, it is also possible that, unlike what is shown in Figures 12 to 14, the growth direction G progresses from right to left instead of from left to right. Furthermore, asymmetric combinations are possible from increasing and decreasing aluminum contents and increasing and decreasing layer thicknesses and corresponding combinations thereof, i.e. the barrier layers 62 can be distributed asymmetrically so that, viewed along the growth direction G, the aluminum content first increases and then decreases, or else the aluminum content first decreases and then increases. The same applies for the thickness (see Figure 13) or for the combination of thickness and aluminum content changes (see Figure 14).

[0086] The components shown in the drawings preferably follow one another directly above the other in the order of appearance, unless otherwise stated. Layers that are not in contact in the drawings are preferably spaced apart from one another. Also, insofar as lines are drawn parallel to one another, corresponding surfaces are preferably also oriented parallel to one another. Similarly, the relative positions of the illustrated components with respect to one another are accurately reproduced in the drawings, unless otherwise stated.

[0087] The invention described herein is not limited by the description based on the examples, but rather includes each and every novel feature and each and every combination of features, and in particular includes each and every combination of features in the claims, even if those features or combinations themselves are not explicitly recited in the claims or examples.

[0088] This patent application claims priority from German patent application no. 102019126506.1, the disclosure of which is hereby incorporated by reference. [Explanation of symbols]

[0089] 1 Optoelectronics Semiconductor Chips 2 Growth substrate 3 Semiconductor layer sequence 31 First semiconductor region (n-type region) 32 Second semiconductor region (p-type region) 33 Active Zone 34 p-type contact layer, especially Al v Ga 1-v As 35 Second semiconductor region remainder 39 Partial region of the semiconductor layer sequence 41 First electrode 42 Second electrode 5 Masking Layers 50 Opening 51 Intermixed regions of semiconductor layer sequences 52 Unmixed regions of semiconductor layer sequences 55 Mixing aids 56 Precursors for Mixed Auxiliaries 61 Quantum well layers, especially [(Al a Ga 1-a ) b In 1-b ] c P 1-c 62 Barrier layers, especially [(Al x Ga 1-x ) y In 1-y ] z P 1-z 7 Passivation Layer 8 Individualized Trench 10 Semiconductor chip variations G Growth direction of the semiconductor layer sequence

Claims

1. A method for manufacturing an optoelectronic semiconductor chip (1), the method comprising the following steps, in the order listed: A) growing an AlInGaAsP semiconductor layer sequence (3) along a growth direction (G) on a growth substrate (2), said semiconductor layer sequence (3) comprising an active zone (33) for generating radiation, said active zone (33) being composed of a number of quantum well layers (61) and barrier layers (62) arranged alternately with one another, B) generating a structured masking layer (5, 34); C) intermixing the quantum well layer (61) with the barrier layer (62) in a region by applying an intermixing agent (55) in the active zone (33) in at least one intermixing region (51) through an opening (50) in the masking layer (5, 34); and D) individualizing the semiconductor layer stack (3) so that partial areas (39) for the semiconductor chips (1) are formed. Including, In the step A, x≧0.6 [(Al ｘ G １－ｘ ) ｙ In １－ｙ ] ｚ P １－ｚ In step A), the barrier layer (62) is grown from [(Al ａ G １－ａ ) ｂ In １－ｂ ] ｃ P １－ｃ growing the quantum well layer (61) from 0.47≦z≦0.53 and 0.47≦c≦0.53; The mixed region (51) has an indirect band gap, and radiative and non-radiative recombination in the mixed region (51) is reduced. A method for manufacturing an optoelectronic semiconductor chip (1).

2. The barrier layer (62) in step A) is a layer having a thickness of x≧0.8 [(Al ｘ G １－ｘ ) ｙ In １－ｙ ] ｚ P １－ｚ The method of claim 1 , wherein the nanoparticles are grown from

3. The masking layer is formed by a p-type contact layer (34) of the semiconductor laminate (3); In step B), the p-type contact layer (34) is completely penetrated by the opening (50); The p-type contact layer (34) is Al ｖ G １－ｖ As, with the proviso that v≦0.35; In step C), mixing is performed completely through the active zone (33) along the growth direction (G), In step D), individualization is carried out only in the at least one mixing area (51), 0.47≦y≦0.53, and 0.47≦b≦0.53; 3. The method according to claim 1 or 2.

