Photoelectric conversion device, photoelectric conversion system, mobile object, equipment

Abstract

To solve the problem that an exposure period control range is subject to constraints.SOLUTION: Provided is a photoelectric conversion device comprising: a pixel unit in which are arranged over a plurality of rows a plurality of pixels, each of which includes a quench element, to the control node of which a signal regulating the start and end of an exposure period is inputted, and an avalanche photodiode which is connected to the quench element; a scan unit for scanning the pixel unit by executing on the plurality of rows, in sequence of rows, a readout process for reading out the pixel signals, an exposure period start process, and an exposure period end process, in units of one row or two or more rows; and a control unit that outputs a synchronization signal for controlling the timing of the readout process to the scan unit, with the timing of the start process and / or the end process being controlled by a control signal which is separate from the synchronization signal.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to a photoelectric conversion device, a photoelectric conversion system, a mobile object, and equipment. [Background technology]

[0002] A photoelectric conversion device including a pixel array in which multiple pixels, each including an avalanche photodiode (APD), are arranged is known. Avalanche multiplication occurs in the PN junction region of the APD due to the charge generated by incident light.

[0003] Patent Document 1 discloses a device including an APD, a quench circuit connected to the APD, a quench circuit having a gate to which a pulse signal is input, and a pulse generating circuit that generates the pulse signal. The pulse generating circuit controls the on / off of the quench circuit. The exposure period of the APD is controlled by this pulse signal. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-123847 Summary of the Invention [Problem to be solved by the invention]

[0005] In the technique described in Patent Document 1, no consideration is given to control of the exposure period.

[0006] One possible method for controlling the exposure period is to set it in synchronization with the vertical synchronization signal that controls pixel scanning or the horizontal synchronization signal that controls the readout process for each pixel row. In this method, the adjustment range of the exposure period is determined by the timing of the vertical synchronization signal or the horizontal synchronization signal. Therefore, there is an issue that the control range of the exposure period is limited. [Means for solving the problem]

[0007] One aspect of the present invention is a pixel section in which a plurality of pixels are arranged across a plurality of rows, each pixel having a quench element to whose gate a pulse signal that defines the start and end of an exposure period is input, and an avalanche photodiode connected to the quench element; a scanning section that scans the pixel section by performing a readout process that reads out signals from the pixels, a start process for the exposure period, and an end process for the exposure period row by row, with one or more rows as a unit; and a control section that outputs a synchronization signal to the scanning section that controls the timing of the readout process, wherein the timing of at least one of the start process and the end process is controlled by a control signal separate from the synchronization signal. The scanning unit has a plurality of row driving units arranged to respectively correspond to the rows of the pixels, each controlling the pixels of the corresponding row, and each of the plurality of row driving units has a pulse counting unit that counts pulse signals to generate a count value, and an end control unit that generates the control signal that controls the end processing in accordance with the count value. The photoelectric conversion device is characterized by the above. [Effects of the Invention]

[0008] According to the present disclosure, it is possible to reduce restrictions on the control range of exposure time, and to set the exposure time more appropriately. [Brief explanation of the drawings]

[0009] [Figure 1] Photoelectric conversion device configuration diagram [Figure 2] Pixel configuration diagram [Figure 3] Control unit configuration diagram [Figure 4] Vertical scanning control unit configuration diagram [Figure 5] Vertical scanning unit configuration diagram [Figure 6] Pixel drive timing diagram [Figure 7] Vertical scanning control unit configuration diagram [Figure 8] Vertical scanning unit configuration diagram [Figure 9] Pixel drive timing diagram [Figure 10] Vertical scanning control unit configuration diagram [Figure 11] Vertical scanning unit configuration diagram [Figure 12] Pixel drive timing diagram [Figure 13]Control unit configuration diagram [Figure 14] Vertical scanning control unit configuration diagram [Figure 15] Vertical scanning unit configuration diagram [Figure 16] Pixel drive timing diagram [Figure 17] Control unit configuration diagram [Figure 18] Vertical scanning control unit configuration diagram [Figure 19] Vertical scanning unit configuration diagram [Figure 20] Pixel drive timing diagram [Figure 21] Vertical scanning control unit configuration diagram [Figure 22] Vertical scanning unit configuration diagram [Figure 23] Pixel drive timing diagram [Figure 24] Vertical scanning control unit configuration diagram [Figure 25] Vertical scanning unit configuration diagram [Figure 26] Pixel drive timing diagram [Figure 27] Diagram showing the configuration of a photoelectric conversion system [Figure 28] Diagram showing the structure and operation of a moving object [Figure 29] Equipment configuration diagram DETAILED DESCRIPTION OF THE INVENTION

[0010] Each embodiment will be described below with reference to the drawings.

[0011] In the following embodiments, an image pickup device will be mainly described as an example of a photoelectric conversion device. However, the embodiments are not limited to image pickup devices and can be applied to other examples of photoelectric conversion devices. For example, a distance measurement device (a device that measures distance using focus detection or TOF (Time Of Flight)) or a photometry device (a device that measures the amount of incident light) can be used.

[0012] The conductivity types of the transistors described in the following embodiments are merely examples and are not limited to those described in the examples. The conductivity types described in the embodiments can be changed as appropriate, and the potentials of the gate, source, and drain of the transistors can be changed as appropriate.

[0013] For example, if a transistor is operated as a switch, the low and high levels of the potential supplied to the gate can be reversed relative to the description in the embodiments in accordance with a change in the conductivity type. Furthermore, the conductivity types of the semiconductor regions described in the following examples are merely examples and are not limited to the conductivity types described in the embodiments. The conductivity types described in the embodiments can be changed as appropriate, and the potential of the semiconductor region can be changed accordingly. For example, in the following embodiments, an example is described in which the quench element 12 connected to the avalanche diode is a PMOS transistor, but it may also be changed to an NMOS transistor. In this case, the high and low levels of the signal supplied to the gate can be changed.

[0014] First Embodiment [Overall Description of Photoelectric Conversion Device 100] 1 is a block diagram showing a schematic configuration of a photoelectric conversion device according to this embodiment. As shown in FIG. 1, the photoelectric conversion device 100 according to this embodiment includes a pixel section 10, a control section 20, a vertical scanning section 30 (scanning section), a signal processing section 40, a horizontal scanning section 50 (second scanning section), and an output section 60.

[0015] The pixel section 10 has a plurality of pixels P arranged across a plurality of rows and a plurality of columns. In Fig. 1, the pixels P arranged in N rows from the first row to the Nth row and M columns from the first column to the Mth column are shown with reference symbols indicating the row number and the column number. For example, the pixel P arranged in the first row and first column is given the reference symbol P(1,1).

[0016] It should be noted that the pixels P do not necessarily have to be arranged in multiple columns in the pixel section 10. For example, the pixels P may be arranged in one column and multiple rows.

[0017] A control line group 150 is arranged in each row of the pixel array of the pixel unit 10, extending in a first direction (the horizontal direction in FIG. 1). The control line group 150 is connected to each pixel P aligned in the first direction and is commonly connected to the pixels P in multiple columns arranged in one row. The control line group 150 includes multiple control lines for controlling the pixels P in one row. Each of these multiple control lines transmits a signal pCLK, a signal pRES, and a signal pVSEL (described later) from the vertical scanning unit 30 to the pixels P in the corresponding row. The vertical scanning unit 30 selects the pixels P in each row of the pixel unit 10 one row at a time or in units of two or more rows in a row-sequential manner. In this way, row scanning (vertical scanning) of the pixel unit 10 is performed by the vertical scanning unit 30. Note that the term "unit" here refers to one or two or more pixel rows whose periods of selection by the vertical scanning unit 30 overlap as one group.

[0018] The first direction in which the control line group 150 extends may be referred to as the row direction or the horizontal direction. Note that in Fig. 1, the control line group 150 is shown with a reference numeral indicating the row number. For example, the control line group in the first row is given the reference numeral 150[1].

[0019] The control line group 150 of each row is connected to the vertical scanning section 30. The vertical scanning section 30 supplies control signals for driving the pixels P to the pixels P via the control lines.

[0020] An output line 152 is arranged in each column of the pixel array of the pixel unit 10, extending in a second direction (the vertical direction in FIG. 1) intersecting the first direction. The output line 152 is connected to each of the pixels P aligned in the second direction, and serves as a signal line common to these pixels P.

[0021] The second direction in which the output lines 152 extend may be referred to as the column direction or the vertical direction. Note that in FIG. 1, the output lines 152 are indicated with a symbol indicating the column number. For example, the output line for the first column is designated by the symbol pOUT[1]. Each output line 152 outputs a digital pixel signal from a pixel P in a row selected by the vertical scanning unit 30. Typically, the pixel signal is a multi-bit digital signal. The output line 152 may be configured as a bus including multiple signal lines transmitting corresponding 1-bit signals among the multi-bit digital signals. This allows for parallel transmission of each bit of the digital signal. Alternatively, multiple buses may be provided for one column of pixels P. Some of the multiple buses are connected to pixels P in some rows of multiple rows, and other buses are connected to pixels P in other rows. This allows for parallel readout of digital signals from pixels P in multiple rows. It should be noted that the present disclosure is not limited to this configuration, and it is also possible to provide only one output line 152 corresponding to one column of pixels P, and transmit a multi-bit digital signal serially.

[0022] The output line 152 is connected to the signal processing unit 40. The signal processing unit 40 is provided corresponding to each column of the pixel unit 10, and is connected to the output line 152 of the corresponding column. The signal processing unit 40 includes a holding unit that holds pixel signals output from the pixels P via the output line 152 of the corresponding column.

