Biasing device

Abstract

To provide an urging device for urging an object connected to a cutter blade so that the cutter blade can be effectively pressed against a workpiece having a complex shape. [Solution] The biasing device biases the movable body 90 against the direction in which the position of the movable body 90 is changed, and is provided with a cutter blade position biasing mechanism consisting of a first cutter blade position biasing cylinder 79a, a second cutter blade position biasing cylinder 79b, a connecting tube 51, a connecting tube 59, and an air compressor 14, and the cutter blade position biasing mechanism is biased by a predetermined air pressure toward both sides of the movable body 90 and has two movable pistons 47 and 55 that are arranged to protrude, and when the position of the movable body 90 is not changed, the two pistons 47 and 55 abut against the movable body 90 to bias it, and when the position of the movable body 90 is changed, either one of the two pistons 47 and 55 abuts against the movable body 90 depending on the direction of the position.

Description

Technical Field

[0001] The present invention relates to a biasing device used for processing a workpiece.

Background Art

[0002] Conventionally, a workpiece processing device and an ultrasonic processing device for processing a workpiece have been known.

[0003] For example, Patent Document 1 and Patent Document 2 describe an ultrasonic processing device that uses a cutter blade 10 to process a workpiece. This ultrasonic processing device swings the cutter blade 10 according to the shape of the workpiece, and biases the swing mechanism against the swing angle direction of the cutter blade 10 by a coil spring mechanism 84, thereby pressing the cutter blade 10 against the surface of the workpiece to be processed (see FIGS. 13 and 14 of Cited Document 1, FIGS. 13 and 14 of Cited Document 2, etc.).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, since the cutter blades described in Cited Document 1 and Cited Document 2 swing only by the swing mechanism, although there is no problem in pressing against the swing direction with respect to the workpiece to be processed, there is a problem that it is highly likely that they cannot cope with workpieces having a complex shape.

[0006] That is, since the cutter blades described in Citation Document 1 and Citation Document 2 swing only by the swing mechanism, there has been a problem that when the shape of the workpiece is complicated, the cutter blade cannot be pressed against the surface of the workpiece.

[0007] The present invention has been made in response to the above-described problems of the prior art, and an object thereof is to provide a biasing device used in an apparatus that can effectively press a cutter blade against a workpiece having a complicated shape (hereinafter referred to as a "workpiece").

Means for Solving the Problems

[0008] In order to solve the above-described problems, the biasing device according to the first aspect of the present invention A moving body that can move in a predetermined direction and in the direction opposite to the predetermined direction, and a place by a fixed air pressure is slidably disposed within the first gap, the moving body towards the predetermined direction capable of biasing a first piston and a second piston that is slidably disposed within the second gap by the predetermined air pressure and can bias the moving body in the opposite direction, is provided, and when the moving body moves is not present, the first the piston is while biasing the moving body by abutting it in the predetermined direction by the predetermined air pressure, and the second piston in the opposite direction to the moving body by the predetermined air pressure brought into contact with and biased, and when the moving body moves is present, according to its movement direction, the first any one of the pistons and the second piston is only brought into contact with and biased. , towards the moving body in the predetermined direction or the opposite direction by the predetermined air pressure It is characterized by this.

[0009] Further, a second aspect of the present invention is the biasing device according to the first aspect, wherein the first gap and the first piston, and the second gap and the second piston are arranged in opposite directions along the predetermined direction and are arranged in parallel in a direction intersecting the predetermined direction.

[0010] Furthermore, The second 3 aspect of the present invention is the biasing device according to the first aspect or the second aspect wherein a position locking mechanism for fixing the a first position of the moving body when the piston and the second piston is in contact with and biasing the moving body is provided. position It is characterized by this.

Effects of the Invention

[0011] According to the biasing device of the first aspect of the present invention,A moving body that can move in a predetermined direction and in the direction opposite to the predetermined direction, and a place By constant air pressure is slidably disposed within the first gap, Moving object towards the predetermined direction Activatable a first piston and a second piston that is slidably disposed within the second gap by the predetermined air pressure and can bias the moving body in the opposite direction, Equipped with a mobile moves If not, the first Piston while biasing the moving body by abutting it in the predetermined direction by the predetermined air pressure, and the second piston in the opposite direction to the moving body by the predetermined air pressure The moving body is pressed against the moves If so, movement Depending on the direction, the first Piston and the second piston Any one of the pistons only of , towards the moving body in the predetermined direction or the opposite direction by the predetermined air pressure Since the force is applied by contact, a constant force can be applied to the moving body regardless of the position of the moving body.

[0012] Further, according to the biasing device of the second aspect of the present invention, in the biasing device of the first aspect, the first gap and the first piston, and the second gap and the second piston are arranged in opposite directions along the predetermined direction and are arranged in parallel in a direction intersecting the predetermined direction. Therefore, regardless of the position of the moving moving body, a constant biasing force can be applied to the moving body.

[0013] Furthermore, The present invention 3 According to the first aspect, or the second aspect In the biasing device of a first Piston and the second piston When the movable body is pressed against the movable body, position Since the device is equipped with a position lock mechanism that fixes the position, the first embodiment or the second aspect In addition to the effect of the biasing device, a mechanism for fixing the moving body can be selected. [Brief description of the drawings]

[0014]

Figure 1

Figure 2

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Figure 16

[0015] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0016] (Embodiment) First, an embodiment of the present invention will be described.

[0017] FIG. 1 is an overall side view of an ultrasonic machining apparatus according to an embodiment of the present invention.

