Container storage device

Abstract

[Problem] To provide a container storage apparatus which has a simpler configuration than the conventional container storage apparatuses and can suck a gas that is leaked from a lid of a container. [Solution] Provided is a container storage apparatus 100 provided with a mounting table 20 on which a container 1 having a lid 1c on the side surface thereof is mounted, a purge device 10 for supplying a purge gas into the container 1, and a suction device 30 for sucking a gas leaked from the container 1, in which the mounting table 20 is provided with a bottom surface part 21 on which the container 1 is mounted and a side wall part 23 which extends upward from the bottom surface part and is positioned opposite to the lid of the container mounted on the bottom surface part, the suction device 30 sucks a gas leaked from a side surface having the lid 1c of the container 1 placed thereon through a first opening 50 arranged on the bottom surface part 21 or the side wall part 23, and an upper end 23a of the side wall part 23 is lower than an upper end 1h of the lid 1c of the container 1 mounted on the bottom surface part 21.

Description

[Technical Field]

[0001] The present invention relates to a container storage device. [Background technology]

[0002] Semiconductor manufacturing plants and the like may be provided with a container storage device for temporarily storing containers containing items such as semiconductor wafers (see, for example, Patent Document 1). For example, the container storage device includes a purge device that supplies a purge gas such as nitrogen gas into the container. The container has a lid on the side for opening and closing an opening for putting items in and out, and the purge gas may leak from around the lid. For this reason, the container storage device described in Patent Document 1 is provided with a suction device that sucks in gas leaking from the lid when the purge device is supplying purge gas into the container. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6607314 Summary of the Invention [Problem to be solved by the invention]

[0004] The suction device described in Patent Document 1 is provided facing the lid of each container and has an opening larger than the lid to suck gas leaking from the lid. This not only increases the size of the suction device, but also may complicate the configuration of the container storage device. Therefore, there is a need for a device that can suck gas leaking from the lid with a simpler configuration than conventional devices.

[0005] An object of the present invention is to provide a container storage device that has a simple configuration and is capable of sucking gas leaking from a container lid. [Means for solving the problem]

[0006] A container storage device according to one aspect of the present invention is a container storage device comprising: a mounting table on which a container having a lid on its side is placed; a purge device that supplies purge gas to the container; and a suction device that sucks gas leaked from the container, wherein the mounting table comprises a bottom surface on which the container is placed and a side wall portion that extends upward from the bottom surface and faces the lid of the container placed on the bottom surface; the suction device sucks gas leaked from the side surface where the lid of the container is located through a first opening provided in the bottom surface or the side wall portion, and the upper end of the side wall portion is lower than the upper end of the lid of the container placed on the bottom surface. [Effects of the Invention]

[0007] The container storage device according to the above aspect can be made smaller than conventional suction devices that have openings larger than the container lids. Also, the device can suck gas leaking from around the container lids with a simpler configuration than conventional devices.

[0008] The mounting table may be capable of mounting multiple containers, and the bottom and sidewalls may be formed continuously across the multiple containers. The number of first openings may be fewer than the number of containers that can be mounted on the mounting table. This configuration allows the number of first openings to be fewer than the number of containers that can be mounted on the mounting table. This reduces the number of components, such as covers covering the first openings and piping connected to the first openings, further simplifying the configuration. The sidewalls may be provided to surround all four sides of the multiple containers mounted on the bottom. This configuration allows the sidewalls to surround the multiple containers collectively, reducing the number of components and further simplifying the configuration. The height of the upper end of the sidewalls may be set to a range of 80 mm to 120 mm from the bottom or the bottom surface of the container. This configuration allows gas leaking from the container to be suctioned while keeping the height of the sidewalls low. The height of the upper end of the sidewalls may be set to a range of one-quarter to one-third of the height of the containers mounted on the bottom. With this configuration, even if the container is tilted, the container will hit the side wall portion, preventing the container from falling.

[0009] The first opening may be provided in the bottom surface between the side wall and the container placed on the bottom surface. With this configuration, the first opening is positioned below the lid of the container, so gas leaking from around the lid of the container can be efficiently sucked through the first opening. The side wall may be provided to surround all four sides of the container placed on the bottom surface. With this configuration, gas leaking from the container accumulates inside the side wall, preventing the gas from diffusing downward from the container storage device.

