Skirt for ultrasonic inspection and ultrasonic inspection apparatus

Abstract

To provide an ultrasonic inspection scarter that can stably jet a liquid stream.SOLUTION: An ultrasonic inspection scarter includes: a nozzle for jetting liquid; a central cylindrical section having a central hollow portion being cylindrical hole-shaped, that is connected to the base end of a nozzle hole of the nozzle and extends along the direction of the nozzle hole; a liquid supply port where the liquid is supplied to the central hollow portion; a central rectifying section located in the central hollow portion of the central cylindrical section and having a rectifying surface along the direction of the nozzle; and an ultrasonic probe that transmits or receives ultrasonic waves that are propagated within the liquid jetted from the nozzle.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] This invention relates to a skater for ultrasonic inspection and an ultrasonic inspection apparatus. Inspection

Background Art

[0002] When performing ultrasonic measurement, a method is known in which water is sprayed onto a test object by a skater, and ultrasonic waves are propagated in a water column formed by the jet flow, and the test object is measured by the ultrasonic transmission method. For example, Patent Document 1 proposes an ultrasonic measurement device that includes a decompression device for decompressing the inside of a housing in order to guide water from an opening into the inside of the housing, and guides the water sprayed from the injection port and colliding with the surface of the test object to the opening side of the housing to form a water column. Further, Patent Document 2 provides a cover for preventing water scattered when hitting the test object from hitting the water column formed by the jet flow on the nozzle that sprays water.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, when propagating ultrasonic waves in a jet flow, in order to obtain good inspection results, it is desirable that the jet flow hits the test portion in a stable state and the ultrasonic waves are stably propagated in the jet flow. In Patent Documents 1 and 2, although the problem of water hitting the water column after the jet flow hits the test portion is considered, no consideration is given to making the jet flow in a good state and applying it to the test portion.

[0005] ​ The present invention has been made in view of the above circumstances, and an object thereof is to provide a skater for ultrasonic inspection and an ultrasonic inspection apparatus that can inject a jet flow in a stable state and perform ultrasonic inspection of an object to be inspected satisfactorily.

Means for Solving the Problems

[0006] That is, among the skaters for ultrasonic inspection of the present invention, the first form is a nozzle for injecting a liquid, a central cylindrical portion having a cylindrical hole-shaped central hollow portion to which the base end of the nozzle hole of the nozzle is connected and that extends along the direction of the nozzle hole, a liquid supply port for supplying liquid to the central hollow portion, a central rectifying portion that is located within the central hollow portion of the central cylindrical portion and has a rectifying surface along the nozzle direction, and an ultrasonic probe for transmitting or receiving ultrasonic waves propagated in the liquid jetted from the nozzle. and on the outer peripheral side of the central cylindrical portion, an outer peripheral inner cylindrical portion that surrounds the central cylindrical portion with a gap therebetween and forms a cylindrical outer peripheral inner hollow portion between the outer peripheral inner cylindrical portion and the central cylindrical portion; on the outer peripheral side of the outer peripheral inner cylindrical portion, an outer peripheral outer cylindrical portion that surrounds the outer peripheral inner cylindrical portion with a gap therebetween and forms a cylindrical outer peripheral outer hollow portion between the outer peripheral outer cylindrical portion and the outer peripheral inner cylindrical portion; a liquid supply port for supplying liquid to the outer peripheral outer hollow portion; an outer peripheral rectifying portion that is located within the outer peripheral inner hollow portion and has a rectifying surface along the nozzle direction; and has the outer peripheral inner hollow portion and the central hollow portion are connected; the outer peripheral outer hollow portion and the outer peripheral inner hollow portion are connected 。

[0007] One form of the ultrasonic inspection apparatus of the present invention is a skater fixture that fixes a skater for ultrasonic inspection for reception and a skater for ultrasonic inspection for transmission, with the nozzles provided in each skater positioned such that the jet flow directions face each other, a manipulator that holds the object to be inspected and moves the object to be inspected at least with the inspected portion of the object to be inspected positioned between the nozzles of the skater for ultrasonic inspection for reception and the skater for ultrasonic inspection for transmission, and at least one of the skater for ultrasonic inspection for reception and the skater for ultrasonic inspection for transmission is composed of the skater for ultrasonic inspection of the invention of the above form.

Advantages of the Invention

[0008] According to the present invention, a liquid can be stably injected from the nozzle of the skater, and ultrasonic flaw detection can be favorably performed.

Brief Description of the Drawings

[0009]

Figure 1A

Figure 1B

Figure 1C

Figure 1D

Figure 2

Figure 3

Figure 4A

Figure 4B

Figure 5A

Figure 5B

Figure 5C

Figure 6A

Figure 6B

Figure 6C

Figure 7A

Figure 7B

Figure 7C

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Embodiments for Carrying Out the Invention

[0010] <Ultrasonic Inspection Skirt> In this embodiment, one form of the ultrasonic inspection skirt will be described.

