Method for manufacturing Josephson junction device and method for manufacturing quantum bit

Abstract

The present invention provides a method for producing a Josephson junction element, the method comprising: a step in which a mask layer, wherein a plurality of mask patterns each having a first opening that extends in a first direction and a second opening that extends in a second direction, which intersects with the first direction, and intersects with the first opening are arranged in the first direction, is formed on a substrate; a step in which after forming a first film on the substrate by means of first film formation from obliquely upward in the first direction using the mask layer as a mask, a second film is formed on the substrate by means of second film formation from obliquely upward in a direction other than the direction of the first film formation with respect to the substrate, thereby forming a first superconducting film that comprises the first film and the second film; a step in which an insulating film is formed on the surface of the first superconducting film; and a step in which a third film that has a region which overlaps with the first superconducting film with the insulating film being interposed therebetween is formed on the substrate by means of third film formation from obliquely upward in the second direction using the mask layer as a mask, thereby forming a second superconducting film that comprises the third film.　

Description

[Technical Field]

[0001] The present invention relates to a method for manufacturing a Josephson junction device and a method for manufacturing a quantum bit. [Background technology]

[0002] A quantum bit is known that includes a transmon in which a Josephson junction element and a capacitor are connected in parallel. The Josephson junction element has a structure in which an insulating film is sandwiched between two layers of superconducting film. It is known that superconducting films are formed by film deposition from an oblique direction (e.g., Patent Documents 1 and 2). When forming a superconducting film by film deposition from an oblique direction, differences in the incidence angle of the film deposition material into the openings in the mask layer can cause differences in the width dimensions of multiple superconducting films formed on a substrate. Therefore, it is known that by correcting the width dimension of the openings in the mask layer, the width dimensions of multiple superconducting films formed on a substrate can be approximately the same even when the incidence angle of the film deposition material is different (e.g., Patent Document 3). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 5-243626 [Patent Document 2] US Patent Application Publication No. 2022 / 0037578 [Patent Document 3] Special Publication No. 2021-503171 Summary of the Invention [Problem to be solved by the invention]

[0004] In manufacturing Josephson junction devices, a mask layer having a plurality of mask patterns, each having a first opening and a second opening extending crosswise, is sometimes used. In this case, a first superconducting film is formed by deposition from diagonally above in the direction of the first openings, an insulating film is formed on the surface of the first superconducting film, and then a second superconducting film is formed by deposition from diagonally above in the direction of the second openings. However, this method can result in large variations in the width dimensions of the plurality of second superconducting films formed on the substrate.

[0005] One aspect of the present invention aims to minimize variations in the width dimension of the second superconducting film. [Means for solving the problem]

[0006] In one aspect, a method for manufacturing a Josephson junction device includes the steps of: forming a mask layer on a substrate, the mask layer including a plurality of mask patterns arranged in a first direction, each mask pattern having a first opening extending in a first direction and a second opening extending in a second direction intersecting the first direction and intersecting the first opening; forming a first film on the substrate by a first film deposition performed obliquely from above in the first direction using the mask layer as a mask, and then forming a second film on the substrate by a second film deposition performed obliquely from above in a direction different from the first film deposition, thereby forming a first superconducting film including the first film and the second film; forming an insulating film on a surface of the first superconducting film; and forming a third film on the substrate by a third film deposition performed obliquely from above in the second direction using the mask layer as a mask, the third film having a region overlapping the first superconducting film via the insulating film, thereby forming a second superconducting film including the third film.

[0007] In one aspect, a method for manufacturing a quantum bit includes the steps of: forming a Josephson junction element; and forming a capacitor connected in parallel to the Josephson junction element, wherein the step of forming the Josephson junction element includes the steps of: forming a mask layer on a substrate in a first direction, the mask layer including a plurality of mask patterns arranged in the first direction, each mask pattern having a first opening extending in a first direction and a second opening extending in a second direction intersecting the first direction and intersecting the first opening; forming a first film on the substrate by a first film deposition performed obliquely from above in the first direction using the mask layer as a mask, and then forming a second film on the substrate by a second film deposition performed obliquely from above in a direction different from the first film deposition, thereby forming a first superconducting film including the first film and the second film; forming an insulating film on a surface of the first superconducting film; and forming a third film on the substrate by a third film deposition performed obliquely from above in the second direction using the mask layer as a mask, the third film having a region overlapping the first superconducting film with the insulating film interposed therebetween, thereby forming a second superconducting film including the third film. [Effects of the Invention]

[0008] As one aspect, the variation in the width dimension of the second superconducting film can be reduced. [Brief explanation of the drawings]

[0009] [Figure 1] 1(a) to 1(c) are diagrams (part 1) showing a method for manufacturing a Josephson junction device according to a comparative example. [Figure 2] 2(a) and 2(b) are diagrams (part 2) showing a method for manufacturing a Josephson junction device according to a comparative example. [Figure 3] 3(a) and 3(b) are diagrams showing the oblique vacuum deposition method for forming the first superconducting film in the manufacturing method of the comparative example. [Figure 4] 4(a) to 4(c) are diagrams showing the film thickness distribution of the first superconducting film in the manufacturing method of the comparative example. [Figure 5]5(a) to 5(c) are diagrams showing the width distribution of the second superconducting film in the manufacturing method of the comparative example. [Figure 6] 6(a) to 6(c) are diagrams (part 1) showing a method for manufacturing a Josephson junction device according to the first embodiment. [Figure 7] 7(a) to 7(c) are diagrams (part 2) showing a method for manufacturing a Josephson junction device according to the first embodiment. [Figure 8] 8(a) to 8(c) are diagrams (part 3) showing a method for manufacturing a Josephson junction device according to the first embodiment. [Figure 9] 9(a) to 9(c) are diagrams (part 4) showing a method for manufacturing a Josephson junction device according to the first embodiment. [Figure 10] 10(a) to 10(c) are diagrams (part 5) showing a method for manufacturing a Josephson junction device according to the first embodiment. [Figure 11] 11(a) to 11(c) are diagrams (part 6) showing a method for manufacturing a Josephson junction device according to the first embodiment. [Figure 12] FIG. 12(a) is a plan view of the first superconducting film after the first film has been formed, and FIG. 12(b) is a plan view of the first superconducting film after the second film has been formed. [Figure 13] 13(a) and 13(b) are diagrams showing the oblique vacuum deposition method for forming the first superconducting film in the manufacturing method of Example 1. FIG. [Figure 14] FIG. 14(a) is a schematic diagram showing the width distribution of the second superconducting film in the manufacturing method of the comparative example, and FIG. 14(b) is a schematic diagram showing the width distribution of the second superconducting film in the manufacturing method of the first embodiment. [Figure 15] 15(a) to 15(c) are cross-sectional views showing a method for manufacturing a Josephson device according to the second embodiment. [Figure 16] 16(a) and 16(b) are diagrams showing the incidence angle of the deposition material onto the substrate in the oblique vacuum deposition method for forming the first superconducting film and the second superconducting film. [Figure 17]17(a) to 17(i) are diagrams showing the incidence angle of the deposition material onto the mask patterns formed in the regions A to I of FIGS. 16(a) and 16(b). [Figure 18] 18(a) to 18(i) are diagrams showing Josephson junction devices formed in regions A to I of FIGS. 16(a) and 16(b). [Figure 19] 19(a) to 19(i) are plan views showing mask patterns formed on a mask layer in a method for manufacturing a Josephson junction device according to the third embodiment. [Figure 20] FIG. 20(a) is a circuit diagram of a quantum bit according to the fourth embodiment, and FIG. 20(b) is a plan view of the quantum bit according to the fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the present invention will be described with reference to the drawings. [Example]

