Suck Back Valve

The suck-back valve addresses timing coordination issues by employing a common switching valve with a divided air chamber and piston configuration for efficient and controlled liquid retrieval, reducing leakage and dripping in semiconductor manufacturing.

JP7756508B2Active Publication Date: 2025-10-20ASAHI YUKIZAI KOGYO CO LTD
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Patent Information

Application Number
JP2021114766
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-07-12
Publication Date
2025-10-20
Estimated Expiration
2041-07-12

AI Technical Summary

Technical Problem

Existing suck-back valves in semiconductor manufacturing equipment face challenges in coordinating the timing of on-off valve closure and liquid suck-back, leading to liquid leakage and dripping due to delayed or incomplete suck-back operations.

Method used

A suck-back valve design that utilizes a common switching valve to control both the on-off valve and suck-back mechanism, featuring a suck-back mechanism with a divided air chamber and a piston configuration that allows for quick initiation of suck-back operations by balancing forces without physical contact restrictions, reducing static friction, and using a variable throttle valve for gradual fluid discharge.

Benefits of technology

Enables early initiation and gradual completion of suck-back operations, minimizing liquid leakage and dripping by ensuring timely and controlled liquid retrieval after flow cessation.

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Abstract

To smoothly perform a suck-back operation while speedily performing a sucking-back operation after a fluid passage is closed in a suck-back valve which switches supply and discharge of driving fluid for opening / closing of the fluid passage and the sucking-back operation with a common switching valve.SOLUTION: A suck-back valve 11 comprises a valve body 13 in which a sucking-back chamber 25 is formed, and a sucking-back mechanism unit 17. The sucking-back mechanism unit includes: a sucking-back piston 61 which is stored in a sucking-back cylinder chamber 59 and slidable between two dead point positions; and an energizing member 63 which energizes the sucking-back piston in a direction to increase a capacity of the sucking-back chamber. The sucking-back cylinder chamber 59 is divided into a first air chamber 59a and a second air chamber 59b by the sucking-back piston. The energizing member is disposed in the first air chamber and a standby position where the sucking-back piston is located when a pressure of driving fluid in the second air chamber becomes maximum is set away from the dead point position closer to the sucking-back chamber.SELECTED DRAWING: Figure 1
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