Nozzle plate, droplet ejection head, droplet ejection device, and method of manufacturing the nozzle plate

Abstract

At a first surface Ba of a single-crystal silicon substrate B, a nozzle plate 110 has a plurality of nozzle channels 111 that have nozzles N for discharging droplets. The first surface Ba of the single-crystal silicon substrate B and a second surface Bb that is opposite the first surface Ba are {110} planes. This makes it possible to give opening parts of the nozzle channels 111 on the first surface Ba side a substantially parallelogram shape, making it possible to increase nozzle density.