Cutting device

Abstract

To provide a cutting device capable of efficiently supplying cutting water to a processing point by suppressing clinging of the cutting water to a rear side of the processing point.SOLUTION: A cutting device comprises: a holding table for holding a workpiece; a cutting unit 20 including a cutting blade 21 for cutting the workpiece held by the holding table; and a cutting water supply nozzle for supplying cutting water to the cutting blade 21. The cutting blade 21 includes a circular base 61 and a cutting blade part 62 formed at an outer edge of the circular base 61. The cutting unit 20 includes a fixed flange 71 fixed to a rotary shaft of a rotatable spindle 22, and a nut 72 for holding the cutting blade 21 between the nut and the fixed flange 71. On outer peripheries 92, 93, 91 and 94 of at least any one of the fixed flange 71, the circular base 61, and the nut 72, unevenness 99 is formed.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a cutting device that processes a workpiece with a cutting blade. [Background technology]

[0002] In a cutting device that cuts a workpiece using a cutting blade, when it is difficult to supply cutting water directly to the processing point, a cutting device is known in which cutting water is supplied to the cutting blade just before the processing point and then supplied to the processing point by the rotation of the cutting blade (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-042490 Summary of the Invention [Problem to be solved by the invention]

[0004] However, as the cutting blade rotates, the cutting water passes through the processing point, which causes problems such as an inefficient supply of cutting water to the processing point, reducing the cooling and cleaning effect of the processing point. Also, if the cutting water containing cutting chips that has passed through the processing point is carried around to above the cutting blade and drips from above the cutting blade, there is a risk that the dirt will re-adhere to the workpiece.

[0005] The present invention was made in consideration of such problems, and its purpose is to provide a cutting device that can suppress cutting water from being carried away behind the machining point and can efficiently supply cutting water to the machining point. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the cutting device of the present invention comprises a holding table for holding a workpiece, a cutting unit having a cutting blade for cutting the workpiece held on the holding table, and a cutting water supply nozzle for supplying cutting water to the cutting blade, the cutting blade including a circular base and a cutting edge portion formed on the outer edge of the circular base, the cutting unit including a fixed flange fixed to a rotation axis of a rotatable spindle and a nut for holding the cutting blade between the fixed flange and the nut, and irregularities are formed on the outer periphery of at least one of the fixed flange, the circular base and the nut. The unevenness is formed by a plurality of protrusions arranged on the outer periphery, and the plurality of protrusions protrude in the radial direction. It is characterized by the following.

[0007] In order to solve the above-mentioned problems and achieve the object, the cutting device of the present invention comprises a holding table for holding a workpiece, a cutting unit having a cutting blade for cutting the workpiece held on the holding table, and a cutting water supply nozzle for supplying cutting water to the cutting blade, the cutting blade having a cutting edge portion, and the cutting unit includes a fixed flange fixed to a rotation axis of a rotatable spindle, a pressing flange for holding the cutting blade between the fixed flange and the cutting unit, and a nut for fixing the pressing flange and the cutting blade to the fixed flange, and at least one of the fixed flange, the pressing flange and the nut has an uneven surface formed on its outer periphery. The unevenness is formed by a plurality of protrusions arranged on the outer periphery, and the plurality of protrusions protrude in the radial direction. It is characterized by the following. In these cutting devices, the unevenness may be formed by a plurality of convex portions that are continuously arranged around the entire outer periphery at equal intervals in the circumferential direction. The plurality of convex portions may have a thickness that is thicker than the cutting blade portion in the axial direction of the spindle. The plurality of convex portions may have a constant thickness that is thicker than the cutting blade portion in the axial direction of the spindle. [Effects of the Invention]

