Load port adapter

Abstract

A load port adapter 1 can be fixed on a mount base for a load port 100. The load port adapter 1 comprises a holding unit 10 in which a cassette 200 capable of storing a plurality of circuit substrates can be held. The holding unit 10 can be fixed on the mount base of the load port 100. The holding unit 10 includes a position adjustment mechanism 15 for positioning the cassette 200 in a reference position X. The reference position X provides a positional reference on the load port adapter 1 side when removing a circuit substrate from within the cassette 200 fixed on the load port adapter 1.

Description

[Technical Field]

[0001] The present invention relates to a load port adapter. [Background technology]

[0002] Load ports are known as devices for opening and closing lids of substrate storage containers that store substrates. For example, as disclosed in Japanese Patent Application Publication No. 2004-2009-14999, a known load port includes a stage on which a FOUP serving as a substrate storage container can be placed, clamping means for fixing the bottom surface of the FOUP, suction means for suction-holding the lid of the FOUP, and a door for opening and closing the lid held by the suction means.

[0003] The load port of Japanese Patent Publication No. 1 can also place an open cassette in addition to the FOUP. The load port of Japanese Patent Publication No. 1 also determines whether the FOUP or the open cassette has been placed on it based on whether the suction means performs the suction operation and whether the suction operation has been completed. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent No. 5211808 Summary of the Invention [Problem to be solved by the invention]

[0005] The configuration and dimensions of the load port disclosed in the above-mentioned Patent Document 1 are determined by standards. The configuration and dimensions of the FOUP to be placed on the load port are also determined by standards. Therefore, unless the storage container has the same configuration and dimensions as the FOUP, it cannot be stably and accurately positioned on the load port.

[0006] In response to this, there is a demand for storage containers having different configurations and dimensions from those of FOUPs to be placed on the load port in a stable and positioned state.

[0007] An object of the present invention is to provide a load port adapter that, when attached to a load port, enables a storage container having a configuration and dimensions different from those of a FOUP to be placed on the load port in a stable and positioned state. [Means for solving the problem]

[0008] A load port adapter according to one embodiment of the present invention is a load port adapter that can be secured to a mounting table of a load port. This load port adapter has a holder that can hold a cassette that can accommodate multiple circuit boards. The holder has a position adjustment mechanism for positioning the cassette at a reference position and can be secured to the mounting table of the load port. [Effects of the Invention]

[0009] A load port adapter according to one embodiment of the present invention is attached to a load port, and thereby allows a storage container having a configuration and dimensions different from those of a FOUP to be placed on the load port in a stable and positioned state. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing a schematic configuration of a load port according to an embodiment. [Figure 2] FIG. 2 is a perspective view showing the load port adapter attached to the load port. [Figure 3] FIG. 3 is a perspective view showing a schematic configuration of the load port adapter. [Figure 4] FIG. 4 is a perspective view showing the load port adapter with the cover removed. [Figure 5] FIG. 5 is a perspective view showing a schematic configuration of the cassette. [Figure 6] FIG. 6 is a bottom view of the cassette. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The same or corresponding parts in the drawings are designated by the same reference numerals, and their description will not be repeated. Furthermore, the dimensions of the components in each drawing do not faithfully represent the actual dimensions of the components, the dimensional ratios of the components, etc.

[0012] In the following description, the vertical direction in the state where the load port 100 is installed will be referred to as the "up-down direction."

[0013] 1 is a perspective view showing the schematic configuration of a load port 100 to which a load port adapter according to an embodiment of the present invention is attached. The load port 100 is a platform on which a cassette containing a resin circuit board, which is an object to be inspected, is placed when the circuit board is supplied to an inspection device (not shown).

[0014] The cassette 200 is a storage container having a different configuration and dimensions from a FOUP, the configuration and dimensions of which are determined by a standard.

[0015] The load port 100 has a supply unit 110 and a support unit 120. The supply unit 110 is a unit that supplies circuit boards to the inspection device. The support unit 120 supports a cassette containing the circuit boards when the circuit boards are supplied from the supply unit 110 to the inspection device. The supply unit 110 is supported by the support unit 120.

[0016] The support unit 120 has a support unit main body 121, multiple wheels 122, a support base 123, and a mounting base 124. The support unit main body 121 is a columnar member extending in the vertical direction. The support unit main body 121 supports the support base 123 and the mounting base 124. Multiple wheels 122 are attached to the lower end of the support unit main body 121. The support base 123 is fixed to the upper end of the support unit main body 121. The mounting base 124 is fixed on top of the support base 123.