[0010] The suction device may also have a second opening provided in the bottom portion and a nozzle that discharges gas flowing out from an exhaust port formed in the bottom surface of the container above the bottom portion through the second opening, and the gas discharged from the nozzle may be sucked in through the first opening. Place Since the inside of the container is not suctioned, negative pressure inside the container can be prevented. The nozzle may be disposed near the first opening. With this configuration, gas leaking from around the lid of the container and gas inside the container released from the nozzle can be sucked together through the first opening. The mounting table may include a cover that covers the nozzle and the first opening and guides the gas released from the nozzle toward the first opening, and the cover may have a third opening formed on an upper surface of the cover and guide the gas flowing in from the third opening toward the first opening. With this configuration, gas leaking from the container can be sucked through the first opening via the third opening while the cover prevents the gas released from the nozzle from diffusing. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a diagram showing an example of a schematic configuration of a container storage device according to an embodiment. [Figure 2] FIG. 2 is a side view of a portion of a container stored in the container storage device. [Figure 3] FIG. 10 is a diagram showing a state in which a container is transported to a container storage device. [Figure 4] FIG. 1 is a diagram illustrating an example of a suction device. [Figure 5] FIG. 10 is a diagram illustrating an example of a cover. [Figure 6]FIG. 4 is a diagram showing the flow of purge gas. [Figure 7] 1 is a flowchart illustrating an example of a container storage method according to an embodiment. [Figure 8] FIG. 10 is a diagram showing a first modified example of a suction device. [Figure 9] FIG. 10 is a diagram showing a second modified example of the suction device. [Figure 10] 10 is a diagram showing a schematic view of the state of gas around the lid of a container in a container storage device according to a comparative example. FIG. [Figure 11] 10 is a diagram showing a schematic view of the state of gas around the lid of the container in the container storage device according to the embodiment. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0012] The present invention will be described below through embodiments, but the following embodiments do not limit the scope of the invention according to the claims. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention. In the drawings, identical or similar parts may be designated by the same reference numerals, and redundant description may be omitted. The shapes and sizes of elements in the drawings may be exaggerated for clarity, and may differ in size and shape from the actual product. In the following drawings, directions are explained using an XYZ coordinate system. In this XYZ coordinate system, the plane parallel to the horizontal plane is the XY plane. The direction perpendicular to the XY plane is referred to as the Z direction. The X, Y, and Z directions are explained by assuming that the direction indicated by the arrow in the drawing is the + direction and the direction opposite to the arrow is the - direction.

[0013] The container storage device 100 is capable of transferring the container 1 from, for example, an overhead transport vehicle 2 that transports the container 1, and is arranged near the ceiling C. The container storage device 100 is fixed in a state in which it is suspended from the ceiling C, for example, by a hanging bracket, and is arranged near the ceiling C. The container storage device 100 is arranged, for example, at a position shifted to the side from directly below the traveling rail (ceiling track) R (see Figure 3) of the overhead transport vehicle 2. The container storage device 100 is, for example, a buffer that temporarily stores the container 1 transported by the overhead transport vehicle 2. The container storage device 100 may also be arranged directly below the traveling rail R.

[0014] FIG. 1 is a diagram showing an example of a schematic configuration of a container storage apparatus 100 according to an embodiment. FIG. 2 is a side view of a portion of a container 1 stored in the container storage apparatus 100. FIG. 3 is a diagram showing a state in which a container 1 is transported to the container storage apparatus 100. As shown in FIG. 1, the container storage apparatus 100 can store a plurality of containers 1. The containers 1 house articles such as wafers or reticles used in the manufacture of semiconductor devices. The containers 1 are, for example, front-opening unified pods (FOUPs), SMIF pods, or reticle pods whose interiors can be purged with purge gas. The containers 1 may also be in other forms that can be transported by an overhead transport vehicle 2.

[0015] As shown in FIGS. 2 and 3, the container 1 includes a main body 1a, an opening 1b, a lid 1c, and a flange 1g. The main body 1a includes a positioning recess 1d on the bottom side. The main body 1a also includes a gas inlet 1e and a gas outlet 1f on the bottom side. As an example, the inlet 1e and the outlet 1f are each located near the end of the bottom side of the main body 1a in the X direction. The inlet 1e and the outlet 1f communicate with the inside and outside of the main body 1a, respectively. The inlet 1e is used to introduce a purge gas into the main body 1a. The outlet 1f is used to exhaust gas, including the purge gas, from the main body 1a. The inlet 1e and the outlet 1f may each be provided with a check valve (not shown) to prevent backflow.

[0016] The opening 1b is provided so as to face the horizontal direction (+Y direction). An article such as a wafer is placed inside the container 1 through the opening 1b. For example, the lid 1c is provided to open and close the opening 1b and is detachably attached to the container 1. Even if the lid 1c is attached tightly to the main body 1a, a gap is generated between the main body 1a and the lid 1c, and there is a possibility that purge gas or the like may leak from this gap.

[0017] A flange 1g, for example, is provided on the top of the container 1. When the container 1 is transported by the overhead transport vehicle 2, the flange 1g is gripped by the overhead transport vehicle 2 during transport. The container 1 is transported by the overhead transport vehicle 2 from the container storage device 100 to a processing device (not shown), and then from the processing device to the container storage device 100. This processing device is, for example, a film forming device, a coater / developer, an exposure device, an etching device, etc., and performs various processes in the process of manufacturing a device (e.g., a semiconductor device). The container storage device 100 is, for example, placed on a transport path along which the container 1 is transported, and is used to temporarily store the container 1.

[0018] As shown in FIG. 3, the ceiling transport vehicle 2 travels along a traveling rail R by the driving force of a traveling unit 4. The traveling rail R is provided near the ceiling C of, for example, a clean room, while being suspended from the ceiling C by hanging hardware Ra, and extends in the X direction. The ceiling transport vehicle 2 includes a main body 3 and a traveling unit 4. The traveling unit 4 includes wheels 4a, a driving source (not shown) such as an electric rotary motor or a linear motor that drives the wheels 4a, and an encoder (not shown). The wheels 4a are disposed so as to roll on a rail surface provided on the inside of the traveling rail R. The encoder detects the number of rotations of the wheels 4a and outputs the detection result to a control unit (not shown) provided in the main body 3, for example. The control unit controls the driving source based on the detection result of the encoder, thereby controlling the speed of the ceiling transport vehicle 2.