[0018] As shown in FIG. 1, the ultrasonic machining apparatus 1 of the present embodiment includes a table 10, an articulated robot 3 fixed to the table 10, a workpiece machining device 5 rotatably connected to the tip of the articulated robot 3, a workpiece mounting table 16 provided on the table 10, an oscillator 2, a main controller 4, and a robot controller 6 arranged on the table 10, and an air compressor 14 (see FIG. 6) arranged outside the table 10.

[0019] Then, the ultrasonic machining apparatus 1 of the present embodiment processes the workpiece W installed on the workpiece mounting table 16 by ultrasonically vibrating the tapered cutter blade 69 with both sides polished in the vertical direction in the drawing by the vibrator 71, which is connected to the tip of the workpiece machining device 5.

[0020] Note that an operation panel 8 is provided on the workpiece mounting table 16, and an operator of the ultrasonic machining apparatus 1 can operate the ultrasonic machining apparatus 1 by operating the operation panel 8.

[0021] The articulated robot 3 is a general 5-axis articulated robot that operates according to commands from the robot controller 6, and can freely change the position and angle of the workpiece machining device 5 to face the workpiece W.

[0022] The articulated robot 3 includes five axes: a first rotation axis 44 for rotating a second base 34 with respect to a first base 32, a second rotation axis 46 for rotating a lower arm portion (lower arm part) 36 back and forth with respect to the second base 34, a third rotation axis 48 for rotating a middle arm portion (middle arm part) 38 up and down with respect to the lower arm portion 36, a fourth rotation axis 50 for rotating an upper arm portion (upper arm part) 40 up and down with respect to the middle arm portion 38, and a fifth rotation axis 52 for coaxially rotating a rotating portion 42 with respect to the upper arm portion 40.

[0023] The articulated robot 3 is electrically connected to a robot controller 6 by a cable (not shown), and the robot controller 6 is electrically connected to a main controller 4 (see FIG. 6).

[0024] FIG. 2 is an overall perspective view of a workpiece processing device 5 provided in the ultrasonic processing device 1 of the present embodiment, FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2, FIG. 4 is a cross-sectional view taken along line B-B of FIG. 2, showing a state where the cylinder for urging the cutter blade angle is turned on and no load is applied to the cutter blade (angle 0 degrees), FIG. 5 is a cross-sectional view taken along line C-C of FIG. 2, showing a state where the cylinder for urging the cutter blade position is turned on and no load is applied to the cutter blade (angle 0 degrees).

[0025] The workpiece processing device 5 processes a workpiece W placed on a workpiece mounting table 16 by ultrasonically vibrating a cutter blade 69 connected to its tip by a vibrator 71 electrically connected from an oscillator 2 via a cable 73.

[0026] As shown in FIGS. 2 to 5, the workpiece processing device 5 includes a lower cutter blade angle changing mechanism 9, a first cutter blade angle urging cylinder 75a, a second cutter blade angle urging cylinder 75b, and a cutter blade angle locking cylinder 77, and an upper cutter blade position changing mechanism 7, a first cutter blade position urging cylinder 79a, a second cutter blade position urging cylinder 79b, and a cutter blade position locking cylinder 81.

[0027] As shown in FIGS. 3 and 4, the cutter blade angle changing mechanism 9 includes a base shaft 11 fixed to the workpiece processing device 5, a rotating body 13 rotatably connected to the base shaft 11 and to which the vibrator 71 and the cutter blade 69 are connected, a first protrusion 83 provided on the rotating body 13 and capable of abutting against a third protrusion 87 described later, a second protrusion 85 provided on the opposite side of the first protrusion 83 of the rotating body 13 and capable of abutting against a fourth protrusion 89 described later, a recess 91 provided on the rotating body 13 and into which a lock pin 39 described later is fitted, and a clearance portion 15 formed so that the rotating body 13 can rotate.

[0028] The first cutter blade angle biasing cylinder 75a biases the rotating body 13 against the rotational force of the rotating body 13 in the counterclockwise rotation in plan view. It includes a first housing 17 having a clearance portion 21 inside, a piston 19 slidably disposed in the clearance portion 21 of the first housing 17, and a third protrusion 87 connected to the tip of the piston 19. The clearance portion 21 of the first housing 17 and the air compressor 14 (see FIG. 6) are communicated with each other by a connection tube 23.

[0029] The second cutter blade angle biasing cylinder 75b biases the rotating body 13 against the rotational force of the rotating body 13 in the clockwise rotation in plan view. It includes a second housing 25 having a clearance portion 29 inside, a piston 27 slidably disposed in the clearance portion 29 of the second housing 25, and a fourth protrusion 89 connected to the tip of the piston 27. The clearance portion 29 of the second housing 25 and the air compressor 14 (see FIG. 6) are communicated with each other by a connection tube 31.

[0030] Note that the first cutter blade angle biasing cylinder 75a, the second cutter blade angle biasing cylinder 75b, the connection tube 23, the connection tube 31, and the air compressor 14 constitute the "cutter blade angle biasing mechanism" of the present invention.

[0031] Furthermore, the cylinder 77 for locking the cutter blade angle stops the rotation of the rotating body 13, and includes a third housing 33 having a void portion 37 (see FIG. 12) inside, a piston 35 slidably disposed within the void portion 37 of the third housing 33, and a lock pin 39 connected to the tip of the piston 35. The void portion 37 of the third housing 33 and the air compressor 14 (see FIG. 6) are communicated by a connection tube 41 and a connection tube 43.

