Wafer-level manufacturing for multiple chip light-emitting devices

Abstract

A light-emitting device, and more specifically, wafer-level manufacturing for a plurality of chip light-emitting devices is disclosed. The light-emitting device includes a specific LED package structure such as an LED chip, a submount, and an electrical connection, which are formed by wafer-level manufacturing before individual light-emitting devices are separated. The method includes bonding an LED wafer on which a plurality of LED chips are formed to a submount wafer including a corresponding metallization pattern, and then separating the individual light-emitting devices. Each light-emitting device includes an array of LED chips already bonded to the submount using electrical connections. The array of LED chips can be electrically coupled in various electrical configurations based on the arrangement of the metallization pattern.

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE

[0001] This disclosure relates to light emitting devices, and more particularly to wafer level manufacturing for multiple chip light emitting devices. [Background technology]

[0002]

[0002] Solid-state light-emitting devices, such as light-emitting diodes (LEDs), are increasingly used in both consumer and commercial applications. Advances in LED technology have resulted in highly efficient, mechanically robust, and long-life light sources. Modern LEDs are therefore enabling a variety of new display applications and are increasingly being used in general lighting applications, often replacing incandescent and fluorescent light sources.

[0003]

[0003] LEDs are solid-state devices that convert electrical energy into light and typically contain one or more active layers (or active regions) of semiconductor material disposed between oppositely doped n-type and p-type layers. When a bias is applied across the doped layers, holes and electrons are injected into the active layer(s), where they recombine to produce light emission, such as visible or ultraviolet light. LED chips typically contain an active region, which may be fabricated from, for example, silicon carbide, gallium nitride, gallium phosphide, indium phosphide, aluminum nitride, gallium arsenide-based materials, and / or organic semiconductor materials.

[0004]

[0004] LED packages have been developed that can provide mechanical support, electrical connections, and encapsulation for LED emitters. Multiple LED chip packages have also been developed that have closely spaced arrays of LED chips within a package. In such applications, there can be challenges in producing high-quality light with desired light emission characteristics while providing a suitable packaging arrangement that allows for multiple LED chips to be placed within a single LED package.

[0005]

[0005] The art continues to seek improved LEDs and solid state light emitting devices with desirable lighting characteristics that can overcome the problems associated with conventional light emitting devices. Summary of the Invention [Means for solving the problem]

[0006]

[0006] The present disclosure relates to light emitting devices, and more particularly to wafer-level manufacturing for multiple chip light emitting devices. Such light emitting devices may include specific light emitting diode (LED) packaging structures, such as LED chips, submounts, and electrical connections, formed by wafer-level manufacturing before the individual light emitting devices are separated. The method includes bonding an LED wafer, on which multiple LED chips are formed, to a submount wafer containing corresponding metallization patterns, and then separating the individual light emitting devices. Each light emitting device includes an array of LED chips already bonded to a submount with electrical connections. The array of LED chips can be electrically coupled in various electrical configurations based on the arrangement of the metallization patterns.

[0007]

[0007] In one aspect, a method includes providing an LED wafer having a plurality of LED chips, each LED chip of the plurality of LED chips having an anode contact and a cathode contact; providing a submount wafer having a first metallization pattern on a front surface of the submount wafer and a second metallization pattern on a back surface of the submount wafer, the second metallization pattern being electrically coupled to the first metallization pattern; bonding the LED wafer to the front surface of the submount wafer so that the anode contact and cathode contact of each LED chip are electrically coupled to the first metallization pattern; and singulating the LED wafer and submount wafer to form a plurality of light emitting devices, each light emitting device of the plurality of light emitting devices comprising a substrate formed from the LED wafer, an array of LED chips from the plurality of LED chips, and a submount formed from the submount wafer. In certain embodiments, the LED wafer comprises a substrate structure subdivided to form individual substrates for the plurality of light emitting devices, and the submount wafer comprises a submount structure subdivided to form individual submounts for the plurality of light emitting devices. In certain embodiments, the substrate structure comprises a sapphire wafer on which a plurality of LED chips are formed. In certain embodiments, the submount structure comprises aluminum oxide or aluminum nitride.

[0008] In a specific embodiment, the first metallization pattern comprises another pair of anode and cathode metal traces bonded to the anode and cathode contacts, respectively, of each LED chip of the plurality of LED chips, and the second metallization pattern comprises a first metal trace forming an anode mounting pad, a second metal trace forming a cathode mounting pad, and a third metal trace forming a portion of the conductive path between the first and second metal traces.

[0009] In certain embodiments, the spacing between adjacent LED chips in the plurality of LED chips is 40 microns (μm) or less. In certain embodiments, the spacing is in the range of 10 μm to 40 μm. In certain embodiments, the plurality of LED chips are subdivided from a common epitaxial LED structure. In certain embodiments, bonding the LED wafer to the front side of the submount wafer comprises thermocompression bonding, eutectic bonding, transient liquid phase bonding, bump bonding, or solder paste bonding to bond the anode and cathode contacts to the first metallization pattern.

[0010] In certain embodiments, bonding the LED wafer to the front side of the submount wafer comprises forming a ceramic bond between the LED wafer and the submount wafer. The method may further comprise forming an underfill material in a gap between the LED wafer and the submount wafer. In certain embodiments, the array of LED chips is electrically coupled in series, parallel, or series-parallel. In certain embodiments, the second metallization pattern comprises a first metal trace pattern configured to electrically couple the array of LED chips for a first light-emitting device of the plurality of light-emitting devices to a first electrical configuration, and a second metal trace pattern configured to electrically couple the array of LED chips for a second light-emitting device of the plurality of light-emitting devices to a second electrical configuration. In certain embodiments, the submount structure comprises a multilayer ceramic structure.

[0011]

[0011] In another aspect, a method includes providing an LED wafer having a plurality of LED chips on a substrate structure; forming a first underfill material on the LED wafer; providing a submount wafer having a first metallization pattern on a front surface of the submount wafer and a second metallization pattern on a back surface of the submount wafer, the second metallization pattern being electrically coupled to the first metallization pattern; bonding the LED wafer to the front surface of the submount wafer so that the plurality of LED chips are electrically coupled to the first metallization pattern; and individualizing the LED wafer and submount wafer to form a plurality of light emitting devices, each light emitting device of the plurality of light emitting devices comprising an array of LED chips of the plurality of LED chips and a submount formed from the submount wafer.

