Package having a substrate with surface interconnects aligned with the surface of the substrate - Patent Application 20070122997

Abstract

A package including a substrate and an integrated device. The substrate includes at least one dielectric layer, a plurality of interconnects comprising a first material, and a plurality of surface interconnects coupled to the plurality of interconnects. The plurality of surface interconnects comprises a second material. A surface of the plurality of surface interconnects is in a plane with a surface of the substrate. The integrated device is coupled to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects.

Description

Priority claims

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to and benefit of non-provisional application Ser. No. 17 / 164,729, filed with the United States Patent Office on February 1, 2021, the entire contents of which are incorporated herein by reference as if fully set forth below and for all applicable purposes. [Technical Field]

[0002] Various features relate to packages that include integrated devices, and more particularly to packages that include integrated devices and substrates. [Background technology]

[0003]

[0003] A substrate includes a dielectric layer and a plurality of interconnects. Some substrate fabrication processes produce surface interconnects with surface recesses, where the surface interconnects are embedded in the substrate and lie below the surface of the substrate. These surface recesses in the substrate can cause insufficient or poor solder joints between the surface interconnects and integrated devices coupled to the substrate. Insufficient and / or poor solder joints in a package can cause reliability issues in the package. There is a continuing need to provide more reliable packages. Summary of the Invention

[0004] Various features relate to packages that include integrated devices, and more particularly to packages that include integrated devices and substrates.

[0005] One example provides a package including a substrate and an integrated device. The substrate includes at least one dielectric layer, a plurality of interconnects comprising a first material, and a plurality of surface interconnects coupled to the plurality of interconnects. The plurality of surface interconnects comprise a second material. Surfaces of the plurality of surface interconnects are planar with a surface of the substrate. The integrated device is coupled to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects.

[0006] Another example provides a substrate including at least one dielectric layer, a plurality of interconnects comprising a first material, and a plurality of surface interconnects coupled to the plurality of interconnects, the plurality of surface interconnects comprising a second material, and surfaces of the plurality of surface interconnects being planar with a surface of the substrate.

[0007] Another example provides a method for fabricating a package. The method includes providing a substrate comprising at least one dielectric layer, a plurality of interconnects comprising a first material, and a plurality of surface interconnects coupled to the plurality of interconnects. The plurality of surface interconnects comprises a second material. Surfaces of the plurality of surface interconnects are planar with a surface of the substrate. The method couples an integrated device to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects.

[0008] Various features, nature and advantages may become apparent from the detailed description set forth below when taken in conjunction with the drawings in which like reference characters refer to like elements throughout. [Brief explanation of the drawings]

[0009] [Figure 1]

[0009] FIG. 1 is a side view of a package including an integrated device and a substrate. [Figure 2]

[0010] 1 is a side view of a package including a substrate with surface interconnects aligned with the surface of the substrate. [Figure 3]

[0011] 10 is a side view of another package including a substrate with surface interconnects aligned with the surface of the substrate. [Figure 4A]

[0012] 1A and 1B illustrate an exemplary sequence for fabricating a substrate. [Figure 4B] 1A and 1B illustrate an exemplary sequence for fabricating a substrate. [Figure 4C] 1A and 1B illustrate an exemplary sequence for fabricating a substrate. [Figure 4D] 1A and 1B illustrate an exemplary sequence for fabricating a substrate. [Figure 5]

[0013] 1 is an exemplary flow diagram of a method for fabricating a substrate. [Figure 6A]

[0014] 1A-1C illustrate an exemplary sequence for fabricating a package including a substrate with surface interconnects aligned with the surface of the substrate. [Figure 6B] 1A-1C illustrate an exemplary sequence for fabricating a package including a substrate with surface interconnects aligned with the surface of the substrate. [Figure 7]

[0015] 1 is an exemplary flow diagram of a method for making a package including a substrate with surface interconnects aligned with a surface of the substrate. [Figure 8]

[0016] 1A-1C illustrate various electronic devices that may incorporate the die, electronic circuits, integrated devices, integrated passive devices (IPDs), passive components, packages, and / or device packages described herein. DETAILED DESCRIPTION OF THE INVENTION

[0010]

[0017] In the following description, specific details are given to provide a thorough understanding of various aspects of the present disclosure. However, it will be understood by those skilled in the art that aspects may be practiced without these specific details. For example, circuits may be shown in block diagrams to avoid obscuring the aspects in unnecessary detail. In other instances, well-known circuits, structures, and techniques may not be shown in detail so as not to obscure aspects of the present disclosure.

[0011]

[0018] The present disclosure describes a package including a substrate and an integrated device. The substrate includes at least one dielectric layer, a plurality of interconnects comprising a first material, and a plurality of surface interconnects coupled to the plurality of interconnects. The plurality of surface interconnects comprises a second material. Surfaces of the plurality of surface interconnects are planar with a surface of the substrate. The integrated device is coupled to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects. The plurality of surface interconnects (e.g., surface pad interconnects) help provide a reliable and strong solder joint between the integrated device and the substrate, even when there is misalignment of the integrated device when coupled to the substrate. Exemplary Package Comprising a Substrate with Surface Interconnects

[0019] 1 shows a package 100 including a substrate 102, an integrated device 104, and an integrated device 106. The substrate 102 includes at least one dielectric layer 120 and a plurality of interconnects 122. The plurality of interconnects 122 includes interconnects embedded within the substrate 102. The integrated device 104 is coupled to the substrate 102 through a plurality of pillar interconnects 140 and a plurality of solder interconnects 142. The plurality of solder interconnects 142 are coupled to the plurality of interconnects 122. The integrated device 106 is coupled to the substrate 102 through a plurality of pillar interconnects 160 and a plurality of solder interconnects 162. The plurality of solder interconnects 162 are coupled to the plurality of interconnects 122. The plurality of solder interconnects 124 are coupled to the substrate 102.

[0012]

[0020] The integrated device 104 is misaligned with the interconnects of the substrate 102. As a result, some of the pillar interconnects 140 and some of the solder interconnects 142 are not aligned with the pad interconnects (e.g., 122 a) of the substrate 102. This results in a poor or poor solder joint between the solder interconnects and the pad interconnects because the vertical offset between the pad interconnects (e.g., 122 a) and the top surface of the substrate 102 stretches the solder interconnects (e.g., 142) and / or introduces one or more small voids in the solder interconnects 142, resulting in a poor or poor electrical connection between the integrated device 104 and the substrate 102.