4. the active zone (33) being located between a first semiconductor region (31) and a second semiconductor region (32), the p-type contact layer (34) being a partial layer of the second semiconductor region (32) which is located furthest from the active zone (33) after step A); the opening (50) extends through the p-type contact layer (34) in the direction of the active zone (33) into the second semiconductor region remainder (35) by at least 50 nm and terminates at a distance of at least 200 nm to the active zone (33); The method of claim 3.

5. The completed semiconductor chip (1) is a light-emitting diode chip, In step D), the partial areas (39) for the semiconductor chip (1) each have an average edge length of at most 100 μm.

5. The method according to any one of claims 1 to 4.

6. after said step D), said at least one mixed region (51) extends into said active zone (33) by at least 0.1 μm and at most 0.5 μm in a direction perpendicular to said growth direction (G); 6. The method according to any one of claims 1 to 5.

7. said at least one mixed region (51) extends completely through said semiconductor layer sequence (3) parallel to said growth direction (G); 7. The method according to any one of claims 1 to 6.

8. After step A), 3 to 30 quantum well layers (61) are provided; The quantum well layers (61) each have a thickness of 2 nm or more and 15 nm or less; The barrier layers (62) each have a thickness of 3 nm or more and 25 nm or less; The emission wavelength of the maximum intensity of the active zone (33) is between 590 nm and 655 nm.

8. The method according to any one of claims 1 to 7.

9. After step A) and before step C), at least some of the barrier layers (62) have different aluminum contents; After step A) and before step C), the corresponding aluminum content is constant within each of the barrier layers (62); the minimum and maximum aluminum contents of the barrier layer (62) in the active zone (33) differ by at least a factor of 1.1 and at most a factor of 1.7, 9. The method according to any one of claims 1 to 8.

10. At least some of the barrier layers (62) have different thicknesses; the minimum and maximum thicknesses of the barrier layer (62) within the active zone (33) differ by at least a factor of 1.5 and at most a factor of 6, 10. The method according to any one of claims 1 to 9.

11. the quantum well layer (61) is the same after step A) and before step C), the barrier layer (62) in the active zone (33) is asymmetrically arranged with respect to thickness variation and / or aluminum content variation at least after step A) and before step C); 11. The method according to claim 9 or 10.

12. The mixing aid (55) is zinc.

12. The method according to any one of claims 1 to 11.

13. In the step (C), the mixed auxiliary (55) is precipitated in the form of diethylzinc and / or dimethylzinc by a vapor phase precipitation method; 13. The method of claim 12.

14. After said step D), in a step E), a passivation layer (7) is applied to the separated mixed region (51), 14. The method according to any one of claims 1 to 13.

15. The growth substrate (2) is removed after step C), 15. The method according to any one of claims 1 to 14.

16. An optoelectronic semiconductor chip (1) comprising an AlInGaAsP semiconductor layer stack (3), The semiconductor layer stack (3) comprises an active zone (33) for generating radiation, the active zone (33) being made up of a number of quantum well layers (61) and barrier layers (62) arranged alternately with one another, The semiconductor layer stack (3) comprises a structured masking layer (5, 34), The quantum well layer (61) and the barrier layer (62) are mixed in a partial region in the active zone (33) in a mixed region (51), and a mixing auxiliary agent (55) is present in the mixed region (51), and further The barrier layer (62) has x≧0.6 and 0.47≦z≦0.53 outside the mixed region (51) [(Al ｘ G １－ｘ ) ｙ In １－ｙ ] ｚ P １－ｚ The quantum well layer (61) is composed of 0<a≦0.2 and 0.47≦c≦0.53 outside the mixed region (51). ａ G １－ａ ) ｂ In １－ｂ ] ｃ P １－ｃ It consists of The mixed region (51) has an indirect band gap, and radiative and non-radiative recombination in the mixed region (51) is reduced. Optoelectronics semiconductor chips.

17. the optoelectronic semiconductor chip (1) being a light-emitting diode chip having an emission wavelength of maximum intensity between 560 nm and 670 nm, the light-emitting diode chip having an average edge length of at most 50 μm, The mixed region (51) extends into the active zone (33) by at least 0.1 μm and at most 0.5 μm in a direction perpendicular to the growth direction (G) of the semiconductor layer stack (3).

17. An optoelectronic semiconductor chip according to claim 16.

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