[0017] 2 is a perspective view showing a state in which a load port adapter 1, which will be described later, is fixed onto the mounting table 124. The load port adapter 1 allows a cassette 200 to be fixed to the mounting table 124. In other words, the cassette 200 is fixed onto the mounting table 124 of the load port 100 by the load port adapter 1. The detailed configuration of the cassette 200 will be described later. For the sake of explanation, FIG. 2 shows the load port adapter 1 with the cover 60 removed.

[0018] 1, the mounting table 124 has multiple detection sensors 124a. The multiple detection sensors 124a are sensors for detecting whether a FOUP is placed on the mounting table 124. When a cassette 200 is fixed onto the mounting table 124 via a load port adapter 1 as in this embodiment, only one of the multiple detection sensors 124a is used as a cassette detection sensor for detecting whether the cassette 200 is positioned on the load port adapter 1.

[0019] Each of the plurality of detection sensors 124a is a displacement detection sensor that outputs a detection signal when a force is applied from above and a detection portion is displaced downward. In this embodiment, the plurality of detection sensors 124a is three detection sensors. When viewed from above the mounting table 124, the three detection sensors 124a are arranged in a triangular shape.

[0020] As will be described in more detail below, as shown in FIG. 2, the load port adapter 1 has an advance / retract pin 11b that comes into contact with one detection sensor 124b of the multiple detection sensors 124a. The one detection sensor 124b functions as the cassette detection sensor together with the advance / retract pin 11b. The remaining detection sensors are positioned inside the load port adapter 1 and are not exposed to the outside of the load port adapter 1. The load port adapter 1 may have two or more advance / retract pins 11b that come into contact with the detection sensors 124b.

[0021] 1, the supply unit 110 is a plate-shaped member and has a supply port 111. That is, the supply unit 110 is frame-shaped. The supply unit 110 also has a lid 112 that opens and closes the supply port 111. The lid 112 is movable relative to the supply port 111.

[0022] When the detection sensor 124b of the mounting table 124 detects that the cassette 200 is placed on the mounting table 124, the lid 112 moves from a position where it closes the supply port 111 to a position where it opens the supply port 111. In other words, the lid 112 opens the supply port 111 of the supply unit 110 when the circuit board stored in the cassette 200 is to be supplied to the inspection device.

[0023] 3 and 4 are perspective views showing the schematic configuration of the load port adapter 1. Fig. 4 is a perspective view showing the load port adapter 1 with the cover 60 removed. The load port adapter 1 has a holding portion 10 and a frame portion 50.

[0024] The holder 10 is flat and holds the cassette 200. The frame 50 is a frame-shaped member extending in a direction perpendicular to the holder 10. The frame 50 covers a part of the supply unit 110. The frame 50 has an opening 51 that is connected to the supply port 111 while covering the supply unit 110.

[0025] 2, when the cassette 200 is fixed to the load port adapter 1 fixed to the load port 100, the frame 50 covers the gap between the supply port 111 of the load port 100, which is connected to an opening 200b (described later) of the cassette 200, and the outer periphery of the opening 200b side of the cassette 200. This prevents an operator from inserting their hand or fingers into the gap between the supply port 111 of the load port 100 and the cassette 200. This improves safety when the cassette 200 is used on the load port 100.

[0026] 3 and 4, the holder 10 has a holder main body 11, a plurality of cassette positioning portions 12, and a plurality of cassette fixing portions 20, 30, and 40. The position of the cassette 200 relative to the load port adapter 1 is adjusted by the plurality of cassette positioning portions 12 and the plurality of cassette fixing portions 20, 30, and 40. In other words, the plurality of cassette positioning portions 12 and the plurality of cassette fixing portions 20, 30, and 40 constitute a position adjustment mechanism 15 of the present invention.

[0027] The holder body 11 is a flat plate-shaped member. A plurality of cassette positioning portions 12 are fixed to the holder body 11. The holder body 11 also has an accommodating recess 11a that accommodates the plurality of cassette fixing portions 20, 30, 40. The accommodating recess 11a is covered by a cover 60.