[0013]

[0021] 2 shows a side view of a package 200 including a substrate with surface interconnects. Package 200 includes a substrate 202, an integrated device 203, and an integrated device 205. Package 200 is coupled to a board 290 (e.g., a printed circuit board (PCB)) through multiple solder interconnects 280. Integrated device 203 is coupled to substrate 202 through multiple pillar interconnects 230 and multiple solder interconnects 232. Integrated device 205 is coupled to substrate 202 through multiple pillar interconnects 250 and multiple solder interconnects 252.

[0014]

[0022] The substrate 202 may be an embedded trace substrate (ETS). The substrate 202 includes at least one dielectric layer 220, a plurality of interconnects 222, and a plurality of surface interconnects 224. The plurality of interconnects 222 includes interconnects located within the at least one dielectric layer 220. The plurality of interconnects 222 includes a plurality of interconnects (e.g., pad interconnects, trace interconnects) embedded through the surface of the substrate 202 and offset from the surface of the substrate 202. Examples of interconnects from the plurality of interconnects 222 include pad interconnect 222a and trace interconnect 222b. The plurality of interconnects 222 offset from the surface of the substrate 202 may have a substrate recess located above the plurality of interconnects 222. The interconnect 222b (e.g., trace interconnect) is an example of an interconnect offset from the surface of the substrate 202 and is adjacent to the substrate recess.

[0015]

[0023] The substrate 202 includes a plurality of surface interconnects 224. The plurality of surface interconnects 224 are coupled to some of the plurality of interconnects 222. The plurality of surface interconnects 224 may occupy space that would otherwise be a substrate recess. The plurality of surface interconnects 224 include a different material than the plurality of interconnects 222. For example, the plurality of interconnects 222 may include copper, and the plurality of surface interconnects 224 may include tin (Sn). The plurality of surface interconnects 224 may be different from a seed layer (e.g., a copper seed layer). The plurality of surface interconnects 224 may be free of a seed layer. The plurality of surface interconnects 224 may have a surface that is aligned with and / or planar with a surface (e.g., a first surface, a top surface) of the substrate 202. For example, a surface of the plurality of surface interconnects 224 that faces away from the substrate 202 is aligned with and / or planar with a surface (e.g., a first surface, a top surface) of the substrate 202. In another example, a surface of the plurality of surface interconnects 224 facing outward from the substrate 202 is aligned with and / or is planar with a surface (e.g., a first surface, an upper surface) of the at least one dielectric layer 220. The surface of the plurality of surface interconnects 224 facing outward from the substrate 202 is a surface facing toward the integrated devices (e.g., 203, 205).

[0016]

[0024] The plurality of surface interconnects 224 may be located on a different metal layer than any of the interconnects from the plurality of interconnects 222 of the substrate 202. The plurality of surface interconnects 224 may be the only interconnects having a surface (e.g., a surface facing away from the substrate) aligned with and / or planar with a first surface (e.g., top surface, integrated device facing surface) of the substrate 202 (e.g., top surface of at least one dielectric layer 220 of the substrate 202). The plurality of surface interconnects 224 is located between the plurality of interconnects 222 and at least one integrated device (e.g., 203, 205). The plurality of surface interconnects 224 may be a means for surface interconnection.

[0017]

[0025] The plurality of surface interconnects 224 are coupled to some of the plurality of interconnects 222 such that a surface of the plurality of surface interconnects (e.g., a surface facing away from the substrate, a surface facing the integrated device) is planar with and / or aligned with a surface of the substrate 202. The plurality of surface interconnects 224 helps to provide a reliable and strong solder joint between the integrated device and the substrate 202, even when there is misalignment of the integrated device when the integrated device is coupled to the substrate 202.

[0018]

[0026] 2 shows that the integrated device 203 is configured to be electrically coupled to the substrate 202 through a plurality of pillar interconnects 230 and a plurality of solder interconnects 232. In particular, the integrated device 203 is configured to be electrically coupled to a plurality of surface interconnects 224 through the plurality of pillar interconnects 230 and a plurality of solder interconnects 232. The pillar interconnects 230a and the solder interconnects 232a may be considered part of the integrated device 203. The integrated device 203 is coupled to the pillar interconnects 230a. The pillar interconnects 230a are coupled to the solder interconnects 232a. The solder interconnects 232a are coupled to the surface interconnects 224a. The surface interconnects 224a are coupled to the interconnects 222a. The surface interconnects 224a are located above the interconnects 222a. The surface interconnects 224a may be surface pad interconnects. The interconnects 222a may be pad interconnects. Thus, the surface pad interconnect may be bonded (e.g., directly bonded) to the pad interconnect. The surface interconnect 224a and the interconnect 222a may be considered as a single pad interconnect comprising a first metal layer and a second metal layer, where the second metal layer comprises a material different from that of the first metal layer. The first metal layer may be represented by the interconnect 222a, and the second metal layer may be represented by the surface interconnect 224a. The first metal layer may comprise copper, and the second metal layer may comprise tin (Sn). The first metal layer may comprise a seed layer.

[0019]

[0027] Similarly, the integrated device 205 is configured to be electrically coupled to the substrate 202 through the plurality of pillar interconnects 250 and the plurality of solder interconnects 252. In particular, the integrated device 205 is configured to be electrically coupled to the plurality of surface interconnects 224 through the plurality of pillar interconnects 250 and the plurality of solder interconnects 252. The plurality of pillar interconnects 250, the plurality of solder interconnects 252, the plurality of surface interconnects 224, and the plurality of interconnects 222 may be coupled to one another as described above for the plurality of pillar interconnects 230, the plurality of solder interconnects 232, the plurality of surface interconnects 224, and the plurality of interconnects 222 between the integrated device 203 and the substrate 202.

[0020]

[0028] The integrated devices (e.g., 203, 205) may include a die (e.g., a semiconductor bare die). The integrated devices may include a radio frequency (RF) device, a passive device, a filter, a capacitor, an inductor, an antenna, a transmitter, a receiver, a gallium arsenide (GaAs)-based integrated device, a surface acoustic wave (SAW) filter, a bulk acoustic wave (BAW) filter, a light emitting diode (LED) integrated device, a silicon (Si)-based integrated device, a silicon carbide (SiC)-based integrated device, a memory, a power management processor (e.g., a power management integrated circuit), an application processor, and / or combinations thereof. The integrated devices (e.g., 203, 205) may include at least one electronic circuit (e.g., a first electronic circuit, a second electronic circuit, etc.).