[0012] In certain embodiments, the LED wafer includes a plurality of streets defining boundaries of each LED chip of the plurality of LED chips, and the first underfill material is disposed to fill a portion of the plurality of streets. In certain embodiments, the first underfill material includes a light-reflecting material configured to reflect or redirect light from the plurality of LED chips. In certain embodiments, the first underfill material is formed on the LED wafer after the LED wafer is attached to the submount wafer. In certain embodiments, the first underfill material is formed on the LED wafer before the LED wafer is attached to the submount wafer. The method may further include forming a second underfill material on the submount wafer before the LED wafer is attached to the submount wafer. In certain embodiments, the first underfill material and the second underfill material form a ceramic bond between the LED wafer and the submount wafer. In certain embodiments, the array of LED chips is electrically coupled in series, parallel, or series-parallel.

[0013] In other aspects, any of the foregoing aspects may be combined individually or together, and / or various individual aspects and features described herein to further advantage. Any of the various features and elements disclosed herein may be combined with one or more other disclosed features and elements, unless indicated to the contrary herein.

[0014] Those skilled in the art will appreciate the scope of the present disclosure and realize additional aspects thereof after reading the following detailed description of the preferred embodiments in conjunction with the accompanying drawings.

[0015] The accompanying drawings, which are incorporated in and form a part of this specification, illustrate several aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure. [Brief explanation of the drawings]

[0015] [Figure 1]

[0016] FIG. 1A is a top view of a light emitting diode (LED) wafer with an exploded portion illustrating a view of an LED chip formed on the LED wafer.

[0017] FIG. 1B is a top view of the submount wafer with exploded portions illustrating a view of the first metallization pattern formed on the submount wafer. [Figure 2A]

[0018] 1B is a cross-sectional view of a manufacturing step for forming a plurality of light emitting devices in which the LED wafer of FIG. 1A is positioned for attachment to the submount wafer of FIG. 1B. [Figure 2B]

[0019] 2B is a cross-sectional view of a manufacturing step subsequent to FIG. 2A, in which the LED wafer is bonded to the submount wafer. [Figure 2C]

[0020] 2C is a cross-sectional view of FIG. 2B at a subsequent manufacturing step, in which the light-emitting devices are separated from one another along the vertical dashed lines of FIG. 2B. [Figure 3A]

[0021] 2B is a cross-sectional view of a manufacturing step for forming a plurality of light emitting devices similar to the manufacturing step illustrated in FIG. 2A, further including one or more underfill materials. [Figure 3B]

[0022] 3B is a cross-sectional view of a manufacturing step subsequent to FIG. 3A for forming a plurality of light-emitting devices, similar to the manufacturing step illustrated in FIG. 2B. [Figure 3C]

[0023] 3B for forming a plurality of light-emitting devices, similar to the manufacturing step illustrated in FIG. 2C. [Figure 4A]

[0024] FIG. 1C is a view of a first side of the submount wafer of FIGS. 1B through 3C, with superimposed vertical and horizontal dashed lines forming a grid of 16 different device areas, each device area including four pairs of front metal traces. [Figure 4B]

[0025] 4B is a view of the submount wafer of FIG. 4A from the same orientation as FIG. 4A with the front metal traces removed and the submount structure shown transparent to reveal the back metal traces. [Figure 4C]

[0026] FIG. 4B is a view from a portion of FIG. 4A illustrating four pairs of front metal traces for a single device area. [Figure 4D]

[0027] FIG. 4B is a view from the side illustrating the backside metal traces along with the location of the vias. [Figure 4E]

[0028] 4C is a view of the submount wafer with the image of FIG. 4C with the front metal traces superimposed on the image of FIG. 4D aligned according to the vias. [Figure 4F]

[0029] FIG. 4F illustrates an equivalent circuit of an LED chip that may later be attached to the front metal trace of FIG. 4E. [Figure 5]

[0030] FIG. 5A is a view of a first side of a submount wafer similar to FIG. 4C, in which the location of one or more of the vias relative to each of the front metal traces is different to accommodate parallel coupling as described below.

[0031] FIG. 5B is a back view of the submount wafer from FIG. 5A.

[0032] FIG. 5C is a view of the submount wafer in which the image of FIG. 5A with the front metal traces is overlaid on the image of FIG. 5B aligned according to the vias.

[0033] FIG. 5D illustrates an equivalent circuit of an LED chip that may later be attached to the front metal trace of FIG. 5C. [Figure 6]

[0034] FIG. 6A is a view of a first side of a submount wafer similar to FIG. 4C, in which the location of one or more of the vias for each of the front metal traces is different to accommodate parallel and series configurations.

[0035] FIG. 6B is a backside view of the submount wafer of FIG. 6A.

[0036] FIG. 6C is a view of the submount wafer in which the image of FIG. 6A with the front metal traces is overlaid on the image of FIG. 6B aligned according to the vias.

[0037] FIG. 6D illustrates an equivalent circuit of an LED chip that may later be attached to the front metal trace of FIG. 6C. [Figure 7]

[0038] FIG. 7A is a front view of a portion of a submount wafer similar to the view provided by FIG. 4C, in which the submount wafer includes a multi-layer structure with vias and interconnects for routing conductive paths.

[0039] FIG. 7B is a back view of the submount wafer of FIG. 7A illustrating two backside metal traces that form the anode and cathode mounting pads of a corresponding light emitting device.

[0040] FIG. 7C is a cross-sectional view taken along section line 7C-7C of FIG. 7A.

[0041] FIG. 7D is a cross-sectional view taken along section line 7D-7D of FIG. 7A. DETAILED DESCRIPTION OF THE INVENTION

[0016]

[0042] The embodiments set forth below represent the information necessary to enable one skilled in the art to practice the embodiments and illustrate the best modes for practicing the embodiments. Upon reading the following description in conjunction with the accompanying drawings, one skilled in the art will understand the concepts of the present disclosure and will recognize applications of these concepts not specifically addressed herein. It is to be understood that these concepts and applications are within the scope of this disclosure and the appended claims.

[0017]

[0043] As used herein, terms such as first, second, etc. may be used to describe various elements, but it will be understood that these elements should not be limited by these terms. These terms are used only to distinguish one element from another. For example, a first element could be termed a second element, and similarly, a second element could be termed a first element, without departing from the scope of the present disclosure. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0018]

[0044] When an element, such as a layer, region, or substrate, is referred to as being "on" or extending "over" another element, it will be understood that the element can be directly on or extending directly above the other element, or there may be intervening elements. In contrast, when an element is referred to as being "directly on" or extending "directly above" another element, there are no intervening elements. Similarly, when an element, such as a layer, region, or substrate, is referred to as being "above" or extending "over" another element, it will be understood that the element can be directly on or extending directly above the other element, or there may be intervening elements. In contrast, when an element is referred to as being "directly on" or extending "directly above" another element, there are no intervening elements. Also, when an element is referred to as being "connected" or "coupled" to another element, it will be understood that the element can be directly connected or coupled to the other element, or there may be intervening elements. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present.

