A purging plate is inserted into the space between the upper surface of a processing device that does not have a purging function and the lower surface of a hoop mounted on the processing device to assist in purging the inside of the hoop.

Abstract

This provides a purging plate that is inserted into the space between the upper surface of a processing device that does not have a purging function and the lower surface of a hoop (FOUP) attached to the processing device, thereby assisting in purging the inside of the hoop. [Solution] The purging plate includes a plate body, a plurality of pipe fitting joints formed on the edge of the plate body, a plurality of pipes formed inside the plate body, and a plurality of nozzles formed on the upper part of the plate body. At least one first type purge hole 131 corresponding to a first type nozzle is formed on the upper part of the plate body centered on a first position, and at least one nozzle vertical movement guide hole 141 corresponding to the first type purge hole is formed centered on at least one first third position spaced apart from the first type purge hole.

Description

[Technical Field]

[0001] The present invention relates to a purging plate that is inserted into the space between the upper surface of a processing apparatus in which a purging function is not embodied and the lower surface of a hoop mounted on the processing apparatus to assist in purging the inside of the hoop. More specifically, the present invention relates to a purging plate in which a plurality of nozzles, including at least one first type nozzle and at least one second type nozzle, are formed on the upper part of the plate body, and a first type purging hole and at least one nozzle vertical movement guiding hole are formed on the upper part of the plate body corresponding to the first type nozzle, at a position spaced apart from the first type purging hole. [Background technology]

[0002] A Front Opening Unified POD (FOUP) is used as a container for storing and transporting wafers, which are substrates used to manufacture semiconductor chips. Its role is to prevent external air from directly contacting the wafers during the semiconductor manufacturing process.

[0003] However, process gases used in the semiconductor manufacturing process through process equipment can remain on wafers and be loaded into the hoop. This can lead to direct contamination of other wafers by fumes and humidity generated by the residual process gases. If fumes adhere to the inner wall of the hoop, they can contaminate the process equipment during subsequent processes, or contaminate new wafers loaded into the hoop, thus hindering wafer yield. These problems have become even more pronounced recently as semiconductor devices have become smaller and their integration density has increased.

[0004] In connection with this, conventionally, this problem has been solved by performing purging, which involves injecting nitrogen gas into the hoop to remove residual process gases inside the hoop and replacing the inside of the hoop with nitrogen gas to prevent contamination of the wafer.

[0005] Generally, purging can be performed by mounting a hoop on the top surface of processing equipment such as a load port, STB (Side Track Buffer), OHB (Over Head Buffer), and stocker. For example, when a purging function is implemented in a load port installed in semiconductor processing equipment and a hoop is mounted on the load port to perform purging inside the hoop, nitrogen gas is supplied into the load port through the semiconductor manufacturing line, and thereafter, the nitrogen gas moves along piping formed inside the load port and is drawn into the hoop, thereby performing purging.

[0006] However, existing processing units do not have a purging function. Therefore, in order to perform purging on hoops, existing processing units must be replaced with those that do have a purging function. This would incur astronomical costs and would place an enormous financial burden on semiconductor chip manufacturers such as Integrated Device Manufacturers (IDMs) and Foundries.

[0007] Here, instead of replacing the entire existing processing unit, which does not have a purging function, with a new processing unit that does have a purging function, research is underway on methods to further implement the purging function by modifying the existing processing unit, or to perform purging even when using a processing unit that does not have a purging function by utilizing the separation space between the upper surface of the processing unit and the lower surface of the hoop attached to the processing unit.

[0008] However, modifying existing processing equipment to further implement the purging function simply involves disassembling parts of the processing equipment, replacing them with parts capable of performing the purging function, and then reinstalling them. Ultimately, this only amounts to reusing some parts of the existing processing equipment, making it difficult to see significant cost savings. Moreover, it has the fatal limitation of voiding warranties due to modifications made without the equipment manufacturer's consent. Furthermore, the modifications take too long, excessively prolonging the manufacturing process, and after the modifications, a great deal of time is required to restore process stability through stage level changes and teaching work.

[0009] As another example, instead of modifying an existing processing apparatus as described above, purging can be performed using a processing apparatus that does not have a purging function, by utilizing the separation space between the upper surface of the processing apparatus and the lower surface of a hoop attached to the processing apparatus. Korean Registered Patent Publication No. 10-1593386 describes a technique for performing purging using a purge module that includes a plate-shaped jig and a gas control box, which are detachably mounted on the top of the stage of a load port and include a gas inlet for injecting gas into the wafer carrier and a gas outlet for discharging gas from inside the wafer carrier, and a pipe connecting the jig and the gas control box.

[0010] However, if the lower part of the jig is sealed using a thin film cover, with a convex cross-section groove formed on the underside of the jig to create a gas passage inside the jig, extending from a connecting member where a port for connecting to the outside of the jig is formed, to the gas inlet and gas outlet, the groove is covered with a thin film that is shallowly processed on the plate surface to form the gas passage. In this case, the shape of the gas passage is determined by the durability and adhesive strength of the thin film, but if the thin film is damaged by external impact, pressure, or prolonged use, such as tearing or weakening of the adhesive strength, there is a problem in that the risk of leakage of nitrogen gas purged into the hoop increases.

[0011] Furthermore, while purge holes on the underside of a hoop are generally arranged in a square shape at the four corners of the hoop's underside according to SEMI standards, if the gas piping connecting the ports from which gas is injected from the outside within the jig and the ports from which gas is discharged from the hoop to the purge holes in the hoop is not consolidated and organized, protrusions will be created in the paths used by people and automated equipment. This restricts the movement of workers and seriously increases the risk of safety accidents such as pipe damage, pipe dropping or leakage due to collisions with transport equipment, and the generation of particles that are extremely dangerous in a cleanroom environment, as well as nitrogen gas poisoning. Therefore, in order for the treatment device to supply and discharge purge gas, the piping connected to the ports on the jig (nitrogen gas supply piping or exhaust gas discharge piping) must be gathered in one location. If the lower part of the shallowly machined grooves on the surface of the plate is covered with a thin film to form gas passages, it becomes difficult to gather the gas passages in one location inside the jig. As a result, an additional configuration is needed to gather the nitrogen gas piping connected to the gas injection port from outside the jig, and to gather and organize the exhaust gas piping connected to the gas discharge port. However, the cost required to add such a configuration far exceeds the cost of modifying the structure of the jig, which defeats the purpose of reusing existing treatment devices to save costs.

[0012] Furthermore, when high-pressure nitrogen gas is instantaneously drawn into the hoop for purging, the difference between the atmospheric pressure outside the hoop and the pressure resistance of the hoop can cause the hoop to float, or the degree of contact between the connecting part of the processing device and the purge hole of the hoop may decrease due to dimensional tolerances on the underside of the hoop, resulting in some nitrogen gas leaking to the outside. To solve these problems, conventional methods have mainly utilized a cylinder-shaped connecting part between the processing device and the purge hole of the hoop.

[0013] However, in order to construct the connecting component between the processing device and the purge hole of the hoop in a cylindrical shape, a minimum isolation distance is required between the processing device and the hoop. Since it was impossible to secure such an isolation distance, there was a problem in that it was difficult to perform purging through a processing device that did not have a purging function.

[0014] Therefore, there is a need for improvement measures to resolve the aforementioned problems. [Overview of the Initiative] [Problems that the invention aims to solve]

[0015] The purpose of this invention is to solve all of the problems described above.

[0016] Furthermore, the present invention also aims to prevent a gap from occurring between the first type nozzle and the lower surface of the hoop, in which nitrogen gas is supplied to the inside of the hoop without employing a cylinder structure, by modifying the structure of the purging plate so that a plurality of nozzles, including at least one first type nozzle and at least one second type nozzle, are formed on the upper part of the plate body, and a first type purge hole and at least one nozzle vertical movement guide hole are formed on the upper part of the plate body corresponding to the first type nozzle at a position spaced apart from the first type purge hole.

[0017] Furthermore, the present invention also aims to modify the structure of the first and second type nozzles so that the pressure applied to the nozzles is uniformly distributed when the hoop is mounted on the processing device, by forming at least one nozzle groove on the upper and lower surfaces of the first type nozzles and preventing the upper surfaces of the first and second type nozzles from collapsing, and so as to cause a portion of the nitrogen gas to rise the lower surface of the first type nozzle through the nozzle vertical movement guide hole, the pressure applied to the lower surface of the first type nozzle is uniformly distributed. [Means for solving the problem]

[0018] According to one embodiment of the present invention, a purging plate is inserted into the space between the upper surface of a processing apparatus in which a purge function is not embodied and the lower surface of a hoop (FOUP) mounted on the processing apparatus, and assists in purging the inside of the hoop, comprising: a plate body; a plurality of pipe fitting coupling portions formed on the edge of the plate body (each of the plurality of pipe fitting coupling portions includes each of the corresponding plurality of pipe fitting housing portions, and each of the plurality of pipe fitting housing portions is coupled to one end thereof with the corresponding pipe fitting); and a plurality of pipes formed inside the plate body (the plurality of pipes Each other end of the fitting housing is directly or indirectly connected to one end of each of the corresponding plurality of pipes, thereby assisting nitrogen gas to be supplied into the main body through at least one first type pipe fitting housing among the plurality of pipe fitting housings to be supplied into the hoop through at least one first type pipe corresponding to the first type pipe fitting housing, and assisting exhaust gas discharged from the hoop to be discharged through at least one second type pipe to at least one second type pipe fitting housing among the plurality of pipe fitting housings corresponding to the second type pipe);and a plurality of nozzles formed on the upper part of the plate body (the plurality of nozzles include at least one first type nozzle and at least one second type nozzle, the first type nozzle is formed around a first position which is either a 1_1 position which is the other end of the first type piping or a 1_2 position which is a predetermined distance away from there in the direction toward one end of the first type piping, and is in contact with the lower surface of the hoop to supply the nitrogen gas supplied from the first type piping into the inside of the hoop, the second type nozzle is formed around a 2_1 position which is the other end of the second type piping or a predetermined distance away from there A purging plate is provided, which is formed around a second position, which is one of two second positions located a predetermined distance from one end of a type of piping, and which draws in the exhaust gas discharged from the hoop, thereby discharging the exhaust gas into the second type of piping; wherein the upper part of the plate body has at least one first type purge hole corresponding to the first type nozzle formed around the first position, and at least one nozzle vertical movement guide hole corresponding to the first type purge hole is formed around at least one first third position spaced apart from the first type purge hole.

[0019] In one example, the first type nozzle is formed on the upper part of the plate body to a first height, a first type hollow portion corresponding to the first type nozzle is formed to penetrate the interior of the first type nozzle with the first position as the center, the lower end region of the first type hollow portion is connected to the region of the first type purge hole, and the upper surface of the first type nozzle is in contact with at least a portion of the lower surface region of the hoop.

[0020] In one example, the first type nozzle has at least one first nozzle groove formed in at least a portion of the lower surface region of the first type nozzle, and at least one first second nozzle groove formed in at least a portion of the upper surface region of the first type nozzle.

[0021] In one example, the 1_1 nozzle groove is formed in the lower surface region of the 1 type nozzle, in the region radially outward from the lower end region of the hollow portion of the 1 type, and the 1_2 nozzle groove is formed in the upper surface region of the 1 type nozzle, in the region radially outward from the upper end region of the hollow portion of the 1 type.

[0022] In one example, a plurality of grooves for inserting a first type nozzle are formed on the upper part of the plate body, centered around a 1_4 position spaced apart from the first type purge hole (the distance from the 1_4 position to the first type purge hole is greater than the distance from the 1_3 position to the first type purge hole and smaller than the radius of the first type nozzle, and the 1_4 position is a plurality of positions that are the same distance from the first type purge hole), and a plurality of first type nozzle insertion portions are formed on the lower surface of the first type nozzle so as to protrude at positions corresponding to the 1_4 position, so that the first type nozzle insertion portions are inserted into the grooves for inserting the first type nozzle.

[0023] In one example, a plurality of first-first fastening through-holes are formed on the upper part of the plate body, centered around a plurality of first-fifth positions located between a first-first boundary line (defined by connecting the points furthest from the first-type purge hole among the boundary lines forming the groove for inserting the first-type nozzle) and a first-second boundary line defined by connecting the outermost shell points on the diameter of the first-type nozzle; a plurality of first-second fastening through-holes are formed in the first-type nozzle so as to penetrate the interior of the first-type nozzle, centered around positions corresponding to the first-fifth positions; and the first-type screw is connected by sequentially passing through the first-second fastening through-holes and the first-first fastening through-holes to maintain the fastened state between the first-type nozzle and the plate body.

[0024] In one example, a first-type nozzle support is formed on the upper part of the area of ​​the first-type nozzle that corresponds to the area between the boundary line corresponding to the 1_1 boundary line and the boundary line corresponding to the 1_2 boundary line, and at least one 1_3 fastening through hole is formed in the first-type nozzle support so as to penetrate the inside of the first-type nozzle support with a position corresponding to the 1_5 position as the center, and the first-type screw is connected by sequentially passing through the 1_3 fastening through hole, the 1_2 fastening through hole and the 1_1 fastening through hole, thereby maintaining the fastened state of the first-type nozzle support, the first-type nozzle and the plate body.

[0025] In one example, the first type of hollow portion is formed such that the size of the lower end region of the first type of hollow portion is smaller than the size of the region of the first type of purge hole, and the size of the upper end region of the first type of hollow portion is the same as the size of the lower end region of the first type of hollow portion.

[0026] In one example, the first type nozzle includes a first type lower nozzle formed on the upper part of the plate body to a height of 1_1 and a first type upper nozzle formed on the upper part of the first type lower nozzle to a height of 1_2, wherein a first type hollow portion corresponding to the first type nozzle is formed to penetrate the interior of the first type lower nozzle and the interior of the first type upper nozzle with respect to the first position, the lower end region of the first type hollow portion is connected to the region of the first type purge hole, and the upper surface of the first type upper nozzle is in contact with at least a portion of the lower surface region of the hoop.