[0021]

[0029] It should be noted that different packages may have different numbers of integrated devices. The locations of the integrated devices are exemplary. The integrated devices may be bonded to different portions of the substrate.

[0022]

[0030] 3 shows a side view of a package 300 including a substrate 302 with surface interconnects. Package 300 is similar to package 200. Thus, package 300 includes the same or similar components as package 200. Substrate 302 is similar to substrate 202. Thus, substrate 302 includes the same or similar components as substrate 202. Substrate 302 may be an embedded trace substrate (ETS). Substrate 302 includes at least one dielectric layer 220, a plurality of interconnects 222, a plurality of surface interconnects 224, a solder resist layer 320, and an encapsulation layer 310.

[0023]

[0031] A solder resist layer 320 is bonded to the bottom surface of the substrate 302. An encapsulation layer 310 may be formed and positioned over a first surface (e.g., top surface) of the substrate 302 and the integrated device(s) (e.g., 203, 205). The encapsulation layer 310 may include a mold, a resin, and / or an epoxy. A compression molding process, a transfer molding process, or a liquid molding process may be used to form the encapsulation layer 310. The encapsulation layer 310 may be photo-etchable. The encapsulation layer 310 may be a means for encapsulation. Exemplary Sequence for Fabricating a Substrate

[0032] In some implementations, fabricating a substrate includes several processes. Figures 4A-4D show an example sequence for providing or fabricating a substrate including surface interconnects. In some implementations, the sequence of Figures 4A-4D may be used to provide or fabricate substrate 202 of Figure 2. However, the processes of Figures 4A-4D may be used to fabricate any of the substrates described in this disclosure.

[0024]

[0033] 4A-4D may combine one or more stages to simplify and / or clarify the sequence for providing or fabricating a substrate. In some implementations, the order of the processes may be changed or modified. In some implementations, one or more of the processes may be interchanged or substituted without departing from the scope of the present disclosure.

[0025]

[0034] Stage 1, as shown in Figure 4A, illustrates the state after a carrier 400 is provided having a metal layer 402. The metal layer 402 may include a seed layer. The metal layer 402 may include copper.

[0026]

[0035] Stage 2 shows the state after a photoresist layer 403 is provided. The photoresist layer 403 may be formed on the metal layer 402. A lamination process and / or a deposition process may be used to form the photoresist layer 403.

[0027]

[0036] Stage 3 shows the situation after selective etching of the photoresist layer 403 , resulting in openings 404 in the photoresist layer 403 .

[0028]

[0037] Stage 4 shows the state after a metal layer 405 is formed through the openings 404 in the photoresist layer 403. The metal layer 405 may form the plurality of surface interconnects 224 as described in this disclosure. The metal layer 405 may include tin (Sn). However, a different material(s) may be used for the metal layer 405. A plating process may be used to form the metal layer 405. The metal layer 405 may be different from the seed layer (e.g., a copper seed layer).

[0029]

[0038] Stage 5 shows the state after interconnect 406 has been formed on metal layer 405 (e.g., surface interconnect 224) and metal layer 402. A plating process may be used to form the interconnect. Interconnect 406 may include copper. Interconnect 406 may include a different material than metal layer 405 and / or surface interconnect 224.

[0030]

[0039] Step 6, as shown in Figure 4B, illustrates the removal of photoresist layer 403, exposing metal layer 402.

[0031]

[0040] Stage 7 shows the state after dielectric layer 420 is formed over metal layer 402, metal layer 405, and carrier 400. Dielectric layer 420 may include polyimide. However, different implementations may use different materials for the dielectric layer. A deposition process and / or lamination process may be used to form dielectric layer 420.

[0032]

[0041] Stage 8 shows the state after multiple cavities 410 are formed in the dielectric layer 420. The multiple cavities 410 may be formed using an etching process (e.g., a photoetching process) or a laser process. The multiple cavities 410 may expose portions of the interconnects 406.

[0033]

[0042] Stage 9 shows the state after interconnects 412 have been formed in and on the dielectric layer 420. The interconnects 412 may be formed in the plurality of cavities 410. Examples of interconnects that may be formed include vias, pads, and / or traces. A plating process may be used to form the interconnects. The interconnects 412 may include copper.

[0034]

[0043] Stage 10 shows the state after another dielectric layer 422 is formed over dielectric layer 420. Dielectric layer 422 can be the same material as dielectric layer 420. However, different implementations may use different materials for the dielectric layer. A deposition process and / or lamination process may be used to form dielectric layer 422.

[0035]

[0044] Stage 11, as shown in Figure 4C, illustrates the state after multiple cavities 430 have been formed in the dielectric layer 422. An etching process or a laser process may be used to form the cavities 430. The multiple cavities 430 may expose portions of the interconnects 412.

[0036]

[0045] Stage 12 shows the state after interconnects 414 have been formed in and on dielectric layer 422. Interconnects 414 may be formed in a plurality of cavities 430. Examples of interconnects that may be formed include vias, pads, and / or traces. A plating process may be used to form the interconnects. Interconnects 414 may include copper.

[0037]

[0046] Stage 13 shows the state after another dielectric layer 424 is formed on dielectric layer 422. Dielectric layer 424 can be the same material as dielectric layer 420. However, different implementations may use different materials for the dielectric layer. A deposition process and / or lamination process may be used to form dielectric layer 424.

[0038]

[0047] Stage 14 shows the state after a plurality of cavities 440 have been formed in the dielectric layer 424. An etching process or a laser process may be used to form the cavities 440. The plurality of cavities 440 may expose portions of the interconnects 414.

[0039]

[0048] Stage 15, as shown in FIG. 4D , depicts the state after interconnects 416 have been formed in and on dielectric layer 424. Interconnects 416 may be formed in a plurality of cavities 440. Examples of interconnects that may be formed include vias, pads, and / or traces. A plating process may be used to form the interconnects. Interconnects 416 may include copper. Interconnects 416 may be formed on the surface of dielectric layer 424. Thus, interconnects 416 may be formed on the surface of the substrate.

[0040]

[0049] Some or all of the interconnects 406, 412, 414 and / or 416 may define the plurality of interconnects 222 of the substrate 202. The dielectric layers 420, 422, 424 may be represented by at least one dielectric layer 220.