[0011] As shown in FIGS. 1A to 1D, the ultrasonic inspection skirt 1 has a skirt body 2 with a circular cross-sectional shape in its outer shape, and one end side of the skirt body 2 constitutes a nozzle 11 having a nozzle hole 11A. Hereinafter, the injection direction of the nozzle hole 11A will be described as the front (the lower side shown in FIG. 1B). The skirt body 2 is provided with a probe 3 on the rear end side, and a cable 4 for transmitting ultrasonic waves to the probe 3 is connected thereto. An ultrasonic transmission cable, which will be described later, is connected to the cable 4. Note that the probe 3 can be replaced with ones of different sizes according to the usage purpose and the like. Further, a water supply port 5 is provided on the side wall of the skirt body 2, an introduction pipe 5A is connected to the water supply port 5, and a water supply pipe 6 is further connected to the introduction pipe 5A. The water supply port 5 corresponds to the liquid supply port of the present invention. When viewed from the front, the skirt body 2 has a partially spherical shape on the lower side and has an overall shape that fits inside a spherical shape with a diameter of 38 mm, excluding the cable 4 and the water supply pipe 6. In the present embodiment, it is desirable that the skirt body 2 has an overall shape that fits inside a spherical shape with a diameter of 50 mm.

[0012] As shown in FIG. 2, the skirt body 2 has a central cylinder portion 10 having a central hollow portion 10A with a circular cross section inside, on the rear side of the nozzle hole 11A. The central hollow portion 10A has a tapered surface 10B whose diameter gradually decreases toward the front, and the tapered surface 10B extends to the tip side of the nozzle hole 11 inside the nozzle 11. That is, a part of the tapered surface 10B constitutes the side surface of the nozzle hole 11A.

[0013] On the outer peripheral side of the central cylinder portion 10, an outer peripheral inner cylinder portion 12 that extends in the nozzle direction is provided at intervals so as to surround the outer peripheral side of the central cylinder portion 10, and an annular outer peripheral inner hollow portion 12A is formed between the outer peripheral surface of the central cylinder portion 10 and the inner peripheral surface of the outer peripheral inner cylinder portion 12. Further, on the rear side of the central hollow portion 10A, a connecting hollow portion 12B is formed by the inner space above the outer peripheral inner cylinder portion 12, and the connecting hollow portion 12B has a larger diameter than the central hollow portion 10A. The outer peripheral side of the connecting central portion 12B communicates annularly with the rear end of the outer peripheral inner hollow portion 12A, and the central hollow portion 10A and the outer peripheral inner hollow portion 12A communicate with each other through the connecting central portion 12B.

[0014] On the outer peripheral side of the outer peripheral inner cylinder portion 12, there is an outer peripheral outer cylinder portion 13 that extends in the nozzle direction at intervals so as to surround the outer peripheral side of the outer peripheral inner cylinder portion 12. An annular outer peripheral outer hollow portion 13A is formed between the outer peripheral surface of the outer peripheral inner cylinder portion 12 and the inner peripheral surface of the outer peripheral outer cylinder portion 13. Note that the thickness of the outer peripheral outer hollow portion 13A is smaller than the thickness of the outer peripheral inner hollow portion 12A. The outer peripheral surface of the outer peripheral outer cylinder portion 13 constitutes the side surface of the skirt body 2.

[0015] The front side of the outer peripheral outer hollow portion 13A is annularly connected to the front end side of the outer peripheral inner hollow portion 12A. On the connecting side of the outer peripheral inner hollow portion 12A and the outer peripheral outer hollow portion 13A, there is a curved inclined surface 13B that gradually positions forward inward along the spherical shape of the lower surface of the nozzle 11. Water flows smoothly from the outer peripheral outer hollow portion 13A to the outer peripheral inner hollow portion 12A, and it is difficult for the flow of water to be disturbed.

[0016] On one side wall side of the outer peripheral outer cylinder portion 13, the water supply port 5 described above is formed so as to penetrate, and a water supply pipe 6 that extends to the outside is connected to the water supply port 5. The water supply port 5 communicates with the outer peripheral outer hollow portion 13A and finally communicates with the central hollow portion 10A. The water supply pipe 6 is connected to an external water supply pump, and water can be supplied to the water supply port 5 through the water supply communication path 6A in the water supply pipe 6. Note that in this embodiment, the water supply port 5 has been described as being provided on the side wall of the outer peripheral outer cylinder portion 13, but it is not limited to the outer peripheral outer cylinder portion 13, and it may be provided at any location where water can be supplied to the outer peripheral outer hollow portion 13A.

[0017] Furthermore, in the central hollow portion 10A, a rectifying portion 20 is disposed on the rear side of the nozzle hole 11A so as to substantially fit on the inner peripheral surface of the hollow portion 10A. As shown in Fig. 3, the rectifying section 20 has a through-hole 20A at the center, and seven rectifying plates 20B are radially provided on its outer periphery at the same angular intervals. The rectifying plates 20B have a shape along the nozzle direction, and their front and back surfaces serve as rectifying surfaces 20C. Thereby, the water passing through the hollow portion 10A flows through the through-hole 20A of the rectifying section 20 and the space between the rectifying surfaces 20C, 20C, and the flow is rectified. The side surface of the rectifying plate 20B has a tapered shape along the tapered surface 10B. In this example, one plate is bent to form a plurality of rectifying plates 20B having a through-hole 20A at the center. However, as the present invention, the manufacturing method of the rectifying section is not particularly limited, and the shape can also be appropriately changed. Further, it may be configured without a through-hole at the center. The rectifying section 20 corresponds to the central rectifying section of the present invention. Note that the central rectifying section may be formed integrally with the central cylindrical portion.

