Imaging device and light receiving element

Abstract

An imaging device according to one embodiment in the present disclosure comprises: a first semiconductor layer having, for each pixel, a photoelectric conversion unit and a charge storing unit that stores a signal charge generated in the photoelectric conversion unit; a second semiconductor layer that is laminated on the first semiconductor layer, has a three-dimensional structure, and has a first surface provided with a pixel transistor that reads the signal charge from the charge storing unit; and a through-wiring that directly connects the charge storing unit and a gate electrode of the pixel transistor.

Description

[Technical Field]

[0001] The present disclosure relates to an imaging device and a light receiving element having a three-dimensional structure. [Background technology]

[0002] For example, Patent Document 1 discloses an imaging element in which a first substrate having sensor pixels that perform photoelectric conversion and a second substrate having a readout circuit are stacked, and the first substrate and the second substrate are electrically connected to each other by through wiring provided in an interlayer insulating film. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 131965 Summary of the Invention

[0004] Incidentally, in an imaging element having a three-dimensional structure as described above, there is a demand for improving the area efficiency of the second substrate on which the readout circuit is formed.

[0005] It is desirable to provide an imaging device that allows for improved area efficiency.

[0006] In one embodiment of the present disclosure 1st The imaging device includes, for each pixel, a first semiconductor layer having a photoelectric conversion unit and a charge accumulation unit in which signal charges generated in the photoelectric conversion unit are accumulated; a second semiconductor layer having a three-dimensional structure stacked on the first semiconductor layer and having a first surface on which a pixel transistor that reads out signal charges from the charge accumulation unit is provided; and through wiring that directly connects the charge accumulation unit and the gate electrode of the pixel transistor. the second semiconductor layer further has a second surface opposite to the first surface and facing the first semiconductor layer, the gate electrode penetrates between the first surface and the second surface of the second semiconductor layer, the pixel transistor has a plurality of fins, and a first width of the through wiring penetrating between the plurality of fins is narrower than a second width of the through wiring extending above the gate electrode. . A second imaging device according to an embodiment of the present disclosure includes, for each pixel, a first semiconductor layer having a photoelectric conversion unit and a charge accumulation unit in which signal charge generated in the photoelectric conversion unit is accumulated; a second semiconductor layer stacked on the first semiconductor layer, having a three-dimensional structure, and having a first surface on which a pixel transistor that reads out the signal charge from the charge accumulation unit is provided; and a through-hole wiring that directly connects the charge accumulation unit to the gate electrode of the pixel transistor, wherein the pixel transistor has a gate-all-around structure, and the pixel transistor includes: a semiconductor layer provided on the first surface side of the second semiconductor layer and extending in a direction approximately parallel to the planar direction of the second semiconductor layer; a gate electrode covering a portion of the upper and lower surfaces and a pair of side surfaces of the semiconductor layer; and a first insulating film provided between the semiconductor layer and the gate electrode, covering the upper surface and a pair of side surfaces of the semiconductor layer and a second insulating film covering the lower surface of the semiconductor layer, wherein the second insulating film is wider than a third width in a direction perpendicular to the extension direction of the semiconductor layer.

[0007] In one embodiment of the present disclosure 1stThe light receiving element includes a first semiconductor layer having a photoelectric conversion section and a charge accumulation section in which signal charges generated in the photoelectric conversion section are accumulated, a second semiconductor layer having a three-dimensional structure stacked on the first semiconductor layer and having a first surface on which a transistor for reading out the signal charges from the charge accumulation section is provided, and a through wiring directly connecting the charge accumulation section and a gate electrode of the transistor. The second semiconductor layer further has a second surface opposite to the first surface and facing the first semiconductor layer, the gate electrode penetrates between the first surface and the second surface of the second semiconductor layer, the transistor has a plurality of fins, and a first width of the through wiring penetrating between the plurality of fins is narrower than a second width of the through wiring extending above the gate electrode. . A second light-receiving element according to one embodiment of the present disclosure includes a first semiconductor layer having a photoelectric conversion section and a charge accumulation section in which signal charges generated in the photoelectric conversion section are accumulated; a second semiconductor layer stacked on the first semiconductor layer, having a three-dimensional structure, and having a first surface on which a transistor for reading out the signal charges from the charge accumulation section is provided; and a through-hole interconnect directly connecting the charge accumulation section to a gate electrode of the transistor, wherein the transistor has a gate-all-around structure, and the transistor includes a semiconductor layer provided on the first surface side of the second semiconductor layer and extending in a direction approximately parallel to the planar direction of the second semiconductor layer, a gate electrode covering a portion of the upper and lower surfaces and a pair of side surfaces of the semiconductor layer, and a first insulating film provided between the semiconductor layer and the gate electrode, covering the upper surface and a pair of side surfaces of the semiconductor layer and a second insulating film covering the lower surface of the semiconductor layer, and the second insulating film is provided wider than a third width in a direction perpendicular to the extension direction of the semiconductor layer.

[0008] In one embodiment of the present disclosure 1st Imaging device and one embodiment 1st Light receiving element and a second imaging device according to an embodiment and a second light receiving element according to an embodiment. In this example, the charge storage section provided in the first semiconductor layer is directly connected to the pixel transistor with a three-dimensional structure provided in the second semiconductor layer by a through-hole wiring, thereby reducing the area required for forming components other than the pixel transistor within the surface of the second semiconductor layer. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a block diagram illustrating an example of a functional configuration of an imaging device according to a first embodiment of the present disclosure. [Figure 2] FIG. 2 is a plan view showing a schematic configuration of the imaging device shown in FIG. [Figure 3] FIG. 3 is a schematic diagram illustrating a cross-sectional configuration taken along line III-III′ shown in FIG. 2. [Figure 4] 2 is an equivalent circuit diagram of the pixel sharing unit shown in FIG. 1. [Figure 5] 10 is a diagram illustrating an example of a connection mode between a plurality of pixel sharing units and a plurality of vertical signal lines. FIG. [Figure 6] 4 is a cross-sectional view schematically illustrating an example of a specific configuration of the imaging device shown in FIG. 3. FIG. [Figure 7A] 7 is a schematic diagram illustrating an example of a planar configuration of a main part of a first substrate illustrated in FIG. 6. [Figure 7B] 7B is a schematic diagram showing the planar configuration of the pad section together with the main part of the first substrate shown in FIG. 7A. [Figure 8] 7 is a schematic diagram illustrating an example of a planar configuration of a second substrate (semiconductor layer) illustrated in FIG. 6. FIG. [Figure 9] 7 is a schematic diagram showing an example of a planar configuration of the pixel circuit and the main part of the first substrate together with the first wiring layer shown in FIG. 6. FIG. [Figure 10] 7 is a schematic diagram illustrating an example of a planar configuration of the first wiring layer and the second wiring layer illustrated in FIG. 6. FIG. [Figure 11] 7 is a schematic diagram illustrating an example of a planar configuration of the second wiring layer and the third wiring layer illustrated in FIG. 6. FIG. [Figure 12] 7 is a schematic diagram illustrating an example of a planar configuration of a third wiring layer and a fourth wiring layer illustrated in FIG. 6. FIG. [Figure 13] 2 is a schematic diagram illustrating a cross-sectional configuration of a main part of the imaging device shown in FIG. [Figure 14] 14 is a schematic diagram illustrating an example of a planar configuration of a second substrate illustrated in FIG. 13. FIG. [Figure 15] 14 is a schematic diagram illustrating a cross-sectional configuration of a main part of the imaging device shown in FIG. 13 as a comparative example. [Figure 16] 16 is a schematic diagram illustrating an example of a planar configuration of a second substrate illustrated in FIG. 15. FIG. [Figure 17A] 14 is a flowchart showing a manufacturing process for the main part of the imaging device shown in FIG. [Figure 17B] FIG. 17B is a schematic cross-sectional view showing a step subsequent to FIG. 17A. [Figure 17C] FIG. 17C is a schematic cross-sectional view showing a step subsequent to FIG. 17B. [Figure 17D] FIG. 17D is a schematic cross-sectional view showing a step subsequent to FIG. 17C. [Figure 18] 4 is a schematic diagram for explaining the path of an input signal to the imaging device shown in FIG. 3. FIG. [Figure 19] 4 is a schematic diagram for explaining a signal path of a pixel signal in the imaging device shown in FIG. 3. FIG. [Figure 20] 10 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a first modified example of the present disclosure. FIG. [Figure 21] 10 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a second modification of the present disclosure. FIG. [Figure 22] 11 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a third modification of the present disclosure. FIG. [Figure 23] FIG. 11 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a fourth modification of the present disclosure. [Figure 24] FIG. 11 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a fifth modification of the present disclosure. [Figure 25] 25 is a schematic diagram illustrating an example of a planar configuration of a second substrate of the imaging device shown in FIG. 24. FIG. [Figure 26] FIG. 13 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a sixth modification of the present disclosure. [Figure 27] FIG. 13 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a seventh modification of the present disclosure. [Figure 28A] 13 is a flowchart illustrating an example of a manufacturing process according to Modification 8 of the present disclosure. [Figure 28B] FIG. 28B is a schematic cross-sectional view showing a step subsequent to FIG. 28A. [Figure 28C] FIG. 28C is a schematic cross-sectional view showing a step subsequent to FIG. 28B. [Figure 28D] FIG. 28D is a schematic cross-sectional view showing a step subsequent to FIG. 28C. [Figure 28E] FIG. 28B is a schematic cross-sectional view showing the step following FIG. 28D. [Figure 28F] FIG. 28B is a schematic cross-sectional view showing the step following FIG. 28E. [Figure 29A] 13 is a flowchart illustrating another example of a manufacturing process according to the eighth modification of the present disclosure. [Figure 29B] FIG. 29B is a schematic cross-sectional view showing a step subsequent to FIG. 29A. [Figure 29C] FIG. 29C is a schematic cross-sectional view showing a step subsequent to FIG. 29B. [Figure 29D] FIG. 29B is a schematic cross-sectional view showing a step subsequent to FIG. 29C. [Figure 30A] 13 is a flowchart illustrating another example of a manufacturing process according to the eighth modification of the present disclosure. [Figure 30B] FIG. 30B is a schematic cross-sectional view showing a step subsequent to FIG. 30A. [Figure 30C] FIG. 30C is a schematic cross-sectional view showing a step subsequent to FIG. 30B. [Figure 30D] FIG. 30D is a schematic cross-sectional view showing a step subsequent to FIG. 30C. [Figure 31A]13 is a flowchart illustrating an example of a manufacturing process according to Modification 8 of the present disclosure. [Figure 31B] FIG. 31B is a schematic cross-sectional view showing a step subsequent to FIG. 31A. [Figure 31C] FIG. 31C is a schematic cross-sectional view showing a step subsequent to FIG. 31B. [Figure 31D] FIG. 31D is a schematic cross-sectional view showing a step subsequent to FIG. 31C. [Figure 32] FIG. 10 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a second embodiment of the present disclosure. [Figure 33] FIG. 33 is a schematic diagram illustrating an example of the planar configuration of the imaging device illustrated in FIG. 32. [Figure 34] 33 is an enlarged view illustrating the structure of a main part of the imaging device shown in FIG. 32. FIG. [Figure 35A] 33 is a flowchart illustrating an example of a manufacturing process for the main part of the imaging device shown in FIG. 32. [Figure 35B] FIG. 35B is a schematic cross-sectional view showing a step subsequent to FIG. 35A. [Figure 35C] FIG. 35C is a schematic cross-sectional view showing a step subsequent to FIG. 35B. [Figure 35D] FIG. 35B is a schematic cross-sectional view showing a step subsequent to FIG. 35C. [Figure 35E] FIG. 35B is a schematic cross-sectional view showing the step following FIG. 35D. [Figure 35F] FIG. 35B is a schematic cross-sectional view showing the step following FIG. 35E. [Figure 35G] FIG. 35B is a schematic cross-sectional view showing the step following FIG. 35F. [Figure 35H] FIG. 35B is a schematic cross-sectional view showing the step following FIG. 35G. [Figure 35I] FIG. 35C is a schematic cross-sectional view showing the step following FIG. 35H. [Figure 36] 34 is a schematic diagram illustrating a cross-sectional configuration of a main part of the imaging device shown in FIG. 33 as a comparative example. FIG. [Figure 37] FIG. 13 is a schematic diagram illustrating a cross-sectional configuration of a main part of an imaging device according to a ninth modification of the present disclosure. [Figure 38A] 38 is a flowchart illustrating an example of a manufacturing process for the main part of the imaging device shown in FIG. 37. [Figure 38B]FIG. 38B is a schematic cross-sectional view showing a step subsequent to FIG. 38A. [Figure 38C] FIG. 38C is a schematic cross-sectional view showing a step subsequent to FIG. 38B. [Figure 38D] FIG. 38D is a schematic cross-sectional view showing a step subsequent to FIG. 38C. [Figure 38E] FIG. 38B is a schematic cross-sectional view showing the step following FIG. 38D. [Figure 39] FIG. 23 is a schematic diagram illustrating an example of a cross-sectional configuration of a main part of an imaging device according to a tenth modification of the present disclosure. [Figure 40] 40 is an enlarged view illustrating the structure of a main part of the imaging device shown in FIG. 39. [Figure 41A] 40 is a flowchart illustrating an example of a manufacturing process for the main part of the imaging device shown in FIG. 39. [Figure 41B] FIG. 41B is a schematic cross-sectional view showing a step subsequent to FIG. 41A. [Figure 41C] FIG. 41C is a schematic cross-sectional view showing a step subsequent to FIG. 41B. [Figure 41D] FIG. 41D is a schematic cross-sectional view showing a step subsequent to FIG. 41C. [Figure 41E] FIG. 41B is a schematic cross-sectional view showing the step following FIG. 41D. [Figure 42] 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 10 of the present disclosure. FIG. [Figure 43] 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 10 of the present disclosure. FIG. [Figure 44] FIG. 22 is a schematic diagram illustrating an example of a planar configuration of an imaging device according to an eleventh modification of the present disclosure. [Figure 45A] 10 is a flowchart illustrating an example of a manufacturing process for a main part of the imaging device of the present disclosure. [Figure 45B] FIG. 45B is a schematic cross-sectional view showing a step subsequent to FIG. 45A. [Figure 45C] FIG. 45C is a schematic cross-sectional view showing a step subsequent to FIG. 45B. [Figure 45D] FIG. 45B is a schematic cross-sectional view showing the step following FIG. 45C. [Figure 45E] FIG. 45B is a schematic cross-sectional view showing the step following FIG. 45D. [Figure 45F]FIG. 45B is a schematic cross-sectional view showing the step following FIG. 45E. [Figure 45G] FIG. 45B is a schematic cross-sectional view showing the step following FIG. 45F. [Figure 45H] FIG. 45B is a schematic cross-sectional view showing the step following FIG. 45G. [Figure 45I] FIG. 45B is a schematic cross-sectional view showing the step following FIG. 45H. [Figure 45J] FIG. 45I is a schematic cross-sectional view showing a step subsequent to FIG. 45I. [Figure 46] FIG. 22 is a schematic diagram illustrating an example of a planar configuration of an imaging device according to an eleventh modification of the present disclosure. [Figure 47] FIG. 22 is a schematic diagram illustrating another example of the planar configuration of an imaging device according to Modification 11 of the present disclosure. [Figure 48A] 23 is a flowchart illustrating an example of a manufacturing process of another example of an imaging device according to Modification 11 of the present disclosure. [Figure 48B] FIG. 48B is a schematic cross-sectional view showing a step subsequent to FIG. 48A. [Figure 48C] FIG. 48C is a schematic cross-sectional view showing a step subsequent to FIG. 48B. [Figure 49] 9 is a schematic diagram illustrating a modified example of the planar configuration of the second substrate (semiconductor layer) shown in FIG. 8. FIG. [Figure 50] 50 is a schematic diagram showing the planar configuration of the pixel circuit shown in FIG. 49 as well as the main parts of the first wiring layer and the first substrate. [Figure 51] 51 is a schematic diagram showing an example of the planar configuration of the second wiring layer together with the first wiring layer shown in FIG. 50. FIG. [Figure 52] 52 is a schematic diagram showing an example of the planar configuration of the third wiring layer together with the second wiring layer shown in FIG. 51. FIG. [Figure 53] 53 is a schematic diagram showing an example of the planar configuration of the fourth wiring layer together with the third wiring layer shown in FIG. 52. FIG. [Figure 54] FIG. 7B is a schematic diagram illustrating a modified example of the planar configuration of the first substrate shown in FIG. 7A. [Figure 55] 55 is a schematic diagram illustrating an example of a planar configuration of a second substrate (semiconductor layer) laminated on the first substrate shown in FIG. 54. FIG. [Figure 56]FIG. 56 is a schematic diagram illustrating an example of the planar configuration of a first wiring layer together with the pixel circuit illustrated in FIG. 55. [Figure 57] FIG. 57 is a schematic diagram showing an example of the planar configuration of the second wiring layer together with the first wiring layer shown in FIG. 56. [Figure 58] FIG. 58 is a schematic diagram showing an example of the planar configuration of the third wiring layer together with the second wiring layer shown in FIG. 57. [Figure 59] FIG. 59 is a schematic diagram showing an example of the planar configuration of the fourth wiring layer together with the third wiring layer shown in FIG. 58. [Figure 60] FIG. 55 is a schematic diagram illustrating another example of the planar configuration of the first substrate shown in FIG. 54. [Figure 61] 61 is a schematic diagram showing an example of a planar configuration of a second substrate (semiconductor layer) laminated on the first substrate shown in FIG. 60. FIG. [Figure 62] FIG. 62 is a schematic diagram showing an example of the planar configuration of the first wiring layer together with the pixel circuit shown in FIG. 61. [Figure 63] FIG. 63 is a schematic diagram showing an example of the planar configuration of the second wiring layer together with the first wiring layer shown in FIG. 62. [Figure 64] FIG. 64 is a schematic diagram showing an example of the planar configuration of the third wiring layer together with the second wiring layer shown in FIG. 63. [Figure 65] FIG. 65 is a schematic diagram showing an example of the planar configuration of the fourth wiring layer together with the third wiring layer shown in FIG. 64. [Figure 66] 4 is a cross-sectional view illustrating another example of the imaging device illustrated in FIG. 3. FIG. [Figure 67] FIG. 67 is a schematic diagram for explaining the path of an input signal to the imaging device shown in FIG. 66. [Figure 68] FIG. 67 is a schematic diagram for explaining the signal paths of pixel signals in the imaging device shown in FIG. 66. [Figure 69] 7 is a cross-sectional view illustrating another example of the imaging device illustrated in FIG. 6. FIG. [Figure 70] FIG. 5 is a diagram illustrating another example of the equivalent circuit illustrated in FIG. [Figure 71] FIG. 7B is a schematic plan view illustrating another example of the pixel separating portion shown in FIG. 7A etc. [Figure 72]FIG. 23 is a schematic diagram illustrating an example of a cross-sectional configuration of a main part of an imaging device according to a nineteenth modification of the present disclosure. [Figure 73] FIG. 73 is a schematic diagram illustrating an example of the planar configuration of the imaging device shown in FIG. 72. [Figure 74A] 73 is a flowchart showing an example of a manufacturing process for the main part of the imaging device shown in FIG. 72. [Figure 74B] FIG. 74B is a schematic cross-sectional view showing a step subsequent to FIG. 74A. [Figure 74C] FIG. 74C is a schematic cross-sectional view showing a step subsequent to FIG. 74B. [Fig. 74D] FIG. 74D is a schematic cross-sectional view showing a step subsequent to FIG. 74C. [Figure 74E] FIG. 74B is a schematic cross-sectional view showing the step following FIG. 74D. [Figure 74F] FIG. 74B is a schematic cross-sectional view showing the step following FIG. 74E. [Figure 75A] 73 is a flowchart illustrating another example of the manufacturing process for the main part of the imaging device shown in FIG. 72. [Figure 75B] FIG. 75B is a schematic cross-sectional view showing a step subsequent to FIG. 75A. [Figure 75C] FIG. 75C is a schematic cross-sectional view showing a step subsequent to FIG. 75B. [Figure 75D] FIG. 75B is a schematic cross-sectional view showing the step following FIG. 75C. [Figure 75E] FIG. 75B is a schematic cross-sectional view showing the step following FIG. 75D. [Figure 75F] FIG. 75B is a schematic cross-sectional view showing the step following FIG. 75E. [Figure 76] FIG. 26 is a schematic diagram illustrating an example of a cross-sectional configuration of a main part of an imaging device according to Modification 20 of the present disclosure. [Figure 77] FIG. 77 is a diagram illustrating an example of an equivalent circuit of the imaging device shown in FIG. 76. [Figure 78A] 77 is a flowchart showing an example of a manufacturing process for the main part of the imaging device shown in FIG. 76. [Figure 78B] FIG. 78B is a schematic cross-sectional view showing a step subsequent to FIG. 78A. [Figure 78C] FIG. 78C is a schematic cross-sectional view showing the step following FIG. 78B. [Figure 78D] FIG. 78D is a schematic cross-sectional view showing a step subsequent to FIG. 78C. [Figure 79] FIG. 26 is a schematic diagram illustrating another example of the cross-sectional configuration of the main part of the imaging device according to Modification 20 of the present disclosure. [Figure 80] FIG. 26 is a schematic diagram illustrating another example of the cross-sectional configuration of the main part of the imaging device according to Modification 20 of the present disclosure. [Figure 81] FIG. 23 is a schematic diagram illustrating an example of a cross-sectional configuration of a main part of an imaging device according to Modification 21 of the present disclosure. [Figure 82] FIG. 82 is a schematic diagram illustrating an example of the planar configuration of the imaging device shown in FIG. 81. [Figure 83A] 82 is a flowchart showing an example of a manufacturing process for the main part of the imaging device shown in FIG. 81. [Figure 83B] FIG. 83B is a schematic cross-sectional view showing the step following FIG. 83A. [Figure 83C] FIG. 83C is a schematic cross-sectional view showing the step following FIG. 83B. [Figure 83D] FIG. 83D is a schematic cross-sectional view showing the step following FIG. 83C. [Figure 83E] FIG. 83B is a schematic cross-sectional view showing the step following FIG. 83D. [Figure 84] FIG. 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 21 of the present disclosure. [Figure 85] FIG. 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 21 of the present disclosure. [Figure 86] FIG. 82 is a schematic diagram illustrating another example of the planar configuration of the imaging device shown in FIG. 81. [Figure 87] FIG. 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 21 of the present disclosure. [Figure 88] FIG. 22 is a schematic diagram illustrating an example of a cross-sectional configuration of a main part of an imaging device according to Modification 22 of the present disclosure. [Figure 89] FIG. 89 is a diagram illustrating an example of an equivalent circuit of the imaging device shown in FIG. 88. [Figure 90A] 89 is a flowchart showing an example of a manufacturing process for the main part of the imaging device shown in FIG. 88. [Figure 90B] FIG. 90B is a schematic cross-sectional view showing a step subsequent to FIG. 90A. [Figure 90C]FIG. 90C is a schematic cross-sectional view showing a step subsequent to FIG. 90B. [Figure 90D] FIG. 90B is a schematic cross-sectional view showing the step following FIG. 90C. [Figure 90E] FIG. 90B is a schematic cross-sectional view showing the step following FIG. 90D. [Figure 90F] FIG. 90C is a schematic cross-sectional view showing the step following FIG. 90E. [Figure 90G] FIG. 90C is a schematic cross-sectional view showing the step following FIG. 90F. [Figure 91] FIG. 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 22 of the present disclosure. [Figure 92] FIG. 92 is a diagram illustrating an example of an equivalent circuit of the imaging device shown in FIG. 91. [Figure 93] FIG. 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 22 of the present disclosure. [Figure 94] FIG. 94 is a diagram illustrating an example of an equivalent circuit of the imaging device shown in FIG. 93. [Figure 95A] 94 is a flowchart showing an example of a manufacturing process for the main part of the imaging device shown in FIG. 93. [Figure 95B] FIG. 95B is a schematic cross-sectional view showing a step subsequent to FIG. 95A. [Figure 95C] FIG. 95C is a schematic cross-sectional view showing a step subsequent to FIG. 95B. [Figure 95D] FIG. 95B is a schematic cross-sectional view showing the step following FIG. 95C. [Figure 95E] FIG. 95B is a schematic cross-sectional view showing the step following FIG. 95D. [Figure 95F] FIG. 95B is a schematic cross-sectional view showing the step following FIG. 95E. [Figure 95G] FIG. 95C is a schematic cross-sectional view showing the step following FIG. 95F. [Figure 96] FIG. 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 22 of the present disclosure. [Figure 97] FIG. 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 22 of the present disclosure. [Figure 98] FIG. 23 is a schematic diagram illustrating another example of a cross-sectional configuration of a main part of an imaging device according to Modification 22 of the present disclosure. [Figure 99]FIG. 1 is a diagram illustrating an example of a schematic configuration of an imaging system including an imaging device according to the above embodiment and its modified example. [Figure 100] FIG. 89 is a diagram illustrating an example of an imaging procedure of the imaging system shown in FIG. 88. [Figure 101] 1 is a block diagram showing an example of a schematic configuration of a vehicle control system; [Figure 102] FIG. 2 is an explanatory diagram showing an example of the installation positions of an outside-vehicle information detection unit and an imaging unit. [Figure 103] FIG. 1 is a diagram illustrating an example of a schematic configuration of an endoscopic surgery system. [Figure 104] FIG. 2 is a block diagram showing an example of the functional configuration of a camera head and a CCU. DETAILED DESCRIPTION OF THE INVENTION

[0010] An embodiment of the present disclosure will be described in detail below with reference to the drawings. The following description is a specific example of the present disclosure, and the present disclosure is not limited to the following aspects. Furthermore, the present disclosure is not limited to the arrangement, dimensions, dimensional ratios, etc. of each component shown in each drawing. The order of description is as follows. 1. First embodiment (Example 1 of an imaging device having a stacked structure of three substrates, with a floating diffusion and an amplifying transistor directly connected by a through-wiring) 2. Variations 2-1. Modification 1 (another example of the configuration on the first substrate side) 2-2. Modification 2 (Another Example 1 of the Pixel Transistor Structure) 2-3. Modification 3 (Another Example 2 of the Pixel Transistor Structure) 2-4. Modification 4 (another example of a method for connecting a floating diffusion and an amplifying transistor) 2-5. Modification 5 (another example of a method for connecting a floating diffusion and an amplifying transistor) 2-6. Modification 6 (another example of the structure of the through wiring connecting the floating diffusion and the amplification transistor) 2-7. Modification 7 (another example of a method for connecting transistors in a pixel circuit) 2-8. Modification 8 (Example of a manufacturing method for a transistor having a fin structure) 3. Second embodiment (Example 2 of an imaging device having a stacked structure of three substrates, with a floating diffusion and an amplifying transistor directly connected by a through-wiring) 4. Variations 4-1. Modification 9 (Another Example 1 of the Amplifying Transistor Structure) 4-2. Modification 10 (Another Example 2 of the Amplifying Transistor Structure) 4-3. Modification 11 (Another Example 3 of the Amplifying Transistor Structure) 5. Modification 12 (Planar Configuration Example 1) 6. Modification 13 (Planar Configuration Example 2) 7. Modification 14 (Planar Configuration Example 3) 8. Modification 15 (Example in which a contact portion between substrates is provided in the center of the pixel array portion) 9. Modification 16 (Example with Planar-Type Transfer Transistor) 10. Modification 17 (Example in which one pixel is connected to one pixel circuit) 11. Modification 18 (Configuration Example of Pixel Separation Unit) 12. Modification 19 (Another Example of a Method for Connecting a Floating Diffusion and an Amplification Transistor) 13. Modification 20 (Example in which the floating diffusion and the reset transistor are directly connected by a through-wiring) 14. Modification 21 (Example of electrically connecting transistors of the same potential using polysilicon wiring) 15. Modification 22 (Example in which multiple transistors constituting a pixel circuit are formed on two stacked semiconductor layers) 16. Application example (imaging system) 17.Application Examples

[0011] <1. First embodiment> [Functional configuration of imaging device 1] FIG. 1 is a block diagram showing an example of a functional configuration of an imaging device (imaging device 1) according to a first embodiment of the present disclosure.