[0023] The horizontal scanning unit 50 is a circuit unit that supplies the signal processing unit 40 with a control signal for reading out a signal from the signal processing unit 40. The horizontal scanning unit 50 supplies a control signal to the signal processing unit 40 of each column via a control line 154. Upon receiving the control signal from the horizontal scanning unit 50, the signal processing unit 40 outputs the signal held in the holding unit to the output unit 60. The horizontal scanning unit 50 selects one or more columns of the signal processing units 40 at a time to perform column scanning (horizontal scanning). A horizontal synchronization signal HD is input to the horizontal scanning unit 50 from the control unit 20. When the level of the horizontal synchronization signal HD changes, the horizontal scanning unit 50 starts horizontal scanning (second scanning) of the signal processing units 40 of each column. Typically, when the horizontal synchronization signal HD transitions from low level to high level, the horizontal scanning unit 50 starts horizontal scanning of the signal processing units 40 of each column. The horizontal synchronization signal HD is a signal that controls the cycle at which horizontal scanning is performed.

[0024] 1, the control lines 154 are indicated with a reference numeral indicating the column number, for example, the control line for the first column is given the reference numeral 154[1].

[0025] The output unit 60 is a circuit unit for outputting the signal output from the signal processing unit 40 to the outside of the photoelectric conversion device 100. Note that the output unit 60 may perform various processes, such as noise reduction and correction, on the signal before outputting it to the outside of the photoelectric conversion device 100.

[0026] The control unit 20 is a circuit unit for supplying control signals that control the operations and timing of the vertical scanning unit 30, the signal processing unit 40, the horizontal scanning unit 50, and the output unit 60.

[0027] The CPU 70 is a circuit unit for controlling the photoelectric conversion device via the control unit 20 by executing a program.

[0028] At least some of the control signals that control the operations and timings of the control unit 20, vertical scanning unit 30, signal processing unit 40, horizontal scanning unit 50, output unit 60, and CPU 70 may be supplied from outside the photoelectric conversion device 100.

[0029] [Pixel P(m,n)] FIG. 2 is a diagram showing the configuration of a pixel P(m,n) of the photoelectric conversion device of this embodiment.

[0030] The pixel P(m,n) includes an APD 11, a quenching element 12, a waveform shaping unit 13, a counter 14, and a pixel output circuit 15.

[0031] The APD 11 generates charge pairs through photoelectric conversion in response to incident light (in response to incident photons). A voltage VL (first voltage) is supplied to the anode of the APD 11. A voltage VH (second voltage) higher than the voltage VL supplied to the anode is supplied to the cathode of the APD 11. A reverse bias voltage is supplied to the anode and cathode so that the APD 11 performs avalanche multiplication. With this voltage supplied, the charge (seed charge) generated by the incident light undergoes avalanche multiplication, generating an avalanche current.

[0032] When a reverse bias voltage is supplied, there are two modes: Geiger mode, in which the anode and cathode are operated at a potential difference greater than the breakdown voltage, and linear mode, in which the anode and cathode are operated at a potential difference close to or less than the breakdown voltage.

[0033] An APD operated in Geiger mode is called a SPAD (single photon avalanche diode). For example, the voltage VL (first voltage) is −30 V, and the voltage VH (second voltage) is 3 V. The APD 11 may be operated in either linear mode or Geiger mode.

[0034] The quench element 12 is connected to a power supply line that supplies a voltage VH and the APD 11. The quench element 12 functions as a load circuit (quench circuit) when signals are multiplied by avalanche multiplication.

[0035] The quench element 12 can be configured with a transistor. For example, the quench element 12 can be configured with a MOS transistor, and Fig. 2 shows the case where the quench element 12 is a PMOS transistor.

[0036] The quench element 12 receives a signal pCLK at its gate, which is a control node. When the signal pCLK is inactive, the quench element 12 is in a non-conductive state (off state). On the other hand, when the signal pCLK is active, the quench element 12 is in a conductive state (on state). When the quench element 12 is in a non-conductive state, it suppresses the voltage supplied to the APD 11 and suppresses avalanche multiplication (quench operation). When the quench element 12 is in a conductive state, it returns the voltage supplied to the APD 11 to voltage VH by flowing a current equivalent to the voltage drop caused by the quench operation (recharge operation). Note that the off state of the quench element 12 does not necessarily mean that the electrical path between the power supply line supplying voltage VH and the APD 11 is completely non-conductive (cut off); it is sufficient that the resistance be controlled to a value required for quench operation. Therefore, the OFF state of the quench element 12 should be a state in which the resistance value of the electrical path between the power supply line and the APD 11 is larger than that in the ON state of the quench element 12.

[0037] A signal pCLK[n] is supplied to the gate of the quench element 12 via a control line (not shown in FIG. 1) to switch between a conductive state and a non-conductive state of the quench element 12. This signal pCLK is a pulse signal input to the gate of the quench element 12 as a control signal that defines the start and end of the exposure period of the pixel P.

[0038] The waveform shaping unit 13 shapes the potential change at the cathode of the APD 11 obtained upon photon detection and outputs a pulse signal. For example, an inverter circuit is used as the waveform shaping unit 13. While FIG. 2 shows an example in which one inverter is used as the waveform shaping unit 13, a circuit in which multiple inverters are connected in series may also be used. Alternatively, other circuits that have a waveform shaping effect may also be used as the waveform shaping unit 13.

[0039] The counter 14 counts the number of pulse signals output from the waveform shaping unit 13 and holds the count value. In addition, a signal pRES[n] is supplied from the vertical scanning unit 30 via a control line (not shown in FIG. 1). When this signal pRES[n] is active, the count value held in the counter 14 is reset to an initial value. This initial value is typically a value where all bits are 0, but it may also be reset to another initial value.

[0040] A signal pVSEL[n] is supplied to the pixel output circuit 15 from the vertical scanning unit 30 via a control line. This signal pVSEL[n] switches between electrical connection and disconnection between the counter 14 and the signal line pOUT[m]. The pixel output circuit 15 includes, for example, a buffer circuit for outputting a signal.

[0041] Furthermore, a switch such as a transistor may be further provided between the APD 11 and the quenching element 12 to switch between electrical connection and disconnection. Similarly, a switch such as a transistor that switches between supplying and not supplying the voltage VH supplied to the quenching element 12 may be further provided in the configuration of FIG. 2. This switch may be provided for each pixel or for each pixel row. Alternatively, one switch may be shared by all pixels. Similarly, a switch such as a transistor that switches between supplying and not supplying the voltage VL supplied to the APD 11 may be further provided in the configuration of FIG. 2. This switch may be provided for each pixel or for each pixel row. Alternatively, one switch may be shared by all pixels.

[0042] In this embodiment, a configuration using the counter 14 has been described. However, instead of the counter 14, the photoelectric conversion device 100 may be configured to acquire pulse detection timing using a time-to-digital converter (hereinafter referred to as TDC) and a memory. In this case, the generation timing of the pulse signal output from the waveform shaping unit 13 is converted into a digital signal by the TDC. To measure the timing of the pulse signal, the TDC is supplied with a signal pREF[n] from the vertical scanning unit 30 in FIG. 1 via a control line (not shown in FIG. 1). The TDC acquires, as a digital signal, a signal obtained by converting the input timing of the signal output from each pixel via the waveform shaping unit 13 into a relative time based on the signal pREF[n].

[0043] [Control unit 20] 3 is a configuration diagram of the control unit 20. A control signal is input to the control unit 20 from a CPU 70 provided outside the control unit 20. The control unit 20 includes a synchronization signal generation unit 21, a vertical scanning control unit 22, a signal processing control unit 23, and a horizontal scanning control unit 24.

[0044] The synchronization signal generation unit 21 generates a vertical synchronization signal VD, a horizontal synchronization signal HD, and a clock MCLK (clock signal) under the control of the CPU 70. The vertical synchronization signal VD is a signal that controls the period of one frame. Typically, the start of vertical scanning by the vertical scanning unit 30 is controlled based on the vertical synchronization signal VD. The horizontal synchronization signal HD is a signal that switches the selection of pixel rows in vertical scanning and horizontal scanning. The horizontal synchronization signal HD is a signal that controls a readout process that reads out signals from pixels P in each row. The vertical synchronization signal VD is also a signal that controls a readout process that reads out signals from the entire pixel unit.

[0045] The vertical scanning control unit 22 generates a signal for controlling the drive timing of the vertical scanning unit 30 and outputs the signal to the vertical scanning unit 30 .

[0046] The signal processing control unit 23 generates a signal for controlling the drive timing of the signal processing unit 40 and outputs the signal to the signal processing unit 40 .

[0047] The horizontal scanning control unit 24 generates a signal for controlling the drive timing of the horizontal scanning unit 50 and outputs it to the horizontal scanning unit 50 .

[0048] [Vertical scanning control unit 22] 4 is a configuration diagram of the vertical scanning control unit 22. The vertical scanning control unit 22 includes a pulse signal generation unit 221, a horizontal synchronization signal count unit 222, a pulse count unit 223, a read signal generation unit 224, a reset signal generation unit 225, a start trigger generation unit 226, and an end trigger generation unit 227.

[0049] The pulse signal generating unit 221 has a frequency dividing circuit (not shown) that divides the frequency of the clock MCLK to generate a signal P_CLK. By using the clock MCLK as the original signal, it becomes possible to control the period of the signal P_CLK in units of one cycle of the clock MCLK. The signal P_CLK is input to the vertical scanning unit 30 and then input to the pixel unit 10 as a control signal pCLK.

[0050] The horizontal synchronizing signal counting unit 222 receives the vertical synchronizing signal VD and the horizontal synchronizing signal HD, counts the number of horizontal synchronizing signals HD in one cycle of the vertical synchronizing signal VD, and outputs a count value cnt_HD.

[0051] The pulse counting unit 223 receives the vertical synchronization signal VD and the signal P_CLK, counts the signal P_CLK for one period of the vertical synchronization signal VD, and outputs a count value cnt_P_CLK.

[0052] The read signal generating unit 224 receives the count value cnt_HD and generates a signal P_VSEL according to the count value cnt_HD.

[0053] The reset signal generating unit 225 receives the count value cnt_HD and generates a signal P_RES according to the count value cnt_HD.

[0054] The start trigger generation unit 226 receives the count value cnt_P_CLK and generates a signal P_EXP_STR according to the count value cnt_P_CLK. The signal P_EXP_STR is a first control signal that controls the exposure start timing of the pixel P.

