Semiconductor Devices

Abstract

Provided is a semiconductor device comprising a transistor portion and a diode portion. The semiconductor device comprises a drift region, a base region, an emitter region, and a plurality of trench portions. The transistor portion includes a boundary region disposed adjacent to the diode portion. In a direction in which the plurality of trench portions are arranged, a lifetime control region is provided across the boundary region from the diode portion to the transistor portion in which the emitter region is provided. The boundary region is provided extending in an extending direction of the plurality of trench portions, and includes a second conductivity-type plug region having a higher doping concentration than the base region. On an upper surface in the boundary region, a contact region and the base region are alternately arranged in the extending direction.

Description

[Technical Field]

[0001] The present invention relates to a semiconductor device. [Background technology]

[0002] BACKGROUND ART Semiconductor devices that include a transistor section and a diode section are known (see, for example, Patent Documents 1 and 2). Patent Document 1: JP 2018-073911 A Patent Document 2: International Publication No. 2019 / 176327 Problem to be Solved

[0003] In a semiconductor device, it is preferable to reduce the reverse recovery loss Err.

[0004] In a first aspect of the present invention, there is provided a semiconductor device comprising a transistor portion and a diode portion, the semiconductor device comprising: a drift region of a first conductivity type provided in a semiconductor substrate; a base region of a second conductivity type provided above the drift region; an emitter region of the first conductivity type provided above the base region and having a higher doping concentration than the drift region; a contact region of the second conductivity type provided above the base region and having a higher doping concentration than the base region; and a plurality of trench portions provided on a front surface of the semiconductor substrate, the transistor portion having a boundary region provided adjacent to the diode portion, and a lifetime control region provided beyond the boundary region in an arrangement direction of the plurality of trench portions from the diode portion to the transistor portion in which the emitter region is provided, the boundary region extending in an extension direction of the plurality of trench portions, and having a plug region of the second conductivity type having a higher doping concentration than the base region, and the contact region and the base region are alternately arranged in the extension direction on the front surface of the semiconductor substrate in the boundary region.

[0005] The boundary region may be made up of one mesa portion sandwiched between two of the plurality of trench portions.

[0006] In the transistor portion other than the boundary region, the contact regions and the emitter regions may be alternately arranged in the extension direction. The contact regions in the boundary region may be provided at positions corresponding to the contact regions in the transistor portion other than the boundary region in the extension direction.

[0007] In the boundary region, the thinning rate, which is the proportion of the base region exposed on the front surface, may be 30% or more and 80% or less.

[0008] In the boundary region, the length over which the plug region extends in the extension direction may be longer than the length over which the contact region extends in the extension direction.

[0009] The diode portion may have a plug region, and the plug region of the boundary region may have the same doping concentration as the plug region of the diode portion.

[0010] The plurality of trench portions in the boundary region may be dummy trench portions.

[0011] The emitter region closest to the boundary region in the arrangement direction may be sandwiched between dummy trench portions.

[0012] The boundary region may not be provided with an emitter region.

[0013] A collector region of the second conductivity type may be provided on the back surface of the semiconductor substrate below the boundary region.

[0014] The semiconductor device may include a cathode region of the first conductivity type provided on the back surface of the semiconductor substrate below the boundary region.

[0015] The lifetime control region may be provided over the entire surface of the semiconductor substrate when viewed from above.

[0016] The transistor portion may have an accumulation region of the first conductivity type provided above the drift region and having a higher doping concentration than the drift region, and the accumulation region may be provided in both the boundary region and the transistor portion other than the boundary region.

[0017] The accumulation region may be provided in both the transistor section and the diode section.

[0018] The above summary of the invention does not list all of the features of the present invention, and subcombinations of these features may also be inventions. [Brief explanation of the drawings]

[0019] [Figure 1A] 1 shows an example of a top view of a semiconductor device 100. FIG. [Figure 1B] 1A shows an example of a cross section of the semiconductor device 100 taken along the line aa' in FIG. 1A. [Figure 1C] 1A shows an example of a cross section of the semiconductor device 100 taken along the line bb' in FIG. 1A. [Figure 1D] 1A shows an example of a cross section of the semiconductor device 100 taken along the line cc' in FIG. 1A. [Figure 2] A modified example of the semiconductor device 100 is shown. [Figure 3] A modified example of the semiconductor device 100 is shown. [Figure 4] A modified example of the semiconductor device 100 is shown. [Figure 5] 1 shows a semiconductor device 500 as a comparative example. [Figure 6A] An example of the IV characteristics of the semiconductor device 100 and the semiconductor device 500 is shown. [Figure 6B] An example of the reverse recovery characteristics of the semiconductor device 100 and the semiconductor device 500 is shown. [Figure 7] The relationship between the thinning rate [%] and the rate of change [%] of reverse recovery loss Err is shown. DETAILED DESCRIPTION OF THE INVENTION

[0020] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention as claimed. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0021] In this specification, one side in a direction parallel to the depth direction of a semiconductor substrate is referred to as "top" and the other side as "bottom." Of the two main surfaces of a substrate, layer, or other member, one surface is referred to as the top surface and the other surface is referred to as the bottom surface. The directions of "top," "bottom," "front," and "back" are not limited to the direction of gravity or the direction in which the semiconductor device is attached to a substrate or the like when mounted.

