Semiconductor equipment

Abstract

This semiconductor device includes: a semiconductor substrate; at least one transistor that is provided on the semiconductor substrate and includes a plurality of semiconductor layers; an electrode provided to the transistor; an organic insulating film provided with an opening in a region overlapping the transistor and the electrode in a plan view in a first direction perpendicular to the semiconductor substrate; and a bump that overlaps the at least one transistor in a plan view in the first direction, and is electrically connected to the electrode through the opening in the organic insulating film, wherein the width of the bump in a second direction parallel to the semiconductor substrate is less than the width of the opening in the organic insulating film in the second direction.

Description

Technical Field

[0004]

[0001] The present invention relates to a semiconductor device.

Background Art

[0002] Patent Document 1 describes a semiconductor device including a heterojunction bipolar transistor. The semiconductor device described in Patent Document 1 has bumps provided directly above the transistors. The bumps are electrically connected to the emitter electrodes of the transistors through openings in an organic insulating film (resin film) that covers the transistors.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When the bumps are provided so as to overlap the entire region of the mesa structure of the transistor, although the heat dissipation property is improved (i.e., the thermal resistance is reduced), there is a possibility that the reliability of the semiconductor device may decrease, such as cracks occurring in the mesa structure due to the stress from the bumps.

[0005] An object of the present invention is to provide a semiconductor device capable of suppressing the stress generated in a transistor.

Means for Solving the Problems

[0006] <00oooo33>A semiconductor device according to one aspect of the present invention comprises a semiconductor substrate, at least one transistor provided on the semiconductor substrate and including a plurality of semiconductor layers, an electrode provided on the transistor, an organic insulating film having an opening in a region overlapping with the transistor and the electrode when viewed in plan in a first direction perpendicular to the semiconductor substrate, and a bump superimposed on at least one of the transistors when viewed in plan in the first direction and electrically connected to the electrode through the opening in the organic insulating film, wherein the width of the bump in a second direction parallel to the semiconductor substrate is smaller than the width of the opening in the organic insulating film in the second direction.

[0007] A semiconductor device according to one aspect of the present invention comprises a semiconductor substrate, at least one transistor provided on the semiconductor substrate and including a plurality of semiconductor layers, an electrode provided on the transistor, an organic insulating film having an opening in a region overlapping with the transistor and the electrode when viewed in plan in a first direction perpendicular to the semiconductor substrate, and a bump superimposed on at least one of the transistors when viewed in plan in the first direction and electrically connected to the electrode through the opening in the organic insulating film, wherein the width of the bump in a second direction parallel to the semiconductor substrate is equal to the width of the opening in the organic insulating film in the second direction. [Effects of the Invention]

[0008] According to the semiconductor device of the present invention, it is possible to suppress the stress generated in the transistor. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a plan view of a semiconductor device according to the first embodiment. [Figure 2] Figure 2 is a cross-sectional view taken along line II-II' in Figure 1. [Figure 3] Figure 3 is a cross-sectional view of the semiconductor device according to the second embodiment. [Figure 4] Figure 4 is a cross-sectional view of a semiconductor device according to the third embodiment. [Figure 5] Figure 5 is a cross-sectional view of a semiconductor device according to the fourth embodiment. [Figure 6] Figure 6 is an explanatory diagram illustrating the manufacturing process of a semiconductor device according to the fourth embodiment. [Figure 7] Figure 7 is a cross-sectional view of a semiconductor device according to the fifth embodiment. [Figure 8] Figure 8 is a cross-sectional view of a semiconductor device according to a modified example of the fifth embodiment. [Figure 9] Figure 9 is an explanatory diagram illustrating the manufacturing process of a semiconductor device according to the fifth embodiment. [Figure 10] Figure 10 is a cross-sectional view of a semiconductor device according to the sixth embodiment. [Figure 11] Figure 11 is a cross-sectional view of a semiconductor device according to the seventh embodiment. [Modes for carrying out the invention]

[0010] Embodiments of the semiconductor device of the present invention will be described in detail below with reference to the drawings. However, the present invention is not limited to these embodiments. Each embodiment is illustrative, and it goes without saying that partial substitution or combination of the configurations shown in different embodiments is possible. In the second and subsequent embodiments, descriptions of matters common to the first embodiment will be omitted, and only the differences will be described. In particular, similar effects and advantages due to similar configurations will not be mentioned sequentially for each embodiment.