[0008] The present invention can suppress the entrainment of cutting water behind the machining point and can efficiently supply cutting water to the machining point. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a cutting device according to the first embodiment. [Figure 2] FIG. 2 is an exploded perspective view showing a main part of the cutting unit of FIG. [Figure 3]FIG. 3 is a perspective view showing a main part of the cutting water supply nozzle of FIG. [Figure 4] FIG. 4 is a front view showing a first example of a main part of the cutting unit of FIG. [Figure 5] FIG. 5 is a cross-sectional view showing a first example of a main part of the cutting unit of FIG. [Figure 6] FIG. 6 is a front view showing a second example of the main part of the cutting unit of FIG. [Figure 7] FIG. 7 is a cross-sectional view showing a second example of the main part of the cutting unit of FIG. [Figure 8] FIG. 8 is a front view showing a third example of the main part of the cutting unit of FIG. [Figure 9] FIG. 9 is a cross-sectional view showing a third example of the main part of the cutting unit of FIG. [Figure 10] FIG. 10 is an exploded perspective view showing a main part of a cutting unit of a cutting device according to the second embodiment. [Figure 11] FIG. 11 is a front view showing a fourth example of the main part of the cutting unit of FIG. [Figure 12] FIG. 12 is a cross-sectional view showing a fourth example of the main part of the cutting unit of FIG. [Figure 13] 13 is a front view showing a fifth example of the main part of the cutting unit of FIG. [Figure 14] 14 is a cross-sectional view showing a fifth example of the main part of the cutting unit of FIG. [Figure 15] FIG. 15 is a diagram illustrating the function and effect of the cutting device according to the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0011] [Embodiment 1] A cutting device 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an example of the configuration of the cutting device 1 according to the first embodiment. FIG. 2 is an exploded perspective view showing a main part of the cutting unit 20 in FIG. 1. FIG. 3 is a perspective view showing a main part of the cutting water supply nozzle 30 in FIG. 1. As shown in FIG. 1, the cutting device 1 includes a holding table 10, a cutting unit 20, the cutting water supply nozzle 30, a moving unit 40, and a control unit 50.

[0012] In the first embodiment, the workpiece 100 to be processed by the cutting device 1 is, for example, a disk-shaped semiconductor device wafer or optical device wafer made of a base material such as silicon, sapphire, silicon carbide (SiC), or gallium arsenide. As shown in FIG. 1 , the workpiece 100 has a flat surface 101 on which devices 103 are formed in areas defined by a plurality of planned division lines 102 formed in a grid pattern. In the first embodiment, the workpiece 100 has an adhesive tape 105 attached to a back surface 104 behind the front surface 101, and an annular frame 106 attached to the outer edge of the adhesive tape 105. However, the present invention is not limited to this. Furthermore, in the present invention, the workpiece 100 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0013] The holding table 10 has a disk-shaped frame body with a recess formed therein and a disk-shaped suction portion fitted into the recess. The suction portion of the holding table 10 is formed from a porous porous ceramic or the like and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the holding table 10 is a holding surface 11 on which a workpiece 100 is placed and which suction-holds the placed workpiece 100. In the first embodiment, the workpiece 100 is placed with its front surface 101 facing upward, and the holding surface 11 suction-holds the placed workpiece 100 from its back surface 104 side via adhesive tape 105. The holding surface 11 and the upper surface of the frame body of the holding table 10 are arranged on the same plane and are formed parallel to the horizontal XY plane. The holding table 10 is movable in the X-axis direction parallel to the horizontal direction by the X-axis moving unit 41 of the moving unit 40, and is rotatable around an axis parallel to the Z-axis direction, which is vertical and perpendicular to the holding surface 11, by a rotary drive source not shown.

[0014] As shown in FIGS. 2 and 3 , the cutting unit 20 includes a cutting blade 21, a spindle 22, a spindle housing 23, a mount unit 24, and a blade cover 25. The spindle 22 is rotatable about an axis parallel to the horizontal direction and a Y-axis direction perpendicular to the X-axis direction. The spindle 22 rotates about the axis in a clockwise direction (the direction of the arrow in FIG. 3 ) as viewed from the front (the −Y direction in FIG. 2 ) to the rear (the +Y direction in FIG. 2 ) by a motor (not shown) connected to the base end of the spindle 22. The outer periphery of the tip of the spindle 22 is tapered so that the outer diameter gradually decreases toward the tip (the −Y direction in FIG. 2 ). The cutting blade 21 is attached to the tip of the spindle 22 via the mount unit 24.

[0015] In the first embodiment, the cutting blade 21 is a so-called hub blade, and as shown in FIG. 2, includes a disk-shaped circular base 61 with a mounting hole 63 formed in the center and an annular cutting blade portion 62 formed on the outer edge of the circular base 61 and protruding from the outer edge of the circular base 61. The cutting blade 21 is attached to the tip of the spindle 22 via the mounting unit 24 through the mounting hole 63, and is rotated clockwise as viewed from front to rear by the spindle 22, which serves as the rotation axis, to cut the workpiece 100. The circular base 61 is made of a metal such as an aluminum alloy. The cutting blade portion 62 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness.

