Surface-emitting laser, method for manufacturing a surface-emitting laser
The VCSEL design with an expanded cavity using a transparent oxide substrate and curved mirrors addresses diffraction and absorption issues, ensuring stable and efficient laser operation with improved thermal performance through single-step integration.
JP7833570B2Active Publication Date: 2026-03-19SANOH IND CO LTD
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Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2022-05-31
- Publication Date
- 2026-03-19
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Abstract
A vertical resonance surface emitting laser includes an oxide substrate having a first surface and a second surface opposite to the first surface; a semiconductor section disposed on the first surface; a dielectric filter layer disposed between the semiconductor section and the first surface and having a reflection spectrum configured to provide an optical window; a first DBR mirror; and a second DBR mirror disposed on the curved surface of the second surface. The first DBR mirror, the semiconductor section, the dielectric filter layer, the oxide substrate, and the second DBR mirror are arranged in a first axial direction to form an extended cavity. The semiconductor section is disposed between the dielectric filter layer and the first DBR mirror and includes a p-type group III nitride region, an n-type group III nitride region, and a group III nitride active region between the p-type group III nitride region and the n-type group III nitride region.
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Citation Information
Patent Citations
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