[0022] In this specification, technical matters may be explained using orthogonal coordinate axes of X, Y, and Z. In this specification, a plane parallel to the top surface of the semiconductor substrate is defined as the XY plane, and the depth direction of the semiconductor substrate is defined as the Z axis. In this specification, the case where the semiconductor substrate is viewed in the Z axis direction is referred to as a top view.

[0023] In each embodiment, an example is shown in which the first conductivity type is N-type and the second conductivity type is P-type, but the first conductivity type may be P-type and the second conductivity type may be N-type. In this case, the conductivity types of the substrate, layer, region, etc. in each embodiment will be opposite polarities.

[0024] In this specification, layers and regions marked with N or P have majority carriers of electrons or holes, respectively. In addition, + and - attached to N or P indicate higher and lower doping concentrations than layers and regions without that designation, respectively. ++ indicates a higher doping concentration than +, and -- indicates a lower doping concentration than -.

[0025] In this specification, the doping concentration refers to the concentration of a dopant that has become a donor or an acceptor. Therefore, the unit is cm -3In this specification, the difference in concentration between the donor and the acceptor (i.e., the net doping concentration) may be referred to as the doping concentration. In this case, the doping concentration can be measured by the SR method. Alternatively, the chemical concentration of the donor and the acceptor may be referred to as the doping concentration. In this case, the doping concentration can be measured by the SIMS method. Unless otherwise specified, any of the above may be used as the doping concentration. Unless otherwise specified, the peak value of the doping concentration distribution in the doping region may be referred to as the doping concentration in the doping region.

[0026] 1A shows an example of a top view of a semiconductor device 100. The semiconductor device 100 of this example is a semiconductor chip including a transistor section 70 and a diode section 80. For example, the semiconductor device 100 is a reverse conducting IGBT (RC-IGBT).

[0027] The transistor section 70 is a region obtained by projecting a collector region 22 provided on the back surface side of the semiconductor substrate 10 onto the upper surface of the semiconductor substrate 10. The collector region 22 has a second conductivity type. In this example, the collector region 22 is, for example, a P+ type. The transistor section 70 includes a transistor such as an IGBT. The transistor section 70 includes a boundary region 90 located at the boundary between the transistor section 70 and the diode section 80. Note that the boundary region 90 may include a cathode region 82 on the back surface side of the semiconductor substrate 10.

[0028] The diode section 80 is a region obtained by projecting a cathode region 82 provided on the back surface side of the semiconductor substrate 10 onto the upper surface of the semiconductor substrate 10. The cathode region 82 has a first conductivity type. In this example, the cathode region 82 is an N+ type, for example. The diode section 80 includes a diode such as a free wheel diode (FWD) provided adjacent to the transistor section 70 on the upper surface of the semiconductor substrate 10.

[0029] FIG. 1A shows the region around the chip edge, which is the edge side of semiconductor device 100, and omits other regions. For example, an edge termination structure may be provided in the region on the negative side of semiconductor device 100 in the Y-axis direction in this example. The edge termination structure reduces electric field concentration on the upper surface side of semiconductor substrate 10. The edge termination structure may have, for example, a guard ring, a field plate, a resurf, or a structure combining these. Note that, for convenience, this example describes the edge on the negative side of the Y-axis direction, but the same applies to other edges of semiconductor device 100.

[0030] The semiconductor substrate 10 may be a silicon substrate, a silicon carbide substrate, a nitride semiconductor substrate such as gallium nitride, etc. The semiconductor substrate 10 in this example is a silicon substrate.

[0031] The semiconductor device 100 of this example includes, on the front surface of the semiconductor substrate 10, a gate trench portion 40, a dummy trench portion 30, an emitter region 12, a base region 14, a contact region 15, and a well region 17. The semiconductor device 100 of this example also includes an emitter electrode 52 and a gate metal layer 50 provided above the front surface of the semiconductor substrate 10.

[0032] The emitter electrode 52 is provided above the gate trench portion 40, the dummy trench portion 30, the emitter region 12, the base region 14, the contact region 15, and the well region 17. The gate metal layer 50 is provided above the gate trench portion 40 and the well region 17.

[0033] The emitter electrode 52 and the gate metal layer 50 are formed of a material containing metal. For example, at least a portion of the emitter electrode 52 may be formed of aluminum or an alloy containing aluminum as a main component (e.g., an aluminum-silicon alloy or an aluminum-silicon-copper alloy, etc.). At least a portion of the gate metal layer 50 may be formed of aluminum or an alloy containing aluminum as a main component (e.g., an aluminum-silicon alloy or an aluminum-silicon-copper alloy, etc.). The emitter electrode 52 and the gate metal layer 50 may have a barrier metal made of titanium or a titanium compound, etc., below the region made of aluminum, etc. The emitter electrode 52 and the gate metal layer 50 are provided separately from each other.

[0034] The emitter electrode 52 and the gate metal layer 50 are provided above the semiconductor substrate 10 with an interlayer insulating film 38 sandwiched therebetween. The interlayer insulating film 38 is omitted in Fig. 1A. A contact hole 54, a contact hole 55, and a contact hole 56 are provided to penetrate the interlayer insulating film 38.