[0016] The spindle housing 23 exposes the tip of the spindle 22 and houses the portion of the spindle 22 other than the tip, thereby allowing the spindle 22 to be inserted therethrough. The spindle housing 23 supports the spindle 22 so as to be rotatable about its axis.

[0017] In the first embodiment, the mount unit 24 includes a fixing flange 71, a nut 72, and a screw 73, as shown in Fig. 2. The fixing flange 71 includes a cylindrical boss portion 81 extending in the front-rear direction (the Y-axis direction shown in Fig. 2), a disk-shaped flange portion 82 formed integrally with the boss portion 81 and protruding radially outward from the rear side of the boss portion 81, and a cylindrical portion 83 formed integrally with the flange portion 82 and protruding further rearward from the flange portion 82. The fixing flange 71 has the boss portion 81, the flange portion 82, and the cylindrical portion 83 whose central axes overlap with each other and are aligned along the Y-axis direction.

[0018] The fixing flange 71 has an attachment hole 84 formed on the inside, spanning the boss portion 81, the flange portion 82, and the cylindrical portion 83. The attachment hole 84 is tapered so that the inner diameter gradually decreases from the base end (the +Y direction in FIG. 2) toward the tip, and is fitted tightly around the outer periphery of the tip of the spindle 22. The fixing flange 71 is fixed to the tip of the rotation shaft of the spindle 22 by inserting a screw 73 into the attachment hole 84 and screwing it into a threaded hole 27 formed in the tip of the rotation shaft of the spindle 22 and tightening it.

[0019] The cutting blade 21 is attached to the boss portion 81 from the rear surface 67 side. Specifically, as shown in FIG. 2 , the boss portion 81 is inserted into the attachment hole 63 of the circular base 61 of the cutting blade 21 from the rear surface 67 side. The nut 72 is tightened by threading a screw groove formed on the inner periphery of the attachment hole formed in the center into a screw groove 88 formed on the tip of the outer circumferential surface 85 of the boss portion 81 to which the cutting blade 21 is attached. In this way, the nut 72 clamps the cutting blade 21 between itself and the fixing flange 71 along the axial direction, and fixes the cutting blade 21 to the tip of the spindle 22 together with the fixing flange 71.

[0020] A rear surface 86 of the nut 72 faces a front surface 66 of the attached cutting blade 21, and the surface 86 of the nut 72 supports the front surface 66 of the cutting blade 21. A front surface 87 of the flange portion 82 faces a rear surface 67 of the attached cutting blade 21, and the surface 87 of the flange portion 82 supports the rear surface 67 of the cutting blade 21. An outer peripheral surface 85 of the boss portion 81 faces an inner peripheral surface of the attachment hole 63 of the circular base 61 of the attached cutting blade 21, and the outer peripheral surface 85 of the boss portion 81 supports the inner peripheral surface of the attachment hole 63 of the circular base 61 of the cutting blade 21.

[0021] The blade cover 25 is attached to the tip side of the spindle housing 23 and covers the upper, front, and rear of the cutting blade 21 attached to the tip of the spindle 22. The blade cover 25 has multiple water channels formed inside, and as shown in Figure 3, the other ends of the upper sides of the multiple water channels are connected to a cutting water supply source (not shown). The cutting water supplied by the cutting water supply source is, for example, pure water.

[0022] 3, the cutting water supply nozzle 30 includes a nozzle 31, a nozzle 32, and a nozzle 33. The nozzles 31, 32, and 33 are each provided at one end of the lower side of each water passage formed inside the blade cover 25.

[0023] As shown in Fig. 3, the nozzle 31 is a blade cooler nozzle that supplies cutting water supplied from a cutting water supply source (not shown) through a water channel formed in the blade cover 25 to a side portion of the cutting edge portion 62 of the cutting blade 21. Here, the side portion of the cutting edge portion 62 is a portion of the side surface of the cutting edge portion 62 that passes near the processing point. The processing point refers to the area of ​​the workpiece 100 that is being cut by the rotating cutting blade 21, and is the area where the rotating cutting blade 21 and the workpiece 100 are in contact with each other.