[0055] The end trigger generation unit 227 receives the count value cnt_P_CLK and generates a signal P_EXP_STOP according to the count value cnt_P_CLK. The signal P_EXP_STOP is a second control signal that controls the exposure end timing of the pixel P.

[0056] [Vertical scanning unit 30] 5 is a configuration diagram of the vertical scanning unit 30. The vertical scanning unit 30 includes a first decoder unit 31, a second decoder unit 32, a third decoder unit 33, a fourth decoder unit 34, and N row driver units 35 arranged for each row of pixels in the pixel unit 10. Each row driver unit 35 is configured to drive one row of pixels in the pixel unit 10, but may also be configured to drive multiple rows.

[0057] The first decoder section 31 decodes the signal P_VSEL generated by the vertical scanning control section 22 to generate read row selection signals vp_vsel(1) to (N), and outputs them to the row driving sections .

[0058] Similarly, the second decoder section 32 decodes the signal P_RES generated by the vertical scanning control section 22 to generate reset row selection signals vp_res(1) to (N), and outputs them to the row driving sections .

[0059] Similarly, the third decoder section 33 decodes the signal P_EXP_STR generated by the vertical scanning control section 22 to generate exposure start row selection signals vp_exp_str(1) to (N), and outputs them to the row driving sections .

[0060] Similarly, the fourth decoder unit 34 decodes the signal P_EXP_STOP generated by the vertical scanning control unit 22 to generate exposure end row selection signals vp_exp_stop(1) to (N) and outputs them to the row driving units 35, respectively.

[0061] The row driver 35 includes a readout controller 351 , an exposure start controller 352 , an exposure end controller 353 , and a pixel drive signal generator 354 .

[0062] In the following description, the configuration of the row driver 35 for the first row will be mainly described, but the row driver 35 for the other rows will also have the same configuration.

[0063] The readout row selection signal vp_vsel(1) output from the first decoder unit 31 and the reset row selection signal vp_res(1) output from the second decoder unit 32 are input to the readout control unit 351. The readout control unit 351 is controlled by a readout control signal and stores the levels of the readout row selection signal vp_vsel(1) and the reset row selection signal vp_res(1). The output signal of the readout control unit 351 is a signal for resetting the counter 14 of the pixel P in the corresponding row and connecting it to the signal line pOUT.

[0064] The exposure start row selection signal vp_exp_str(1) output from the third decoder unit 33 is input to the exposure start control unit 352. The exposure start control unit 352 stores the level of the exposure start row selection signal vp_exp_str(1). The output signal of the exposure start control unit 352 is a signal (start signal) for starting exposure of the pixels P in the corresponding row.

[0065] The exposure end row selection signal vp_exp_stop(1) output from the fourth decoder unit 34 is input to the exposure end control unit 353. The exposure end control unit 353 is controlled by the exposure end control signal and stores the level of the exposure end row selection signal vp_exp_stop(1). The output signal of the exposure end control unit 353 is a signal (end signal) for ending the exposure of the pixels P in the corresponding row.

[0066] The pixel drive signal generation unit 354 receives the readout row selection signal vp_vsel(1) and reset row selection signal vp_res(1) stored in the readout control unit 351, the exposure start row selection signal vp_exp_str(1) stored in the exposure start control unit 352, and the exposure end row selection signal vp_exp_stop(1) stored in the exposure end control unit 353. These signals are used to perform readout, reset processing, exposure start processing, and exposure end processing for the corresponding pixel rows. The timing of these processing operations is controlled by signals input to the pixel drive signal generation unit 354. The pixel drive signal generation unit 354 outputs each pixel drive signal required for these processes to the corresponding pixel rows. The pixel drive signals output from the pixel drive signal generation unit 354 are the signal pCLK[1], the signal pVSEL[1], and the signal pRES[1]. Here, one pixel drive signal generation section 354 is configured to drive one row of the pixel section 10, but may be configured to drive two or more rows.

[0067] [Pixel drive signal operation] The operation of the photoelectric conversion device according to the first embodiment shown in FIG. 1 will be described.

[0068] 6 is a timing chart showing an example of the operation of the vertical scanning control section 22, the vertical scanning section 30, and the pixel section 10. The operation will be described below with reference to FIG.

[0069] <<Input of vertical scanning control unit 22>> First, the CPU 70 executes a program, and a signal for controlling the photoelectric conversion device 100 is supplied to the control unit 20.

[0070] In response to this, a synchronization signal generation unit 21 in the control unit 20 generates a vertical synchronization signal VD, a horizontal synchronization signal HD, and a clock MCLK. These signals are supplied to a vertical scanning control unit 22, a signal processing control unit 23, and a horizontal scanning control unit 24.

[0071] 《cnt_HD》 At time t100, when the vertical synchronization signal VD transitions to a high level, the counter value cnt_HD is initialized to a value of 0 based on this.

[0072] At time t102, when the horizontal synchronization signal HD transitions to a high level, the counter value cnt_HD counts up based on this and transitions to a value of 1. The counter value cnt_HD counts up every time the horizontal synchronization signal HD transitions to a high level.

[0073] 《cnt_P_CLK》 At time t100, when the vertical synchronization signal VD transitions to high level, the pulse counting unit 223 starts counting the signal P_CLK.

[0074] At time t101, when the signal P_CLK transitions to high level, the counter value cnt_P_CLK is initialized to the value zero.

[0075] At time t103, when the signal P_CLK transitions to high level, the counter value cnt_P_CLK counts up based on this and transitions to the value 1. The counter value cnt_P_CLK counts up every time the signal P_CLK transitions to high level.

[0076] <<Reset process>> At time t102, based on cnt_HD=1, the signal P_RES transitions to a value of 0. The value 0 is a predetermined setting value, and may be configured to be controllable by a register or the like. Furthermore, the timing at which the signal P_RES transitions to a value of 0 does not necessarily have to be when the counter value cnt_HD is 1, and may be configured to be controllable by a register or the like.

[0077] At time t104, when the horizontal synchronization signal HD transitions to a high level, the signal P_RES transitions (counts up) to a value of 1 based on this. The width of the transition does not necessarily have to be +1, and the transition may also be to a specific value. The settings of these transitions may be configured to be controllable using setting information held in a register. Thereafter, the signal P_RES counts up (+1) every time the horizontal synchronization signal HD transitions to a high level.

[0078] Furthermore, at time t102, when the value of the signal P_RES transitions to 0, the signal pRES[1] transitions to high level, and the first row of the pixel unit 10 becomes the target row for the reset process. The signal pRES[1] controls the counter 14 of the pixel P, and if it is high level, resets the count value held in the counter 14.

[0079] At time t104, when the value of the signal P_RES transitions to the value 1, the first row of the pixel unit 10 is no longer the target row for the reset process, and the signal pRES[1] transitions to low level.

[0080] <<Exposure start processing and exposure end processing>> At time t101, signal hd_exp transitions to high level based on cnt_P_CLK=0. The value 0 is a predetermined setting value, and may be configured to be controllable by a register or the like. Thereafter, signal hd_exp transitions to high level every time cnt_P_CLK counts up by one. Note that the timing at which signal hd_exp transitions to high level may also be every time cnt_P_CLK counts up by two or three times, or when cnt_P_CLK is a specific value, and these may be configured to be controllable by a register or the like.

[0081] At time t105, based on cnt_P_CLK=3, the signal P_EXP_STR transitions to a value of 0. The value 0 is a predetermined setting value, and may be configured to be controllable by a register or the like. Furthermore, the timing at which the signal P_EXP_STR transitions to a value of 0 does not necessarily have to be when the counter value cnt_P_CLK is 3, and may be configured to be controllable by a register or the like.

[0082] At time t106, when the signal hd_exp transitions to a high level, the signal P_EXP_STR transitions to a value of 1 based on this. The width of the transition does not necessarily have to be +1, and the transition may also be to a specific value. The settings of these transitions may be configured to be controllable using setting information held in a register. Thereafter, the signal P_EXP_STR is counted up (+1) every time the signal hd_exp transitions to a high level.

[0083] Also, at time t105, when the value of the signal P_EXP_STR transitions to 0, the first row of the pixel unit 10 becomes the target row for exposure start processing. As a result, the vertical scanning unit 30 starts supplying the signal pCLK[1]. The signal pCLK[1] is generated using the signal P_CLK. The signal pCLK[1] controls the quench element 12 of the pixel P in the first row of the pixel unit 10, and controls the voltage supplied to the APD 11. Because the quench element 12 is a PMOS transistor, it is in an off state when the signal pCLK is at a high level and in an on state when the signal pCLK is at a low level.

[0084] At time t107, based on cnt_P_CLK=7, the signal P_EXP_STOP transitions to a value of 0. The value 0 is a predetermined setting value, and may be configured to be controllable by a register or the like. Furthermore, the timing at which the signal P_EXP_STOP transitions to a value of 0 does not necessarily have to be when the counter value cnt_P_CLK is 7, and may be configured to be controllable by a register or the like.

[0085] At time t108, when the signal hd_exp transitions to a high level, the signal P_EXP_STOP transitions to a value of 1 based on this. The width of the transition does not necessarily have to be +1, and the transition may also be to a specific value, which may be controlled by a register or the like. After that, the signal P_EXP_STOP is counted up (+1) every time the signal hd_exp transitions to a high level.

[0086] Furthermore, at time t107, when the value of the signal P_EXP_STOP transitions to the value 0, the first row of the pixel unit 10 becomes the target row for the exposure termination process, and the supply of the signal pCLK[1] is terminated.

[0087] The period from time t105 to time t107 is the exposure time for the first row of the pixel unit 10. By controlling the timing at which the signal P_EXP_STR transitions to value 0 and the timing at which the signal P_EXP_STOP transitions to value 0 using the counter value cnt_P_CLK, it is possible to control the exposure time in units of one cycle of the signal P_CLK.

[0088] <<Reading process>> At time t109, the signal P_VSEL transitions to a value of 0 based on cnt_HD=0. The value 0 is a predetermined setting value and may be configured to be controllable by a register or the like. The timing at which the signal P_VSEL transitions to a value of 0 does not necessarily have to occur when the counter value cnt_HD is 0. For example, the timing at which the signal P_VSEL transitions may be adjusted based on setting information stored in a register so that it coincides with the timing at which the counter value cnt_HD is a predetermined value.