[0019]

[0045] Relative terms such as "bottom" or "top" or "upper" or "below" or "horizontal" or "vertical" may be used herein to describe the relationship of one element, layer, or region to another element, layer, or region, as illustrated in the figures. It will be understood that these terms, and those discussed above, are intended to encompass different orientations of the device in addition to the orientation shown in the figures.

[0020]

[0046] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the disclosure. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly dictates otherwise. Furthermore, it will be understood that the terms "comprises," "comprising," "including," and / or "comprising," as used herein, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0021]

[0047] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. Furthermore, terms used herein should be interpreted as having a meaning consistent with the meaning in the context of the present specification and related art, and will not be interpreted in an idealized or overly formal sense unless explicitly defined herein.

[0022]

[0048] Embodiments are described herein with reference to schematic diagrams of embodiments of the present disclosure. Accordingly, actual dimensions of layers and elements may vary, and variations from the shapes of the figures are expected, for example, as a result of manufacturing techniques and / or tolerances. For example, regions illustrated or described as square or rectangular may have rounded or curved features, and regions illustrated as straight lines may have slight irregularities. Accordingly, regions illustrated in the figures are schematic, and the shapes of those regions are not intended to illustrate the exact shape of a region of a device or to limit the scope of the disclosure. Additionally, the size of structures or regions may be exaggerated relative to other structures or regions for illustrative purposes and, therefore, are provided to illustrate the general structure of the inventive subject matter and may or may not be drawn to scale. Elements common between figures may be identified herein with common element numbers and may not be described again later.

[0023]

[0049] The present disclosure relates to light-emitting devices, and more particularly to wafer-level manufacturing for multiple-chip light-emitting devices. Such light-emitting devices may include specific LED packaging structures, such as light-emitting diode (LED) chips, submounts, and electrical connections, formed by wafer-level manufacturing before the individual light-emitting devices are separated. The method involves bonding an LED wafer on which multiple LED chips are formed to a submount wafer containing corresponding metallization patterns, and then separating the individual light-emitting devices. Each light-emitting device includes an array of LED chips already bonded to a submount with electrical connections. The array of LED chips can be electrically coupled in various electrical configurations based on the arrangement of the metallization patterns.

[0024]

[0050] The light emitting devices disclosed herein may include multiple LED chips with specific LED packaging structures, such as submounts and electrical connections, that are bonded together by wafer-level manufacturing. By bonding multiple LED chips to a submount, including electrical connections, at the wafer level, groups of individual LED chips already bonded to the submount with electrical connections can be individually separated to form multiple LED chip light emitting devices.

[0025]

[0051] Before delving into the specific details of various aspects of the present disclosure, an overview of the various elements that may be included in exemplary light-emitting devices of the present disclosure is provided for context. LED chips typically include an active LED structure or region that may have many different semiconductor layers arranged in many different ways. The fabrication and operation of LEDs and their active structures are generally known in the art and will be briefly discussed herein. The layers of the active LED structure can be fabricated using known processes, with metal-organic chemical vapor deposition being a suitable process. The layers of the active LED structure typically include many different layers and may generally include an active layer sandwiched between n-type and p-type oppositely doped epitaxial layers, all formed sequentially on a growth substrate. It is understood that additional layers and elements may also be included in the active LED structure, including, but not limited to, buffer layers, nucleation layers, superlattice structures, undoped layers, cladding layers, contact layers, current spreading layers, light extraction layers and elements, etc. The active layer may include a single quantum well, multiple quantum wells, a double heterostructure, or a superlattice structure.

[0026]

[0052] The active LED structure can be fabricated from different material systems, some of which are III-nitride-based. III-nitrides refer to semiconductor compounds formed between nitrogen (N) and elements from group III of the periodic table, usually aluminum (Al), gallium (Ga), and indium (In). Gallium nitride (GaN) is a common binary compound. III-nitrides also refer to ternary and quaternary compounds such as aluminum gallium nitride (AlGaN), indium gallium nitride (InGaN), and aluminum indium gallium nitride (AlInGaN). For III-nitrides, silicon (Si) is a common n-type dopant, and magnesium (Mg) is a common p-type dopant. Thus, the active, n-type, and p-type layers may include one or more layers of GaN, AlGaN, InGaN, and AlInGaN, undoped or doped with Si or Mg, in III-nitride-based material systems. Other material systems include silicon carbide (SiC), organic semiconductor materials, and other III-V systems such as gallium phosphide (GaP), gallium arsenide (GaAs), and related compounds.

[0027]

[0053] The active LED structure may be grown on a growth substrate, which can include many materials, such as sapphire, SiC, aluminum nitride (AlN), GaN, GaAs, glass, or silicon. SiC offers certain advantages, such as a closer crystal lattice match with III-nitrides than other substrates, resulting in high-quality III-nitride films. SiC also has very high thermal conductivity, so the total output power of III-nitride devices on SiC is not limited by the heat dissipation of the substrate. Sapphire is another common substrate for III-nitrides and also offers certain advantages, such as low cost, an established manufacturing process, and excellent optical properties with excellent light transmission.

[0028]

[0054] Different embodiments of the active LED structure may emit light of different wavelengths depending on the composition of the active layer, n-type layer, and p-type layer. In certain embodiments, the active LED structure may emit blue light with a peak wavelength range of approximately 430 nanometers (nm) to 480 nm. In other embodiments, the active LED structure may emit green light with a peak wavelength range of 500 nm to 570 nm. In other embodiments, the active LED structure may emit red light with a peak wavelength range of 600 nm to 650 nm. In certain embodiments, the active LED structure may emit light having a peak wavelength in any region of the visible spectrum, for example, primarily in the range of 400 nm to 700 nm.

[0029]

[0055] In certain embodiments, the active LED structure may be configured to emit light outside the visible spectrum, including one or more portions of the ultraviolet (UV), infrared (IR), or near-IR spectrum. The UV spectrum is typically divided into three wavelength range categories, designated by the letters A, B, and C. Thus, UV-A light is typically defined as a peak wavelength range of 315 nm to 400 nm, UV-B is typically defined as a peak wavelength range of 280 nm to 315 nm, and UV-C is typically defined as a peak wavelength range of 100 nm to 280 nm. UV LEDs are particularly important for use in applications related to disinfection of microorganisms, such as in air, water, and surfaces. In other applications, UV LEDs may be provided with one or more luminescent materials to provide an LED package with aggregate emission having a broad spectrum and improved color quality for visible light applications. The near-IR and / or IR wavelengths of the LED structures of the present disclosure can have wavelengths greater than 700 nm, such as in the range of 750 nm to 1100 nm or greater.