[0011] A method for manufacturing a Josephson device known as a Manhattan type will be described. First, a method for manufacturing a Josephson device according to a comparative example will be described. FIGS. 1(a) to 2(b) are diagrams showing a method for manufacturing a Josephson device according to a comparative example. The upper figures in FIGS. 1(a) to 2(b) are plan views showing the method for manufacturing a Josephson device according to a comparative example. The middle figures are cross-sectional views taken along line AA of the upper figures, and the lower figures are cross-sectional views taken along line BB of the upper figures. In the upper plan views of FIGS. 1(b) to 2(b), the first superconducting film 14, the insulating film 16, and the second superconducting film 18 formed in the gap 26 are hatched for clarity (the same applies to similar figures below).

[0012] As shown in FIG. 1(a), a mask layer 12 is formed on a substrate 10. The mask layer 12 has an upper layer 12a and a lower layer 12b. A mask pattern 20 including an opening 22, an opening 24, and a void 26 is formed on the mask layer 12. The opening 22 extends in the X-axis direction, and the opening 24 extends in the Y-axis direction, intersecting the opening 22, and both are formed in the upper layer 12a. The void 26 is formed in the lower layer 12b. The void 26 is located below the openings 22, 24, and has a shape that is larger than the openings 22, 24 in a plan view.

[0013] As shown in FIG. 1(b), using the mask layer 12 as a mask, a first superconducting film 14 is formed on the substrate 10 by deposition from diagonally above in the −X direction, as indicated by arrow 40. For example, the first superconducting film 14 is formed by oblique vacuum deposition. Since the first superconducting film 14 is formed on the substrate 10 by deposition from diagonally above in the −X direction, by setting the width dimension of the opening 24 to an appropriate size, the first superconducting film 14 extending in the Y-axis direction is not formed in the void 26. Only the first superconducting film 14 extending in the X-axis direction is formed in the void 26.

[0014] As shown in FIG. 1(c), while maintaining the vacuum state in which the first superconducting film 14 was formed, oxygen is introduced into the chamber to oxidize the surface of the first superconducting film 14, thereby forming an insulating film 16 on the surface of the first superconducting film 14.

[0015] As shown in FIG. 2( a), using the mask layer 12 as a mask, the second superconducting film 18 is formed on the substrate 10 by deposition from diagonally above in the +Y direction, as indicated by arrow 42. For example, the second superconducting film 18 is formed by oblique vacuum deposition. Since the second superconducting film 18 is formed on the substrate 10 by deposition from diagonally above in the +Y direction, the width dimension of the opening 22 is set to an appropriate size, so that the second superconducting film 18 extending in the X-axis direction is not formed in the void 26. Only the second superconducting film 18 extending in the Y-axis direction is formed in the void 26. As a result, a region 28 is formed in which the first superconducting film 14 extending in the X-axis direction and the second superconducting film 18 extending in the Y-axis direction overlap with the insulating film 16 interposed therebetween.

[0016] 2(b), the mask layer 12, the first superconducting film 14, the insulating film 16, and the second superconducting film 18 formed on the mask layer 12 are removed by a lift-off method. A region 28 where the first superconducting film 14 extending in the X-axis direction and the second superconducting film 18 extending in the Y-axis direction overlap with the insulating film 16 interposed therebetween becomes a Josephson junction 30.

[0017] 3(a) to 5(c) are used to explain problems that arise in a manufacturing method of a Josephson device according to a comparative example. FIGS. 3(a) and 3(b) are diagrams illustrating an oblique vacuum deposition method for forming a first superconducting film 14 in a manufacturing method of a Josephson device according to a comparative example. As shown in FIGS. 3(a) and 3(b), the deposition material in a deposition source 34 is vaporized or sublimated to adhere to the substrate 10, thereby forming the first superconducting film 14. At this time, the wafer-shaped substrate 10 is tilted relative to the deposition source 34 so that the deposition material in the deposition source 34 is incident on the substrate 10 from obliquely above in the −X direction.

[0018] When the substrate 10 is tilted with respect to the deposition source 34, the distance from the deposition source 34 to the substrate 10 varies significantly within the plane of the substrate 10. That is, the distance L2 from the deposition source 34 to the center B of the substrate 10, the distance L1 to the end A of the substrate 10 closer to the deposition source 34, and the distance L3 to the end C of the substrate 10 farther from the deposition source 34 all differ. Distance L1 is shorter than distance L2, and distance L2 is shorter than distance L3. As an example, assume that the substrate 10 is a 3-inch (76 mm) wafer, the angle θ2 at which the deposition material from the deposition source 34 enters the center B of the substrate 10 is 45.0°, and the distance L2 is 550 mm. In this case, the angle θ1 at which the deposition material enters the end A of the substrate 10 closer to the deposition source 34 is 47.9°, and the distance L1 is 524 mm. The angle θ3 at which the deposition material is incident on the end C of the substrate 10 farther from the deposition source 34 is 42.3°, and the distance L3 is 577 mm.

[0019] 4(a) to 4(c) are diagrams showing the film thickness distribution of the first superconducting film 14 in a manufacturing method of a Josephson junction device according to a comparative example. The upper diagrams in FIGS. 4(a) to 4(c) are plan views of the mask pattern 20 formed at positions A to C in FIGS. 3(a) and 3(b). The lower diagrams are cross-sectional views taken along the line AA in the upper diagrams. As shown in FIGS. 4(a) to 4(c), the distances from the deposition source 34 to the positions A to C are different, resulting in different thicknesses of the first superconducting film 14 deposited at the positions A to C. The closer the distance from the deposition source 34, the thicker the deposited first superconducting film 14 is, and the farther the distance, the thinner the deposited first superconducting film 14 is. Therefore, the thickness T1 of the first superconducting film 14 deposited on the mask layer 12 at position A is thicker than the thickness T2 of the first superconducting film 14 deposited on the mask layer 12 at position B. The thickness T2 of the first superconducting film 14 deposited on the mask layer 12 at position B is thicker than the thickness T3 of the first superconducting film 14 deposited on the mask layer 12 at position C. As an example, assume that the distances L1, L2, and L3 in Figure 3(b) are 524 mm, 550 mm, and 577 mm, and the angles θ1, θ2, and θ3 are 47.9°, 45.0°, and 42.3°. In this case, if the thickness T2 of the first superconducting film 14 at position B is set to 28.3 nm, the thickness T1 of the first superconducting film 14 at position A will be 31.1 nm, and the thickness T3 of the first superconducting film 14 at position C will be 25.6 nm.