[0089] At time t110, when the horizontal synchronization signal HD transitions to high level, the signal P_VSEL transitions to a value of 1 based on this. The width of the transition does not necessarily have to be +1, and the transition may also be to a specific value, which may be controlled by a register or the like. Thereafter, the signal P_VSEL is counted up (+1) each time the horizontal synchronization signal HD transitions to high level.

[0090] Furthermore, at time t109, when the value of the signal P_VSEL transitions to 0, the signal pVSEL[1] transitions to high level, and the first row of the pixel unit 10 becomes the target row for readout processing. The signal pVSEL[1] controls the pixel output circuit 15 of the pixel P, and when it is high level, the counter 14 and the signal line pOUT are connected, and the count value is read out.

[0091] At time t110, when the value of the signal P_VSEL transitions to the value 1, the first row of the pixel unit 10 is no longer the target row for the readout process, and the signal pVSEL[1] transitions to low level.

[0092] <<Transition of target rows for each process>> At time t104, when the value of the signal P_RES transitions to the value 1, the second row of the pixel section 10 becomes the target row for the reset process.

[0093] At time t106, when the value of the signal P_EXP_STR transitions to the value 1, the second row of the pixel section 10 becomes the target row for exposure start processing.

[0094] At time t108, when the value of the signal P_EXP_STOP transitions to the value 1, the second row of the pixel section 10 becomes the target row for the exposure end process.

[0095] At time t110, when the value of the signal P_VSEL transitions to value 1, the second row of the pixel section 10 becomes the target row for the readout process.

[0096] The operation of the second row of the pixel section 10 is the same as the operation of the first row of the pixel section 10.

[0097] In this embodiment, a counter value cnt_P_CLK is generated to count the signal P_CLK, and a signal P_EXP_STR is generated to control the start of exposure in accordance with the counter value cnt_P_CLK, and a signal P_EXP_STOP is generated to control the end of exposure in accordance with the counter value cnt_P_CLK.

[0098] This allows the period of signal P_CLK to be controlled in units of one cycle of MCLK, and signals P_EXP_STR and P_EXP_STOP to be controlled in units of one cycle of signal P_CLK, thereby controlling the period and number of times of signal pCLK supplied to pixels using these signals. Meanwhile, the exposure time of pixel P can be controlled more precisely than when the start and end of the exposure time are set in synchronization with the horizontal synchronization signal HD. In this embodiment, both the start and end of the exposure period are set asynchronously with the horizontal synchronization signal HD. However, this is not limiting, and at least one of the start and end of the exposure time may be set asynchronously with the horizontal synchronization signal HD. This allows for precise control of at least one of the start and end of the exposure period without being restricted by the timing of the horizontal synchronization signal HD.

[0099] In this embodiment, both the exposure start process and the end process are set aside from synchronization with the horizontal synchronization signal VD. However, this is not limiting, and it is sufficient if the timing of at least one of the exposure start process and the end process is set aside from synchronization with the vertical synchronization signal VD. This allows for precise control of the timing of at least one of the exposure period start process and the end process without being limited by the timing of the vertical synchronization signal VD.

[0100] Second Embodiment Next, a photoelectric conversion device according to a second embodiment of the present disclosure will be described with reference to Figures 7, 8, and 9, focusing on differences from the first embodiment. This embodiment differs from the first embodiment in the configuration of the vertical scanning control unit 22 and the configuration of the row driving unit 35. Specifically, in the first embodiment, the vertical scanning control unit 22 includes a pulse count unit 223 and an end trigger generation unit 227. In this embodiment, the signal used by the start trigger generation unit 226 to generate the signal P_EXP_STR differs from that in the first embodiment. In addition, this embodiment differs from the first embodiment in that the signal that controls the end of exposure is generated by a circuit separate from the end trigger generation unit 227.

[0101] [Vertical scanning control unit 22] 7 is a configuration diagram of a vertical scanning control unit 22 according to the second embodiment. In this embodiment, the vertical scanning control unit 22 does not include a pulse count unit 223 and an end trigger generation unit 227, unlike the first embodiment.

[0102] [Vertical scanning unit 30] 8 is a configuration diagram of a vertical scanning unit 30 according to the second embodiment. In this embodiment, the vertical scanning unit 30 does not include a fourth decoder unit 34. On the other hand, in this embodiment, the row driving unit 35 in the vertical scanning unit 30 includes a pulse counting unit 355.

[0103] [Pixel drive signal operation] 9 is a timing chart showing an example of the operation of the vertical scanning section 30 and the pixel section 10 according to the second embodiment. Hereinafter, the operation will be described with reference to FIG.

[0104] 《cnt_P_CLK》 At time t100, when the value of the signal P_EXP_STR transitions to the value 0, the pulse counting unit 355 starts counting the signal P_CLK.

[0105] At time t101, when the signal P_CLK transitions to high level, the counter value cnt_P_CLK is initialized to the value zero.

[0106] At time t102, when the signal P_CLK transitions to high level, the counter value cnt_P_CLK counts up based on this and transitions to the value 1. The counter value cnt_P_CLK counts up every time the signal P_CLK transitions to high level.

[0107] <<Exposure start processing and exposure end processing>> At time t100, when the value of the signal P_EXP_STR transitions to the value 0, the first row of the pixel unit 10 becomes the target row for the exposure start process, and the supply of the signal pCLK[1] begins. The signal pCLK[1] is generated using the signal P_CLK.

[0108] At time t104, the signal p_exp_stop[1] transitions to high level based on cnt_P_CLK[1] = 4. Note that the timing at which the signal p_exp_stop[1] transitions to high level does not necessarily have to be when the counter value cnt_P_CLK[1] is 4. For example, it may be configured to be controlled using setting information held in a register.

[0109] At time t104, when the signal p_exp_stop[1] transitions to high level, the first row of the pixel unit 10 becomes the target row for the exposure termination process, and the supply of the signal pCLK[1] is terminated. In other words, the pulse count unit 355 included in the row driver 35 controls the exposure period termination process. A row driver 35 is typically provided corresponding to each row of pixels P. Furthermore, in the row driver 35 for each row, the count value of the pulse count unit 355 corresponding to the timing at which the signal p_exp_stop goes high can be arbitrarily set. Therefore, the timing of the exposure termination process can be arbitrarily set for each pixel row of the pixel unit 10.

[0110] The period from time t101 to time t104 is the exposure time for the first row of the pixel unit 10. During the exposure time, the signal pCLK[1] controls the quenching elements 12 of the pixels P in the first row of the pixel unit 10, and controls the voltage supplied to the APDs 11.

[0111] <<Transition of target rows for exposure start processing and exposure end processing>> At time t103, when the value of the signal P_EXP_STR transitions to the value 1, the second row of the pixel section 10 becomes the target row for exposure start processing.

[0112] At time t105, when the counter value cnt_P_CLK[2] transitions to the value 4, the signal p_exp_stop[2] transitions to high level based on this, and the second row of the pixel section 10 becomes the target row for exposure end processing.

[0113] The operation of the second row of the pixel section 10 is the same as the operation of the first row of the pixel section 10, and therefore a description thereof will be omitted.

[0114] According to this embodiment, the exposure termination process can be controlled more easily by providing a pulse counting unit 355 in each row driving unit 35. Furthermore, by providing the row driving unit 35 with the pulse counting unit 355, as described above, the timing of the exposure termination process can be set arbitrarily for each pixel row of the pixel unit 10.

[0115] Third Embodiment Next, a photoelectric conversion device according to a third embodiment of the present disclosure will be described with reference to Figures 10, 11, and 12, focusing on differences from the second embodiment. This embodiment differs from the second embodiment in the configuration of the vertical scanning control unit 22 and the configuration of the row driving unit 35. Specifically, the vertical scanning control unit 22 includes a selection generation unit 228. A signal P_EXP_STR output by a start trigger generation unit 226 is input to the selection generation unit 228.

[0116] [Vertical scanning control unit 22] 10 is a configuration diagram of the vertical scanning control unit 22 according to the third embodiment. In this embodiment, the vertical scanning control unit 22 includes a selection generation unit 228.

[0117] The selection generation unit 228 receives the signal P_EXP_STR and generates the signals P_SH1 and P_SH2 indicating the numbers. Note that the number of input signals P_EXP_STR may be two or more, and the number of output signals P_SH may be three or more.

[0118] Furthermore, the pulse signal generating unit 221 outputs a signal P_CLK1 and a signal P_CLK2 each having a different frequency. The number of signals P_CLK to be output may be three or more.

[0119] [Vertical scanning unit 30] 11 is a configuration diagram of a vertical scanning section 30 according to the third embodiment. In this embodiment, a row driving section 35 in the vertical scanning section 30 includes a selection holding section 356 and a pulse signal selection section 357.

[0120] The selection holding unit 356 receives the signals P_SH1, P_SH2, and vp_exp_str(1) and generates a signal p_sh[1] indicating the number of the target row.

[0121] The pulse signal selection unit 357 receives the signals P_CLK1, P_CLK2, and p_sh[1], selects the signal P_CLK to be used in the target row from either the signal P_CLK1 or the signal P_CLK2, and outputs it as the signal p_clk[1].

[0122] [Pixel drive signal operation] 12 is a timing chart showing an example of the operation of the vertical scanning control section 22, the vertical scanning section 30, and the pixel section 10 according to the third embodiment. Hereinafter, the operation will be described with reference to FIG.

[0123] <<Operation of the vertical scanning control unit 22>> At time t100, when the value of signal P_EXP_STR transitions to value 0, signal P_SH1 transitions to high level and signal P_SH2 transitions to low level based on this. At time t102, when the value of signal P_EXP_STR transitions to value 0, signal P_SH1 transitions to low level and signal P_SH2 transitions to high level based on this. Thereafter, signals P_SH1 and P_SH2 toggle each time the value of signal P_EXP_STR transitions to value 0.