[0035] The contact hole 55 connects the gate metal layer 50 to the gate conductive portion in the transistor portion 70. Inside the contact hole 55, a plug made of tungsten or the like may be formed.

[0036] The contact hole 56 connects the emitter electrode 52 and the dummy conductive portion in the dummy trench portion 30. Inside the contact hole 56, a plug made of tungsten or the like may be formed.

[0037] The connection portion 25 electrically connects a front surface electrode, such as the emitter electrode 52 or the gate metal layer 50, to the semiconductor substrate 10. In one example, the connection portion 25 is provided between the gate metal layer 50 and the gate conductive portion. The connection portion 25 is also provided between the emitter electrode 52 and the dummy conductive portion. The connection portion 25 is made of a conductive material, such as polysilicon doped with impurities. In this example, the connection portion 25 is polysilicon (N+) doped with N-type impurities. The connection portion 25 is provided above the front surface of the semiconductor substrate 10 via an insulating film, such as an oxide film.

[0038] The gate trench portions 40 are arranged at predetermined intervals along a predetermined arrangement direction (in this example, the X-axis direction). The gate trench portions 40 in this example may have two extending portions 41 extending along an extension direction (in this example, the Y-axis direction) that is parallel to the front surface of the semiconductor substrate 10 and perpendicular to the arrangement direction, and a connecting portion 43 that connects the two extending portions 41.

[0039] At least a portion of the connection portion 43 may be formed in a curved shape. Connecting the ends of the two extension portions 41 of the gate trench portion 40 can alleviate electric field concentration at the ends of the extension portions 41. At the connection portion 43 of the gate trench portion 40, the gate metal layer 50 may be connected to the gate conductive portion.

[0040] The dummy trenches 30 are trenches electrically connected to the emitter electrode 52. Similar to the gate trenches 40, the dummy trenches 30 are arranged at predetermined intervals along a predetermined arrangement direction (the X-axis direction in this example). Similar to the gate trenches 40, the dummy trenches 30 in this example may have a U-shape on the front surface of the semiconductor substrate 10. That is, the dummy trenches 30 may have two extension portions 31 extending along the extension direction and a connection portion 33 connecting the two extension portions 31.

[0041] The transistor section 70 of this example has a structure in which two gate trench sections 40 and three dummy trench sections 30 are repeatedly arranged. That is, the transistor section 70 of this example has gate trench sections 40 and dummy trench sections 30 in a ratio of 2:3. For example, the transistor section 70 has one extension section 31 between two extension sections 41. The transistor section 70 also has two extension sections 31 adjacent to the gate trench section 40.

[0042] However, the ratio of the gate trench portions 40 to the dummy trench portions 30 is not limited to this example. The ratio of the gate trench portions 40 to the dummy trench portions 30 may be 1:1 or 2:4. Furthermore, the transistor portion 70 may not be provided with dummy trench portions 30, and may be entirely made up of gate trench portions 40.

[0043] The well region 17 is a second conductivity type region provided closer to the front surface of the semiconductor substrate 10 than the drift region 18, which will be described later. The well region 17 is an example of a well region provided on the edge side of the semiconductor device 100. The well region 17 is, for example, P+ type. The well region 17 is formed within a predetermined range from the end of the active region on the side where the gate metal layer 50 is provided. The diffusion depth of the well region 17 may be deeper than the depths of the gate trench portion 40 and the dummy trench portion 30. Part of the regions of the gate trench portion 40 and the dummy trench portion 30 on the gate metal layer 50 side are formed in the well region 17. The bottoms of the ends of the gate trench portion 40 and the dummy trench portion 30 in the extension direction may be covered by the well region 17.

[0044] The contact hole 54 is formed above the emitter region 12 and the contact region 15 in the transistor section 70. boundary area 90, the contact hole 54 is provided above the base region 14. The contact hole 54 is provided above the contact region 15 in the boundary region 90. The contact hole 54 is provided above the base region 14 in the diode section 80. None of the contact holes 54 is provided above the well regions 17 provided at both ends in the Y-axis direction. In this manner, one or more contact holes 54 are formed in the interlayer insulating film. The one or more contact holes 54 may be provided extending in the extension direction. Note that a plug region 19 may be provided below the contact hole 54. The plug region 19 will be described later.

[0045] The boundary region 90 is provided in the transistor section 70 and is adjacent to the diode section 80. The boundary region 90 includes a contact region 15. The boundary region 90 includes the contact region 15, which allows holes remaining in the diode section 80 to be extracted during turn-off operation, thereby preventing breakdown due to latch-up. The boundary region 90 of this example does not include an emitter region 12. This prevents a decrease in latch-up resistance. The boundary region 90 of this example is composed of a single mesa portion 91 sandwiched between two trench portions. By using a single mesa portion 91 as the boundary region 90, the active areas of the transistor section 70 and the diode section 80 can be kept large, preventing deterioration of electrical characteristics (e.g., forward current-voltage characteristics). However, the boundary region 90 may also be composed of three or more trench portions and multiple mesa portions 91.