[0020] The first superconducting film 14 is deposited not only on the top surface of the mask layer 12 but also on the side surfaces of the mask layer 12 at the openings 24. The thickness of the first superconducting film 14 on the side surfaces of the mask layer 12 at the openings 24 at position A is thicker than the thickness of the first superconducting film 14 on the side surfaces of the mask layer 12 at the openings 24 at position B. The thickness of the first superconducting film 14 on the side surfaces of the mask layer 12 at the openings 24 at position B is thicker than the thickness of the first superconducting film 14 on the side surfaces of the mask layer 12 at the openings 24 at position C. Therefore, if the widths of the openings 24 formed at positions A to C excluding the first superconducting film 14 are designated X1, X2, and X3, then width X1 is narrower than width X2, and width X2 is narrower than width X3.

[0021] 5(a) to 5(c) are diagrams showing the width distribution of the second superconducting film 18 in a manufacturing method of a Josephson junction device according to a comparative example. The upper diagrams in FIGS. 5(a) to 5(c) are plan views of the mask pattern 20 formed at positions A to C in FIGS. 3(a) and 3(b). The lower diagrams are cross-sectional views taken along line AA in the upper diagrams. As shown in FIGS. 4(a) to 4(c), the width X1 of the opening 24 at position A is narrower than the width X2 of the opening 24 at position B, and the width X2 of the opening 24 at position B is narrower than the width X3 of the opening 24 at position C. Therefore, as shown in FIGS. 5(a) to 5(c), the width W1 of the second superconducting film 18 formed in the gap 26 at position A is narrower than the width W2 of the second superconducting film 18 formed in the gap 26 at position B. The width W2 of the second superconducting film 18 formed in the gap 26 at position B is narrower than the width W3 of the second superconducting film 18 formed in the gap 26 at position C. In this way, variations occur in the width dimensions of the second superconducting film 18 formed in the gap 26 at each of positions A to C. This causes variations in the area of ​​the region 28 where the first superconducting film 14 and the second superconducting film 18 overlap with the insulating film 16 interposed therebetween (i.e., Josephson junction 30).

[0022] Because the reciprocal of the area of ​​the Josephson junction 30 corresponds to the junction resistance of the Josephson junction 30, the characteristics of the Josephson junction element are affected by the area of ​​the Josephson junction 30. For example, in a quantum bit using transmons in which a Josephson junction element and a capacitor are connected in parallel, if there is variation in the area of ​​the Josephson junction 30, this variation will be reflected in the quantum bit and cause a decrease in fidelity. Therefore, as shown in Figures 5(a) to 5(c), if there is variation in the width dimension of the second superconducting film 18 and therefore in the area of ​​the Josephson junction 30, the characteristics of the Josephson junction element will vary, resulting in a decrease in the fidelity of the quantum bit. In the future, as wafer size increases and / or quantum bit chips become larger due to integration, it is expected that the variation in the width dimension of the second superconducting film 18 will increase, and the variation in the area of ​​the Josephson junction 30 will also increase.

[0023] Therefore, a method for manufacturing a Josephson junction device according to Example 1, which can reduce the variation in the width dimension of the second superconducting film 18 formed in the void 26 and reduce the variation in the area of ​​the Josephson junction 30, will be described below.

[0024] FIGS. 6(a) to 11(c) are diagrams illustrating a manufacturing method of a Josephson junction device according to Example 1. The upper figures in FIGS. 6(a), 7(a), 8(a), 9(a), 10(a), and 11(a) are plan views of a mask pattern 20a formed at position A in FIGS. 3(a) and 3(b). The middle figures are AA cross-sectional views of the upper figures, and the lower figures are BB cross-sectional views of the upper figures. The upper figures in FIGS. 6(b), 7(b), 8(b), 9(b), 10(b), and 11(b) are plan views of a mask pattern 20b formed at position B in FIGS. 3(a) and 3(b). The middle figures are AA cross-sectional views of the upper figures, and the lower figures are BB cross-sectional views of the upper figures. The upper diagrams of Figures 6(c), 7(c), 8(c), 9(c), 10(c), and 11(c) are plan views of mask pattern 20c formed at position C in Figures 3(a) and 3(b). The middle diagrams are cross-sectional views taken along line AA of the upper diagrams, and the lower diagrams are cross-sectional views taken along line BB of the upper diagrams.

[0025] As shown in FIGS. 6(a) to 6(c), a mask layer 12 is formed on a substrate 10. The substrate 10 is, for example, a high-resistivity silicon substrate. The mask layer 12 has an upper layer 12a and a lower layer 12b. Mask patterns 20a to 20c, each including an opening 22, an opening 24, and a void 26, are formed on the mask layer 12 at positions A to C. The opening 22 extends in the X-axis direction, and the opening 24 extends in the Y-axis direction, intersecting (for example, perpendicular to) the opening 22, and both are formed in the upper layer 12a. In this way, the mask patterns 20a to 20c have a cross-shaped opening formed by the openings 22 and 24 in the upper layer 12a. The void 26 is formed in the lower layer 12b. The void 26 is located below the openings 22 and 24 and has a shape larger than the openings 22 and 24 in a plan view. The mask layer 12 is formed, for example, from a resist. A resist having a higher sensitivity to exposure (e.g., EB (Electron Beam) exposure) for forming openings 22, 24 and voids 26 than that of upper layer 12a is used for lower layer 12b. As a result, when openings 22, 24 are formed in upper layer 12a, voids 26 having a shape similar to that of the openings 22, 24 but larger than that of the openings 22, 24 are formed in lower layer 12b. Mask patterns 20a to 20c formed at positions A to C are aligned in the X direction as shown in FIG. 3(a).