[0030]

[0056] The LED chip may also be coated with one or more luminescent or other conversion materials, such as phosphors, so that at least a portion of the light from the LED chip is absorbed by the one or more phosphors and converted to one or more different wavelength spectra according to the characteristic emissions from the one or more phosphors. In some embodiments, the combination of the LED chip and one or more phosphors emits a combination of approximately white light. The one or more phosphors may be yellow (e.g., YAG:Ce), green (e.g., LuAg:Ce), and red (e.g., Ca i-x-y Sr x EU y The luminescent material may include one or more of the following: a phosphor, a scintillator, a luminescent ink, a quantum dot material, a day glow tape, and the like. The luminescent material may be provided by any suitable means, such as, for example, a coating directly on one or more surfaces of the LED, a dispersion in an encapsulant configured to cover one or more LEDs, and / or a coating (e.g., by powder coating, inkjet printing, etc.) on one or more optical or support elements. In certain embodiments, the luminescent material may be downconverted or upconverted, or a combination of both downconverting and upconverting materials may be provided. In certain embodiments, multiple different (e.g., different composition) luminescent materials arranged to produce different peak wavelengths may be arranged to receive the emitted light from one or more LED chips. In some embodiments, the one or more phosphors may be a yellow phosphor (e.g., YAG:Ce), a green phosphor (e.g., LuAg:Ce), and a red phosphor (e.g., Ca i-x-y Sr x EU y AlSiN3), and combinations thereof. One or more luminescent materials may be provided on one or more portions of the LED chip and / or submount in a variety of configurations.

[0031]

[0057] As used herein, a layer or region of a light-emitting device may be considered “transparent” if at least 80% of the light emitted that strikes the layer or region passes through the layer or region and emerges. Additionally, as used herein, a layer or region of an LED may be considered “reflective” or embody a “mirror” or “reflector” if at least 80% of the light emitted that strikes the layer or region is reflected. In some embodiments, the light emitted comprises visible light, such as blue and / or green LEDs, with or without a light-emitting material. In other embodiments, the light emitted may comprise non-visible light. For example, in the case of GaN-based blue and / or green LEDs, silver (Ag) may be considered a reflective material (e.g., at least 80% reflective). In the case of UV LEDs, appropriate materials may be selected to achieve high reflectivity in some desired embodiments and / or low absorption in some desired embodiments. In certain embodiments, a “light-transmitting” material may be configured to transmit at least 50% of the light emitted at a desired wavelength.

[0032]

[0058] The present invention can be useful for LED chips having various shapes, including flip-chip shapes. Flip-chip LED chip configurations typically include anode and cathode connections made from the same side or surface of the LED chip. The anode and cathode sides are typically configured as mounting surfaces of the LED chip for flip-chip mounting to another surface, such as a printed circuit board. In this regard, the anode and cathode connections on the mounting surface serve to mechanically attach and electrically couple the LED chip to the other surface. In flip-chip mounting, the opposite side or surface of the LED chip corresponds to the light-emitting surface, which faces the intended direction of light emission. In certain embodiments, the growth substrate of the LED chip can form and / or be adjacent to the light-emitting surface during flip-chip mounting. During chip fabrication, the active LED structure may be epitaxially grown on the growth substrate.

[0033]

[0059] An LED package may include one or more elements, such as a light-emitting material, an encapsulant, a light-modifying material, a lens, and electrical contacts, along with one or more LED chips. In certain embodiments, the LED package may also include a support member, such as a submount. Suitable materials for the submount include, but are not limited to, ceramic materials such as aluminum oxide, alumina, or AlN, or organic insulators such as polyimide (PI) or polyphthalamide (PPA). In other embodiments, the submount may comprise a printed circuit board (PCB), sapphire, Si, or any other suitable material. In PCB embodiments, different PCB types may be used, such as standard FR-4 PCBs, metal-core PCBs, or any other type of PCB. Metal trace patterns may be provided on one or more sides of the submount to receive and / or electrically connect one or more LED chips. An encapsulant may be formed over the LED chips on the submount to protect the underlying LED package elements and / or shape the emitted light from the LED package. The encapsulant may include a material that is optically transparent and / or optically transparent to the wavelengths provided by the underlying LED chip and / or light-emitting material. Suitable encapsulating materials include silicone, plastic, epoxy, or glass. In certain aspects, the encapsulating material may include a lens shape to control light emission.

[0034]

[0060] According to aspects of the present disclosure, a light-emitting device may include multiple LED chips with specific LED packaging structures, such as submounts and electrical connections, bonded together using wafer-level fabrication. Bonding multiple LED chips using submounts with wafer-level electrical connections allows groups of individual LED chips already bonded to submounts with electrical connections to be individually separated to form multiple LED chip light-emitting devices. Wafer-level fabrication may include bonding an LED wafer to a submount wafer before the various light-emitting devices are singulated. As used herein, an LED wafer may include a growth substrate blanket-deposited with epitaxial LED structures. Individual LED chips along the growth substrate may be formed by post-epitaxy fabrication, which may include removing portions of the epitaxial LED structures along streets to define the boundaries of the LED chips. The LED wafer may include other post-epitaxy fabrication, such as forming reflective structures, electrical contacts for the anode and cathode of each LED chip, and / or passivation layers. As used herein, a submount wafer may comprise a ceramic material such as aluminum oxide or alumina, AlN, or an organic insulator such as PI or PPA, or PCB, sapphire, Si, or any other suitable material. As described in more detail below, one or more sides of the submount may be provided with a metal trace pattern to receive and / or electrically connect to one or more LED chips of the LED wafer.

[0035]

[0061] For multi-chip applications, wafer-level manufacturing offers various advantages, including avoiding complex pick-and-place steps for individual LED chips, where each LED chip is prepared for a separate die attach step. In multi-chip applications, increasing the number of separate die attach steps can increase the risk of failures and / or electrical shorts associated with variations in bond strength and / or chip alignment. Wafer-level bonding allows multiple LED chips to be simultaneously bonded to electrical connections on a submount wafer while the spacing between adjacent LED chips is fixed by the LED wafer. According to aspects of the present disclosure, spacing between adjacent LED chips in a multi-chip light-emitting device can be provided after wafer-level manufacturing to 40 microns (μm) or less, or in a range of 10 μm to 40 μm, or in a range of 20 μm to 40 μm, or in a range of 20 μm to 30 μm. At the wafer level, multiple LED chips can be defined from a common epitaxial structure by forming streets between them. In this manner, each LED chip forms a mesa along the LED wafer, and the spacing values ​​noted above are measured from the edge of the mesa to the edge of the mesa of an adjacent LED chip. Such close spacing can be important in multiple-chip light-emitting devices, where multiple LED chips are arranged to collectively provide a single light-emitting surface or the appearance of a single LED chip. In certain embodiments, the substrate on which the LED chips are formed is continuous, thereby also enhancing the appearance of a single LED chip. For example, in flip-chip embodiments where light emission exits through the substrate, having a continuous substrate with no gaps between the LED chips can provide the appearance of a single light-emitting surface. It should be understood that the principles described herein are also applicable to applications where there is a large spacing between LED chips.