[0124] The timing at which the signals P_SH1 and P_SH2 toggle does not necessarily have to be when the signal P_EXP_STR has a value of 0, and may be controlled by a register or the like.

[0125] <<Pixel drive signal operation>> At time t100, when the value of the signal P_EXP_STR transitions to the value 0, the signal P_SH1 is at a high level and the signal P_SH2 is at a low level. At this time, the signal p_sh[1] transitions to a high level.

[0126] At time t102, when the value of the signal P_EXP_STR transitions to the value 0, the signal P_SH1 is at a low level and the signal P_SH2 is at a high level. At this time, the signal p_sh[1] transitions to a low level.

[0127] During the period from time t100 to time t102 when the signal p_sh[1] indicates a high level, the pulse signal selection unit 357 selects the signal P_CLK1 and outputs it as the signal p_clk[1].

[0128] During the period when the signal p_sh[1] indicates a low level, the pulse signal selection unit 357 selects the signal P_CLK2 and outputs it as p_clk[1].

[0129] Furthermore, at time t100, when the value of the signal P_EXP_STR transitions to the value 0, the first row of the pixel unit 10 becomes the target row for the exposure start process, and the supply of the signal pCLK[1] begins. The signal p_clk[1] is used as the original signal of the signal pCLK[1].

[0130] At time t101, when the value of the signal P_EXP_STR transitions to the value 1, the signal P_SH1 is at a high level and the signal P_SH2 is at a low level. At this time, the signal p_sh[2] transitions to a high level.

[0131] At time t103, when the value of the signal P_EXP_STR transitions to the value 1, the signal P_SH1 is at a low level and the signal P_SH2 is at a high level. At this time, the signal p_sh[2] transitions to a low level.

[0132] During the period from time t101 to time t103 when the signal p_sh[2] indicates a high level, the pulse signal selection unit 357 selects the signal P_CLK1 and outputs it as p_clk[2].

[0133] During the period in which the signal p_sh[2] indicates a low level, the pulse signal selection unit 357 selects the signal P_CLK2 and outputs it as the signal p_clk[2].

[0134] Furthermore, at time t101, when the value of the signal P_EXP_STR transitions to the value 1, the second row of the pixel unit 10 becomes the target row for the exposure start process, and the supply of the signal pCLK[2] begins. The signal p_clk[2] is used as the original signal of the signal pCLK[2].

[0135] According to this embodiment, the vertical scanning control unit 22 includes a selection generation unit 228. Furthermore, each row driving unit 35 includes a selection holding unit 356 and a pulse signal selection unit 357, which control the period and number of pulses of the signal pCLK for each frame. This makes it possible to set an exposure time that corresponds to the changed brightness even if the brightness of the subject changes suddenly. Even if the brightness of the subject drops significantly, it is possible to suppress a drop in brightness of the captured image.

[0136] <Fourth embodiment> Next, a photoelectric conversion device according to a fourth embodiment of the present disclosure will be described with reference to Figures 13, 14, 15, and 16, focusing on differences from the first embodiment. This embodiment differs from the first embodiment in the configurations of the control unit 20, vertical scanning control unit 22, and vertical scanning unit 30. The configuration of this embodiment is capable of performing a so-called global shutter operation in which the exposure periods of the pixels P start and end simultaneously for all pixels.

[0137] [Control unit 20] 13 is a configuration diagram of a control unit 20 according to a fourth embodiment. In this embodiment, the control unit 20 generates signals TRG_STR and TRG_STOP in a synchronization signal generation unit 21 and outputs them to a vertical scanning unit 30. The signal TRG_STR is a trigger signal indicating the start of exposure and is used in common for all rows. The signal TRG_STOP is a trigger signal indicating the end of exposure and is used in common for all rows. The signals TRG_STR and TRG_STOP may be generated by the CPU 70.

[0138] [Vertical scanning control unit 22] 14 is a configuration diagram of a vertical scanning control unit 22 according to the fourth embodiment. In this embodiment, the vertical scanning control unit 22 does not include a pulse count unit 223, a start trigger generation unit 226, or an end trigger generation unit 227.

[0139] Furthermore, the vertical scanning control unit 22 receives a signal RES_EN generated by the synchronization signal generation unit 21. The signal RES_EN is a signal that enables generation of a signal P_RES, which is an output of the reset signal generation unit 225. The signal P_RES is generated based on the vertical synchronization signal VD and the signal RES_EN, and is used commonly for all rows.

[0140] [Vertical scanning unit 30] 15 is a configuration diagram of a vertical scanning unit 30 according to the fourth embodiment. In this embodiment, the vertical scanning unit 30 does not include a second decoder unit 32, a third decoder unit 33, or a fourth decoder unit 34. In addition, the vertical scanning unit 30 does not include an exposure start control unit 352 or an exposure end control unit 353.

[0141] [Pixel drive signal operation] 16 is a timing chart showing an example of the operation of the vertical scanning control section 22, the vertical scanning section 30, and the pixel section 10 according to the fourth embodiment. Hereinafter, the operation will be described with reference to FIG.

[0142] <<Operation of the vertical scanning control unit 22>> At time t100, when the vertical synchronization signal VD transitions to a high level, if the signal RES_EN is at a high level, the signal P_RES transitions to a high level based on this.

[0143] At time t101, when the vertical synchronization signal VD transitions to a low level, the signal P_RES transitions to a low level based on this.

[0144] The timing at which the level of the signal P_RES transitions does not necessarily need to be controlled by referring to the vertical synchronization signal VD, but may be controlled by referring to the counter value cnt_HD, for example.

[0145] <<Pixel drive signal operation>> At time t102, when TRG_STR transitions to high level, supply of pCLK to each row begins.

[0146] At time t103, when TRG_STOP transitions to high level, the supply of pCLK to each row is terminated.

[0147] At time t104, when the value of the signal P_VSEL transitions to 0, the signal pVSEL[1] transitions to high level, and the first row of the pixel unit 10 becomes the target row for readout processing. The signal pVSEL[1] controls the pixel output circuit 15 of the pixel P, and when it is high level, the counter 14 and the signal line pOUT are connected, and the count value is read out.

[0148] At time t105, when the value of the signal P_VSEL transitions to the value 1, the first row of the pixel unit 10 is no longer the target row for the readout process, and the signal pVSEL[1] transitions to low level.

[0149] Furthermore, at time t105, when the value of the signal P_VSEL transitions to the value 1, the signal pVSEL[2] transitions to the high level, and the second row of the pixel unit 10 becomes the target row for the readout process.

[0150] Thereafter, the signal pVSEL transitions to a high level and then to a low level in the same manner.

[0151] According to this embodiment, a global shutter operation can be performed in which the timing of the exposure start process and the exposure end process are simultaneous for all rows. This makes it possible to obtain an image without rolling shutter distortion. Furthermore, by controlling the timing of the exposure start process and the exposure end process using a control signal separate from the horizontal synchronization signal HD, the exposure time can be controlled precisely.

[0152] Fifth Embodiment Next, a photoelectric conversion device according to a fifth embodiment of the present disclosure will be described with reference to Figures 17, 18, 19, and 20, focusing on differences from the fourth embodiment. This embodiment differs from the fourth embodiment in the configurations of the control unit 20, vertical scanning control unit 22, and vertical scanning unit 30. This embodiment also has a configuration capable of performing a global shutter operation.

[0153] [Control unit 20] 17 is a configuration diagram of a control unit 20 according to the fifth embodiment. In this embodiment, the control unit 20 does not generate the signal TRG_STOP in the synchronization signal generating unit 21.

[0154] [Vertical scanning control unit 22] 18 is a configuration diagram of a vertical scanning control unit 22 according to the fifth embodiment. In this embodiment, the vertical scanning control unit 22 includes a pulse count unit 223 and an end trigger generation unit 227.

[0155] The pulse counting unit 223 receives the signals P_CLK and TRG_STR and outputs a count value cnt_P_CLK.

[0156] The signal P_EXP_STOP, which is the output of the end trigger generating unit 227, is generated based on the count value cnt_P_CLK and is used in common for all rows.

[0157] [Vertical scanning unit 30] 19 is a configuration diagram of a vertical scanning section 30 according to the fifth embodiment. In this embodiment, the vertical scanning section 30 does not receive the signal TRG_STOP, but receives the signal P_EXP_STOP.

[0158] [Pixel drive signal operation] 20 is a timing chart showing an example of the operation of the vertical scanning control section 22, the vertical scanning section 30, and the pixel section 10 according to the sixth embodiment. Hereinafter, the operation will be described with reference to FIG.

[0159] At time t100, when the signal TRG_STR transitions to high level, supply of pCLK to each row begins.

[0160] Also, at time t100, when the signal TRG_STR transitions to high level, the pulse counting unit 223 starts counting the signal P_CLK.

[0161] At time t101, when the signal P_CLK transitions to high level, the count value cnt_P_CLK transitions to 0. The counter value cnt_P_CLK counts up every time the signal P_CLK transitions to high level.

[0162] At time t102, when the counter value cnt_P_CLK transitions to 10, the signal P_EXP_STOP transitions to high level. Note that the timing at which the signal P_EXP_STOP transitions to high level does not necessarily have to be when the counter value cnt_P_CLK is 10, and may be controlled by a register or the like.

[0163] At time t102, when the signal P_EXP_STOP transitions to high level, the supply of pCLK to each row is terminated.

[0164] The period from time t101 to time t102 is the exposure time for each row of the pixel unit 10. By controlling the timing at which the signal P_EXP_STOP transitions to high level using the counter value cnt_P_CLK, it is possible to control the exposure time in units of one cycle of the signal P_CLK.

[0165] According to this embodiment, by making the timing of exposure start and end common to all rows, it is possible to capture a still image without rolling shutter distortion. Also, by controlling the timing of exposure end using the count value cnt_P_CLK, it is possible to manage the exposure time using the number of signals P_CLK, making control easier.

[0166] Sixth Embodiment Next, a photoelectric conversion device according to a sixth embodiment of the present disclosure will be described with reference to Figures 21, 22, and 23, focusing on differences from the fifth embodiment. This embodiment differs from the fifth embodiment in the configurations of the vertical scanning control unit 22 and the vertical scanning unit 30.

