Charged particle beam device and camera image display method
JP7681649B2Active Publication Date: 2025-05-22JEOL LTD
7 Cites 0 Cited by
Patent Information
- Application Number
- JP2023117224
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2023-07-19
- Publication Date
- 2025-05-22
- Estimated Expiration
- 2043-07-19
Smart Images
Figure 0007681649000001 
Figure 0007681649000002 
Figure 0007681649000003
Abstract
To allow a user to easily see a camera image or utilize the camera image in lifting a sample unit.SOLUTION: In a step of lifting a sample unit 30, a camera image with a height guide is displayed. A display magnification controller 52 increases the display magnification of the camera image at the time point when the representative height of the sample unit 30 reaches a magnification change height. A projection amount computing unit 55 calculates the amount of projection of a sample 32 from a sample holder 31 on the basis of the height of the sample holder 31 at the time point when it receives a registration operation.SELECTED DRAWING: Figure 1
Need to check novelty before this filing date? Find Prior Art
Citation Information
Patent Citations
Charged particle beam device
JP2014093283A
Charged particle beam device capable of easily analyzing desired part with EBSD detector, and control method thereof
JP2015023005A
Sample measurement method using charged particle beam system and scanning electron microscope
JP2020126721A
3D mapping of sample by charged-particle microscopy
JP2022091151A
Method for generating an image of an object and particle beam device for carrying out the method
US10103002B1