[0036]

[0062] Another advantage of wafer-level manufacturing is that it eliminates the need to sort individual LED chips according to brightness, wavelength, and / or turn-on voltage before assembling them into a common device. With wafer-level manufacturing, adjacent LED chips are formed from the same region of a common epitaxial LED structure, eliminating the need for individual sorting by brightness, wavelength, and / or turn-on voltage. Yet another advantage of wafer-level manufacturing is that multiple LED chips can be electrically connected in different configurations simply by providing different patterns of metal traces on the submount wafer. For example, a submount wafer may include patterns that electrically couple multiple LED chips in series, parallel, series-parallel, and individually addressable configurations. Wafer-level manufacturing, in particular, provides such flexible electrical connections in combination with the close spacing of the LED chips described above. In certain embodiments, a monolithic high-voltage chip can be formed by connecting multiple LED chips in a series or series-parallel configuration, thereby increasing the operating voltage, reducing the voltage drop required for electrical drive, and improving overall system efficiency.

[0037]

[0063] FIG. 1A is a top view of an LED wafer 10 with an exploded view illustrating a view of LED chips 12 formed on the LED wafer 10. The LED wafer 10 includes a wafer-shaped substrate structure 14. In FIG. 1A, the wafer shape is circular; in other embodiments, the wafer shape may be square or rectangular. The substrate structure 14 may embody a growth wafer, such as sapphire, SiC, AlN, or GaN, on which an epitaxial LED structure, as described above, may be deposited. Various fabrication steps may define the LED chips 12 from the epitaxial LED structure, including the formation of one or more reflective layers, passivation layers, anode contacts 16, and cathode contacts 18 for each LED chip 12. Streets 20 are formed to define the boundaries of each LED chip 12. The streets 20 may embody areas where the epitaxial LED structure is removed from the substrate structure 14. In this manner, the streets 20 define the spacing between adjacent LED chips 12. As explained above, in certain embodiments, such spacing may be 40 μm or less, or in the range of 10 μm to 40 μm, or in the range of 20 μm to 40 μm, or in the range of 20 μm to 30 μm.

[0038]

[0064] FIG. 1B is a top view of submount wafer 22 with an exploded portion illustrating a view of a first, or front, metallization pattern formed on submount wafer 22. Submount wafer 22 includes wafer-shaped submount structures 24. In certain embodiments, the wafer shape of submount structures 24 corresponds to the wafer shape of substrate structure 14 of FIG. 1A. Submount structures 24 can comprise any of the materials described above and, when separated, can form precursor structures that provide individual submounts for multiple light emitting devices. The first metallization pattern includes a repeating pattern of pairs of first and second metal traces 26-1 and 26-2. Each pair of first and second metal traces 26-1 and 26-2 is formed in a shape corresponding to anode contact 16 and cathode contact 18 of FIG. 1A. In this manner, when the side of the LED wafer 10, seen in FIG. 1A, is attached to the side of the submount wafer 22, seen in FIG. 1B, each anode contact 16 can be mechanically bonded and electrically coupled to a corresponding first metal trace 26-1. Similarly, each cathode contact 18 can be mechanically bonded and electrically coupled to a corresponding second metal trace 26-2. As will be described in more detail below, one or more vias 28 can be positioned to provide a conductive path through the submount structure 24 to a second metallization pattern on the opposite, or backside, side of the submount wafer 22.

[0039]

[0065] 2A is a cross-sectional view of a manufacturing step for forming a plurality of light-emitting devices 30, with the LED wafer 10 of FIG. 1A positioned to be attached to the submount wafer 22 of FIG. 1B. For illustrative purposes, the diagram provided in FIG. 2A shows only four LED chips 12 with corresponding streets 20, and the superimposed vertical dashed lines 32 indicate the locations where the individual light-emitting devices 30 will later be separated. In practice, the number of individual light-emitting devices 30 formed may be much greater, with each individual light-emitting device 30 including two or more LED chips 12. A wafer aligner can be applied to properly position the LED wafer 10 relative to the submount wafer 22, aligning the anode contact 16 with the first metal trace 26-1 and the cathode contact 18 with the second metal trace 26-2.

[0040]

[0066] As illustrated in FIG. 2A , separate vias 28 may be disposed to electrically couple each of the first metal traces 26-1 and second metal traces 26-2 of the first metallization pattern on the first side 22′, or front side, of the submount wafer 22 to a second metallization pattern on the second side 22″, or back side, of the submount wafer 22. The first metal traces 26-1 and second metal traces 26-2 are also referred to herein as front metal traces 26-1, 26-2. The second metallization pattern may include back metal traces 34-1, 34-2, and 34-3 configured to provide various electrical connections between the LED chips 12. 2A , the first metal trace 26-1 and the second metal trace 26-2 associated with the leftmost LED chip 12 are coupled to the back metal traces 34-1 and 34-2, respectively, and the back metal trace 34-2 is also electrically coupled to the first metal trace 26-1 associated with the next adjacent LED chip 12. Finally, the second metal trace 26-2 associated with the adjacent LED chip 12 is electrically coupled to the back metal trace 34-3. In this manner, the LED chips 12 of each light-emitting device 30 are electrically coupled in series based on the arrangement of the submount wafer 22.

[0041]

[0067] 2B is a cross-sectional view of a manufacturing step subsequent to FIG. 2A , in which the LED wafer 10 is bonded to a submount wafer 22. As illustrated, pairs of corresponding anode and cathode contacts 16 and 18 are bonded to pairs of corresponding front metal traces 26-1, 26-2. Such wafer bonding can be provided by a variety of techniques that mechanically and electrically bond the metal of each anode contact 16 and each cathode contact 18 to the metal of the corresponding front metal traces 26-1, 26-2. For example, bonding may include thermocompression bonding of a particular same metal, such as gold (Au), copper (Cu), or aluminum (Al), present at the interface formed between the anode or cathode contact 16 or 18 and the corresponding front metal trace 26-1, 26-2. Other bonding may include die attach metal stacks formed at the interface, such as eutectic metal stacks such as gold-tin (Au-Sn), gold-silicon (Au-Si), gold-germanium (Au-Ge), aluminum-germanium (Al-Ge), or gold-indium (Au-In). Still other bonding may include transient liquid phase bonding, such as with copper-tin (Cu-Sn), Au-In, or silver-tin (Ag-Sn). Additional bonding may include bump bonding, either with a pattern of solder bumps or with solder paste bonding.