[0011] (First Embodiment) Figure 1 is a plan view of a semiconductor device according to the first embodiment. Note that Figure 1 omits the detailed configuration of each transistor BT and schematically shows the mesa structure including the base layer 4 and the arrangement of the emitter electrode 6 of each transistor.

[0012] As shown in Figure 1, the semiconductor device 100 includes a semiconductor substrate 1, a transistor group Q1, a first organic insulating film 16, and bumps 21.

[0013] In the following description, a one-way direction in the plane parallel to the surface of the semiconductor substrate 1 is defined as the X-axis direction Dx. Also, a direction orthogonal to the X-axis direction Dx in the plane parallel to the surface of the semiconductor substrate 1 is defined as the Y-axis direction Dy. Further, a direction orthogonal to each of the X-axis direction Dx and the Y-axis direction Dy is defined as the Z-axis direction Dz. The Z-axis direction Dz is a direction perpendicular to the surface of the semiconductor substrate 1. The Z-axis direction Dz is an example of the "first direction", and the X-axis direction Dx and the Y-axis direction Dy are examples of the "second direction". Also, in this specification, a plan view indicates the positional relationship when viewed from the Z-axis direction Dz.

[0014] The transistor group Q1 is provided on the surface of the semiconductor substrate 1. The transistor group Q1 has a plurality of transistors BT. The transistor BT is a heterojunction bipolar transistor (HBT). The transistor BT is also called a unit transistor, and the unit transistor is defined as the smallest transistor constituting the transistor group Q1. The transistors BT are electrically connected in parallel to form the transistor group Q1.

[0015] The plurality of transistors BT of the transistor group Q1 are arranged side by side in the X-axis direction Dx. The mesa structure including the base layer 4 and the emitter electrode 6 of the plurality of transistors BT extend in the Y-axis direction Dy, respectively.

[0016] In FIG. 1, the transistor group Q1 is configured to have three or more transistors BT. However, the number and arrangement of the transistors BT are merely examples and can be changed as appropriate. At least one transistor BT may be provided. Also, in FIG. 1, for the sake of easy understanding, one transistor group Q1 is shown, but two or more transistor groups may be provided on the same semiconductor substrate 1.

[0017] The bump 21 overlaps with a plurality of transistors BT of the transistor group Q1 in a plan view. The bump 21 is electrically connected to the plurality of transistors BT through an opening 17 provided in the first organic insulating film 16. The bump 21 has an oval shape in a plan view, extends in the X-axis direction Dx, and is provided along the arrangement direction of the plurality of transistors BT. The bump 21 is provided so as to cover the entire plurality of transistors BT arranged in the X-axis direction Dx. Further, the width of the bump 21 in the Y-axis direction Dy is larger than the width of the mesa structure including the base layer 4 of the plurality of transistors BT and the emitter electrode 6 in the Y-axis direction Dy.

[0018] In a plan view, a part of the bump 21 is provided inside the opening 17 provided in the first organic insulating film 16. That is, the area of a part of the bump 21 is smaller than the area of the opening 17, and the outer periphery of the bump 21 is separated from the inner periphery of the opening 17. The detailed relationship between the bump 21 and the opening 17 provided in the first organic insulating film 16 will be described later.

[0019] Next, the detailed cross-sectional configuration of the semiconductor device 100 will be described. FIG. 2 is a cross-sectional view taken along the line II-II' of FIG. 1. As shown in FIG. 2, in the semiconductor device 100, the transistor BT includes a sub-collector layer 2, a collector layer 3, a base layer 4, an emitter layer 5, and an emitter electrode 6. The transistor BT is laminated on the semiconductor substrate 1 in the order of the sub-collector layer 2, the collector layer 3, the base layer 4, the emitter layer 5, and the emitter electrode 6. Although not shown in FIG. 2, a collector electrode is provided in the sub-collector layer 2, and a base electrode is provided in the base layer 4.

[0020] The mesa structure of the present embodiment is composed of one or a plurality of semiconductor layers among the semiconductor layers (sub-collector layer 2, collector layer 3, base layer 4, emitter layer 5) of the transistor BT. For example, the mesa structure is a collector mesa composed of the collector layer 3 and the base layer 4.