[0012] The imaging device 1 in FIG. 1 includes, for example, an input section 510A, a row driver section 520, a timing control section 530, a pixel array section 540, a column signal processing section 550, an image signal processing section 560, and an output section 510B.

[0013] In the pixel array section 540, pixels 541 are repeatedly arranged in an array. More specifically, pixel-sharing units 539 each including a plurality of pixels are repeating units, and these repeating units are repeatedly arranged in an array having a row direction and a column direction. Note that, for convenience, the row direction may be referred to as the H direction, and the column direction perpendicular to the row direction may be referred to as the V direction in this specification. In the example of FIG. 1, one pixel-sharing unit 539 includes four pixels (pixels 541A, 541B, 541C, and 541D). Each of the pixels 541A, 541B, 541C, and 541D has a photodiode PD (shown in FIG. 6, etc., described later). The pixel-sharing unit 539 is a unit that shares one pixel circuit (pixel circuit 210 in FIG. 4, described later). In other words, each of the four pixels (pixels 541A, 541B, 541C, and 541D) has one pixel circuit (pixel circuit 210, described later). By operating this pixel circuit in a time-division manner, pixel signals from each of the pixels 541A, 541B, 541C, and 541D are sequentially read out. The pixels 541A, 541B, 541C, and 541D are arranged, for example, in two rows and two columns. The pixel array section 540 is provided with the pixels 541A, 541B, 541C, and 541D, as well as multiple row drive signal lines 542 and multiple vertical signal lines (column readout lines) 543. The row drive signal line 542 drives the pixels 541 included in each of multiple pixel-sharing units 539 arranged side by side in the row direction in the pixel array section 540. The row drive signal line 542 drives each pixel arranged side by side in the row direction within the pixel-sharing unit 539. As will be described in detail later with reference to FIG. 4, each pixel-sharing unit 539 is provided with multiple transistors. To drive each of these multiple transistors, multiple row drive signal lines 542 are connected to one pixel-sharing unit 539. The pixel sharing unit 539 is connected to the vertical signal line (column readout line) 543. Pixel signals are read out via the vertical signal line (column readout line) 543 from each of the pixels 541A, 541B, 541C, and 541D included in the pixel sharing unit 539.

[0014] The row driving unit 520 includes, for example, a row address control unit that determines the position of the row for pixel driving, in other words, a row decoder unit, and a row driving circuit unit that generates signals for driving the pixels 541A, 541B, 541C, and 541D.

[0015] The column signal processing unit 550 includes, for example, a load circuit unit that is connected to the vertical signal line 543 and forms a source follower circuit together with the pixels 541A, 541B, 541C, and 541D (pixel sharing units 539). The column signal processing unit 550 may include an amplifier circuit unit that amplifies the signal read out from the pixel sharing unit 539 via the vertical signal line 543. The column signal processing unit 550 may include a noise processing unit. The noise processing unit removes the system noise level from the signal read out from the pixel sharing unit 539 as a result of photoelectric conversion, for example.

[0016] The column signal processing unit 550 includes, for example, an analog-to-digital converter (ADC). The analog-to-digital converter converts the signal read from the pixel shared unit 539 or the analog signal that has undergone the noise processing into a digital signal. The ADC includes, for example, a comparator unit and a counter unit. The comparator unit compares the analog signal to be converted with a reference signal to be compared with the analog signal. The counter unit measures the time until the comparison result in the comparator unit is inverted. The column signal processing unit 550 may also include a horizontal scanning circuit unit that controls scanning of the readout columns.

[0017] The timing control section 530 supplies signals for controlling timing to the row driving section 520 and the column signal processing section 550 based on the reference clock signal and timing control signal input to the device.

[0018] The image signal processing unit 560 is a circuit that performs various signal processing operations on data obtained as a result of photoelectric conversion, in other words, data obtained as a result of the imaging operation in the imaging device 1. The image signal processing unit 560 includes, for example, an image signal processing circuit unit and a data holding unit. The image signal processing unit 560 may also include a processor unit.

[0019] One example of signal processing executed by the image signal processing unit 560 is tone curve correction processing, which increases the gradation of AD converted imaging data when the data is of a dark subject, and decreases the gradation when the data is of a bright subject. In this case, it is desirable to store in advance in the data storage unit of the image signal processing unit 560 characteristic data of the tone curve based on which the gradation of the imaging data is to be corrected.

[0020] The input unit 510A is for inputting, for example, the above-mentioned reference clock signal, timing control signal, characteristic data, etc. from outside the device to the imaging device 1. The timing control signal is, for example, a vertical synchronization signal, a horizontal synchronization signal, etc. The characteristic data is, for example, for storage in a data holding unit of the image signal processing unit 560. The input unit 510A includes, for example, an input terminal 511, an input circuit unit 512, an input amplitude changing unit 513, an input data conversion circuit unit 514, and a power supply unit (not shown).

[0021] The input terminal 511 is an external terminal for inputting data. The input circuit unit 512 is for inputting a signal input to the input terminal 511 into the imaging device 1. The input amplitude change unit 513 changes the amplitude of the signal input by the input circuit unit 512 to an amplitude that is easily usable inside the imaging device 1. The input data conversion circuit unit 514 changes the arrangement of the data string of the input data. The input data conversion circuit unit 514 is configured, for example, by a serial-parallel conversion circuit. This serial-parallel conversion circuit converts a serial signal received as input data into a parallel signal. Note that the input amplitude change unit 513 and the input data conversion circuit unit 514 may be omitted from the input unit 510A. The power supply unit supplies power set to various voltages required inside the imaging device 1 based on power supplied from an external source to the imaging device 1.

[0022] When the imaging device 1 is connected to an external memory device, the input unit 510A may be provided with a memory interface circuit that receives data from the external memory device, such as a flash memory, an SRAM, or a DRAM.

[0023] Output unit 510B outputs image data to the outside of the device. This image data is, for example, image data captured by imaging device 1 and image data that has been signal-processed by image signal processing unit 560. Output unit 510B includes, for example, output data conversion circuit unit 515, output amplitude change unit 516, output circuit unit 517, and output terminal 518.

[0024] The output data conversion circuit unit 515 is configured with, for example, a parallel-serial conversion circuit, and converts parallel signals used inside the imaging device 1 into serial signals. The output amplitude change unit 516 changes the amplitude of the signals used inside the imaging device 1. Signals with changed amplitudes are easier to use in external devices connected to the outside of the imaging device 1. The output circuit unit 517 is a circuit that outputs data from inside the imaging device 1 to outside the device, and the output circuit unit 517 drives wiring outside the imaging device 1 connected to an output terminal 518. Data is output from the imaging device 1 to outside the device through the output terminal 518. The output data conversion circuit unit 515 and the output amplitude change unit 516 may be omitted from the output unit 510B.

[0025] When the imaging device 1 is connected to an external memory device, the output unit 510B may be provided with a memory interface circuit that outputs data to the external memory device, such as a flash memory, an SRAM, or a DRAM.

[0026] [Schematic configuration of imaging device 1] 2 and 3 show an example of a schematic configuration of the imaging device 1. The imaging device 1 includes three substrates (a first substrate 100, a second substrate 200, and a third substrate 300). FIG. 2 shows a schematic planar configuration of each of the first substrate 100, the second substrate 200, and the third substrate 300, and FIG. 3 shows a schematic cross-sectional configuration of the first substrate 100, the second substrate 200, and the third substrate 300 stacked on top of each other. FIG. 3 corresponds to the cross-sectional configuration taken along line III-III′ shown in FIG. 2. The imaging device 1 is a three-dimensional imaging device formed by bonding together three substrates (the first substrate 100, the second substrate 200, and the third substrate 300). The first substrate 100 includes a semiconductor layer 100S and a wiring layer 100T. The second substrate 200 includes a semiconductor layer 200S and a wiring layer 200T. The third substrate 300 includes a semiconductor layer 300S and a wiring layer 300T. Here, for convenience, the combination of the wiring included in each of the first substrate 100, the second substrate 200, and the third substrate 300 and the surrounding interlayer insulating film is referred to as the wiring layer (100T, 200T, 300T) provided on each substrate (first substrate 100, second substrate 200, and third substrate 300). The first substrate 100, the second substrate 200, and the third substrate 300 are stacked in this order, with the semiconductor layer 100S, the wiring layer 100T, the semiconductor layer 200S, the wiring layer 200T, the wiring layer 300T, and the semiconductor layer 300S arranged in this order along the stacking direction. The specific configurations of the first substrate 100, the second substrate 200, and the third substrate 300 will be described later. The arrows in FIG. 3 indicate the direction of incidence of light L into the imaging device 1. For convenience, in the following cross-sectional views, the light incident side of the imaging device 1 may be referred to as "bottom," "lower side," or "bottom," and the side opposite the light incident side may be referred to as "top," "upper side," or "upper." Furthermore, for convenience, in the present specification, with respect to a substrate having a semiconductor layer and a wiring layer, the wiring layer side may be referred to as the front surface, and the semiconductor layer side may be referred to as the back surface. The description in the specification is not limited to the above terms. The imaging device 1 is, for example, a back-illuminated imaging device in which light is incident from the back surface side of the first substrate 100 having a photodiode.

[0027] The pixel array section 540 and the pixel-shared unit 539 included in the pixel array section 540 are both configured using both the first substrate 100 and the second substrate 200. The first substrate 100 is provided with a plurality of pixels 541A, 541B, 541C, and 541D included in the pixel-shared unit 539. Each of these pixels 541 has a photodiode (a photodiode PD described below) and a transfer transistor (a transfer transistor TR described below). The second substrate 200 is provided with a pixel circuit (a pixel circuit 210 described below) included in the pixel-shared unit 539. The pixel circuit reads out pixel signals transferred from the photodiodes of the pixels 541A, 541B, 541C, and 541D via the transfer transistors, or resets the photodiodes. In addition to these pixel circuits, the second substrate 200 has a plurality of row drive signal lines 542 extending in the row direction and a plurality of vertical signal lines 543 extending in the column direction. The second substrate 200 further includes a power supply line 544 (such as a power supply line VDD described below) extending in the row direction. The third substrate 300 includes, for example, an input section 510A, a row driver 520, a timing control section 530, a column signal processing section 550, an image signal processing section 560, and an output section 510B. The row driver 520 is provided, for example, in a region that partially overlaps with the pixel array section 540 in the stacking direction (hereinafter simply referred to as the stacking direction) of the first substrate 100, the second substrate 200, and the third substrate 300. More specifically, the row driver 520 is provided, in the stacking direction, in a region that partially overlaps with the pixel array section 540 near an end of the pixel array section 540 in the H direction ( FIG. 2 ). The column signal processing section 550 is provided, for example, in a region that partially overlaps with the pixel array section 540 in the stacking direction. More specifically, the column signal processing unit 550 is provided in a region overlapping the vicinity of the end of the pixel array unit 540 in the V direction in the stacking direction (FIG. 2). Although not shown, the input unit 510A and the output unit 510B may be provided in a portion other than the third substrate 300, for example, on the second substrate 200. Alternatively, the input unit 510A and the output unit 510B may be provided on the back surface (light incident surface) side of the first substrate 100.The pixel circuits provided on the second substrate 200 may also be called pixel transistor circuits, pixel transistor groups, pixel transistors, pixel readout circuits, or readout circuits. In this specification, the term pixel circuits will be used.

[0028] The first substrate 100 and the second substrate 200 are electrically connected by, for example, through electrodes (through electrodes 120E and 121E in FIG. 6 described below). The second substrate 200 and the third substrate 300 are electrically connected by, for example, contact portions 201, 202, 301, and 302. The second substrate 200 is provided with contact portions 201 and 202, and the third substrate 300 is provided with contact portions 301 and 302. The contact portion 201 of the second substrate 200 contacts the contact portion 301 of the third substrate 300, and the contact portion 202 of the second substrate 200 contacts the contact portion 302 of the third substrate 300. The second substrate 200 has a contact region 201R in which a plurality of contact portions 201 are provided, and a contact region 202R in which a plurality of contact portions 202 are provided. The third substrate 300 has a contact region 301R in which a plurality of contact portions 301 are provided and a contact region 302R in which a plurality of contact portions 302 are provided. The contact regions 201R and 301R are provided between the pixel array section 540 and the row driver section 520 in the stacking direction (FIG. 3). In other words, the contact regions 201R and 301R are provided, for example, in a region where the row driver section 520 (third substrate 300) and the pixel array section 540 (second substrate 200) overlap in the stacking direction, or in a region nearby this. The contact regions 201R and 301R are disposed, for example, at the end of such a region in the H direction (FIG. 2). The third substrate 300 has a contact region 301R provided in a position overlapping, for example, with a part of the row driver section 520, specifically, the end of the row driver section 520 in the H direction (FIGS. 2 and 3). The contact portions 201 and 301 connect, for example, the row drive section 520 provided on the third substrate 300 and the row drive signal line 542 provided on the second substrate 200. The contact portions 201 and 301 may connect, for example, the input section 510A provided on the third substrate 300 to a power supply line 544 and a reference potential line (a reference potential line VSS described below). The contact regions 202R and 302R are provided between the pixel array section 540 and the column signal processing section 550 in the stacking direction (FIG. 3).In other words, the contact regions 202R and 302R are provided, for example, in a region where the column signal processing unit 550 (third substrate 300) and the pixel array unit 540 (second substrate 200) overlap in the stacking direction, or in a region adjacent thereto. The contact regions 202R and 302R are arranged, for example, at the end of such a region in the V direction ( FIG. 2 ). On the third substrate 300, for example, the contact region 302R is provided in a position overlapping with a part of the column signal processing unit 550, specifically, the end of the column signal processing unit 550 in the V direction ( FIGS. 2 and 3 ). The contact regions 202 and 302 are used to connect pixel signals (signals corresponding to the amount of charge generated as a result of photoelectric conversion in the photodiodes) output from each of the multiple pixel sharing units 539 included in the pixel array unit 540 to the column signal processing unit 550 provided on the third substrate 300. The pixel signals are sent from the second substrate 200 to the third substrate 300.

[0029] As described above, FIG. 3 is an example cross-sectional view of the imaging device 1. The first substrate 100, the second substrate 200, and the third substrate 300 are electrically connected via wiring layers 100T, 200T, and 300T. For example, the imaging device 1 has an electrical connection portion that electrically connects the second substrate 200 and the third substrate 300. Specifically, the contact portions 201, 202, 301, and 302 are formed by electrodes made of a conductive material. The conductive material is made of a metal material such as copper (Cu), aluminum (Al), or gold (Au). The contact regions 201R, 202R, 301R, and 302R electrically connect the second substrate and the third substrate by directly bonding wiring formed as electrodes, for example, thereby enabling input and / or output of signals between the second substrate 200 and the third substrate 300.

[0030] The electrical connection portion that electrically connects the second substrate 200 and the third substrate 300 can be provided in a desired location. For example, as described as contact regions 201R, 202R, 301R, and 302R in FIG. 3, the electrical connection portion may be provided in a region that overlaps with the pixel array section 540 in the stacking direction. The electrical connection portion may also be provided in a region that does not overlap with the pixel array section 540 in the stacking direction. Specifically, the electrical connection portion may be provided in a region that overlaps with a peripheral portion disposed outside the pixel array section 540 in the stacking direction.

[0031] The first substrate 100 and the second substrate 200 are provided with, for example, connection holes H1 and H2. The connection holes H1 and H2 penetrate the first substrate 100 and the second substrate 200 (FIG. 3). The connection holes H1 and H2 are provided outside the pixel array section 540 (or a portion overlapping the pixel array section 540) (FIG. 2). For example, the connection hole H1 is disposed outside the pixel array section 540 in the H direction, and the connection hole H2 is disposed outside the pixel array section 540 in the V direction. For example, the connection hole H1 reaches the input section 510A provided on the third substrate 300, and the connection hole H2 reaches the output section 510B provided on the third substrate 300. The connection holes H1 and H2 may be hollow or may contain a conductive material at least in part. For example, there is a configuration in which a bonding wire is connected to an electrode formed as the input portion 510A and / or the output portion 510B. Alternatively, there is a configuration in which an electrode formed as the input portion 510A and / or the output portion 510B is connected to a conductive material provided in the connection holes H1, H2. The conductive material provided in the connection holes H1, H2 may be embedded in part or all of the connection holes H1, H2, or the conductive material may be formed on the side walls of the connection holes H1, H2.

[0032] 3 shows a structure in which the input unit 510A and the output unit 510B are provided on the third substrate 300, but the present invention is not limited to this. For example, the input unit 510A and / or the output unit 510B can be provided on the second substrate 200 by sending signals from the third substrate 300 to the second substrate 200 via the wiring layers 200T and 300T. Similarly, the input unit 510A and / or the output unit 510B can be provided on the first substrate 100 by sending signals from the second substrate 200 to the first substrate 100 via the wiring layers 100T and 200T.

[0033] FIG. 4 is an equivalent circuit diagram illustrating an example of the configuration of a pixel-shared unit 539. The pixel-shared unit 539 includes a plurality of pixels 541 (four pixels 541A, 541B, 541C, and 541D are illustrated in FIG. 4), one pixel circuit 210 connected to the plurality of pixels 541, and a vertical signal line 543 connected to the pixel circuit 210. The pixel circuit 210 includes, for example, four transistors, specifically, an amplification transistor AMP, a selection transistor SEL, a reset transistor RST, and an FD conversion gain switching transistor FDG. As described above, the pixel-shared unit 539 operates one pixel circuit 210 in a time-division manner to sequentially output pixel signals of each of the four pixels 541 (pixels 541A, 541B, 541C, and 541D) included in the pixel-shared unit 539 to the vertical signal line 543. A state in which one pixel circuit 210 is connected to multiple pixels 541 and the pixel signals of these multiple pixels 541 are output in a time-division manner by one pixel circuit 210 is said to be "multiple pixels 541 sharing one pixel circuit 210."

[0034] Pixels 541A, 541B, 541C, and 541D have common components. Hereinafter, in order to distinguish the components of pixels 541A, 541B, 541C, and 541D from one another, the identification number 1 is added to the end of the reference numeral for the component of pixel 541A, the identification number 2 is added to the end of the reference numeral for the component of pixel 541B, the identification number 3 is added to the end of the reference numeral for the component of pixel 541C, and the identification number 4 is added to the end of the reference numeral for the component of pixel 541D. When it is not necessary to distinguish the components of pixels 541A, 541B, 541C, and 541D from one another, the identification numbers added to the end of the reference numerals for the components of pixels 541A, 541B, 541C, and 541D are omitted.

[0035] Each of the pixels 541A, 541B, 541C, and 541D includes, for example, a photodiode PD, a transfer transistor TR electrically connected to the photodiode PD, and a floating diffusion FD electrically connected to the transfer transistor TR. The cathode of the photodiode PD (PD1, PD2, PD3, and PD4) is electrically connected to the source of the transfer transistor TR, and the anode is electrically connected to a reference potential line (e.g., ground). The photodiode PD photoelectrically converts incident light and generates a charge corresponding to the amount of light received. The transfer transistors TR (transfer transistors TR1, TR2, TR3, and TR4) are, for example, n-type complementary metal oxide semiconductor (CMOS) transistors. The drain of the transfer transistor TR is electrically connected to the floating diffusion FD, and the gate is electrically connected to a drive signal line. This drive signal line is one of multiple row drive signal lines 542 (see FIG. 1) connected to one pixel sharing unit 539. The transfer transistor TR transfers the charge generated in the photodiode PD to the floating diffusion FD. The floating diffusion FD (floating diffusions FD1, FD2, FD3, and FD4) is an n-type diffusion layer region formed in a p-type semiconductor layer. The floating diffusion FD is a charge holding means that temporarily holds the charge transferred from the photodiode PD, and is also a charge-to-voltage conversion means that generates a voltage according to the amount of charge.

[0036] The four floating diffusions FD (floating diffusions FD1, FD2, FD3, and FD4) included in one pixel-shared unit 539 are electrically connected to each other and to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG. The drain of the FD conversion gain switching transistor FDG is connected to the source of the reset transistor RST, and the gate of the FD conversion gain switching transistor FDG is connected to a drive signal line. This drive signal line is one of multiple row drive signal lines 542 connected to one pixel-shared unit 539. The drain of the reset transistor RST is connected to a power supply line VDD, and the gate of the reset transistor RST is connected to the drive signal line. This drive signal line is one of multiple row drive signal lines 542 connected to one pixel-shared unit 539. The gate of the amplification transistor AMP is connected to the floating diffusion FD, the drain of the amplification transistor AMP is connected to the power supply line VDD, and the source of the amplification transistor AMP is connected to the drain of the selection transistor SEL. The source of the selection transistor SEL is connected to a vertical signal line 543, and the gate of the selection transistor SEL is connected to the drive signal line. This drive signal line is part of a plurality of row drive signal lines 542 connected to one pixel sharing unit 539 .

[0037] When the transfer transistor TR is turned on, it transfers the charge of the photodiode PD to the floating diffusion FD. The gate (transfer gate TG) of the transfer transistor TR includes, for example, a so-called vertical electrode, and as shown in FIG. 6, extends from the surface of the semiconductor layer (semiconductor layer 100S in FIG. 6) to a depth reaching the PD. The reset transistor RST resets the potential of the floating diffusion FD to a predetermined potential. When the reset transistor RST is turned on, it resets the potential of the floating diffusion FD to the potential of the power supply line VDD. The selection transistor SEL controls the output timing of the pixel signal from the pixel circuit 210. The amplification transistor AMP generates, as the pixel signal, a signal with a voltage corresponding to the level of the charge held in the floating diffusion FD. The amplification transistor AMP is connected to a vertical signal line 543 via the selection transistor SEL. In the column signal processing unit 550, the amplification transistor AMP forms a source follower together with a load circuit unit (see FIG. 1) connected to the vertical signal line 543. When the selection transistor SEL is turned on, the amplification transistor AMP outputs the voltage of the floating diffusion FD to the column signal processing unit 550 via the vertical signal line 543. The reset transistor RST, the amplification transistor AMP, and the selection transistor SEL are, for example, N-type CMOS transistors.

[0038] The FD conversion gain switching transistor FDG is used to change the gain of charge-to-voltage conversion in the floating diffusion FD. Generally, pixel signals are small when shooting in dark locations. Based on Q = CV, if the capacitance (FD capacitance C) of the floating diffusion FD is large during charge-to-voltage conversion, the V when converted to voltage by the amplifier transistor AMP will be small. On the other hand, in bright locations, pixel signals are large, so if the FD capacitance C is not large, the floating diffusion FD cannot fully absorb the charge from the photodiode PD. Furthermore, the FD capacitance C must be large so that the V when converted to voltage by the amplifier transistor AMP does not become too large (in other words, to reduce it). Given these factors, when the FD conversion gain switching transistor FDG is turned on, the gate capacitance of the FD conversion gain switching transistor FDG increases, increasing the overall FD capacitance C. On the other hand, when the FD conversion gain switching transistor FDG is turned off, the overall FD capacitance C decreases. In this way, by switching the FD conversion gain switching transistor FDG on and off, the FD capacitance C can be varied, thereby changing the conversion efficiency. The FD conversion gain switching transistor FDG is, for example, an N-type CMOS transistor.

[0039] It is also possible to configure the pixel circuit 210 without the FD conversion gain switching transistor FDG. In this case, for example, the pixel circuit 210 is configured with three transistors, for example, an amplification transistor AMP, a selection transistor SEL, and a reset transistor RST. The pixel circuit 210 has at least one pixel transistor, for example, an amplification transistor AMP, a selection transistor SEL, a reset transistor RST, and an FD conversion gain switching transistor FDG.

[0040] The selection transistor SEL may be provided between the power supply line VDD and the amplification transistor AMP. In this case, the drain of the reset transistor RST is electrically connected to the power supply line VDD and the drain of the selection transistor SEL. The source of the selection transistor SEL is electrically connected to the drain of the amplification transistor AMP, and the gate of the selection transistor SEL is electrically connected to a row drive signal line 542 (see FIG. 1). The source of the amplification transistor AMP (the output terminal of the pixel circuit 210) is electrically connected to a vertical signal line 543, and the gate of the amplification transistor AMP is electrically connected to the source of the reset transistor RST. Although not shown, the number of pixels 541 sharing one pixel circuit 210 may be other than four. For example, two or eight pixels 541 may share one pixel circuit 210.

[0041] FIG. 5 shows an example of a connection between multiple pixel-sharing units 539 and vertical signal lines 543. For example, four pixel-sharing units 539 arranged in a column direction are divided into four groups, and a vertical signal line 543 is connected to each of the four groups. For simplicity of explanation, FIG. 5 shows an example in which each of the four groups includes one pixel-sharing unit 539. However, each of the four groups may include multiple pixel-sharing units 539. In this way, in the imaging device 1, the multiple pixel-sharing units 539 arranged in the column direction may be divided into groups including one or more pixel-sharing units 539. For example, a vertical signal line 543 and a column signal processing unit 550 are connected to each of these groups, allowing pixel signals to be read out simultaneously from each group. Alternatively, in the imaging device 1, one vertical signal line 543 may be connected to multiple pixel-sharing units 539 arranged in a column direction. In this case, pixel signals are read out sequentially in a time-division manner from the multiple pixel-sharing units 539 connected to one vertical signal line 543.

[0042] [Specific configuration of imaging device 1] FIG. 6 illustrates an example of a cross-sectional configuration perpendicular to the main surfaces of the first substrate 100, the second substrate 200, and the third substrate 300 of the imaging device 1. FIG. 6 is a schematic representation to facilitate understanding of the positional relationships of the components, and may differ from the actual cross section. In the imaging device 1, the first substrate 100, the second substrate 200, and the third substrate 300 are stacked in this order. The imaging device 1 further includes a light-receiving lens 401 on the back surface (light incident surface) of the first substrate 100. A color filter layer (not shown) may be provided between the light-receiving lens 401 and the first substrate 100. The light-receiving lens 401 is provided for each of the pixels 541A, 541B, 541C, and 541D, for example. The imaging device 1 is, for example, a back-illuminated imaging device. The imaging device 1 includes a pixel array section 540 located in the center and a peripheral section 540B located outside the pixel array section 540.

[0043] The first substrate 100 has, in order from the light receiving lens 401 side, an insulating film 111, a fixed charge film 112, a semiconductor layer 100S, and a wiring layer 100T. The semiconductor layer 100S is made of, for example, a silicon substrate. The semiconductor layer 100S has, for example, a p-well layer 115 in and near a part of the surface (the surface on the wiring layer 100T side), and an n-type semiconductor region 114 in the other region (a region deeper than the p-well layer 115). For example, the n-type semiconductor region 114 and the p-well layer 115 form a pn junction photodiode PD. The p-well layer 115 is a p-type semiconductor region.

[0044] 7A shows an example of the planar configuration of the first substrate 100. Fig. 7A mainly shows the planar configuration of the pixel isolation portion 117, photodiode PD, floating diffusion FD, VSS contact region 118, and transfer transistor TR of the first substrate 100. The configuration of the first substrate 100 will be described using Fig. 7A together with Fig. 6.

[0045] A floating diffusion FD and a VSS contact region 118 are provided near the surface of the semiconductor layer 100S. The floating diffusion FD is configured by an n-type semiconductor region provided in the p-well layer 115. The floating diffusions FD (floating diffusions FD1, FD2, FD3, and FD4) of the pixels 541A, 541B, 541C, and 541D are provided close to each other in the center of the pixel-shared unit 539 ( FIG. 7A ). As will be described in detail later, the four floating diffusions (floating diffusions FD1, FD2, FD3, and FD4) included in this pixel-shared unit 539 are electrically connected to each other via electrical connection means (pad portions 120, described later) within the first substrate 100 (more specifically, within the wiring layer 100T). Furthermore, the floating diffusion FD is connected from the first substrate 100 to the second substrate 200 (more specifically, from the wiring layer 100T to the wiring layer 200T) via electrical means (through electrodes 120E, which will be described later). In the second substrate 200 (more specifically, inside the wiring layer 200T), the floating diffusion FD is electrically connected by this electrical means to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG.