[0027] In one example, the lower nozzle of the first type is formed above the purge hole of the first type with a 1_1 diameter (a portion of the 1_1 diameter corresponds to the hollow portion of the first type) and a height of approximately 1_1, centered on the first position, and the upper nozzle of the first type is formed above the lower nozzle of the first type with a 1_2 diameter (a portion of the 1_2 diameter corresponds to the hollow portion of the first type) and a height of approximately 1_2, centered on the first position.

[0028] In one example, at least one first nozzle groove is formed in the region corresponding to the first diameter, which is the lower surface region of the first type's lower nozzle, in the region that is radially outward from the lower end region of the hollow portion of the first type, and at least one first nozzle groove is formed in the region corresponding to the first diameter, which is the upper surface region of the first type's upper nozzle, in the region that is radially outward from the upper end region of the hollow portion of the first type.

[0029] In one example, a plurality of first-type nozzle insertion grooves are formed on the upper part of the plate body, centered around a first-fourth position spaced apart from the first-type purge hole (the distance from the first-fourth position to the first-type purge hole is greater than the distance from the first-third position to the first-type purge hole and smaller than the radius of the first-type lower nozzle, and the first-fourth position is a plurality of positions that are the same distance from the first-type purge hole), and a plurality of first-type nozzle insertion portions are formed on the lower surface of the first-type lower nozzle so as to protrude at positions corresponding to the first-fourth position, so that the first-type nozzle insertion portions are inserted into the first-type nozzle insertion grooves.

[0030] In one example, a plurality of first-first fastening through-holes are formed on the upper part of the plate body, centered around a plurality of first-fifth positions located between a first-first boundary line (defined by connecting the points furthest from the first-type purge hole among the boundary lines forming the first-type nozzle insertion groove) and a first-second boundary line defined by connecting the outermost shell points on the first-first diameter of the first-type lower nozzle; a plurality of first-second fastening through-holes are formed in the first-type lower nozzle, centered around positions corresponding to the first-fifth positions, so as to penetrate the interior of the first-type lower nozzle; and the first-type screw is connected by sequentially passing through the first-second fastening through-holes and the first-first fastening through-holes to maintain the fastened state between the first-type nozzle and the plate body.

[0031] In one example, a first-type nozzle support is formed in the upper part of the region of the lower nozzle of the first-type, specifically in the region between the boundary line corresponding to the 1_1 boundary line and the boundary line corresponding to the 1_2 boundary line. At least one 1_3 fastening through-hole is formed in the first-type nozzle support so as to penetrate the interior of the first-type nozzle support centered on the position corresponding to the 1_5 position. The first-type screw is connected by sequentially passing through the 1_3 fastening through-hole, the 1_2 fastening through-hole, and the 1_1 fastening through-hole, thereby maintaining the fastened state of the first-type nozzle support, the first-type nozzle, and the plate body.

[0032] In one example, the first type of hollow portion is formed such that the size of the lower end region of the first type of hollow portion is smaller than the size of the region of the first type of purge hole, and the size of the upper end region of the first type of hollow portion is the same as the size of the lower end region of the first type of hollow portion.

[0033] In one example, the first type of purge hole is formed to penetrate the plate body downward to a predetermined depth (the predetermined depth is less than the height of the plate body), and the lower end region of the first type of purge hole is connected to the upper end region of the first type of piping.

[0034] In one example, at least one second type purge hole corresponding to the second type nozzle is formed on the upper part of the plate body, centered on the second position.

[0035] In one example, the second type nozzle is formed on the upper part of the plate body to a second height, and a second type hollow portion corresponding to the second type nozzle is formed to penetrate the interior of the second type nozzle with the second position as the center, and the lower end region of the second type hollow portion is connected to the region of the second type purge hole, and the upper surface of the second type nozzle is in contact with at least a portion of the lower surface region of the hoop.

[0036] In one example, the second type nozzle has at least one second_1 nozzle groove formed in at least a portion of the lower surface region of the second type nozzle, and at least one second_2 nozzle groove formed in at least a portion of the upper surface region of the second type nozzle.

[0037] In one example, the 2_1 nozzle groove is formed in the lower surface region of the 2 type nozzle, in the region radially outward from the lower end region of the hollow portion of the 2 type, and the 2_2 nozzle groove is formed in the upper surface region of the 2 type nozzle, in the region radially outward from the upper end region of the hollow portion of the 2 type.

[0038] In one example, a plurality of second-type nozzle insertion grooves are formed on the upper part of the plate body, centered around second and third positions spaced apart from the second-type purge hole (where the distance from the second and third positions to the second-type purge hole is smaller than the radius of the second-type nozzle, and the second and third positions are multiple positions all at the same distance from the second-type purge hole), and a plurality of second-type nozzle insertion portions are formed on the lower surface of the second-type nozzle so as to protrude at positions corresponding to the second and third positions, so that the second-type nozzle insertion portions are inserted into the second-type nozzle insertion grooves.

[0039] In one example, a plurality of 2_1 fastening through holes are formed on the upper part of the plate body, centered around a plurality of 2_4 positions located between a 2_1 boundary line (defined by connecting the points furthest from the 2-type purge hole among the boundary lines forming the 2-type nozzle insertion groove) and a 2_2 boundary line defined by connecting the outermost shell points on the diameter of the 2-type nozzle; a plurality of 2_2 fastening through holes are formed in the 2-type nozzle so as to penetrate the interior of the 2-type nozzle, centered around positions corresponding to the 2_4 positions; and the 2-type screw is connected by sequentially passing through the 2_2 fastening through holes and the 2_1 fastening through holes to maintain the fastened state between the 2-type nozzle and the plate body.

[0040] In one example, a second-type nozzle support is formed on the upper part of the upper surface region of the second-type nozzle, in the region between the boundary line corresponding to the 1_1 boundary line and the boundary line corresponding to the 1_2 boundary line. At least one 2_3 fastening through-hole is formed in the second-type nozzle support so as to penetrate the interior of the second-type nozzle support centered on the position corresponding to the 2_4 position. The second-type screw is connected by sequentially passing through the 2_3 fastening through-hole, the 2_2 fastening through-hole, and the 2_1 fastening through-hole, thereby maintaining the fastened state of the second-type nozzle support, the second-type nozzle, and the plate body.

[0041] In one example, the second type of hollow portion is formed such that the size of the lower end region of the second type of hollow portion is smaller than the size of the region of the second type of purge hole, and the size of the upper end region of the second type of hollow portion is the same as the size of the lower end region of the second type of hollow portion.

[0042] In one example, the second type nozzle includes a second type lower nozzle formed on the upper part of the plate body to a height of approximately 2_1 and a second type upper nozzle formed on the upper part of the second type lower nozzle to a height of approximately 2_2, wherein a second type hollow portion corresponding to the second type nozzle is formed to penetrate the interior of the second type lower nozzle and the interior of the second type upper nozzle with respect to the second position, the lower end region of the second type hollow portion is connected to the region of the second type purge hole, and the upper surface of the second type upper nozzle is in contact with at least a portion of the lower surface region of the hoop.

[0043] In one example, the lower nozzle of the second type is formed above the purge hole of the second type with a 2_1 diameter (a portion of the 2_1 diameter corresponds to the hollow portion of the second type) and a height of approximately 2_1, centered on the second position, and the upper nozzle of the second type is formed above the lower nozzle of the second type with a 2_2 diameter (a portion of the 2_2 diameter corresponds to the hollow portion of the second type) and a height of approximately 2_2, centered on the second position.

[0044] In one example, at least one 2_1 nozzle groove is formed in the region corresponding to the 2_1 diameter, which is the lower surface region of the lower nozzle of the second type, in the region that is radially outward from the lower end region of the hollow part of the second type, and at least one 2_2 nozzle groove is formed in the region corresponding to the 2_2 diameter, which is the upper surface region of the upper nozzle of the second type, in the region that is radially outward from the upper end region of the hollow part of the second type.

[0045] In one example, a plurality of second-type nozzle insertion grooves are formed on the upper part of the plate body, centered around second and third positions spaced apart from the second-type purge holes (where the distance from the second and third positions to the second-type purge holes is smaller than the radius of the second-type lower nozzle, and the second and third positions are multiple positions all at the same distance from the second-type purge holes), and a plurality of second-type nozzle insertion portions are formed on the lower surface of the second-type lower nozzle so as to protrude at positions corresponding to the second and third positions, so that the second-type nozzle insertion portions are inserted into the second-type nozzle insertion grooves.

[0046] In one example, a plurality of 2_1 fastening through holes are formed on the upper part of the plate body, centered around a plurality of 2_4 positions located between the 2_1 boundary line (defined by connecting the points furthest from the 2-type purge hole among the boundary lines forming the 2-type nozzle insertion groove) and the 2_2 boundary line defined by connecting the outermost shell points on the 2_1 diameter of the 2-type lower nozzle; a plurality of 2_2 fastening through holes are formed in the 2-type lower nozzle, centered around positions corresponding to the 2_4 positions, so as to penetrate the interior of the 2-type lower nozzle; and the 2-type screw is connected by sequentially passing through the 2_2 fastening through holes and the 2_1 fastening through holes, thereby maintaining the fastened state between the 2-type nozzle and the plate body.

[0047] In one example, a second-type nozzle support is formed on the upper part of the upper surface region of the second-type lower nozzle, in the region corresponding to the boundary line corresponding to the 2_1 boundary line and the boundary line corresponding to the 2_2 boundary line. At least one 2_3 fastening through hole is formed in the second-type nozzle support so as to penetrate the interior of the second-type nozzle support centered on the position corresponding to the 2_4 position. The second-type screw is connected by sequentially passing through the 2_3 fastening through hole, the 2_2 fastening through hole and the 2_1 fastening through hole, thereby maintaining the fastened state of the second-type nozzle support, the second-type nozzle, and the plate body.

[0048] In one example, the second type of hollow portion is formed such that the size of the lower end region of the second type of hollow portion is smaller than the size of the region of the second type of purge hole, and the size of the upper end region of the second type of hollow portion is the same as the size of the lower end region of the second type of hollow portion.

[0049] In one example, the second type of purge hole is formed to penetrate the plate body to a predetermined depth (the predetermined depth is less than the height of the plate body) in the downward direction, and the lower end region of the second type of purge hole is connected to the upper end region of the second type of piping. [Effects of the Invention]

[0050] The present invention modifies the structure of a purging plate so that a plurality of nozzles, including at least one first type nozzle and at least one second type nozzle, are formed on the upper part of the plate body, and a first type purge hole and at least one nozzle vertical movement guide hole are formed on the upper part of the plate body corresponding to the first type nozzle, at a position spaced apart from the first type purge hole, thereby preventing a gap from occurring between the first type nozzle and the lower surface of the hoop, which allows nitrogen gas to be supplied to the inside of the hoop without employing a cylinder structure.

[0051] Furthermore, the present invention has the effect of deforming the structure of the first and second type nozzles so that the pressure applied to the nozzles is uniformly distributed when the hoop is mounted on the processing device, thereby preventing the upper surfaces of the first and second type nozzles from collapsing, and causing a portion of the nitrogen gas to rise the lower surface of the first type nozzle through the nozzle vertical movement guide hole, thereby uniformly distributing the pressure applied to the lower surface of the first type nozzle. [Brief explanation of the drawing]

[0052] The following drawings, attached for use in describing embodiments of the present invention, represent only a portion of embodiments of the present invention, and for a person with ordinary skill in the art to which the present invention pertains (hereinafter referred to as "ordinary art"), the other drawings can be obtained from these drawings without inventive work.

[0053] [Figure 1a-1c] This is a simplified diagram of a purging plate according to one embodiment of the present invention. [Figure 2a-2e] This figure shows a simplified connection structure between a pipe fitting coupling group and a plate body according to one embodiment of the present invention. [Figures 3a-3d] This figure shows a simplified connection structure between at least one first-type nozzle and a plate body among a plurality of nozzles according to one embodiment of the present invention. [Figures 4a-4d] This figure shows a simplified connection structure between at least one second-type nozzle and a plate body among a plurality of nozzles according to one embodiment of the present invention. [Modes for carrying out the invention]

[0054] The detailed description of the present invention, as described below, will refer to the accompanying drawings illustrating specific embodiments in which the present invention may be carried out to illustrate each object, each technical solution, and each advantage of the present invention. These embodiments will be described in sufficient detail so that a person of the ordinary skill can carry out the present invention.

[0055] Furthermore, the word “including” and its variations throughout the detailed description of the invention and each claim are not intended to exclude any other technical features, appendices, components, or steps. Other purposes, advantages, and characteristics of the invention will become apparent to an ordinary person, partly from this description and partly from the practice of the invention. The following examples and drawings are provided as illustrative examples and are not intended to limit the invention.

[0056] Furthermore, the present invention encompasses all possible combinations of the embodiments shown herein. It should be understood that while the various embodiments of the present invention differ from one another, they do not necessarily have to be mutually exclusive. For example, certain shapes, structures, and characteristics described herein are embodied in one embodiment without departing from the spirit and scope of the invention in relation to that embodiment. It should also be understood that the position or arrangement of individual components within each disclosed embodiment may be modified without departing from the spirit and scope of the invention. Therefore, the detailed descriptions below should not be taken as restrictive, and the scope of the invention is limited only by the appended claims, along with all equivalent claims, provided they are adequately described. Similar reference numerals in the drawings refer to parts that are identical or have similar functions across various aspects.

[0057] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that persons with ordinary skill in the art to which the present invention pertains can easily implement the present invention.

[0058] Figures 1a to 1c show a simplified purging plate according to one embodiment of the present invention.

[0059] First, referring to Figures 1a to 1c, these are perspective views of the purging plate 1000. The purging plate 1000 can be inserted into the separation space formed between the upper surface of a processing device such as a load port, STB (Side Track Buffer), OHB (Over Head Buffer), and stocker, which do not have a purging function, and the lower surface of a hoop, thereby assisting in purging the inside of the hoop.