[0024] The nozzle 32 is a shower nozzle that supplies cutting water supplied from a cutting water supply source (not shown) through a water channel formed in the blade cover 25 to the front portion of the cutting edge portion 62 of the cutting blade 21. Here, the front portion of the cutting edge portion 62 refers to the outer circumferential surface and side portion of the cutting edge portion 62 that passes in front of (before) the processing point along the rotation direction.

[0025] The nozzle 33 is a spray nozzle that supplies cutting water supplied from a cutting water supply source (not shown) through a water channel formed in the blade cover 25 onto the workpiece 100 in front of the cutting edge portion 62 of the cutting blade 21.

[0026] The spindle housing 23 is provided so as to be movable in the Y-axis direction by the Y-axis movement unit 42 of the movement unit 40 relative to the workpiece 100 held on the holding table 10, and is provided so as to be movable in the Z-axis direction by the Z-axis movement unit 43 of the movement unit 40. The spindle 22 rotatably supported by the spindle housing 23, the cutting blade 21 attached to the tip of the spindle 22, the blade cover 25 attached to the tip side of the spindle housing 23, and the nozzles 31, 32, 33 of the cutting water supply nozzle 30 attached to the blade cover 25 move together with the spindle housing 23.

[0027] The cutting device 1 sets the cutting blade 21 attached to the tip of the spindle 22 by the moving unit 40 at a predetermined position relative to the workpiece 100 held on the holding table 10, supplies cutting water by the nozzles 31, 32, and 33, and moves the cutting blade 21 relative to the workpiece 100 along the planned dividing line 102 while rotating, thereby cutting the workpiece 100 along the planned dividing line 102 with the cutting blade 21. The cutting device 1 guides the cutting water supplied by the nozzle 32 to the front part of the cutting blade 21, i.e., in front of (in front of) the processing point along the rotation direction, toward the processing point by rotating the cutting blade 21 clockwise as viewed from the front to the rear.

[0028] The control unit 50 controls the operation of each component of the cutting device 1 and causes the cutting device 1 to perform cutting processing using the cutting unit 20. In the first embodiment, the control unit 50 includes a computer system. The computer system included in the control unit 50 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as a ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 50 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 50, and outputs control signals for controlling the cutting device 1 to each component of the cutting device 1 via the input / output interface device of the cutting device 1.

[0029] Next, this specification will describe the irregularities 99, which are a main part of the cutting device 1 according to the first embodiment. In the first embodiment, the irregularities 99 (see FIGS. 4 to 9) are formed on at least one of the outer periphery 91 of the circular base 61, the outer peripheries 92, 93 of the flange portion 82 and the cylindrical portion 83 of the fixing flange 71, and the outer periphery 94 of the nut 72. In the first embodiment, as shown in FIGS. 4, 6, and 8, the irregularities 99 are formed by a plurality of convex portions that are continuously arranged at equal intervals in the circumferential direction around the entire periphery on which the irregularities 99 are formed. The plurality of convex portions that make up the irregularities 99 protrude in the radial direction and are formed to have a constant thickness that is thicker than the cutting edge portion 62 of the cutting blade 21 in the axial direction of the spindle 22. The radial length of the convex portions constituting the irregularities 99 and the axial thickness of the spindle 22 are formed to be long and thick enough to rotate and move with the rotation of the spindle 22, thereby disrupting the circumferential air flow that is clockwise as viewed from front to rear and that is created by the rotating cutting blade 21 and mount unit 24. Therefore, the irregularities 99 rotate and move with the rotation of the spindle 22, thereby disrupting the circumferential air flow that is created by the rotating cutting blade 21 and mount unit 24, thereby preventing cutting water supplied by the nozzle 32 in front of the processing point from rotating with the rotation of the cutting blade 21.

[0030] The convex portions constituting the unevenness 99 may be U-shaped, i.e., rectangular, with the radially outer side formed along the circumferential direction, or may be pointed radially outward. The unevenness 99 may be, for example, a gear shape formed by a plurality of rectangular convex portions arranged in the circumferential direction at intervals approximately equal to the circumferential width of the convex portions, or may be a sawtooth shape formed by a plurality of pointed convex portions arranged in the circumferential direction at a constant pitch. Furthermore, the convex portions may be formed continuously at a predetermined interval around the entire circumference, or may not be formed around the entire circumference but may be formed in one part or in multiple places.

