LED Array

Abstract

To provide different approaches for growth and subsequent fabrication of monolithic multiple-color μLED arrays all based on III-nitrides in a single wafer.SOLUTION: A method of producing a light emitting diode (LED) array comprises: forming a semiconductor layer (100) of group III nitride material; forming a dielectric mask layer (104) over the semiconductor layer, the dielectric mask layer having an array of holes (106) through the dielectric mask layer each exposing an area of the semiconductor layer; and growing an LED structure in each of the holes. The array of holes comprises a first set of holes (106a) each having a first cross-sectional area and a second set of holes (106b) each having a second cross-sectional area different from the first cross sectional area.SELECTED DRAWING: Figure 1b

Description

[Technical Field]

[0001] The present invention relates to light emitting diode (LED) arrays and methods for manufacturing LED arrays. The present invention particularly relates to arrays of LEDs on the micrometer scale. [Background technology]

[0002] The growing demand for brighter, higher-resolution, and more power-efficient display panels for smartwatches, smartphones, televisions, and AR / VR devices is driving the development of microdisplay technologies primarily comprised of microLEDs (μLEDs) with diameters on the scale of <100 μm. III-nitride μLEDs offer several unique features for display applications compared to organic light-emitting diodes (OLEDs) and liquid crystal displays (LCDs), as described, for example, in ZY Fan, JY Lin, and HX Jiang, J. Phys. D: Appl. Phys. 41, 094001 (2008); HX Jiang and JY Lin, Optical Express 21, A476 (2013); and J. Day, J. Li, DY C Lie, C. Bradford, JY Lin, and HX Jiang, Appl. Phys. Lett. 99, 031116 (2011). Unlike LCDs, III-nitride-based microdisplays, in which μLEDs are the primary component, are self-emissive. Displays using μLEDs exhibit high resolution, high efficiency, and high contrast ratios. OLEDs are typically operated at current densities several orders of magnitude lower than semiconductor LEDs to maintain reasonable lifetimes. As a result, the luminance of OLEDs is significantly lower, typically 3000 cd / m for full-color displays. 2 while III-nitride μLEDs are 10 5 cd / m 2They exhibit higher luminance than OLEDs. Notably, III-nitride-based μLEDs inherently exhibit longer operational lifetimes and chemical robustness compared to OLEDs. Therefore, III-nitride μLEDs are expected to potentially replace LCDs and OLEDs for high-resolution, high-brightness displays in a wide range of applications in the near future.

[0003] Two main approaches dominate the fabrication of microdisplays. The so-called pick-and-place technique has been proposed for manufacturing microdisplays (Vincent W. Lee, Nancy Twu, and Ioannis Kymissis, Display 6 / 16 (2016)). The main challenge with pick-and-place technology stems from the transfer yield of pixels (i.e., red, blue, and green microLEDs from different wafers). This also significantly increases the basic material cost or manufacturing time for constructing the microdisplay, thus posing major challenges in terms of reproducibility and scalability. High-resolution microdisplays, which are particularly important for smartwatches, smartphones, televisions, and AR / VR devices, require μLEDs with both smaller diameters, such as <10 μm, and smaller pitches, which tend to make pick-and-place technology difficult. In that case, direct integration of a microLED array with an array of transistors that provides active matrix switching has been used (HX Zhang, D. Massoubre, J. McKendry, Z. Gong, B. Guilhabert, C. Griffin, E. Gu, PE Jessop, JM Girkin, and MD Dawson, Optics Express 16, 9918-9926 (2008); ZJ Liu, WC Hong, KM Wong, and KM Lau, J. Display Tech. 9, 678-682 (2013); and CW Sun, CH Chao, HY Chen, YHChiu, WY Yeh, MH Wu, HHYen, and CC Liang, S ID Digest of Technical Papers, 1042-1045 (2011)). However, this method suffers from several significant drawbacks, as explained in GB1816455.8. Furthermore, due to the fundamental challenges in manufacturing a single multi-color wafer, such micro LED-based displays are based on either a single color or the use of down-conversion materials. Using the latter, multi-color emission can be achieved, but it suffers from energy loss due to the down-conversion process, extra costs and challenges for accurately positioning the down-conversion material, whose diameter must be smaller than that of the micro LED, and reliability issues with the down-conversion material. Therefore, neither image quality nor optical efficiency is satisfactory, which makes practical applications very difficult.