[0041]

[0050] Stage 16 illustrates the state after the carrier 400 has been separated (e.g., removed and ground) from the dielectric layer 220 and the metal layer 402 (e.g., seed layer) has been removed (e.g., etched) from the dielectric layer 220, leaving the substrate 202. At least one solder resist layer (e.g., 320) may be formed on a surface (e.g., top surface, bottom surface) of the substrate 202. The plurality of surface interconnects 224 are coupled to some of the plurality of interconnects 222 such that the surfaces (e.g., surfaces facing outward from the substrate, surfaces facing the integrated device) of the plurality of surface interconnects 224 are planar and / or aligned with the surface of the substrate 202 (e.g., surface of the at least one dielectric layer 220). In some implementations, the surface interconnects 224 directly coupled to the interconnects 222 may be considered a single pad interconnect comprising a first metal layer and a second metal layer, where the second metal layer comprises a material different from that of the first metal layer. The first metal layer may be represented by interconnects from the plurality of interconnects 222, and the second metal layer may be represented by surface interconnects 224. The first metal layer may include copper, and the second metal layer may include tin (Sn). The first metal layer may include a seed layer. As shown in step 16, some of the interconnects from the plurality of interconnects 222 may be embedded through the surface of the substrate 202, and there may be substrate recesses above and / or adjacent to some of the interconnects from the plurality of interconnects 222.

[0042]

[0051] Different implementations may use different processes to form the metal layer(s). In some implementations, a chemical vapor deposition (CVD) process and / or a physical vapor deposition (PVD) process to form the metal layer(s). For example, a sputtering process, a spray coating process, and / or a plating process may be used to form the metal layer(s). 1 is an exemplary flow diagram of a method for fabricating a substrate;

[0052] In some implementations, fabricating a substrate includes several processes. Figure 5 shows an example flow diagram of a method 500 for providing or fabricating a substrate including surface interconnects. In some implementations, the method 500 of Figure 5 can be used to provide or fabricate the substrate 202 of Figure 2. However, the method 500 can be used to fabricate any substrate described in this disclosure.

[0043]

[0053] 5 may combine one or more processes to simplify and / or clarify the method for providing or fabricating a substrate. In some implementations, the order of the processes may be changed or modified.

[0044]

[0054] The method provides (at 505) a carrier 400 having a metal layer 402. The metal layer 402 may include a seed layer (e.g., a copper seed layer). Different implementations may use different materials for the carrier. Stage 1 of Figure 10A shows and describes an example of a state after a carrier with a metal layer is provided.

[0045]

[0055] The method forms and etches (at 510) a photoresist layer 403. The photoresist layer 403 may be laminated and / or deposited on the metal layer 402 of the carrier 400. Steps 2-3 of Figure 10A show and describe forming and etching the photoresist layer.

[0046]

[0056] The method forms (at 515) a plurality of surface interconnects 224 on the metal layer 402. The surface interconnects 224 may be formed from a metal layer 405 (e.g., a surface metal layer). The metal layer 405 may include a different material than the metal layer 402. The metal layer 405 may include tin (Sn). The metal layer 405 may be different from the seed layer (e.g., a copper seed layer). A plating process may be used to form the metal layer 405. Step 4 of FIG. 4A shows and describes an example of forming the surface interconnects.

[0047]

[0057] The method forms (at 520) interconnect 406 on metal layer 405 and metal layer 402. A plating process may be used to form interconnect 406. Step 5 of Figure 4A shows and describes one example of forming the interconnect.

[0048]

[0058] The method removes (at 525) the photoresist layer 403. Step 6 of Figure 4B shows and describes an example of removing the photoresist layer.

[0049]

[0059] The method forms (at 530) a dielectric layer 420 over the carrier 400 and the metal layer 402. The dielectric layer 420 may include polyimide. Forming the dielectric layer may also include forming a plurality of cavities (e.g., 410) in the dielectric layer 420. The plurality of cavities may be formed using an etching process (e.g., photoetching) or a laser process. Steps 7-8 of FIG. 4B show and describe one example of forming the dielectric layer and the cavities in the dielectric layer.

[0050]

[0060] The method forms (at 535) interconnects in and on the dielectric layer. For example, interconnects 412 may be formed in and on dielectric layer 420. A plating process may be used to form the interconnects. Forming the interconnects may include providing a patterned metal layer on and / or within the dielectric layer. Step 9 of FIG. 4B shows and describes one example of forming interconnects in and on the dielectric layer.

[0051]

[0061] The method forms (at 540) a dielectric layer 422 over the dielectric layer 420 and the interconnects. The dielectric layer 422 may include polyimide. Forming the dielectric layer may also include forming a plurality of cavities (e.g., 430) in the dielectric layer 422. The plurality of cavities may be formed using an etching process or a laser process. Steps 10-11 in Figures 4B-4C illustrate forming the dielectric layer and the cavities in the dielectric layer.

[0052]

[0062] The method forms (at 545) interconnects in and / or on the dielectric layer. For example, interconnect 414 may be formed. A plating process may be used to form the interconnects. Forming the interconnects may include providing a patterned metal layer on and within the dielectric layer. Step 12 of Figure 4C shows and describes one example of forming interconnects in and on the dielectric layer.

[0053]

[0063] The method may form additional dielectric layer(s) and additional interconnects as described at 540 and 545. Steps 13-15 of Figures 4C-4D show and describe one example of forming additional interconnects in and on a dielectric layer.

[0054]

[0064] Once all the dielectric layer(s) and additional interconnects have been formed, the method may separate (e.g., remove, grind) the carrier (e.g., 400) from the dielectric layer 420 and remove (e.g., etch out) the metal layer 402 (e.g., seed layer), leaving the substrate 202. Stage 16 of FIG. 4D shows and describes an example of separating the carrier from the substrate. In some implementations, the method may form at least one solder resist layer (e.g., 320) on the substrate (e.g., on the first surface of the substrate, on the second surface of the substrate).

[0055]

[0065] Different implementations may use different processes to form the metal layer(s). In some implementations, a chemical vapor deposition (CVD) process and / or a physical vapor deposition (PVD) process to form the metal layer(s). For example, a sputtering process, a spray coating process, and / or a plating process may be used to form the metal layer(s). Exemplary Sequence for Making a Package Including a Substrate with Surface Interconnects

[0066] 6A-6B show an example sequence for providing or fabricating a package including a substrate with surface interconnects. In some implementations, the sequence of Figures 6A-6B can be used to provide or fabricate package 300 including a substrate with surface interconnects of Figure 3, or any of the packages described in this disclosure.