[0046] In one example, the trench portion of the boundary region 90 is a dummy trench portion 30. The boundary region 90 in this example is arranged so that both ends in the X-axis direction are dummy trench portions 30. In addition, the emitter region 12 closest to the boundary region 90 in the arrangement direction is sandwiched between the dummy trench portions 30. This structure makes it possible to suppress the influence of fluctuations in the gate potential on electrical characteristics (for example, forward current-voltage characteristics, etc.).

[0047] Mesa portion 71, mesa portion 91, and mesa portion 81 are mesa portions provided adjacent to trench portions in a plane parallel to the front surface of semiconductor substrate 10. A mesa portion is a portion of semiconductor substrate 10 sandwiched between two adjacent trench portions, and may be a portion extending from the front surface of semiconductor substrate 10 to the deepest bottom of each trench portion. An extension portion of each trench portion may be considered as one trench portion. In other words, the region sandwiched between the two extension portions may be considered as a mesa portion.

[0048] The mesa portion 71 is provided in the transistor portion 70 adjacent to at least one of the dummy trench portion 30 or the gate trench portion 40. The mesa portion 71 has a well region 17, an emitter region 12, a base region 14, and a contact region 15 on the front surface of the semiconductor substrate 10. In the mesa portion 71, the emitter regions 12 and the contact regions 15 are provided alternately in the extension direction.

[0049] The mesa portion 91 is provided in the boundary region 90. The mesa portion 91 has a base region 14, a contact region 15, and a well region 17 on the front surface of the semiconductor substrate 10. In the mesa portion 91, the base regions 14 and the contact regions 15 are provided alternately in the extension direction. In this way, the boundary region 90 is provided with the contact regions 15 thinned out, which suppresses the injection of excessive holes during diode operation and reduces the reverse recovery loss Err, turn-on loss Eon, and reverse recovery surge voltage.

[0050] The mesa portion 81 is provided in a region of the diode portion 80 that is sandwiched between adjacent dummy trench portions 30. The mesa portion 81 has a base region 14 and a well region 17 on the front surface of the semiconductor substrate 10.

[0051] The base region 14 is a second conductivity type region provided on the front surface side of the semiconductor substrate 10 in the transistor section 70 and the diode section 80. The base region 14 is, for example, a P-type. The base region 14 may be provided on the front surface of the semiconductor substrate 10 at both ends of the mesa section 71 and the mesa section 91 in the Y-axis direction. Note that FIG. 1A shows only one end of the base region 14 in the Y-axis direction.

[0052] The emitter region 12 is a region of a first conductivity type having a higher doping concentration than the drift region 18. In this example, the emitter region 12 is, for example, N+ type. An example of a dopant for the emitter region 12 is arsenic (As). The emitter region 12 is provided on the front surface of the mesa portion 71 in contact with the gate trench portion 40. The emitter region 12 may be provided extending in the X-axis direction from one of the two trench portions sandwiching the mesa portion 71 to the other. The emitter region 12 is also provided below the contact hole 54.

[0053] Furthermore, the emitter region 12 may or may not be in contact with the dummy trench portion 30. In this example, the emitter region 12 is in contact with the dummy trench portion 30. The emitter region 12 does not have to be provided in the mesa portion 91.

[0054] The contact region 15 is a second conductivity type region having a higher doping concentration than the base region 14. In this example, the contact region 15 is, for example, P+ type. In this example, the contact region 15 is provided on the front surfaces of the mesa portion 71 and the mesa portion 91. The contact region 15 may be provided in the X-axis direction from one of the two trench portions sandwiching the mesa portion 71 or the mesa portion 91 to the other. The contact region 15 may or may not be in contact with the gate trench portion 40. Furthermore, the contact region 15 may or may not be in contact with the dummy trench portion 30. In this example, the contact region 15 is in contact with the dummy trench portion 30 and the gate trench portion 40. The contact region 15 is also provided below the contact hole 54. The contact region 15 may also be provided in the mesa portion 81.

[0055] Here, in the transistor portion 70 other than the boundary region 90, the contact regions 15 and the emitter regions 12 are alternately arranged in the extension direction. Furthermore, the contact regions 15 in the boundary region 90 are provided so as to correspond in position in the extension direction to the contact regions 15 in the transistor portion 70 other than the boundary region 90. "Provided so as to correspond in position in the extension direction" means that the contact regions 15 are provided so as to at least overlap in position in the extension direction. In one example, a mask for implanting dopants into the contact regions 15 is provided so as to extend in the X-axis direction beyond multiple trench portions. This allows for improved patterning accuracy even when the width of the mesa portion in the X-axis direction is shortened. Furthermore, the base region 14 in the boundary region 90 may be provided so as to correspond in position in the extension direction to the emitter regions 12 in the transistor portion 70 other than the boundary region 90.

[0056] The plug regions 19 are provided in the contact holes 54, extending in the extension direction without being thinned out. The plug regions 19 extend in the extension direction above the base regions 14 and contact regions 15, which are alternately arranged in the extension direction, and beyond the base regions 14 and contact regions 15. That is, in the boundary region 90, the length by which the plug regions 19 extend in the extension direction is longer than the length by which the contact regions 15 extend in the extension direction. Furthermore, in the boundary region 90, the length by which the plug regions 19 extend in the extension direction may be longer than the length by which the base regions 14 extend in the extension direction.