[0018] Furthermore, a rectifying section 21 shown in Figs. 4A and 4B is provided in the outer peripheral inner hollow portion 12A. The rectifying section 21 has an annular shape and fits annularly in the outer peripheral inner hollow portion 12A. The rectifying section 21 has a rectifying section cylindrical body 21A having a shape along the outer peripheral surface of the central cylindrical portion 10, and a plurality of rectifying plates 21B are provided radially at equal angular intervals on the outer peripheral surface of the rectifying section cylindrical body 21A. In this example, the rectifying plates 21B are composed of 16 pieces, and their outer peripheral ends have a shape substantially along the inner peripheral surface of the outer peripheral inner cylindrical body 12. The rectifying plates 21B extend rearward from the rectifying section cylindrical body 21A, and at the front side, the front end positions of the rectifying section cylindrical body 21A and the rectifying plates 21B are aligned. The side surface of the rectifying plate 21B serves as a rectifying surface 21C along the nozzle direction. The rectifying section cylindrical body 21A is for fixing the rectifying plates 21B, and the flow of water is stabilized by the water flowing along the rectifying surface 21C of the rectifying plates 21B. The rectifying section 21 corresponds to the outer peripheral rectifying section of the present invention. The outer peripheral rectifying section of the present invention may be formed integrally with the outer peripheral inner cylindrical portion or the outer peripheral outer cylindrical portion.

[0019] Further, inside the outer peripheral outer hollow portion 13A, a filter 22 is disposed over the entire circumference so as to block the thickness direction in the space between the inner circumferential surface of the outer peripheral outer cylindrical portion 13 and the outer circumferential surface of the outer peripheral inner cylindrical portion 12. The filter 22 is disposed on the front side of the water supply port 5, that is, on the downstream side in the water flow. The filter 22 is made of a non-woven fabric and has a mesh structure (product name: Migagiron Z; manufactured by Sankyo Rikagaku #150 - 320). The water introduced into the water supply port 5 is sent at a predetermined flow rate (for example, 5 - 10 L / min). While a pressure loss occurs when passing through the spaces between the meshes in the filter 22, the water flow is straightened by passing through the meshes. Note that, as for the present invention, the type of the filter, the size of the mesh, etc. are not particularly limited.

[0020] The ultrasonic inspection skirter 1 is composed of a plurality of members as shown in FIGS. 5A, B, C, FIGS. 6A, B, C, and FIGS. 7A, B, C. In this example, the skirter body 2 is composed of body members 2A, 2B, and 2C. In the following description, the state where the nozzle is positioned on the lower side will be described.

[0021] As shown in FIGS. 5A, 5B, and 5C, the body member 2A constitutes the lower shape of the skirter body 2 and has a spherical segment-shaped nozzle 11 with a spherical lower surface. A central cylindrical portion 10 rises at the center on the nozzle 11. A nozzle hole 11A penetrating vertically is formed at the center of the nozzle 11, and the central cylindrical portion 10 has a cylindrical hole-shaped central hollow portion 10A inside, and the central hollow portion 10A communicates with the nozzle hole 11A. The central hollow portion 10A and the nozzle hole 11A have a tapered surface 10B whose diameter gradually decreases toward the tip, and a part of the tapered surface 10B constitutes the inclined surface of the nozzle hole 11A. An upper surface peripheral wall 11B is provided annularly at the outer peripheral end of the upper surface of the nozzle 11. On the upper surface side of the nozzle 11, an annular recess that gradually deepens inward except for the upper surface peripheral wall 11B and reaches the outer peripheral surface of the central cylindrical portion 10 is provided, forming a curved inclined surface 13B. The annular recess communicates the front end side of the outer peripheral outer hollow portion 13A and the front end side of the outer peripheral inner hollow portion 12A. The spherical shape of the lower surface of the nozzle 11 facilitates the rotational movement of the ultrasonic inspection skater 1 when the ultrasonic inspection skater 1 is arranged on the inner circumferential side of the R part.

[0022] As shown in FIGS. 6A, 6B, and 6C, the main body member 2B is in contact with the upper surface peripheral wall 11B of the nozzle 11 and has a cylindrical outer peripheral outer cylinder part 13 composed of a cylindrical wall having the same thickness (2.4 mm) as the upper surface peripheral wall 11B. At the upper end of the outer peripheral outer cylinder part 13, a rib 13C with a thickness of 3 mm on the inner circumferential side (including the wall thickness of the cylinder wall) is formed. The inner diameter of the rib 13C is 27 mm. Furthermore, a water supply port 5 is opened in the side wall of the outer peripheral outer cylinder part 13, and an introduction pipe 5A is provided on the outer wall of the outer peripheral outer cylinder part 13 so as to be connected to the water supply port 5.

[0023] The main body member 2C has a cylindrical outer peripheral inner cylinder part 12 shown in FIGS. 7A, 7B, and 7C, has a double rib 12C with a space in the front-rear direction near the upper end of the outer peripheral inner cylinder part 12, and has a lid part 12D at the upper end of the outer peripheral inner cylinder body 12. An attachment hole 12E for inserting the probe 3 is formed in the lid part 12D. The inner diameter of the attachment hole 12E is substantially the same as the inner diameter of the rib 12C. The outer diameter of the outer peripheral inner cylinder body 12 has a size (27 mm diameter) that fits without a gap inside the inner diameter of the rib 13C of the outer peripheral outer cylinder body 13, and the outer peripheral inner cylinder body 12 is inserted into the inner diameter side of the rib 13C of the outer peripheral outer cylinder body 13. The outer peripheral inner cylinder body 12 has a length such that it is in a state of being inserted until the lid part 12C hits the upper end of the rib 13C and is approximately at the same lower end position as the lower end of the outer peripheral outer cylinder body 13.