[0060] In this case, the purging plate 1000 may include a plate body 100, a pipe fitting connection group 200, a plurality of pipes, namely first pipes 310 to fourth pipes 340, and a plurality of nozzles, namely first nozzles 401 to fourth nozzles 404. Incidentally, Figure 1a is a perspective view of the purging plate 1000, Figure 1b is a perspective view of the purging plate 1000 in Figure 1a with the plurality of nozzles 400 removed, and Figure 1c is a perspective view of the purging plate 1000 viewed from above toward the ground. The first pipes 310 to fourth pipes 340 are components included inside the plate body 100 and are not shown in Figures 1a and 1b, so you can refer to Figure 1c to confirm this.

[0061] Specifically, the plate body 100 must be inserted into a separation space formed at a height of approximately 3 mm to 10 mm, and must be manufactured with a thin thickness. Therefore, it can be made from a material with high toughness, strength, and impact resistance. In addition, the plate body 100 has three guide pin insertion holes 120 to help ensure that it is mounted in the correct position when attached to the processing device. Furthermore, a portion of the plate body 100 can be left open to prevent contact with structures including various sensors formed on the upper part of the processing device.

[0062] Next, the pipe fitting joint group 200 can be integrally formed in a predetermined single area on the edge 110 of the plate body 100. Although the present invention shows the pipe fitting joint group 200 formed on the lower part of the edge 110, this does not preclude the pipe fitting joint group 200 from being formed on the side or upper part of the edge 110. Furthermore, the pipe fitting joint group 200 can be formed in a predetermined single area on the edge of the plate body 100 located between the first nozzle 401 and the second nozzle 402, or on the edge of the plate body 100 located between the first nozzle 401 and the third nozzle 403, and so on. Those skilled in the art can make various modifications. By forming the pipe fitting joint group 200 in a predetermined single area on the edge 110 of the plate body 100 in this way, it is possible to effectively reduce costs because it eliminates the need for a configuration that collects pipes by gas type, such as nitrogen gas and exhaust gas, outside the purging plate 1000, and does not require the labor costs associated with this. In another form, the pipe fitting connection group 200 may be formed in a separate manner by positioning each of the multiple pipe fitting connections separately within a predetermined single area on the edge 110 of the plate body 100. Incidentally, according to the conventional technology, each of the multiple pipe fitting connections can be formed on the edge of the plate body 100 adjacent to each of the first nozzles 401 to the fourth nozzles 404. In this case, the required overall length of the first pipes 310 to the fourth pipes 340 formed inside the plate body 100 is reduced. However, this has the disadvantage of requiring a configuration in which the pipes are organized by gas type outside the plate body 100, and the associated labor costs. Therefore, in the present invention, the structure of the purging plate 1000 is improved by forming the pipe fitting connection group 200 in a predetermined single area on the edge 110 of the plate body 100.

[0063] At this time, the pipe fitting coupling group 200 includes a plurality of pipe fitting housings, namely the first pipe fitting housing 210_1 to the fourth pipe fitting housing 210_4, and each of the pipe fittings (not shown) corresponding to each of the first pipe fitting housing 210_1 to the fourth pipe fitting housing 210_4 is coupled to one end of each of the first pipe fitting housing 210_1 to the fourth pipe fitting housing 210_4 (corresponding to the surface in the pipe fitting housing group 200 where a circular hole is observed). In other words, since each of the pipe fittings (not shown) is coupled in a manner in which it is inserted into each of the first pipe fitting housing 210_1 to the fourth pipe fitting housing 210_4, the cross-sectional size of each of the first pipe fitting housing 210_1 to the fourth pipe fitting housing 210_4 is formed to be larger than the cross-sectional size of each of the pipe fittings (not shown).

[0064] Furthermore, referring to Figure 1c, the pipe fitting coupling group 200 further includes an integrated coupling body 230, and the first to fourth pipe fitting housings 210_1 to 210_4, which serve as multiple pipe fitting housings, can be positioned inside the integrated coupling body 230. Alternatively, the structure of the pipe fitting coupling group 200 can be modified to further include multiple separate coupling bodies (not shown), so that each of the first to fourth pipe fitting housings 210_1 to 210_4 is positioned inside the corresponding separate coupling body (not shown). In this case, the first to fourth pipe fitting housings 210_1 to 210_4 can correspond to at least one first type pipe fitting housing and at least one second type pipe fitting housing, and the meanings of the first and second types will be described later.

[0065] Furthermore, as described above, the multiple pipes are formed inside the plate body 100, and the other end of each of the first pipe fitting housings 210_1 to the fourth pipe fitting housings 210_4 can be directly or indirectly connected to one end of each of the corresponding first pipes 310 to the fourth pipes 340.

[0066] This is possible in which, in order to simplify the internal structure of the pipe fitting coupling group 200, the pipe fitting coupling group 200 includes first pipe fitting housings 210_1 to fourth pipe fitting housings 210_4 inside, and the other end of each of the first pipe fitting housings 210_1 to fourth pipe fitting housings 210_4 (i.e., located in a circle from each of the pipe fittings to be coupled) is directly connected to one end of the corresponding first pipe 310 to fourth pipe 340, but the inside of the pipe fitting coupling group 200 (more specifically, the integrated coupling body 23 The first connecting passage 220_1 to the fourth connecting passage 220_4 may be further included as multiple connecting passages within the 0, and each of the first connecting passage 220_1 to the fourth connecting passage 220_4 may be positioned so that each of the other ends of the first pipe fitting housing 210_1 to the fourth pipe fitting housing 210_4 is connected to each of the first pipe 310 to the fourth pipe 340, so that each of the other ends of the first pipe fitting housing 210_1 to the fourth pipe fitting housing 210_4 is indirectly connected to each of the corresponding first pipe 310 to the fourth pipe 340.

[0067] Furthermore, referring to Figure 1a, the first nozzle 401 to the fourth nozzle 404, which are multiple nozzles, are structures formed on the upper part of the plate body 100, and the first nozzle 401 to the fourth nozzle 404 can correspond to at least one first type nozzle and at least one second type nozzle.

[0068] Incidentally, when purging is performed with the hoop fixed on the processing device, nitrogen gas is drawn into the hoop from at least one nozzle on the processing device, and exhaust gas containing fumes, moisture, etc. remaining inside the hoop is drawn into the plate body 100 through a different nozzle than the one into which the nitrogen gas was drawn, thereby discharging the exhaust gas. However, according to the specifications of the processing device, it can be composed of a maximum of four nozzles, so the input and output based on the hoop (i.e., input is nitrogen gas, output is exhaust gas) can be realized in one of the following configurations: 1in-1out, 3in-1out, and 2in-2out.

[0069] Therefore, in this invention, nozzles that draw nitrogen gas into the hoop within the first nozzle 401 to the fourth nozzle 404 are described as first-type nozzles, and nozzles that draw exhaust gas discharged from the hoop into the plate body 100 within the first nozzle 401 to the fourth nozzle 404 are described as second-type nozzles. At this time, referring to Figures 1a and 1b, it can be confirmed that the upper structure of the plate body 100 connected to the first nozzle 401, the second nozzle 402, and the fourth nozzle 404 is formed differently from the upper structure of the plate body 100 connected to the third nozzle 403. This corresponds to the 3in-1out structure among the 1in-1out, 3in-1out, and 2in-2out structures described above, with the first nozzle 401, the second nozzle 402, and the fourth nozzle 404 being first-type nozzles, and the third nozzle 403 being a second-type nozzle. However, the purging plate 1000 in the present invention is not limited to being used in a 3-in-1-out structure. It can also be modified into a 1-in-1-out structure in which the first nozzle 401 is used as a first-type nozzle and the third nozzle 403 is used as a second-type nozzle, or into a 2-in-2-out structure in which the first nozzle 401 and the second nozzle 402 are used as first-type nozzles and the third nozzle 403 and the fourth nozzle 404 are used as second-type nozzles, but it must include at least one first-type nozzle and at least one second-type nozzle.

[0070] In summary, a first-type nozzle can be formed in the first to fourth pipes 310 to 340 corresponding to the position of the other end of the first-type pipe connected to the first-type nozzle, and one end of the first-type pipe can be connected to the other end of at least one first-type pipe fitting housing in the first to fourth pipe fitting housings 210_1 to 210_4, and a second-type nozzle can be formed in the first to fourth pipes 310 to 340 corresponding to the position of the other end of the second-type pipe connected to the second-type nozzle, and one end of the second-type pipe can be connected to the other end of at least one second-type pipe fitting housing in the first to fourth pipe fitting housings 210_1 to 210_4. As illustrated in Figures 1a to 1c, the first pipe fitting housing 210_1, the second pipe fitting housing 210_2, and the fourth pipe fitting housing 210_4 are first-type pipe fitting housings, the third pipe fitting housing 210_3 is a second-type pipe fitting housing, the first pipe 310, the second pipe 320, and the fourth pipe 340 are first-type pipes, the third pipe 330 is a second-type pipe, the first nozzle 401, the second nozzle 402, and the fourth nozzle 404 are first-type nozzles, and the third nozzle 403 is a second-type nozzle.

[0071] In this connected state, nitrogen gas for supplying the interior of the plate body 100 from the nitrogen gas supply piping of semiconductor chip manufacturers such as integrated device manufacturers (IDMs) and foundries is supplied directly or indirectly to the first type piping corresponding to the first type piping fitting housing from the nitrogen gas supply piping of semiconductor chip manufacturers such as integrated device manufacturers (IDMs) and foundries, and nitrogen gas supplied from the first type piping can be supplied to the interior of the hoop through the first type nozzle which is in contact with the lower surface of the hoop, and exhaust gas discharged from the hoop can be drawn into the interior of the plate body 100 through the second type nozzle and discharged to the second type piping, and the exhaust gas can be discharged directly or indirectly through the second type piping to the second type piping fitting housing which is connected to one end of the second type piping, and the exhaust gas can be discharged to the outside through the second type piping fitting housing.

[0072] Incidentally, Figures 2a to 2e describe the detailed structure of the pipe fitting housing group 200 and the connection relationship between the pipe fitting housing group 200 and the first pipes 310 to 4th pipes 340 as described in Figure 1c. Figures 3a to 3d describe the detailed structure of the first type nozzle and the connection relationship between the first type nozzle and the corresponding first type pipe connected thereto. Figures 4a to 4d describe the detailed structure of the second type nozzle and the connection relationship between the second type nozzle and the corresponding second type pipe connected thereto.

[0073] Figures 2a to 2e show a simplified representation of the connection structure between the pipe fitting group and the plate body.

[0074] First, referring to Figure 2a, we see an enlarged view of the neighboring area within the purging plate 1000 that includes the pipe fitting connection group 200. Here, the A-A' section is explained in Figure 2b, the B-B' section in Figure 2c, the C-C' section in Figure 2d, and the D-D' section in Figure 2e.

[0075] Referring to Figure 2b, it can be seen that the pipe fitting connection group 200 includes the first pipe fitting housing 210_1 to the fourth pipe fitting housing 210_4 inside the integrated connection body 230. As another example, the first type pipe fitting housings can be positioned adjacent to each other within the first pipe fitting housings 210_1 to the fourth pipe fitting housing 210_4 inside the integrated connection body 230, and the second type pipe fitting housings can be positioned adjacent to each other within the first pipe fitting housings 210_1 to the fourth pipe fitting housing 210_4. Alternatively, the first type pipe fitting connection and the second type pipe fitting connection can be positioned spaced apart from each other to more clearly distinguish between the first type pipe fitting connection and the second type pipe fitting connection.

[0076] Furthermore, the pipe fitting coupling group 200 may further include a first connecting passage 220_1 to a fourth connecting passage 220_4, each corresponding to one of the first pipe fitting housings 210_1 to a fourth pipe fitting housings 210_4. In addition, the first connecting passages 220_1 to a fourth connecting passage 220_4 may be located inside the integrated coupling body 230, and specifically, at least a portion of one end of the first connecting passages 220_1 to a fourth connecting passage 220_4 may be connected to the other end of the corresponding first pipe fitting housings 210_1 to a fourth pipe fitting housings 210_4. In this case, as explained in Figures 1a to 1c, if the first pipe fitting housing 210_1, the second pipe fitting housing 210_2, and the fourth pipe fitting housing 210_4 are first-type pipe fitting housings, and the third pipe fitting housing 210_3 is a second-type pipe fitting housing, then the first connecting passages 220_1, 220_2, and 4th connecting passages 220_4, which are connected to the other ends of the first pipe fitting housing 210_1, the second pipe fitting housing 210_2, and the fourth pipe fitting housing 210_4, respectively, become first-type connecting passages, and the third connecting passage 220_3, which is connected to the other end of the third pipe fitting housing 210_3, can become a second-type connecting passage.

[0077] Furthermore, the integrated coupling body 230 includes first pipe fitting housings 210_1 to fourth pipe fitting housings 210_4 and first connecting passages 220_1 to fourth connecting passages 220_4, wherein each of the first pipe fitting housings 210_1 to fourth pipe fitting housings 210_4 is separated by at least one partition wall, and each of the first connecting passages 220_1 to fourth connecting passages 220_4 can also be separated by at least one partition wall. For example, the first pipe fitting housing section 210_1 and the second pipe fitting housing section 210_2 are separated by a first partition wall 231 formed inside the integrated main body 230, and the first connecting passage 220_1 and the second connecting passage 220_2 are separated by a second partition wall 232 formed inside the integrated main body 230, and the second pipe fitting housing section 210_2 and the third pipe fitting housing section 210_3 are separated by a second partition wall 232 formed inside the integrated main body 230, and the second connecting passage 220_2 and the third connecting passage 220_3 are separated by a third partition wall 233 formed inside the integrated main body 230, and the third pipe fitting housing section 210_3 and the fourth pipe fitting housing section 210_4 are separated by a third partition wall 233 formed inside the integrated main body 230, and the third connecting passage 220_3 and the fourth connecting passage 220_4 are separated. In this case, the number of partitions required inside the integrated main body 230 can be changed depending on the number of multiple pipe fitting housings and the number of multiple connecting passages.