[0042]

[0068] FIG. 2C is a cross-sectional view of FIG. 2B at a next manufacturing step, in which the light-emitting devices 30 are separated from one another along the vertical dashed lines 32 in FIG. 2B. Separation can be accomplished by wafer dicing or singulation, such as mechanical sawing or laser dicing. After separation, each light-emitting device 30 includes a substrate 14' separated from the substrate structure 14 of FIG. 2B and a submount 24' separated from the submount structure 24 of FIG. 2B. Each light-emitting device 30 may embody multiple chip devices in which an array of LED chips 12 is closely spaced and formed from a common region of an epitaxial LED structure. Spacing may be determined by the street 20, as previously described. The light-emitting devices 30 may be suitable for placement within an LED package or a larger LED lighting system. In certain embodiments, the substrate 14' may comprise a material, such as sapphire, that is optically transparent or optically transparent to the wavelengths generated by the LED chips 12. In other embodiments, the substrate 14' may not be required. For example, the substrate structure 14 of FIG. 2B may be removed after bonding to the submount wafer 22, and the light emitting device 30 of FIG. 2C may not include the substrate 14'.

[0043]

[0069] After singulation, the back metal traces 34-1, 34-3 of each light emitting device 30 form anode and cathode mounting pads for attachment to external electrical connections, and the other back metal trace 34-2 forms part of the conductive path between them. For example, the conductive path between the back metal traces 34-1, 34-3 runs through the submount 24' via the via 28, through the left LED chip 12, back through the submount 24' to the back metal trace 34-2, back through the submount 24' to the next LED chip 12, and finally back through the submount 24' to the back metal trace 34-3.

[0044]

[0070] 3A-3C illustrate cross-sectional views of manufacturing steps for forming a plurality of light-emitting devices 36 similar to light-emitting device 30 of FIGS. 2A-2C and further including one or more underfill materials 38-1, 38-2. As such, the descriptions of the manufacturing steps of FIGS. 2A-2C, along with the further details provided below, can be readily adapted for the manufacturing steps of FIGS. 3A-3C.

[0045]

[0071] FIG. 3A is a cross-sectional view of a manufacturing step for forming a plurality of light-emitting devices 36, similar to the manufacturing step illustrated in FIG. 2A. In FIG. 3A, a first underfill material 38-1 is formed on the LED wafer 10 to fill the streets 20 and other topographical variations associated with the LED chips 12, the anode contacts 16, and / or the cathode contacts 18. The first underfill material 38-1 may first be formed to completely cover the LED chips 12, the anode contacts 16, and the cathode contacts 18 before applying a removal step to expose the surfaces of the anode contacts 16 and the cathode contacts 18. The removal step may include grinding and / or polishing the first underfill material 38-1 to effectively planarize the anode contacts 16 and the cathode contacts 18. In certain embodiments, the first underfill material 38-1 may be flush with the exposed surfaces of the anode contacts 16 and the cathode contacts 18. The first underfill material 38-1 may include a light-modifying and / or light-reflecting material configured to redirect light propagating downward from the LED chip 12 to enhance brightness. In certain embodiments, the first underfill material 38-1 may be formed by painting, dispensing with partial or full curing, spin-coating, or the like. The first underfill material 38-1 may include a ceramic material that enhances bonding, such as a ceramic paste, a spin-on dielectric, and / or a sol-gel reaction (e.g., an inorganic colloidal suspension and gelation in a continuous liquid phase). The second underfill material 38-2 may be formed on the submount wafer 22 in a similar manner and with similar materials as the first underfill material 38-1. In this manner, the second underfill material 38-2 may cover topographical variations associated with the front metal traces 26-1, 26-2, or other features that may be present on the first side 22′. In other embodiments, the second underfill material 38-2 may be omitted.

[0046]

[0072] FIG. 3B is a cross-sectional view of a manufacturing step subsequent to FIG. 3A for forming a plurality of light-emitting devices 36, similar to the manufacturing step illustrated in FIG. 2B. Thus, as described above, the LED wafer 10 is bonded to the submount wafer 22. As illustrated, the presence of the first underfill material 38-1 and the second underfill material 38-2 can effectively fill the gap between the submount wafer 22 and the LED wafer 10. In this manner, an improved thermal contact area can be provided. As described above, in embodiments in which the first underfill material 38-1 and the second underfill material 38-2 comprise ceramic materials, the ceramic materials can form ceramic bonds therebetween that enhance the thermal conductivity and improve the mechanical integrity of the light-emitting devices 36. In certain embodiments, the first underfill material 38-1 and the second underfill material 38-2 may not be formed prior to wafer bonding. Rather, the first underfill material 38-1 and the second underfill material 38-2 may be applied to fill the space between the LED wafer 10 and the submount wafer 22 after bonding. For example, the underfill materials 38-1, 38-2 may be applied with an appropriate viscosity to effectively wick and fill the space between the LED wafer 10 and the submount wafer 22 before curing. In such an embodiment, the first underfill material 38-1 and the second underfill material 38-2 may embody a single continuous layer.

[0047]

[0073] 3C is a cross-sectional view of a manufacturing step subsequent to that shown in FIG. 3B for forming a plurality of light emitting devices 36, similar to the manufacturing step illustrated in FIG. 2C. In this regard, individual light emitting devices 36 may be formed with first and second underfill materials 38-1, 38-2 formed between substrate 14′ and submount 24′. As with FIG. 2C, substrate 14′ may be optional in certain embodiments.

[0048]

[0074] The configurations of front and back metal traces on the submount wafer described above may be suitable for providing different electrical arrangements of wafer-bonded LED chips. The principles described can be applied to multiple-chip light-emitting devices with electrical configurations of LED chips bonded in series, parallel, combinations of series and parallel, and individually addressable configurations. In certain embodiments, the submount wafer is formed with different patterns of back metal traces in different locations, so that after wafer bonding with the LED wafer and subsequent singulation, some light-emitting devices may be formed with a first electrical configuration and other light-emitting devices from the same LED wafer may be formed with a second electrical configuration that differs from the first electrical configuration. Thus, many different types of light-emitting devices can be simultaneously fabricated simply by providing various back metallization patterns along the submount wafer.