[0019] The upper part of the main body 3 is attached to a connecting part 3a extending downward from the running part 4. The main body 3 is suspended from the running part 4 via the connecting part 3a. The main body 3 is capable of housing a container 1 inside. The main body 3 includes a lateral discharge mechanism 5, a lifting part 6, and a gripping part 7. The lateral discharge mechanism 5 is provided at the upper part of the main body 3. The lateral discharge mechanism 5 switches between a state in which the container 1 is housed within the main body 3 and a state in which the container 1 is discharged to the side. The lateral discharge mechanism 5 includes a base 5a and a lateral discharge part 5b. A rotating part may be provided on the base 5a. This rotating part has an electric motor or the like and is rotatable around the Z direction (vertical direction) as its rotation axis. Rotation of the rotating part rotates the lateral discharge mechanism 5, thereby changing the direction of lateral discharge by the lateral discharge mechanism 5.

[0020] The horizontal extension portions 5b are attached to the underside of the base portion 5a. The horizontal extension portions 5b are, for example, multiple movable plates arranged in a stack in the Z direction. The multiple horizontal extension portions 5b can be moved in the +Y direction or the -Y direction (a direction perpendicular to the traveling direction of the traveling portion 4) along guides (not shown) by the driving force of a power device (not shown) such as an electric motor. A lifting unit 6 is attached to the lowest horizontal extension portion 5b. The horizontal extension mechanism 5 moves the horizontal extension portions 5b, which are movable plates, using the driving device, and can slide the lifting unit 6 and the gripping unit 7 attached to the lowest horizontal extension portion 5b in a direction perpendicular to the traveling direction.

[0021] The lifting unit 6 is controlled by the control unit to raise and lower the gripping unit 7 at a predetermined speed. The lifting unit 6 is also controlled by the control unit to maintain the gripping unit 7 at a target height. The gripping unit 7 suspends and holds the container 1 by gripping the flange 1g of the container 1. The gripping unit 7 is, for example, a chuck with claws that can move horizontally. In this way, the ceiling transport vehicle 2 can perform horizontal transfer to deliver the container 1 to the destination position of the container storage device 100 by sliding the horizontal extension unit 5b to extend the lifting unit 6 and lowering the gripping unit 7 using the lifting unit 6. The ceiling transport vehicle 2 can also deliver the container 1 by lowering the gripping unit 7 using the lifting unit 6 without sliding the horizontal extension unit 5b.

[0022] The container storage apparatus 100 includes a purging device 10, a mounting table 20, and a suction device 30. The purging device 10 supplies purge gas to the containers 1 stored in the container storage apparatus 100. The purging device 10 is provided on the mounting table 20. Note that in FIG. 1, a purging device 10 is provided for each container 1 stored in the container storage apparatus 100, but this is not limiting. The purging device 10 may be provided for some of the containers 1 stored in the container storage apparatus 100.

[0023] The purging device 10 includes, for example, a purge nozzle 10a and a flow rate control device (not shown), such as a mass flow controller, that controls the flow rate of the purge gas. The purge nozzle 10a is provided in a state where it protrudes upward from the mounting table 20. The purge nozzle 10a is positioned so as to connect to the inlet 1e of the container 1 when the container 1 is mounted on the mounting table 20. The purge nozzle 10a is connected to a purge gas supply unit 11 (see FIG. 6) via a pipe 12 (see FIG. 6), which will be described later. The purge gas is a gas that is inert to the items stored in the container 1, such as nitrogen gas. The purging device 10 supplies the purge gas from the supply unit 11 via the pipe 12 and into the container 1 from the inlet 1e, thereby purging the interior of the container 1 with the purge gas.

[0024] The loading platform 20 is positioned to the side of the platform directly below the track of the overhead transport vehicle 2. The container 1 is placed on the loading platform 20 from the front side of the container storage device 100 by lateral transfer using the overhead transport vehicle 2. The front side of the container storage device 100 is the side facing the overhead transport vehicle 2. In FIG. 1, the number of loading platforms 20 arranged in the container storage device 100 is two, and they are arranged side by side in the X direction, but this is not limited to this configuration, and the number of loading platforms 20 may be one, or three or more.

[0025] In this embodiment, one mounting table 20 is capable of mounting multiple containers 1, but instead of this configuration, one mounting table 20 may be capable of mounting one container 1. FIG. 1 shows a state in which four containers 1 are mounted on one mounting table 20, and a state in which no container 1 is mounted on the other mounting table 20. Note that the mounting tables 20 may be arranged in parallel instead of being arranged in series in the X direction.

[0026] The mounting table 20 includes a bottom surface 21, sidewalls 22, supports 26, and a frame member 27. The container 1 is placed on the bottom surface 21. The bottom surface 21 is provided with a plurality of pins (kinematic pins) 17 for positioning the container 1. The pins 17 are arranged corresponding to the positions of recesses 1d provided in the bottom of the container 1, and can fit into the recesses 1d. When the container 1 is placed on the bottom surface 21, the pins 17 fit into the recesses 1d of the container 1, thereby positioning the container 1. The shape and number of the recesses 1d and pins 17 are arbitrary.