[0031] Next, this specification will describe first, second, and third examples, which are specific aspects of the irregularities 99. FIG. 4 is a front view showing a first example of the main part of the cutting unit 20 of FIG. 1. FIG. 5 is a cross-sectional view showing the first example of the main part of the cutting unit 20 of FIG. 1. FIG. 6 is a front view showing a second example of the main part of the cutting unit 20 of FIG. 1. FIG. 7 is a cross-sectional view showing the second example of the main part of the cutting unit 20 of FIG. 1. FIG. 8 is a front view showing a third example of the main part of the cutting unit 20 of FIG. 1. FIG. 9 is a cross-sectional view showing the third example of the main part of the cutting unit 20 of FIG. 1.

[0032] 4 and 5, in a first example of the cutting device 1 according to the first embodiment, asperities 99 are formed on the outer periphery 92 of the flange portion 82 of the fixing flange 71 and the outer periphery 94 of the nut 72. In the first example, the outer periphery 92 of the flange portion 82 is formed in a two-step stepped shape, which results in a shape that is symmetrical left and right in FIG. 5 (-Y direction and +Y direction, front and back shown in FIG. 5) across the circular base 61, the nut 72, and the cutting blade portion 62 of the cutting blade 21, and the asperities 99 are formed symmetrically front and back across the cutting blade portion 62 of the cutting blade 21. In the first example, as shown in FIG. 4, the outer peripheries 92, 94 on which the asperities 99 are formed have the same diameter, and the asperities 99 formed on the outer peripheries 92, 94 are arranged so as to overlap in the axial direction (front and back direction) of the spindle 22. 5, in the first example, the irregularities 99 formed on the outer periphery 94, the cutting edge portion 62 of the cutting blade 21, and the irregularities 99 formed on the outer periphery 92 are arranged at equal intervals in the front-to-rear direction. Therefore, in the first example, when the spindle 22 rotates, the cutting blade 21 and the mount unit 24, which rotate together with the spindle 22, are less likely to become eccentric, making it easier to maintain balance.

[0033] 6 and 7, a second example of the cutting device 1 according to the first embodiment is obtained by changing the position of the irregularities 99 formed on the rear side of the cutting edge portion 62 of the cutting blade 21, i.e., the irregularities 99 formed on the outer periphery 92 of the flange portion 82 of the fixed flange 71, in the first example so that they are closer to the cutting edge portion 62 of the cutting blade 21. In the second example, the irregularities 99 on the rear side of the cutting edge portion 62 are closer to the cutting edge portion 62 of the cutting blade 21 than in the first example, and therefore the effect of the irregularities 99 in suppressing the cutting water from being carried around as the cutting blade 21 rotates is enhanced more than in the first example.

[0034] In the second example, as shown in FIG. 6, the diameters of the outer peripheries 92, 94 on which the irregularities 99 are formed are different, and the irregularities 99 formed on the outer peripheries 92, 94 are arranged so as not to overlap in the axial direction (front-rear direction) of the spindle 22. Also, in the second example, as shown in FIG. 7, the irregularities 99 formed on the outer periphery 94, the cutting edge portion 62 of the cutting blade 21, and the irregularities 99 formed on the outer periphery 92 are formed with different diameters. Thus, in the second example, as shown in FIGS. 6 and 7, the irregularities 99 formed on the outer periphery 92 of the flange portion 82 of the fixing flange 71 and the irregularities 99 formed on the outer periphery 94 of the nut 72 are formed asymmetrically in the front and rear with respect to the cutting edge portion 62 of the cutting blade 21. In such a second example, eccentricity of the cutting blade 21 and the mount unit 24 that rotate together with the spindle 22 can be prevented and balance can be achieved by, for example, cutting or drilling portions of the circular base 61 of the cutting blade 21 and the mount unit 24 where the irregularities 99 are not formed.

[0035] 8 and 9 , in the third example of the cutting device 1 according to the first embodiment, the position of the asperities 99 formed on the outer periphery 94 of the nut 72 forward of the cutting blade portion 62 of the cutting blade 21 in the second example is changed so that they are formed on the outer periphery 91 of the circular base 61 of the cutting blade 21. In the third example, the asperities 99 forward of the cutting blade portion 62 are closer to the cutting blade portion 62 of the cutting blade 21 than in the first and second examples. This enhances the effect of the asperities 99 in suppressing the cutting water from being carried along with the rotation of the cutting blade 21 compared to the first and second examples. In the third example, as in the second example, the two asperities 99 are formed asymmetrically on the front and rear sides of the cutting blade portion 62 of the cutting blade 21. By, for example, cutting or drilling portions of the circular base 61 of the cutting blade 21 or the mount unit 24 where the asperities 99 are not formed, eccentricity of the cutting blade 21 and the mount unit 24 that rotate together with the spindle 22 can be prevented and balance can be achieved.