[0078] Referring to Figure 2c, a cross-section is shown that allows us to examine the internal structure of the third pipe fitting housing 210_3 within the third nozzle 403 and pipe fitting coupling group 200. The other end 212_3 of the third pipe fitting housing 210_3 can be connected to the lower region, which is at least a part of one end 221_3 of the third connecting passage 220_3. At this time, with the purging plate 1000 attached to the top surface of the processing apparatus and the hoop secured to the processing apparatus, the direction from the processing apparatus toward the ground should be considered as the lower side. Incidentally, the lower region may be the lowest region of one end 221_3 of the third connecting passage 220_3, but it may also correspond to a region located slightly above the lowest point. In Figure 2c, for convenience, the lower region is shown as the region located slightly above the lowest point, and below, the lower region will be used to encompass both of the above cases.

[0079] As shown in Figure 2b, since pipe fittings of the same standard are inserted and connected into each of the first pipe fitting housings 210_1 to the fourth pipe fitting housings 210_4, the sizes of each of the first pipe fitting housings 210_1 to the fourth pipe fitting housings 210_4 are formed to be the same, and for the convenience of manufacturing while maintaining consistent performance, the sizes of each of the first connecting passages 220_1 to the fourth connecting passages 220_4 can also be formed to be the same.

[0080] In other words, if we generalize this to a first type for supplying nitrogen gas supplied from the outside into the purging plate 1000 and a second type for discharging exhaust gas discharged from the hoop to the outside of the purging plate 1000, then the other end of the pipe fitting housing of the first type may be connected to the lower region within the region of one end of the connecting passage of the first type, and the other end of the pipe fitting housing of the second type may be connected to the lower region within the region of one end of the connecting passage of the second type.

[0081] In other words, the first type of pipe fitting housing is formed with a 1_1 cross section and a 1_1 length, the first type of connecting passage is formed with a 1_2 cross section and a 1_2 length, and the other end of the first type of pipe fitting housing is connected to at least a portion of the 1_2 cross section corresponding to one end of the first type of connecting passage; the second type of pipe fitting housing is formed with a 2_1 cross section and a 2_1 length, the second type of connecting passage is formed with a 2_2 cross section and a 2_2 length, and the other end of the second type of pipe fitting housing can be connected to at least a portion of the 2_2 cross section corresponding to one end of the second type of connecting passage. In this case, a first type of connecting passage can be formed such that the size of the first_2 cross section is larger than the size of the first_1 cross section, and a second type of connecting passage can be formed such that the size of the second_2 cross section is larger than the second_1 cross section. Furthermore, a first type of pipe fitting housing can be formed such that the first_1 cross section is a circle with a first diameter, and a second type of pipe fitting housing can be formed such that the second_1 cross section is a circle with a second diameter.

[0082] For example, regarding the third pipe fitting housing 210_3 and the third connecting passage 220_3 shown in Figure 2c, each of the third pipe fitting housing 210_3 and the third connecting passage 220_3 can correspond to a second type pipe fitting housing and a second type connecting passage, and in this case, the length of the third pipe fitting housing 210_3 is the second-first length L 2_1 Corresponding to this, the length of the third connecting passage 220_3 is the length of the second_2 L 2_2 Corresponding to this, and referring to Figure 2d, the cross section 213_3 of the third pipe fitting housing section 210_3 is the second_1 cross section S 2_1 Corresponding to this, and referring to Figure 2e, the cross section 223_3 of the third connecting passage 220_3 is the second_2 cross section S 2_2 This can accommodate the above. Incidentally, in Figure 2d, θ1 is the first cross-section S of the first type pipe fitting housing. 1_1 This refers to the diameter corresponding to θ2, where θ2 is the second_1 cross-section S of the second type pipe fitting housing. 2_1 This refers to the diameter corresponding to W in Figure 2e.p_1 means the width corresponding to the first_2 cross-section S of the first type of connecting passageway 1_2 and W p_2 means the width corresponding to the second_2 cross-section S of the second type of connecting passageway 2_2 and h p_1 means the height corresponding to the first_2 cross-section S of the first type of connecting passageway 1_2 and h p_2 means the height corresponding to the second_2 cross-section S of the second type of connecting passageway and may be such 2_2

[0083] At this time, the width of the third connecting passageway 220_3 in Fig. 2b (corresponding to W in Fig. 2e p_2 ) is larger than the diameter of the third pipe fitting accommodating portion 210_3 (corresponding to θ2 in Fig. 2d), and the height of the third connecting passageway 220_3 in Fig. 2c (corresponding to h in Fig. 2e p_2 ) is larger than the diameter of the third pipe fitting accommodating portion 210_3 (corresponding to θ2 in Fig. 2d). Therefore, the size of the second_2 cross-section S corresponding to the third connecting passageway 220_3 2_2 is considered to be larger than the size of the second_1 cross-section S 2_1 . More intuitively, Figs. 2d and 2e show the shape of the cross-section cut while maintaining the same size of the third nozzle 403 and the pipe fitting coupling portion group 200. Therefore, when Figs. 2d and 2e are compared, it can be seen that the size of the second_2 cross-section S 2_2 is larger than the size of the second_1 cross-section S 2_1 . And in Fig. 2e, the size of the first_2 cross-section S which is the cross-section 223_1 of the first connecting passageway, the cross-section 223_2 of the second connecting passageway, and the cross-section 223_4 of the fourth connecting passageway 1_2 and the size of the second_2 cross-section S which is the cross-section 223_3 of the third connecting passageway 2_2 may be formed to be the same, but can also be formed differently

[0084] ​Furthermore, pipe fittings are typically formed in a cylindrical shape to facilitate the connection of cylindrical pipes, and as shown in Figure 2d, circular cross-sections with diameters θ1 (the diameter of the first type of pipe fitting housing) and θ2 (the diameter of the second type of pipe fitting housing) appear, allowing each pipe fitting to be easily connected to each of the first to fourth pipe fitting housings 210_1. At this time, in order to save costs, θ1 and θ2 should be formed identically so that pipe fittings of the same standard can be used, hence the first cross-section S 1_1 Size and 1st_2nd cross section S 1_2 The size may be the same, but is not limited to that.

[0085] Then, in Figure 2c, one end 331 of the third pipe 330 can be connected to the upper region within the area of ​​the other end 222_3 of the third connecting passage 220_3. At this time, the purging plate 1000 is attached to the top surface of the processing device, and with the hoop securely attached to the processing device, the direction from the ground toward the processing device can be considered as the upper side. If this is generalized to the first and second types, one end of the first type pipe can be connected to the upper region within the area of ​​the other end of the first type connecting passage, and one end of the second type pipe can be connected to the upper region within the area of ​​the other end of the second type connecting passage.

[0086] In this case, one end of the first type of piping can be connected to at least a portion of the first_2 cross section corresponding to the other end of the first type of connecting passage, and one end of the second type of piping can be connected to at least a portion of the second_2 cross section corresponding to the other end of the second type of connecting passage.

[0087] For example, the third connecting passage 220_3 and the third pipe 330 in Figure 2c correspond to the second type connecting passage and the second type pipe, and the height of one end 331 of the third pipe 330 is the height of the other end 222_3 of the third connecting passage 220_3 (h in Figure 2e). p_2It can be seen that it corresponds to a part of the (which falls under) section S. Furthermore, referring to Figure 2e, the size of one end 311 of the first pipe, one end 321 of the second pipe, and one end 341 of the fourth pipe are the same as the size of the first and second cross-section S. 2_2 It is formed to correspond to a part of the size, and the size of the cross-section of one end 331 of the third pipe is the size of the second cross-section S 2_2 It can be formed to correspond to a portion of the size. This is because, in a situation where a fluid (gas) is continuously supplied at a constant flow rate, when the fluid passes from a point with a large cross-sectional area to a point with a small cross-sectional area, the fluid pressure increases but the flow velocity decreases, and conversely, when the fluid passes from a point with a small cross-sectional area to a point with a large cross-sectional area, the fluid pressure decreases but the flow velocity increases. This property can be used to increase the pressure of nitrogen gas supplied to one end of the piping.

[0088] Up to this point, we have described the structure of the third pipe fitting housing 210_3, the third connecting passage 220_3, and the third pipe 330 corresponding to the second type, and their connection relationships, with reference to Figures 2a to 2e. However, with reference to Figures 2b, 2d, and 2e, the structure of the first connecting passage, the second connecting passage, and the fourth connecting passage, and the first pipe, the second pipe, and the fourth pipe, which are connected to the first connecting passage, the second connecting passage, and the fourth connecting passage, which correspond to the first type of pipe fitting housing, and their connection relationships may also be formed in the same / similar manner.

[0089] On the other hand, if, as shown in Figure 2c, the other end 212_3 of the third pipe fitting housing 210_3 is directly connected to one end 331 of the third pipe 330 (i.e., there is no third connecting passage 220_3), then the second_1 cross section S, which corresponds to the other end 212_3 of the third pipe fitting housing 210_3 as described in Figure 2d, is formed when one end 331 of the third pipe 330 corresponds to the other end 212_3 of the third pipe fitting housing 210_3. 2_1In the first and second types, the pipe fitting housing of the first type is formed with a 1_1 cross section and a 1_1 length, and one end of the first type pipe is connected to the other end of the 1_1 cross section corresponding to at least a portion of the pipe. The pipe fitting housing of the second type is formed with a 2_1 cross section and a 2_1 length, and one end of the second type pipe can be connected to the other end of the 2_1 cross section corresponding to at least a portion of the pipe.

[0090] Having previously discussed the connection between the pipe fitting joint and the plate body, we will now specifically explain the connection between multiple nozzles and the plate body with reference to Figures 3a to 4d.

[0091] Figures 3a to 3d show a simplified connection structure between at least one of the multiple nozzles of type 1 and the plate body.

[0092] Figure 3a shows a magnified view of the area within the purging plate 1000 that includes the first nozzle 401, and Figure 3b shows a magnified view of the same area as in Figure 3a with multiple nozzles removed from the purging plate 1000. As explained in Figure 1b, the first nozzle 401, the second nozzle 402, and the fourth nozzle 404 in Figure 3a can correspond to the first type nozzle 400_1, and nitrogen gas supplied from the outside can be supplied into the hoop through the first type nozzle 400_1. On the other hand, as will be specifically explained in Figures 4a to 4b, the third nozzle 403 can correspond to the second type nozzle 400_2. However, although the present invention exemplifies a 3-in-1-out input / output configuration based on the hoop, it will be clear to those skilled in the art that, depending on the manufacturing environment, it can be modified to include at least one first type nozzle 400_1 and at least one second type nozzle 400_2, such as 1-in-1-out or 2-in-2-out, as described above.

[0093] Furthermore, referring to Figures 3a and 3b, the upper part of the plate body 100 corresponding to the position where the first type nozzle 400_1 is mounted can be formed with a first type purge hole 131, at least one nozzle vertical movement guidance hole 141, multiple first type nozzle insertion holes 151, and multiple first fastening through holes 161.

[0094] Referring to Figure 3c, which shows the A-A' cross-section in Figure 3a, the first type nozzle 400_1 is located at position 1_1 X, which is the other end position 302_1 of the first type piping 300_1. 1_1 and the first and second position X is a position 303_1 which is a predetermined distance away from one end of the first type of piping 300_1. 1_2 It can be formed on the upper part of the plate body 100 with one of the first positions X1 as the center, but in Figure 3c, the first and second positions X 1_2 This can be considered as the case where the first position X1 is present. Therefore, the first type nozzle 400_1 can be in contact with the lower surface of the hoop, allowing nitrogen gas supplied from the first type pipe 300_1 to be supplied into the interior of the hoop.

[0095] At this time, a first-type purge hole 131 corresponding to a first-type nozzle 400_1 is formed in the upper part of the plate body 100, centered on a first position X1, and at least one nozzle vertical movement guide hole 141 corresponding to the first-type purge hole 131 can be formed centered on at least one first-third position X3 spaced away from the first-type purge hole 131. Specifically, the first-type purge hole 131 is formed to penetrate the plate body 100 downwards to a predetermined depth (the predetermined depth is less than the height of the plate body 100), and the lower end region of the first-type purge hole 131 can be connected to the upper end region of the first-type piping 300_1.

[0096] Conventionally, when the first type nozzle 400_1 contacts the lower surface of the hoop, and nitrogen gas supplied at a high flow rate is drawn into the hoop, considerable pressure is applied to the hoop, causing the hoop to rise instantaneously and creating a gap between the first type nozzle 400_1 and the lower surface of the hoop. Alternatively, the shape of the lower surface of the hoop may differ depending on the hoop manufacturer, which can also create a gap between the first type nozzle 400_1 and the lower surface of the hoop. This creates a problem in which at least a portion of the nitrogen gas supplied into the hoop leaks out through this gap. To solve this problem, a cylinder structure has been added inside the processing device that embodies the purging function, allowing the nozzle to rise through the cylinder structure and eliminating the gap between the nozzle and the lower surface of the hoop, thereby preventing the nitrogen gas from leaking out.

[0097] However, the purging plate 1000 of the present invention is a plate that assists in performing purging by being attached to a processing device that does not have a purging function, and since it is a structure formed within a maximum of 10 mm including the height of the plate body 100 and the height of the first type nozzle 400_1, there is a problem that it is impossible to further include a cylinder structure inside the purging plate 1000.

[0098] Therefore, the purging plate 1000 of the present invention has an important feature that solves the problem of nitrogen gas leakage without employing a cylinder structure. This is achieved by further forming nozzle vertical movement guidance holes 141 smaller than the first type purge holes, located at a certain distance from the first type purge holes 131 on the upper part of the plate body 100, and by allowing nitrogen gas to be supplied through the first type piping 300_1, a portion of the supplied nitrogen gas applies pressure to the lower surface of the first type nozzle 400_1 through the nozzle vertical movement guidance holes 141, causing the first type nozzle 400_1 to rise so that the upper surface of the first type nozzle 400_1 is in close contact with the lower surface of the hoop.

