Charged particle beam control device and charged particle beam apparatus including same

The charged particle beam control device addresses temperature drift and magnetic interference by using a heater with parallel current resistors and controlled heat generation, ensuring stable electron beam focusing and trajectory during voltage changes.

JP7789959B2Active Publication Date: 2025-12-22HITACHI HIGH TECH CORP
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Patent Information

Application Number
JP2024567139
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2022-12-28
Publication Date
2025-12-22
Estimated Expiration
2042-12-28

AI Technical Summary

Technical Problem

Existing charged particle beam control devices face issues with temperature drift and magnetic field interference due to heater currents, affecting the focusing and trajectory of electron beams, particularly when changing acceleration voltages, which compromises measurement accuracy and system uptime.

Method used

A charged particle beam control device with a heater structure that generates heat parallel to the beam path, using resistors with opposite current directions to cancel out magnetic fields, and a control system to adjust heater currents based on acceleration voltage changes, maintaining consistent heat generation and beam stability.

Benefits of technology

This configuration suppresses temperature drift and minimizes magnetic interference, allowing for rapid voltage changes without stabilization wait times, enhancing device operating efficiency and accuracy.

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Abstract

The present disclosure suppresses temperature drift of a charged particle beam control device (magnetic field lens, magnetic field deflector, separator, etc.) constituting a charged particle beam apparatus, by means of a heater having a simple structure and through easy heater current control, and suppresses the influence on a charged particle beam due to the use of the heater. Accordingly, the present disclosure proposes a charged particle beam control device which generates a magnetic field acting on a charged particle beam passing through a beam path of a charged particle beam apparatus, and which comprises: a coil that generates a magnetic field when being supplied with electric current; and a heater for supplying heat to the coil. The heater is provided with resistors disposed so as to cause electric current to flow in parallel to the beam path. In the resistors, the directions of electric current at positions facing each other across the beam path are the same with each other (see FIG. 3).
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Citation Information

Patent Citations

  • Magnetic lens

    JP1982055043A

  • Electromagnetic lens

    JP2009176542A

  • particle optics

    JP2009517816A

  • Method of eliminating thermally induced beam drift in an electron beam separator

    US20190228944A1