[0027] The sidewall portion 22 is provided to surround all four sides of one or more containers 1 placed on the bottom surface portion 21. The sidewall portion 22 is provided to extend vertically upward from the bottom surface portion 21. The sidewall portion 22 is, for example, a plate-shaped member that surrounds the periphery of the container 1. The sidewall portion 22 includes a first sidewall portion 23, a second sidewall portion 24, and a pair of third sidewall portions 25. The first sidewall portion 23 extends upward from the bottom surface portion 21 and faces the lid 1c of the container 1 placed on the bottom surface portion 21. The first sidewall portion 23 is provided on the front side of the container storage device 100. Note that, if the mounting table 20 is capable of storing multiple containers 1, the first sidewall portion 23 may be formed continuously over an area corresponding to the multiple containers 1. However, this is not limited to this form, and a first sidewall portion 23 may be provided for each container 1.

[0028] The upper end 23a of the first side wall portion 23 is lower than the upper end 1h of the lid 1c of the container 1 placed on the bottom surface portion 21. The height H2 of the upper end 23a of the first side wall portion 23 is lower than the height H1 of the upper end 1h of the lid 1c. Note that the heights H1 and H2 may be heights from the bottom surface of the container 1 or may be heights from the bottom surface portion 21, as shown in FIG. 2. The upper end 23a of the first side wall portion 23 is set in the range of 80 mm to 120 mm from the bottom surface or bottom surface portion 21 of the container 1.

[0029] Furthermore, the upper end 23a of the first side wall portion 23 may be set to be in the range of one-quarter to one-third of the height of the container 1 placed on the bottom surface portion 21. By setting the height of the first side wall portion 23 in this manner, gas leaking from the container 1 is prevented from falling downward from the bottom surface portion 21, and even if the container 1 is tilted, the lid 1c is engaged with the upper end 23a of the first side wall portion 23, the upper end 24a of the second side wall portion 24, or the upper end 25a of the third side wall portion 25, thereby preventing the container 1 placed on the bottom surface portion 21 from falling off the bottom surface portion 21. Furthermore, even if the lid 1c is accidentally removed from the stored container 1, the lid 1c is engaged with the upper end 23a of the first side wall portion 23, etc., and therefore can be prevented from falling.

[0030] The second side wall portion 24 is provided on the rear side, which is the surface opposite to the front side of the container storage device 100. In other words, the second side wall portion 24 is provided on the surface opposite to the surface facing the ceiling transport vehicle 2 when the surface facing the ceiling transport vehicle 2 is defined as the front. The height of the upper end 24a of the second side wall portion 24 may be approximately the same as the height of the container 1 placed on the bottom surface portion 21, or may be a different height. The height of the upper end 24a of the second side wall portion 24 may be the same as the upper end 23a of the first side wall portion 23. The second side wall portion 24 has the function of preventing gas leaking from the container 1 from flowing around to the rear side and falling downward from the bottom surface portion 21, while also preventing the container 1 placed on the bottom surface portion 21 from falling from the bottom surface portion 21.

[0031] The third side wall portions 25 are provided on the left and right sides of the container storage device 100, i.e., on both ends of the container storage device 100 in the X direction. The third side wall portions 25 are provided on the +X side and -X side of the container 1 together with supporting columns 26, which will be described later. The third side wall portions 25 are provided so as to connect the end of the first side wall portion 23 and the end of the second side wall portion 24. As a result, the first side wall portion 2 3、 The multiple containers 1 are surrounded by the second side wall portion 24 and a pair of third side wall portions 25. By surrounding the containers 1 with the side wall portions 22, gas leaking from around the lids 1c of the containers 1 can be collected inside the side wall portions 22 and prevented from diffusing downward.

[0032] Furthermore, the end of the first side wall portion 23, the second side wall portion 24, and the pair of third side wall portions 25 are arranged to coincide with the outer edge of the mounting table 20 in a plan view. The height of the upper end 25a of the third side wall portion 25 may be approximately the same as the height of the container 1 placed on the bottom surface portion 21, or may be a different height. The height of the upper end 25a of the third side wall portion 25 may be the same height as the upper end 23a of the first side wall portion 23.

[0033] The support columns 26 are provided on the +X side and the -X side of the mounting table 20 and support the mounting table 20. The support columns 26 are connected to the bottom surface portion 21, and as described above, a portion of the support columns 26 is used as part of the third side wall portion 25. A frame member 27 is provided at the upper ends of the support columns 26 so as to connect the two support columns 26. The frame member 27 is disposed above the bottom surface portion 21 and extends in the X direction. The frame member 27 is suspended from the ceiling C via a hanging bracket (not shown). The height position of the frame member 27 (container storage device 100) can be adjusted by adjusting the hanging bracket.

[0034] The suction device 30 sucks in purge gas leaking from around the lid 1c of the container 1. Here, the purge gas purged into the container 1 may leak from the attachment portion of the lid 1c of the container 1, etc. Depending on the type or concentration of the gas, the purge gas may affect the human body. When the container 1 is stored in an open environment, purge gas leaking from the container 1 may deteriorate the surrounding environment. In particular, when workers work near the container 1, the atmosphere near the container 1 may become contaminated with purge gas leaking from the container 1. Furthermore, in clean rooms, a so-called downflow, in which clean air flows downward from a fan filter unit located at the top of the building, may be formed. When the container 1 is stored in an open environment, the downflow may cause purge gas to flow toward the ground, resulting in a high concentration of purge gas near the ground. The suction device 30 according to this embodiment sucks in and collects purge gas leaking from the container 1, preventing the purge gas from diffusing around the container storage device 100 or near the ground.