[0057] 1B shows an example of the aa' cross section of the semiconductor device 100 in FIG. 1A. The aa' cross section is an XZ plane passing through the emitter region 12 of the mesa portion 71. The aa' cross section of this example shows the structure of the mesa portion 91. Base Area 14 In the a-a' cross section, the semiconductor device 100 of this example has a semiconductor substrate 10, an interlayer insulating film 38, an emitter electrode 52, and a collector electrode 24. The emitter electrode 52 is formed above the semiconductor substrate 10 and the interlayer insulating film 38.

[0058] The drift region 18 is a region of a first conductivity type provided in the semiconductor substrate 10. In this example, the drift region 18 is, for example, an N-type. The drift region 18 may be a region remaining in the semiconductor substrate 10 without other doped regions being formed therein. That is, the doping concentration of the drift region 18 may be the same as the doping concentration of the semiconductor substrate 10.

[0059] The buffer region 20 is a region of a first conductivity type provided below the drift region 18. In this example, the buffer region 20 is, for example, N-type. The doping concentration of the buffer region 20 is higher than the doping concentration of the drift region 18. The buffer region 20 may function as a field stop layer that prevents a depletion layer spreading from the lower surface side of the base region 14 from reaching the collector region 22 of the second conductivity type and the cathode region 82 of the first conductivity type.

[0060] The collector region 22 is provided below the buffer region 20 in the transistor section 70. The cathode region 82 is provided below the buffer region 20 in the diode section 80. The boundary between the collector region 22 and the cathode region 82 is the boundary between the transistor section 70 and the diode section 80.

[0061] The collector electrode 24 is formed on the rear surface 23 of the semiconductor substrate 10. The collector electrode 24 is made of a conductive material such as a metal.

[0062] The base region 14 is configured such that, in the mesa portion 71, the mesa portion 91, and the mesa portion 81, Drift Region 18 The base region 14 is a second conductivity type region provided above the gate trench portion 40. The base region 14 may be provided in contact with the dummy trench portion 30.

[0063] The emitter region 12 is provided in the mesa portion 71 between the base region 14 and the front surface 21. The emitter region 12 is provided in contact with the gate trench portion 40. The emitter region 12 may or may not be in contact with the dummy trench portion 30. The emitter region 12 does not have to be provided in the mesa portion 91.

[0064] The plug region 19 is a region of the second conductivity type having a higher doping concentration than the base region 14 and the contact region 15. In this example, the plug region 19 is of P++ type, for example. The plug region 19 is provided on the front surface 21. In the a-a' cross section, the plug region 19 is provided above the base region 14 in the mesa portion 81 and the mesa portion 91. The plug region 19 in this example is in contact with the base region 14. The plug region 19 is also spaced apart from the adjacent trench portion. The plug region 19 may be provided in the mesa portion 91 and the mesa portion 81, extending in the Y-axis direction along the contact hole 54. In this example, the plug regions 19 in the mesa portion 81 and the mesa portion 91 have the same doping concentration, but may have different doping concentrations.

[0065] The accumulation region 16 is a region of a first conductivity type that is provided closer to the front surface 21 of the semiconductor substrate 10 than the drift region 18. In this example, the accumulation region 16 is, for example, an N+ type. The accumulation region 16 is provided in the transistor portion 70. In this example, the accumulation region 16 is provided in both the boundary region 90 and the transistor portion 70 other than the boundary region 90. The transistor portion 70 other than the boundary region 90 is the region in which the mesa portion 71 is formed.

[0066] The accumulation region 16 is provided in contact with the gate trench portion 40. The accumulation region 16 may or may not be in contact with the dummy trench portion 30. The doping concentration of the accumulation region 16 is higher than the doping concentration of the drift region 18. The dose of ion implantation into the accumulation region 16 is 1E12 cm -2 Above, 1E13cm -2 The ion implantation dose of the accumulation region 16 may be 3E12 cm -2 Above, 6E12cm-2 By providing the accumulation region 16, the carrier injection enhancement effect (IE effect) can be enhanced, and the on-voltage of the transistor section 70 can be reduced. Note that E represents a power of 10, and for example, 1E12 cm -2 is 1 x 10 12 cm -2 means.

[0067] One or more gate trenches 40 and one or more dummy trenches 30 are provided on the front surface 21. Each trench extends from the front surface 21 to the drift region 18. In regions where at least one of the emitter region 12, the base region 14, the contact region 15, and the accumulation region 16 is provided, each trench also penetrates these regions to reach the drift region 18. The trenches penetrating the doped regions are not limited to those formed in the order of forming the doped regions and then the trenches. The trenches penetrating the doped regions also include those formed after the trenches have been formed.

[0068] The gate trench portion 40 has a gate trench, a gate insulating film 42, and a gate conductive portion 44 formed on the front surface 21. The gate insulating film 42 is formed to cover the inner wall of the gate trench. The gate insulating film 42 may be formed by oxidizing or nitriding the semiconductor on the inner wall of the gate trench. The gate conductive portion 44 is formed inside the gate trench, further inward than the gate insulating film 42. The gate insulating film 42 insulates the gate conductive portion 44 from the semiconductor substrate 10. The gate conductive portion 44 is made of a conductive material such as polysilicon. The gate trench portion 40 is covered on the front surface 21 with an interlayer insulating film 38.