[0056]

[0067] 6A-6B may combine one or more stages to simplify and / or clarify the sequence for providing or making a package. In some implementations, the order of the processes may be changed or modified. In some implementations, one or more of the processes may be interchanged or substituted without departing from the scope of the present disclosure. The sequence of FIGS. 6A-6B may be used to make one package or several packages at a time (as part of a wafer).

[0057]

[0068] Stage 1, as shown in FIG. 6A, depicts the state after a substrate 302 is provided. The substrate 302 can be provided or fabricated by a supplier. A process similar to the process shown in FIGS. 4A-4D can be used to fabricate the substrate 302. However, different implementations may use different processes to fabricate the substrate 302. Examples of processes that can be used to fabricate the substrate 302 include a semi-additive process (SAP) and a modified semi-additive process (mSAP). The substrate 302 includes at least one dielectric layer 220, a plurality of interconnects 222, a plurality of surface interconnects 224, and a solder resist layer 320. The substrate 302 can be an embedded trace substrate (ETS).

[0058]

[0069] The plurality of surface interconnects 224 may have a surface that is aligned with and / or planar with a surface (e.g., first surface, top surface) of the substrate 302. For example, a surface of the plurality of surface interconnects 224 that faces outward from the substrate 302 is aligned with and / or planar with a surface (e.g., first surface, top surface) of the substrate 302. In another example, a surface of the plurality of surface interconnects 224 that faces outward from the substrate 302 is aligned with and / or planar with a surface (e.g., first surface, top surface) of the at least one dielectric layer 220. The plurality of surface interconnects 224 may comprise a material that is different from the material of the plurality of interconnects 222. The plurality of interconnects 224 may be different from the seed layer.

[0059]

[0070] Stage 2 shows the state after integrated device 203 and integrated device 205 are bonded to a first surface (e.g., a top surface) of substrate 302. Integrated device 203 may be bonded to substrate 302 through a plurality of pillar interconnects 230 and a plurality of solder interconnects 232. The plurality of solder interconnects 232 may be bonded to a plurality of surface interconnects 224. Integrated device 205 may be bonded to substrate 302 through a plurality of pillar interconnects 250 and a plurality of solder interconnects 252. The plurality of solder interconnects 252 may be bonded to a plurality of surface interconnects 224. A solder reflow process may be used to bond the integrated device to substrate 302.

[0060]

[0071] Stage 3, as shown in FIG. 6B , depicts the state after an encapsulation layer 310 is provided over the substrate 302 and the integrated device (e.g., 203, 205). The encapsulation layer 310 may encapsulate the integrated device(s) and / or components. For example, the encapsulation layer 310 may be formed over the substrate 302 and the integrated device(s) (e.g., 203, 205). The encapsulation layer 310 may include a mold, a resin, and / or an epoxy. A compression molding process, a transfer molding process, or a liquid molding process may be used to form the encapsulation layer 310. The encapsulation layer 310 may be photo-etchable. The encapsulation layer 310 may be a means for encapsulation.

[0061]

[0072] Stage 4 shows the state after the plurality of solder interconnects 280 have been bonded to a second surface (e.g., bottom surface) of the substrate 302. The plurality of solder interconnects 280 may be bonded to interconnects from the plurality of interconnects 222 of the substrate 302. A solder reflow process may be used to bond the plurality of solder interconnects 280 to the substrate 302. Stage 4 may show the package 300. The packages (e.g., 200, 300) described in this disclosure may be fabricated one at a time or fabricated together as part of one or more wafers and then singulated into individual packages. 1. An exemplary flow diagram of a method for fabricating a package including a substrate with surface interconnects.

[0073] In some implementations, creating a package including a substrate with surface interconnects involves several processes. Figure 7 shows an example flow diagram of a method 700 for providing or creating a package including a substrate with surface interconnects. In some implementations, the method 700 of Figure 7 can be used to provide or create the package 300 of Figure 3 described in this disclosure. However, the method 700 can be used to provide or create any of the packages described in this disclosure.

[0062]

[0074] 7 may combine one or more processes to simplify and / or clarify a method for providing or making a package including a substrate with surface interconnects. In some implementations, the order of the processes may be changed or modified.

[0063]

[0075] The method provides (at 705) a substrate (e.g., 202, 302) with surface interconnects. The substrate 302 can be provided or fabricated by a supplier. The substrate 302 includes a first surface and a second surface. The substrate 302 includes at least one dielectric layer 220, a plurality of interconnects 222, a plurality of surface interconnects 224, and a solder resist layer 320. The plurality of surface interconnects 224 can be coupled to the plurality of interconnects 222. The plurality of surface interconnects 224 can be located on the plurality of interconnects 222. Different implementations can provide different substrates. A process similar to the process shown in FIGS. 4A-4D can be used to fabricate the substrate 302. However, different implementations can use different processes to fabricate the substrate 302. Step 1 of FIG. 6A shows and describes an example of providing a substrate with surface interconnects.

[0064]

[0076] The method includes (at 710) bonding a plurality of integrated devices (e.g., 203, 205) to a first surface of a substrate (e.g., 302). For example, integrated device 203 may be bonded to substrate 202 through a plurality of pillar interconnects 230 and a plurality of solder interconnects 232. The plurality of solder interconnects 232 may be bonded to a plurality of interconnects 224 of substrate 302. In another example, integrated device 205 may be bonded to substrate 302 through a plurality of pillar interconnects 250 and a plurality of solder interconnects 252. The plurality of solder interconnects 252 may be bonded to a plurality of surface interconnects 224 of substrate 302. A solder reflow process may be used to bond the integrated device to the substrate. Stage 2 of FIG. 6A shows and describes an example of an integrated device bonded to a substrate.

[0065]

[0077] The method forms (at 715) an encapsulation layer (e.g., 310) over the substrate (e.g., 302). The encapsulation layer 310 may include a mold, a resin, and / or an epoxy. A compression molding process, a transfer molding process, or a liquid molding process may be used to form the encapsulation layer 310. The encapsulation layer 310 may be photoetchable. The encapsulation layer 310 may be a means for encapsulation. The encapsulation layer may encapsulate the integrated device(s) and / or component(s). Step 3 of FIG. 6B shows and describes an example of forming an encapsulation layer over a substrate.