[0035] The suction device 30 sucks in gas (including purge gas) leaked from around the lid 1c of the container 1. Furthermore, the suction device 30 sucks in gas released from inside the container 1 through the exhaust nozzle 40. The exhaust nozzle 40 will be described later. The suction device 30 discharges the sucked gas from the container storage device 100. FIG. 4 is a diagram showing an example of the suction device 30. As shown in FIG. 4, the suction device 30 includes a suction unit 31, a pipe 32, and a pipe 33. The suction unit 31 includes an exhaust nozzle 40, a pipe 41, a flow rate measuring device 42, a first nozzle 50, a second nozzle 60, and a cover 70. In the example shown in FIG. 1, a suction unit 31 is provided for each container 1. However, this configuration is not limited thereto, and a suction unit 31 may be provided for each of a plurality of containers 1.

[0036] When purge gas is supplied from purge nozzle 10a into container 1 via inlet 1e of container 1 by purge device 10, gas inside container 1 flows out through exhaust port 1f of container 1 (see FIG. 6). Exhaust nozzle 40 is provided on bottom surface 21 so as to connect with exhaust port 1f of container 1 when container 1 is placed on mounting table 20. Gas inside container 1 flows out of container 1 through exhaust nozzle 40 and is sucked by suction device 30. Note that exhaust nozzle 40 is an example of a second opening.

[0037] The pipe 41 is provided, for example, on the back surface of the bottom surface portion 21. One end of the pipe 41 is connected to the exhaust nozzle 40, and the other end is connected to the second nozzle 60. The flow rate measuring device 42 is provided, for example, on the back surface of the bottom surface portion 21. The flow rate measuring device 42 is provided midway along the pipe 41, and measures the flow rate of gas discharged from the exhaust nozzle 40 and flowing through the pipe 41. The flow rate measuring device 42 may be, for example, a mass flow controller.

[0038] The first nozzle 50 is provided, for example, on the bottom surface portion 21 or inside the bottom surface portion 21. The first nozzle 50 is provided on the bottom surface portion 21 between the first side wall portion 23 and the container 1 placed on the bottom surface portion 21. The first nozzle 50 is arranged inside a cover 70 attached to the bottom surface portion 21. The first nozzle 50 sends gas inside the cover 70 to the piping 32 via a connecting portion 51 such as a joint member. The connecting portion 51 connects the first nozzle 50 to the piping 32. The first nozzle 50 protrudes upward from the upper surface of the bottom surface portion 21 inside the cover 70. The first nozzle 50 may be provided with a check valve to prevent backflow of gas. The first nozzle 50 is an example of a first opening.

[0039] The second nozzle 60 is provided on the bottom surface portion 21. The second nozzle 60 is provided on the bottom surface portion 21 between the first side wall portion 23 and the container 1 placed on the bottom surface portion 21. The second nozzle 60 protrudes upward from the upper surface of the bottom surface portion 21 within the cover 70. The second nozzle 60 is arranged near the first nozzle 50. For example, the first nozzle 50 and the second nozzle 60 are arranged side by side in the X direction. The second nozzle 60 may be provided with a check valve to prevent backflow of gas. The second nozzle 60 discharges gas flowing out from the exhaust port 1f on the bottom surface of the container 1 above the bottom surface portion 21 via the exhaust nozzle 40.

[0040] The second nozzle 60 is in communication with the pipe 41 and discharges gas flowing through the pipe 41 into the cover 70. The cover 70 is provided on the bottom surface 21 between the first side wall portion 23 and the container 1 placed on the bottom surface 21. The cover 70 is provided to cover the first nozzle 50 and the second nozzle 60. The cover 70 guides the gas discharged from the second nozzle 60 to flow into the pipe 32 via the first nozzle 50. In other words, the cover 70 guides the gas discharged from the second nozzle 60 toward the first nozzle 50.

[0041] FIG. 5 is a diagram illustrating an example of a cover 70. As illustrated in FIG. 5, the cover 70 includes, for example, a third opening 71, a first space 72, a second space 73, and a third space 74. The third opening 71 is formed on the upper surface of the cover 70. The third opening 71 is a circular hole, but its shape is not particularly limited. The third opening 71 is a hole for introducing gas G3 leaking from around the lid 1c of the container 1 into the cover 70. The upper surface of the cover 70 is lower than the upper end 23a of the first side wall 23. In other words, the third opening 71 is located at a position lower than the upper end 23a of the first side wall 23. The gas G3 leaking from around the lid 1c of the container 1 is introduced into the cover 70 through the third opening 71 and is sucked by the first nozzle 50.

[0042] The first space 72 is a space within the cover 70, and the gas G2 from the second nozzle 60 is released therethrough. The first space 72 is in communication with the pipe 41 via the second nozzle 60. The first space 72 is, for example, a cylindrical space. The second space 73 connects the first space 72 with the third space 74. The second space 73 guides the gas G2 in the first space 72 to the third space 74. The third space 74 connects the third opening 71 with the first nozzle 50 (first opening). The third space 74 is, for example, a cylindrical space. The third space 74 guides the gas G3 flowing in from the third opening 71 to the first nozzle 50. The third space 74 is also connected to the first space 72 via the second space 73. Therefore, the third space 74 guides the gas G2 that has flowed from the first space 72 into the second space 73 to the first nozzle 50.