[0021] More specifically, the semiconductor substrate 1 is, for example, a semi-insulating GaAs (gallium arsenide) substrate. The subcollector layer 2 is provided on the semiconductor substrate 1. The subcollector layer 2 is a high-concentration n-type GaAs layer with a thickness of, for example, about 0.5 μm. The collector layer 3 is provided on the subcollector layer 2. The collector layer 3 is an n-type GaAs layer with a thickness of, for example, about 1 μm. The base layer 4 is provided on the collector layer 3. The base layer 4 is a p-type GaAs layer with a thickness of, for example, about 100 nm.

[0022] The emitter layer 5 is provided on the base layer 4. Although not shown in the diagram, the emitter layer 5 includes, for example, an intrinsic emitter layer from the base layer 4 side and an emitter mesa layer provided above it. The intrinsic emitter layer is an n-type InGaP (indium gallium phosphide) layer with a thickness of, for example, 30 nm to 40 nm. The emitter mesa layer is formed from a high-concentration n-type GaAs layer and a high-concentration n-type InGaAs layer. The thickness of the high-concentration n-type GaAs layer and the high-concentration n-type InGaAs layer is, for example, about 100 nm each. The high-concentration n-type InGaAs layer of the emitter mesa layer is provided to make ohmic contact with the emitter electrode 6.

[0023] The base layer 4 and collector layer 3 are epitaxially grown on the semiconductor substrate 1, and then subjected to an etching process to form a mesa structure. Alternatively, the lower part of the collector layer 3 may not be removed, and the mesa structure may be formed on the upper parts of the base layer 4 and collector layer 3.

[0024] The collector electrode (not shown in the figure) is placed on the subcollector layer 2 in contact with it. The collector electrode is positioned adjacent to the mesa structure (base layer 4 and collector layer 3) in the X-axis direction Dx. The collector electrode has a multilayer film in which, for example, an AuGe (gold germanium) film, a Ni (nickel) film, and an Au (gold) film are stacked in that order. The thickness of the AuGe film is, for example, 60 nm. The thickness of the Ni film is, for example, 10 nm. The thickness of the Au film is, for example, 200 nm.

[0025] The base electrode (not shown in the diagram) is in contact with the base layer 4 and is provided on top of the base layer 4. The base electrode is a multilayer film in which Ti film, Pt film, and Au film are stacked in that order. The thickness of the Ti film is, for example, 50 nm. The thickness of the Pt film is, for example, 50 nm. The thickness of the Au film is, for example, 200 nm.

[0026] The emitter electrode 6 is in contact with the emitter layer 5 and is provided on top of the emitter layer 5. The emitter electrode 6 is, for example, a Ti (titanium) film. The thickness of the Ti film is, for example, 50 nm.

[0027] Furthermore, an isolation region 2b is provided on the semiconductor substrate 1 adjacent to the subcollector layer 2. The isolation region 2b is insulated by ion implantation technology. The isolation region 2b insulates the elements (between multiple transistors BT).

[0028] The first insulating film 9 is provided on the subcollector layer 2 and isolation region 2b, covering multiple transistors BT except for a portion of the emitter electrode 6. The first insulating film 9 is, for example, a SiN (silicon nitride) layer. The first insulating film 9 may be a single layer, or it may be a stack of multiple nitride or oxide layers. A metal emitter wiring 12 is stacked on the first insulating film 9. The emitter wiring 12 is provided between the multiple transistors BT. When viewed in a plan view perpendicular to the semiconductor substrate 1, a first insulating film opening 10 is provided in the region of the first insulating film 9 that overlaps with the emitter electrode 6, and the bump 21 is electrically connected to the emitter electrode 6 at the first insulating film opening 10.

[0029] An inorganic insulating film 14 (passivation film) is provided to cover a portion of the emitter wiring 12, and a first organic insulating film 16 is provided on top of the inorganic insulating film 14. The inorganic insulating film 14 is an inorganic protective film made of an inorganic material containing at least one of SiN or SiON (silicon oxynitride). The inorganic insulating film 14 may be omitted if necessary.

[0030] The first organic insulating film 16 is an organic protective film made of an organic material such as polyimide or BCB. The inorganic insulating film 14 and the first organic insulating film 16 are provided with openings 15 and 17, respectively, in regions that overlap with the multiple transistors BT and emitter electrodes 6.

[0031] The bump 21 is formed in the region overlapping with the opening 15 of the inorganic insulating film 14 and the opening 17 of the first organic insulating film 16, and is electrically connected to the emitter electrodes 6 of multiple transistors BT via the openings 15 and 17. The bump 21 is a pillar bump, and for example, copper (Cu) is used. In addition to Cu, low-resistance metal materials such as aluminum (Al) or gold (Au) can be used for the bump 21.