[0036] In all of the first to third examples, the unevenness 99 is formed on both the front and rear sides of the cutting blade 21, but the present invention is not limited to this, and the unevenness 99 may be formed on only one side, either the front or rear, of the cutting blade 62 of the cutting blade 21. Also, in all of the first to third examples, the unevenness 99 is formed in one location on both the front and rear sides of the cutting blade 21, but the present invention is not limited to this, and the unevenness 99 may be formed in two or more locations on either the front or rear side of the cutting blade 62 of the cutting blade 21.

[0037] In the cutting device 1 according to the first embodiment having the above-described configuration, the unevenness 99 is formed on at least one of the outer periphery 91 of the circular base 61, the outer peripheries 92, 93 of the flange portion 82 and the cylindrical portion 83 of the fixing flange 71, and the outer periphery 94 of the nut 72. Therefore, in the cutting device 1 according to the first embodiment, the unevenness 99 rotates and moves with the rotation of the spindle 22, thereby disturbing the circumferential air flow created by the rotating cutting blade 21 and the mount unit 24, thereby preventing cutting water supplied in front of the processing point by the nozzle 32 from being carried around behind the processing point. This prevents cutting water that has passed the processing point from dripping from above the cutting blade 21, which can cause dirt to re-adhere on the workpiece 100. In addition, the reduction in cutting water that passes through the processing point and is carried around behind the processing point reduces the effect of allowing cutting water supplied by the nozzle 32 to be supplied to the processing point sufficiently and efficiently.

[0038] [Embodiment 2] A cutting device 1-2 according to a second embodiment of the present invention will be described with reference to the drawings. FIG. 10 is an exploded perspective view showing the main parts of a cutting unit 20-2 of the cutting device 1-2 according to the second embodiment. FIG. 11 is a front view showing a fourth example of the main parts of the cutting unit 20-2 of FIG. 10. FIG. 12 is a cross-sectional view showing the fourth example of the main parts of the cutting unit 20-2 of FIG. 10. FIG. 13 is a front view showing a fifth example of the main parts of the cutting unit 20-2 of FIG. 10. FIG. 14 is a cross-sectional view showing the fifth example of the main parts of the cutting unit 20-2 of FIG. 10. In FIGS. 10 to 14, the same parts as those of the first embodiment are designated by the same reference numerals, and description thereof will be omitted.

[0039] A cutting device 1-2 according to the second embodiment is the same as that of the first embodiment, except that the cutting unit 20 is replaced with a cutting unit 20-2. As shown in Fig. 10, the cutting unit 20-2 is the same as that of the first embodiment, except that the cutting blade 21 in the cutting unit 20 is replaced with a cutting blade 21-2 that has an annular cutting edge portion 62 and is a so-called hubless blade that does not have a circular base 61, and the mount unit 24 is further modified to include a retaining flange 74. In the second embodiment, the shapes of the boss portion 81, flange portion 82, and cylindrical portion 83 of the fixing flange 71 and the nut 72 are changed to match the shape of the cutting blade 21-2, but the functions thereof are the same as those of the first embodiment.

[0040] In the second embodiment, as shown in FIG. 10 , the boss portion 81 is inserted from the rear surface 67 into the mounting hole 63 formed in the center of the cutting edge portion 62 of the cutting blade 21-2. In the second embodiment, the boss portion 81 is further inserted from the rear surface 89 into the mounting hole 76 formed in the center of the presser flange 74. In the second embodiment, the nut 72 is tightened by threading a screw groove formed on the inner periphery of the central mounting hole into a screw groove 88 formed on the tip of the outer circumferential surface 85 of the boss portion 81 to which the cutting blade 21-2 and the presser flange 74 are attached. In this way, in the second embodiment, the nut 72 fixes the presser flange 74 and the cutting blade 21 to the fixing flange 71, and sandwiches the cutting blade 21-2 between the fixing flange 71 and the presser flange 74 along the axial direction, thereby fixing the cutting blade 21-2 together with the fixing flange 71 and the presser flange 74 to the tip of the spindle 22.