[0004] Therefore, there is a need for new approaches to fabricating bright and high-resolution microdisplays. It would be desirable to have an approach that involves the monolithic integration of different emission wavelength microLEDs, such as red, blue, and green microLEDs, as individual pixels in an array along with other electronic components. To achieve full-color microdisplays without the need for down-conversion materials, the epitaxial wafer should preferably have a monolithic multicolor LED structure with a control configuration. Clearly, achieving multicolor emission from a single wafer is a major challenge. Another major barrier to achieving multicolor emission from a single wafer exists. Currently, III-nitride-based LEDs (i.e., those containing InGaN / GaN quantum wells as the light-emitting region) are grown on c-plane substrates. Polar orientation results in strain-induced piezoelectric fields due to the large lattice mismatch between InGaN and GaN. As a result, LEDs suffer from reduced overlap between the electron and hole wavefunctions, leading to reduced quantum efficiency. This becomes even worse with increasing emission wavelengths, such as green LEDs, thus creating the so-called "green" gap, which means that the quantum efficiency of green LEDs is much lower than that of blue LEDs. The efficiency of III-nitride-based red LEDs is even lower than that of green LEDs. Furthermore, this strain also limits the incorporation of indium into GaN, which further increases the challenge of achieving longer wavelength emission. Therefore, at present, red LEDs are essentially based exclusively on AlGaInP. This makes it nearly impossible to monolithically integrate different emission wavelength micro-LED arrays (with red, blue, and green micro-LEDs as individual pixels) on a single wafer. Summary of the Invention [Problem to be solved by the invention]

[0005] Therefore, it is essential to develop a different approach for the growth and subsequent fabrication of monolithic multicolor μLED arrays based entirely on III-nitride in a single wafer to address all the above issues. Any new approach will have to be built on a scalable foundation to meet the industrial demands. [Means for solving the problem]

[0006] The present invention provides a method for fabricating a light emitting diode (LED) array, the method including the steps of forming a semiconductor layer of a III-nitride material, forming a dielectric mask layer overlying the semiconductor layer, the dielectric mask layer having an array of holes therethrough, each exposing an area of ​​the semiconductor layer, and growing an LED structure in each of the holes. The array can include a first set of holes having a first cross-sectional area and a second set of holes having a second cross-sectional area different from the first cross-sectional area.

[0007] The LED structure can be grown on the exposed areas of the semiconductor layer. Growth is entirely upward because growth does not occur from the dielectric sidewalls of the hole. The upward growth of the LED structure may therefore result in a layered LED structure, with each layer being generally flat or planar and of substantially constant thickness.

[0008] The semiconductor layer may be formed on a substrate of, for example, a III-nitride such as GaN, or of sapphire, silicon (Si), silicon carbide (SiC), or glass.

[0009] Growing an LED structure in each of the holes may include growing an n-type layer. Growing an LED structure in each of the holes may include growing a prelayer in each of the holes. Growing an LED structure in each of the holes may include growing at least one active layer in each of the holes. Growing an LED structure in each of the holes may include growing a p-type layer in each of the holes. The at least one active layer may be between the n-type layer and the p-type layer. The at least one active layer may include at least one quantum well layer, and may include multiple quantum well layers. These may be formed, for example, from InGaN or another suitable III-nitride material. The prelayer may be, for example, either an InGaN layer with a low indium content and a typical thickness of <100 nm, or an InGaN / GaN superlattice with a low indium content (the total thickness of the superlattice is typically less than 300 nm). The n-type and p-type layers may further be made of III-nitride materials such as GaN, InGaN, or AlGaN.

[0010] Each LED structure is grown in a respective one of the holes, so that each LED structure is formed from multiple layers that all have the same cross-sectional area equal to the cross-sectional area of ​​the hole in which the LED structure is grown.