[0024] In the assembly of the above-described main body members 2A, 2B, and 2C, the rectifying unit 20 is disposed in the central hollow portion 10A, the rectifying unit 21 is disposed in the inner peripheral inner hollow portion 12A, and the filter 22 is disposed annularly without a gap in the outer peripheral outer hollow portion 13A. At this time, the filter 22 is disposed on the lower side of the water supply port 5, that is, on the downstream side in the water flow. In the present embodiment, the rectifying units 20 and 21 and the filter 22 are disposed. However, as the present invention, at least the rectifying unit 20 is required, and the rectifying unit 21 and the filter 22 can be omitted. However, in order to obtain a better water jet state, it is desirable to provide the rectifying unit 21 and the filter 22 together with the rectifying unit 20.

[0025] The probe 3 is fitted into the mounting hole 12E. The probe 3 is housed within the inner diameter of the rib 12C and is attached so that the lower end is flush with the lower surface of the rib 12C. As a result, the upper surface side of the connecting hollow portion 12B is closed by the lower surface of the probe 3 side and the lower surface of the rib 12C, and the sealing 12F is disposed in the recess between the two-stage ribs 12C. The main body members 2A, 2B, and 2C can be joined to each other by adhesion on the surfaces in contact with each other without using fixtures such as bolts, nuts, and screws. Thereby, the entire ultrasonic inspection skid 1 can be made into a small shape that fits within a diameter of 38 mm in a front view with the water supply port 5 at the rear, excluding the cable 4 and the water supply pipe 6. In this embodiment, it is assumed that the skid main body 2 is constituted by the main body members 2A, 2B, and 2C. However, the number and shape of the members constituting the skid main body are not limited, and the skid main body 2 may be integrally constituted.

[0026] The water flow in the ultrasonic inspection skid 1 will be described with reference to FIG. 8. Water is introduced annularly from the water supply port 5 through the water supply connection path 6A of the water supply pipe 6 into the outer peripheral outer hollow portion 13A. After passing through the filter 22, this water smoothly flows along the inclined surface 13B of the recess in the front side of the outer peripheral outer hollow portion 13A into the front end side of the outer peripheral inner hollow portion 12A and moves rearward within the outer peripheral inner hollow portion 12A. At that time, the water is rectified by passing through the filter 22, and further, the water flowing within the outer peripheral inner hollow portion 12A passes through the rectifying portion 21 and is rectified, and moves rearward within the outer peripheral inner hollow portion 12A. After the water has moved annularly to the connecting hollow portion 12B at the rear end of the outer peripheral inner hollow portion 12A, it moves forward in the central hollow portion 10A. In the central hollow portion 10A, the water moves forward and is further rectified by passing through the rectifying portion 20. The water that has passed through the rectifying portion 20 moves to the central hollow portion 10A and the nozzle 11, moves forward while being constricted by the tapered surface 10B, and is ejected forward from the nozzle hole 11A.

[0027] The water passing through the central hollow portion 13A is rectified by the filter 22, and further, the water passing through the outer peripheral outer hollow portion 12A and the outer peripheral inner hollow portion 10A is rectified by the above two rectifying portions 20 and 21, and the water ejected forward from the nozzle hole 11A has no turbulent flow and has a good laminar flow state.

[0028] When the ultrasonic inspection skater 1 is used for transmission, ultrasonic waves are sent forward from the probe 3 and propagated to the water flowing within the central hollow portion 10A and the nozzle hole 11A. The ultrasonic waves can travel through the water in a laminar flow state with little attenuation and propagate stably. When the ultrasonic inspection skater 1 is used for reception, the ultrasonic waves propagate stably with little attenuation in the jet flow in a laminar flow state and are received by the probe 3.

[0029] FIG. 9 shows an example of the usage state in ultrasonic inspection. The skimmer 1 for ultrasonic inspection is used for transmission. The object to be inspected 100 is placed in front of the nozzle 11, and the receiving ultrasonic inspection skimmer 50 is placed on the opposite side across the object to be inspected 100. The ultrasonic inspection skimmer 50 is related to the related art and is arranged so that the object to be inspected 100 is located in front of the nozzle.

[0030] In this state, water is sprayed from the nozzles of the ultrasonic inspection skimmer 1 and the ultrasonic inspection skimmer 50 to strike the water column 30 against the inspected part 100A of the object to be inspected 100. The water supply amount is not particularly limited, but for example, it can be set to a supply amount of 5 to 10 L / min. At this time, ultrasonic waves are generated from the probe 3 by the ultrasonic inspection skimmer 1 and propagated into the water flowing in the ultrasonic inspection skimmer 1. The ultrasonic waves hit the inspected part 100A of the object to be inspected 100 together with the water column 30, penetrate the inspected part 100A, propagate in the water column 60 sprayed from the ultrasonic inspection skimmer 50, and are transmitted into the ultrasonic inspection skimmer 50. In the ultrasonic inspection skimmer 50, an inspection is performed to receive the ultrasonic waves that have penetrated the inspected part 100A with the probe 51. At this time, the ultrasonic waves hit the inspected part 100A in a stable state, so that the ultrasonic inspection of the ultrasonic waves can be performed well.