[0041] In the second embodiment, the rear surface 89 of the pressing flange 74 faces the front surface 66 of the attached cutting blade 21-2, and the pressing flange 74 supports the front surface 66 of the cutting blade 21-2 with the surface 89. Also, in the second embodiment, the outer peripheral surface 85 of the boss portion 81 faces the inner peripheral surface of the attachment hole 63 of the cutting blade portion 62 of the attached cutting blade 21-2, and the boss portion 81 supports the inner peripheral surface of the attachment hole 63 of the cutting blade portion 62 of the cutting blade 21-2 with the outer peripheral surface 85. Also, as in the first embodiment, the flange portion 82 supports the rear surface 67 of the cutting blade 21-2 with the surface 87.

[0042] In embodiment 2, irregularities 99 (see Figures 11 to 14) of the same shape and properties as those in embodiment 1 are formed on at least one of the outer peripheries 92, 93 of the flange portion 82 and cylindrical portion 83 of the fixing flange 71, the outer periphery 95 of the pressing flange 74, and the outer periphery 94 of the nut 72.

[0043] Next, this specification describes fourth and fifth examples, which are specific aspects of the irregularities 99 that are a key part of the cutting device 1-2 according to the second embodiment. In the fourth example of the cutting device 1-2 according to the second embodiment, as shown in FIGS. 11 and 12 , the irregularities 99 are formed on the outer periphery 92 of the flange portion 82 of the fixing flange 71 and on the outer periphery 94 of the nut 72. In the fourth example, the shape of the flange portion 82 of the fixing flange 71 is formed to be symmetrical in the left-right direction with the shapes of the pressing flange 74 and the nut 72 in FIG. 12 , sandwiching the cutting blade portion 62. This makes it possible to form the irregularities 99 symmetrical in the front-to-back direction with the cutting blade portion 62 of the cutting blade 21 sandwiched between them, as in the first example. Therefore, when the spindle 22 rotates, it is easy to balance the cutting blade 21 and the mount unit 24, which rotate together with the spindle 22.

[0044] As shown in Figures 13 and 14, the fifth example of the cutting device 1-2 according to embodiment 2 is such that the position of the irregularities 99 formed on the outer periphery 92 of the flange portion 82 of the fixed flange 71 located rearward of the cutting edge portion 62 of the cutting blade 21 in the fourth example has been changed so that they are formed on the outer periphery 95 of the pressing flange 74.

[0045] In the fifth example, the asperities 99 are closer to the cutting edge portion 62 of the cutting blade 21 than in the fourth example, and therefore the effect of the asperities 99 in suppressing the cutting water from being carried away by the rotation of the cutting blade 21 is enhanced more than in the fourth example. Also, in the fifth example, as in the fourth example, the shape of the fixing flange 71 is formed to be the same as the shape of the pressing flange 74, which makes it possible to form the asperities 99 symmetrically on both sides of the cutting edge portion 62 of the cutting blade 21. Therefore, when the spindle 22 rotates, it is easier to balance the cutting blade 21 and the mount unit 24, which rotate together with the spindle 22.

[0046] The cutting device 1-2 according to the second embodiment having the above-described configuration is the cutting device 1 of the first embodiment, except that the cutting blade 21 is changed to a cutting blade 21 that does not have the circular base 61, the mount unit 24 is changed to further include a pressing flange 74, and the outer periphery 91 of the circular base 61, which is one of the candidates for the position where the irregularities 99 are formed, is changed to the outer periphery 95 of the pressing flange 74. Therefore, the cutting device 1-2 according to the second embodiment has the same effects as those of the first embodiment.

[0047] Next, the inventor of the present invention confirmed the operational effects of the cutting device 1 according to embodiment 1. Fig. 15 is a diagram for explaining the operational effects of the cutting device 1 according to embodiment 1. Fig. 15 summarizes the results obtained when the operational effects were confirmed.

[0048] The right column of "Comparative Example" in Fig. 15 shows a schematic diagram of the state of cutting water when a conventional cutting device, in which the asperities 99 are not formed in the cutting device 1 according to embodiment 1, rotates a spindle equipped with a cutting blade while supplying cutting water. The right column of "Example" in Fig. 15 shows a schematic diagram of the state of cutting water when a first example of the cutting device 1 according to embodiment 1 rotates a spindle 22 equipped with a cutting blade 21 while supplying cutting water.