[0043] In this way, the cover 70 has the function of guiding the gas G2 released from the second nozzle 60 toward the first nozzle 50, and the function of guiding the gas G3 leaking from around the lid 1c of the container 1 toward the first nozzle 50 through the third opening 71.

[0044] The pipe 32 communicates with the first nozzle 50 via a connection portion 51. Furthermore, as shown in FIG. 1, the pipe 32 is connected to a pipe 33. Note that FIG. 1 shows a configuration in which one first nozzle 50 is connected to the pipe 32, and does not illustrate connections between other first nozzles 50 and the pipe 32. The gases G2 and G3 sucked through the first nozzle 50 are sent to the pipe 33 via the pipe 32. The pipe 32 includes a portion extending in the X direction along the bottom surface of the bottom portion 21 and a portion extending in the Z direction along the support 26. The pipe 32 is connected to the pipe 33. The pipe 33 is attached to the frame member 27. The pipe 33 extends in the X direction along the frame member 27. The gases G2 and G3 are sent from the pipe 32 to the pipe 33 and discharged from the pipe 33 to the outside.

[0045] The suction device 30 is connected to a pipe 33 and includes a suction force generator that generates a suction force for sucking the gases G2 and G3. However, the present invention is not limited to this configuration, and the suction device 30 may be configured, for example, such that the pipe 33 is connected to a suction force generator (line) already installed in a factory or the like. In the container storage device 100, the timing of sucking the gases G2 and G3 is not particularly limited, and may be operated in conjunction with the operation of the purging device 10, for example. For example, the suction by the suction device 30 may be started when the container 1 is placed on the bottom surface portion 21 and the purging device 10 starts supplying purge gas to the container 1. Furthermore, the suction by the suction device 30 may be performed continuously without being linked to the purging device 10, or may be performed when an operator or the like operates the suction.

[0046] Next, a method for suctioning gases G2 and G3 by the suction device 30 will be described with reference to FIGS. 6 and 7. FIG. 6 is a diagram schematically illustrating the flow of purge gases G2 and G3 sucked in by the suction device 30. FIG. 7 is a flowchart illustrating an example of a container storage method according to an embodiment. As shown in FIG. 7, the ceiling transport vehicle 2 places the container 1 at a target position on the bottom surface portion 21 by lateral transfer (step S101). In step S101, first, the ceiling transport vehicle 2 moves to the container storage device 100 and stops to the side of the target position where the container 1 is to be placed. Next, the ceiling transport vehicle 2 uses the lateral transfer mechanism 5 to laterally transfer the container 1 to directly above the placement table 20. Next, the ceiling transport vehicle 2 places the container 1 at a target position on the bottom surface portion 21 by lowering the gripping unit 7 with the lifting unit 6. Next, the gripping of the container 1 by the gripping unit 7 is released, and the container 1 placed on the bottom surface portion 21 is transferred to the situation This becomes:

[0047] The operation of the ceiling transport vehicle 2 is controlled by a control unit (not shown) provided in the ceiling transport vehicle 2. This control unit acquires information about the storage location (destination position) of the container 1 from a higher-level control device or the like, and controls the ceiling transport vehicle 2 to place the container 1 in this storage location. Furthermore, when the container 1 is placed on the bottom surface portion 21, as described above, the pin 17 provided on the bottom surface portion 21 fits into the recess 1d provided on the bottom surface of the container 1, thereby positioning the container 1 on the placement table 20.

[0048] Next, the supply of purge gas G1 to the container 1 placed on the bottom surface portion 21 is started (step S102). In step S102, when the container 1 is placed on the bottom surface portion 21, an inlet 1e provided on the bottom surface of the container 1 and a purge nozzle 10a provided on the bottom surface portion 21 are connected. In this state, the purge device 10 supplies the purge gas G1 sent from the supply unit 11 into the container 1 via the piping 12 and the purge nozzle 10a, as shown in FIG. 6. The supply amount of the purge gas G1 is controlled by a control unit (not shown) provided in the purge device 10, for example, based on the flow rate of the purge gas G1 flowing through the piping 12.

[0049] When the supply of purge gas G1 by the purging device 10 begins, the suction device 30 begins suctioning the gas (step S103). When the container 1 is placed on the bottom surface 21, the exhaust port 1f provided on the bottom surface of the container 1 and the exhaust nozzle 40 provided on the bottom surface 21 are connected. When the purge gas G1 is supplied into the container 1 in the above-mentioned step S102, the internal pressure of the container 1 increases. Due to the increase in the internal pressure of the container 1, the gas G2 inside the container 1 is exhausted from the exhaust port 1f and is released into the cover 70 from the second nozzle 60 via the exhaust nozzle 40 and the piping 41. In step S103, the gas G2 released into the cover 70 is sucked in through the first nozzle 50.

[0050] Furthermore, when the internal pressure of the container 1 increases due to the supply of purge gas to the container 1, gas G3 may leak from around the lid 1c of the container 1. The gas G3 accumulates inside the sidewall 22 surrounding the container 1 and is sucked by the first nozzle 50 through the third opening 71 of the cover 70. The gases G2 and G3 sucked by the first nozzle 50 are discharged to the outside of the container storage device 100 (or outside the building adjacent to the factory) through the pipes 32 and 33. The suction of the gases G2 and G3 by the suction device 30 may be performed when the purge gas is supplied to the container 1, or may be performed continuously while the container 1 is being stored. Furthermore, while the container 1 is being stored in the container storage device 100, the suction device 30 may be operated at predetermined time intervals based on the output of a timer (not shown) or the like. The process is completed through the above-described series of operations.