[0032] Although not shown in Figure 2, a metal film such as a diffusion barrier layer or a plating seed layer may be provided between the bump 21 and the emitter wiring 12. For example, materials such as nickel (Ni), titanium (Ti), tungsten (W), and chromium (Cr) can be used as the diffusion barrier layer or seed layer.

[0033] The width R1 of the bump 21 in the X-axis direction Dx is smaller than the width R2 of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx. The outer circumferential surface of the bump 21 faces the inner circumferential surface of the opening 17 of the first organic insulating film 16 at a distance from it. The bump 21 is formed with a constant width R1 extending from inside the opening 17 of the first organic insulating film 16 to above the first organic insulating film 16. Also, the width R1 of the bump 21 in the X-axis direction Dx is equal to the width of the opening 15 of the inorganic insulating film 14 in the X-axis direction Dx. The outer circumferential surface of the bump 21 contacts the inner circumferential surface of the opening 15 of the inorganic insulating film 14 at its lower end. That is, the inorganic insulating film 14 covers the surface of the emitter wiring 12 between the bump 21 and the first organic insulating film 16.

[0034] Furthermore, if the width R1 of the bump 21 in the X-axis direction Dx has some variation above the first organic insulating film 16, the width R1 may be any width among the varied widths. Also, the width of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx refers to the distance in the X-axis direction Dx between the opposing inner surfaces of the first organic insulating film 16 that form the opening 17. In addition, the gap between the outer surface of the bump 21 and the inner surface of the opening 17 of the first organic insulating film 16 may be filled with, for example, an inorganic insulating film or a metal film.

[0035] Furthermore, as shown in Figure 1, the width of the bump 21 in the Y-axis direction Dy is smaller than the width of the opening 17 of the first organic insulating film 16 in the Y-axis direction Dy. In the Y-axis direction Dy, the outer surface of the bump 21 faces the inner surface of the opening 17 of the first organic insulating film 16 at a distance from it.

[0036] As described above, the semiconductor device 100 of this embodiment includes a semiconductor substrate 1, at least one transistor BT provided on the semiconductor substrate 1 and including a plurality of semiconductor layers, an electrode (e.g., an emitter electrode 6) provided on the transistor BT, a first organic insulating film 16 having an opening 17 in a region overlapping with the transistor BT and the electrode, and a bump 21 superimposed on at least one transistor BT and electrically connected to the electrode via the opening 17 of the first organic insulating film 16. The width R1 of the bump 21 in the X-axis direction Dx parallel to the semiconductor substrate 1 is smaller than the width R2 of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx.

[0037] As a result, the semiconductor device 100 has bumps 21 that cover the entire area of ​​the mesa structure of the multiple transistors BT, thereby improving heat dissipation. Furthermore, thermal stress generated when the semiconductor device 100 is mounted on an external substrate such as a printed circuit board is applied from the bumps 21 to the mesa structure of the multiple transistors BT. In this embodiment, the width R1 of the bumps 21 is formed to be smaller than the width R2 of the opening 17 of the first organic insulating film 16. Therefore, compared to the case where the width R1 of the bumps 21 is formed to be larger than the width R2 of the opening 17 of the first organic insulating film 16, and a part of the bumps 21 is also provided on the first organic insulating film 16, this embodiment can suppress the thermal stress applied from the bumps 21 to the mesa structure of the transistors BT.

[0038] More specifically, since the bumps 21 are not provided in the region overlapping with the inner surface of the opening 17 of the first organic insulating film 16, the concentration of thermal stress from the bumps 21 near the opening 17 of the first organic insulating film 16 can be suppressed compared to the case where a part of the bumps 21 is also provided on the first organic insulating film 16. As a result, the concentration of thermal stress in a part of the mesa structure of the transistor BT can be suppressed, and the occurrence of cracks in the mesa structure of the transistor BT can be suppressed.

[0039] Note that the transistors BT and bumps 21 shown in Figures 1 and 2 are only schematic representations, and their shapes can be modified as appropriate. For example, bump 21 is shown with a rectangular cross-section, but it may have other shapes, such as a curved top surface.

[0040] (Second Embodiment) Figure 3 is a cross-sectional view of a semiconductor device according to the second embodiment. As shown in Figure 3, the second embodiment differs from the first embodiment in that the width R3 of the opening 15 of the inorganic insulating film 14 in the X-axis direction Dx is smaller than the width R1 of the bump 21. The configuration of the transistor group Q1 (multiple transistors BT) is the same as in the first embodiment, so a repeated explanation will be omitted.