[0049] As shown in FIG. 15 , in a conventional cutting device without irregularities, a large amount of cutting water was swept up above the cutting blade as the cutting blade rotated, resulting in a reduced flow rate of cutting water remaining at the processing point to clean and cool the cutting blade and the workpiece at the processing point. On the other hand, in the first example of the cutting device 1 according to embodiment 1, in which irregularities 99 were formed, the amount of cutting water swept up as the cutting blade 21 rotated was significantly reduced compared to the conventional device. Therefore, more of the cutting water was supplied to the processing point, resulting in a higher flow rate of cutting water for cleaning and cooling the cutting blade 21 and the workpiece 100 at the processing point. It was confirmed that the cutting water was discharged along the top surface (surface 101) of the workpiece 100. Thus, in the example shown in FIG. 15 , by forming irregularities 99 on the outer periphery 92 of the flange portion 82 of the fixing flange 71 and the outer periphery 94 of the nut 72, it was revealed that the cutting water supplied by the nozzle 32 ahead of the processing point was prevented from swept up behind the processing point, thereby enabling efficient supply of cutting water supplied by the nozzle 32 to the processing point.

[0050] Furthermore, Figure 15 shows the formation of the unevenness 99 according to the first example, but even when other unevenness 99 is formed, such as the second or third example, the results obtained show a tendency similar to that of the example shown in Figure 15, in that the cutting water supplied by the nozzle 32 in front of the processing point is prevented from being carried around behind the processing point, and the cutting water supplied by the nozzle 32 can be efficiently supplied to the processing point.

[0051] Furthermore, for the cutting device 1-2 according to embodiment 2, a comparison was made in the same manner as in embodiment 1 between a conventional cutting device in which no unevenness was formed and fourth and fifth examples of the cutting device 1-2 according to embodiment 2 in which unevenness 99 was formed. As in embodiment 1, the results showed that by forming unevenness 99, the cutting water supplied by the nozzle 32 in front of the processing point is prevented from being carried around behind the processing point, and the cutting water supplied by the nozzle 32 can be efficiently supplied to the processing point.

[0052] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0053] 1,1-2 Cutting equipment 10 Holding table 20,20-2 Cutting unit 21,21-2 Cutting blade 22 Spindle 24 Mounting Unit 30 Cutting water supply nozzle 31, 32, 33 Nozzle 61 Circular base 62 Cutting blade 71 Fixed flange 72 Nut 74 Pressing flange 91, 92, 93, 94, 95 Outer circumference 99 Unevenness 100 Workpiece

Claims

1. a holding table for holding the workpiece; a cutting unit having a cutting blade for cutting the workpiece held on the holding table; a cutting water supply nozzle for supplying cutting water to the cutting blade; The cutting blade includes a circular base and a cutting edge portion formed on an outer edge of the circular base, The cutting unit comprises: a fixing flange fixed to a rotation shaft of a rotatable spindle; and a nut that holds the cutting blade between the fixing flange and the nut, The fixing flange, the circular base, and the nut have an outer periphery formed with irregularities, the irregularities are formed by a plurality of protrusions arranged on the outer periphery, The cutting device is characterized in that the plurality of protrusions protrude in a radial direction.

2. a holding table for holding the workpiece; a cutting unit having a cutting blade for cutting the workpiece held on the holding table; a cutting water supply nozzle for supplying cutting water to the cutting blade; The cutting blade has a cutting edge portion, The cutting unit includes a fixed flange fixed to a rotation shaft of a rotatable spindle, a pressing flange for sandwiching the cutting blade between the fixed flange and the pressing flange, and a nut for fixing the pressing flange and the cutting blade to the fixed flange, The fixing flange, the pressing flange, and the nut have an outer periphery formed with irregularities, the irregularities are formed by a plurality of protrusions arranged on the outer periphery, The cutting device is characterized in that the plurality of protrusions protrude in a radial direction.

3. A cutting device as described in claim 1 or claim 2, wherein the unevenness is formed by a plurality of convex portions arranged continuously and at equal intervals in the circumferential direction around the entire circumference of the outer periphery.

4. A cutting device as described in claim 1, claim 2 or claim 3, wherein the plurality of convex portions have a thickness in the axial direction of the spindle that is thicker than the cutting blade portion.

5. A cutting device as described in Claim 4, wherein the multiple convex portions have a constant thickness in the axial direction of the spindle that is thicker than the cutting blade portion.

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