[0026] As shown in FIGS. 7(a) to 7(c), using the mask layer 12 as a mask, a first film 14a is formed on the substrate 10 by deposition from diagonally above in the -X direction, as indicated by arrow 40. For example, the first film 14a is formed by oblique vacuum deposition. The first film 14a is, for example, an aluminum (Al) film. Because the first film 14a is formed on the substrate 10 by deposition from diagonally above in the -X direction, by appropriately adjusting the width of the opening 24, the first film 14a extending in the Y-axis direction is not formed within the void 26. Only the first film 14a extending in the X-axis direction is formed within the void 26. For example, by making the width of the opening 24 smaller than the thickness of the upper layer 12a, the first film 14a extending in the Y-axis direction can be prevented from being formed within the void 26. The first film 14a is formed offset in the +X direction relative to the opening 22. For example, the film formation conditions are adjusted so that the thickness of the first film 14a formed at position B is about half the thickness of the first superconducting film 14 to be formed at position B.

[0027] Because the first film 14a is formed by deposition from diagonally above in the -X direction, the distance from the vapor deposition source 34 to position A is closer than to position B, and position B is closer than to position C. Therefore, the thickness of the first film 14a formed at position A is thicker than the thickness of the first film 14a formed at position B. The thickness of the first film 14a formed at position B is thicker than the thickness of the first film 14a formed at position C. In this manner, a film thickness distribution occurs in the first film 14a formed at each of positions A to C. At this stage, the width X1 of the opening 24 excluding the first film 14a at position A is smaller than the width X2 of the opening 24 excluding the first film 14a at position B. The width X2 of the opening 24 excluding the first film 14a at position B is smaller than the width X3 of the opening 24 excluding the first film 14a at position C.

[0028] As shown in FIGS. 8(a) to 8(c), the mask layer 12 is used as a mask to form the second film 14b on the substrate 10 by deposition from diagonally above in the +X direction, as indicated by arrow 41. For example, the second film 14b is formed by oblique vacuum deposition. The second film 14b is, for example, an aluminum (Al) film. Since the second film 14b is formed on the substrate 10 by deposition from diagonally above in the +X direction, by appropriately adjusting the width of the opening 24, the second film 14b extending in the Y-axis direction is not formed within the void 26. Only the second film 14b extending in the X-axis direction is formed within the void 26. For example, by making the width of the opening 24 smaller than the thickness of the upper layer 12a, the second film 14b extending in the Y-axis direction can be prevented from being formed within the void 26. The second film 14b is formed offset in the −X direction relative to the opening 22. The film formation conditions are adjusted so that the thickness of the second film 14b formed at the position B is about half the thickness of the first superconducting film 14 to be formed at the position B.

[0029] The second film 14b is formed so as to overlap most of the first film 14a, and the first film 14a and the second film 14b form the first superconducting film 14. The width of the first superconducting film 14 is, for example, about 100 nm to 300 nm, and the thickness is about 10 nm to 100 nm. Here, the pattern misalignment between the first film 14a and the second film 14b will be explained in detail using figures. FIG. 12(a) is a plan view after the first film 14a has been formed, and FIG. 12(b) is a plan view after the second film 14b has been formed. FIGS. 12(a) and 12(b) also illustrate the extraction pad 32 formed by the first film 14a and the second film 14b. As shown in Figures 12(a) and 12(b), the first film 14a is formed shifted in the +X direction with respect to the opening 22 (not shown in Figures 12(a) and 12(b)), and the second film 14b is formed shifted in the -X direction with respect to the opening 22, so that the patterns of the first film 14a and the second film 14b are formed shifted in the X-axis direction.

[0030] 8(a) to 8(c), the second film 14b is formed by deposition from diagonally above in the +X direction, and therefore the distance from the vapor deposition source 34 to position C is closer than to position B, which is closer than to position A. Therefore, the thickness of the second film 14b formed at position C is thicker than the thickness of the second film 14b formed at position B. The thickness of the second film 14b formed at position B is thicker than the thickness of the second film 14b formed at position A. In this way, the second films 14b formed at each of positions A to C have a film thickness distribution opposite to that of the first films 14a formed at each of positions A to C.

[0031] Because the film thickness distribution of the first film 14a and the film thickness distribution of the second film 14b are opposite, the total film thickness of the first film 14a and the second film 14b formed at each of positions A to C varies little. That is, the thickness of the first superconducting film 14 formed at each of positions A to C varies little. Therefore, the variations in width X1 of the opening 24 excluding the first superconducting film 14 at position A, width X2 of the opening 24 excluding the first superconducting film 14 at position B, and width X3 of the opening 24 excluding the first superconducting film 14 at position C are small.

[0032] In order to suppress variations in the thickness of the first superconducting film 14 formed at each of positions A to C by utilizing the film thickness distribution of the first film 14a and the film thickness distribution of the second film 14b, it is preferable that the thickness of the first film 14a and the thickness of the second film 14b are approximately the same at the center B of the substrate 10. For example, in Example 1, for the first film 14a and the second film 14b formed at position B, the ratio of the difference in thickness between the first film 14a and the second film 14b to the thickness of the first film 14a is set to ±3% or less.

[0033] Here, the vacuum evaporation method for forming the first superconducting film 14 consisting of the first film 14a and the second film 14b will be described with reference to the drawings. FIGS. 13(a) and 13(b) are diagrams illustrating the oblique vacuum evaporation method for forming the first superconducting film 14 in the manufacturing method of a Josephson junction device according to Example 1. As shown in FIGS. 13(a) and 13(b), the substrate 10 is tilted with respect to the evaporation source 34, and the evaporation material from the evaporation source 34 is incident on the substrate 10 from obliquely above in the −X direction to form the first film 14a on the substrate 10 by the first deposition method. Thereafter, the substrate 10 is tilted in the opposite direction with respect to the evaporation source 34, and the evaporation material is incident on the substrate 10 from obliquely above in the +X direction to form the second film 14b on the substrate 10 by the second deposition method.

[0034] In the first film formation, the angle at which the vapor deposition material from the vapor deposition source 34 is incident on the edge A of the substrate 10 is defined as θ11, and the distance from the vapor deposition source 34 to the edge A of the substrate 10 is defined as L11. The angle at which the vapor deposition material from the vapor deposition source 34 is incident on the central portion B of the substrate 10 is defined as θ12, and the distance from the vapor deposition source 34 to the central portion B of the substrate 10 is defined as L12. The angle at which the vapor deposition material from the vapor deposition source 34 is incident on the edge C of the substrate 10 is defined as θ13, and the distance from the vapor deposition source 34 to the edge C of the substrate 10 is defined as L13. In the second film formation, the angle at which the vapor deposition material from the vapor deposition source 34 is incident on the edge A of the substrate 10 is defined as θ21, and the distance from the vapor deposition source 34 to the edge A of the substrate 10 is defined as L21. The angle at which the vapor deposition material from the vapor deposition source 34 is incident on the central portion B of the substrate 10 is defined as θ22, and the distance from the vapor deposition source 34 to the central portion B of the substrate 10 is defined as L22. The angle at which the deposition material from the deposition source 34 is incident on the edge C of the substrate 10 is set to θ23, and the distance from the deposition source 34 to the edge C of the substrate 10 is set to L23.