[0028] The holder body 11 has an advance / retract pin 11b that comes into contact with the detection sensor 124b of the load port 100 when the load port adapter 1 is fixed on the mounting table 124 of the load port 100. The lower part of the advance / retract pin 11b is located in a through-hole (not shown) in the holder body 11. When the load port adapter 1 is fixed on the mounting table 124 of the load port 100, the tip of the detection sensor 124b of the load port 100 is located in the through-hole. The advance / retract pin 11b, with its lower part located in the through-hole, can advance / retract in the thickness direction relative to the holder body 11.

[0029] When the load port adapter 1 is set on the mounting table 124 of the load port 100, the detection sensor 124b of the load port 100 pushes the advance / retract pins 11b upward. When the cassette 200 is set on the load port adapter 1, the cassette 200 pushes the detection sensor 124b downward via the advance / retract pins 11b. This makes it possible to detect that the cassette 200 has been seated.

[0030] The plurality of cassette positioning units 12 position the bottom of the cassette 200 (described later) relative to the holder main body 11. That is, the plurality of cassette positioning units 12 each have an L-shaped protrusion 12a when the holder main body 11 is viewed from above. The protrusions 12a of the plurality of cassette positioning units 12 come into contact with the outer corners of the bottom of the cassette 200, thereby positioning the cassette 200 relative to the holder main body 11.

[0031] In this embodiment, the plurality of cassette positioning parts 12 are four cassette positioning parts. The four cassette positioning parts 12 position the bottom of a cassette 200 with respect to the holder main body 11, which will be described later.

[0032] The plurality of cassette fixing parts include a first cassette fixing part 20, a second cassette fixing part 30, and a third cassette fixing part 40.

[0033] The first cassette fixing part 20 presses the cassette 200 placed on the load port adapter 1 against the reference position X. The reference position X is the position of one of the two corners located on the frame part 50 side of the holder main body 11. The reference position X is the reference position on the load port adapter 1 side when removing a circuit board from the cassette 200 fixed on the load port adapter 1.

[0034] As will be described in more detail later, the reference position X is the position where, when the cassette 200 is fixed to the load port adapter 1, the corner of the cassette 200 located on the opening side is positioned on the load port adapter 1.

[0035] The first cassette fixing part 20 pushes the cassette 200 obliquely from the center of the holder main body 11 towards the reference position X when the load port adapter 1 is viewed from above.

[0036] The first cassette fixing part 20 has a contact part 21 and a drive part 22. The contact part 21 comes into contact with a protrusion (not shown) located on the bottom of the cassette 200. The drive part 22 moves the contact part 21 back and forth in one direction as shown by the solid arrows in Figures 2 and 4. That is, when viewing the load port adapter 1 from above, the drive part 22 moves the contact part 21 from the center of the holder main body 11 toward the reference position X.

[0037] More specifically, the driving unit 22 has an actuator 23 and a connecting shaft 24. The tip of the connecting shaft 24 is connected to the contact unit 21. The actuator 23 is, for example, a cylinder mechanism that moves the connecting shaft 24 in the axial direction.

[0038] The second cassette fixing part 30 presses the cassette 200 placed on the load port adapter 1 against the frame part 50. Like the first cassette fixing part 20, the second cassette fixing part 30 also has a contact part 31 and a drive part 32.

[0039] The contact portion 31 comes into contact with a protrusion (not shown) located on the bottom of the cassette 200. As indicated by the solid arrows in Figures 2 and 4, the drive unit 32 reciprocates the contact portion 31 in a direction different from the direction in which the contact portion 21 of the first cassette fixing portion 20 moves. In other words, when viewing the load port adapter 1 from above, the drive unit 32 moves the contact portion 31 from the center of the holder main body 11 toward the frame portion 50.

[0040] More specifically, the driving unit 32 has an actuator 33 and a connecting shaft 34. The tip of the connecting shaft 34 is connected to the contact unit 31. The actuator 33 is, for example, a cylinder mechanism that moves the connecting shaft 34 in the axial direction.

[0041] The third cassette fixing part 40, together with the first cassette fixing part 20 and the second cassette fixing part 30, fixes the cassette 200 placed on the load port adapter 1 to the load port adapter 1. When the load port adapter 1 is viewed from above, the third cassette fixing part 40 pushes the cassette 200 in the opposite direction to the second cassette fixing part 30. In other words, the third cassette fixing part 40 pushes the cassette 200 in a direction different from the direction toward the reference position X.