[0032] Note that the cylinder 77 for locking the cutter blade angle, the connection tube 41, the connection tube 43, and the air compressor 14 constitute the "cutter blade angle locking mechanism" of the present invention.

[0033] As shown in FIGS. 3 and 5, the cutter blade position changing mechanism 7 includes a base 92 fixed to the workpiece processing apparatus 5, a moving body 90 movably connected to the base 92, a seventh protrusion 97 provided on the moving body 90 and capable of abutting against a fifth protrusion 95 described later, an eighth protrusion 98 provided on the moving body 90 and capable of abutting against a sixth protrusion 99 described later, and a recess 93 provided on the moving body 90 and into which a lock pin 67 described later is engaged.

[0034] The first cylinder 79a for biasing the cutter blade position includes a fourth housing 45 having a void portion 49 inside, a piston 47 slidably disposed within the void portion 49 of the fourth housing 45, and a fifth protrusion 95 connected to the tip of the piston 47. The void portion 49 of the fourth housing 45 and the air compressor 14 (see FIG. 6) are communicated by a connection tube 51.

[0035] Also, the second cylinder 79b for biasing the cutter blade position includes a fifth housing 53 having a void portion 57 inside, a piston 55 slidably disposed within the void portion 57 of the fifth housing 53, and a sixth protrusion 99 connected to the tip of the piston 55. The void portion 57 of the fifth housing 53 and the air compressor 14 (see FIG. 6) are communicated by a connection tube 59.

[0036] Note that the first cutter blade position biasing cylinder 79a, the second cutter blade position biasing cylinder 79b, the connection tube 51, the connection tube 59, and the air compressor 14 constitute the "cutter blade position biasing mechanism" of the present invention.

[0037] Furthermore, the cutter blade position locking cylinder 81 includes a sixth housing 61 having a void portion 65 (see FIG. 16) therein, a piston 63 slidably disposed within the void portion 65 (see FIG. 16) of the sixth housing 61, and a lock pin 67 connected to the tip of the piston 63. The void portion 65 (see FIG. 16) of the sixth housing 61 and the air compressor 14 (see FIG. 6) are communicated by a connection tube 94 and a connection tube 96.

[0038] Note that the cutter blade position locking cylinder 81, the connection tube 94, the connection tube 96, and the air compressor 14 constitute the "cutter blade position locking mechanism" of the present invention.

[0039] Next, a block diagram of the ultrasonic machining apparatus 1 of the present embodiment will be described.

[0040] FIG. 6 is a block diagram of the ultrasonic machining apparatus of the present embodiment, and FIG. 7 is a block diagram of the main controller of the ultrasonic machining apparatus of the present embodiment.

[0041] In FIG. 6, the ultrasonic machining apparatus 1 includes a main controller 4 electrically connected to a power source 12, an air compressor 14 electrically connected to the main controller 4 for driving the first cutter blade angle biasing cylinder 75a, the second first cutter blade angle biasing cylinder 75b, the cutter blade angle locking cylinder 77, the first cutter blade position biasing cylinder 79a, the second cutter blade position biasing cylinder 79b, and the cutter blade position locking cylinder 81, a robot controller 6 electrically connected to the main controller 4 for controlling the articulated robot 3, an oscillator 2 for driving the vibrator 71, and an operation panel 8 for receiving an input from an operator of the apparatus.

[0042] In this embodiment, the first cutter blade angle biasing cylinder 75a and the second first cutter blade angle biasing cylinder 75b are collectively referred to as the "cutter blade angle biasing cylinder 75", and the first cutter blade position biasing cylinder 79a and the second cutter blade position biasing cylinder 79b are collectively referred to as the "cutter blade position biasing cylinder 79".

[0043] Also, in FIG. 7, the main controller 4 includes a CPU (Central Processing Unit) 22, a RAM (Random Access Memory) 24 that is input / output connected to the CPU 22, and a ROM (Read Only Memory) 26 that is input / output connected to the CPU 22.

[0044] The RAM 24 includes a machining data table 24a that stores machining data for machining the workpiece W, and a machining mode data table 24b that stores setting items corresponding to a machining mode described later when the ultrasonic machining apparatus 1 machines the workpiece W.

[0045] Also, the ROM 26 includes a main program 26a that controls the operation of the entire ultrasonic machining apparatus 1 of this embodiment, and an ultrasonic machining program 26b that executes ultrasonic machining of the ultrasonic machining apparatus 1 according to a machining mode described later.

[0046] Next, the operation of the ultrasonic machining apparatus 1 having the above-described configuration will be described.

[0047] FIG. 8 is a flowchart of the main program in the ultrasonic machining apparatus of this embodiment, and FIG. 9 is a flowchart of the ultrasonic machining program in the ultrasonic machining apparatus of this embodiment.

[0048] As described above, the ultrasonic machining apparatus 1 of this embodiment machines the workpiece W installed on the workpiece mounting table 16 by ultrasonically vibrating the cutter blade 69 connected to the tip of the workpiece machining apparatus 5 with the vibrator 71.

[0049] In addition, the ultrasonic processing apparatus 1 of the present embodiment includes four processing modes as processing modes for processing the workpiece W.

[0050] Specifically, the ultrasonic processing apparatus 1 of the present embodiment biases the cutter blade 69 with the cutter blade angle biasing cylinder 75 and the cutter blade position biasing cylinder 79 turned on, and processes the workpiece W in a first processing mode; biases the cutter blade 69 with the cutter blade angle locking cylinder 77 and the cutter blade position biasing cylinder 79 turned on, and processes the workpiece W in a second processing mode; biases the cutter blade 69 with the cutter blade angle biasing cylinder 75 and the cutter blade position locking cylinder 81 turned on, and processes the workpiece W in a third processing mode; and processes the workpiece W in a fourth processing mode without biasing the cutter blade 69 with the cutter blade angle locking cylinder 77 and the cutter blade position locking cylinder 81 turned on.