[0035] As an example, assume that the substrate 10 is a 3-inch wafer. In the first film formation, the angle θ12 at which the deposition material from the deposition source 34 is incident on the central portion B of the substrate 10 is 45.0°, and the distance L12 is 550 mm. In this case, the angle θ11 at which the deposition material is incident on the edge A of the substrate 10 is 47.9°, and the distance L11 is 524 mm. The angle θ13 at which the deposition material is incident on the edge C of the substrate 10 is 42.3°, and the distance L13 is 577 mm. In the second film formation, the angle θ22 at which the deposition material from the deposition source 34 is incident on the central portion B of the substrate 10 is 45.0°, and the distance L22 is 550 mm. In this case, the angle θ21 at which the deposition material is incident on the edge A of the substrate 10 is 42.3°, and the distance L21 is 577 mm. The angle θ23 at which the deposition material is incident on the edge C of the substrate 10 is 47.9°, and the distance L23 is 524 mm.

[0036] For example, the thickness T2 of the first film 14a deposited on the central portion B of the substrate 10 is set to 14.2 nm. In this case, the thickness T1 of the first film 14a deposited on the edge A of the substrate 10 is approximately 15.6 nm, and the thickness T3 of the first film 14a deposited on the edge C of the substrate 10 is approximately 12.8 nm (see FIGS. 7(a) to 7(c) for thicknesses T1 to T3). In addition, the thickness T4 of the second film 14b deposited on the central portion B of the substrate 10 is set to 14.2 nm. In this case, the thickness T5 of the second film 14b deposited on the edge A of the substrate 10 is approximately 12.8 nm, and the thickness T6 of the second film 14b deposited on the edge C of the substrate 10 is approximately 15.6 nm (see FIGS. 8(a) to 8(c) for thicknesses T4 to T6). Therefore, at each of positions A to C, the thickness of the laminated film of first film 14a and second film 14b, ie, the thickness of first superconducting film 14, is about 28.3 nm, and the variation in the thickness of first superconducting film 14 is small.

[0037] The thicknesses of the first film 14a and the second film 14b are largely determined by the distance from the vapor deposition source 34 to the substrate 10, although they are somewhat affected by the angle of incidence of the vapor deposition material from the vapor deposition source 34 onto the substrate 10. Therefore, to ensure that the thicknesses of the first film 14a and the second film 14b at the central portion B of the substrate 10 are approximately the same, it is preferable that the distance L12 from the vapor deposition source 34 to the central portion B during the first film formation is approximately the same as the distance L22 from the vapor deposition source 34 to the central portion B during the second film formation. For example, in Example 1, the ratio of the difference between the distance L12 and the distance L22 to the distance L12 is set to ±5% or less. Furthermore, if the angle of incidence of the vapor deposition material from the vapor deposition source 34 onto the substrate 10 changes significantly, the thickness of the vapor deposition film may change. Therefore, in order to make the thicknesses of the first film 14a and the second film 14b at the central portion B of the substrate 10 approximately the same, it is preferable that the incident angle θ12 of the vapor deposition material at the central portion B in the first film formation and the incident angle θ22 of the vapor deposition material at the central portion B in the second film formation do not differ significantly. For example, in Example 1, the rate of difference between the incident angle θ12 and the incident angle θ22 with respect to the incident angle θ12 is set to ±30% or less.

[0038] As shown in Figures 9(a) to 9(c), while maintaining the vacuum state that was present when the first superconducting film 14 was formed, oxygen is introduced into the chamber to oxidize the surface of the first superconducting film 14, thereby forming an insulating film 16 on the surface of the first superconducting film 14. The widths X1 to X3 of the opening 24 at positions A to C are narrowed by the thickness of the insulating film 16, but the variation remains small. Note that in Figures 9(a) to 9(c), the first film 14a and the second film 14b are omitted from the illustration, and only the first superconducting film 14 is shown (the same applies to Figures 10(a) to 11(c)).

[0039] As shown in FIGS. 10(a) to 10(c), the second superconducting film 18 is formed on the substrate 10 by deposition from diagonally above in the +Y direction, as indicated by arrow 42, using the mask layer 12 as a mask. For example, the second superconducting film 18 is formed by oblique vacuum deposition. The second superconducting film 18 is, for example, an aluminum (Al) film. The width of the second superconducting film 18 is, for example, approximately 100 nm to 300 nm, and the thickness is, for example, approximately 10 nm to 100 nm. Because the second superconducting film 18 is formed on the substrate 10 by deposition from diagonally above in the +Y direction, by appropriately setting the width dimension of the opening 22, the second superconducting film 18 extending in the X-axis direction is not formed within the void 26. Only the second superconducting film 18 extending in the Y-axis direction is formed within the void 26. For example, by making the width dimension of the opening 22 smaller than the thickness dimension of the upper layer 12a, the second superconducting film 18 extending in the X-axis direction can be prevented from being formed within the void 26. The second superconducting film 18 is formed so as to be shifted in the −Y direction with respect to the opening 24. As a result, a region 28 is formed in which the first superconducting film 14 extending in the X-axis direction and the second superconducting film 18 extending in the Y-axis direction overlap with the insulating film 16 interposed therebetween.

[0040] Since the variation in the widths X1 to X3 (see Figures 9(a) to 9(c)) of the opening 24 at each position A to C is small, the variation in the widths W1 to W3 of the second superconducting film 18 formed in the gap 26 at each position A to C is also small.

[0041] 11(a) to 11(c), the mask layer 12, the first superconducting film 14, the insulating film 16, and the second superconducting film 18 formed on the mask layer 12 are removed by lift-off. A region 28 where the first superconducting film 14 extending in the X-axis direction and the second superconducting film 18 extending in the Y-axis direction overlap with the insulating film 16 interposed therebetween becomes a Josephson junction 30, and a plurality of Josephson junction devices 100 are formed on the substrate 10. The insulating film 16 has a thickness that allows a tunneling effect to be obtained at a temperature at which superconductivity occurs. Since there is little variation in the widths W1 to W3 of the second superconducting film 18 formed at positions A to C, there is also little variation in the area of ​​the Josephson junction 30.

[0042] FIG. 14(a) is a schematic diagram showing the width distribution of the second superconducting film 18 in the manufacturing method of the Josephson device according to the comparative example, and FIG. 14(b) is a schematic diagram showing the width distribution of the second superconducting film 18 in the manufacturing method of the Josephson device according to the first example. In FIGS. 14(a) and 14(b), the horizontal axis indicates the position of the substrate 10 in the X-axis direction, and the vertical axis indicates the width of the second superconducting film 18. As shown in FIG. 14(a), when the manufacturing method of the Josephson device according to the comparative example is used, the width of the second superconducting film 18 varies in the X-axis direction of the substrate 10. In contrast, as shown in FIG. 14(b), when the manufacturing method of the Josephson device according to the first example is used, the variation in the width of the second superconducting film 18 in the X-axis direction of the substrate 10 can be suppressed.