[0049]

[0075] 4A and 4B illustrate a larger portion of the submount wafer 22 described above with respect to FIGS. 1B through 3C, which provides series connections between the LED chips of corresponding light-emitting devices. FIG. 4A is a view of a first side 22′ of the submount wafer 22, with superimposed vertical and horizontal dashed lines 32 forming a grid of 16 different device areas, each including four pairs of front metal traces 26-1, 26-2. As explained above, the front metal traces 26-1, 26-2 are configured to bond to the anode and cathode contacts 16, 18 of the LED chip 12, as illustrated, for example, in FIGS. 2A through 2C. For illustrative purposes, FIG. 4B is a view of the submount wafer 22 from the same orientation as FIG. 4A, except that the front metal traces 26-1, 26-2 have been removed, and the submount structure 24 is illustrated transparently. The location of the vias 28 remains as illustrated. In this way, the positions of the back metal traces 34-1 to 34-5 are provided aligned corresponding to Figure 4A, and therefore the illustration of Figure 4A can be superimposed on the illustration of Figure 4B without rotation.

[0050]

[0076] Figures 4C through 4E illustrate a portion of the submount wafer 22 from one of the device regions of Figures 4A and 4B. Figure 4C is a view of a portion of Figure 4A, illustrating four pairs of front metal traces 26-1, 26-2 for a single device region. In this manner, four LED chips can be flip-chip mounted to the pairs of front metal traces 26-1, 26-2. Figure 4D is a view from portion 4B, illustrating the back metal traces 34-1 through 34-5, along with the location of the vias 28. The back metal traces 34-1, 34-5 form anode and cathode mounting pads for attachment to external electrical connections, while the other back metal traces 34-2, 34-3, and 34-4 form part of the interconnection paths between them. To accommodate various interconnection paths, certain of the back metal traces (e.g., 34-2, 34-3, 34-5) intended to electrically couple different LED chips together may have different shapes, such as wide (e.g., 34-2), non-linear (e.g., 34-3), and / or elongated (e.g., 34-4). Although the portion of submount structure 24 in Figure 4C is illustrated as a square, other shapes, such as a rectangle, can be provided by adjusting the position of the separation line corresponding to dashed line 32 in Figures 4A and 4B.

[0051]

[0077] FIG. 4E is a diagram of the submount wafer 22 in which the image of FIG. 4C with the front metal traces 26-1, 26-2 is superimposed on the image of FIG. 4D aligned according to the vias 28. The vias 28 define the locations where particular ones of the front metal traces 26-1, 26-2 are electrically coupled to corresponding ones of the back metal traces 34-1 through 34-5 through the submount structure 24. FIG. 4F illustrates an equivalent circuit 40 of LED chips 12 that may later be attached to the front metal traces 26-1, 26-2 on the first side 22′. As illustrated, the arrangement of the vias 28 and back metal traces 34-1 through 34-5 provides a series arrangement of LED chips applicable for high-voltage applications.

[0052]

[0078] FIGS. 5A-5D illustrate additional configurations of the submount wafer 22 of FIGS. 4A-4D that provide parallel connections for corresponding light-emitting devices. FIG. 5A is a view of a first side 22′ of the submount wafer 22 similar to FIG. 4C, but with a different location of one or more vias 28 relative to each of the front metal traces 26-1, 26-2 to accommodate parallel coupling, as described below. FIG. 5B is a view of the back side 22″ of the submount wafer 22 from FIG. 5A. As illustrated, only two back metal traces 34-1, 34-2 are positioned relative to the vias 28, with the back metal trace 34-1 forming the anode mounting pad and the back metal trace 34-2 forming the cathode mounting pad. FIG. 5C is a view of the submount wafer 22 in which the image of FIG. 5A with the front metal traces 26-1, 26-2 aligned according to the vias 28 is superimposed on the image of FIG. 5B. The vias 28 define locations where particular ones of the front metal traces 26-1, 26-2 are electrically coupled to corresponding ones of the back metal traces 34-1, 34-2 through the submount structure 24. As illustrated, each front metal trace 26-1 is electrically coupled to the back metal trace 34-1, and each front metal trace 26-2 is electrically coupled to the back metal trace 34-2. FIG. 5D illustrates an equivalent circuit 42 of an LED chip 12 that may later be attached to the front metal traces 26-1, 26-2 on the first side 22′. As illustrated, the arrangement of the vias 28 and the back metal traces 34-1, 34-2 provides a parallel arrangement for the LED chips 12. In certain embodiments, a single submount wafer 22 may include one or more regions configured to provide parallel connections for light-emitting devices, as illustrated in FIGS. 5A through 5D, and one or more other regions configured to provide series connections for light-emitting devices, as illustrated in FIGS. 4A through 4F.

[0053]

[0079] Figures 6A through 6D illustrate another additional configuration of the submount wafer 22 of Figures 4A through 4D that provides parallel and series connections for corresponding light emitting devices. Figure 6A is a view of the first side 22' of the submount wafer 22 similar to Figure 4C, but with a different location of one or more vias 28 relative to each of the front metal traces 26-1, 26-2 to accommodate parallel and series coupling, as described below. FIG. 6B is a view of the backside 22″ of the submount wafer 22 from FIG. 6A. As illustrated, only three backside metal traces 34-1 to 34-3 are positioned relative to the vias 28, with the backside metal traces 34-1, 34-3 forming the anode and cathode mounting pads and the backside metal trace 34-2 forming part of the electrical interconnection therebetween. FIG. 6C is a view of the submount wafer 22 in which the image of FIG. 6A with the frontside metal traces 26-1, 26-2 is superimposed on the image of FIG. 6B aligned according to the vias 28. The vias 28 define the locations where a particular frontside metal trace of the frontside metal traces 26-1, 26-2 is electrically coupled, via the submount structure 24, to a corresponding backside metal trace of the backside metal traces 34-1 to 34-3. FIG. 6D is a view of the first side 22″ of the submount wafer 22. 6A-6D , and one or more other regions configured to provide a series connection for light-emitting devices, as illustrated in FIGS. 4A-4F . In yet further embodiments, a single submount wafer 22 can include different regions according to each of FIGS. 4A-4F , 5A-5D , and 6A-6D .

[0054]

[0080] 7A-7D illustrate alternative configurations for the submount wafer 46, including a multi-layer structure with vias and interconnects that route conductive paths between the front metal traces 26-1, 26-2 and the back metal traces 34-1, 34-2. The multi-layer configuration for the submount structure 24 may include multiple sub-layers 48-1 to 48-3, which provide increased flexibility in routing the electrical connections. In certain embodiments, the sub-layers 48-1 to 48-3 may include a laminate structure with vias 28 and interconnects 50 formed therein. The laminate structure may include a multi-layer ceramic structure, such as a multi-layer printed circuit board.