[0167] [Vertical scanning control unit 22] FIG. 21 is a configuration diagram of the vertical scanning control unit 22 according to the sixth embodiment.

[0168] In this embodiment, the pulse signal generating section 221 in the vertical scanning control section 22 generates a signal P_CLK1 and a signal P_CLK2 that has the same cycle as the signal P_CLK1 but a different phase from the signal P_CLK1.

[0169] The vertical scanning control unit 22 also includes a first counting unit 229 , an end trigger 1 generating unit 2210 , a second counting unit 2211 , and an end trigger 2 generating unit 2212 .

[0170] The first counting unit 229 receives the signals P_CLK1 and TRG_STR and outputs a count value cnt_P_CLK1 (first count value). The second counting unit 2211 receives the signals P_CLK2 and TRG_STR and outputs a count value cnt_P_CLK2 (second count value).

[0171] The signal P_EXP_STOP1 output from the end trigger 1 generator 2210 is generated based on the count value cnt_P_CLK1, and the signal P_EXP_STOP2 output from the end trigger 2 generator 2212 is generated based on the count value cnt_P_CLK2.

[0172] The configuration may be changed as appropriate so that the number of signals P_CLK is three or more.

[0173] [Vertical scanning unit 30] 22 is a configuration diagram of a vertical scanning unit 30 according to the sixth embodiment. In this embodiment, the signal P_CLK is not input to the vertical scanning unit 30. On the other hand, signals P_CLK1 and P_CLK2 are input to the vertical scanning unit 30. In addition, the signal P_EXP_STOP is not input. On the other hand, signals P_EXP_STOP1 and P_EXP_STOP2 are input to the vertical scanning unit 30.

[0174] The signals P_CLK1 and P_EXP_STOP1 are used by the row driver units 35 corresponding to the 1st row through the N / 2th row of the pixel unit 10. The signals P_CLK2 and P_EXP_STOP2 are used by the row driver units 35 corresponding to the (N / 2)+1th row through the Nth row of the pixel unit 10. The allocation of signals used by each row driver unit is not limited to this. For example, different signals may be repeatedly used every other row or every two rows, or may be used irregularly, or may be configured to be controllable by a register or the like.

[0175] [Pixel drive signal operation] 23 is a timing chart showing an example of the operation of the vertical scanning control section 22, the vertical scanning section 30, and the pixel section 10 according to the sixth embodiment. Hereinafter, the operation will be described with reference to FIG.

[0176] At time t100, when the signal TRG_STR transitions to a high level, supply of the signal pCLK to each row begins. The signal P_CLK1 is used as the original signal of the signal pCLK corresponding to the 1st row through the N / 2th row of the pixel unit 10, and the signal P_CLK2 is used as the original signal of the signal pCLK corresponding to the (N / 2)+1th row through the Nth row of the pixel unit 10.

[0177] Also, at time t100, when the signal TRG_STR transitions to high level, the first counting unit 229 and the second counting unit 2211 start counting the signals P_CLK1 and P_CLK2.

[0178] At time t101, when the signal P_CLK1 transitions to high level, the count value cnt_P_CLK1 transitions to 0. The counter value cnt_P_CLK1 counts up every time the signal P_CLK1 transitions to high level.

[0179] At time t102, when the signal P_CLK2 transitions to high level, the count value cnt_P_CLK2 transitions to 0. The counter value cnt_P_CLK2 counts up every time the signal P_CLK2 transitions to high level.

[0180] At time t103, when the counter value cnt_P_CLK1 transitions to 10, the signal P_EXP_STOP1 transitions to high level. Note that the timing at which the signal P_EXP_STOP1 transitions to high level does not necessarily have to be when the counter value cnt_P_CLK1 is 10, and may be controlled by a register or the like.

[0181] At time t103, when the signal P_EXP_STOP1 transitions to high level, the supply of pCLK corresponding to the 1st row to the N / 2th row of the pixel section 10 is terminated.

[0182] At time t104, when the counter value cnt_P_CLK2 transitions to 10, the signal P_EXP_STOP2 transitions to high level. Note that the timing at which the signal P_EXP_STOP2 transitions to high level does not necessarily have to be when the counter value cnt_P_CLK2 is 10, and may be controlled by a register or the like.

[0183] At time t104, when the signal P_EXP_STOP2 transitions to high level, the supply of pCLK corresponding to the (N / 2)+1th row to the Nth row of the pixel section 10 is terminated.

[0184] A plurality of phases of the signal pCLK supplied to the pixel P are prepared. This makes it possible to suppress instantaneous increases in current that occur in the power supply system of the photoelectric conversion device due to avalanche multiplication operations, etc., and thus makes it possible to further stabilize the circuit operation of the photoelectric conversion device.

[0185] According to this embodiment, global shutter operation can be performed by simultaneously starting and ending exposure for all rows. This allows for the acquisition of an image free of rolling shutter distortion. Furthermore, by providing multiple signals P_CLK with different phases for use in generating the signal pCLK, it is possible to suppress instantaneous increases in current flowing through the power supply system. This stabilizes the power supply system of the photoelectric conversion device, thereby further stabilizing the circuit operation of the photoelectric conversion device.

[0186] Seventh Embodiment Next, a photoelectric conversion device according to a seventh embodiment of the present disclosure will be described, focusing on differences from the sixth embodiment, with reference to Figures 24, 25, and 26. This embodiment differs from the sixth embodiment in the configurations of the vertical scanning control unit 22 and the vertical scanning unit 30.

[0187] [Vertical scanning control unit 22] FIG. 24 is a configuration diagram of the vertical scanning control unit 22 according to the seventh embodiment.

[0188] In this embodiment, the pulse signal generating unit 221 in the vertical scanning control unit 22 generates signals P_CLK1, P_CLK2, P_CLK3, and P_CLK4. The period of each signal can be controlled in units of one cycle of MCLK, and each signal can be set to a different period.

[0189] The vertical scanning control unit 22 also includes a first count unit 229, an end trigger 1 generation unit 2210, and a second count unit 2211. The vertical scanning control unit 22 also includes an end trigger 2 generation unit 2212, a third count unit 2213, an end trigger 3 generation unit 2214, a fourth count unit 2215, and an end trigger 4 generation unit 2216.

[0190] The first counting unit 229 receives signals P_CLK1 and TRG_STR and outputs a count value cnt_P_CLK1. The second counting unit 2211 receives signals P_CLK2 and TRG_STR and outputs a count value cnt_P_CLK2. The third counting unit 2213 receives signals P_CLK3 and TRG_STR and outputs a count value cnt_P_CLK3. The fourth counting unit 2215 receives signals P_CLK4 and TRG_STR and outputs a count value cnt_P_CLK4.

[0191] The signal P_EXP_STOP1 output from the end trigger 1 generation unit 2210 is generated based on the count value cnt_P_CLK1. The signal P_EXP_STOP2 output from the end trigger 2 generation unit 2212 is generated based on the count value cnt_P_CLK2. The signal P_EXP_STOP3 output from the end trigger 3 generation unit 2214 is generated based on the count value cnt_P_CLK3. The signal P_EXP_STOP4 output from the end trigger 4 generation unit 2216 is generated based on the count value cnt_P_CLK4.

[0192] The configuration may be changed as appropriate so that the number of signals P_CLK is five or more.

[0193] [Vertical scanning unit 30] 25 is a configuration diagram of a vertical scanning unit 30 according to the seventh embodiment. In this embodiment, the signal P_CLK is not input to the vertical scanning unit 30. On the other hand, signals P_CLK1, P_CLK2, P_CLK3, and P_CLK4 are input to the vertical scanning unit 30. In addition, the signal P_EXP_STOP is not input to the vertical scanning unit 30. On the other hand, signals P_EXP_STOP1, P_EXP_STOP2, P_EXP_STOP3, and P_EXP_STOP4 are input to the vertical scanning unit 30.

[0194] The signals P_CLK1, P_CLK2, P_EXP_STOP1, and P_EXP_STOP2 are used in the row driver 35 corresponding to the 1st to N / 2nd rows of the pixel unit 10. Furthermore, the signal P_CLK1 is used as the original signal of the signal pCLK_L, and the signal P_CLK2 is used as the original signal of the signal pCLK_R.

[0195] The signals P_CLK3, P_CLK4, P_EXP_STOP3, and P_EXP_STOP4 are used in the row driver 35 corresponding to the (N / 2)+1th row to the Nth row of the pixel unit 10. Furthermore, the signal P_CLK3 is used as the original signal of the signal pCLK_L, and the signal P_CLK4 is used as the original signal of the signal pCLK_R.

[0196] The allocation of signals used by each row driver is not limited to this. For example, different signals may be repeatedly used every other row or every two rows, or may be irregular, or may be configured to be controllable by a register or the like.

[0197] The signal pCLK_L is supplied to the 1st to (M / 2)th columns of the pixel section 10, and the signal pCLK_R is supplied to the (M / 2)+1th to Mth columns of the pixel section 10.

[0198] The allocation of the signal pCLK is not limited to this. For example, a different signal may be repeatedly used for every other column or every two columns, or may be irregular, or may be configured to be controllable by a register or the like.

[0199] [Pixel drive signal operation] 26 is a timing chart showing an example of the operation of the vertical scanning control section 22, the vertical scanning section 30, and the pixel section 10 according to the seventh embodiment. Hereinafter, the operation will be described with reference to FIG.

[0200] At time t100, when the signal TRG_STR transitions to high level, the supply of the signals pCLK_L and pCLK_R to each row begins.

[0201] Also, at time t100, signal TRG_STR transitions to high level. This causes first count unit 229, second count unit 2211, third count unit 2213, and fourth count unit 2215 to start counting signals P_CLK1, P_CLK2, P_CLK3, and P_CLK4. The count values ​​generated by first count unit 229, second count unit 2211, third count unit 2213, and fourth count unit 2215 are the first count value, second count value, third count value, and fourth count value, respectively.