[0043] As described above, according to the first embodiment, as shown in FIG. 6(a), a mask layer 12 is formed on a substrate 10. The mask layer 12 includes a plurality of mask patterns 20a-20c arranged in the X-axis direction. The mask patterns 20a-20c each have an opening 22 extending in the X-axis direction and an opening 24 extending in the Y-axis direction and intersecting the opening 22. As shown in FIGS. 7(a) to 7(c), a first film 14a is formed on the substrate 10 by deposition from diagonally above in the -X direction using the mask layer 12 as a mask. Thereafter, as shown in FIGS. 8(a) to 8(c), a second film 14b is formed on the substrate 10 by deposition from diagonally above in the +X direction, which is 180° different from the deposition of the first film 14a. This forms a first superconducting film 14 including the first film 14a and the second film 14b. As shown in FIGS. 9(a) to 9(c), an insulating film 16 is formed on the surface of the first superconducting film 14. 10(a) to 10(c), using the mask layer 12 as a mask, a second superconducting film 18 having a region 28 overlapping the first superconducting film 14 via the insulating film 16 is formed on the substrate 10 by film deposition from diagonally above in the +Y direction. This makes it possible to suppress variations in the width dimension of the second superconducting film 18 of the multiple Josephson junction devices 100 formed on the substrate 10. Therefore, variations in the area of ​​the Josephson junctions 30 of the multiple Josephson junction devices 100 are suppressed.

[0044] In Example 1, the second film 14b is formed from above obliquely in a direction that is 180° different from the direction in which the first film 14a is formed on the substrate 10. However, the present invention is not limited to this case, and the second film 14b may be formed from above obliquely in a direction that is 180°±5° different from the direction in which the first film 14a is formed on the substrate 10.

[0045] 13(b), in Example 1, the distance L12 from the deposition source 34 to the central part B of the substrate 10 during the deposition of the first film 14a (first film) is 95% to 105% of the distance L22 from the deposition source 34 to the central part B of the substrate 10 during the deposition of the second film 14b (second film). This makes it possible to suppress the variation in the thickness of the first superconducting film 14 within the substrate 10 due to the film thickness distribution of the first film 14a and the film thickness distribution of the second film 14b. The suppression of the variation in the thickness of the first superconducting film 14 also makes it possible to suppress the variation in the width dimension of the second superconducting film 18 of the plurality of Josephson junction devices 100. To suppress the variation in the thickness of the first superconducting film 14, the distance L12 is preferably 97% to 103% of the distance L22, more preferably 98% to 102%, and even more preferably 99% to 101%.

[0046] 13(b), in Example 1, the angle θ12 at which the vapor deposition material from the vapor deposition source 34 is incident on the central portion B of the substrate 10 during the deposition of the first film 14a (first film formation) is 70% to 130% of the angle θ22 at which the vapor deposition material from the vapor deposition source 34 is incident on the central portion B of the substrate 10 during the deposition of the second film 14b (second film formation). This makes it possible to suppress the variation in thickness of the first superconducting film 14 within the substrate 10 due to the film thickness distribution of the first film 14a and the film thickness distribution of the second film 14b. This makes it possible to suppress the variation in width of the second superconducting film 18 of the multiple Josephson junction devices 100. In order to suppress the variation in thickness of the first superconducting film 14, the angle θ12 is preferably 75% to 125% of the angle θ22, more preferably 80% to 120%, and even more preferably 90% to 110%.

[0047] In Example 1, the thickness of the first film 14a at the central portion B of the substrate 10 is 97% to 103% of the thickness of the second film 14b at the central portion B of the substrate 10. This makes it possible to suppress the variation in the thickness of the first superconducting film 14 within the substrate 10 due to the film thickness distribution of the first film 14a and the film thickness distribution of the second film 14b. This also makes it possible to suppress the variation in the width dimension of the second superconducting film 18 of the plurality of Josephson junction devices 100. In order to suppress the variation in the thickness of the first superconducting film 14, the thickness of the first film 14a at the central portion B of the substrate 10 is preferably 98% to 102% of the thickness of the second film 14b at the central portion B of the substrate 10, more preferably 99% to 101%. [Example]

[0048] 15(a) to 15(c) are cross-sectional views showing a manufacturing method of a Josephson device according to Example 2. The upper figures in FIGS. 15(a) to 15(c) are plan views showing the manufacturing method of a Josephson device according to Example 2, the middle figures are cross-sectional views taken along the line AA of the upper figures, and the lower figures are cross-sectional views taken along the line BB of the upper figures. In the manufacturing method of a Josephson device according to Example 2, the steps shown in FIGS. 6(a) to 9(c) of Example 1 are first performed. Then, as shown in FIG. 15(a), a first film 18a is formed on a substrate 10 by film deposition from an obliquely upward direction in the +Y direction, as indicated by an arrow 42, using a mask layer 12 as a mask. For example, the first film 18a is formed by oblique vacuum deposition. The first film 18a is, for example, an aluminum (Al) film. For example, film deposition conditions are adjusted so that the thickness of the first film 18a formed at the center of the substrate 10 is approximately half the thickness of the second superconducting film 18 to be formed at the center of the substrate 10.

[0049] Because the first film 18a is formed on the substrate 10 by deposition from diagonally above in the +Y direction, depending on the thickness of the first superconducting film 14, the first film 18a may not be formed on the side surface of the first superconducting film 14 on the -Y direction side. Therefore, as shown in FIG. 15(b), the second film 18b is formed on the substrate 10 by deposition from diagonally above in the -Y direction, as indicated by arrow 43, using the mask layer 12 as a mask. For example, the second film 18b is formed by oblique vacuum deposition. The second film 18b is, for example, an aluminum (Al) film. For example, deposition conditions are adjusted so that the thickness of the second film 18b formed at the center of the substrate 10 is approximately half the thickness of the second superconducting film 18 to be formed at the center of the substrate 10.

[0050] Since the second film 18b is formed on the substrate 10 by deposition from diagonally above in the -Y direction, the second film 18b is formed to cover the side surface of the first superconducting film 14 on the -Y direction side. Note that it is possible that the second film 18b is not formed on the side surface of the first superconducting film 14 on the +Y direction side. The second film 18b is formed so that most of it overlaps the first film 18a, and the first film 18a and the second film 18b form the second superconducting film 18.