[0069] The gate conductive portion 44 includes a region facing the adjacent base region 14 on the mesa portion 71 side, across the gate insulating film 42, in the depth direction of the semiconductor substrate 10. When a predetermined voltage is applied to the gate conductive portion 44, a channel is formed by an electron inversion layer in the surface layer of the interface of the base region 14 that contacts the gate trench.

[0070] The dummy trench portion 30 may have the same structure as the gate trench portion 40. The dummy trench portion 30 has a dummy trench, a dummy insulating film 32, and a dummy conductive portion 34 formed on the front surface 21 side. The dummy insulating film 32 is formed to cover the inner wall of the dummy trench. The dummy conductive portion 34 is formed inside the dummy trench and further inward than the dummy insulating film 32. The dummy insulating film 32 insulates the dummy conductive portion 34 from the semiconductor substrate 10. The dummy trench portion 30 is covered on the front surface 21 with an interlayer insulating film 38.

[0071] The interlayer insulating film 38 is provided on the front surface 21. An emitter electrode 52 is provided above the interlayer insulating film 38. One or more contact holes 54 are provided in the interlayer insulating film 38 to electrically connect the emitter electrode 52 to the semiconductor substrate 10. Contact holes 55 and 56 may also be provided so as to penetrate the interlayer insulating film 38.

[0072] The lifetime control region 150 is a region in which lifetime killers are intentionally formed by, for example, injecting impurities into the semiconductor substrate 10. The lifetime killers are carrier recombination centers. The lifetime killers may be crystal defects. For example, the lifetime killers may be vacancies, divacancies, complex defects formed by these with elements constituting the semiconductor substrate 10, or dislocations. The lifetime killers may also be rare gas elements such as helium and neon, or metal elements such as platinum. The lifetime control region 150 can be formed by injecting helium or the like into the semiconductor substrate 10.

[0073] The lifetime control region 150 is provided on the front surface 21 side of the semiconductor substrate 10. The lifetime control region 150 is provided in both the transistor section 70 and the diode section 80. The lifetime control region 150 may be formed by implanting impurities from the front surface 21 side, or may be formed by implanting impurities from the back surface 23 side.

[0074] The lifetime control region 150 is provided beyond the boundary region 90 in the arrangement direction, from the diode section 80 to the transistor section 70 in which the emitter region 12 is provided. In this example, the lifetime control region 150 is provided over the entire surface of the semiconductor substrate 10 when viewed from above. Therefore, the lifetime control region 150 can be formed without using a mask. The dose of impurities for forming the lifetime control region 150 is 0.5E10 cm -2 Above, 1E13cm -2 The dose of the impurity for forming the lifetime control region 150 may be 5E10 cm -2 Above, 5E11cm -2 It may be the following:

[0075] Furthermore, the lifetime control region 150 in this example is formed by implantation from the back surface 23 side. For example, the lifetime control region 150 is formed by irradiating helium from the back surface 23 side. This makes it possible to avoid any influence on the front surface 21 side of the semiconductor device 100. Here, whether the lifetime control region 150 is formed by implantation from the front surface 21 side or the back surface 23 side can be determined by obtaining the state of the front surface 21 side by the SR method or by measuring leakage current.

[0076] In this example, the collector region 22 is provided on the back surface 23 below the boundary region 90. The boundary between the collector region 22 and the cathode region 82 is located at the boundary between the transistor section 70 and the diode section 80.

[0077] 1C shows an example of the bb' cross section of the semiconductor device 100 in FIG. 1A. The bb' cross section is an XZ plane that passes through the contact region 15 in the mesa portion 71. The bb' cross section in this example also passes through the contact region 15 in the mesa portion 91.

[0078] The mesa portion 71 has a base region 14, a contact region 15, and an accumulation region 16. The mesa portion 91 has a base region 14, a contact region 15, an accumulation region 16, and a plug region 19. In the b-b' cross section, the mesa portion 91 differs from the mesa portion 71 in that it has the plug region 19. The mesa portion 81, like the a-a' cross section, has the base region 14, an accumulation region 16, and a plug region 19.

[0079] The contact region 15 is provided above the base region 14 in the mesa portion 91. The contact region 15 is provided in the mesa portion 91 so as to contact the dummy trench portion 30.

[0080] The plug region 19 is provided above the contact region 15 of the mesa portion 91 in the b-b' cross section. In this example, the plug region 19 is in contact with the contact region 15. The plug region 19 is provided in the mesa portion 91 in both the a-a' cross section and the b-b' cross section. That is, the plug region 19 is provided on the front surface 21, extending in the extension direction.

[0081] As in the case of the a-a' cross section, the lifetime control region 150 is provided in both the transistor portion 70 and the diode portion 80. Since the semiconductor device 100 of this example has the lifetime control region 150 in both the transistor portion 70 and the diode portion 80, holes are uniformly released at turn-off, improving the carrier balance between the transistor portion 70 and the diode portion 80.