[0055]

[0081] FIG. 7A is a front view of a portion of a submount wafer 46 similar to the view provided by FIG. 4C. Thus, four pairs of front metal traces 26-1, 26-2 are illustrated for a single device area. However, as with the previous embodiment, any number of pairs of front metal traces 26-1, 26-2 can be provided, depending on the number of LED chips intended for each light-emitting device. FIG. 7B is a back view of the submount wafer 46 of FIG. 7A, illustrating two back metal traces 34-1, 34-2 that form the anode and cathode mounting pads for the corresponding light-emitting devices. While there are only two back metal traces 34-1, 34-2, the multi-layer configuration of the submount structure 24 allows for any number of series, parallel, and series-parallel configurations. FIG. 7C is a cross-sectional view along section line 7C-7C in FIG. 7A, and FIG. 7D is a cross-sectional view along section line 7D-7D in FIG. 7A. As illustrated, the front traces 26-1, 26-2 may be formed on sublayer 48-1, with multiple vias 28 extending from each of the front traces 26-1, 26-2 across the sublayer 48-1. The interconnects 50 may be disposed in the next sublayer 48-2, which redirects the conductive path horizontally within the submount structure 24. In the cross-section of Figure 7C, another via 28 is disposed in the next sublayer 48-3, providing a conductive path to the back metal trace 34-1. The conductive path to the other back metal trace 34-2 may also be disposed in other locations outside the cross-sections of Figures 7C and 7D.

[0056]

[0082] As explained above, the multi-layer structure may provide increased design flexibility for the submount wafer 46. For example, the backside metal traces 34-1, 34-2 may form a single anode and a single cathode with a pattern that is not necessarily associated with each location of the vias 28, as illustrated in FIG. 7B . Thus, other areas of the backside are open to include other features, such as neutral thermal pads for heat dissipation. In further embodiments, the multi-layer structure allows for additional anode and cathode contacts, enabling the provision of individual addressing for the LED chips. Light-emitting devices of various shapes, such as squares and rectangles, can be formed from submount wafers with multi-layer structures.

[0057]

[0083] It is contemplated that any of the foregoing aspects and / or various individual aspects and features described herein may be combined to further advantage. Any of the various embodiments disclosed herein may be combined with one or more of the other disclosed embodiments, unless indicated to the contrary herein.

[0058]

[0084] Those skilled in the art will recognize improvements and modifications to the preferred embodiments of the present disclosure, and all such improvements and modifications are considered to be within the scope of the concepts disclosed herein and the appended claims.

Claims

1. providing an LED wafer comprising a plurality of light emitting diode (LED) chips, each LED chip of the plurality of LED chips comprising an anode contact and a cathode contact; providing a submount wafer with a first metallization pattern on a front side of the submount wafer and a second metallization pattern on a back side of the submount wafer, the second metallization pattern being electrically coupled to the first metallization pattern; bonding the LED wafer to the front side of the submount wafer such that the anode contact and the cathode contact of each LED chip are electrically coupled to the first metallization pattern; singulating the LED wafer and the submount wafer to form a plurality of light emitting devices, each light emitting device of the plurality of light emitting devices comprising a substrate formed from the LED wafer, an array of LED chips from the plurality of LED chips, and a submount formed from the submount wafer; A method comprising:

2. 10. The method of claim 1, wherein the LED wafer comprises a substrate structure that is subdivided to form each substrate of the plurality of light emitting devices, and the submount wafer comprises a submount structure that is subdivided to form each submount of the plurality of light emitting devices.

3. The method of claim 2 , wherein the substrate structure comprises a sapphire wafer on which the plurality of LED chips are formed.

4. The method of claim 2 , wherein the submount structure comprises aluminum oxide or aluminum nitride.

5. 10. The method of claim 1, wherein the first metallization pattern comprises another pair of anode and cathode metal traces bonded to the anode and cathode contacts, respectively, of each LED chip of the plurality of LED chips.

6. 6. The method of claim 5, wherein the second metallization pattern comprises a first metal trace forming an anode mounting pad, a second metal trace forming a cathode mounting pad, and a third metal trace forming a portion of a conductive path between the first metal trace and the second metal trace.

7. The method of claim 1 , wherein the spacing between adjacent LED chips in the plurality of LED chips is 40 microns (μm) or less.

8. The method of claim 7 , wherein the spacing is in the range of 10 μm to 40 μm.

9. The method of claim 1 , wherein the plurality of LED chips are subdivided from a common epitaxial LED structure.

10. 10. The method of claim 1, wherein bonding the LED wafer to the front side of the submount wafer comprises thermocompression bonding, eutectic bonding, transient liquid phase bonding, bump bonding, or solder paste bonding to bond the anode and cathode contacts to the first metallization pattern.

11. 10. The method of claim 1, wherein bonding the LED wafer to the front side of the submount wafer comprises forming a ceramic bond between the LED wafer and the submount wafer.

12. The method of claim 1 , further comprising forming an underfill material in a gap between the LED wafer and the submount wafer.

13. The method of claim 1 , wherein the array of LED chips is electrically coupled in series, parallel, or series-parallel.

14. The second metallization pattern comprises: a first metal trace pattern configured to electrically couple the array of LED chips for a first light emitting device of the plurality of light emitting devices with a first electrical configuration; a second metal trace pattern configured to electrically couple the array of LED chips for a second light emitting device of the plurality of light emitting devices with a second electrical configuration; and The method of claim 1 , comprising:

15. The method of claim 1 , wherein the submount structure comprises a multi-layer ceramic structure.

16. providing a light emitting diode (LED) wafer comprising a plurality of LED chips on a substrate structure; forming a first underfill material on the LED wafer; providing a submount wafer with a first metallization pattern on a front side of the submount wafer and a second metallization pattern on a back side of the submount wafer, the second metallization pattern being electrically coupled to the first metallization pattern; bonding the LED wafer to the front surface of the submount wafer such that the plurality of LED chips are electrically coupled to the first metallization pattern; singulating the LED wafer and the submount wafer to form a plurality of light emitting devices, each light emitting device of the plurality of light emitting devices comprising an array of LED chips of the plurality of LED chips and a submount formed from the submount wafer; A method comprising:

17. 17. The method of claim 16, wherein the LED wafer includes a plurality of streets defining boundaries of each LED chip of the plurality of LED chips, and the first underfill material is disposed to fill a portion of the plurality of streets.

18. 17. The method of claim 16, wherein the first underfill material comprises a light reflective material configured to reflect or redirect light from the plurality of LED chips.

19. 17. The method of claim 16, wherein the first underfill material is formed on the LED wafer after the LED wafer is attached to the submount wafer.

20. 17. The method of claim 16, wherein the first underfill material is formed on the LED wafer before the LED wafer is attached to the submount wafer.

21. 21. The method of claim 20, further comprising forming a second underfill material on the submount wafer before the LED wafer is attached to the submount wafer.

22. 22. The method of claim 21, wherein the first underfill material and the second underfill material form a ceramic bond between the LED wafer and the submount wafer.

23. 17. The method of claim 16, wherein the array of LED chips is electrically coupled in series, parallel, or series-parallel.

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