[0046] The VSS contact region 118 is a region electrically connected to the reference potential line VSS and is arranged apart from the floating diffusion FD. For example, in the pixels 541A, 541B, 541C, and 541D, the floating diffusion FD is arranged at one end of each pixel in the V direction, and the VSS contact region 118 is arranged at the other end (FIG. 7A). The VSS contact region 118 is formed of, for example, a p-type semiconductor region. The VSS contact region 118 is connected to, for example, a ground potential or a fixed potential. This supplies a reference potential to the semiconductor layer 100S.

[0047] The first substrate 100 is provided with a photodiode PD, a floating diffusion FD, a VSS contact region 118, and a transfer transistor TR. The photodiode PD, floating diffusion FD, VSS contact region 118, and transfer transistor TR are provided in each of the pixels 541A, 541B, 541C, and 541D. The transfer transistor TR is provided on the front surface side of the semiconductor layer 100S (the side opposite the light incident surface, the second substrate 200 side). The transfer transistor TR has a transfer gate TG. The transfer gate TG includes, for example, a horizontal portion TGb facing the front surface of the semiconductor layer 100S and a vertical portion TGa provided within the semiconductor layer 100S. The vertical portion TGa extends in the thickness direction of the semiconductor layer 100S. One end of the vertical portion TGa is in contact with the horizontal portion TGb, and the other end is provided within the n-type semiconductor region 114. By configuring the transfer transistor TR with such a vertical transistor, transfer failure of pixel signals is less likely to occur, and the readout efficiency of pixel signals can be improved.

[0048] The horizontal portion TGb of the transfer gate TG extends, for example, in the H direction from a position facing the vertical portion TGa toward the center of the pixel sharing unit 539 (FIG. 7A). This allows the H direction position of the through electrode (through electrode TGV described later) that reaches the transfer gate TG to be closer to the H direction positions of the through electrodes (through electrodes 120E and 121E described later) that are connected to the floating diffusion FD and the VSS contact region 118. For example, the multiple pixel sharing units 539 provided on the first substrate 100 have the same configuration (FIG. 7A).

[0049] The semiconductor layer 100S is provided with a pixel separator 117 that separates the pixels 541A, 541B, 541C, and 541D from one another. The pixel separator 117 is formed to extend in the normal direction of the semiconductor layer 100S (a direction perpendicular to the surface of the semiconductor layer 100S). The pixel separator 117 is provided to separate the pixels 541A, 541B, 541C, and 541D from one another, and has, for example, a lattice-like planar shape (FIGS. 7A and 7B). The pixel separator 117 electrically and optically separates the pixels 541A, 541B, 541C, and 541D from one another. The pixel separator 117 includes, for example, a light-shielding film 117A and an insulating film 117B. The light-shielding film 117A is made of, for example, tungsten (W). The insulating film 117B is provided between the light-shielding film 117A and the p-well layer 115 or the n-type semiconductor region 114. The insulating film 117B is made of, for example, silicon oxide (SiO). The pixel separating portion 117 has, for example, an FTI (Full Trench Isolation) structure and penetrates the semiconductor layer 100S. Although not shown, the pixel separating portion 117 is not limited to an FTI structure that penetrates the semiconductor layer 100S. For example, it may have a DTI (Deep Trench Isolation) structure that does not penetrate the semiconductor layer 100S. The pixel separating portion 117 extends in the normal direction of the semiconductor layer 100S and is formed in a partial region of the semiconductor layer 100S.

[0050] The semiconductor layer 100S is provided with, for example, a first pinning region 113 and a second pinning region 116. The first pinning region 113 is provided near the back surface of the semiconductor layer 100S and is disposed between the n-type semiconductor region 114 and the fixed charge film 112. The second pinning region 116 is provided on a side surface of the pixel separating section 117, specifically, between the pixel separating section 117 and the p-well layer 115 or the n-type semiconductor region 114. The first pinning region 113 and the second pinning region 116 are formed of, for example, a p-type semiconductor region.

[0051] A fixed charge film 112 having a negative fixed charge is provided between the semiconductor layer 100S and the insulating film 111. An electric field induced by the fixed charge film 112 forms a first pinning region 113 of the hole accumulation layer at the interface on the light-receiving surface (back surface) side of the semiconductor layer 100S. This suppresses the generation of dark current due to the interface state on the light-receiving surface side of the semiconductor layer 100S. The fixed charge film 112 is formed, for example, from an insulating film having a negative fixed charge. Examples of materials for this insulating film having a negative fixed charge include hafnium oxide, zirconium oxide, aluminum oxide, titanium oxide, and tantalum oxide.

[0052] A light-shielding film 117A is provided between the fixed charge film 112 and the insulating film 111. This light-shielding film 117A may be provided continuously with the light-shielding film 117A that constitutes the pixel separating section 117. The light-shielding film 117A between the fixed charge film 112 and the insulating film 111 is selectively provided, for example, at a position facing the pixel separating section 117 in the semiconductor layer 100S. The insulating film 111 is provided so as to cover this light-shielding film 117A. The insulating film 111 is made of, for example, silicon oxide.

[0053] The wiring layer 100T provided between the semiconductor layer 100S and the second substrate 200 has, from the semiconductor layer 100S side, an interlayer insulating film 119, pad portions 120 and 121, a passivation film 122, an interlayer insulating film 123, and a bonding film 124, in this order. The horizontal portion TGb of the transfer gate TG is provided in this wiring layer 100T, for example. The interlayer insulating film 119 is provided over the entire surface of the semiconductor layer 100S and is in contact with the semiconductor layer 100S. The interlayer insulating film 119 is made of, for example, a silicon oxide film. Note that the configuration of the wiring layer 100T is not limited to the above, and may be any configuration including wiring and an insulating film.

[0054] FIG. 7B shows the configuration of the pad portions 120 and 121 along with the planar configuration shown in FIG. 7A. The pad portions 120 and 121 are provided in selective regions on the interlayer insulating film 119. The pad portion 120 is used to connect the floating diffusions FD (floating diffusions FD1, FD2, FD3, and FD4) of the pixels 541A, 541B, 541C, and 541D to one another. The pad portion 120 is disposed, for example, for each pixel sharing unit 539 in the center of the pixel sharing unit 539 in plan view ( FIG. 7B ). The pad portion 120 is disposed so as to straddle the pixel separating portion 117 and overlap at least a portion of each of the floating diffusions FD1, FD2, FD3, and FD4 ( FIGS. 6 and 7B ). Specifically, the pad section 120 is formed in a region that overlaps, in a direction perpendicular to the surface of the semiconductor layer 100S, at least a portion of each of the floating diffusions FD (floating diffusions FD1, FD2, FD3, and FD4) that share the pixel circuit 210 and at least a portion of the pixel isolation section 117 formed between the photodiodes PD (photodiodes PD1, PD2, PD3, and PD4) that share the pixel circuit 210. The interlayer insulating film 119 is provided with connection vias 120C for electrically connecting the pad section 120 to the floating diffusions FD1, FD2, FD3, and FD4. The connection vias 120C are provided in each of the pixels 541A, 541B, 541C, and 541D. For example, a portion of the pad section 120 is embedded in the connection vias 120C, thereby electrically connecting the pad section 120 to the floating diffusions FD1, FD2, FD3, and FD4.

[0055] The pad portion 121 is used to connect the multiple VSS contact regions 118 to each other. For example, the pad portion 121 electrically connects the VSS contact regions 118 provided in pixels 541C and 541D of one pixel sharing unit 539 adjacent to each other in the V direction with the VSS contact regions 118 provided in pixels 541A and 541B of the other pixel sharing unit 539. The pad portion 121 is provided, for example, to straddle the pixel isolation portion 117 and is arranged to overlap at least a portion of each of the four VSS contact regions 118. Specifically, the pad portion 121 is formed in a region that overlaps at least a portion of each of the multiple VSS contact regions 118 and at least a portion of the pixel isolation portion 117 formed between the multiple VSS contact regions 118 in a direction perpendicular to the surface of the semiconductor layer 100S. The interlayer insulating film 119 is provided with a connection via 121C for electrically connecting the pad portion 121 and the VSS contact region 118. The connection via 121C is provided in each of the pixels 541A, 541B, 541C, and 541D. For example, a part of the pad portion 121 is embedded in the connection via 121C, thereby electrically connecting the pad portion 121 to the VSS contact region 118. For example, the pad portion 120 and the pad portion 121 of each of the multiple pixel sharing units 539 aligned in the V direction are arranged at approximately the same position in the H direction ( FIG. 7B ).

[0056] By providing the pad section 120, it is possible to reduce the amount of wiring for connecting each floating diffusion FD to the pixel circuit 210 (for example, the gate electrode of the amplification transistor AMP) across the entire chip. Similarly, by providing the pad section 121, it is possible to reduce the amount of wiring for supplying potential to each VSS contact region 118 across the entire chip. This makes it possible to reduce the area of ​​the entire chip, suppress electrical interference between wiring in miniaturized pixels, and / or reduce costs by reducing the number of components.

[0057] The pad portions 120 and 121 can be provided at desired positions on the first substrate 100 and the second substrate 200. Specifically, the pad portions 120 and 121 can be provided on either the wiring layer 100T or the insulating region 212 of the semiconductor layer 200S. When provided on the wiring layer 100T, the pad portions 120 and 121 may be in direct contact with the semiconductor layer 100S. Specifically, the pad portions 120 and 121 may be configured to be directly connected to at least a portion of each of the floating diffusion FD and / or the VSS contact region 118. Alternatively, connection vias 120C and 121C may be provided from each of the floating diffusion FD and / or the VSS contact region 118 connected to the pad portions 120 and 121, and the pad portions 120 and 121 may be provided at desired positions in the insulating region 212 of the wiring layer 100T and the semiconductor layer 200S.

[0058] In particular, when the pad portions 120, 121 are provided in the wiring layer 100T, it is possible to reduce the wiring connected to the floating diffusion FD and / or the VSS contact region 118 in the insulating region 212 of the semiconductor layer 200S. This makes it possible to reduce the area of ​​the insulating region 212, in the second substrate 200 on which the pixel circuit 210 is formed, for forming the through wiring for connecting the floating diffusion FD to the pixel circuit 210. This makes it possible to ensure a large area for the second substrate 200 on which the pixel circuit 210 is formed. By ensuring the area for the pixel circuit 210, it is possible to form a large pixel transistor, which can contribute to improving image quality by reducing noise, etc.

[0059] In particular, when an FTI structure is used for the pixel separation section 117, it is preferable to provide a floating diffusion FD and / or a VSS contact region 118 in each pixel 541, and therefore, by using the configuration of the pad sections 120, 121, the wiring connecting the first substrate 100 and the second substrate 200 can be significantly reduced.

[0060] 7B , for example, pad portions 120 connected to a plurality of floating diffusions FD and pad portions 121 connected to a plurality of VSS contact regions 118 are alternately arranged linearly in the V direction. Furthermore, the pad portions 120 and 121 are formed in positions surrounded by a plurality of photodiodes PD, a plurality of transfer gates TG, and a plurality of floating diffusions FD. This allows elements other than the floating diffusions FD and VSS contact regions 118 to be freely arranged on the first substrate 100 on which a plurality of elements are formed, thereby improving the efficiency of the layout of the entire chip. Furthermore, symmetry is ensured in the layout of elements formed in each pixel shared unit 539, thereby suppressing variations in the characteristics of each pixel 541.

[0061] The pad portions 120 and 121 are made of, for example, polysilicon (Poly Si), more specifically, doped polysilicon to which impurities are added. The pad portions 120 and 121 are preferably made of a highly heat-resistant conductive material such as polysilicon, tungsten (W), titanium (Ti), or titanium nitride (TiN). This makes it possible to form the pixel circuit 210 after bonding the semiconductor layer 200S of the second substrate 200 to the first substrate 100. The reason for this will be explained below. In the following explanation, the method of forming the pixel circuit 210 after bonding the semiconductor layer 200S of the first substrate 100 to the semiconductor layer 200S of the second substrate 200 will be referred to as the first manufacturing method.

[0062] Here, it is also conceivable to form the pixel circuits 210 on the second substrate 200 and then bond this to the first substrate 100 (hereinafter referred to as a second manufacturing method). In this second manufacturing method, electrodes for electrical connection are formed in advance on the surface of the first substrate 100 (the surface of the wiring layer 100T) and the surface of the second substrate 200 (the surface of the wiring layer 200T). When the first substrate 100 and the second substrate 200 are bonded together, the electrodes for electrical connection formed on the surface of the first substrate 100 and the surface of the second substrate 200 simultaneously come into contact with each other. This forms an electrical connection between the wiring included in the first substrate 100 and the wiring included in the second substrate 200. Therefore, by configuring the imaging device 1 using the second manufacturing method, it is possible to manufacture the imaging device using an appropriate process depending on the configuration of the first substrate 100 and the second substrate 200, for example, and thus a high-quality, high-performance imaging device can be manufactured.

[0063] In this second manufacturing method, when bonding the first substrate 100 and the second substrate 200 together, alignment errors may occur due to the manufacturing equipment used for bonding. Furthermore, the first substrate 100 and the second substrate 200 each have a diameter of, for example, several tens of centimeters. When bonding the first substrate 100 and the second substrate 200 together, expansion and contraction of the substrates may occur in microscopic regions of each of the first substrate 100 and the second substrate 200. This expansion and contraction of the substrates is caused by a slight difference in the timing at which the substrates contact each other. Due to this expansion and contraction of the first substrate 100 and the second substrate 200, errors may occur in the positions of the electrical connection electrodes formed on the surfaces of the first substrate 100 and the second substrate 200, respectively. In the second manufacturing method, it is preferable to take measures to ensure that the electrodes of the first substrate 100 and the second substrate 200 contact each other even if such errors occur. Specifically, at least one, and preferably both, of the electrodes of the first substrate 100 and the second substrate 200 are made large in consideration of the above-mentioned error. Therefore, when the second manufacturing method is used, for example, the size (size in the substrate planar direction) of the electrode formed on the surface of the first substrate 100 or the second substrate 200 becomes larger than the size of the internal electrode extending in the thickness direction from the inside of the first substrate 100 or the second substrate 200 to the surface.

[0064] On the other hand, by forming the pad portions 120, 121 from a heat-resistant conductive material, the first manufacturing method can be used. In the first manufacturing method, after forming the first substrate 100 including the photodiode PD, the transfer transistor TR, etc., the first substrate 100 and the second substrate 200 (semiconductor layer 2000S) are bonded together. At this time, the second substrate 200 is in a state where patterns of the active elements and wiring layers that constitute the pixel circuits 210 have not yet been formed. Because the second substrate 200 is in a state before patterns are formed, even if an error occurs in the bonding position when the first substrate 100 and the second substrate 200 are bonded together, this bonding error will not cause an error in alignment between the patterns of the first substrate 100 and the second substrate 200. This is because the pattern of the second substrate 200 is formed after the first substrate 100 and the second substrate 200 are bonded together. It should be noted that when a pattern is formed on the second substrate, for example, an exposure apparatus for pattern formation uses the pattern formed on the first substrate as a target for alignment when forming the pattern. For the reasons described above, errors in the bonding position between the first substrate 100 and the second substrate 200 do not pose a problem in manufacturing the imaging device 1 in the first manufacturing method. For the same reason, errors caused by expansion and contraction of the substrates in the second manufacturing method do not pose a problem in manufacturing the imaging device 1 in the first manufacturing method.

[0065] In the first manufacturing method, after bonding the first substrate 100 and the second substrate 200 (semiconductor layer 200S) together in this manner, active elements are formed on the second substrate 200. Then, through electrodes 120E, 121E and through electrodes TGV (FIG. 6) are formed. In forming these through electrodes 120E, 121E, and TGV, for example, a pattern of the through electrodes is formed from above the second substrate 200 using reduced projection exposure with an exposure device. Because reduced projection exposure is used, even if an error occurs in the alignment between the second substrate 200 and the exposure device, the magnitude of the error in the second substrate 200 is only a fraction (the reciprocal of the reduced projection magnification) of the error in the second manufacturing method. Therefore, by configuring the imaging device 1 using the first manufacturing method, it becomes easier to align the elements formed on the first substrate 100 and the second substrate 200, and a high-quality, high-performance imaging device can be manufactured.

[0066] The imaging device 1 manufactured using such a first manufacturing method has different characteristics from the imaging device manufactured using the second manufacturing method. Specifically, in the imaging device 1 manufactured using the first manufacturing method, for example, the through electrodes 120E, 121E, and TGV have a substantially constant thickness (size in the substrate planar direction) from the second substrate 200 to the first substrate 100. Alternatively, when the through electrodes 120E, 121E, and TGV have a tapered shape, the tapered shape has a constant inclination. The imaging device 1 having such through electrodes 120E, 121E, and TGV facilitates miniaturization of the pixels 541.

[0067] Here, when the imaging device 1 is manufactured using the first manufacturing method, the first substrate 100 and the second substrate 200 (semiconductor layer 200S) are bonded together, and then active elements are formed on the second substrate 200. Therefore, the first substrate 100 is also affected by the heat treatment required for forming the active elements. For this reason, as described above, it is preferable to use a conductive material with high heat resistance for the pad portions 120, 121 provided on the first substrate 100. For example, it is preferable to use a material with a higher melting point (i.e., higher heat resistance) for the pad portions 120, 121 than at least a portion of the wiring material included in the wiring layer 200T of the second substrate 200. For example, a conductive material with high heat resistance, such as doped polysilicon, tungsten, titanium, or titanium nitride, is used for the pad portions 120, 121. This makes it possible to manufacture the imaging device 1 using the first manufacturing method.

[0068] The passivation film 122 is provided over the entire surface of the semiconductor layer 100S so as to cover, for example, the pad portions 120 and 121 (FIG. 6). The passivation film 122 is made of, for example, a silicon nitride (SiN) film. The interlayer insulating film 123 covers the pad portions 120 and 121 with the passivation film 122 in between. This interlayer insulating film 123 is provided over the entire surface of the semiconductor layer 100S. The interlayer insulating film 123 is made of, for example, a silicon oxide (SiO) film. The bonding film 124 is provided on the bonding surface between the first substrate 100 (specifically, the wiring layer 100T) and the second substrate 200. That is, the bonding film 124 is in contact with the second substrate 200. This bonding film 124 is provided over the entire main surface of the first substrate 100. The bonding film 124 is made of, for example, a silicon nitride film or a silicon oxide film.

[0069] The light receiving lens 401 faces the semiconductor layer 100S with the fixed charge film 112 and the insulating film 111 interposed therebetween (FIG. 6). The light receiving lens 401 is provided at a position facing the photodiode PD of each of the pixels 541A, 541B, 541C, and 541D, for example.

[0070] The second substrate 200 has, from the first substrate 100 side, a semiconductor layer 200S and a wiring layer 200T in this order. The semiconductor layer 200S is configured to include, for example, a silicon substrate. A well region 211 is provided in the semiconductor layer 200S across the thickness direction. The well region 211 is, for example, a p-type semiconductor region. The second substrate 200 is provided with a pixel circuit 210 arranged for each pixel sharing unit 539. The pixel circuit 210 is provided, for example, on the front surface side (the wiring layer 200T side) of the semiconductor layer 200S. In the imaging device 1, the second substrate 200 is bonded to the first substrate 100 such that the back surface side (the semiconductor layer 200S side) of the second substrate 200 faces the front surface side (the wiring layer 100T side) of the first substrate 100. In other words, the second substrate 200 is bonded to the first substrate 100 face-to-back.

[0071] 8, 9 to 12 schematically show an example of the planar configuration of the second substrate 200. FIG. 8 shows the configuration of the pixel circuit 210 provided near the surface of the semiconductor layer 200S. FIG. 9 schematically shows the configuration of the wiring layer 200T (specifically, the first wiring layer W1 described below), the semiconductor layer 200S connected to the wiring layer 200T, and each part of the first substrate 100. FIGS. 10 to 12 show an example of the planar configuration of the wiring layer 200T. The configuration of the second substrate 200 will be described below using FIGS. 8, 9 to 12 as well as FIG. 6. In FIGS. 8 and 9, the outline of the photodiode PD (the boundary between the pixel isolation portion 117 and the photodiode PD) is shown by a dashed line, and the boundary between the semiconductor layer 200S and the element isolation region 213 or the insulating region 212 in the portion overlapping the gate electrode of each transistor constituting the pixel circuit 210 is shown by a dotted line. In the portion overlapping the gate electrode of the amplification transistor AMP, a boundary between the semiconductor layer 200S and the isolation region 213 and a boundary between the isolation region 213 and the insulating region 212 are provided on one side in the channel width direction.

[0072] The second substrate 200 is provided with an insulating region 212 that divides the semiconductor layer 200S and an element isolation region 213 that is provided in a part of the semiconductor layer 200S in the thickness direction (FIG. 6). For example, in the insulating region 212 provided between two pixel circuits 210 adjacent to each other in the H direction, the through electrodes 120E and 121E and the through electrodes TGVs (through electrodes TGV1, TGV2, TGV3, TGV4) of two pixel sharing units 539 connected to the two pixel circuits 210 are arranged (FIG. 9).

[0073] The insulating region 212 has approximately the same thickness as the semiconductor layer 200S (FIG. 6). The semiconductor layer 200S is divided by this insulating region 212. The through electrodes 120E, 121E and the through electrodes TGV are arranged in this insulating region 212. The insulating region 212 is made of, for example, silicon oxide.

[0074] The through electrodes 120E, 121E are provided to penetrate the insulating region 212 in the thickness direction. The upper ends of the through electrodes 120E, 121E are connected to the wiring of the wiring layer 200T (the first wiring layer W1, the second wiring layer W2, the third wiring layer W3, and the fourth wiring layer W4 described below). The through electrodes 120E, 121E are provided to penetrate the insulating region 212, the bonding film 124, the interlayer insulating film 123, and the passivation film 122, and the lower ends thereof are connected to the pad portions 120, 121 (FIG. 6). The through electrode 120E serves to electrically connect the pad portion 120 and the pixel circuit 210. That is, the floating diffusion FD of the first substrate 100 is electrically connected to the pixel circuit 210 of the second substrate 200 by the through electrode 120E. The through electrode 121E is for electrically connecting the pad portion 121 and the reference potential line VSS of the wiring layer 200T. That is, the through electrode 121E electrically connects the VSS contact region 118 of the first substrate 100 to the reference potential line VSS of the second substrate 200.

[0075] The through electrodes TGV are provided to penetrate the insulating region 212 in the thickness direction. The upper ends of the through electrodes TGV are connected to the wiring of the wiring layer 200T. The through electrodes TGV are provided to penetrate the insulating region 212, the bonding film 124, the interlayer insulating film 123, the passivation film 122, and the interlayer insulating film 119, and the lower ends thereof are connected to the transfer gates TG (FIG. 6). Such through electrodes TGV are intended to electrically connect the transfer gates TG (transfer gates TG1, TG2, TG3, and TG4) of the pixels 541A, 541B, 541C, and 541D to the wiring of the wiring layer 200T (part of the row drive signal line 542, specifically, the wirings TRG1, TRG2, TRG3, and TRG4 in FIG. 11, which will be described later). That is, the through-electrode TGV electrically connects the transfer gate TG of the first substrate 100 to the wiring TRG of the second substrate 200, and a drive signal is sent to each of the transfer transistors TR (transfer transistors TR1, TR2, TR3, TR4).

[0076] The insulating region 212 is a region in which the through electrodes 120E, 121E and through electrodes TGV for electrically connecting the first substrate 100 and the second substrate 200 are provided insulated from the semiconductor layer 200S. For example, the through electrodes 120E, 121E and through electrodes TGV (through electrodes TGV1, TGV2, TGV3, TGV4) connected to two pixel circuits 210 (pixel sharing units 539) adjacent to each other in the H direction are arranged in the insulating region 212. The insulating region 212 is provided, for example, extending in the V direction (FIGS. 8 and 9). Here, by devising the position of the horizontal portion TGb of the transfer gate TG, the position of the through electrode TGV in the H direction is closer to the position of the through electrodes 120E, 121E in the H direction than the position of the vertical portion TGa (FIGS. 7A and 9). For example, the through electrode TGV is disposed at approximately the same position as the through electrodes 120E, 120E in the H direction. This allows the through electrodes 120E, 121E and the through electrode TGV to be provided together in an insulating region 212 extending in the V direction. As another arrangement example, it is possible to provide the horizontal portion TGb only in the region overlapping the vertical portion TGa. In this case, the through electrode TGV is formed approximately directly above the vertical portion TGa, and the through electrode TGV is disposed, for example, in the approximately center of each pixel 541 in the H and V directions. In this case, the position of the through electrode TGV in the H direction is significantly different from the position of the through electrodes 120E, 121E in the H direction. For example, an insulating region 212 is provided around the through electrodes TGV and the through electrodes 120E, 121E to electrically insulate them from the adjacent semiconductor layer 200S. When the position of the through electrode TGV in the H direction is significantly different from the position of the through electrodes 120E, 121E in the H direction, it is necessary to provide an insulating region 212 independently around each of the through electrodes 120E, 121E, and TGV. This results in the semiconductor layer 200S being divided into small pieces. In contrast, a layout in which the through electrodes 120E, 121E and the through electrode TGV are collectively arranged in the insulating region 212 extending in the V direction can increase the size of the semiconductor layer 200S in the H direction. This makes it possible to secure a large area for forming semiconductor elements in the semiconductor layer 200S.This makes it possible to increase the size of the amplification transistor AMP and suppress noise, for example.

[0077] As described with reference to FIG. 4, the pixel-sharing unit 539 has a structure in which the floating diffusions FD provided in each of the plurality of pixels 541 are electrically connected to each other, and these plurality of pixels 541 share one pixel circuit 210. The floating diffusions FD are electrically connected to each other by pad portions 120 provided on the first substrate 100 (FIGS. 6 and 7B). The electrical connection portion (pad portion 120) provided on the first substrate 100 and the pixel circuit 210 provided on the second substrate 200 are electrically connected via one through-electrode 120E. As another structural example, it is also possible to provide the electrical connection portion between the floating diffusions FD on the second substrate 200. In this case, the pixel-sharing unit 539 is provided with four through-electrodes connected to the floating diffusions FD1, FD2, FD3, and FD4, respectively. Therefore, in the second substrate 200, the number of through electrodes penetrating the semiconductor layer 200S increases, and the insulating region 212 that insulates the periphery of these through electrodes becomes larger. In comparison, the structure in which the pad portion 120 is provided on the first substrate 100 (FIGS. 6 and 7B) reduces the number of through electrodes and makes it possible to reduce the insulating region 212. This makes it possible to secure a large area for forming a semiconductor element in the semiconductor layer 200S. This makes it possible, for example, to increase the size of the amplification transistor AMP and suppress noise.

[0078] The element isolation region 213 is provided on the surface side of the semiconductor layer 200S. The element isolation region 213 has an STI (Shallow Trench Isolation) structure. In this element isolation region 213, the semiconductor layer 200S is dug in the thickness direction (perpendicular to the main surface of the second substrate 200), and an insulating film is buried in this dug portion. This insulating film is made of, for example, silicon oxide. The element isolation region 213 separates the multiple transistors that make up the pixel circuit 210 according to the layout of the pixel circuit 210. The semiconductor layer 200S (specifically, the well region 211) extends below the element isolation region 213 (deep in the semiconductor layer 200S).

[0079] Here, with reference to Figures 7A, 7B and 8, the difference between the outer shape (outer shape in the substrate planar direction) of the pixel sharing unit 539 on the first substrate 100 and the outer shape of the pixel sharing unit 539 on the second substrate 200 will be described.

[0080] In the imaging device 1, pixel-sharing units 539 are provided across both the first substrate 100 and the second substrate 200. For example, the outer shape of the pixel-sharing units 539 provided on the first substrate 100 and the outer shape of the pixel-sharing units 539 provided on the second substrate 200 are different from each other.

[0081] 7A and 7B, the outlines of the pixels 541A, 541B, 541C, and 541D are represented by dashed dotted lines, and the outline shape of the pixel-sharing unit 539 is represented by a thick line. For example, the pixel-sharing unit 539 of the first substrate 100 is composed of two pixels 541 (pixels 541A and 541B) arranged adjacent to each other in the H direction and two pixels 541 (pixels 541C and 541D) arranged adjacent to each other in the V direction. That is, the pixel-sharing unit 539 of the first substrate 100 is composed of four pixels 541 arranged adjacently in two rows and two columns, and the pixel-sharing unit 539 of the first substrate 100 has a substantially square outline shape. In the pixel array section 540, such pixel sharing units 539 are arranged adjacent to each other at a pitch of two pixels in the H direction (a pitch equivalent to two pixels 541) and at a pitch of two pixels in the V direction (a pitch equivalent to two pixels 541).