[0041] As shown in Figure 3, in the semiconductor device 100A according to the second embodiment, the bump 21 is provided overlapping the peripheral edge of the opening 15 of the inorganic insulating film 14. As a result, the inorganic insulating film 14 covers the entire surface of the emitter wiring 12 between the bump 21 and the first organic insulating film 16. Therefore, the semiconductor device 100A can suppress the intrusion of moisture from the bump 21 side and has excellent moisture resistance.

[0042] Furthermore, as described above, the inorganic insulating film 14 is formed from an inorganic material and has a larger Young's modulus than the first organic insulating film 16. In other words, the inorganic insulating film 14 can easily transmit stress from the bump 21 to the transistor BT side, so even if the width R3 of the opening 15 of the inorganic insulating film 14 is made small, it is possible to suppress the occurrence of stress concentration.

[0043] (Third embodiment) Figure 4 is a cross-sectional view of a semiconductor device according to the third embodiment. As shown in Figure 4, the third embodiment differs from the first and second embodiments described above in that the width R1 of the bump 21 in the X-axis direction Dx is equal to the width R2 of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx.

[0044] As shown in Figure 4, in the semiconductor device 100B according to the third embodiment, the outer circumferential surface of the bump 21 is in contact with the inner circumferential surface of the opening 17 of the first organic insulating film 16. The bump 21 has a constant width R1 extending from inside the opening 17 of the first organic insulating film 16 to above the first organic insulating film 16. The opening 15 of the inorganic insulating film 14 is formed with a width equal to the width R2 of the opening 17 of the first organic insulating film 16. However, it is not limited to this, and, similar to the second embodiment, the opening 15 of the inorganic insulating film 14 may be formed smaller than the width R2 of the opening 17 of the first organic insulating film 16.

[0045] In this embodiment as well, the bump 21 is located in a region outside the opening 17 of the first organic insulating film 16 and is not provided on the first organic insulating film 16. Therefore, compared to the case where the width R1 of the bump 21 is formed to be larger than the width R2 of the opening 17 of the first organic insulating film 16, the thermal stress applied to the mesa structure of the transistor BT can be suppressed.

[0046] (Fourth Embodiment) Figure 5 is a cross-sectional view of a semiconductor device according to the fourth embodiment. As shown in Figure 5, the fourth embodiment differs from the first to third embodiments in that the bump 21 has a configuration in which a first portion 21a and a second portion 21b having different widths.

[0047] As shown in Figure 5, in the semiconductor device 100C according to the fourth embodiment, the bump 21 is stacked on top of a plurality of transistors BT in the order of second portion 21b and first portion 21a. The width R1 of the first portion 21a in the X-axis direction Dx is smaller than the width R2 of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx. If the width R1 of the first portion 21a in the X-axis direction Dx has some variation above the first organic insulating film 16, the width R1 may be any width among the varied widths.

[0048] The second portion 21b is provided between the first portion 21a and the transistor BT in the Z-axis direction Dz, and is located inside the opening 17 of the first organic insulating film 16. The second portion 21b fills the opening 17 of the first organic insulating film 16, and the outer surface of the second portion 21b is in contact with the inner surface of the opening 17 of the first organic insulating film 16. That is, the width of the second portion 21b is greater than the width of the first portion 21a, and equal to the width R2 of the opening 17 of the first organic insulating film 16.

[0049] Figure 6 is an explanatory diagram illustrating the manufacturing process of a semiconductor device according to the fourth embodiment. As shown in Figure 6, a plurality of transistors BT and each insulating film are provided on a semiconductor substrate 1, and a power supply film 11 is formed covering the plurality of transistors BT and each insulating film (step ST1). The power supply film 11 is provided covering the first organic insulating film 16 and the opening 17, and contacts the emitter electrodes 6 of the plurality of transistors BT at the bottom of the opening 17. A metal material with good conductivity is used for the power supply film 11. Note that the power supply film 11 is not shown in Figures 2 to 5 described above.

[0050] Next, the power supply film 11 on the upper part of the first organic insulating film 16 is removed (step ST2). The power supply film 11 provided at the bottom of the opening 17 remains without being removed. The power supply film 11 is removed from a predetermined portion on the upper part of the first organic insulating film 16 by, for example, etching.