[0051] As described above, according to this embodiment, the suction device 30 does not have an opening larger than the lid 1c of the container 1, so the suction device 30 can be made smaller and can suck gases G2 and G3 leaking from the container 1 with a simple configuration. Furthermore, because the upper end 23a of the first side wall portion 23 is lower than the upper end of the lid 1c of the container 1 placed on the bottom surface portion 21, the amount of lifting and lowering of the gripper 7 when the container 1 is transferred laterally by the ceiling transport vehicle 2 can be reduced. The container 1 is transferred between the container storage device 100 by the lateral transfer of the ceiling transport vehicle 2 as described above. Therefore, if a suction device is installed whose upper end is higher than the lid 1c of the container 1, when the lateral transfer is performed by the ceiling transport vehicle 2, the gripper 7 and the container 1 must be moved laterally to avoid the suction device and must be raised and lowered by the lifting and lowering unit 6 with a long stroke. In this embodiment, the upper end 23a of the first side wall portion 23 is lower than the upper end 1h of the lid 1c of the container 1 placed on the bottom surface portion 21, so that the amount of lifting and lowering of the gripping portion 7 during lateral transfer can be reduced, and the container 1 can be transferred efficiently.

[0052] Furthermore, since the sidewall portion 22 is provided to surround the container 1, gas G3 leaking from around the lid 1c of the container 1 accumulates inside the sidewall portion 22 and is sucked in by the first nozzle 50, thereby preventing gases G2 and G3 from diffusing into the worker's activity area below the mounting table 20. Furthermore, since the first nozzle 50 (third opening 71 of the cover 70) is provided on the bottom surface portion 21 between the side surface of the container 1 on the lid 1c side and the first sidewall portion 23, the first nozzle 50 is close to the lid 1c of the container 1, and gas G3 leaking from around the lid 1c of the container 1 can be efficiently sucked in by the first nozzle 50. Furthermore, when purge gas G1 is supplied to the container 1, gas G2 discharged from the exhaust port 1f is sucked in by the first nozzle 50 together with gas G3 leaking from around the lid 1c of the container 1, so that a gas recovery device or the like for recovering gas G2 discharged from the exhaust port 1f is not required, thereby reducing the manufacturing cost of the container storage device 100.

[0053] Furthermore, the container storage device 100 is usually installed in a clean room where a downflow is formed. Therefore, due to this downflow, the gas G3 leaking from around the lid 1c of the container 1 is more efficiently collected inside the side wall portion 22 and sucked through the first nozzle 50.

[0054] (First Modification) In the above embodiment, an example has been described in which a first nozzle 50 (first opening) is provided for each container 1 placed on the bottom surface portion 21, but the present invention is not limited to this example. FIG. 8 is a diagram showing a first modified example of the suction device 30. In FIG. 8, the same components as those in the above embodiment are denoted by the same reference numerals and will not be described. omission 8, the number of first nozzles 50 may be fewer than the number of containers 1 placed on the bottom surface portion 21. For example, one first nozzle 50 may be provided on the bottom surface portion 21 for multiple containers 1. In this case, a side wall portion 22 is provided to surround the multiple containers 1, and one first nozzle 50 is provided inside the side wall portion 22. Therefore, gas G3 leaking from around the lids 1c of the multiple containers 1 is collected and stored in the side wall portion 22. Furthermore, one cover 70 is provided inside the side wall portion 22 corresponding to one first nozzle 50.

[0055] In addition, when one first nozzle 50 is provided for multiple containers 1, for example, pipes 41 are connected from the exhaust nozzles 40 of each of the multiple containers 1 to one second nozzle 60, and gas G2 from the multiple containers 1 is sent collectively to one second nozzle 60 and then released into the cover 70. One first nozzle 50 sucks in gas G3 accumulated in the side wall portion 22 and gas G2 released into the cover 70 and discharges them to the outside.

[0056] As such, according to the first variant, the same effects as those of the above-mentioned embodiment are obtained, and since gas G2 and gas G3 from multiple containers 1 are sucked in by first nozzles 50 that are fewer in number than the number of containers 1, the number of first nozzles 50 and pipes 32, etc. can be reduced compared to the above-mentioned embodiment, and the manufacturing cost of the container storage device 100 can be reduced.

[0057] (Second Modification) In the above embodiment, the first nozzle 50, which is the first opening, is provided on the bottom surface portion 21, but the present invention is not limited to this. FIG. 9 is a diagram showing a second modified example of the suction device 30. In FIG. 9, the same components as those in the above embodiment are denoted by the same reference numerals and will not be described. omission 9, the first nozzles 50 (first openings) may be provided in the first side wall 23 instead of the bottom surface 21. The first nozzles 50 are preferably provided in a lower portion of the first side wall 23 near the bottom surface 21. Note that the number of first nozzles 50 in the second modified example may be less than the number of containers 1 placed on the placing table 20, as in the first modified example described above.