[0066]

[0078] The method includes (at 720) bonding a plurality of solder interconnects (e.g., 280) to a second surface of the substrate (e.g., 302). The plurality of solder interconnects may be bonded to a plurality of interconnects 222 of the substrate. Step 4 of Figure 6B shows and describes an example of bonding the solder interconnects to a substrate. Exemplary Electronic Devices

[0079] 8 illustrates various electronic devices that may be integrated with any of the above-described devices, integrated devices, integrated circuit (IC) packages, integrated circuit (IC) devices, semiconductor devices, integrated circuits, dies, interposers, packages, package-on-package (PoP), system-in-package (SiP), or system-on-chip (SoC). For example, a mobile phone device 802, a laptop computer device 804, a fixed location terminal device 806, a wearable device 808, or an automotive vehicle 810 may include a device 800 described herein. The device 800 may be, for example, any of the devices and / or integrated circuit (IC) packages described herein. The devices 802, 804, 806, and 808 and the vehicle 810 illustrated in FIG. 8 are merely illustrative. Other electronic devices may also characterize device 800, including a group of devices (e.g., electronic devices), including, but not limited to, mobile devices, handheld personal communications system (PCS) units, portable data units such as personal digital assistants, global positioning system (GPS) enabled devices, navigation devices, set-top boxes, music players, video players, entertainment units, fixed location data units such as meter reading equipment, communications devices, smartphones, tablet computers, computers, wearable devices (e.g., watches, eyeglasses), Internet of Things (IoT) devices, servers, routers, electronic devices implemented in automated vehicles (e.g., autonomous vehicles), or any other device that stores or retrieves data or computer instructions, or any combination thereof.

[0067]

[0080] One or more of the components, processes, features, and / or functions shown in Figures 2-3, 4A-4D, 5, 6A-6B, and / or 7-8 may be rearranged and / or combined into a single component, process, feature, or function, or implemented in several components, processes, or functions. Also, additional elements, components, processes, and / or functions may be added without departing from this disclosure. Also, it should be noted that Figures 2-3, 4A-4D, 5, 6A-6B, and / or 7-8 in this disclosure, and their corresponding descriptions, are not limited to dies and / or ICs. In some implementations, Figures 2-3, 4A-4D, 5, 6A-6B, and / or 7-8, and their corresponding descriptions, may be used to manufacture, create, provide, and / or generate devices and / or integrated devices. In some implementations, the device may include a die, an integrated device, an integrated passive device (IPD), a die package, an integrated circuit (IC) device, a device package, an integrated circuit (IC) package, a wafer, a semiconductor device, a package-on-package (PoP) device, a heat dissipation device, and / or an interposer.

[0068]

[0081] It should be noted that the figures in this disclosure may represent actual and / or conceptual representations of various parts, components, objects, devices, packages, integrated devices, integrated circuits, and / or transistors. In some instances, the figures may not be to scale. In some instances, for clarity, not all components and / or parts may be shown. In some instances, the position, location, size, and / or shape of various parts and / or parts in the figures may be exemplary. In some implementations, various components and / or parts in the figures may be optional.

[0069]

[0082] The word “exemplary” is used herein to mean “serving as an example, instance, or illustration.” Any implementation or aspect described herein as “exemplary” should not necessarily be construed as preferred or advantageous over other aspects of the present disclosure. Likewise, the term “aspect” does not require that all aspects of the present disclosure include the described feature, advantage, or mode of operation. The term “coupled” is used herein to refer to a direct or indirect coupling (e.g., mechanical coupling) between two objects. For example, if object A physically contacts object B, and object B contacts object C, objects A and C may still be considered to be coupled to each other even though they are not in direct physical contact with each other. The term “electrically coupled” may mean that two objects are directly or indirectly coupled to each other such that an electric current (e.g., signal, power, ground) may travel between the two objects. Two objects that are electrically coupled may or may not have an electric current traveling between them. The use of the terms "first," "second," "third," and "fourth" (and / or anything beyond fourth) is arbitrary. Any of the components described may be a first component, a second component, a third component, or a fourth component. For example, a component referred to as a second component may be a first component, a second component, a third component, or a fourth component. The term "encapsulate" means that an object may partially or completely encapsulate another object. The terms "upper" and "lower" are arbitrary. A component located on the upper side may be located above a component located on the lower side. An upper component may be considered a lower component, and vice versa. As described in this disclosure, a first component located "on" a second component may mean that the first component is located above or below the second component, depending on how lower or upper is arbitrarily defined.In another example, a first component may be located on (e.g., above) a first surface of a second component, and a third component may be located on (e.g., below) a second surface of the second component, with the second surface facing the first surface. It is further noted that the term "over," as used herein in the context of one component being located on another component, may be used to mean a component that is on and / or in (e.g., on the surface of or embedded within) another component. Thus, for example, a first component that is over a second component may mean (1) that the first component is over the second component but is not in direct contact with the second component, (2) that the first component is on (e.g., on the surface of) the second component, and / or (3) that the first component is in (e.g., embedded within) the second component. A first component located "in" a second component can be partially located within the second component or completely located within the second component. As used in this disclosure, the term "about 'value X'" or "approximately value X" means within 10 percent of 'value X'. For example, a value of about 1 or approximately 1 would mean a value in the range of 0.9 to 1.1.

[0070]

[0083] In some implementations, an interconnect is an element or component of a device or package that enables or facilitates an electrical connection between two points, elements, and / or components. In some implementations, an interconnect may include a trace, a via, a pad, a pillar, a metallization layer, a redistribution layer, and / or an under bump metallization (UBM) layer / interconnect. In some implementations, an interconnect may include a conductive material that may be configured to provide an electrical path for a signal (e.g., a data signal), ground, and / or power. An interconnect may include two or more elements or components. An interconnect may be defined by one or more interconnects. An interconnect may include one or more metal layers. An interconnect may be part of a circuit. Different implementations may use different processes and / or sequences to form the interconnect. In some implementations, a chemical vapor deposition (CVD) process, a physical vapor deposition (PVD) process, a sputtering process, a spray coating, and / or a plating process may be used to form the interconnect.

[0071]

[0084] Also, it should be noted that various disclosures contained herein may be described as a process, which is depicted as a flowchart, a flow diagram, a structure diagram, or a block diagram. While a flowchart may describe operations as a sequential process, many of the operations may be performed in parallel or simultaneously. Further, the order of operations may be rearranged. A process ends when its operations are completed.