[0051] Next, the second portion 21b of the bump 21 is formed inside the opening 17 of the first organic insulating film 16 (step ST3). The second portion 21b of the bump 21 is formed, for example, by plating.

[0052] Next, a resist 200 is applied onto the first organic insulating film 16 and the second portion 21b, and an opening 201 is formed by photolithography in a region of the resist 200 that overlaps with a part of the second portion 21b. The first portion 21a of the bump 21 is formed inside the opening 201 of the resist 200 (step ST4). The first portion 21a of the bump 21 is formed, for example, by plating.

[0053] Subsequently, the resist 200 is removed to form a bump 21 having a first portion 21a and a second portion 21b (step ST5). Thus, the manufacturing method of the semiconductor device 100C according to the fourth embodiment can form a bump 21 having a first portion 21a and a second portion 21b by performing the process in two separate plating steps.

[0054] (Fifth embodiment) Figure 7 is a cross-sectional view of a semiconductor device according to the fifth embodiment. As shown in Figure 7, the fifth embodiment differs from the first to fourth embodiments in that it has a redistribution layer 18.

[0055] As shown in Figure 7, in the semiconductor device 100D according to the fifth embodiment, the redistribution layer 18 is provided on the first organic insulating film 16 and is electrically connected to a plurality of transistors BT via an opening 17.

[0056] The second organic insulating film 19 is provided on top of the first organic insulating film 16, covering the redistribution layer 18. An opening 20 is provided in the region of the second organic insulating film 19 that overlaps with the redistribution layer 18. The bump 21 is provided in the region that overlaps with the opening 20 and is electrically connected to the redistribution layer 18 via the opening 20. Note that the first organic insulating film 16 and the second organic insulating film 19 may be formed from the same material. That is, the first organic insulating film 16 and the second organic insulating film 19 may be formed integrally, and there may be no clear interface between them.

[0057] The width R1 of the bump 21 in the X-axis direction Dx is equal to the width of the opening 20 of the second organic insulating film 19 in the X-axis direction Dx. Also, the width R1 of the bump 21 in the X-axis direction Dx is smaller than the width R2 of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx. In other words, the width of the opening 20 of the second organic insulating film 19 is smaller than the width R2 of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx.

[0058] Thus, the semiconductor device 100D according to the fifth embodiment has a redistribution layer 18 superimposed on at least one transistor BT, and includes a first organic insulating film 16 and a second organic insulating film 19 stacked in this order from the side closest to the transistor BT. The redistribution layer 18 is provided between the first organic insulating film 16 and the second organic insulating film 19 and is electrically connected to the emitter electrode 6 of the transistor BT through an opening 17 (first opening) provided in the first organic insulating film 16. The bump 21 is electrically connected to the redistribution layer 18 through an opening 20 (second opening) provided in the second organic insulating film 19. The width R1 of the bump 21 in the X-axis direction Dx is smaller than the width R2 of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx.

[0059] Thus, even with a configuration having a redistribution layer 18, by making the width R1 of the bump 21 smaller than the width R2 of the opening 17 of the first organic insulating film 16 provided on the side closer to the transistor BT, the thermal stress applied from the bump 21 to the mesa structure of the transistor BT can be suppressed, similar to the embodiments described above.

[0060] (modified version) Figure 8 is a cross-sectional view of a semiconductor device according to a modified example of the fifth embodiment. In the semiconductor device 100D according to the fifth embodiment shown in Figure 7, the width R1 of the bump 21 is not limited to being equal to the width of the opening 20 of the second organic insulating film 19. As shown in Figure 8, in the semiconductor device 100E according to a modified example of the fifth embodiment, the width R1 of the bump 21 may be greater than the width of the opening 20 of the second organic insulating film 19 and smaller than the width R2 of the opening 17 of the first organic insulating film 16.

[0061] Figure 9 is an explanatory diagram illustrating the manufacturing process of a semiconductor device according to the fifth embodiment. As shown in Figure 9, a power supply film 11 is formed covering a plurality of transistors BT and each insulating film (step ST11). The power supply film 11 is provided covering the first organic insulating film 16 and the opening 17, and contacts the emitter electrodes 6 of the plurality of transistors BT at the bottom of the opening 17. The power supply film 11 is patterned by etching or the like. Specifically, the power supply film 11 is provided by removing the outer edge side on the first organic insulating film 16 and covering a part of the upper surface of the first organic insulating film 16 near the opening 17.