[0099] In addition, nitrogen gas is supplied stably into the hoop through the structural deformation of the first type nozzle 400_1, which can be explained as follows. Incidentally, the first type nozzle 400_1 can be formed on the upper part of the plate body 100 at a first height h1, and this may be realized in a single layer, but more specifically, it may be formed in two layers (i.e., the first type lower nozzle 410_1 and the first type upper nozzle 420_1). In this regard, the case in which it is realized in a single layer will be explained first, and then the case in which it is realized in two layers will be explained later.

[0100] First, a first-type hollow section 431 corresponding to a first-type nozzle 400_1 is formed to penetrate the interior of the first-type nozzle 400_1 with a first position X1 as the center, and the lower end region of the first-type hollow section 431 is connected to the region of the first-type purge hole 131, so that the upper surface of the first-type nozzle 400_1 is in contact with at least a portion of the lower surface region of the hoop. In this case, the size of the lower end region of the first-type hollow section 431 can be formed to be smaller than the size of the region of the first-type purge hole 131. However, although Figure 3c shows that the size of the lower end region of the first-type hollow section 431 is formed to be smaller than the size of the region of the first-type purge hole 131, it is not limited to this, and the size of the lower end region of the first-type hollow section 431 can be larger than or the same as the size of the region of the first-type purge hole 131. Furthermore, the first type hollow portion 431 can be formed such that the size of the upper end region of the first type hollow portion 431 is the same as the size of the lower end region of the first type hollow portion 431.

[0101] Furthermore, at least one first nozzle groove 441_1 can be formed in at least a portion of the lower surface region of the first type nozzle 400_1, and at least one first second nozzle groove 441_2 can be formed in at least a portion of the upper surface region of the first type nozzle 400_1. More specifically, the first nozzle groove 441_1 can be formed in the lower surface region of the first type nozzle 400_1, in the region radially outward from the lower end region of the first type hollow portion 431, and the first second nozzle groove 441_2 can be formed in the upper surface region of the first type nozzle 400_1, in the region radially outward from the upper end region of the first type hollow portion 431.

[0102] This means that when a portion of the nitrogen gas through the nozzle vertical movement guide hole 141 pressurizes the lower surface of the first type nozzle 400_1 and causes the first type nozzle 400_1 to rise, if the lower surface of the first type nozzle 400_1 is flat, then the nitrogen gas will be concentrated at a point on the lower surface of the first type nozzle 400_1 (i.e., the first-third position X). 1_3 The nozzle rises further at the point corresponding to the above point, and as it moves further away, the lower surface of the first type nozzle 400_1 rises only slightly, which can create a large gap between the lower end region of the hoop and the upper surface region of the first type nozzle 400_1 at the edges. Therefore, in order to prevent this, the present invention adds a first nozzle groove 441_1 on the lower surface of the first type nozzle 400_1, and the nitrogen gas supplied through the nozzle vertical movement guide hole 141 concentrates pressure between each of the first nozzle grooves 441_1, thereby reducing the curvature of each of the first nozzle grooves 441_1, and thus a uniform pressure can be applied to the entire lower surface of the first type nozzle 400_1.

[0103] Furthermore, since the upper surface of the first type nozzle 400_1 is in contact with at least a portion of the lower surface area of ​​the hoop, the first type nozzle 400_1 can be made of an elastic material, and the hardness of the lower surface of the hoop is higher than that of the first type nozzle 400_1. Therefore, if the upper surface of the first type nozzle 400_1 is formed flat, when the hoop is attached to the processing device, the first type nozzle 400_1 may be unevenly crushed by the lower surface of the hoop. To prevent this, the present invention adds first and second nozzle grooves 441_2 on the upper surface of the first type nozzle 400_1, and concentrates pressure between each of the first and second nozzle grooves 441_2 by the lower surface of the hoop, thereby reducing the curvature of each of the first and second nozzle grooves 441_2. This allows uniform pressure to be applied to the entire upper surface of the first type nozzle 400_1, reducing the possibility of a gap occurring between the lower surface of the hoop and the first type nozzle 400_1.

[0104] Furthermore, on the upper part of the plate body 100, there are multiple first-type nozzle insertion grooves 151 spaced apart from the first-type purge holes at multiple first-fourth positions X 1_4 It is formed around the first type nozzle 400_1, and on the lower surface of the first type nozzle 400_1, there are multiple first type nozzle insertion parts 451 at the first_4 position X 1_4 The first type nozzle insertion portion 451 is formed to protrude at a position corresponding to the first type nozzle insertion groove 151, so that it can be inserted into the first type nozzle insertion groove 151. At this time, the first_4 position X 1_4 The distance from each of these to the first type purge hole 131 is the distance from the first and third positions X 1_3 The distance from the first type purge hole 131 is greater than the distance from the first type nozzle 400_1 and less than the radius of the first type nozzle 400_1, and the first_4 position X 1_4 Each of these may represent one of several positions that are the same distance from the first type purge hole 131. In this case, position X_1_4 1_4If there are many positions where the first type of nozzle insertion groove 151 converges to infinity, then, as shown in Figure 3b, the first type of nozzle insertion groove 151 can be formed in a circular band shape, and the first and fourth positions X 1_4 Even if the multiple positions corresponding to this do not converge to infinity, it is possible to make them have the same or similar effect.

[0105] In other words, when the first type nozzle insertion section 451 is inserted into the first type nozzle insertion groove 151, it is possible to temporarily prevent nitrogen gas from flowing out into the gap between the lower surface of the first type nozzle 400_1 and the upper surface of the plate body 100 when the lower surface of the first type nozzle 400_1 rises due to nitrogen gas being injected into the lower surface of the first type nozzle 400_1 through the nozzle vertical movement guide hole 141.

[0106] The following describes the structure of the first type nozzle 400_1 when it is embodied in two layers.

[0107] First, the first type nozzle 400_1 is placed on the top of the plate body 100 at a height h 1_1 A first type lower nozzle 410_1 is formed to the extent of the first type lower nozzle 410_1 and a first and second height h is formed on the upper part of the first type lower nozzle 410_1 1_2It may include a first type upper nozzle 420_1 which is formed to a certain extent. Furthermore, a first type hollow portion 431 corresponding to the first type nozzle 400_1 is formed to penetrate the interior of the first type lower nozzle 410_1 and the interior of the first type upper nozzle 420_1 with respect to a first position X1, and the lower end region of the first type hollow portion 431 is connected to the region of the first type purge hole 131, and the upper surface of the first type upper nozzle 420_1 is in contact with at least a portion of the lower surface region of the hoop. In this case, as described above, the size of the lower end region of the first type hollow portion 431 is shown to be smaller than the size of the region of the first type purge hole 131. However, the size of the lower end region of the first type hollow portion 431 can be larger than or the same as the size of the region of the first type purge hole 131, and the first type hollow portion 431 can be formed such that the size of the upper end region of the first type hollow portion 431 is the same as the size of the lower end region of the first type hollow portion 431.

[0108] And, of the first type nozzles 400_1, the first type lower nozzle 410_1 is positioned above the first type purge hole 131 with a first position X1 as the center and a first diameter D 1_1 With the 1st height h 1_1 It can be formed to a certain extent, and at this time, the 1st diameter D 1_1 A portion of it may correspond to the hollow section 431 of the first type. Also, the upper nozzle 420_1 of the first type is located above the lower nozzle 410_1 of the first type, with a first and second diameter D centered on the first position X1. 1_2 It can be formed with a height of approximately h2, and at this time, the first and second diameter D 1_2 The diameter D is the 1st diameter. 1_1 Smaller, 1st_2nd diameter D 1_2 A portion of it may correspond to the hollow section 431 of the first type.

[0109] And the first diameter D as the lower surface region of the first type lower nozzle 410_1 1_1In the region corresponding to the above, at least one first nozzle groove 441_1 is formed in the region radially outward from the lower end region of the first type hollow portion 431, and the first second diameter D is the upper surface region of the first type upper nozzle 420_1. 1_2 Of the regions corresponding to this, at least one first_2 nozzle groove 441_2 can be formed in the region that is radially outward from the upper end region of the first type hollow portion 431.

[0110] This is because, as when the first type nozzle 400_1 is realized in a single layer, when a portion of the nitrogen gas through the nozzle vertical movement guide hole 141 pressurizes the lower surface of the first type lower nozzle 410_1 and causes the first type nozzle 400_1 to rise, if the lower surface of the first type lower nozzle 410_1 is flat, then the nitrogen gas will be concentrated at a point on the lower surface of the first type lower nozzle 410_1 where it is injected (i.e., the first-third position X). 1_3 The nozzle rises further at the corresponding point, and as it moves further away from this point, the lower surface of the first type lower nozzle 410_1 rises only slightly, which can create a large gap between the lower end region of the hoop and the upper end region of the first type upper nozzle 420_1 at the edges. Therefore, in order to prevent this, the present invention adds a first nozzle groove 441_1 on the lower surface of the first type lower nozzle 410_1, and the nitrogen gas supplied through the nozzle vertical movement guide hole 141 concentrates pressure between each of the first nozzle grooves 441_1, thereby reducing the curvature of each of the first nozzle grooves 441_1, and thus a uniform pressure can be applied to the entire lower surface of the first type lower nozzle 410_1.

[0111] Furthermore, since the upper surface of the first type upper nozzle 420_1 is in contact with at least a portion of the lower surface area of ​​the hoop, the first type upper nozzle 420_1 can be made of an elastic material. However, because the hardness of the lower surface of the hoop is higher than that of the first type upper nozzle 420_1, if the upper surface of the first type upper nozzle 420_1 is formed flat, when the hoop is attached to the processing device, the lower surface of the hoop may cause the first type upper nozzle 420_1 to be unevenly crushed. Therefore, in order to prevent this, the present invention adds a first and second nozzle groove 441_2 on the upper surface of the first type upper nozzle 420_1, and concentrates pressure between each of the first and second nozzle grooves 441_2 by the lower surface of the hoop, thereby reducing the curvature of each of the first and second nozzle grooves 441_2, and thereby applies uniform pressure to the entire upper surface of the first type upper nozzle 420_1, thereby reducing the possibility of a gap occurring between the lower surface of the hoop and the first type upper nozzle 420_1.

[0112] Furthermore, on the upper part of the plate body 100, there are multiple first-type nozzle insertion grooves 151 spaced apart from the first-type purge holes 131 at multiple first-fourth positions X 1_4 It is formed around the first type, and on the lower surface of the first type lower nozzle 410_1, there are multiple first type nozzle insertion parts 451 at the first_4 position X 1_4 It is formed to protrude at a position corresponding to the first type nozzle insertion portion 451 so that it can be inserted into the first type nozzle insertion groove 151. At this time, the first_4 position X 1_4 The distance from each of these to the first type purge hole 131 is the distance from the first and third positions X 1_3 The distance from the first type purge hole 131 is greater than the radius of the first type lower nozzle 410_1, and the first_4 position X 1_4 Each of these may represent each of a plurality of positions that are the same distance from the first type purge hole 131. In this case, the first_4 position X 1_4If there are many positions where the first type of nozzle insertion groove 151 converges to infinity, then, as shown in Figure 3b, the first type of nozzle insertion groove 151 can be formed in a circular band shape, and the first and fourth positions X 1_4 It is also possible to achieve the same or similar effect even if the multiple positions corresponding to this do not converge to infinity.

[0113] In other words, when the first type nozzle insertion section 451 is inserted into the first type nozzle insertion groove 151, it is possible to temporarily prevent nitrogen gas from flowing out into the gap between the lower surface of the first type lower nozzle 410_1 and the upper surface of the plate body 100 when the lower surface of the first type lower nozzle 410_1 rises due to nitrogen gas being injected into the lower surface of the first type lower nozzle 410_1 through the nozzle vertical movement guide hole 141.

[0114] Furthermore, referring to Figure 3d, other structural modifications of the first type nozzle 400_1 are described as follows: the upper part of the plate body 100 of the first type nozzle 400_1 has multiple first fastening through holes 161 along the first boundary line B 1_1 The first and second boundary lines B are defined by connecting the outermost shell points on the diameter of the first type nozzle 400_1. 1_2 Multiple 1_5 positions X located between 1_5 The nozzle of the first type 400_1 is formed around the first and second fastening through holes 461 at the first and fifth positions X 1_5 It can be formed so as to penetrate the interior of the first type nozzle 400_1 with the corresponding position as the center. At this time, the first_5 position X 1_5 This may mean multiple positions that are all the same distance from the first type purge hole 131, but the first boundary line B 1_1 and the 1st and 2nd boundary line B 1_2 The distance from the first type purge hole 131 between them may mean multiple positions that are different from each other, and the first boundary line B 1_1 This may be defined by connecting the points on the boundary line forming the first type nozzle insertion groove 151 that are furthest from the first type purge hole 131.

[0115] Furthermore, by ensuring that the first type screw sequentially passes through the first and second fastening through holes 461 and the first fastening through hole 161, the first type nozzle 400_1 and the plate body 100 can be maintained in a fastened state.

[0116] Furthermore, within the region of the first type nozzle 400_1, the first boundary line B 1_1 The corresponding boundary line and the 1st and 2nd boundary line B 1_2 A first type nozzle support 470_1 is formed in the upper part of the area corresponding to the boundary line between the first type nozzle support 470_1 and the first type nozzle support 470_1 has at least one first-third fastening through hole 471_1 at the first-fifth position X 1_5 The first type nozzle support 470_1 is formed to penetrate the interior of the first type nozzle support 470_1 with a corresponding position as the center, and the first type screw is formed to sequentially penetrate and connect through the first-third fastening through-hole 471_1, the first-second fastening through-hole 461, and the first-first fastening through-hole 161, thereby maintaining the fastened state of the first type nozzle support 470_1, the first type nozzle 400_1, and the plate body 100.