[0051] In FIG. 8, first, after the operator of the apparatus turns on the power switch, when the number of workpieces W to be processed and the processing mode are input by operating buttons on the operation panel 8 and the start button is pressed, the ultrasonic processing apparatus 1 moves the arm of the articulated robot 3 to the initial position (S1), sets the number of workpieces W to be processed (S3), extracts setting items from the processing mode data table 24b based on the input processing mode (S5), and executes an ultrasonic processing program described later (S7).

[0052] (First processing mode) First, an explanation will be given assuming that the first processing mode in which the cutter blade 69 is biased with the cutter blade angle biasing cylinder 75 and the cutter blade position biasing cylinder 79 turned on and the workpiece W is processed is set. The first processing mode is the optimal processing mode when processing a workpiece W having a complex processing shape.

[0053] In FIG. 9, in the ultrasonic processing program, first, after acquiring processing data from the processing data table 24a (S21), it is determined whether the processing mode is the cutter blade angle biasing mode (S23).

[0054] Since the first processing mode uses the cutter blade angle biasing mode (S23: Yes), the first cutter blade angle biasing cylinder 75a and the second cutter blade angle biasing cylinder 75b are turned on (S25), and it is determined whether the processing mode is the cutter blade position biasing mode (S29).

[0055] Since the first processing mode uses the cutter blade position biasing mode (S29: Yes), the first cutter blade position biasing cylinder 79a and the second first cutter blade position biasing cylinder 79b are turned on (S31).

[0056] Note that FIG. 4 described above shows a state (angle 0 degrees) in which the first cutter blade angle biasing cylinder 75a and the second first cutter blade angle biasing cylinder 75b are turned on and no load is applied to the cutter blade.

[0057] Specifically, referring to FIG. 4, when the first cutter blade angle biasing cylinder 75a is turned on and air is injected from the air compressor 14 into the gap portion 21 of the first housing 17 of the first cutter blade angle biasing cylinder 75a through the connection tube 23, the piston 19 moves downward in the up and down direction of the drawing, and the third protrusion 87 connected to the tip of the piston 19 abuts against the first protrusion 83 provided on the rotating body 13.

[0058] Also, when the second cutter blade angle biasing cylinder 75b is turned on and air is injected from the air compressor 14 into the gap portion 29 of the second housing 25 of the second cutter blade angle biasing cylinder 75b through the connection tube 31, the piston 27 moves upward in the up and down direction of the drawing, and the fourth protrusion 89 connected to the tip of the piston 27 abuts against the second protrusion 85 provided on the rotating body 13.

[0059] Thus, when the first cutter blade angle biasing cylinder 75a and the second first cutter blade angle biasing cylinder 75b are turned on, although the rotating body 13 can rotate in the clockwise and counterclockwise directions with respect to the base axis 11 in the drawing plane, when the rotating body 13 is biased by the third protrusion 87 connected to the tip of the piston 19 and the fourth protrusion 89 connected to the tip of the piston 27, if no load is applied to the cutter blade 69, the cutter blade 69 will be in a stable state at the position of 0 degrees (see Fig. 13).

[0060] Return to the ultrasonic machining program. When the setting of the machining mode is completed, next, it is determined whether the workpiece W is set on the workpiece mounting table 16 (S35). If the workpiece W is not set on the workpiece mounting table 16 (S35: No), wait until the workpiece W is set on the workpiece mounting table 16. If the workpiece W is set on the workpiece mounting table 16 (S35: Yes), drive the oscillator 2 to ultrasonically vibrate the vibrator 71 connected to the cutter blade 69 (S37).

[0061] Next, move each arm of the articulated robot 3 so that the cutter blade 69 is positioned at the machining start position with respect to the workpiece W (S39), and move the cutter blade 69 to ultrasonically machine the workpiece W (S41).

[0062] Here, in the first machining mode in which the cutter blade 69 is biased with the cutter blade angle biasing cylinder 75 and the cutter blade position biasing cylinder 79 turned on to machine the workpiece W, the operation inside the workpiece machining apparatus 5 will be described.

[0063] FIG. 10 is a view showing a state in which the cylinder for urging the cutter blade angle is turned on in the B-B cross-sectional view of FIG. 2, a load is applied to the cutter blade, and the cutter blade rotates by the maximum angle in the counterclockwise direction (angle +θ1 degrees). FIG. 11 is a view showing a state in which the cylinder for urging the cutter blade angle is turned on in the B-B cross-sectional view of FIG. 2, a load is applied to the cutter blade, and the cutter blade rotates by the maximum angle in the clockwise direction (angle -θ1 degrees). FIG. 13 is a view of the attached cutter blade as seen from below, and is an explanatory view for explaining the relationship between the cutter blade and the rotation direction of the cutter blade.

[0064] As described above, FIG. 4 shows a state where no load is applied to the cutter blade 69. However, in the first processing mode, when the cutter blade 69 receives a rotational load from the workpiece W during the processing of the workpiece W by the workpiece processing apparatus 5, the cutter blade 69 is configured to be rotatable within a range of ± several degrees (maximum ±5°).