[0202] At time t101, when the counter value cnt_P_CLK3 transitions to 11, the signal P_EXP_STOP3 transitions to high level. Note that the timing at which the signal P_EXP_STOP3 transitions to high level does not necessarily have to be when the counter value cnt_P_CLK3 is 11, and may be controlled by a register or the like.

[0203] At time t101, when the signal P_EXP_STOP3 transitions to high level, the supply of the signal pCLK_L corresponding to the (N / 2)+1th row to the Nth row of the pixel section 10 is terminated.

[0204] At time t102, when the counter value cnt_P_CLK1 transitions to 10, the signal P_EXP_STOP1 transitions to high level. Note that the timing at which the signal P_EXP_STOP1 transitions to high level does not necessarily have to be when the counter value cnt_P_CLK1 is 10, and may be controlled by a register or the like.

[0205] At time t102, when the signal P_EXP_STOP1 transitions to high level, the supply of the signal pCLK_L corresponding to the 1st row to the N / 2th row of the pixel section 10 is terminated.

[0206] At time t103, when the counter value cnt_P_CLK2 transitions to 9, the signal P_EXP_STOP2 transitions to high level. Note that the timing at which the signal P_EXP_STOP2 transitions to high level does not necessarily have to be when the counter value cnt_P_CLK2 is 9, and may be controlled by a register or the like.

[0207] At time t103, when the signal P_EXP_STOP2 transitions to high level, the supply of the signal pCLK_R corresponding to the 1st row to the N / 2th row of the pixel section 10 is terminated.

[0208] At time t104, when the counter value cnt_P_CLK4 transitions to the value 8, the signal P_EXP_STOP4 transitions to the high level. Note that the timing at which the signal P_EXP_STOP4 transitions to the high level does not necessarily have to be when the counter value cnt_P_CLK4 is the value 8, and may be controlled by a register or the like.

[0209] At time t104, when the signal P_EXP_STOP4 transitions to high level, the supply of the signal pCLK_R corresponding to the (N / 2)+1th row to the Nth row of the pixel section 10 is terminated.

[0210] By controlling the timing at which each signal P_EXP_STOP transitions to high level using each counter value cnt_P_CLK, it becomes possible to individually control the exposure time of the area controlled by each pCLK in units of one cycle of the signal P_CLK.

[0211] According to this embodiment, a global shutter operation can be performed in which the exposure start and end timings are simultaneous for all rows. This makes it possible to obtain an image without rolling shutter distortion. Furthermore, by providing multiple signals pCLK and individually controlling the cycle and number of times of each signal pCLK, it is possible to set different exposure times for each region to which the signal pCLK is supplied. This makes it possible to set exposure times of lengths appropriate for each region, even when there is a difference in brightness between regions of the subject.

[0212] Eighth Embodiment The photoelectric conversion system according to this embodiment will be described with reference to Fig. 27. Fig. 27 is a block diagram showing a schematic configuration of the photoelectric conversion system according to this embodiment.

[0213] The imaging devices described in the first to seventh embodiments can be applied to various photoelectric conversion systems. Examples of applicable photoelectric conversion systems include digital still cameras, digital camcorders, surveillance cameras, copiers, fax machines, mobile phones, vehicle-mounted cameras, and observation satellites. Also included in the photoelectric conversion system is a camera module equipped with an optical system such as a lens and an imaging device. Fig. 27 illustrates a block diagram of a digital still camera as an example of such systems.

[0214] 27 includes an imaging device 1004, a lens 1002 that forms an optical image of a subject on the imaging device 1004, an aperture 1003 that adjusts the amount of light passing through the lens 1002, and a barrier 1001 that protects the lens 1002. The lens 1002 and the aperture 1003 form an optical system that focuses light on the imaging device 1004. The imaging device 1004 is a photoelectric conversion device (imaging device) according to any of the above embodiments, and converts the optical image formed by the lens 1002 into an electrical signal.

[0215] The photoelectric conversion system also includes a signal processing unit 1007, which is an image generation unit that generates an image by processing an output signal output from the imaging device 1004. The signal processing unit 1007 performs various corrections and compressions as necessary to output image data. The signal processing unit 1007 may be formed on the same semiconductor substrate on which the imaging device 1004 is provided, or may be formed on a semiconductor substrate separate from the imaging device 1004. Alternatively, the imaging device 1004 and the signal processing unit 1007 may be formed on the same semiconductor substrate.

[0216] The photoelectric conversion system further includes a memory unit 1010 for temporarily storing image data, and an external interface unit (external I / F unit) 1013 for communicating with an external computer or the like. The photoelectric conversion system further includes a recording medium 1012 such as a semiconductor memory for recording or reading out imaging data, and a recording medium control interface unit (recording medium control I / F unit) 1011 for recording or reading out data from the recording medium 1012. The recording medium 1012 may be built into the photoelectric conversion system or may be detachable.

[0217] The photoelectric conversion system further includes an overall control and calculation unit 1009 that performs various calculations and controls the entire digital still camera, and a timing generation unit 1008 that outputs various timing signals to the image capture device 1004 and the signal processing unit 1007. Here, timing signals and the like may be input from outside, and the photoelectric conversion system only needs to include at least the image capture device 1004 and the signal processing unit 1007 that processes the output signal output from the image capture device 1004.

[0218] The imaging device 1004 outputs an imaging signal to a signal processing unit 1007. The signal processing unit 1007 performs predetermined signal processing on the imaging signal output from the imaging device 1004 and outputs image data. The signal processing unit 1007 generates an image using the imaging signal.

[0219] As described above, according to this embodiment, it is possible to realize a photoelectric conversion system to which the photoelectric conversion device (imaging device) according to any one of the above embodiments is applied.

[0220] Ninth Embodiment The photoelectric conversion system and the moving object of this embodiment will be described with reference to Fig. 28. Fig. 28 is a diagram showing the configuration of the photoelectric conversion system and the moving object of this embodiment.

[0221] FIG. 28(a) illustrates an example of a photoelectric conversion system related to an in-vehicle camera. The photoelectric conversion system 300 includes an image capture device 310. The image capture device 310 is the photoelectric conversion device (image capture device) described in any of the above embodiments. The photoelectric conversion system 300 includes an image processing unit 312 that performs image processing on multiple pieces of image data acquired by the image capture device 310, and a parallax acquisition unit 314 that calculates parallax (phase difference between parallax images) from the multiple pieces of image data acquired by the photoelectric conversion system 300. The photoelectric conversion system 300 also includes a distance acquisition unit 316 that calculates the distance to an object based on the calculated parallax, and a collision determination unit 318 that determines whether or not there is a possibility of a collision based on the calculated distance. Here, the parallax acquisition unit 314 and the distance acquisition unit 316 are examples of distance information acquisition means that acquire information about the distance to the object. That is, the distance information includes information about the parallax, the defocus amount, the distance to the object, etc. The collision determination unit 318 may determine the possibility of a collision using any of this distance information. The distance information acquisition means may be realized by dedicated hardware, a software module, a field programmable gate array (FPGA), an application specific integrated circuit (ASIC), or a combination thereof.

[0222] The photoelectric conversion system 300 is connected to a vehicle information acquisition device 320 and can acquire vehicle information such as vehicle speed, yaw rate, and steering angle. The photoelectric conversion system 300 is also connected to a control ECU 330, which is a control device that outputs a control signal to generate a braking force for the vehicle based on the determination result of the collision determination unit 318. The photoelectric conversion system 300 is also connected to an alarm device 340 that issues an alarm to the driver based on the determination result of the collision determination unit 318. For example, if the determination result of the collision determination unit 318 indicates a high possibility of a collision, the control ECU 330 performs vehicle control to avoid the collision and mitigate damage by applying the brakes, releasing the accelerator, suppressing engine output, etc. The alarm device 340 warns the user by sounding an alarm, displaying alarm information on a screen such as a car navigation system, or vibrating the seat belt or steering wheel.

[0223] In this embodiment, the surroundings of the vehicle, for example, the front or rear, are imaged by the photoelectric conversion system 300. Fig. 28(b) shows the photoelectric conversion system when imaging the area in front of the vehicle (imaging range 350). The vehicle information acquisition device 320 sends instructions to the photoelectric conversion system 300 or the imaging device 310. This configuration can further improve the accuracy of distance measurement.

[0224] Although the above describes an example of control to prevent collision with other vehicles, the present invention can also be applied to control of automatic driving by following other vehicles, and control of automatic driving to prevent deviation from a lane. Furthermore, the photoelectric conversion system is not limited to vehicles such as the subject vehicle, but can be applied to moving bodies (moving devices) such as ships, aircraft, and industrial robots. In addition, the present invention can be applied not only to moving bodies but also to a wide range of devices that use object recognition, such as intelligent transport systems (ITS).

[0225] [Modified embodiment] The present disclosure is not limited to the above-described embodiment, and various modifications are possible.

[0226] For example, an example in which part of the configuration of any one embodiment is added to another embodiment, or an example in which part of the configuration of another embodiment is replaced with another embodiment, is also included in the embodiments of the present disclosure.

[0227] Furthermore, the photoelectric conversion systems shown in the above eighth and ninth embodiments are examples of photoelectric conversion systems to which photoelectric conversion devices can be applied, and photoelectric conversion systems to which the photoelectric conversion devices of the present disclosure can be applied are not limited to the configurations shown in Figures 27 and 28.

[0228] It should be noted that the above-described embodiments are merely examples of specific embodiments for carrying out the present disclosure, and the technical scope of the present disclosure should not be construed as being limited by these embodiments. In other words, the present disclosure can be carried out in various forms without departing from its technical concept or main features.

[0229] Tenth Embodiment This embodiment can be applied to any of the first to seventh embodiments. FIG. 29(a) is a schematic diagram illustrating a device 9191 including a photoelectric conversion device 930 of this embodiment. The photoelectric conversion device 930 can be any of the photoelectric conversion devices described in the first to seventh embodiments, or a photoelectric conversion device that combines multiple embodiments. The device 9191 including the photoelectric conversion device 930 will be described in detail. As described above, the photoelectric conversion device 930 can include a semiconductor device 910 having a semiconductor layer 10, as well as a package 920 that houses the semiconductor device 910. The package 920 can include a base to which the semiconductor device 910 is fixed and a lid such as glass that faces the semiconductor device 910. The package 920 can further include bonding members such as bonding wires and bumps that connect terminals provided on the base to terminals provided on the semiconductor device 910.