[0117] Thus, within the region of the first type nozzle 400_1, the first boundary line B 1_1 and the 1st and 2nd boundary line B 1_2 By further forming a first-type nozzle support 470_1 on the upper part of a predetermined area determined by the first type, and maintaining the state in which the first-type nozzle support 470_1, the first-type nozzle 400_1, and the plate body 100 are fastened together using a first-type screw, it is possible not only to prevent the first-type nozzle 400_1 from separating from the plate body 100, but also to secondarily prevent nitrogen gas, which raises the lower surface of the first-type nozzle 400_1 through the nozzle vertical movement guide hole 141 explained in Figure 3c, from being discharged to the outside through the gap between the lower surface of the first-type nozzle 400_1 and the upper surface of the plate body 100.

[0118] Furthermore, a first-type nut insertion opening 171 can be formed at the lower end of the 11th fastening through hole 161 (specifically, at the lower end of the plate body 100), and by inserting a first-type nut into the first-type nut insertion opening 171, and then sequentially passing through the 13th fastening through hole 471_1, the 12th fastening through hole 461, the 11th fastening through hole 161, and the first-type nut insertion opening 171 to connect the first-type screws, the first-type nozzle support 470_1, the first-type nozzle 400_1, and the plate body 100 can be kept in a more stable fastened state.

[0119] The following describes other structural modifications of the first type nozzle 400_1 when it is embodied in two layers.

[0120] Referring to Figure 3d, the upper part of the plate body 100 has multiple 11 fastening through holes 161 along the 11 boundary line B 1_1 and the diameter D of the lower nozzle 410_1 of the first type 1_1 The first and second boundary lines B are defined by connecting the outermost shell points. 1_2 Multiple 1_5 positions X located between 1_5 The lower nozzle 410_1 of the first type is formed around the first_5 position X 1_5 It can be formed so as to penetrate the interior of the first type lower nozzle 410_1 with the corresponding position as the center. At this time, the first_5 position X 1_5 This may mean multiple positions that are all the same distance from the first type purge hole 131, but the first boundary line B 1_1 and the 1st and 2nd boundary line B 1_2 The distance from the first type purge hole 131 between them may mean multiple positions that are different from each other, and the first boundary line B 1_1 This may be defined by connecting the points on the boundary line forming the first type nozzle insertion groove 151 that are furthest from the first type purge hole 131.

[0121] Furthermore, by ensuring that the first type screw sequentially passes through the first and second fastening through holes 461 and the first fastening through hole 161, the first type nozzle 400_1 and the plate body 100 can be maintained in a fastened state.

[0122] Furthermore, within the region of the lower nozzle 410_1 of the first type, the first boundary line B 1_1 The corresponding boundary line and the 1st and 2nd boundary line B 1_2 A first type nozzle support 470_1 is formed in the upper part of the area corresponding to the boundary line between the first type nozzle support 470_1 and the first type nozzle support 470_1 has at least one first-third fastening through hole 471_1 at the first-fifth position X 1_5 The first type nozzle support 470_1 is formed to penetrate the interior of the first type nozzle support 470_1 with a corresponding position as the center, and the first type screw is formed to sequentially penetrate and connect through the first-third fastening through-hole 471_1, the first-second fastening through-hole 461, and the first-first fastening through-hole 161, thereby maintaining the fastened state of the first type nozzle support 470_1, the first type nozzle 400_1, and the plate body 100.

[0123] Thus, within the region of the lower nozzle 410_1 of the first type, the 1_1 boundary line B 1_1 and the 1st and 2nd boundary line B 1_2 By further forming a first-type nozzle support 470_1 on the upper part of a predetermined area determined by the first type, and maintaining the state in which the first-type nozzle support 470_1, the first-type nozzle 400_1, and the plate body 100 are fastened together using a first-type screw, it is also possible to obtain the secondary effect of preventing nitrogen gas, which raises the lower surface of the first-type lower nozzle 410_1 through the nozzle vertical movement guide hole 141 explained in Figure 3c, from being discharged to the outside through the gap between the lower surface of the first-type lower nozzle 410_1 and the upper surface of the plate body 100.

[0124] Furthermore, a first-type nut insertion opening 171 can be formed at the lower end of the 11th fastening through hole 161 (specifically, at the lower end of the plate body 100), and by inserting a first-type nut into the first-type nut insertion opening 171, and then sequentially passing through the 13th fastening through hole 4711, the 12th fastening through hole 461, the 11th fastening through hole 161, and the first-type nut insertion opening 171 to connect the first-type screw, the first-type nozzle support 4701, the first-type nozzle 4001, and the plate body 100 can be further secured.

[0125] We have now seen the connection between the first type nozzle 400_1 and the plate body 100. The connection between the second type nozzle 400_2, mentioned in Figure 3a, and the plate body 100 will be explained with reference to Figures 4a to 4d.

[0126] Figures 4a to 4d show a simplified connection structure between at least one of the second type nozzles among the multiple nozzles and the plate body.

[0127] Figure 4a shows a magnified view of the area of ​​the purging plate 1000 that includes the third nozzle 403, and Figure 4b shows a magnified view of the same area as in Figure 4a with multiple nozzles removed from the purging plate 1000. As explained in Figure 3a, the third nozzle 403 in Figure 4a can correspond to a second type nozzle 400_2, and the exhaust gas discharged from the hoop is drawn into the inside of the plate body 100 through the second type nozzle, thereby allowing the exhaust gas to be discharged into a second type piping connected to the second type nozzle.

[0128] Furthermore, referring to Figures 4a and 4b, the upper part of the plate body 100 corresponding to the position where the second type nozzle (corresponding to the third nozzle 403 in this example) is installed can have a second type purge hole 132, multiple second type nozzle insertion holes 152, and multiple second-first fastening through holes 162 formed thereon. Incidentally, the reason why four multiple first-first fastening through holes 161 are formed in Figure 3b is to prevent the first type nozzle from separating from the plate body due to the relatively high flow rate of nitrogen gas, and the reason why two multiple second-first fastening through holes 162 are formed may be because the possibility of the second type nozzle separating from the plate body when exhaust gas is discharged is relatively low, but it is also possible to increase the number of multiple second-first fastening through holes 162 to be the same as the number of multiple first-first fastening through holes 161.

[0129] Referring to Figure 4c, which shows the A-A' cross-section in Figure 4a, the second type nozzle 400_2 is located at position 302_2, which is the other end of the second type piping 300_2, at position X_1. 2_1 And the second-second position X is a position 303_2 which is a predetermined distance away from one end 301_2 of the second type of piping 300_2. 2_2 It can be formed on the upper part of the plate body 100 with the second position X2, which is one of the two, as the center, and in Figure 4c, the second position X 2_2 This can be considered as the case when it is in the second position X2. Therefore, when the second type nozzle 400_2 is in contact with the lower surface of the hoop, the exhaust gas discharged from the hoop is drawn into the inside of the plate body 100 through the second type nozzle 400_2 and then discharged into the second type piping 300_2.

[0130] At this time, a second type purge hole 132 corresponding to a second type nozzle 400_2 can be formed in the upper part of the plate body 100, centered on the second position X2. Specifically, the second type purge hole 132 is formed to penetrate the plate body 100 downwards to a predetermined depth (the predetermined depth is less than the height of the plate body 100), and the lower end region of the second type purge hole 132 can be connected to the upper end region of the second type piping 300_2.

[0131] Incidentally, the upper part of the plate body 100, which is connected in correspondence with the first type nozzle 400_1 described in Figure 3c, is provided with nozzle vertical movement guide holes 141 to prevent nitrogen gas from flowing out through the gap formed between the first type nozzle 400_1 and the lower surface of the hoop. However, since the second type nozzle 400_2 serves as a passage for exhaust gas discharged from the hoop to be drawn into the interior of the plate body 100, a negative pressure of approximately 3 kPa is applied to the lower surface of the hoop that is in contact with the second type nozzle 400_2. In addition, as the hoop is fixed to the processing device, gravity from the hoop is also applied to the second type nozzle 400_2 by the lower surface of the hoop, so that the lower surface of the hoop is pulled towards the second type nozzle 400_2, and the second type nozzle 400_2 can maintain a state of close contact with the lower surface of the hoop without any additional configuration. Therefore, it can be said that there is little possibility of exhaust gases leaking out into the environment.

[0132] Along with this, the exhaust gas is stably drawn into the interior of the plate body 100 through the second type nozzle 400_2 via structural deformation of the second type nozzle 400_2, which can be explained as follows. Incidentally, the second type nozzle 400_2 can be formed on the upper part of the plate body 100 at a second height h2, and this may be realized in a single layer, but more specifically, it may be formed in two layers (i.e., the lower second type nozzle 410_2 and the upper second type nozzle 420_2). In relation to this, first, the case in which it is realized in a single layer will be explained, and then the case in which it is realized in two layers will be explained. At this time, the first type nozzle 400_1 and the second type nozzle 400_2 can be formed such that the second height h2 of the second type nozzle 400_2 and the first height h1 of the first type nozzle 400_1 described in Figure 3c are different from each other. However, in order to maintain a stable contact between the first type nozzle 400_1 and the second type nozzle 400_2, they can also be formed to have the same height as each other.

[0133] First, a second-type hollow section 432 corresponding to the second-type nozzle 400_2 is formed to penetrate the interior of the second-type nozzle 400_2 with the second position X2 as the center, and the lower end region of the second-type hollow section 432 is connected to the region of the second-type purge hole 132, so that the upper surface of the second-type nozzle 400_2 is in contact with at least a portion of the lower surface region of the hoop. In this case, the size of the lower end region of the second-type hollow section 432 can be formed to be smaller than the size of the region of the second-type purge hole 132. However, although Figure 4c shows that the size of the lower end region of the second-type hollow section 432 is formed to be smaller than the size of the region of the second-type purge hole 132, it is not limited to this, and the size of the lower end region of the second-type hollow section 432 can be larger than or the same as the size of the region of the second-type purge hole 132. Furthermore, the second type of hollow portion 432 can be formed such that the size of the upper end region of the second type of hollow portion 432 is the same as the size of the lower end region of the second type of hollow portion 432.

[0134] Furthermore, at least one second-first nozzle groove 442_1 can be formed in at least a portion of the lower surface region of the second-type nozzle 400_2, and at least one second-second nozzle groove 442_2 can be formed in at least a portion of the upper surface region of the second-type nozzle 400_2. More specifically, the second-first nozzle groove 442_1 can be formed in the lower surface region of the second-type nozzle 400_2, in the region radially outward from the lower end region of the second-type hollow portion 432, and the second-second nozzle groove 442_2 can be formed in the upper surface region of the second-type nozzle 400_2, in the region radially outward from the upper end region of the second-type hollow portion 432.

[0135] This is because, in the case where the upper surface of the second type nozzle 400_2 is in contact with at least a portion of the lower surface area of ​​the hoop, the second type nozzle 400_2 can be made of an elastic material, but the hardness of the lower surface of the hoop is higher than that of the second type nozzle 400_2. Therefore, if the upper surface of the second type nozzle 400_2 is formed flat, when the hoop is fixed to the processing device, the upper surface of the second type nozzle 400_2 may be unevenly crushed by the lower surface of the hoop. To prevent this, the present invention adds a second nozzle groove 442_2 on the upper surface of the second type nozzle 400_2, and reduces the curvature of each of the second nozzle grooves 442_2 by applying concentrated pressure between each of the second nozzle grooves 442_2 by the lower surface of the hoop. This allows uniform pressure to be applied to the entire upper surface of the second type nozzle 400_2, thereby reducing the possibility of a gap occurring between the lower surface of the hoop and the second type nozzle 400_2.

[0136] Furthermore, the pressure from the underside of the hoop (for example, gravity) reduces the curvature of each of the second nozzle grooves 442_2, and at the same time, pressure is applied to the underside of the second type nozzle 400_2. However, if the underside of the second type nozzle 400_2 is flat, the underside of the second type nozzle 400_2 will be pushed more in the direction toward the ground from the point where the pressure is concentrated, and the pressure will decrease further away from this point, which can cause the underside of the second type nozzle 400_2 to be unevenly crushed. Therefore, in order to prevent this, the present invention adds a second first nozzle groove 442_1 on the underside of the second type nozzle 400_2, and reduces the curvature of each of the second first nozzle grooves 442_1 by concentrating the pressure from the underside of the hoop between them, thereby enabling uniform pressure to be applied to the entire underside of the second type nozzle 400_2.

[0137] And on the upper part of the plate body 100, a plurality of second-type nozzle insertion grooves 152 are formed around a plurality of second_3 positions X spaced apart from the second-type purge holes 132. 2_3 On the lower surface of the second-type nozzle 400_2, a plurality of second-type nozzle insertion parts 452 are formed so as to protrude at positions corresponding to the second_3 positions X. 2_3 The second-type nozzle insertion parts 452 can be inserted into the second-type nozzle insertion grooves 152. At this time, each of the distances from each of the second_3 positions X to the second-type purge holes 132 is smaller than the radius of the second-type nozzle 400_2, and each of the second_3 positions X 2_3 may each mean one of a plurality of positions having the same distance from the second-type purge hole 132. At this time, if there are a very large number of positions where the second_3 positions X converge to infinity, as shown in FIG. 4b, the second-type nozzle insertion grooves 152 can be formed in a circular band shape, and even if the plurality of positions corresponding to the second_3 positions X do not converge to infinity, the same / similar effect can be achieved. 2_3 2_3 2_3

[0138] Hereinafter, the structure of the second-type nozzle 400_2 when the second-type nozzle 400_2 is embodied in two layers will be described.