[0051] 15(c), the mask layer 12, the first superconducting film 14, the insulating film 16, and the second superconducting film 18 formed on the mask layer 12 are removed by lift-off, thereby forming a Josephson junction device 200 on the substrate 10.

[0052] According to the second embodiment, after the first film 18a is formed on the substrate 10 by film deposition from diagonally above in the +Y direction, the second film 18b is formed on the substrate 10 by film deposition from diagonally above in the -Y direction, which is 180° different from the film deposition of the first film 18a with respect to the substrate 10. In this way, the second superconducting film 18 including the first film 18a and the second film 18b is formed. In this way, by forming the second superconducting film 18 by film deposition from diagonally above in the +Y direction and the -Y direction, it is possible to prevent breaks in the second superconducting film 18 even when the first superconducting film 14 is thick.

[0053] In Example 2, the second film 18b is formed from above obliquely in a direction that is 180° different from the direction in which the first film 18a is formed on the substrate 10. However, this is not limiting, and the second film 18b may be formed from above obliquely in a direction that is 180°±5° different from the direction in which the first film 18a is formed on the substrate 10. [Example]

[0054] 16(a) and 16(b) are diagrams showing the incidence angle of the deposition material onto the substrate 10 in the oblique vacuum deposition method for forming the first superconducting film 14 and the second superconducting film 18. As shown in FIG. 16(a), the substrate 10 is tilted with respect to the deposition source 34, and the deposition material from the deposition source 34 is incident on the substrate 10 from above at an angle in the −X and +X directions to form the first superconducting film 14. At this time, the deposition source 34 is not positioned at infinity with respect to the substrate 10, but is placed, for example, at a distance of approximately 500 mm from the substrate 10. Therefore, as indicated by arrows 40a to 40c and arrows 41a to 41c, the incidence angle of the deposition material from the deposition source 34 varies in the Y-axis direction of the substrate 10. That is, the incidence angle of the deposition material from the deposition source 34 differs among regions A, B, and C located on the +Y direction side of the substrate 10, regions D, E, and F located in the center in the Y-axis direction, and regions G, H, and I located on the −Y direction side.

[0055] 16(b), the deposition material from the deposition source 34 is incident on the substrate 10 obliquely from above in the +Y direction to form the second superconducting film 18. Therefore, as indicated by arrows 42a to 42c, the incident angle of the deposition material from the deposition source 34 varies in the X-axis direction of the substrate 10. That is, the incident angle of the deposition material from the deposition source 34 differs among regions A, D, and G located on the −X direction side of the substrate 10, regions B, E, and H located in the center in the X-axis direction, and regions C, F, and I located on the +X direction side.

[0056] 17(a) to 17(i) show the incidence angles of the vapor deposition material onto the mask pattern 20 formed in regions A to I of FIGS. 16(a) and 16(b). As shown in FIGS. 17(a) to 17(i), the openings 22 included in the mask pattern 20 in all of regions A to I extend in the X-axis direction, and the openings 24 extend in the Y-axis direction. Therefore, as shown in FIGS. 17(d) to 17(f), for regions D, E, and F located at the center of the substrate 10 in the Y-axis direction, the vapor deposition material enters the openings 22 from a direction approximately parallel to the X-axis direction, as indicated by arrows 40b and 41b. On the other hand, as shown in FIGS. 17(a) to 17(c), for regions A, B, and C located on the +Y-direction side of the substrate 10, the vapor deposition material enters the openings 22 from a direction inclined in the −Y direction relative to the openings 22, as indicated by arrows 40a and 41a. As shown in Figures 17(g) to 17(i), for regions G, H, and I located on the -Y direction side of substrate 10, the deposition material enters opening 22 from a direction tilted toward the +Y direction relative to opening 22, as indicated by arrows 40c and 41c.

[0057] 17(b), 17(e), and 17(h), for regions B, E, and H located at the center in the X-axis direction of the substrate 10, the deposition material enters the opening 24 from a direction approximately parallel to the Y-axis direction, as indicated by arrow 42b. On the other hand, for regions A, D, and G located on the −X-direction side of the substrate 10, as indicated by arrow 42a, the deposition material enters the opening 24 from a direction tilted toward the +X direction with respect to the opening 24, as indicated by arrow 42a. For regions C, F, and I located on the +X-direction side of the substrate 10, as indicated by arrow 42c, the deposition material enters the opening 24 from a direction tilted toward the −X direction with respect to the opening 24, as indicated by arrow 42c.

[0058] 18(a) to 18(i) show Josephson junction elements formed in regions A to I of FIGS. 16(a) and 16(b). In addition, in FIGS. 18(a) to 18(i), the first superconducting film 14 is illustrated as seen through the insulating film 16. As shown in FIGS. 17(d) to 17(f), in regions D, E, and F, the deposition material enters the opening 22 extending in the X-axis direction from a direction substantially parallel to the X-axis direction. On the other hand, as shown in FIGS. 17(a) to 17(c), in regions A, B, and C, the deposition material enters the opening 22 extending in the X-axis direction from a direction tilted toward the -Y direction. As shown in FIGS. 17(g) to 17(i), in regions G, H, and I, the deposition material enters the opening 22 extending in the X-axis direction from a direction tilted toward the +Y direction. Therefore, as shown in Figures 18(a) to 18(i), the first superconducting films 14 formed in regions A, B, C, G, H, and I are formed with a narrower width than the first superconducting films 14 formed in regions D, E, and F.

[0059] 17(b), 17(e), and 17(h), in regions B, E, and H, the deposition material enters the openings 24 extending in the Y-axis direction from a direction substantially parallel to the Y-axis direction. On the other hand, as shown in FIGS. 17(a), 17(d), and 17(g), in regions A, D, and G, the deposition material enters the openings 24 extending in the Y-axis direction from a direction tilted toward the +X direction. As shown in FIGS. 17(c), 17(f), and 17(i), in regions C, F, and I, the deposition material enters the openings 24 extending in the Y-axis direction from a direction tilted toward the −X direction. Therefore, as shown in FIGS. 18(a) to 18(i), the second superconducting films 18 formed in regions A, C, D, F, G, and I are formed to have a narrower width than the second superconducting films 18 formed in regions B, E, and H.

[0060] 19(a) to 19(i) are plan views showing mask patterns 20 formed on the mask layer 12 in a manufacturing method of a Josephson junction device according to Example 3. FIGS. 19(a) to 19(i) show mask patterns 20 formed in regions A to I of FIGS. 16(a) and 16(b). As shown in FIGS. 19(a) to 19(i), the openings 22 formed in regions D, E, and F located at the center of the substrate 10 in the Y-axis direction are narrower than the openings 22 formed in regions A, B, C, G, H, and I located at the edges of the substrate 10 in the Y-axis direction. Thus, the width of the openings 22 located at the center of the substrate 10 in the Y-axis direction is narrower, and the width of the openings 22 located at the edges of the substrate 10 is wider. This makes it possible to prevent variations in the width of the first superconducting film 14 formed on the substrate 10, even when the angles of incidence of the evaporation material from the evaporation source 34 onto the substrate 10 from obliquely above in the −X and +X directions differ in the Y-axis direction.