[0031] In the ultrasonic inspection skimmer 1 of this embodiment, when water hits the inspected part 100A, it forms a stable water umbrella shape. This is obtained because the water is in a good laminar flow state. On the other hand, when the water is in a turbulent flow state, when it hits the object to be inspected, it does not form a stable water umbrella state, and the water is likely to scatter. In the flow of water in a stable laminar flow state, the attenuation of ultrasonic waves is small and the propagation is also stable.

[0032] In the above example, with the ultrasonic inspection skirt 1 for transmission, ultrasonic waves were transmitted at a frequency of 1 MHz from the probe 3, and with the ultrasonic inspection skirt 50 for reception, when ultrasonic waves of 1 MHz were measured, the height variation of the echo was 20.5 - 28.0%, showing little variation and being stable. On the other hand, when using a skirt where the rectification of water was not sufficient, the water was in a turbulent state, the height variation of the echo was 6.0 - 19.0%, the attenuation amount increased, and there were always fluctuations, resulting in an unstable ultrasonic wave propagation state. Also, since the ultrasonic inspection skirt 1 of the present embodiment has a shape that fits within a diameter of 38 mm when viewed from the front, it is difficult to secure a sufficient flow path for rectification. However, due to the arrangement of the rectifying portions 20, 21 and the arrangement of the filter 22, a sufficient rectifying effect is obtained, and the injected water has a good laminar flow state.

[0033] In the above example, the description was made with respect to the flat plate-shaped object to be inspected 100. For example, a case where the ultrasonic inspection skirt 1 for transmission is arranged in a narrow space with respect to the object to be inspected 110 will be described. An example of the object to be inspected is shown in FIG. 10. The object to be inspected 110 has an elongated shape and has an R portion with an R-shaped cross section in the central part, and the two sides on both sides of the R-shaped cross section portion have an angular difference of about 45 degrees. Among the R portions, there are those with a core 111 and those without. In the figure, the one with the core 111 is shown, and in the present embodiment, the presence or absence of the core is not limited. This object to be inspected 110 can be exemplified by, for example, the wing nose portion of an aircraft. In this example, the R portion is taken as the inspection portion 110A. For example, the ultrasonic inspection skirt 1 for transmission is arranged on the inner surface side of the R-shaped cross section portion, and the ultrasonic inspection skirt 50 for reception is arranged on the outer surface side of the R-shaped cross section portion. The measurement range of the inspection portion 110A is not limited to the top portion, and it is necessary to measure the surroundings. At this time, it is desirable that the ultrasonic inspection skirt 1 applies water to the inspection portion 110A as vertically as possible, and the ultrasonic inspection skirt 50 for reception is arranged at its tip.

[0034] However, when the skater is placed in a narrow space and its movement is restricted, it becomes difficult to properly apply the sprayed water to the part to be inspected. FIG. 11 is a view in which a skater for transmission ultrasonic waves is arranged on the inner surface side of the object 110 to be inspected. The right view in the figure shows the ultrasonic inspection skater 1 of the present embodiment arranged, and the left view in the figure shows the ultrasonic inspection skater 50 having a rectangular shape in the related art arranged. The two-dot chain line in the figure shows the positional relationship when the rotational positions of the skater and the object 110 to be inspected are changed. Inspection The ultrasonic inspection skater 1 has a lateral width of 33 mm in a front view with the nozzle 11 facing downward, a vertical length including the probe 3 of 35.5 mm, and is entirely contained within a circle of 38 mm. The ultrasonic inspection skater 50 has a lateral width of 37 mm in a front view with the nozzle facing downward, a vertical length including the probe 3 of 40 mm, has a rectangular body shape, and the overall shape is contained within a circle of 49 mm. When the ultrasonic inspection skater 50 is directed toward the top portion of the part 110A to be inspected, the corners are close to the inner surface of the part 110A of the object 110 to be inspected, the rotation range is restricted, and when the rotation angle increases, it comes into contact with the inner surface of the object 110 to be inspected. Therefore, it is necessary to perform measurement by applying water obliquely to the part 110A to be inspected, and good ultrasonic transmission cannot be achieved.

[0035] In contrast, for the ultrasonic inspection skater 1, the water supply pipe 6 can be arranged in the longitudinal direction of the object 100 to be inspected, and a predetermined clearance can be maintained over a wide range with the inner surface of the object 110 to be inspected, and the ultrasonic inspection skater 1 can be adjusted within a large angular range. Thereby, the water sprayed from the nozzle 11 can be applied to the inner surface of the object 110 to be inspected almost perpendicularly, and ultrasonic waves can be favorably transmitted through the object 100 to be inspected. In particular, for the ultrasonic inspection skater 1, the lower surface side where the nozzle 11 is located is formed in an arc shape in cross section, and rotational adjustment can be performed more easily. <Ultrasonic inspection device>