[0139] First, the second-type nozzle 400_2 includes a second-type lower nozzle 410_2 formed at a second_1 height (h 2_1 ) above the upper part of the plate body 100 and a second_2 height h above the second-type lower nozzle 410_2. 2_2 ​​​It can include a second type of upper nozzle 420_2 formed to such an extent. Also, a second type of hollow portion 432 corresponding to the second type of nozzle 400_2 is formed to penetrate through the inside of the second type of lower nozzle 410_2 and the inside of the second type of upper nozzle 420_2 around a second position X2, and the lower end region of the second type of hollow portion 432 is connected corresponding to the region of the second type of purge hole 132, and the upper surface of the second type of upper nozzle 420_2 can be brought into contact with at least a part within the lower surface region of the hoop. At this time, as described previously, although the size of the lower end region of the second type of hollow portion 432 is shown to be smaller than the size of the region of the second type of purge hole 132, the size of the lower end region of the second type of hollow portion 432 can be formed to be larger than or the same as the size of the region of the second type of purge hole 132, and the second type of hollow portion 432 can be formed such that the size of the upper end region of the second type of hollow portion 432 is the same as the size of the lower end region of the second type of hollow portion 432.

[0140] And, among the second type of nozzles 400_2, the second type of lower nozzle 410_2 is formed with a second_1 diameter D around the second position X2 above the second type of purge hole 132 2_1 having a second_1 height (h 2_1 ). At this time, a part of the second_1 diameter D 2_1 may correspond to the second type of hollow portion 432. Also, the second type of upper nozzle 420_2 is formed with a second_2 diameter D around the second position X2 above the second type of lower nozzle 410_2 2_2 having a second_2 height h 2_2 . At this time, the second_2 diameter D 2_2 is smaller than the second_1 diameter D 2_1 , and a part of the second_2 diameter D 2_2 may correspond to the second type of hollow portion 432.

[0141] And, as the lower surface region of the second type of lower nozzle 410_2, the second_1 diameter D 2_1In the region corresponding to the above, at least one second_1 nozzle groove 442_1 is formed in the region radially outward from the lower end region of the second type hollow portion 432, and the second_2 diameter D is the upper surface region of the second type upper nozzle 420_2. 2_2 Of the regions corresponding to this, at least one second nozzle groove 442_2 can be formed in the region that is radially outward from the upper end region of the second type hollow portion 432.

[0142] This is because, in which the upper surface of the second type upper nozzle 420_2 is in contact with at least a portion of the lower surface area of ​​the hoop, the second type lower nozzle 410_2 and the second type upper nozzle 420_2 can be made of an elastic material, and the hardness of the lower surface of the hoop is higher than that of the second type lower nozzle 410_2 and the second type upper nozzle 420_2. Therefore, if the lower surface of the second type lower nozzle 410_2 and the upper surface of the second type upper nozzle 420_2 are formed flat, when the hoop is attached to the processing apparatus, the upper surface of the second type upper nozzle 420_2 may be unevenly crushed first by the lower surface of the hoop, and thereafter the lower surface of the second type lower nozzle 410_2 may also be unevenly crushed. Therefore, in order to prevent this, the present invention adds a second-first nozzle groove 442_1 on the lower surface of the second-type lower nozzle 410_2, and a second-second nozzle groove 442_2 on the upper surface of the second-type upper nozzle 420_2, and reduces the curvature of each of the second-second nozzle grooves 442_2 by applying concentrated pressure between each of the second-second nozzle grooves 442_2 due to the lower surface of the hoop, thereby enabling uniform pressure to be applied to the entire upper surface of the second-type upper nozzle 420_2. Subsequently, by reducing the curvature of each of the second-first nozzle grooves 442_1 by applying concentrated pressure between each of the second-first nozzle grooves 442_1, uniform pressure can be applied to the entire lower surface of the second-type lower nozzle 410_2.

[0143] Furthermore, on the upper part of the plate body 100, there are multiple second-type nozzle insertion grooves 152 spaced apart from the second-type purge holes 132 at multiple second and third positions X 2_3 It is formed around the second type lower nozzle 410_2, and on the lower surface of the second type lower nozzle 410_2, there are multiple second type nozzle insertion parts 452 at the second and third positions X 2_3 It is formed to protrude at a position corresponding to the second type nozzle insertion portion 452 so that it can be inserted into the second type nozzle insertion groove 152. At this time, the second and third positions X 2_3 The distance from each of these to the second type purge hole 132 is smaller than the radius of the second type lower nozzle 410_2, and the second and third positions X 2_3 Each of these may mean each of a plurality of positions that are the same distance from the second type purge hole 132. In this case, the second and third positions X 2_3 If there are many positions where the poles converge to infinity, the second type of nozzle insertion groove 152 can be formed in a circular band shape, as shown in Figure 4b, and the second and third positions X 2_3 Even if the multiple positions corresponding to this do not converge to infinity, it is possible to make them have the same or similar effect.

[0144] Furthermore, referring to Figure 4d, other structural modifications of the second type nozzle 400_2 are described as follows: the upper part of the plate body 100 has multiple second-first fastening through holes 162 along the second-first boundary line B 2_1 The second boundary line B is defined by connecting the outermost shell point on the diameter of the second type nozzle 400_2. 2_2 Multiple 2_4 positions X located between 2_4 The second type nozzle 400_2 is formed around the second position X, and the second type nozzle 400_2 has multiple second fastening through holes 462 at the second position X 2_4 It can be formed so as to penetrate the interior of the second type nozzle 400_2 with the corresponding position as the center. At this time, the second_4 position X 2_4 This may mean multiple positions that are all the same distance from the second type purge hole 132, but the second-first boundary line B 2_1 and the 2nd boundary line B 2_2The distance from the second type of purge hole 132 between them may mean multiple positions that are different from each other, and the second-first boundary line B 2_1 This may be defined by connecting the points on the boundary line forming the second type nozzle insertion groove 152 that are furthest from the second type purge hole 132.

[0145] Furthermore, by ensuring that the second type of screw sequentially passes through the second-second fastening through-hole 462 and the second-first fastening through-hole 162, the second type of nozzle 400_2 and the plate body 100 can be maintained in a fastened state.

[0146] Furthermore, within the region of the second type nozzle 400_2, the second-first boundary line B 2_1 The corresponding boundary line and the 2nd_2nd boundary line B 2_2 A second type nozzle support 470_2 is formed in the upper part of the area corresponding to the boundary line between the second type nozzle support 470_2 and the second type nozzle support 470_2 has at least one second-third fastening through hole 471_2 at the second-fourth position X 2_4 The second type nozzle support 470_2 is formed to penetrate the interior of the second type nozzle support 470_2 with a corresponding position as the center, and the second type screw is formed to sequentially penetrate and connect through the second and third fastening through holes 471_2, 22 fastening through hole 462, and 21 fastening through hole 162, thereby maintaining the fastened state of the second type nozzle support 470_2, the second type nozzle 400_2, and the plate body 100.

[0147] Thus, within the region of the second type nozzle 400_2, the second-first boundary line B 2_1 and the 2nd boundary line B 2_2 By further forming a second type nozzle support 470_2 on the upper part of a predetermined area determined by the method, and by using a second type screw to maintain the state in which the second type nozzle support 470_2, the second type nozzle 400_2, and the plate body 100 are fastened together, it is possible to prevent the second type nozzle 400_2 from separating from the plate body 100.

[0148] Furthermore, a second type nut insertion opening 172 can be formed at the lower end of the second-first fastening through hole 162 (specifically, at the lower end of the plate body 100), and by inserting a second type nut into the second type nut insertion opening 172 and then sequentially passing through the second-third fastening through hole 471-2, the second-second fastening through hole 462, the second-first fastening through hole 162, and the second type nut insertion opening 172, the second type nozzle support 470-2, the second type nozzle 400-2, and the plate body 100 can be further secured.

[0149] The following describes other structural modifications of the second type nozzle 400_2 when it is embodied in two layers.

[0150] Referring to Figure 4d, the upper part of the plate body 100 has multiple second-first fastening through holes 162 along the second-first boundary line B 2_1 and the diameter D of the second type lower nozzle 410_2 2_1 The second boundary line B is defined by connecting the uppermost shell points. 2_2 Multiple 2_4 positions X located between 2_4 The lower nozzle 410_2 of the second type is formed around the second_4 position X 2_4 It can be formed so as to penetrate the interior of the second type lower nozzle 410_2 with the corresponding position as the center. At this time, the second_4 position X 2_4 This may mean multiple positions that are all the same distance from the second type purge hole 132, but the second-first boundary line B 2_1 and the 2nd boundary line B 2_2 The distance from the second type of purge hole 132 between them may mean multiple positions that are different from each other, and the second-first boundary line B 2_1 This may be defined by connecting the points of the boundary lines forming each of the second type nozzle insertion grooves 152 that are located furthest from the second type purge holes 132.

[0151] Furthermore, by ensuring that the second type of screw sequentially passes through the second-second fastening through-hole 462 and the second-first fastening through-hole 162, the second type of nozzle 400_2 and the plate body 100 can be maintained in a fastened state.

[0152] Furthermore, within the region of the lower nozzle 410_2 of the second type, the second-first boundary line B 2_1 The corresponding boundary line and the 2nd_2nd boundary line B 2_2 A second type nozzle support 470_2 is formed in the upper part of the area corresponding to the boundary line between the second type nozzle support 470_2 and the second type nozzle support 470_2 has at least one second-third fastening through hole 471_2 at the second-fourth position X 2_4 The second type nozzle support 470_2 is formed to penetrate the interior of the second type nozzle support 470_2 with a corresponding position as the center, and the second type screw is formed to sequentially penetrate and connect through the second and third fastening through holes 471_2, 22 fastening through hole 462, and 21 fastening through hole 162, thereby maintaining the fastened state of the second type nozzle support 470_2, the second type nozzle 400_2, and the plate body 100.

[0153] Thus, in the lower nozzle 410_2 region of the second type, the second_1 boundary line B 2_1 and the 2nd boundary line B 2_2 By further forming a second type nozzle support 470_2 on the upper part of a predetermined area determined by [the specified method], and by using a second type screw to maintain the state in which the second type nozzle support 470_2, the second type nozzle 400_2, and the plate body 100 are fastened together, the problem of the second type nozzle 400_2 separating from the plate body 100 can be prevented.

[0154] Furthermore, a second type nut insertion opening 172 can be formed at the lower end of the second-first fastening through hole 162 (specifically, at the lower end of the plate body 100), and by inserting a second type nut into the second type nut insertion opening 172, and then sequentially passing through the second-third fastening through hole 471-2, the second-second fastening through hole 462, the second-first fastening through hole 162, and the second type nut insertion opening 172 to connect the second type nut, the second type nozzle support 470-2, the second type lower nozzle 410-2, and the plate body 100, a more stable fastening state can be maintained.

[0155] In summary, the first type nozzle 400_1 described in Figure 3c and the second type nozzle 400_2 described in Figure 4c are manufactured through a mold, and to facilitate material management and effectively reduce costs, the first type nozzle 400_1 and the second type nozzle 400_2 may be manufactured with the same shape. However, there is a difference in that the upper part of the plate body 100 connected to the first type nozzle 400_1 has at least one nozzle vertical movement guide hole 141, while the upper part of the plate body 100 connected to the second type nozzle 400_2 does not have a configuration corresponding to at least one nozzle vertical movement guide hole 141.

[0156] Although the present invention has been described above with reference to specific components and other details, as well as limited embodiments and drawings, these are provided only to aid in a more general understanding of the invention. The present invention is not limited to the embodiments described above, and various modifications and variations can be made from this description by those with ordinary skill in the art to which the invention pertains.

[0157] Therefore, the concept of the present invention should not be limited to the embodiments described above, and it can be said that not only the claims described later, but also all modifications that are equivalent or equivalent to the claims of this invention, fall within the scope of the concept of the present invention.

Claims

1. A purging plate is inserted into the space between the upper surface of a processing device that does not have a purging function and the lower surface of a hoop mounted on the processing device, and assists in purging the inside of the hoop, The plate body and A plurality of pipe fitting coupling portions are formed on the edge of the plate body (each of the plurality of pipe fitting coupling portions includes each of the corresponding plurality of pipe fitting housing portions, and each of the corresponding pipe fittings is coupled to one end of each of the plurality of pipe fitting housing portions), A plurality of pipes formed inside the plate body (each other end of the plurality of pipe fitting housings is directly or indirectly connected to one end of each of the plurality of pipes corresponding thereto, and nitrogen gas for supplying into the body through at least one first type pipe fitting housing in the plurality of pipe fitting housings is supplied into the hoop through at least one first type pipe corresponding to the first type pipe fitting housing, and exhaust gas discharged from the hoop is discharged through at least one second type pipe corresponding to the second type pipe in the plurality of pipe fitting housings), A plurality of nozzles are formed on the upper part of the plate body (the plurality of nozzles include at least one first type nozzle and at least one second type nozzle, the first type nozzle is formed around a first position which is one of a first_1 position which is the other end of the first type piping and a first_2 position which is a predetermined distance away from there in the direction toward one end of the first type piping, and contacts the lower surface of the hoop to supply the nitrogen gas supplied from the first type piping into the inside of the hoop, the second type nozzle is formed around a second position which is one of a second_1 position which is the other end of the second type piping and a second_2 position which is a predetermined distance away from there in the direction toward one end of the second type piping, and draws in the exhaust gas discharged from the hoop to discharge the exhaust gas into the second type piping), Includes, A purging plate having at least one first type purge hole corresponding to the first type nozzle formed on the upper part of the plate body, centered on the first position, and at least one nozzle vertical movement guidance hole corresponding to the first type purge hole formed around at least one first third position spaced apart from the first type purge hole.

2. The purging plate according to claim 1, wherein the first type nozzle is formed on the upper part of the plate body to a first height, a first type hollow portion corresponding to the first type nozzle is formed to penetrate the interior of the first type nozzle with a first position as the center, the lower end region of the first type hollow portion is connected to the region of the first type purge hole, and the upper surface of the first type nozzle is in contact with at least a portion of the lower surface region of the hoop.