[0072]

[0085] In the following, further examples are described to facilitate understanding of the present invention.

[0073]

[0086] Aspect 1: A package comprising a substrate and an integrated device. The substrate comprises at least one dielectric layer, a plurality of interconnects comprising a first material, and a plurality of surface interconnects coupled to the plurality of interconnects. The plurality of surface interconnects comprises a second material, and surfaces of the plurality of surface interconnects are planar with the surface of the substrate. The integrated device is coupled to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects.

[0074]

[0087] Embodiment 2: A package as described in embodiment 1, wherein the plurality of surface interconnects includes surface pad interconnects that are planar with the surface of the substrate and have a surface facing the integrated device.

[0075]

[0088] Embodiment 3: The package of embodiments 1 to 2, wherein a plurality of surface interconnects are located between the plurality of interconnects and the integrated device.

[0076]

[0089] Embodiment 4: The package of embodiments 1 to 3, wherein the plurality of surface interconnects are free of a seed layer.

[0077]

[0090] Embodiment 5: The package of embodiments 1 to 4, wherein the plurality of surface interconnects comprises tin (Sn).

[0078]

[0091] Aspect 6: A package as described in aspects 1 to 5, wherein the plurality of interconnects include trace interconnects embedded in the substrate through the surface of the substrate, wherein the trace interconnects are adjacent to a substrate recess from the surface of the substrate.

[0079]

[0092] Embodiment 7: The package of embodiment 6, wherein the surface of the substrate is the surface facing the integrated device.

[0080]

[0093] Embodiment 8: A package described in embodiments 1 to 7, wherein the plurality of interconnects include pad interconnects, wherein the plurality of surface interconnects include surface pad interconnects, wherein the surface pad interconnects are coupled to the pad interconnects, and wherein a surface of the pad interconnect facing the integrated device is planar with the surface of the substrate.

[0081]

[0094] Embodiment 9: The package of embodiment 8, wherein the integrated device is coupled to the surface pad interconnects through pillar interconnects and solder interconnects.

[0082]

[0095] Aspect 10: The package of aspects 1 to 9, wherein the package is incorporated into a device selected from the group consisting of a music player, a video player, an entertainment unit, a navigation device, a communication device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, a computer, a wearable device, a laptop computer, a server, an Internet of Things (IoT) device, and a device in an automotive vehicle.

[0083]

[0096] Aspect 11: A substrate comprising at least one dielectric layer, a plurality of interconnects comprising a first material, and a plurality of surface interconnects coupled to the plurality of interconnects, the plurality of surface interconnects comprising a second material, and surfaces of the plurality of surface interconnects being planar with a surface of the substrate.

[0084]

[0097] Embodiment 12: The substrate of embodiment 11, wherein the plurality of surface interconnects are free of a seed layer.

[0085]

[0098] Embodiment 13: The substrate of embodiments 11 to 12, wherein the plurality of surface interconnects comprises tin (Sn).

[0086]

[0099] Embodiment 14: A substrate as described in embodiments 11 to 13, wherein the plurality of interconnects include trace interconnects embedded in the substrate through the surface of the substrate, wherein the trace interconnects are adjacent to a substrate recess from the surface of the substrate.

[0087]

[0100] Embodiment 15: The substrate according to embodiment 14, wherein the surface of the substrate is the surface facing the integrated device.

[0088]

[0101] Embodiment 16: A substrate described in embodiments 11 to 15, wherein the plurality of interconnects include pad interconnects, wherein the plurality of surface interconnects include surface pad interconnects, wherein the surface pad interconnects are coupled to the pad interconnects, and wherein a surface of the pad interconnects is planar with the surface of the substrate.

[0089]

[0102] Embodiment 17: A method for fabricating a package. The method includes providing a substrate comprising at least one dielectric layer, a plurality of interconnects comprising a first material, and a plurality of surface interconnects coupled to the plurality of interconnects, wherein the plurality of surface interconnects comprise a second material, and wherein surfaces of the plurality of surface interconnects are planar with a surface of the substrate. The method couples an integrated device to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects.

[0090]

[0103] Embodiment 18: The method of embodiment 17, wherein the plurality of surface interconnects comprises surface pad interconnects that are planar with the surface of the substrate and have a surface facing the integrated device.

[0091]

[0104] Embodiment 19: The method of embodiments 17 to 18, wherein a plurality of surface interconnects are located between the plurality of interconnects and the integrated device.

[0092]

[0105] Embodiment 20: The method of embodiments 17 to 19, wherein the plurality of surface interconnects are free of a seed layer.

[0093]

[0106] Embodiment 21: The method of embodiments 17 to 20, wherein the plurality of surface interconnects comprises tin (Sn).

[0094]

[0107] Embodiment 22: The method of embodiments 17 to 21, wherein the plurality of interconnects include pad interconnects, wherein the plurality of surface interconnects include surface pad interconnects, wherein the surface pad interconnects are coupled to the pad interconnects, and wherein a surface of the pad interconnect facing the integrated device is planar with the surface of the substrate.

[0095]

[0108] Embodiment 23: The method of embodiment 22, wherein the integrated device is coupled to the surface pad interconnects through pillar interconnects and solder interconnects.

[0096]