[0082] 8 and 9, the outlines of the pixels 541A, 541B, 541C, and 541D are represented by dashed dotted lines, and the outline shape of the pixel-sharing unit 539 is represented by a thick line. For example, the outline shape of the pixel-sharing unit 539 of the second substrate 200 is smaller in the H direction than the pixel-sharing unit 539 of the first substrate 100, and is larger in the V direction than the pixel-sharing unit 539 of the first substrate 100. For example, the pixel-sharing unit 539 of the second substrate 200 is formed with a size (area) equivalent to one pixel in the H direction, and is formed with a size equivalent to four pixels in the V direction. In other words, the pixel-sharing unit 539 of the second substrate 200 is formed with a size equivalent to adjacent pixels arranged in one row and four columns, and the pixel-sharing unit 539 of the second substrate 200 has a substantially rectangular outline shape.

[0083] For example, in each pixel circuit 210, the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG are arranged in this order in the V direction ( FIG. 8 ). By providing each pixel circuit 210 with a substantially rectangular outer shape as described above, four transistors (the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG) can be arranged side by side in one direction (the V direction in FIG. 8 ). This allows the drain of the amplification transistor AMP and the drain of the reset transistor RST to share a single diffusion region (a diffusion region connected to the power supply line VDD). For example, the formation region of each pixel circuit 210 can also be provided in a substantially square shape. In this case, two transistors are arranged along one direction, making it difficult to share a single diffusion region for the drain of the amplification transistor AMP and the drain of the reset transistor RST. Therefore, providing the formation region of the pixel circuit 210 in a substantially rectangular shape makes it easier to arrange the four transistors closely together, thereby reducing the formation region of the pixel circuit 210. In other words, pixels can be miniaturized. Furthermore, when it is not necessary to reduce the area in which the pixel circuit 210 is formed, it is possible to increase the area in which the amplification transistor AMP is formed and suppress noise.

[0084] For example, near the surface of the semiconductor layer 200S, in addition to the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG, a VSS contact region 218 connected to the reference potential line VSS is provided. The VSS contact region 218 is configured, for example, by a p-type semiconductor region. The VSS contact region 218 is electrically connected to the VSS contact region 118 of the first substrate 100 (semiconductor layer 100S) via the wiring of the wiring layer 200T and the through-electrode 121E. This VSS contact region 218 is provided, for example, at a position adjacent to the source of the FD conversion gain switching transistor FDG with the element isolation region 213 interposed therebetween (FIG. 8).

[0085] Next, with reference to Figures 7B and 8, the positional relationship between the pixel-sharing units 539 provided on the first substrate 100 and the pixel-sharing units 539 provided on the second substrate 200 will be described. For example, of two pixel-sharing units 539 aligned in the V direction on the first substrate 100, one pixel-sharing unit 539 (for example, the upper side of the paper in Figure 7B) is connected to one pixel-sharing unit 539 (for example, the left side of the paper in Figure 8) of two pixel-sharing units 539 aligned in the H direction on the second substrate 200. For example, of the two pixel-sharing units 539 aligned in the V direction on the first substrate 100, the other pixel-sharing unit 539 (for example, the lower side of the paper in Figure 7B) is connected to the other pixel-sharing unit 539 (for example, the right side of the paper in Figure 8) of two pixel-sharing units 539 aligned in the H direction on the second substrate 200.

[0086] For example, of two pixel sharing units 539 lined up in the H direction on the second substrate 200, the internal layout (arrangement of transistors, etc.) of one pixel sharing unit 539 is substantially equal to a layout obtained by inverting the internal layout of the other pixel sharing unit 539 in the V and H directions. The effects obtained by this layout will be described below.

[0087] In two pixel-sharing units 539 aligned in the V direction on the first substrate 100, each pad section 120 is disposed at the center of the external shape of the pixel-sharing unit 539, i.e., the center of the pixel-sharing unit 539 in the V and H directions ( FIG. 7B ). On the other hand, the pixel-sharing unit 539 on the second substrate 200 has a substantially rectangular external shape that is long in the V direction as described above, and therefore, for example, the amplification transistor AMP connected to the pad section 120 is disposed at a position shifted upward in the plane of the drawing from the center of the pixel-sharing unit 539 in the V direction. For example, when two pixel-sharing units 539 aligned in the H direction on the second substrate 200 have the same internal layout, the distance between the amplification transistor AMP of one pixel-sharing unit 539 and the pad section 120 (for example, the pad section 120 of the pixel-sharing unit 539 on the upper side in the plane of the drawing in FIG. 7B ) is relatively short. However, the distance between the amplification transistor AMP of the other pixel sharing unit 539 and the pad section 120 (for example, the pad section 120 of the pixel sharing unit 539 on the lower side of the page in FIG. 7B) becomes longer. This increases the area of ​​the wiring required to connect this amplification transistor AMP and the pad section 120, which may complicate the wiring layout of the pixel sharing unit 539. This may affect the miniaturization of the imaging device 1.

[0088] In contrast, by inverting the internal layouts of two pixel-sharing units 539 aligned in the H direction of the second substrate 200 with respect to each other at least in the V direction, it is possible to shorten the distance between the amplification transistors AMP and the pad section 120 of both of these two pixel-sharing units 539. Therefore, compared to a configuration in which the internal layouts of two pixel-sharing units 539 aligned in the H direction of the second substrate 200 are the same, it is easier to miniaturize the imaging device 1. Note that the planar layout of each of the multiple pixel-sharing units 539 of the second substrate 200 is symmetrical within the range shown in FIG. 8, but becomes asymmetrical when the layout of the first wiring layer W1 shown in FIG. 9, which will be described later, is included.

[0089] Furthermore, it is preferable that the internal layouts of two pixel sharing units 539 aligned in the H direction on the second substrate 200 are also inverted relative to each other in the H direction. The reason for this will be explained below. As shown in FIG. 9 , the two pixel sharing units 539 aligned in the H direction on the second substrate 200 are respectively connected to the pad portions 120, 121 on the first substrate 100. For example, the pad portions 120, 121 are disposed in the central portions in the H direction of the two pixel sharing units 539 aligned in the H direction on the second substrate 200 (between the two pixel sharing units 539 aligned in the H direction). Therefore, by inverting the internal layouts of the two pixel sharing units 539 aligned in the H direction on the second substrate 200 relative to each other in the H direction, it is possible to reduce the distance between each of the multiple pixel sharing units 539 on the second substrate 200 and the pad portions 120, 121. That is, it becomes easier to miniaturize the imaging device 1.

[0090] Furthermore, the positions of the outlines of the pixel-sharing units 539 on the second substrate 200 do not have to be aligned with the positions of any of the outlines of the pixel-sharing units 539 on the first substrate 100. For example, of two pixel-sharing units 539 aligned in the H direction on the second substrate 200, in one pixel-sharing unit 539 (for example, on the left side of the paper in FIG. 9 ), the outline on one side in the V direction (for example, the upper side of the paper in FIG. 9 ) is arranged outside the outline on one side in the V direction of the corresponding pixel-sharing unit 539 on the first substrate 100 (for example, the upper side of the paper in FIG. 7B ). Furthermore, of two pixel-sharing units 539 aligned in the H direction on the second substrate 200, in the other pixel-sharing unit 539 (for example, on the right side of the paper in FIG. 9 ), the outline on the other side in the V direction (for example, the lower side of the paper in FIG. 9 ) is arranged outside the outline on the other side in the V direction of the corresponding pixel-sharing unit 539 on the first substrate 100 (for example, the lower side of the paper in FIG. 7B ). In this way, by arranging the pixel sharing unit 539 of the second substrate 200 and the pixel sharing unit 539 of the first substrate 100 together, it is possible to shorten the distance between the amplification transistor AMP and the pad section 120. Therefore, it becomes easier to miniaturize the imaging device 1.

[0091] Furthermore, the positions of the outlines of the multiple pixel sharing units 539 on the second substrate 200 do not have to be aligned with each other. For example, two pixel sharing units 539 aligned in the H direction on the second substrate 200 are arranged with the positions of the outlines in the V direction shifted. This makes it possible to shorten the distance between the amplification transistor AMP and the pad section 120. This makes it easier to miniaturize the imaging device 1.

[0092] 7B and 9, the repeated arrangement of pixel-sharing units 539 in the pixel array section 540 will be described. The pixel-sharing unit 539 of the first substrate 100 has a size equivalent to two pixels 541 in the H direction and a size equivalent to two pixels 541 in the V direction (FIG. 7B). For example, in the pixel array section 540 of the first substrate 100, pixel-sharing units 539 each having a size equivalent to four pixels 541 are repeatedly arranged adjacent to each other at a two-pixel pitch in the H direction (a pitch equivalent to two pixels 541) and at a two-pixel pitch in the V direction (a pitch equivalent to two pixels 541). Alternatively, the pixel array section 540 of the first substrate 100 may be provided with a pair of pixel-sharing units 539 in which two pixel-sharing units 539 are arranged adjacent to each other in the V direction. In the pixel array section 540 of the first substrate 100, for example, a pair of pixel-sharing units 539 are repeatedly arranged adjacent to each other at a two-pixel pitch in the H direction (a pitch equivalent to two pixels 541) and at a four-pixel pitch in the V direction (a pitch equivalent to four pixels 541). The pixel-sharing unit 539 of the second substrate 200 has a size equivalent to one pixel 541 in the H direction and a size equivalent to four pixels 541 in the V direction (FIG. 9). For example, the pixel array section 540 of the second substrate 200 is provided with a pair of pixel-sharing units 539, each including two pixel-sharing units 539 each having a size equivalent to four pixels 541. The pixel-sharing units 539 are arranged adjacent to each other in the H direction and offset in the V direction. In the pixel array section 540 of the second substrate 200, for example, a pair of pixel-sharing units 539 are repeatedly arranged adjacent to each other with no gaps at a pitch of two pixels in the H direction (a pitch corresponding to two pixels 541) and at a pitch of four pixels in the V direction (a pitch corresponding to four pixels 541). By repeatedly arranging the pixel-sharing units 539 in this manner, it is possible to arrange the pixel-sharing units 539 without any gaps. This makes it easier to miniaturize the imaging device 1.

[0093] The wiring layer 200T includes, for example, a passivation film 221, an interlayer insulating film 222, and a plurality of wirings (a first wiring layer W1, a second wiring layer W2, a third wiring layer W3, and a fourth wiring layer W4). The passivation film 221 is in contact with, for example, the surface of the semiconductor layer 200S and covers the entire surface of the semiconductor layer 200S. The passivation film 221 covers the gate electrodes of the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG. The interlayer insulating film 222 is provided between the passivation film 221 and the third substrate 300. The interlayer insulating film 222 separates the plurality of wirings (the first wiring layer W1, the second wiring layer W2, the third wiring layer W3, and the fourth wiring layer W4). The interlayer insulating film 222 is made of, for example, silicon oxide.

[0094] The wiring layer 200T includes, for example, a first wiring layer W1, a second wiring layer W2, a third wiring layer W3, a fourth wiring layer W4, and contact portions 201 and 202 arranged in this order from the semiconductor layer 200S side, and these are insulated from each other by an interlayer insulating film 222. The interlayer insulating film 222 includes a plurality of connection portions connecting the first wiring layer W1, the second wiring layer W2, the third wiring layer W3, or the fourth wiring layer W4 to the layers below them. The connection portions are formed by filling connection holes in the interlayer insulating film 222 with a conductive material. For example, the interlayer insulating film 222 includes a connection portion 218V connecting the first wiring layer W1 and the VSS contact region 218 of the semiconductor layer 200S. For example, the hole diameter of such connection portions connecting elements of the second substrate 200 is different from the hole diameters of the through electrodes 120E and 121E and the through electrodes TGV. Specifically, the diameter of the connection holes connecting the elements of the second substrate 200 is preferably smaller than the diameters of the through electrodes 120E, 121E and the through electrodes TGV. The reason for this is explained below. The depth of the connection portions (such as the connection portion 218V) provided in the wiring layer 200T is smaller than the depths of the through electrodes 120E, 121E and the through electrodes TGV. Therefore, it is easier to fill the connection holes with a conductive material in the connection portions than in the through electrodes 120E, 121E and the through electrodes TGV. Making the diameter of the connection portions smaller than the diameters of the through electrodes 120E, 121E and the through electrodes TGV makes it easier to miniaturize the imaging device 1.

[0095] For example, the first wiring layer W1 connects the through electrode 120E to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG (specifically, a connection hole reaching the source of the FD conversion gain switching transistor FDG). The first wiring layer W1 connects the through electrode 121E to the connection portion 218V, for example, thereby electrically connecting the VSS contact region 218 of the semiconductor layer 200S to the VSS contact region 118 of the semiconductor layer 100S.

[0096] Next, the planar configuration of the wiring layer 200T will be described with reference to Figures 10 to 12. Figure 10 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2. Figure 11 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3. Figure 12 shows an example of the planar configuration of the third wiring layer W3 and the fourth wiring layer W4.

[0097] For example, the third wiring layer W3 includes wirings TRG1, TRG2, TRG3, TRG4, SELL, RSTL, and FDGL extending in the H direction (row direction) (FIG. 11). These wirings correspond to the plurality of row drive signal lines 542 described with reference to FIG. 4. The wirings TRG1, TRG2, TRG3, and TRG4 are for sending drive signals to the transfer gates TG1, TG2, TG3, and TG4, respectively. The wirings TRG1, TRG2, TRG3, and TRG4 are connected to the transfer gates TG1, TG2, TG3, and TG4 via the second wiring layer W2, the first wiring layer W1, and the through-electrode 120E, respectively. The wiring SELL is for sending drive signals to the gate of the selection transistor SEL, the wiring RSTL is for sending drive signals to the gate of the reset transistor RST, and the wiring FDGL is for sending drive signals to the gate of the FD conversion gain switching transistor FDG, respectively. The wirings SELL, RSTL, and FDGL are connected to the gates of the selection transistor SEL, reset transistor RST, and FD conversion gain switching transistor FDG, respectively, via the second wiring layer W2, the first wiring layer W1, and a connection portion.

[0098] For example, the fourth wiring layer W4 includes a power supply line VDD, a reference potential line VSS, and a vertical signal line 543 extending in the V direction (column direction) (FIG. 12). The power supply line VDD is connected to the drain of the amplifier transistor AMP and the drain of the reset transistor RST via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection portion. The reference potential line VSS is connected to the VSS contact region 218 via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection portion 218V. The reference potential line VSS is also connected to the VSS contact region 118 of the first substrate 100 via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, the through electrode 121E, and the pad portion 121. The vertical signal line 543 is connected to the source (Vout) of the select transistor SEL via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection portion.

[0099] The contact portions 201 and 202 may be provided at positions overlapping the pixel array section 540 in a plan view (e.g., FIG. 3), or may be provided in a peripheral section 540B outside the pixel array section 540 (e.g., FIG. 6). The contact portions 201 and 202 are provided on the surface of the second substrate 200 (the surface on the wiring layer 200T side). The contact portions 201 and 202 are made of metal such as Cu (copper) and Al (aluminum). The contact portions 201 and 202 are exposed on the surface of the wiring layer 200T (the surface on the third substrate 300 side). The contact portions 201 and 202 are used for electrical connection between the second substrate 200 and the third substrate 300 and for bonding the second substrate 200 and the third substrate 300 together.

[0100] 6 shows an example in which a peripheral circuit is provided in the peripheral portion 540B of the second substrate 200. This peripheral circuit may include a part of the row driving section 520 or a part of the column signal processing section 550. Alternatively, as shown in FIG. 3, the peripheral circuit may not be provided in the peripheral portion 540B of the second substrate 200, and the connection holes H1 and H2 may be provided near the pixel array section 540.

[0101] The pixel transistors (amplification transistor AMP, selection transistor SEL, reset transistor RST, and FD conversion gain switching transistor FDG) that make up the pixel circuit 210 preferably have a three-dimensional structure such as a fin type (for example, a fin-FET (field-effect transistor), a tri-gate FET, or a double-gate FET) in which the channel region has an uneven structure. In particular, by making the amplification transistor AMP have a three-dimensional structure, the effective gate width becomes larger, making it possible to suppress noise.

[0102] FIG. 13 is a schematic diagram illustrating an example of the cross-sectional configuration of the first substrate 100 and the second substrate 200 when the pixel transistors constituting the pixel circuit 210 are fin-type FD-SOI (fully depleted SOI). FIG. 14 is a diagram illustrating an example of the layout of the pixel circuit 210 on the second substrate 200 when the pixel transistors have a three-dimensional structure. Note that FIG. 13 is a simplified cross-section taken along lines A-A' and B-B' in FIG. 14. FIG. 15 is a comparative example illustrating, in correspondence with the cross-sectional view of FIG. 13, an embodiment in which the through electrode 120E penetrates the insulating region 212 and electrically connects the pad section 120 to the gate AG of the amplification transistor AMP via other wiring such as the first wiring layer W1. FIG. 16 is a diagram illustrating the layout of the pixel circuit on the second substrate 200 when the cross-sectional structure shown in FIG. 15 is employed.

[0103] In the imaging device 1 shown in Fig. 13, the gate of the pixel transistor penetrates from the front surface (surface 200S1) to the back surface (surface 200S2) of the semiconductor layer 200S. In particular, when the amplification transistor AMP has such a structure, the pad section 120 and the amplification transistor AMP can be directly connected by a through electrode 120E, as shown in Figs. 13 and 14. Specifically, of the pixel transistors arranged in parallel in the V direction as shown in Fig. 8, for example, the amplification transistor AMP is extended to the center of the pixel shared unit 539 in the V and H directions as shown in Fig. 14, and extends to above the pad section 120, so that the through electrode 120E penetrates the gate AG of the amplification transistor AMP.

[0104] This eliminates the need for the insulating region 212 that electrically insulates the periphery of the through electrode 120E. That is, it is possible to further reduce the area of ​​the insulating region 212, which is used to form the through wiring that connects the floating diffusion FD and the pixel circuit 210, in the second substrate 200 on which the pixel circuit 210 is formed. This makes it possible to further increase the area of ​​the second substrate 200 on which the pixel circuit 210 is formed. By further increasing the area of ​​the pixel circuit 210 in this way, it becomes possible to form even larger pixel transistors.

[0105] Furthermore, in this structure, the floating diffusion FD and the amplification transistor AMP are directly connected by the through electrode 120E. Therefore, the wiring length between the floating diffusion FD and the amplification transistor AMP can be shortened compared to when the floating diffusion FD and the amplification transistor AMP are electrically connected via the first wiring layer W1 in addition to the through electrode 120E as shown in FIG. 15. Therefore, the wiring capacitance can be reduced compared to the wiring structure shown in FIG. 15, making it possible to improve conversion efficiency. Also, it becomes possible to reduce noise.

[0106] 13 and 14 can be manufactured, for example, as follows: Figures 17A to 17D show an example of the manufacturing process.

[0107] First, as shown in Fig. 17A, a wiring layer 100T is formed on a semiconductor layer 100S, and a bonding film 124 is formed on the back surface (surface 200SA2) of a silicon substrate 200SA. Next, as shown in Fig. 17B, the silicon substrate 200SA is bonded to the wiring layer 100T via the bonding film 124, and then the silicon substrate 200SA is thinned to form a semiconductor layer 200S having a predetermined thickness. Here, the predetermined thickness is the thickness necessary to form the pixel circuit 210. Specifically, the thickness of the semiconductor layer 200S is the height of a Fin-type pixel transistor (for example, several tens to several hundreds of nm).

[0108] Next, as shown in FIG. 17C, the semiconductor layer 200S is appropriately separated to form a pixel circuit 210 including an amplifying transistor AMP and the like. Subsequently, as shown in FIG. 17D, a passivation film 221 (not shown) and an interlayer insulating film 222 are formed, and then through-electrodes 120E, 121E and a connecting portion 218V are formed, and then the surface is planarized by, for example, CMP. Thereafter, a first wiring layer W1, a second wiring layer W2, a third wiring layer W3, a fourth wiring layer W4, and the like are formed to form a wiring layer 200T. In this manner, the imaging device shown in FIG. 13 is manufactured.

[0109] The third substrate 300 includes, for example, a wiring layer 300T and a semiconductor layer 300S in this order from the second substrate 200 side. For example, the surface of the semiconductor layer 300S is provided on the second substrate 200 side. The semiconductor layer 300S is made of a silicon substrate. A circuit is provided on the surface side of the semiconductor layer 300S. Specifically, the surface side of the semiconductor layer 300S includes, for example, at least some of an input unit 510A, a row driver unit 520, a timing control unit 530, a column signal processing unit 550, an image signal processing unit 560, and an output unit 510B. The wiring layer 300T provided between the semiconductor layer 300S and the second substrate 200 includes, for example, an interlayer insulating film, multiple wiring layers separated by the interlayer insulating film, and contact units 301 and 302. The contact portions 301 and 302 are exposed on the surface of the wiring layer 300T (the surface facing the second substrate 200). The contact portion 301 is in contact with the contact portion 201 of the second substrate 200, and the contact portion 302 is in contact with the contact portion 202 of the second substrate 200. The contact portions 301 and 302 are electrically connected to circuits formed in the semiconductor layer 300S (e.g., at least one of the input portion 510A, the row driver portion 520, the timing control portion 530, the column signal processing portion 550, the image signal processing portion 560, and the output portion 510B). The contact portions 301 and 302 are made of metal such as Cu (copper) and aluminum (Al). For example, an external terminal TA is connected to the input portion 510A via a connection hole H1, and an external terminal TB is connected to the output portion 510B via a connection hole H2.

[0110] Here, the features of the imaging device 1 will be described.

[0111] Generally, an imaging device mainly consists of a photodiode and a pixel circuit. Increasing the area of ​​the photodiode increases the amount of charge generated as a result of photoelectric conversion, thereby improving the signal-to-noise ratio (S / N ratio) of the pixel signal and enabling the imaging device to output better image data (image information). On the other hand, increasing the size of the transistors included in the pixel circuit (especially the size of the amplification transistor) reduces the noise generated in the pixel circuit, thereby improving the S / N ratio of the imaging signal and enabling the imaging device to output better image data (image information).

[0112] However, in an imaging device in which a photodiode and a pixel circuit are provided on the same semiconductor substrate, if the area of ​​the photodiode is increased within the limited area of ​​the semiconductor substrate, the size of the transistor provided in the pixel circuit may be reduced, and if the size of the transistor provided in the pixel circuit is increased, the area of ​​the photodiode may be reduced.

[0113] To solve these problems, for example, the imaging device 1 of this embodiment uses a structure in which multiple pixels 541 share one pixel circuit 210 and the shared pixel circuit 210 is arranged so as to overlap the photodiode PD. This makes it possible to maximize the area of ​​the photodiode PD and maximize the size of the transistors provided in the pixel circuit 210 within the limited area of ​​the semiconductor substrate. This improves the S / N ratio of the pixel signal, allowing the imaging device 1 to output better image data (image information).

[0114] When realizing a structure in which multiple pixels 541 share one pixel circuit 210 and this pixel circuit 210 is arranged overlapping the photodiode PD, multiple wirings connected to one pixel circuit 210 extend from the floating diffusion FD of each of the multiple pixels 541. In order to secure a large area for the semiconductor layer 200S forming the pixel circuit 210, for example, it is possible to form a connection wiring that interconnects these multiple extending wirings and combines them into one. Similarly, it is possible to form a connection wiring that interconnects the multiple extending wirings and combines them into one for the multiple wirings extending from the VSS contact region 118.

[0115] For example, if connection wiring that interconnects the multiple wirings extending from the floating diffusion FD of each of the multiple pixels 541 is formed in the semiconductor layer 200S that forms the pixel circuit 210, it is conceivable that the area for forming the transistors included in the pixel circuit 210 will be reduced. Similarly, if connection wiring that interconnects the multiple wirings extending from the VSS contact region 118 of each of the multiple pixels 541 and combines them into one is formed in the semiconductor layer 200S that forms the pixel circuit 210, it is conceivable that this will result in a reduction in the area for forming the transistors included in the pixel circuit 210.

[0116] In order to solve these problems, for example, the imaging device 1 of this embodiment can have a structure in which multiple pixels 541 share one pixel circuit 210 and the shared pixel circuit 210 is arranged superimposed on the photodiode PD, and can have a structure in which connection wiring that interconnects the floating diffusions FD of each of the multiple pixels 541 to combine them into one, and connection wiring that interconnects the VSS contact regions 118 provided in each of the multiple pixels 541 to combine them into one, provided on the first substrate 100.

[0117] Here, when the second manufacturing method described above is used as a manufacturing method for providing, on the first substrate 100, the connection wiring that interconnects and combines the floating diffusions FD of the plurality of pixels 541 and the connection wiring that interconnects and combines the VSS contact regions 118 of the plurality of pixels 541, it is possible to manufacture the first substrate 100 and the second substrate 200 using an appropriate process depending on their respective configurations, thereby manufacturing a high-quality, high-performance imaging device. Furthermore, the connection wiring of the first substrate 100 and the second substrate 200 can be formed through a simple process. Specifically, when the second manufacturing method is used, electrodes connected to the floating diffusions FD and electrodes connected to the VSS contact regions 118 are provided on the surfaces of the first substrate 100 and the second substrate 200, which are the bonding interface between the first substrate 100 and the second substrate 200, respectively. Furthermore, it is preferable to make the electrodes formed on the surfaces of these two substrates large so that the electrodes formed on the surfaces of these two substrates will contact each other even if misalignment occurs between the electrodes formed on the surfaces of these two substrates when the first substrate 100 and the second substrate 200 are bonded together. In this case, it may be difficult to arrange the electrodes within the limited area of ​​each pixel provided in the imaging device 1.

[0118] To solve the problem of needing a large electrode at the bonding interface between the first substrate 100 and the second substrate 200, for example, the imaging device 1 of this embodiment can use the first manufacturing method described above as a manufacturing method in which multiple pixels 541 share one pixel circuit 210 and the shared pixel circuit 210 is arranged so as to overlap the photodiode PD. This makes it easy to align the elements formed on the first substrate 100 and the second substrate 200, making it possible to manufacture an imaging device with high quality and high performance. Furthermore, it is possible to have a unique structure that is created by using this manufacturing method. That is, it has a structure in which the semiconductor layer 100S and wiring layer 100T of the first substrate 100 and the semiconductor layer 200S and wiring layer 200T of the second substrate 200 are stacked in this order, in other words, a structure in which the first substrate 100 and the second substrate 200 are stacked face-to-back, and it also has through electrodes 120E, 121E that pass from the surface side of the semiconductor layer 200S of the second substrate 200, through the semiconductor layer 200S and the wiring layer 100T of the first substrate 100, and reach the surface of the semiconductor layer 100S of the first substrate 100.

[0119] In a structure in which connection wiring that interconnects and combines the floating diffusions FD of each of the multiple pixels 541 into one and connection wiring that interconnects and combines the VSS contact regions 118 of each of the multiple pixels 541 are provided on a first substrate 100, if this structure and a second substrate 200 are stacked using the first manufacturing method to form a pixel circuit 210 on the second substrate 200, there is a possibility that the effects of the heating process required to form the active elements provided in the pixel circuit 210 will extend to the connection wiring formed on the first substrate 100.

[0120] Therefore, in order to solve the problem that the connection wiring is affected by the heat treatment when forming the active elements, the imaging device 1 of this embodiment desirably uses a highly heat-resistant conductive material for the connection wiring that interconnects and combines the floating diffusions FD of each of the plurality of pixels 541 and for the connection wiring that interconnects and combines the VSS contact regions 118 of each of the plurality of pixels 541. Specifically, the highly heat-resistant conductive material can be a material with a higher melting point than at least a portion of the wiring material included in the wiring layer 200T of the second substrate 200.

