ion source

Abstract

To provide an ion source capable of suppressing short-circuiting of a cooling pipe with a surrounding structure.SOLUTION: An ion source 1 comprises an electrode 20 including a movable member (a second electrode 22). Therefore, the ion source 1 is capable of extracting ions in an optimal electric field by adjusting a position of the second electrode 22 by moving the second electrode 22 in accordance with the kind of ions. With the movement of the second electrode 22, deformation force, is applied to a cooling pipe 50. Therefore, the cooling pipe 50 may be deformed so as to be closer to a surrounding structure by moving the second electrode 22. Meanwhile, the ion source 1 comprises a mechanism 60 which is provided around the cooling pipe 50 and avoids short-circuiting of the cooing pipe 50 and the ion source 1 with the structure. Therefore, even if the cooling pipe 50 is deformed, the short-circuiting of the cooling pipe 50 and the ion source 1 with the structure can be avoided. Thus, the short-circuiting of the cooling pipe 50 with the surrounding structure can be suppressed.SELECTED DRAWING: Figure 1