[0082] 1D shows an example of a cc' cross section of the semiconductor device 100 in FIG. 1A. The cc' cross section is a YZ cross section of the mesa portion 91.

[0083] In the mesa portion 91, the base region 14 and the contact region 15 are exposed on the front surface 21. The base region 14 and the contact region 15 are alternately arranged on the front surface 21 at a predetermined thinning ratio. The thinning ratio is expressed as L1 / (L1+L2). That is, the thinning ratio indicates the proportion of the base region that is exposed on the front surface 21 in the boundary region 90.

[0084] Length L1 is the width in the Y-axis direction between the bottoms of contact regions 15 on the front surface 21 side. Length L1 may be 2.2 μm or more and 30 μm or less. For example, length L1 is 2.2 μm. Length L2 is the width in the Y-axis direction between the bottoms of contact regions 15 on the front surface 21 side. Length L2 may be 0.5 μm or more and 5.0 μm or less. For example, length L2 is 0.6 μm. Length L2 may be longer than length L1. The bottoms of contact regions 15 are the portions where the boundary between base region 14 and contact region 15 is approximately flat in the Y-axis direction.

[0085] In the semiconductor device 100 of this embodiment, the base regions 14 and the contact regions 15 are alternately provided in the boundary region 90 at a predetermined thinning rate, thereby reducing the reverse recovery current Irp, reverse recovery loss Err, and surge voltage. The semiconductor device 100 also suppresses an increase in contact resistance, thereby suppressing breakdown during turn-off and reverse recovery. Furthermore, the semiconductor device 100 does not have an emitter region 12 in the boundary region 90, thereby suppressing a decrease in latch-up resistance. As a result, the semiconductor device 100 improves the trade-off characteristics between the diode forward voltage Vf and reverse recovery loss Err, reduces the reverse recovery surge voltage, and suppresses variations in SW resistance.

[0086] FIG. 2 shows a modified example of the semiconductor device 100. This example shows an example of the cross section taken along the line a-a' in FIG. 1A. The semiconductor device 100 of this example differs from the embodiment of FIG. 1B in that it includes an accumulation region 16 in both the transistor section 70 and the diode section 80. Other than the differences from the embodiment of FIG. 1B, the embodiment may be the same as the embodiment of FIG. 1B.

[0087] In this example, the accumulation region 16 is provided over the entire surface of the transistor section 70 and the diode section 80. This allows the semiconductor device 100 to avoid the influence of mask misalignment of the accumulation region 16. The mesa section 81 includes the base region 14, the accumulation region 16, and a plug region 19. The accumulation region 16 is provided between the base region 14 and the drift region 18. The doping concentration of the accumulation region 16 may be the same in the transistor section 70 and the diode section 80.

[0088] FIG. 3 shows a modified example of the semiconductor device 100. This example shows an example of the a-a' cross section in FIG. 1A. The semiconductor device 100 of this example differs from the embodiment of FIG. 1B in that it includes a cathode region 82 below the boundary region 90. Other than the differences from the embodiment of FIG. 1B, the semiconductor device 100 may be the same as the embodiment of FIG. 1B.

[0089] In this example, the cathode region 82 is provided on the back surface 23 below the boundary region 90. The boundary between the collector region 22 and the cathode region 82 is located at the boundary between the boundary region 90 and the transistor portion 70 other than the boundary region 90. In this example, the boundary between the collector region 22 and the cathode region 82 is located below the dummy trench portion 30 adjacent to the mesa portion 91, but is not limited to this. The boundary between the collector region 22 and the cathode region 82 may also be located below the mesa portion 91.

[0090] FIG. 4 shows a modified example of the semiconductor device 100. This example shows an example of the a-a' cross section in FIG. 1A. The semiconductor device 100 of this example differs from the embodiment of FIG. 1B in that the lifetime control region 150 is provided on only a part of the semiconductor substrate 10 rather than on the entire surface. Other than the differences from the embodiment of FIG. 1B, the semiconductor device 100 may be the same as the embodiment of FIG. 1B.

[0091] The lifetime control region 150 is provided beyond the boundary region 90 in the arrangement direction, from the diode section 80 to the transistor section 70 in which the emitter region 12 is provided. In this example, the lifetime control region 150 is provided on the entire surface of the diode section 80 and in a part of the transistor section 70. The length L3 is the length in the arrangement direction from the boundary between the collector region 22 and the cathode region 82 to the end of the lifetime control region 150. The length L3 may be the same as the film thickness of the semiconductor substrate 10, or may be greater than the film thickness of the semiconductor substrate 10. By appropriately setting the length L3, it is possible to suppress carrier injection.

[0092] 5 shows a semiconductor device 500 of a comparative example. The semiconductor device 500 includes a boundary region 590. A mesa portion 591 in the boundary region 590 has a contact region 515 exposed on the front surface of the semiconductor substrate 10. In the mesa portion 591 of this example, the contact region 515 is provided over the entire area sandwiched between the base regions 14 on both ends in the Y-axis direction. That is, in the mesa portion 591, the contact regions 515 and the base regions 14 are not provided alternately.

[0093] 6A shows an example of the IV characteristics of the semiconductor device 100 and the semiconductor device 500. There is no significant difference between the IV characteristics of the semiconductor device 100 and the semiconductor device 500.

