Environmental data monitoring method, environmental data monitoring system, and environmental data monitoring device

Abstract

To provide an environment data monitoring method, an environment data monitoring system, and an environment data monitoring device for removing an abnormal condition of a micro clean room as quickly as possible.SOLUTION: An environment data monitoring system includes a magnetic sensor, a first pressure sensor positioned inside a chamber, a second pressure sensor positioned outside the chamber, a main antenna, an RF reader, and a controller. An environment data monitoring method includes: acquiring fan rotation speed by using the magnetic sensor; acquiring first pressure by using the first pressure sensor; acquiring second pressure by using the second pressure sensor; calculating a first pressure difference between the first pressure and the second pressure by using the controller; determining whether or not the fan speed and the first pressure difference have reached an alarm reference by using the controller; and transmitting an alarm signal by using the controller, when the fan speed and the first pressure difference have reached the alarm reference.SELECTED DRAWING: Figure 1

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