[0042] Like the first cassette fixing part 20 and the second cassette fixing part 30, the third cassette fixing part 40 also has a contact part 41 and a drive part 42. The contact part 41 comes into contact with a protrusion (not shown) located on the bottom of the cassette 200. As indicated by the solid arrows in FIGS. 2 and 4, the drive part 42 moves the contact part 41 back and forth in a direction different from the direction in which the contact part 21 of the first cassette fixing part 20 and the contact part 31 of the second cassette fixing part 30 move. In other words, when viewing the load port adapter 1 from above, the drive part 42 moves the contact part 41 from the center of the holder main body 11 toward the opposite side from the frame part 50.

[0043] More specifically, the driving unit 42 has an actuator 43 and a connecting shaft 44. The tip of the connecting shaft 44 is connected to the contact unit 41. The actuator 43 is, for example, a cylinder mechanism that moves the connecting shaft 44 in the axial direction.

[0044] The force with which the first cassette fixing part 20 and the second cassette fixing part 20 push the cassette 200 towards the reference position X is greater than the force with which the third cassette fixing part 40 pushes the cassette 200 in a direction different from the reference position X.

[0045] The cassette fixing parts 20, 30, 40 of the load port adapter 1 are driven and controlled by a control part (not shown). A signal output from the detection sensor 124b is input to the control part. Based on the signal, the control part may control the driving of the cassette fixing parts 20, 30, 40, or may control the opening and closing of the lid 112 of the load port 100.

[0046] (Cassette) FIG. 5 is a perspective view showing the schematic configuration of the cassette 200. The cassette 200 is a cubic box-shaped member. That is, the cassette 200 has a space 200a surrounded by a plurality of flat walls 201 to 205. The cassette 200 can accommodate a plurality of circuit boards arranged in the thickness direction. The cassette 200 has an opening 200b on one side. The opening 200b is located on the opening 51 side of the frame 50 when the cassette 200 is fixed on the load port adapter 1.

[0047] Cassette 200 has a moving wall 210 that moves laterally within an internal space 200a while being parallel to a side wall 201 that constitutes cassette 200. The direction of movement of moving wall 210 is indicated by an outline arrow in FIG.

[0048] The movable wall 210 and the side wall 201 opposite to the movable wall 210 each have a plurality of slits 220 on their opposing surfaces. The plurality of slits 220 extend from the opening 200b side toward the wall 203 on the opposite side of the opening 200b. This allows the plurality of slits 220 of the movable wall 210 and the plurality of slits 220 of the side wall 201 opposite to the movable wall 210 to hold a plurality of circuit boards lined up in the thickness direction.

[0049] In a cassette 200 having such a configuration, by moving the movable wall 210 laterally relative to the side wall 201 opposite the movable wall 210, even if the size of the circuit board changes, the circuit board can be held aligned in the thickness direction by the multiple slits 220 in the movable wall 210 and the multiple slits 220 in the side wall 201 opposite the movable wall 210.

[0050] With the cassette 200 fixed on the load port adapter 1, of the walls 201 to 205 that form the opening 200b of the cassette 200, the side wall 201 having the multiple slits 220 is positioned at the reference position X. Of the side wall 201 having the multiple slits 220, the portion that forms the opening 200b is the reference position Y on the cassette 200 side. With the cassette 200 fixed on the load port adapter 1 as shown in FIG. 2, this reference position Y overlaps with the reference position X on the load port adapter 1 side.

[0051] The reference positions X and Y are used as the origin of the transfer position when a transfer device such as a robot arm transfers a circuit board from a cassette 200 fixed on the load port adapter 1 to an inspection device (not shown).

[0052] Fig. 6 is a bottom view of the cassette 200. In Fig. 6, the contact positions of the contact portion 21 of the first cassette fixing portion 20, the contact portion 31 of the second cassette fixing portion 30, and the contact portion 41 of the third cassette fixing portion 40 with respect to the cassette 200 are indicated by dashed dotted lines.

[0053] Cassette 200 has plate-shaped mounting portions 205a to 205d on the four sides of wall 205 located on the bottom surface, respectively, which are fixed to wall 203 at a distance in the thickness direction. Cassette 200 also has diagonal braces 205e to 205h on the four corners of wall 205, which connect mounting portions 205a located on adjacent sides.

[0054] When fixing the cassette 200 on the load port adapter 1, the contact portion 21 of the first cassette fixing portion 20, the contact portion 31 of the second cassette fixing portion 30, and the contact portion 41 of the third cassette fixing portion 40 each contact the cassette 200 at the following positions.