[0065] However, when the first cutter blade angle urging cylinder 75a and the second cutter blade angle urging cylinder 75b are turned on, the rotating body 13 is such that the third protrusion 87 connected to the tip of the piston 19 abuts against the first protrusion 83 provided on the rotating body 13, and the fourth protrusion 89 connected to the tip of the piston 27 abuts against the second protrusion 85 provided on the rotating body 13. Thus, it is always biased toward the position of angle 0 degrees (see FIG. 13) and is rotatable in that state.

[0066] For example, as shown in FIG. 10, with the first cutter blade angle biasing cylinder 75a and the second first cutter blade angle biasing cylinder 75b turned on, a rotational load is applied to the cutter blade 69. The first protrusion 83 provided on the rotating body 13 continuously presses the third protrusion 87 connected to the tip of the piston 19. When the cutter blade 69 rotates by the maximum angle in the counterclockwise direction on the drawing (angle +θ1 degrees), the first protrusion 83 provided on the rotating body 13 abuts against the third protrusion 87 connected to the tip of the piston 19, but the second protrusion 85 provided on the rotating body 13 does not abut against the fourth protrusion 89 connected to the tip of the piston 27.

[0067] When the first protrusion 83 provided on the rotating body 13 continuously presses the third protrusion 87 connected to the tip of the piston 19, the first protrusion 83 abutting against the third protrusion 87 is biased by a force f1 in the -θ direction from the third protrusion 87. Note that this force f1 does not change depending on the angle of the rotating body 13 and is constant as long as the first protrusion 83 abuts against the third protrusion 87.

[0068] On the other hand, for example, as shown in FIG. 11, with the first cutter blade angle biasing cylinder 75a and the second first cutter blade angle biasing cylinder 75b turned on, a rotational load is applied to the cutter blade 69. The second protrusion 85 provided on the rotating body 13 continuously presses the fourth protrusion 89 connected to the tip of the piston 27. When the cutter blade 69 rotates by the maximum angle in the clockwise direction on the drawing (angle -θ1 degrees), the second protrusion 85 provided on the rotating body 13 abuts against the fourth protrusion 89 connected to the tip of the piston 27, but the first protrusion 83 provided on the rotating body 13 does not abut against the third protrusion 87 connected to the tip of the piston 19.

[0069] When the second protrusion 85 provided on the rotating body 13 continuously presses the fourth protrusion 89 connected to the tip of the piston 27, the second protrusion 85 in contact with the fourth protrusion 89 is biased by a force f1 in the +θ direction from the fourth protrusion 89. Note that this force f1 does not change depending on the angle of the rotating body 13 and is constant as long as the second protrusion 85 is in contact with the fourth protrusion 89.

[0070] FIG. 14 is a view showing a state (angle +X1 mm) in which the cutter blade position biasing cylinder is turned on, a load is applied to the cutter blade, and the cutter blade has moved the maximum displacement in the +X direction in the C-C cross-sectional view of FIG. 2, and FIG. 15 is a view showing a state (angle -X1 mm) in which the cutter blade position biasing cylinder is turned on, a load is applied to the cutter blade, and the cutter blade has moved the maximum displacement in the -X direction in the C-C cross-sectional view of FIG. 2.

[0071] As described above, FIG. 5 shows a state (position 0 mm) in which the first cutter blade position biasing cylinder 79a and the second cutter blade position biasing cylinder 79b are turned on and no load is applied to the cutter blade. However, in the first processing mode, when the cutter blade 69 receives a load from the workpiece W during the machining of the workpiece W by the workpiece machining apparatus 5, the cutter blade 69 is configured to be movable within a range of ± several mm (maximum ±5 mm).

[0072] However, when the first cutter blade position biasing cylinder 79a and the second cutter blade position biasing cylinder 79b are turned on, the moving body 90 is in a state where the seventh protrusion 97 provided on the moving body 90 contacts the fifth protrusion 95 connected to the tip of the piston 47, and the eighth protrusion 98 provided on the moving body 90 contacts the sixth protrusion 99 connected to the tip of the piston 55. In this state, the moving body 90 is always biased toward the position 0 mm (see FIG. 14) and is movable in that state.

[0073] For example, as shown in FIG. 14, with the first cutter blade positioning cylinder 79a and the second cutter blade positioning cylinder 79b turned on, a load is applied to the cutter blade 69, and the eighth protrusion 98 provided on the moving body 90 continues to press the sixth protrusion 99 connected to the tip of the piston 55. When the cutter blade 69 has moved the maximum displacement in the +X direction (angle +X 1 mm), the eighth protrusion 98 provided on the moving body 90 abuts against the sixth protrusion 99 connected to the tip of the piston 55, but the seventh protrusion 97 provided on the moving body 90 does not abut against the fifth protrusion 95 connected to the tip of the piston 47.

[0074] When the eighth protrusion 98 provided on the moving body 90 continues to press the sixth protrusion 99 connected to the tip of the piston 55, the eighth protrusion 98 that abuts against the sixth protrusion 99 is biased by a force f2 in the -X direction from the sixth protrusion 99. Note that this force f2 does not change depending on the position of the moving body 90 and is constant as long as the eighth protrusion 98 abuts against the sixth protrusion 99.

[0075] On the other hand, for example, as shown in FIG. 15, with the first cutter blade positioning cylinder 79a and the second cutter blade positioning cylinder 79b turned on, a load is applied to the cutter blade 69, and the seventh protrusion 97 provided on the moving body 90 continues to press the fifth protrusion 95 connected to the tip of the piston 47. When the cutter blade 69 has moved the maximum displacement in the -X direction (angle -X 1 mm), the seventh protrusion 97 provided on the moving body 90 abuts against the fifth protrusion 95 connected to the tip of the piston 47, but the eighth protrusion 98 provided on the moving body 90 does not abut against the sixth protrusion 99 connected to the tip of the piston 55.