[0061] Furthermore, the openings 24 formed in regions B, E, and H located at the center of the substrate 10 in the X-axis direction are narrower than the openings 24 formed in regions A, C, D, F, G, and I located at the edges of the substrate 10 in the X-axis direction. In this way, the width of the openings 24 located at the center of the substrate 10 is narrowed in the X-axis direction, and the width of the openings 24 located at the edges of the substrate 10 is widened. This makes it possible to suppress variations in the width dimension of the second superconducting film 18 formed on the substrate 10, even if the incident angle when the evaporation material from the evaporation source 34 is incident on the substrate 10 from diagonally above in the +Y direction varies in the X-axis direction.

[0062] In Examples 1 to 3, the openings 22 and 24 extend in directions that are 90° apart. However, they may extend in a direction slightly offset from 90° (for example, 80° to 100°). In Examples 1 to 3, the first and second superconducting films 14 and 18 are formed using oblique deposition. However, the first and second superconducting films 14 and 18 may be formed by methods other than oblique deposition. In Examples 1 to 3, the first and second superconducting films 14 and 18 are aluminum (Al) films. However, other films may be used. For example, the first and second superconducting films 14 and 18 may be niobium (Nb) films, niobium nitride (NbN) films, tantalum (Ta) films, tantalum nitride (TaN) films, or titanium nitride (TiN) films. In the example shown, the insulating film 16 is an oxide film of the first superconducting film 14. However, other films may be used. [Example]

[0063] Fig. 20(a) is a circuit diagram of a quantum bit 300 according to Example 4, and Fig. 20(b) is a plan view of the quantum bit 300 according to Example 4. As shown in Fig. 20(a), the quantum bit 300 according to Example 4 includes a transmon 80 including a Josephson device 100 formed by the manufacturing method of Example 1 and a capacitor 82 connected in parallel to the Josephson device 100.

[0064] 20(b), a Josephson device 100 is formed by the manufacturing method of Example 1, and a capacitor 82 is formed connected in parallel to the Josephson device 100. The capacitor 82 is formed between the electrode films 84 and 86, for example, by arranging the electrode films 84 and 86 connected to the Josephson device 100 to face each other.

[0065] Instead of the Josephson junction device 100 formed by the manufacturing method of the first embodiment, a Josephson junction device formed by the manufacturing method of the second embodiment or the third embodiment may be used.

[0066] Although the embodiments of the present invention have been described in detail above, the present invention is not limited to such specific embodiments, and various modifications and variations are possible within the scope of the gist of the present invention as defined in the claims. [Explanation of symbols]

[0067] 10 Substrate 12 Mask Layer 12a upper layer 12b Lower layer 14 First superconducting film 14a 1st membrane 14b Second membrane 16. Insulating film 18 Second superconducting film 18a 1st membrane 18b 2nd membrane 20, 20a, 20b, 20c mask patterns 22 Opening 24 Opening 26 void 28 areas 30 Josephson junction 32 Drawer Pad 34 Vapor deposition source 80 Transmon 82 Capacitor 84 Electrode membrane 86 Electrode membrane 100, 200 Josephson junction element

Claims

1. forming a mask layer on a substrate, the mask layer including a plurality of mask patterns arranged in the first direction, each mask pattern having a first opening extending in a first direction and a second opening extending in a second direction intersecting the first direction and intersecting the first opening; forming a first film on the substrate by first film deposition from obliquely above in the first direction using the mask layer as a mask, and then forming a second film on the substrate by second film deposition from obliquely above in a direction different from the first film deposition, thereby forming a first superconducting film including the first film and the second film; forming an insulating film on a surface of the first superconducting film; and forming a third film having a region overlapping with the first superconducting film via the insulating film on the substrate by a third film deposition performed obliquely from above in the second direction using the mask layer as a mask, thereby forming a second superconducting film including the third film.

2. the first film formation and the second film formation are oblique deposition; 2. The method for manufacturing a Josephson junction device according to claim 1, wherein a distance from a vapor deposition source to a center of the substrate in the first film formation is 95% or more and 105% or less of a distance from a vapor deposition source to the center of the substrate in the second film formation.

3. 3. The method for manufacturing a Josephson junction device according to claim 2, wherein an incident angle of the vapor deposition material to the center of the substrate in the first film formation is 70% or more and 130% or less of an incident angle of the vapor deposition material to the center of the substrate in the second film formation.

4. 4. The method for manufacturing a Josephson junction device according to claim 2, wherein in the step of forming the first superconducting film, the first film and the second film are formed so that the thickness of the second film at the center of the substrate is 97% or more and 103% or less of the thickness of the first film at the center of the substrate.

5. 3. The method for manufacturing a Josephson junction element according to claim 1, wherein the step of forming the second superconducting film comprises forming the third film by the third film deposition, and then forming a fourth film on the substrate by a fourth film deposition from obliquely above in a direction that is 180°±5° different from the direction of the third film deposition relative to the substrate, thereby forming the second superconducting film including the third film and the fourth film.

6. 3. The method for manufacturing a Josephson junction device according to claim 1, wherein the step of forming the mask layer includes forming the mask layer having an upper layer in which the first opening and the second opening are formed, and a lower layer located below the first opening and the second opening and in which a gap larger in plan view than the first opening and the second opening is formed.

7. 3. The method for manufacturing a Josephson junction device according to claim 1, wherein the second film is formed from a direction that is 180.degree.+-.5.degree. different from the direction of the first film when viewed from above on the surface of the substrate.

8. forming a Josephson junction device; forming a capacitor connected in parallel to the Josephson junction device; The step of forming the Josephson junction device includes: forming a mask layer on a substrate, the mask layer including a plurality of mask patterns arranged in the first direction, each mask pattern having a first opening extending in a first direction and a second opening extending in a second direction intersecting the first direction and intersecting the first opening; forming a first film on the substrate by first film deposition from obliquely above in the first direction using the mask layer as a mask, and then forming a second film on the substrate by second film deposition from obliquely above in a direction different from the first film deposition, thereby forming a first superconducting film including the first film and the second film; forming an insulating film on a surface of the first superconducting film; and forming a third film having a region overlapping the first superconducting film via the insulating film on the substrate by a third film deposition from obliquely above in the second direction using the mask layer as a mask, thereby forming a second superconducting film including the third film. How quantum bits are manufactured.

Images