[0121] In this way, for example, the imaging device 1 of this embodiment has: (1) a structure in which the first substrate 100 and the second substrate 200 are stacked face-to-back (specifically, a structure in which the semiconductor layer 100S and the wiring layer 100T of the first substrate 100 and the semiconductor layer 200S and the wiring layer 200T of the second substrate 200 are stacked in this order); (2) a structure in which the through electrodes 120E, 121E are provided from the front surface side of the semiconductor layer 200S of the second substrate 200, penetrating the semiconductor layer 200S and the wiring layer 100T of the first substrate 100, and reaching the front surface of the semiconductor layer 100S of the first substrate 100; and (3) a structure in which the floating diffusions FD provided in each of the plurality of pixels 541 are provided. By providing a structure in which the connection wiring that interconnects and combines the floating diffusions FD of the plurality of pixels 541 into one and the connection wiring that interconnects and combines the VSS contact regions 118 of each of the plurality of pixels 541 and the connection wiring that interconnects and combines the VSS contact regions 118 of each of the plurality of pixels 541 is formed from a highly heat-resistant conductive material, it is possible to provide the connection wiring that interconnects and combines the floating diffusions FD of the plurality of pixels 541 into one and the connection wiring that interconnects and combines the VSS contact regions 118 of each of the plurality of pixels 541 on the first substrate 100 without providing a large electrode at the interface between the first substrate 100 and the second substrate 200.

[0122] [Operation of imaging device 1] Next, the operation of the imaging device 1 will be described using FIGS. 18 and 19. FIGS. 18 and 19 are diagrams similar to FIG. 3, with arrows added to indicate the paths of each signal. FIG. 18 uses arrows to indicate the paths of input signals input from the outside to the imaging device 1, as well as the paths of the power supply potential and the reference potential. FIG. 19 uses arrows to indicate the signal paths of pixel signals output from the imaging device 1 to the outside. For example, an input signal (e.g., a pixel clock and a synchronization signal) input to the imaging device 1 via the input unit 510A is transmitted to the row driver 520 of the third substrate 300, and a row drive signal is generated in the row driver 520. This row drive signal is sent to the second substrate 200 via the contact units 301 and 201. Furthermore, this row drive signal reaches each pixel shared unit 539 of the pixel array unit 540 via a row drive signal line 542 in the wiring layer 200T. Of the row drive signals that reach the pixel sharing unit 539 on the second substrate 200, the drive signals other than those for the transfer gate TG are input to the pixel circuit 210, driving each transistor included in the pixel circuit 210. The drive signal for the transfer gate TG is input to the transfer gates TG1, TG2, TG3, and TG4 on the first substrate 100 via the through-electrodes TGV, driving the pixels 541A, 541B, 541C, and 541D (FIG. 18). In addition, a power supply potential and a reference potential supplied from the outside of the imaging device 1 to the input section 510A (input terminal 511) of the third substrate 300 are sent to the second substrate 200 via the contact sections 301 and 201, and are supplied to the pixel circuit 210 of each pixel sharing unit 539 via wiring in the wiring layer 200T. The reference potential is also supplied to the pixels 541A, 541B, 541C, and 541D on the first substrate 100 via the through-electrode 121E. Meanwhile, pixel signals photoelectrically converted in the pixels 541A, 541B, 541C, and 541D of the first substrate 100 are sent to the pixel circuit 210 of the second substrate 200 for each pixel sharing unit 539 via the through-electrode 120E. Pixel signals based on these pixel signals are sent from the pixel circuit 210 to the third substrate 300 via the vertical signal line 543 and the contact units 202 and 302. These pixel signals are processed by the column signal processing unit 550 and the image signal processing unit 560 of the third substrate 300, and then output to the outside via the output unit 510B.

[0123] [effect] In this embodiment, the pixel transistors constituting the pixel circuits 210 have a three-dimensional structure, and the floating diffusion FD provided on the first substrate 100 and the pixel circuits 210 (specifically, the gates AG of the amplification transistors AMP) provided on the second substrate 200 are directly connected by the through electrodes 120E. This reduces the formation area of ​​the insulating regions 212 formed in the plane of the semiconductor layer 200S, and ensures the area of ​​the second substrate 200 on which the pixel circuits 210 are formed.

[0124] A CMOS image sensor (CIS) is composed of a light-receiving sensor section and a pixel circuit section that includes a source follower circuit. While technological advances have led to a yearly reduction in cell size, miniaturization is difficult because a certain area is required to form the pixel circuit section. For this reason, as mentioned above, development is underway for three-dimensional image sensors in which the light-receiving sensor section and source follower circuit are formed on different substrates and then stacked.

[0125] In the above-described three-dimensional imaging element, the substrates (corresponding to the first substrate 100 and the second substrate 200 in the present embodiment) on which the light-receiving sensor unit and the source follower circuit are formed are electrically connected via wiring or the like formed horizontally to the main surfaces of the substrates on which the through-wiring and the source follower circuit are formed. In this case, the periphery of the through-wiring must be electrically insulated, so an insulating region is required on the substrate on which the source follower circuit is formed, which limits the area in which the element can actually be arranged.

[0126] In contrast to this, in this embodiment, the pixel transistors constituting the pixel circuit 210 are Fin-type FD-SOI, and the floating diffusion FD provided on the first substrate 100 (specifically, the pad portion 120 formed in an area overlapping with at least a portion of each of the multiple floating diffusions FD1, FD2, FD3, and FD4 that share the pixel circuit 210) and the pixel circuit 210 (specifically, the gate AG of the amplification transistor AMP) are directly connected by a through electrode 120E.

[0127] As a result, in the present embodiment, the area of ​​the insulating region 212 formed in the plane of the semiconductor layer 200S is reduced, and the area of ​​the semiconductor layer 200S for forming the pixel circuit 210 is secured. That is, it is possible to improve the area efficiency of the pixel transistors that form the pixel circuit 210 on the second substrate 200.

[0128] Furthermore, in this embodiment, the floating diffusion FD and the amplification transistor AMP are directly connected by the through electrode 120E, so the wiring length can be shortened compared to the case where the connection is made via the first wiring layer W1 and the connection portion 218V in addition to the through electrode 120E, as shown in FIG. 15. This makes it possible to reduce the wiring capacitance and improve the conversion efficiency. It also makes it possible to reduce noise.

[0129] Below, we will explain modifications of the first embodiment (modifications 1 to 8), modifications of the second embodiment and the second embodiment (modifications 9 to 11), and modifications of the first and second embodiments and modifications 1 to 11 (modifications 12 to 18). In the following, the same components as those in the first embodiment will be given the same reference numerals, and their description will be omitted as appropriate.

[0130] <2. Modifications> (2-1. Variation 1) 20 is a schematic diagram illustrating another example of the cross-sectional configuration of the main part of the imaging device 1 in the first embodiment, that is, the cross-sectional configuration of the first substrate 100 and the second substrate 200. In the first embodiment, an example is shown in which a plurality of pixels 541 (for example, pixels 541A, 541B, 541C, and 541D) share one pixel circuit 210, but the present technology can also be applied to a structure in which one pixel circuit 210 is formed in one pixel 541, as shown in FIG. 20, and can obtain the same effects as in the first embodiment.

[0131] (2-2. Variation 2) 21 is a schematic diagram showing another example of the cross-sectional configuration of the main part of the imaging device 1 in the first embodiment, that is, the cross-sectional configuration of the first substrate 100 and the second substrate 200. In the first embodiment, the amplification transistor AMP, the selection transistor SEL, the reset transistor RST, and the FD conversion gain switching transistor FDG that configure the pixel circuit 210 are exemplified as Fin-type FD-SOI (Fully Depletion SOI), but the pixel transistors other than the amplification transistor AMP may have, for example, a planar structure as shown in FIG.

[0132] (2-3. Variation 3) 22 is a schematic diagram illustrating another example of the cross-sectional configuration of the main part of the imaging device 1 in the first embodiment, that is, the cross-sectional configuration of the first substrate 100 and the second substrate 200. In the first embodiment, an example was shown in which all of the gates of the amplification transistor AMP, the selection transistor SEL, the reset transistor RST, and the FD conversion gain switching transistor FDG that constitute the pixel circuit 210 pass through the semiconductor layer 200S, but the gates of the pixel transistors other than the amplification transistor AMP do not have to pass through the semiconductor layer 200S, as shown in FIG.

[0133] (2-4. Variation 4) 23 is a schematic diagram illustrating another example of the cross-sectional configuration of the main part of the imaging device 1 in the first embodiment, that is, the cross-sectional configuration of the first substrate 100 and the second substrate 200. In the first embodiment, the gate AG of the amplifier transistor AMP is connected to, for example, the source of the reset transistor RST by using a through electrode 120E that connects the pad portion 120 to the gate AG of the amplifier transistor AMP and further penetrates the gate AG to contact the first wiring layer W1, but the present invention is not limited to this.

[0134] Specifically, the connection between the pad section 120 and the gate AG of the amplifier transistor AMP and the connection between the gate AG of the amplifier transistor AMP and the first wiring layer W1 may be made separately. In this modification, as shown in Fig. 23, the connection between the pad section 120 and the gate AG of the amplifier transistor AMP and the connection between the gate AG of the amplifier transistor AMP and the first wiring layer W1 are made by through electrodes 120E1 and 120E2, respectively. This makes it possible to more reliably connect the pad section 120 and the gate AG of the amplifier transistor AMP compared to the structure shown in Fig. 13.

[0135] Furthermore, in this modification, at least the end of the gate AG that penetrates the semiconductor layer 200S of the amplification transistor AMP protrudes from the surface 200S2 of the semiconductor layer 200S toward the first substrate 100. This makes it possible to prevent contact between the through electrode 120E1 and the semiconductor layer 200S.

[0136] (2-5. Variation 5) FIG. 24 is a schematic diagram illustrating another example of the cross-sectional configuration of the main parts of the imaging device 1 according to the first embodiment, i.e., the cross-sectional configuration of the first substrate 100 and the second substrate 200. FIG. 25 is a schematic diagram illustrating the planar configuration of the second substrate 200 of the imaging device 1 illustrated in FIG. 24. In the first embodiment, the connection between the pad section 120 and the amplifier transistor AMP via the through electrode 120E is achieved by the through electrode 120E penetrating the gate AG of the amplifier transistor AMP. However, the through electrode 120E does not necessarily have to penetrate the gate AG of the amplifier transistor AMP. For example, as illustrated in FIG. 24, the through electrode 120E may be in contact with the side surface of the gate AG of the amplifier transistor AMP to connect the pad section 120 and the amplifier transistor AMP. This facilitates the processing of the through electrode 120E compared to the structure illustrated in FIG. 13.

[0137] In this case, it is preferable that the through electrode 120E portion connecting the gate AG of the amplifier transistor AMP and the first wiring layer W1 is formed so that a part of the through electrode 120E hangs over the upper surface of the gate AG of the amplifier transistor AMP, as shown in Fig. 24. This makes it possible to reliably connect the through electrode 120E and the gate AG of the amplifier transistor AMP.

[0138] (2-6. Variation 6) 26 is a schematic diagram illustrating another example of the cross-sectional configuration of the main part of the imaging device 1 according to the first embodiment, i.e., the cross-sectional configuration of the first substrate 100 and the second substrate 200. In the first embodiment, the through electrode 120E has a single width (single diameter). However, as shown in FIG. 26, the through electrode 120E formed between the first wiring layer W1 and the gate AG of the amplifier transistor AMP may have a larger width, specifically, a width larger than the fin-to-fin spacing of the amplifier transistor AMP. This allows for reliable connection between the through electrode 120E and the gate AG of the amplifier transistor AMP.

[0139] (2-7. Variation 7) 27 is a schematic diagram illustrating another example of the cross-sectional configuration of the main part of the imaging device 1 in the first embodiment, that is, the cross-sectional configuration of the first substrate 100 and the second substrate 200. In the first embodiment, the gate AG of the amplification transistor AMP and the source of the reset transistor RST are connected via the through electrode 120E, the first wiring layer W1, and the connection portion 218V, but the present invention is not limited to this.

[0140] For example, as shown in FIG. 27, the gate AG of the amplifier transistor AMP may be extended horizontally, and the gate AG of the amplifier transistor AMP may be directly connected to the source of the reset transistor RST. This allows the wiring length between the amplifier transistor AMP and the reset transistor RST to be shortened. Therefore, compared to the structure shown in FIG. 13, the wiring capacitance can be further reduced, and the conversion efficiency can be further improved. In addition, noise can be further reduced.

[0141] (2-8. Variation 8) 29A to 29D show an example of a manufacturing process for the pixel transistors provided on the second substrate 200 described in the first embodiment.

[0142] In the first embodiment described above, an example is shown in FIG. 13 in which the gate (e.g., gate AG) of the pixel transistor including the amplification transistor AMP penetrates the semiconductor layer 200S. However, in order to reduce noise in such an amplification transistor AMP, it is desirable to make the height of the fins approximately uniform.

[0143] However, in the first manufacturing method described above, in which the pixel circuit 210 is formed after bonding the semiconductor layer 200S of the first substrate 100 and the second substrate 200, unevenness may occur on the surface of the interlayer insulating film 123 due to the influence of the horizontal portion TGb of the transfer gate TG and the pad portions 120, 121 formed on the semiconductor layer 100S constituting the first substrate 100 (see, for example, FIG. 28A). This may also result in unevenness on the surface (face 200S1) of the semiconductor layer 200S after thinning (see, for example, FIG. 28B). If the fins of the amplification transistor AMP are processed under such conditions, variations in the fin height will occur, causing noise. Therefore, the following method is generally used to eliminate variations in the fin height.

[0144] First, as shown in Fig. 28C, the semiconductor layer 200S is separated by, for example, dry etching to form the fins 223, and then, as shown in Fig. 28D, the fins 223 are backfilled with, for example, an oxide film 231. Thereafter, as shown in Fig. 28E, the surface height of the oxide film 231 and the fins 223 is planarized by, for example, CMP, and then, as shown in Fig. 28F, the oxide film 231 is again etched to a predetermined depth by dry etching. However, with this manufacturing method, it is difficult to sufficiently reduce the variation in the height of the fins 223 exposed from the oxide film 231 due to variations in planarization by CMP and variations in etching depth.

[0145] In contrast to this, in this modification, the fins 223 are first filled with, for example, a film (light absorbing film 232) that absorbs ultraviolet (UV) light. Examples of materials for the light absorbing film 232 include silicon oxide (SiN). An example of a manufacturing process for the pixel transistor of this modification will be described below with reference to Figures 29A to 29D.

[0146] First, as shown in FIG. 29A, the fins 223 are buried in a light absorbing film 232. Next, as shown in FIG. 29B, the surface heights of the light absorbing film 232 and the fins 223 are planarized by, for example, CMP. Subsequently, as shown in FIG. 29C, for example, UV light is irradiated to break the bonds of the light absorbing film 232, and a layer 232A with a high etching rate is formed in the light absorbing film 232, followed by etching. As a result, as shown in FIG. 29D, an etched surface with a flat surface (surface 232S) is formed in the light absorbing film 232. Therefore, compared to the above manufacturing method, it is possible to further reduce variations in the height of the fins 223 exposed from the light absorbing film 232 by etching.

[0147] Furthermore, the penetration depth of the UV light into the light absorbing film 232 can be changed by the intensity of the irradiated UV light. Therefore, by changing the intensity of the UV light according to the surface shape of the light absorbing film 232 so as to eliminate variations in planarization by CMP, it becomes possible to further reduce variations in the height of the fins 223 exposed from the light absorbing film 232.

[0148] The light absorbing film 232 is not limited to UV light, and may be any material that absorbs a predetermined wavelength. Other materials for the light absorbing film 232 include, for example, silicon oxynitride, aluminum oxide, hafnium oxide, and dimconium oxide. The light irradiated onto the light absorbing film 232 may be light other than UV light, but considering the effects of light energy and diffraction, it is preferable to use light with a short wavelength.

[0149] The present technology can also be applied to the manufacture of pixel transistors in which the fins 223 are not independent of each other, such as the select transistor SEL and reset transistor RST shown in FIG.

[0150] 30A to 30D show an example of a method for manufacturing a pixel transistor in which the fins 223 are not independent of each other. As shown in FIG. 30A, the fins 223 are formed so that they are continuous with each other, leaving a portion of the semiconductor layer 200S unremoved. Then, as shown in FIG. 30B, a light-absorbing film 232 is formed on the semiconductor layer 200S to bury the fins 223, and the surface heights of the light-absorbing film 232 and the fins 223 are flattened. Next, as shown in FIG. 30C, a layer 232A with a high etching rate is formed in the light-absorbing film 232 by, for example, irradiating with UV light, and then etching is performed. This reduces the variation in the height of the fins 223 exposed from the light-absorbing film 232, as shown in FIG. 30D.

[0151] 31A to 31D show another example of the manufacturing process of the pixel transistors provided on the second substrate 200 in this modified example. A light absorbing film 232 having an absorption coefficient higher than that of the light absorbing film 232 may be formed in advance on the surface of the fin 223.

[0152] First, as shown in FIG. 31A, a light-absorbing film 232 is formed on the surface of the fin 223 and on the first substrate 100. Next, as shown in FIG. 31B, the light-absorbing film 232 is formed in the same manner as above to embed the fin 223, and then the surfaces of the light-absorbing film 232 and the fin 223 are planarized. Subsequently, as shown in FIG. 31C, UV light is irradiated to form a layer 232A with a high etching rate in the light-absorbing film 232. Thereafter, etching is performed as shown in FIG. 31D. In this way, by forming a light-absorbing film 232 with a higher absorption coefficient than the light-absorbing film 232 on the surface of the fin 223, it is possible to reduce the formation of defects caused by UV light irradiation of the fin 223.

[0153] 3. Second Embodiment FIG. 32 is a schematic diagram illustrating an example of a cross-sectional configuration of the first substrate 100 and the second substrate 200 as a main part of the imaging device 1 according to the second embodiment of the present disclosure. FIG. 33 is a schematic diagram illustrating a planar configuration of the second substrate 200 in the imaging device 1 illustrated in FIG. 32. Note that FIG. 32 is a simplified cross-section taken along the line CC' illustrated in FIG. 33. In the first embodiment described above, an example was shown in which the amplifier transistor AMP, which is directly connected to the pad portion 120 by the through electrode 120E, is a fin-type FD-SOI (fully depleted SOI) (see, for example, FIG. 13 ). However, the amplifier transistor AMP may have another three-dimensional structure. In this embodiment, a case in which the amplifier transistor AMP has a GAA (gate all around) structure will be described in detail.

[0154] [Configuration of the amplifier transistor AMP] Fig. 34 is an enlarged view of the amplifier transistor AMP within the dashed-dotted line shown in Fig. 32. The amplifier transistor AMP has a GAA structure in which a gate AG is provided continuously around the channel 224. In the amplifier transistor AMP of this embodiment, a portion of the gate insulating film 225 that electrically insulates the gate AG from the channel 224 is formed to be wider than the width of the channel 224. Specifically, of the gate insulating films 225 provided around the channel 224 extending in the V direction, the gate insulating film 225 provided on the surface (lower surface) of the channel 224 that faces the pad portion 120 is formed to be wider than the width of the channel 224 in the H direction. More specifically, the gate insulating film 225 extending outward from the lower surface of the channel 224 extends closer to the first substrate 100 and to a position one step lower than the gate insulating film 225 provided on the lower surface of the channel 224. Furthermore, a through electrode 120E is connected to the gate AG as in the first embodiment, and in this embodiment, the through electrode 120E also serves as the gate AG of the amplifier transistor AMP formed below the channel 224.

[0155] [Manufacturing method of the amplifier transistor AMP] A method for manufacturing the amplifier transistor AMP of this embodiment will be described below. Figures 35A to 35I show an example of a manufacturing process for the amplifier transistor AMP shown in Figures 32 to 34.

[0156] First, as shown in FIG. 35A, a semiconductor layer 200S is bonded to a first substrate 100, and an insulating region 212 and an element isolation region 213 are formed in predetermined positions. Next, as shown in FIG. 35B, an opening H3 is formed in the insulating region 212 formed above the pad portion 120, reaching the pad portion 120. Subsequently, as shown in FIG. 35C, after polysilicon, for example, is embedded in the opening H3, the polysilicon provided on the semiconductor layer 200S is removed by, for example, CMP, and the surface of the semiconductor layer 200S including the insulating region 212 and the element isolation region 213 is planarized. This forms a through electrode 120E that also serves as the gate AG of the amplification transistor AMP.

[0157] Next, as shown in FIG. 35D, for example, a silicon oxide film 225X and a polysilicon film 224X are sequentially formed on the semiconductor layer 200S including the insulating region 212, the element isolation region 213, and the through electrode 120E. Subsequently, the polysilicon film 224X and the silicon oxide film 225X are processed by, for example, photolithography and etching. As a result, as shown in FIG. 35E, a gate insulating film 225A covering the channel 224 of the amplification transistor AMP and the lower surface of the channel 224 is formed. Thereafter, a thermal oxide film is formed on the surfaces of the through electrode 120E and the channel 224 by annealing. This thermal oxide film becomes a gate insulating film 225B that extends outward beyond the upper and side surfaces of the channel 224 and the lower surface of the channel 224.

[0158] 35F, a resist film 234 having openings at predetermined positions is formed by, for example, photolithography. Subsequently, as shown in Fig. 35G, the thermal oxide film on the through electrode 120E exposed from the resist film 234 is removed by, for example, etching, and then the resist film 234 is removed. Then, a polysilicon film 226X is formed on the semiconductor layer 200S including the insulating region 212, the element isolation region 213, the through electrode 120E, the channel 224 provided on the through electrode 120E, and the like.

[0159] Next, as shown in FIG. 35H, the polysilicon film 226X is processed by, for example, photolithography and etching. This forms the gate AG of the amplifier transistor AMP and the gates of other pixel transistors (not shown), which cover the side and top surfaces of the channel 224. As a result, the amplifier transistor AMP is completed, which has a gate insulating film 225 that extends wider than the width of the channel 224 in the H direction and in which the gate insulating film 225B, which also extends wider than the width of the channel 224 in the H direction, is formed at a position one step lower than the gate insulating film 225A provided on the lower surface of the channel 224. Thereafter, as shown in FIG. 35H, a passivation film 221 is formed to cover the gate AG of the amplifier transistor AMP and the gates of other pixel transistors (not shown).

[0160] Next, as shown in Fig. 35I, an interlayer insulating film 222 is formed on the passivation film 221, and then a connection portion 218V reaching the gate of a pixel transistor including an amplification transistor AMP, a through electrode 121E reaching the pad portion 121, and the like (not shown) are formed. Thereafter, a first wiring layer W1 is formed. In this way, the second substrate 200 of the imaging device 1 shown in Fig. 32 is formed.

[0161] [effect] As described above, in this embodiment, the amplification transistor AMP has a GAA structure, and the floating diffusion FD (specifically, the pad portion 120) and the amplification transistor AMP are directly connected by the through electrode 120E. Therefore, compared to the layout of a typical pixel circuit 210 as shown in FIG. 36, for example, it is possible to ensure a larger formation area for the pixel circuit 210 in the second substrate 200 (see FIG. 33). That is, similar to the first embodiment, it is possible to improve the area efficiency of the pixel transistors that constitute the pixel circuit 210 on the second substrate 200.

[0162] In addition, in this embodiment, as in the first embodiment, the wiring length between the pad section 120 and the amplification transistor AMP can be shortened, which reduces the wiring capacitance and improves the conversion efficiency, and also reduces noise.

[0163] Furthermore, when forming an amplifying transistor AMP with a GAA structure on the second substrate 200 using a general manufacturing method, when forming a gate insulating film around the channel, an oxide film may also be formed on the contact portion with the floating diffusion FD (for example, on the surface of the pad portion 120), which may prevent electrical continuity with the floating diffusion FD.

[0164] In contrast, in this embodiment, an opening H3 reaching the pad portion 120 is formed in advance, polysilicon is embedded in the opening H3 to form a through electrode 120E, and then a channel 224 is formed, followed by annealing to form a gate insulating film 225. This prevents an oxide film from being formed on the surface of the pad portion 120, making it possible to ensure electrical continuity between the pad portion 120 and the amplification transistor AMP. This makes it possible to improve manufacturing yield and reliability.

[0165] <4. Modifications> (4-1. Variation 9) 37 is a schematic diagram illustrating another example of the cross-sectional configuration of the main parts of the imaging device 1 in the second embodiment, that is, the cross-sectional configuration of the first substrate 100 and the second substrate 200. This modification differs from the second embodiment in that a widened portion 120EA is provided above the through electrode 120E that is embedded in the insulating region 212 and also serves as the gate AG on the underside of the channel 224 of the amplification transistor AMP.

[0166] 38A to 38E show an example of a manufacturing process for the amplifying transistor AMP shown in FIG.

[0167] 38A, the semiconductor layer 200S is bonded to the first substrate 100, and an insulating region 212 and an element isolation region 213 are formed in predetermined positions. Thereafter, an opening H3 that reaches the pad portion 120 and an opening H4 that is wider than the opening H3 are formed in the insulating region 212 formed above the pad portion 120. Next, in the same manner as in the second embodiment, polysilicon is embedded in the openings H3 and H4, and a silicon oxide film 225X and a polysilicon film 224X, for example, are formed on the semiconductor layer 200S including the insulating region 212, the element isolation region 213, and the through electrode 120E, as shown in FIG.

[0168] 38C, polysilicon film 224X and silicon oxide film 225X are processed to form channel 224 and gate insulating film 225A, and then annealing is performed to form a thermal oxide film that becomes gate insulating film 225B on the surfaces of through electrode 120E and channel 224. Next, as shown in FIG. 38D, a resist film 234 having openings at predetermined positions is formed by, for example, photolithography.

[0169] Next, as in the second embodiment, the thermal oxide film on the through electrode 120E exposed from the resist film 234 is removed by, for example, etching, and then the resist film 234 is removed. A polysilicon film 226X is then formed on the semiconductor layer 200S, including the insulating region 212, the element isolation region 213, the through electrode 120E, and the channel 224 provided on the through electrode 120E. Next, as shown in FIG. 38E, the polysilicon film 226X is processed by, for example, photolithography and etching to form a gate AG. Thereafter, as in the second embodiment, a passivation film 221, an interlayer insulating film 222, and a first wiring layer W1 are sequentially formed. As a result of the above, the second substrate 200 of the imaging device 1 shown in FIG. 37 is formed.

[0170] As described above, in this modification, the widened portion 120EA is provided on the upper portion of the through electrode 120E, which is embedded in the insulating region 212 and also serves as the gate AG on the underside of the channel 224 of the amplifier transistor AMP. In other words, a convex portion having a diameter larger than the wiring diameter of the through electrode 120E is provided on the portion of the gate AG provided around the channel 224 that is embedded in the insulating region 212. As a result, as shown by the arrow in FIG. 38E , the distance between the end of the gate insulating film 225B and the contact portion between the through electrode 120E and the gate AG is wider than in the second embodiment. This increases the margin for conduction defects between the pad portion 120 and the amplifier transistor AMP, making it possible to further improve manufacturing yield and reliability.

[0171] (4-2. Variation 10) Fig. 39 is a schematic diagram showing another example of the cross-sectional configuration of the main part of the imaging device 1 in the second embodiment, i.e., the cross-sectional configuration of the first substrate 100 and the second substrate 200. Fig. 40 is an enlarged view of the amplifying transistor AMP within the dashed-dotted line shown in Fig. 39. This modification differs from the second embodiment in that a thermal oxide film 227, which is wider than the width of the channel 224 in the H direction and is provided apart from the channel 224 and the gate insulating film 225, is formed below the channel 224 in the gate AG.

[0172] 41A to 41E show an example of a manufacturing process for the amplifying transistor AMP shown in FIGS.

[0173] 41A, a sacrificial layer 235 made of, for example, silicon germanium (SiGe) and a polysilicon film 224X are sequentially formed on a semiconductor layer 200S including an insulating region 212, an element isolation region 213, and a through electrode 120E. Next, as shown in FIG. 41B, the polysilicon film 224X is processed by, for example, photolithography and wet etching to form a channel 224, and the sacrificial layer 235 is removed.