[0058] Furthermore, the second nozzle 60 is provided on the bottom surface 21 so as to emit the gas G2, for example, upward. A cover member or the like that blocks the flow of the gas G2 may be provided above the second nozzle 60. The gas G2 sent from the exhaust nozzle 40 is emitted from the second nozzle 60 onto the bottom surface 21 and accumulated inside the side wall 22. Similarly, the gas G3 that has leaked from around the lid 1c of the container 1 is also accumulated inside the side wall 22. The first nozzle 50 sucks in the gases G2 and G3 accumulated inside the side wall 22 and discharges them to the outside.

[0059] As described above, the second modification has the same effects as the above-described embodiment. Furthermore, since the first nozzle 50 is provided on the side wall 22, even if there is no space on the bottom surface 21 to place the first nozzle 50, the gases G2 and G3 accumulated inside the side wall 22 can be reliably sucked.

[0060] Next, the suction of gas G3 by the suction device 30 will be described with reference to Figures 10 and 11. Figure 10 is a diagram schematically showing the state of gas G3 around the lid 1c of a container 1 stored in a container storage device 100A according to a comparative example. Figure 11 is a diagram schematically showing the state of gas G3 around the lid 1c of a container 1 stored in a container storage device 100 according to an embodiment. Figures 10 and 11 show the state of gas G3 in an environment where a downflow is formed.

[0061] 10, the container storage device 100A according to the comparative example does not have a configuration equivalent to the suction device 30. Therefore, as shown in Fig. 10, gas G3 leaking from around the lid 1c of the container 1 diffuses so as to spread along the bottom of the mounting table 20A on which the container 1 is placed. On the other hand, since the container storage device 100 according to the present embodiment is provided with the side wall 22, gas G3 leaking from around the lid 1c of the container 1 is guided between the lid 1c and the first side wall 23 and accumulates inside the side wall 22.

[0062] The gas G3 accumulated inside the side wall portion 22 is sucked in through the first nozzle 50. Note that the first nozzle 50 is not shown in FIG. 11. Therefore, the gas G3 diffusing downward from the side wall portion 22 is drawn into the inside of the side wall portion 22, thereby preventing it from diffusing below the bottom surface portion 21. As a result, according to this embodiment, it is confirmed that the diffusion of the gas G3 downward in the container storage device 100 is suppressed.

[0063] Although the embodiments have been described above, the technical scope of the present invention is not limited to the above-described embodiments. It will be apparent to those skilled in the art that various modifications or improvements can be made to the above-described embodiments. It is clear from the claims that such modifications or improvements can also be included within the technical scope of the present invention. One or more of the requirements described in the above-described embodiments may be omitted. The requirements described in the above-described embodiments can be combined as appropriate. The execution order of each procedure shown in the embodiments can be implemented in any order, as long as the results of a previous procedure are not used in a subsequent procedure. Even if the operations in the above-described embodiments are described using terms such as "first," "next," and "continuously" for convenience, this order is not required. Furthermore, to the extent permitted by law, the disclosures of Japanese Patent Application No. 2022-083746 and all documents cited in the above-described embodiments are incorporated herein by reference. [Explanation of symbols]

[0064] C...Ceiling R···Rail 1...container 2. Ceiling transport vehicle 10. Purging device 20. Mounting table 30...Suction device 21...Bottom part 22 Side wall 40 Exhaust nozzle (second opening) 50···First nozzle (first opening) 60... Second nozzle (nozzle) 70···Cover 71 Third opening 100...Container storage device

Claims

1. A container storage device comprising: a mounting table on which a container having a lid on a side surface is mounted; a purge device that supplies purge gas to the container; and a suction device that suctions gas leaked from the container, the mounting table includes a bottom surface on which the container is placed, and a sidewall portion extending upward from the bottom surface and facing the lid of the container placed on the bottom surface, the suction device suctions gas leaking from a side surface of the container where the lid is located through a first opening provided in the bottom surface portion or the side wall portion; The upper end of the side wall portion is lower than the upper end of the lid of the container placed on the bottom surface portion. Container storage device.

2. the mounting table is capable of mounting a plurality of the containers thereon; the bottom surface portion and the side wall portion are formed continuously across the plurality of containers, the number of the first openings is less than the number of the containers that can be placed on the table; The container storage device according to claim 1 .

3. The side wall portion is provided so as to collectively surround all four sides of the plurality of containers placed on the bottom surface portion. The container storage device according to claim 2.

4. The height of the upper end of the side wall portion is set in the range of 80 mm to 120 mm from the bottom surface portion or the bottom surface of the container. The container storage device according to claim 1 .

5. The height of the upper end of the side wall portion is set in the range of one-fourth to one-third of the height of the container placed on the bottom surface portion. The container storage device according to claim 1 .

6. The first opening is provided in the bottom surface portion between the side wall portion and the container placed on the bottom surface portion. The container storage device according to claim 1 .

7. The side wall portion is provided to surround the container placed on the bottom surface portion on all four sides. The container storage device according to claim 1 .

8. The suction device has a second opening provided in the bottom portion and a nozzle that discharges gas flowing out from an exhaust port formed in the bottom surface of the container above the bottom surface through the second opening, and sucks the gas discharged from the nozzle through the first opening. The container storage device according to claim 1 .

9. The nozzle is disposed near the first opening. The container storage device according to claim 8.

10. the mounting table includes a cover that covers the nozzle and the first opening and guides the gas emitted from the nozzle toward the first opening; the cover has a third opening formed in an upper surface of the cover, and guides the gas flowing in from the third opening toward the first opening. The container storage device according to claim 9.

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