[0011] At least one active layer may have an upper surface that is below the upper surface of the dielectric layer. If only one quantum well layer is present, the upper surface is the upper surface of that quantum well layer. If multiple quantum well layers are present, the upper surface is the upper surface of the uppermost quantum well layer. The upward direction may be defined as the direction of growth of the semiconductor layers and / or the LED structure.

[0012] Forming the dielectric mask layer may include growing a layer of dielectric material and etching an array of holes into the layer of dielectric material. Alternatively, the dielectric layer may be grown around areas where holes will later be formed, for example using a mask during growth of the dielectric layer.

[0013] The method may further include the step of etching each of the exposed areas of the semiconductor layer prior to the step of growing an LED structure in each of the holes. The semiconductor layer may provide a common electrical contact for all of the LED structures.

[0014] The semiconductor layer may be doped. For example, the semiconductor layer may include a single layer of n-type or p-type III-nitride material. Alternatively, the semiconductor layer may include a first sublayer and a second sublayer, with the heterointerface between the first and second sublayers configured to form a two-dimensional charge carrier gas at the heterointerface. The sublayers may form a buffer layer and a barrier layer. The two-dimensional charge carrier gas may be, for example, a two-dimensional electron gas (2DEG). A two-dimensional hole gas (2DHG) may also be used, but typically has a lower charge carrier density and / or mobility. For example, a heterostructure including a layer of GaN and a layer of AlGaN or InGaN, or more generally, two layers of AlGaN with different Al contents or two layers of InGaN with different In contents, can form a 2DEG at the interface between the two layers, and the electron density within the 2DEG varies depending on several factors, including the Al content of the AlGaN layer or the In content of the InGaN layer. It is well known that other III-nitride heterointerfaces can be used with the same effect.

[0015] The present invention further provides an LED array including a semiconductor layer and a dielectric layer having an array of LED structures extending beyond the semiconductor layer and through the dielectric layer. The LED structures may include a first set of LED structures each having a first cross-sectional area and a second set of LED structures each having a second cross-sectional area different from the first cross-sectional area. The first cross-sectional area may be at least 1% larger, or at least 2% larger, than the second cross-sectional area.

[0016] Each of the LED structures can fill the hole in which it is grown such that each LED structure has a cross-sectional area that is the same as the cross-sectional area of ​​the hole in which it is grown. Thus, the LED structures can include a first set of LED structures each having a first cross-sectional area and a second set of LED structures each having a second cross-sectional area that is different from the first cross-sectional area.

[0017] The first set of LED structures may each be configured to emit light having a first peak wavelength, and the second set of LED structures may each be configured to emit light having a second peak wavelength that is different from the first peak wavelength.

[0018] The array of holes may further include a third set of holes each having a third cross-sectional area different from the first and second cross-sectional areas.

[0019] The array of LED structures may include a third set of LED structures grown in a third set of holes, and the LED structures in the third set may each be configured to emit light having a third peak wavelength different from the first and second peak wavelengths.

[0020] For example, the three sets may include a red set, a green set, and a blue set of LED structures.

[0021] The LED structures may be arranged in multiple groups. The method may further include forming multiple contacts, each contact connected to a respective one of the groups of LED structures. Each of the groups of LED structures may be operable, i.e., switched on and off, independently of the other groups of LED structures. This may enable pixelated displays or lighting systems with variable color output to be fabricated, with each pixel formed from one of the groups of LED structures.

[0022] Each group of LED structures may include at least one LED structure from each set of LED structures, which may be used, for example, in a monochrome display or a white light illumination system.

[0023] Each group of LED structures may include only LED structures from one of the sets of LED structures, which may be used, for example, in a color display device.

[0024] The present invention further provides an LED array including a semiconductor layer, a dielectric layer having an array of holes extending beyond the semiconductor layer and extending through the dielectric layer, and an LED device formed in each of the holes, The array may include a first set of holes having a first cross-sectional area and a second set of holes having a second cross-sectional area different from the first cross-sectional area.