[0036] <Ultrasonic inspection device> Next, an ultrasonic inspection apparatus that holds and moves the inspection object 110 with a manipulator using a transmitter skater and a receiver skater will be described with reference to the drawings of FIGS. 12 to 14. FIG. 12 shows a schematic plan view and a block diagram of the ultrasonic inspection apparatus 200, in which the ultrasonic inspection skater 1 and the ultrasonic inspection skater 50 are installed and fixed facing each other so that the water injection directions are opposite. In the ultrasonic inspection apparatus 200, a water supply pump 201 for supplying water to the ultrasonic inspection skater 1 and the ultrasonic inspection for skater 50 is arranged. The outlet side of the water supply pump unit 201 is connected to the ultrasonic inspection skater 1 and the ultrasonic inspection for skater 50 by a water supply pipe 202. In the figure, for simplicity, the water supply pipe 202 is shown by a single line, but in reality, water can be supplied independently to each of the ultrasonic inspection skaters 1 and 50. The water supply pump 201 and the water supply pipe 202 can supply water to the ultrasonic inspection skater 1 and the ultrasonic inspection for skater 50 with a predetermined amount of water.

[0037] Also, an ultrasonic transmission cable 215 for transmitting an ultrasonic signal is installed on the probes of the ultrasonic inspection skater 1 and the ultrasonic inspection for skater 50, and one end thereof is connected to the flaw detector 210. The flaw detector 210 is connected to the recording PC 211 and the analysis PC 212 by a signal cable 225. In the analysis PC 212, the ultrasonic waves measured by the ultrasonic inspection skater 50 are received to perform flaw detection analysis on the inspection part, and the data before or after analysis is saved to the recording PC 211 as necessary.

[0038] The manipulator 230 is connected to the robot controller 221 by a signal cable 222, and the robot controller 221 is connected to the control panel 220 by a signal cable 226. Further, the robot controller 221 is connected to the sensors on the skater side by a signal cable 227. Through the signal cable 226, the robot controller 221, and the signal cable 222, a position signal for the manipulator 230 is sent by the control panel 220, and the operation of the manipulator 230 is controlled by the robot controller 221 according to the command of the control panel 220. The position signal from the sensors on the skater side is notified to the robot controller 221 through the signal cable 227.

[0039] The control panel 220 is connected to a PLC 213 (Programmable Logic Controller) by a signal cable 223, and between the PLC 213 and the control panel 220, the position signal of the object to be inspected by the manipulator 230 is exchanged. Also, the above-described flaw detector 210 is connected to the PLC 213 by a signal cable 224. A position signal is sent from the PLC 213 to the flaw detector 210, and the relationship between the flaw detection position and the flaw detection result is associated.

[0040] As shown in FIGS. 12 and 13, in the ultrasonic inspection apparatus 200, the ultrasonic inspection skater 1 and the ultrasonic inspection skater 50 are arranged to face each other, and each is fixed to skater fixtures 250A and 250B described later. A manipulator 230 is arranged on the rear side thereof, and an object to be inspected table 245 is installed on one side of the manipulator 230. A hand rest 240 is provided on the rear side of the manipulator 230.

[0041] A work clamp hand 241 is arranged on the hand rest 240. Work clamp hands of different sizes can be used according to the size of the object to be inspected. In the figure, a large-sized work clamp hand 241A and a small-sized work clamp hand 241B are placed.

[0042] The manipulator 230 has a base 230A mounted on a base so as to be horizontally rotatable about a vertical shaft, a base end of a first arm 230B mounted to the base 230A so as to be vertically rotatable about a horizontal shaft, and a base end of a second arm 230C mounted to the tip of the first arm 230B so as to be vertically rotatable about a horizontal shaft. At the tip of the second arm 230C, a hand 230D is rotatable about an axis aligned with the second arm 230C. This allows the hand 230D to move within the operating range B shown in FIG. 13.

[0043] The manipulator 230 receives a control command from the control panel 220 and moves to a predetermined position by rotating each rotation axis via the robot controller 221. First, the work clamp hand 241 on the hand rest 240 is taken out and held by suction. In the manipulator 230, the base portion 230A, the first arm portion 230B, the second arm portion 230C, and the hand portion 230D are rotated and moved to move the hand portion 230D holding the work clamp hand 241, clamp the object to be inspected 110 placed on the object to be inspected table 245, and move the object to be inspected 110 in preparation for measurement.

[0044] The object 110 to be inspected is moved by the manipulator 230, and the ultrasonic inspection scatter 1 and the ultrasonic inspection for The object 110 to be inspected is lowered vertically from above between the scatterers 50. At this time, the inner surface of the R part of the object 110 to be inspected, i.e., the inner surface of the part 110A to be inspected, faces the ultrasonic inspection scatterer 1, and a predetermined distance, for example, about 5 mm, is maintained from the tip side of the ultrasonic inspection scatterer 1. The distance between the part 110 to be inspected and the scatterer for ultrasonic inspection is set to 1 / 2 mm. for This can be done by measuring distances from the distance measuring sensors 251A and 251B provided on the scatter 50 side.