[0055] The contact portion 21 of the first cassette fixing portion 20 is inserted between the diagonal brace portion 205f located on the opening 200b side of the cassette 200 and the wall 205. As a result, the first cassette fixing portion 20 comes into contact with the diagonal brace portion 205f of the cassette 200, and fixes the cassette 200.

[0056] The contact portion 31 of the second cassette fixing portion 30 is inserted between the mounting portion 205a located on the opening 200b side of the cassette 200 and the wall 205. As a result, the second cassette fixing portion 30 comes into contact with the mounting portion 205a of the cassette 200 to fix the cassette 200.

[0057] The contact portion 41 of the third cassette fixing portion 40 is inserted between the wall 205 and the mounting portion 205c located on the opposite side of the opening 200b of the cassette 200. As a result, the third cassette fixing portion 40 comes into contact with the mounting portion 205c of the cassette 200 and fixes the cassette 200.

[0058] As described above, the load port adapter 1 of this embodiment is a load port adapter that can be fixed onto the mounting table 124 of the load port 100. This load port adapter 1 has a holder 10 that can hold a cassette 200 that can accommodate multiple circuit boards. The holder 10 has a position adjustment mechanism 15 for positioning the cassette 200 at a reference position X. The holder 10 can be fixed onto the mounting table 124 of the load port 100.

[0059] This allows the cassette 200 capable of accommodating the circuit board to be set on the mounting table of the load port 100. This improves the versatility of the load port 100.

[0060] Generally, a cassette can accommodate circuit boards of various sizes. Therefore, a reference position is determined for the cassette when removing a circuit board from the cassette. By aligning this reference position of the cassette with the reference position of the adapter, the position of the cassette can be determined relative to the load port to which the adapter is fixed.

[0061] As configured above, the holder 10 has the position adjustment mechanism 15, which allows the cassette 200 to be positioned at the reference position X of the load port adapter 1. This makes it easy to position the cassette 200 relative to the load port 100 to which the load port adapter 1 is attached. This allows the cassette 200 to be placed on the load port 100 in a stable and positioned state.

[0062] The position adjustment mechanism 15 presses the cassette 200 toward the reference position X and has a plurality of cassette fixing portions 20, 30, 40 that fix the cassette 200 in place.

[0063] This allows the cassette 200 to be fixed to the load port adapter 1 while being positioned at the reference position X of the load port adapter 1.

[0064] The cassette fixing parts 20, 30, 40 press the cassette 200 in different directions when the holding part 10 is viewed in plan.

[0065] This allows the cassette 200 to be pressed in different directions when the holder 10 is viewed in plan view, and therefore the cassette 200 can be held by the holder 10 more reliably.

[0066] When the holding unit 10 is viewed in plan, the multiple cassette fixing units 10, 20, 30 include a first cassette fixing unit 20 and a second cassette fixing unit 30 that push the cassette 200 toward the reference position X, and a third cassette fixing unit 40 that pushes the cassette 200 in a direction different from the direction toward the reference position X. The force with which the first cassette fixing unit 20 and the second cassette fixing unit 30 push the cassette 200 toward the reference position X is greater than the force with which the third cassette fixing unit 40 pushes the cassette 200 in a direction different from the direction toward the reference position X.

[0067] Of the forces acting on the cassette 200 by the multiple cassette fixing parts 10, 20, 30, the force that positions the cassette 200 at the reference position X is large, so the cassette 200 can be more reliably positioned at the reference position X. Therefore, the cassette 200 can be positioned with respect to the load port adapter 1 with higher accuracy.

[0068] The cassette fixing portions 20, 30, 40 have contact portions 21, 31, 41 that come into contact with the cassette 200, and drive portions 22, 32, 42 that move the contact portions 21, 31, 41 back and forth.

[0069] This makes it possible to realize the cassette fixing portions 20, 30, 40 that fix the cassette 200 to the load port adapter 1 while positioning the cassette 200 at the reference position X of the load port adapter 1.

[0070] The cassette fixing portions 20 , 30 , 40 are positioned between the cassette 200 and the holder 10 when the cassette 200 is held on the holder 10 .

[0071] As a result, when the cassette 200 is held on the holder 10, the cassette fixing parts 20, 30, 40 are positioned and hidden between the cassette 200 and the holder 10, preventing the cassette fixing parts 20, 30, 40 from being exposed. This further improves safety when supplying circuit boards using the load port 100.