[0174] Subsequently, an annealing process is performed to form a gate insulating film 225 and a thermal oxide film 227 on the surfaces of the through electrode 120E and the channel 224, respectively, as shown in FIG. 41C. Next, as shown in FIG. 41D, a resist film 234 having openings at predetermined positions is formed in the same manner as in the second embodiment. Next, the thermal oxide film 227 on the through electrode 120E exposed from the resist film 234 is removed by, for example, etching, and then the resist film 234 is removed. A polysilicon film 226X is formed on the semiconductor layer 200S including the insulating region 212, the element isolation region 213, the through electrode 120E, and the channel 224 provided on the through electrode 120E. Next, as shown in FIG. 41E, the polysilicon film 226X is processed by, for example, photolithography and etching to form a gate AG, and then a passivation film 221, an interlayer insulating film 222, and a first wiring layer W1 are sequentially formed in the same manner as in the second embodiment. In this way, the second substrate 200 of the imaging device 1 shown in FIG. 39 is formed.

[0175] As described above, in this modification, the sacrificial layer 235 and the polysilicon film 224X are sequentially formed on the semiconductor layer 200S including the insulating region 212, the element isolation region 213, and the through electrode 120E, and then the polysilicon film 224X is processed to form the channel 224, and the gate insulating film 225 is formed by thermal oxidation. This makes it possible to improve the manufacturing yield and reliability in comparison with the case where a manufacturing method for the amplification transistor AMP having a general GAA structure is used, in addition to the effects of the first embodiment, as in the second embodiment.

[0176] 42, this modification can also be combined with modification 9. By controlling the formation range of resist film 234, the etching time and conditions, and the like, it is also possible to form thermal oxide film 227 to be narrower than the width of channel 224 in the H direction, as shown in FIG. 43. This increases the distance between the end of thermal oxide film 227 and the contact portion between through electrode 120E and gate AG, thereby further increasing the margin for conduction defects between pad portion 120 and amplification transistor AMP, making it possible to further improve manufacturing yield and reliability.

[0177] (4-3. Variation 11) In this modification, a method is described in which, when forming the amplification transistor AMP using the method described in the above modification 10, the sacrificial layer 235 below the channel 224 is selectively removed, and the sacrificial layer 235 formed below the source 224S and the drain 224D formed at both ends of the channel 224 is left.

[0178] When the amplification transistor AMP is formed using the method shown in the above-described modified example 10, the sacrificial layer 235 formed below the polysilicon film 224X that constitutes the channel 224 is removed by wet etching or the like during processing of the polysilicon film 224X. However, it is desirable that the sacrificial layer 235 below the polysilicon film 224X that constitutes the source 224S and the drain 224D formed at both ends of the channel 224 remains so that the polysilicon film 224X does not peel off. For this reason, the polysilicon film 224X in the source 224S and drain 224D portions is generally processed to be larger than the channel 224 portion, as shown in FIG. 44, for example.

[0179] 45A to 45J show an example of a manufacturing process of the amplifying transistor AMP in this modification. In Fig. 45B to 45J, (A) shows the cross section along line CC' (channel 224 portion) shown in Fig. 44, and (B) shows the cross section along line DD' (drain 224D portion).

[0180] 45A, a sacrificial layer 235 and a polysilicon film 224X formed on a semiconductor layer 200S including an insulating region 212, an element isolation region 213, and a through electrode 120E are processed into a predetermined shape. Next, as shown in FIG. 45B, a resist film 236 is formed on both end portions of the polysilicon film 224X that will become the source 224S and the drain 224D.

[0181] Next, as shown in FIG. 45C, the sacrificial layer 235 immediately below the polysilicon film 224X that will become the channel 224 is removed by, for example, wet etching. At this time, the sacrificial layer 235 immediately below the polysilicon film 224X that will become the source 224S and the drain 224D is not removed because it is covered by the resist film 236. Thereafter, the resist film 236 is removed. Next, as shown in FIG. 45D, a thermal oxide film is formed on the surface of the polysilicon film 224X and the surface of the through electrode 120E by annealing. This thermal oxide film becomes the gate insulating film 225 and the thermal oxide film 227 shown in FIGS. 39 and 40.

[0182] 45E, a resist film 237 is formed to cover the polysilicon film 224X, and then, as shown in Fig. 45F, the thermal oxide film 227 formed on the upper surface of the through electrode 120E exposed from the resist film 237 is removed by etching. Next, as shown in Fig. 45G, a polysilicon film 226X is formed on the semiconductor layer 200S including the insulating region 212, the element isolation region 213, the through electrode 120E, and the polysilicon film 224X that will become the channel 224, the source 224S, and the drain 224D.

[0183] Subsequently, as shown in FIG. 45H, a resist film 238 is formed at a predetermined position on the polysilicon film 226X. Specifically, the resist film 238 is formed on the polysilicon film 224X that will become the channel 224. Next, as shown in FIG. 45I, the polysilicon film 226X is processed by etching to form a gate AG, and then a passivation film 221 is formed. Thereafter, as shown in FIG. 45J, an interlayer insulating film 222, a connecting portion 218B, and a first wiring layer W1 are formed in this order.

[0184] In the amplification transistor AMP formed using the above-described manufacturing method, the sacrificial layer 235 can be left directly below the polysilicon film 224X that becomes the source 224S and the drain 224D. Therefore, for example, as shown in FIG. 46, it is possible to form the source 224S and the drain 224D and the channel 224 to have approximately the same width. This allows the chip size of the entire pixel circuit 210 to be reduced, making it possible to improve the yield within a single silicon wafer, for example.

[0185] Note that both end portions of the polysilicon film 224X that become the source 224S and the drain 224D may be rounded and curved, for example, as shown in Fig. 47. Furthermore, in the above-described modification 10 and this modification, SiGe is given as an example of the material for the sacrificial layer 235, but the sacrificial layer 235 is not limited to this, and may be formed using, for example, a conductive film or an insulating film.

[0186] Furthermore, even if the amplifying transistor AMP has a GAA structure, the gate length may be insufficient. In such a case, the polysilicon film 224X constituting the channel 224 may be replaced with a multilayer film 228 in which Si films 228X1 made of polysilicon and sacrificial layers 228X2 made of, for example, SiGe are alternately stacked, as shown in FIG. 48A. This makes it possible to ensure the gate length.

[0187] In this way, when using the multilayer film 228 in which the Si films 228X1 and the sacrificial layers 228X2 are alternately stacked, the channel 224 portion and the source 224S and drain 224D portions can be processed as follows.

[0188] First, the multilayer film 228 is processed into a predetermined shape, and then, as shown in FIG. 48A, the multilayer film 228 is covered with an inverted tapered resist film 239, except for the lowest sacrificial layer 228X2 of the multilayer film 228, which will become the channel 224. The inverted tapered resist film 239 can be formed using, for example, a negative resist. Next, as shown in FIG. 48B, the lowest sacrificial layer 228X2 of the channel 224 portion exposed from the resist film 239 is selectively removed by, for example, wet etching. Thereafter, the resist film 239 is removed. Next, as shown in FIG. 48C, the gate insulating film 225, the thermal oxide film 227, the gate AG, the passivation film 221, the interlayer insulating film 222, the connection portion 218B, and the first wiring layer W are sequentially formed in the same manner as above.

[0189] Although the second embodiment and Modifications 9 to 11 have shown examples in which the amplification transistor AMP has a GAA structure, all of the transistors constituting the pixel circuit 210 may have a GAA structure. In this case, the semiconductor layer 200S may be a multilayer film 228 in which the Si films 228X1 and the sacrificial layers 228X2 are alternately stacked as described above. In this case, the thickness of the multilayer film 228 is thinner than the thickness of the semiconductor layer 200S, which allows the thickness of the second substrate 200 to be reduced. Therefore, the aspect ratio of the through electrodes 120E and 121E is reduced, which improves ease of processing and stability, and allows for an improvement in yield.

[0190] <5. Variation 12> 49 to 53 illustrate a modified example of the planar configuration of the imaging device 1 according to the above-described embodiments. FIG. 49 schematically illustrates the planar configuration of the vicinity of the surface of the semiconductor layer 200S of the second substrate 200, corresponding to FIG. 8 described in the first embodiment. FIG. 50 schematically illustrates the configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, corresponding to FIG. 9 described in the first embodiment. FIG. 51 illustrates an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, corresponding to FIG. 10 described in the first embodiment. FIG. 52 illustrates an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, corresponding to FIG. 11 described in the first embodiment. FIG. 53 illustrates an example of the planar configuration of the third wiring layer W3 and the fourth wiring layer W4, corresponding to FIG. 12 described in the first embodiment.

[0191] 50 , of two pixel-sharing units 539 aligned in the H direction on the second substrate 200, the internal layout of one pixel-sharing unit 539 (e.g., the right side of the paper) is configured to be inverted in only the H direction from the internal layout of the other pixel-sharing unit 539 (e.g., the left side of the paper). Also, the deviation in the V direction between the outline of one pixel-sharing unit 539 and the outline of the other pixel-sharing unit 539 is larger than the deviation described in the first embodiment above ( FIG. 9 ). Increasing the deviation in the V direction in this way can reduce the distance between the amplification transistor AMP of the other pixel-sharing unit 539 and the pad unit 120 connected thereto (the pad unit 120 on the other (lower side of the paper) of the two pixel-sharing units 539 aligned in the V direction shown in FIG. 7B ). With this layout, in the 12th modification of the imaging device 1 shown in FIGS. 49 to 53, the area of ​​two pixel sharing units 539 arranged in the H direction can be made the same as the area of ​​the pixel sharing unit 539 on the second substrate 200 described in the first embodiment above, without having to invert the planar layouts of these units in the V direction. The planar layout of the pixel sharing units 539 on the first substrate 100 is the same as the planar layout (FIGS. 7A and 7B) described in the first embodiment above. Therefore, the imaging device 1 of this modification can achieve the same effects as the imaging device 1 described in the first embodiment above. The arrangement of the pixel sharing units 539 on the second substrate 200 is not limited to the arrangements described in the first and second embodiments and this modification.

[0192] <6. Variation 13> 54 to 59 illustrate a modified example of the planar configuration of the imaging device 1 according to the above-described embodiments. FIG. 54 schematically illustrates the planar configuration of the first substrate 100, corresponding to FIG. 7A described in the first embodiment. FIG. 55 schematically illustrates the planar configuration of the surface of the semiconductor layer 200S of the second substrate 200, corresponding to FIG. 8 described in the first embodiment. FIG. 56 schematically illustrates the configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, corresponding to FIG. 9 described in the first embodiment. FIG. 57 illustrates an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, corresponding to FIG. 10 described in the first embodiment. FIG. 58 illustrates an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, corresponding to FIG. 11 described in the first embodiment. FIG. 59 shows an example of a planar configuration of the third wiring layer W3 and the fourth wiring layer W4, and corresponds to FIG. 12 described in the first embodiment.

[0193] In this modification, the outline of each pixel circuit 210 has a substantially square planar shape (see FIG. 55, etc.). In this respect, the planar configuration of the imaging device 1 of this modification differs from the planar configuration of the imaging device 1 described in the first embodiment.

[0194] For example, the pixel sharing unit 539 of the first substrate 100 is formed across a pixel region of 2 rows and 2 columns, as described in the first embodiment above, and has an approximately square planar shape (Figure 54). For example, in each pixel sharing unit 539, the horizontal portions TGb of the transfer gates TG1 and TG3 of pixels 541A and 541C in one pixel column extend in the H direction from the position where they overlap with the vertical portion TGa toward the center of the pixel sharing unit 539 (more specifically, toward the outer edges of pixels 541A and 541C and toward the center of the pixel sharing unit 539), and the horizontal portions TGb of the transfer gates TG2 and TG4 of pixels 541B and 541D in the other pixel column extend in the H direction from the position where they overlap with the vertical portion TGa toward the outside of the pixel sharing unit 539 (more specifically, toward the outer edges of pixels 541B and 541D and toward the outside of the pixel sharing unit 539). The pad portion 120 connected to the floating diffusion FD is provided in the center of the pixel sharing unit 539 (the center of the pixel sharing unit 539 in the H and V directions), and the pad portion 121 connected to the VSS contact region 118 is provided at the end of the pixel sharing unit 539 at least in the H direction (in the H and V directions in Figure 54).

[0195] As another example of arrangement, it is possible to provide the horizontal portions TGb of the transfer gates TG1, TG2, TG3, and TG4 only in the regions facing the vertical portions TGa. In this case, as described in the first embodiment, the semiconductor layer 200S is likely to be divided into small pieces. Therefore, it becomes difficult to form large transistors in the pixel circuit 210. On the other hand, if the horizontal portions TGb of the transfer gates TG1, TG2, TG3, and TG4 are extended in the H direction from positions overlapping the vertical portions TGa, as in the above modification, the width of the semiconductor layer 200S can be increased, as described in the first embodiment. Specifically, the H-direction positions of the through electrodes TGV1 and TGV3 connected to the transfer gates TG1 and TG3 can be arranged close to the H-direction position of the through electrode 120E, and the H-direction positions of the through electrodes TGV2 and TGV4 connected to the transfer gates TG2 and TG4 can be arranged close to the H-direction position of the through electrode 121E (FIG. 56). This allows the width (size in the H direction) of the semiconductor layer 200S extending in the V direction to be increased, as described in the first embodiment above. This allows the size of the transistors in the pixel circuit 210, particularly the size of the amplifying transistor AMP, to be increased. As a result, the signal-to-noise ratio of the pixel signal is improved, and the imaging device 1 can output better pixel data (image information).

[0196] The pixel-sharing unit 539 of the second substrate 200 has, for example, approximately the same size in the H direction and V direction as the pixel-sharing unit 539 of the first substrate 100, and is provided, for example, across an area corresponding to a pixel area of ​​approximately 2 rows by 2 columns. For example, in each pixel circuit 210, a selection transistor SEL and an amplification transistor AMP are arranged side by side in the V direction in one semiconductor layer 200S extending in the V direction, and an FD conversion gain switching transistor FDG and a reset transistor RST are arranged side by side in the V direction in one semiconductor layer 200S extending in the V direction. The one semiconductor layer 200S provided with the selection transistor SEL and the amplification transistor AMP and the one semiconductor layer 200S provided with the FD conversion gain switching transistor FDG and the reset transistor RST are arranged side by side in the H direction via an insulating region 212. This insulating region 212 extends in the V direction ( FIG. 55 ).

[0197] Here, the external shape of the pixel-shared unit 539 on the second substrate 200 will be described with reference to Fig. 55 and Fig. 56. For example, the pixel-shared unit 539 on the first substrate 100 shown in Fig. 54 is connected to an amplifier transistor AMP and a select transistor SEL provided on one side in the H direction of the pad section 120 (the left side of the paper in Fig. 56), and an FD conversion gain switching transistor FDG and a reset transistor RST provided on the other side in the H direction of the pad section 120 (the right side of the paper in Fig. 56). The external shape of the pixel-shared unit 539 on the second substrate 200 including the amplifier transistor AMP, select transistor SEL, FD conversion gain switching transistor FDG, and reset transistor RST is determined by the following four outer edges:

[0198] The first outer edge is the outer edge of one end in the V direction (the upper end in the plane of FIG. 56 ) of the semiconductor layer 200S including the select transistor SEL and the amplifier transistor AMP. This first outer edge is provided between the amplifier transistor AMP included in the pixel sharing unit 539 and the select transistor SEL included in the pixel sharing unit 539 adjacent to the pixel sharing unit 539 on one side in the V direction (the upper side in FIG. 56 ). More specifically, the first outer edge is provided in the center in the V direction of the element isolation region 213 between the amplifier transistor AMP and the select transistor SEL. The second outer edge is the outer edge of the other end in the V direction (the lower end in the plane of FIG. 56 ) of the semiconductor layer 200S including the select transistor SEL and the amplifier transistor AMP. This second outer edge is provided between the select transistor SEL included in the pixel sharing unit 539 and the amplifier transistor AMP included in the pixel sharing unit 539 adjacent to the pixel sharing unit 539 on the other side in the V direction (the lower side in FIG. 56 ). More specifically, the second outer edge is provided in the center in the V direction of the element isolation region 213 between the select transistor SEL and the amplification transistor AMP. The third outer edge is the outer edge of the other end in the V direction (the end on the lower side of the paper in FIG. 56 ) of the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. This third outer edge is provided between the FD conversion gain switching transistor FDG included in the pixel shared unit 539 and the reset transistor RST included in the pixel shared unit 539 adjacent to the other side in the V direction (the lower side of the paper in FIG. 56 ). More specifically, the third outer edge is provided in the center in the V direction of the element isolation region 213 between the FD conversion gain switching transistor FDG and the reset transistor RST. The fourth outer edge is the outer edge of one end in the V direction (the end on the upper side of the paper in FIG. 56 ) of the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. This fourth outer edge is provided between the reset transistor RST included in the pixel sharing unit 539 and the FD conversion gain switching transistor FDG (not shown) included in the pixel sharing unit 539 adjacent to this pixel sharing unit 539 on one side of the V direction (upper side of the paper in Figure 56).More specifically, the fourth outer edge is provided at the center in the V direction of the element isolation region 213 (not shown) between the reset transistor RST and the FD conversion gain switching transistor FDG.

[0199] In the outline of the pixel shared unit 539 on the second substrate 200, which includes the first, second, third, and fourth outer edges, the third and fourth outer edges are arranged to be shifted to one side in the V direction relative to the first and second outer edges (in other words, offset to one side in the V direction). Using such a layout allows the gate of the amplifier transistor AMP and the source of the FD conversion gain switching transistor FDG to be arranged as close as possible to the pad section 120. This reduces the area of ​​the wiring connecting them, facilitating miniaturization of the imaging device 1. The VSS contact region 218 is provided between the semiconductor layer 200S including the select transistor SEL and the amplifier transistor AMP and the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. For example, multiple pixel circuits 210 have the same layout.

[0200] The imaging device 1 having such a second substrate 200 also provides the same effects as those described in the above first embodiment. The arrangement of the pixel sharing units 539 on the second substrate 200 is not limited to the arrangements described in the above first and second embodiments and this modified example.

[0201] <7. Variation 14> FIGS. 60 to 65 illustrate a modified example of the planar configuration of the imaging device 1 according to the above-described embodiments. FIG. 60 schematically illustrates the planar configuration of the first substrate 100, corresponding to FIG. 7B described in the first embodiment. FIG. 61 schematically illustrates the planar configuration of the surface of the semiconductor layer 200S of the second substrate 200, corresponding to FIG. 8 described in the first embodiment. FIG. 62 schematically illustrates the configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, corresponding to FIG. 9 described in the first embodiment. FIG. 63 illustrates an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, corresponding to FIG. 10 described in the first embodiment. FIG. 64 illustrates an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, corresponding to FIG. 11 described in the first embodiment. FIG. 65 shows an example of a planar configuration of the third wiring layer W3 and the fourth wiring layer W4, and corresponds to FIG. 12 described in the first embodiment.

[0202] In this modification, the semiconductor layer 200S of the second substrate 200 extends in the H direction (FIG. 62). That is, this configuration roughly corresponds to the planar configuration of the imaging device 1 shown in FIG. 55 and the like rotated by 90 degrees.

[0203] For example, the pixel-sharing unit 539 of the first substrate 100 is formed across a 2-row by 2-column pixel region, as described in the first embodiment above, and has a substantially square planar shape ( FIG. 60 ). For example, in each pixel-sharing unit 539, the transfer gates TG1 and TG2 of pixels 541A and 541B in one pixel row extend toward the center of the pixel-sharing unit 539 in the V direction, and the transfer gates TG3 and TG4 of pixels 541C and 541D in the other pixel row extend outward from the pixel-sharing unit 539 in the V direction. The pad section 120 connected to the floating diffusion FD is provided in the center of the pixel-sharing unit 539, and the pad section 121 connected to the VSS contact region 118 is provided at an end of the pixel-sharing unit 539 at least in the V direction (in the V and H directions in FIG. 60 ). At this time, the V-direction positions of the through electrodes TGV1 and TGV2 of the transfer gates TG1 and TG2 approach the V-direction position of the through electrode 120E, and the V-direction positions of the through electrodes TGV3 and TGV4 of the transfer gates TG3 and TG4 approach the V-direction position of the through electrode 121E (FIG. 62). Therefore, for the same reason as described in the first embodiment, the width (size in the V-direction) of the semiconductor layer 200S extending in the H-direction can be increased. This makes it possible to increase the size of the amplification transistor AMP and suppress noise.

[0204] In each pixel circuit 210, the selection transistor SEL and the amplification transistor AMP are arranged side by side in the H direction, and the reset transistor RST is arranged adjacent to the selection transistor SEL in the V direction with the insulating region 212 between them (FIG. 61). The FD conversion gain switching transistor FDG is arranged side by side with the reset transistor RST in the H direction. The VSS contact region 218 is provided in an island shape in the insulating region 212. For example, the third wiring layer W3 extends in the H direction (FIG. 64), and the fourth wiring layer W4 extends in the V direction (FIG. 65).

[0205] The imaging device 1 having such a second substrate 200 also provides the same effects as those described in the first embodiment. The arrangement of the pixel sharing units 539 on the second substrate 200 is not limited to the arrangements described in the first and second embodiments and this modification. For example, the semiconductor layer 200S described in the first and second embodiments and modification 12 may extend in the H direction.

[0206] <8. Variation 15> Fig. 66 is a schematic diagram illustrating a modified example of the cross-sectional configuration of the imaging device 1 according to the above-described embodiments. Fig. 66 corresponds to Fig. 3 described in the first embodiment. In this modified example, the imaging device 1 has contact portions 203, 204, 303, and 304 at positions facing the center of the pixel array section 540, in addition to contact portions 201, 202, 301, and 302. In this respect, the imaging device 1 of this modified example differs from the imaging device 1 described in the first embodiment.

[0207] Contact portions 203 and 204 are provided on second substrate 200 and are exposed on the bonding surface with third substrate 300. Contact portions 303 and 304 are provided on third substrate 300 and are exposed on the bonding surface with second substrate 200. Contact portion 203 contacts contact portion 303, and contact portion 204 contacts contact portion 304. That is, in this imaging device 1, second substrate 200 and third substrate 300 are connected by contact portions 203, 204, 303, and 304 in addition to contact portions 201, 202, 301, and 302.

[0208] Next, the operation of the imaging device 1 will be described using FIGS. 67 and 68. In FIG. 67, arrows indicate the paths of input signals input from the outside to the imaging device 1, and the paths of the power supply potential and reference potential. In FIG. 68, arrows indicate the signal paths of pixel signals output from the imaging device 1 to the outside. For example, an input signal input to the imaging device 1 via the input unit 510A is transmitted to the row driver 520 of the third substrate 300, and a row drive signal is generated in the row driver 520. This row drive signal is sent to the second substrate 200 via contact units 303 and 203. Furthermore, this row drive signal reaches each pixel sharing unit 539 of the pixel array section 540 via a row drive signal line 542 in the wiring layer 200T. Of the row drive signals that reach the pixel sharing units 539 of the second substrate 200, the drive signals other than those for the transfer gate TG are input to the pixel circuits 210, and each transistor included in the pixel circuits 210 is driven. A drive signal for the transfer gate TG is input to the transfer gates TG1, TG2, TG3, and TG4 of the first substrate 100 via the through-electrode TGV, and the pixels 541A, 541B, 541C, and 541D are driven. In addition, a power supply potential and a reference potential supplied from outside the imaging device 1 to the input section 510A (input terminal 511) of the third substrate 300 are sent to the second substrate 200 via contact sections 303 and 203, and supplied to the pixel circuits 210 of each pixel sharing unit 539 via wiring in the wiring layer 200T. The reference potential is also supplied to the pixels 541A, 541B, 541C, and 541D of the first substrate 100 via the through-electrode 121E. Meanwhile, pixel signals photoelectrically converted by the pixels 541A, 541B, 541C, and 541D on the first substrate 100 are sent to the pixel circuit 210 on the second substrate 200 for each pixel sharing unit 539. Pixel signals based on these pixel signals are sent from the pixel circuit 210 to the third substrate 300 via the vertical signal line 543 and the contact units 204 and 304. These pixel signals are processed by the column signal processing unit 550 and the image signal processing unit 560 on the third substrate 300, and then output to the outside via the output unit 510B.

[0209] The imaging device 1 having such contact portions 203, 204, 303, and 304 can also achieve the same effects as those described in the first embodiment. The positions and number of the contact portions can be changed depending on the design of the circuitry of the third substrate 300, to which the wiring via the contact portions 303 and 304 is connected.

[0210] <9. Variation 16> Fig. 69 shows a modified example of the cross-sectional configuration of the imaging device 1 according to the above-described embodiments. Fig. 69 corresponds to Fig. 6 described in the first embodiment. In this modified example, a transfer transistor TR having a planar structure is provided on the first substrate 100. In this respect, the imaging device 1 of this modified example differs from the imaging device 1 described in the first embodiment.

[0211] In this transfer transistor TR, the transfer gate TG is formed only by the horizontal portion TGb, ie, the transfer gate TG does not have the vertical portion TGa and is provided opposite to the semiconductor layer 100S.

[0212] An imaging device 1 having such a planar-structure transfer transistor TR also achieves the same effects as those described in the first embodiment. Furthermore, by providing a planar-type transfer gate TG on the first substrate 100, the photodiode PD can be formed closer to the surface of the semiconductor layer 100S than when a vertical-type transfer gate TG is provided on the first substrate 100, which may increase the saturation signal amount (Qs). Furthermore, the method of forming a planar-type transfer gate TG on the first substrate 100 requires fewer manufacturing steps than the method of forming a vertical-type transfer gate TG on the first substrate 100, and may be less likely to have adverse effects on the photodiode PD due to the manufacturing steps.

[0213] <10. Variation 17> FIG. 70 shows a modified example of the pixel circuit of the imaging device 1 according to the above-described embodiments. FIG. 70 corresponds to FIG. 4 described in the first embodiment. In this modified example, a pixel circuit 210 is provided for each pixel (pixel 541A). That is, the pixel circuit 210 is not shared by multiple pixels. In this respect, the imaging device 1 of this modified example differs from the imaging device 1 described in the first embodiment.

[0214] The imaging device 1 of this modification is the same as the imaging device 1 described in the first embodiment in that the pixel 541A and the pixel circuit 210 are provided on different substrates (the first substrate 100 and the second substrate 200). Therefore, the imaging device 1 according to this modification can also obtain the same effects as those described in the first embodiment.

[0215] <11. Variation 18> 71 shows a modified planar configuration of pixel separation section 117 described in the above embodiment and the like. Gaps may be provided in pixel separation section 117 surrounding each of pixels 541A, 541B, 541C, and 541D. That is, pixels 541A, 541B, 541C, and 541D do not have to be entirely surrounded by pixel separation section 117. For example, the gaps in pixel separation section 117 are provided near pad sections 120 and 121 (see FIG. 7B).

[0216] In the first embodiment, an example has been described in which the pixel separating section 117 has an FTI structure that penetrates the semiconductor layer 100S (see FIG. 6), but the pixel separating section 117 may have a configuration other than the FTI structure. For example, the pixel separating section 117 does not have to be provided so as to penetrate completely through the semiconductor layer 100S, and may have a so-called DTI (Deep Trench Isolation) structure. Good too.

[0217] <12. Variation 19> Fig. 72 is a schematic diagram showing a cross-sectional configuration of a main part of an imaging device 1 according to a nineteenth modification of the present disclosure. Fig. 73 is a schematic diagram showing a planar configuration of the second substrate 200 in the imaging device shown in Fig. 72. Note that Fig. 72 shows a cross section corresponding to the E-E' line shown in Fig. 73. The imaging device 1 having the amplification transistor AMP with the GAA structure described in the second embodiment above can be formed, for example, as follows.

[0218] First, a sacrificial layer 120A is formed in advance on the pad portion 120 that connects the floating diffusions FD (floating diffusions FD1, FD2, FD3, FD4) of the pixels 541A, 541B, 541C, 541D to each other, using, for example, chemical vapor deposition (CVD).

[0219] The sacrificial layer 120A may be made of a material that, when oxidized, increases its etching selectivity with respect to a silicon oxide film. Examples of such materials include Ge. Other examples of materials that may be used for the sacrificial layer 120A include III-V compound semiconductor materials (e.g., InGaAs, InP, and GaAs) and amorphous carbon. The following description will be given taking the case where the sacrificial layer 120A is made of Ge as an example.

[0220] Thereafter, in the same manner as in the second embodiment, the semiconductor layer 200S is bonded to the first substrate 100, and insulating regions 212 and element isolation regions 213 are formed at predetermined positions.