[0062] Next, a redistribution layer 18 is formed on the power supply film 11, covering the opening 17 of the first organic insulating film 16 (step ST12). The redistribution layer 18 is formed, for example, by plating.

[0063] Next, a second organic insulating film 19 is formed covering the redistribution layer 18 and the first organic insulating film 16, and an opening 20 is formed in the region of the second organic insulating film 19 that overlaps with a part of the redistribution layer 18 (step ST13). The width of the opening 20 in the second organic insulating film 19 is formed to be smaller than the width of the opening 17 in the first organic insulating film 16.

[0064] Next, a resist 200 is applied onto the second organic insulating film 19 and the redistribution layer 18, and an opening 201 is formed in the resist 200 in the region overlapping with the opening 20 of the second organic insulating film 19 by photolithography. A bump 21 is formed inside the opening 201 of the resist 200 (step ST14). The bump 21 is formed, for example, by plating. Here, the width of the opening 201 of the resist 200 is formed to be equal to the width of the opening 20 of the second organic insulating film 19. As a result, the width R1 of the bump 21 is also formed to be equal to the width of the opening 20 of the second organic insulating film 19.

[0065] Subsequently, the bump 21 is formed by removing the resist 200 (step ST15). In this way, the manufacturing method of the semiconductor device 100D according to the fifth embodiment can form the redistribution layer 18 and the bump 21.

[0066] Note that the manufacturing process shown in Figure 9 is merely an example and can be modified as appropriate. For example, in step ST14, the width of the opening 201 of the resist 200 may be formed to be greater than the width of the opening 20 of the second organic insulating film 19 and smaller than the width R2 of the opening 17 of the first organic insulating film 16. In this case, the width R1 of the bump 21 will be greater than the width of the opening 20 of the second organic insulating film 19 and smaller than the width R2 of the opening 17 of the first organic insulating film 16.

[0067] (Sixth Embodiment) Figure 10 is a cross-sectional view of the semiconductor device according to the sixth embodiment. As shown in Figure 10, the semiconductor device 100F according to the sixth embodiment differs from the semiconductor device 100C of the fourth embodiment (see Figure 5) in that the width R1b of the second portion 21b of the bump 21 is smaller than the width R2 of the opening 17 of the first organic insulating film 16. Alternatively, the semiconductor device 100F according to the sixth embodiment can be said to be a configuration in which the bump 21 of the fourth embodiment is combined with the semiconductor device 100 according to the first embodiment.

[0068] As shown in Figure 10, in the semiconductor device 100F according to the sixth embodiment, the bump 21 has a first portion 21a and a second portion 21b having different widths. The bump 21 is stacked on a plurality of transistors BT in the order of second portion 21b, then first portion 21a. The width R1a of the first portion 21a in the X-axis direction Dx is smaller than the width R1b of the second portion 21b. Also, the width R1a of the first portion 21a in the X-axis direction Dx is smaller than the width R2 of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx.

[0069] The second portion 21b is provided between the first portion 21a and the transistor BT in the Z-axis direction Dz, and is located inside the opening 17 of the first organic insulating film 16. The outer circumferential surface of the second portion 21b is provided opposite the inner circumferential surface of the opening 17 of the first organic insulating film 16 with a gap between them. That is, the width R1b of the second portion 21b is greater than the width of the first portion 21a, and smaller than the width R2 of the opening 17 of the first organic insulating film 16.

[0070] (Seventh Embodiment) Figure 11 is a cross-sectional view of the semiconductor device according to the seventh embodiment. As shown in Figure 11, the semiconductor device 100G according to the seventh embodiment differs from the semiconductor device 100 according to the first embodiment in that it has an underbump metal 22 (UBM).

[0071] The underbump metal 22 is provided below the bump 21. More specifically, the underbump metal 22 is provided between the bump 21 and the emitter wiring 12 in a direction perpendicular to the semiconductor substrate 1. When the width R1 of the bump 21 in the X-axis direction Dx is smaller than the width of the opening 17 of the first organic insulating film 16 in the X-axis direction Dx, the width of the underbump metal 22 in the X-axis direction Dx is also smaller than the width R2 of the opening 17 of the first organic insulating film 16.