[0025] The method or LED array may further include, in any operable combination, any one or more features of the preferred embodiments of the invention hereinafter described with reference to the accompanying drawings. [Brief explanation of the drawings]

[0026] [Figure 1a] FIG. 1a shows an as-grown template formed in a process according to a first embodiment of the present invention. [Figure 1b] FIG. 1b illustrates the template of FIG. 1a with a masking pattern formed in a mask layer of the template. [Figure 1c] FIG. 1c shows the template of FIG. 1a with micro LEDs grown in holes in the mask layer. [Figure 1d] FIG. 1d shows the template of FIG. 1c with electrical contacts formed thereon. [Figure 2] FIG. 1d is a cross-sectional view through the LED structure of the template of FIG. [Figure 3] 10 is a schematic plan view of an LED array according to a further embodiment of the present invention. [Figure 4] 10 is a schematic plan view of an LED array according to a further embodiment of the present invention. [Figure 5a] FIG. 5a is a plot of the electrophotoluminescence of an individual LED in the array of FIG. 1c. [Figure 5b] FIG. 5b is a plot of the electrophotoluminescence of an individual LED in the array of FIG. 1c. [Figure 5c] FIG. 5c is a plot of the electrophotoluminescence of an individual LED in the array of FIG. 1c. DETAILED DESCRIPTION OF THE INVENTION

[0027] 1a, a III-nitride or other suitable semiconductor layer, such as a standard n-type GaN (n-GaN) layer 100, is initially grown on a substrate 102. The substrate 102 can be a GaN substrate or any foreign substrate, such as sapphire, silicon (Si), silicon carbide (SiC), or even glass. The GaN layer 100 can be grown by means of any standard GaN growth method, using either metalorganic vapor phase epitaxy (MOVPE) or molecular beam epitaxy (MBE), or any other suitable growth method. The resulting "as-grown n-GaN template" can have a thickness above 10 μm, but typically the thickness is in the range of 500 nm to 10 μm. Subsequently, a dielectric layer 104, such as silicon dioxide (SiO) or silicon nitride (SiN), or any other suitable dielectric material, is deposited on the n-GaN layer 100 by using PECVD or any other suitable deposition method. The thickness of the dielectric layer can be in the range of 20 nm to 500 μm.

[0028] Referring to FIG. 1b, an array of holes 106 is then formed in the dielectric layer 104. The holes 106 are typically on the micrometer scale and are therefore referred to as microholes. This can be done by photolithography followed by an etching process (which can be dry or wet etching). To form the microholes 106, the dielectric layer 104 is etched through its entire thickness, all the way down to the upper surface of the n-GaN layer 100. The microholes have different cross-sectional areas. Here, cross-sectional area refers to a cross section in a plane perpendicular to the general direction of hole etching and parallel to the plane of the upper surface of the substrate. The holes include at least two sets of holes, each with a different cross-sectional area. If the holes 106 are rounded, they can have a diameter of 1 μm to 500 μm, and the pitch distance, i.e., the distance between the centers of adjacent microholes, can be, for example, 1 μm to 500 μm. Further etching of the n-GaN layer 100 only in the micro-pore area can be performed using the remaining dielectric layer 104 as a mask. The n-GaN etch depth is Depending on the n-GaN layer thickness, the etching depth can be from zero (meaning no GaN etching) to 10 μm. Typically, the optimal etching method or conditions will be different for the n-GaN layer 100 than for the dielectric layer 104. For example, SF etching can be used to etch the dielectric layer 104 but will not etch the n-GaN layer 100. Therefore, etching all the way through the dielectric layer 104 and stopping at the top surface of the semiconductor layer 100 is simple to achieve. This, in turn, has benefits for the quality of the LED structure grown in the hole 106.

[0029] The holes 106 include a first set of holes 106a, a second set of holes 106b, and may further include a third set of holes 106c. Each set of holes 106a, 106b, and 106c may be arranged in a regular array, such as a rectangular array, a hexagonal array, or any other shaped array. The diameter of the first set of holes 106a is larger than the diameter of the second set of holes 106b, which in turn is larger than the diameter of the third set of holes 106c. The holes 106 are further arranged in groups 107a and 107b. Each group may include one or more holes 106. Each group of holes 107a and 107b may be disposed within a respective area of ​​the dielectric layer 104, as indicated by the dashed lines in FIG. 1b. For example, as shown in Figure lb, each of groups 107a, 107b includes one hole from each of sets 106a, 106b, 106c. Holes of different cross-sectional areas may be grouped together in different ways for different applications, as described in more detail below. Each group 107a, 107b of holes may be identical, including the same number of holes with the same cross-sectional area arranged in the same relative positions, or in other applications, the groups may be different.