[0076] When the seventh protrusion 97 provided on the moving body 90 continues to press the fifth protrusion 95 connected to the tip of the piston 47, the seventh protrusion 97 that abuts against the fifth protrusion 95 is biased by a force f2 in the +X direction from the fifth protrusion 95. Note that this force f2 does not change depending on the position of the moving body 90 and is constant as long as the seventh protrusion 97 abuts against the fifth protrusion 95.

[0077] Return to the ultrasonic machining program, and it is determined whether the machining of the workpiece W is completed (S43). If the machining of the workpiece W is not completed (S43: No), the movement (machining) of the cutter blade 69 is continued (S41). If the machining of the workpiece W is completed (S43: Yes), return to the main program (S45).

[0078] (Second machining mode) Next, the second machining mode of machining the workpiece W by urging the cutter blade 69 with the cutter blade angle locking cylinder 77 and the cutter blade position biasing cylinder 79 turned on will be described. The second machining mode is used when machining at a higher speed than the first mode.

[0079] In FIG. 9, in the ultrasonic machining program, first, after acquiring machining data from the machining data table 24a (S21), it is determined whether the machining mode is the cutter blade angle biasing mode (S23).

[0080] Since the second machining mode does not use the cutter blade angle biasing mode (S23: No), the first cutter blade angle locking cylinder 77 is turned on (S27), and it is determined whether the machining mode is the cutter blade position biasing mode (S29).

[0081] Since the second machining mode uses the cutter blade position biasing mode (S29: Yes), the first cutter blade position biasing cylinder 79a and the second first cutter blade position biasing cylinder 79b are turned on (S31).

[0082] FIG. 12 is a view showing a state (angle 0 degrees) in which the cutter blade angle locking cylinder is turned on and the angle of the cutter blade is fixed in the B - B cross - sectional view of FIG. 2.

[0083] Specifically, with reference to Fig. 12, when the cylinder 77 for locking the cutter blade angle is turned on and air is injected from the air compressor 14 through the connection tube 41 and the connection tube 43 into the gap 37 of the third housing 33 of the cylinder 77 for locking the cutter blade angle, the piston 35 moves to the left side in the drawing, and the lock pin 39 connected to the tip of the piston 35 fits into the recess 91 provided in the rotating body 13.

[0084] In this way, when the cylinder 77 for locking the cutter blade angle is turned on, the rotating body 13 is fixed by the lock pin 39, and the cutter blade 69 is fixed at the position of 0 degrees (see Fig. 13).

[0085] Returning to the ultrasonic processing program, when the setting of the processing mode is completed, next, it is determined whether the workpiece W is set on the workpiece mounting table 16 (S35). If the workpiece W is not set on the workpiece mounting table 16, it waits for the workpiece W to be set on the workpiece mounting table 16 (S35: No). If the workpiece W is set on the workpiece mounting table 16 (S35: Yes), the oscillator 2 is driven to ultrasonically vibrate the vibrator 71 connected to the cutter blade 69 (S37).

[0086] Next, each arm of the articulated robot 3 is moved so that the cutter blade 69 is positioned at the machining start position with respect to the workpiece W (S39), and the cutter blade 69 is moved to ultrasonically machine the workpiece W (S41).

[0087] Regarding the operation inside the workpiece machining apparatus 5 when machining the workpiece W while urging the cutter blade 69 with the cutter blade positioning biasing cylinder 79 turned on, it is as described above with reference to Figs. 5, 14, and 15.

[0088] Therefore, in the second processing mode, the processing apparatus 5 fixes the angle of the cutter blade 69 at 0 degrees and urges the workpiece W with a constant force f2 toward the position of 0 mm with respect to the cutter blade 69 to machine the workpiece W.

[0089] Then, it is determined whether the machining of the workpiece W is completed (S43). If the machining of the workpiece W is not completed (S43: No), the movement (machining) of the cutter blade 69 is continued (S41). If the machining of the workpiece W is completed (S43: Yes), the process returns to the main program (S45).

[0090] (Third machining mode) Next, a third machining mode in which the cutter blade 69 is biased with the cutter blade angle biasing cylinder 75 and the cutter blade position locking cylinder 81 turned on and the workpiece W is machined will be described. Note that the third machining mode is also an appropriate machining mode when machining a workpiece W with a complex machining shape, but it is used when machining at a higher speed than the first machining mode.

[0091] In FIG. 9, in the ultrasonic machining program, first, after acquiring machining data from the machining data table 24a (S21), it is determined whether the machining mode is the cutter blade angle biasing mode (S23).

[0092] Since the third machining mode uses the cutter blade angle biasing mode (S23: Yes), the first cutter blade angle biasing cylinder 75a and the second cutter blade angle biasing cylinder 75b are turned on (S25), and it is determined whether the machining mode is the cutter blade position biasing mode (S29).

[0093] Since the third machining mode does not use the cutter blade position biasing mode (S29: No), the cutter blade position locking cylinder 81 is turned on (S33).

[0094] FIG. 16 is a view showing a state (displacement 0 mm) in which the cutter blade position locking cylinder is turned on and the position of the cutter blade is fixed in the C-C cross-sectional view of FIG. 2.