[0045] When measuring, use the ultrasound examination scatter 1 and ultrasound examination forWith water being sprayed from the nozzles of the skater 50 respectively, ultrasonic waves are propagated through the water column from the ultrasonic inspection skater 1 and transmitted through the inspection part 110A for ultrasonic inspection. for Ultrasonic waves are propagated through the water column by the skater 50, and the inspection part 110A is inspected for flaws by the received ultrasonic waves. The ultrasonic waves are sent to the flaw detector 210 via the ultrasonic transmission cable 215, and the analysis of the ultrasonic measurement is performed by the analysis PC 212. The position of the inspection part 110A at that time can be obtained from the detection results of the sensors 251A and 251B and the position signal command, and is notified to the flaw detector 210 via the PLC 213, and the association between the flaw detection result and the flaw detection position is performed.

[0046] When measuring different positions of the inspection part 110A, the manipulator 230 rotates the inspection object 110 around the ultrasonic inspection skater 1 with the vertical axis of the inspection part 110A as the center to measure the periphery of the R part. At this time, while measuring the distance with the distance measurement sensors 251A and 251B so as to have the same interval as the tip side of the ultrasonic inspection skater 1, the rotational movement of the inspection object 110 is performed. Then, the measurement of the inspection part 110A can be performed in the same manner as above. Also, the manipulator 230 moves the inspection object 110 in the vertical direction to similarly measure the inspection part 110A at different positions, and similarly, the inspection object 110 is rotated to measure the periphery of the inspection part 110A.

[0047] By the above operations, it becomes possible to fix the ultrasonic inspection skater 1 and the ultrasonic inspection skater 50 to the skater fixture and measure the inspection object 110. As a result, the jet flow sprayed from the skater is stabilized, and fluctuations in the water volume and the generation of water splashes are suppressed. Therefore, the ultrasonic waves propagating through the jet flow hit the inspection part in a stable state, improving the inspection accuracy. Also, since the inspection object 110 is moved vertically by the manipulator 230 for measurement, it is possible to suppress the deflection and bending stress that occur when the inspection object is long or flexible. Therefore, correction of the flaw detection position according to the deflection of the inspection object is unnecessary, and the accuracy of the measurement position can be increased. Furthermore, the suppression of bending stress also leads to the prevention of damage to the inspection object. The inspected object 110 to be inspected can be moved to a predetermined position by the manipulator 230. The skirter 1 for ultrasonic inspection according to the present embodiment has a reduced overall cross-sectional shape to facilitate placement, and can also perform measurements over a wide range even when the object to be inspected is rotated for measurement.

[0048] In the above embodiment, the manipulator having the first arm portion, the second arm portion, and the hand portion has been described, but the constituent members are not particularly limited, and a manipulator can be configured by appropriately combining mechanisms.

[0049] In the above embodiment, the description has been limited to water as the one from which water is sprayed from the ultrasonic inspection manipulator, but other liquids may be used.

[0050] As described above, the present invention has been described based on the above embodiment, but appropriate changes can be made to the above embodiment without departing from the scope of the present invention.

Explanation of Signs

[0051] 1 Skirter for ultrasonic inspection 2 Skirter body 2A Body member 2B Body member 2C Body member 3 Probe 4 Cable 5 Water supply port 5A Introduction pipe 6 Water supply pipe 6A Water supply connection path 10 Central cylindrical portion 10A Central hollow portion 10B Tapered surface 11 Nozzle 11A Nozzle hole 11B Upper surface peripheral wall 12 Outer peripheral inner cylindrical portion 12A Outer peripheral inner hollow portion 12B Connecting hollow portion 12C Rib 12D Cover part 12E Mounting hole 12F Sealing 13 Outer peripheral outer cylinder part 13A Outer peripheral outer hollow part 13B Inclined surface 13C Rib 20 Straightening part 20A Through hole 20B Straightening plate 20C Straightening surface 21 Straightening part 21A Straightening part cylinder body 21B Straightening plate 21C Straightening surface 22 Filter 30 Water column 50 Skirt for ultrasonic inspection 60 Water column 100 Object to be inspected 100A Part to be inspected 110 Object to be inspected 110A Part to be inspected 200 Ultrasonic inspection device 201 Water supply pump 202 Water supply pipe 210 Flaw detector 211 Recording PC 212 Analysis PC 213 PLC 215 Ultrasonic transmission cable 220 Control panel 221 Robot controller 222 Signal cable 223 Signal cable 224 Signal cable 225 Signal cable 226 Signal cable 227 Signal cable 230 Manipulator 230A Base part 230B First arm part 230C Second arm part 230D Hand part 240 Hand rest 241 Work clamp hand Large 241A Work Clamp Small 241B Work Clamp 245 Covered Inspection Object Stand 250A Skirt Fixture 250B Skirt Fixture 251A Distance Measurement Sensor 251B Distance Measurement Sensor

Claims

1. A nozzle for injecting a liquid, a central cylinder portion having a central hollow portion in the shape of a cylindrical hole to which the proximal end of the nozzle hole of the nozzle is connected and extending along the direction of the nozzle hole, a liquid supply port for supplying liquid to the central hollow portion, a central rectifying portion located within the central hollow portion of the central cylinder portion and having a rectifying surface along the nozzle direction, and an ultrasonic probe for transmitting or receiving ultrasonic waves propagated within the liquid jet ejected from the nozzle, an outer peripheral inner cylinder portion that surrounds the central cylinder portion with a gap on the outer peripheral side of the central cylinder portion and forms a cylindrical outer peripheral inner hollow portion between the central cylinder portion and the outer peripheral inner cylinder portion, an outer peripheral outer cylinder portion that surrounds the outer peripheral inner cylinder portion with a gap on the outer peripheral side of the outer peripheral inner cylinder portion and forms a cylindrical outer peripheral outer hollow portion between the outer peripheral inner cylinder portion and the outer peripheral outer cylinder portion, the liquid supply port for supplying liquid to the outer peripheral outer hollow portion, an outer peripheral rectifying portion located within the outer peripheral inner hollow portion and having a rectifying surface along the nozzle direction, and the outer peripheral inner hollow portion and the central hollow portion are connected, An ultrasonic inspection skater in which the outer peripheral outer hollow portion and the outer peripheral inner hollow portion are connected.