[0030] The holes 106 are rounded in cross section in the embodiment shown, although other cross sections, such as oval or square, may be used.

[0031] Next, referring to FIG. 1c, a standard III-nitride LED structure is grown on the exposed areas of the GaN layer 100. However, because only discrete areas of the GaN layer 100 are exposed by the micro-holes 106 in the dielectric layer or mask, the LED structure is formed as an array of discrete LEDs 108 separated by the remaining portions of the dielectric layer 104 between the micro-holes 106. The LED structures 108 are grown by either MOVPE or MBE, or any other suitable growth method. Growth occurs upward from the exposed areas of the GaN (or other semiconductor) layer, not from the sidewalls of the holes 106. Thus, a layered LED structure can be built up inside each of the holes 106, with each layer being substantially flat or planar. The LED structure can include an n-GaN layer 110, an InGaN pre-layer, an active region 112, a thin p-type AlGaN layer (not shown) as a blocking layer, and then a final p-doped GaN layer 114. The active region 112 may include an InGaN-based multiple quantum well (MQW). An example LED structure is described in more detail below with reference to FIG. 2. As mentioned above, due to the dielectric mask 104, the LED structures can be grown only in the micropores 106, as shown in FIG. 1c, forming a μLED array. Each LED structure 108 will substantially fill the pore 106 in which it is grown. Therefore, the LED includes several—in the illustrated example, three—sets of LEDs with different cross-sectional areas and, therefore, different light-emitting characteristics. Here, cross-sectional area refers to the area in a plane perpendicular to the general direction of growth of the LED structure. This cross-sectional area will typically be substantially constant across the height of the LED structure 108. For example, there may be a first set of LED structures 108a with the largest cross-sectional area, a second set of LED structures 108b with a smaller cross-sectional area than the first set, and a third set of LED structures 108c with an even smaller cross-sectional area. Each set of LEDs is arranged in a regular array within the dielectric layer 104. For example, each set of LEDs may be arranged in a rectangular array or The LEDs may be arranged in any other shaped array. Rectangular arrays, or any other shaped arrays, may each have the same spacing, but be offset from one another, as shown in FIG. 1c, so that each LED from one set forms a group with one LED from each of the other sets. In other arrangements where different groupings of LEDs are required, different sets of LEDs may each be arranged in different types of arrays. Each group of LEDs may be identical, containing the same number of LEDs with the same cross-sectional area arranged in the same relative positions, or in other applications, the groups may be different.

[0032] It is important that the topmost layer of InGaN MQW 112 should not extend above the upper surface of the dielectric layer 104. Otherwise, this extension could cause shorting effects after the template is fabricated into the final μLED array. It is also important that the overgrown n-GaN 110 in each of the micro-hole areas directly contacts the n-GaN layer 100 in the unetched portion of the template below the dielectric mask 104, so that all of the individual μLEDs are electrically connected to each other by the n-GaN layer 100 in the unetched portion below the dielectric mask 104.

[0033] 1d, once the LED array structure is completed, further device fabrication is performed, including forming electrical contacts to the array. For example, a top contact layer 116 may be formed over the dielectric mask layer 104 and over the top p-GaN layer of the individual micro LED devices 108. The top contact layer 116 therefore forms a common p-contact for all of the LED devices 108. The top contact layer 116 may be formed from ITO or a Ni / Au alloy. An anode 118 may then be formed on the p-contact layer 116. For example, a portion of the dielectric layer 104 may be etched away, and then a portion of the LED structure over the etched dielectric layer section may be etched further down to the n-GaN, exposing an area 120 of the n-GaN 100, and a cathode 122 may be formed on the exposed area 120 of the n-GaN.