[0095] Specifically, referring to FIG. 16, when the cylinder 81 for locking the cutter blade position is turned on and air is injected from the air compressor 14 through the connection tube 94 and the connection tube 96 into the gap 65 of the sixth housing 61 of the cylinder 81 for locking the cutter blade position, the piston 63 moves to the left side in the drawing, and the lock pin 67 connected to the tip of the piston 63 fits into the recess 93 provided in the moving body 90.

[0096] In this way, when the cylinder 81 for locking the cutter blade position is turned on, the moving body 90 is fixed by the lock pin 67, and the cutter blade 69 is fixed at the position of 0 mm (see FIG. 16 etc.).

[0097] Returning to the ultrasonic processing program, when the setting of the processing mode is completed, next, it is determined whether or not the workpiece W is set on the workpiece mounting table 16 (S35). If the workpiece W is not set on the workpiece mounting table 16, it waits for the workpiece W to be set on the workpiece mounting table 16 (S35: No). If the workpiece W is set on the workpiece mounting table 16 (S35: Yes), the oscillator 2 is driven to ultrasonically vibrate the vibrator 71 connected to the cutter blade 69 (S37).

[0098] Next, each arm of the articulated robot 3 is moved so that the cutter blade 69 is positioned at the machining start position with respect to the workpiece W (S39), and the cutter blade 69 is moved to ultrasonically machine the workpiece W (S41).

[0099] Regarding the operation inside the workpiece machining apparatus 5 when machining the workpiece W while biasing the cutter blade 69 with the first cutter blade angle biasing cylinder 75a and the second cutter blade angle biasing cylinder 75b turned on, it is as described above with reference to FIGS. 4, 10, 11, and 13.

[0100] Therefore, in the third processing mode, the processing apparatus 5 fixes the position of the cutter blade 69 at 0 mm, and biases the cutter blade 69 toward the angle of 0 degrees with a constant force f1 with respect to the workpiece W, and machines the workpiece W.

[0101] Then, it is determined whether the machining of the workpiece W is completed (S43). If the machining of the workpiece W is not completed (S43: No), the movement (machining) of the cutter blade 69 is continued (S41). If the machining of the workpiece W is completed (S43: Yes), the process returns to the main program (S45).

[0102] (Fourth machining mode) Finally, a fourth machining mode in which the workpiece W is machined without urging the cutter blade 69 with the cutter blade angle locking cylinder 77 and the cutter blade position locking cylinder 81 turned on will be described. The fourth machining mode is used when machining at the highest speed.

[0103] In FIG. 9, in the ultrasonic machining program, first, after obtaining machining data from the machining data table 24a (S21), it is determined whether the machining mode is the cutter blade angle urging mode (S23).

[0104] Since the fourth machining mode does not use the cutter blade angle urging mode (S23: No), the cutter blade angle locking cylinder 77 is turned on (S27), and it is determined whether the machining mode is the cutter blade position urging mode (S29).

[0105] Also, since the fourth machining mode does not use the cutter blade position urging mode either (S29: No), the cutter blade position locking cylinder 81 is turned on (S33).

[0106] Then, when the setting of the machining mode is completed, next, it is determined whether the workpiece W is set on the workpiece mounting table 16 (S35). If the workpiece W is not set on the workpiece mounting table 16, it waits for the workpiece W to be set on the workpiece mounting table 16 (S35: No). If the workpiece W is set on the workpiece mounting table 16 (S35: Yes), the oscillator 2 is driven to ultrasonically vibrate the vibrator 71 connected to the cutter blade 69 (S37).

[0107] Next, each arm of the articulated robot 3 is moved so that the cutter blade 69 is positioned at the machining start position with respect to the workpiece W (S39), and the cutter blade 69 is moved to machine the workpiece W (S41).

[0108] Regarding the operation inside the workpiece machining apparatus 5 when machining the workpiece W without biasing the cutter blade 69 with the cutter blade angle locking cylinder 77 turned on, it is as described above with reference to FIGS. 4 and 12.

[0109] Also, regarding the operation inside the workpiece machining apparatus 5 when machining the workpiece W without biasing the cutter blade 69 with the cutter blade position locking cylinder 81 turned on, it is as described above with reference to FIGS. 5 and 16.

[0110] Therefore, in the fourth machining mode, the machining apparatus 5 fixes the angle of the cutter blade 69 at 0 degrees and the position of the cutter blade 69 at 0 mm, and machines the workpiece W.

[0111] Then, it is determined whether or not the machining of the workpiece W is completed (S43). If the machining of the workpiece W is not completed (S43: No), the movement (machining) of the cutter blade 69 is continued (S41). If the machining of the workpiece W is completed (S43: Yes), the process returns to the main program (S45).

[0112] When returning to the main program in FIG. 8, the oscillator 2 is turned off to stop the ultrasonic vibration of the vibrator 71 connected to the cutter blade 69 (S9), and all cylinders of the first cutter blade angle biasing cylinder 75a, the second cutter blade angle biasing cylinder 75b, the cutter blade angle locking cylinder 77, the first cutter blade position biasing cylinder 79a, the second cutter blade position biasing cylinder 79b, and the cutter blade position locking cylinder 81 are turned off (S11).

[0113] After moving the arm of the multi-joint robot 3 to the initial position (S13), it is determined whether or not the processed workpiece W has been removed from the workpiece mounting table 16 (S15). If it is determined that the workpiece W has not been removed (S15: No), it waits for the workpiece W to be removed. If it is determined that the workpiece W has been removed (S15: Yes), it is further determined whether or not the number of processed workpieces W has reached the number of processes input on the operation panel 8 (S17).