[0072] The load port adapter 1 further has a frame portion 50 that covers the gap between the supply port 111 of the load port 100 connected to the opening 200b of the cassette 200 and the outer periphery of the opening 200b side of the cassette 200 when the cassette 200 is fixed to the load port 100 and the load port adapter 1.

[0073] This prevents an operator from inserting his or her hands or fingers into the gap between the supply port 111 of the load port 100 and the cassette 200. Therefore, when the cassette 200 is used on the load port 100, safety can be improved.

[0074] (Other Embodiments) Although the embodiments of the present invention have been described above, the above-described embodiments are merely examples for carrying out the present invention. Therefore, the present invention is not limited to the above-described embodiments, and it is possible to appropriately modify and carry out the above-described embodiments within the scope of the spirit thereof.

[0075] In the above embodiment, the plurality of cassette fixing parts includes a first cassette fixing part 20, a second cassette fixing part 30, and a third cassette fixing part 40. However, the plurality of cassette fixing parts may include two cassette fixing parts, or may include four or more cassette fixing parts.

[0076] Furthermore, the direction in which the cassette is fixed by each cassette fixing portion is not limited to the direction described in the above embodiment.

[0077] In the above embodiment, the drive units 22, 32, 42 of the multiple cassette fixing units 20, 30, 40 reciprocate the contact units 21, 31, 41 in different directions. However, the multiple drive units may reciprocate at least some of the multiple contact units in the same direction. Furthermore, the cassette fixing units may fix the cassette to the load port adapter using fastening members such as bolts, rather than fixing the cassette to the load port adapter by using the drive units to press the contact units against protrusions on the bottom of the cassette. The cassette fixing units may have any configuration as long as they can fix the cassette in a positioned state in the load port adapter.

[0078] In the above embodiment, the load port adapter 1 has four cassette positioning units 12. However, the load port adapter may have two or three cassette positioning units as long as the cassettes can be positioned. The load port adapter may also have five or more cassette positioning units.

[0079] In the above embodiment, the load port adapter 1 has a frame portion 50. However, the load port adapter does not have to have a frame portion.

[0080] The present invention can be used, for example, in a load port adapter that can be fixed onto the mounting table of a load port. [Explanation of symbols]

[0081] 1 Load port adapter 10 Holding part 11 Holding unit body 11a Recess 11b Advance / retreat pin 12 Cassette positioning unit 15 Position adjustment mechanism 20 First cassette fixing part 21, 31, 41 Contact parts 22, 32, 42 Drive unit 23, 33, 43 Actuators 24, 34, 44 connection shaft 30 Second cassette fixing part 40 Third cassette fixing part 50 Frame 51 Aperture 60 Cover 100 Loading Port 110 Supply section 111 Supply port 112 Lid 120 Support part 121 Support body 122 Wheels 123 Support stand 124 Mounting table 124a Detection sensor 200 cassettes 200a space 200b aperture 201~205 Wall 210 Moving Wall 220 Slit X Reference position on the load port adapter side Y Cassette side reference position

Claims

1. A load port adapter that can be fixed onto a mounting table of a load port, a holding portion capable of holding a cassette capable of accommodating a plurality of circuit boards; the holding unit has a position adjustment mechanism for positioning the cassette at a reference position, and is fixable to the mounting table of the load port; The position adjustment mechanism includes: a plurality of cassette fixing portions that press the cassette toward the reference position and fix the cassette; the plurality of cassette fixing portions include, in a plan view of the holding portion, a first cassette fixing portion that pushes the cassette toward the reference position, and a third cassette fixing portion that pushes the cassette in a direction different from the direction toward the reference position; a force with which the first cassette fixing portion pushes the cassette toward the reference position that is greater than a force with which the third cassette fixing portion pushes the cassette in a direction different from the direction toward the reference position;

2. 2. The load port adapter according to claim 1, The cassette fixing portion is a contact portion that contacts the cassette; a drive unit that reciprocates the contact portion.

3. 3. The load port adapter according to claim 1, The cassette fixing portion is positioned between the cassette and the holder when the cassette is held on the holder.

4. 4. The load port adapter according to claim 1, a load port adapter, further comprising a frame portion that covers a gap between a supply port of the load port connected to an opening of the cassette and an outer periphery of the opening side of the cassette when the cassette is fixed to the load port and the load port adapter.

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