3. The purging plate according to claim 2, wherein the first type nozzle has at least one first nozzle groove formed in at least a portion of the lower surface region of the first type nozzle, and at least one first second nozzle groove formed in at least a portion of the upper surface region of the first type nozzle.

4. The purging plate according to claim 3, wherein the 1_1 nozzle groove is formed in the lower surface region of the first type nozzle, in the region radially outward from the lower end region of the hollow portion of the first type, and the 1_2 nozzle groove is formed in the upper surface region of the first type nozzle, in the region radially outward from the upper end region of the hollow portion of the first type.

5. The purging plate according to claim 2, wherein a plurality of grooves for inserting first type nozzles are formed on the upper part of the plate body, centered on a first_4 position spaced apart from the first type purge hole (the distance from the first_4 position to the first type purge hole is greater than the distance from the first_3 position to the first type purge hole and smaller than the radius of the first type nozzle, and the first_4 position is a plurality of positions that are the same distance from the first type purge hole), and a plurality of first type nozzle insertion portions are formed on the lower surface of the first type nozzle so as to protrude at positions corresponding to the first_4 position, so that the first type nozzle insertion portions are inserted into the grooves for inserting first type nozzles.

6. The purging plate according to claim 5, wherein a plurality of first-first fastening through-holes are formed on the upper part of the plate body, centered on a plurality of first-fifth positions located between a first-first boundary line (the first-first boundary line is defined by connecting each of the points furthest from the first-type purge hole among the boundary lines forming the groove for inserting the first-type nozzle) and a first-second boundary line defined by connecting the outermost shell points on the diameter of the first-type nozzle, and the first-type nozzle is formed such that a plurality of first-second fastening through-holes are formed in the first-type nozzle so as to penetrate the interior of the first-type nozzle centered on positions corresponding to the first-fifth positions, and the first-type screw is connected by sequentially passing through the first-second fastening through-holes and the first-first fastening through-holes to maintain a fastened state between the first-type nozzle and the plate body.

7. A purging plate according to claim 6, wherein a first-type nozzle support is formed in the upper part of the region of the first-type nozzle that corresponds to the area between the boundary line corresponding to the 1_1 boundary line and the boundary line corresponding to the 1_2 boundary line, and at least one 1_3 fastening through hole is formed in the first-type nozzle support so as to penetrate the interior of the first-type nozzle support with a position corresponding to the 1_5 position, and the first-type screw is connected by sequentially passing through the 1_3 fastening through hole, the 1_2 fastening through hole and the 1_1 fastening through hole, thereby maintaining a state in which the first-type nozzle support, the first-type nozzle and the plate body are fastened together.

8. The purging plate according to claim 2, wherein the size of the lower end region of the first type hollow portion is smaller than the size of the region of the first type purge hole, and the first type hollow portion is formed such that the size of the upper end region of the first type hollow portion is the same as the size of the lower end region of the first type hollow portion.

9. The purging plate according to claim 2, wherein the first type nozzle includes a first type lower nozzle formed on the upper part of the plate body to a height of 1_1 and a first type upper nozzle formed on the upper part of the first type lower nozzle to a height of 1_2, wherein a first type hollow portion corresponding to the first type nozzle is formed to penetrate the interior of the first type lower nozzle and the interior of the first type upper nozzle with respect to the first position, the lower end region of the first type hollow portion is connected to the region of the first type purge hole, and the upper surface of the first type upper nozzle is in contact with at least a portion of the lower surface region of the hoop.

10. The purging plate according to claim 9, wherein the lower nozzle of the first type is formed above the purging hole of the first type with a 1_1 diameter (a portion of the 1_1 diameter corresponds to the hollow portion of the first type) and a height of 1_1, centered on the first position, and the upper nozzle of the first type is formed above the lower nozzle of the first type with a 1_2 diameter (a portion of the 1_2 diameter is smaller than the 1_1 diameter, and a portion of the 1_2 diameter corresponds to the hollow portion of the first type) and a height of 1_2, centered on the first position.

11. The purging plate according to claim 10, wherein at least one first nozzle groove is formed in the region corresponding to the first diameter as the lower surface region of the first type lower nozzle, in the region radially outward from the lower end region of the hollow portion of the first type, and at least one first nozzle groove is formed in the region corresponding to the first diameter as the upper surface region of the first type upper nozzle, in the region radially outward from the upper end region of the hollow portion of the first type.

12. The purging plate according to claim 10, wherein a plurality of first-type nozzle insertion grooves are formed on the upper part of the plate body, centered on a first-fourth position spaced apart from the first-type purge hole (the distance from the first-fourth position to the first-type purge hole is greater than the distance from the first-third position to the first-type purge hole and smaller than the radius of the first-type lower nozzle, and the first-fourth position is a plurality of positions that are the same distance from the first-type purge hole), and a plurality of first-type nozzle insertion portions are formed on the lower surface of the first-type lower nozzle so as to protrude at positions corresponding to the first-fourth position, so that the first-type nozzle insertion portions are inserted into the first-type nozzle insertion grooves.

13. The purging plate according to claim 12, wherein a plurality of first-first fastening through-holes are formed on the upper part of the plate body, centered on a plurality of first-fifth positions located between a first-first boundary line (the first-first boundary line is defined by connecting each of the points located furthest from the first-type purge hole among the boundary lines forming the first-type nozzle insertion groove) and a first-second boundary line defined by connecting the outermost shell points on the first-first diameter of the first-type lower nozzle, and a plurality of first-second fastening through-holes are formed in the first-type lower nozzle so as to penetrate the interior of the first-type lower nozzle centered on positions corresponding to the first-fifth positions, and the first-type screw is connected by sequentially passing through the first-second fastening through-holes and the first-first fastening through-holes to maintain a fastened state between the first-type nozzle and the plate body.

14. A purging plate according to claim 13, wherein a first-type nozzle support is formed in the upper part of the region of the lower nozzle of the first-type, in the region corresponding to the boundary line corresponding to the 1_1 boundary line and the boundary line corresponding to the 1_2 boundary line, and at least one 1_3 fastening through hole is formed in the first-type nozzle support so as to penetrate the interior of the first-type nozzle support with a position corresponding to the 1_5 position, and the first-type screw is connected by sequentially passing through the 1_3 fastening through hole, the 1_2 fastening through hole and the 1_1 fastening through hole, thereby maintaining a state in which the first-type nozzle support, the first-type nozzle and the plate body are fastened together.

15. The purging plate according to claim 9, wherein the size of the lower end region of the first type hollow portion is smaller than the size of the region of the first type purge hole, and the size of the upper end region of the first type hollow portion is the same as the size of the lower end region of the first type hollow portion.

16. The purging plate according to claim 1, wherein the first type of purge hole is formed to penetrate the plate body downward to a predetermined depth (the predetermined depth is less than the height of the plate body), and the lower end region of the first type of purge hole is connected to the upper end region of the first type of piping.

17. The purging plate according to claim 1, wherein at least one second type of purging hole corresponding to the second type of nozzle is formed on the upper part of the plate body, centered on the second position.

18. The purging plate according to claim 17, wherein the second type nozzle is formed on the upper part of the plate body to a second height, a second type hollow portion corresponding to the second type nozzle is formed to penetrate the interior of the second type nozzle with the second position as the center, the lower end region of the second type hollow portion is connected to the region of the second type purge hole, and the upper surface of the second type nozzle is in contact with at least a portion of the lower surface region of the hoop.

19. The purging plate according to claim 18, wherein the second type of nozzle has at least one second-first nozzle groove formed in at least a portion of the lower surface region of the second type of nozzle, and at least one second-second nozzle groove formed in at least a portion of the upper surface region of the second type of nozzle.

20. The purging plate according to claim 19, wherein the 2_1 nozzle groove is formed in the lower surface region of the second type nozzle, in a region that is radially outward from the lower end region of the hollow portion of the second type, and the 2_2 nozzle groove is formed in the upper surface region of the second type nozzle, in a region that is radially outward from the upper end region of the hollow portion of the second type.

21. The purging plate according to claim 18, wherein a plurality of second-type nozzle insertion grooves are formed on the upper part of the plate body, centered on second and third positions spaced apart from the second-type purge hole (where the distance from the second and third positions to the second-type purge hole is smaller than the radius of the second-type nozzle, and the second and third positions are multiple positions all at the same distance from the second-type purge hole), and a plurality of second-type nozzle insertion portions are formed on the lower surface of the second-type nozzle so as to protrude at positions corresponding to the second and third positions, so that the second-type nozzle insertion portions are inserted into the second-type nozzle insertion grooves.

22. The purging plate according to claim 21, wherein a plurality of second-first fastening through-holes are formed on the upper part of the plate body, centered on a plurality of second-fourth positions located between a second-first boundary line (the second-first boundary line is defined by connecting each of the points furthest from the second-type purge hole among the boundary lines forming the second-type nozzle insertion groove) and a second-second boundary line defined by connecting the outermost shell point on the diameter of the second-type nozzle, and the second-type nozzle has a plurality of second-second fastening through-holes formed so as to penetrate the interior of the second-type nozzle centered on positions corresponding to the second-fourth positions, and the second-type screw is connected by sequentially passing through the second-second fastening through-holes and the second-first fastening through-holes to maintain a fastened state between the second-type nozzle and the plate body.

23. A purging plate according to claim 22, wherein a second type nozzle support is formed on the upper part of the upper surface region of the second type nozzle, in the region corresponding to the boundary line corresponding to the 1_1 boundary line and the boundary line corresponding to the 1_2 boundary line, and at least one 2_3 fastening through hole is formed in the second type nozzle support so as to penetrate the interior of the second type nozzle support with a position corresponding to the 2_4 position, and the second type screw is connected by sequentially passing through the 2_3 fastening through hole, the 2_2 fastening through hole and the 2_1 fastening through hole, thereby maintaining a state in which the second type nozzle support, the second type nozzle and the plate body are fastened together.

24. The purging plate according to claim 18, wherein the size of the lower end region of the second type hollow portion is formed to be smaller than the size of the region of the second type purge hole, and the second type hollow portion is formed such that the size of the upper end region of the second type hollow portion is the same as the size of the lower end region of the second type hollow portion.

25. The purging plate according to claim 18, wherein the second type nozzle includes a second type lower nozzle formed on the upper part of the plate body to a height of approximately 2_1 and a second type upper nozzle formed on the upper part of the second type lower nozzle to a height of approximately 2_2, wherein a second type hollow portion corresponding to the second type nozzle is formed to penetrate the interior of the second type lower nozzle and the interior of the second type upper nozzle with respect to the second position, the lower end region of the second type hollow portion is connected to the region of the second type purge hole, and the upper surface of the second type upper nozzle is in contact with at least a portion of the lower surface region of the hoop.

26. The purging plate according to claim 25, wherein the lower nozzle of the second type is formed above the purging hole of the second type with a 2_1 diameter (a portion of the 2_1 diameter corresponds to the hollow portion of the second type) and a height of approximately 2_1, centered on the second position, and the upper nozzle of the second type is formed above the lower nozzle of the second type with a 2_2 diameter (a portion of the 2_2 diameter corresponds to the hollow portion of the second type) and a height of approximately 2_2, centered on the second position.

27. The purging plate according to claim 26, wherein at least one second nozzle groove is formed in the region corresponding to the second diameter as the lower surface region of the second type lower nozzle, in the region radially outward from the lower end region of the hollow portion of the second type, and at least one second nozzle groove is formed in the region corresponding to the second diameter as the upper surface region of the second type upper nozzle, in the region radially outward from the upper end region of the hollow portion of the second type.

28. The purging plate according to claim 26, wherein a plurality of second-type nozzle insertion grooves are formed on the upper part of the plate body, centered on second and third positions spaced apart from the second-type purge hole (where the distance from the second and third positions to the second-type purge hole is smaller than the radius of the second-type lower nozzle, and the second and third positions are multiple positions all at the same distance from the second-type purge hole), and a plurality of second-type nozzle insertion portions are formed on the lower surface of the second-type lower nozzle so as to protrude at positions corresponding to the second and third positions, so that the second-type nozzle insertion portions are inserted into the second-type nozzle insertion grooves.

29. The purging plate according to claim 28, wherein a plurality of second-first fastening through-holes are formed on the upper part of the plate body, centered on a plurality of second-fourth positions located between the second-first boundary line (the second-first boundary line is defined by connecting each of the points furthest from the second-type purge hole among the boundary lines forming the second-type nozzle insertion groove) and the second-second boundary line defined by connecting the outermost shell point on the second-first diameter of the second-type lower nozzle, and the second-type lower nozzle is formed such that a plurality of second-second fastening through-holes are formed in the second-type lower nozzle so as to penetrate the interior of the second-type lower nozzle centered on positions corresponding to the second-fourth positions, and the second-type screw is connected by sequentially passing through the second-second fastening through-holes and the second-first fastening through-holes to maintain a fastened state between the second-type nozzle and the plate body.

30. A purging plate according to claim 29, wherein a second type nozzle support is formed on the upper part of the upper surface region of the lower nozzle of the second type, in the region corresponding to the boundary line corresponding to the 2_1 boundary line and the boundary line corresponding to the 2_2 boundary line, and at least one 2_3 fastening through hole is formed in the second type nozzle support so as to penetrate the interior of the second type nozzle support with a position corresponding to the 2_4 position, and the second type screw is connected by sequentially passing through the 2_3 fastening through hole, the 2_2 fastening through hole and the 2_1 fastening through hole, thereby maintaining a state in which the second type nozzle support, the second type nozzle and the plate body are fastened together.

31. The purging plate according to claim 25, wherein the size of the lower end region of the second type hollow portion is smaller than the size of the region of the second type purge hole, and the size of the upper end region of the second type hollow portion is the same as the size of the lower end region of the second type hollow portion.

32. The purging plate according to claim 17, wherein the second type of purge hole is formed to penetrate the plate body to a predetermined depth (the predetermined depth is less than the height of the plate body) in the downward direction, and the lower end region of the second type of purge hole is connected to the upper end region of the second type of piping.

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