[0034] The microLED structure fabricated in this way exhibits several unique features that current microLEDs cannot possess. Under the same growth conditions, microLEDs with different diameters can exhibit different emission wavelengths. This is due to a combination of several mechanisms. First, the growth rate of InGaN / GaN multiple quantum wells (MQWs) as the light-emitting region in microLEDs grown in microholes depends on the microhole diameter. Different thicknesses of the InGaN MQWs result in different emission wavelengths. Second, the indium incorporation rate of the InGaN / GaN MQWs also depends on the microhole diameter. Different indium contents lead to differences in the emission wavelengths of the InGaN / GaN MQWs. Third, the strain relaxation of the InGaN / GaN MQWs along the lateral direction depends on the microhole diameter, resulting in differences in the emission wavelengths of the InGaN / GaN MQWs. Therefore, for example, under optimized growth conditions, three sets of microLEDs with three different diameters in each group can emit red, blue, and green light. If there are two micro LEDs with different diameters in each group, the micro LEDs can emit blue and yellow. If there are four micro LEDs with different diameters in each group, the micro LEDs can emit red, blue, green, and yellow. In each of these cases, white light can be produced from each group of LEDs. The color rendering index and color temperature can be adjusted by adding extra micro LEDs. For example, to increase the color temperature, two micro holes with the same diameter for long emission, such as green or yellow or red, can be included in each group along with two other micro holes with different diameters. To decrease the color temperature, two micro holes with the same diameter for short emission wavelengths, such as blue, can be included in each group along with two other micro holes with different diameters. The micropores may be included.

[0035] For example, as discussed below with reference to Figures 5a to 5c, experiments have shown that blue light is emitted in an array of μLEDs each with a diameter of 10 μm, green light is emitted in an array of μLEDs each with a diameter of 20 μm, and red light is emitted in an array of μLEDs each with a diameter of 30 μm. These microLEDs were obtained by growth in microholes with corresponding different diameters under identical conditions during the same growth progression.

[0036] The wavelengths of light, and therefore the cross-sectional areas, of the different sets of LEDs can be selected depending on the requirements of any particular application. While there will typically be significant differences between the wavelengths, and therefore the cross-sectional areas, of the different sets of LEDs, the photolithography process for forming holes 106 is very precise, so that differences in cross-sectional area, for example, down to 2%, or even 1%, for LEDs on the micron scale, can be produced in a controlled manner.

[0037] It will be appreciated that various modifications to the above-described embodiments are possible. For example, in one variation, the structure is reversed, with a p-GaN layer grown on a substrate and covered with a dielectric layer, and then the p-GaN layer of LED device 108 formed first, followed by a multiple quantum well layer and then an n-GaN layer. An n-contact layer is then formed above the top surface of the dielectric layer in place of the p-contact layer, and the positions of the anode and cathode are reversed.

[0038] 1a to 1d, the overgrown n-GaN 110 in the micro-holes 106 must match the n-GaN in the unetched portion of the n-GaN layer 100 below the dielectric mask 104 so that all individual μLEDs 108 are electrically connected to each other by the n-GaN layer 100. Instead of using the n-GaN 100 in the unetched portion below the dielectric mask 104 as the electrically connected channel, in a further embodiment, a III-nitride heterostructure with a two-dimensional electron gas (2DEG) at the heterojunction is used as the semiconductor layer instead of the n-GaN layer. In this embodiment, a standard AlGaN / GaN HEMT structure is used. The high-sheet-carry-density and high-electron-mobility electron gas (2DEG) formed at the interface between the AlGaN barrier and the GaN buffer of the high-electron-mobility transistor (HEMT) structure is used as the electrically connected channel.