[0072] The underbump metal 22 is formed from a material containing at least one of Ti, Cr, Cu, Au, Ni, and Pd, for example. Other adhesion layers may be provided between the underbump metal 22 and the emitter wiring 12. For example, when the semiconductor device 100G of this embodiment is mounted on an external substrate via the bump 21, the bump 21 may be crushed by the pressure during mounting, and its width R1 may become wider than the width R2 of the opening 17 of the first organic insulating film 16. Even in such a case, if the width of the underbump metal 22 is narrower than the width R2 of the opening 17 of the first organic insulating film 16, it is equivalent to the width R1 of the bump 21 in the semiconductor device 100G before mounting being narrower than the width R2 of the opening 17 of the first organic insulating film 16, and as described above, the thermal stress applied from the bump 21 to the mesa structure of the transistor BT can be reduced.

[0073] Note that the semiconductor device 100G shown in Figure 11 is configured by combining the semiconductor device 100 according to the first embodiment with an underbump metal 22, but is not limited to this. The underbump metal 22 can be combined with each of the semiconductor devices 100A, 100B, 100C, 100D, 100E, and 100F shown in the second to sixth embodiments.

[0074] Furthermore, although the above embodiments have described semiconductor devices in which one bump 21 is superimposed on multiple transistors BT, the invention is not limited to this. A semiconductor device in which one bump is formed superimposed on one transistor is also acceptable. In addition, although pillar bumps have been described as an example of bumps, other types of bumps such as solder bumps or stud bumps may also be used.

[0075] Furthermore, the materials, thicknesses, dimensions, etc., of each component shown in the embodiments described above are merely examples and may be changed as appropriate. The materials and thicknesses of the subcollector layer 2, collector layer 3, base layer 4, emitter layer 5, and various wirings may also be changed as appropriate.

[0076] The embodiments described above are provided to facilitate understanding of the present invention and are not intended to limit its interpretation. The present invention may be modified or improved without departing from its spirit, and equivalents thereof are also included. [Explanation of Symbols]

[0077] 1. Semiconductor substrate 2 Subcollector Layer 3. Collector layer 4. Base layer 5. Emitter layer 12 Emitter Wiring 14 Inorganic insulating film 15, 17, 20 aperture 16. First Organic Insulating Film 18 Redistribution layer 19. Second Organic Insulating Film 21 Bump 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G Semiconductor equipment R1, R2, R3, R1a, R1b width BT Transistor

Claims

1. Semiconductor substrate and The semiconductor substrate is provided with at least one transistor including a plurality of semiconductor layers, The electrodes provided on the transistor, An organic insulating film having an opening in a region overlapping with the transistor and the electrode when viewed in a plan view in a first direction perpendicular to the semiconductor substrate, In a plan view in the first direction, it has a bump superimposed on at least one of the transistors and electrically connected to the electrode through an opening in the organic insulating film, The aforementioned bump includes underbump metal, The underbump metal is positioned at the opening of the organic insulating film. The width of the underbump metal in the second direction parallel to the semiconductor substrate is smaller than the width of the opening of the organic insulating film in the second direction. Semiconductor equipment.

2. A semiconductor device according to claim 1, The transistors are arranged in the second direction, The bump and the opening in the organic insulating film are provided across a plurality of transistors. Semiconductor equipment.

3. A semiconductor device according to claim 1 or claim 2, The semiconductor substrate and the organic insulating film are provided with an inorganic insulating film, The inorganic insulating film is provided with openings in a region that overlaps with the openings and bumps of the organic insulating film when viewed in plan in the first direction. The bump is provided so as to overlap with the peripheral edge of the opening in the inorganic insulating film. Semiconductor equipment.

4. A semiconductor device according to claim 1 or claim 2, The aforementioned bump is, Part 1 and, The organic insulating film includes a second portion provided inside the opening and between the first portion and the transistor in the first direction, The width of the first portion of the bump is smaller than the width of the second portion. Semiconductor equipment.

5. A semiconductor device according to claim 1 or claim 2, The redistribution layer has a layer superimposed on at least one of the transistors when viewed in plan in the first direction, The organic insulating film includes a first organic insulating film and a second organic insulating film, which are stacked in this order from the side closest to the transistor. The redistribution layer is provided between the first organic insulating film and the second organic insulating film, and is electrically connected to the electrode through a first opening provided in the first organic insulating film. The bump is electrically connected to the redistribution layer through a second opening provided in the second organic insulating film. The width of the underbump metal in the second direction is smaller than the width of the first opening of the first organic insulating film in the second direction. Semiconductor equipment.

6. A semiconductor device according to claim 5, The width of the first opening of the first organic insulating film in the second direction is greater than the width of the second opening of the second organic insulating film in the second direction. Semiconductor equipment.

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