[0221] 74A, for example, a sacrificial layer 235 and a polysilicon film 224X are stacked on the semiconductor layer 200S, and an Si thin film layer having an insulating film 212X is bonded to the underside of the sacrificial layer 235 on the side opposite to the polysilicon film 224X. Subsequently, as shown in FIG. 74B, the polysilicon film 224X is processed by, for example, photolithography and reactive ion etching (RIE) to form an opening 224H penetrating the polysilicon film 224X.

[0222] Next, for example, an alkaline aqueous solution (e.g., an etching solution of hydrogen fluoride:hydrogen peroxide:acetic acid=1:200:3) having a SiGe / Si selectivity of 10 or more and a SiO2 / Si selectivity of 7.5 or more is prepared, and the sacrificial layer 235 is etched. At this time, the sacrificial layer 235 also recedes in the planar direction, and the sacrificial layer 235 below the channel 224 is removed. Subsequently, as shown in FIG. 74C, a resist film 234 is formed on the polysilicon film 224X to protect one of the openings 224H. After that, the insulating region 212 and the wiring layer 100T are etched by dry etching using a gas containing a halogen element such as F, Cl, or Br, to form an opening 100H reaching the sacrificial layer 120A. Next, after removing the resist film 234, an annealing process is performed. As shown in FIG. 74D, a thermal oxide film that becomes the gate insulating film 225 is formed on the surface of the polysilicon film 224X including the channel 224. At this time, the sacrificial layer 120A exposed at the bottom of the opening 100H is also oxidized, forming, for example, a GeO2 layer 120X. After that, the substrate is washed with, for example, pure water. As a result, the GeO2 layer 120X is removed as shown in FIG. 74E.

[0223] If the sacrificial layer 120A is made of a III-V material, the oxidized sacrificial layer 120A can be removed by washing with, for example, hydrochloric acid. If the sacrificial layer 120A is made of amorphous carbon, the oxidized sacrificial layer 120A can be removed by washing with, for example, sulfuric acid / hydrogen peroxide.

[0224] Next, as shown in FIG. 74F, a polysilicon film 226X is formed around the channel 224 and in the opening 100H, for example, by CVD. This results in the formation of a through electrode 120E that electrically connects the gate AG and the amplifying transistor AMP to the floating diffusion FD. Thereafter, a passivation film 221, an interlayer insulating film 222, and a first wiring layer W1 are sequentially formed in the same manner as in the second embodiment. This completes the formation of the second substrate 200 of the image pickup device 1 shown in FIG. 72.

[0225] Moreover, the imaging device 1 having the amplifying transistor AMP of the GAA structure described in the second embodiment can be formed, for example, as follows.

[0226] First, in the same manner as described above, a sacrificial layer 120A is formed in advance on the pad portion 120. Thereafter, in the same manner as in the second embodiment, a semiconductor layer 200S is bonded to the first substrate 100, and an insulating region 212 and an element isolation region 213 are formed in predetermined positions.

[0227] 75A, a polysilicon film 224X is bonded onto the semiconductor layer 200S. Subsequently, as shown in Fig. 75B, the polysilicon film 224X is processed by, for example, photolithography and RIE to form an opening 224H penetrating the polysilicon film 224X.

[0228] Next, wet etching is performed using, for example, ultra-diluted hydrofluoric acid to remove the insulating region 212 below the polysilicon film 224X between the openings 224H. Subsequently, as shown in FIG. 75C, a resist film 234 is formed on the polysilicon film 224X to protect one of the openings 224H. Then, the insulating region 212 and the wiring layer 100T are etched by dry etching using a gas containing a halogen element, such as F, Cl, or Br, to form an opening 100H that reaches the sacrificial layer 120A. Next, after removing the resist film 234, an annealing process is performed. As shown in FIG. 75D, a thermal oxide film that becomes the gate insulating film 225 is formed on the surface of the polysilicon film 224X. At this time, the sacrificial layer 120A exposed at the bottom of the opening 100H is also oxidized, forming a GeO2 layer 120X. This is then followed by rinsing with, for example, pure water. As a result, the GeO2 layer 120X is removed as shown in FIG. 75E.

[0229] Next, as shown in FIG. 75F, for example, a polysilicon film 226X is formed around the channel 224 and in the opening 100H. This results in the formation of a through electrode 120E that electrically connects the gate AG and the amplification transistor AMP to the floating diffusion FD. Thereafter, a passivation film 221, an interlayer insulating film 222, and a first wiring layer W1 are sequentially formed in the same manner as in the second embodiment. This completes the formation of the second substrate 200 of the image pickup device 1 shown in FIG. 72.

[0230] As described above, in this modification, the sacrificial layer 120A is formed in advance on the pad portion 120. This allows the gate AG and the through electrode 120E that electrically connects the amplification transistor AMP to the floating diffusion FD to be formed all at once. Therefore, in addition to the effects of the second embodiment, the manufacturing process can be simplified and the junction resistance can be reduced. Furthermore, since the amplification transistor AMP can be formed without peeling off the oxide film around the channel 224, it is possible to reduce instability of the threshold voltage due to a parasitic transistor with a nearby contact on the second substrate 200.

[0231] <13. Variation 20> Fig. 76 is a schematic diagram showing a cross-sectional configuration of a main part of an imaging device 1 according to Modification 20 of the present disclosure. Fig. 77 is an equivalent circuit diagram of the imaging device 1 shown in Fig. 76. In the first embodiment described above, an example has been shown in which the floating diffusion FD and the gate AG of the amplification transistor AMP are directly connected by a through electrode 120E, but for example, the floating diffusion FD and the source RS of the reset transistor RST may be directly connected by a through electrode 120E1.

[0232] In the above-described embodiments, the pixel circuit 210 includes the FD conversion gain switching transistor FDG, but the FD conversion gain switching transistor FDG may be omitted. In that case, as shown in FIG. 77, the source RS of the reset transistor RST has the same potential as the floating diffusion FD and the gate AG of the amplification transistor AMP.

[0233] In this modification, the reset transistor RST has a Fin-type FD-SOI structure, and its source and drain are formed from the front surface (surface 200S1) to the back surface (surface 200S2) of the semiconductor layer 200S. Therefore, as shown in FIG. 76, by connecting the through electrode 120E1 to the surface 200S2 of the semiconductor layer 200S on which the source RS of the reset transistor RST is formed, the floating diffusion FD and the source RS of the reset transistor RST can be electrically connected. Such an imaging device 1 can be formed, for example, as follows.

[0234] First, as shown in Fig. 78A, wiring such as pad portions 120 and 121 and the gate TGb of the transfer transistor TR is formed on the semiconductor layer 100S. Next, as shown in Fig. 78B, an interlayer insulating film 123 that covers the wiring is formed on the semiconductor layer 100S, and then a through electrode 120E1 that reaches the pad portion 120 is provided, and a wiring layer 100T is formed.

[0235] Next, as shown in FIG. 78C, a semiconductor layer 200S is bonded onto the wiring layer 100T. Subsequently, as shown in FIG. 78D, a source follower circuit, an amplifying transistor AMP, a reset transistor RST, a selection transistor SEL, and an FD conversion gain switching transistor FDG are formed on the semiconductor layer 200S. At this time, at least the gate RG of the reset transistor RST has a fin structure that penetrates the semiconductor layer 200S. This allows the source RS of the reset transistor RST and the floating diffusion FD to be electrically connected via the through electrode 120E1. There are no restrictions on the other transistors, but to simplify the number of processes and the structure, it is preferable to use a fin structure similar to that of the reset transistor RST.

[0236] Thereafter, an interlayer insulating film 222 and various wirings are provided to form a wiring layer 200T. In this way, the imaging device 1 shown in FIG.

[0237] In this manner, in this modification, the floating diffusion FD and the source RS of the reset transistor RST are directly connected by the through electrode 120E1. This eliminates the need to provide separate wiring for electrically connecting the floating diffusion FD to the reset transistor RST, thereby reducing the area of ​​the insulating region 212 formed in the plane of the semiconductor layer 200S and ensuring the area of ​​the semiconductor layer 200S for forming the pixel circuit 210. In other words, it is possible to improve the area efficiency of the pixel transistors that form the pixel circuit 210 on the second substrate 200.

[0238] In addition, in this modification, in order to directly connect the floating diffusion FD and the source RS of the reset transistor RST by the through electrode 120E1, an example has been shown in which the floating diffusion FD and the source RS of the reset transistor RST are laid out so as to overlap in the stacking direction in a planar view, but this is not limited to this. For example, as shown in FIG. 79, a wiring extending in the in-plane direction may be provided in the wiring layer 100T, and this may be used as part of the through electrode 120E1 that connects the floating diffusion FD and the source RS of the reset transistor RST. This improves the degree of freedom in the layout of pixel transistors provided in the semiconductor layer 200S.

[0239] Furthermore, in this modification, an example has been shown in which the floating diffusion FD and the source RS of the reset transistor RST are directly connected by the through electrode 120E1, but this may be combined with, for example, modification 5. That is, as shown in FIG. 80, the side surface of the source RS of the reset transistor RST and the side surface of the gate AG of the amplifier transistor AMP are made to contact the through electrode 120E that penetrates the semiconductor layer 200S and the wiring layer 100T. This makes it possible to further reduce the area of ​​the insulating region 212 formed in the plane of the semiconductor layer 200S. That is, it is possible to further improve the area efficiency of the pixel transistors that constitute the pixel circuit 210 on the second substrate 200.

[0240] <14. Variation 21> Fig. 81 is a schematic diagram showing a cross-sectional configuration of a main part of an imaging device 1 according to Modification 21 of the present disclosure. Fig. 82 is a schematic diagram showing a planar configuration of the second substrate 200 in the imaging device 1 shown in Fig. 81. In the above-described embodiment and the like, an example has been shown in which the gate AG of the amplification transistor AMP and the source FS of the FD conversion gain switching transistor FDG are electrically connected via the connection portion 218V and the first wiring layer W1, but this is not limiting.

[0241] In the image pickup device 1 of this modification, the polysilicon 226 forming the gate of the pixel transistor is extended between the amplifier transistor AMP and the FD conversion gain switching transistor FDG, and the gate AG of the amplifier transistor AMP and the source FS of the FD conversion gain switching transistor FDG are electrically connected using this. Such an image pickup device 1 can be formed, for example, as follows.

[0242] First, as shown in FIG. 83A, the semiconductor layer 200S is processed to form fins 223 of various transistors that constitute the pixel circuit 210 on the wiring layer 100T, and then a silicon oxide film that becomes the gate insulating film 225 is formed around the fins 223.

[0243] 83B, a resist film 240 having a predetermined pattern is formed on the wiring layer 100T, and an opening 100H is formed that reaches the pad portion 120. Subsequently, as shown in Fig. 83C, the opening 100H is filled in on the wiring layer 100T, and a resist film 241 is formed that covers everything except the fin 223 that constitutes the FD conversion gain switching transistor FDG, and the gate insulating film 225 provided around the source FS of the fin 223 that constitutes the FD conversion gain switching transistor FDG is peeled off.

[0244] Next, after removing the resist film 241, a polysilicon film 226X is formed to cover the fin 223 and fill the opening 100H, as shown in Fig. 83D. Subsequently, as shown in Fig. 83E, the polysilicon film 226X is processed. This forms the gates AG and FG of the amplifier transistor AMP and the FD conversion gain switching transistor FDG, the polysilicon 226 that connects the gate AG of the amplifier transistor AMP and the source FS of the FD conversion gain switching transistor FDG, and the through electrode 120E1 connected thereto.

[0245] Thereafter, an interlayer insulating film 222 and various wirings are provided to form the wiring layer 200T. In this way, the imaging device 1 shown in FIG.

[0246] As described above, in this modification, the gate AG of the amplification transistor AMP and the source FS of the FD conversion gain switching transistor FDG, which have the same potential, are electrically connected using polysilicon 226 that forms the gate of the pixel transistor, and this polysilicon film and the pad section 120 are electrically connected via the through electrode 120E1. This eliminates the need for through wiring (e.g., through electrode 120E) that penetrates between the first substrate 100 and the second substrate 200. This reduces the area of ​​the insulating region 212 formed in the plane of the semiconductor layer 200S, thereby ensuring the area of ​​the semiconductor layer 200S that forms the pixel circuit 210. In other words, it is possible to improve the area efficiency of the pixel transistors that form the pixel circuit 210 on the second substrate 200.

[0247] In addition, since there is no need to form the gate AG of the amplification transistor AMP or the source FS of the FD conversion gain switching transistor FDG, which have the same potential as the floating diffusion FD, above the pad section 120, the degree of freedom in the layout of the pixel transistors provided in the semiconductor layer 200S is improved.

[0248] 81 shows an example in which the connection portion 218V connected to the first wiring layer W1 is connected to the FD conversion gain switching transistor FDG, but the present invention is not limited to this. For example, as shown in FIG. 84, the connection portion 218V may be connected to the amplifier transistor AMP. Alternatively, as shown in FIG. 85, the connection portion 218V may be connected to the polysilicon 226 that connects the gate AG of the amplifier transistor AMP and the source FS of the FD conversion gain switching transistor FDG.

[0249] 86, the gate AG of the amplifier transistor AMP and the source FS of the FD conversion gain switching transistor FDG may be arranged in a straight line and connected by polysilicon 226. This reduces the wiring length of the polysilicon 226 that connects the gate AG of the amplifier transistor AMP and the source FS of the FD conversion gain switching transistor FDG, thereby reducing the capacitance.

[0250] Also, for example, as shown in FIG. 87, a silicon oxide film may be left around the source FS of the FD conversion gain switching transistor FDG, and the source FS of the FD conversion gain switching transistor FDG and the polysilicon 226 may be electrically connected via the connection portion 218V. <15. Variation 22> Fig. 88 is a schematic diagram showing a cross-sectional configuration of a main part of an imaging device 1 according to Modification 22 of the present disclosure. Fig. 89 is an equivalent circuit diagram of the imaging device 1 shown in Fig. 88. In the above-described lion-shaped configuration, an example was shown in which the pixel circuit 210 was provided on the second substrate 200, but this is not limiting. For example, a fourth substrate 400 including a semiconductor layer 400S may be provided between the second substrate 200 and the third substrate 300 described above, and multiple transistors constituting the pixel circuit 210 may be provided separately on the semiconductor layers 200S and 400S.

[0251] 88 and 89, of the multiple transistors that make up the pixel circuit 210, the amplification transistor AMP and selection transistor SEL may be provided in the semiconductor layer 200S, and the reset transistor RST and FD conversion gain switching transistor FDG may be provided in the semiconductor layer 400S. This makes it possible to secure the area for forming pixel transistors such as the amplification transistor AMP while reducing the pixel pitch.

[0252] Furthermore, when the amplifier transistor AMP and the selection transistor SEL are provided in the semiconductor layer 200S and the reset transistor RST and the FD conversion gain switching transistor FDG are provided in the semiconductor layer 400S, the following planar layout is preferable. For example, it is preferable to lay out the elements so that the source or drain of the transfer transistor TR, the gate AG of the amplifier transistor AMP, and the source of the FD conversion gain switching transistor FDG overlap in a planar view. By extending the through electrode 120E through the fourth substrate 400, the source or drain of the transfer transistor TR, the gate AG of the amplifier transistor AMP, and the source of the FD conversion gain switching transistor FDG can be electrically connected by the through electrode 120E. This minimizes the wiring length and, in principle, minimizes the FD capacitance. Furthermore, the number of vias required to electrically connect each pixel transistor is reduced, thereby further reducing the pixel pitch. Furthermore, the stress caused by the vias is reduced, thereby reducing transistor characteristic fluctuations.

[0253] Such an imaging device 1 can be formed, for example, as follows.

[0254] 90A, the semiconductor layer 200S is processed by, for example, etching to form the fins 233 of the amplifier transistor AMP and the selection transistor SEL on the wiring layer 100T. Next, as shown in FIG. 90B, an insulating region 212 is formed, and polysilicon is deposited and processed to form the gates (e.g., gates AG) of the amplifier transistor AMP and the selection transistor SEL.

[0255] 90C, an interlayer insulating film 222 is formed, and then, as shown in Fig. 90D, a through electrode 120E is formed that penetrates the gate AG of the amplification transistor AMP and reaches the pad portion 120 provided on the source or drain of the transfer transistor TR. Next, as shown in Fig. 90E, a semiconductor layer 400S is bonded onto the wiring layer 200T.

[0256] Next, as shown in FIG. 90F, the semiconductor layer 400S is processed by, for example, etching, and then an insulating region 412 is formed. Next, as shown in FIG. 90G, the gates RG and FG of the reset transistor RST and the FD conversion gain switching transistor FDG are formed, respectively. After that, an interlayer insulating film 422 and various wirings are provided, and a wiring layer 400T is formed. With the above steps, the imaging device 1 shown in FIG. 88 is completed.

[0257] As described above, in this modification, of the amplification transistor AMP, selection transistor SEL, reset transistor RST, and FD conversion gain switching transistor FDG that constitute the pixel circuit 210, the amplification transistor AMP and selection transistor SEL are provided in the semiconductor layer 200S, and the reset transistor RST and FD conversion gain switching transistor FDG are provided in the semiconductor layer 400S. This makes it possible to secure the area for forming pixel transistors such as the amplification transistor AMP while reducing the pixel pitch.

[0258] Furthermore, since the source or drain of the transfer transistor TR, the gate AG of the amplification transistor AMP, and the source of the FD conversion gain switching transistor FDG are overlapped in a planar view, they can be electrically connected by the through electrode 120E. This makes it possible to minimize the FD capacitance in principle. Furthermore, since the number of vias for electrically connecting each pixel transistor is reduced, the pixel pitch can be further reduced. In addition, since stress caused by the vias is reduced, it is possible to reduce fluctuations in transistor characteristics.

[0259] 88 and 89 show an example in which the FD conversion gain switching transistor FDG is included as a plurality of transistors constituting the pixel circuit 210, but the FD conversion gain switching transistor FDG may be omitted, for example, as shown in Fig. 92. In that case, for example, as shown in Fig. 91, the source or drain of the transfer transistor TR, the gate AG of the amplification transistor AMP, and the source of the reset transistor RST are made to overlap in a planar view, and are electrically connected by a through electrode 120E.

[0260] 88 and 91 and the like show an example in which, of the amplifier transistor AMP, select transistor SEL, reset transistor RST, and FD conversion gain switching transistor FDG that constitute the pixel circuit 210, the amplifier transistor AMP and select transistor SEL are provided in the semiconductor layer 200S, and the reset transistor RST and FD conversion gain switching transistor FDG are provided in the semiconductor layer 400S, but this is not limiting. For example, as shown in Figures 93 and 94, the reset transistor RST and FD conversion gain switching transistor FDG may be provided in the semiconductor layer 200S, and the amplifier transistor AMP and select transistor SEL may be provided in the semiconductor layer 400S.

[0261] Such an imaging device 1 can be formed, for example, as follows.

[0262] 95A, after forming a through electrode 120E1 in the wiring layer 100T, a semiconductor layer 200S is bonded to the wiring layer 100T and the semiconductor layer 200S is processed by, for example, etching. Next, after forming an insulating region 212, the gates RG and FG of the reset transistor RST and the FD conversion gain switching transistor FDG are formed on the semiconductor layer 200S, respectively, as shown in FIG.

[0263] 95C, an interlayer insulating film 222 and a through electrode 120E2 penetrating the interlayer insulating film 222 are formed. Next, as shown in FIG. 95D, a semiconductor layer 400S is bonded onto the wiring layer 200T. Then, as shown in FIG. 95E, the semiconductor layer 400S is processed by, for example, etching to form the fins 433 of the amplifier transistor AMP and the select transistor SEL.

[0264] Next, as shown in FIG. 95F, a polysilicon film is formed and processed to form gates (e.g., gates AG) of the amplification transistor AMP and the selection transistor SEL. Subsequently, as shown in FIG. 95G, an insulating region 412 and an interlayer insulating film 422 are formed. After that, various wirings are provided to form a wiring layer 400T. With the above steps, the imaging device 1 shown in FIG. 93 is completed.

[0265] 93 shows an example in which the gate AG of the amplifier transistor AMP and the source of the FD conversion gain switching transistor FDG are electrically connected via a through electrode 120E1, and the source of the FD conversion gain switching transistor FDG and the gate AG of the amplifier transistor AMP are electrically connected via a through electrode 120E2, but this is not limiting. For example, as shown in FIG. 96, the gate AG of the amplifier transistor AMP, the source of the FD conversion gain switching transistor FDG, and the gate AG of the amplifier transistor AMP may be electrically connected via a through electrode 120E that penetrates the semiconductor layer 200S and reaches the surface 400S2 of the semiconductor layer 400S. Furthermore, for example, as shown in FIG. 97, the through electrode 120E may also penetrate the gate AG of the amplifier transistor AMP provided on a fourth substrate.

[0266] The second substrate 200 and the fourth substrate 400 may be electrically connected to each other by joining together contact portions 201, 401 provided on the surface of the wiring layer 200T of the second substrate 200 facing the fourth substrate 400 and the surface of the wiring layer 400T1 provided on the surface 400S2 side of the fourth substrate 400 facing the second substrate 200, as shown in Figure 98.

[0267] (Other variations) The above modifications 1 to 22 may be combined with each other.

[0268] <16. Application Examples> FIG. 99 shows an example of a schematic configuration of an imaging system 7 including the imaging device 1 according to the above-described embodiments.

[0269] The imaging system 7 is, for example, an electronic device such as an imaging device such as a digital still camera or a video camera, or a portable terminal device such as a smartphone or a tablet terminal. The imaging system 7 includes, for example, the imaging device 1 according to the above-described embodiment, a DSP circuit 243, a frame memory 244, a display unit 245, a storage unit 246, an operation unit 247, and a power supply unit 248. In the imaging system 7, the imaging device 1 according to the above-described embodiment, the DSP circuit 243, the frame memory 244, the display unit 245, the storage unit 246, the operation unit 247, and the power supply unit 248 are connected to each other via a bus line 249.

[0270] The imaging device 1 according to the above-described embodiments outputs image data corresponding to incident light. The DSP circuit 243 is a signal processing circuit that processes the signal (image data) output from the imaging device 1 according to the above-described embodiments. The frame memory 244 temporarily stores the image data processed by the DSP circuit 243 on a frame-by-frame basis. The display unit 245 is formed of a panel display device such as a liquid crystal panel or an organic EL (Electro Luminescence) panel, and displays moving or still images captured by the imaging device 1 according to the above-described embodiments. The storage unit 246 records image data of moving or still images captured by the imaging device 1 according to the above-described embodiments in a storage medium such as a semiconductor memory or a hard disk. The operation unit 247 issues operation commands for various functions of the imaging system 7 in accordance with user operations. The power supply unit 248 appropriately supplies various power sources to these power sources as operating power for the imaging device 1, DSP circuit 243, frame memory 244, display unit 245, storage unit 246, and operation unit 247 according to the above-described embodiments.

[0271] Next, the imaging procedure in the imaging system 7 will be described.

[0272] 100 shows an example of a flowchart of the imaging operation in the imaging system 7. The user operates the operation unit 247 to instruct the start of imaging (step S101). Then, the operation unit 247 transmits an imaging command to the imaging device 1 (step S102). Upon receiving the imaging command, the imaging device 1 (specifically, the system control circuit 36) performs imaging in a predetermined imaging method (step S103).

[0273] The imaging device 1 outputs image data obtained by imaging to the DSP circuit 243. Here, the image data refers to data for all pixels of pixel signals generated based on the charges temporarily stored in the floating diffusion FD. The DSP circuit 243 performs predetermined signal processing (e.g., noise reduction processing) based on the image data input from the imaging device 1 (step S104). The DSP circuit 243 stores the image data that has undergone the predetermined signal processing in the frame memory 244, and the frame memory 244 stores the image data in the storage unit 246 (step S105). In this manner, imaging is performed in the imaging system 7.

[0274] In this application example, the imaging device 1 according to the above-described embodiment and the like is applied to an imaging system 7. This allows the imaging device 1 to be made smaller or have higher resolution, and therefore a small or high-resolution imaging system 7 can be provided.

[0275] <17. Application Examples> [Application example 1] The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body, such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, personal mobility, an airplane, a drone, a ship, or a robot.

[0276] FIG. 101 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a mobile object control system to which the technology of the present disclosure can be applied.

[0277] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 101, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also shown as functional components of the integrated control unit 12050 are a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (interface) 12053.

[0278] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, a braking device for generating a braking force of the vehicle, etc.

[0279] The body system control unit 12020 controls the operation of various devices equipped in the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as headlamps, backup lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves transmitted from a portable device that serves as a key or signals from various switches may be input to the body system control unit 12020. The body system control unit 12020 receives these radio waves or signals and controls the vehicle's door lock device, power window device, lamps, etc.

[0280] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture images outside the vehicle and receives the captured images. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for people, cars, obstacles, signs, characters on the road surface, etc., based on the received images.

[0281] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of light received. The imaging unit 12031 can output the electrical signal as an image, or as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0282] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing off.

[0283] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, steering mechanism, or braking device based on the information inside and outside the vehicle acquired by the outside-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output control commands to the drivetrain control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including avoiding or mitigating collisions between vehicles, following based on the distance between vehicles, maintaining vehicle speed, warning of vehicle collisions, or warning of vehicle lane departure.

[0284] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on driver operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle obtained by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0285] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information about the outside of the vehicle acquired by the outside information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside information detection unit 12030, and perform cooperative control for the purpose of preventing glare, such as switching from high beams to low beams.

[0286] The audio / video output unit 12052 transmits at least one output signal of audio and / or video to an output device capable of visually or audibly notifying information to passengers in the vehicle or to the outside of the vehicle. In the example of Fig. 57, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are exemplified as output devices. The display unit 12062 may include, for example, at least one of an on-board display and a head-up display.

[0287] FIG. 102 is a diagram showing an example of the installation position of the imaging unit 12031.

[0288] In FIG. 102, a vehicle 12100 has imaging units 12101, 12102, 12103, 12104, and 12105 as the imaging unit 12031.

[0289] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided, for example, at positions such as the front nose, side mirrors, rear bumper, back door, and the top of the windshield inside the vehicle cabin of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the top of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The forward images acquired by the imaging units 12101 and 12105 are mainly used to detect preceding vehicles, pedestrians, obstacles, traffic lights, traffic signs, lanes, etc.

[0290] 102 shows an example of the imaging ranges of the imaging units 12101 to 12104. Imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, by overlaying the image data captured by the imaging units 12101 to 12104, a bird's-eye view image of the vehicle 12100 viewed from above can be obtained.

[0291] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of multiple imaging elements, or may be an imaging element having pixels for phase difference detection.

[0292] For example, the microcomputer 12051 can calculate the distance to each three-dimensional object within the imaging ranges 12111 to 12114 and the change in this distance over time (relative speed with respect to the vehicle 12100) based on the distance information obtained from the imaging units 12101 to 12104, thereby extracting as a preceding vehicle, in particular, the three-dimensional object that is the closest three-dimensional object on the path of the vehicle 12100 and traveling in approximately the same direction as the vehicle 12100 at a predetermined speed (for example, 0 km / h or higher). Furthermore, the microcomputer 12051 can set a vehicle-to-vehicle distance to be maintained in advance in front of the preceding vehicle, and perform automatic braking control (including follow-up stop control), automatic acceleration control (including follow-up start control), etc. In this way, cooperative control can be performed for the purpose of automatic driving, which runs autonomously without relying on driver operation.

[0293] For example, the microcomputer 12051 classifies and extracts three-dimensional object data regarding three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. The microcomputer 12051 then determines the collision risk, which indicates the degree of risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drivetrain control unit 12010.

[0294] At least one of the image capturing units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the images captured by the image capturing units 12101 to 12104. The pedestrian recognition is performed, for example, by extracting feature points from the images captured by the image capturing units 12101 to 12104, which are infrared cameras, and then performing pattern matching on a series of feature points that indicate the outline of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the images captured by the image capturing units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular outline on the recognized pedestrian for emphasis. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating the pedestrian at a desired position.