[0039] To fabricate such a device, a standard AlGaN / GaN HEMT structure is first grown on a GaN substrate or any foreign substrate, such as sapphire, Si, SiC, or even glass, by means of any standard GaN growth technique, using either MOVPE or MBE, or any other epitaxial method. For example, a GaN layer forming a buffer layer can be grown on the substrate, and then an AlGaN layer forming a barrier layer is grown on the GaN layer. This structure is referred to herein as the "as-grown HEMT template." Subsequently, a dielectric layer, such as SiO2 or SiN, or any other dielectric material, with a thickness in the range of 2 nm to 500 μm, is deposited on the as-grown HEMT template using PECVD or any other suitable deposition method. The resulting structure will be the same as that shown in FIG. 1a, but with the HEMT structure instead of the n-GaN layer 100. Thereafter, by means of a photolithography method and then an etching process (which may be dry etching or wet etching), the dielectric layer is removed from the HEMT structure to form a micro-hole array in the dielectric layer. The as-grown HEMT is etched down to the surface, where the microhole diameter can be 1 μm to 500 μm and the pitch distance between adjacent hole centers can be in the range of 10 μm to 500 μm. Further etching of the as-grown HEMT within the microhole area can be performed using the remaining area of ​​the dielectric layer as a mask. The as-grown HEMT etch depth can be from zero (meaning no etching) to 10 μm, depending on the AlGaN barrier position of the as-grown HEMT template. However, typically, the etching will extend downward at least as far as the heterointerface between the two layers of the as-grown HEMT structure to provide good electrical contact between each of the LED structures and the 2DEG.

[0040] A standard III-nitride LED structure is then grown on the dielectric mask-patterned HEMT template characterized by microholes, e.g., by either MOVPE or MBE, as described above with reference to Figure 1c, or any other epitaxial technique, and contacts are provided, e.g., as described above with reference to Figure 1d. As with the embodiments of Figures 1a-1d, the key point is that InGaN The upper surface of the MQW 212 should be below the upper surface of the dielectric layer 204 to avoid short circuit effects after fabrication into the final μLED array.

[0041] 2, the LED structures in the LED arrays of FIGS. 1a-1d can have any suitable structure and will typically include multiple layers. In one example, the LED structures can include an n-GaN layer 210, an InGaN pre-layer 216 formed above the n-GaN layer 210, several InGaN quantum well layers 212 formed above the pre-layer 216, a p-doped blocking layer 218, e.g., p-AlGaN, and then a p-GaN layer 214. It will be appreciated that this structure can be varied in several ways. As noted above, the top surface of the uppermost one of the quantum well layers 212 is preferably below the top surface of the dielectric layer. It is even more preferred that the top surface of the blocking layer 218 is below the top surface of the dielectric layer.

[0042] 1a-1d, in the embodiment shown in these figures, several of the small group of LEDs 107a, 107b are treated as a larger group of LEDs, including the LEDs from each of the three sets of holes 106a, 106b, 106c, that are covered by a single contact layer 116. This results in a single area that can be turned on and off using contacts 118 to produce a white light source. However, it will be recognized that different sized LEDs and their switching contacts can be arranged in a variety of different ways depending on the application.

[0043] 3, in an arrangement in which an LED structure is arranged in a manner similar to that of FIGS. 1a-1d, i.e., with groups 307a, 307b of LEDs, each group having three LEDs 306a, 306b, 306c therein, each of which is of a different cross-sectional area and, therefore, a different emission spectrum and peak wavelength, each group 307a, 307b may have a respective contact layer area 316a, 316b extending above it so that separate contacts can be provided for each group of LEDs. This allows each group of LEDs to be switched on and off independently of the others. This may be useful, for example, in a monochrome display, such as a white-light display.

[0044] 4, each of the LEDs may have a separate contact layer 416a, 416b, 416c extending above it so that each LED may be activated independently of the others. This arrangement may be used, for example, to allow each pixel to be illuminated as red, green, or blue. It can be used in color displays.

[0045] Referring to Figures 5a, 5b, and 5c, arrays of micro LEDs were fabricated as described above with reference to Figures 1a through 1d, except that in each case, all of the LEDs in each array had the same diameter: one array with 10 μm diameter LEDs, one with 20 μm diameter LEDs, and one with 30 μm diameter LEDs. The electrophotoluminescence of each of the LED arrays was measured, with the results as shown. As can be seen, the 10 μm diameter LEDs have a peak wavelength at approximately 500 nm, and the light they emit appears blue; the 20 μm diameter LEDs have a peak wavelength at approximately 520 nm, and the light they emit appears green; and the 30 μm diameter LEDs have a peak wavelength at approximately 610 nm, and the light they emit appears red. It will be appreciated that the diameters of the different LEDs in a multicolor array, such as that of Figure 1c, can be adjusted to achieve different color combinations.