[0230] The equipment 9191 can include at least one of an optical device 940, a control device 950, a processing device 960, a display device 970, a storage device 980, and a mechanical device 990. The optical device 940 corresponds to the photoelectric conversion device 930. The optical device 940 is, for example, a lens, a shutter, or a mirror. The control device 950 controls the photoelectric conversion device 930. The control device 950 is, for example, a photoelectric conversion device such as an ASIC.

[0231] The processing device 960 processes the signal output from the photoelectric conversion device 930. The processing device 960 is a photoelectric conversion device such as a CPU or ASIC for configuring an AFE (analog front end) or a DFE (digital front end). The display device 970 is an EL display device or a liquid crystal display device that displays information (images) obtained by the photoelectric conversion device 930. The storage device 980 is a magnetic device or a semiconductor device that stores information (images) obtained by the photoelectric conversion device 930. The storage device 980 is a volatile memory such as an SRAM or a DRAM, or a non-volatile memory such as a flash memory or a hard disk drive.

[0232] The mechanical device 990 has a moving part or a propulsion part such as a motor or an engine. In the device 9191, the signal output from the photoelectric conversion device 930 is displayed on the display device 970, or transmitted to the outside by a communication device (not shown) provided in the device 9191. For this purpose, the device 9191 preferably further includes a storage device 980 and a processing device 960 in addition to the memory circuit and arithmetic circuit provided in the photoelectric conversion device 930. The mechanical device 990 may be controlled based on the signal output from the photoelectric conversion device 930.

[0233] The device 9191 is also suitable for electronic devices such as information terminals with a photographing function (for example, smartphones and wearable devices) and cameras (for example, interchangeable lens cameras, compact cameras, video cameras, and surveillance cameras). The mechanical device 990 in the camera can drive components of the optical device 940 for zooming, focusing, and shutter operations. Alternatively, the mechanical device 990 in the camera can move the photoelectric conversion device 930 for vibration isolation operations.

[0234] Furthermore, the device 9191 may be transportation equipment such as a vehicle, a ship, or an aircraft. The mechanical device 990 in transportation equipment can be used as a moving device. The device 9191 as transportation equipment is suitable for transporting the photoelectric conversion device 930 or for assisting and / or automating driving (piloting) using an imaging function. The processing device 960 for assisting and / or automating driving (piloting) can perform processing for operating the mechanical device 990 as a moving device based on information obtained by the photoelectric conversion device 930. Alternatively, the device 9191 may be a medical device such as an endoscope, a measuring device such as a distance measuring sensor, an analytical device such as an electron microscope, an office machine such as a copier, or an industrial device such as a robot.

[0235] According to the above-described embodiment, it is possible to obtain good pixel characteristics. Therefore, the value of the photoelectric conversion device can be increased. In this case, increasing the value corresponds to at least one of adding functions, improving performance, improving characteristics, improving reliability, improving manufacturing yield, reducing environmental impact, reducing costs, reducing size, and reducing weight.

[0236] Therefore, if the photoelectric conversion device 930 according to this embodiment is used in equipment 9191, the value of the equipment can also be improved. For example, by installing the photoelectric conversion device 930 in transportation equipment, excellent performance can be obtained when photographing the exterior of the transportation equipment or measuring the external environment. Therefore, when manufacturing and selling transportation equipment, deciding to install the photoelectric conversion device according to this embodiment in the transportation equipment is advantageous in terms of improving the performance of the transportation equipment itself. In particular, the photoelectric conversion device 930 is suitable for transportation equipment that performs driving assistance and / or automatic driving of the transportation equipment using information obtained by the photoelectric conversion device. [Explanation of symbols]

[0237] 10 Pixel section 11 Avalanche diode 12 Quench element 13 Waveform shaping circuit 14 Counter 15 Pixel output circuit 20 Control Unit 22 Vertical scanning control section 30 Vertical scanning unit 40 Signal holding section 50 Horizontal scanning unit (second scanning unit) 60 Output section 70 CPU (calculation section) 100 Photoelectric conversion device

Claims

1. a pixel section in which a plurality of pixels are arranged across a plurality of rows, each pixel having a quench element to which a signal defining the start and end of an exposure period is input at a control node, and an avalanche photodiode connected to the quench element; a scanning unit that scans the pixel unit by performing a readout process of reading out signals from the pixels, a start process of the exposure period, and an end process of the exposure period row by row, with one row or two or more rows as a unit; a control unit that outputs a synchronization signal to the scanning unit to control the timing of the readout process; the timing of at least one of the start process and the end process is controlled by a control signal separate from the synchronization signal; the scanning unit includes a plurality of row driving units arranged to respectively correspond to the rows of the pixels, each of which controls the pixels of the corresponding row; a pulse counting unit, each of the plurality of row driving units, that counts pulse signals to generate a count value; a termination control unit that generates the control signal for controlling the termination process in accordance with the count value.

2. The row driver has a start control unit that generates a start signal that controls the start process, 2. The photoelectric conversion device according to claim 1, wherein the pulse counting section starts generating the count value in accordance with a change in the level of the start signal.

3. The control unit comprises: a signal generating unit that generates a plurality of clock signals having different periods; a selection generation unit that generates a selection signal to the row driver; 3. The photoelectric conversion device according to claim 1, wherein one clock signal selected from the plurality of clock signals in accordance with the selection signal is input to the pulse counting unit as the pulse signal used to generate the count value.

4. The control unit has a first count unit that generates a first count value by counting one clock signal of the plurality of clock signals, and a second count unit that generates a second count value by counting another clock signal of the plurality of clock signals; generating the control signal used in the termination process by the row driver corresponding to a portion of the plurality of rows using the first count value; 4. The photoelectric conversion device according to claim 3, wherein the row driver corresponding to another part of the plurality of rows generates the control signal used in the termination process using the second count value.

5. The plurality of pixels are further arranged across a plurality of columns, generating the control signal used in the termination process by the row driver corresponding to a portion of the plurality of rows and a portion of the plurality of columns using the first count value; The photoelectric conversion device according to claim 4, characterized in that the row driving unit corresponding to another part of the plurality of rows and a part of the plurality of columns generates the control signal used for the termination processing using the second count value.

6. A pixel section in which a plurality of pixels are arranged across a plurality of rows, each pixel having a quench element to which a signal that defines the start and end of an exposure period is input at a control node, and an avalanche photodiode connected to the quench element; a scanning unit that scans the pixel unit by performing a readout process of reading out signals from the pixels, a start process of the exposure period, and an end process of the exposure period row by row, with one row or two or more rows as a unit; a control unit that outputs a synchronization signal to the scanning unit to control the timing of the readout process; the timing of at least one of the start process and the end process is controlled by a control signal separate from the synchronization signal; the timing of the start process is controlled by a first control signal, which is the control signal; The photoelectric conversion device is characterized in that the timing of the termination process is controlled by a second control signal, which is the control signal.

7. A pixel section in which a plurality of pixels are arranged across a plurality of rows, each pixel having a quench element to which a signal that defines the start and end of an exposure period is input at a control node, and an avalanche photodiode connected to the quench element; a scanning unit that scans the pixel unit by performing a readout process of reading out signals from the pixels, a start process of the exposure period, and an end process of the exposure period row by row, with one row or two or more rows as a unit; a control unit that outputs a synchronization signal to the scanning unit to control the timing of the readout process; the timing of at least one of the start process and the end process is controlled by a control signal separate from the synchronization signal; The control unit includes a pulse count unit that counts pulse signals to generate a count value; a start trigger generation unit that generates the control signal for controlling the start process in accordance with the count value; The photoelectric conversion device, wherein the start trigger generation unit outputs the other control signal to the scanning unit.

8. The photoelectric conversion device according to claim 7, characterized in that the synchronization signal and a clock signal which is the pulse signal are input to the pulse counting unit, and the pulse counting unit starts generating the count value in accordance with a change in the level of the synchronization signal.

9. A photoelectric conversion device described in any one of claims 1 to 8, characterized in that the synchronization signal is a signal that controls the timing of switching the row of the pixel that performs the readout process.

10. The plurality of pixels are arranged across a plurality of columns, The photoelectric conversion device includes a plurality of signal processing units that receive pixel signals read from the pixels by the readout process and are arranged corresponding to the plurality of columns, and a second scanning unit that performs a second scan to sequentially read out the pixel signals from the plurality of signal processing units.

10. The photoelectric conversion device according to claim 1, wherein the synchronization signal is a signal for controlling a cycle for starting the second scan.

11. A photoelectric conversion device described in any one of claims 1 to 8, characterized in that the synchronization signal is a signal that controls the start of the scanning of the scanning unit.

12. 12. The photoelectric conversion device according to claim 1, wherein the start process is performed simultaneously for the plurality of rows.

13. 13. The photoelectric conversion device according to claim 12, wherein the initiation process is controlled by the control signal.

14. 14. The photoelectric conversion device according to claim 12, wherein the termination process is performed simultaneously for the plurality of rows.

15. 14. The photoelectric conversion device according to claim 12, wherein the termination process is performed row-sequentially on the plurality of rows in accordance with the control signal.

16. The photoelectric conversion device according to any one of claims 1 to 15, a signal processing unit that generates an image using a signal output from the photoelectric conversion device.

17. A moving object equipped with the photoelectric conversion device according to any one of claims 1 to 15, A moving body comprising a control unit that controls the movement of the moving body using a signal output from the photoelectric conversion device.

18. An apparatus comprising the photoelectric conversion device according to any one of claims 1 to 15, an optical device corresponding to the photoelectric conversion device; a control device that controls the photoelectric conversion device; a processing device that processes a signal output from the photoelectric conversion device; a display device that displays information obtained by the photoelectric conversion device; a storage device that stores information obtained by the photoelectric conversion device; and and a mechanical device that operates based on information obtained by the photoelectric conversion device.

Images