2. The outer peripheral inner hollow portion is connected to the rear end side in the nozzle direction of the central hollow portion, The outer peripheral outer cylinder portion hollow portion is connected to the front end side in the nozzle direction of the outer peripheral inner hollow portion, and it has a connecting hollow portion having a larger diameter on the rear side than on the front side on the rear side of the central hollow portion, and the outer peripheral inner hollow portion and the central hollow portion are connected via the connecting hollow portion, The ultrasonic inspection skater according to claim 1, wherein the thickness of the outer peripheral outer hollow portion is smaller than the thickness of the outer peripheral inner hollow portion.

3. The outer peripheral outer hollow portion has a filter in the flow domain through which the liquid supplied from the liquid supply port flows, The ultrasonic inspection skater according to claim 1 or 2, wherein the filter has a mesh structure through which the liquid passes.

4. In the overall shape with the nozzle facing downward, at least the cross-sectional shape in a front view has a shape that fits within a circle with a diameter of 50 mm, The ultrasonic inspection skater according to any one of claims 1 to 3, wherein the central hollow portion and the nozzle hole of the nozzle have a tapered surface with an inner diameter decreasing from the rear side toward the tip side.

5. A nozzle provided with a receiving ultrasonic inspection skirt and a transmitting ultrasonic inspection skirt on each skirt is positioned so that the jet directions face each other, and a skirt fixture that fixes the receiving ultrasonic inspection skirt and the transmitting ultrasonic inspection skirt, A manipulator that holds the object to be inspected and moves the object to be inspected with at least the inspected part of the object to be inspected positioned between the nozzles of the receiving ultrasonic inspection skirt and the transmitting ultrasonic inspection skirt, An ultrasonic inspection apparatus, wherein at least one of the receiving ultrasonic inspection skirt and the transmitting ultrasonic inspection skirt is composed of the ultrasonic inspection skirt according to any one of claims 1 to 4.

6. An ultrasonic inspection apparatus for inspecting an object to be inspected having a relatively narrow space on one side of the spaces on both sides sandwiching the inspected part, A nozzle provided with a receiving ultrasonic inspection skirt and a transmitting ultrasonic inspection skirt on each skirt is positioned so that the jet directions face each other, and a skirt fixture that fixes the receiving ultrasonic inspection skirt and the transmitting ultrasonic inspection skirt, A manipulator that holds the object to be inspected and moves the object to be inspected with at least the inspected part of the object to be inspected positioned between the nozzles of the receiving ultrasonic inspection skirt and the transmitting ultrasonic inspection skirt, The manipulator has a nozzle for injecting a liquid on the narrow side of the space sandwiching the inspected part, a central cylindrical part having a cylindrical hole-shaped central hollow part where the base end of the nozzle hole of the nozzle is connected and extending along the nozzle hole direction, a liquid supply port for supplying liquid to the central hollow part, and a central rectifying part located in the central hollow part of the central cylindrical part and having a rectifying surface along the nozzle direction. Holding the object to be inspected so that the ultrasonic inspection skirt having an ultrasonic probe for transmitting or receiving ultrasonic waves propagated in the liquid jet from the nozzle is positioned, Furthermore, the object to be inspected can be rotationally moved in a direction intersecting the liquid jet direction between the nozzles, And the object to be inspected can be slidably moved in a direction intersecting the jet direction, And an ultrasonic inspection apparatus that enables the object to be inspected to be slidably moved in a direction intersecting the jet direction.

7. The ultrasonic inspection skirt located in the narrow space has an outer peripheral inner cylindrical part that surrounds the central cylindrical part with a space therebetween on the outer peripheral side of the central cylindrical part and forms a cylindrical outer peripheral inner hollow part between the central cylindrical part and itself. On the outer peripheral side of the inner peripheral cylindrical portion, an outer peripheral outer cylindrical portion that surrounds the inner peripheral cylindrical portion with a gap therebetween and forms a cylindrical outer peripheral outer hollow portion with the inner peripheral cylindrical portion, A liquid supply port for supplying liquid to the outer peripheral outer hollow portion, An outer peripheral rectifying portion that is located in the inner peripheral hollow portion and has a rectifying surface along the nozzle direction, and The inner peripheral hollow portion and the central hollow portion are connected, The ultrasonic inspection apparatus according to claim 6, wherein the outer peripheral outer hollow portion and the inner peripheral hollow portion are connected.

8. The ultrasonic inspection apparatus according to any one of claims 5 to 7, wherein at least one of the ultrasonic inspection skirter for reception and the ultrasonic inspection skirter for transmission has a distance measurement sensor that measures the distance from the object to be inspected in the jet flow direction when fixed to the skirter fixture.

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