[0109] Various features of the present disclosure described herein can be implemented in different systems without departing from the present disclosure. It should be noted that the above-described aspects of the present disclosure are merely examples and should not be construed as limiting the present disclosure. The description of the aspects of the present disclosure is illustrative and does not limit the scope of the claims. Thus, the present teachings can be readily applied to other types of devices, and many alternatives, modifications, and variations will be apparent to those skilled in the art. The inventions described in the claims of the present application as originally filed are set forth below. [C1] A package, at least one dielectric layer; a plurality of interconnects comprising a first material; a plurality of surface interconnects coupled to the plurality of interconnects; a substrate comprising: the plurality of surface interconnects comprising a second material; a surface of the plurality of surface interconnects being planar with a surface of the substrate; an integrated device coupled to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects; A package comprising: [C2] The package of C1, wherein the plurality of surface interconnects include surface pad interconnects that are planar with the surface of the substrate and have a surface facing the integrated device. [C3] The package of C1, wherein the plurality of surface interconnects are located between the plurality of interconnects and the integrated device. [C4] The package of C1, wherein the plurality of surface interconnects are free of a seed layer. [C5] The package of C1, wherein the plurality of surface interconnects comprises tin (Sn). [C6] the plurality of interconnects include trace interconnects embedded in the substrate through the surface of the substrate; the trace interconnects are adjacent to a substrate recess from the surface of the substrate; Package as described in C1. [C7] The package of C6, wherein the surface of the substrate is the surface facing the integrated device. [C8] the plurality of interconnects includes pad interconnects; the plurality of surface interconnects include surface pad interconnects; the surface pad interconnect is coupled to the pad interconnect; a surface of the pad interconnect facing the integrated device is planar with the surface of the substrate; Package as described in C1. [C9] The package of C8, wherein the integrated device is coupled to the surface pad interconnects through pillar interconnects and solder interconnects. [C10] the package is incorporated into a device selected from the group consisting of a music player, a video player, an entertainment unit, a navigation device, a communication device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, a computer, a wearable device, a laptop computer, a server, an Internet of Things (IoT) device, and a device in an automotive vehicle; Package as described in C1. [C11] A substrate, at least one dielectric layer; a plurality of interconnects comprising a first material; a plurality of surface interconnects coupled to the plurality of interconnects; Here, the plurality of surface interconnects comprising a second material; a surface of the plurality of surface interconnects being planar with a surface of the substrate; substrate. [C12] The substrate of C11, wherein the plurality of surface interconnects are free of a seed layer. [C13] The substrate of C11, wherein the plurality of surface interconnects comprises tin (Sn). [C14] the plurality of interconnects include trace interconnects embedded in the substrate through the surface of the substrate; the trace interconnects are adjacent to a substrate recess from the surface of the substrate; The substrate described in C11. [C15] The substrate of C14, wherein the surface of the substrate is the surface facing the integrated device. [C16] the plurality of interconnects includes pad interconnects; the plurality of surface interconnects include surface pad interconnects; the surface pad interconnect is coupled to the pad interconnect; a surface of the pad interconnection that is planar with the surface of the substrate; The substrate described in C11. [C17] 1. A method for making a package, comprising: at least one dielectric layer; a plurality of interconnects comprising a first material; a plurality of surface interconnects coupled to the plurality of interconnects; and providing a substrate comprising: the plurality of surface interconnects comprising a second material; a surface of the plurality of surface interconnects being planar with a surface of the substrate; coupling an integrated device to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects; A method comprising: [C18] The method of C17, wherein the plurality of surface interconnects includes surface pad interconnects that are planar with the surface of the substrate and have a surface facing the integrated device. [C19] The method of C17, wherein the plurality of surface interconnects are located between the plurality of interconnects and the integrated device. [C20] The method of C17, wherein the plurality of surface interconnects are free of a seed layer. [C21] The method of claim C17, wherein the plurality of surface interconnects comprises tin (Sn). [C22] the plurality of interconnects includes pad interconnects; the plurality of surface interconnects include surface pad interconnects; the surface pad interconnect is coupled to the pad interconnect; a surface of the pad interconnect facing the integrated device is planar with the surface of the substrate; The method described in C17. [C23] The method of C22, wherein the integrated device is coupled to the surface pad interconnects through pillar interconnects and solder interconnects.

Claims

1. A substrate, at least one dielectric layer; a plurality of interconnects comprising a first material; Here, the plurality of interconnects including via and pad interconnects; the pad interconnect is coupled to the via, and one side of the pad interconnect is in contact with the via; a plurality of surface interconnects coupled to the plurality of interconnects; Here, the plurality of surface interconnects comprising a second material; the plurality of surface interconnects includes surface pad interconnects; the surface pad interconnect is coupled to the pad interconnect, one side of the surface pad interconnect contacting the other side of the pad interconnect; the other side of said surface pad interconnect is planar with the surface of said substrate; the pad interconnect is located between the via and the surface pad interconnect; an integrated device coupled to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects; Equipped with substrate.

2. The substrate of claim 1 , wherein the plurality of surface interconnects are seed layer-free.

3. The substrate of claim 1 , wherein the plurality of surface interconnects comprises tin (Sn).

4. the plurality of interconnects include trace interconnects embedded in the substrate through the surface of the substrate; the trace interconnects are adjacent to a substrate recess from the surface of the substrate; The substrate of claim 1 .

5. The substrate of claim 4 , wherein the surface of the substrate is the surface facing the integrated device.

6. A package, A substrate according to any one of claims 1 to 5; an integrated device coupled to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects; A package comprising:

7. The package of claim 6 , wherein the surface pad interconnect has a surface facing the integrated device that is planar with the surface of the substrate.

8. The package of claim 6 , wherein the plurality of surface interconnects are located between the plurality of interconnects and the integrated device.

9. The package of claim 6 , wherein the integrated device is coupled to the surface pad interconnects through pillar interconnects and solder interconnects.

10. the package is incorporated into a device selected from the group consisting of a music player, a video player, an entertainment unit, a navigation device, a communication device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, a computer, a wearable device, a laptop computer, a server, an Internet of Things (IoT) device, and a device in an automotive vehicle; The package of claim 6.

11. 1. A method for making a package, comprising: at least one dielectric layer; and a plurality of interconnects comprising a first material; the plurality of interconnects including via and pad interconnects; the pad interconnect is coupled to the via, and one side of the pad interconnect is in contact with the via; a plurality of surface interconnects coupled to the plurality of interconnects; and providing a substrate comprising: the plurality of surface interconnects comprising a second material; the plurality of surface interconnects includes surface pad interconnects; the surface pad interconnect is coupled to the pad interconnect, one side of the surface pad interconnect contacting the other side of the pad interconnect; the other side of said surface pad interconnect is planar with the surface of said substrate; the pad interconnect is located between the via and the surface pad interconnect; coupling an integrated device to the plurality of surface interconnects of the substrate through a plurality of pillar interconnects and a plurality of solder interconnects; Equipped with the other side of the surface pad interconnect is a surface facing the integrated device that is planar with the surface of the substrate; method.

12. The method of claim 11 , wherein the plurality of surface interconnects are located between the plurality of interconnects and the integrated device.

13. The method of claim 11 , wherein the plurality of surface interconnects are seed layer-free.

14. The method of claim 11 , wherein the plurality of surface interconnects comprises tin (Sn).

15. The method of claim 11 , wherein the integrated device is coupled to the surface pad interconnects through pillar interconnects and solder interconnects.

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