[0094] 6B shows an example of the reverse recovery characteristics of the semiconductor device 100 and the semiconductor device 500. Comparing the graphs during reverse recovery, it can be seen that the reverse recovery loss is lower in the semiconductor device 100 than in the semiconductor device 500. In this way, the semiconductor device 100 can improve the reverse recovery characteristics without significantly affecting the IV characteristics.

[0095] 7 shows the relationship between the thinning rate [%] and the rate of change [%] of reverse recovery loss Err. As the thinning rate increases, the reverse recovery loss Err decreases. The thinning rate may be 20.0% or more, or 30.0% or more. The thinning rate may be 80.0% or less, 70.0% or less, or 60.0% or less. By appropriately setting the thinning rate, the semiconductor device 100 of this example can reduce the reverse recovery loss Err while suppressing breakdown due to latch-up.

[0096] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the claims that such modifications and improvements can also be included within the technical scope of the present invention.

[0097] It should be noted that the order of execution of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before," "prior to," etc., and that the processes can be performed in any order unless the output of a previous process is used in a subsequent process. Even if the operational flow in the claims, specifications, and drawings is described using "first," "next," etc. for convenience, this does not mean that the processes must be performed in this order. [Explanation of symbols]

[0098] 10 semiconductor substrate, 12 emitter region, 14 base region, 15 contact region, 16 accumulation region, 17 well region, 18 drift region, 19 plug region, 21 front surface, 22 collector region, 23 back surface, 24 collector electrode, 25 connection portion, 30 dummy trench portion, 38 interlayer insulating film, 40 gate trench portion, 41 extension portion, 43 connection portion, 50 Gate metal layer, 52 emitter electrode, 54 contact hole, 55 contact hole, 56 contact hole, 70 transistor portion, 71 mesa portion, 80 diode portion, 81 mesa portion, 82 cathode region, 90 boundary region, 91 mesa portion, 100 semiconductor device, 150 lifetime control region, 500 semiconductor device, 515 contact region, 590 boundary region, 591 mesa portion

Claims

1. A semiconductor device including a transistor portion and a diode portion, a first conductivity type drift region provided in a semiconductor substrate; a second conductivity type base region provided above the drift region; an emitter region of a first conductivity type provided above the base region and having a doping concentration higher than that of the drift region; a contact region of a second conductivity type provided above the base region and having a doping concentration higher than that of the base region; a plurality of trenches provided on the front surface of the semiconductor substrate; Equipped with the transistor portion has a boundary region provided adjacent to the diode portion, a lifetime control region provided beyond the boundary region from the diode portion to the transistor portion in which the emitter region is provided in an arrangement direction of the plurality of trench portions; the boundary region is provided to extend in an extension direction of the plurality of trench portions and has a plug region of a second conductivity type having a doping concentration higher than that of the base region; the contact regions and the base regions are alternately arranged in the extension direction on the front surface in the boundary region; The plug regions are provided above the contact regions and the base regions that are alternately arranged in the extension direction. Semiconductor device.

2. The boundary region is formed by one mesa portion sandwiched between two of the plurality of trench portions. The semiconductor device according to claim 1 .

3. the contact regions and the emitter regions are alternately arranged in the extension direction in the transistor portion other than the boundary region, The contact region in the boundary region is provided so as to correspond in position in the extension direction to the contact region in the transistor portion other than the boundary region. The semiconductor device according to claim 1 .

4. In the boundary region, a thinning rate, which is a ratio of the base region exposed on the front surface, is 30% or more and 80% or less. The semiconductor device according to claim 1 .

5. In the boundary region, the length of the plug region extending in the extension direction is longer than the length of the contact region extending in the extension direction. The semiconductor device according to claim 1 .

6. the diode portion has the plug region, The plug region of the boundary region has the same doping concentration as the plug region of the diode portion. The semiconductor device according to claim 1 .

7. The plurality of trench portions in the boundary region are dummy trench portions. The semiconductor device according to claim 1 .

8. The emitter region closest to the boundary region in the arrangement direction is sandwiched between dummy trench portions. The semiconductor device according to claim 1 .

9. The emitter region is not provided in the boundary region. The semiconductor device according to claim 1 .

10. a collector region of a second conductivity type provided on the back surface of the semiconductor substrate below the boundary region; The semiconductor device according to claim 1 .

11. a cathode region of a first conductivity type provided on the back surface of the semiconductor substrate below the boundary region; The semiconductor device according to claim 1 .

12. The lifetime control region is provided over the entire surface of the semiconductor substrate when viewed from above. The semiconductor device according to claim 1 .

13. the transistor portion is provided above the drift region and has an accumulation region of a first conductivity type having a doping concentration higher than that of the drift region; The accumulation region is provided in both the boundary region and the transistor portion other than the boundary region. The semiconductor device according to claim 1 .

14. The accumulation region is provided in both the transistor section and the diode section. The semiconductor device according to claim 13.

15. The plug region is provided above the contact region. The semiconductor device according to claim 1 .

16. The lifetime control region is formed by implantation from the back side of the semiconductor substrate. The semiconductor device according to claim 1 .

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