Claims

1. 1. A method for manufacturing a light emitting diode (LED) array, comprising: forming a semiconductor layer; forming a dielectric mask layer overlying the semiconductor layer; the dielectric mask layer having an array of holes therethrough, each hole exposing an area of ​​the semiconductor layer; the array of holes comprises a first set of holes each exposing a first area and a second set of holes each exposing a second area different from the first area; forming a growing an LED structure only in each of the holes, bounded by each of the areas exposed by the holes; A method for providing the above.

2. 10. The method of claim 1, The LED structure has at least one active layer between an n-type layer and a p-type layer.

3. 3. The method of claim 2, growing the LED structure only in the holes, growing the n-type layer over the exposed area of ​​the semiconductor layer; growing the at least one active layer above the n-type layer; growing the p-type layer over the at least one active layer; A method comprising:

4. 4. The method of claim 3, The method, wherein a top surface of the upper side of the at least one active layer is below a top surface of the dielectric mask layer.

5. 5. The method of claim 4, The method wherein an upper surface of the upper side of the p-type layer is below an upper surface of the dielectric mask layer.

6. 6. The method according to any one of claims 1 to 5, The method, wherein the first area is at least 1% larger than the second area.

7. 7. The method according to claim 1, wherein wherein each of the LED structures fills the hole in which it is grown alone such that the LED structures include a first set of LED structures each having a first cross-sectional area equal to the first area and a second set of LED structures each having a second cross-sectional area equal to the second area and different from the first cross-sectional area.

8. 8. The method of claim 7, the first set of LED structures are each configured to emit light having a first peak wavelength, and the second set of LED structures are each configured to emit light having a second peak wavelength that is different from the first peak wavelength.

9. 9. The method of claim 8, the array of holes further includes a third set of holes each exposing a third area different from the first area and the second area; the array of LED structures includes a third set of LED structures grown only in the third set of holes, the LED structures in the third set each configured to emit light having a third peak wavelength different from the first and second peak wavelengths. method.

10. 10. The method according to any one of claims 1 to 9, the LED structures are arranged in groups; the method further comprising forming a plurality of contacts, each of the contacts connected to a respective one of the groups of LED structures, such that each of the groups of LED structures can be activated independently from other groups of LED structures. method.

11. a semiconductor layer; a dielectric layer extending above the semiconductor layer; an array of LED structures extending through the dielectric layer; Equipped with The array of LED structures comprises: a first set of LED structures each having a first cross-sectional area, each formed only in a respective hole that penetrates the dielectric layer and exposes a respective first area of ​​the semiconductor layer, the first areas defining the first cross-sectional area; a second set of LED structures each having a second cross-sectional area different from the first cross-sectional area, each formed only in a respective hole extending through the dielectric layer to expose a respective second area of ​​the semiconductor layer, the second areas bounding the second cross-sectional area; and An LED array comprising:

12. 12. The LED array of claim 11, The second cross-sectional area is at least 1% larger than the first cross-sectional area.

13. 13. The LED array according to claim 11 or 12, an LED array, wherein the first set of LED structures are each configured to emit light having a first peak wavelength, and the second set of LED structures are each configured to emit light having a second peak wavelength that is different from the first peak wavelength.

14. 14. The LED array of claim 13, the LED structures further include a third set of LED structures each having a third cross-sectional area different from the first and second cross-sectional areas; the third set of LED structures are each configured to emit light having a third peak wavelength different from the first and second peak wavelengths.

15. 15. The LED array according to claim 11, The LED array, wherein the LED structures are arranged in a plurality of groups, the array further including a plurality of contacts, each of the contacts connected to a respective one of the groups of LED structures, such that each of the groups of LED structures can be activated independently of other groups of LED structures.

16. 16. The LED array according to claim 11, The LED array, wherein the LED structure has at least one active layer between an n-type layer and a p-type layer.

17. 17. The LED array of claim 16, an upper surface of the at least one active layer above the upper surface of the dielectric layer;

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