[0114] Here, if it is determined that the number of processed workpieces W has not reached the number of processes input on the operation panel 8 (S17: No), the ultrasonic processing program is executed again. If it is determined that the number of processed workpieces W has reached the number of processes input on the operation panel 8 (S17: Yes), the process is terminated (S19).

[0115] According to the workpiece processing apparatus 5 of the present embodiment, for those that process the workpiece W using the cutter blade 69, in particular, the cutter blade 69 is provided with a cutter blade position changing mechanism 7 capable of changing the position in a certain direction with respect to the workpiece W according to the shape of the workpiece W, and a first cutter blade position biasing cylinder 79a and a second cutter blade position biasing cylinder 79b that bias the cutter blade position changing mechanism 7 against the changing direction of the position of the cutter blade 69. The first cutter blade position biasing cylinder 79a and the second cutter blade position biasing cylinder 79b bias the cutter blade position changing mechanism 7 with a substantially constant biasing force regardless of the position of the cutter blade 69 by the cutter blade position changing mechanism 7, so that the workpiece can be processed with high precision.

[0116] Further, according to the workpiece processing apparatus 5 of the present embodiment, since it is provided with a cutter blade position locking cylinder 81 for fixing the position of the cutter blade 69 in a certain direction with respect to the workpiece W, according to the shape of the workpiece W, a mechanism for effectively pressing the cutter blade 69 can be selected to process the workpiece W.

[0117] Further, according to the workpiece processing apparatus 5 of the present embodiment, there are provided a cutter blade angle changing mechanism 9 capable of changing the angle of the cutter blade 69 with respect to the traveling direction according to the shape of the workpiece W, and a first cutter blade angle biasing cylinder 75a and a second cutter blade angle biasing cylinder 75b that bias the cutter blade angle changing mechanism 9 against the changing direction of the angle of the cutter blade 69. Therefore, even for a workpiece W with a complex processing shape, the cutter blade 69 can be effectively pressed against the workpiece for processing.

[0118] Further, according to the workpiece processing apparatus 5 of the present embodiment, the first cutter blade angle biasing cylinder 75a and the second cutter blade angle biasing cylinder 75b bias the cutter blade angle changing mechanism 9 with a substantially constant biasing force regardless of the angle of the cutter blade 69. Therefore, even for a workpiece W with a complex processing shape, the cutter blade 69 can be more effectively pressed against the workpiece for processing.

[0119] Further, according to the workpiece processing apparatus 5 of the present embodiment, since it is provided with a cutter blade angle locking mechanism 77 for fixing the angle, according to the shape of the workpiece W, a mechanism for effectively pressing the cutter blade 69 can be selected to process the workpiece.

[0120] Further, according to the ultrasonic processing apparatus 1 of the present embodiment, since the cutter blade 69 is ultrasonically vibrated in a direction intersecting the moving direction of the moving body 90 to process the workpiece, the workpiece can be processed more precisely.

[0121] Furthermore, according to the ultrasonic processing apparatus 1 of the present embodiment, since the cutter blade 69 is ultrasonically vibrated in a direction intersecting the rotational direction of the rotating body 13 to process the workpiece, the workpiece can be processed more precisely.

[0122] As described above, the ultrasonic processing apparatus and the workpiece processing apparatus in the embodiments of the present invention have been described. However, the present invention is not limited to the above embodiments, and various modifications can be made and implemented without departing from the gist of the present invention.

[0123] For example, although the vibrator 71 used in the above-described embodiment was described as vibrating the cutter blade 69 in the vertical direction in the drawing, it is not limited thereto, and it may be a direction intersecting the rotation direction of the rotating body 13 or a direction intersecting the moving direction of the moving body 90.

[0124] Also, although the cutter blade 69 used in the above-described embodiment was described using a double-sided polished cutter blade, a single-sided polished cutter blade can also be used considering the machining direction.

Explanation of Reference Numerals

[0125] 1 ··· Ultrasonic machining apparatus 2 ··· Oscillator 3 ··· Articulated robot 5 ··· Work machining apparatus 6 ··· Robot controller 7 ··· Cutter blade position changing mechanism 9 ··· Cutter blade angle changing mechanism 14 ··· Air compressor 69 ··· Cutter blade 71 ··· Vibrator 75 ··· Cylinder for biasing cutter blade angle 77 ··· Cylinder for locking cutter blade angle 79 ··· Cylinder for biasing cutter blade position 81 ··· Cylinder for locking cutter blade position W ··· Workpiece

Claims

Claim 1: A moving body that can move in a predetermined direction and in a direction opposite to the predetermined direction, A first piston that is slidably disposed within a first gap portion by a predetermined air pressure and that can urge the moving body in the predetermined direction, A second piston that is slidably disposed within a second gap portion by the predetermined air pressure and that can urge the moving body in the opposite direction, Comprising: When the moving body does not move, the first piston is brought into contact with and urged against the moving body in the predetermined direction by the predetermined air pressure, and the second piston is brought into contact with and urged against the moving body in the opposite direction by the predetermined air pressure. When the moving body moves, depending on the moving direction, only one of the first piston and the second piston is brought into contact with and urged against the moving body in the predetermined direction or the opposite direction by the predetermined air pressure. An urging device characterized by this. Claim 2: The first gap portion and the first piston, and the second gap portion and the second piston are arranged in opposite directions along the predetermined direction and are arranged in parallel in a direction intersecting the predetermined direction. The urging device according to claim 1, characterized by this. Claim 3 The urging device according to claim 1 or claim 2, further comprising a position locking mechanism that fixes the position of the moving body when the first piston and the second piston are in contact with and urging the moving body.

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