[0295] An example of a mobile object control system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to the imaging unit 12031 of the above-described configuration. Specifically, the imaging device 1 according to the above-described embodiment can be applied to the imaging unit 12031. By applying the technology according to the present disclosure to the imaging unit 12031, it is possible to obtain a high-resolution captured image with little noise, thereby enabling high-precision control using the captured image in the mobile object control system.

[0296] [Application example 2] FIG. 103 is a diagram showing an example of a schematic configuration of an endoscopic surgery system to which the technology according to the present disclosure (the present technology) can be applied.

[0297] Figure 103 shows an operator (doctor) 11131 performing surgery on a patient 11132 on a patient bed 11133 using an endoscopic surgery system 11000. As shown in the figure, the endoscopic surgery system 11000 is composed of an endoscope 11100, other surgical instruments 11110 such as an insufflation tube 11111 and an energy treatment instrument 11112, a support arm device 11120 that supports the endoscope 11100, and a cart 11200 on which various devices for endoscopic surgery are mounted.

[0298] The endoscope 11100 is composed of a lens barrel 11101, a region of a predetermined length from the tip of which is inserted into a body cavity of a patient 11132, and a camera head 11102 connected to the base end of the lens barrel 11101. In the example shown, the endoscope 11100 is configured as a so-called rigid scope having a rigid lens barrel 11101, but the endoscope 11100 may also be configured as a so-called flexible scope having a flexible lens barrel.

[0299] An opening into which an objective lens is fitted is provided at the tip of the lens barrel 11101. A light source device 11203 is connected to the endoscope 11100, and light generated by the light source device 11203 is guided to the tip of the lens barrel by a light guide extending inside the lens barrel 11101, and is irradiated via the objective lens towards an object to be observed inside the body cavity of the patient 11132. The endoscope 11100 may be a direct-viewing endoscope, an oblique-viewing endoscope, or a side-viewing endoscope.

[0300] An optical system and an image sensor are provided inside the camera head 11102, and light reflected from the object of observation (observation light) is collected onto the image sensor by the optical system. The observation light is photoelectrically converted by the image sensor to generate an electrical signal corresponding to the observation light, i.e., an image signal corresponding to the observed image. The image signal is sent to a camera control unit (CCU) 11201 as RAW data.

[0301] The CCU 11201 is configured with a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc., and comprehensively controls the operations of the endoscope 11100 and the display device 11202. Furthermore, the CCU 11201 receives an image signal from the camera head 11102, and performs various image processing on the image signal, such as development processing (demosaic processing), to display an image based on the image signal.

[0302] Under the control of the CCU 11201, the display device 11202 displays an image based on an image signal that has been subjected to image processing by the CCU 11201.

[0303] The light source device 11203 is configured from a light source such as an LED (Light Emitting Diode), and supplies irradiation light to the endoscope 11100 when photographing an operation site or the like.

[0304] The input device 11204 is an input interface for the endoscopic surgery system 11000. A user can input various information and instructions to the endoscopic surgery system 11000 via the input device 11204. For example, the user inputs an instruction to change the imaging conditions (type of irradiating light, magnification, focal length, etc.) of the endoscope 11100.

[0305] The treatment tool control device 11205 controls the driving of the energy treatment tool 11112 for cauterizing tissue, incising, sealing blood vessels, etc. The insufflation device 11206 inflates the body cavity of the patient 11132 through the insufflation tube 11111 in order to ensure a clear field of view for the endoscope 11100 and a working space for the surgeon. The recorder 11207 is a device capable of recording various types of information related to the surgery. The printer 11208 is a device capable of printing various types of information related to the surgery in various formats such as text, images, or graphs.

[0306] The light source device 11203 that supplies illumination light to the endoscope 11100 when photographing the surgical site can be configured from a white light source configured from, for example, an LED, a laser light source, or a combination of these. When the white light source is configured from a combination of RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high precision, making it possible to adjust the white balance of the captured image in the light source device 11203. In this case, it is also possible to capture images corresponding to each RGB in a time-division manner by irradiating the object of observation with laser light from each RGB laser light source in a time-division manner and controlling the drive of the image sensor of the camera head 11102 in synchronization with the irradiation timing. According to this method, a color image can be obtained without providing a color filter to the image sensor.

[0307] Furthermore, the light source device 11203 may be controlled to change the intensity of light it outputs at predetermined time intervals. By controlling the driving of the image sensor of the camera head 11102 in synchronization with the timing of the change in light intensity to acquire images in a time-division manner and combining the images, it is possible to generate an image with a high dynamic range that is free of so-called blocked-up shadows and blown-out highlights.

[0308] The light source device 11203 may also be configured to supply light in a predetermined wavelength band corresponding to special light observation. Special light observation, for example, utilizes the wavelength dependence of light absorption in body tissues to irradiate light with a narrower band than the light irradiated during normal observation (i.e., white light), thereby capturing high-contrast images of specific tissues, such as blood vessels on the surface of mucous membranes, known as narrow-band imaging. Alternatively, special light observation may be performed using fluorescence observation, in which images are obtained using fluorescence generated by irradiating excitation light. Fluorescence observation can involve irradiating excitation light onto body tissues and observing the fluorescence from the tissues (autofluorescence observation), or locally injecting a reagent such as indocyanine green (ICG) into the body tissue and irradiating the tissue with excitation light corresponding to the fluorescent wavelength of the reagent to obtain a fluorescent image. The light source device 11203 may be configured to supply narrow-band light and / or excitation light corresponding to such special light observation.

[0309] FIG. 104 is a block diagram showing an example of the functional configuration of the camera head 11102 and the CCU 11201 shown in FIG.

[0310] The camera head 11102 has a lens unit 11401, an imaging unit 11402, a drive unit 11403, a communication unit 11404, and a camera head control unit 11405. The CCU 11201 has a communication unit 11411, an image processing unit 11412, and a control unit 11413. The camera head 11102 and the CCU 11201 are connected to each other by a transmission cable 11400 so that they can communicate with each other.

[0311] The lens unit 11401 is an optical system provided at the connection point with the lens barrel 11101. Observation light taken in from the tip of the lens barrel 11101 is guided to the camera head 11102 and enters the lens unit 11401. The lens unit 11401 is composed of a combination of multiple lenses including a zoom lens and a focus lens.

[0312] The imaging unit 11402 is configured with an imaging element. The imaging element constituting the imaging unit 11402 may be one (a so-called single-chip type) or multiple (a so-called multi-chip type). When the imaging unit 11402 is configured with a multi-chip type, for example, each imaging element may generate an image signal corresponding to each of RGB, and a color image may be obtained by combining these signals. Alternatively, the imaging unit 11402 may be configured with a pair of imaging elements for acquiring image signals for the right eye and the left eye corresponding to 3D (dimensional) display. 3D display enables the surgeon 11131 to more accurately grasp the depth of the biological tissue at the surgical site. Note that when the imaging unit 11402 is configured with a multi-chip type, multiple lens units 11401 may be provided corresponding to each imaging element.

[0313] Furthermore, the imaging unit 11402 does not necessarily have to be provided in the camera head 11102. For example, the imaging unit 11402 may be provided inside the lens barrel 11101, immediately after the objective lens.

[0314] The driving unit 11403 is configured by an actuator, and moves the zoom lens and focus lens of the lens unit 11401 by a predetermined distance along the optical axis under the control of the camera head control unit 11405. This allows the magnification and focus of the image captured by the imaging unit 11402 to be adjusted appropriately.

[0315] The communication unit 11404 is configured by a communication device for transmitting and receiving various types of information to and from the CCU 11201. The communication unit 11404 transmits the image signal obtained from the imaging unit 11402 to the CCU 11201 via the transmission cable 11400 as RAW data.

[0316] Furthermore, the communication unit 11404 receives a control signal for controlling the driving of the camera head 11102 from the CCU 11201 and supplies the control signal to the camera head control unit 11405. The control signal includes information on the imaging conditions, such as information specifying the frame rate of the captured image, information specifying the exposure value at the time of imaging, and / or information specifying the magnification and focus of the captured image.

[0317] The image capturing conditions such as the frame rate, exposure value, magnification, and focus may be appropriately specified by the user, or may be automatically set by the control unit 11413 of the CCU 11201 based on the acquired image signal. In the latter case, the endoscope 11100 is equipped with so-called AE (Auto Exposure) function, AF (Auto Focus) function, and AWB (Auto White Balance) function.

[0318] The camera head control unit 11405 controls the driving of the camera head 11102 based on a control signal received from the CCU 11201 via the communication unit 11404 .

[0319] The communication unit 11411 is configured by a communication device for transmitting and receiving various information to and from the camera head 11102. The communication unit 11411 receives an image signal transmitted from the camera head 11102 via the transmission cable 11400.

[0320] Furthermore, the communication unit 11411 transmits to the camera head 11102 a control signal for controlling the driving of the camera head 11102. The image signal and the control signal can be transmitted by electrical communication, optical communication, or the like.

[0321] The image processing unit 11412 performs various image processing operations on the image signal, which is RAW data sent from the camera head 11102 .

[0322] The control unit 11413 performs various controls related to the imaging of the surgical site, etc. by the endoscope 11100 and the display of the captured image obtained by imaging the surgical site, etc. For example, the control unit 11413 generates a control signal for controlling the driving of the camera head 11102.

[0323] Furthermore, the control unit 11413 causes the display device 11202 to display a captured image showing the surgical site, etc., based on the image signal that has been image processed by the image processing unit 11412. At this time, the control unit 11413 may recognize various objects in the captured image using various image recognition technologies. For example, the control unit 11413 can recognize surgical tools such as forceps, specific biological parts, bleeding, mist generated when using the energy treatment tool 11112, etc., by detecting the shape and color of the edges of objects included in the captured image. When displaying the captured image on the display device 11202, the control unit 11413 may use the recognition results to superimpose various surgical support information on the image of the surgical site. By superimposing the surgical support information and presenting it to the surgeon 11131, the burden on the surgeon 11131 can be reduced and the surgeon 11131 can proceed with the surgery reliably.

[0324] The transmission cable 11400 connecting the camera head 11102 and the CCU 11201 is an electrical signal cable for communication of electrical signals, an optical fiber for optical communication, or a composite cable of these.

[0325] In the illustrated example, communication is performed by wire using the transmission cable 11400, but communication between the camera head 11102 and the CCU 11201 may also be performed wirelessly.

[0326] The above describes an example of an endoscopic surgery system to which the technology according to the present disclosure can be applied. Of the configurations described above, the technology according to the present disclosure can be suitably applied to the imaging unit 11402 provided in the camera head 11102 of the endoscope 11100. By applying the technology according to the present disclosure to the imaging unit 11402, it is possible to reduce the size or increase the resolution of the imaging unit 11402, thereby providing a compact or high-resolution endoscope 11100.

[0327] Although the present disclosure has been described above with reference to the first and second embodiments and their modified examples 1 to 22, application examples, and applied examples, the present disclosure is not limited to the above-described embodiments, etc., and various modifications are possible. For example, although the present technology has been described using the imaging device 1 as an example in the above-described embodiments, etc., the present technology can also be applied to, for example, a light receiving element, etc.

[0328] Note that the effects described in this specification are merely examples. The effects of the present disclosure are not limited to the effects described in this specification. The present disclosure may have effects other than the effects described in this specification.

[0329] The present disclosure can also be configured as follows: According to the configuration below, a charge storage section provided in the first semiconductor layer and a pixel transistor having a three-dimensional structure provided in the second semiconductor layer are directly connected by a through-wiring, which makes it possible to reduce the formation area of ​​components other than the pixel transistor within the surface of the second semiconductor substrate and improve area efficiency. (1) a first semiconductor layer for each pixel, the first semiconductor layer having a photoelectric conversion unit and a charge accumulation unit for accumulating signal charges generated in the photoelectric conversion unit; a second semiconductor layer that is stacked on the first semiconductor layer, has a three-dimensional structure, and has a first surface on which a pixel transistor that reads out the signal charge from the charge accumulation portion is provided; a through-wiring that directly connects the charge storage portion and the gate electrode of the pixel transistor; An imaging device comprising: (2) The imaging device according to (1), wherein the pixel transistor has a fin structure. (3) the second semiconductor layer further has a second surface opposite to the first surface and facing the first semiconductor layer; The imaging device according to (1) or (2), wherein the gate electrode penetrates between the first surface and the second surface of the second semiconductor layer. (4) The imaging device according to (3), wherein an end of a penetrating portion of the gate electrode that penetrates the second semiconductor layer protrudes from the second surface of the second semiconductor layer. (5) The imaging device according to (4), wherein the through wiring connects the charge accumulation section and the end of the gate electrode protruding from the second surface of the second semiconductor layer. (6) The imaging device according to any one of (3) to (5), wherein the through wiring is in contact with a side surface of the gate electrode that penetrates the second semiconductor layer. (7) The imaging device according to (6), wherein the through wiring is further in contact with a part of an upper surface of the gate electrode. (8) the pixel transistor has a plurality of fins; An imaging device described in any one of (3) to (7), wherein a first width of the through wiring that passes through the plurality of fins is narrower than a second width of the through wiring that extends above the gate electrode. (9) The imaging device according to any one of (1) to (8), wherein the pixel transistor has a gate-all-around structure. (10) the pixel transistor includes: a semiconductor layer provided on the first surface side of the second semiconductor layer and extending in a direction substantially parallel to a planar direction of the second semiconductor layer; the gate electrode covering a part of an upper surface and a lower surface and a pair of side surfaces of the semiconductor layer; and a first insulating film provided between the semiconductor layer and the gate electrode, covering the upper surface and the pair of side surfaces of the semiconductor layer and a second insulating film covering the lower surface of the semiconductor layer; The imaging device according to (9), wherein the second insulating film is provided to have a width greater than a third width in a direction perpendicular to the extension direction of the semiconductor layer. (11) The imaging device described in (10), wherein an extension portion of the second insulating film extending outside the third width of the semiconductor layer is formed below the second insulating film covering the lower surface of the semiconductor layer. (12) The imaging device according to (10) or (11), wherein the gate electrode has a convex portion that is wider than the through-hole wiring on a surface facing the first semiconductor layer. (13) The imaging device according to (12), wherein the width of the convex portion is greater than the diameter of the through-wire. (14) the pixel transistor includes: a semiconductor layer provided on the first surface side of the second semiconductor layer and extending in a direction substantially parallel to a planar direction of the second semiconductor layer; the gate electrode covering an upper surface and a lower surface of a part of the semiconductor layer and a pair of side surfaces; and a third insulating film provided between the semiconductor layer and the gate electrode and covering the upper surface and the lower surface and the pair of side surfaces of the semiconductor layer, The imaging device according to any one of (10) to (13), further comprising a fourth insulating film provided below the semiconductor layer at a predetermined interval. (15) The imaging device according to (14), wherein the fourth insulating film is provided to have a width wider than the third width of the semiconductor layer. (16) The imaging device according to (14), wherein the fourth insulating film is provided to have a width narrower than the third width of the semiconductor layer. (17) The imaging device according to (15) or (16), wherein the gate electrode has a convex portion wider than the fourth insulating film on a surface facing the first semiconductor layer. (18) The imaging device according to (17), wherein the width of the convex portion is greater than the diameter of the through-wire. (19) the pixel transistor is provided on the first surface side of the second semiconductor layer, and has a source region and a drain region at both ends of the semiconductor layer extending in a direction substantially parallel to a planar direction of the second semiconductor layer; The imaging device according to any one of (10) to (18), further comprising a sacrificial layer directly below the semiconductor layer in the source region and the drain region, the sacrificial layer having sides substantially identical to the sides of the semiconductor layer. (20) The imaging device according to (19), wherein the semiconductor layer has a substantially constant width in the extension direction. (twenty one) The imaging device according to any one of (1) to (20), wherein the pixel transistors include an amplification transistor, a reset transistor, a selection transistor, and an FD conversion gain switching transistor. (twenty two) The imaging device according to (21), wherein the amplification transistor, the reset transistor, the selection transistor, and the FD conversion gain switching transistor each have the three-dimensional structure. (twenty three) The imaging device described in (22), wherein, among the amplification transistor, the reset transistor, the selection transistor and the FD conversion gain switching transistor, the gate electrode of at least the amplification transistor penetrates between the first surface of the second semiconductor layer and a second surface opposite to the first surface and facing the first semiconductor layer. (twenty four) the amplifying transistor has the three-dimensional structure, The imaging device according to any one of (21) to (23), wherein the reset transistor, the selection transistor, and the FD conversion gain switching transistor have a planar structure. (twenty five) a first semiconductor layer having a photoelectric conversion portion and a charge accumulation portion in which signal charges generated in the photoelectric conversion portion are accumulated; a second semiconductor layer stacked on the first semiconductor layer, having a three-dimensional structure, and having a first surface on which a transistor that reads out the signal charge from the charge accumulation portion is provided; a through-wiring that directly connects the charge storage portion and the gate electrode of the transistor; A light receiving element comprising: (26) forming a photoelectric conversion unit and a charge accumulation unit for accumulating signal charges generated in the photoelectric conversion unit for each pixel in the first semiconductor layer; a second semiconductor layer is stacked on a first surface of the first semiconductor layer via a first insulating film; forming a pixel transistor having a three-dimensional structure that reads out the signal charge from the charge accumulation portion in the second semiconductor layer; A through-wiring is formed that penetrates the first insulating film and directly connects the charge storage portion and the gate electrode of the pixel transistor. A method for manufacturing an imaging device. (27) The pixel transistor is processing the second semiconductor layer to form a fin; embedding the fin with a light absorbing film that absorbs first light of a predetermined wavelength; The method for manufacturing an imaging device according to (26), wherein the light absorbing film is etched after the first light is irradiated to form layers having different etching rates in the light absorbing film. (28) The method for manufacturing an imaging device described in (27) above, further comprising processing the second semiconductor layer to form a fin, forming a highly light-absorbing film on the surface of the fin, the highly light-absorbing film having a higher absorption coefficient for the first light than the light-absorbing film, and then burying the fin with the light-absorbing film. (29) The pixel transistor is After forming the through wiring, a second insulating film and a polysilicon film constituting the pixel transistor are sequentially stacked on the second semiconductor layer including the through wiring; processing the second insulating film and the polysilicon film into a predetermined shape of the pixel transistor; A method for manufacturing an imaging device described in any one of (26) to (28), wherein a thermal oxide film is formed on the surface of the polysilicon film and the surface of the through-hole wiring by annealing treatment, and then at least a portion of the thermal oxide film formed on the surface of the through-hole wiring outside the polysilicon film in a planar view is removed. (30) The pixel transistor is After forming the through wiring, a first sacrificial layer and a polysilicon film constituting the pixel transistor are sequentially stacked on the second semiconductor layer including the through wiring; processing the first sacrificial layer and the polysilicon film into a predetermined shape of the pixel transistor; removing the first sacrificial layer formed in a channel portion of the pixel transistor; A method for manufacturing an imaging device described in any one of (26) to (28), wherein a thermal oxide film is formed on the surface of the polysilicon film and the surface of the through-hole wiring by annealing treatment, and then at least a portion of the thermal oxide film formed on the surface of the through-hole wiring outside the polysilicon film in a planar view is removed. (31) The pixel transistor is After forming the through wiring, a first sacrificial layer and a polysilicon film constituting the pixel transistor are sequentially stacked on the second semiconductor layer including the through wiring; processing the first sacrificial layer and the polysilicon film into a predetermined shape of the pixel transistor; The method for manufacturing an imaging device according to any one of (26) to (28), wherein the first sacrificial layer formed below a channel portion of the pixel transistor is removed by etching selectivity using an alkaline aqueous solution. (32) The method for manufacturing an imaging device according to any one of (26) to (31), wherein after the charge accumulation section is formed for each pixel, a second sacrificial layer is formed on the charge accumulation section. (33) The method for manufacturing an imaging device according to (32) above, wherein the second sacrificial layer is formed using a material that increases etching selectivity with respect to the first insulating film when oxidized. (34) The method for manufacturing an imaging device according to (33) above, wherein the second sacrificial layer is formed using germanium. (35) The method for manufacturing an imaging device according to (32) above, wherein the second sacrificial layer is formed using a material that has a high etching selectivity with respect to the first insulating film. (36) The method for manufacturing an imaging device according to (35) above, wherein the second sacrificial layer is formed using a III-V compound semiconductor material. (37) The method for manufacturing an imaging device according to (32) above, wherein the second sacrificial layer is formed using amorphous carbon.

[0330] This application claims priority based on Japanese Patent Application No. 2020-178463, filed on October 23, 2020, in the Japan Patent Office, the entire contents of which are incorporated herein by reference.

[0331] Those skilled in the art will recognize that various modifications, combinations, subcombinations, and variations may occur depending on design requirements and other factors, and are intended to be within the scope of the appended claims and their equivalents.

Claims

1. a first semiconductor layer for each pixel, the first semiconductor layer having a photoelectric conversion portion and a charge accumulation portion for accumulating signal charges generated in the photoelectric conversion portion; a second semiconductor layer that is stacked on the first semiconductor layer, has a three-dimensional structure, and has a first surface on which a pixel transistor that reads out the signal charge from the charge accumulation portion is provided; a through-hole interconnection that directly connects the charge accumulation portion and the gate electrode of the pixel transistor; the second semiconductor layer further has a second surface opposite to the first surface and facing the first semiconductor layer; the gate electrode penetrates between the first surface and the second surface of the second semiconductor layer, the pixel transistor has a plurality of fins; A first width of the through wiring passing through the plurality of fins is narrower than a second width of the through wiring extending above the gate electrode. Imaging device.

2. The imaging device according to claim 1 , wherein the pixel transistor has a fin-type structure.

3. The imaging device according to claim 1 , wherein an end of a penetrating portion of the gate electrode that penetrates the second semiconductor layer protrudes from the second surface of the second semiconductor layer.

4. The imaging device according to claim 3 , wherein the through wiring connects the charge accumulation section and the end of the gate electrode that protrudes from the second surface of the second semiconductor layer.

5. The imaging device according to claim 1 , wherein the through-hole wiring is in contact with a side surface of the gate electrode that penetrates the second semiconductor layer.

6. The imaging device according to claim 5 , wherein the through-hole wiring is further in contact with a part of an upper surface of the gate electrode.

7. The imaging device according to claim 1 , wherein the pixel transistor has a gate-all-around structure.

8. the pixel transistor includes: a semiconductor layer provided on the first surface side of the second semiconductor layer and extending in a direction substantially parallel to a planar direction of the second semiconductor layer; the gate electrode covering a part of an upper surface and a lower surface and a pair of side surfaces of the semiconductor layer; and a first insulating film provided between the semiconductor layer and the gate electrode, covering the upper surface and the pair of side surfaces of the semiconductor layer and a second insulating film covering the lower surface of the semiconductor layer; The imaging device according to claim 7 , wherein the second insulating film is provided to have a width greater than a third width in a direction perpendicular to the extending direction of the semiconductor layer.

9. 9. The imaging device according to claim 8, wherein an extension portion of the second insulating film extending outward beyond the third width of the semiconductor layer is formed below the second insulating film covering the lower surface of the semiconductor layer.

10. The imaging device according to claim 8 , wherein the gate electrode has a convex portion that is wider than the through-hole wiring on a surface thereof facing the first semiconductor layer.

11. The imaging device according to claim 10 , wherein the width of the convex portion is greater than the diameter of the through-wire.

12. the pixel transistor includes: a semiconductor layer provided on the first surface side of the second semiconductor layer and extending in a direction substantially parallel to a planar direction of the second semiconductor layer; the gate electrode covering an upper surface and a lower surface of a part of the semiconductor layer and a pair of side surfaces; and a third insulating film provided between the semiconductor layer and the gate electrode and covering the upper surface, the lower surface, and the pair of side surfaces of the semiconductor layer, 9. The imaging device according to claim 8, further comprising a fourth insulating film provided below said semiconductor layer at a predetermined interval.

13. The imaging device according to claim 12 , wherein the fourth insulating film is provided to have a width wider than the third width of the semiconductor layer.

14. The imaging device according to claim 12 , wherein the fourth insulating film is provided to have a width narrower than the third width of the semiconductor layer.

15. The imaging device according to claim 13 , wherein the gate electrode has a convex portion that is wider than the fourth insulating film on a surface thereof facing the first semiconductor layer.

16. The imaging device according to claim 15 , wherein the width of the convex portion is greater than the diameter of the through-wire.

17. the pixel transistor is provided on the first surface side of the second semiconductor layer, and has a source region and a drain region at both ends of the semiconductor layer extending in a direction substantially parallel to a planar direction of the second semiconductor layer; The imaging device according to claim 8 , further comprising a sacrificial layer immediately below the semiconductor layer in the source region and the drain region, the sacrificial layer having side surfaces substantially identical to side surfaces of the semiconductor layer.

18. The imaging device according to claim 17 , wherein the semiconductor layer has a substantially constant width in the extension direction.

19. 2. The imaging device according to claim 1, wherein the pixel transistors include an amplification transistor, a reset transistor, a selection transistor, and an FD conversion gain switching transistor.

20. The imaging device according to claim 19 , wherein the amplifying transistor, the reset transistor, the selection transistor, and the FD conversion gain switching transistor each have the three-dimensional structure.

21. 21. The imaging device of claim 20, wherein a gate electrode of at least the amplifying transistor among the amplifying transistor, the reset transistor, the selection transistor, and the FD conversion gain switching transistor penetrates between the first surface of the second semiconductor layer and a second surface facing the first semiconductor layer on the opposite side to the first surface.

22. the amplifying transistor has the three-dimensional structure, The imaging device according to claim 19 , wherein the reset transistor, the selection transistor, and the FD conversion gain switching transistor have a planar structure.

23. A first semiconductor layer having a photoelectric conversion unit and a charge storage unit in which signal charges generated in the photoelectric conversion unit are stored, for each pixel; a second semiconductor layer that is stacked on the first semiconductor layer, has a three-dimensional structure, and has a first surface on which a pixel transistor that reads out the signal charge from the charge accumulation portion is provided; a through-hole interconnection that directly connects the charge accumulation portion and the gate electrode of the pixel transistor; the pixel transistor has a gate-all-around structure, the pixel transistor includes: a semiconductor layer provided on the first surface side of the second semiconductor layer and extending in a direction substantially parallel to a planar direction of the second semiconductor layer; the gate electrode covering a part of an upper surface and a lower surface and a pair of side surfaces of the semiconductor layer; and a first insulating film provided between the semiconductor layer and the gate electrode, covering the upper surface and the pair of side surfaces of the semiconductor layer and a second insulating film covering the lower surface of the semiconductor layer; The second insulating film is provided to have a width greater than a third width in a direction perpendicular to the extending direction of the semiconductor layer. Imaging device.

24. a first semiconductor layer having a photoelectric conversion portion and a charge accumulation portion in which signal charges generated in the photoelectric conversion portion are accumulated; a second semiconductor layer stacked on the first semiconductor layer, having a three-dimensional structure, and having a first surface on which a transistor that reads out the signal charge from the charge accumulation portion is provided; a through-hole interconnection that directly connects the charge storage portion and a gate electrode of the transistor; the second semiconductor layer further has a second surface opposite to the first surface and facing the first semiconductor layer; the gate electrode penetrates between the first surface and the second surface of the second semiconductor layer, the transistor has a plurality of fins; A first width of the through wiring passing through the plurality of fins is narrower than a second width of the through wiring extending above the gate electrode. Photodetector.

25. A first semiconductor layer having a photoelectric conversion unit and a charge storage unit in which signal charges generated in the photoelectric conversion unit are stored; a second semiconductor layer stacked on the first semiconductor layer, having a three-dimensional structure, and having a first surface on which a transistor that reads out the signal charge from the charge accumulation portion is provided; a through-hole interconnection that directly connects the charge storage portion and a gate electrode of the transistor; the transistor has a gate-all-around structure, the transistor includes: a semiconductor layer provided on the first surface side of the second semiconductor layer and extending in a direction substantially parallel to a planar direction of the second semiconductor layer; the gate electrode covering a part of an upper surface and a lower surface and a pair of side surfaces of the semiconductor layer; and a first insulating film provided between the semiconductor layer and the gate electrode, covering the upper surface and the pair of side surfaces of the semiconductor layer and a second insulating film covering the lower surface of the semiconductor layer; The second insulating film is provided to have a width greater than a third width in a direction perpendicular to the extending direction of the semiconductor layer. Photodetector.

Images